WO2008003792A3 - Vakuumbeschichtungsanlage mit einer transporteinrichtung zum transport von substraten - Google Patents

Vakuumbeschichtungsanlage mit einer transporteinrichtung zum transport von substraten Download PDF

Info

Publication number
WO2008003792A3
WO2008003792A3 PCT/EP2007/056990 EP2007056990W WO2008003792A3 WO 2008003792 A3 WO2008003792 A3 WO 2008003792A3 EP 2007056990 W EP2007056990 W EP 2007056990W WO 2008003792 A3 WO2008003792 A3 WO 2008003792A3
Authority
WO
WIPO (PCT)
Prior art keywords
coating system
vacuum coating
transport direction
delivery element
transport unit
Prior art date
Application number
PCT/EP2007/056990
Other languages
English (en)
French (fr)
Other versions
WO2008003792A2 (de
Inventor
Reinhardt Bauer
Frank Hupka
Andreas Heisig
Johannes Struempfel
Hans-Christian Hecht
Wolfgang Erbkamm
Original Assignee
Ardenne Anlagentech Gmbh
Reinhardt Bauer
Frank Hupka
Andreas Heisig
Johannes Struempfel
Hans-Christian Hecht
Wolfgang Erbkamm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ardenne Anlagentech Gmbh, Reinhardt Bauer, Frank Hupka, Andreas Heisig, Johannes Struempfel, Hans-Christian Hecht, Wolfgang Erbkamm filed Critical Ardenne Anlagentech Gmbh
Priority to DE112007000494T priority Critical patent/DE112007000494B4/de
Priority to US12/280,931 priority patent/US8127712B2/en
Publication of WO2008003792A2 publication Critical patent/WO2008003792A2/de
Publication of WO2008003792A3 publication Critical patent/WO2008003792A3/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G37/00—Combinations of mechanical conveyors of the same kind, or of different kinds, of interest apart from their application in particular machines or use in particular manufacturing processes
    • B65G37/005—Combinations of mechanical conveyors of the same kind, or of different kinds, of interest apart from their application in particular machines or use in particular manufacturing processes comprising two or more co-operating conveying elements with parallel longitudinal axes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G15/00—Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration
    • B65G15/22—Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration comprising a series of co-operating units
    • B65G15/24—Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration comprising a series of co-operating units in tandem
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/568—Transferring the substrates through a series of coating stations

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Intermediate Stations On Conveyors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Coating Apparatus (AREA)
  • Rollers For Roller Conveyors For Transfer (AREA)

Abstract

Eine Vakuumbeschichtungsanlage mit einer Transporteinrichtung zum Transport von Substraten in einer Transportrichtung umfasst mindestens einen in der Transportrichtung verlaufend angeordneten ersten Endlosförderer mit einem um mindestens zwei Umlenkrollen geführten endlosen Fördermittel, welches mit einem Abstand zu einer in der Transportrichtung parallel zum Fördermittel des ersten Endlosförderers verlaufend angeordneten Leiteinrichtung so angeordnet ist, dass die Substrate in den Abstand zwischen dem Fördermittel des ersten Endlosförderers und der Leiteinrichtung einführbar und durch die Bewegung des Fördermittels des ersten Endlosförderers in der Transportrichtung bewegbar sind.
PCT/EP2007/056990 2006-07-07 2007-07-09 Vakuumbeschichtungsanlage mit einer transporteinrichtung zum transport von substraten WO2008003792A2 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE112007000494T DE112007000494B4 (de) 2006-07-07 2007-07-09 Vakuumbeschichtungsanlage mit einer Transporteinrichtung zum Transport von Substraten
US12/280,931 US8127712B2 (en) 2006-07-07 2007-07-09 Vacuum coating system comprising a transport unit for transporting substrates

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102006031826.9 2006-07-07
DE102006031826 2006-07-07

Publications (2)

Publication Number Publication Date
WO2008003792A2 WO2008003792A2 (de) 2008-01-10
WO2008003792A3 true WO2008003792A3 (de) 2008-05-22

Family

ID=38535572

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2007/056990 WO2008003792A2 (de) 2006-07-07 2007-07-09 Vakuumbeschichtungsanlage mit einer transporteinrichtung zum transport von substraten

Country Status (3)

Country Link
US (1) US8127712B2 (de)
DE (1) DE112007000494B4 (de)
WO (1) WO2008003792A2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009042432A1 (de) 2008-09-29 2010-04-22 Von Ardenne Anlagentechnik Gmbh Transportvorrichtung für eine Vakuumprozessanlage, Antriebseinrichtung für eine Anlagenkomponente einer Vakuumprozessanlage, und Vakuumprozessanlage
DE102009005966A1 (de) 2008-09-29 2010-04-15 Von Ardenne Anlagentechnik Gmbh Transportvorrichtung für eine Vakuumprozessanlage, Antriebseinrichtung für eine Anlagenkomponente einer Vakuumprozessanlage, und Vakuumprozessanlage
DE102009017305B4 (de) * 2009-04-16 2012-12-06 Von Ardenne Anlagentechnik Gmbh Einrichtung zum Transport von Substraten durch Vakuumanlagen
DE102009031092A1 (de) 2009-06-29 2010-12-30 Von Ardenne Anlagentechnik Gmbh Transportverfahren, Antriebseinrichtung und Substratbehandlungsanlage
WO2011000583A1 (de) 2009-06-29 2011-01-06 Von Ardenne Anlagentechnik Gmbh Transportverfahren, antriebseinrichtung und substratbehandlungsanlage
DE102010002619A1 (de) 2009-11-06 2011-05-19 Von Ardenne Anlagentechnik Gmbh Transportverfahren, Antriebseinrichtung und Substratbehandlungsanlage

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4744712A (en) * 1986-05-06 1988-05-17 Ron Mitchell Apparatus and method for an improved wafer handling system for cantilever type diffusion tubes
WO1997030343A1 (de) * 1996-02-13 1997-08-21 Krones Ag Inspektionsmaschine für gefässe
DE19916703A1 (de) * 1999-04-14 2000-10-19 Haering Franz Inspektionsmaschine für transparente Behälter

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE25215E (en) * 1962-08-07 Automatic protective device
DE2234631A1 (de) * 1972-07-14 1974-01-31 Kabel Metallwerke Ghh Abzugsvorrichtung fuer druckempfindliches gut
SE372917B (de) * 1973-05-04 1975-01-20 C G R Ossbahr
US3901381A (en) * 1973-10-10 1975-08-26 Ball Brothers Service Corp Automatic ware handler
DE2425465B1 (de) * 1974-05-27 1975-03-27 Clouth Gummiwerke Ag Foerdergurt
US3944354A (en) * 1974-09-06 1976-03-16 Eastman Kodak Company Voltage measurement apparatus
EP0382028B1 (de) * 1989-02-09 1994-06-08 Präzisions-Werkzeuge AG Verfahren zum Beschichten einer Fläche zylindrischer Gegenstände und Apparat dafür
US5455514A (en) * 1994-06-20 1995-10-03 Eastman Kodak Company Apparatus and method for measuring polar charge on a sheet or moving web
US5609242A (en) * 1995-07-12 1997-03-11 The Goodyear Tire & Rubber Company Steel cable conveyor belt with improved penetration and rip resistance
IE960922A1 (en) * 1996-12-20 1998-07-01 Thomas Harney Handling beverage bottles
AT406668B (de) * 1998-10-05 2000-07-25 Starlinger & Co Gmbh Vorrichtung zur übernahme und beförderung von gegenständen

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4744712A (en) * 1986-05-06 1988-05-17 Ron Mitchell Apparatus and method for an improved wafer handling system for cantilever type diffusion tubes
WO1997030343A1 (de) * 1996-02-13 1997-08-21 Krones Ag Inspektionsmaschine für gefässe
DE19916703A1 (de) * 1999-04-14 2000-10-19 Haering Franz Inspektionsmaschine für transparente Behälter

Also Published As

Publication number Publication date
WO2008003792A2 (de) 2008-01-10
DE112007000494A5 (de) 2009-10-01
US20090173280A1 (en) 2009-07-09
DE112007000494B4 (de) 2011-12-01
US8127712B2 (en) 2012-03-06

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