WO2008004851A1 - A hybrid substrate and method of manufacturing the same - Google Patents

A hybrid substrate and method of manufacturing the same Download PDF

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Publication number
WO2008004851A1
WO2008004851A1 PCT/MY2007/000035 MY2007000035W WO2008004851A1 WO 2008004851 A1 WO2008004851 A1 WO 2008004851A1 MY 2007000035 W MY2007000035 W MY 2007000035W WO 2008004851 A1 WO2008004851 A1 WO 2008004851A1
Authority
WO
WIPO (PCT)
Prior art keywords
heat sink
substrate
ceramic
top surface
metallized layer
Prior art date
Application number
PCT/MY2007/000035
Other languages
French (fr)
Inventor
Sheng Teoh Wan
Original Assignee
Globetronics Industries Sdn Bhd (17765-H)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Globetronics Industries Sdn Bhd (17765-H) filed Critical Globetronics Industries Sdn Bhd (17765-H)
Publication of WO2008004851A1 publication Critical patent/WO2008004851A1/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
    • H01L23/3735—Laminates or multilayers, e.g. direct bond copper ceramic substrates
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0058—Laminating printed circuit boards onto other substrates, e.g. metallic substrates
    • H05K3/0061—Laminating printed circuit boards onto other substrates, e.g. metallic substrates onto a metallic substrate, e.g. a heat sink
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/03—Use of materials for the substrate
    • H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/38—Improvement of the adhesion between the insulating substrate and the metal

Definitions

  • the present invention relates to a hybrid substrate used in semiconductor industry and method of manufacturing the same.
  • Substrate is used as a key direct material in Semiconductor industry and can be made from various materials such as laminated Printed Circuit Board (PCB), Low Temperature co-fire ceramic or in a hybrid design.
  • PCB Printed Circuit Board
  • Low Temperature co-fire ceramic Low Temperature co-fire ceramic
  • the current market situation provides a low-cost low-reliability substrate or a high-cost reliable substrate.
  • the availability of a low-cost high reliability substrate has been the market requirement for a long time.
  • Japanese Patent JP09315876A2 discloses one such attempt wherein an aluminum-ceramic composite substrate is provided.
  • EP0390598A3 discloses another such attempt wherein an aluminum nitride having a high thermal conductivity on which a metallized layer is formed with a high bonding strength.
  • the problem to be solved is to provide a substrate having high thermal conductivity, low thermal resistance, low cost, direct IC assembly capable, ease of fabrication, optional of AuSn reflow capable and pre-heat sink in a single design/ substrate and to provide a method of manufacturing of such substrate.
  • the problem is solved by providing a hybrid substrate comprising a heat sink base, a ceramic top and a non epoxy base Metal Base Adhesive sandwiched between the heat sink base made of a metal with thermal conductivity above
  • a substrate comprising a heat sink as base, wherein the heat sink is made of a metal with thermal conductivity above 12OWVmK and top surface of the heat sink is treated by electro/ electroless deposition /PVD of a metal based material to promote adhesion of top surface with a Metal Base Adhesive; a Metal Base Adhesive disposed on the treated top surface of said heat sink to adhere with the heat sink; and a ceramic, wherein at lower surface of said ceramic, a first metallized layer of metal based electrical and thermal conductive material is disposed by thickfilm/ thinfilm or electro/ electroless deposition; whereby said substrate is formed by sandwiching the Metal Base Adhesive between the treated top surface of the heat sink and the first metallized layer disposed on the lower surface of the ceramic
  • a second metallized layer of metal based electrical and thermal conductive material if further disposed on top surface of the ceramic by thtckfilm/ thinfilm or electro/ electroless deposition; and a circuit protector on top of second metallized layer is provided.
  • the heat sink is made of Aluminum.
  • the heat sink is made of Copper.
  • the metal based material for electro/ electroless deposition /PVD is selected from a group of Copper, Nickel, Silver, Gold-Platinum, Silver-Platinum and Gold.
  • the Metal Base Adhesive is an inorganic adhesive.
  • the ceramic is made of material selected from a group of Alumina Oxide, Aluminum Nitride, beryllium oxide and Low Temperature co-fire ceramic.
  • the material of first metallized layer is selected from a group of Silver, AgPt, AgPd, AuSn, AuPt, Copper, Nickel and Gold.
  • the material of second metallized layer is selected from a group of Silver, AgPt 1 AgPd, AuSn, AuPt 1 Copper, Nickel and Gold.
  • the circuit protector is made of glass or any dielectric material.
  • the heat sink is made of Aluminum; the top surface of the heat sink is treated by electro/ electroless deposition /PVD of nickel, copper, silver, AgPt, AuPt, AuSn or gold. . -.
  • a method of manufacturing a substrate comprises the steps of: providing a heat sink made of a metal with thermal conductivity above 12OVWmK as base; treating top surface of the heat sink by electro/ electroless deposition / PVD of a metal based material to promote adhesion of top surface with a Metal Base Adhesive; disposing a Metal Base Adhesive on the treated top surface of said heat sink to adhere with the heat sink; providing a ceramic; disposing a first metallized layer of metal based electrical and thermal conductive material at lower surface of said ceramic by thickfilm/ thinfilm or electro/ electroless deposition 7. PVD; and sandwiching the Metal Base Adhesive between the treated top surface of the heat sink and the first metallized layer disposed on the lower surface of the ceramic to form a substrate.
  • the method also comprises the steps of: disposing a second metallized layer of metal based electrical and thermal conductive material on top surface of the ceramic by thickfilm/ thinfilm or electro/ electroless deposition /PVD; and providing a circuit protector on top of second metallized layer.
  • Figure 1 shows top view of a substrate according to an embodiment of the present invention.
  • Figure 2 shows front view of a substrate according to an embodiment of the present invention.
  • Figure 3 shows right side view of a substrate according to an embodiment of the present invention. .
  • Figure 4 shows perspective view of a substrate according to an embodiment of the present invention.
  • a substrate (10) of any size is provided according to an embodiment of the present invention.
  • a heat sink (12) is provided at the base of substrate (10).
  • the heat sink may be made of any metal such as Aluminum or Copper or other metal with high thermal conductivity above 120W/mK.
  • the top surface of heat sink is treated by electro/ electroless deposition /PVD of a metal based material to promote adhesion of top surface with a Metal Base Adhesive and to conduct heat.
  • the top surface may be treated with a material based on metal such as Copper, Nickel, Silver , AgPt, AuPt of Gold to form a treated top surface (14).
  • a Metal Base Adhesive (16) is provided on top of the treated top surface (14) to stick to the heat sink (12) as well as to conduct heat from circuit protector (24), second metallized layer (22), Ceramic (20) and first metallized5 layer (18) to heat sink (12).
  • the Metal Base Adhesive (16) also acts as a shock absorber for mechanical and thermal impact.
  • An inorganic adhesive or metal adhesive such as metal filled or solder may be used as Metal Base Adhesive
  • a first metallized layer (18) is provided on lower surface of the ceramic (20).
  • the layer (18) comprises a metal based electrical and thermal conductive material deposited by thickfilm/ thinfilm or electro/ electroless deposition /PVD methodology and promotes adhesion between the ceramic (20) and the metal base adhesive (16) and the treated top surface (14)5 of the heat sink (12).
  • the material of first metallized layer (18) may be selected from a group of Silver, AgPt 1 AgPd, AuPt, AuSn, Copper, Nickel and Gold.
  • the ceramic (20) may be made of material selected from a group of Alumina Oxide, Aluminum Nitride, beryllium oxide and Low Temperature co-fire ceramic.
  • the ceramic (20) provides as a thermal substrate to enable circuit building on top of 0 it. It also acts as a thermal conductor and provides a dielectric layer.
  • a second metallized layer (22) is provided on top of the ceramic (20)/
  • the layer (22) comprises a metal based electrical and thermal conductive material deposited by thickfilm/ thinfilm or electro/ electroless
  • the material of second metallized layer (18) may be selected from a group of Silver, AgPt, AgPd, AuSn, Copper, Nickel and Gold.
  • the layer (22) acts as an electrical layer, which is also thermal conductive.
  • a Circuit Protector (24) is provided on top of the second metallized layer to protect the circuit from short circuit in case of any conductive object failing on top of it. It also protects the circuit from mechanical damage and corrosion. It further enables more material to conduct on top of it without damaging the circuit like build a reflector cup/ ring on top.
  • the Circuit Protector (24) may be made of solder mask, glass or any dielectric material. , ,

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Abstract

A hybrid substrate comprising a heat sink base, a ceramic top and a Metai Base Adhesive sandwiched between the heat sink base and ceramic top is disclosed.

Description

A HYBRID SUBSTRATE AND METHOD OF MANUFACTURING THE SAME
Field of the Invention
The present invention relates to a hybrid substrate used in semiconductor industry and method of manufacturing the same.
Background Art
Substrate is used as a key direct material in Semiconductor industry and can be made from various materials such as laminated Printed Circuit Board (PCB), Low Temperature co-fire ceramic or in a hybrid design.
The current market situation provides a low-cost low-reliability substrate or a high-cost reliable substrate. The availability of a low-cost high reliability substrate has been the market requirement for a long time.
There have been efforts in the past to provide a substrate to meet the market requirements.
Japanese Patent JP09315876A2 discloses one such attempt wherein an aluminum-ceramic composite substrate is provided.
EP0390598A3 discloses another such attempt wherein an aluminum nitride having a high thermal conductivity on which a metallized layer is formed with a high bonding strength.
However, the above solutions do not meet all of the current and future market requirements summarized as follows: a) High Thermal Conductivity (above 25VWmK); b) Low Thermal Resistant (Maximum at 1WVmK); c) Low Cost (lower than USD 1 /square inch/per watt light source); d) Direct IC Assembly Capable; e) Ease of Fabrication; f) Option Of AuSn Reflow Capable (310 degree C); g) Pre-heat sink in a single design/ substrate.
The problem to be solved is to provide a substrate having high thermal conductivity, low thermal resistance, low cost, direct IC assembly capable, ease of fabrication, optional of AuSn reflow capable and pre-heat sink in a single design/ substrate and to provide a method of manufacturing of such substrate.
The problem is solved by providing a hybrid substrate comprising a heat sink base, a ceramic top and a non epoxy base Metal Base Adhesive sandwiched between the heat sink base made of a metal with thermal conductivity above
12OVvVmK and ceramic top, which is disclosed in detail in the disclosure and. detailed description along with method of manufacturing of such substrate. .
Disclosure of the invention
According to an embodiment of the invention, there is provided a substrate comprising a heat sink as base, wherein the heat sink is made of a metal with thermal conductivity above 12OWVmK and top surface of the heat sink is treated by electro/ electroless deposition /PVD of a metal based material to promote adhesion of top surface with a Metal Base Adhesive; a Metal Base Adhesive disposed on the treated top surface of said heat sink to adhere with the heat sink; and a ceramic, wherein at lower surface of said ceramic, a first metallized layer of metal based electrical and thermal conductive material is disposed by thickfilm/ thinfilm or electro/ electroless deposition; whereby said substrate is formed by sandwiching the Metal Base Adhesive between the treated top surface of the heat sink and the first metallized layer disposed on the lower surface of the ceramic
According to another embodiment of the invention, a second metallized layer of metal based electrical and thermal conductive material if further disposed on top surface of the ceramic by thtckfilm/ thinfilm or electro/ electroless deposition; and a circuit protector on top of second metallized layer is provided.
According to another, embodiment of the invention, the heat sink is made of Aluminum.
According to another embodiment of the invention, the heat sink is made of Copper.
According to another embodiment of the invention, the metal based material for electro/ electroless deposition /PVD is selected from a group of Copper, Nickel, Silver, Gold-Platinum, Silver-Platinum and Gold.
According to another embodiment of the invention, the Metal Base Adhesive is an inorganic adhesive. .
According to another embodiment of the invention, the ceramic is made of material selected from a group of Alumina Oxide, Aluminum Nitride, beryllium oxide and Low Temperature co-fire ceramic.
According to another embodiment of the invention, the material of first metallized layer is selected from a group of Silver, AgPt, AgPd, AuSn, AuPt, Copper, Nickel and Gold. . According to another embodiment of the invention, the material of second metallized layer is selected from a group of Silver, AgPt1 AgPd, AuSn, AuPt1 Copper, Nickel and Gold.
According to another embodiment of the invention, the circuit protector is made of glass or any dielectric material.
According to another embodiment of the invention, the heat sink is made of Aluminum; the top surface of the heat sink is treated by electro/ electroless deposition /PVD of nickel, copper, silver, AgPt, AuPt, AuSn or gold. . -.
According to yet another embodiment of the invention, a method of manufacturing a substrate is provided which comprises the steps of: providing a heat sink made of a metal with thermal conductivity above 12OVWmK as base; treating top surface of the heat sink by electro/ electroless deposition / PVD of a metal based material to promote adhesion of top surface with a Metal Base Adhesive; disposing a Metal Base Adhesive on the treated top surface of said heat sink to adhere with the heat sink; providing a ceramic; disposing a first metallized layer of metal based electrical and thermal conductive material at lower surface of said ceramic by thickfilm/ thinfilm or electro/ electroless deposition 7. PVD; and sandwiching the Metal Base Adhesive between the treated top surface of the heat sink and the first metallized layer disposed on the lower surface of the ceramic to form a substrate.
According to yet another embodiment of the invention, the method also comprises the steps of: disposing a second metallized layer of metal based electrical and thermal conductive material on top surface of the ceramic by thickfilm/ thinfilm or electro/ electroless deposition /PVD; and providing a circuit protector on top of second metallized layer. Brief Description of the Drawings
Figure 1 shows top view of a substrate according to an embodiment of the present invention.
Figure 2 shows front view of a substrate according to an embodiment of the present invention.
Figure 3 shows right side view of a substrate according to an embodiment of the present invention. .
Figure 4 shows perspective view of a substrate according to an embodiment of the present invention.
Number Description of Elements 10 Substrate
12 Heat Sink
14 Treated Top. Surface
16 Metal Base Adhesive
18 First Metallized Layer 20 Ceramic
22 V- . . Second Metallized Layer
24 Circuit Protector
Detailed Description of the Invention ;
As can be seen in Figure 1; a substrate (10) of any size is provided according to an embodiment of the present invention. : As can be seen in Figure 2, a heat sink (12) is provided at the base of substrate (10). The heat sink may be made of any metal such as Aluminum or Copper or other metal with high thermal conductivity above 120W/mK. The top surface of heat sink is treated by electro/ electroless deposition /PVD of a metal based material to promote adhesion of top surface with a Metal Base Adhesive and to conduct heat. The top surface may be treated with a material based on metal such as Copper, Nickel, Silver , AgPt, AuPt of Gold to form a treated top surface (14). Further, a Metal Base Adhesive (16) is provided on top of the treated top surface (14) to stick to the heat sink (12) as well as to conduct heat from circuit protector (24), second metallized layer (22), Ceramic (20) and first metallized5 layer (18) to heat sink (12). The Metal Base Adhesive (16) also acts as a shock absorber for mechanical and thermal impact. An inorganic adhesive or metal adhesive such as metal filled or solder may be used as Metal Base Adhesive
0 As can be seen in Figure 3, a first metallized layer (18) is provided on lower surface of the ceramic (20). The layer (18) comprises a metal based electrical and thermal conductive material deposited by thickfilm/ thinfilm or electro/ electroless deposition /PVD methodology and promotes adhesion between the ceramic (20) and the metal base adhesive (16) and the treated top surface (14)5 of the heat sink (12). The material of first metallized layer (18) may be selected from a group of Silver, AgPt1 AgPd, AuPt, AuSn, Copper, Nickel and Gold. The ceramic (20) may be made of material selected from a group of Alumina Oxide, Aluminum Nitride, beryllium oxide and Low Temperature co-fire ceramic. The ceramic (20) provides as a thermal substrate to enable circuit building on top of 0 it. It also acts as a thermal conductor and provides a dielectric layer.
, As can be seen in Figure 4, a second metallized layer (22) is provided on top of the ceramic (20)/ The layer (22) comprises a metal based electrical and thermal conductive material deposited by thickfilm/ thinfilm or electro/ electroless
35 deposition methodology. The material of second metallized layer (18) may be selected from a group of Silver, AgPt, AgPd, AuSn, Copper, Nickel and Gold. The layer (22) acts as an electrical layer, which is also thermal conductive.
Further, a Circuit Protector (24) is provided on top of the second metallized layer to protect the circuit from short circuit in case of any conductive object failing on top of it. It also protects the circuit from mechanical damage and corrosion. It further enables more material to conduct on top of it without damaging the circuit like build a reflector cup/ ring on top. The Circuit Protector (24) may be made of solder mask, glass or any dielectric material. , ,

Claims

Claims:
1) A hybrid substrate compri$ing:
a heat sink as base, wherein the heat sink is made of a metal with thermal conductivity above 120VWmK and top surface of the heat sink is treated by electro/ electroless deposition / PVD of a metal based material to promote adhesion of top surface with a Metal Base Adhesive;
a Metal Base Adhesive disposed on the treated top surface of said heat sink to adhere with the heat sink; and
a ceramic, wherein at lower surface of said ceramic, a first metallized layer of metal based electrical and thermal conductive material is disposed by thickfilm/ thinfilm or electro/ electroless deposition /PVD; .
whereby said substrate is formed by sandwiching the Metal Base Adhesive between the treated top surface of the heat sink and the first metallized layer disposed on the lower surface of the ceramic.
2) . The substrate of claim.1, further comprising:
a second metallized layer of metal based electrical and thermal conductive material disposed on top surface of the ceramic by thickfilm/ thinfilm or electro/ electroless deposition /PVD; and a circuit protector on top of second metallized layer. ■.' ' . • .- . '. .
3) The substrate of claim 1 , wherein the heat sink is made of Aluminum.
4) The substrate of claim 1 , wherein the heat sink is made of Copper. 5) The substrate of claim 1, wherein the metal based material for electro/ electroless deposition is selected from a group of Copper, Nickel, Silver and Gold . ■ ■ . / ' •■ - ■ .
6) The substrate of claim 1 , wherein the Metai Base Adhesive is an inorganic adhesive. ; . . . .
7) The substrate of claim 1 , wherein the ceramic is made of material selected from a group of Alumina Oxide, Aluminum Nitride, beryllium oxide and Low Temperature cp-fire ceramic.
8) The substrate of claim 1, wherein the material of first metallized layer is selected from a group of Silver, AgPt, AgPd, AuPt, AuSn, Copper, Nickel and
9) The substrate of claim 2, wherein the material of second metallized layer is selected from a group of Silver, AgPt, AgPd, AuPt, AuSn, Copper, Nickel and
10) The substrate of claim 2, wherein the circuit protector is made of glass or any dielectric material. ; _
11) The substrate of claim 1 or 2, wherein: ' ' ■. . '.. , ■' .
the heat sink is made of Aluminum; the top surface of the heat sink is treated by electro/ electroless deposition /PVD of nickel or copper; and the material of first metallized layer is AgPt. , , . . . . . ■■ ... 12) A method of manufacturing a substrate comprising: .
providing a heat sink made of a metal with thermal conductivity above 12OVWmK as base; treating top surface of the heat sink by electro/ electroless deposition /PVD of a metal based material to promote adhesion of top surface with a Metal Base Adhesive; disposing a Metal Base Adhesive on the treated top surface of said heat sink to adhere with the heat sink; providing a ceramic; disposing :a first metallized layer of metal based electrical and thermal conductive material at lower surface of said ceramic by thickfitm/ thinfilm or electro/ electroless deposition /PVD; and sandwiching the Metal Base Adhesive between the treated top surface of the heat sink and the first metallized layer disposed on the lower surface of the ceramic to form a substrate.
13) The method of claim 12, further comprising:
disposing a second metallized layer of metal based electrical and thermal conductive material on top surface of the ceramic by thickfilm/ thinfilm or electro/ electroless deposition /PVD; and providing a circuit protector on top of second metallized layer.
PCT/MY2007/000035 2006-07-06 2007-05-31 A hybrid substrate and method of manufacturing the same WO2008004851A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
MYPI20063222 2006-07-06
MYPI20063222 2006-07-06

Publications (1)

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Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8475955B2 (en) 2005-03-25 2013-07-02 Front Edge Technology, Inc. Thin film battery with electrical connector connecting battery cells
US8679674B2 (en) 2005-03-25 2014-03-25 Front Edge Technology, Inc. Battery with protective packaging
US8753724B2 (en) 2012-09-26 2014-06-17 Front Edge Technology Inc. Plasma deposition on a partially formed battery through a mesh screen
US8864954B2 (en) 2011-12-23 2014-10-21 Front Edge Technology Inc. Sputtering lithium-containing material with multiple targets
US8865340B2 (en) 2011-10-20 2014-10-21 Front Edge Technology Inc. Thin film battery packaging formed by localized heating
US9077000B2 (en) 2012-03-29 2015-07-07 Front Edge Technology, Inc. Thin film battery and localized heat treatment
US9257695B2 (en) 2012-03-29 2016-02-09 Front Edge Technology, Inc. Localized heat treatment of battery component films
US9356320B2 (en) 2012-10-15 2016-05-31 Front Edge Technology Inc. Lithium battery having low leakage anode
US9887429B2 (en) 2011-12-21 2018-02-06 Front Edge Technology Inc. Laminated lithium battery
US9905895B2 (en) 2012-09-25 2018-02-27 Front Edge Technology, Inc. Pulsed mode apparatus with mismatched battery
US10008739B2 (en) 2015-02-23 2018-06-26 Front Edge Technology, Inc. Solid-state lithium battery with electrolyte

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EP0097944A2 (en) * 1982-06-29 1984-01-11 Kabushiki Kaisha Toshiba Method for directly bonding ceramic and metal members and laminated body of the same
US5165986A (en) * 1991-06-05 1992-11-24 Ferro Corporation Copper conductive composition for use on aluminum nitride substrate
EP0455229B1 (en) * 1990-05-02 1997-10-15 Mitsubishi Materials Corporation Ceramic substrate used for an electric or electronic circuit
JPH09315876A (en) * 1996-05-29 1997-12-09 Dowa Mining Co Ltd Aluminum-ceramic composite substrate and is production
EP0422558B1 (en) * 1989-10-09 2001-03-28 Mitsubishi Materials Corporation Ceramic substrate used for fabricating electric or electronic circuit
JP2003188240A (en) * 2001-12-21 2003-07-04 Nhk Spring Co Ltd Wafer-retaining device
US20060076571A1 (en) * 2004-09-24 2006-04-13 Min-Hsun Hsieh Semiconductor light-emitting element assembly

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Publication number Priority date Publication date Assignee Title
EP0097944A2 (en) * 1982-06-29 1984-01-11 Kabushiki Kaisha Toshiba Method for directly bonding ceramic and metal members and laminated body of the same
EP0422558B1 (en) * 1989-10-09 2001-03-28 Mitsubishi Materials Corporation Ceramic substrate used for fabricating electric or electronic circuit
EP0455229B1 (en) * 1990-05-02 1997-10-15 Mitsubishi Materials Corporation Ceramic substrate used for an electric or electronic circuit
US5165986A (en) * 1991-06-05 1992-11-24 Ferro Corporation Copper conductive composition for use on aluminum nitride substrate
JPH09315876A (en) * 1996-05-29 1997-12-09 Dowa Mining Co Ltd Aluminum-ceramic composite substrate and is production
JP2003188240A (en) * 2001-12-21 2003-07-04 Nhk Spring Co Ltd Wafer-retaining device
US20060076571A1 (en) * 2004-09-24 2006-04-13 Min-Hsun Hsieh Semiconductor light-emitting element assembly

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8475955B2 (en) 2005-03-25 2013-07-02 Front Edge Technology, Inc. Thin film battery with electrical connector connecting battery cells
US8679674B2 (en) 2005-03-25 2014-03-25 Front Edge Technology, Inc. Battery with protective packaging
US8865340B2 (en) 2011-10-20 2014-10-21 Front Edge Technology Inc. Thin film battery packaging formed by localized heating
US9887429B2 (en) 2011-12-21 2018-02-06 Front Edge Technology Inc. Laminated lithium battery
US8864954B2 (en) 2011-12-23 2014-10-21 Front Edge Technology Inc. Sputtering lithium-containing material with multiple targets
US9077000B2 (en) 2012-03-29 2015-07-07 Front Edge Technology, Inc. Thin film battery and localized heat treatment
US9257695B2 (en) 2012-03-29 2016-02-09 Front Edge Technology, Inc. Localized heat treatment of battery component films
US9905895B2 (en) 2012-09-25 2018-02-27 Front Edge Technology, Inc. Pulsed mode apparatus with mismatched battery
US8753724B2 (en) 2012-09-26 2014-06-17 Front Edge Technology Inc. Plasma deposition on a partially formed battery through a mesh screen
US9356320B2 (en) 2012-10-15 2016-05-31 Front Edge Technology Inc. Lithium battery having low leakage anode
US10008739B2 (en) 2015-02-23 2018-06-26 Front Edge Technology, Inc. Solid-state lithium battery with electrolyte

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