WO2007148464A1

WO2007148464A1 - Linear oscillation actuator

Info

Publication number: WO2007148464A1
Application number: PCT/JP2007/057748
Authority: WO
Inventors: Masaki Takasan; Kazuo Seiki
Original assignee: Kabushiki Kaisha Toyota Jidoshokki
Priority date: 2006-06-20
Filing date: 2007-04-06
Publication date: 2007-12-27
Also published as: TW200803146A; JP2008005568A

Abstract

When a high frequency voltage is applied from a drive control section (10) to an interdigital electrode (6) at one end of a lower stator (2) and an interdigital electrode (8) at one end of an upper stator (3) and interdigital electrodes (7, 9) at the other end are matched as a wave receiving electrode, a surface acoustic wave traveling in the +X direction is generated on the upper surface of the lower stator (2) and the lower surface of the upper stator (3) formed of a piezoelectric substrate. By the surface acoustic wave, a slider (4) brought into pressure contact with the surfaces of the lower stator (2) and the upper stator (3) by a leaf spring (5) is moved in the –X direction and thereby a drive object (12) on the outside of a casing (1) moves relatively through a wire (11).

Description

Specification

Linear type vibration actuator

Technical field

TECHNICAL FIELD [0001] The present invention relates to a linear vibration actuator, and more particularly to an actuator that relatively moves a driving object using ultrasonic vibration.

Background art

An apparatus that conveys an object using an ultrasonic motor is known. For example, the transport device disclosed in Patent Document 1 presses and holds a magnetic card, which is a transported object, between a pair of rod-shaped elastic bodies, and applies high-frequency power to piezoelectric ceramics bonded to both elastic bodies. The magnetic card is conveyed by generating and generating ultrasonic traveling waves in these elastic bodies. By using ultrasonic vibration, it is possible to obtain a transport device having a large thrust while being thin.

By mounting the transfer device of Patent Document 1 on a magnetic card reader / writer, etc., the magnetic card is transferred at high speed, and during the transfer, the magnetic head reads data from the magnetic card and writes data to the magnetic card. It can be carried out.

Patent Document 1: Japanese Patent Laid-Open No. 5-266260

Disclosure of the invention

Problems to be solved by the invention

[0004] However, for example, when trying to use a transport device such as Patent Document 1 to move a hand or a finger in a robot, a robot, etc., the hand or finger that is the object to be driven is paired with a pair of rods or The plate-like elastic body is pressed and clamped, and in this state, a traveling wave of ultrasonic waves must be generated in both elastic bodies. For this reason, as a robot hand, elastic bodies arranged on both sides of the hand and fingers are obstructive, and the moving direction of the hands and fingers is limited to the direction along the traveling direction of the traveling wave in the elastic bodies. As a result, it becomes extremely messy and selfish. This is due to the fact that the driven object is located inside the transport device. In particular, when driving multiple objects, the size of the actuator increases, so downsizing is an issue. Accordingly, the present invention has been made to solve such problems, and provides a linear vibration actuator that can move an external driving object relative to each other using ultrasonic vibration. With the goal.

Means for solving the problem

[0005] A linear vibration actuator according to the present invention includes a slide mechanism portion in which a slider is movably disposed in a predetermined direction along a surface of a plate-shaped or rod-shaped stator, and the slider is disposed outside the slide mechanism portion. A connecting member that is connected to an object to be driven, a preload means that pressurizes the slider against the surface of the stator, and one of a facing surface of the stator and the slider along the predetermined direction. A traveling wave generating means for generating a traveling wave is generated, and the traveling wave is generated by the traveling wave generating means to move the slider in the slide mechanism along the surface of the stator. The object is moved relatively.

Note that “relatively moving the driving object” includes the following three modes.

(1) The driven object moves relative to the stator whose position is fixed.

(2) The position is fixed and the stator moves relative to the driven object.

(3) The relative position of the stator and the driving object changes while the stator and the driving object move together.

The invention's effect

[0006] According to the present invention, it is possible to relatively move an external driving object using ultrasonic vibration.

Brief Description of Drawings

FIG. 1 is a side sectional view showing a configuration of a linear vibration actuator according to a first embodiment.

FIG. 2 is a perspective view showing a stator used in Embodiment 1.

FIG. 3 is a side sectional view showing a configuration of a linear vibration actuator according to a modification of the first embodiment.

FIG. 4 is a side cross-sectional view showing the configuration of the linear vibration actuator according to the second embodiment. FIG. 5 is a side cross-sectional view showing the configuration of the linear vibration actuator according to the third embodiment.

FIG. 6 is a perspective view showing a configuration of a linear vibration actuator according to a third embodiment.

FIG. 7 is a side cross-sectional view showing the configuration of the linear vibration actuator according to the fourth embodiment.

FIG. 8 is a side cross-sectional view showing a configuration of a linear vibration actuator according to a fifth embodiment.

FIG. 9 is a side cross-sectional view showing the configuration of the linear vibration actuator according to the sixth embodiment.

FIG. 10 is a perspective view showing a stator used in Embodiment 6.

FIG. 11 is a side cross-sectional view showing the configuration of the linear vibration actuator according to the seventh embodiment.

FIG. 12 is a front cross-sectional view showing a configuration of a linear vibration actuator according to a seventh embodiment.

FIG. 13 is a side sectional view showing a configuration of a linear vibration actuator according to an eighth embodiment.

FIG. 14 is a side sectional view showing a configuration of a linear vibration actuator according to a ninth embodiment.

FIG. 15 is a schematic front view showing a robot hand to which the present invention is applied.

BEST MODE FOR CARRYING OUT THE INVENTION

Embodiments of the present invention will be described below with reference to the accompanying drawings.

Embodiment 1

FIG. 1 shows the configuration of the linear vibration actuator according to the first embodiment. A pair of flat plate-like lower stator 2 and upper stator 3 each formed from a piezoelectric substrate are arranged in parallel in each other in casing 1 with one end opened, and a metal isotropic force is also formed between these stators 2 and 3. A slider 4 is arranged. The lower stator 2 is fixed to the bottom of the casing 1 and the upper stator 3 is arranged so that the slider 4 is sandwiched between the lower stator 2 and the lower stator 2, the upper stator 3 and the slider 4. A slide mechanism S is formed. Further, a plate panel 5 is inserted as a preload means between the upper surface of the upper stator 3 and the ceiling surface of the casing 1. The urging force of the plate panel 5 causes the upper stator 3 to move in the direction of the lower stator 2. The slider 4 is pressed and brought into pressure contact with the surfaces of the lower stator 2 and the upper stator 3 with a predetermined pressure.

Interdigital electrodes 6 and 7 are formed in the vicinity of both end portions of the upper surface of the lower stator 2 facing the slider 4, and similarly, interdigital shapes are formed in the vicinity of both end portions of the lower surface of the upper stator 3 facing the slider 4. Electrodes 8 and 9 are formed. And the drive control part 10 which has a high frequency power supply is electrically connected to these interdigital electrodes 6-9. The interdigital electrodes 6 to 9 and the drive controller 10 form traveling wave generating means.

Here, the direction from the interdigital electrodes 6 and 8 at one end of the lower stator 2 and the upper stator 3 to the interdigital electrodes 7 and 9 is + X direction, and the interdigital electrodes 7 and 9 at the other end are also one end. The direction of the force toward the interdigital electrodes 6 and 8 is defined as the X direction.

In addition, one end of a wire 11 as a connecting member is connected to the slider 4, and the other end of the wire 11 extends to the outside of the casing 1 through the open end of the casing 1 and is connected to the driven object 12. Has been. The driven object 12 is disposed so as to be movable in the + X direction and the −X direction, and is biased in a direction away from the casing 1, that is, in the + X direction by a biasing means such as a panel not shown. To do.

Next, the operation of the first embodiment will be described. As shown in FIG. 2, when a high frequency voltage is applied from the high frequency power source 13 in the drive control unit 10 to the interdigital electrode 6 at one end of the lower stator 2, the surface elasticity is applied to the upper surface of the lower stator 2 where the piezoelectric substrate force is formed. The wave is excited and propagates toward the interdigital electrode 7 at the other end. At this time, a matching circuit 14 in the drive control unit 10 is connected to the interdigital electrode 7 at the other end, and the interdigital electrode 7 is used as a receiving electrode to perform matching so that the surface acoustic wave is generated from the interdigital electrode. 7 is absorbed and the generation of the reflected wave is suppressed, and the surface acoustic wave becomes a traveling wave in the + X direction from the interdigital electrode 6 at one end to the interdigital electrode 7 at the other end.

[0012] The energy of the surface acoustic wave absorbed by the interdigital electrode 7 is a force that can be consumed by a resistance for energy consumption or the like. By using it for excitation, energy efficiency is greatly improved. It can be done.

Similarly, a high-frequency voltage is applied from the drive control unit 10 to the interdigital electrode 8 at one end of the upper stator 3 and matching is performed with the interdigital electrode 9 at the other end as a receiving electrode. A surface acoustic wave traveling in the + X direction is generated from the interdigital electrode 8 toward the interdigital electrode 9 at the other end.

[0013] The traveling waves in the + X direction generated on the upper surface of the lower stator 2 and the lower surface of the upper stator 3 are in pressure contact with the surfaces of the lower stator 2 and the upper stator 3 with a predetermined pressure. The slider 4 moves in the direction opposite to the traveling wave along the surfaces of the lower stator 2 and the upper stator 3, that is, in the X direction from the interdigital electrodes 7 and 9 at the other end to the interdigital electrodes 6 and 8 at the other end. To do. As the slider 4 moves, the driving object 12 outside the casing 1 moves relative to the X direction against the urging force of the panel or the like via the wire 11, not shown.

[0014] Conversely, by applying a high-frequency voltage to the interdigital electrodes 7 and 9 at the other ends of the lower stator 2 and the upper stator 3, respectively, and using the interdigital electrodes 6 and 8 at one end as receiving electrodes, respectively. Then, surface acoustic waves traveling in the X direction from the interdigital electrodes 7 and 9 at the other end toward the interdigital electrodes 6 and 8 at the other end are generated on the upper surface of the lower stator 2 and the lower surface of the upper stator 3, respectively. Can be moved in the + X direction. As a result, the tension of the wire 11 connecting the slider 4 and the driven object 12 is lowered, and the driven object 12 is relatively moved in the + X direction under the urging force of a panel or the like (not shown).

As shown in FIG. 3, the lower stator 2 and the linear guide 15 extending in parallel with the upper stator 3 are installed in the casing 1, and the movement of the slider 4 is guided by this linear guide 15, so that the lower part The slider 4 can be smoothly moved along the surfaces of the stator 2 and the upper stator 3.

[0016] Embodiment 2

FIG. 4 shows the configuration of the linear vibration actuator according to the second embodiment. In the second embodiment, four slide mechanism portions S used in the first embodiment are stacked on top of each other and housed in the casing 21 to constitute a stacked type actuator. Four slide mechanism parts S are stacked on top of each other in a casing 21 that is open at one end. On the upper surface of the upper stator 3 of the id mechanism portion S, the lower stator 2 of the upper slide mechanism portion S is located. Further, a panel panel 5 is inserted between the upper surface of the uppermost slide mechanism S and the ceiling surface of the casing 21. The plate panel 5 acts as a preload means in common with the four slide mechanism portions S, and the slider 4 of each slide mechanism portion S is applied to the surfaces of the lower stator 2 and the upper stator 3 with a predetermined pressure. Press contact.

The sliders 4 of the four slide mechanism portions S are connected to different driving objects 12 through corresponding wires 11 respectively. Further, drive control units 10 corresponding to the interdigital electrodes 6 to 9 of the four slide mechanism units S are electrically connected.

[0017] With such a configuration, the sliders 4 of the four slide mechanism sections S can be independently moved by the corresponding drive control sections 10, and the four driving objects 12 are driven with multiple degrees of freedom. It becomes possible to do.

Since the four slide mechanism parts S are stacked and the four plate mechanism parts S are preloaded with the common plate panel 5, a thin multi-degree-of-freedom linear vibration actuator with a small number of parts is realized.

In addition, by using the common plate panel 5, the preload applied to the four slide mechanism sections S is uniform, and the movement characteristics of the slider 4 in the four slide mechanism sections S can be made uniform. A feature is configured.

Furthermore, since surface acoustic waves are used as traveling waves, the surface of each stator 2 and 3 opposite to the slider 4 does not vibrate, so any part of these surfaces of each stator 2 and 3 is preloaded. This makes it possible to simplify the configuration of the preload means.

[0018] Embodiment 3

5 and 6 show the configuration of the linear vibration actuator according to the third embodiment. In the third embodiment, the lower stator 2 of the upper slide mechanism portion S also serves as the upper stator of the lower slide mechanism portion S in the actuator of the second embodiment shown in FIG.

Since surface acoustic waves are used as traveling waves, different surface acoustic waves can be generated on both sides of one stator. Therefore, in this third embodiment, the upper stage Interdigital electrodes 6 and 7 are formed in the vicinity of both ends of the upper surface of the lower stator 2 of the ride mechanism S, and the interdigital electrodes 6 and 7 are used as lower electrodes of the upper slide mechanism S. The interdigital electrodes 8 and 9 are formed in the vicinity of both ends of the lower surface of the lower stator 2, and the interdigital electrodes 8 and 9 are used as the upper electrodes of the lower slide mechanism section S.

[0019] By adopting such a configuration, the stator positioned between the upper slide mechanism portion S and the lower slide mechanism portion S stacked on each other can be made into one sheet, and is thinner and has a simple structure. A multi-degree-of-freedom linear vibration actuator is realized.

[0020] Embodiment 4

FIG. 7 shows the configuration of the linear vibration actuator according to the fourth embodiment. The fourth embodiment is formed of metal or the like instead of sandwiching the slider 4 formed of a metal or the like between the lower stator 2 and the upper stator 3 formed with piezoelectric substrate force in the first embodiment. In addition, a slider 24 having a piezoelectric substrate force formed between the lower stator 22 and the upper stator 23 is sandwiched to form interdigital electrodes 6 and 7 near both ends of the lower surface of the slider 24 and near both ends of the upper surface of the slider 24. In this example, interdigital electrodes 8 and 9 are formed. The lower stator 22, the upper stator 23, and the slider 24 form a slide mechanism portion S. Further, the drive control unit 10 is electrically connected to the interdigital electrodes 6-9.

The slider 24 is pressed against the surfaces of the lower stator 22 and the upper stator 23 with a predetermined pressure by the urging force of the plate panel 5. In addition, the driven object 12 outside the casing 1 is connected to the slider 24 via a wire 11.

By applying a high frequency voltage from the drive control unit 10 to the interdigital electrodes 6 and 8 at one end of the slider 24 and using the interdigital electrodes 7 and 9 at the other end as receiving electrodes, matching is performed. Surface acoustic waves traveling in the + X direction are generated from the interdigital electrodes 6 and 8 toward the interdigital electrodes 7 and 9 on both sides, and the slider 24 moves in the + X direction. On the other hand, by applying a high frequency voltage from the drive control unit 10 to the interdigital electrodes 7 and 9 at the other end of the slider 24 and matching the interdigital electrodes 6 and 8 at one end with the receiving electrodes, both sides of the slider 24 are obtained. Interdigital electrodes 7 and 9 to interdigital electrodes 6 and As a result, the surface acoustic wave traveling in the X direction is generated and the slider 24 moves in the X direction.

Therefore, similarly to the first embodiment, the drive object 12 outside the casing 1 can be moved via the wire 11.

[0022] Embodiment 5

FIG. 8 shows a configuration of the linear vibration actuator according to the fifth embodiment. In this fifth embodiment, the four slide mechanism portions S used in the fourth embodiment are stacked on top of each other and housed in the casing 21 to constitute a stacked actuator and the upper slide mechanism portion S. The lower stator 22 also serves as the upper stator of the lower slide mechanism S. Four slide mechanism parts S are stacked on top of each other in the casing 21 with one end open, and only the lower stator 22 of the upper slide mechanism part S is located between the slide mechanism parts S that overlap each other. The lower stator 22 of the upper slide mechanism part S also serves as the upper stator of the lower slide mechanism part S. A plate panel 5 is inserted between the upper surface of the uppermost slide mechanism S and the ceiling surface of the casing 21. The plate panel 5 allows the sliders 24 of the four slide mechanisms S to move to the lower stator 22 and the upper stator 23, respectively. The surface is pressed and contacted with a predetermined pressure!

Although not shown in the drawings, the sliders 24 of the four slide mechanism portions S are connected to different driving objects via the corresponding sliders 11, respectively. In addition, drive control units respectively corresponding to the interdigital electrodes 6 to 9 formed on both surfaces of the slider 24 of the four slide mechanism units S are electrically connected.

[0024] With such a configuration, similarly to Embodiments 2 and 3 described above, the sliders 24 of the four slide mechanism sections S can be independently moved by the corresponding drive control sections, It becomes possible to drive the driven object with multiple degrees of freedom.

Also, by using the common plate panel 5, the preload applied to the four slide mechanism sections S becomes uniform, and the movement characteristics of the slider 24 in the four slide mechanism sections S can be made uniform. A high-quality multi-degree-of-freedom actuator is constructed.

[0025] Embodiment 6

FIG. 9 shows the configuration of the linear vibration actuator according to the sixth embodiment. In the sixth embodiment, the lower stator 32 and the upper stator 33, which also have an inertial physical force, are used instead of the lower stator 2 and the upper stator 3, and the lower stator 32 is used instead of the interdigital electrodes 6 and 7. Piezoelectric elements 36 and 37 are pasted near the both ends of the upper surface of each of the electrodes, and piezoelectric elements 38 and 39 are pasted near the both ends of the lower surface of the upper stator 33 instead of the interdigital electrodes 8 and 9, respectively. A slide mechanism S is formed by the lower stator 32, the upper stator 33 and the slider 4. In addition, the drive control unit 10 is electrically connected to the piezoelectric elements 36 to 39.

The slider 4 is pressed and contacted with the surfaces of the lower stator 32 and the upper stator 33 with a predetermined pressing force by the urging force of the plate panel 5. In addition, a driven object 12 outside the casing 1 is connected to the slider 4 via a wire 11.

As shown in FIG. 10, when a high frequency voltage is applied from the high frequency power supply 13 in the drive control unit 10 to the piezoelectric element 36 at one end of the lower stator 2, flexural vibration is generated in the lower stator 32 that also has elastic body force. Is generated and propagates toward the piezoelectric element 37 at the other end. At this time, by connecting the matching circuit 14 in the drive control unit 10 to the piezoelectric element 37 at the other end and performing matching with the piezoelectric element 37 as the vibration-absorbing side element, the flexural vibration is absorbed by the piezoelectric element 37. Then, the generation of the reflected wave is suppressed, and a bending traveling wave in the + X direction from the piezoelectric element 36 at one end toward the piezoelectric element 37 at the other end is generated.

[0027] It is to be noted that the energy efficiency can be greatly improved by allowing the flexural vibration energy absorbed by the piezoelectric element 37 at the other end to flow back to the piezoelectric element 36 side at the one end and using it for exciting the flexural vibration. .

Similarly, by applying a high-frequency voltage from the drive control unit 10 to the piezoelectric element 38 at one end of the upper stator 33 and matching the piezoelectric element 39 at the other end as a vibration-absorbing side element, the lower surface of the upper stator 33 is A bending traveling wave is generated that travels in the + X direction from the piezoelectric element 38 toward the piezoelectric element 39 at the other end.

[0028] Progression in the + X direction generated on the upper surface of the lower stator 32 and the lower surface of the upper stator 33 The slider 4 force pressed against the surfaces of the lower stator 32 and the upper stator 33 by a predetermined pressure by the wave 4 force along the surface of the lower stator 32 and the upper stator 33, that is, in the direction opposite to the traveling wave, Move in the X direction. As the slider 4 moves, the driven object 12 outside the casing 1 moves in the X direction against the urging force of a panel or the like (not shown) via the wire 11.

[0029] Conversely, by applying a high-frequency voltage to the piezoelectric elements 37 and 39 at the other ends of the lower stator 32 and the upper stator 33, respectively, and using the piezoelectric elements 36 and 38 at the one end as vibration-absorbing side elements, A deflection traveling wave traveling in the X direction from the piezoelectric elements 37 and 39 at the other end to the piezoelectric elements 36 and 38 at the other end is generated on the upper surface of the lower stator 32 and the lower surface of the upper stator 33, respectively. Can be moved in the + X direction. As a result, the tension of the wire 11 connecting the slider 4 and the driving object 12 is lowered, and the driving object 12 is moved in the + X direction by receiving an urging force of a panel or the like (not shown).

[0030] Embodiment 7

FIGS. 11 and 12 show the configuration of the linear vibration actuator according to the seventh embodiment. In the seventh embodiment, a stack type actuator is configured by stacking four slide mechanism portions S using a bending traveling wave and storing them in a casing 21. Each slide mechanism portion S is formed by an upper stator 33 that also has elastic body force, a linear guide 40 that extends in parallel with the upper stator 33, and a slider 4 that is movably held by the linear guide 40. The lower surface of the upper stator 33 is in contact with the upper surface of the slider 4, and the leg portion 41 of the linear guide 40 is positioned below the lower surface of the slider 4.

[0031] Four slide mechanism portions S are stacked on each other in the casing 21 with one end opened, and the legs of the linear guide 40 of the upper slide mechanism portion S on the upper surface of the upper stator 33 of the lower slide mechanism portion S. Part 41 is listed. A panel panel 5 is inserted between the upper surface of the uppermost slide mechanism S and the ceiling surface of the casing 21. The upper stator 33 of the uppermost slide mechanism section S is pressed against the slider 4 by the urging force of the plate panel 5, and is further applied to the upper stator 33 of the lower slide mechanism section S via the linear guide 40. The urging force is applied. In this way, the plate panel 5 acts as a preload means in common with the four slide mechanism portions S, and the slider 4 of each slide mechanism portion S is predetermined with respect to the lower surface of the upper stator 33. Press contact with a pressure of.

[0032] Piezoelectric elements 38 and 39 are attached to the vicinity of both ends of the lower surface of the upper stator 33 of each slide mechanism S. Force not shown in the drawing Upper part of the four slide mechanism parts S The drive control parts corresponding to the piezoelectric elements 38 and 39 of the stator 33 are electrically connected. In addition, the sliders 4 of the four slide mechanism sections S are connected to each other via corresponding wires 11. Connected to different driving objects! Speak.

[0033] With such a configuration, the sliders 4 of the four slide mechanism parts S can be independently moved by the corresponding drive control parts as in the second, third and fifth embodiments. It becomes possible to drive four driving objects with multiple degrees of freedom.

[0034] Embodiment 8

FIG. 13 shows the configuration of the linear vibration actuator according to the eighth embodiment. In the eighth embodiment, the upper surface of the slider 44 in which the elastic force is also formed instead of attaching the piezoelectric elements 36 to 39 to the surfaces of the lower stator 32 and the upper stator 33, which also have elastic force, in the sixth embodiment. Piezoelectric elements 36 and 37 are pasted near the both ends of this, respectively, and the slider 44 is sandwiched between the lower stator 22 and the upper stator 23 in which a metal isotropic force is also formed. The lower stator 22, the upper stator 23 and the slider 44 form a slide mechanism portion S. Further, the drive control unit 10 is electrically connected to the piezoelectric elements 36 and 37 of the slider 44.

The slider 44 is pressed against the surfaces of the lower stator 22 and the upper stator 23 with a predetermined pressure by the urging force of the plate panel 5. Further, the driven object 12 outside the casing 1 is connected to the slider 44 via the wire 11.

When a high frequency voltage is applied from the drive control unit 10 to the piezoelectric element 36 at one end of the slider 44, When the piezoelectric element 37 at the other end is matched as the vibration-absorbing side element, a bending traveling wave in the direction + X direction is generated from the piezoelectric element 36 at one end to the piezoelectric element 37 at the other end in the slider 44, which is an elastic body force. The slider 44 moves in the + X direction. On the other hand, by applying a high-frequency voltage from the drive control unit 10 to the piezoelectric element 37 on the other end of the slider 44 and matching the piezoelectric element 36 on the one end as a vibration-absorbing side element, the piezoelectric element 36 on the other end of the slider 44 also has elastic body force. The element 37 force is also directed to the piezoelectric element 36 at one end — a bending traveling wave in the X direction is generated, and the slider 44 moves in the X direction.

Therefore, similarly to the sixth embodiment, the driving object 12 outside the casing 1 can be moved via the wire 11.

Instead of pasting the piezoelectric elements 36 and 37 on the upper surface of the slider 44, the piezoelectric elements 36 and 37 may be pasted near both ends of the lower surface of the slider 44, respectively.

[0036] Embodiment 9

FIG. 14 shows the configuration of the linear vibration actuator according to the ninth embodiment. In the ninth embodiment, the four slide mechanism portions S used in the eighth embodiment are stacked on top of each other and housed in the casing 21 to constitute a stacked actuator and the upper slide mechanism portion S. The lower stator 22 also serves as the upper stator of the lower slide mechanism section S. Four slide mechanism parts S are stacked on each other in the casing 21 with one end opened, and only the lower stage 22 of the upper slide mechanism part S is located between the slide mechanism parts S that overlap each other. The lower stator 22 of the slide mechanism section S also serves as the upper stator of the lower slide mechanism section S. A plate panel 5 is inserted between the upper surface of the uppermost slide mechanism S and the ceiling surface of the casing 21. The plate panel 5 allows the sliders 44 of the four slide mechanisms S to be moved to the lower stator 22 and the upper stator 23, respectively. The surface is pressed and contacted with a predetermined pressure!

[0037] Although not shown, the sliders 44 of the four slide mechanism portions S are connected to different driving objects via the corresponding carriers 11, respectively. Furthermore, drive control units respectively corresponding to the piezoelectric elements 36 and 37 formed on the upper surfaces of the sliders 44 of the four slide mechanism units S are electrically connected.

[0038] With such a configuration, as in Embodiments 2, 3, 5, and 7 described above, four slides are provided. The sliders 44 of the mechanism part S can be independently moved by the corresponding drive control parts, and the four drive objects can be driven with multiple degrees of freedom.

In addition, by using the common plate panel 5, the preload applied to the four slide mechanism sections S is uniform, and the movement characteristics of the slider 44 in the four slide mechanism sections S can be made uniform, resulting in a high-quality, multi-degree of freedom. An actuator is configured.

[0039] In the first to ninth embodiments, a force using the wire 11 as a connecting member for connecting the external drive object 12 to the sliders 4, 24, and 44 is not limited to this. A plate-like member can also be used.

In Embodiments 1 to 9, a power bar-shaped stator using flat-shaped lower stators 2, 22, and 32 and upper stators 3, 23, and 33 can also be used. Furthermore, if the slider can be moved freely, a curved stator can be used. In addition to the force using the plate panel 5 as preloading means, various biasing means such as a dish panel and a coil panel can be used.

Also in the above-described Embodiments 2 to 6, 8, and 9, it is preferable to guide the movement of the sliders 4, 24 and 44 by the linear guide 15 as shown in FIG.

[0040] In the above-described Embodiments 2, 3, 5, 7, and 9, the forces of the sliders 4, 24, and 44 of the four slide mechanism portions S connected to different driving objects 12 and independently driven It is also possible to connect the sliders 4, 24 and 44 of these four slide mechanisms S to a common driving object 12. In this way, it is possible to obtain a thrust four times that in the case where the driven object 12 is moved by the single slide mechanism S. In this case, the common drive control unit 10 is electrically connected to the interdigital electrodes 6 to 9 or the piezoelectric elements 36 to 39 of the four slide mechanism units S, and the sliders 4 and 24 of the four slide mechanism units S are connected. And 44 and 44 can be moved in synchronization.

[0041] In Embodiments 2, 3, 5, 7, and 9, four slide mechanism portions S are stacked on each other. However, the number of stacked slide mechanism portions S is not limited to four. Two, three One or five or more slide mechanism sections S can be stacked.

[0042] In each of the embodiments described above, the driven object 12 is arranged so as to be movable in the + X direction and the X direction, and the sliders 4, 24, Force that moved the drive target 12 with respect to the casing 1 by moving 44 On the contrary, the casing 1 is arranged to be movable in the + X direction and the X direction, and a fixed object is adopted as the drive target 12 By doing so, the casing 1 can be moved with respect to the driven object 12.

For example, in the first embodiment shown in FIG. 1, a high-frequency voltage is applied from the drive control unit 10 to the interdigital electrodes 6 and 8 at one end of the lower stator 2 and the upper stator 3 and the interdigital transducer is formed at the other end. By aligning electrodes 7 and 9 as receiving electrodes, surface acoustic waves traveling in the + X direction are generated on the upper surface of lower stator 2 and the lower surface of upper stator 3, and slider 4 force Lower stator 2 and upper stator 3 Move in the X direction relative to. At this time, since the slider 4 is connected to the driven object 12 which is a fixed object via the wire 11, it cannot actually move in the X direction due to the tension of the wire 11, and the lower stator 2 and The upper stator 3 moves relative to the slider 4 in the + X direction. In this way, the casing 1 can be moved in the + X direction.

[0044] When the casing 1 is moved in the X direction, it is necessary to move the slider 4 in the + X direction relative to the lower stator 2 and the upper stator 3. It is preferable to connect the slider 4 and the driven object 12 using a rod or a plate-like connecting member.

Similarly, in the second to ninth embodiments, the casings 1 and 21 are arranged so as to be movable in the + X direction and the one X direction, and a fixed object is used as the driving object 12. On the other hand, the casings 1 and 21 can be moved.

[0045] When a plurality of slide mechanism portions S are stacked and used as in the second, third, fifth, seventh, and ninth embodiments, the drive is connected to the sliders 4, 24, and 44 of each slide mechanism portion S. When the object 12 is a fixed object, the sliders 4, 24 and 44 of the plurality of slide mechanism sections S may be moved in synchronization. In addition, a drive object 12 as a fixed object is connected to a slider of at least one slide mechanism part S among the plurality of slide mechanism parts S to connect the slider. The casing 21 is moved by the ride mechanism S, and the movable drive object 12 is connected to the slider of the other slide mechanism S, and the movable drive object 12 is moved by the slide mechanism S. It is also possible to configure.

By using the stacked type actuators according to the second, third, fifth, seventh, and ninth embodiments described above, it is possible to configure a robot node as shown in FIG. 15, for example. This mouth bot hand is an array of five multi-joint fingers F, such as the first finger, the second finger, and the third finger, which are arranged side by side on a plurality of wires 11 of a stacked actuator A. is there. By using the stacked type actuator A, a small robot hand can be realized. When only one part of the finger F is driven, the finger F is used by using a vibration actuator having a single slider 4, 24, 44 as shown in the first, fourth, sixth, and eighth embodiments. It's a matter of moving around.

Furthermore, the entire robot hand can be moved by attaching the robot hand to the tip of an arm (not shown) and moving the arm. In this case, the relative positions of the casings 1 and 21 and the driving object 12 change while the casings 1 and 21 of the vibration actuator and the finger F as the driving object 12 are both moved by the movement of the arm. .

Claims

The scope of the claims

[1] a slide mechanism portion in which a slider is arranged so as to be movable in a predetermined direction along the surface of a plate-like or rod-like stator;

A coupling member that couples the slider to an object to be driven outside the slide mechanism; a preload means that pressurizes and contacts the slider against the surface of the stator; and one of the opposing surfaces of the stator and the slider Traveling wave generating means for generating traveling waves along the predetermined direction

A linear type characterized in that a traveling wave is generated by the traveling wave generating means and the slider is moved along the surface of the stator to move the driven object relative to each other via the connecting member. Vibration actuator.

[2] The linear vibration actuator according to [1], wherein the slide mechanism section includes a pair of stators arranged in parallel with each other and the slider arranged between the pair of stators.

3. The linear vibration actuator according to claim 1, wherein the slide mechanism portion has a linear guide for guiding the movement of the slider along the surface of the stator.

[4] a plurality of the slide mechanism portions stacked on each other;

A common preloading means that pressurizes the plurality of slide mechanism portions in a stacked state to press the slider in pressure contact with the surface of the stator in each of the slide mechanism portions;

A plurality of the connecting members respectively connecting the sliders of the plurality of slide mechanism sections to the plurality of driving objects;

A plurality of traveling wave generating means for respectively moving the sliders of the plurality of slide mechanism sections;

The linear vibration actuator according to claim 1, further comprising:

[5] The plurality of slide mechanism sections include an upper stator and a lower stator that are arranged in parallel to each other, and the slider that is arranged between the upper stator and the lower stator, and the upper slide mechanism. 5. The linear vibration actuator according to claim 4, wherein the lower stator of the portion also serves as the upper stator of the lower slide mechanism portion.

[6] The plurality of slide mechanism portions each have a plurality of linear guides for guiding the movement of the slider along the surface of the stator,

5. The linear type vibration actuator according to claim 4, wherein the preload means calorically presses the plurality of slide mechanism portions via the plurality of linear guides.

7. The linear vibration actuator according to claim 1, wherein the traveling wave generating means generates a surface acoustic wave as a traveling wave.

[8] The stator is formed of a piezoelectric substrate,

8. The linear vibration actuator according to claim 7, wherein the traveling wave generating means includes an interdigital electrode formed on a surface of the stator and a drive control unit that applies a high frequency voltage to the interdigital electrode.

[9] The traveling wave generating means has a second interdigital electrode formed on the surface of the stator,

The interdigital electrode and the second interdigital electrode are respectively formed near both ends of the stator,

9. The linear vibration actuator according to claim 8, wherein the drive control unit performs matching using the second interdigital electrode as a receiving electrode.

[10] The slider is formed of a piezoelectric substrate,

8. The linear vibration actuator according to claim 7, wherein the traveling wave generating means includes an interdigital electrode formed on a surface of the slider and a drive control unit that applies a high frequency voltage to the interdigital electrode.

[11] The traveling wave generating means has a second interdigital electrode formed on the surface of the slider,

The interdigital electrode and the second interdigital electrode are respectively formed near both ends of the slider,

11. The linear vibration actuator according to claim 10, wherein the drive control unit performs matching using the second interdigital electrode as a receiving electrode.

12. The linear vibration actuator according to claim 1, wherein the traveling wave generating means generates a bending traveling wave as a traveling wave.

[13] The stator is formed of an elastic body,

13. The linear vibration actuator according to claim 12, wherein the traveling wave generating means includes a piezoelectric element disposed on a surface of the stator and a drive control unit that applies a high frequency voltage to the piezoelectric element.

[14] The traveling wave generating means includes a second piezoelectric element formed on the surface of the stator, and the piezoelectric element and the second piezoelectric element are formed near both ends of the stator,

14. The linear vibration actuator according to claim 13, wherein the drive control unit uses the second piezoelectric element as a vibration absorption side element for matching.

[15] The slider is formed of an elastic body,

13. The linear vibration actuator according to claim 12, wherein the traveling wave generating means includes a piezoelectric element disposed on a surface of the slider and a drive control unit that applies a high frequency voltage to the piezoelectric element.

[16] The traveling wave generating means includes a second piezoelectric element formed on the surface of the slider, and the piezoelectric element and the second piezoelectric element are formed near both ends of the slider,

16. The linear vibration actuator according to claim 15, wherein the drive control unit performs matching using the second piezoelectric element as a vibration-side element.

17. The linear mold according to claim 1, further comprising a casing that houses the slide mechanism portion and that is open at one end, and the connecting member extends to the outside of the casing through an open end portion of the casing. Vibration actuator.

18. The linear vibration actuator according to claim 17, wherein the preload means also includes a plate banner inserted between the inner surface of the casing and the stator.