WO2007076820A3 - Ultraschallwandler mit selbsttragender anpassschicht sowie verfahren zur herstellung - Google Patents

Ultraschallwandler mit selbsttragender anpassschicht sowie verfahren zur herstellung Download PDF

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Publication number
WO2007076820A3
WO2007076820A3 PCT/DE2006/002272 DE2006002272W WO2007076820A3 WO 2007076820 A3 WO2007076820 A3 WO 2007076820A3 DE 2006002272 W DE2006002272 W DE 2006002272W WO 2007076820 A3 WO2007076820 A3 WO 2007076820A3
Authority
WO
WIPO (PCT)
Prior art keywords
ultrasonic transducer
layer
transducer
matching layer
self
Prior art date
Application number
PCT/DE2006/002272
Other languages
English (en)
French (fr)
Other versions
WO2007076820A2 (de
Inventor
Robert Lemor
Steffen Tretbar
Eike Christian Weiss
Original Assignee
Fraunhofer Ges Forschung
Robert Lemor
Steffen Tretbar
Eike Christian Weiss
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Ges Forschung, Robert Lemor, Steffen Tretbar, Eike Christian Weiss filed Critical Fraunhofer Ges Forschung
Priority to EP06828702A priority Critical patent/EP1963030A2/de
Publication of WO2007076820A2 publication Critical patent/WO2007076820A2/de
Publication of WO2007076820A3 publication Critical patent/WO2007076820A3/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0688—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction with foil-type piezoelectric elements, e.g. PVDF
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/12—Diagnosis using ultrasonic, sonic or infrasonic waves in body cavities or body tracts, e.g. by using catheters
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4444—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device related to the probe
    • A61B8/445—Details of catheter construction

Landscapes

  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Medical Informatics (AREA)
  • Surgery (AREA)
  • Pathology (AREA)
  • Radiology & Medical Imaging (AREA)
  • Biophysics (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Physics & Mathematics (AREA)
  • Molecular Biology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Mechanical Engineering (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)

Abstract

Die vorliegende Erfindung betrifft einen Ultraschallwandler sowie ein Verfahren zu dessen Herstellung. Der Ultraschallwandler weist zumindest eine piezoaktive Wandlerschicht (14), die als nicht selbsttragende Schicht ausgebildet ist, Kontaktierungsschichten (13, 15) zur elektrischen Kontaktierung der Wandlerschicht (14) und eine vorderseitige Anpassschicht (12) zur akustischen Impedanzanpassung an ein Ankoppelmedium auf. Die Anpassschicht (12) ist beim vorliegenden Ultraschallwandler als tragendes Element für die Wandlerschicht (14) und die Kontaktierungsschichten (13, 15) ausgebildet. Auf diese Weise kann ein mikrosystemtechnischer Aufbau des Ultraschallwandlers realisiert werden, der eine erhöhte Leistungsabgabe im Sendefall und eine erhöhte Sensitivität im Empfangsfall aufweist.
PCT/DE2006/002272 2005-12-21 2006-12-18 Ultraschallwandler mit selbsttragender anpassschicht sowie verfahren zur herstellung WO2007076820A2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP06828702A EP1963030A2 (de) 2005-12-21 2006-12-18 Ultraschallwandler mit selbsttragender anpassschicht sowie verfahren zur herstellung

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005061343.8 2005-12-21
DE200510061343 DE102005061343B4 (de) 2005-12-21 2005-12-21 Ultraschallwandler mit selbsttragender Anpassschicht sowie Verfahren zur Herstellung

Publications (2)

Publication Number Publication Date
WO2007076820A2 WO2007076820A2 (de) 2007-07-12
WO2007076820A3 true WO2007076820A3 (de) 2008-03-20

Family

ID=38135530

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2006/002272 WO2007076820A2 (de) 2005-12-21 2006-12-18 Ultraschallwandler mit selbsttragender anpassschicht sowie verfahren zur herstellung

Country Status (3)

Country Link
EP (1) EP1963030A2 (de)
DE (1) DE102005061343B4 (de)
WO (1) WO2007076820A2 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012003495B4 (de) * 2012-02-24 2015-04-09 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Ultraschallwandler zur Anregung und/oder zur Detektion von Ultraschall unterschiedlicher Frequenzen
DE102014207681A1 (de) 2014-04-24 2015-10-29 Robert Bosch Gmbh Membran für einen Ultraschallwandler und Ultraschallwandler

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2503517A1 (fr) * 1981-04-06 1982-10-08 Thomson Csf Transducteur piezo-electrique
US4473769A (en) * 1982-07-30 1984-09-25 Thomson-Csf Transducer of the half-wave type with a piezoelectric polymer active element
US5381386A (en) * 1993-05-19 1995-01-10 Hewlett-Packard Company Membrane hydrophone

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2473242A1 (fr) * 1980-01-08 1981-07-10 Thomson Csf Transducteur electroacoustique a dome actif
DE3809447A1 (de) * 1988-03-21 1989-10-12 Siemens Ag Verfahren zur herstellung einer anpassschicht bei ultraschallwandlern
JP2730756B2 (ja) * 1988-04-13 1998-03-25 日立建機株式会社 超音波探触子及びその製造方法
US5159228A (en) * 1990-08-24 1992-10-27 Siemens Aktiengesellschaft Pressure wave sensor
US6831394B2 (en) * 2002-12-11 2004-12-14 General Electric Company Backing material for micromachined ultrasonic transducer devices

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2503517A1 (fr) * 1981-04-06 1982-10-08 Thomson Csf Transducteur piezo-electrique
US4473769A (en) * 1982-07-30 1984-09-25 Thomson-Csf Transducer of the half-wave type with a piezoelectric polymer active element
US5381386A (en) * 1993-05-19 1995-01-10 Hewlett-Packard Company Membrane hydrophone

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP1963030A2 *

Also Published As

Publication number Publication date
DE102005061343A1 (de) 2007-07-05
WO2007076820A2 (de) 2007-07-12
EP1963030A2 (de) 2008-09-03
DE102005061343B4 (de) 2010-11-25

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