WO2007089061A1 - Plasma generating apparatus - Google Patents

Plasma generating apparatus Download PDF

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Publication number
WO2007089061A1
WO2007089061A1 PCT/KR2006/002805 KR2006002805W WO2007089061A1 WO 2007089061 A1 WO2007089061 A1 WO 2007089061A1 KR 2006002805 W KR2006002805 W KR 2006002805W WO 2007089061 A1 WO2007089061 A1 WO 2007089061A1
Authority
WO
WIPO (PCT)
Prior art keywords
electrode
dielectric
plasma
space
generating apparatus
Prior art date
Application number
PCT/KR2006/002805
Other languages
French (fr)
Inventor
Seung-Lok Park
Seung-Ik Jeon
Original Assignee
Ls Cable Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ls Cable Ltd. filed Critical Ls Cable Ltd.
Publication of WO2007089061A1 publication Critical patent/WO2007089061A1/en

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2431—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes using cylindrical electrodes, e.g. rotary drums

Definitions

  • the present invention relates to a plasma generating apparatus, and more particularly to a plasma generating apparatus for generating plasma using a simple structure thereof while preventing the generation of high temperature heat by electric discharge.
  • a dielectric barrier plasma discharger has been widely used as an atmospheric plasma discharger.
  • high voltage electrodes are installed on opposite sides with reference to a dielectric barrier of an electrical insulator, and a discharging space is formed therebetween, so that source gases are supplied to the discharging space between the electrodes and electric discharge occurs due to high voltage applied to the electrodes, thereby generating plasma.
  • the conventional plasma discharger has a problem in that plasma is decomposed by high temperature heat occurring in the electrodes and the dielectric barrier.
  • an object of the present invention is to provide a plasma generating apparatus for generating plasma using a simple structure thereof while easily cooling electrodes.
  • a plasma generating apparatus comprising: a first cylindrical electrode having a hollow therein; a dielectric provided on an inner face of the first electrode; a second electrode spaced to a distance from an inner face of the dielectric with a spacer interposed therebetween; a gas supply unit supplying source gas to the space between the second electrode and the dielectric; a voltage applying unit applying a voltage to the first and second electrodes; a plasma discharging port discharging plasma generated in the space between the second electrode and the dielectric to the outside; and covers shielding both ends of the first electrode to prevent the source gas from leaking.
  • the second electrode may include an electro-conductive liquid and a body having a hollow filling therein the conductive liquid, and the voltage applying unit may apply a voltage to the conductive liquid.
  • the plasma generating apparatus may further include a circulating cooler cooling the conductive liquid.
  • the gas supply unit may include a supply pipe provided on upper side of the apparatus along a longitudinal direction of the first electrode and filled therein with the source gas, and a plurality of gas supply ports, each having one end connected to the supply pipe and the other end connected to the space between the second electrode and the dielectric through the first electrode and the dielectric so as to supply the source gas filled in the supply pipe to the space between the second electrode and the dielectric.
  • FIG. 1 is a perspective view of a plasma generating apparatus according to a preferred embodiment of the present invention.
  • FIG. 2 is a sectional view taken along lines 11—11 ' in FIG. 1.
  • FIG. 1 is a perspective view of a plasma generating apparatus 100 according to a preferred embodiment of the present invention
  • FIG. 2 is a sectional view taken along lines H-II' in FIG. 1.
  • the plasma generating apparatus 100 includes a first cylindrical electrode 10 having a hollow.
  • the first electrode 10 is made of an electro-conductive material, and serves as an electrode to which a voltage is applied and a case as well in which various constitutional elements are installed.
  • a dielectric 20 is provided on an inner face of the hollow of the first electrode 10.
  • the dielectric 20 serves to prevent the generation of arc between the first electrode 10 and a second electrode 30 to be described below.
  • the second electrode 30 is provided in the hollow of the first electrode 10 to which the dielectric 20 is attached.
  • the second electrode 30 is spaced to a distance from the inner face of the dielectric 20 by a plurality of spacers 22 each having a predetermined length. The distance between the second electrode 30 and the dielectric 20 defines the space where gas is supplied by the gas supply unit 40 and electric discharge occurs.
  • the second electrode 30 includes a cylindrical body 32 having a hollow 34, in which an electro-conductive liquid 36 is filled, serving as an electrode. That is, voltage is not directly applied to the body 32 of the second electrode 30, but applied to the conductive liquid 36 filled in the body 32, so that the conductive liquid 36 functions as an electrode.
  • the conductive liquid 36 may be tap water, fluid liquid containing antifreeze, or preferably, sodium chloride solution.
  • the second electrode 30 is positioned in the first cylindrical electrode 10 so as to be spaced to a distance from the first electrode, so that a structure is provided that the electric field does not leaked between the first and second electrodes 10 and 30 and is concentrated on the space between the first and second electrodes 10 and 30. Due to such an electric field concentration structure, the voltage applied to the first and second electrodes 10 and 30 can be reduced so that heat occurring in the first and second electrodes 10 and 30 can be also lowered.
  • the hollow 34 of the second electrode 30 communicates with a circulating cooler 50 through a circulating line 52.
  • the heated conductive liquid 36 in the hollow 34 of the second electrode 30 is heated by high voltage, the heated conductive liquid 36 is introduced into the circulating cooler 50 through the circulating line 52 and is cooled, and the cooled conductive liquid 36 in turn is supplied to the hollow 34 of the second electrode 30.
  • the cooling of the circulating cooler 50 the conductive liquid 36 of the second electrode 30 is prevented from being heated above a certain temperature.
  • the gas supply unit 40 is installed to supply source gas to the space between the second electrode 30 and the dielectric 20.
  • the gas supply unit 40 includes a supply pipe 42 in which the source gas is filled, and a plurality of gas supply ports 44 connected between the supply pipe 42 and the inside of the first electrode 10.
  • the supply pipe 42 lengthily extends in a longitudinal direction of the first electrode 10, and contains therein the source gas.
  • the gas supply port 44 has two ends, one end being connected to the supply pipe 42 and the other end being connected to the space between the second electrode 30 and the dielectric 20 through the first electrode 10 and the dielectric 20.
  • the source gas filled in the supply pipe 42 is supplied to the space between the second electrode 30 and the dielectric 20 through the gas supply ports 44.
  • the open opposite ends of the first electrode 10 are shielded by covers 12 and 14.
  • a voltage applying unit 60 applies a voltage to the first and second electrodes 10 and 30.
  • the voltage applying unit 60 has two lines, a first line 64 being connected to the first electrode 10 and a second line 64 being connected to the inside of the circulating cooler 50.
  • the voltage applying unit 60 applies the voltage to the conductive liquid 36 to be cooled by the circulating cooler 50 and the first electrode 10.
  • electric discharge occurs in the space between the second electrode 30 and the dielectric 20, and such discharge and the supplied gas generates plasma.
  • the plasma generated is discharged outside via a plasma discharging port 70 connected to the lower portion of the first electrode 10 so as to process the surface of a target object (not shown) or the like.
  • the opposite ends of the first electrode 10 are shielded by the covers 12 and 14, and the conductive liquid 36 is supplied in the hollow 34 of the body 32 constituting the second electrode 30.
  • the source gas is filled in the supply pipe 42 of the gas supply unit 40, and is supplied to the space between the dielectric 20 and the second electrode 30 through the gas supply ports 44.
  • a voltage is applied to the first electrode 10 and the conductive liquid 36 of the second electrode 30, causing electric discharge in the space between the dielectric 20 and the second electrode 30.
  • Such discharge and the supplied gas generate plasma in the space between the dielectric 20 and the second electrode 30, and the plasma is discharged outside through the plasma discharging port 70.
  • the conductive liquid 36 heated by applied voltage is introduced into the circulating cooler 50 through the circulating line 52 and is cooled, and the cooled conductive liquid 36 in turn is supplied to the hollow 34 of the second electrode 30.
  • the heated conductive liquid is cooled by the circulating cooler to easily cool the heated electrodes, thereby greatly extending the lifetime of the electrodes and the dielectric.
  • the electric field is concentrated by the electric field concentration structure of the first and second electrodes, thereby generating sufficient plasma even the lower voltage as compared to the prior plasma generating apparatus.
  • the plasma generating apparatus of the present invention is easily manufactured with low cost by the simple structure as compared to the prior apparatus.

Abstract

A plasma generating apparatus is provided. The apparatus includes a first cylindrical electrode having a hollow therein, a dielectric provided on an inner face of the first electrode, a second cylindrical electrode spaced in the hollow of the first electrode to a distance from an inner face of the dielectric with a plurality of spacers, a gas supply unit supplying source gas to the space between the second electrode and the dielectric, a voltage applying unit applying a voltage to the first and second electrodes, a plasma discharging port discharging plasma generated in the space between the second electrode and the dielectric to the outside, and covers shielding both ends of the first electrode to prevent the source gas from leaking, so that the electrodes are easily cooled, and the plasma is generated by the simple structure thereof.

Description

[DESCRIPTION] [Invention Title]
PLASMA GENERATING APPARATUS [Technical Field]
The present invention relates to a plasma generating apparatus, and more particularly to a plasma generating apparatus for generating plasma using a simple structure thereof while preventing the generation of high temperature heat by electric discharge. [Background Art]
Generally, a dielectric barrier plasma discharger has been widely used as an atmospheric plasma discharger. In the dielectric barrier plasma discharger, high voltage electrodes are installed on opposite sides with reference to a dielectric barrier of an electrical insulator, and a discharging space is formed therebetween, so that source gases are supplied to the discharging space between the electrodes and electric discharge occurs due to high voltage applied to the electrodes, thereby generating plasma.
However, such a conventional plasma discharger uses the conductive electrodes, that high temperature heat occurs due to electric discharge, thereby causing a problem of reduction in lifetime of the electrodes and the dielectric barrier.
In addition, the conventional plasma discharger has a problem in that plasma is decomposed by high temperature heat occurring in the electrodes and the dielectric barrier. [Disclosure] [Technical Problem]
Accordingly, the present invention has been made to solve the above- mentioned problems occurring in the prior art, and an object of the present invention is to provide a plasma generating apparatus for generating plasma using a simple structure thereof while easily cooling electrodes. [Technical Solution]
In order to accomplish the above object, there -is provided a plasma generating apparatus comprising: a first cylindrical electrode having a hollow therein; a dielectric provided on an inner face of the first electrode; a second electrode spaced to a distance from an inner face of the dielectric with a spacer interposed therebetween; a gas supply unit supplying source gas to the space between the second electrode and the dielectric; a voltage applying unit applying a voltage to the first and second electrodes; a plasma discharging port discharging plasma generated in the space between the second electrode and the dielectric to the outside; and covers shielding both ends of the first electrode to prevent the source gas from leaking.
Herein, the second electrode may include an electro-conductive liquid and a body having a hollow filling therein the conductive liquid, and the voltage applying unit may apply a voltage to the conductive liquid.
The plasma generating apparatus may further include a circulating cooler cooling the conductive liquid.
The gas supply unit may include a supply pipe provided on upper side of the apparatus along a longitudinal direction of the first electrode and filled therein with the source gas, and a plurality of gas supply ports, each having one end connected to the supply pipe and the other end connected to the space between the second electrode and the dielectric through the first electrode and the dielectric so as to supply the source gas filled in the supply pipe to the space between the second electrode and the dielectric. [Description of Drawings]
The above and other objects, features and advantages of the present invention will be more apparent from the following detailed description taken in conjunction with the accompanying drawings, in which:
FIG. 1 is a perspective view of a plasma generating apparatus according to a preferred embodiment of the present invention; and
FIG. 2 is a sectional view taken along lines 11—11 ' in FIG. 1. [Mode for Invention]
Hereinafter, a preferred embodiment of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a perspective view of a plasma generating apparatus 100 according to a preferred embodiment of the present invention, and FIG. 2 is a sectional view taken along lines H-II' in FIG. 1.
Referring to FIGS. 1 and 2, the plasma generating apparatus 100 includes a first cylindrical electrode 10 having a hollow. The first electrode 10 is made of an electro-conductive material, and serves as an electrode to which a voltage is applied and a case as well in which various constitutional elements are installed.
A dielectric 20 is provided on an inner face of the hollow of the first electrode 10. The dielectric 20 serves to prevent the generation of arc between the first electrode 10 and a second electrode 30 to be described below.
The second electrode 30 is provided in the hollow of the first electrode 10 to which the dielectric 20 is attached. The second electrode 30 is spaced to a distance from the inner face of the dielectric 20 by a plurality of spacers 22 each having a predetermined length. The distance between the second electrode 30 and the dielectric 20 defines the space where gas is supplied by the gas supply unit 40 and electric discharge occurs.
The second electrode 30 includes a cylindrical body 32 having a hollow 34, in which an electro-conductive liquid 36 is filled, serving as an electrode. That is, voltage is not directly applied to the body 32 of the second electrode 30, but applied to the conductive liquid 36 filled in the body 32, so that the conductive liquid 36 functions as an electrode. The conductive liquid 36 may be tap water, fluid liquid containing antifreeze, or preferably, sodium chloride solution.
Like this, the second electrode 30 is positioned in the first cylindrical electrode 10 so as to be spaced to a distance from the first electrode, so that a structure is provided that the electric field does not leaked between the first and second electrodes 10 and 30 and is concentrated on the space between the first and second electrodes 10 and 30. Due to such an electric field concentration structure, the voltage applied to the first and second electrodes 10 and 30 can be reduced so that heat occurring in the first and second electrodes 10 and 30 can be also lowered.
Meanwhile, the hollow 34 of the second electrode 30 communicates with a circulating cooler 50 through a circulating line 52. When the conductive liquid 36 in the hollow 34 of the second electrode 30 is heated by high voltage, the heated conductive liquid 36 is introduced into the circulating cooler 50 through the circulating line 52 and is cooled, and the cooled conductive liquid 36 in turn is supplied to the hollow 34 of the second electrode 30. By the cooling of the circulating cooler 50, the conductive liquid 36 of the second electrode 30 is prevented from being heated above a certain temperature.
Upward the first electrode 10, the gas supply unit 40 is installed to supply source gas to the space between the second electrode 30 and the dielectric 20. The gas supply unit 40 includes a supply pipe 42 in which the source gas is filled, and a plurality of gas supply ports 44 connected between the supply pipe 42 and the inside of the first electrode 10. The supply pipe 42 lengthily extends in a longitudinal direction of the first electrode 10, and contains therein the source gas. The gas supply port 44 has two ends, one end being connected to the supply pipe 42 and the other end being connected to the space between the second electrode 30 and the dielectric 20 through the first electrode 10 and the dielectric 20. Thus, the source gas filled in the supply pipe 42 is supplied to the space between the second electrode 30 and the dielectric 20 through the gas supply ports 44. In order to prevent the supplied gas from leaking, the open opposite ends of the first electrode 10 are shielded by covers 12 and 14.
Meanwhile, a voltage applying unit 60 applies a voltage to the first and second electrodes 10 and 30. The voltage applying unit 60 has two lines, a first line 64 being connected to the first electrode 10 and a second line 64 being connected to the inside of the circulating cooler 50. Thus, the voltage applying unit 60 applies the voltage to the conductive liquid 36 to be cooled by the circulating cooler 50 and the first electrode 10. When the voltage is applied to the first electrode 10 and the conductive liquid 36, electric discharge occurs in the space between the second electrode 30 and the dielectric 20, and such discharge and the supplied gas generates plasma.
The plasma generated is discharged outside via a plasma discharging port 70 connected to the lower portion of the first electrode 10 so as to process the surface of a target object (not shown) or the like.
Description will now be made of the operation procedure of the plasma generating apparatus of the invention as constructed above.
First, the opposite ends of the first electrode 10 are shielded by the covers 12 and 14, and the conductive liquid 36 is supplied in the hollow 34 of the body 32 constituting the second electrode 30.
Then, the source gas is filled in the supply pipe 42 of the gas supply unit 40, and is supplied to the space between the dielectric 20 and the second electrode 30 through the gas supply ports 44.
After supplying the source gas, a voltage is applied to the first electrode 10 and the conductive liquid 36 of the second electrode 30, causing electric discharge in the space between the dielectric 20 and the second electrode 30. Such discharge and the supplied gas generate plasma in the space between the dielectric 20 and the second electrode 30, and the plasma is discharged outside through the plasma discharging port 70.
Meanwhile, the conductive liquid 36 heated by applied voltage is introduced into the circulating cooler 50 through the circulating line 52 and is cooled, and the cooled conductive liquid 36 in turn is supplied to the hollow 34 of the second electrode 30.
Although preferred embodiments of the present invention have been described for illustrative purposes, those skilled in the art will appreciate that various modifications, additions and substitutions are possible, without departing from the scope and spirit of the invention as disclosed in the accompanying claims. [Industrial Applicability]
As set forth before, according to the plasma generating apparatus of the present invention, the heated conductive liquid is cooled by the circulating cooler to easily cool the heated electrodes, thereby greatly extending the lifetime of the electrodes and the dielectric.
Further, according to the present invention, the electric field is concentrated by the electric field concentration structure of the first and second electrodes, thereby generating sufficient plasma even the lower voltage as compared to the prior plasma generating apparatus.
Furthermore, the plasma generating apparatus of the present invention is easily manufactured with low cost by the simple structure as compared to the prior apparatus.

Claims

[CLAIMS] [Claim 1]
A plasma generating apparatus comprising: a first cylindrical electrode having a hollow therein; a dielectric provided on an inner face of the first electrode; a second cylindrical electrode spaced in the hollow of the first electrode to a distance from an inner face of the dielectric with a plurality of spacers; a gas supply unit supplying source gas to the space between the second electrode and the dielectric; a voltage applying unit applying a voltage to the first and second electrodes; a plasma discharging port discharging plasma generated in the space between the second electrode and the dielectric to the outside; and covers shielding both ends of the first electrode to prevent the source gas from leaking. [Claim 2]
The plasma generating apparatus as claimed in claim 1, wherein the second electrode includes: an electro-conductive liquid; and a body having a hollow filling therein the conductive liquid, and wherein the voltage applying unit applies a voltage to the conductive liquid. [Claim 3]
The plasma generating apparatus as claimed in claim 2, further comprising a circulating cooler cooling the conductive liquid. [Claim 4]
The plasma generating apparatus as claimed in claim 1, wherein the gas supply unit includes: a supply pipe provided on upper side of the apparatus along a longitudinal direction of the first electrode and filled therein with the source gas; and a plurality of gas supply ports, each having one end connected to the supply pipe and the other end connected to the space between the second electrode and the dielectric through the first electrode and the dielectric so as to supply the source gas filled in the supply pipe to the space between the second electrode and the dielectric.
PCT/KR2006/002805 2006-02-03 2006-07-18 Plasma generating apparatus WO2007089061A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2006-0010704 2006-02-03
KR20060010704 2006-02-03

Publications (1)

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WO2007089061A1 true WO2007089061A1 (en) 2007-08-09

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104411083A (en) * 2014-12-17 2015-03-11 河北大学 Device and method for producing continuous low-temperature large-section atmospheric pressure plasma plumes
WO2015073198A1 (en) * 2013-11-18 2015-05-21 Applied Materials, Inc. Plasma generation source employing dielectric conduit assemblies having removable interfaces and related assemblies and methods
US20190059149A1 (en) * 2017-08-18 2019-02-21 Montgomery William Childs Electrode assembly for plasma generation

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4960569A (en) * 1988-11-14 1990-10-02 Alten Corporation Corona discharge ozonator with cooled flow path
US5354541A (en) * 1993-06-09 1994-10-11 Louis Sali Ozone generator

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4960569A (en) * 1988-11-14 1990-10-02 Alten Corporation Corona discharge ozonator with cooled flow path
US5354541A (en) * 1993-06-09 1994-10-11 Louis Sali Ozone generator

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
ELIASSON B. AND KOGELSCHATZ U.: "Modeling and applications of silent discharge plasmas", PLASMA SCIENCE, IEEE TRANSACTIONS, vol. 19, no. 2, April 1991 (1991-04-01), pages 309 - 323 *
LAROUSSI M. ET AL.: "Generation of an atmospheric pressure non equilibrium diffuse discharge in air by means of a water electrode", POWER MODULATOR SYMPOSIUM, 2002 AND 2002 HIGH-VOLTAGE WORKSHOP. CONFERENCE RECORD OF THE TWENTY-FIFTH INTERNATIONAL, 30 June 2002 (2002-06-30) - 3 July 2002 (2002-07-03), pages 556 - 558, XP010636709 *

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015073198A1 (en) * 2013-11-18 2015-05-21 Applied Materials, Inc. Plasma generation source employing dielectric conduit assemblies having removable interfaces and related assemblies and methods
CN105746000A (en) * 2013-11-18 2016-07-06 应用材料公司 Plasma generation source employing dielectric conduit assemblies having removable interfaces and related assemblies and methods
JP2017503307A (en) * 2013-11-18 2017-01-26 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ Plasma source and associated assembly and method using a dielectric conduit assembly having a detachable interface
CN104411083A (en) * 2014-12-17 2015-03-11 河北大学 Device and method for producing continuous low-temperature large-section atmospheric pressure plasma plumes
CN104411083B (en) * 2014-12-17 2017-01-18 河北大学 Device and method for producing continuous low-temperature large-section atmospheric pressure plasma plumes
US20190059149A1 (en) * 2017-08-18 2019-02-21 Montgomery William Childs Electrode assembly for plasma generation
US11006512B2 (en) * 2017-08-18 2021-05-11 Aureon Energy Ltd. Electrode assembly for plasma generation

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