WO2007115419A3 - Wear-resistant layer for parts, method for coating a part with a wear-resistant layer, and device for carrying out said method - Google Patents

Wear-resistant layer for parts, method for coating a part with a wear-resistant layer, and device for carrying out said method Download PDF

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Publication number
WO2007115419A3
WO2007115419A3 PCT/CH2007/000167 CH2007000167W WO2007115419A3 WO 2007115419 A3 WO2007115419 A3 WO 2007115419A3 CH 2007000167 W CH2007000167 W CH 2007000167W WO 2007115419 A3 WO2007115419 A3 WO 2007115419A3
Authority
WO
WIPO (PCT)
Prior art keywords
wear
resistant layer
coating
parts
carrying
Prior art date
Application number
PCT/CH2007/000167
Other languages
German (de)
French (fr)
Other versions
WO2007115419A9 (en
WO2007115419A2 (en
Inventor
Erich Bergmann
Original Assignee
Ecole D Ingenieurs De Geneve E
Erich Bergmann
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ecole D Ingenieurs De Geneve E, Erich Bergmann filed Critical Ecole D Ingenieurs De Geneve E
Priority to EP07720066A priority Critical patent/EP2007922A2/en
Priority to JP2009503387A priority patent/JP2009532581A/en
Publication of WO2007115419A2 publication Critical patent/WO2007115419A2/en
Publication of WO2007115419A3 publication Critical patent/WO2007115419A3/en
Publication of WO2007115419A9 publication Critical patent/WO2007115419A9/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C23C14/0057—Reactive sputtering using reactive gases other than O2, H2O, N2, NH3 or CH4
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C23C14/025—Metallic sublayers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605—Carbon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0635—Carbides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications

Abstract

The invention relates to a coating material which protects parts against wear, a novel method for coating parts with a wear-resistant layer, and a device that allows said coating material to be applied to part surfaces by means of the inventive method. The coating material is embodied as a multiphase material that is composed of a hard material compound and a free nonmetallic element which is provided with a low friction coefficient and very high resistance against wear caused by sliding friction. In the inventive method, multiphase materials are reactively deposited, the two components of the compound being produced with the aid of physical vapor sources. The system required for carrying out said method comprises at least two physical vapor sources that are arranged in a special manner as well as a special turntable.
PCT/CH2007/000167 2006-04-07 2007-04-02 Wear-resistant layer for parts, method for coating a part with a wear-resistant layer, and device for carrying out said method WO2007115419A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP07720066A EP2007922A2 (en) 2006-04-07 2007-04-02 Wear-resistant layer for parts, method for coating a part with a wear-resistant layer, and device for carrying out said method
JP2009503387A JP2009532581A (en) 2006-04-07 2007-04-02 Component wear protection layer, component wear protection coating method, and apparatus for performing component wear protection coating method

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH573/06 2006-04-07
CH5732006 2006-04-07

Publications (3)

Publication Number Publication Date
WO2007115419A2 WO2007115419A2 (en) 2007-10-18
WO2007115419A3 true WO2007115419A3 (en) 2008-07-31
WO2007115419A9 WO2007115419A9 (en) 2009-03-05

Family

ID=38037449

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CH2007/000167 WO2007115419A2 (en) 2006-04-07 2007-04-02 Wear-resistant layer for parts, method for coating a part with a wear-resistant layer, and device for carrying out said method

Country Status (3)

Country Link
EP (1) EP2007922A2 (en)
JP (1) JP2009532581A (en)
WO (1) WO2007115419A2 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006029415B4 (en) * 2006-06-27 2023-07-06 Schaeffler Technologies AG & Co. KG Wear-resistant coating and manufacturing process therefor
DE102008042896A1 (en) * 2008-10-16 2010-04-22 Federal-Mogul Burscheid Gmbh Method for coating a sliding element and sliding element, in particular piston ring or cylinder liner of an internal combustion engine
DE102008062220B4 (en) * 2008-12-13 2021-04-22 Mahle International Gmbh Sliding layer, its use on or with a sliding element and method for producing a sliding layer
DE102012020756A1 (en) 2012-10-23 2014-04-24 Mahle International Gmbh Component with a coating and process for its preparation
DE102012020757A1 (en) * 2012-10-23 2014-05-08 Mahle International Gmbh Component with a coating and process for its preparation
DE102017205028A1 (en) * 2017-03-24 2018-09-27 Robert Bosch Gmbh Wear-resistant coated metallic component consisting of this component assembly
CN112481591B (en) * 2020-11-11 2023-03-24 中国科学院宁波材料技术与工程研究所 Self-adaptive high-low temperature cycle resistant low-friction functional protective coating and preparation method and application thereof

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1123990A1 (en) * 2000-02-09 2001-08-16 Hauzer Techno Coating Europe Bv Method for PVD coating
JP2003082458A (en) * 2001-09-10 2003-03-19 Sumitomo Electric Ind Ltd Apparatus and method for forming amorphous carbon film
WO2004061150A1 (en) * 2002-12-27 2004-07-22 Commissariat A L'energie Atomique Method for the production of a multilayer wear-resistant coating
US20040144318A1 (en) * 2001-02-02 2004-07-29 Thomas Beck Device for ceramic-type coating of a substrate
US20050170162A1 (en) * 2004-02-02 2005-08-04 Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.) Hard laminated film, method of manufacturing the same and film-forming device
WO2006027016A1 (en) * 2004-09-08 2006-03-16 Bic-Violex Sa Method for deposition of a layer on a razor blade edge and razor blade

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1123990A1 (en) * 2000-02-09 2001-08-16 Hauzer Techno Coating Europe Bv Method for PVD coating
US20040144318A1 (en) * 2001-02-02 2004-07-29 Thomas Beck Device for ceramic-type coating of a substrate
JP2003082458A (en) * 2001-09-10 2003-03-19 Sumitomo Electric Ind Ltd Apparatus and method for forming amorphous carbon film
WO2004061150A1 (en) * 2002-12-27 2004-07-22 Commissariat A L'energie Atomique Method for the production of a multilayer wear-resistant coating
US20050170162A1 (en) * 2004-02-02 2005-08-04 Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.) Hard laminated film, method of manufacturing the same and film-forming device
WO2006027016A1 (en) * 2004-09-08 2006-03-16 Bic-Violex Sa Method for deposition of a layer on a razor blade edge and razor blade

Also Published As

Publication number Publication date
WO2007115419A9 (en) 2009-03-05
JP2009532581A (en) 2009-09-10
EP2007922A2 (en) 2008-12-31
WO2007115419A2 (en) 2007-10-18

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