WO2007115419A3 - Couche anti-usure pour composants, procédé d'application d'une couche anti-usure pour composants et dispositif pour la mise en oeuvre d'un procédé d'application d'une couche anti-usure pour composants - Google Patents

Couche anti-usure pour composants, procédé d'application d'une couche anti-usure pour composants et dispositif pour la mise en oeuvre d'un procédé d'application d'une couche anti-usure pour composants Download PDF

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Publication number
WO2007115419A3
WO2007115419A3 PCT/CH2007/000167 CH2007000167W WO2007115419A3 WO 2007115419 A3 WO2007115419 A3 WO 2007115419A3 CH 2007000167 W CH2007000167 W CH 2007000167W WO 2007115419 A3 WO2007115419 A3 WO 2007115419A3
Authority
WO
WIPO (PCT)
Prior art keywords
wear
resistant layer
coating
parts
carrying
Prior art date
Application number
PCT/CH2007/000167
Other languages
German (de)
English (en)
Other versions
WO2007115419A9 (fr
WO2007115419A2 (fr
Inventor
Erich Bergmann
Original Assignee
Ecole D Ingenieurs De Geneve E
Erich Bergmann
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ecole D Ingenieurs De Geneve E, Erich Bergmann filed Critical Ecole D Ingenieurs De Geneve E
Priority to JP2009503387A priority Critical patent/JP2009532581A/ja
Priority to EP07720066A priority patent/EP2007922A2/fr
Publication of WO2007115419A2 publication Critical patent/WO2007115419A2/fr
Publication of WO2007115419A3 publication Critical patent/WO2007115419A3/fr
Publication of WO2007115419A9 publication Critical patent/WO2007115419A9/fr

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C23C14/0057—Reactive sputtering using reactive gases other than O2, H2O, N2, NH3 or CH4
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C23C14/025—Metallic sublayers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605—Carbon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0635—Carbides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)

Abstract

L'invention concerne une couche de matériau protégeant des composants contre toute usure, un nouveau procédé d'application d'une couche anti-usure sur des composants ainsi qu'un dispositif permettant d'appliquer cette couche de matériau sur des surfaces de composants par le procédé selon l'invention. La couche de matériau dont il est question est constituée d'un matériau polyphasé composé d'une combinaison de substances dures et d'un métalloïde libre, lequel matériau présente un faible coefficient de frottement et une résistance très élevée à l'usure par glissement. Le procédé dont il est question est un procédé de dépôt réactif de matériaux polyphasés, selon lequel les deux constituants de la combinaison sont obtenus à l'aide de sources de vapeur physiques. L'installation requise pour la mise en oeuvre du procédé comporte au moins deux sources de vapeur physiques, disposées d'une manière particulière, ainsi qu'une table rotative spécifique.
PCT/CH2007/000167 2006-04-07 2007-04-02 Couche anti-usure pour composants, procédé d'application d'une couche anti-usure pour composants et dispositif pour la mise en oeuvre d'un procédé d'application d'une couche anti-usure pour composants WO2007115419A2 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2009503387A JP2009532581A (ja) 2006-04-07 2007-04-02 コンポーネント摩耗防護層、コンポーネント摩耗防護コーティング法、およびコンポーネント摩耗防護コーティング法を実施する装置
EP07720066A EP2007922A2 (fr) 2006-04-07 2007-04-02 Couche anti-usure pour composants, procédé d'application d'une couche anti-usure pour composants et dispositif pour la mise en oeuvre d'un procédé d'application d'une couche anti-usure pour composants

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH5732006 2006-04-07
CH573/06 2006-04-07

Publications (3)

Publication Number Publication Date
WO2007115419A2 WO2007115419A2 (fr) 2007-10-18
WO2007115419A3 true WO2007115419A3 (fr) 2008-07-31
WO2007115419A9 WO2007115419A9 (fr) 2009-03-05

Family

ID=38037449

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CH2007/000167 WO2007115419A2 (fr) 2006-04-07 2007-04-02 Couche anti-usure pour composants, procédé d'application d'une couche anti-usure pour composants et dispositif pour la mise en oeuvre d'un procédé d'application d'une couche anti-usure pour composants

Country Status (3)

Country Link
EP (1) EP2007922A2 (fr)
JP (1) JP2009532581A (fr)
WO (1) WO2007115419A2 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006029415B4 (de) * 2006-06-27 2023-07-06 Schaeffler Technologies AG & Co. KG Verschleißfeste Beschichtung sowie Herstellverfahren hierfür
DE102008042896A1 (de) * 2008-10-16 2010-04-22 Federal-Mogul Burscheid Gmbh Verfahren zur Beschichtung eines Gleitelements und Gleitelement, insbesondere Kolbenring oder Zylinderlaufbuchse eines Verbrennungsmotors
DE102008062220B4 (de) * 2008-12-13 2021-04-22 Mahle International Gmbh Gleitschicht, deren Verwendung an oder mit einem Gleitelement und Verfahren zur Herstellung einer Gleitschicht
DE102012020757A1 (de) 2012-10-23 2014-05-08 Mahle International Gmbh Bauteil mit einer Beschichtung und Verfahren zu seiner Herstellung
DE102012020756A1 (de) 2012-10-23 2014-04-24 Mahle International Gmbh Bauteil mit einer Beschichtung und Verfahren zu seiner Herstellung
DE102017205028A1 (de) * 2017-03-24 2018-09-27 Robert Bosch Gmbh Verschleißschutzbeschichtetes metallisches Bauteil hieraus bestehende Bauteilanordnung
CN112481591B (zh) * 2020-11-11 2023-03-24 中国科学院宁波材料技术与工程研究所 自适应耐高低温循环低摩擦功能防护涂层及其制法与应用

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1123990A1 (fr) * 2000-02-09 2001-08-16 Hauzer Techno Coating Europe Bv Procédé de revêtement par PVD
JP2003082458A (ja) * 2001-09-10 2003-03-19 Sumitomo Electric Ind Ltd 非晶質炭素被膜の形成装置及び形成方法
WO2004061150A1 (fr) * 2002-12-27 2004-07-22 Commissariat A L'energie Atomique Procede de realisation d’un revetement anti-usure multicouche
US20040144318A1 (en) * 2001-02-02 2004-07-29 Thomas Beck Device for ceramic-type coating of a substrate
US20050170162A1 (en) * 2004-02-02 2005-08-04 Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.) Hard laminated film, method of manufacturing the same and film-forming device
WO2006027016A1 (fr) * 2004-09-08 2006-03-16 Bic-Violex Sa Procede de depot d'une couche sur le tranchant d'une lame de rasoir, et lame de rasoir

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1123990A1 (fr) * 2000-02-09 2001-08-16 Hauzer Techno Coating Europe Bv Procédé de revêtement par PVD
US20040144318A1 (en) * 2001-02-02 2004-07-29 Thomas Beck Device for ceramic-type coating of a substrate
JP2003082458A (ja) * 2001-09-10 2003-03-19 Sumitomo Electric Ind Ltd 非晶質炭素被膜の形成装置及び形成方法
WO2004061150A1 (fr) * 2002-12-27 2004-07-22 Commissariat A L'energie Atomique Procede de realisation d’un revetement anti-usure multicouche
US20050170162A1 (en) * 2004-02-02 2005-08-04 Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.) Hard laminated film, method of manufacturing the same and film-forming device
WO2006027016A1 (fr) * 2004-09-08 2006-03-16 Bic-Violex Sa Procede de depot d'une couche sur le tranchant d'une lame de rasoir, et lame de rasoir

Also Published As

Publication number Publication date
WO2007115419A9 (fr) 2009-03-05
EP2007922A2 (fr) 2008-12-31
JP2009532581A (ja) 2009-09-10
WO2007115419A2 (fr) 2007-10-18

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