WO2007088948A1 - Electronic component and method for manufacturing same - Google Patents

Electronic component and method for manufacturing same Download PDF

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Publication number
WO2007088948A1
WO2007088948A1 PCT/JP2007/051735 JP2007051735W WO2007088948A1 WO 2007088948 A1 WO2007088948 A1 WO 2007088948A1 JP 2007051735 W JP2007051735 W JP 2007051735W WO 2007088948 A1 WO2007088948 A1 WO 2007088948A1
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WO
WIPO (PCT)
Prior art keywords
resistance
dots
ink
electronic component
dot
Prior art date
Application number
PCT/JP2007/051735
Other languages
French (fr)
Japanese (ja)
Inventor
Seiji Goto
Masahiro Kimura
Original Assignee
Murata Manufacturing Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co., Ltd. filed Critical Murata Manufacturing Co., Ltd.
Priority to EP07713763.6A priority Critical patent/EP1983530A4/en
Priority to JP2007556921A priority patent/JP4183020B2/en
Priority to CN2007800043503A priority patent/CN101379572B/en
Publication of WO2007088948A1 publication Critical patent/WO2007088948A1/en

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01CRESISTORS
    • H01C17/00Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/065Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thick film techniques, e.g. serigraphy
    • H01C17/06506Precursor compositions therefor, e.g. pastes, inks, glass frits
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01CRESISTORS
    • H01C7/00Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/003Thick film resistors

Definitions

  • the present invention relates to an electronic component and a method for manufacturing the same, and more particularly to an electronic component having a resistance element and a method for manufacturing the same.
  • a resistance element such as a resistance film having a desired resistance value with respect to a resistor or the like
  • screen printing or an ink jet method is known.
  • Patent Document 2 discloses forming a resistor on an unfired ceramic sheet by attaching one type of resistive ink by an ink jet method.
  • Patent Document 1 JP-A-60-30101
  • Patent Document 2 JP-A-10-189305
  • the present invention is intended to provide an electronic component and a method for manufacturing the same, which can efficiently manufacture resistance elements having various resistance values in view of the actual situation.
  • the present invention provides an electronic component configured as follows.
  • the electronic component is of a type including a pair of terminals facing each other and a resistance element arranged between the pair of terminals.
  • the resistance element includes at least two resistance parts (hereinafter referred to as “first resistance part” and “second resistance part”) arranged in succession.
  • the first resistance portion includes a plurality of first dots arranged to overlap each other.
  • the second resistance portion includes a plurality of second dots having different electrical resistances from the first dots arranged to overlap each other.
  • the first dots and the second dots are formed by, for example, using an ink jet method and ejecting fine particles of resistive ink having different compositions to adhere to the substrate. It is also possible to use a laser printing method to form fine particles of resistance toner having different compositions by adhering to a substrate.
  • the resistance element is divided into at least two first resistance portions and second resistance portions, and each resistance portion includes a plurality of dots that overlap each other.
  • the first resistor portion and the second resistor portion are arranged in series between the terminals. Yes.
  • the resistance part having a relatively high resistance value is partially removed to roughly adjust the resistance value, and then the resistance value is relatively adjusted. It is possible to finely adjust the resistance value by partially removing the lower resistance portion.
  • the first resistance portion and the second resistance portion are arranged in parallel between the terminals.
  • the term “parallel” may be used when the first resistance portion and the second resistance portion are in contact with each other or when they are apart from each other. When they are in contact, they may be stacked one above the other. Further, in the state where they are stacked one above the other, the second resistance portion may be formed in a floating island shape in the first resistance portion.
  • the resistance part having a relatively high resistance value is partially removed to roughly adjust the resistance value, and then the resistance value is relatively adjusted. It is possible to finely adjust the resistance value by partially removing the lower resistance portion.
  • At least one of the first resistance portion and the second resistance portion is a metal.
  • Metals have various resistance values, such as those with a fairly high resistance value such as Ni-Cr, those with a slightly high resistance value such as Pd, and those with a low resistance value such as Ag. Therefore, it is possible to easily form resistance elements having various resistance values depending on the application.
  • the present invention provides a method of manufacturing an electronic component configured as follows.
  • a method for manufacturing an electronic component includes: (1) using a first resistance ink containing a component that is a part of a resistance element in a first region of a base material; A first step of disposing dots, and (2) the first resistive ink including a component that is another part of the resistance element in a second region adjacent to the first region. A second step of disposing a plurality of second dots overlapping each other by an inkjet method using a second resistive ink having a different composition; (3) the first dots and the second in the first region; And a third step of heat-treating the second dot in the region to form the resistance element.
  • the first dot and the second dot are the first resistance ink and the second dot, respectively. It is formed by ejecting fine ink droplets of the resistance ink 2 to adhere to the substrate.
  • the resistance element is divided into at least two first regions and second regions, and each region includes a plurality of dots that overlap each other.
  • the second step may be started before the first step is finished.
  • the third step may include a plurality of steps having different heat treatment temperatures as the drying step and the firing step. Of these, the drying step may be started before the first step or the second step is completed.
  • the screen plate is not required for forming the resistance element, the management cost of producing the screen plate is unnecessary, and the production period of the screen plate is also eliminated.
  • resistance elements having various resistance values can be formed.
  • a dot drying step for drying the first dots is provided before the second step.
  • This dot drying step may be provided independently between the first step and the second step, but is preferably performed in parallel with the first step.
  • the dot drying step may be performed by setting the base material to a temperature higher than room temperature or by performing the first step in a dry atmosphere.
  • the first dot placed on the base material is dried by performing the first step in a dry atmosphere or the force that brings the base material to a temperature higher than room temperature (for example, 25 ° C or higher). Since the time can be shortened, it becomes difficult to mix two types of resistance inks even if they are overcoated or arranged, and it is easy to obtain a desired resistance value.
  • the present invention provides a method for manufacturing an electronic component configured as follows.
  • the method of manufacturing an electronic component includes (1) a first step of arranging a plurality of first dots by an ink jet method using a first resistance ink containing a component serving as a resistance element on a substrate. (2) A second resistance ink containing a component that becomes the resistance element and having a composition different from that of the first resistance ink is used, and a plurality of second dots are overlapped with the first dot by an inkjet method. A second step of forming the mixing portion by mixing the first resistance ink of the first dot and the second resistance ink of the second dot; and (3) And a third step of heat-treating the mixing portion to form the resistance element. [0027] In the above method, the second step may be started before the first step is completed.
  • the temperature is set to room temperature or lower than room temperature.
  • the resistance of the substrate can be reduced by delaying the drying of the first dot ink and lengthening the ink mixing time by setting the substrate to room temperature or lower than room temperature (for example, less than 25 ° C).
  • room temperature or lower than room temperature for example, less than 25 ° C.
  • the variation in the resistance value of the film can be reduced, and a stable resistance value can be obtained.
  • resistance elements having various resistance values can be efficiently manufactured.
  • FIG. 1 is an overall configuration diagram of an inkjet printer used for printing. (Example 1)
  • FIG. 2 is a schematic diagram for explaining a print pattern. (Example 1)
  • FIG. 3 is a schematic diagram for explaining a print pattern. (Example 1)
  • FIG. 4 is a schematic diagram for explaining a printing method. (Example 2)
  • FIG. 5 is a schematic diagram for explaining a print pattern. (Example 2)
  • FIG. 6 is a schematic diagram for explaining a print pattern. (Example 3)
  • Example 1 will be described with reference to Figs.
  • an inkjet printer 10 used for printing a pattern to be a resistive film (resistive element) will be described with reference to the schematic diagram of FIG.
  • the inkjet printer 10 generally includes a moving table 12 on which a base material 8 is placed, a plurality (for example, three) of inkjet heads 14, 16, 18, and a control unit 11 that controls the overall apparatus. Is provided.
  • the moving table 12 is driven in the X direction indicated by reference numeral 23 by the motor 22, is driven in the Y direction indicated by reference numeral 25 by the motor 24, and is moved in the ⁇ direction (in the X and Y axes) indicated by reference numeral 27 by the motor 26. Driven around the right Z axis).
  • the driving of the motors 22, 24 and 26 of the moving table 12 is controlled by the control unit 11.
  • the moving table 12 may be moved in directions other than X, ⁇ , and ⁇ , or conversely, may be moved only in any one or two directions of X, ⁇ , and ⁇ .
  • the moving table 12 may be provided with a vacuum suction hole for adsorbing the base material 8 or a heater for heating and keeping the base material 2 as necessary.
  • the inkjet heads 14, 16, and 18 are respectively arranged at fixed positions above the moving table 12. Ink jet heads 14, 16, and 18 are supplied with resistance inks 34, 36, and 38 force tanks with different compositions, respectively. Inkjet heads 14, 16, and 18 are formed with one or more minute holes, and these holes are also used to transfer ink droplets 35, 37, and 39, which are fine particles of resistance ink 34, 36, and 38, to a moving table. Inject towards 12 The ink jet heads 14, 16, and 18 change the size (the amount of ink droplets) and the number of ink droplets 35, 37, and 39 to be ejected under the control of the control unit 11.
  • the resistance inks 34, 36, 38 include a resistance material such as ruthenium oxide, glass, carbon, and metal particles.
  • a resistance material such as ruthenium oxide, glass, carbon, and metal particles.
  • the resistance material included in the resistance inks 34, 36, and 38 one having an arbitrary resistance value can be used. For example, with metal particles, the resistance is quite high, like Ni-Cr.
  • the base material 8 placed on the movable table 12 is a workpiece such as a substrate or a ceramic green sheet for producing an electronic component.
  • control unit 11 for example, a personal computer is used.
  • the control unit 11 drives the ink jet heads 14, 16, and 18 in synchronization with the movement of the moving table 12 according to a predetermined program based on the input parameters of the keyboard force (not shown) and the ink droplets 3 5, 37, 39 is discharged.
  • a predetermined pattern is printed on the substrate 8 placed on the moving table 12 with the resistance inks 34, 36, and 38.
  • the ink jet heads 14, 16, 18 in which a plurality of holes for ejecting the ink droplets 35, 37, 39 are arranged in a row are arranged so that the rows of holes are parallel to each other.
  • the moving table 12 is driven in the direction in which the inkjet heads 14, 16, 18 are arranged (perpendicular to the row of holes) or in an oblique direction.
  • printing can be performed almost simultaneously using the resistance inks 34, 36, and 38, and the pattern serving as the resistance element can be efficiently formed.
  • the inkjet heads 14, 16, 18 are arranged at fixed positions, and instead of moving the substrate 8, the inkjet heads 14, 16, 18 may be moved while the substrate 8 is fixed. Both the substrate 8 and the ink jet heads 14, 16, 18 may be moved.
  • a pattern to be a resistive film is divided into a plurality of printing process areas (regions) in the plane direction, and each printing process area is roughly abbreviated using different resistance inks using a plurality of inkjet heads. Paint at the same time. From this, it is possible to realize a resistance film having a resistance value different from that of the resistance film formed of one type of resistance ink. Resistive films with different resistance values can be realized by changing the planar shape and cross-sectional shape of the pattern to be the resistive film.
  • the substrate 8 is heated to a temperature higher than room temperature (for example, 25 ° C or higher), and printing is performed in an atmosphere that is easily dried, such as dry air.
  • a heater is provided on the moving table 12 and the base material 8 is heated and kept warm.
  • the substrate 8 may be heated to a temperature higher than room temperature by air conditioning during printing.
  • print part It may be covered with a cover, and dry air with a predetermined humidity may be continuously supplied to the cover to maintain an atmosphere that is easy to dry. This shortens the drying time of the dots of the resistance ink printed on the substrate 8, makes it difficult for the two types of resistance inks to be mixed even if they are overcoated or aligned, and a desired resistance value is easily obtained.
  • the pattern to be the resistance film is printed as shown in the schematic diagrams of FIGS. 2 and 3, for example. Between the terminals 4 and 6 formed in advance on the base material 8 (see FIG. 1), two types of resistance inks 1 and 2 dots 1 a and 2 a are arranged, and the resistance film is formed by an aggregate of dots la and 2 a. A pattern is formed.
  • the pattern shown in the plan view of FIG. 2 (a) includes a first group including a plurality of (in the figure, 2 ⁇ 2) dots 1 of resistance ink 1 between terminals 4 and 6, and a plurality of patterns.
  • the second group including the dots 2a of the resistance ink 2 (2 ⁇ 2 in the figure) is alternately arranged in a staggered pattern.
  • the dots la, 2a overlap, and the first group and the second group are continuous.
  • the pattern shown in the plan view of Fig. 2 (b) is a plurality of (six in the figure) resistors arranged between the terminals 4 and 6 in a direction perpendicular to the direction connecting the terminals 4 and 6.
  • a first group including the dot la of ink 1 and a second group including a plurality of (six in the figure) resistive ink 2 dots 2a arranged in a direction perpendicular to the direction connecting the terminals 4 and 6; Are alternately arranged in the direction connecting the terminals 4 and 6.
  • the dots la and 2a overlap each other, and the first group and the second dull loop are continuous.
  • the pattern shown in the plan view of FIG. 2 (c) is a plurality of (10 in the figure) dots of resistive ink 1 arranged in a direction connecting terminals 4 and 6 between terminals 4 and 6. And a second group including a plurality of (10 in the figure) resistive ink 2 dots 2a arranged in the direction connecting the terminals 4 and 6 in the direction connecting the terminals 4 and 6 They are alternately arranged in the direction perpendicular to it. The dots la and 2a overlap each other, and the first group and the second group are continuous.
  • the pattern shown in the plan view of FIG. 2 (d) is a first pattern including a plurality (5 ⁇ 6 in the figure) of resistive ink 1 dots la arranged between the terminals 4 and 6 in a square shape.
  • a group and a second group including a plurality (5 ⁇ 6 in the figure) of resistive ink 2 dots 2 a arranged in a square are arranged in series between terminals 4 and 6.
  • the dots la and 2a overlap each other, and the first dull loop and the second group are continuous.
  • the pattern shown in the plan view of FIG. 2 (e) is a first pattern including a plurality of (10 ⁇ 3 in the figure) resistive ink 1 dots la arranged between the terminals 4 and 6 in a square shape.
  • a group and a second group including a plurality of (10 ⁇ 3 in the figure) resistive ink 2 dots 2a arranged in a square are arranged in parallel. The dots la and 2a overlap each other, and the first group and the second group are continuous.
  • the pattern shown in the plan view of FIG. 2 (f) and the side view of FIG. 2 (g) has a plurality of squares (10 ⁇ 6 in the figure) as the first layer between the terminals 4 and 6.
  • the first group containing the dot la of the resistance ink 1 is arranged, and as the second layer, a second group including a plurality (10 X 6 in the figure) of the resistance ink 2 dots 2a is formed on the second layer.
  • the dots la and 2a overlap each other, and the first group and the second group are continuous.
  • the first group of dots la is arranged in the first region, and the second group of dots 2a is arranged in the second region.
  • the first group and the second group by the dots la, 2a are dried and fired to form a resistance film, and then become a first resistance portion and a second resistance portion, respectively.
  • the pattern shown in FIG. 2 (a) is obtained by changing the resistance value variation by making the first group of the resistance ink 1 and the second group of the resistance ink 2 a certain size. Overlapping portion of resistive ink 1 and resistive ink 2 that is likely to cause (i.e., the boundary between the first area where the first dot la is arranged and the second area where the second dot 2a is arranged) The total length of the wire is shortened, making it easier to predict the resistance value of the resistive film between terminals 4 and 6. Also between terminals 4 and 6 In this connection, the electrical resistance distribution can be made substantially uniform.
  • FIGS. 2 (b) to 2 (g) and FIG. 3 show the force between the terminals 4 and 6 between the first group of the resistance ink 1 and the second group of the resistance ink 2. Since they are arranged in series or in parallel, the resistance value of the resistive film between the terminals 4 and 6 can be easily predicted. Further, when adjusting the resistance value of the formed resistance film later, first, the group having a relatively high resistance value is partially removed to roughly adjust the resistance value, and then relatively The resistance value can be finely adjusted by partially removing the lower resistance group.
  • the resistance value of the resistive film between the terminals 4 and 6 is determined by the pattern (size, shape, and arrangement of each group) separately applied by the resistance inks 1 and 2, and the dot la of the resistance inks 1 and 2 in each group. , 2a can be changed by changing the size (the amount of ink droplets) and the number of ink droplets.
  • resistance ink is printed using a plurality of inkjet heads, two or more types of resistance inks can be applied separately. As a result, the drying process can be performed only once. In addition, since the drying process is not performed in the middle and printing is performed at a time, printing with high alignment accuracy between the resistance inks without realigning the printing position can be easily performed.
  • the printing pattern of the second and subsequent types of resistance ink is set so that no gap is generated even when the printing pattern of the first type of resistance ink is narrow. Can be printed.
  • the resistance value change 'adjustment by separately applying a plurality of types of resistance inks can be easily performed by changing the setting of software parameters.
  • RuO ruthenium oxide
  • the weight percentage of each component in the solid content of the resistance ink 1 is RuO force 3 ⁇ 40 parts by weight.
  • Resistance ink 1 has a viscosity of 89 mPa's at room temperature
  • Resistive Ink 2 has a viscosity of 109 mPa's at room temperature. However, since the ink is heated before ink jetting, the viscosity before ink jetting is lower than that at room temperature, approximately 20m 'Pa's.
  • an inkjet printer having a movable table movable in the X and Y directions, and two separate silver electrodes as a pair of terminals were formed.
  • a ceramic green sheet was prepared.
  • the inkjet head has SUS adhesive material with 256 holes with a hole diameter of 50 m formed in a row at a pitch of 280 m, and can eject ink droplets of 10 to L00 pi (picoliters).
  • resistive inks 1 and 2 were ejected substantially simultaneously, and a pattern as shown in the schematic diagram of Fig. 2 (a) was printed on the ceramic green sheet. . That is, a square pattern in which a first group of a plurality of dots of resistive ink 1 and a second group of a plurality of dots of resistive ink 2 are alternately arranged in a staggered manner between two silver electrodes. Printed.
  • This ceramic green sheet was laminated with other sheets and “press” fired to obtain a ceramic substrate in which a resistance film was formed between silver electrodes.
  • a resistance value of the resistance film on the ceramic substrate was measured, a resistance value of 5.4 k ⁇ was obtained.
  • Comparative Example 1 only resistive ink 1 was ejected, a square pattern connecting two silver electrodes on a ceramic green sheet was printed, and lamination and pressing were performed in the same manner as in Example 1. A ceramic substrate having a resistance film formed only between the resistance inks 1 between the silver electrodes was obtained. When the resistance value of the resistance film using only the resistance ink 1 was measured, a resistance value of 84 k ⁇ was obtained.
  • Comparative Example 2 only the resistance ink 2 was ejected, a square pattern connecting the two silver electrodes on the ceramic green sheet was printed, and lamination and pressing were performed in the same manner as in Example 1. A ceramic substrate having a resistance film formed only between the resistance inks 2 between the silver electrodes was obtained. When the resistance value of the resistance film using only the resistance ink 2 was measured, a resistance value of 2.3 k ⁇ was obtained.
  • the resistance value of the resistance film manufactured by separately applying the resistance ink 1 and the resistance ink 2 is the resistance value of the resistance film manufactured only by the resistance ink 1, and the resistance ink 2 It can be set to an intermediate value between the resistance value of the resistance film produced only by this method.
  • Example 2 will be described with reference to FIGS. 4 and 5.
  • Example 2 printing is performed using an inkjet printer.
  • printing is performed almost simultaneously on the base material 8 placed on the moving table 12 from the inkjet heads 14 and 16 in a substantially Cf standing manner. At this time, printing is performed so that a part or all of the dots la of the resistance ink 1 discharged from the ink jet head 14 and a part or all of the dots 2a of the resistance ink 2 discharged from the inkjet head 16 overlap. Also, before the dot la of the resistance ink 1 dries, the dot 2a of the resistance ink 2 is overlapped so that the resistance ink 1 of the dot la and the resistance ink 2 of the dot 2a are mixed. Ultrasound may be applied to facilitate mixing. By mixing, a part of the component of the resistance ink 1 and a part of the component of the resistance ink 2 may chemically react or an alloy may be formed.
  • the substrate 8 can be brought into a state at room temperature or a temperature lower than room temperature (for example, less than 25 ° C). I like it.
  • room temperature or a temperature lower than room temperature for example, less than 25 ° C.
  • the mixing unit 3 By mixing the resistance inks, as shown schematically in the plan view of FIG. 5, the mixing unit 3 in which the plurality of resistance inks 1 and 2 are mixed is formed between the terminals 4 and 6. A resistance film is formed between the terminals 4 and 6 by drying and firing the mixing portion 3.
  • the resistance value of the resistance film between the terminals 4 and 6 can be changed, for example, by changing the program parameters of the control unit 11, the mixing ratio of the resistance inks 1 and 2, the printing area, the printing pattern (planar shape, cross-sectional shape), etc. It can be changed by changing.
  • the mixing ratio of the resistance inks 1 and 2 can be changed by changing the size (number of ink droplets) and the number of the inks 1 and 2 of the resistance inks 1 and 2 and the number of overprints.
  • the mixing ratio of the resistance inks 1 and 2 for mixing the resistance inks 1 and 2 to obtain a resistance film having a desired electrical resistance is, for example, a law called “volume mixing rule” (the following formula (1)) It is possible to make predictions using
  • the resistivity and dielectric constant of a composite material formed by mixing a plurality of component materials are: In the case of two components, the following approximate expression holds.
  • V log V log p + V log p (1)
  • V is the volume of the composite material.
  • p is the resistivity of the composite material.
  • V 1 and V total total 1 2 are the volumes of components 1 and 2 in the composite material.
  • p is the resistivity of components 1 and 2
  • the resistive inks 1 and 2 are ejected, and printing is performed so that a plurality of dots of the resistive inks 1 and 2 are overlapped. While mixing the resistance inks 1 and 2 on the sheet, a pattern to be a resistance film was formed. At that time, the moving table was not heated to room temperature (25 ° C), the drying of the ink on the ceramic green sheet was delayed, and sufficient time was secured for mixing the resistance inks 1 and 2 together.
  • Example 3 Example 3 will be described with reference to FIG.
  • the pattern shown in the plan view of FIG. 6 (a) is a plurality of (4 ⁇ 6 in the figure) resistive inks arranged in a square on the terminal 4 side as in the pattern of FIG. 2 (d).
  • the first group Is containing the dot 1 la, and the second group 2s containing the dots 2a of multiple (4 X 6 in the figure) resistance ink 2 arranged in a square on the terminal 6 side Is arranged.
  • the fourth groups including the dots 2a of the resistance ink 2 are alternately arranged in a staggered pattern.
  • the dots la and 2a overlap each other, and the first to fourth groups are continuous.
  • the pattern shown in the plan view of FIG. 6 (b) is a plurality of (4 ⁇ 6 in the figure) resistive inks arranged in a square on the terminal 4 side as in the pattern of FIG. 2 (d).
  • a second group 2t including dots 2a of ink 2 is arranged.
  • resistor ink 2 six dots are arranged in a direction perpendicular to the direction connecting the third group and the terminals 4 and 6 to the third group including the dot la of the resistance ink 1. Are arranged alternately in the direction connecting the terminals 4 and 6. The dots la and 2a overlap each other, and the first to fourth groups are continuous.
  • a resistance gradient can be provided between terminals 4 and 6.
  • FIG. For example, when the dot la of the resistance ink 1 containing Pd having a relatively large electric resistance and the dot 2a of the resistance ink 2 containing Ag having a relatively small electric resistance are arranged from the upper terminal 4 in the figure. The resistance can be tilted so that the electrical resistance gradually decreases as it is directed to the lower terminal 6.
  • both the dot la of the resistance ink 1 and the dot 2a of the resistance ink 2 are metal, but one of them is a metal and the other is other than a metal such as ruthenium oxide, glass or carbon.
  • a resistance gradient can be provided between the terminals 4 and 6.
  • three or more types of resistance ink may be used. It is also possible to produce a resistance element by using a single laser printer instead of inkjet and arranging a plurality of types of dots with different electrical resistance.

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Ink Jet (AREA)
  • Non-Adjustable Resistors (AREA)

Abstract

An electronic component wherein resistance elements having various resistance values can be efficiently manufactured, and a method for manufacturing such electronic component are provided. The electronic component is provided with a pair of facing terminals (4, 6) and a resistance element arranged between the terminals (4, 6). The resistance element includes at least two resistance sections (hereinafter referred to as 'first resistance section' and 'second resistance section'), which are arranged in series. The first resistance section includes a plurality of first dots (1a) arranged one over another. The second resistance section includes a plurality of second dots (2a) which are arranged one over another and have an electrical resistance different from that of the first dots.

Description

明 細 書  Specification
電子部品及びその製造方法  Electronic component and manufacturing method thereof
技術分野  Technical field
[0001] 本発明は、電子部品及びその製造方法に関し、詳しくは、抵抗要素を有する電子 部品及びその製造方法に関する。  [0001] The present invention relates to an electronic component and a method for manufacturing the same, and more particularly to an electronic component having a resistance element and a method for manufacturing the same.
背景技術  Background art
[0002] 抵抗器等にお!ヽて、所望の抵抗値の抵抗膜等の抵抗要素を形成する方法として、 例えば、スクリーン印刷や、インクジェット法が知られている。  [0002] As a method of forming a resistance element such as a resistance film having a desired resistance value with respect to a resistor or the like, for example, screen printing or an ink jet method is known.
[0003] 例えば、特許文献 1には、スクリーン印刷を用い、基材表面に面積ならびに間隔が 異なるドット状の第 1の抵抗部を略帯状に形成し、その第 1の抵抗部の上に第 1の抵 抗部と電気抵抗が異なる連続した層状の第 2の抵抗部を形成することが開示されて いる。 [0003] For example, in Patent Document 1, dot-shaped first resistance portions having different areas and intervals are formed in a substantially strip shape on the substrate surface using screen printing, and the first resistance portions are formed on the first resistance portions. It is disclosed that a continuous layer-like second resistance portion having a different electrical resistance from that of one resistance portion is formed.
[0004] また、特許文献 2には、未焼成セラミックシート上に、 1種類の抵抗性インクをインク ジェット法で付着させて抵抗体を形成することが開示されている。  [0004] Patent Document 2 discloses forming a resistor on an unfired ceramic sheet by attaching one type of resistive ink by an ink jet method.
特許文献 1 :特開昭 60— 30101号公報  Patent Document 1: JP-A-60-30101
特許文献 2 :特開平 10— 189305号公報  Patent Document 2: JP-A-10-189305
発明の開示  Disclosure of the invention
発明が解決しょうとする課題  Problems to be solved by the invention
[0005] しかし、特許文献 1のように、スクリーン印刷を用いて抵抗部を形成する場合、抵抗 値が変わるとスクリーン版を交換する。そのため、抵抗値ごとに多額のスクリーン版製 作コストが発生し、スクリーン版の製作に長期間を要する。  [0005] However, as in Patent Document 1, when the resistance portion is formed using screen printing, the screen plate is replaced when the resistance value changes. For this reason, a large amount of screen plate manufacturing cost is incurred for each resistance value, and it takes a long time to manufacture the screen plate.
[0006] また、スクリーン印刷を用いて 2種類以上の導電性ペーストを印刷する場合、 2種類 以上の導電性ペーストを同時に印刷することができず、 1種類の導電性ペーストを印 刷するごとに、毎回、乾燥工程、スクリーン版の変更工程が必要となる。 2種類目の導 電性ペーストの印刷以降は、スクリーン版をそれ以前に印刷した導電性ペーストの印 刷位置に高精度に位置決めする必要がある。さらに、 2種類目以降の導電性ペース トは、スクリーン印刷によって、それ以前に印刷した導電性ペーストの間の隙間にうま く入らず、空隙が形成されてしまうことがある。そのため、工程を簡便にすることが困 難である。 [0006] When two or more types of conductive paste are printed using screen printing, two or more types of conductive paste cannot be printed at the same time, and each time one type of conductive paste is printed. Each time, a drying step and a screen plate changing step are required. After printing the second type of conductive paste, it is necessary to position the screen plate with high accuracy at the printing position of the conductive paste printed before. In addition, the second and subsequent conductive pastes are applied to the gaps between the previously printed conductive pastes by screen printing. A void may be formed without entering. For this reason, it is difficult to simplify the process.
[0007] 特許文献 2のように 1種類の抵抗性インクを用いて抵抗体を形成する場合、例えば 抵抗体の寸法'形状が同じで抵抗値が異なるようにするためには、抵抗値に対応し て組成の異なる抵抗性インクを予め作製しておかなければならない。そのため、多品 種少量生産に対応しにくい。  [0007] When a resistor is formed using one type of resistive ink as in Patent Document 2, for example, in order to make the resistor's dimensions' shape and the resistance value different, it corresponds to the resistance value. Thus, resistive inks having different compositions must be prepared in advance. For this reason, it is difficult to handle high-mix low-volume production.
[0008] 本発明は、力かる実情に鑑み、種々の抵抗値の抵抗要素を効率よく作製すること ができる、電子部品及びその製造方法を提供しょうとするものである。  [0008] The present invention is intended to provide an electronic component and a method for manufacturing the same, which can efficiently manufacture resistance elements having various resistance values in view of the actual situation.
課題を解決するための手段  Means for solving the problem
[0009] 本発明は、上記課題を解決するために、以下のように構成した電子部品を提供す る。 In order to solve the above-described problems, the present invention provides an electronic component configured as follows.
[0010] 電子部品は、互いに対向する一対の端子と、該一対の端子間に配置された抵抗要 素とを備えたタイプのものである。前記抵抗要素は、連続して配置された少なくとも 2 つの抵抗部 (以下、「第 1抵抗部」、「第 2抵抗部」という。)を含む。前記第 1抵抗部は 、互いに重なり合って配置された複数の第 1のドットを含む。前記第 2抵抗部は、互い に重なり合って配置された前記第 1のドットとは電気抵抗が異なる複数の第 2のドット を含む。  [0010] The electronic component is of a type including a pair of terminals facing each other and a resistance element arranged between the pair of terminals. The resistance element includes at least two resistance parts (hereinafter referred to as “first resistance part” and “second resistance part”) arranged in succession. The first resistance portion includes a plurality of first dots arranged to overlap each other. The second resistance portion includes a plurality of second dots having different electrical resistances from the first dots arranged to overlap each other.
[0011] 上記構成において、第 1のドットと第 2のドットとは、例えば、インクジェット法を用い、 組成の異なる抵抗インクの微細な粒子を噴射して基材に付着させることにより形成す る。レーザープリント法を用い、組成の異なる抵抗トナーの微細な粒子を基材に付着 させて形成することも可能である。抵抗要素は、少なくとも 2つの第 1抵抗部と第 2抵 抗部とに塗り分けられ、各抵抗部は互いに重なり合った複数のドットを含んでいる。  [0011] In the above configuration, the first dots and the second dots are formed by, for example, using an ink jet method and ejecting fine particles of resistive ink having different compositions to adhere to the substrate. It is also possible to use a laser printing method to form fine particles of resistance toner having different compositions by adhering to a substrate. The resistance element is divided into at least two first resistance portions and second resistance portions, and each resistance portion includes a plurality of dots that overlap each other.
[0012] 上記構成によれば、抵抗要素の形成にスクリーン版を必要としないので、スクリーン 版の製作'管理コストが不要となり、スクリーン版の製作期間もなくなるため、短納期 対応が可能となる。ドットを形成するための抵抗インクや抵抗トナー等を変更すること なぐ抵抗部内のドットのサイズや個数、抵抗部の形状などを変えることにより、種々 の抵抗値の抵抗要素を形成することができる。  [0012] According to the above configuration, since the screen plate is not required for forming the resistance element, the production cost of the screen plate is not necessary, and the production period of the screen plate is eliminated, so that a short delivery time can be met. Resistance elements having various resistance values can be formed by changing the size and number of dots in the resistance portion, the shape of the resistance portion, etc. without changing the resistance ink or resistance toner for forming dots.
[0013] 好ましくは、前記第 1抵抗部と前記第 2抵抗部とが前記端子間に直列に配置されて いる。 [0013] Preferably, the first resistor portion and the second resistor portion are arranged in series between the terminals. Yes.
[0014] この場合、計算により所望の抵抗値を得やすい。また、形成した抵抗要素の抵抗値 を後から調整する場合、まず、相対的に抵抗値が高い方の抵抗部を部分的に除去し て抵抗値をおおまかに調整し、次いで、相対的に抵抗値が低い方の抵抗部を部分 的に除去して抵抗値を微調整することができる。  In this case, it is easy to obtain a desired resistance value by calculation. Further, when adjusting the resistance value of the formed resistance element later, first, the resistance part having a relatively high resistance value is partially removed to roughly adjust the resistance value, and then the resistance value is relatively adjusted. It is possible to finely adjust the resistance value by partially removing the lower resistance portion.
[0015] 好ましくは、前記第 1抵抗部と前記第 2抵抗部とが前記端子間に並列に配置されて いる。ここで言う並列とは、第 1抵抗部と第 2抵抗部が接触している場合と離れている 場合のいずれであってもよい。また接触している場合においては、上下に重ねられた 状態であってもよい。さらに上下に重ねられている状態においては、第 1抵抗部内に 浮島状に第 2抵抗部が形成されて 、てもよ 、。  [0015] Preferably, the first resistance portion and the second resistance portion are arranged in parallel between the terminals. Here, the term “parallel” may be used when the first resistance portion and the second resistance portion are in contact with each other or when they are apart from each other. When they are in contact, they may be stacked one above the other. Further, in the state where they are stacked one above the other, the second resistance portion may be formed in a floating island shape in the first resistance portion.
[0016] この場合、計算により所望の抵抗値を得やすい。また、形成した抵抗要素の抵抗値 を後から調整する場合、まず、相対的に抵抗値が高い方の抵抗部を部分的に除去し て抵抗値をおおまかに調整し、次いで、相対的に抵抗値が低い方の抵抗部を部分 的に除去して抵抗値を微調整することができる。  In this case, it is easy to obtain a desired resistance value by calculation. Further, when adjusting the resistance value of the formed resistance element later, first, the resistance part having a relatively high resistance value is partially removed to roughly adjust the resistance value, and then the resistance value is relatively adjusted. It is possible to finely adjust the resistance value by partially removing the lower resistance portion.
[0017] 好ましくは、前記第 1抵抗部と前記第 2抵抗部との少なくとも一方が金属である。  [0017] Preferably, at least one of the first resistance portion and the second resistance portion is a metal.
[0018] 金属は、例えば、 Ni—Crのように抵抗値がかなり高いもの、 Pdのように抵抗値がや や高いもの、 Agのように抵抗値が低いものなど、種々の抵抗値のものがあるので、用 途に応じて種々の抵抗値の抵抗要素を容易に形成することができる。  [0018] Metals have various resistance values, such as those with a fairly high resistance value such as Ni-Cr, those with a slightly high resistance value such as Pd, and those with a low resistance value such as Ag. Therefore, it is possible to easily form resistance elements having various resistance values depending on the application.
[0019] また、本発明は、上記課題を解決するために、以下のように構成した電子部品の製 造方法を提供する。  [0019] In addition, in order to solve the above problems, the present invention provides a method of manufacturing an electronic component configured as follows.
[0020] 電子部品の製造方法は、(1)基材の第 1の領域に、抵抗要素の一部となる成分を 含む第 1の抵抗インクを用い、インクジェット法により、互いに重なり合う複数の第 1の ドットを配置する第 1の工程と、(2)前記第 1の領域に隣接する第 2の領域に、前記抵 抗要素の他の一部となる成分を含み前記第 1の抵抗インクとは組成が異なる第 2の 抵抗インクを用い、インクジェット法により、互いに重なり合う複数の第 2のドットを配置 する第 2の工程と、(3)前記第 1の領域の前記第 1のドットと前記第 2の領域の前記第 2のドットとを熱処理して、前記抵抗要素を形成する第 3の工程とを備える。  [0020] A method for manufacturing an electronic component includes: (1) using a first resistance ink containing a component that is a part of a resistance element in a first region of a base material; A first step of disposing dots, and (2) the first resistive ink including a component that is another part of the resistance element in a second region adjacent to the first region. A second step of disposing a plurality of second dots overlapping each other by an inkjet method using a second resistive ink having a different composition; (3) the first dots and the second in the first region; And a third step of heat-treating the second dot in the region to form the resistance element.
[0021] 上記方法において、第 1のドットと第 2のドットとは、それぞれ、第 1の抵抗インクと第 2の抵抗インクの微細なインク滴を噴射して基材に付着させることにより形成する。抵 抗要素は、少なくとも 2つの第 1の領域と第 2の領域とに塗り分けられ、各領域は互い に重なり合った複数のドットを含んでいる。第 2の工程は、第 1の工程が終了する前に 開始してもよい。第 3の工程は、乾燥工程及び焼成工程として熱処理温度の異なる 複数の工程を含んでいてもよい。このうち乾燥工程は、第 1の工程又は第 2の工程が 終了する前に開始してもよい。 In the above method, the first dot and the second dot are the first resistance ink and the second dot, respectively. It is formed by ejecting fine ink droplets of the resistance ink 2 to adhere to the substrate. The resistance element is divided into at least two first regions and second regions, and each region includes a plurality of dots that overlap each other. The second step may be started before the first step is finished. The third step may include a plurality of steps having different heat treatment temperatures as the drying step and the firing step. Of these, the drying step may be started before the first step or the second step is completed.
[0022] 上記方法によれば、抵抗要素の形成にスクリーン版を必要としないで、スクリーン版 の製作'管理コストが不要となり、スクリーン版の製作期間もなくなる。同じ抵抗インク を用い、領域内のドットのサイズや個数、領域の形状などを変えることにより、種々の 抵抗値の抵抗要素を形成することができる。  [0022] According to the above method, the screen plate is not required for forming the resistance element, the management cost of producing the screen plate is unnecessary, and the production period of the screen plate is also eliminated. By using the same resistance ink and changing the size and number of dots in the area, the shape of the area, etc., resistance elements having various resistance values can be formed.
[0023] 好ましくは、前記第 2の工程の前に、前記第 1のドットを乾燥させるドット乾燥工程を 備える。このドット乾燥工程は、前記第 1の工程と前記第 2の工程との間に独立して設 けてもよいが、好ましくは、前記第 1の工程と並行して実施する。例えば、前記第 1の 工程において、前記基材を常温より高温にするか、または前記第 1の工程を乾燥雰 囲気中において行なうことにより、前記ドット乾燥工程を実施するのがよい。  [0023] Preferably, a dot drying step for drying the first dots is provided before the second step. This dot drying step may be provided independently between the first step and the second step, but is preferably performed in parallel with the first step. For example, in the first step, the dot drying step may be performed by setting the base material to a temperature higher than room temperature or by performing the first step in a dry atmosphere.
[0024] この場合、基材を常温よりも高温 (例えば、 25°C以上)にする力 または前記第 1の 工程を乾燥雰囲気中において行なうことにより、基材に配置した第 1のドットの乾燥時 間を短くすることができるので、重ね塗りや並べ塗りをしても 2種類の抵抗インクが混 合しにくくなり、所望の抵抗値を得やすい。  [0024] In this case, the first dot placed on the base material is dried by performing the first step in a dry atmosphere or the force that brings the base material to a temperature higher than room temperature (for example, 25 ° C or higher). Since the time can be shortened, it becomes difficult to mix two types of resistance inks even if they are overcoated or arranged, and it is easy to obtain a desired resistance value.
[0025] また、本発明は、上記課題を解決するために、以下のように構成した電子部品の製 造方法を提供する。  [0025] Further, in order to solve the above problems, the present invention provides a method for manufacturing an electronic component configured as follows.
[0026] 電子部品の製造方法は、(1)基材に、抵抗要素となる成分を含む第 1の抵抗インク を用い、インクジェット法により、複数の第 1のドットを配置する第 1の工程と、(2)前記 抵抗要素となる成分を含み前記第 1の抵抗インクとは組成が異なる第 2の抵抗インク を用い、インクジェット法により、複数の第 2のドットを、前記第 1のドットに重なるように 配置して、前記第 1のドットの前記第 1の抵抗インクと前記第 2のドットの前記第 2の抵 抗インクとを混合させて混合部を形成する第 2の工程と、 (3)前記混合部を熱処理し て、前記抵抗要素を形成する第 3の工程とを備える。 [0027] 上記方法において、第 2の工程は、第 1の工程が終了する前に開始してもよい。 [0026] The method of manufacturing an electronic component includes (1) a first step of arranging a plurality of first dots by an ink jet method using a first resistance ink containing a component serving as a resistance element on a substrate. (2) A second resistance ink containing a component that becomes the resistance element and having a composition different from that of the first resistance ink is used, and a plurality of second dots are overlapped with the first dot by an inkjet method. A second step of forming the mixing portion by mixing the first resistance ink of the first dot and the second resistance ink of the second dot; and (3) And a third step of heat-treating the mixing portion to form the resistance element. [0027] In the above method, the second step may be started before the first step is completed.
[0028] 上記方法によれば、抵抗要素の形成にスクリーン版を必要としないので、スクリーン 版の製作'管理コストが不要となり、スクリーン版の製作期間もなくなる。同じ抵抗イン クを用い、抵抗インクの混合比を、第 1のドットと第 2のドットのサイズ (インク液の量)や 個数、印刷回数等を変えて調整することで、あるいは印刷パターンを変えることで、 種々の抵抗値を得ることができる。 [0028] According to the above method, since the screen plate is not required for forming the resistance element, the production cost of the screen plate is not necessary, and the production period of the screen plate is also eliminated. Use the same resistance ink, and adjust the mixing ratio of the resistance ink by changing the size (number of ink liquid) and number of the first and second dots, the number of times of printing, etc., or changing the printing pattern As a result, various resistance values can be obtained.
[0029] 好ましくは、前記第 1の工程及び前記第 2の工程において、常温又は常温より低温 にする。 [0029] Preferably, in the first step and the second step, the temperature is set to room temperature or lower than room temperature.
[0030] この場合、基材を常温又は常温よりも低温 (例えば、 25°C未満)にすることにより、 第 1のドットのインクの乾燥を遅らせ、インクの混合時間を長くすることにより、抵抗膜 の抵抗値のばらつきを小さくし、安定した抵抗値を得ることができる。  [0030] In this case, the resistance of the substrate can be reduced by delaying the drying of the first dot ink and lengthening the ink mixing time by setting the substrate to room temperature or lower than room temperature (for example, less than 25 ° C). The variation in the resistance value of the film can be reduced, and a stable resistance value can be obtained.
発明の効果  The invention's effect
[0031] 本発明によれば、種々の抵抗値の抵抗要素を効率よく作製することができる。  [0031] According to the present invention, resistance elements having various resistance values can be efficiently manufactured.
図面の簡単な説明  Brief Description of Drawings
[0032] [図 1]印刷に用いるインクジェットプリンタの全体構成図である。(実施例 1) FIG. 1 is an overall configuration diagram of an inkjet printer used for printing. (Example 1)
[図 2]印刷パターンを説明するための模式図である。(実施例 1)  FIG. 2 is a schematic diagram for explaining a print pattern. (Example 1)
[図 3]印刷パターンを説明するための模式図である。(実施例 1)  FIG. 3 is a schematic diagram for explaining a print pattern. (Example 1)
[図 4]印刷方法を説明するための模式図である。(実施例 2)  FIG. 4 is a schematic diagram for explaining a printing method. (Example 2)
[図 5]印刷パターンを説明するための模式図である。(実施例 2)  FIG. 5 is a schematic diagram for explaining a print pattern. (Example 2)
[図 6]印刷パターンを説明するための模式図である。(実施例 3)  FIG. 6 is a schematic diagram for explaining a print pattern. (Example 3)
符号の説明  Explanation of symbols
[0033] la 第 1のドット [0033] la first dot
2a 第 2のドット  2a 2nd dot
3 混合部  3 Mixing section
4 端子  4 terminals
6 端子  6 terminals
8 基材  8 Base material
10 インクジェットプリンタ 14, 16, 18 インクジェットヘッド 10 Inkjet printer 14, 16, 18 Inkjet head
34, 36, 38 抵抗インク  34, 36, 38 Resistive ink
35, 37, 39 インク滴  35, 37, 39 Ink drops
発明を実施するための最良の形態  BEST MODE FOR CARRYING OUT THE INVENTION
[0034] 以下、本発明の実施の形態について、図 1〜図 5を参照しながら説明する。 Hereinafter, embodiments of the present invention will be described with reference to FIGS. 1 to 5.
[0035] <実施例 1 > 実施例 1について、図 1〜図 3を参照しながら説明する。 <Example 1> [0035] Example 1 will be described with reference to Figs.
[0036] まず、抵抗膜 (抵抗要素)となるパターンの印刷に用いるインクジェットプリンタ 10に ついて、図 1の模式図を参照しながら説明する。 First, an inkjet printer 10 used for printing a pattern to be a resistive film (resistive element) will be described with reference to the schematic diagram of FIG.
[0037] インクジェットプリンタ 10は、大略、基材 8を載置する移動テーブル 12と、複数 (例え ば 3個)のインクジェットヘッド 14, 16, 18と、装置全体の制御を統括する制御部 11と を備える。 [0037] The inkjet printer 10 generally includes a moving table 12 on which a base material 8 is placed, a plurality (for example, three) of inkjet heads 14, 16, 18, and a control unit 11 that controls the overall apparatus. Is provided.
[0038] 移動テーブル 12は、モータ 22により符号 23で示す X方向に駆動され、モータ 24に より符号 25で示す Y方向に駆動され、モータ 26により符号 27で示す Θ方向(X, Y軸 に直角な Z軸周り)に駆動される。移動テーブル 12のモータ 22, 24, 26の駆動は、 制御部 11によって制御される。移動テーブル 12は、 X, Υ, Θ以外の方向に移動す るようにしても、逆に、 X, Υ, Θのうち任意の 1方向又は 2方向にのみ移動するように してもよい。移動テーブル 12には、必要に応じて、基材 8を吸着するための真空吸引 孔を設けたり、基材 2を加熱'保温するためのヒーターを設けたりしてもよい。  [0038] The moving table 12 is driven in the X direction indicated by reference numeral 23 by the motor 22, is driven in the Y direction indicated by reference numeral 25 by the motor 24, and is moved in the Θ direction (in the X and Y axes) indicated by reference numeral 27 by the motor 26. Driven around the right Z axis). The driving of the motors 22, 24 and 26 of the moving table 12 is controlled by the control unit 11. The moving table 12 may be moved in directions other than X, Υ, and Θ, or conversely, may be moved only in any one or two directions of X, Υ, and Θ. The moving table 12 may be provided with a vacuum suction hole for adsorbing the base material 8 or a heater for heating and keeping the base material 2 as necessary.
[0039] インクジェットヘッド 14, 16, 18は、それぞれ、移動テーブル 12の上方の固定位置 に配置される。インクジェットヘッド 14, 16, 18には、それぞれ、組成が異なる抵抗ィ ンク 34, 36, 38力タンク 15, 17, 19力ら供給される。インクジェットヘッド 14, 16, 18 には、 1又は 2以上の微小な孔が形成され、この孔カも抵抗インク 34, 36, 38の微細 な粒子であるインク滴 35, 37, 39を、移動テーブル 12に向けて噴射する。インクジェ ットヘッド 14, 16, 18は、制御部 11からの制御によって、噴射するインク滴 35, 37, 39のサイズ (インク滴の量)や個数を変更する。  The inkjet heads 14, 16, and 18 are respectively arranged at fixed positions above the moving table 12. Ink jet heads 14, 16, and 18 are supplied with resistance inks 34, 36, and 38 force tanks with different compositions, respectively. Inkjet heads 14, 16, and 18 are formed with one or more minute holes, and these holes are also used to transfer ink droplets 35, 37, and 39, which are fine particles of resistance ink 34, 36, and 38, to a moving table. Inject towards 12 The ink jet heads 14, 16, and 18 change the size (the amount of ink droplets) and the number of ink droplets 35, 37, and 39 to be ejected under the control of the control unit 11.
[0040] 抵抗インク 34, 36, 38は、酸化ルテニウム、ガラス、カーボン、金属粒子などの抵 抗材料を含む。抵抗インク 34, 36, 38に含まれる抵抗材料には、任意の抵抗値のも のを用いることができる。例えば金属粒子では、 Ni— Crのように抵抗値がかなり高い もの、 Pdのように抵抗値がやや高いもの、 Agのように抵抗値が低いものなど、種々の 抵抗値のものがあるが、用途に応じていずれの材料も用いることができる。移動テー ブル 12に載置する基材 8は、電子部品を作製するための基板やセラミックグリーンシ ートなどのワークである。 [0040] The resistance inks 34, 36, 38 include a resistance material such as ruthenium oxide, glass, carbon, and metal particles. As the resistance material included in the resistance inks 34, 36, and 38, one having an arbitrary resistance value can be used. For example, with metal particles, the resistance is quite high, like Ni-Cr. There are various resistance values, such as those with a slightly high resistance value such as Pd and those with a low resistance value such as Ag, but any material can be used depending on the application. The base material 8 placed on the movable table 12 is a workpiece such as a substrate or a ceramic green sheet for producing an electronic component.
[0041] 制御部 11には、例えばパーソナルコンピュータを用いる。制御部 11は、不図示の キーボード等力 入力されたパラメータに基づいて、所定のプログラムに従って、移 動テーブル 12の移動に同期してインクジェットヘッド 14, 16, 18を駆動し、インク滴 3 5, 37, 39を吐出させる。これにより、移動テーブル 12に載置された基材 8上には、 抵抗インク 34, 36, 38で所定のパターンが印刷される。  [0041] For the control unit 11, for example, a personal computer is used. The control unit 11 drives the ink jet heads 14, 16, and 18 in synchronization with the movement of the moving table 12 according to a predetermined program based on the input parameters of the keyboard force (not shown) and the ink droplets 3 5, 37, 39 is discharged. As a result, a predetermined pattern is printed on the substrate 8 placed on the moving table 12 with the resistance inks 34, 36, and 38.
[0042] 好ましくは、インク滴 35, 37, 39を吐出する複数の孔が一列に配置されているイン クジェットヘッド 14, 16, 18を、孔の列が互いに平行になるように並べる。移動テープ ル 12は、インクジェットヘッド 14, 16, 18が並んでいる方向(孔の列に対して直角方 向)または斜め方向に駆動する。これによつて、抵抗インク 34, 36, 38を用いて略同 時に印刷を行!、、抵抗要素となるパターンを効率よく形成することができる。  [0042] Preferably, the ink jet heads 14, 16, 18 in which a plurality of holes for ejecting the ink droplets 35, 37, 39 are arranged in a row are arranged so that the rows of holes are parallel to each other. The moving table 12 is driven in the direction in which the inkjet heads 14, 16, 18 are arranged (perpendicular to the row of holes) or in an oblique direction. As a result, printing can be performed almost simultaneously using the resistance inks 34, 36, and 38, and the pattern serving as the resistance element can be efficiently formed.
[0043] なお、インクジェットヘッド 14, 16, 18を固定位置に配置し、基材 8を移動する代わ りに、基材 8を固定したままインクジェットヘッド 14, 16, 18を移動するようにしても、 基材 8とインクジェットヘッド 14, 16, 18の両方を移動するようにしてもよい。  Note that the inkjet heads 14, 16, 18 are arranged at fixed positions, and instead of moving the substrate 8, the inkjet heads 14, 16, 18 may be moved while the substrate 8 is fixed. Both the substrate 8 and the ink jet heads 14, 16, 18 may be moved.
[0044] このインクジェットプリンタ 10を用いて、複数種類の抵抗インクを用いて、抵抗膜とな るパターンを塗り分けた後、乾燥し、焼成することにより、抵抗膜を形成する。  [0044] Using this ink-jet printer 10, using a plurality of types of resistance inks, a pattern to be a resistance film is applied separately, and then dried and baked to form a resistance film.
[0045] 例えば、抵抗膜となるパターンを、平面方向に複数の印刷工リア (領域)に分け、そ れぞれの印刷工リアを、複数のインクジェットヘッドを使って異なる抵抗インクを用い て略同時に塗り分ける。これ〖こより、 1種類の抵抗インクで形成した抵抗膜とは異なる 抵抗値の抵抗膜を実現することができる。抵抗膜となるパターンの平面形状、断面形 状を変化させることで、異なる抵抗値の抵抗膜を実現できる。  [0045] For example, a pattern to be a resistive film is divided into a plurality of printing process areas (regions) in the plane direction, and each printing process area is roughly abbreviated using different resistance inks using a plurality of inkjet heads. Paint at the same time. From this, it is possible to realize a resistance film having a resistance value different from that of the resistance film formed of one type of resistance ink. Resistive films with different resistance values can be realized by changing the planar shape and cross-sectional shape of the pattern to be the resistive film.
[0046] 好ましくは、印刷時には、基材 8を常温よりも高温 (例えば、 25°C以上)にする力、印 刷をドライエアーなど乾燥しやすい雰囲気中で行なう。例えば、移動テーブル 12にヒ 一ターを設けて基材 8を加熱'保温する。印刷前に予め基板 8を加熱しておいても、 印刷中の空調により基板 8を常温よりも高温とするようにしてもよい。または印刷部を カバーで覆い、カバーの中に所定の湿度のドライエアーを外部力 送り続け、乾燥し やすい雰囲気を維持するようにしてもよい。これにより、基材 8に印刷した抵抗インク のドットの乾燥時間を短くし、重ね塗りや並べ塗りをしても 2種類の抵抗インクが混合 しにくくなり、所望の抵抗値を得やすい。 [0046] Preferably, at the time of printing, the substrate 8 is heated to a temperature higher than room temperature (for example, 25 ° C or higher), and printing is performed in an atmosphere that is easily dried, such as dry air. For example, a heater is provided on the moving table 12 and the base material 8 is heated and kept warm. Even if the substrate 8 is heated in advance before printing, the substrate 8 may be heated to a temperature higher than room temperature by air conditioning during printing. Or print part It may be covered with a cover, and dry air with a predetermined humidity may be continuously supplied to the cover to maintain an atmosphere that is easy to dry. This shortens the drying time of the dots of the resistance ink printed on the substrate 8, makes it difficult for the two types of resistance inks to be mixed even if they are overcoated or aligned, and a desired resistance value is easily obtained.
[0047] 抵抗膜となるパターンは、例えば図 2及び図 3の模式図に示すように印刷する。基 材 8 (図 1参照)上に予め形成された端子 4, 6間に、 2種類の抵抗インク 1, 2のドット 1 a, 2aを配置し、ドット la, 2aの集合体によって、抵抗膜となるパターンを形成する。  [0047] The pattern to be the resistance film is printed as shown in the schematic diagrams of FIGS. 2 and 3, for example. Between the terminals 4 and 6 formed in advance on the base material 8 (see FIG. 1), two types of resistance inks 1 and 2 dots 1 a and 2 a are arranged, and the resistance film is formed by an aggregate of dots la and 2 a. A pattern is formed.
[0048] 図 2 (a)の平面図に示すパターンは、端子 4, 6の間に、複数(図では 2 X 2個)の抵 抗インク 1のドット laを含む第 1のグループと、複数(図では 2 X 2個)の抵抗インク 2の ドット 2aを含む第 2のグループとが、千鳥状に交互に配置されている。ドット la, 2a同 士は重なり合っており、第 1のグループと第 2のグループとは連続している。  [0048] The pattern shown in the plan view of FIG. 2 (a) includes a first group including a plurality of (in the figure, 2 × 2) dots 1 of resistance ink 1 between terminals 4 and 6, and a plurality of patterns. The second group including the dots 2a of the resistance ink 2 (2 × 2 in the figure) is alternately arranged in a staggered pattern. The dots la, 2a overlap, and the first group and the second group are continuous.
[0049] 図 2 (b)の平面図に示すパターンは、端子 4, 6の間に、端子 4, 6を結ぶ方向に対 して直角方向に配置された複数(図では 6個)の抵抗インク 1のドット laを含む第 1の グループと、端子 4, 6を結ぶ方向に対して直角方向に配置された複数(図では 6個) の抵抗インク 2のドット 2aを含む第 2のグループとが、端子 4, 6を結ぶ方向に交互に 配置されている。ドット la, 2a同士は重なり合っており、第 1のグループと第 2のダル 一プとは連続している。  [0049] The pattern shown in the plan view of Fig. 2 (b) is a plurality of (six in the figure) resistors arranged between the terminals 4 and 6 in a direction perpendicular to the direction connecting the terminals 4 and 6. A first group including the dot la of ink 1 and a second group including a plurality of (six in the figure) resistive ink 2 dots 2a arranged in a direction perpendicular to the direction connecting the terminals 4 and 6; Are alternately arranged in the direction connecting the terminals 4 and 6. The dots la and 2a overlap each other, and the first group and the second dull loop are continuous.
[0050] 図 2 (c)の平面図に示すパターンは、端子 4, 6の間に、端子 4, 6を結ぶ方向に配 置された複数(図では 10個)の抵抗インク 1のドット laを含む第 1のグループと、端子 4, 6を結ぶ方向に配置された複数(図では 10個)の抵抗インク 2のドット 2aを含む第 2のグループとが、端子 4, 6を結ぶ方向に対して直角方向に交互に配置されている 。ドット la, 2a同士は重なり合っており、第 1のグループと第 2のグループとは連続し ている。  [0050] The pattern shown in the plan view of FIG. 2 (c) is a plurality of (10 in the figure) dots of resistive ink 1 arranged in a direction connecting terminals 4 and 6 between terminals 4 and 6. And a second group including a plurality of (10 in the figure) resistive ink 2 dots 2a arranged in the direction connecting the terminals 4 and 6 in the direction connecting the terminals 4 and 6 They are alternately arranged in the direction perpendicular to it. The dots la and 2a overlap each other, and the first group and the second group are continuous.
[0051] 図 2 (d)の平面図に示すパターンは、端子 4, 6の間に、四角形に配置された複数( 図では 5 X 6個)の抵抗インク 1のドット laを含む第 1のグループと、四角形に配置さ れた複数(図では 5 X 6個)の抵抗インク 2のドット 2aを含む第 2のグループとが、端子 4, 6の間に直列に配置されている。ドット la, 2a同士は重なり合っており、第 1のダル 一プと第 2のグループとは連続して 、る。 [0052] 図 2 (e)の平面図に示すパターンは、端子 4, 6の間に、四角形に配置された複数( 図では 10 X 3個)の抵抗インク 1のドット laを含む第 1のグループと、四角形に配置さ れた複数(図では 10 X 3個)の抵抗インク 2のドット 2aを含む第 2のグループとが、並 列に配置されている。ドット la, 2a同士は重なり合っており、第 1のグループと第 2の グループとは連続して 、る。 [0051] The pattern shown in the plan view of FIG. 2 (d) is a first pattern including a plurality (5 × 6 in the figure) of resistive ink 1 dots la arranged between the terminals 4 and 6 in a square shape. A group and a second group including a plurality (5 × 6 in the figure) of resistive ink 2 dots 2 a arranged in a square are arranged in series between terminals 4 and 6. The dots la and 2a overlap each other, and the first dull loop and the second group are continuous. [0052] The pattern shown in the plan view of FIG. 2 (e) is a first pattern including a plurality of (10 × 3 in the figure) resistive ink 1 dots la arranged between the terminals 4 and 6 in a square shape. A group and a second group including a plurality of (10 × 3 in the figure) resistive ink 2 dots 2a arranged in a square are arranged in parallel. The dots la and 2a overlap each other, and the first group and the second group are continuous.
[0053] 第 1のグループと第 2のグループとが並列に配置される場合には、図 3 (a)に示すよ うに、抵抗インク 1のドット laを含む第 1のグループの一部と、抵抗インク 2のドット 2aを 含む第 2のグループの一部とが、上下に重ねられた状態に形成される力、あるいは図 3 (b)に示すように、抵抗インク 1のドット laを含む第 1のグループの一部の上に、抵 抗インク 2のドット 2aを含む第 2のグループの全部力 浮島状に重ねられた状態に形 成される力して、部分的に並列配置となるようにしてもよい。これらの場合、第 1のダル 一プと第 2のグループの上下関係が逆であってもよい。また、図 3 (c)に示すように、 抵抗インク 1のドット laを含む第 1の第 1のグループと、抵抗インク 2のドット 2aを含む 第 2のグループとが離れて 、てもよ 、。  [0053] When the first group and the second group are arranged in parallel, as shown in Fig. 3 (a), a part of the first group including the dot la of the resistance ink 1, The force formed in a state where the second group including the dot 2a of the resistance ink 2 is superposed vertically, or the first group including the dot la of the resistance ink 1 as shown in FIG. The entire force of the second group including the dot 2a of the resistance ink 2 on a part of the group 1 is a force formed in a state of being superposed in a floating island shape, so that it is partially arranged in parallel. It may be. In these cases, the vertical relationship between the first dull loop and the second group may be reversed. Further, as shown in FIG. 3 (c), the first first group including the dot la of the resistance ink 1 and the second group including the dot 2a of the resistance ink 2 may be separated from each other. .
[0054] 図 2 (f)の平面図及び図 2 (g)の側面図に示すパターンは、端子 4, 6の間に、 1層 目として、四角形に複数(図では 10 X 6個)の抵抗インク 1のドット laを含む第 1のグ ループが配置され、その上に 2層目として、四角形に複数(図では 10 X 6個)の抵抗 インク 2のドット 2aを含む第 2のグループが配置されている。ドット la, 2a同士は重なり 合っており、第 1のグループと第 2のグループとは連続している。  [0054] The pattern shown in the plan view of FIG. 2 (f) and the side view of FIG. 2 (g) has a plurality of squares (10 × 6 in the figure) as the first layer between the terminals 4 and 6. The first group containing the dot la of the resistance ink 1 is arranged, and as the second layer, a second group including a plurality (10 X 6 in the figure) of the resistance ink 2 dots 2a is formed on the second layer. Has been placed. The dots la and 2a overlap each other, and the first group and the second group are continuous.
[0055] なお、図 2及び図 3に示した各パターンにおいて、第 1のグループのドット laは第 1 の領域に配置され、第 2のグループのドット 2aは第 2の領域に配置されている。ドット la, 2aによる第 1のグループと第 2のグループは、乾燥し、焼成して抵抗膜を形成し た後に、それぞれ、第 1抵抗部、第 2抵抗部になる。  In each pattern shown in FIG. 2 and FIG. 3, the first group of dots la is arranged in the first region, and the second group of dots 2a is arranged in the second region. . The first group and the second group by the dots la, 2a are dried and fired to form a resistance film, and then become a first resistance portion and a second resistance portion, respectively.
[0056] 図 2 (a)に示したパターンは、抵抗インク 1による第 1のグループと、抵抗インク 2によ る第 2のグループとをある程度の大きさにすることにより、抵抗値のばらつきの原因と なりやすい抵抗インク 1と抵抗インク 2との重なり部分 (すなわち、第 1のドット laが配 置される第 1の領域と、第 2のドット 2aが配置される第 2の領域との境界線)の総延長 が短くなり、端子 4, 6間の抵抗膜の抵抗値の予測が容易になる。また、端子 4, 6間 にお 、て、電気抵抗の分布を略均一にすることができる。 [0056] The pattern shown in FIG. 2 (a) is obtained by changing the resistance value variation by making the first group of the resistance ink 1 and the second group of the resistance ink 2 a certain size. Overlapping portion of resistive ink 1 and resistive ink 2 that is likely to cause (i.e., the boundary between the first area where the first dot la is arranged and the second area where the second dot 2a is arranged) The total length of the wire is shortened, making it easier to predict the resistance value of the resistive film between terminals 4 and 6. Also between terminals 4 and 6 In this connection, the electrical resistance distribution can be made substantially uniform.
[0057] 図 2 (b)〜図 2 (g)及び図 3に示したパターンは、端子 4, 6間に、抵抗インク 1による 第 1のグループと、抵抗インク 2による第 2のグループと力 直列又は並列に配置され ているので、端子 4, 6間の抵抗膜の抵抗値の予想が容易である。また、形成された 抵抗膜の抵抗値を後から調整する場合、まず、相対的に抵抗値が高い方のグルー プを部分的に除去して抵抗値をおおまかに調整し、次いで、相対的に抵抗値が低い 方のグループを部分的に除去して抵抗値を微調整することができる。  [0057] The patterns shown in FIGS. 2 (b) to 2 (g) and FIG. 3 show the force between the terminals 4 and 6 between the first group of the resistance ink 1 and the second group of the resistance ink 2. Since they are arranged in series or in parallel, the resistance value of the resistive film between the terminals 4 and 6 can be easily predicted. Further, when adjusting the resistance value of the formed resistance film later, first, the group having a relatively high resistance value is partially removed to roughly adjust the resistance value, and then relatively The resistance value can be finely adjusted by partially removing the lower resistance group.
[0058] 端子 4, 6間の抵抗膜の抵抗値は、抵抗インク 1, 2で塗り分けるパターン (各グルー プの寸法、形状、配置)や、各グループ中の抵抗インク 1, 2のドット la, 2aのサイズ( インク滴の量)や個数などを変えることにより、変更することができる。  [0058] The resistance value of the resistive film between the terminals 4 and 6 is determined by the pattern (size, shape, and arrangement of each group) separately applied by the resistance inks 1 and 2, and the dot la of the resistance inks 1 and 2 in each group. , 2a can be changed by changing the size (the amount of ink droplets) and the number of ink droplets.
[0059] 複数のインクジェットヘッドを用いて抵抗インクの印刷を行なえば、 2種類以上の抵 抗インクの塗り分けを同時に行なうことができる。これにより、乾燥工程を 1回のみにす ることができる。また、途中で乾燥工程が入らず、一時に印刷するので、印刷位置を 合わせ直すことなぐ抵抗インク間の位置合わせ精度が高い印刷を簡便に行なうこと ができる。  [0059] If resistance ink is printed using a plurality of inkjet heads, two or more types of resistance inks can be applied separately. As a result, the drying process can be performed only once. In addition, since the drying process is not performed in the middle and printing is performed at a time, printing with high alignment accuracy between the resistance inks without realigning the printing position can be easily performed.
[0060] また、スクリーン版を用いていないので、 1種類目の抵抗インクの印刷パターンの間 隔が狭い場合でも、空隙が発生しないように、 2種類目以降の抵抗インクの印刷バタ ーンを印刷することができる。  [0060] Since the screen plate is not used, the printing pattern of the second and subsequent types of resistance ink is set so that no gap is generated even when the printing pattern of the first type of resistance ink is narrow. Can be printed.
[0061] さらに、複数種類の抵抗インクの塗り分けによる抵抗値の変更'調整を、ソフトウェア のパラメータの設定変更により、簡便に行なうことができる。  [0061] Furthermore, the resistance value change 'adjustment by separately applying a plurality of types of resistance inks can be easily performed by changing the setting of software parameters.
[0062] 次に、具体例を説明する。  [0062] Next, a specific example will be described.
[0063] 予め、電子部品用の抵抗膜の材料である酸化ルテニウム (RuO )、ガラスなどを有  [0063] In advance, there is ruthenium oxide (RuO), glass or the like, which is a material for a resistance film for electronic components.
2  2
機溶剤に分散させた、組成の異なる 2種類のインクジェット用の抵抗インク 1及び抵抗 インク 2を作製した。  Two types of ink-jet resistance ink 1 and resistance ink 2 having different compositions dispersed in an organic solvent were prepared.
[0064] 抵抗インク 1の固形分中における各成分の重量パーセントは、 RuO力 ¾0重量パー  [0064] The weight percentage of each component in the solid content of the resistance ink 1 is RuO force ¾0 parts by weight.
2  2
セント、 CaO-Al O -SiO—B O系ガラスが 56重量0 /0、 SiO—B O—K O系 St, CaO-Al O -SiO-BO-based glass 56 weight 0/0, SiO-BO- KO system
2 3 2 2 3 2 2 3 2 ガラスが 14重量%である。抵抗インク 2の固形分中における各成分の重量パーセント は、 RuO力 0重量0 /0、 CaO-Al O—SiO—B O系ガラスが 35重量0 /0、 SiO B O -K O系ガラスが 15重量%である。抵抗インク 1の粘度は常温で 89mPa' s2 3 2 2 3 2 2 3 2 Glass is 14% by weight. Weight percent of each component in the solid content of the resistor ink 2, RuO force 0 wt 0/0, CaO-Al O -SiO-BO -based glass 35 weight 0/0, SiO BO-KO glass is 15% by weight. Resistance ink 1 has a viscosity of 89 mPa's at room temperature
2 3 2 、 抵抗インク 2の粘度は常温で 109mPa' sである。ただ ンク噴射前にインクを加熱 するので、インク噴射前の粘度は常温の場合よりも低くなり、約 20m 'Pa' sとなってい る。 2 3 2, Resistive Ink 2 has a viscosity of 109 mPa's at room temperature. However, since the ink is heated before ink jetting, the viscosity before ink jetting is lower than that at room temperature, approximately 20m 'Pa's.
[0065] 2個のピエゾ式インクジェットヘッドの下方に、 X方向、 Y方向に移動可能な移動テ 一ブルを持つインクジェットプリンタと、一対の端子として 2つの分離した銀電極を形 成しておいたセラミックグリーンシートを用意した。インクジェットヘッドは、 SUS接着 材に、孔径 50 mの孔が 280 mピッチで 256個一列に形成されており、 10〜: L00 pi (ピコリットル)のインク滴を飛ばすことができる。  [0065] Below the two piezo-type inkjet heads, an inkjet printer having a movable table movable in the X and Y directions, and two separate silver electrodes as a pair of terminals were formed. A ceramic green sheet was prepared. The inkjet head has SUS adhesive material with 256 holes with a hole diameter of 50 m formed in a row at a pitch of 280 m, and can eject ink droplets of 10 to L00 pi (picoliters).
[0066] インクジェットプリンタの 2個のインクジェットヘッドから、それぞれ、抵抗インク 1, 2を 略同時に吐出させ、セラミックグリーンシート上に、図 2 (a)の模式図に示すようなパタ ーンを印刷した。すなわち、 2つの銀電極間に、抵抗インク 1の複数のドットによる第 1 のグループと、抵抗インク 2による複数のドットによる第 2のグループとが千鳥状に交 互に配置された四角形のパターンを印刷した。  [0066] From the two inkjet heads of the inkjet printer, resistive inks 1 and 2 were ejected substantially simultaneously, and a pattern as shown in the schematic diagram of Fig. 2 (a) was printed on the ceramic green sheet. . That is, a square pattern in which a first group of a plurality of dots of resistive ink 1 and a second group of a plurality of dots of resistive ink 2 are alternately arranged in a staggered manner between two silver electrodes. Printed.
[0067] このセラミックグリーンシートを他のシートと積層 'プレス'焼成して、銀電極の間に抵 抗膜が形成されたセラミック基板を得た。このセラミック基板上の抵抗膜の抵抗値を 測定したところ、 5. 4k Ωの抵抗値を得た。  [0067] This ceramic green sheet was laminated with other sheets and “press” fired to obtain a ceramic substrate in which a resistance film was formed between silver electrodes. When the resistance value of the resistance film on the ceramic substrate was measured, a resistance value of 5.4 kΩ was obtained.
[0068] 比較例 1として、抵抗インク 1のみを吐出させ、セラミックグリーンシート上の 2つの銀 電極間を接続する四角形のパターンを印刷し、実施例 1と同様に積層 ·プレス'焼成 して、銀電極間に抵抗インク 1のみで抵抗膜が形成されたセラミック基板を得た。この 抵抗インク 1のみによる抵抗膜の抵抗値を測定したところ、 84k Ωの抵抗値を得た。  [0068] As Comparative Example 1, only resistive ink 1 was ejected, a square pattern connecting two silver electrodes on a ceramic green sheet was printed, and lamination and pressing were performed in the same manner as in Example 1. A ceramic substrate having a resistance film formed only between the resistance inks 1 between the silver electrodes was obtained. When the resistance value of the resistance film using only the resistance ink 1 was measured, a resistance value of 84 kΩ was obtained.
[0069] 比較例 2として、抵抗インク 2のみを吐出させ、セラミックグリーンシート上の 2つの銀 電極間を接続する四角形のパターンを印刷し、実施例 1と同様に積層 ·プレス'焼成 して、銀電極間に抵抗インク 2のみで抵抗膜が形成されたセラミック基板を得た。この 抵抗インク 2のみによる抵抗膜の抵抗値を測定すると、 2. 3k Ωの抵抗値を得た。  [0069] As Comparative Example 2, only the resistance ink 2 was ejected, a square pattern connecting the two silver electrodes on the ceramic green sheet was printed, and lamination and pressing were performed in the same manner as in Example 1. A ceramic substrate having a resistance film formed only between the resistance inks 2 between the silver electrodes was obtained. When the resistance value of the resistance film using only the resistance ink 2 was measured, a resistance value of 2.3 kΩ was obtained.
[0070] 以上の具体例から分かるように、抵抗インク 1と抵抗インク 2とを塗り分けて作製した 抵抗膜の抵抗値は、抵抗インク 1のみで作製した抵抗膜の抵抗値と、抵抗インク 2の みで作製した抵抗膜の抵抗値との中間の値にすることができる。 [0071] <実施例 2 > 実施例 2について、図 4及び図 5を参照しながら説明する。 [0070] As can be seen from the above specific examples, the resistance value of the resistance film manufactured by separately applying the resistance ink 1 and the resistance ink 2 is the resistance value of the resistance film manufactured only by the resistance ink 1, and the resistance ink 2 It can be set to an intermediate value between the resistance value of the resistance film produced only by this method. <Example 2> Example 2 will be described with reference to FIGS. 4 and 5. FIG.
[0072] 実施例 2にお 、ても、インクジェットプリンタを用いて印刷を行なう。 [0072] In Example 2 as well, printing is performed using an inkjet printer.
[0073] 図 4に模式的に示すように、移動テーブル 12に載置された基材 8上に、それぞれ、 インクジェットヘッド 14, 16から、略同 Cf立置に、略同時に印刷する。このとき、インク ジェットヘッド 14から吐出した抵抗インク 1のドット laの一部又は全部と、インクジェット ヘッド 16から吐出した抵抗インク 2のドット 2aの一部又は全部とが重なるように印刷す る。また、抵抗インク 1のドット laが乾燥する前に、抵抗インク 2のドット 2aを重ね、ドッ ト laの抵抗インク 1とドット 2aの抵抗インク 2とが混ざり合うようにする。混合を促進する ために、超音波を印加してもよい。混合により、抵抗インク 1の成分の一部と抵抗イン ク 2の成分の一部とが化学反応したり、合金を形成したりしてもよい。 As schematically shown in FIG. 4, printing is performed almost simultaneously on the base material 8 placed on the moving table 12 from the inkjet heads 14 and 16 in a substantially Cf standing manner. At this time, printing is performed so that a part or all of the dots la of the resistance ink 1 discharged from the ink jet head 14 and a part or all of the dots 2a of the resistance ink 2 discharged from the inkjet head 16 overlap. Also, before the dot la of the resistance ink 1 dries, the dot 2a of the resistance ink 2 is overlapped so that the resistance ink 1 of the dot la and the resistance ink 2 of the dot 2a are mixed. Ultrasound may be applied to facilitate mixing. By mixing, a part of the component of the resistance ink 1 and a part of the component of the resistance ink 2 may chemically react or an alloy may be formed.
[0074] 印刷中には、例えば移動テーブル 12を常温又は常温よりも低温に冷却することに より、基材 8を常温又は常温よりも低温の状態 (例えば、 25°C未満)にすることが、好 ましい。この場合、抵抗インクの乾燥を遅らせ、抵抗インクの混合時間を長くするによ り、抵抗膜の抵抗値のばらつきを小さくし、安定した抵抗値を得ることができる。 [0074] During printing, for example, by cooling the moving table 12 to room temperature or a temperature lower than room temperature, the substrate 8 can be brought into a state at room temperature or a temperature lower than room temperature (for example, less than 25 ° C). I like it. In this case, by delaying the drying of the resistance ink and lengthening the mixing time of the resistance ink, variation in the resistance value of the resistance film can be reduced and a stable resistance value can be obtained.
[0075] 抵抗インクを混合することによって、図 5の平面図に模式的に示すように、端子 4, 6 間に、複数の抵抗インク 1, 2が混合している混合部 3を形成する。混合部 3を乾燥し 、焼成することによって、端子 4, 6間に抵抗膜を形成する。 By mixing the resistance inks, as shown schematically in the plan view of FIG. 5, the mixing unit 3 in which the plurality of resistance inks 1 and 2 are mixed is formed between the terminals 4 and 6. A resistance film is formed between the terminals 4 and 6 by drying and firing the mixing portion 3.
[0076] 端子 4, 6間の抵抗膜の抵抗値は、例えば制御部 11のプログラムのパラメータを変 え、抵抗インク 1, 2の混合比、印刷面積、印刷パターン (平面形状、断面形状)等を 変更することで、変えることができる。抵抗インク 1, 2の混合比は、抵抗インク 1, 2のド ット la, 2aのサイズ (インク滴の量)や個数、重ね印刷回数を変えることにより、変更す ることがでさる。 [0076] The resistance value of the resistance film between the terminals 4 and 6 can be changed, for example, by changing the program parameters of the control unit 11, the mixing ratio of the resistance inks 1 and 2, the printing area, the printing pattern (planar shape, cross-sectional shape), etc. It can be changed by changing. The mixing ratio of the resistance inks 1 and 2 can be changed by changing the size (number of ink droplets) and the number of the inks 1 and 2 of the resistance inks 1 and 2 and the number of overprints.
[0077] 抵抗インク 1, 2の混合比を一定に保ちながら均一ピッチでドット la, 2aを印刷すれ ば、電極 4, 6間に実質的に均一な抵抗膜を形成することができる。  If the dots la and 2a are printed at a uniform pitch while keeping the mixing ratio of the resistance inks 1 and 2 constant, a substantially uniform resistance film can be formed between the electrodes 4 and 6.
[0078] 抵抗インク 1, 2を混合して所望の電気抵抗の抵抗膜を得るための抵抗インク 1, 2 の混合比は、例えば「体積混合則」と呼ばれる法則(下記の式(1) )を用いて予測す ることがでさる。  The mixing ratio of the resistance inks 1 and 2 for mixing the resistance inks 1 and 2 to obtain a resistance film having a desired electrical resistance is, for example, a law called “volume mixing rule” (the following formula (1)) It is possible to make predictions using
[0079] すなわち、複数成分の材料を混合して形成される複合材料の抵抗率や誘電率は、 2成分の場合、次の近似式が成り立つ。 That is, the resistivity and dielectric constant of a composite material formed by mixing a plurality of component materials are: In the case of two components, the following approximate expression holds.
V log = V log p + V log p · · · (1)  V log = V log p + V log p (1)
total total 1 1 2 2  total total 1 1 2 2
ここで、 V は複合材料の体積である。 p は複合材料の抵抗率である。 V , V total total 1 2 は、成分 1, 2の複合材料中における体積である。 p , は、成分 1, 2の抵抗率で  Where V is the volume of the composite material. p is the resistivity of the composite material. V 1 and V total total 1 2 are the volumes of components 1 and 2 in the composite material. p, is the resistivity of components 1 and 2
1 2  1 2
ある。  is there.
[0080] 次に、具体例を説明する。  [0080] Next, a specific example will be described.
[0081] 実施例 1の具体例と同じインクジェットプリンタと抵抗インク 1, 2を用い、抵抗インク 1 , 2を吐出させ、抵抗インク 1, 2の複数のドットを重ね合わせるように印刷し、セラミック グリーンシート上で抵抗インク 1, 2を混ぜながら、抵抗膜となるパターンを形成した。 その際、移動テーブルを加熱せず、常温(25°C)とし、セラミックグリーンシート上でィ ンクが乾燥することを遅らせ、抵抗インク 1 , 2同士が混合するのに十分な時間を確保 した。  [0081] Using the same inkjet printer and resistive inks 1 and 2 as the specific example of Example 1, the resistive inks 1 and 2 are ejected, and printing is performed so that a plurality of dots of the resistive inks 1 and 2 are overlapped. While mixing the resistance inks 1 and 2 on the sheet, a pattern to be a resistance film was formed. At that time, the moving table was not heated to room temperature (25 ° C), the drying of the ink on the ceramic green sheet was delayed, and sufficient time was secured for mixing the resistance inks 1 and 2 together.
[0082] このようにして抵抗膜となるパターンを印刷したグリーンシートに他のシートを積層、 プレス、焼成し、抵抗膜の抵抗値を測定すると、 15. 3k Ωの抵抗値を得た。この抵抗 値は、前述した比較例 1の抵抗インク 1のみで作製した抵抗膜の抵抗値と、前述した 比較例 2の抵抗インク 2のみで作製した抵抗膜の抵抗値との中間の値である。  [0082] When another sheet was laminated, pressed and fired on the green sheet printed with the pattern to be a resistance film in this way, the resistance value of the resistance film was measured, and a resistance value of 15.3 kΩ was obtained. This resistance value is an intermediate value between the resistance value of the resistance film made with only the resistance ink 1 of Comparative Example 1 described above and the resistance value of the resistance film made with only the resistance ink 2 of Comparative Example 2 described above. .
[0083] く実施例 3 > 実施例 3について、図 6を参照しながら説明する。  Example 3> Example 3 will be described with reference to FIG.
[0084] 図 6 (a)の平面図に示すパターンは、図 2 (d)のパターンのように、端子 4側に、四角 形に配置された複数(図では 4 X 6個)の抵抗インク 1のドット laを含む第 1のグルー プ Isが配置され、端子 6側に、四角形に配置された複数(図では 4 X 6個)の抵抗イン ク 2のドット 2aを含む第 2のグループ 2sが配置されている。第 1のグループ Isと第 2の グループ 2sとの間の領域 5sに、図 2 (a)のパターンのように、複数の抵抗インク 1のド ット laを含む第 3のグループと、複数の抵抗インク 2のドット 2aを含む第 4のグループ とが、千鳥状に交互に配置されている。ドット la, 2a同士は重なり合っており、第 1〜 第 4のグループは連続して 、る。  [0084] The pattern shown in the plan view of FIG. 6 (a) is a plurality of (4 × 6 in the figure) resistive inks arranged in a square on the terminal 4 side as in the pattern of FIG. 2 (d). The first group Is containing the dot 1 la, and the second group 2s containing the dots 2a of multiple (4 X 6 in the figure) resistance ink 2 arranged in a square on the terminal 6 side Is arranged. In a region 5s between the first group Is and the second group 2s, as shown in the pattern of FIG. The fourth groups including the dots 2a of the resistance ink 2 are alternately arranged in a staggered pattern. The dots la and 2a overlap each other, and the first to fourth groups are continuous.
[0085] 図 6 (b)の平面図に示すパターンは、図 2 (d)のパターンのように、端子 4側に、四 角形に配置された複数(図では 4 X 6個)の抵抗インク 1のドット laを含む第 1のダル ープ Itが配置され、端子 6側に、四角形に配置された複数(図では 4 X 6個)の抵抗 インク 2のドット 2aを含む第 2のグループ 2tが配置されている。第 1のグループ Itと第 2のグループ 2tとの間の領域 5tに、図 2 (b)のパターンのように、端子 4, 6を結ぶ方 向に対して直角方向に配置された複数(図では 6個)の抵抗インク 1のドット laを含む 第 3のグループと、端子 4, 6を結ぶ方向に対して直角方向に配置された複数(図で は 6個)の抵抗インク 2のドット 2aを含む第 4のグループとが、端子 4, 6を結ぶ方向に 交互に配置されている。ドット la, 2a同士は重なり合っており、第 1〜第 4のグループ は連続している。 [0085] The pattern shown in the plan view of FIG. 6 (b) is a plurality of (4 × 6 in the figure) resistive inks arranged in a square on the terminal 4 side as in the pattern of FIG. 2 (d). A plurality of resistors (4 X 6 in the figure) arranged in a square on the side of terminal 6 where the first loop It including 1 dot la is placed A second group 2t including dots 2a of ink 2 is arranged. In the region 5t between the first group It and the second group 2t, as shown in the pattern in Fig. 2 (b), a plurality of (Fig. In the figure, six dots (resistor ink 2) are arranged in a direction perpendicular to the direction connecting the third group and the terminals 4 and 6 to the third group including the dot la of the resistance ink 1. Are arranged alternately in the direction connecting the terminals 4 and 6. The dots la and 2a overlap each other, and the first to fourth groups are continuous.
[0086] 抵抗値が異なるドット la, 2aを図 6 (a)及び (b)のように配置すると、端子 4, 6の間 において抵抗傾斜を付けることができる。例えば、電気抵抗が相対的に大きい Pdを 含む抵抗インク 1のドット laと、電気抵抗が相対的に小さ 、Agを含む抵抗インク 2の ドット 2aを配置した場合、図上で上部の端子 4から下部の端子 6に向力つて電気抵抗 が次第に小さくなるように、抵抗を傾斜させることができる。  If dots la, 2a having different resistance values are arranged as shown in FIGS. 6 (a) and 6 (b), a resistance gradient can be provided between terminals 4 and 6. FIG. For example, when the dot la of the resistance ink 1 containing Pd having a relatively large electric resistance and the dot 2a of the resistance ink 2 containing Ag having a relatively small electric resistance are arranged from the upper terminal 4 in the figure. The resistance can be tilted so that the electrical resistance gradually decreases as it is directed to the lower terminal 6.
[0087] このように抵抗傾斜を付けることで、いわゆるシャント抵抗を別途設けずに回路側と 接地側のインピーダンスマッチングを図ることができ、簡単な方法で接地の効果を確 実に得ることができる。  [0087] By providing a resistance slope in this way, impedance matching between the circuit side and the ground side can be achieved without providing a so-called shunt resistor separately, and the effect of grounding can be obtained with a simple method.
[0088] なお、抵抗インク 1のドット laと抵抗インク 2のドット 2aの両方が金属の場合に限らず 、いずれか一方が金属で、他方が酸化ルテニウム、ガラス、カーボンなど金属以外の 場合にも、端子 4, 6間に抵抗傾斜を付けることができる。  [0088] It should be noted that not only the case where both the dot la of the resistance ink 1 and the dot 2a of the resistance ink 2 are metal, but one of them is a metal and the other is other than a metal such as ruthenium oxide, glass or carbon. A resistance gradient can be provided between the terminals 4 and 6.
[0089] <まとめ > 以上に説明した実施例 1、 2によれば、種々の抵抗値の抵抗要素を効 率よく作製することができる。  <Summary> According to Examples 1 and 2 described above, it is possible to efficiently produce resistance elements having various resistance values.
[0090] すなわち、インクジェットを用いて抵抗インクを印刷することで、多数のスクリーン版 を用意する必要がなくなる。これにより、版製作コストを削減できるため、低コストで電 子部品の製造を行なうことができる。また、版製作期間がなくなることで、短納期対応 が可能となる。  That is, by printing the resistance ink using inkjet, it is not necessary to prepare a large number of screen plates. As a result, the plate manufacturing cost can be reduced, and electronic parts can be manufactured at low cost. In addition, since there is no plate production period, it is possible to meet short delivery times.
[0091] また、インクジェットは印刷パターンの変更が容易であるので、抵抗膜となるパター ンの平面形状、断面形状等を変えることで、異なる抵抗値の抵抗膜を簡便に作製す ることがでさる。  [0091] In addition, since it is easy to change the printing pattern in the inkjet, it is possible to easily produce resistance films having different resistance values by changing the planar shape, cross-sectional shape, etc. of the pattern to be the resistance film. Monkey.
[0092] なお、本発明は、上記した実施の形態に限定されるものではなぐ種々変更を加え て実施可能である。 Note that the present invention is not limited to the above-described embodiment, and various modifications are made. Can be implemented.
例えば、 3種類以上の抵抗インクを用いてもよい。インクジェットの代わりに、レーザ 一プリンタを用い、電気抵抗の異なる複数種類のドットを配置することにより、抵抗要 素を作製することも可能である。  For example, three or more types of resistance ink may be used. It is also possible to produce a resistance element by using a single laser printer instead of inkjet and arranging a plurality of types of dots with different electrical resistance.

Claims

請求の範囲 The scope of the claims
[1] 互いに対向する一対の端子と、  [1] a pair of terminals facing each other;
該一対の端子間に配置された抵抗要素とを備えた電子部品において、 前記抵抗要素は、連続して配置された少なくとも 2つの抵抗部(以下、「第 1抵抗部 」、「第 2抵抗部」という。)を含み、  An electronic component comprising a resistance element disposed between the pair of terminals, wherein the resistance element includes at least two resistance parts (hereinafter referred to as “first resistance part”, “second resistance part”) ")
前記第 1抵抗部は、互いに重なり合って配置された複数の第 1のドットを含み、 前記第 2抵抗部は、互いに重なり合って配置された前記第 1のドットとは電気抵抗 が異なる複数の第 2のドットを含むことを特徴とする、電子部品。  The first resistance unit includes a plurality of first dots arranged to overlap each other, and the second resistance unit includes a plurality of second dots having different electric resistances from the first dots arranged to overlap each other. An electronic component characterized by including a dot.
[2] 前記第 1抵抗部と前記第 2抵抗部とが前記端子間に直列に配置されていることを特 徴とする、請求項 1に記載の電子部品。 2. The electronic component according to claim 1, wherein the first resistance part and the second resistance part are arranged in series between the terminals.
[3] 前記第 1抵抗部と前記第 2抵抗部とが前記端子間に並列に配置されていることを特 徴とする、請求項 1に記載の電子部品。 [3] The electronic component according to [1], wherein the first resistance portion and the second resistance portion are arranged in parallel between the terminals.
[4] 前記第 1抵抗部と前記第 2抵抗部との少なくとも一方が金属であることを特徴とする[4] The at least one of the first resistance part and the second resistance part is a metal.
、請求項 1に記載の電子部品。 The electronic component according to claim 1.
[5] 基材の第 1の領域に、抵抗要素の一部となる成分を含む第 1の抵抗インクを用い、 インクジェット法により、互いに重なり合う複数の第 1のドットを配置する第 1の工程と、 前記第 1の領域に隣接する第 2の領域に、前記抵抗要素の他の一部となる成分を 含み前記第 1の抵抗インクとは組成が異なる第 2の抵抗インクを用い、インクジェット 法により、互いに重なり合う複数の第 2のドットを配置する第 2の工程と、 [5] A first step of using a first resistance ink containing a component that is a part of a resistance element in a first region of the base material, and arranging a plurality of first dots that overlap each other by an inkjet method; The second region adjacent to the first region includes a component that is another part of the resistive element, and a second resistive ink having a composition different from that of the first resistive ink is used. A second step of arranging a plurality of second dots overlapping each other;
前記第 1の領域の前記第 1のドットと前記第 2の領域の前記第 2のドットとを熱処理し て、前記抵抗要素を形成する第 3の工程と、  A third step of heat-treating the first dots in the first region and the second dots in the second region to form the resistance element;
を備えたことを特徴とする、電子部品の製造方法。  A method for producing an electronic component, comprising:
[6] 前記第 2の工程の前に、前記第 1のドットを乾燥させるドット乾燥工程を備えたことを 特徴とする、請求項 5に記載の電子部品の製造方法。 6. The method for manufacturing an electronic component according to claim 5, further comprising a dot drying step for drying the first dots before the second step.
[7] 前記ドット乾燥工程は、前記第 1の工程において、前記基材を常温より高温にする ことにより、前記第 1のドットを乾燥させることを特徴とする、請求項 6に記載の電子部 品の製造方法。 [7] The electronic unit according to [6], wherein the dot drying step dries the first dot by setting the base material to a temperature higher than room temperature in the first step. Product manufacturing method.
[8] 前記ドット乾燥工程は、前記第 1の工程を乾燥雰囲気中において行なうことにより、 前記第 1のドットを乾燥させることを特徴とする、請求項 6または 7に記載の電子部品 の製造方法。 [8] The dot drying step is performed by performing the first step in a dry atmosphere. 8. The method of manufacturing an electronic component according to claim 6, wherein the first dots are dried.
[9] 基材に、抵抗要素となる成分を含む第 1の抵抗インクを用い、インクジェット法により 、複数の第 1のドットを配置する第 1の工程と、  [9] A first step of arranging a plurality of first dots by an inkjet method using a first resistance ink containing a component that becomes a resistance element on a substrate;
前記抵抗要素となる成分を含み前記第 1の抵抗インクとは組成が異なる第 2の抵抗 インクを用い、インクジェット法により、複数の第 2のドットを、前記第 1のドットに重なる ように配置して、前記第 1のドットの前記第 1の抵抗インクと前記第 2のドットの前記第 2の抵抗インクとを混合させて混合部を形成する第 2の工程と、  Using a second resistance ink containing a component that serves as the resistance element and having a composition different from that of the first resistance ink, a plurality of second dots are arranged to overlap the first dots by an inkjet method. A second step of mixing the first resistive ink of the first dot and the second resistive ink of the second dot to form a mixing portion;
前記混合部を熱処理して、前記抵抗要素を形成する第 3の工程と、  A third step of heat-treating the mixing portion to form the resistance element;
を備えたことを特徴とする、電子部品の製造方法。  A method for producing an electronic component, comprising:
[10] 前記第 1の工程及び前記第 2の工程において、常温又は常温より低温にすることを 特徴とする、請求項 9に記載の電子部品の製造方法。  [10] The method of manufacturing an electronic component according to [9], wherein in the first step and the second step, the temperature is set to normal temperature or lower than normal temperature.
PCT/JP2007/051735 2006-02-03 2007-02-01 Electronic component and method for manufacturing same WO2007088948A1 (en)

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