WO2007141173A1 - Cible de pulvérisation rotative - Google Patents

Cible de pulvérisation rotative Download PDF

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Publication number
WO2007141173A1
WO2007141173A1 PCT/EP2007/055280 EP2007055280W WO2007141173A1 WO 2007141173 A1 WO2007141173 A1 WO 2007141173A1 EP 2007055280 W EP2007055280 W EP 2007055280W WO 2007141173 A1 WO2007141173 A1 WO 2007141173A1
Authority
WO
WIPO (PCT)
Prior art keywords
target
sputter
sputter target
central zone
end zones
Prior art date
Application number
PCT/EP2007/055280
Other languages
English (en)
Inventor
Wilmert De Bosscher
Original Assignee
Bekaert Advanced Coatings
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bekaert Advanced Coatings filed Critical Bekaert Advanced Coatings
Publication of WO2007141173A1 publication Critical patent/WO2007141173A1/fr

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C23C14/0089—Reactive sputtering in metallic mode
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
    • H01J37/3405—Magnetron sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3414—Targets
    • H01J37/3426—Material
    • H01J37/3429—Plural materials

Definitions

  • a rotatable sputter target Field of the invention is a rotatable sputter target Field of the invention.
  • the invention relates to an improved rotatable sputter target and to a method of manufacturing such a sputter target.
  • magnetron sputtering has become a well-known technique to deposit thin coatings such as metal coatings or ceramic coatings on large area substrates such as glass or elongated flexible substrates.
  • the technique of sputtering is typically used to deposit silicon oxide, silicon nitride, titanium oxide, zinc oxide, tin oxide ....
  • the sputter deposition rate and the degree of target consumption are important issues to make the sputter process economically interesting.
  • the sputter process became more attractive as several advantages can be realized.
  • the most important advantages are the higher target material consumption, the possibility to use a higher power density and thus to obtain a higher sputter deposition rate, the enhanced anode functionality during AC sputtering and the drastically reduced arc sensitivity during reactive sputtering.
  • the rotatable sputter target also shows problems.
  • Reactive sputtering involves working and controlling the sputter deposition rate of a metal in a reactive gas as known from the hysteresis curve. High sputter deposition rates are obtained in the metallic mode.
  • an insulating material can be built up at all exposed and non-sputtering surfaces.
  • the consumption of a rotatable target is significantly higher compared to planar targets, still a considerable amount of target material is lost by the setup of the sputter target and the magnet array and the consumption of the target material remains an issue.
  • the rotatable sputter target rotates below the stationary race track.
  • the race track turns a higher power density and thus a higher sputter deposition rate is obtained, leading to a higher consumption of the target material.
  • the target has to be replaced although still an appreciable amount of valuable material may be present over the main part of the target.
  • US 5,470,452 and US 5,725,746 disclose rotatable targets comprising an elongated tubular member having a target material at the outer surface thereof.
  • the target comprises a collar of an electrically conductive material at at least one end of the tubular member.
  • the target material is substantially free of the collar material.
  • the collar material suppresses arcing.
  • this type of rotatable targets shows a number of drawbacks. As the thermal contact between the collar and the target material is not optimal, thermal stresses in the collar material can be high.
  • the collar will be thermally expanded to a higher extent compared to the rest of the target material. Consequently, the thermal contact between the collar and the water cooled target material will be further reduced.
  • the collar will function as a loose glowing ring over the rotating target material and may cause local melt zones on the target material.
  • a further drawback of this type of rotatable targets is that material sputtered from the collar material will be deposited also on the edges of the substrate being coated where it will be mixed with material sputtered from the target material.
  • a rotatable sputter target is provided.
  • the rotatable sputter target comprises a target material and a magnet array located at the interior of the target material.
  • the magnet array defines a central zone extending along the major part of the length of the target material and defines an end zone at each end of the central zone.
  • the target material comprises a first material and a second material.
  • the target material comprises the first material at least on the central zone and comprises the second material at least on the end zones.
  • the second material has a lower sputter deposition rate than the first material.
  • the second material is preferably applied by thermal spraying.
  • the first material is applied on the central zone and on the end zones, whereas the second material is applied at least on the end zones on top of the first material.
  • the second material is anchored in the first material and will not become loose during the use of the sputter target. This is a great advantage compared to sputter targets known in the art.
  • the first material comprises at least a first element and the second material comprises a compound of the first element of the first material.
  • the coating sputter deposited from the first material and from the second material have substantially the same composition.
  • substantially the same composition is meant that at least 80 % of the atomic composition of the coating sputter deposited from the first and from the second material is the same.
  • the first and the second material are used to deposit a coating on the substrate having substantially the same composition, substantially the whole length of the target material is used for sputtering.
  • the first material may comprise any material that can be used in DC or in midfrequent AC sputtering.
  • the first material comprises at least a first element.
  • the first element comprises a metal and more preferably the first element comprises a metal selected from the group consisting of Zn, Sn, Ag, Cu, Nd, Ni, Zr, Fe, Al, Si, Ti, Nb, Ta, Cr, Mo and W.
  • a metal selected from the group consisting of Zn, Sn, Ag, Cu, Nd, Ni, Zr, Fe, Al, Si, Ti, Nb, Ta, Cr, Mo and W.
  • the first material may comprise a compound or an alloy of the first element.
  • the first material may also comprise the first element doped with another element. Furthermore, the first material may comprise a compound of the first element doped with another element or an alloy of the first element doped with another element.
  • the second material comprises preferably a compound of the first element of the first material.
  • a compound of the first element of the first material is defined as any material comprising the first element.
  • the second material may for example consist of the first element of the first material.
  • the second material may comprise an alloy of the first element of the first material
  • the second material may comprise a chemical compound of the first element of the first material such as an oxide, a nitride or an oxynitride of the first element of the first material.
  • the second material comprises the first element of the first material doped with at least one element other than the first element or comprises a compound of the first element of the first material doped with at least one element other than the first element.
  • the rotatable sputter target according to the present invention is in particular suitable to be used in a reactive sputter process.
  • the first material comprises a metal and the second material comprises a compound of this metal of the first material and of the reactive gas.
  • Preferred embodiments of rotatable targets according to the present invention comprise a rotatable target having a target material comprising Zn as first material and Zn ⁇ 2 as second material.
  • the rotatable target is preferably used in a reactive sputter process using oxygen as reactive gas; - a rotatable target having Ti as first material and TiO x N y (with 0 ⁇ x ⁇ 2, 0 ⁇ y ⁇ 2 and at least one of x or y different from 0) as second material.
  • the rotatatable target is preferably used in a reactive sputter process using oxygen or nitrogen or a combination of oxygen and nitrogen as reactive gas; a rotatable target having a target material comprising Si:AI (with 10 wt% Al) as first material and Si as second material.
  • the rotatable target can be used in a reactive sputter process using any kind of reactive gas.
  • the reactive gas comprises oxygen or nitrogen.
  • the target material can be self-supporting or can be deposited on a target base.
  • an adhesion promoting layer can be applied on the target base before the application of the target material.
  • the first material and the second material of the target material can be obtained by any technique known in the art, as for example by casting, extrusion, sintering, hipping and spraying, such as thermal spraying or by combinations thereof.
  • the second material is preferably obtained by thermal spraying.
  • both the first material and the second material are obtained by thermal spraying.
  • a first group of sputter targets according to the present invention comprises sputter targets having a uniform thickness of the target material over the entire length of the target base.
  • the thickness of the target material is preferably ranging between 2 and 30 mm and more preferably between 4 and 15 mm.
  • a second group of sputter targets according to the present invention comprises sputter targets whereby the target material has a dog-bone structure.
  • the thickness of the target material at the end zones is higher than the thickness of the target material located in the central zone.
  • the thickness of the target material at the central zone is preferably ranging between 2 and 20 mm and the thickness of the target material at the end zones is preferably ranging between 3 and 30 mm.
  • a method to manufacture a rotatable sputter target is provided.
  • the method comprises the steps of providing a target material comprising a first and a second material, said second material having a lower sputter deposition rate than said first material; and - providing a magnet array being located at the interior of the target material.
  • the magnet array defines a central zone extending along the major part of the length of the target material and defines end zones at each end of the central zone.
  • the target material comprises the first material at least on the central zone and comprises the second material at least on the end zones.
  • the second material is preferably applied by thermal spraying.
  • the target material comprises the first material on the central zone and on the end zones and the second material is applied by thermal spraying at the end zones on top of the first material.
  • the first material comprises at least a first element and the second material comprises a compound of the first element of the first material.
  • the first material can be obtained by any technique known in the art such as casting, extrusion, sintering, hipping or spraying.
  • Figure 1 is a schematic view of a rotatable sputter target according to the present invention.
  • a rotatable metallic titanium target known from the prior art is used to deposit a titanium dioxide coating.
  • the target has a straight structure and is provided with an adequate feedback loop system.
  • the target consumption is limited to 15 - 45 %.
  • the feedback loop system is monitoring a specific fast reaction process variable at one or more locations across the length of the target. With the appropriate feedback parameter, the target surface is kept in its semi-poisoned state. However, at the same time, the race track turn is situated in a different poisoning condition.
  • race track turn is defined as the area having a higher plasma density or a longer residence time in the plasma region than the central target region (sputtering zone).
  • FIG. 1 shows a rotatable target 10 according to the present invention.
  • the rotatable target 10 comprises a target base 1 1 , a target material 12 applied at the outer side of the target base and a magnet array 13 located within said target base.
  • the magnet array 13 defines a central zone 14 and two end zones 15.
  • the central zone 14 is extending along the major part of the length of the target base 1 1.
  • the end of the central zone is roughly corresponding with the end of magnet array 13.
  • the target material 12 comprises a first material 16 and a second material 17.
  • the first material 16 is applied at least on the central zone 14, the second material 17 is applied at least on the end zones 15.
  • the second material has a lower sputter deposition rate than the first material.
  • the first material comprises Ti and the second material comprises TiO x with 0 ⁇ x ⁇ 2.
  • TiO x is applied by thermal spraying.
  • the rotatable target 10 is being used in a reactive process and is provided with an adequate feedback system.
  • the second material 17 located at the end zones 15 will sputter with a deposition rate similar to the deposition rate of the first material 16 located at the central zone 14.
  • the second material 17 of the end zones 15 will also from a TiO 2 layer of good quality because the depleted amount from the gas (due to extra erosion) is compensated by the presence of oxygen of the second material 17.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

L'invention concerne une cible de pulvérisation rotative et un procédé pour fabriquer une telle cible de pulvérisation. La cible de pulvérisation comprend un matériau cible et un ensemble d'aimants situé à l'intérieur du matériau cible. L'ensemble d'aimants définit une zone centrale s'étendant le long de la partie principale de la longueur du matériau cible et définit une zone d'extrémité à chaque extrémité de la zone centrale. Le matériau cible comporte un premier matériau et un second matériau. Le matériau cible comporte le premier matériau au moins sur la zone centrale et le second matériau au moins sur les zones d'extrémité. Le second matériau a une vitesse de dépôt par pulvérisation inférieure au premier matériau. Le second matériau est, de préférence, appliqué par projection à chaud.
PCT/EP2007/055280 2006-06-02 2007-05-31 Cible de pulvérisation rotative WO2007141173A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP06114889.6 2006-06-02
EP06114889 2006-06-02

Publications (1)

Publication Number Publication Date
WO2007141173A1 true WO2007141173A1 (fr) 2007-12-13

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Family Applications (1)

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PCT/EP2007/055280 WO2007141173A1 (fr) 2006-06-02 2007-05-31 Cible de pulvérisation rotative

Country Status (1)

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WO (1) WO2007141173A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT12292U3 (de) * 2011-10-18 2013-03-15 Plansee Se Rohrtarget
US10138544B2 (en) 2011-06-27 2018-11-27 Soleras, LTd. Sputtering target
CN112899628A (zh) * 2021-01-18 2021-06-04 福建阿石创新材料股份有限公司 一种可均匀溅射旋转硅靶材及其制备方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0586809A1 (fr) * 1992-07-15 1994-03-16 "EMIEL VANDERSTRAETEN" Société de personnes à responsabilité limitée Cathode pour pulvérisation et procédé de fabrication d'une telle cathode
US5427665A (en) * 1990-07-11 1995-06-27 Leybold Aktiengesellschaft Process and apparatus for reactive coating of a substrate

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5427665A (en) * 1990-07-11 1995-06-27 Leybold Aktiengesellschaft Process and apparatus for reactive coating of a substrate
EP0586809A1 (fr) * 1992-07-15 1994-03-16 "EMIEL VANDERSTRAETEN" Société de personnes à responsabilité limitée Cathode pour pulvérisation et procédé de fabrication d'une telle cathode

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10138544B2 (en) 2011-06-27 2018-11-27 Soleras, LTd. Sputtering target
AT12292U3 (de) * 2011-10-18 2013-03-15 Plansee Se Rohrtarget
WO2013056286A1 (fr) 2011-10-18 2013-04-25 Plansee Se Cible tubulaire
CN112899628A (zh) * 2021-01-18 2021-06-04 福建阿石创新材料股份有限公司 一种可均匀溅射旋转硅靶材及其制备方法

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