WO2007072617A1 - Ceramic electronic component and method for manufacturing same - Google Patents

Ceramic electronic component and method for manufacturing same Download PDF

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Publication number
WO2007072617A1
WO2007072617A1 PCT/JP2006/319960 JP2006319960W WO2007072617A1 WO 2007072617 A1 WO2007072617 A1 WO 2007072617A1 JP 2006319960 W JP2006319960 W JP 2006319960W WO 2007072617 A1 WO2007072617 A1 WO 2007072617A1
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WIPO (PCT)
Prior art keywords
ceramic
conductive paste
electronic component
ceramic electronic
main part
Prior art date
Application number
PCT/JP2006/319960
Other languages
French (fr)
Japanese (ja)
Inventor
Daiji Kono
Kaoru Tachibana
Takehiko Otsuki
Original Assignee
Murata Manufacturing Co., Ltd.
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Publication date
Application filed by Murata Manufacturing Co., Ltd. filed Critical Murata Manufacturing Co., Ltd.
Publication of WO2007072617A1 publication Critical patent/WO2007072617A1/en

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00Fixed inductances of the signal type 
    • H01F17/0006Printed inductances
    • H01F17/0013Printed inductances with stacked layers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00Details of transformers or inductances, in general
    • H01F27/28Coils; Windings; Conductive connections
    • H01F27/29Terminals; Tapping arrangements for signal inductances
    • H01F27/292Surface mounted devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/12Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials
    • H01F1/34Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials non-metallic substances, e.g. ferrites
    • H01F1/36Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials non-metallic substances, e.g. ferrites in the form of particles
    • H01F1/37Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials non-metallic substances, e.g. ferrites in the form of particles in a bonding agent
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00Fixed inductances of the signal type 
    • H01F17/04Fixed inductances of the signal type  with magnetic core
    • H01F17/045Fixed inductances of the signal type  with magnetic core with core of cylindric geometry and coil wound along its longitudinal axis, i.e. rod or drum core
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00Details of transformers or inductances, in general
    • H01F27/02Casings
    • H01F27/027Casings specially adapted for combination of signal type inductors or transformers with electronic circuits, e.g. mounting on printed circuit boards

Definitions

  • the present invention relates to a ceramic electronic component, and more particularly to a ceramic electronic component such as a chip inductor in which an electronic element such as a coil is incorporated in a ceramic laminate and a method for manufacturing the same.
  • various ceramic electronic parts such as chip inductors are provided in which a sheet made of ferrite and a coil conductor are laminated and a conductive paste is applied to both ends of the laminated body to form external electrodes.
  • the external electrode is formed by immersing the end of the laminate in a thin paste layer or printing.
  • the printing method is laborious and complicated, and is not practical in terms of cost.
  • the dipping method is suitable for mass production, but it is difficult to prevent excessive wetting of the conductive paste, and the dimensional accuracy of the folded portion of the formed external electrode on the side of the laminate is poor. Have a point.
  • Patent Document 1 includes, as shown in FIG. 11, an inner layer portion 115 having a porosity of 30 to 80 vol% and incorporating a coil L, and outer layer portions 116a and 116b having a porosity of 10 vol% or less.
  • a ceramic electronic component comprising a ceramic laminate 120 is disclosed.
  • the external electrodes 121 provided at both ends of the laminate 120 are formed deep into the inner layer 115, and the difference in wettability between the inner layer 115 and the outer layer 116 a, 116 b is represented by the external electrode 121. There is no suggestion on how to use it for the formation.
  • Patent Document 1 Japanese Patent Laid-Open No. 2005-38904
  • an object of the present invention is to provide a ceramic electronic component that can stop the wetting of a conductive paste by a dipping method at a predetermined position and can form an external electrode with high dimensional accuracy, and a method for manufacturing the same. There is to do.
  • a first invention is a ceramic electronic component in which external electrodes formed using a conductive paste are provided at both ends of a ceramic laminate incorporating an electronic element,
  • the laminate includes a main portion and an end portion provided with the external electrode, and the surface state of the main portion has lower wettability of the conductive paste than the surface state of the end portion.
  • the surface of the part is formed up to the boundary part with the main part.
  • the conductive paste when the conductive paste is applied to the end of the laminate, the conductive paste is prevented from wetting up at the boundary with the main part having low wettability, The external electrode is formed with high dimensional accuracy.
  • the main part also has a ceramic laminated body force having a porosity of 30 to 80 vol%
  • the end part also has a ceramic laminated body force having a porosity of 10 vol% or less. It is preferable to become.
  • the pores may be filled with rosin. Further, even if the surface roughness of the main part is made larger than the surface roughness of the end part, the wetting of the conductive paste can be stopped at the boundary part with the main part.
  • a second invention is a ceramic electronic component in which external electrodes formed using a conductive paste V are provided at both ends of a ceramic laminated body incorporating an electronic element, the ceramic laminated body comprising: And an intermediate portion located between the main portion and the end portion, and the surface state of the intermediate portion is more wettable than the surface state of the end portion.
  • the lower external electrode is formed on the surface of the end portion up to a boundary portion with the intermediate portion.
  • the conductive paste when the conductive paste is applied to the end portion of the laminate, the conductive paste is prevented from wetting at the boundary with the intermediate portion having low wettability, The external electrode is formed with high dimensional accuracy.
  • the intermediate portion also has a ceramic laminated body force having a porosity of 30 to 80 vol%, and the end portion also has a ceramic laminated body force having a porosity of 10 vol% or less. It is preferable to become.
  • the pores may be filled with rosin. Even if the surface roughness of the intermediate part is made larger than the surface roughness of the edge part, the wetting of the conductive paste can be reduced with the intermediate part. Can be stopped at the boundary.
  • a third invention is a ceramic electronic component in which external electrodes formed using a conductive paste V are provided at both ends of a ceramic laminate incorporating an electronic element, the ceramic laminate being a main component. Part and an end provided with the external electrode, in plan view from the arrangement direction of the main part and the end part, the end part is formed inside the outer periphery of the main part, the external electrode is The surface of the end portion is formed up to the boundary portion with the main portion.
  • the conductive paste when the conductive paste is applied to the end portion of the multilayer body, the conductive paste is prevented from getting wet at the boundary portion with the main portion where the step exists.
  • the external electrodes are formed with high accuracy in terms of dimensions.
  • a fourth invention is a ceramic electronic component in which external electrodes formed using a conductive paste V are provided at both ends of a ceramic laminate incorporating an electronic element, the ceramic laminate being a main component. And an intermediate portion positioned between the main portion and the end portion, and the intermediate portion is provided in a concave shape between the main portion and the end portion.
  • the external electrode is formed on the surface of the end portion up to a boundary portion with the intermediate portion or the main portion.
  • the conductive paste when the conductive paste is applied to the end of the laminate, the conductive paste is prevented from wetting at the concave intermediate portion, and the external electrode is It is formed with high dimensional accuracy.
  • a fifth invention is a ceramic electronic component in which external electrodes formed using a conductive paste V are provided at both ends of a ceramic laminated body incorporating an electronic element, the ceramic laminated body comprising: And an intermediate part located between the main part and the end part, and the intermediate part is provided in a convex shape between the main part and the end part, The external electrode is formed on the surface of the end portion up to a boundary portion with the intermediate portion.
  • the conductive paste when the conductive paste is applied to the end of the laminate, the conductive paste is prevented from getting wet at the boundary with the intermediate portion where there is a step.
  • the external electrodes are formed with high accuracy in terms of dimensions.
  • a conductive paste is used at both ends of a ceramic laminate incorporating an electronic element.
  • V a method of manufacturing a ceramic electronic component provided with external electrodes formed by laminating ceramic sheets, a main part having a surface state in which the wettability of the conductive paste is relatively low, and the wettability of the conductive paste Forming a laminate composed of an end portion having a relatively high surface state, and applying a conductive paste to the surface of the end portion to form an external electrode up to a boundary portion with the main portion. It is characterized by having.
  • the conductive paste when applying the conductive paste to the end of the laminate, the conductive paste has low wettability and wets at the boundary with the main part. The force S is prevented, and the external electrode is formed with high dimensional accuracy.
  • a seventh invention is a method for manufacturing a ceramic electronic component in which external electrodes formed using a conductive paste V are provided at both ends of a ceramic laminate incorporating an electronic element, wherein the ceramic sheets are laminated.
  • a step of forming a laminated body comprising: an intermediate portion positioned; and a step of applying a conductive paste to the surface of the end portion to form an external electrode up to a boundary portion with the intermediate portion.
  • the conductive paste when applying the conductive paste to the end portion of the laminate, the conductive paste has a wetting force at the boundary with the intermediate portion having low wettability. S is prevented, and the external electrode is formed with high dimensional accuracy.
  • the main part or the intermediate part having a surface state in which the wettability of the conductive paste is relatively low the ceramic raw material power containing a burned-out material is also ceramic. It is preferable to form a green sheet by laminating the sheets.
  • An eighth invention is a method for manufacturing a ceramic electronic component in which external electrodes formed using a conductive paste V are provided at both ends of a ceramic laminate incorporating electronic elements, the ceramic sheets being laminated
  • the main portion and end portions located at both ends of the main portion, and the end portion is arranged on the inner side of the outer periphery of the main portion in plan view.
  • V forming the laminated body, and applying an electrically conductive paste to the surface of the end portion to form an external electrode And a step of forming up to a boundary portion with the main portion.
  • the conductive paste when the conductive paste is applied to the end of the laminate, the conductive paste wets up at the boundary with the main part where there is a step.
  • the external electrode is formed with high accuracy in terms of dimension.
  • a ninth invention is a method of manufacturing a ceramic electronic component in which an external electrode formed by using a conductive paste V is provided at both ends of a ceramic laminate incorporating an electronic element, wherein the ceramic sheet is laminated. And the intermediate part located between the main part and the end part and the main part and the end part, and the laminated body so that the surface shape of the intermediate part is different from the surface shape of the main part and the end part. And a step of applying a conductive paste to the surface of the end portion to form an external electrode up to the intermediate portion or the boundary portion with the main portion.
  • the surface shape of the intermediate portion can be formed in a concave shape or a convex shape with respect to the main portion and the end portion to have different shapes.
  • the conductive paste when applying the conductive paste to the end portion of the laminate, the conductive paste has a wetting force at the boundary with the intermediate portion having a different shape.
  • the external electrode is formed with high dimensional accuracy.
  • the external electrode is preferably formed by immersing the end of the multilayer body in a conductive paste. Ceramic electronic parts equipped with external electrodes with good dimensional accuracy can be mass-produced at low cost.
  • the external electrodes are formed by using a conductive paste at both ends of the ceramic laminate, and the conductive paste applied to both ends of the ceramic laminate is baked or conductive grease is used. If it is a material, it means that it is cured after application.
  • the wetting force S of the conductive paste is prevented at the boundary between the end and the main part or the intermediate part.
  • the dimension of the folded portion to the side surface of the laminate can be accurately formed.
  • FIG. 1 is a cross-sectional view schematically showing a ceramic electronic component which is a first embodiment of the present invention.
  • FIG. 2 is an exploded perspective view of the ceramic electronic component.
  • FIG. 3 is a cross-sectional view of a main part of the ceramic electronic component.
  • FIG. 4 is a sectional view schematically showing a ceramic electronic component according to a second embodiment of the present invention.
  • FIG. 5 is a sectional view schematically showing a ceramic electronic component according to a third embodiment of the present invention.
  • FIG. 6 is a cross-sectional view schematically showing a ceramic electronic component according to a fourth embodiment of the present invention.
  • FIG. 7 shows a ceramic electronic component according to a fifth embodiment of the present invention, in which (A) is a schematic cross-sectional view, and (B) is a view taken in the direction of arrow A with the external electrode omitted.
  • FIG. 8 is a sectional view schematically showing a ceramic electronic component according to a sixth embodiment of the present invention.
  • FIG. 9 is a sectional view schematically showing a ceramic electronic component according to a seventh embodiment of the present invention.
  • FIG. 10 is an explanatory diagram showing a state in which a conductive paste is applied to the end of a ceramic electronic component
  • FIG. 11 is a cross-sectional view showing a conventional ceramic electronic component.
  • FIGS. 1 to 3 Refer to the first embodiment, FIGS. 1 to 3
  • the ceramic electronic component 1A includes a coil L built in the laminate 10 and external electrodes 31 and 31 that are electrically connected to the coil L at both ends of the laminate 10. It is configured as a formed chip inductor.
  • the laminate 10 is made by laminating a plurality of ceramic sheets 15 having a predetermined pattern of coil conductors 21 and a plurality of ceramic sheets 16 having via-hole conductors 25, and firing them. Is formed.
  • Each coil conductor 21 forms a helical coil L via a via-hole conductor 22 formed at one end, and both ends of the coil L are electrically connected to the external electrodes 31 and 31 by via-hole conductors 25. Yes.
  • the laminated portion of the ceramic sheet 15 is referred to as a main portion 11 of the laminated body 10, and the laminated portion of the ceramic sheet 16 is referred to as end portions 12 and 12.
  • the main part 11 has a porosity of 30 to 80 vol%, and the end parts 12 and 12 have a porosity of 10 vol% or less. If the porosity is less than or equal to lOvol%, the voids are generated by bubbles or binders and dispersants volatile components encapsulated when the slurry-like ceramic material is produced. Higher porosity than ceramic materials An appropriate amount of burned-out material can be added and fired to obtain it. In addition, these pores may be filled with an epoxy resin. As burned-out materials, those that also have cross-linked polystyrene strength are known.
  • FIG. 3 shows a state in which holes 35 are formed in the laminate 10 and filled with the resin 36.
  • the holes 35 include open holes and closed holes.
  • the dielectric constant is lowered and the stray capacitance is reduced, so that desired impedance characteristics can be obtained.
  • the porosity exceeds 80 vol%, which is preferably 30 vol% or more, the mechanical strength of the laminate 10 decreases.
  • the conductive base applied as the external electrodes 31 and 31 is diffused into the laminated body 10.
  • the magnetic permeability increases, the leakage of magnetic flux in the coil L is reduced. Filling the pores 35 with the resin 36 has an effect of suppressing a decrease in impedance.
  • V Volume of ceramic sintered body
  • the external electrodes 31, 31 are formed by applying a conductive paste to the surfaces of the end portions 12, 12 of the multilayer body 10 by an immersion method. That is, as shown in FIG. 10, a flat stainless steel tank 50 is filled with a conductive paste P to a predetermined thickness, and a plurality of laminates 10 held on the back surface of the jig 51 are attached to the jig 51. By lowering, the end surface force of the laminate 10 is immersed in the conductive paste P until it contacts the bottom surface of the stainless steel tank 50, pulled up, and then dried.
  • the wettability of the conductive paste with respect to the laminate varies depending on the surface state of the laminate.
  • the porosity of the laminate is small, the wettability is relatively large.
  • the porosity is large, the wettability is relatively small.
  • the main part 11 is formed with a porosity of 30 to 80 vol%, and the end part is formed with a porosity of 10 vol% or less, so that the end part 12 of the laminate 10 is electrically conductive.
  • the conductive paste P has low wettability and prevents the wetting due to surface tension at the boundary with the main part 11. Therefore, the external electrode 31 is dimensionally It will be formed accurately. The dimensional accuracy of the external electrode 31 in the first embodiment will be described below together with a comparative example as an experimental result by the present inventors.
  • a method of manufacturing a ceramic electronic component will be described.
  • a desired pattern is formed on a ceramic green sheet having a through-hole by a printing method such as screen printing using a conductive paste, and the sheet is laminated and crimped so that a spiral coil is formed.
  • Ceramic electronic parts are obtained by cutting and firing.
  • ceramic materials and conductor materials are alternately printed by a printing method such as screen printing to form a helical coil, and a ceramic electronic component is obtained by pressure bonding, cutting, and firing.
  • the ceramic electronic component 1A was manufactured by the following steps. First, the oxide materials of -keckle, zinc, copper and iron were mixed and calcined at 800 ° C for 1 hour. Thereafter, the raw material was pulverized by a ball mill and dried to obtain a Ni—Zn—Cu ferrite raw material having an average particle diameter of about 2 m. Next, a solvent, a binder and a dispersant were added to the ferrite raw material and kneaded to obtain a slurry.
  • the sheet 16 constituting the end portions 12 and 12 was formed into a ceramic green sheet having a thickness of 40 m by the doctor-blade method using the slurry-like ferrite raw material.
  • a commercially available spherical polymer for example, a burned-out material having an average particle size of 8 / zm and having a crosslinked polystyrene power is added. Then, they were kneaded to form a slurry, and a ceramic green sheet having a thickness of 40 ⁇ m was obtained by a doctor blade method or the like.
  • a hole for a via-hole conductor was formed in the prepared ceramic green sheet, and a coil conductor or a via-hole conductor was screen-printed.
  • conductive paste such as Ag, Pd, Cu, Au and their alloys.
  • the sheets 15 and 16 were laminated and pressure-bonded to produce a laminated body 10 in which the coil L was built.
  • the above process is performed in a state where a plurality of coils are arranged in a matrix as a mother substrate, and the mother laminate is cut into one unit laminate (chip).
  • the obtained laminate was heat-treated at 400 ° C. for 3 hours (debinding agent treatment) and then baked at 925 ° C. for 2 hours. From the main part 11 and the end parts 12, 12 having the desired porosity A sintered ceramic laminate 10 is obtained.
  • the ceramic sintered laminate 10 was immersed in an epoxy-based resin, the resin was filled in the pores, and the resin was cured at 150 to 180 ° C. for 2 hours. After removing the resin film adhering to the surface of the laminate 10, a conductive paste made of Ag is applied to the surfaces of the end portions 12 and 12 of the laminate 10 using the coating apparatus shown in FIG. 31, 31 were formed.
  • the present inventors produced a ceramic sintered laminate 10 having a long side of 1. Omm, a short side of 0.5mm, and a height of 0.5mm by the above-described process.
  • the end portions 12 and 12 having a porosity of 10 vol% or less are set to 200 m (dimension W1) from the end face, and the main portion 11 contains about 5 ⁇ m pores with a porosity of about 50 vol%.
  • a conductive paste mainly composed of Ag was applied to the end portion.
  • the viscosity of the conductive paste was 31.4 Pa.s when the shear rate was about 1.9 sec-1.
  • 100 ceramic sintered laminates 10 are held on the back surface of the jig 51, and the conductive paste ⁇ is put into the stainless steel tank 50 to a depth of 150 ⁇ m.
  • the surface of the paste P was smoothed using a squeegee.
  • the jig 51 was lowered until the end surface of the laminate 10 was in contact with the bottom surface of the stainless steel tank 50, and the conductive paste P was applied to the end 12 of the laminate 10. After coating, it was dried in an oven at 120 ° C for 1 hour.
  • the dimension W2 of the folded portion of the external electrode 31 formed here was determined.
  • the conductive paste is applied only to one end of the laminate 10 and dried, and the dimension W is subtracted from the dimension W measured in advance from the length L of the laminate 10. We asked for W2. The results are shown in Table 1 below.
  • FIG. 1 a laminated body formed of a ceramic material having the same size as the laminated body 10 and the main portion 11 being the same as the end portions 12 and 12 (mixed with a burned-out material) is shown in FIG.
  • a conductive paste 150 m in depth was applied to the end using the coating apparatus shown in Fig. 1, and dried under the same conditions, and the dimensions of the folded portion of the formed external electrode were determined. The results are also shown in Table 1.
  • the folded part has a minimum dimension of 205 ⁇ m and a maximum of 232 ⁇ m. It will be a great help.
  • the dimension W2 of the folded portion is 203 ⁇ m at the minimum, 215 ⁇ m at the maximum, and 208 ⁇ m on the average, which is a preferable dimensional accuracy. This is because wetting of the conductive paste was stopped at the boundary with the main part having a large porosity.
  • represents the magnitude of variation with standard deviation.
  • the external electrode 31 is formed to the inside of about 10 to 20 m from the boundary. .
  • the ceramic electronic component 1B is formed of a laminated body 10 with a main part 11, end parts 12, 12 at both ends, and intermediate parts 13, 13. Only 13 had a porosity of 30 to 80 vol%. The porosity of the main part 11 and the end parts 12 and 12 is 10 vol% or less. The width of the intermediate parts 13 and 13 is 20 m. In FIG. 4, the internal coils are not shown.
  • the conductive paste when the conductive paste is applied to the end portions 12 and 12, the conductive paste has a boundary portion with the intermediate portions 13 and 13 having a high porosity (the surface has low wettability). The wetting is prevented and the external electrode 31 is formed with high dimensional accuracy.
  • the ceramic electronic component 1C is formed of a laminated body 10 with a main part 11 and end parts 12 and 12 at both ends, and the end parts 12 and 12 have a normal surface roughness.
  • the surface roughness Ra of the main part 11 is set to 1.45 / zm, for example, while it is (Ra: about 0.81 / zm).
  • the internal coils are not shown.
  • the surface roughness is rough, the wettability of the conductive paste decreases. Therefore, also in the third embodiment, when the conductive paste is applied to the end portions 12 and 12, the conductive paste has a rough surface (the surface has low wettability) at the boundary portion with the main portion 11. The wetting is prevented, and the external electrode 31 is formed with high dimensional accuracy.
  • the ceramic electronic component 1D includes a laminated body 10 formed of a main part 11, end parts 12, 12 at both ends, and intermediate parts 13, 13. Only the surface roughness Ra is set to 1.45 / zm, for example, and the surface roughness of the main part 11 and the end parts 12 and 12 is assumed to be a normal surface roughness. In FIG. 6, the internal coils are not shown.
  • the conductive paste when the conductive paste is applied to the end portions 12 and 12, the conductive paste is prevented from wetting at the boundary portions with the intermediate portions 13 and 13 having a rough surface, and the external electrode 3 1 is formed with high dimensional accuracy.
  • the ceramic electronic component 1E is formed of a laminated body 10 with a main part 11 and end parts 12 and 12 at both ends.
  • the end portions 12 and 12 are formed inside the outer periphery of the main portion 11 in a plan view from the arrangement direction (the direction of arrow A).
  • the main part 11 and the end parts 12 and 12 are different from each other only in the outer shape which may be made of the same material.
  • the internal coils are not shown.
  • FIG. 7 (B) is a view seen from the direction of arrow A in FIG. 7 (A).
  • the conductive paste when applying the conductive paste to the end portions 12, 12, the conductive paste is prevented from wetting at the step portion between the end portions 12, 12 and the main portion 11, and the external electrode 31 Is formed with dimensional accuracy.
  • the ceramic electronic component 1F is formed of a laminated body 10 with a main part 11, end parts 12 and 12 at both ends, and intermediate parts 13 and 13.
  • a concave groove 13a is formed.
  • the present inventors have described the ceramic sintered laminate 10 of the sixth embodiment having a long side of 1. Omm, a short side of 0.5mm, and a height of 0.5mm described in the first embodiment. It was produced in. Furthermore, grooves 13a and 13a having a width of 20 ⁇ m and a depth of 10 ⁇ m were formed on the inner surface J of the laminated body 10 having an end face force of 150 m (dimension W3). A conductive paste mainly composed of Ag was applied to the end portions 12 and 12. The viscosity of the conductive paste was 12.5 Pa.s when the shear rate was about 1.9 sec- 1 .
  • 100 ceramic sintered laminates 10 are held on the back surface of the jig 51, and a conductive paste tub is introduced into the stainless steel bath 50 to a depth of 100 ⁇ m.
  • the surface of the paste P was smoothed using a squeegee.
  • the jig 51 was lowered until the end surface of the laminate 10 was in contact with the bottom surface of the stainless steel tank 50, and the conductive paste P was applied to the end 12 of the laminate 10. After coating, it was dried in an oven at 120 ° C for 1 hour.
  • the dimension W4 of the folded portion of the external electrode 31 formed here was determined by the same procedure as the dimension W2 in the first example. The results are shown in Table 2 below.
  • a conductive paste (with the same depth of 100 ⁇ m) was applied to the end of a laminated body of the same size that does not form a groove using the coating apparatus shown in FIG.
  • the dimensions of the folded portion of the formed external electrode were determined. The results are also shown in Table 2.
  • the dimension of the folded part was 166 m at the minimum and 198 m at the maximum by dipping in a conductive paste with a thickness of 100 / zm, and the surface tension increased to 182 m on average. become.
  • the dimension W4 of the folded portion is a minimum of 164 ⁇ m, a maximum of 176 ⁇ m, and an average of 173 ⁇ m, which is a preferable dimensional accuracy. This is because the wetting of the conductive paste is stopped by the groove 13a of the intermediate portion 13.
  • the wetting of the conductive paste is not completely stopped by the groove 13a.
  • the depth of the groove 13a is 10 m, wetting up stops on the inner side about 13 m from the intermediate portion 13.
  • the ceramic electronic component 1G according to the seventh embodiment includes a laminate 10 as a main part.
  • the ceramic electronic component and the manufacturing method thereof according to the present invention can be variously modified within the scope of the gist thereof, which is not limited to the above embodiment.
  • the present invention can be widely applied to various ceramic electronic parts such as LC composite parts in addition to the chip inductors shown in the above embodiments.
  • the porosity of the main part 11, the end part 12 and the intermediate part 13 is arbitrary, and the pores may not be filled with grease.
  • the above-described embodiments can be combined.
  • the fifth embodiment in which the laminated body is composed of a main part and an end part, and the end part is formed inside the outer periphery of the main part (see FIG.
  • the main part may have a porosity of 30 to 80 vol%, and the end part may have a porosity of 10 vol% or less.
  • the present invention is useful for ceramic electronic components such as chip inductors, and in particular, the wetting of the conductive paste by the dipping method can be stopped at a predetermined position, and external electrodes can be formed with high dimensional accuracy. Excellent in that it can be done.

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  • Microelectronics & Electronic Packaging (AREA)
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Abstract

A ceramic electronic component in which the part wetted with a conductive paste by immersion method can be stopped at a predetermined position and an external electrode can be formed with high dimensional precision. A ceramic electronic component wherein external electrodes (31) formed of a conductive paste are provided at the opposite ends of a ceramic laminate (10) incorporating a coil (L). The ceramic laminate (10) consists of a main portion (11) and end portions (12, 12). The end portion (12) has a porosity of 10 vol% or less whereas the main portion (11) has a porosity of 30-80 vol% thereby exhibiting a low wettability of the conductive paste. When the end portions (12, 12) are immersed into the conductive paste, upward wetting with the conductive paste is blocked at the border with the main portion (11) and the external electrode is formed with high dimensional precision.

Description

セラミック電子部品及びその製造方法  Ceramic electronic component and method for manufacturing the same
技術分野  Technical field
[0001] 本発明は、セラミック電子部品、特に、セラミック積層体にコイルなどの電子素子を 内蔵したチップインダクタなどのセラミック電子部品及びその製造方法に関する。 背景技術  TECHNICAL FIELD [0001] The present invention relates to a ceramic electronic component, and more particularly to a ceramic electronic component such as a chip inductor in which an electronic element such as a coil is incorporated in a ceramic laminate and a method for manufacturing the same. Background art
[0002] 一般に、チップインダクタなどのセラミック電子部品は、フェライトからなるシートとコ ィル導体とを積層し、該積層体の両端部に導電ペーストを塗布して外部電極を形成 したものが種々提供されている。外部電極は、積層体の端部を薄いペースト層に浸 漬したり、印刷したりして形成されている。印刷法は、手間が力かり作業が複雑であり 、コスト的に実用的ではない。一方、浸漬法は、量産向きではあるが、導電ペーストの 過度の濡れ上がりを防止することが困難で、形成された外部電極の積層体側面への 折返し部分の寸法精度が悪 、と 、う問題点を有して 、た。  [0002] In general, various ceramic electronic parts such as chip inductors are provided in which a sheet made of ferrite and a coil conductor are laminated and a conductive paste is applied to both ends of the laminated body to form external electrodes. Has been. The external electrode is formed by immersing the end of the laminate in a thin paste layer or printing. The printing method is laborious and complicated, and is not practical in terms of cost. On the other hand, the dipping method is suitable for mass production, but it is difficult to prevent excessive wetting of the conductive paste, and the dimensional accuracy of the folded portion of the formed external electrode on the side of the laminate is poor. Have a point.
[0003] 導電ペーストの濡れ性は積層体の表面状態 (空孔率ゃ粗さ)あるいは表面形状(凹 部ゃ凸部の存在)によって異なる。特許文献 1には、図 11に示すように、 30〜80vol %の空孔率を有し、コイル Lを内蔵した内層部 115と 10vol%以下の空孔率を有する 外層部 116a, 116bとからなるセラミック積層体 120を備えたセラミック電子部品が開 示されている。しかし、特許文献 1では、積層体 120の両端部に設けた外部電極 121 が内層部 115にまで深く形成されており、内層部 115と外層部 116a, 116bとの濡れ 性の差を外部電極 121の形成にどのように利用するかについては何ら示唆していな い。  [0003] The wettability of the conductive paste varies depending on the surface state (porosity, roughness) or surface shape (recesses, presence of protrusions) of the laminate. Patent Document 1 includes, as shown in FIG. 11, an inner layer portion 115 having a porosity of 30 to 80 vol% and incorporating a coil L, and outer layer portions 116a and 116b having a porosity of 10 vol% or less. A ceramic electronic component comprising a ceramic laminate 120 is disclosed. However, in Patent Document 1, the external electrodes 121 provided at both ends of the laminate 120 are formed deep into the inner layer 115, and the difference in wettability between the inner layer 115 and the outer layer 116 a, 116 b is represented by the external electrode 121. There is no suggestion on how to use it for the formation.
特許文献 1:特開 2005— 38904号公報  Patent Document 1: Japanese Patent Laid-Open No. 2005-38904
発明の開示  Disclosure of the invention
発明が解決しょうとする課題  Problems to be solved by the invention
[0004] そこで、本発明の目的は、浸漬法による導電ペーストの濡れ上がりを所定位置で止 めることができ、寸法精度よく外部電極を形成することのできるセラミック電子部品及 びその製造方法を提供することにある。 課題を解決するための手段 [0004] Accordingly, an object of the present invention is to provide a ceramic electronic component that can stop the wetting of a conductive paste by a dipping method at a predetermined position and can form an external electrode with high dimensional accuracy, and a method for manufacturing the same. There is to do. Means for solving the problem
[0005] 前記目的を達成するため、第 1の発明は、電子素子を内蔵したセラミック積層体の 両端部に導電ペーストを用いて形成された外部電極を設けたセラミック電子部品で あって、前記セラミック積層体は、主要部と前記外部電極を設けた端部とからなり、前 記主要部の表面状態は前記端部の表面状態よりも導電ペーストの濡れ性が低ぐ前 記外部電極は前記端部の表面に前記主要部との境界部分まで形成されていること、 を特徴とする。  In order to achieve the above object, a first invention is a ceramic electronic component in which external electrodes formed using a conductive paste are provided at both ends of a ceramic laminate incorporating an electronic element, The laminate includes a main portion and an end portion provided with the external electrode, and the surface state of the main portion has lower wettability of the conductive paste than the surface state of the end portion. The surface of the part is formed up to the boundary part with the main part.
[0006] 第 1の発明に係るセラミック電子部品にあっては、積層体の端部に導電ペーストを 塗布する際、導電ペーストは濡れ性の低い主要部との境界部分で濡れ上がりが阻止 され、外部電極が寸法的に精度よく形成される。  [0006] In the ceramic electronic component according to the first invention, when the conductive paste is applied to the end of the laminate, the conductive paste is prevented from wetting up at the boundary with the main part having low wettability, The external electrode is formed with high dimensional accuracy.
[0007] 第 1の発明に係るセラミック電子部品において、主要部は 30〜80vol%の空孔率を 有するセラミック積層体力もなり、端部は 10vol%以下の空孔率を有するセラミック積 層体力もなることが好ましい。空孔には榭脂が充填されていてもよい。また、主要部の 表面粗さを端部の表面粗さよりも粗くしても、導電ペーストの濡れ上がりを主要部との 境界部分で止めることができる。  [0007] In the ceramic electronic component according to the first invention, the main part also has a ceramic laminated body force having a porosity of 30 to 80 vol%, and the end part also has a ceramic laminated body force having a porosity of 10 vol% or less. It is preferable to become. The pores may be filled with rosin. Further, even if the surface roughness of the main part is made larger than the surface roughness of the end part, the wetting of the conductive paste can be stopped at the boundary part with the main part.
[0008] 第 2の発明は、電子素子を内蔵したセラミック積層体の両端部に導電ペーストを用 V、て形成された外部電極を設けたセラミック電子部品であって、前記セラミック積層 体は、主要部と前記外部電極を設けた端部と該主要部及び端部の間に位置する中 間部とからなり、前記中間部の表面状態は前記端部の表面状態よりも導電ペースト の濡れ性が低ぐ前記外部電極は前記端部の表面に前記中間部との境界部分まで 形成されていること、を特徴とする。  [0008] A second invention is a ceramic electronic component in which external electrodes formed using a conductive paste V are provided at both ends of a ceramic laminated body incorporating an electronic element, the ceramic laminated body comprising: And an intermediate portion located between the main portion and the end portion, and the surface state of the intermediate portion is more wettable than the surface state of the end portion. The lower external electrode is formed on the surface of the end portion up to a boundary portion with the intermediate portion.
[0009] 第 2の発明に係るセラミック電子部品にあっては、積層体の端部に導電ペーストを 塗布する際、導電ペーストは濡れ性の低い中間部との境界部分で濡れ上がりが阻止 され、外部電極が寸法的に精度よく形成される。  [0009] In the ceramic electronic component according to the second invention, when the conductive paste is applied to the end portion of the laminate, the conductive paste is prevented from wetting at the boundary with the intermediate portion having low wettability, The external electrode is formed with high dimensional accuracy.
[0010] 第 2の発明に係るセラミック電子部品において、中間部は 30〜80vol%の空孔率を 有するセラミック積層体力もなり、端部は 10vol%以下の空孔率を有するセラミック積 層体力もなることが好ましい。空孔には榭脂が充填されていてもよい。また、中間部の 表面粗さを端部の表面粗さよりも粗くしても、導電ペーストの濡れ上がりを中間部との 境界部分で止めることができる。 [0010] In the ceramic electronic component according to the second invention, the intermediate portion also has a ceramic laminated body force having a porosity of 30 to 80 vol%, and the end portion also has a ceramic laminated body force having a porosity of 10 vol% or less. It is preferable to become. The pores may be filled with rosin. Even if the surface roughness of the intermediate part is made larger than the surface roughness of the edge part, the wetting of the conductive paste can be reduced with the intermediate part. Can be stopped at the boundary.
[0011] 第 3の発明は、電子素子を内蔵したセラミック積層体の両端部に導電ペーストを用 V、て形成された外部電極を設けたセラミック電子部品であって、前記セラミック積層 体は、主要部と前記外部電極を設けた端部とからなり、前記主要部及び前記端部の 配列方向から平面視で、前記端部は前記主要部の外形周囲よりも内側に形成され、 前記外部電極は前記端部の表面に主要部との境界部分まで形成されて 、ること、を 特徴とする。  [0011] A third invention is a ceramic electronic component in which external electrodes formed using a conductive paste V are provided at both ends of a ceramic laminate incorporating an electronic element, the ceramic laminate being a main component. Part and an end provided with the external electrode, in plan view from the arrangement direction of the main part and the end part, the end part is formed inside the outer periphery of the main part, the external electrode is The surface of the end portion is formed up to the boundary portion with the main portion.
[0012] 第 3の発明に係るセラミック電子部品にあっては、積層体の端部に導電ペーストを 塗布する際、導電ペーストは段差が存在する主要部との境界部分で濡れ上がりが阻 止され、外部電極が寸法的に精度よく形成される。  [0012] In the ceramic electronic component according to the third invention, when the conductive paste is applied to the end portion of the multilayer body, the conductive paste is prevented from getting wet at the boundary portion with the main portion where the step exists. The external electrodes are formed with high accuracy in terms of dimensions.
[0013] 第 4の発明は、電子素子を内蔵したセラミック積層体の両端部に導電ペーストを用 V、て形成された外部電極を設けたセラミック電子部品であって、前記セラミック積層 体は、主要部と前記外部電極を設けた端部と該主要部及び端部の間に位置する中 間部とからなり、前記中間部は前記主要部と前記端部との間に凹状に設けられ、前 記外部電極は前記端部の表面に前記中間部又は前記主要部との境界部分まで形 成されていること、を特徴とする。  [0013] A fourth invention is a ceramic electronic component in which external electrodes formed using a conductive paste V are provided at both ends of a ceramic laminate incorporating an electronic element, the ceramic laminate being a main component. And an intermediate portion positioned between the main portion and the end portion, and the intermediate portion is provided in a concave shape between the main portion and the end portion. The external electrode is formed on the surface of the end portion up to a boundary portion with the intermediate portion or the main portion.
[0014] 第 4の発明に係るセラミック電子部品にあっては、積層体の端部に導電ペーストを 塗布する際、導電ペーストは凹状となっている中間部で濡れ上がりが阻止され、外部 電極が寸法的に精度よく形成される。  [0014] In the ceramic electronic component according to the fourth aspect of the invention, when the conductive paste is applied to the end of the laminate, the conductive paste is prevented from wetting at the concave intermediate portion, and the external electrode is It is formed with high dimensional accuracy.
[0015] 第 5の発明は、電子素子を内蔵したセラミック積層体の両端部に導電ペーストを用 V、て形成された外部電極を設けたセラミック電子部品であって、前記セラミック積層 体は、主要部と前記外部電極を設けた端部と該主要部及び端部の間に位置する中 間部とからなり、前記中間部は前記主要部と前記端部との間に凸状に設けられ、前 記外部電極は前記端部の表面に前記中間部との境界部分まで形成されていること、 を特徴とする。  [0015] A fifth invention is a ceramic electronic component in which external electrodes formed using a conductive paste V are provided at both ends of a ceramic laminated body incorporating an electronic element, the ceramic laminated body comprising: And an intermediate part located between the main part and the end part, and the intermediate part is provided in a convex shape between the main part and the end part, The external electrode is formed on the surface of the end portion up to a boundary portion with the intermediate portion.
[0016] 第 5の発明に係るセラミック電子部品にあっては、積層体の端部に導電ペーストを 塗布する際、導電ペーストは段差が存在する中間部との境界部分で濡れ上がりが阻 止され、外部電極が寸法的に精度よく形成される。 [0017] 第 6の発明は、電子素子を内蔵したセラミック積層体の両端部に導電ペーストを用[0016] In the ceramic electronic component according to the fifth invention, when the conductive paste is applied to the end of the laminate, the conductive paste is prevented from getting wet at the boundary with the intermediate portion where there is a step. The external electrodes are formed with high accuracy in terms of dimensions. [0017] According to a sixth aspect of the present invention, a conductive paste is used at both ends of a ceramic laminate incorporating an electronic element.
V、て形成された外部電極を設けたセラミック電子部品の製造方法であって、セラミック シートを積層して、導電ペーストの濡れ性が比較的低い表面状態を有する主要部と、 導電ペーストの濡れ性が比較的高い表面状態を有する端部とからなる積層体を形成 する工程と、前記端部の表面に導電ペーストを塗布して外部電極を前記主要部との 境界部分まで形成する工程と、を備えたことを特徴とする。 V, a method of manufacturing a ceramic electronic component provided with external electrodes formed by laminating ceramic sheets, a main part having a surface state in which the wettability of the conductive paste is relatively low, and the wettability of the conductive paste Forming a laminate composed of an end portion having a relatively high surface state, and applying a conductive paste to the surface of the end portion to form an external electrode up to a boundary portion with the main portion. It is characterized by having.
[0018] 第 6の発明に係るセラミック電子部品の製造方法にあっては、積層体の端部に導電 ペーストを塗布する際、導電ペーストは濡れ性の低 、主要部との境界部分で濡れ上 力 Sりが阻止され、外部電極が寸法的に精度よく形成される。  [0018] In the method for manufacturing a ceramic electronic component according to the sixth aspect of the invention, when applying the conductive paste to the end of the laminate, the conductive paste has low wettability and wets at the boundary with the main part. The force S is prevented, and the external electrode is formed with high dimensional accuracy.
[0019] 第 7の発明は、電子素子を内蔵したセラミック積層体の両端部に導電ペーストを用 V、て形成された外部電極を設けたセラミック電子部品の製造方法であって、セラミック シートを積層して、主要部と、導電ペーストの濡れ性が比較的高い表面状態を有する 端部と、導電ペーストの濡れ性が比較的低 、表面状態を有して前記主要部と前記端 部の間に位置する中間部と、からなる積層体を形成する工程と、前記端部の表面に 導電ペーストを塗布して外部電極を前記中間部との境界部分まで形成する工程と、 を備えたことを特徴とする。  [0019] A seventh invention is a method for manufacturing a ceramic electronic component in which external electrodes formed using a conductive paste V are provided at both ends of a ceramic laminate incorporating an electronic element, wherein the ceramic sheets are laminated. A main portion, an end portion having a surface state with relatively high wettability of the conductive paste, and a relatively low wettability of the conductive paste and having a surface state between the main portion and the end portion. A step of forming a laminated body comprising: an intermediate portion positioned; and a step of applying a conductive paste to the surface of the end portion to form an external electrode up to a boundary portion with the intermediate portion. And
[0020] 第 7の発明に係るセラミック電子部品の製造方法にあっては、積層体の端部に導電 ペーストを塗布する際、導電ペーストは濡れ性の低い中間部との境界部分で濡れ上 力 Sりが阻止され、外部電極が寸法的に精度よく形成される。  [0020] In the method for manufacturing a ceramic electronic component according to the seventh aspect of the invention, when applying the conductive paste to the end portion of the laminate, the conductive paste has a wetting force at the boundary with the intermediate portion having low wettability. S is prevented, and the external electrode is formed with high dimensional accuracy.
[0021] 第 6及び第 7の発明に係るセラミック電子部品の製造方法において、導電ペースト の濡れ性が比較的低い表面状態を有する前記主要部又は前記中間部は、焼失材を 含むセラミック原料力もセラミックグリーンシートを作製し、該シートを積層することによ り形成することが好ましい。  [0021] In the method of manufacturing a ceramic electronic component according to the sixth and seventh inventions, the main part or the intermediate part having a surface state in which the wettability of the conductive paste is relatively low, the ceramic raw material power containing a burned-out material is also ceramic. It is preferable to form a green sheet by laminating the sheets.
[0022] 第 8の発明は、電子素子を内蔵したセラミック積層体の両端部に導電ペーストを用 V、て形成された外部電極を設けたセラミック電子部品の製造方法であって、セラミック シートを積層して、主要部と該主要部の両端部に位置する端部とからなり、主要部及 び端部の配列方向力 平面視で、端部が主要部の外形周囲よりも内側に配置されて V、る積層体を形成する工程と、前記端部の表面に導電ペーストを塗布して外部電極 を前記主要部との境界部分まで形成する工程と、を備えたことを特徴とする。 [0022] An eighth invention is a method for manufacturing a ceramic electronic component in which external electrodes formed using a conductive paste V are provided at both ends of a ceramic laminate incorporating electronic elements, the ceramic sheets being laminated The main portion and end portions located at both ends of the main portion, and the end portion is arranged on the inner side of the outer periphery of the main portion in plan view. V, forming the laminated body, and applying an electrically conductive paste to the surface of the end portion to form an external electrode And a step of forming up to a boundary portion with the main portion.
[0023] 第 8の発明に係るセラミック電子部品の製造方法にあっては、積層体の端部に導電 ペーストを塗布する際、導電ペーストは段差が存在する主要部との境界部分で濡れ 上がりが阻止され、外部電極が寸法的に精度よく形成される。  [0023] In the method for manufacturing a ceramic electronic component according to the eighth aspect of the invention, when the conductive paste is applied to the end of the laminate, the conductive paste wets up at the boundary with the main part where there is a step. The external electrode is formed with high accuracy in terms of dimension.
[0024] 第 9の発明は、電子素子を内蔵したセラミック積層体の両端部に導電ペーストを用 V、て形成された外部電極を設けたセラミック電子部品の製造方法であって、セラミック シートを積層して、主要部と端部と主要部及び端部の間に位置する中間部とからなり 、前記中間部の表面形状が前記主要部及び前記端部の表面形状とは異なるように 積層体を形成する工程と、前記端部の表面に導電ペーストを塗布して外部電極を前 記中間部又は前記主要部との境界部分まで形成する工程と、を備えたことを特徴と する。例えば、中間部の表面形状を主要部及び端部に対して凹状又は凸状に形成 して異なる形状とすることができる。  [0024] A ninth invention is a method of manufacturing a ceramic electronic component in which an external electrode formed by using a conductive paste V is provided at both ends of a ceramic laminate incorporating an electronic element, wherein the ceramic sheet is laminated. And the intermediate part located between the main part and the end part and the main part and the end part, and the laminated body so that the surface shape of the intermediate part is different from the surface shape of the main part and the end part. And a step of applying a conductive paste to the surface of the end portion to form an external electrode up to the intermediate portion or the boundary portion with the main portion. For example, the surface shape of the intermediate portion can be formed in a concave shape or a convex shape with respect to the main portion and the end portion to have different shapes.
[0025] 第 9の発明に係るセラミック電子部品の製造方法にあっては、積層体の端部に導電 ペーストを塗布する際、導電ペーストは形状が異なる中間部との境界部分で濡れ上 力 Sりが阻止され、外部電極が寸法的に精度よく形成される。  [0025] In the method of manufacturing a ceramic electronic component according to the ninth aspect of the invention, when applying the conductive paste to the end portion of the laminate, the conductive paste has a wetting force at the boundary with the intermediate portion having a different shape. Thus, the external electrode is formed with high dimensional accuracy.
[0026] 第 6ないし第 9の発明に係るセラミック電子部品の製造方法において、外部電極は 、積層体の端部を導電ペーストに浸漬して形成することが好ましい。寸法精度の良好 な外部電極を備えたセラミック電子部品を安価に量産することができる。  In the method for manufacturing a ceramic electronic component according to the sixth to ninth inventions, the external electrode is preferably formed by immersing the end of the multilayer body in a conductive paste. Ceramic electronic parts equipped with external electrodes with good dimensional accuracy can be mass-produced at low cost.
[0027] なお、本発明において、外部電極をセラミック積層体の両端部に導電ペーストを用 V、て形成することは、セラミック積層体の両端部に塗布した導電ペーストを焼き付け たり、導電性榭脂材であれば塗布後に硬化させて形成することを意味する。  [0027] In the present invention, the external electrodes are formed by using a conductive paste at both ends of the ceramic laminate, and the conductive paste applied to both ends of the ceramic laminate is baked or conductive grease is used. If it is a material, it means that it is cured after application.
発明の効果  The invention's effect
[0028] 本発明によれば、積層体の端部に外部電極を形成する際に導電ペーストの濡れ上 力 Sりが、端部と主要部又は中間部との境界部分で阻止され、外部電極の積層体側面 への折返し部分の寸法を精度よく形成することができる。  [0028] According to the present invention, when forming the external electrode at the end of the laminate, the wetting force S of the conductive paste is prevented at the boundary between the end and the main part or the intermediate part. The dimension of the folded portion to the side surface of the laminate can be accurately formed.
図面の簡単な説明  Brief Description of Drawings
[0029] [図 1]本発明の第 1実施例であるセラミック電子部品を模式的に示す断面図である。  FIG. 1 is a cross-sectional view schematically showing a ceramic electronic component which is a first embodiment of the present invention.
[図 2]前記セラミック電子部品の分解斜視図である。 [図 3]前記セラミック電子部品の要部断面図である。 FIG. 2 is an exploded perspective view of the ceramic electronic component. FIG. 3 is a cross-sectional view of a main part of the ceramic electronic component.
[図 4]本発明の第 2実施例であるセラミック電子部品の概略を示す断面図である。  FIG. 4 is a sectional view schematically showing a ceramic electronic component according to a second embodiment of the present invention.
[図 5]本発明の第 3実施例であるセラミック電子部品の概略を示す断面図である。  FIG. 5 is a sectional view schematically showing a ceramic electronic component according to a third embodiment of the present invention.
[図 6]本発明の第 4実施例であるセラミック電子部品の概略を示す断面図である。  FIG. 6 is a cross-sectional view schematically showing a ceramic electronic component according to a fourth embodiment of the present invention.
[図 7]本発明の第 5実施例であるセラミック電子部品を示し、(A)は概略断面図、(B) は外部電極を省略した A矢視図である。  FIG. 7 shows a ceramic electronic component according to a fifth embodiment of the present invention, in which (A) is a schematic cross-sectional view, and (B) is a view taken in the direction of arrow A with the external electrode omitted.
[図 8]本発明の第 6実施例であるセラミック電子部品の概略を示す断面図である。  FIG. 8 is a sectional view schematically showing a ceramic electronic component according to a sixth embodiment of the present invention.
[図 9]本発明の第 7実施例であるセラミック電子部品の概略を示す断面図である。  FIG. 9 is a sectional view schematically showing a ceramic electronic component according to a seventh embodiment of the present invention.
[図 10]セラミック電子部品の端部に導電ペーストを塗布する状態を示す説明図である  FIG. 10 is an explanatory diagram showing a state in which a conductive paste is applied to the end of a ceramic electronic component
[図 11]従来のセラミック電子部品を示す断面図である。 FIG. 11 is a cross-sectional view showing a conventional ceramic electronic component.
発明を実施するための最良の形態  BEST MODE FOR CARRYING OUT THE INVENTION
[0030] 以下、本発明に係るセラミック電子部品及びその製造方法の実施例について添付 図面を参照して説明する。  Hereinafter, embodiments of a ceramic electronic component and a manufacturing method thereof according to the present invention will be described with reference to the accompanying drawings.
[0031] (第 1実施例、図 1〜図 3参照)  [0031] (Refer to the first embodiment, FIGS. 1 to 3)
本発明の第 1実施例であるセラミック電子部品 1Aは、図 1に示すように、積層体 10 にコイル Lを内蔵し、積層体 10の両端部にコイル Lと導通した外部電極 31, 31を形 成したチップインダクタとして構成したものである。  As shown in FIG. 1, the ceramic electronic component 1A according to the first embodiment of the present invention includes a coil L built in the laminate 10 and external electrodes 31 and 31 that are electrically connected to the coil L at both ends of the laminate 10. It is configured as a formed chip inductor.
[0032] この積層体 10は、図 2に示すように、所定パターンのコイル導体 21を形成した複数 枚のセラミックシート 15とビアホール導体 25を形成した複数枚のセラミックシート 16を 積層し、焼成して形成されている。各コイル導体 21は一端部に形成したビアホール 導体 22を介して螺旋状のコイル Lを形成し、該コイル Lの両端部はビアホール導体 2 5にて外部電極 31, 31に電気的に接続されている。  As shown in FIG. 2, the laminate 10 is made by laminating a plurality of ceramic sheets 15 having a predetermined pattern of coil conductors 21 and a plurality of ceramic sheets 16 having via-hole conductors 25, and firing them. Is formed. Each coil conductor 21 forms a helical coil L via a via-hole conductor 22 formed at one end, and both ends of the coil L are electrically connected to the external electrodes 31 and 31 by via-hole conductors 25. Yes.
[0033] ここで、セラミックシート 15の積層部分を積層体 10の主要部 11、セラミックシート 16 の積層部分を端部 12, 12と称する。そして、主要部 11は 30〜80vol%の空孔率を 有し、端部 12, 12は 10vol%以下の空孔率を有している。空孔は、空孔率が lOvol %以下であれば、スラリー状のセラミック材料を作製する際に抱き込んだ気泡や結合 剤及び分散剤の揮発性成分によって生じる。それ以上の空孔率は、セラミック材料に 焼失材を適量添加し、焼成すること〖こより得ることができる。また、これらの空孔には エポキシ系榭脂を充填してもよい。焼失材としては、架橋ポリスチレン力もなるものな どが知られている。図 3に、積層体 10内に空孔 35が形成され、榭脂 36が充填されて いる状態を示す。なお、空孔 35には、開空孔及び閉空孔を含む。 Here, the laminated portion of the ceramic sheet 15 is referred to as a main portion 11 of the laminated body 10, and the laminated portion of the ceramic sheet 16 is referred to as end portions 12 and 12. The main part 11 has a porosity of 30 to 80 vol%, and the end parts 12 and 12 have a porosity of 10 vol% or less. If the porosity is less than or equal to lOvol%, the voids are generated by bubbles or binders and dispersants volatile components encapsulated when the slurry-like ceramic material is produced. Higher porosity than ceramic materials An appropriate amount of burned-out material can be added and fired to obtain it. In addition, these pores may be filled with an epoxy resin. As burned-out materials, those that also have cross-linked polystyrene strength are known. FIG. 3 shows a state in which holes 35 are formed in the laminate 10 and filled with the resin 36. The holes 35 include open holes and closed holes.
[0034] 積層体 10に空孔 35を形成することで、誘電率が低下して浮遊容量が小さくなるた め、所望のインピーダンス特性を得ることができる。この場合、空孔率は 30vol%以上 が好ましぐ 80vol%を超えると積層体 10の機械的強度が低下する。一方、端部 12, 12の空孔率を 10vol%以下にすることで、外部電極 31 , 31として塗布される導電べ 一ストが積層体 10の内部に拡散しに《なる。また、透磁率が高くなるので、コイル L の磁束の漏れが少なくなる。空孔 35に榭脂 36を充填することは、インピーダンスの低 下を抑制する効果を有する。 [0034] By forming the holes 35 in the stacked body 10, the dielectric constant is lowered and the stray capacitance is reduced, so that desired impedance characteristics can be obtained. In this case, when the porosity exceeds 80 vol%, which is preferably 30 vol% or more, the mechanical strength of the laminate 10 decreases. On the other hand, by setting the porosity of the end portions 12 and 12 to 10 vol% or less, the conductive base applied as the external electrodes 31 and 31 is diffused into the laminated body 10. In addition, since the magnetic permeability increases, the leakage of magnetic flux in the coil L is reduced. Filling the pores 35 with the resin 36 has an effect of suppressing a decrease in impedance.
[0035] ここで、空孔率 (Vol%)は以下の式によって求められる。 [0035] Here, the porosity (Vol%) is obtained by the following equation.
空孔率 = { 1 - (W/V) /G) X 100 (%)  Porosity = (1-(W / V) / G) X 100 (%)
W:セラミック焼結体の重量  W: Weight of ceramic sintered body
V:セラミック焼結体の体積  V: Volume of ceramic sintered body
G:セラミック焼結体の理論密度  G: Theoretical density of ceramic sintered body
[0036] ところで、前記外部電極 31 , 31は、積層体 10の端部 12, 12の表面に浸漬法にて 導電ペーストを塗布することにより形成される。即ち、図 10に示すように、平板状のス テンレス槽 50に導電ペースト Pを所定の厚さに充填し、治具 51の裏面に保持された 複数個の積層体 10を該治具 51を下降させることにより、積層体 10の端面力 Sステンレ ス槽 50の底面に接するまで導電ペースト Pに浸漬し、引き上げた後乾燥させることに より形成する。 Meanwhile, the external electrodes 31, 31 are formed by applying a conductive paste to the surfaces of the end portions 12, 12 of the multilayer body 10 by an immersion method. That is, as shown in FIG. 10, a flat stainless steel tank 50 is filled with a conductive paste P to a predetermined thickness, and a plurality of laminates 10 held on the back surface of the jig 51 are attached to the jig 51. By lowering, the end surface force of the laminate 10 is immersed in the conductive paste P until it contacts the bottom surface of the stainless steel tank 50, pulled up, and then dried.
[0037] 一般に、積層体に対する導電ペーストの濡れ性は、積層体の表面状態によって変 化する。積層体の空孔率が小さいと濡れ性は比較的大きぐ空孔率が大きいと濡れ 性は比較的小さい。本第 1実施例においては、主要部 11は 30〜80vol%の空孔率 で形成され、端部は 10vol%以下の空孔率で形成されているため、積層体 10の端部 12を導電ペースト Pに浸漬した際、導電ペースト Pは濡れ性の低 、主要部 11との境 界部分で表面張力による濡れ上がりが阻止される。それゆえ、外部電極 31が寸法的 に精度よく形成されることになる。なお、本第 1実施例における外部電極 31の寸法精 度については本発明者らによる実験結果として比較例とともに以下に説明する。 [0037] In general, the wettability of the conductive paste with respect to the laminate varies depending on the surface state of the laminate. When the porosity of the laminate is small, the wettability is relatively large. When the porosity is large, the wettability is relatively small. In the first embodiment, the main part 11 is formed with a porosity of 30 to 80 vol%, and the end part is formed with a porosity of 10 vol% or less, so that the end part 12 of the laminate 10 is electrically conductive. When immersed in the paste P, the conductive paste P has low wettability and prevents the wetting due to surface tension at the boundary with the main part 11. Therefore, the external electrode 31 is dimensionally It will be formed accurately. The dimensional accuracy of the external electrode 31 in the first embodiment will be described below together with a comparative example as an experimental result by the present inventors.
[0038] ここで、セラミック電子部品の製造方法について説明する。製造方法は 2種類に大 別される。第 1の方法は、貫通孔を形成したセラミックグリーンシート上に導電ペースト によりスクリーン印刷などの印刷法で所望のパターンを形成し、該シートを螺旋状の コイルが形成されるように積層、圧着、裁断、焼成することでセラミック電子部品を得 る。第 2の方法は、セラミック材料と導体材料とをスクリーン印刷などの印刷法で交互 に印刷して螺旋状のコイルを形成し、圧着、裁断、焼成することでセラミック電子部品 を得る。 [0038] Here, a method of manufacturing a ceramic electronic component will be described. There are two types of manufacturing methods. In the first method, a desired pattern is formed on a ceramic green sheet having a through-hole by a printing method such as screen printing using a conductive paste, and the sheet is laminated and crimped so that a spiral coil is formed. Ceramic electronic parts are obtained by cutting and firing. In the second method, ceramic materials and conductor materials are alternately printed by a printing method such as screen printing to form a helical coil, and a ceramic electronic component is obtained by pressure bonding, cutting, and firing.
[0039] 具体的には、以下の工程によってセラミック電子部品 1Aを製造した。まず、 -ッケ ル、亜鉛、銅及び鉄の酸化物原料を混合して 800°Cで 1時間仮焼した。その後、ボ ールミルにより原料を粉砕し、乾燥することにより、平均粒径が約 2 mの Ni— Zn— Cu系フェライト原料を得た。次に、このフェライト原料に、溶媒、結合剤及び分散剤を 加えて混練し、スラリーとした。  [0039] Specifically, the ceramic electronic component 1A was manufactured by the following steps. First, the oxide materials of -keckle, zinc, copper and iron were mixed and calcined at 800 ° C for 1 hour. Thereafter, the raw material was pulverized by a ball mill and dried to obtain a Ni—Zn—Cu ferrite raw material having an average particle diameter of about 2 m. Next, a solvent, a binder and a dispersant were added to the ferrite raw material and kneaded to obtain a slurry.
[0040] 端部 12, 12を構成するシート 16は、前記スラリー状のフェライト原料を用いてドクタ 一ブレード法などで厚さ 40 mのセラミックグリーンシートとした。主要部 11を構成す るシート 15は、前記フェライト原料に溶媒、結合剤、分散剤に加えて、市販の球状ポ リマー、例えば、平均粒径が 8 /z mの架橋ポリスチレン力もなる焼失材を添加し、混練 してスラリー状とし、ドクターブレード法などで厚さ 40 μ mのセラミックグリーンシートと した。  [0040] The sheet 16 constituting the end portions 12 and 12 was formed into a ceramic green sheet having a thickness of 40 m by the doctor-blade method using the slurry-like ferrite raw material. For the sheet 15 constituting the main part 11, in addition to the above-mentioned ferrite raw material, a commercially available spherical polymer, for example, a burned-out material having an average particle size of 8 / zm and having a crosslinked polystyrene power is added. Then, they were kneaded to form a slurry, and a ceramic green sheet having a thickness of 40 μm was obtained by a doctor blade method or the like.
[0041] 用意されたセラミックグリーンシートにビアホール導体用の穴を形成し、コイル導体 やビアホール導体をスクリーン印刷した。印刷には、 Ag, Pd, Cu, Auやこれらの合 金などの導電ペーストを用いた。  [0041] A hole for a via-hole conductor was formed in the prepared ceramic green sheet, and a coil conductor or a via-hole conductor was screen-printed. For printing, we used conductive paste such as Ag, Pd, Cu, Au and their alloys.
[0042] 次に、図 2に示したように、各シート 15, 16を積層、圧着し、コイル Lを内蔵した積層 体 10を作製した。以上の工程はマザ一基板として複数単位のコイルがマトリクス状に 配置された状態で行われ、マザ一積層体を 1単位の積層体 (チップ)に裁断する。そ して、得られた積層体を 400°Cで 3時間熱処理 (脱結合剤処理)を行った後、 925°C で 2時間焼成した。これにて、所望の空孔率を有する主要部 11及び端部 12, 12から なるセラミック焼結積層体 10が得られる。 Next, as shown in FIG. 2, the sheets 15 and 16 were laminated and pressure-bonded to produce a laminated body 10 in which the coil L was built. The above process is performed in a state where a plurality of coils are arranged in a matrix as a mother substrate, and the mother laminate is cut into one unit laminate (chip). Then, the obtained laminate was heat-treated at 400 ° C. for 3 hours (debinding agent treatment) and then baked at 925 ° C. for 2 hours. From the main part 11 and the end parts 12, 12 having the desired porosity A sintered ceramic laminate 10 is obtained.
[0043] 次に、セラミック焼結積層体 10をエポキシ系榭脂中に浸漬し、空孔内に榭脂を充 填し、 150〜180°Cで 2時間榭脂を硬化させた。積層体 10の表面に付着する榭脂膜 を除去した後、図 10に示す塗布装置を用いて、積層体 10の端部 12, 12の表面に A gからなる導電ペーストを塗布し、外部電極 31, 31を形成した。  Next, the ceramic sintered laminate 10 was immersed in an epoxy-based resin, the resin was filled in the pores, and the resin was cured at 150 to 180 ° C. for 2 hours. After removing the resin film adhering to the surface of the laminate 10, a conductive paste made of Ag is applied to the surfaces of the end portions 12 and 12 of the laminate 10 using the coating apparatus shown in FIG. 31, 31 were formed.
[0044] 本発明者らは、長辺 1. Omm、短辺 0. 5mm、高さ 0. 5mmのセラミック焼結積層体 10を前記の工程にて作製した。空孔率が 10vol%以下の端部 12, 12は端面から 20 0 m (寸法 W1)とし、主要部 11は約 5 μ mの空孔を約 50vol%の空孔率で含有し ている。その端部に Agを主成分とする導電ペーストを塗布した。導電ペーストの粘度 はずり速度が約 1. 9sec- 1のときに 31. 4Pa. sであった。  [0044] The present inventors produced a ceramic sintered laminate 10 having a long side of 1. Omm, a short side of 0.5mm, and a height of 0.5mm by the above-described process. The end portions 12 and 12 having a porosity of 10 vol% or less are set to 200 m (dimension W1) from the end face, and the main portion 11 contains about 5 μm pores with a porosity of about 50 vol%. A conductive paste mainly composed of Ag was applied to the end portion. The viscosity of the conductive paste was 31.4 Pa.s when the shear rate was about 1.9 sec-1.
[0045] 即ち、図 10に示すように、治具 51の裏面に 100個のセラミック焼結積層体 10を保 持し、ステンレス槽 50に深さ 150 μ mになるように導電ペースト Ρを投入し、スキージ を用いて該ペースト Pの表面を平滑にした。治具 51を積層体 10の端面がステンレス 槽 50の底面に接するまで下降させ、積層体 10の端部 12に導電ペースト Pを塗布し た。塗布後にオーブンにて 120°Cで 1時間乾燥させた。ここで形成された外部電極 3 1の折返し部分の寸法 W2を求めた。  That is, as shown in FIG. 10, 100 ceramic sintered laminates 10 are held on the back surface of the jig 51, and the conductive paste Ρ is put into the stainless steel tank 50 to a depth of 150 μm. The surface of the paste P was smoothed using a squeegee. The jig 51 was lowered until the end surface of the laminate 10 was in contact with the bottom surface of the stainless steel tank 50, and the conductive paste P was applied to the end 12 of the laminate 10. After coating, it was dried in an oven at 120 ° C for 1 hour. The dimension W2 of the folded portion of the external electrode 31 formed here was determined.
[0046] 具体的には、積層体 10の一端部にのみ導電ペーストを塗布して乾燥させ、予め測 定しておいた積層体 10の長さ Lから測定した寸法 Wを減算することで寸法 W2を求 めた。その結果を以下の表 1に示す。  [0046] Specifically, the conductive paste is applied only to one end of the laminate 10 and dried, and the dimension W is subtracted from the dimension W measured in advance from the length L of the laminate 10. We asked for W2. The results are shown in Table 1 below.
[0047] また、比較例として、前記積層体 10と同じサイズで主要部 11を端部 12, 12と同じ( 焼失材が混入されて 、な 、)セラミック材料で形成した積層体を、図 10に示した塗布 装置を用いて端部に導電ペースト (深さは同じ 150 m)を塗布し、同じ条件で乾燥 させ、形成された外部電極の折返し部分の寸法を求めた。その結果を表 1に併せて 示す。  [0047] As a comparative example, a laminated body formed of a ceramic material having the same size as the laminated body 10 and the main portion 11 being the same as the end portions 12 and 12 (mixed with a burned-out material) is shown in FIG. A conductive paste (150 m in depth) was applied to the end using the coating apparatus shown in Fig. 1, and dried under the same conditions, and the dimensions of the folded portion of the formed external electrode were determined. The results are also shown in Table 1.
[0048] [表 1] ほ 1 ) [0048] [Table 1] 1)
Figure imgf000012_0001
Figure imgf000012_0001
[0049] 比較例では、 150 mの厚さの導電ペーストに浸漬することで、折返し部分の寸法 は最小で 205 μ m、最大で 232 μ mであり、平均で 217 mまで表面張力で濡れ上 力 たことになる。これに対して、本第 1実施例では、折返し部分の寸法 W2は最小で 203 μ m、最大で 215 μ m、平均で 208 μ mであり、好ましい寸法精度であった。こ れは、導電ペーストの濡れ上がりが空孔率の大きい主要部との境界部分で止められ たことによる。また、表 1において、 σは標準偏差でのばらつきの大きさを表している。  [0049] In the comparative example, by immersing in a conductive paste with a thickness of 150 m, the folded part has a minimum dimension of 205 μm and a maximum of 232 μm. It will be a great help. On the other hand, in the first embodiment, the dimension W2 of the folded portion is 203 μm at the minimum, 215 μm at the maximum, and 208 μm on the average, which is a preferable dimensional accuracy. This is because wetting of the conductive paste was stopped at the boundary with the main part having a large porosity. In Table 1, σ represents the magnitude of variation with standard deviation.
[0050] なお、主要部 11と端部 12, 12との境界部分には必ずしも空孔が形成されているわ けではないので、境界より 10〜20 m程度内側まで外部電極 31が形成される。  [0050] It should be noted that since the pores are not necessarily formed in the boundary portion between the main portion 11 and the end portions 12 and 12, the external electrode 31 is formed to the inside of about 10 to 20 m from the boundary. .
[0051] (第 2実施例、図 4参照)  [0051] (Refer to the second embodiment, FIG. 4)
第 2実施例であるセラミック電子部品 1Bは、図 4に示すように、積層体 10を主要部 1 1と両端の端部 12, 12と中間部 13, 13とで形成し、中間部 13, 13のみ空孔率を 30 〜80vol%とした。主要部 11及び端部 12, 12の空孔率は 10vol%以下である。中間 部 13, 13の幅寸法は 20 mである。なお、図 4において、内部のコイルは図示を省 略している。  As shown in FIG. 4, the ceramic electronic component 1B according to the second embodiment is formed of a laminated body 10 with a main part 11, end parts 12, 12 at both ends, and intermediate parts 13, 13. Only 13 had a porosity of 30 to 80 vol%. The porosity of the main part 11 and the end parts 12 and 12 is 10 vol% or less. The width of the intermediate parts 13 and 13 is 20 m. In FIG. 4, the internal coils are not shown.
[0052] 本第 2実施例においては、端部 12, 12に導電ペーストを塗布する際、導電ペースト は空孔率の大きい(表面が濡れ性の低い)中間部 13, 13との境界部分で濡れ上がり を阻止され、外部電極 31が寸法的に精度よく形成される。  [0052] In the second embodiment, when the conductive paste is applied to the end portions 12 and 12, the conductive paste has a boundary portion with the intermediate portions 13 and 13 having a high porosity (the surface has low wettability). The wetting is prevented and the external electrode 31 is formed with high dimensional accuracy.
[0053] (第 3実施例、図 5参照)  [0053] (Refer to the third embodiment, FIG. 5)
第 3実施例であるセラミック電子部品 1Cは、図 5に示すように、積層体 10を主要部 11と両端の端部 12, 12とで形成し、端部 12, 12は通常の表面粗さ(Ra : 0. 81 /z m 程度)であるのに対して主要部 11の表面粗さ Raを例えば 1. 45 /z mとしている。なお 、図 5において、内部のコイルは図示を省略している。 As shown in FIG. 5, the ceramic electronic component 1C according to the third embodiment is formed of a laminated body 10 with a main part 11 and end parts 12 and 12 at both ends, and the end parts 12 and 12 have a normal surface roughness. The surface roughness Ra of the main part 11 is set to 1.45 / zm, for example, while it is (Ra: about 0.81 / zm). In addition In FIG. 5, the internal coils are not shown.
[0054] 表面粗さが粗いと導電ペーストの濡れ性が低下する。それゆえ、本第 3実施例にお いても、端部 12, 12に導電ペーストを塗布する際、導電ペーストは表面粗さが粗い( 表面が濡れ性の低い)主要部 11との境界部分で濡れ上がりを阻止され、外部電極 3 1が寸法的に精度よく形成される。  [0054] When the surface roughness is rough, the wettability of the conductive paste decreases. Therefore, also in the third embodiment, when the conductive paste is applied to the end portions 12 and 12, the conductive paste has a rough surface (the surface has low wettability) at the boundary portion with the main portion 11. The wetting is prevented, and the external electrode 31 is formed with high dimensional accuracy.
[0055] (第 4実施例、図 6参照)  [0055] (Example 4 see FIG. 6)
第 4実施例であるセラミック電子部品 1Dは、図 6に示すように、積層体 10を主要部 11と両端の端部 12, 12と中間部 13, 13とで形成し、中間部 13, 13のみ表面粗さ R aを例えば 1. 45 /z mとし、主要部 11及び端部 12, 12の表面粗さは通常の表面粗さ としている。なお、図 6において、内部のコイルは図示を省略している。  As shown in FIG. 6, the ceramic electronic component 1D according to the fourth embodiment includes a laminated body 10 formed of a main part 11, end parts 12, 12 at both ends, and intermediate parts 13, 13. Only the surface roughness Ra is set to 1.45 / zm, for example, and the surface roughness of the main part 11 and the end parts 12 and 12 is assumed to be a normal surface roughness. In FIG. 6, the internal coils are not shown.
[0056] 本第 4実施例においても、端部 12, 12に導電ペーストを塗布する際、導電ペースト は表面粗さが粗い中間部 13, 13との境界部分で濡れ上がりを阻止され、外部電極 3 1が寸法的に精度よく形成される。  Also in the fourth embodiment, when the conductive paste is applied to the end portions 12 and 12, the conductive paste is prevented from wetting at the boundary portions with the intermediate portions 13 and 13 having a rough surface, and the external electrode 3 1 is formed with high dimensional accuracy.
[0057] (第 5実施例、図 7参照)  [0057] (Fifth embodiment, see FIG. 7)
第 5実施例であるセラミック電子部品 1Eは、図 7に示すように、積層体 10を主要部 1 1と両端の端部 12, 12とで形成し、主要部 11及び端部 12, 12の配列方向(矢印 A 方向)から平面視で、端部 12, 12を主要部 11の外形周囲よりも内側に形成している 。この場合、主要部 11と端部 12, 12とは同じ材料で構成してもよぐ外形のみが異な る。なお、図 7において、内部のコイルは図示を省略している。また、図 7 (B)は図 7 ( A)の矢印 A方向から見た図である。  As shown in FIG. 7, the ceramic electronic component 1E according to the fifth embodiment is formed of a laminated body 10 with a main part 11 and end parts 12 and 12 at both ends. The end portions 12 and 12 are formed inside the outer periphery of the main portion 11 in a plan view from the arrangement direction (the direction of arrow A). In this case, the main part 11 and the end parts 12 and 12 are different from each other only in the outer shape which may be made of the same material. In FIG. 7, the internal coils are not shown. FIG. 7 (B) is a view seen from the direction of arrow A in FIG. 7 (A).
[0058] 本第 5実施例においては、端部 12, 12に導電ペーストを塗布する際、導電ペースト は端部 12, 12と主要部 11との段差部分で濡れ上がりが阻止され、外部電極 31が寸 法的に精度よく形成される。  In the fifth embodiment, when applying the conductive paste to the end portions 12, 12, the conductive paste is prevented from wetting at the step portion between the end portions 12, 12 and the main portion 11, and the external electrode 31 Is formed with dimensional accuracy.
[0059] (第 6実施例、図 8参照)  [0059] (Refer to Example 6, Fig. 8)
第 6実施例であるセラミック電子部品 1Fは、図 8に示すように、積層体 10を主要部 1 1と両端の端部 12, 12と中間部 13, 13とで形成し、中間部 13に凹状の溝 13aを形 成している。中間部 13に溝 13aを形成することにより、端部 12, 12に導電ペーストを 塗布する際、導電ペーストの濡れ上がりが溝 13aによって阻止され、外部電極 31が 寸法的に精度よく形成されることになる。 As shown in FIG. 8, the ceramic electronic component 1F according to the sixth embodiment is formed of a laminated body 10 with a main part 11, end parts 12 and 12 at both ends, and intermediate parts 13 and 13. A concave groove 13a is formed. By forming the groove 13a in the intermediate portion 13, when the conductive paste is applied to the end portions 12, 12, the wetting of the conductive paste is prevented by the groove 13a, and the external electrode 31 is It is formed with high accuracy in dimension.
[0060] 本発明者らは、長辺 1. Omm、短辺 0. 5mm、高さ 0. 5mmの第 6実施例であるセ ラミック焼結積層体 10を前記第 1実施例で説明した工程にて作製した。さら〖こ、積層 体 10の端面力ら 150 m (寸法 W3)の内佃 J咅分に幅 20 μ m、深さ 10 μ mの溝 13a , 13aを形成した。端部 12, 12に Agを主成分とする導電ペーストを塗布した。導電 ペーストの粘度はずり速度が約 1. 9sec— 1のときに 12. 5Pa. sであった。 [0060] The present inventors have described the ceramic sintered laminate 10 of the sixth embodiment having a long side of 1. Omm, a short side of 0.5mm, and a height of 0.5mm described in the first embodiment. It was produced in. Furthermore, grooves 13a and 13a having a width of 20 μm and a depth of 10 μm were formed on the inner surface J of the laminated body 10 having an end face force of 150 m (dimension W3). A conductive paste mainly composed of Ag was applied to the end portions 12 and 12. The viscosity of the conductive paste was 12.5 Pa.s when the shear rate was about 1.9 sec- 1 .
[0061] 即ち、図 10に示すように、治具 51の裏面に 100個のセラミック焼結積層体 10を保 持し、ステンレス槽 50に深さ 100 μ mになるように導電ペースト Ρを投入し、スキージ を用いて該ペースト Pの表面を平滑にした。治具 51を積層体 10の端面がステンレス 槽 50の底面に接するまで下降させ、積層体 10の端部 12に導電ペースト Pを塗布し た。塗布後にオーブンにて 120°Cで 1時間乾燥させた。ここで形成された外部電極 3 1の折返し部分の寸法 W4を前記第 1実施例での寸法 W2と同じ手順で求めた。その 結果を以下の表 2に示す。  That is, as shown in FIG. 10, 100 ceramic sintered laminates 10 are held on the back surface of the jig 51, and a conductive paste tub is introduced into the stainless steel bath 50 to a depth of 100 μm. The surface of the paste P was smoothed using a squeegee. The jig 51 was lowered until the end surface of the laminate 10 was in contact with the bottom surface of the stainless steel tank 50, and the conductive paste P was applied to the end 12 of the laminate 10. After coating, it was dried in an oven at 120 ° C for 1 hour. The dimension W4 of the folded portion of the external electrode 31 formed here was determined by the same procedure as the dimension W2 in the first example. The results are shown in Table 2 below.
[0062] また、比較例として、溝を形成しない同サイズの積層体を、図 10に示した塗布装置 を用いて端部に導電ペースト (深さは同じ 100 μ m)を塗布し、同じ条件で乾燥させ、 形成された外部電極の折返し部分の寸法を求めた。その結果を表 2に併せて示す。  [0062] As a comparative example, a conductive paste (with the same depth of 100 μm) was applied to the end of a laminated body of the same size that does not form a groove using the coating apparatus shown in FIG. The dimensions of the folded portion of the formed external electrode were determined. The results are also shown in Table 2.
[0063] [表 2]  [0063] [Table 2]
ほ 2 )  2)
Figure imgf000014_0001
Figure imgf000014_0001
比較例では、 100 /z mの厚さの導電ペーストに浸漬することで、折返し部分の寸法 は最小で 166 m、最大で 198 mであり、平均で 182 mまで表面張力で濡れ上 がったことになる。これに対して、本第 6実施例では、折返し部分の寸法 W4は最小で 164 μ m、最大で 176 μ m、平均で 173 μ mであり、好ましい寸法精度であった。こ れは、導電ペーストの濡れ上がりが中間部 13の溝 13aで止められたことによる。 In the comparative example, the dimension of the folded part was 166 m at the minimum and 198 m at the maximum by dipping in a conductive paste with a thickness of 100 / zm, and the surface tension increased to 182 m on average. become. On the other hand, in the sixth embodiment, the dimension W4 of the folded portion is a minimum of 164 μm, a maximum of 176 μm, and an average of 173 μm, which is a preferable dimensional accuracy. This This is because the wetting of the conductive paste is stopped by the groove 13a of the intermediate portion 13.
[0065] なお、第 6実施例において、導電ペーストの濡れ上がりが溝 13aで完全に止められ ているわけではない。溝 13aの深さが 10 mにおいては、中間部 13から m程 度の内側で濡れ上がりが止まる。 [0065] In the sixth embodiment, the wetting of the conductive paste is not completely stopped by the groove 13a. When the depth of the groove 13a is 10 m, wetting up stops on the inner side about 13 m from the intermediate portion 13.
[0066] (第 7実施例、図 9参照) [0066] (Refer to the seventh embodiment, FIG. 9)
第 7実施例であるセラミック電子部品 1Gは、図 9に示すように、積層体 10を主要部 As shown in FIG. 9, the ceramic electronic component 1G according to the seventh embodiment includes a laminate 10 as a main part.
11と両端の端部 12, 12と中間部 13, 13とで形成し、中間部 13に凸状の突起 13bを 形成している。中間部 13に突起 13bを形成することにより、端部 12, 12に導電ぺー ストを塗布する際、導電ペーストの濡れ上がりが突起 13bによって阻止され、外部電 極 31が寸法的に精度よく形成されることになる。 11, end portions 12 and 12 at both ends, and intermediate portions 13 and 13, and a convex protrusion 13 b is formed on the intermediate portion 13. By forming the protrusion 13b on the intermediate portion 13, when the conductive paste is applied to the end portions 12, 12, the wetting of the conductive paste is prevented by the protrusion 13b, and the external electrode 31 is formed with high dimensional accuracy. Will be.
[0067] (他の実施例) [0067] (Other Examples)
なお、本発明に係るセラミック電子部品及びその製造方法は、前記実施例に限定さ れるものではなぐその要旨の範囲内で種々に変更することができる。  It should be noted that the ceramic electronic component and the manufacturing method thereof according to the present invention can be variously modified within the scope of the gist thereof, which is not limited to the above embodiment.
[0068] 例えば、本発明は前記実施例に示したチップインダクタ以外に LC複合部品など種 々のセラミック電子部品に幅広く適用することができる。また、前記第 3〜第 7実施例 において、主要部 11、端部 12及び中間部 13の空孔率は任意であり、空孔には榭脂 が充填されていなくてもよい。 For example, the present invention can be widely applied to various ceramic electronic parts such as LC composite parts in addition to the chip inductors shown in the above embodiments. In the third to seventh embodiments, the porosity of the main part 11, the end part 12 and the intermediate part 13 is arbitrary, and the pores may not be filled with grease.
[0069] さらに、前記各実施例を組み合わせることも可能である。例えば、積層体が主要部 と端部とで構成され、端部が主要部の外形周囲より内側に形成された第 5実施例(図[0069] Further, the above-described embodiments can be combined. For example, the fifth embodiment in which the laminated body is composed of a main part and an end part, and the end part is formed inside the outer periphery of the main part (see FIG.
7参照)において、主要部が 30〜80vol%の空孔率を有し、端部が 10vol%以下の 空孔率を有していてもよい。 7)), the main part may have a porosity of 30 to 80 vol%, and the end part may have a porosity of 10 vol% or less.
産業上の利用可能性  Industrial applicability
[0070] 以上のように、本発明は、チップインダクタなどのセラミック電子部品に有用であり、 特に、浸漬法による導電ペーストの濡れ上がりを所定位置で止めることができ、寸法 精度よく外部電極を形成することができる点で優れている。 [0070] As described above, the present invention is useful for ceramic electronic components such as chip inductors, and in particular, the wetting of the conductive paste by the dipping method can be stopped at a predetermined position, and external electrodes can be formed with high dimensional accuracy. Excellent in that it can be done.

Claims

請求の範囲 The scope of the claims
[1] 電子素子を内蔵したセラミック積層体の両端部に導電ペーストを用いて形成された 外部電極を設けたセラミック電子部品であって、  [1] A ceramic electronic component having external electrodes formed using a conductive paste at both ends of a ceramic laminate incorporating an electronic element,
前記セラミック積層体は、主要部と前記外部電極を設けた端部とからなり、 前記主要部の表面状態は前記端部の表面状態よりも導電ペーストの濡れ性が低く 前記外部電極は前記端部の表面に前記主要部との境界部分まで形成されている こと、  The ceramic laminate includes a main part and an end provided with the external electrode, and the surface state of the main part is lower in wettability of the conductive paste than the surface state of the end part. The external electrode is the end part. Formed on the surface of the main part up to the boundary with the main part,
を特徴とするセラミック電子部品。  Ceramic electronic parts characterized by
[2] 前記主要部は 30〜80vol%の空孔率を有するセラミック積層体力もなり、前記端部 は 10vol%以下の空孔率を有するセラミック積層体力もなることを特徴とする請求の 範囲第 1項に記載のセラミック電子部品。  [2] The main part also has a ceramic laminated body force having a porosity of 30 to 80 vol%, and the end part also has a ceramic laminated body force having a porosity of 10 vol% or less. The ceramic electronic component according to item 1.
[3] 前記セラミック積層体に形成された空孔に榭脂が充填されていることを特徴とする 請求の範囲第 2項に記載のセラミック電子部品。 [3] The ceramic electronic component as set forth in [2], wherein the pores formed in the ceramic laminate are filled with resin.
[4] 前記主要部の表面粗さは前記端部の表面粗さよりも粗いことを特徴とする請求の範 囲第 1項に記載のセラミック電子部品。 [4] The ceramic electronic component according to [1], wherein a surface roughness of the main portion is rougher than a surface roughness of the end portion.
[5] 電子素子を内蔵したセラミック積層体の両端部に導電ペーストを用いて形成された 外部電極を設けたセラミック電子部品であって、 [5] A ceramic electronic component provided with external electrodes formed using a conductive paste at both ends of a ceramic laminate incorporating an electronic element,
前記セラミック積層体は、主要部と前記外部電極を設けた端部と該主要部及び端 部の間に位置する中間部とからなり、  The ceramic laminate includes a main part, an end provided with the external electrode, and an intermediate part located between the main part and the end,
前記中間部の表面状態は前記端部の表面状態よりも導電ペーストの濡れ性が低く 前記外部電極は前記端部の表面に前記中間部との境界部分まで形成されている こと、  The surface state of the intermediate part is lower in wettability of the conductive paste than the surface state of the end part, and the external electrode is formed up to the boundary part with the intermediate part on the surface of the end part.
を特徴とするセラミック電子部品。  Ceramic electronic parts characterized by
[6] 前記中間部は 30〜80vol%の空孔率を有するセラミック積層体力もなり、前記端部 は 10vol%以下の空孔率を有するセラミック積層体力もなることを特徴とする請求の 範囲第 5項に記載のセラミック電子部品。 6. The intermediate portion also has a ceramic laminate force having a porosity of 30 to 80 vol%, and the end portion also has a ceramic laminate force having a porosity of 10 vol% or less. The ceramic electronic component according to Item 5.
[7] 前記セラミック積層体に形成された空孔に榭脂が充填されていることを特徴とする 請求の範囲第 6項に記載のセラミック電子部品。 [7] The ceramic electronic component as set forth in [6], wherein the pores formed in the ceramic laminate are filled with resin.
[8] 前記中間部の表面粗さは前記端部の表面粗さよりも粗いことを特徴とする請求の範 囲第 5項に記載のセラミック電子部品。 8. The ceramic electronic component according to claim 5, wherein the surface roughness of the intermediate portion is rougher than the surface roughness of the end portion.
[9] 電子素子を内蔵したセラミック積層体の両端部に導電ペーストを用いて形成された 外部電極を設けたセラミック電子部品であって、 [9] A ceramic electronic component in which external electrodes formed using a conductive paste are provided at both ends of a ceramic laminate incorporating an electronic element,
前記セラミック積層体は、主要部と前記外部電極を設けた端部とからなり、 前記主要部及び前記端部の配列方向から平面視で、前記端部は前記主要部の外 形周囲よりも内側に形成され、  The ceramic laminate includes a main portion and an end portion provided with the external electrode, and the end portion is located on the inner side of the outer periphery of the main portion in plan view from the arrangement direction of the main portion and the end portion. Formed into
前記外部電極は前記端部の表面に主要部との境界部分まで形成されていること、 を特徴とするセラミック電子部品。  The external electrode is formed on the surface of the end portion up to a boundary portion with a main portion.
[10] 電子素子を内蔵したセラミック積層体の両端部に導電ペーストを用いて形成された 外部電極を設けたセラミック電子部品であって、 [10] A ceramic electronic component provided with external electrodes formed using a conductive paste on both ends of a ceramic laminate incorporating an electronic element,
前記セラミック積層体は、主要部と前記外部電極を設けた端部と該主要部及び端 部の間に位置する中間部とからなり、  The ceramic laminate includes a main part, an end provided with the external electrode, and an intermediate part located between the main part and the end,
前記中間部は前記主要部と前記端部との間に凹状に設けられ、  The intermediate portion is provided in a concave shape between the main portion and the end portion,
前記外部電極は前記端部の表面に前記中間部又は前記主要部との境界部分まで 形成されていること、  The external electrode is formed on the surface of the end portion up to a boundary portion with the intermediate portion or the main portion;
を特徴とするセラミック電子部品。  Ceramic electronic parts characterized by
[11] 電子素子を内蔵したセラミック積層体の両端部に導電ペーストを用いて形成された 外部電極を設けたセラミック電子部品であって、 [11] A ceramic electronic component provided with external electrodes formed using a conductive paste on both ends of a ceramic laminate incorporating an electronic element,
前記セラミック積層体は、主要部と前記外部電極を設けた端部と該主要部及び端 部の間に位置する中間部とからなり、  The ceramic laminate includes a main part, an end provided with the external electrode, and an intermediate part located between the main part and the end,
前記中間部は前記主要部と前記端部との間に凸状に設けられ、  The intermediate portion is provided in a convex shape between the main portion and the end portion,
前記外部電極は前記端部の表面に前記中間部との境界部分まで形成されている こと、  The external electrode is formed on the surface of the end portion up to a boundary portion with the intermediate portion;
を特徴とするセラミック電子部品。  Ceramic electronic parts characterized by
[12] 電子素子を内蔵したセラミック積層体の両端部に導電ペーストを用いて形成された 外部電極を設けたセラミック電子部品の製造方法であって、 [12] Formed using conductive paste on both ends of ceramic laminate with built-in electronic elements A method of manufacturing a ceramic electronic component provided with an external electrode,
セラミックシートを積層して、導電ペーストの濡れ性が比較的低い表面状態を有す る主要部と、導電ペーストの濡れ性が比較的高 、表面状態を有する端部とからなる 積層体を形成する工程と、  The ceramic sheets are laminated to form a laminate composed of a main part having a surface state with relatively low wettability of the conductive paste and an end having a surface state with relatively high wettability of the conductive paste. Process,
前記端部の表面に導電ペーストを塗布して外部電極を前記主要部との境界部分ま で形成する工程と、  Applying a conductive paste to the surface of the end to form an external electrode up to the boundary with the main part;
を備えたことを特徴とするセラミック電子部品の製造方法。  A method of manufacturing a ceramic electronic component comprising:
[13] 電子素子を内蔵したセラミック積層体の両端部に導電ペーストを用いて形成された 外部電極を設けたセラミック電子部品の製造方法であって、  [13] A method for producing a ceramic electronic component comprising external electrodes formed using a conductive paste on both ends of a ceramic laminate incorporating an electronic element,
セラミックシートを積層して、主要部と、導電ペーストの濡れ性が比較的高い表面状 態を有する端部と、導電ペーストの濡れ性が比較的低 、表面状態を有して前記主要 部と前記端部の間に位置する中間部と、からなる積層体を形成する工程と、 前記端部の表面に導電ペーストを塗布して外部電極を前記中間部との境界部分ま で形成する工程と、  Laminating ceramic sheets, the main part, the end part having a surface state with relatively high wettability of the conductive paste, the conductive part having relatively low wettability and the surface state having the surface part and the main part A step of forming a laminate comprising an intermediate portion located between the end portions, a step of applying a conductive paste to the surface of the end portion and forming an external electrode up to the boundary portion with the intermediate portion;
を備えたことを特徴とするセラミック電子部品の製造方法。  A method of manufacturing a ceramic electronic component comprising:
[14] 導電ペーストの濡れ性が比較的低い表面状態を有する前記主要部又は前記中間 部は、焼失材を含むセラミック原料力もセラミックグリーンシートを作製し、該シートを 積層することにより形成することを特徴とする請求の範囲第 12項又は第 13項に記載 のセラミック電子部品の製造方法。 [14] The main part or the intermediate part having a surface state in which the wettability of the conductive paste is relatively low is formed by producing a ceramic green sheet and laminating the ceramic raw material power including a burned material. 14. The method of manufacturing a ceramic electronic component according to claim 12, wherein the ceramic electronic component is manufactured according to claim 12.
[15] 電子素子を内蔵したセラミック積層体の両端部に導電ペーストを用いて形成された 外部電極を設けたセラミック電子部品の製造方法であって、 [15] A method for producing a ceramic electronic component comprising external electrodes formed using a conductive paste at both ends of a ceramic laminate incorporating an electronic element,
セラミックシートを積層して、主要部と該主要部の両端部に位置する端部とからなり 、主要部及び端部の配列方向から平面視で、端部が主要部の外形周囲よりも内側に 配置されて!ゝる積層体を形成する工程と、  A ceramic sheet is laminated, and consists of a main part and ends located at both ends of the main part. The main part and the arrangement direction of the end part are viewed in plan view, and the end part is inside the outer periphery of the main part. A process of forming a stacked body
前記端部の表面に導電ペーストを塗布して外部電極を前記主要部との境界部分ま で形成する工程と、  Applying a conductive paste to the surface of the end to form an external electrode up to the boundary with the main part;
を備えたことを特徴とするセラミック電子部品の製造方法。  A method of manufacturing a ceramic electronic component comprising:
[16] 電子素子を内蔵したセラミック積層体の両端部に導電ペーストを用いて形成された 外部電極を設けたセラミック電子部品の製造方法であって、 [16] Formed using conductive paste on both ends of ceramic laminate with built-in electronic elements A method of manufacturing a ceramic electronic component provided with an external electrode,
セラミックシートを積層して、主要部と端部と主要部及び端部の間に位置する中間 部とからなり、前記中間部の表面形状が前記主要部及び前記端部の表面形状とは 異なるように積層体を形成する工程と、  The ceramic sheet is laminated and consists of a main part, an end part, and an intermediate part located between the main part and the end part, and the surface shape of the intermediate part is different from the surface shape of the main part and the end part. Forming a laminate on
前記端部の表面に導電ペーストを塗布して外部電極を前記中間部又は前記主要 部との境  A conductive paste is applied to the surface of the end portion to connect the external electrode to the intermediate portion or the main portion.
界部分まで形成する工程と、  Forming to the boundary part;
を備えたことを特徴とするセラミック電子部品の製造方法。  A method of manufacturing a ceramic electronic component comprising:
[17] 前記中間部の表面形状を前記主要部及び前記端部に対して凹状又は凸状に形 成することを特徴とする請求の範囲第 16項に記載のセラミック電子部品の製造方法 17. The method for manufacturing a ceramic electronic component according to claim 16, wherein the surface shape of the intermediate portion is formed concave or convex with respect to the main portion and the end portion.
[18] 前記外部電極は、前記積層体の端部を導電ペーストに浸漬して形成することを特 徴とする請求の範囲第 12項ないし第 17項のいずれかに記載のセラミック電子部品 の製造方法。 [18] The manufacturing of the ceramic electronic component according to any one of [12] to [17], wherein the external electrode is formed by immersing an end of the laminate in a conductive paste. Method.
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