WO2008008741A2 - Poste de chargement de pont et procédé - Google Patents

Poste de chargement de pont et procédé Download PDF

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Publication number
WO2008008741A2
WO2008008741A2 PCT/US2007/073091 US2007073091W WO2008008741A2 WO 2008008741 A2 WO2008008741 A2 WO 2008008741A2 US 2007073091 W US2007073091 W US 2007073091W WO 2008008741 A2 WO2008008741 A2 WO 2008008741A2
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WO
WIPO (PCT)
Prior art keywords
pod
port
port door
door
plate
Prior art date
Application number
PCT/US2007/073091
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English (en)
Other versions
WO2008008741A3 (fr
Inventor
Theodore W. Rogers
Roumen I. Deyanov
Original Assignee
Asyst Technologies, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asyst Technologies, Inc. filed Critical Asyst Technologies, Inc.
Priority claimed from US11/774,928 external-priority patent/US20080008570A1/en
Publication of WO2008008741A2 publication Critical patent/WO2008008741A2/fr
Publication of WO2008008741A3 publication Critical patent/WO2008008741A3/fr

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover

Definitions

  • Pods are used to convey substrates from one tool to another.
  • An exemplary type of pod is referred to as a front-opening unified pod (FOUP).
  • FOUP front-opening unified pod
  • Each pod is capable of transporting a number of substrates of a specific size. For example, for wafers having a diameter of 300 mm, a conventional FOUP has a capacity of 25 wafers, and can therefore carry 25 or fewer 300 mm wafers at a time.
  • the pods are designed to maintain a protected internal environment to keep the wafers free of contamination, e.g., by particulates in the air outside the pod.
  • a lot size is the number of substrates being processed as a group.
  • a pod having a maximum capacity of 25 substrates is appropriate for a lot size of 25, since each 25-substrate lot can be kept together during processing and conveyed from one tool to another in a single pod.
  • some fabricators are moving to reduce their lot size for a variety of reasons. Storing a 10-substrate lot in a pod designed for 25 substrates can be space-inefficient, resulting in a greatly reduced storage density. In a fabrication facility where floor space can be precious, it may be desirable to increase the storage density by storing the substrate lots in smaller size pods, each having a smaller maximum capacity e.g., 8 or 10 substrates each.
  • each pod is designed specifically to interface with a particular load port in each tool and each load port is correspondingly designed to fit a standard 25-substrate pod. Therefore, simply resizing the pod would result in an incompatibility between the pod and the load port. A redesign of the load port is possible so that the load port can then accommodate the smaller-capacity pod, however, this is an expensive proposition which may not provide compatibility with future lot size changes.
  • FIGS 1 and 2 show a conventional load port 10 configured to interface with a standard 300 mm, 25-wafer pod 70 (shown in Figure 2).
  • Load port 10 includes a tool interface 20.
  • tool interface 20 is in conformance with the standard for Box Opener/Loader-to-Tool Standard Interface (BOLTS), commonly referred to as a BOLTS interface or a BOLTS plate.
  • BOLTS Box Opener/Loader-to-Tool Standard Interface
  • Tool interface 20 includes an aperture 22 surrounded by a recessed shoulder 24.
  • Aperture 22 is occluded by a port door 30.
  • Port door 30 forms a proximity seal with aperture 22 to prevent contaminates from migrating to the interior of process tool 40.
  • a proximity seal takes advantage of a positive interior pressure that is maintained by process tool 40, and provides a small amount of clearance, e.g., about 1 mm, between the parts forming the proximity seal, allowing air to escape process tool 40 and sweep away any particulates from the sealing surfaces.
  • Load port 10 also includes an advance plate assembly 50 having an advance plate 52. Registration pins 54 mate with corresponding slots or recesses in the bottom support 72 of pod 70. Advance plate assembly 50 has an actuator (not shown) that slides advance plate 52 between the retracted position shown and an advanced position that is proximate tool interface 20.
  • Port door 30 is moved from the closed position shown in Figures 1 and 2 to an open position. In the closed position, port door 30 substantially occludes aperture 22 of tool interface 20. Port door 30 is moved from the closed position by mechanism 32 which translates port door 30 to the right (as viewed in Figure 2) and then down to the open position. In the open position, aperture 22 and the interior of pod 70 remains substantially unobstructed by port door 30.
  • the front surface 34 of port door 30 includes a pair of latch keys 60.
  • Latch keys 60 include a post 62 and a crossbar 64, and are configured to rotate on the axis of post 62.
  • Latch keys 60 are inserted into corresponding latch key receptacles (not shown) of the pod door 74 as pod 70 is advanced towards the port door 30 by advance plate assembly 50. Latch keys 60 are rotated on the axis of post 62, interacting with a mechanism (not shown) internal to pod door 74, causing latches to disengage from lip 76 of pod 70.
  • An example of a door latch assembly within a pod door adapted to receive and operate with latch keys is disclosed in U.S. Pat. No. 4,995,430, entitled “Sealable Transportable Container Having Improved Latch Mechanism," which is incorporated herein by reference.
  • Another example is presented in U.S. Patent 6,502,869, issued on January 7, 2003 to Rosenquist et al, also incorporated herein by reference.
  • a conventional load port includes two latch keys 60, each of which pairs are structurally and operationally identical to each other. Once the latches are disengaged, port door 30 may be retracted thereby removing pod door 74 from pod 70.
  • Alignment pins 34 ensure a degree of alignment between port door 30 and pod door 74, so that pod door 74 will be sufficiently aligned with aperture 22 to pass through aperture and be stowed in the interior of process tool 40.
  • these alignment pins may not always be sufficiently precise to ensure alignment between pod door 74 and lip 76 of pod 70 when replacing pod door 74, particularly if any amount of shifting has occurred between pod door 74 and port door 30.
  • a vacuum system (not shown) for retaining pod door 74 against port door 30 and prevent any relative movement between the two.
  • the U.S. Patent 6,502,869 mentioned above describes an alternative mechanism to prevent relative movement between the port door and the pod door. In that system, the latch keys are biased in a rearward direction after engaging the pod door, thereby compressing the pod door between the back of the latch keys and the pod door, the friction between pod door 74 and port door 30 preventing any relative movement.
  • the present invention addresses a desire to make load ports easily reconfigurable to accommodate pods of varying capacities and sizes these needs by providing a bridge loadport as described hereinbelow. It should be appreciated that the present invention can be implemented in numerous ways, including as a process, an apparatus, a system, a device, or a method. Several inventive embodiments of the present invention are described below.
  • a bridge loadport includes a tool interface, an advance plate assembly, a port plate, and a port door.
  • the tool interface extends vertically and is configured to substantially cover one end of a process tool.
  • the advance plate assembly is supported on the front side of the tool interface and is configured to support a front- opening unified pod (pod).
  • the port plate extends vertically, covering an upper portion of the tool interface.
  • An aperture having a size and shape that substantially matches a size and shape of a door of a pod is formed in the port plate.
  • the port door has a port door actuator and a port door face attached to the port door actuator.
  • the port door face is movable with respect to the port door actuator along an axis that is perpendicular to the aperture.
  • the port door actuator includes a latch key extending from a front of the port door actuator through the port door face and from a front of the port door face.
  • a method for loading a pod to a load port of a process tool includes mounting the pod onto an advance plate of an advance plate assembly, the advance plate being in a retracted position.
  • the advance plate is advanced from the retracted position to an advanced position.
  • the pod forms a proximity seal with a port plate of the load port.
  • a latch key is extended from a port door into a latch key receptacle of a door of the pod, which is latched to a lip of the pod.
  • the extending causes a port door face to engage the door of the pod, the port door face being biased by a spring against the door of the pod.
  • the latch key is rotated, causing the door of the pod to disengage from the lip of the pod.
  • the port door is then moved to an open position, the moving causing the door of the pod to be removed from a front opening of the pod and allowing substantially unobstructed access to an interior of the pod.
  • a load port in yet another embodiment, includes a port plate, and a port door.
  • the port plate includes an aperture having a size and shape that substantially matches a size and shape of a door of a pod, the pod having a selected maximum capacity and being capable of holding substrates of a selected diameter.
  • the port door has a port door actuator and a port door face attached to the port door actuator.
  • the port door may be positioned in a closed position in which the port door face substantially occludes the aperture in the port plate and an open position in which the aperture is substantially unobstructed by the port door.
  • the port door actuator includes a latch key extending from a front of the port door actuator through the port door face and from a front of the port door face. The latch key extends from the front side of the tool interface when the port door is in the closed position.
  • a method for operating a load port of a process tool includes selecting a pod size of a pod for transporting substrates to and from a process tool.
  • the pod size has a capacity defined as a maximum number of substrates that the pod can contain at one time, and a substrate dimension, the substrate dimension being a size of each of the substrates that the pod can contain.
  • a port plate is selected from among a plurality of port plates. Each of the plurality of port plates has an aperture corresponding to a differing pod size.
  • the selected port plate has an aperture corresponding to a size of the front opening of the pod of the selected pod size.
  • the selected port plate is attached to a tool interface of a load port.
  • a port door face is selected from among a plurality of port door faces of differing sizes.
  • the selected port door face has a shape corresponding to a front surface of a door of the pod of the selected pod size.
  • the selected port door face is attached to the port door actuator.
  • Figures 1 and 2 are isometric and profile views showing a conventional load port configured to interface with a standard 300 mm, 25-wafer pod.
  • Figure 3 shows an isometric view of an exemplary bridge loadport.
  • Figures 4A and 4B show embodiments of a load port for the bridge loadport of Figure 3.
  • FIGS 5, 6, 7, and 8 show schematic representations of the loadport of Figure 4B in various stages of operation.
  • Figure 9 shows a schematic representation of a control system for the bridge loadport of Figure 3.
  • Figures 1OA, 1OB, 1OC, and 1OD show the bridge loadport of Figure 3 in various configurations.
  • FIG. 3 shows an exemplary bridge loadport 100 having a tool interface 120 having a generally vertically extending plate.
  • tool interface 120 conforms to an industry standard BOLTS interface, and is configured to substantially cover one end of a process tool, such as process tool 40 shown in Figure 1.
  • Bridge loadport 100 also includes an advance plate assembly 150 having an advance plate 152 for mounting a pod as described in further detail below.
  • Advance plate assembly 150 includes an elevator mechanism 156 configured to raise and lower advance plate 152 for purposes that will be made clear below with reference to Figures 10A- 10D.
  • elevator mechanism 156 is implemented using a linear actuator, such as a belt drive, lead screw, or other servo actuator as would occur to those skilled in the art.
  • advance plate assembly 150 includes an internal actuator for moving the advance plate 152 from a retracted position, which is spaced from tool interface 120 to an advanced position, proximate tool interface 120.
  • Bridge loadport 100 also includes a load port 105 having a port plate 140.
  • Port plate 140 defines an aperture 142 that is shown substantially occluded by port door face 132 of port door 130.
  • port plate 140 is attached to a frame (not visible in Figure 3) of bridge loadport 100 using a releasable attaching means such as a plurality of screws or one or more latches.
  • a partial cross section view of loadport 105 is shown in Figure 4A. It can be seen here that port plate 140 is attached to frame 145 by screws 147.
  • port door face 132 is retained to port door actuator 136 by a coupling, hi one embodiment, the coupling simply fixes port door face 132 to port door actuator 136 in the absence of springs 134.
  • the coupling could include a plurality of screws, latches, clips, etc.
  • the coupling allows for relative movement between port door face 132 and port door actuator 136.
  • the coupling could include one or more alignment means which permit relative movement only in the direction perpendicular to the plane of the port door face.
  • Such alignment means may be formed by the axial shafts of the two latch keys 160, in combination with corresponding surfaces in the port door, or additional alignment means (not shown) may be provided such as a linear bearing, alignment pins, etc., to ensure port door face smoothly moves with one degree of freedom along a single axis perpendicular to port door actuator 130, substantially preventing rotational movement or translational movements along other axes.
  • the additional alignment means can also include a catch for retaining port door face 132 to port door 136.
  • the coupling may be cooperative with any of a plurality of port door faces of differing sizes and shapes, depending on the size of pod 70.
  • springs 134 may be implemented in any suitable fashion, and may, for example, be formed integrally with port door face 132 or port door actuator 136.
  • Port door face e.g., may be made from a suitable plastic material, wherein at least the front surface is formed from a material sufficiently stiff to meet flatness standards promulgated for process tool interface port doors by Semiconductor Equipment and Materials International (SEMI).
  • port door face 132 includes an extended rim 138, shaped to improve the air flow and resulting proximity seal between port door face 132 and aperture 142 of port plate 140.
  • Pod 70 includes an interior space 73 enclosed by a pod door 74.
  • Pod door 74 includes, for each latch key 160, a latch key receptacle 80 (only one being visible in Figure 4A) having an internal shoulder 82.
  • pod 70 is mounted to a support 75 capable of moving left and right to advance pod 70 to port plate 140 for loading and to retract pod 70 from port plate 140 for unloading.
  • Figure 4B shows a second embodiment wherein pod 70 is mounted to an advance plate 152, which is moved left and right by advance plate assembly 150, which is shown in more detail in Figure 3.
  • FIGs 5-8 show various stages of operation of load port 105. It should be noted that these operations apply both to the embodiments of Figure 4 A and Figure 4B.
  • the pod support in this case advance plate 152, is moved to the advanced position, thereby bringing front flange 79 of pod 70 to port plate 140.
  • front flange 70 is brought sufficiently close to port plate 140 to form a proximity seal therewith.
  • port door actuator 136 moves forward after pod 70 is moved to the advanced position, the forward movement of port door actuator 136 causing springs 134 to compress and latch keys 160 to be extended into latch key receptacles 80.
  • port door actuator 36 is moved into the forward position prior to or during the advance of pod 70.
  • latch keys 160 are inserted into latch key receptacles 80 and springs 134 are in a compressed state, biasing port door face 132 into engagement with pod door 74.
  • the movement of port door actuator is effectuated by mechanism 135 shown by way of example in Figure 4A.
  • Mechanism 135 is capable of moving port door 130 on a Y and a Z axis, the Y-axis being left and right as viewed in Figure 5, and the Z-axis being up and down.
  • latch key 160 is rotated 90° to unlatch the pod door from the pod.
  • Port door actuator 136 includes an actuator mechanism (not shown) such as a servo or solenoid causing latch key 160 to rotate.
  • Rotation of latch key 160 interacts with an internal mechanism (not shown) in pod door 74.
  • the internal mechanism causes pod door latches to retract from slots (not shown) formed in lip 76 of pod 70, thereby releasing pod door 74 from pod 70.
  • Such a mechanism is described in more detail in U.S. Patents 4,995,430 and 6,502,869, previously incorporated herein by reference.
  • the rotation of latch keys 160 cause the pod door 74 to be coupled to port door 30, due to interference between cross bar 164 (see Figure 4A) and internal shoulder 82 of pod door 74.
  • port door 130 is shown moved a small distance away from aperture 142, allowing springs 13 to decompress slightly, hi the position shown in Figure 7, the back edges of cross bar 164 ( Figures 4A, 4B, 5) of latch key 160 just engage internal shoulders 82 of latch key receptacles 80 formed in pod door 74.
  • springs 134 remain in a compressed state, exerting a force against port door face 132, which in turn is pressed against pod door 74. Resulting friction between port door face 132 and pod door 74 ensures that there is no relative movement between pod door 74 and port door face 132.
  • Port door actuator 136 continues to move in a rearward direction from the position shown in Figure 7, as shown in Figure 8, wherein pod door 74 is removed entirely away from pod 70. From this position, port door 30, along with pod door 74, may move down using an actuator such as actuator 132 shown in Figure 4A. Once port door 30 is moved down, access to substrates 78 in pod 70 becomes substantially unobstructed either by pod door 74 or port door 30.
  • FIG. 9 shows an exemplary control system 190 for controlling the operations of bridge loadport 100, described above with reference to Figures 3-8.
  • Control system 190 includes a control unit 192 which is in communication with an external control system 195.
  • external control system 195 may provide load and unload directives to control unit 192, in response to which control unit 192 operates bridge loadport 100 to load and unload a pod.
  • Advance plate assembly 150 (or other support system such as support 75 shown in Figure 4A) includes an advance actuator 153 for moving the pod 70 between the retracted and advanced positions described previously.
  • Advance plate assembly 150 may include a pod sensor 155 that detects a presence of a pod on the advance plate.
  • pod sensor 155 may be implemented using a microswitch or a proximity sensor to detect when a pod is properly mounted on advance plate 152.
  • Pod sensor 155 may further be adapted to sense the particular type or configuration of pod which has been placed on the loadport, or the loadport control unit 192 may receive a signal from the external control system 195 conveying such information.
  • control unit 192 Upon receiving a "load" directive from external control system 195, control unit 192 detects whether a pod is mounted by way of pod sensor 155, then causes advance plate 152 to move to the advanced position (shown, e.g., in Figure 5) by activating advance actuator 153. Control unit 192 also actuates port door mechanism 132 (shown in Figure 4A) to cause the port door actuator 136 to move forward so that the latch keys 160 extend into latch key receptacles 80 as shown in Figure 5. Control unit 192 then causes port door actuator 136 to rotate the latch keys 160 to disengage pod door 74 from outer lip 76 of pod 70. Control unit 192 then actuates port door mechanism 32 to cause port door 30 to move from the closed position to the open position described above.
  • control unit 192 also operates elevator 156 shown in Figure 3, to raise and lower advance plate assembly 150, for reasons that will be made clear in the discussion below referencing Figures 1OA - 10D.
  • Bridge loadport 100 described above may be easily reconfigured for different size pods by replacing port plate 140 and port door face 132.
  • Figures 1OA - 1OD show exemplary configurations.
  • bridge loadport 100 includes a port plate 140' having an aperture 142' sufficiently tall and wide to accommodate a large capacity pod designed to contain a maximum of 25 450 mm wafers
  • hi Figure 1OB bridge loadport 100 includes a port plate 140" having an aperture 142" sufficiently tall and wide to accommodate a low capacity pod designed to contain a maximum of 10 wafers 450 mm wafers. Since a pod of this capacity has a lower profile, advance plate assembly 150 is lifted from the position shown in Figure 1OA to ensure alignment between the pod door and port door face 132 and between latch keys 160 and the latch key receptacles formed on the pod.
  • Advance plate assembly 150 may be lifted by elevator 156 shown by way of example in Figure 3.
  • elevator 156 is manually operated, e.g., by using a manually operated vertically adjustable support or by manually removing advance plate assembly 150 from a first location on and reattaching advance plate assembly 150 to load port 100 at a different elevation, hi another embodiment, elevator 156 is automatically adjusted in response to signals from control unit 192 ( Figure 9).
  • bridge loadport 100 includes a port plate 140'" having an aperture 142'" sized to correspond with a low capacity pod designed to contain a maximum of 10 wafers each 300 mm in diameter. Since these wafers have a smaller diameter, the pod used to transport them is not as wide, and therefore aperture 142'" is not as wide as the apertures 142' and 142" shown in Figures 1OA and 1OB, respectively.
  • Figure 1OD shows a bridge loadport 100 configured to cooperate with a standard 25 300 mm wafer, pod, substantially as shown in Figure 3, but presented again here for comparison with configurations in Figures 1OA - 1OC.
  • Figures 1OA through 1OD show by way of example, pods and loadports configured for receiving and storing semiconductor wafers, other substrate types, such as magnetic media, LCD panels, etc., can be received and stored using loadports and pods as described above.
  • various mechanisms aside from the spring- biased door face described above with reference to Figures 4-8, may be used to retain a pod door to the port door.
  • the interchangeable port plates and port door faces allows easy reconfiguration of a load port that is initially configured to receive pods of a first size to be subsequently configured to receive pods of a second size, wherein the first and second pod sizes can differ with respect to a lot size difference, a substrate dimension difference, or both.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Power-Operated Mechanisms For Wings (AREA)

Abstract

L'invention concerne un poste de chargement de pont qui comprend une interface d'outil, un ensemble plateau de déplacement, une plaque à orifice, et une porte à orifice. L'interface d'outil s'étend verticalement et est configurée de manière à recouvrir sensiblement une extrémité d'un outil de procédé. L'ensemble plateau de déplacement est soutenu du côté avant de l'interface d'outil et est configuré de manière à soutenir la nacelle unifiée à ouverture frontale (nacelle). La plaque à orifice s'étend verticalement, recouvrant une partie supérieure de l'interface d'outil. Une ouverture de taille et de forme similaires à celles d'une porte de nacelle est formée sur la plaque à orifice. La porte à orifice comporte un actionneur de porte à orifice et une face de porte à orifice fixée sur l'actionneur de porte à orifice. Dans un mode de réalisation la face de la porte à orifice peut se déplacer par rapport à l'actionneur de porte à orifice le long d'une ligne perpendiculaire à l'ouverture.
PCT/US2007/073091 2006-07-10 2007-07-09 Poste de chargement de pont et procédé WO2008008741A2 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US81960306P 2006-07-10 2006-07-10
US60/819,603 2006-07-10
US11/774,928 2007-07-09
US11/774,928 US20080008570A1 (en) 2006-07-10 2007-07-09 Bridge loadport and method

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Publication Number Publication Date
WO2008008741A2 true WO2008008741A2 (fr) 2008-01-17
WO2008008741A3 WO2008008741A3 (fr) 2008-03-06

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014038977A (ja) * 2012-08-20 2014-02-27 Tdk Corp ロードポート装置
JP2014049453A (ja) * 2012-08-29 2014-03-17 Tdk Corp ロードポート装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6382896B1 (en) * 2000-09-08 2002-05-07 Industrial Technology Research Institute Front-opening unified pod closing/opening control structure
US20030012625A1 (en) * 2001-07-13 2003-01-16 Rosenquist Frederick T. Smif load port interface including smart port door
US20040262548A1 (en) * 2001-09-17 2004-12-30 Shoji Komatsu Wafer mapping device and load port with the device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6382896B1 (en) * 2000-09-08 2002-05-07 Industrial Technology Research Institute Front-opening unified pod closing/opening control structure
US20030012625A1 (en) * 2001-07-13 2003-01-16 Rosenquist Frederick T. Smif load port interface including smart port door
US20040262548A1 (en) * 2001-09-17 2004-12-30 Shoji Komatsu Wafer mapping device and load port with the device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014038977A (ja) * 2012-08-20 2014-02-27 Tdk Corp ロードポート装置
JP2014049453A (ja) * 2012-08-29 2014-03-17 Tdk Corp ロードポート装置

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