WO2007051567A1 - Système de mesure permettant de mesurer les zones limitrophes ou les surfaces de pièces d’usinage - Google Patents

Système de mesure permettant de mesurer les zones limitrophes ou les surfaces de pièces d’usinage Download PDF

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Publication number
WO2007051567A1
WO2007051567A1 PCT/EP2006/010376 EP2006010376W WO2007051567A1 WO 2007051567 A1 WO2007051567 A1 WO 2007051567A1 EP 2006010376 W EP2006010376 W EP 2006010376W WO 2007051567 A1 WO2007051567 A1 WO 2007051567A1
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WO
WIPO (PCT)
Prior art keywords
light
measuring system
optical fibers
measuring
light source
Prior art date
Application number
PCT/EP2006/010376
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German (de)
English (en)
Inventor
Martin SCHÖNLEBER
Original Assignee
Precitec Optronik Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Precitec Optronik Gmbh filed Critical Precitec Optronik Gmbh
Publication of WO2007051567A1 publication Critical patent/WO2007051567A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Definitions

  • Measuring system for measuring limit For measuring limit or
  • the invention relates to a measuring system for measuring boundary surfaces or surfaces of workpieces
  • an optical waveguide device in whose one end face the light of the at least one light source can be coupled in and whose other end face can be imaged by the objective as a function of the wavelength of the light in different planes;
  • a decoupling device with which at a boundary or surface of the workpiece reflected light from the beam path of the incident light can be decoupled
  • a spectrograph to which the light extracted by the decoupling means can be supplied and which is capable of producing electrical output signals representative of the intensity of the light as a function of the wavelength
  • an evaluation unit to which the electrical signals of the spectrograph can be supplied and which is able to determine therefrom and from stored data the topography of the interface;
  • the optical fiber device is an optical fiber bundle in which a plurality of optical fiber fibers is substantially parallel.
  • optical measuring devices of this type With optical measuring devices of this type meanwhile measurement accuracies in the direction perpendicular to the surface of significantly less than one micrometer can be achieved.
  • triangulation measurement methods interferometric measurement methods and measurement methods based on the autofocus principle, which are similarly known from CD players.
  • a measuring system of the type mentioned at the outset is known from an article by C. Dietz and M. Jurca entitled “An Alternative to the Laser", Sensoragazine No. 4, November 3, 1997, pages 15 to 18.
  • This measuring system enables a particularly accurate surface measurement with a very compact design.
  • white light generated by a halogen or xenon lamp is guided via a (single) glass fiber to a measuring head.
  • the measuring head contains a lens with strong chromatic aberration, which images the lens-side face of the glass fiber at a short distance in a short distance. Due to the chromatic aberration, a wavelength-dependent focal length results for this image.
  • an optical boundary or surface is present in the focal length range of the objective, only light of a specific wavelength produces a sharp pixel on this boundary or surface due to the wavelength-dependent focal length of the objective. Conversely, only the reflection of the light of this wavelength is again imaged sharply on the fiber end and coupled into the fiber. At the opposite end of the fiber, the returning light is decoupled and analyzed in a spectrograph. Each local maximum of the spectral intensity distribution corresponds to a reflective optical boundary or surface. If only the reflex at the next limit or surface of the measuring head is evaluated, then the distance between the measuring head and the boundary or surface can be deduced therefrom. If, in addition, the following boundary or surface is included in the evaluation, the thickness of a transparent layer or of a transparent body can be determined.
  • the thickness of the layer or of the body is obtained as the difference between the measured distances for the upper and the lower boundary or surface.
  • the bodies to be measured it may, for. B. glass panes or thin-walled glass tubes to be produced with uniform slice thickness or wall thickness.
  • Another area of application for the thickness measurement of transparent bodies is the verification of the surface fidelity of lenses.
  • the term surface measurement should therefore also include the layer thickness measurement in this context.
  • the pointwise measurement of the boundary or surface requires a certain amount of time. In principle, it is always desirable, especially in mass production, to keep this time as short as possible. Since usually more than one measuring point is to be machined, a mechanical movement of the measuring head relative to the workpiece is usually essential. This must be done with high accuracy and is relatively sluggish.
  • DE 10 2004 01 1 189 A1 shows a measuring system for measuring surfaces of workpieces, which has all the features of the preamble of claim 1. For the evaluation of the light returned by each fiber from the measuring head, a separate light receiver is required for each fiber.
  • DE 101 61 486 A1 shows the use of a plurality of optical cables with a central illumination fiber and these surrounding optical fibers, which guide the reflected light to an evaluation.
  • work is done in a kind of "dark field", since the light, which is reflected back exactly into the exit surface of the optical fiber, is faded out for the evaluation.
  • the spectrograph and the evaluation unit are designed so that they multi-channel and simultaneously processed at the boundary or surface of the workpiece reflected light of the different optical fibers.
  • the single-channel structure of the known measuring system is multiplied to a multi-channel design, although only one measuring head, a spectrograph and an evaluation unit, possibly modified, are used.
  • a "parallel" arrangement of the plurality of optical fibers within a fiber optic bundle is not to be understood as strict geometric parallelism.
  • Parallel in the context of the present invention, the optical fibers continue to run even when the arrangements of their faces at the two opposite ends of the light guide bundle differ, the individual optical fibers are thus rotated against each other.
  • a common light source is provided for all optical fibers. This means that the "depth range" given by the bandwidth of the light used and the dispersion of the objective, which can be measured on the boundary or surface of the workpiece, is the same for all optical fibers.
  • the coupling of the light from the light source to the individual optical fibers can, for example, be done so that the light source adjacent to the end faces of the optical fibers are arranged on a surrounding the light source circuit or on a spherical surface surrounding the light source. With a light source radiating uniformly into the different solid angles, this means that the light intensity coupled into each fiber optic fiber is approximately the same.
  • an arrangement may be used which is somewhat more complicated and in which the light of a light source is first coupled into an optical fiber and is distributed therefrom via at least one coupling piece to a plurality of optical fibers.
  • the measuring system does not differ appreciably from one in which the same light source is used for all optical fibers.
  • the acceleration of the measuring method in this case is essentially simply based on the fact that the same type of measurement takes place simultaneously in several points in the same "depth range" of the boundary or surface.
  • the second possibility when using different light sources is that at least a part of the light sources radiate in different wavelength ranges. In this case, at the same time measurements can be made in different depth ranges, which otherwise could not be made for a given broadband of the individual light source.
  • the end faces of the optical fibers facing the measuring head are arranged in a linear array.
  • a linear array This is particularly suitable where measuring points are to be measured on a boundary or surface, which lie on a straight line.
  • a relatively wide "strip" of the boundary or surface can be scanned with this linear array in a scanning movement of the measuring head.
  • the ends of the optical fiber fibers facing the measuring head can also form a two-dimensional matrix-like array. With this array it is possible to measure an entire area of a boundary or surface while the measuring head is stationary. With the measuring head moved, the boundary or surface can be scanned in a relatively wide "strip" by proceeding in the direction of movement of the measuring head in steps corresponding to the width of the array in this direction.
  • the ends of the optical fiber fibers facing the measuring head can be arranged in a workpiece-adapted array, in particular in a circular or cross shape.
  • measuring points must be measured which are located in a specific geometric arrangement on the workpiece. If the array of the ends of the optical waveguide fibers facing the measuring head is matched to the arrangement of the measuring points, movement of the measuring head during the measurement is not necessary.
  • the thickness of a transparent layer is to be measured, but generally also where comparatively large "depths" of the boundary or surface are to be detected, that embodiment of the invention in which the measuring head is suitable facing ends of the optical fibers are at least partially offset in the axial direction against each other.
  • the decoupling device may comprise a beam splitter; In this case, therefore, the coupling takes place outside of the optical fibers.
  • the decoupling device comprises at least one optical fiber coupling piece.
  • Such couplings generally T-couplings, are commercially available.
  • optical fibers of a fiber optic fiber bundle which is guided from the coupling device to the spectrograph, are arranged in an input gap of the spectrograph and that the end faces of the optical fiber bundle Fers to a corresponding number of strip-shaped detector Arrays of a detector device are imaged, wherein the strip-shaped detector arrays are arranged to extend transversely to the entrance gap.
  • the multi-channel processing of the light signals supplied by the individual optical fiber fibers can be made particularly simple.
  • strip-shaped detector arrays individual linear detectors can be used, but it is also conceivable that a two-dimensional detector array is used, individual rows or groups of lines being used as strip-shaped detectors.
  • the decoupling device can also be located in the measuring head. Then, a first optical fiber bundle leads from the light source or the light sources to the measuring head and a second optical fiber bundle leads from the measuring head to the spectrograph.
  • Figure 1 shows schematically the structure of a measuring system according to the invention
  • Figures Ia to 2c several ways to assign a plurality of optical fibers of one or more light sources
  • FIGS. 3a to 3d show several possibilities of arranging the optical fibers at their workpiece-near end
  • FIG. 4 schematically shows a measuring head which can alternatively be used in the measuring system of FIG. 1;
  • FIG. 5 shows an alternative to Figure 1 way of decoupling the light reflected on the measured workpiece light.
  • FIG. 6 is a schematic exploded view of the most important components of the spectrograph used in the measuring system of FIG.
  • the measuring system shown here and designated overall by the reference numeral 1 comprises two light-emitting diodes 2a, 2b, which serve as light sources.
  • the two light-emitting diodes 2 a, 2 b emit light in a certain wavelength range, ie they do not emit monochromatic light.
  • the wavelength range of the two light-emitting diodes 2a, 2b can be identical but also different.
  • the light emitted by the light-emitting diodes 2 a, 2 b is at least approximately parallelized by a first lens 4, then passes through a beam splitter cube 5 and a second lens 6, which projects the two light-emitting diodes 2 a, 2 b onto the end faces of two lens fibers arranged parallel to one another 7a, 7b focused.
  • the two optical fibers 7a, 7b form an optical fiber bundle 7 in the terminology of the appended claims.
  • the ends of the two optical fiber fibers 7a, 7b remote from the lens 6 lie within a measuring head 8, which is arranged in the vicinity of an interface 9 of a workpiece to be measured.
  • the measuring head 8 contains, as the most important component, an objective 10 which is indicated only schematically and which has a high dispersion in a known manner, that is to say is not consciously chromatically correct.
  • the objective 10 images the different wavelengths contained in the light of the light-emitting diodes 2 a, 2 b in different focal planes, a sharp image being achieved in the boundary surface 9 of the workpiece only for a specific wavelength.
  • the corresponding light is shown in FIG. 1 by solid lines, while the light of another wavelength, which is focused at a smaller distance from the objective 10, is shown in dashed lines.
  • the light reflected at the interface 9 of the workpiece passes through the lens 10 in the opposite direction and is focused by this on the lens 10 adjacent end faces of the two optical fibers 7a, 7b.
  • the light emerging from the opposite end faces of the optical fibers 7a, 7b is approximately parallelized by the lens 6 and partially - reflected at the mirror surface of the beam splitter cube 5 so that it falls in the lateral direction of another lens 1 1, which throws the two beams on the entrance slit of a spectrograph 12.
  • the internal structure of the spectrograph 12 will be explained below with reference to FIG. 6; For the moment it is sufficient to know that the spectrograph 12 generates electrical signals which are representative of the intensity of the received light as a function of the wavelength and which one
  • Evaluation unit 13 are supplied.
  • the evaluation unit 13 calculates the topography of the interface 9 of the workpiece from the electrical signals supplied to it and from variables stored in it.
  • the measuring system shown in Figure 1 is to be understood in many respects as a duplication of known measuring systems, wherein the duplication relates to the number of light sources and the number of optical fibers;
  • the optical elements 4, 5, 6, 10, 1 1, the spectrograph 12 and the evaluation unit 13 are provided only once.
  • the evaluation of the information obtained by the spectrograph 12 in the evaluation unit 13 can be carried out according to the same principles, as is also the case with the prior art mentioned at the outset. This may be referred to.
  • the measurement system 1 shown in FIG. 1 makes it possible to topographically measure a specific interface 9 in a much faster manner than in the prior art. In this case, a distinction is made between those cases in which the two light emitting diodes 2a, 2b emit light of the same wavelength range, and those in which the emitted wavelength ranges of the two light emitting diodes 2a, 2b differ.
  • the acceleration of the evaluation process simply results from the fact that at any time of the survey two closely spaced points of the interface 9 can be measured, so that during a scanning movement of the measuring head 8, for measuring the entire interface 9 is required, can be worked in wider stripes.
  • the distance between the two images of the LEDs 2a, 2b on the interface 9 of the workpiece to be measured is selected in accordance with the accuracy requirements. For example, in those cases where the wavelength ranges emitted by the two light-emitting diodes 2a, 2b are different, the arrangement of FIG. 1 serves simultaneously to perform topographic measurements at different distances from the measuring head 8, for example at an upper and lower boundary surface of one transparent layer.
  • the more accurate the measurement result the closer the two images of the LEDs 2a, 2b are laterally adjacent to one another.
  • the described arrangement makes it possible to measure interfaces that are so far apart that they could no longer be measured with the wavelength range emitted by a single light source.
  • Different wavelength ranges are generally advantageous wherever the measurements are to extend over a "depth" of the workpiece that can no longer be covered by the wavelength range of a single light source.
  • the measuring system 1 shown in FIG. 1 can be understood as a two-channel measuring system. Of course, it is possible to use a larger number of channels instead of two channels.
  • FIG. 2a A first example of a four-channel configuration of the measuring system 1 is shown in FIG. 2a.
  • this four light sources 102a, 102b, 102c, 102d are shown, each associated with an optical fiber 107a, 107b, 107c, 107d.
  • the optical fiber bundle 107 thus comprises as many optical fibers 107a to 107d as there are light sources 102a to 102d.
  • light sources in particular superluminescent diodes, which emit a sufficiently broadband light come into consideration as light sources.
  • the wavelength range emitted by the different light sources 102a-102d may be the same or different depending on the application.
  • FIG. 2a shows no imaging elements which couple the light emitted by the light sources 102a to 102d into the adjacent end faces of the optical fibers 107a to 107d.
  • imaging elements can be provided. This applies equally to FIGS. 2b and 2c described below.
  • FIG. 2b shows another type, as in four optical fibers 207a, 207b, 207c,
  • the ends of the four optical fibers 207a, 207b, 207c, 207d are bent so that the corresponding end faces lie approximately on a circle surrounding the light source 202.
  • all the optical fibers 207a to 207d of light of the same wavelength range happens as a broadband light source is preferably a xenon or halogen lamp.
  • a broadband light source is preferably a xenon or halogen lamp.
  • the illustrated two-dimensional arrangement of the end faces of the optical waveguide fibers 207a, 207d such is also considered, in which the individual end faces lie on a spherical surface surrounding the light source 202.
  • a single light source 302 is used, which in turn is preferably a xenon or halogen lamp.
  • a supercontum radiation source is considered as the light source.
  • the light emitted by the light source 302 is first coupled into an optical fiber 307a, which branches into the two optical fibers 307b, 307c via a first T-coupling piece 307a.
  • Each optical waveguide fiber 307b, 307c splits again into two optical waveguide fibers 307d, 307e or 307f, 307g via each respective T-coupling piece 307i or 307k.
  • the optical fiber bundle 307 of Figure 2c consists of a total of four optical fibers 307d to 307g.
  • the arrangement of the end faces of the optical fibers need not coincide at both ends, but it is possible to "twist" the optical fibers within their fiber optic fiber bundle between their end near the light source and its end near the measuring head so that virtually any arrangement or “arrays” of radiating faces in the vicinity of the probe
  • FIG. 3b shows a two-dimensional matrix of a total of twelve optical fiber fibers 407a to 4071 (for reasons of clarity, not all of the optical fibers are provided with the corresponding reference symbol in FIGS. 3b to 3d).
  • This arrangement can also be used for "stripwise" scanning of the interface 9 to be measured, wherein the scanning movement can be “stepwise” by performing a jump or step of the scan movement after each measurement process, which is the width of the matrix in this direction equivalent. If all measuring points lie within the area covered by the matrix, then movement of the measuring head 8 is not required.
  • FIG. 3c shows an "object-adapted" array of eight optical fibers 507a to 507h, whose end faces facing the measuring head lie on a circle. This arrangement is intended for such applications in which the points to be measured of the interface of the workpiece are at least approximately on a circle.
  • FIG. 3b Another object-adapted arrangement of nine optical fiber fibers 607a to 607i is shown in FIG. 3b.
  • the end faces of the optical waveguide fibers 607a, 607i facing the measuring head 8 form a cross, which likewise eliminates or at least minimizes scanning movement of the measuring head 8 in many applications.
  • FIG. 4 shows an exemplary embodiment of a measuring head 708 in which the end faces of the optical fiber fibers 707a and 707b inserted into it end at different distances from the objective 710.
  • This arrangement can be used in particular where large "depth differences" are to be measured in the workpiece, for example, where a relatively large thickness of a transparent layer is to be determined on a workpiece.
  • narrower light sources can be used than would be required if the images of the end faces of both optical fibers 707a and 707b would be in the same plane at the same wavelength.
  • the light reflected at the interface 9 to be measured is decoupled by means of the beam splitter cube 5 and fed to the spectrograph 12.
  • a beam splitter cube 5 it is also possible to use an optical waveguide coupling device, as shown in FIG. 5 and provided there overall with the reference numeral 805.
  • an optical fiber bundle 807 is illustrated with three optical fiber fibers 807a, 807b, 807c extending from a holder 814 near the light source (s) to a holder 815 within the probe near the objective.
  • optical fibers 807a, 807b, 807c each open via a T-coupling piece 807d, 807e, 807f three further optical fibers 807g, 807h, 807i. Their ends are fastened in a holder 816, which is arranged in the vicinity of the entrance slit of the spectrograph 12.
  • the function of the coupling device 805 is self-explanatory.
  • the structure of the spectrograph 12 is shown schematically, which in principle can be used in all cases described above. It contains a first lens 20, which substantially parallelizes the light emitted in this case by a light-fiber bundle 7 arranged in its entrance slit 19 with light emitted by five optical fibers 7a to 7d. This parallelized light traverses a diffraction grating 21 and is thereby decomposed into the individual wavelengths contained in it and deflected in different dimensions in FIG. 6 in the horizontal direction.
  • a second lens 22 forms the end faces of the optical fiber bundle 7 on a corresponding number, in the present case five, horizontal stripes shaped detector arrays 23a, 23b, 23c, 23d and 23e of a detector device 23 from.
  • the evaluation unit 13 which is associated with this spectrograph 12, can determine the light intensity measured there for each "pixel" of the detector arrays 23a to 23e and assign it to the corresponding wavelength. From the result obtained in this way, the topography of the measured boundary surface (s) can be determined from data stored in the evaluation unit 13 and obtained, for example, in a previously performed calibration process, and output, for example, in a display.
  • the decoupling device is located in the measuring head.
  • a first optical fiber bundle leads from the light source or the light sources to the measuring head and a second optical fiber bundle from the measuring head to the spectrograph.
  • optical fibers 7, optionally in combination with a decoupling device such as shown in FIG. 5, any desired, object-adapted array arrangement of its end faces in the area of the measuring head 8 is possible (examples are shown in FIGS. 3a-3d), while at the same time the input gap 19 arranged or to be imaged on these faces of the optical fibers is a linear Form an array extending transversely to the dispersion direction of the spectrograph.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

Système de mesure (1) permettant de mesurer les zones limitrophes ou les surfaces (9) de pièces d’usinage comprenant au moins une source de lumière (2a, 2b), qui envoie une lumière non monochromatique. Cette lumière est acheminée à une tête de mesure (8) par un dispositif de guidage de lumière (7), contenant une pluralité de fibres de guidage de lumière (7a, 7b), tête de mesure comprenant un objectif (10) sans correction chromatique. Cet objectif constitue les faces frontales voisines des deux fibres de guidage de lumière (7a, 7b) en fonction de la longueur d'onde de la lumière dans des plans différents. La lumière réfléchie au niveau de la zone limitrophe ou de la surface mesurée (9) de la pièce d’usinage est découplée au moyen d’un dispositif de découplage (5) à partir de la marche des rayons de la lumière incidente et injectée dans un spectrographe (12). Ce spectrographe (12) ainsi qu’une unité d’interprétation (13) commutée en aval de celui-ci sont réalisés de telle sorte qu’ils peuvent traiter sur plusieurs canaux et simultanément la lumière amenée jusqu’à eux et réfléchie au niveau de la zone limitrophe (9) de la pièce d'usinage des diverses fibres de guidage de lumière (7a, 7b), de manière à déterminer rapidement la topographie de la zone limitrophe ou de la surface (9) de la pièce d'usinage.
PCT/EP2006/010376 2005-11-04 2006-10-27 Système de mesure permettant de mesurer les zones limitrophes ou les surfaces de pièces d’usinage WO2007051567A1 (fr)

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Application Number Priority Date Filing Date Title
DE102005052743.4A DE102005052743B4 (de) 2005-11-04 2005-11-04 Messsystem zur Vermessung von Grenz- oder Oberflächen von Werkstücken
DE102005052743.4 2005-11-04

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DE102007046228A1 (de) * 2007-09-26 2009-04-09 Degudent Gmbh Verfahren zur Erkennung von Veränderungen an zumindest einem Zahn
US8477320B2 (en) 2009-05-15 2013-07-02 Degudent Gmbh Method and measuring arrangement for the three-dimensional measurement of an object
CN104995480A (zh) * 2013-03-15 2015-10-21 欧姆龙株式会社 共聚焦测量装置
CN107976145A (zh) * 2016-10-21 2018-05-01 株式会社三丰 光谱共焦传感器和测量方法

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GB2489722B (en) 2011-04-06 2017-01-18 Precitec Optronik Gmbh Apparatus and method for determining a depth of a region having a high aspect ratio that protrudes into a surface of a semiconductor wafer
DE102011051146B3 (de) 2011-06-17 2012-10-04 Precitec Optronik Gmbh Prüfverfahren zum Prüfen einer Verbindungsschicht zwischen waferförmigen Proben
DE102012203315B4 (de) * 2011-11-30 2014-10-16 Micro-Epsilon Messtechnik Gmbh & Co. Kg Vorrichtung und ein Verfahren zur Abstands- oder Dickenmessung eines Objekts
DE102012111008B4 (de) 2012-11-15 2014-05-22 Precitec Optronik Gmbh Optisches Messverfahren und optische Messvorrichtung zum Erfassen einer Oberflächentopographie
WO2014203161A1 (fr) * 2013-06-17 2014-12-24 Precitec Optronik Gmbh Dispositif de mesure optique servant à détecter des différences d'espacement et procédé de mesure optique
DE102013016367A1 (de) * 2013-09-30 2015-04-02 Carl Zeiss Microscopy Gmbh Lichtmikroskop und Verfahren zum Untersuchen einer Probe mit einem Lichtmikroskop
US10234265B2 (en) 2016-12-12 2019-03-19 Precitec Optronik Gmbh Distance measuring device and method for measuring distances
DE102017126310A1 (de) 2017-11-09 2019-05-09 Precitec Optronik Gmbh Abstandsmessvorrichtung
DE102018130901A1 (de) 2018-12-04 2020-06-04 Precitec Optronik Gmbh Optische Messeinrichtung

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CN107976145A (zh) * 2016-10-21 2018-05-01 株式会社三丰 光谱共焦传感器和测量方法

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