WO2008001798B1 - Oscillating wave detection method and device - Google Patents

Oscillating wave detection method and device

Info

Publication number
WO2008001798B1
WO2008001798B1 PCT/JP2007/062863 JP2007062863W WO2008001798B1 WO 2008001798 B1 WO2008001798 B1 WO 2008001798B1 JP 2007062863 W JP2007062863 W JP 2007062863W WO 2008001798 B1 WO2008001798 B1 WO 2008001798B1
Authority
WO
WIPO (PCT)
Prior art keywords
resonators
wave detection
resonance
vibration wave
detection method
Prior art date
Application number
PCT/JP2007/062863
Other languages
French (fr)
Japanese (ja)
Other versions
WO2008001798A1 (en
Inventor
Shigeru Ando
Nobutaka Ono
Yuya Fujita
Naoki Ikeuchi
Original Assignee
Univ Tokyo
Tokyo Electron Ltd
Shigeru Ando
Nobutaka Ono
Yuya Fujita
Naoki Ikeuchi
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Tokyo, Tokyo Electron Ltd, Shigeru Ando, Nobutaka Ono, Yuya Fujita, Naoki Ikeuchi filed Critical Univ Tokyo
Publication of WO2008001798A1 publication Critical patent/WO2008001798A1/en
Publication of WO2008001798B1 publication Critical patent/WO2008001798B1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
    • G01H11/08—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H13/00—Measuring resonant frequency

Abstract

Provided are an oscillating wave detection method and device capable of obtaining a Hilbert transform pair output as an instantaneous value in real time. The oscillating wave detection method causes an oscillating wave to propagate to a plurality resonance beams (51 to 5m), each resonating to a particular frequency, and detects oscillation of each of the resonance beams (51 to 5m) as an electric signal by using piezoelectric resistors (61 to 6m) arranged in the resonance beams (51 to 5m). The resonance beams (51 to 5m) are arranged so that positions of the respective resonators are arranged in a logarithmic linear form proportional to a logarithm of their resonance frequencies. When N is an integer not smaller than 2, the resonance beams (51 to 5m) are selected by every other N-1 and the outputs of the piezoelectric resistors (61 to 6m) are added so as to output a plurality of signals. More preferably, the N is an integer not smaller than 3 and the resonance beams (51 to 5m) are arranged and the resonance frequencies are set so that the ratio of the resonance frequencies of the resonance beams (51 to 5m) of every other N-1 is constant.

Claims

19 補正書の請求の範囲 [2007年 11月 28日 （28. 11. 2007) 国際事務局受理] 19 Scope of request for amendments [November 28, 2007 (28. 11. 2007) International Bureau accepted]
[1] (補正後） 互いに異なる特定の周波数に共振する複数の共振子 （5 1〜5 m) に 振動波を伝播させ、 前記共振子それぞれの振動を検出する振動波検出方 法であって、 [1] (after correction) A vibration wave detection method for propagating vibration waves to a plurality of resonators (5 to 5 m) resonating at specific frequencies different from one another and detecting the vibration of each of the resonators. ,
前記複数の共振子を、 それぞれの共振子の位置がそれらの共振周波数 の対数に比例する対数線形になるように配列し、  The plurality of resonators are arranged such that the position of each resonator is log-linearly proportional to the logarithm of their resonance frequency
Nを 2以上の整数として、 N— 1本おきの前記共振子から構成された 複数の共振子群のうち少なくとも 2つの共振子群について、 共振子群毎 に各共振子群を構成する各共振子に対応する検出器の出力を加算して得 られる合成出力を継続的に生成し出力することを特徴とする振動波検出 方法。  For at least two of the plurality of resonator groups formed of the N-1 alternating resonators, where N is an integer of 2 or more, each of the resonators constituting each of the resonator groups includes at least two of the resonator groups. An oscillatory wave detection method characterized by continuously generating and outputting a combined output obtained by adding the outputs of detectors corresponding to a child.
[2] 前記複数の共振子は、 前記複数の共振子の前記 N— 1本おきの前記共 振子の共振周波数の比が一定になるように、 前記共振子の共振周波数を 設定して配列することを特徴とする請求項 1に記載の振動波検出方法。  [2] The plurality of resonators are set and arranged such that the ratio of the resonant frequencies of the resonators of every other one of the plurality of resonators is constant. The vibration wave detection method according to claim 1, characterized in that:
[3] 前記 Nは 3以上の整数であることを特徴とする請求項 1に記載の振動 波検出方法。  [3] The vibration wave detection method according to claim 1, wherein the N is an integer of 3 or more.
[4] (補正後） 互いに異なる特定の周波数に共振する複数の共振子 （5 1〜5 m) を、 それぞれの共振子の位置がそれらの共振周波数の対数に比例する対数線 " 形になるように配列した共振子列 （ 5 1〜 5 m) と、  [4] (after correction) A plurality of resonators (5 to 5 m) resonating at a specific frequency different from each other, the position of each resonator becomes a logarithmic line "proportional to the logarithm of their resonance frequency" And a series of resonators (51 to 5 m) arranged as
前記共振子列に伝播された振動波による前記複数の共振子それぞれの 振動を検出する検出器 （6 1〜6 m) と、  A detector (6 to 6 m) for detecting each vibration of the plurality of resonators by the vibration wave propagated to the resonator array;
Nを 2以上の整数として、 N— 1本おきの前記共振子に対応する前記 検出器の出力を加算して得られる合成出力を継続的に生成する、 少なく とも 2つの出力合成部 （1 0 a〜 1 0 c ) と、  At least two output combining units continuously generate a combined output obtained by adding the outputs of the detectors corresponding to the N-1 alternating resonators, where N is an integer of 2 or more. a ~ 1 0 c),
を備えることを特徴とする振動波検出装置。  An oscillatory wave detection apparatus comprising:
[5] 前記共振子列は、 前記複数の共振子の N— 1本おきの前記共振子の共 振周波数の比が一定になるように、 前記共振子の共振周波数を設定して 配列することを特徴とする請求項 4に記載の振動波検出装置。 [5] The resonator array may be arranged by setting the resonance frequencies of the resonators such that the ratio of the resonance frequencies of the N-1 alternating resonators of the plurality of resonators becomes constant. The vibration wave detection device according to claim 4, characterized in that
[6] 前記 Nは 3以上の整数であることを特徴とする請求項 4に記載の振動 波検出装置。 [6] The vibration wave detection device according to Claim 4, wherein the N is an integer of 3 or more.
[7] 前記検出器は、 ピエゾ抵抗 （6 1〜6 m) であることを特徴とする請 求項 4に記載の振動波検出装置。  [7] The vibration wave detection device according to claim 4, wherein the detector is a piezoresistor (61 to 6 m).
[8] 前記検出器は、 容量性の素子 （8 1〜8 m、 9 1〜9 m) であること を特徴とする請求項 4に記載の振動波検出装置。 [8] The vibration wave detection device according to claim 4, wherein the detector is a capacitive element (8 1 to 8 m, 9 1 to 9 m).
補正された用紙 （条約第 19条） Amended paper (Article 19 of the Convention)
PCT/JP2007/062863 2006-06-27 2007-06-27 Oscillating wave detection method and device WO2008001798A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006177199A JP2008008683A (en) 2006-06-27 2006-06-27 Oscillating wave detection method and device
JP2006-177199 2006-06-27

Publications (2)

Publication Number Publication Date
WO2008001798A1 WO2008001798A1 (en) 2008-01-03
WO2008001798B1 true WO2008001798B1 (en) 2008-03-13

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/062863 WO2008001798A1 (en) 2006-06-27 2007-06-27 Oscillating wave detection method and device

Country Status (3)

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JP (1) JP2008008683A (en)
TW (1) TW200809169A (en)
WO (1) WO2008001798A1 (en)

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Publication number Priority date Publication date Assignee Title
KR20180015482A (en) 2016-08-03 2018-02-13 삼성전자주식회사 Audio spectrum analyzer and method of arrangement of resonators included in the audio spectrum analyzer
JP7030331B2 (en) * 2018-03-28 2022-03-07 リバーエレテック株式会社 AE sensor element and AE sensor
TWI681371B (en) * 2018-03-31 2020-01-01 鈺紳科技股份有限公司 Vibration and sound wave integrated sensing system and method
CN112595408B (en) * 2020-12-10 2021-07-23 四川度飞科技有限责任公司 Dynamic resonance sensing device

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0265131A (en) * 1988-08-31 1990-03-05 Hitachi Ltd Plasma treatment device
JPH068505Y2 (en) * 1988-11-04 1994-03-02 トヨタ自動車株式会社 Vehicle noise / vibration analyzer
JPH10254460A (en) * 1997-03-12 1998-09-25 Rion Co Ltd Nose producing device and reverberation time measuring device using the same
JP3248452B2 (en) * 1997-05-26 2002-01-21 住友金属工業株式会社 Acoustic sensor
JP3348686B2 (en) * 1998-05-22 2002-11-20 住友金属工業株式会社 Vibration wave detection method and device

Also Published As

Publication number Publication date
WO2008001798A1 (en) 2008-01-03
TW200809169A (en) 2008-02-16
JP2008008683A (en) 2008-01-17

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