WO2007127587A1 - Polymeric chelant and coagulant to treat metal-containing wastewater - Google Patents
Polymeric chelant and coagulant to treat metal-containing wastewater Download PDFInfo
- Publication number
- WO2007127587A1 WO2007127587A1 PCT/US2007/066041 US2007066041W WO2007127587A1 WO 2007127587 A1 WO2007127587 A1 WO 2007127587A1 US 2007066041 W US2007066041 W US 2007066041W WO 2007127587 A1 WO2007127587 A1 WO 2007127587A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- coagulant
- transition metals
- copper
- ppm
- combination
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/68—Treatment of water, waste water, or sewage by addition of specified substances, e.g. trace elements, for ameliorating potable water
- C02F1/683—Treatment of water, waste water, or sewage by addition of specified substances, e.g. trace elements, for ameliorating potable water by addition of complex-forming compounds
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/52—Treatment of water, waste water, or sewage by flocculation or precipitation of suspended impurities
- C02F1/54—Treatment of water, waste water, or sewage by flocculation or precipitation of suspended impurities using organic material
- C02F1/56—Macromolecular compounds
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2101/00—Nature of the contaminant
- C02F2101/10—Inorganic compounds
- C02F2101/20—Heavy metals or heavy metal compounds
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2103/00—Nature of the water, waste water, sewage or sludge to be treated
- C02F2103/34—Nature of the water, waste water, sewage or sludge to be treated from industrial activities not provided for in groups C02F2103/12 - C02F2103/32
- C02F2103/346—Nature of the water, waste water, sewage or sludge to be treated from industrial activities not provided for in groups C02F2103/12 - C02F2103/32 from semiconductor processing, e.g. waste water from polishing of wafers
Definitions
- the present invention relates to the use of a water-soluble polymeric chelant, in combination with a water-soluble coagulant to precipitate contaminants from aqueous solutions and/or dispersions.
- CMP chemical mechanical planarization
- Grinstead in U.S. Patent No. 4,741,831 teaches a cyclic process for treating an aqueous metal-bearing waste stream which comprises: 1) contacting the aqueous waste stream with a polymeric chelant to form a soluble metal complex, 2) using membrane separation to remove the aqueous portion, 3) contacting the concentrate with a mineral acid to release the metal, 4) using a second membrane filtration to separate the metal filtrate from the regenerated polymeric chelant, and 5) recycling the aqueous polymeric chelant concentrate to the contact zone of the first step.
- the preferred organic polymeric coagulants are poly[epichlorohyrin-co-dimethylamine] (pEPI/DMA) and poly[diallyldimethylamonium chloride] (pDADMAC) polymers. It is further taught that, for metal containing waste, it may be desirable to add a metal removal agent to yield an insoluble metal precipitate that is absorbed by the coagulant. In the examples with CMP slurries, the chemical treatments are added directly to the slurry and then processed directly via microfiltration.
- Salmen et al. in U.S. Patent No 6,258,277 teach a process for removing heavy metals from a semiconductor wastewater containing abrasive solids comprising: 1) adding an effective amount of a water-soluble polymer containing dithiocarbamate functionality (DTC-polymer), 2) precipitating heavy metal ions, and 3) passing wastewater through a microfilter to remove the abrasive solids and precipitated heavy metal ions. It is further taught that the use of a coagulant in conjunction a DTC-polymer will adversely affect permeate flux and quality.
- DTC-polymer water-soluble polymer containing dithiocarbamate functionality
- Example 2 (polymer B) of WO '493 is compositionally equivalent to the polyethyleiminodiacetic acid.XNa (PEIDA) composition of the present invention.
- cationic polymers and anionic polymers as coprecipitants in removing heavy metals from wastewater is known in the art.
- Swanson et al. U.S. Patent No. 3,947,354
- a cationic polyelectrolyte and anionic xanthate to precipitate and remove metal-ions from wastewater.
- Swanson et al.'s selection of anionic polymers is limited to water soluble polyhydroxyl derivatives, such as starch, cellulose, dextrins, hemicellulose, polyvinyl alcohols and preferably anionic starch xanthate.
- a drawback to current technologies for treating CMP wastewater is that the copper is coprecipitated with abrasive solids, thus increasing the amount of copper-containing waste generated. Furthermore, current technologies require utilization, with periodic maintenance, of the ion exchange bed to successfully remove copper to compliance level. Thus, it is an object of the present invention to provide a process for treating CMP wastewater that minimizes the amount of copper-containing waste generated. A further object of the present invention is to provide a novel treatment for CMP wastewater.
- the present invention is directed to the use of a novel combination of a polymeric chelant and coagulant to treat metal containing wastewater. More particularly, the invention is directed at removing copper from CMP wastewater.
- polymeric chelants of the present invention are well known to those skilled in the art. For example, see the compositions of Grinstead, U.S. Patent No. 4,741,831, Carey et al., U.S. Patent No. 5,594,096, Salmen et al., U.S. Patent No. 6,258,277, and Smith et al., PCT WO 96/38493.
- polymeric chelants are derived from polyamines including diethylenetriamine (DETA), triethylenetetraamine (TETA), tetraethylenepentaamine (TEPA), poly[vinylamine], and branched or linear poly[ethylenimine] (PEI). Particularly preferred are water-soluble polymers characterized as branched polymers represented by the following formula:
- R 1 independently is -H, -CS 2 R 2 , -CH 2 CO 2 R 2 , -CH2-PO 3 R 2 , or mixtures thereof;
- R 2 each independently represents -H or a cation; and the sum of x, y and z is an integer greater than 15.
- Coagulants with utility in treating wastewater are well known to those skilled in the art.
- Preferred are tannin containing polymers as taught by Quamme et al., U.S. Patent No. 4,558,080 and Chen et al., U.S. Patent No. 5,916,991.
- the coagulant may be described as a water soluble or dispersible copolymer of a tannin and a cationic monomer selected from the group consisting of methyl chloride or dimethyl sulfate quaternary salt of dimethyl aminoethyl acrylate, diethylaminoethyl acrylate, dimethylaminoethyl methacrylate, diethylaminoethyl methacrylate, dimethylaminopropyl methacrylamide, dimethylaminopropyl acrylamide, and diallyl dimethyl ammonium chloride.
- a cationic monomer selected from the group consisting of methyl chloride or dimethyl sulfate quaternary salt of dimethyl aminoethyl acrylate, diethylaminoethyl acrylate, dimethylaminoethyl methacrylate, diethylaminoethyl methacrylate, dimethylaminopropyl methacrylamide, dimethylamin
- Particularly preferred cationic polymers are the tannin adducts as taught by Chen et al. '991.
- a particularly preferred commercially available cationic tannin available from GE Water and Process Technologies is KlaraidTM PC2705 composed of tannin and 2- acryloxyethyltrimethyl ammonium chloride (AETAC). The structure of unmodified Wattle tannin appears below.
- distilled water (30 g) and monochloroacetic acid (35.2 g, 0.372 moles).
- the reactor contents were sparged of air with nitrogen, cooled to 0 0 C, and then aqueous poly[ethylenimine] (50%, 32 g, 0.372 moles, BASF Lupasol P) was added drop wise over a 10 minute period with cooling.
- Aqueous sodium hydroxide (50%, 29.1 g, 0.372 moles) was then charged over a 20 minute period with cooling, maintaining the batch temperature at 5-10 0 C.
- the batch temperature was increased to 90 0 C and, after 20 minutes, a second addition of aqueous sodium hydroxide (50%, 29.1 g, 0.372 moles) was conducted over a 2 hour period as required to maintain a pH of 9-11 into the feed, after which the batch was held at 90 0 C overnight.
- the resulting crude product was precipitated in methanol to wash away the sodium chloride byproduct, filtered and dried in vacuo at 40 0 C.
- the resultant PEIDA was made down as a 5 wt. % solids solution in DI water for testing.
- Example 2 To a reactor setup as described in Example 1 was charged DI water (102 g) and sodium chloroacetate (55.39 g, 0.466 moles). The reactor contents were sparged of air with nitrogen, and then poly[ethylenimine] (20.5 g, 0.466 mole, Nippon Shokubai Epomin SP-200) was added over a 6 minute period, during which the batch exothermed to 43 0 C. Aqueous sodium hydroxide (50%, 37.28 g, 0.466 moles) was then charged for 1 hour, during which the batch temperature was gradually increased to 90 0 C. The batch was held at 90 0 C for 1 hour, then cooled to room temperature, adjusted to 39.6 wt. % solids with DI water, and used without any further purification.
- DI water 102 g
- sodium chloroacetate 55.39 g, 0.466 moles
- Example 2 To a reactor setup as described in Example 1 was charged DI water (120 g) and poly[ethylenimine] (24.1 g, 0.559 mole, Nippon Shokubai Epomin SP-200). The reactor contents were sparged of air with nitrogen, and sodium chloroacetate (66.4 g, 0.559 moles) was added. The batch was then heated to 75 0 C and held for 30 minutes. Aqueous sodium hydroxide (50%, 44.7 g, 0.559 moles) was then charged over a 2 hour period, during which the batch temperature was maintained at 75 0 C. The batch was held at 75 0 C for 90 minutes, then cooled to room temperature, adjusted to 38.2 wt. % solids with DI water, and used without any further purification.
- a treatment dose of 150 ppm PC 2705 at pH 4 from Example 5 (Table 2) was used to examine copper retention in the permeate after suspended solids removal using a ceramic membrane.
- Sixteen gallons of CMP slurry was adjusted to pH 4, treated with 150 ppm PC 2705, and mixed at 500 rpm for 30 seconds, then at 200 rpm for 5 minutes.
- the treated slurry was transferred into a reservoir, and then passed through a ceramic membrane at an initial pressure of 25 PSI.
- the permeate was collected at 10 minute intervals and then analyzed for copper via ICP. Results summarized on Table 3 demonstrated a quantitative recovery of copper in the permeate.
- a CMP waste slurry provided by a computer chip manufacturer, containing 24 ppm of copper was treated with lOOppm of PC 2705 and allowed to mix for 1 minute at lOOrpm. Resulting floes were allowed to settle and supernatant was decanted and adjusted to a predetermined pH using 0.1M NaOH. The supernatant aliquots was then treated with the dithiocarbamate polymeric chelant (MR 2405), and the resulting suspension was allowed to settle for 5 minutes, then filtered through a 0.45 micron filter. The isolated filtrate was then analyzed for residual copper content via ICP, the results of which are summarized in Tables 6, 7 and 8 (left column).
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- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Hydrology & Water Resources (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Water Supply & Treatment (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Medicinal Chemistry (AREA)
- Separation Of Suspended Particles By Flocculating Agents (AREA)
- Removal Of Specific Substances (AREA)
- Treatment Of Water By Ion Exchange (AREA)
Abstract
Description
Claims
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009507876A JP2009535200A (en) | 2006-04-25 | 2007-04-05 | Polymer chelating agent and coagulant for treating metal-containing wastewater |
| AU2007243032A AU2007243032B2 (en) | 2006-04-25 | 2007-04-05 | Polymeric chelant and coagulant to treat metal-containing wastewater |
| EP07760167A EP2013147A1 (en) | 2006-04-25 | 2007-04-05 | Polymeric chelant and coagulant to treat metal-containing wastewater |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/380,090 US7722841B2 (en) | 2006-04-25 | 2006-04-25 | Polymeric chelant and coagulant to treat metal-containing wastewater |
| US11/380,090 | 2006-04-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2007127587A1 true WO2007127587A1 (en) | 2007-11-08 |
Family
ID=38441465
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/US2007/066041 Ceased WO2007127587A1 (en) | 2006-04-25 | 2007-04-05 | Polymeric chelant and coagulant to treat metal-containing wastewater |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US7722841B2 (en) |
| EP (1) | EP2013147A1 (en) |
| JP (1) | JP2009535200A (en) |
| KR (1) | KR20080112321A (en) |
| CN (1) | CN101432232A (en) |
| AU (1) | AU2007243032B2 (en) |
| TW (1) | TW200808662A (en) |
| WO (1) | WO2007127587A1 (en) |
Cited By (4)
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| US9283418B2 (en) | 2010-10-15 | 2016-03-15 | Avantech, Inc. | Concentrate treatment system |
| WO2017126355A1 (en) | 2016-01-20 | 2017-07-27 | ハイモ株式会社 | Iminodiacetic acid type chelate resin and method for producing same |
| US10580542B2 (en) | 2010-10-15 | 2020-03-03 | Avantech, Inc. | Concentrate treatment system |
| US10710913B2 (en) | 2015-04-15 | 2020-07-14 | SCREEN Holdings Co., Ltd. | Waste liquid treatment method and waste liquid treatment apparatus |
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| US7709265B2 (en) * | 2005-03-24 | 2010-05-04 | Johnsondiversey, Inc. | Method and system for measuring water hardness |
| US8211389B2 (en) * | 2010-04-06 | 2012-07-03 | Nalco Company | Metal scavenging polymers and uses thereof |
| US9328003B2 (en) | 2006-09-07 | 2016-05-03 | Nalco Company | Method of heavy metal removal from water streams |
| US7964688B2 (en) * | 2007-11-30 | 2011-06-21 | Laurino Joseph P | Chelating compound, and method of use of, poly(1-octadecyl-butanedioate) and the corresponding acid, poly(1-octadecyl-butanedioic acid) |
| JP2010167551A (en) * | 2008-12-26 | 2010-08-05 | Nomura Micro Sci Co Ltd | Method for regenerating used slurry |
| US8858802B2 (en) * | 2009-12-18 | 2014-10-14 | General Electric Company | Deoiling of SAGD produce water |
| US8927637B2 (en) | 2010-04-06 | 2015-01-06 | Nalco Company | Metal scavenging polymers and uses thereof |
| JP5666196B2 (en) * | 2010-08-11 | 2015-02-12 | オルガノ株式会社 | Copper sulfate recovery method and copper sulfate recovery device |
| CN101979416B (en) * | 2010-09-09 | 2012-08-29 | 华东理工大学 | Preparation of novel acrylamide high-polymer chelating agent and application thereof to stabilization treatment of hazardous waste |
| CN102051480B (en) * | 2011-01-20 | 2012-11-07 | 辽宁大学 | Method for preparing elemental gold by utilizing synchronous absorption of persimmon tannins |
| EP2812100B1 (en) * | 2012-02-06 | 2020-05-20 | Nalco Company | Corrosion control in flue gas wet scrubber systems |
| TWI583630B (en) * | 2012-06-29 | 2017-05-21 | 奈寇公司 | Metal-scavenging polymers and uses thereof |
| WO2014065487A1 (en) * | 2012-10-23 | 2014-05-01 | 고려대학교 산학협력단 | Method for separating impurities in cmp wastewater and apparatus for separating impurities in cmp wastewater using same |
| US9499420B2 (en) | 2012-11-06 | 2016-11-22 | Thatcher Company, Inc. | Formulations and methods for removing heavy metals from waste solutions containing chelating agents |
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Citations (1)
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| WO2004074183A2 (en) * | 2003-02-18 | 2004-09-02 | Katz, Joanne, Raphael | Chemical composition for the treatment of water |
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2006
- 2006-04-25 US US11/380,090 patent/US7722841B2/en not_active Expired - Fee Related
-
2007
- 2007-04-05 AU AU2007243032A patent/AU2007243032B2/en not_active Ceased
- 2007-04-05 KR KR1020087025802A patent/KR20080112321A/en not_active Ceased
- 2007-04-05 JP JP2009507876A patent/JP2009535200A/en active Pending
- 2007-04-05 EP EP07760167A patent/EP2013147A1/en not_active Withdrawn
- 2007-04-05 WO PCT/US2007/066041 patent/WO2007127587A1/en not_active Ceased
- 2007-04-05 CN CNA2007800152074A patent/CN101432232A/en active Pending
- 2007-04-25 TW TW096114615A patent/TW200808662A/en unknown
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004074183A2 (en) * | 2003-02-18 | 2004-09-02 | Katz, Joanne, Raphael | Chemical composition for the treatment of water |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9283418B2 (en) | 2010-10-15 | 2016-03-15 | Avantech, Inc. | Concentrate treatment system |
| US10580542B2 (en) | 2010-10-15 | 2020-03-03 | Avantech, Inc. | Concentrate treatment system |
| US10710913B2 (en) | 2015-04-15 | 2020-07-14 | SCREEN Holdings Co., Ltd. | Waste liquid treatment method and waste liquid treatment apparatus |
| WO2017126355A1 (en) | 2016-01-20 | 2017-07-27 | ハイモ株式会社 | Iminodiacetic acid type chelate resin and method for producing same |
| US10364303B2 (en) | 2016-01-20 | 2019-07-30 | Hymo Corporation | Iminodiacetic acid type chelate resin and method for producing same |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2009535200A (en) | 2009-10-01 |
| KR20080112321A (en) | 2008-12-24 |
| CN101432232A (en) | 2009-05-13 |
| US7722841B2 (en) | 2010-05-25 |
| TW200808662A (en) | 2008-02-16 |
| AU2007243032B2 (en) | 2012-01-12 |
| US20070248512A1 (en) | 2007-10-25 |
| AU2007243032A1 (en) | 2007-11-08 |
| EP2013147A1 (en) | 2009-01-14 |
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