WO2007046484A1

WO2007046484A1 - Electrophoretic chip, electrophoretic device, and electrophoretic system

Info

Publication number: WO2007046484A1
Application number: PCT/JP2006/320878
Authority: WO
Inventors: Osamu Teranuma; Mayuko Sakamoto; Yoshihiro Izumi; Masayuki Fujimoto
Original assignee: Sharp Kabushiki Kaisha; National University Corporation Shizuoka University
Priority date: 2005-10-19
Filing date: 2006-10-19
Publication date: 2007-04-26
Also published as: WO2007046484A8

Abstract

An electrophoretic panel (10) causes a dielectric substance to migrate dielectrically by applying an electric field generated by an AC voltage, to a sample containing the dielectric substance. The electrophoretic panel (10) is equipped, on a lower substrate (1), with a plurality of migration lanes (3) for causing the dielectric substance to migrate dielectrically. On the lower substrate (1), there is disposed a migration electrode array (6), which includes a plurality of migration electrodes (6a) intersecting with the migration lanes (3) and which causes the dielectric substance to migrate dielectrically by applying the AC voltage so as to apply the electric field to the sample injected into the migration lanes (3). The individual migration electrodes (6a) in the migration electrode array (6) are disposed across the migration lanes (3).

Description

Dielectrophoresis chip, dielectrophoresis apparatus, and dielectrophoresis system

[0001] The present invention relates to a dielectrophoresis chip, a dielectrophoresis apparatus, and a dielectrophoresis system for conveying particles such as biomolecules and resin beads by dielectrophoretic force.

Background art

[0002] In recent years, as chemical analysis systems, research and development of chemical analysis systems called Lab-on-a-Chip (Lab-on-a-Chip) and μ-TAS (Micro Total Analysis System) have been conducted. It is actively done. These chemical analysis systems use a microchip substrate of the size of a palm by means of semiconductor microfabrication technology. On this single microchip substrate (one chip), pumps, valves, reaction vessels, various sensors, etc. Are integrated and miniaturized. Examples of the microchip substrate include a glass substrate.

[0003] In these chemical analysis systems, various analyzes are performed by transporting, separating, and collecting particles in a fluid flowing through a fine channel provided on the microchip substrate. These chemical analysis systems can measure small amounts of sample, shorten reaction time, automate measurement including pretreatment, downsize equipment, make equipment disposable, lower cost, and manpower. There are advantages such as reduction, especially in the fields of medical care and environmental measurement. These chemical analysis systems can be widely applied to the field of food hygiene, environmental monitoring, etc., including the medical field.

[0004] Analyzes in these chemical analysis systems are blood cell components such as erythrocytes, leukocytes, and lymphocytes obtained by separating blood; bacteria such as E. coli and Listeria; DNA (deoxyribonucleic acid) A wide range of biomolecules such as deoxyribose nucleic acid) and tannoproteins. The main applications include, for example, analysis of these DNAs, proteins, cells, etc. (reaction “detection” separation ”transport); chemical synthesis (microplant);

[0005] For this reason, these chemical analysis systems are attracting attention as a means for performing inspections and health management in local clinics and general households that can be performed only by large research institutions such as university hospitals. For this reason, such analysis chips are handled at low cost in addition to high analysis accuracy. Therefore, research is being conducted with the aim of putting it to practical use.

[0006] Until now, methods for manipulating a sample (for example, a sample solution (containing particle solution)) for analysis on a microchip substrate include flow channel processing, pressure control using a micropump, and electrophoresis. Methods using electrical properties such as (electrophoresis) and dielectrophoresis (DEP) have been proposed.

[0007] In particular, the dielectrophoresis phenomenon is a non-uniform alternating electric field that can act on any particle regardless of its own charge as a driving force for transporting, separating, and collecting particles (including biomolecules) in a fluid. Suitable for particle separation 'conveyance. For this reason, since the dielectrophoresis phenomenon is suitable for selecting an object (particulate matter), research on a chemical analysis system using the dielectrophoresis phenomenon is underway (for example, Patent Documents 1 to 5). Non-patent documents 1 to 4).

FIG. 26 is a perspective view showing a schematic configuration of a conventional particle transport device using a dielectrophoresis phenomenon, and FIG. 26 shows a schematic configuration of the particle transport device in which a plurality of non-parallel electrode pairs are arranged. Yes.

[0009] As an application example of the chemical analysis system using the dielectrophoresis phenomenon, for example, in Patent Document 1, as shown in FIG. 26, the lower surface of a channel 101 for flowing a sample liquid such as a blood sample is shown. Discloses a particle conveying device 100 in which a plurality of non-parallel electrode pairs 111 and 112 are arranged. In the particle conveying device 100, particles are conveyed by the dielectrophoretic force generated by the non-uniform electric field obtained by the non-parallel electrode pairs 111 and 112.

[0010] Sarako, As an application example using the above dielectrophoresis phenomenon, for example, a particle control method by dielectrophoresis using a comb electrode as an electrode (electrophoresis electrode array) is known! (For example, see Patent Documents 2 to 4, Non-Patent Documents 1 to 4).

FIG. 27 (a) is a side view showing a schematic configuration of a conventional dielectrophoresis apparatus that separates cells using a comb-shaped electrode, and FIG. 27 (b) is a side view of FIG. 27 (a). It is a top view which shows the structure of the principal part (electrode formation part) in the dielectrophoresis apparatus shown.

[0012] For example, in Non-Patent Document 1, as shown in FIGS. 27 (a) and 27 (b), a comb electrode 202 provided on a glass substrate 201 is subjected to high frequency by an alternating current (AC) signal generator 203. By applying A technique is disclosed in which living cells and dead cells in the electrode chamber 204 (flow channel) are separated using an electrophoretic force generated from a difference in dielectric constant between the cells.

[0013] Further, in Patent Document 2, a comb-shaped electrode is used to concentrate microorganisms (biological particles such as bacteria) in a sample solution by dielectrophoresis in the gap portion of the electrode that is an electric field concentration portion. A technique for measuring the concentration of the microorganism by performing impedance measurement between the two is disclosed.

[0014] FIG. 28 is a diagram for explaining a technique for transporting cells using comb-shaped electrodes.

[0015] In Non-Patent Document 2 and Patent Document 3, as shown in FIG. 28, the particles in the electrophoresis medium are placed above the surface of the electrode 301 depending on the phase condition of the signal applied to the adjacent electrodes 301. It is disclosed that it floats and is transported.

[0016] In this way, an operation technique for separating, floating, and transporting particles by applying a high frequency of an appropriate frequency and voltage to an electrophoretic medium containing particles (including biological substances such as cells). It has been known.

[0017] Dielectrophoresis is a phenomenon in which a force acts on particles due to the interaction between an applied electric field and an electric dipole induced thereby, and more specifically, when a nonuniform AC electric field is applied. This is a phenomenon in which a substance moves under the force (dielectrophoretic force) due to the interaction between the electric field lines generated in the field and the polarization of the substance. The dielectrophoretic force depends on the dielectric constant of the particles and the solvent, the frequency of the applied voltage, and the like. Dielectrophoresis (DEP) is called “positive dielectrophoresis” (hereinafter referred to as “p-DEP”) in which force is applied in the direction of strong electric field depending on the dielectric constant of particles and solvent, and the frequency of applied voltage. “Negative dielectrophoresis” (hereinafter referred to as “n-DEP”), in which force is applied in a weak direction.

[0018] Hereinafter, the principle of dielectrophoresis will be described.

[0019] When an electric field is applied to a particle force system suspended in a solvent, a dipole moment is induced. As described above, when the electric field is, for example, alternating current (AC), the dipole moment is defined as a vector having in-phase and out-of-phase components.

[0020] The time average value of the dielectrophoretic force F (t) acting on the dielectric particles in the non-uniform electric field is expressed by the following formula (1) as described in Non-Patent Document 3, for example.

[0021] [Equation 1]

f CM ⁼ ( ^£ / (ε 'p + 2 ε _m )

ε ε _p — j (σ _ρ / ω) (1)

[0022] In the formula (1), each symbol represents the following components.

F: Time average value of dielectrophoretic force F (t) acting on dielectric particles in non-uniform electric field [Ν] ε:

0 Dielectric constant of vacuum [FZm] r: Particle radius [m] ：: Root mean square of electric field [VZm] E: Each electric field

Component phase [rad] f ： Clasius Mosotti coefficient (frequency dependence of dielectric constant of particles

CM

): Dielectric constant of particle, ε: Dielectric constant of solvent,: Complex dielectric constant of particle [F

P m P

Zm] ε *: Complex permittivity of solvent [FZm] ω: Angular frequency [radZs] σ: Conductivity of particles m p

Rate [Q ^_1 'm ^_1 ] σ: Conductivity of solvent [0 ^_1 ' 111 ^_1 ], Imaginary unit, 1 ^: Real part of complex number, Im: Imaginary part of complex number, ▽: Gradient vector (gradient).

[0023] As shown in Equation (1), the dielectrophoretic force has two components, a stationary DEP (DEP) and a traveling-wave DEP (hereinafter referred to as "TWD").

[0024] DEP is a force (in-phase component of the polarization induced by the electric field; real part of equation (1)) caused by the non-uniform distribution of the electric field. On the other hand, TWD is the force (loss component of polarization induced by the electric field; imaginary part of equation (1)) caused by the non-uniform distribution of the phase of the electric field component. Thus, the dielectrophoretic behavior is induced by the non-uniformity of the electric field magnitude and the non-uniformity of the electric field phase.

[0025] When the electric field phase is constant, that is, when the TWD component is zero, only DEP acts. As a result, equation (1) is simplified as shown in equation (2) below (steady DEP).

[0026] [Equation 2]

Ρ-2 π _{£ o £ m} r ³ Re [f _CM ] VE ² _rms

(2) [0027] where T is the charge relaxation time of Maxwell Wagner,

MW

It is expressed as shown in Equation (3).

[0028] [Equation 3]

(ε _ρ + 2 £ _m ) / (σ _ρ + 2 σ _η )… (3)

[0029] When considering only DEP, ε = ε * ε = ε *, and the relative permittivity of the particles (ε) is larger than the relative permittivity of the solvent (ε) (ε> ε), That is, if Re [f]> 0, invite mpm CM

The electrophoretic force works in the direction of strong electric field strength. In other words, a positive dielectrophoresis (p—DEP) force is applied. As a result, the particles move in the direction in which the electric field gradient is large.

[0030] On the other hand, when the relative dielectric constant (ε) of the particles is smaller than the relative dielectric constant (ε) of the solvent (ε <ε) p m p m

That is, when Re [f] <0, the dielectrophoretic force acts in the direction where the electric field strength is weak. That means

CM

Negative dielectrophoretic (n—DEP) force acts. As a result, the particles move in the direction where the electric field gradient is small.

[0031] As a specific behavior, when a comb electrode is used as the electrode as described above, the relative dielectric constant (ε) larger than the relative dielectric constant m) of the solvent.

Particles with p are trapped on the electrode, more specifically on the extreme side of the electrode. On the other hand, the dielectric constant of the solvent (ε)

Particles having a relative dielectric constant (ε) p smaller than m float above the electrode. If the electric field phase is not constant, both DEP and TWD can act from equation (1).

[0032] Therefore, when separating two types of particles, Re [f]> 0 for one type of particle,

CM

For a single particle, choose a frequency such that Re [f] <0.

CM

[0033] On the other hand, in the case of TWD, as in the case of DEP above, the electric field position m CM when I [f]> 0.

The dielectrophoretic force acts in the direction of the large phase, that is, the electric field movement direction. When I [f] <0 m CM, the dielectrophoretic force is in the direction of the small electric field phase, that is, the direction opposite to the electric field movement direction. Work.

When a comb electrode is used, TWD works in a direction perpendicular to the electrode wiring length direction. Here, the action of TWD varies depending on the height from the electrode plane. In other words, the effect of TWD is more noticeable at a certain distance from the plane than near the electrode plane. Therefore, when transporting the target particles by TWD, the target particles are first levitated only by DEP (DEP mode). After that, the TWD can act efficiently on the target particles by transporting the target particles (TWD mode) by applying the TWD.

Next, the phase condition of the applied voltage in the conventional dielectrophoresis apparatus will be described with reference to FIG. For example, as shown in FIG. 28, non-patent document 2 and patent document 3 describe the phase conditions of signals applied to adjacent electrodes 301 in an electrode array composed of a plurality of electrodes 301. As 0 °, 180 °. , 0. 180. ...,..., Equation (1) becomes only the real part (that is, Equation (2)). As a result, the particles in the electrophoresis medium float by receiving a force (DEP) that floats above the surface of the electrode 301. Therefore, thereafter, in the above electrode example, the phase condition of the signal applied to the adjacent electrodes 301 is 0 as described in Non-Patent Document 2 and Patent Document 3. , 90 °, 180. , 270 °, etc., equation (1) has both real and imaginary parts. As a result, the particles in the electrophoresis medium are transported by receiving a transport force (TWD).

Patent Document 1: Japanese Patent Publication “JP-A-6-174630 (Publication Date: June 24, 1994)”

Patent Document 2: Corresponding to Japanese Patent Gazette “Special Table 2003-504196 (Publication Date: February 4, 2003)” (International Publication No. 01Z005514 Pamphlet (International Publication Date: January 25, 2001) )

Patent Document 3: Japanese Patent Publication “JP 2000-125846 (Publication Date: May 9, 2000)”

Patent Document 4: Corresponds to Japanese Patent Gazette “Special Publication 2003-504629 (Publication Date: February 4, 2003)” (International Publication No. 01Z005512 Pamphlet (International Publication Date: January 25, 2001) )

Patent Document 5: Japanese Patent Publication Gazette “Patent No. 3453136 (Registration Date: July 18, 2003, Publication Date: November 2, 1994)” (corresponding US Pat. No. 5,454,472) Registration date: October 3, 1995))

Patent Document 6: Japanese Published Patent Publication “Japanese Patent Laid-Open No. 2000-298109 (Publication Date: 24th January 2000)”

Non-Special Reference 1: HaiDo Li et al., Dielectrophoretic separation and manipulation of live and heat-treated cells of Listeria on microfabricated devices with interdigitated elec trades ", Sensors and Actuators B 86, p.215-221, 2002.

Non-Patent Document 2: Ronald Pethig et al ", Enhancing Traveling-Wave Dielectrophoresis with Signal Superposition", IEEE Engineering in medicine and biology magazine, p.43-50, Nov./Dec. 2003.

Non-Special Terms 3: Xiao- Bo Wang et al., 'Dielectrophoretic Manipulation of Particles, IE EE Trans. Ind. Applicat., Vol.33, No.3, ρ · 660-669, May./June 1997.

Non-Special Terms 4: R. Krupke et.al., "Separation of metallic from semiconducting single-walled carbon nanotubes" SCIENCE, vol.301, 18 July 2003, p.344-347

Non-Special Reference 5: J. Voldman et al. "Design and analysis of extruded quadrupolar dielec trophoretic t ps〃, Journal of Electrostatics 57 (2003) p.69-90

Disclosure of the invention

[0036] However, a semiconductor chip substrate (dielectrophoresis chip) in a chemical analysis system using a dielectrophoresis phenomenon and a particle transport apparatus (dielectrophoresis apparatus) using the same have been proposed and developed. ) Has the following problems.

In the dielectrophoresis test, conventionally, as shown in FIG. 26 and FIG. 27 (a), (b), etc., one sample (electrophoresis medium) is usually placed on one semiconductor chip substrate (microarray). It is injected into a flow path provided in the semiconductor chip substrate, and an alternating current (AC) voltage is applied to a dielectrophoretic electrode (electrophoretic electrode array) provided in the flow path to manipulate particles in the sample solution. ! / Speak.

For this reason, for example, when comparing the behavior of a plurality of samples under the same dielectrophoresis conditions, the same number of microarrays as the sample solution are required. In this case, it is necessary to input the same drive voltage (AC) to each microarray, and the setting of the experiment environment becomes complicated.

[0039] The present invention has been made in view of the above-described conventional problems, and an object of the present invention is to simultaneously place a plurality of samples under electrophoretic conditions under the same conditions without complicated setting of an experimental environment. Therefore, it is possible to provide a dielectrophoresis chip, a dielectrophoresis apparatus, and a dielectrophoresis system.

[0040] In order to solve the above problems, a dielectrophoresis chip is a dielectric that dielectrophores the dielectric substance by applying an electric field formed by an alternating voltage to a sample containing the dielectric substance. The electrophoresis chip includes a plurality of electrophoresis lanes for dielectrophoretic migration of the dielectric substance on a single substrate, and a plurality of electrode forces intersecting the electrophoresis lane, and an electric field is applied to the sample injected into the electrophoresis lane. In order to apply an AC voltage, an electrode array that dielectrophores the inductive substance by applying an AC voltage is provided, and each electrode in the electrode array is provided across the plurality of electrophoresis lanes. .

[0041] For this reason, an AC voltage (electrophoresis control voltage) that applies a dielectrophoretic force to the dielectric substance can be input to each electrode in each electrophoretic lane. In addition, according to the above configuration, it is possible to place a plurality of different samples under the same conditions under the same conditions without complicated setting of the experimental environment. Therefore, according to the above configuration, there is an effect that it is possible to provide a dielectrophoresis chip adapted to various test conditions with a wide range of application to the test conditions.

The dielectrophoresis apparatus and the dielectrophoresis system include the dielectrophoresis chip.

[0043] Therefore, the dielectrophoresis apparatus and the dielectrophoresis system collectively apply an alternating voltage (electrophoresis control voltage) that applies a dielectrophoretic force to the dielectric substance to each electrode in each electrophoretic lane of the dielectrophoresis chip. Can be entered. Therefore, according to the above configuration, it is possible to place a plurality of different types of samples under the same conditions at the same time under the electrophoresis conditions without complicated setting of the experimental environment, and the application range for the test conditions is widened. It is possible to provide a dielectrophoresis apparatus and a dielectrophoresis system that can be adapted to various test conditions.

Furthermore, according to the above-described configuration, as described above, the type of sample (for example, a medium such as a solvent) can be moved by using a dielectrophoresis chip having a plurality of electrophoresis lanes on one substrate. It is possible to select specific particles simultaneously by changing each lane and selecting specific particles simultaneously, or by using the same medium as the solvent and changing the electrode shape for each lane. Yes, it is possible to efficiently select a plurality of particles. Therefore, according to the above configuration, it is possible to provide a dielectrophoresis system and a dielectrophoresis device and a dielectrophoresis system compatible with a wide range of applications.

Brief Description of Drawings FIG. 1 is a perspective view showing a schematic configuration of a dielectrophoresis panel according to a first exemplary embodiment.

FIG. 2 is a plan view of the dielectrophoresis panel shown in FIG. 1 as viewed from the upper substrate side.

3 is a cross-sectional view taken along the line AA of the dielectrophoresis panel shown in FIG.

4 is a cross-sectional view of the dielectrophoresis panel shown in FIG.

FIG. 5 is a schematic configuration diagram of a dielectrophoresis system including the dielectrophoresis panel shown in FIG.

FIG. 6 is a plan view showing a schematic configuration of a dielectrophoresis panel according to a second exemplary embodiment.

FIG. 7 is a plan view showing a schematic configuration of a dielectrophoresis panel according to a third exemplary embodiment.

[Fig. 8] (a) is a plan view showing a schematic configuration of a dielectrophoresis panel according to a fourth embodiment. (B) to (e) are diagrams in each electrophoresis lane of the dielectrophoresis panel shown in (a). FIG. 5 is a plan view schematically showing the shape of an electrophoresis electrode.

FIG. 9 is a plan view showing a schematic configuration of a dielectrophoresis panel according to a fifth embodiment.

FIG. 10 is a plan view showing a schematic configuration of a dielectrophoresis panel according to a sixth embodiment.

FIG. 11 is an exploded cross-sectional view of the dielectrophoresis panel shown in FIG.

FIG. 12 is a plan view showing a schematic configuration of a dielectrophoresis panel according to a seventh embodiment.

FIG. 13 is a cross-sectional view of the dielectrophoresis panel shown in FIG.

FIG. 14 is a plan view showing a schematic configuration of a dielectrophoresis panel according to an eighth embodiment.

15 is a cross-sectional view of the dielectrophoresis panel shown in FIG.

FIG. 16 is a cross-sectional view of the dielectrophoresis panel shown in FIG.

FIG. 17 is a schematic configuration diagram of a dielectrophoresis system including the dielectrophoresis panel shown in FIG.

FIG. 18 is a cross-sectional view of the principal part schematically showing the state of floating and transporting the target particles in the electrophoresis medium using the dielectrophoresis system shown in FIG. 17 in the cross section of the dielectrophoresis panel shown in FIG. (A) is a cross-sectional view of the main part showing how the target particles are levitated in the DEP mode, and (b) is a cross-sectional view of the main part showing how the levitated target particles are conveyed in the TWD mode. is there.

FIG. 19 is a sectional view showing a schematic configuration of a dielectrophoresis panel according to a ninth embodiment.

FIG. 20 is a sectional view showing a schematic configuration of another dielectrophoresis panel according to the ninth embodiment.

[FIG. 21] Levitating the target particle in the electrophoresis medium using the dielectrophoresis system shown in FIG. FIG. 18 is another cross-sectional view schematically showing the main part of the dielectrophoresis panel shown in FIG. 17, and (a) is a cross-sectional view of the main part showing the state of floating the target particles. (B) And (c) is principal part sectional drawing which shows a mode that the levitated target particle is conveyed.

FIG. 22 is a cross-sectional view of still another main part schematically showing the state of levitation and transport of target particles in the electrophoretic medium using the dielectrophoresis system shown in FIG. 17 in the cross section of the dielectrophoresis panel shown in FIG. (A) is a cross-sectional view of the main part showing how the target particles are levitated, and (b) and (c) are cross-sectional views of the main part showing how the levitated target particles are conveyed. .

FIG. 23 is a plan view showing a schematic configuration of a dielectrophoresis panel according to an eleventh embodiment.

FIG. 24 is a plan view showing a schematic configuration of a dielectrophoresis panel according to a twelfth embodiment.

FIG. 25 (a) is a plan view showing a schematic configuration of the dielectrophoresis panel according to the thirteenth embodiment, and (b) to (e) are diagrams in each electrophoresis lane of the dielectrophoresis panel shown in (a). It is a top view which shows typically the shape of an electrophoresis electrode.

[26] FIG. 26 is a perspective view showing a schematic configuration of a conventional particle transport device using a dielectrophoresis phenomenon.

[FIG. 27] (a) is a side view showing a schematic configuration of a conventional dielectrophoresis apparatus for separating cells using comb-shaped electrodes, and (b) is a schematic diagram of the dielectrophoresis apparatus shown in (a). It is a top view which shows the structure of a part.

[28] FIG. 28 is a diagram for explaining a technique for transporting cells using comb-shaped electrodes.

Explanation of symbols

1 Lower board (board)

2 Upper board (board)

3 Electrophoresis lane

4 electrophoresis lane wall

4a Bulkhead

4b opening

4c Running lane wall extension

5 Injection 'outlet (inlet)

6 Electrophoretic electrode array (electrode array) a Electrophoresis electrode (electrode)

b Mounting and connection

Bottom protective film (Protective film)

Upper surface protective film (Protective film)

Observation area

Dielectrophoresis panel (Dielectrophoresis chip) FPC

Electrophoresis lane wall

Gap

Injection 'outlet (inlet)

1st electrode

a Transparent electrode

b Metal electrode

A Electrophoresis electrode array (first electrode array) Second electrode

a Transparent electrode

b Metal electrode

A Electrophoretic electrode array (second electrode array) Spacing layer (electrophoresis lane wall) a Bulkhead (electrophoresis lane wall)

Mounting and connection

FPC

Control board (control unit)

DC power supply

AC—DC converter

AC—DC converter 70 Dielectrophoresis machine

80 Imaging system

85 Dielectrophoresis system

91 particles

91a particles

91b particles

92 Solvent

PI electrode

P2 electrode

P3 electrode

BEST MODE FOR CARRYING OUT THE INVENTION

[Embodiment 1]

The present embodiment will be described below with reference to FIGS. FIG. 1 is a perspective view showing a schematic configuration of a dielectrophoresis panel according to the present embodiment. FIG. 2 is a plan view of the dielectrophoresis panel shown in FIG. 1 as viewed from the upper substrate side. 3 is a cross-sectional view taken along the line AA of the dielectrophoresis panel shown in FIG. 2, and FIG. 4 is a cross-sectional view taken along the line BB of the dielectrophoresis panel shown in FIG. FIG. 5 is a schematic configuration diagram of a dielectrophoresis system that works on the present embodiment including the dielectrophoresis panel shown in FIG. In FIG. 2, for convenience of illustration, the upper substrate is indicated by a two-dot chain line.

As shown in FIGS. 1 to 4, the dielectrophoresis panel 10 (dielectrophoresis chip, electrophoretic array) according to the present embodiment as a so-called microchip substrate has a lower substrate 1 ( A plurality of migration lanes 3 (flow paths) having migration spaces are provided between the first substrate) and the upper substrate 2 (second substrate).

[0049] The electrophoresis lane 3 has a pattern of the electrophoresis lane wall 4 on one substrate of the pair of substrates, in the present embodiment, the lower substrate 1 and along the formation region of the electrophoresis lane 3. Is formed.

[0050] Further, each electrophoresis lane 3 has an injection hole 5 (opening, injection) for injecting and discharging a sample (swimming medium) containing an observation object (dielectric substance) such as a sample solution. The entrance) is formed ing.

[0051] At least one of the lower substrate 1 and the upper substrate 2 is preferably formed of a transparent substrate (transparent insulator substrate) such as glass, quartz, or plastic. In the present embodiment, as the lower substrate 1 and the upper substrate 2, for example, transparent substrates of about 10 cm × 10 cm are used.

[0052] Among these lower substrate 1 and upper substrate 2, for example, on the surface of lower substrate 1 facing upper substrate 2, a plurality of electrophoresis electrodes 6a (induction electrodes) are provided as migration electrode array 6 (migration electrode wiring). Electrode row (comb-type electrode) force composed of electrodes for electrophoresis) is provided in a direction perpendicular to each electrophoresis lane 3... Across each electrophoresis lane 3.

[0053] The migration electrode 6a is, for example, a metal material such as aluminum (A1), titanium (Ti), molybdenum (Mo), white gold (Pt), gold (Au), or an alloy containing these metals. It is formed by. In the present embodiment, as the migration electrode array 6, for example, migration electrodes 6 a having a film thickness of about 2000 A, an electrode length of about 10 cm, and an electrode width (L: line) of 30 m are arranged with an electrode spacing (S: space). ) Form 1000 pieces so that the force is 30 m (that is, both LZS is 30 μm).

However, the conditions such as the electrode width, the electrode interval, and the electrode length (wiring length) are not particularly limited, and the size and arrangement of particles to be analyzed (that is, particles in the electrophoresis medium) are not particularly limited. In addition, it may be set as appropriate according to the intended operation (separation, collection, transport, etc.). Further, the film thickness and electrode material of the swimming electrode 6a can also be set as appropriate, and are not particularly limited.

The migration electrode array 6 (that is, each migration electrode 6 a) extends over the plurality of migration lanes 3, and acts in common on each migration lane 3. The electrophoresis electrode array 6 has a mounting / connecting portion 6b (input terminal portion) at one end portion of the lower substrate. A flexible printed circuit (hereinafter referred to as “FPC”) 17 is mounted on the mounting / connecting portion 6b, and the control board 50 (control portion; drive) shown in FIG. Connected to the control unit). The control board 50 will be described later.

A lower surface protective film 7 and an upper surface protective film 8 are formed on the opposing surfaces of the lower substrate 1 and the upper substrate 2, respectively. The lower surface protective film 7 and the upper surface protective film 8 constitute the bottom wall and the top wall of the inner wall of the migration lane 3, respectively. Examples of the material for the lower surface protective film 7 and the upper surface protective film 8 include fluorine-based resin; human cell film; organic film such as acrylic resin and polyimide resin; and the like. The materials of the film 7 and the upper surface protective film 8 are not particularly limited as long as they are appropriately set according to the type of particles to be migrated. Further, the film thickness of the lower surface protective film 7 and the upper surface protective film 8 is not particularly limited as long as it can protect (cover) the inner wall of the migration lane 3, particularly the surface of each of the migration electrodes 6 a. It is not something. The artificial cell membrane includes, for example, “Livisure” (registered trademark) manufactured by NOF Corporation, “PCmodifer” (registered trademark) manufactured by fcAI Neochip, and the like. In addition, as the material for the lower surface protective film 7 and the upper surface protective film 8, a material having photosensitivity can also be used. By using a material having photosensitivity as the material for the lower surface protective film 7 and the upper surface protective film 8, for example, a portion where no protective film other than the migration lane 3 is required, for example, a mounting terminal portion (implementation 'connection portion 6b) Can be removed by, for example, photolithography, and the time and labor of subsequent processes can be saved.

In addition, according to the present embodiment, on the lower substrate 1 provided with the lower surface protective film 7, as described above, the respective electrophoresis lanes 3. · There is a migration lane wall 4 separating

[0059] The migration lane wall 4 is a frame provided with a plurality of partition walls 4a that partition the inside into a plurality of lanes as partition walls (partitions). Each partition wall 4a is perpendicular to the electrophoresis electrode array 6 so that the electrophoresis electrode array 6 (each electrophoresis electrode 6a) and the electrophoresis lane 3 intersect (orthogonal in the present embodiment). In parallel!

[0060] The migration lane wall 4 is formed of, for example, a sealing material (adhesive). The sealing material is not particularly limited. For example, a conventionally known resin is used as the sealing material. As such a sealing material, for example, an epoxy resin or an adhesive resin (adhesive) such as an epoxy adhesive made of a resin composition containing epoxy resin as a main component is used. It is preferable that the sealing material includes V or a loose spacer (spacing retaining material) such as a spherical spacer or a fiber-like spacer. By containing a spacer such as a spacer, when the lower substrate 1 and the upper substrate 2 are disposed facing each other and bonded together, the thickness of the electrophoresis lane wall 4, that is, the upper The lane height of electrophoresis lane 3 can be made uniform.

[0061] As the spacer mixed in the sealing material, for example, polytetrafluoroethylene, glass so-called Teflon (registered trademark) spacer, glass spacer or the like is used. Can do.

[0062] In the present embodiment, four rows of electrophoresis lanes 3 having a lane width (interval between partition walls 4a'4a) of about 1 cm and a lane length of about 6 cm are formed in parallel. The width of the electrophoresis lane wall 4 is set to about 2 mm. In addition, a glass spacer with a particle size of 40 μm is mixed in the sealant so that the thickness of electrophoresis lane 3 (height of electrophoresis lane wall 4) is uniform.

[0063] In addition, any one of the lower substrate 1 and the upper substrate 2 has an injection / discharge hole 5 for injecting and discharging the sample to and from each of the electrophoresis lanes 3 described above. Formed every three. In the present embodiment, holes having a hole diameter of about 2 mm are provided at both ends of each electrophoresis lane 3 in the upper substrate 2 as the injection and discharge holes 5.

[0064] In each electrophoresis lane 3, the extending direction (longitudinal direction) of the electrophoresis electrode array 6 and the straight line connecting the two injection / discharge holes 5 in each electrophoresis lane 3 are as vertical as possible. It is hoped that it will be provided!

[0065] Next, a method for manufacturing the dielectrophoresis panel 10 according to the present embodiment will be described below.

In the present embodiment, as described above, for example, 10 cm × 10 cm transparent substrates are used for the lower substrate 1 and the upper substrate 2. First, the electrophoresis electrode array 6 is formed on the lower substrate 1.

In the present embodiment, as described above, a metal material is used, and after forming a metal film on the lower substrate 1 by sputtering or the like, it is patterned into an electrode shape using photolithography. Thus, as described above, for example, the migration electrode array 6 composed of 1000 electrode rows having a film thickness of about 2000 A, LZS of 30 / ζ πι, and an electrode length of about 10 cm is formed. At the same time, a mounting / connecting portion 6b is formed as a mounting terminal at the end of the electrophoresis electrode array 6 as a pattern.

Next, when the lower substrate 1 and the upper substrate 2 are bonded together, the upper substrate 2 Then, the portions overlapping with the electrophoresis lanes 3 are drilled with, for example, a drill, so that injection and discharge holes 5 having a hole diameter of about 2 mm are provided at both ends of each electrophoresis lane 3. As a method for forming the injection / discharge hole 5, other methods such as blasting and etching can be used.

Next, for example, by applying the above-described protective film material on the lower substrate 1 on which the migration electrode array 6 is formed and the upper substrate 2 on which the injection / discharge holes 5 are formed, A lower protective film 7 and an upper protective film 8 are formed respectively.

[0070] Next, an epoxy system in which, for example, a glass spacer having a particle size of 40 μm is mixed as a reactive adhesive (thermosetting adhesive) on the lower substrate 1 on which the lower surface protective film 7 is formed. Apply adhesive (seal). From this, for example, the electrophoresis lane wall 4 having a width of about 2 mm and a height of about 40 m is formed. For the application of the sealing material, for example, a printing method using a screen plate or a drawing method using a dispenser is used.

[0071] According to the present embodiment, as described above, the migration lane wall 4 is formed of the sealing material containing the glass spacer! /, And the force between the migration lanes 3 (lane height) Can be kept uniform. Further, as described above, the migration lane wall 4 having a plurality of partition walls 4a can be easily formed by patterning the sealing material using printing or a drawing method. Thereby, a plurality of electrophoresis lanes 3 can be easily formed.

Thereafter, the lower substrate 1 and the upper substrate 2 are disposed to face each other and are bonded together. As a result, the migration lane 3 surrounded by the migration lane wall 4 that partitions the space between the lower substrate 1 and the upper substrate 2 and the lower substrate 1 and the upper substrate 2 is formed.

Specifically, the lower substrate 1 and the upper substrate 2 are arranged to face each other, and hot pressing is performed from both the upper and lower surfaces. The sealing material on the lower substrate 1 is softened and softened by hot pressing, and then cured and bonded to each other, whereby the migration lane 3 is formed between the two substrates. The gap of the electrophoresis lane 3 is maintained by the spacer included in the sealing material constituting the electrophoresis lane wall 4. In the present embodiment, as described above, four rows of electrophoresis lanes 3 having a lane width (interval between partition walls 4a'4a) of about 1 cm, a lane length of about 6 cm, and a thickness of about 40 m are formed in parallel. Through the above steps, the dielectrophoresis panel 10 which is useful for the present embodiment is formed. As shown in FIG. 5, the dielectrophoresis panel 10 is connected to the control board 50 via the FPC 17 mounted on the mounting / connecting portion 6b formed on the end of the electrophoresis electrode array 6. And A dielectrophoresis apparatus 70 according to the present embodiment includes the dielectrophoresis panel 10, a control board 50, and a DC power source 60 (power source). In addition, the dielectrophoresis system 85 that works in the present embodiment includes the dielectrophoresis apparatus 70 and the imaging system 80.

The control board 50 includes a frequency / timer control unit 50a, a synchronization signal control unit 50b, an oscillation circuit unit 50c, and a phase selection / amplification unit 50d.

In the dielectrophoresis apparatus 70, the voltage (DC (direct current) voltage) output from the DC power source 60 is input to the control board 50 and drives the control board 50.

[0077] In the control board 50, an AC voltage is output from the oscillation circuit unit 50c. The output AC voltage is adjusted to the intended AC output by controlling the frequency, phase, amplitude, etc. by the frequency / timer control unit 50a, synchronization signal control unit 50b, and phase selection / amplification unit 50d. It is applied (input) to the dielectrophoresis panel 10 via the FPC 17.

In addition, the imaging system 80 includes a light source such as a laser for applying irradiation light to the observation region (measurement unit) in the migration lane 3 of the dielectrophoresis panel 10, an optical microscope, a CCD (charge coupled device; charge coupled device) is an optical system equipped with an imaging device such as a camera, and is installed in the upper or lower portion of the electrophoresis lane 3 for optical detection.

[0079] The sample used in the present embodiment may be a sample containing an inductive substance that can induce dielectrophoretic force. More specifically, a medium made of a dielectric substance is in the medium. As long as the sample is dispersed in the sample, there is no particular limitation.

[0080] In addition, the "electrophoresis medium" used as the sample (sample solution) in the present embodiment is a dispersion in which "particles" (electrophoretic particles) to be electrophoresed are dispersed in a "solvent". An electrophoresis medium in which particles to be migrated are dispersed in a solvent is used as the sample.

[0081] Specific examples of the particles include dielectric particles, that is, biological cells, bacteria, viruses, parasitic microorganisms, DNA, proteins, nanopolymers, botanical particles (pollen, etc.), non-biology Particle and the like.

[0082] The particles include other particles that can be suspended in a liquid and can induce dielectrophoretic force. [0083] Further, the particles (dielectric particles) may be a compound or gas dissolved or suspended in a liquid (so-called dielectric gas). For example, Non-Patent Document 4 discloses that carbon nanotubes are sorted (separation between metal and semiconductor) by dielectrophoresis. In Non-Patent Document 4 above, carbon nanotube suspensions are prepared by dispersing carbon nanotubes that are hydrophilic and not dispersed in water using supercritical water, so that semiconductors can migrate and metals cannot migrate. The carbon nanotubes are sorted using

In dielectrophoresis, the difference in the dielectrophoretic rate between the medium is a parameter of the driving force. For this reason, it is also possible to convey a fine valve of gas such as air or nitrogen by using an appropriate viscous medium. Also, an anaerobic substance can be carried in a gas valve such as nitrogen. That is, even an anaerobic substance can be dispersed in a solvent by being enclosed in a gas valve as described above, and can be used as particles that are useful in this embodiment.

[0085] As the solvent, for example, water, physiological saline, ethanol, methanol, butanol, oil or the like can be used as appropriate. In order to adjust the relative dielectric constant of the solvent, a mixed solvent in which a plurality of solvents are mixed (for example, a mixed solution of water and ethanol) can be used. Furthermore, in order to adjust the viscous resistance of the solvent, cellulose, polyvinyl alcohol or the like can be added as a regulator.

[0086] Depending on the type of particles in the electrophoresis medium, such as when using E. coli as the particles, nonspecific adsorption to the inner wall of the electrophoresis lane 3 is prevented immediately before the experiment (measurement). Therefore, it is desirable to perform surface treatment of the inner wall of electrophoresis lane 3 (addition of surfactant or artificial cell membrane).

[0087] Hereinafter, an example of a method of using the dielectrophoresis system 85 in the present embodiment will be specifically described. However, the present embodiment is not limited to this. Also, in the following explanation, the power of explaining the separation and comparison of E. coli live cells and dead cells as an example. This is also merely an example. However, it is not limited.

[0088] Generally, it is known that the frequency characteristics of dielectric constant are different between live cells and dead cells. The Thereby, it is possible to separate live and dead cells by the dielectrophoresis phenomenon.

[0089] In this example, a case where the difference between E. coli cultured in three different environments is quantitatively observed will be described as an example. For observation, a dielectrophoresis system 85 provided with the dielectrophoresis panel 10 provided with four electrophoresis lanes 3 in parallel is used.

[0090] In order to prevent non-specific adsorption of Escherichia coli to the inner wall of electrophoresis lane 3, it is desirable to perform surface treatment (providing a surfactant or an artificial cell membrane) on the inner wall of each electrophoresis lane 3 in advance.

[0091] In one of the four lanes 3, one lane 3 contains a diluted aqueous solution (saline) of a specific concentration of specific E. coli (before culture) as a comparative sample. Inject from the discharge hole 5. In the remaining three electrophoresis lanes 3, each E. coli cultured in three different environments was diluted with an aqueous solution diluted to the same concentration as the comparative sample from one injection 'discharge hole 5 in each electrophoresis lane 3. inject.

[0092] First, live cells and dead cells are separated by stationary DEP (DEP). Specifically, for example, an AC voltage is applied alternately between adjacent migration electrodes 6a at an applied voltage of 8 V, a frequency of 10 MHz, and an adjacent phase difference π. As a result, live cells are trapped at the end of the migration electrode 6a, and dead cells rise near the center of the migration electrode 6a.

[0093] The living cells trapped at the end of the electrophoresis electrode 6a are observed by the imaging system 80.

By comparing the living cells trapped at the end of the electrophoresis electrode 6a with a comparative sample, the difference due to each culture environment is confirmed. For example, the number of cells in a certain area is counted by epi-illumination observation. This enables a quantitative comparison.

Next, only dead cells are moved by traveling wave DEP (TWD). Specifically, for example, an AC voltage is applied to the adjacent migration electrode 6a with an applied voltage of 8 V, a frequency of 10 MHz, and an adjacent phase difference π 2. Thereby, the difference of the dead cell generation | occurrence | production by each culture environment is confirmed. For example, the number of dead cells that pass through a certain region in a certain time is increased by observation with an optical microscope, for example. This enables a quantitative comparison.

[0095] According to the present embodiment, as described above, a plurality of electrophoresis lanes 3 are provided in parallel, and furthermore, the electrophoresis electrodes 6a (electrophoresis electrode array 6) acting in common on each electrophoresis lane 3 are provided. In other words, the electrophoresis electrode 6a (the electrophoresis electrode array 6) is provided in common in each electrophoresis lane 3. The migration control voltage can be input to the migration electrode array 6 at once. As described above, according to the present embodiment, when one type of signal is input to the comb-shaped electrode (electrophoresis electrode array 6) having the electrophoresis electrodes 6a common to the electrophoresis lanes 3 provided in parallel to each other, a plurality of signals are input. An electric field can be applied to electrophoresis lane 3 of Therefore, according to the present embodiment, migration control of a plurality of samples (electrophoresis media) can be performed simultaneously in a lump. Therefore, according to the present embodiment, a plurality of different samples (for example, samples having different relative dielectric constants and viscosities of solvents, or physical property values of particles in the solvent (without the complicated setting of the experimental environment) It is possible to place samples with different dielectric constants etc.) under the same migration conditions under the same conditions, and dielectrophoresis chips and dielectrophoresis adapted to various test conditions with a wide range of application to the test conditions. It is possible to realize a device and even a dielectrophoresis system

[0096] Also, according to the present embodiment, by using the dielectrophoresis panel 10 (dielectrophoresis chip) having the plurality of electrophoresis lanes 3 in this way, the type of the solvent (electrophoresis medium) can be changed. It is possible to select specific particles at the same time by changing each electrode and changing the electrode shape for each lane 3 with the same solvent (electrophoresis medium). Yes, it is possible to efficiently select a plurality of particles. Therefore, according to this embodiment, it is possible to realize a dielectrophoresis chip, a dielectrophoresis apparatus, and a dielectrophoresis system compatible with a wide range of applications.

In the present embodiment, the migration lane wall 4 is formed on the lower substrate 1 on which the lower surface protective film 7 is formed, that is, on the lower surface protective film 7. The form of the electrophoretic lane wall 4 in the lower surface protective film 7 and the upper surface protective film 8 when the lower surface protective film 7 and the upper surface protective film 8 are formed, that is, the above-described form is not limited thereto. Part or all of the overlapping region with the electrophoresis lane wall 4 (seal material) may be removed. With such a structure, even when the adhesion between the lower surface protective film 7 and the upper surface protective film 8 and the sealing material is poor, sufficient adhesion can be obtained.

[0098] Further, in the dielectrophoresis panel 10 according to the present embodiment, the lower surface protective film 7 and the upper surface protective film 8 are formed on the opposing surfaces of the lower substrate 1 and the upper substrate 2, respectively. The configuration is described as an example. However, this embodiment is limited to this. However, the lower surface protective film 7 and the upper surface protective film 8 are not necessarily formed on the lower substrate 1 and the upper substrate 2. However, on the opposing surfaces of the lower substrate 1 and the upper substrate 2, particularly on the migration electrodes 6a in the migration lane 3, the protective films (the lower surface protection film 7 and the upper surface protection film) that cover the migration electrodes 6a. By providing 8), it is possible to prevent the migrating particles from adsorbing to the migration electrode 6a. Therefore, depending on the kind of the particles, it is desirable that the lower protective film 7 and the upper protective film 8 are formed on the lower substrate 1 and the upper substrate 2.

Further, in the present embodiment, the case where the migration lane wall 4 is formed on the lower substrate 1 has been described as an example. However, the migration lane wall 4 is not necessarily provided on the lower substrate 1. It may be formed on the upper substrate 2 which need not be formed on the upper substrate 2.

[0100] In the present embodiment, the lower substrate 1 and the upper substrate 2 are, for example, 10 cm.

Although a case where a transparent substrate of about 10 cm is used has been described as an example, this embodiment is not limited to this, as long as one of the substrates is provided so as to be observable. Good. Specifically, for example, only the upper substrate 2 that is the substrate opposite to the substrate on the migration electrode formation side may be formed of a transparent substrate.

[0101] Further, the lower substrate 1 and the upper substrate 2 do not necessarily have to be formed of a transparent substrate on one of the substrates. Specifically, the lower substrate 1 and the upper substrate 2 are regions where the particles undergo a dielectrophoretic force. 3 and the electrophoresis electrode 6a (the electrophoresis electrode array 6) are used as an observation area, and the sample (electrophoresis medium) in the electrophoresis lane 3 may be provided to be observable in the observation area. For example, the region where the particles are subjected to the dielectrophoretic force on the substrate opposite to the substrate on which the migration electrode is formed (in this embodiment, the upper substrate 2), specifically, the migration lane 3 and the migration electrode 6a ( An observation window (opening or transparent area) is provided in the area (observation area) where the electrophoresis electrode array 6) overlaps, and the sample (electrophoresis medium) in the electrophoresis lane 3 is observed in this area. If possible, both substrates may be formed of a non-transparent substrate (semi-transparent or opaque substrate).

[0102] The substrate sizes of the lower substrate 1 and the upper substrate 2 are not particularly limited as long as they are set appropriately. Furthermore, the specific size made in the present embodiment is also only an example of the embodiment, and various changes can be made according to the analysis target. That is, the above Substrate size, electrode size (electrode width, electrode spacing, electrode thickness, electrode length, etc.) of lower substrate 1 and upper substrate 2, film thickness of lower surface protective film 7 and upper surface protective film 8, layer thickness of migration lane wall 4 ( Conditions such as height), lane width, and lane length are not particularly limited, and various changes can be made according to the analysis target.

[0103] In the present embodiment, the case where the electrophoresis lanes 3 are formed in four rows in parallel has been described as an example. However, the number of lanes in the electrophoresis lane 3 is appropriately set according to the number of measurement samples and the like. There is no particular limitation.

Further, in the present embodiment, the case where the migration electrode 6a (migration electrode array 6) force is provided in the vertical direction with respect to each migration lane 3 is described as an example. However, the present embodiment is not limited to this. The same electrophoresis electrode 6a (electrophoresis electrode array 6) force is extended over a plurality of electrophoresis lanes 3. However, it is not always necessary that the migration electrode 6a extends in a direction perpendicular to the migration lanes 3 as long as they act in common. However, from the viewpoint of ease of comparative observation of particles, it is preferable that the observation regions in each swimming lane 3 are provided adjacent to each other. For this reason, it is preferable that the electrophoresis electrode 6a is provided in a direction perpendicular to the electrophoresis lanes 3.

[0105] In the present embodiment, the dielectrophoresis panel 10 in which the electrophoresis lane 3 is provided between the lower substrate 1 and the upper substrate 2 is taken as an example of the dielectrophoresis chip that works with the present embodiment. Although the present embodiment is not limited to this, force depending on the type of the sample (sample solution), for example, the upper surface of the electrophoresis lane 3 is not covered with the upper substrate 2 You may have. That is, the electrophoresis lane 3 is not necessarily formed between a pair of substrates, for example, an electrophoresis tank (that is, the lower substrate 1 and the lower substrate 1 provided on the lower substrate 1 (surface of the lower substrate 1)). The migration cell formed on the lower substrate 1 (that is, the lower substrate 1 and the upper side) may be an electrophoresis tank composed of the migration lane wall 4 formed on the lower substrate 1. It may be a closed space formed by the substrate 2 and the electrophoresis lane wall 4.

[0106] The dielectrophoresis chip, dielectrophoresis apparatus, and dielectrophoresis system according to the present embodiment are used for bio research microarrays such as separation and detection of specific cells, for example, It can be suitably used in a chemical analysis system that conveys a dielectric substance such as biomolecules and resin beads by dielectrophoretic force. These chemical analysis systems can be widely applied to the medical field, food sanitation field, environmental monitoring, etc., and blood cell components such as red blood cells, white blood cells, and lymphocytes obtained by separating blood; Escherichia coli, Listeria It targets a wide range of dielectric materials such as DNA (deoxyribonucleic acid; deoxyribose nucleic acid), biomolecules such as proteins, and analyzes, for example, DNA, proteins, cells, etc. (reactions) It can be suitably used for applications such as 'detection'separation'conveyance); chemical synthesis (microplant);

[Embodiment 2]

This embodiment will be described mainly based on FIG. In the present embodiment, differences from the first embodiment will be mainly described, and components having the same functions as those used in the first embodiment will be denoted by the same reference numerals. The explanation is omitted.

FIG. 6 is a plan view showing a schematic configuration of a dielectrophoresis panel according to the present embodiment.

Also in FIG. 6, for convenience of illustration, the upper substrate is indicated by a two-dot chain line.

As shown in FIGS. 1 to 5, in the first embodiment, whether or not the electrode width and the electrode interval of each of the moving electrodes 6a in the electrophoresis electrode array 6 are overlapping portions with the electrophoresis lane 3 or not. Regardless of this, the case where it is constant (LZS is 30 / zm for both) has been described as an example. That is, in the first embodiment, the migration electrode array 6 has a stripe structure in which the migration electrodes 6a constituting the migration electrode array 6 are provided in parallel with each other in a stripe shape. In this case, the case is described as an example.

However, in the present embodiment, as shown in FIG. 6, the electrode width and the electrode interval of the migration electrode 6a are overlapped with the migration lane 3 in the migration electrode 6a (migration electrode array 6). The area is different from the other areas. Therefore, in the present embodiment, the electrode shape of the migration electrode 6a is different between the region where the migration electrode 6a (the migration electrode array 6) overlaps the migration lane 3 and the other regions.

[0111] In the dielectrophoresis experiment, when the narrow pitch electrophoretic electrode array 6 is formed, the wiring resistance of the entire electrophoretic electrode array 6 is increased, and each electrophoretic electrode 6a constituting the electrophoretic electrode array 6 is formed. The parasitic capacitance between them also increases. For this reason, it is inevitable that the influence of the attenuation and delay of the input AC voltage will increase if the narrow pitch electrophoresis electrode array 6 is formed!

Therefore, in the present embodiment, as shown in FIG. 6, a plurality of frame-shaped electrophoresis lanes provided independently of each other as electrophoresis lane walls between the lower substrate 1 and the upper substrate 2. By providing the walls 21 at a distance from each other, a plurality of electrophoresis lanes 3 that are spaced apart from each other and provided in parallel are provided, and the inside of the electrophoresis lane 3 (within the frame) and the area between the electrophoresis lanes ( The migration electrode array 6 is provided so that the electrode width and the electrode spacing of the migration electrode 6a are different between the gap 22), that is, outside the migration lane 3 (outside the frame).

[0113] Specifically, the migration electrode 6a in the migration lane 3, that is, the migration electrode in the region (observation region 9) used as the observation region where the migration electrode array 6 overlaps the migration lane 3 6a is formed with, for example, an electrode width (L) of 10 μm and an electrode interval (S) of 10 (electrode pitch of 20 μm), while other regions, that is, regions not related to electrophoresis (that is, Electrophoresis electrode 6a in the outer lane 3) has an electrode width of 30 m (L) and a maximum electrode interval of 30 m (that is, an electrode interval of 30 / ζ πι at the center between adjacent lanes 3 and 3; the center The electrode pitch at the part is 60 μm).

[0114] Thus, in this embodiment, the narrow pitch required only for the swimming electrode 6a group (that is, the electrophoresis electrode 6a group in the observation region 9) in the electrophoresis lane 3 necessary for observation of the electrophoresis phenomenon. Wiring is used, and the other area of the migration electrode 6a group (the migration electrode 6a group with a gap of 22mm) that is unrelated to the migration phenomenon is wide-pitch wiring. As a result, the resistance of the entire migration electrode array 6 can be reduced, the parasitic capacitance can be reduced, and the attenuation and delay of the input AC voltage can be suppressed. The wiring shape described above is only an example, and the present invention is not limited to this.

[Embodiment 3]

This embodiment will be described mainly based on FIG. In the present embodiment, the differences from the first and second embodiments will be mainly described, and the components having the same functions as the components used in the first and second embodiments are described. The same number is assigned and its description is omitted.

[0116] FIG. 7 is a plan view showing a schematic configuration of a migration panel that works according to the present embodiment. In addition Also in FIG. 7, for convenience of illustration, the upper substrate is indicated by a two-dot chain line.

[0117] In the dielectrophoresis panel 10 shown in Fig. 7, the electrode width and electrode interval (electrode pitch) of the electrophoresis electrode 6a are different in each of the three electrophoresis lanes 3 provided in parallel and spaced apart from each other! This is different from the dielectrophoresis panel 10 shown in FIG. In the dielectrophoresis panel 10 shown in FIG. 7, the electrode width and the electrode interval of the electrophoresis electrodes 6a are so large that the migration lane 3 on the side is far from the mounting connection 6b provided at the end of the lower substrate 1. The electrophoresis electrode array 6 is provided.

[0118] More specifically, the electrophoresis electrode array 6 shown in FIG. 7 has, for example, an electrode width of 10 m, in order from the electrophoresis lane 3 on the mounting / connecting portion 6b side in a region overlapping with each electrophoresis lane 3. Electrode part PI consisting of electrophoretic electrode 6a group with electrode spacing 10 m (electrode pitch 20 μm) and electrode part consisting of electrophoretic electrode 6a group with electrode width 20 μm and electrode spacing 20 m (electrode pitch 40 μm) Electrophoresis electrode P3 and electrode part P3 consisting of group 6a with electrode width 30 μm and electrode spacing 30 m (electrode pitch 60 μm) A total of three different types of strip-shaped electrode parts P1, P2, P3 It has a configuration equipped.

[0119] The migration electrode 6a between the electrode parts P1 and Ρ2 has, for example, an electrode width of 30 μm, an electrode interval of 10 μm at the electrode part P1 side end (electrode pitch 20 μm), and the electrode parts The electrode interval is 20 μm (electrode pitch 40 μm) at the P2 side end, and the electrode interval is determined by the array width of the migration electrode array 6 (both ends on both sides of the migration electrode array 6). The electrode is formed so as to change linearly according to the electrode width between the electrodes 6a and 6a. Further, the migration electrode 6a between the electrode parts Ρ2 and Ρ3 has an electrode width of 30 / ζ πι, an electrode interval of 20 μm (electrode pitch 40 μm) at the end of the electrode part Ρ2, and an end of the electrode part P3 side. The electrode spacing is 30 m (electrode pitch 60 m), and the electrode spacing is determined by the array width of the migration electrode array 6 (the swimming electrodes 6a at both ends of the migration electrode array 6). · It is formed to change linearly according to the electrode width between 6a!

[0120] According to the present embodiment, as described above, by changing the electrode shape (or electrode width, electrode interval) of the migration electrode array 6 for each migration lane 3, a plurality of specific particles are simultaneously introduced. Sorting can be identified, and multiple particles can be sorted efficiently. In addition, when it is possible to observe the difference in migration behavior of multiple lanes 3 at once, There are also benefits.

[Embodiment 4]

The present embodiment will be described mainly based on FIGS. 8 (a) to (e). In this embodiment, differences from Embodiments 1 to 3 are mainly described, and components having the same functions as those used in Embodiments 1 to 3 are described. Are given the same number and their explanation is omitted.

[0122] Fig. 8 (a) is a plan view showing a schematic configuration of the dielectrophoresis panel 10 that works according to the present embodiment, and Figs. 8 (b) to 8 (e) show the dielectric shown in Fig. 8 (a). 4 is a plan view schematically showing the shape of the electrophoresis electrode 6a in each electrophoresis lane 3 of the electrophoresis panel 10. FIG. In FIG. 8 (a), the upper substrate is indicated by a two-dot chain line for convenience of illustration.

[0123] As shown in Fig. 8 (a), the dielectrophoresis panel 10 according to the present embodiment is the same as the dielectrophoresis panel 10 according to the first embodiment. However, the shape of the electrophoresis electrode 6a (the electrophoresis electrode array 6) is different! /.

[0124] Specifically, among the four electrophoresis lanes 3 described above, in the electrophoresis lane 3A that is closest to the mounting portion 6b, the electrophoresis electrode array 6 has a wiring width as shown in Fig. 8 (b). It has a structure (stripe-type electrode structure) in which linear migration electrodes 6a of 30 / zm are provided in a stripe shape. Next, in the electrophoresis lane 3B close to the mounting / connecting portion 6b, the electrophoresis electrode array 6 has a structure in which linear migration electrodes 6a having a wiring width of 45 m are provided in a stripe shape as shown in FIG. Stripe-type electrode structure). Then, in the electrophoresis lane 3C next to the mounting lane 3B next to the mounting lane 3B, as shown in FIG. 8 (d), the electrophoresis electrode array 6 is a chopped type (saw saw) with a wiring width of 30 m. A plurality of electrophoretic electrodes 6a arranged in parallel at equal intervals. Finally, among the four migration lanes 3 described above, the mounting connection 6 b force is farthest in the far lane 3D, as shown in FIG. 8 (e), the migration electrode array 6 has a waveform with a wiring width of 30 m. The plurality of migration electrodes 6a are arranged in parallel at equal intervals. The electrode spacing (electrode pitch) of each of the migration electrodes 6a is 60 μm.

[0125] The dielectrophoresis behavior depends on the wiring, that is, the shape of the migration electrode 6a (migration electrode array 6), even when the same sample (migration medium) is used and driven with the same control voltage. Depending on the state of the electric field in the medium). Therefore, by changing at least one of the electrode shape, electrode width, and electrode interval of the electrophoresis electrode 6a (electrophoresis electrode array 6) for each electrophoresis lane 3 as in the present embodiment, It becomes possible to simultaneously sort and identify a plurality of specific particles. As a result, for example, a plurality of particles can be efficiently selected. In addition, according to the above configuration, there is a merit that the difference in the migration behavior of the particles in the plurality of migration lanes 3 can be collectively observed.

[0127] In the present embodiment, as described above, as the dielectrophoresis panel 10 that works in the present embodiment, among the shape, electrode width, and electrode interval of the migration electrode 6a (migration electrode array 6), In both cases, a dielectrophoresis panel in which one condition is different for each lane 3 has been described as an example. However, the present embodiment is not limited to this.

For example, as shown in FIG. 6 or FIG. 7, the dielectrophoresis panel 10 according to the present embodiment has a predetermined gap 22 (region between lanes) between the lanes 3 and 3 adjacent to each other. The gap portion 22 and the migration lane 3 have a configuration in which at least one of the shape, electrode width, and electrode spacing of the migration electrode 6a (migration electrode array 6) is different. May be.

[0129] For example, if the electrode shape of the migration electrode array 6 in the migration lanes 3A.3B.3C is not a stripe shape! /, If the electrode shape of the migration electrode array 6 in the gap 22 is a strip structure, By shortening the wiring length, it is possible to suppress an increase in wiring resistance.

In addition, as shown in FIG. 6, when the electrode shape of the migration electrode array 6 is made different between the migration lane 3 and the gap 22 by changing the wiring width and the wiring interval of the migration electrode 6a, etc. The low resistance of the migration electrode array 6 (wiring) in the dielectrophoresis panel 10 can be achieved.

[Embodiment 5]

This embodiment will be described mainly based on FIG. In the present embodiment, the differences from the first to fourth embodiments will be mainly described, and the components having the same functions as the components used in the first to fourth embodiments will be described. The same number is assigned and its description is omitted. FIG. 9 is a plan view showing a schematic configuration of the dielectrophoresis panel 10 according to the present embodiment. In FIG. 9 as well, for convenience of illustration, the upper substrate is indicated by a two-dot chain line.

As shown in FIG. 9, the dielectrophoresis panel 10 according to the present embodiment has mounting 'connection portions 6b at both ends of the electrophoresis electrode array 6, and these mounting'connection portions 6b' 6b Each has a configuration in which FPC17 is mounted. As a result, in the dielectrophoresis panel 10 according to the present exemplary embodiment, it is possible to input drive AC voltages from both ends of the electrophoretic electrode array 6.

The FPCs 17 are each connected to the control board 50 (drive control unit, control device). As a result, the dielectrophoresis panel 10 according to the present embodiment has the same drive AC voltage from the FPC 17 at both ends of the electrophoretic electrode array 6 to each electrophoretic electrode 6a during the dielectrophoresis test. Input at the same time.

As described above, according to the present embodiment, the driving voltage is input from both ends of the migration electrode 6a, so that compared with the case where the driving voltage is also input only to one side force of the migration electrode 6a, It is possible to further suppress the effects of input voltage signal attenuation and delay due to wiring resistance and parasitic capacitance.

[Embodiment 6]

The present embodiment will be described mainly based on FIG. 10 and FIG. In the present embodiment, differences from Embodiments 1 to 5 will be mainly described, and components having the same functions as those used in Embodiments 1 to 5 are described. Are given the same number and their explanation is omitted.

In the present embodiment, a method of injecting a sample solution (electrophoresis medium) as a sample into each electrophoresis lane 3 in the dielectrophoresis panel 10 will be mainly described.

Conventionally, as a method for injecting a sample into a dielectrophoresis panel, as shown in the first embodiment, either the upper substrate 2 or the lower substrate 1 is injected into the discharge hole 5 (opening portion). In general, the sample is injected from the injection / discharge hole 5 by pressurization such as a pump.

[0139] For example, Patent Document 6 describes a microchip that is not a system for dielectrophoresis but has an inlet formed above the microphone channel of the channel chip. . When this structure is applied to the dielectrophoresis panel 10, as shown in the first embodiment, the upper substrate is formed in the previous stage in which the lower substrate 1 and the upper substrate 2 are bonded to form the dielectrophoresis panel 10. It is necessary to provide an injection / discharge hole 5 as an injection port in a portion that becomes the top wall or the bottom wall of each electrophoresis lane 3 in either one of 2 and the lower substrate 1. As a method for forming the injection / discharge hole 5, as shown in the first embodiment, there are methods such as drilling, blasting and etching.

By the way, as shown in the first embodiment, generally, protective layers are formed on the upper and lower substrates on the inner surface of the dielectrophoresis panel. In the first embodiment, the lower substrate 1 and the upper substrate 2 are provided with a protective film (protective layer) that covers, for example, the migration electrode array 6, like the lower protective film 7 and the upper protective film 8. Further, the lower substrate 1 and the upper substrate 2 are subjected to a surface treatment such as hydrophilicity / water repellent treatment according to the sample to be injected into the electrophoresis lane 3.

[0141] However, after forming the protective film on the substrate in this manner and then forming the injection port in the substrate, the surface treatment material and the dust of the substrate accompanying the opening treatment are applied to the surface treatment portion of the substrate. There is concern about adhesion. Dust adhering to the surface treatment part is difficult to remove even if it is washed. When a dielectrophoresis panel is formed, it becomes a cause of product failure as an impurity.

[0142] In addition, when the surface treatment of the substrate is performed after the injection port is manufactured, the surface treatment agent may enter the injection port and contaminate the opening. If the surface treatment agent solidifies in the opening, it will cause an error in the opening diameter, and will cause problems such as poor connection and generation of dust when a connector is inserted.

[0143] Further, as described above, when the dielectrophoresis panel 10 has a plurality of electrophoresis lanes 3, in the conventional method of forming the inlets on the substrate, a plurality of inlets are provided according to the number of electrophoresis lanes. Therefore, the manufacturing process becomes complicated and the probability of occurrence of defects increases.

Therefore, in the present embodiment, the side surface of the dielectrophoresis panel 10 where the sample injection / discharge hole 5 (opening) is not the surface of either the lower substrate 1 or the upper substrate 2 ( It is provided in the cross section of the panel structure.

FIG. 10 is a plan view showing a schematic configuration of the dielectrophoresis panel 10 according to the present embodiment. FIG. 11 is an exploded sectional view taken along line E-E of the dielectrophoresis panel 10 shown in FIG. In FIG. 10, for convenience of illustration, the upper substrate is indicated by a two-dot chain line.

As shown in FIG. 10, the dielectrophoresis panel 10 according to the present embodiment replaces the injection 'discharge hole 5 according to the first embodiment as an opening for injection / discharge of the sample. A configuration in which an injection / discharge port 31 formed by the migration lane wall 4 is provided between the lower substrate 1 and the upper substrate 2, that is, specifically, on the side surface of the dielectrophoresis panel 10. Have! / In the present embodiment, the injection and discharge ports 31 are provided at both ends of the electrophoresis lane 3.

[0147] The inlet / outlet hole 5 has a diameter of about 2 mm and a height of about 40 m (equal to the gap of the panel cavity). Also in this embodiment, as in the first embodiment, the lane width (interval between partition walls 4a'4a) of each swimming lane 3 is about 1 cm and the lane length is about 6 cm. The width of 4 is set to about 2mm. In addition, a glass spacer having a particle diameter of 40 m is mixed in the sealing material used for forming the migration lane wall 4 so that the thickness of the migration lane 3 (height of the migration lane wall 4) is uniform. . Note that structures other than those described above are formed in the same manner as in the first embodiment.

That is, in the present embodiment, the migration lane wall 4 is opened in each migration lane 3 by a partial force of a frame body (outer edge) connecting the partition walls 4a'4a separating the migration lanes 3 ... In addition to the opening 4b as an injection and discharge port 31 extending from the opening 4b to the end of the dielectrophoresis panel 10 along the extending direction of the swimming lane 3. It has a configuration in which a flow path (passage) composed of the electrophoresis lane wall extension 4c (migration lane wall 4) is provided.

Also in this embodiment, a transparent substrate of about 10 cm × 10 cm is used for the lower substrate 1 and the upper substrate 2. Therefore, the length of the inlet / outlet 31 (the length of the flow path (extended portion)) is about 2 cm.

Further, as shown in FIG. 11, the inner end la ′ 2a of the injection / exhaust port 31 in the lower substrate 1 and the upper substrate 2, that is, the upper substrate 2 in the lower substrate 1 Each end side of the injection / discharge port 31 forming portion on the opposing surface and the upper substrate 2 facing the lower substrate 1 is subjected to chamfering processing with chamfered corners. Is desirable.

[0151] In the present embodiment, a liquid feeding tube 13 having an outer diameter larger than the diameter of the injection 'discharge port 31 is connected (pressed contact) to the injection' discharge port 31 to thereby inject the sample. Discharge is possible.

[0152] Therefore, as described above, the inner end la '2a of the injection' discharge port 31 is chamfered, so that when the injection 'discharge port 31 and the liquid feeding tube 13 are connected, both of them are connected. The contact area is increased and the adhesion between the two is improved.

[0153] As described above, the liquid feeding tube 13 is made of a deformable material (for example, a flexible material) such as silicone resin from the viewpoint of the adhesion between the injection / discharge port 31 and the liquid feeding tube 13. It is desirable that the material is preferably made of an elastic material. In the present embodiment, as the liquid feeding tube 13, for example, a force that uses a tube made of silicone resin having an outer diameter of about 3 mm and an inner diameter of about 1 mm is not limited to this. Absent.

In addition, as shown in FIG. 11, in the dielectrophoresis panel 10, the lower surface protective film 7 and the upper surface protective film 8 are end portions of the injection / discharge ports 31 (that is, the chamfering process is performed). In addition, the lower substrate 1 and the upper substrate 2 are formed on the inner side of the inner end portion la ′ 2a), that is, the lower end protective film 7 and the upper surface are formed at the end portion of the injection / discharge port 31. It is desirable that the protective film 8 be formed.

[0155] As described above, by adopting a structure in which the lower surface protective film 7 and the upper surface protective film 8 are not formed at the end portion of the injection and discharge port 31, the diameter of the injection and discharge port 31 is increased. Adhesion between the inlet and outlet 31 and the liquid feeding tube 13 is further improved. Further, according to the above configuration, there is an effect of preventing the lower surface protective film 7 and the upper surface protective film 8 from becoming unnecessary dust and remaining in the electrophoresis lane 3 during the chamfering process.

In the present embodiment, as a method for injecting a sample (sample solution) into each electrophoresis lane 3 via the injection / discharge port 31, the liquid is supplied to the injection / discharge port 31 as described above. Although the method of feeding the sample solution to the injection / discharge port 31 by connecting the tube 13 has been described, the sample injection method (sample solution feeding method) according to the present embodiment is as follows. It is not limited to the above method. In the present embodiment, the liquid feeding tube 13 having an outer diameter larger than the diameter of the injection 'discharge port 31 is connected (pressed contact) to the injection' discharge port 31. Although the method of feeding the sample solution to the injection / discharge port 31 has been described, the present embodiment is not limited to this, and the liquid supply tube 13 fitted to the injection / discharge port 31 (for example, the above-described one) The liquid feeding may be performed using a liquid feeding tube 13) having an outer diameter smaller than the diameter of the inlet / outlet port 31.

[0158] Further, as described above, the liquid feeding tube 13 may be provided separately from the dielectrophoresis panel 10 and connected to the dielectrophoresis panel 10 only when a sample (sample solution) is injected. The dielectrophoresis panel 10 may have a configuration fixed in advance.

That is, the dielectrophoresis panel 10 according to the present embodiment includes the liquid feeding tube 13 as injection means for feeding (injecting) a sample to the dielectrophoresis panel 10. The dielectrophoresis apparatus 70 or the dielectrophoresis system 85 may serve as an injection means (injection apparatus) for supplying (injecting) a sample to the dielectrophoresis panel 10, and the liquid supply tube 13 or You may have the structure provided with the sample injection apparatus provided with the said liquid feeding tube 13. FIG.

[0160] According to the present embodiment, as described above, the opening (injection / discharge port 31) for feeding the sample into and out of the electrophoresis lane 3 is provided on the side surface of the dielectrophoresis panel 10, thereby allowing the swimming. It is possible to prevent impurities from entering the dynamic lane 3 and suppress the occurrence of defects in the liquid feeding system.

[0161] Also, according to the present embodiment, the injection 'discharge port 31 is inevitably formed on the side surface of the dielectrophoresis panel 10 by the pattern of the migration lane wall 4, so that the injection' discharge port 31 is formed. In order to do so, no additional materials or processes are required. Therefore, according to the above configuration, the dielectrophoresis panel 10 is compared with a method of providing an opening (injection 'discharge hole 5) on the dielectrophoresis panel 10 (for example, on the upper substrate 2) by a drill or the like. It is possible to relatively suppress the occurrence rate of defects. This suppression effect becomes more prominent as the number of migration lanes 3 increases. Therefore, according to the above configuration, the dielectrophoresis panel 1 is more efficiently compared to the case where the dielectrophoresis panel 10 is provided with an opening (injection / exhaust hole (injection / exhaust port)) with a drill or the like. 0 can be formed and is more preferable from the viewpoint of use. [Embodiment 7]

The present embodiment will be described mainly with reference to FIGS. In the present embodiment, differences from Embodiments 1 to 6 will be mainly described, and components having the same functions as those used in Embodiments 1 to 6 are described. Are given the same number and their explanation is omitted.

[0163] In this embodiment, the injection and discharge port 31 in the dielectrophoresis panel 10 is used as a sample, and other methods for feeding a sample solution (electrophoresis medium) are mainly used. explain.

FIG. 12 is a plan view showing a schematic configuration of the dielectrophoresis panel 10 according to the present embodiment, and FIG. 13 is a cross-sectional view of the dielectrophoresis panel 10 shown in FIG. FIG. Also in FIG. 12, for convenience of illustration, the upper substrate is indicated by a two-dot chain line.

[0165] As shown in Fig. 12, the dielectrophoresis panel 10 according to the present embodiment is similar to the embodiment 6 in that the lane walls 4a and 4a connecting the lanes 4a and 4a separating the lanes 3 and 4 are separated. A part of the outer edge portion (frame body) of each has an opening 4b opened at both ends of each electrophoresis lane 3 (both ends in the longitudinal direction of each electrophoresis lane 3). 31 was extended from the opening 4b to the end of the electrophoresis panel 10 (end of the lower substrate 1) along the extending direction of the electrophoresis lane 3 (longitudinal direction of each electrophoresis lane 3). In addition, it has a configuration in which a flow path (passage) composed of the migration lane wall extending portion 4c (migration lane wall 4) is provided.

Accordingly, the dielectrophoresis panel 10 that is effective in the present embodiment is also opened at both ends of the electrophoresis lane 3 so as to face the side surfaces of the dielectrophoresis panel 10 as in the sixth embodiment. The inlet / outlet port 31 (electrophoresis lane wall extending portion 4c) is provided and has a structure.

[0167] Also in this embodiment, the lane width (interval between the partition walls 4a'4a) of each electrophoresis lane 3 is about 1 cm, the lane length is about 6 cm, and the width of the electrophoresis lane wall 4 as in Embodiment 6 above. The inlet / outlet hole 5 has a diameter of about 2 mm and a height of about 40 m (equal to the gap of the panel cavity). The length of the injection / discharge port 31 (length of each lane wall extending portion 4c) is about 2 cm.

However, as shown in FIGS. 12 and 13, in the dielectrophoresis panel 10 which is useful in the present embodiment, the substrate length of the upper substrate 2 in the extending direction of the electrophoresis lanes 3 It is formed to be shorter than the substrate length of the lower substrate 1 in the extending direction of the dynamic lane 3. It is. For this reason, in the present embodiment, the side wall of the injection / discharge hole 5, that is, the swimming lane wall extending portion 4c (the migration lane wall 4) is provided so as to protrude outward from the end portion of the upper substrate 2. It has the structure which was made. In this embodiment, the substrate length of the upper substrate 2 in the extending direction of each migration lane 3 is about 4 mm shorter than the substrate length of the lower substrate 1 in the extending direction of each migration lane 3. To form. In other words, in the present embodiment, the lower substrate 1 protrudes from the upper substrate 2 by about 2 mm at each end in the extending direction of the electrophoresis lanes 3.

In addition, as shown in FIG. 13, the dielectrophoresis panel 10 that is useful in the present embodiment includes the inner end portion la · 2a of the injection inlet / outlet 31 in the lower substrate 1 and the upper substrate 2. Only the inner end portion 2a has a configuration in which a chamfering process in which a force corner portion is chamfered is performed. That is, the dielectrophoresis panel 10 according to the present embodiment includes the upper substrate out of the opposed surface of the lower substrate 1 facing the upper substrate 2 and the opposed surface of the upper substrate 2 facing the lower substrate 1. Only the surface of the substrate 2 facing the lower substrate 1 has a structure in which chamfering treatment is performed on the end of the injection / discharge port 31 forming portion.

[0170] Furthermore, the dielectrophoresis panel 10 according to the present embodiment has a configuration in which a liquid delivery connector 15 is connected to the injection / discharge port 31.

[0171] Like the liquid feeding tube 13, the liquid feeding connector 15 is formed of a deformable material such as silicone resin. As shown in FIG. 13, the liquid feeding connector 15 sandwiches the ends of the dielectric swimming panel 10, that is, the ends of the lower substrate 1 and the upper substrate 2, so that the injection / discharge port 31 Connected.

[0172] Further, the liquid feeding connector 15 has a plurality of U-shaped openings 15a into which the injection / discharge port 31 (electrophoresis lane wall extending portion 4c) is inserted and fitted on one side surface. ing. Each electrophoresis lane 3 is structurally separated inside the liquid delivery connector 15 by inserting the injection / discharge port 31 (electrophoresis lane wall extending portion 4c) into the opening 15a.

In addition, the top wall (upper wall) of the liquid delivery connector 15 corresponds to the injection 'discharge port 31 and corresponds to the injection portion 31a. The injection' discharge hole 16 (injection 'discharge portion, opening) Part).

In the present embodiment, the inner diameter of the injection / discharge port 31 is set to about 2 mm. . The liquid feeding connector 15 is configured so that the lower surface 1 of the lower substrate 1 at the inlet / outlet 31 is in contact with the inner wall of the opening 15a and the inlet / outlet 16 is in the plan view in the lower base. It is formed so as to be positioned above the portion where the plate 1 and the migration lane wall extending portion 4c on the lower substrate 1 are exposed (that is, the portion where the upper substrate 2 is provided). RU

Thus, according to the present embodiment, by injecting the sample into the injection / discharge hole 16, the sample is injected into each electrophoresis lane 3 via the injection / discharge port 31 (liquid feeding). I am able to do it.

[0176] The liquid feeding connector 15 is appropriately designed according to the number of the electrophoresis lanes 3. The liquid feeding connector 15 may be detachably provided on the dielectric swimming panel 10 which may be fixed to the dielectrophoresis panel 10 in advance. In the latter case, the liquid feeding connector 15 can be reused for the dielectrophoresis panel 10 of the same design.

That is, also in this embodiment, the dielectrophoresis panel 10 includes the liquid feeding connector 15 as injection means for feeding (injecting) a sample to the dielectrophoresis panel 10. The dielectrophoresis device 70 or the dielectrophoresis system 85 may serve as an injecting means (injection device) for injecting (injecting) a sample into the electrophoretic panel 10 as the liquid feeding connector 15 or You may have the structure provided with the sample injection device provided with the said liquid feeding connector 15. FIG.

Also in the present embodiment, as described above, an opening (injection / discharge port 31) for feeding the sample into and out of the electrophoresis lane 3 is provided on the side surface of the dielectrophoresis panel 10, so that the electrophoresis lane It is possible to prevent impurities from entering 3 and suppress the occurrence of defects in the liquid feeding system.

Also in this embodiment, since the injection / discharge port 31 is inevitably formed on the side surface of the dielectrophoresis panel 10 due to the pattern of the electrophoresis lane wall 4, the injection / discharge port 31 is formed. No additional materials or processes are required. Therefore, according to the above configuration, the dielectrophoresis panel 10 is compared with a method of providing an opening (injection 'discharge hole 5) on the dielectrophoresis panel 10 (for example, on the upper substrate 2) with a drill or the like. It is possible to relatively reduce the defect occurrence rate. This suppression effect becomes more prominent as the number of migration lanes 3 increases. Therefore, according to the above configuration, the dielectrophoresis panel 10 is provided with an injection / discharge rod with a drill or the like. The dielectrophoresis panel 10 can be formed more efficiently as compared with the case where it is opened, and it is more preferable from the viewpoint of use.

[0180] In the present embodiment, the lower substrate 1 is configured to protrude by about 2 mm from the upper substrate 2 at each end in the extending direction of the electrophoresis lanes 3, and the implantation is performed. 'By setting the inner diameter of the discharge port 31 to about 2 mm, the lower substrate 1 end surface lb is in contact with the inner wall of the opening 15a as shown in FIG. An example has been described in which the configuration is located at the two end portions of the upper substrate and the one end portion of the lower substrate. However, this embodiment is not limited to this, and the lower substrate 1 end face lb is in contact with the inner wall of the opening 15a, and the edge of the injection / discharge hole 16 is If both are formed so as to be located in the exposed region of the lower substrate 1, the inner diameter of the injection hole 16 need not be the same as the protruding length of the lower substrate 1. The inner diameter of the discharge hole 16 may be formed so as to be smaller than the protruding length of the lower substrate 1.

[0181] In addition, the inner diameter of the injection and discharge holes 16 and the protruding length of the lower substrate 1 are not limited to the above lengths, and can be appropriately set so that the sample can be smoothly injected and discharged. Is possible.

[0182] Note that the method of injecting (feeding) the sample in the dielectrophoresis panel 10 having the injection 'discharge port on the side surface (electrophoresis array cross section) of the dielectrophoresis panel 10 is not limited to the above method! / ヽ. The above method is an example of the method of injecting (feeding) the sample in the dielectrophoresis panel 10. Depending on the method of use of the dielectrophoresis panel 10 and the type of sample (electrophoresis medium), various forms of injection (liquid feeding) The method is adaptable.

[0183] In each of the embodiments described above, an example in which the electrode example (electrophoresis electrode array 6) is arranged on one side (that is, only one side) of the dielectrophoresis panel 10 force electrophoresis lane 3 is taken as an example. I explained.

In the following embodiment, a case will be described as an example where a configuration in which electrode examples (electrophoretic electrode arrays) are arranged on two opposing surfaces in the electrophoresis lane 3 is described.

[Embodiment 8]

The present embodiment will be described mainly based on FIGS. 14 to 18 (a) and (b). Book In the embodiment, the difference from the first to seventh embodiments will be mainly described, and the same reference numerals are given to the components having the same functions as those used in the first to seventh embodiments. The description is omitted.

FIG. 14 is a plan view of the dielectrophoresis panel 10 that works with the present embodiment as viewed from the upper substrate side. FIG. 15 is a cross-sectional view of the dielectrophoresis panel 10 shown in FIG. 14 taken along the line GG, and FIG. 16 is a cross-sectional view of the dielectrophoresis panel shown in FIG. (Longitudinal sectional view). FIG. 17 is a schematic configuration diagram of a dielectrophoresis system that works on the present embodiment including the dielectrophoresis panel shown in FIG. Also in FIG. 14, for convenience of illustration, the upper substrate is indicated by a two-dot chain line.

As shown in FIG. 14 to FIG. 16, the dielectrophoresis panel 10 (dielectrophoresis chip, electrophoresis array) that works with the present embodiment is also similar to the first to seventh embodiments. (First substrate) and upper substrate 2 (second substrate) are arranged opposite to each other via migration lane 3 (flow path, cell) having a migration space, as shown in FIGS. 14 and 15. The flow path has a configuration including a plurality of electrophoresis lanes 3.

[0188] Also in the present embodiment, as the lower substrate 1 and the upper substrate 2, a transparent substrate (transparent insulator substrate) such as glass, quartz, or plastic can be preferably used.

[0189] In the present embodiment, the electrophoresis lane 3 is a state in which the lower substrate 1 and the upper substrate 2 are provided with a predetermined space (electrophoresis space) constituting each electrophoresis lane 3 between the two substrates. It is formed by bonding and fixing with a seal material (adhesive). That is, in the dielectrophoresis panel 10 according to the present embodiment, the lower substrate 1 and the upper substrate 2 are arranged to face each other via the spacing layer 43 (seal material layer) made of the seal material. Have the same structure.

[0190] As shown in FIG. 15, the electrophoresis lane 3 is divided into one of the pair of substrates, in the present embodiment, on a surface facing the upper substrate 2 on the lower substrate 1. As walls (intercutting), partition walls 43a (electrophoresis lane walls) separating the electrophoresis lanes 3 ... 1S are patterned along the formation area of each electrophoresis lane 3.

[0191] In the present embodiment, the spacing layer 43 serves as the partition wall. That is, in the present embodiment, the partition wall 43a includes the spacing layer 43 and the like. Strictly speaking, it is formed of a sealing material that constitutes the spacing layer 43.

[0192] Further, on the surface of the lower substrate 1 facing the upper substrate 2, the electrophoresis electrode array 41A is provided.

(Electrophoresis electrode wiring, first electrode array) is provided with an electrode array (first electrode array, comb-shaped electrode) composed of a plurality of electrodes (electrophoresis electrode; hereinafter referred to as “first electrode”) 41 .

[0193] Further, on the surface of the upper substrate 2 facing the lower substrate 1, there is a migration electrode array 42A.

(Electrophoresis electrode wiring, second electrode array) is provided with an electrode array (second electrode array, comb-shaped electrode) composed of a plurality of electrodes (electrophoresis electrode: hereinafter referred to as “second electrode”) 42. The

[0194] Thus, the migration electrode array 41A and the migration electrode array 42A form an electric field by an AC voltage between the first electrodes 41 and 41 and between the second electrodes 42 and 42, respectively. An electric field is applied to each of the samples injected into 3. That is, in the dielectrophoresis panel 10 according to the present embodiment, the electrophoretic electrode array 41 and the electrophoretic electrode array 42A are electric fields substantially parallel to the lower substrate 1 and the upper substrate 2, respectively, in other words. For example, an electric field (lateral electric field) substantially parallel to the lane surface of the electrophoresis lane 3 is applied to each sample injected into the electrophoresis lane 3.

[0195] In the lower substrate 1 and the upper substrate 2, the first electrode 41 and the second electrode 42 are overlapped with each other in a plan view via the electrophoresis lane 3 (that is, in plan view). They are placed opposite each other so as to overlap each other. Further, the first electrode 41... And the second electrode 42... Are provided so as to intersect with the electrophoresis lane 3 (orthogonal in the present embodiment).

[0196] Also in the present embodiment, as shown in Fig. 14, the migration electrode array 41A and the migration electrode array 42A (more precisely, each first electrode in the migration electrode array 41A and the migration electrode array 42A). The electrode 41 and the second electrode 42) force are extended across the plurality of swimming lanes 3 so as to straddle each of the electrophoresis lanes 3. The electrode array 42A acts in common on each electrophoresis lane 3.

That is, in the present embodiment, each of the partition walls 43a (the spacing layer 43) includes the swimming electrode array 41A.42A (the first electrode 41 and the second electrode 42), the electrophoresis lane 3 and so on. Are arranged side by side in the vertical direction with respect to the electrophoresis electrode arrays 41 and 42 so that they intersect (orthogonal in the present embodiment).

[0198] In the present embodiment, at least one of the first electrode 41 and the second electrode 42 described above. One electrode has at least a region where the particles receive a dielectrophoretic force, specifically, a region where the electrophoresis lane 3 overlaps the first electrode 41 and the second electrode 42 (electrophoresis electrode array 41Α · 42Α). It is desirable that a part (area) corresponding to a part of the area (at least the observation area) is constituted by a transparent electrode.

[0199] In the present embodiment, the first electrode 41 and the second electrode 42 are, for example, In (Indium Tin Oxide), ZnO (Zinc Oxide), IZO (Indium Palladium). It is made of a transparent conductive oxide film (transparent electrode) such as Indium Zinc Oxide. The electrode material used for the transparent electrode is not particularly limited as long as it is a transparent conductive material. Among them, ITO is preferable.

[0200] According to the present embodiment, as described above, the first electrode 41 and the second electrode 42 are made of transparent electrodes such as ITO, so that when observing the electrophoresis medium as a sample, Observation is possible from any direction above and below the migration lane 3 (above the lower substrate 1 side and the upper substrate 2 side) without being blocked by the first electrode 41 and the second electrode 42. Therefore, the observation direction can be selected.

In this embodiment, as shown in FIGS. 14 and 16, any two electrodes adjacent to each other in the first electrode row are 41x and 41x + 1, respectively. When the two electrodes in the second electrode array arranged at the positions overlapping with the two electrodes 41χ 41χ + 1 are 42χ and 42χ + 1, respectively, the lower substrate 1 and the upper substrate 2 The electrode 41χ · 41χ + 1 and the electrode 42χ · 42χ + 1 opposite to these electrodes 41χ · 41χ + 1 and the force opposite to each other as far as the alignment accuracy allows, Is located. The electrodes 41χ and 41χ + 1 refer to the Xth and χ + 1st electrodes from one end of the lower substrate 1 in the first electrode row, respectively. Electrodes 42χ and 42χ + 1 denote the Xth and χ + 2th electrodes from the same end as the lower substrate 1 of the upper substrate 2 in the second electrode row, respectively. Hereinafter, the electrode 41x + m or the electrode 41x + n represents the x + m-th or x + n-th electrode from one end of the lower substrate 1 in the first electrode row, respectively. The electrode 42x + m or 42x + n is the same one end force x + mth or x + nth electrode of the upper substrate 2 as the lower substrate 1 in the second electrode row, respectively. X, m, and n are each 1 or more Indicates an arbitrary integer.

[0202] Further, as shown in FIGS. 14 and 15, the electrophoretic electrode array 41A includes the lower substrate, as shown in FIG.

Mounted at one end · Hold connection section 44 (input terminal section)! The FPC 17 is mounted on the mounting / connecting section 44 and is connected to the control board 50 (control section; drive control section) shown in FIG.

On the other hand, as shown in FIGS. 14 and 15, the electrophoretic electrode array 42A includes the upper substrate.

Two end parts have mounting 'connection part 45 (input terminal part). A flexible printed circuit board (hereinafter referred to as “FPC”) 46 is mounted on the mounting / connecting section 45 (input terminal section), and the control board 55 (control section; Drive control unit). The control boards 50 and 55 will be described later.

[0204] As shown in FIGS. 15 and 16, a lower surface protective film 7 and an upper surface protective film 8 are formed on the opposing surfaces of the lower substrate 1 and the upper substrate 2 as electrode protective films, respectively. ing. These lower surface protective film 7 and upper surface protective film 8 constitute the bottom wall and the top wall of the inner wall of the migration lane 3! / Speak.

[0205] Examples of the material of the lower surface protective film 7 and the upper surface protective film 8 include the embodiments described above.

Materials similar to those described in 1 can be used, but the materials for the lower surface protective film 7 and the upper surface protective film 8 are particularly limited as long as they are appropriately set according to the type of particles to be migrated. Not a thing. The lower surface protective film 7 and the upper surface protective film 8 only need to protect (cover) the inner walls of the electrophoresis lane 3 and, in particular, the surfaces of the electrodes in the electrophoresis electrode arrays 41Α and 42Α. The film thickness is not particularly limited. In the present embodiment also, a material having photosensitivity can be used as the material of the lower surface protective film 7 and the upper surface protective film 8. By using a material having photosensitivity as the material of the lower surface protective film 7 and the upper surface protective film 8, for example, a part other than the migration lane 3 where no protective film is required, for example, a mounting terminal part (mounting connection part 44. 45) can be removed by, for example, photolithography, and the time and effort in the subsequent process can be saved.

[0206] The spacing layer 43 is provided on the lower protective film 7 and the upper protective film 8.

[0207] The sealing material used for the spacing layer 43 is not particularly limited, and conventionally known resin is used as the sealing material. As such a sealing material, for example, the above-mentioned A material similar to the material described in Embodiment 1 can be used. Also in this embodiment, it is preferable that the sealing material includes a so-called spacer (a spacing member) such as a spherical spacer or a fiber-like spacer. When the lower substrate 1 and the upper substrate 2 are bonded to each other so that the lower substrate 1 and the upper substrate 2 are bonded to each other, the migration lane wall thickness, that is, the migration label is included. The lane height of lane 3 can be made uniform. As a spacer mixed in the sealing material, a spacer similar to the material described in the first embodiment can be used.

[0208] Further, in this embodiment, even if any of the lower substrate 1 and the upper substrate 2 is used, the sample (electrophoresis medium) is injected into and discharged from the electrophoresis lane 3. Injecting and discharging holes 5 are formed. In the present embodiment, as shown in FIG. 16, the injection and discharge holes 5 are provided at both ends of each electrophoresis lane 3 in the upper substrate 2.

[0209] In addition, in the migration lane 3, the extending direction (longitudinal direction) of the electrophoresis electrode arrays 41 and 42 and the straight line connecting the two injection / discharge holes 5 of the electrophoresis medium are as vertical as possible. It is desirable to have

[0210] Next, a method for manufacturing the above-described dielectrophoresis panel 10 that works according to the present embodiment will be described below.

[0211] In the present embodiment, as described above, transparent substrates are used for the lower substrate 1 and the upper substrate 2, and the migration electrode array 41A is formed on the lower substrate 1, and the upper substrate 2 Then, an electrophoresis electrode array 42A having the same shape as the electrophoresis electrode array 41 is formed.

[0212] The electrophoretic electrode array 41A and the electrophoretic electrode array 42A are formed, for example, after a conductive oxide film such as an ITO film is formed on the lower substrate 1 and the upper substrate 2 by sputtering deposition or the like. It can be easily formed by patterning the electrode shape using lithography. In the present embodiment, simultaneously with the formation of the migration electrode arrays 41Α and 42 実装, the mounting connection portions 44 and 45 are formed as patterns on the respective ends of the migration electrode arrays 41Α and 42Α.

[0213] Next, when the lower substrate 1 and the upper substrate 2 are bonded to each other, a portion of the upper substrate 2 that overlaps the electrophoresis lane 3 is drilled with, for example, a drill, so that Injecting / discharging holes 5 each having a predetermined hole diameter are provided at both ends. In addition, as a method for forming the injection and discharge holes 5, other methods such as blasting and etching can be used.

[0214] Next, on the lower substrate 1 on which the migration electrode array 41A is formed, and on the upper substrate 2 on which the migration electrode array 42A and the injection / discharge holes 5 are formed, for example, the above-described protective film material Are applied to form a lower surface protective film 7 and an upper surface protective film 8, respectively.

[0215] Next, an epoxy adhesive (sealant) in which, for example, a glass spacer is mixed as a reactive adhesive (thermosetting adhesive) on the lower substrate 1 on which the lower surface protective film 7 is formed. A region where the lower substrate 1 and the upper substrate 2 excluding the swimming lane 3 formation region are disposed opposite to each other (that is, the lower substrate excluding the migration lane 3 formation region and the mounting 'connection portion 44 side end portion). 1Apply to the entire bottom surface. As a result, the spacing layer 43 (sealing material layer) that forms the migration lane wall is formed on the lower substrate 1.

[0216] At this time, the epoxy adhesive (sealant) is applied to the region where the lower substrate 1 and the upper substrate 2 except the region where the migration lane 3 is formed are disposed, and to each migration label. By coating between the three layers 3, the partition wall 43a can be formed at the same time as the spacing layer 4 3 outside the migration lane 3 formation region.

[0217] The electrophoresis lane 3 is formed to be perpendicular to the electrophoresis electrode array 41A. Also in this embodiment, for application of the sealing material, for example, a printing method using a screen plate or a drawing method using a dispenser can be used.

[0218] After that, the lower substrate 1 and the upper substrate 2 are disposed to face each other and bonded to each other, so that the lower substrate 1 and the upper substrate 2 and between the lower substrate 1 and the upper substrate 2 are bonded. The electrophoresis lane 3 surrounded by the spacing layer 43 (partition wall 43a) for partitioning the space can be formed.

[0219] More specifically, after the formation of the spacing layer 43 (partition wall 43a), the lower substrate 1 and the upper substrate 2 are connected to the extending direction (longitudinal direction) of the electrophoresis electrode arrays 41 アレイ and 42Α, The two electrodes of the electrophoresis medium · The straight line connecting the discharge holes 5 is as vertical as possible, and the first electrode 41 ··· and the second electrode 42 ··· and the force constituting the above-mentioned electrophoresis electrode array 41A.42A Electrophoresis lane 3 formation area In the region, the two substrates are bonded together by being opposed to each other so as to overlap in plan view with the migration lane 3 interposed therebetween, and being bonded and fixed by the seal material (adhesive). As a result, the electrophoresis lane 3 surrounded by the lower substrate 1 and the upper substrate 2 and the spacing holding layer 43 (migration lane wall) provided between the lower substrate 1 and the upper substrate 2 is changed. Form.

[0220] Specifically, the lower substrate 1 and the upper substrate 2 are disposed to face each other, and hot pressing is performed from both the upper and lower surfaces. The sealing material on the lower substrate 1 is softened and softened by hot pressing, and then cured and bonded to each other, whereby the migration lane 3 is formed between the two substrates.

[0221] Through the above-described steps, the dielectrophoresis panel 10 which is effective in the present embodiment is formed.

[0222] In the present embodiment, for example, a transparent substrate of about 10 cm x 10 cm is used as the lower substrate 1 and the upper substrate 2, and the lane width (interval between the partition walls 43a'43a) is about lcm, the lane length Form 5 rows of parallel lanes 3 approximately 6 cm in length. The width of each partition wall 43a is set to about 2 mm. In addition, a glass spacer having a particle size of 40 μm is mixed in the sealing material so that the thickness of the electrophoresis lane 3 (the height of the spacing layer 43) is uniform.

[0223] However, the specific size made in the present embodiment is merely an example of the embodiment, and the size of each component, for example, the substrate size of the lower substrate 1 and the upper substrate 2 and the electrode size. (Electrode width, electrode interval, electrode thickness, electrode length, etc.), film thickness of lower surface protective film 7 and upper surface protective film 8, layer thickness (height) of interval holding layer 43, lane width (interval between partition walls 43a and 43a ) Conditions such as lane length are not particularly limited, and can be variously changed depending on the analysis target.

For example, in the present embodiment, the case where the lane width is about 1 cm has been described as an example. However, the lane width is not limited to the above size. The lane width is preferably lcm (about lcm), and particularly preferably 8 mm.

Furthermore, in the present embodiment, as shown in FIG. 14, the case where the above-described migration lane 3 is formed in five rows in parallel has been described as an example. However, the present embodiment is not limited to this. It is not done.

In the present embodiment, the layer thickness of the spacing layer 43, that is, the gap (lane height) of the migration lane 3 is also the above-described sheet constituting the spacing layer 43 (migration lane wall). It is maintained uniformly by the spacers contained in the lumber. In addition, as described above, the sealing material By forming a pattern using printing or a drawing method, the electrophoresis lane wall 4 having a plurality of partition walls 43a can be easily formed. Thereby, the plurality of electrophoresis lanes 3 can be easily formed.

Also, according to the present embodiment, as shown in FIG. 14, the lower substrate 1 and the upper substrate 2 are connected to each other in the region where the migration lane 3 is formed. When the lower substrate 1 and the upper substrate 2 are bonded together by shifting them in the extending direction (longitudinal direction) of the electrophoresis electrode arrays 41 and 42 within the range where they are opposed to each other. Therefore, it is possible to easily mount the FPCs 17 and 46 on the mounting parts 44 and 45 described above.

As shown in FIG. 17, the dielectrophoresis panel 10 is connected to the control board 50 via the FPC 17 mounted on the mounting 'connection portion 44 formed on the heel end portion of the electrophoresis electrode array 41. . Further, as shown in FIG. 17, the dielectrophoresis panel 10 is connected to the control board 55 via the FPC 46 mounted on the mounting / connecting portion 45 formed at the end of the electrophoresis electrode array 42A.

A dielectrophoresis apparatus 70 according to the present embodiment includes the dielectrophoresis panel 10, control boards 50 and 55, and a DC power source 60 (power source). A dielectrophoresis system 85 according to the present embodiment includes the dielectrophoresis device 70 and an imaging system 80.

[0230] The control board 50 includes a frequency / timer control unit 50a, a synchronization signal control unit 50b, an oscillation circuit unit 50c, and a phase selection / amplification unit 50d. The control board 55 includes a frequency timer control unit 55a, a synchronization signal control unit 55b, an oscillation circuit unit 55c, and a phase selection / amplification unit 55d.

In the dielectrophoresis apparatus 70, the voltage (DC (direct current) voltage) output from the DC power source 60 is input to the control board 50 to drive the control board 50 and input to the control board 55. Then, the control board 55 is driven.

[0232] In the control board 50, an AC voltage is output from the oscillation circuit unit 50c. The output AC voltage is adjusted to the intended AC output by controlling the frequency, phase, amplitude, etc. by the frequency / timer control unit 50a, synchronization signal control unit 50b, and phase selection / amplification unit 50d. A printing force U (input) is applied to the dielectrophoresis panel 10 via the FPC 17. In the control board 55, an AC voltage is output from the oscillation circuit section 55c. AC output The voltage is adjusted to the intended AC output by controlling the frequency, phase, amplitude, etc. by the frequency / timer control unit 55a, the synchronization signal control unit 55b, the phase selection / amplification unit 55d, and the voltage is adjusted via the FPC 46. Applied (input) to the dielectrophoresis panel 10.

At this time, the synchronization signal controller 50b of the control board 50 and the synchronization signal controller 55b of the control board 55 are signals applied (input) to the dielectrophoresis panel 10 via the FPC 17. And the signal applied (input) to the dielectrophoresis panel 10 via the FPC 46 are synchronized and then applied (input) to the dielectrophoresis panel 10.

Also in the present embodiment, the imaging system 80 includes a light source such as a laser for applying irradiation light to the observation region (measurement unit) in the electrophoresis lane 3 of the dielectrophoresis panel 10 and an optical microscope. Alternatively, it is an optical system equipped with an image pickup device such as a CCD (charge coupled device), etc., and is installed at the upper or lower portion of the electrophoresis lane 3 for optical detection.

[0235] The behavior of the particles in the electrophoresis medium using the dielectrophoresis system 85 in the present embodiment will be described below.

FIGS. 18 (a) and 18 (b) show how the target particles in the electrophoresis medium are floated and conveyed using the dielectrophoresis system 85 shown in FIG. FIG. 15 is a cross-sectional view of an essential part schematically showing a cross section (that is, a cross section taken along line JJ of the dielectrophoresis panel 10 shown in FIG. 14). Fig. 18 (a) above shows how the target particles are levitated in the DEP mode. Figure 18 (b) shows the state where the levitated target particles are transported in the TWD mode.

In FIGS. 18 (a) and 18 (b), a negative dielectrophoretic force (n−DEP) is obtained by applying a DEP (Dielectrophoresis) signal to the electrophoresis electrode arrays 41 アレイ and 42Α by the control boards 50 and 55. Therefore, among the particles 91, the particles whose relative dielectric constant (ε) is smaller than the relative dielectric constant (ε) of the solvent 92

p m

91a (s <ε) is levitated (levitated) as the target particle (electrophoretic particle) and positive dielectrophoretic force (ρ p m

DEP), the relative permittivity (ε) of particles 91 is greater than the relative permittivity (ε) of solvent 92.

Particles 91b (ε> ε) having a large p m are trapped on the edge of the first electrode 41 or the second electrode 42.

p m

The two or more kinds of particles 91 are separated by switching to a TWD (Traveling-Wave DEP) signal, and only the floating particles 9 la are transported. The first electrode 41 Alternatively, the particle 9 lb trapped at the edge of the second electrode 42 remains trapped even when the TWD signal is applied, as shown in FIG. 18 (b).

[0238] According to the present embodiment, as shown in FIGS. 18 (a) and 18 (b), in the electrophoresis electrode array 41Α42A, the electrodes adjacent to each other in each electrophoresis electrode array 41Α · 42Α, For example, the first electrodes 41 (41χ, 41χ + 1, 41χ + 2, 41χ + 3) that are mutually connected in the electrophoresis electrode array 41A have different phases depending on the control boards 50 and 55. The high frequency (alternating voltage) is printed. In addition, as shown in FIGS. 18 (a) and 18 (b), the first electrodes 41 (41x, 41x + l, 41x + 2, 41x + 3) are connected to each other via the migration lane 3 (migration medium layer). The second electrode 42 (42x, 42x + l, 42x + 2, 42x + 3) placed in the overlapping position is connected to the second electrode 42 (42 X, 42x + l, 42x + 2, 42x + 3 ) And the first electrode 41 (4 lx, 41x + l, 41x + 2, 41x + 3) arranged at positions overlapping each other, are applied with the same Cf phase high frequency. In other words, in the present embodiment, a voltage having the same potential is applied to the electrophoresis electrodes facing vertically. As a result, a symmetrical electric field can be applied to the particles 91 contained in the electrophoretic medium 90 from above and below, and compared to a case where an electric field is applied to the particles 91 from one direction. You can gain power.

[0239] As shown in Fig. 18 (a), in the DEP mode, the first electrode 41 (41x, 41x + l, 41x + 2 , 41x + 3) line [apply high frequency to the second electrode 42 (42x, 42x + l, 42x + 2, 42x + 3) so as to be shifted by π by Kawasaki Thus, the levitation force of the particles 91a can be controlled efficiently.

[0240] Also, as shown in Fig. 18 (b), in the TWD mode, the first electrodes 41 (41x, 41x + l, 41x + 2) are mutually connected in each electrophoresis electrode array 41A.42A. , 41x + 3) side-by-side with respect to this second electrode 42 (42x, 42x + l, 42x + 2, 42x + 3) By applying this, the levitated particles 9 la can be transported efficiently.

[0241] This will be described more specifically with reference to FIGS. 18 (a) and (b). In the following description, two types of particles 91a '91b having different dielectric constants are separated by the difference in dielectric constant and frequency characteristics, and only one particle (2) is conveyed and removed as an example. The following In the description, a suspension obtained by suspending particles 91a '91b in a solvent 92 is used as a sample. However, the present embodiment is not limited to this.

[0242] First, a suspension in which particles 9 la and particles 9 lb each having a size of about 10 m are prepared, and this suspension is subjected to dielectric shown in Figs. 18 (a) and 18 (b). Inject into electrophoresis panel 10. Subsequently, for example, 4.5 V, 50 Hz alternating current is applied to the suspension by DEP. Then, the particles 91b are trapped at the edge of the first electrode 41 or the second electrode 42 by p-DEP, and the particles 91a are trapped by the n-DEP as shown in FIG. 18 (a). It floats in the center of electrophoresis lane 3 between 1 electrode 41 and 2nd electrode 42). That is, the distance between the first electrode 41 and the second electrode 42 (the distance between the surface of the first electrode 41 and the surface of the second electrode 42) is V, and the center of the electrode 41x and the center of the electrode 41x + n And the distance between the center of the electrode 42x and the center of the electrode 42x + n is H, the particle 91a becomes n-DEP so that the center is the surface of the first electrode 41 or the second The surface force of the electrode 42 rises to a distance of about VZ2 and a distance of about HZ2 from the edges of the first electrode 41 and the second electrode 42.

[0243] The frequency range for separating the particles 91a and the particles 91b is not particularly limited as long as it is appropriately set depending on the types of the particles 91a and the particles 91b. For example, the frequency range is 30 kHz to 100 kHz. It is preferable to be within the range. Depending on the type of particle 9 la and particle 9 lb, in the low frequency region below 30 kHz, particle 91a and particle 91b are both subjected to p-DEP force, and in the high frequency region above 100 kHz, particle 91a and particle 91b Since both 1S receive n-DEP forces, separation in these frequency ranges may not be possible.

[0244] After separating the particles 91a and 91b by the above DEP mode, when the signal is switched to the TWD mode, as shown in Fig. 18 (b), only the floating particle 91a is injected at the end of the electrophoresis lane 3 ' It is conveyed in the direction of the discharge hole 5. The particles 91b remain trapped in the edge portion of the first electrode 41 even when the TWD signal is given. If the flying height is lowered due to the influence of gravity while transporting the particles 91a in TWD mode, the flying height is lowered by applying the DEP signal to the first electrode row and the second electrode row again. Particle 91a can be lifted again

[0245] According to the present embodiment, the DEP signal and the TWD signal can be appropriately switched in this way. From the suspension (electrophoresis medium 90) only the particles 91a that have a dielectric constant lower than that of 9 lb particles (more precisely, the relative dielectric constant) is lower than the relative dielectric constant (ε) of solvent 92). Separate transport pm

You can. As the solvent 92, for example, a force in which physiological saline is used. The present embodiment is not limited to this.

[0246] It is desirable that these particles 91 (particles 91a and 91b) are decorated with a fluorescent dye before being injected into the dielectrophoresis panel 10. The behavior of the particles 91 during electrophoresis can be observed, for example, from above the first electrode 41 or the second electrode 42 (transparent electrode portion (observation region)) with an optical microscope and a CCD camera (optical system 80). .

[0247] In general, the relative dielectric constant (ε) of the solvent 92 injected into the electrophoresis lane 3 is larger than the relative dielectric constant of the protective film (the lower protective film 7 and the upper protective film 8)! / In this case, when the relative dielectric constant (ε) of the solvent is as small as possible, an electric field is more easily applied to the electrophoresis medium 90. Furthermore, the thinner the protective films (the lower protective film 7 and the upper protective film 8), the easier the electric field is applied to the migration medium 90.

[0248] In addition, when the particles 91 having a diameter of about 10 m are separated and transported as described above, for example, both the first electrode row and the second electrode row are comb-shaped electrodes, When the electrode width (L) and electrode spacing (S) are both approximately 30 111 (73 = 30 111), the separation and transfer of particles 91 (particles 91a '91b) should be performed effectively. Can do. Note that even when one or both of the electrode width (L) and the electrode interval (S) is smaller than 30 μm, the particles 91 (particles 91a '91b) can be separated and transported. However, in this case, the electric field applied to the migration medium 90 is weakened, and as a result, the dielectrophoretic force applied to the particles 91, particularly the particles 91a (electrophoretic particles) may be weakened. Particularly suitable conditions include, for example, when the lane height of migration lane 3 is 40 m (specifically, the lane height is 40 m and the lane width is 8 mm), the ratio of solvent 92 Dielectric constant (ε) force ε = 50, protection

m m

The thickness of the films (the lower protective film 7 and the upper protective film 8) is 1 m. Note that, as described above, the lane height can be controlled by the spacer (spacing holding material) included in the sealing material.

[0249] According to the present embodiment, as described above, the first electrode 41 and the second electrode 42 are respectively disposed above and below the migration medium layer composed of the migration medium 90 injected into the migration lane 3. Toga Both electrode array forces arranged so as to overlap each other in a plane Since a high frequency is applied to the electrophoresis medium layer, a stable dielectrophoretic behavior is achieved compared to the case where one electrode array is not used. In addition, the dielectrophoretic force can be increased without increasing the driving voltage.

That is, according to the present embodiment, as described above, by applying high-frequency waves of the same phase to the electrodes positioned on the upper and lower substrates and overlapping each other, the particles can be produced without increasing the driving voltage. 91 can be provided with a sufficient dielectrophoretic force for migration or retention.

[0251] In addition, since high frequencies with different conditions such as phase and amplitude can be applied to the upper and lower electrode rows, the behavior of electrophoresis can be controlled more efficiently than when only one electrode row is used. can do. In addition, according to the present embodiment, it is possible to control more complicated electrophoretic behavior as compared with the case where only one of the electrode arrays is used.

For example, in the first electrode row and the second electrode row, as shown in FIGS. 18 (a) and (b), the electrodes adjacent to each other in each electrode row have high frequencies having different phases. In addition to the application, high frequency waves of the same phase are applied to the electrodes arranged at positions overlapping each other via the above-described electrophoresis lane 3 (electrophoresis medium layer), so that they are symmetrical with respect to the electrophoresis medium 90 from above and below. It is possible to apply a strong electric field, and a strong dielectrophoretic force can be obtained. At this time, the levitation force of the particles 91 can be efficiently controlled by applying a high frequency so that the phases are sequentially shifted by π to the electrodes adjacent to each other in each electrode row. Further, by applying a high frequency so that the phase is sequentially shifted by ππ2 to the electrodes adjacent to each other in each electrode row, the floating (floating) particles 91 can be efficiently conveyed.

In this embodiment, as shown in FIGS. 18 (a) and 18 (b), after separating particles 91a '91b in DEP mode, particles floating in TWD mode 9 The force described by taking the case of conveying only la as an example This embodiment is not limited to this. In the present embodiment, both of the above modes can be used alone. For example, if the dielectrophoretic force or buoyancy is greater than the gravity due to the influence of the flow path (electrophoresis flow path), that is, the migration lane 3, and the like, the particle 91 is changed by giving only the TWD signal. Can be transported.

[0254] Also, according to the present embodiment, one of the first electrode array and the second electrode example is described. The case where voltage is applied to the electrode rows and the case where voltage is applied to both electrode rows can be used separately in the same experiment. Thereby, the dielectrophoretic force can be adjusted without changing the driving voltage.

[0255] Also in this embodiment, a plurality of electrophoresis lanes 3 are provided in parallel as described above in the same manner as in the first to seventh embodiments, and the electrophoresis electrodes that act in common on each electrophoresis lane 3 (this embodiment In this embodiment, the first electrode 41 and the second electrode 42) are provided, that is, the first electrode 41 and the second electrode 42 (the electrophoresis electrode array 41Α and 42Α) are provided in common in each electrophoresis lane 3. The migration control voltage can be input to the migration electrode arrays 41 and 42 in a batch for each of the migration electrode arrays. As described above, according to the present embodiment, when one type of signal is input to each comb electrode (electrophoresis electrode array 41A.42A) having a common electrophoresis electrode in each electrophoresis lane 3 provided in parallel to each other. An electric field can be simultaneously applied to a plurality of electrophoresis lanes 3. Therefore, according to the present embodiment, migration control of a plurality of samples (electrophoresis medium 90) can be performed simultaneously in a lump.

[0256] Therefore, according to the present embodiment, a plurality of different types of samples (for example, samples having different relative dielectric constants and viscosities of solvents, or particles in the solvent without complicated setting of the experimental environment). Samples with different physical properties (such as relative dielectric constants) can be placed under the same conditions under the same migration conditions, and the dielectrophoresis chip that can be applied to various test conditions with a wide range of application to the test conditions. It is possible to realize a dielectrophoresis apparatus and further a dielectrophoresis system.

[0257] Further, according to the present embodiment, by using the dielectrophoresis panel 10 (dielectrophoresis chip) having the plurality of electrophoresis lanes 3 as described above, the type of the solvent 92 (electrophoresis medium 90) can be migrated. By changing each lane 3 and selecting a plurality of specific particles at the same time, or by using the same solvent 92 (electrophoresis medium 90) and changing the electrode shape for each lane 3, a specific plurality of particles 91 It is also possible to sort the particles at the same time, which makes it possible to efficiently sort multiple particles. Therefore, according to the present embodiment, it is possible to realize a dielectrophoresis chip and a dielectrophoresis device that correspond to a wide range of applications, and further a dielectrophoresis system 85.

In the present embodiment, the first electrode 41 and the second electrode 42 (electrophoresis electrode array 41 Α-42Α) force each electrophoresis lane 3... Across each electrophoresis lane 3. Perpendicular to The case where it is provided has been described as an example. However, the present embodiment is not limited to this, and the same electrode (electrophoresis electrode array 41A) is extended over a plurality of electrophoresis lanes 3. The first electrode 41 and the second electrode 42 do not necessarily need to extend in the vertical direction with respect to the migration lanes 3 as long as they act in common with respect to the third lane 3. However, from the viewpoint of ease of comparative observation of particles, it is preferable that the observation regions in each electrophoresis lane 3 are provided adjacent to each other. Therefore, it is preferable that the first electrode 41 and the second electrode 42 are provided in a direction perpendicular to the respective electrophoresis lanes 3...

[0259] Also, in the present embodiment, a case where two electrode arrays are provided so as to face each other (overlap) via the electrophoresis lane 3 will be described as an example. However, as described above, the present embodiment is not limited to this. The first electrode 41 and the second electrode 42 (electrophoresis electrode array 41A.42A) force straddle each electrophoresis lane 3. As long as it extends over the plurality of migration lanes 3 as described above, two electrode rows (third electrode row and fourth electrode row) are further provided via the migration lane 3. Have it! / In other words, the electrophoresis lane 3 may have a configuration in which separate electrode arrays are formed on the top wall, bottom wall, and both side walls of the lane 3, respectively. This makes it possible to further stabilize the dielectrophoretic behavior of the dielectric material (for example, the particle 91), to transport the dielectric material more efficiently, and to achieve more complicated electrophoretic behavior. It is also possible to control.

In the present embodiment, as described above, the first electrode 41... And the second electrode 42. The case where the electrode shapes, electrode widths, and electrode intervals of the first electrode 41 and the second electrode 42 are formed under the same conditions so as to overlap is described as an example. However, the present embodiment is not limited to this, and the conditions such as the shape of the first electrode 41 and the second electrode 42, the electrode width, the electrode interval, and the electrode length (wiring length) are not limited thereto. The size of the particles to be analyzed (that is, the particles 91 in the electrophoresis medium 90), the target operation (separation, collection, transportation, etc.), etc. may be set as appropriate. The film thicknesses and electrode materials of the first electrode 41 and the second electrode 42 can also be set as appropriate, and are not particularly limited. [0261] In the present embodiment, as described above, arbitrary two electrodes adjacent to each other in the first electrode row are 41x and 41x + l, respectively, and these two electrodes 41χ · 41χ + When the two electrodes in the second electrode array arranged at the position overlapping 1 are 42χ and 42χ + 1, respectively, the lower substrate 1 and the upper substrate 2 are connected to the electrodes 41χ · 41χ. +1 and the force described with reference to the case where the electrodes 42χ · 42χ + 1 are arranged to face each other so as to overlap each other in the migration lane 3 formation region This embodiment is limited to this It is not a thing.

[0262] As shown in Fig. 14, the lower substrate 1 and the upper substrate 2 have the first electrode 41 ··· and the second electrode 42 ··· in the migration lane 3 formation region. Ideally, it should be completely overlapped in plan view. In consideration of the displacement of both substrates when the lower substrate 1 and the upper substrate 2 are bonded together, the electrodes 4 lx 41χ + 1 and the electrodes 42χ If the lower substrate 1 and the upper substrate 2 are arranged to face each other so that at least a part thereof overlaps with 42χ + 1 in a plan view, the lower substrate 1 and the upper substrate 2 are separated from each other in the migration lane. (3) In the formation region, the electrodes 41χ · 41χ + 1 and the electrodes 42χ · 42χ + 1 may be arranged to face each other while being shifted from each other within a partially overlapping range.

[0263] Specifically, the first electrode 41 and the second electrode 42 are planar, as long as the electrode 41χ in the first electrode row overlaps with a part of the electrode 42χ in the second electrode row. It does not matter if the position is shifted. However, the lower substrate 1 and the upper substrate 2 are arranged such that the electrodes in the first electrode array are sequentially 41χ, 41χ + 1 from the side closer to one injection / discharge hole 5 in the electrophoresis lane 3, When the electrodes in the electrode array are sequentially 42χ, 42χ + 1, for example, if the electrode is overlapped with a part of the electrode 41χ + 1 adjacent to the electrode 41χ opposite to the electrode 42χ force, the electric field density may decrease. Also, it is not desirable that each electrode is given a phase different from the phase to be applied, so that a predictable dielectrophoretic behavior cannot be obtained or a problem such as adversely affecting the circuit board is caused. Therefore, the positional shift is suppressed within the range in which the Xth electrode 42χ does not overlap with a part of the electrode 41χ + 1 adjacent to the Xth electrode 41χ provided across the migration lane 3. Hope.

[0264] Further, in the present embodiment, as described above, the spacing layer 43 (see FIG. This is not limited to this embodiment. The present embodiment is not limited to this, and the force is to be formed on the lower substrate 1 on which the lower surface protective film 7 is formed, that is, on the lower surface protective film 7. When the lower surface protective film 7 and the upper surface protective film 8 are formed, a part or all of the overlapping region of the lower surface protective film 7 and the upper surface protective film 8 with the spacing layer 43 may be removed. By adopting such a structure, even when the adhesion between the lower surface protective film 7 and the upper surface protective film 8 and the sealing material is poor, sufficient adhesion can be obtained.

[0265] Further, in the dielectrophoresis panel 10 that is effective in the present embodiment, as described above, the lower surface protective film 7 and the upper surface protective film are formed on the opposing surfaces of the lower substrate 1 and the upper substrate 2, respectively. The case where 8 is formed has been described as an example. However, the present embodiment is not limited thereto, and the lower protective film 7 and the upper protective film 8 are not necessarily formed on the lower substrate 1 and the upper substrate 2. However, a protective film covering these electrodes (electrophoresis electrodes) on the opposing surfaces of the lower substrate 1 and the upper substrate 2, particularly on the first electrode 41 and the second electrode 42 in the electrophoresis lane 3. By providing (the lower surface protective film 7 and the upper surface protective film 8), it is possible to prevent the migrating particles 91 (91a) from adsorbing to the electrophoretic electrode. Therefore, it is desirable that the lower surface protective film 7 and the upper surface protective film 8 are formed on the lower substrate 1 and the upper substrate 2 depending on the kind of the particles 91.

[0266] Further, in the present embodiment, the force is assumed to use a transparent substrate as the lower substrate 1 and the upper substrate 2. In the present embodiment, the particle 91 is not limited to this. The sample in the electrophoresis lane 3 in the area (observation area) where the electrophoresis lane 3 overlaps the first electrode 41 and the second electrode 42 (electrophoresis electrode array 41Α · 42Α). (Migration medium 90) may be provided so as to be observable. Specifically, for example, in the dielectrophoresis panel 10, only one of the lower substrate 1 and the upper substrate 2 is formed of a transparent substrate, and the electrophoresis lane 3 and the above in the other substrate are described above. An observation window (opening or transparent region) is provided in a region (observation region) where the first electrode 41 and the second electrode 42 (electrophoresis electrode array 41Α · 42Α) overlap each other. May be. Further, the dielectrophoresis panel 10 includes the lower substrate 1 and the upper substrate 2 in which the electrophoresis lane 3, the first electrode 41, and the second electrode 42 (electrophoresis electrode array) on both substrates. 41A-42A) is composed of a non-transparent substrate (semi-transparent or opaque substrate) provided with transparent regions (either one may be an opening) in the region (observation region) that overlaps with (41A-42A). You may have.

[0267] According to this embodiment, in any of the configurations described above, observation and imaging with transmitted light (observation and imaging with transmission mode) are possible.

[0268] According to the present embodiment, it is possible to construct an observation system by projection by using the transmission mode as described above. In addition, the transmission mode is very effective for observation using fluorescence and filtering.

However, this embodiment is not limited to this, and one of the lower substrate 1 and the upper substrate 2 is formed of a transparent substrate, and the other substrate is a non-transparent substrate ( Either the first electrode 41 or the second electrode 42 (electrophoresis electrode) which may have a configuration formed of a semi-transparent or opaque substrate) is formed of a transparent electrode and the other electrode The electrode (electrophoresis electrode) may have a configuration formed of a non-transparent electrode such as a metal electrode. In this case, observation and photographing (optical imaging) in the electrode region are possible by using reflected (epi-illumination) light (epi-illumination mode) by the non-transparent electrode.

[0270] That is, according to the present embodiment, as described above, an electric field formed by an alternating voltage is applied to each sample from separate electrode arrays provided with the electrophoresis lane 3 interposed therebetween. Compared to the case where the electric field is applied only from one side of the electrophoresis lane, the dielectric substance can have a stable dielectrophoretic behavior, and the dielectric substance can be efficiently transported (dielectrophoresis). Can do. Therefore, even when the above configuration is adopted, the application range for the test conditions can be expanded and the observation environment can be improved as compared with the conventional case.

[0271] Further, in the present embodiment, even when the lower substrate 1 and the upper substrate 2 are formed of a transparent substrate or a non-transparent substrate is used, a part of the electrophoresis lane 3 is used. When the observation region is formed by providing an observation window (transparent region) or the like, both the first electrode 41 and the second electrode 42 may be formed of a non-transparent electrode such as a metal electrode.

[0272] Examples of the metal material include metals such as aluminum (A1), titanium (Ti), molybdenum (Mo), platinum (Pt), and gold (Au), or alloys including these metals. use can do.

[0273] The metal electrode is formed by using the metal material, forming a metal film by sputter deposition or the like, and patterning the metal film into an electrode shape using photolithography. be able to.

[0274] However, in the former case, one of the lower substrate 1 and the upper substrate 2 is formed of a non-transparent substrate, or optically disposed on one side of the electrophoresis lane 3 (flow path). Since the non-transparent electrode is formed, the installation power of the imaging device (imaging system 80) such as a CCD is limited to one of the substrates in the swimming lane 3 described above.

[0275] Further, as in the latter case, when non-transparent electrodes are formed on both surfaces (upper and lower surfaces) of the electrophoresis lane 3 (flow path), optical imaging at least in the electrode region becomes impossible.

[0276] Therefore, at least one of the first electrode 41 and the second electrode 42 is an area where the particles 91 receive a dielectrophoretic force, specifically, the electrophoresis lane 3 and the first electrode 41. It is desirable that a portion (region) corresponding to at least a part of the region (at least the observation region) of the region where the second electrode 42 (electrophoresis electrode array 41Α · 42 重畳) overlaps is constituted by a transparent electrode.

[0277] However, from the viewpoint of wiring resistance and parasitic capacitance, all wiring on both sides of the migration lane 3, that is, the first electrode 41 and the second electrode 42 are both metal wiring (metal electrode). In addition, the largest dielectrophoretic force can be obtained. For this reason, to obtain the maximum dielectrophoretic force at a limited voltage, first, a substrate (dielectric material) in which at least a part of the electrophoretic lane 3 is provided with a region where the electrophoretic electrode arrays 41 Α and 42 ゝ are formed as transparent electrode caps. After confirming the dielectrophoretic behavior with the electrophoresis panel 10), use the double-sided metal electrode substrate (dielectrophoresis panel 10) in which all wirings on both sides of the electrophoresis lane 3 are formed with metal wirings (metal electrodes) as described above. You can do it. In this case, for example, as described above, dielectrophoresis of an object to be observed using a substrate (dielectrophoresis panel 10) in which at least a part of the electrophoresis lane 3 is provided with a region in which the electrophoresis electrode arrays 41Α and 42Α also have a transparent electrode force is provided. In an experiment in which the behavior is confirmed and the object is to be retained and transported rather than the behavior observation, the object may be stagnated and transported by the double-sided metal electrode substrate (dielectrophoresis panel 10).

[Embodiment 9] The present embodiment will be described mainly based on FIG. 14, FIG. 19, and FIG. In the present embodiment, differences from the eighth embodiment will be mainly described, and components having the same functions as those used in the eighth embodiment have the same numbers. The description is omitted.

[0279] In the eighth embodiment, the first electrode 41 and the second electrode 42 are mainly composed of various transparent electrodes such as ITO, ΖηΟ, and ΙΖΟ! The case has been described as an example. However, in general, the resistivity of transparent conductive materials such as ΙΤΟ, ΖηΟ, and ΙΖΟ is on the order of 10 ² μΩ 'cm. This is two orders of magnitude larger than metal materials such as aluminum (Al, approximately 2.7 μΩ-cm) and gold (Au, approximately 2.5 Ω · cm). Therefore, compared to the case where the first electrode 41 and the second electrode 42 are formed of metal electrodes, the electrodes (wirings) having the same shape are formed of a transparent conductive material as shown in the eighth embodiment. It becomes relatively high resistance by 1 to 2 digits.

[0280] Therefore, in the present embodiment, the first electrode 41 and the second electrode 42 (electrophoresis electrode array 41A-42A) 1S are exemplified by the dielectrophoresis panel 10 partially formed of transparent electrodes. explain.

FIGS. 19 and 20 show the case where the first electrode 41 and the second electrode 42 (electrophoresis electrode array 41 アレイ · 42Α) are partially formed of transparent electrodes in the dielectrophoresis panel 10 shown in FIG. 14 corresponds to a cross-sectional view taken along the line JJ of the dielectrophoresis panel 10 shown in FIG.

As shown by the broken line in FIG. 14, the dielectrophoresis panel 10 according to the present embodiment has a sample in each electrophoresis lane 3 on a portion where each electrophoresis lane 3 and the electrophoresis electrode array 41A.42A overlap each other. An observation area 9 is provided for observing (imaging (transmission)) the (electrophoretic medium 90). As shown in FIG. 19, in the dielectrophoresis panel 10 according to the present embodiment, the first electrode 41 in the observation region 9 is composed of the transparent electrode 41a, and the first electrode 41 in a portion that does not overlap the observation region 9 For this, a metal material (metal electrode 41b) is used. The second electrode 42 in the observation region 9 is composed of a transparent electrode 42a, and a metal material (metal electrode 42b) is used for the second electrode 42 that does not overlap the observation region 9.

[0283] More specifically, in the present embodiment, as the first electrode 41 and the second electrode 42, an electrode having a two-layer structure in which a metal electrode layer is partially formed on a transparent electrode layer. (Electrode arrangement Line) is used. That is, in the first electrode 41 and the second electrode 42 according to the present embodiment, only the portion of the first electrode 41 and the second electrode 42 that overlaps the observation region 9 is a single transparent electrode 41a or transparent electrode 42a. It consists of a layer electrode (single-layer wiring), and the other part is a two-layer electrode consisting of a transparent electrode 41a and a metal electrode 41b (two-layer wiring), or a two-layer electrode consisting of a transparent electrode 42a and a metal electrode 42b. (Two-layer wiring) Get help!

[0284] Thus, according to the present embodiment, each electrophoresis lane 3 is overlapped with the first electrode 41 and the second electrode 4 2 (electrophoresis electrode array 41Α · 42Α), that is, each electrophoresis lane 3 By forming at least a part of the first electrode 41 and the second electrode 42 (electrophoresis electrode array 41 Α · 42 で) of the transparent electrode (transparent electrode 41a or transparent electrode 42a) alone, The first electrode 41... And the second electrode 42... Formation region are used as the observation region 9.

[0285] As the material of the transparent electrodes 41a'42a, for example, a transparent conductive material such as ITO, ΖηΟ, and ΙΖΟ can be used. Among these transparent conductive materials, cocoons are preferably used. In addition, as the metal material, a metal material such as aluminum (A1), titanium (Ti), molybdenum (Mo), platinum (Pt), gold (Au), or an alloy containing these metals is used. be able to.

In this embodiment, the electrode width, electrode interval, electrode length (wiring length), etc. of the first electrode 41 and the second electrode 42 (transparent electrode 41a'42a and metal electrode 41b * 42b) are also described. The conditions are not particularly limited, and are appropriately determined according to the size of the particle 91 to be analyzed (that is, the particle 91 in the electrophoresis medium 90) and the intended operation (separation, collection, transportation, etc.). You only have to set it. The film thickness of the first electrode 41 and the second electrode 42 (transparent electrode 41a'42a and metal electrode 41b'42b) and the electrode material in each electrode layer can also be set as appropriate, and are particularly limited. is not.

[0287] Furthermore, the electrode length of the single-layer wiring portion of each of the transparent electrodes 41a'42a in the first electrode 41 and the second electrode 42 is not particularly limited, and the lane width of the migration lane 3 or the first electrode What is necessary is just to set suitably according to the resistivity etc. of 41 and the 2nd electrode 42 (electrophoresis electrode array 41 * 42 *). However, when the electrodes (wirings) of the same shape are formed of the transparent conductive material and the metal material as described above on the single-layer wiring portion of the transparent electrode 41a'42a in the electrophoresis electrode array 41Α and 42Α. The electrode made of transparent electrode material is made of metal material The resistance is relatively high compared to the formed electrode. Therefore, in order to keep the resistivity as low as possible, at least the area corresponding to the outside of the migration lane 3 in the first electrode 41 and the second electrode 42 (migration electrode array 41A-42A), that is, the first electrode. The overlapping region of the first electrode 41 and the second electrode 42 (electrophoretic electrode array 41Α / 42Α) with the spacing layer 43 includes a two-layer structure of the transparent electrode 41a and the metal electrode 41b and the transparent electrode 42a. As shown in FIG. 20 which preferably has a two-layer structure with the metal electrode 42b, the first electrode 41 and the second electrode 42 force are transparent electrodes 4 la in a part of the migration lane 3 described above. Alternatively, it is more preferable that each of the transparent electrodes 42a has a single layer structure.

[0288] Hereinafter, a method for forming the migration electrode arrays 41Α and 42Α, which is useful for the present embodiment, will be described.

In the present embodiment, first, as in the eighth embodiment, after forming a coating film on the lower substrate 1 by sputtering deposition or the like, by patterning into an electrode shape using photolithography, On the lower substrate 1, transparent electrodes 41a are formed. On the other hand, on the upper substrate 2, after forming an ITO film by sputter deposition or the like, the transparent electrode 42 a... Is formed on the upper substrate 2 by patterning into an electrode shape using photolithography.

[0290] Next, on the lower substrate 1 and the upper substrate 2 on which the transparent electrodes 41a ... or the transparent electrodes 42a ... are formed, a metal material is used as described above, and a metal film is formed by sputtering deposition or the like. In addition, the metal film is patterned into an electrode shape using photolithography, and the wiring portion that overlaps the observation region 9 in the patterned metal film (in this embodiment, in each electrophoresis lane 3 and each Remove the wiring pattern in the vicinity of migration lane 3).

[0291] As a result, only the portion of the first electrode 41 and the second electrode 42 that overlaps each observation region 9 becomes the ITO single-layer wiring (transparent electrode 41a or transparent electrode 42a), and the other portions are Au. A two-layer wiring of a transparent electrode (transparent electrode 41a or transparent electrode 42a) such as ZlTO is formed.

[0292] The method for forming the portions other than the electrophoresis electrode arrays 41 and 42 is basically the same as in the eighth embodiment. Also in the present embodiment, at the same time as the formation of the first electrode 41 and the second electrode 42, mounting terminals are connected to the ends of the first electrode 41 and the second electrode 42. Then, the mounting and connection portions 44 and 45 are formed into a pattern.

[0293] According to the present embodiment, the portion of the electrophoresis electrode array 41 A · 42Α that overlaps each observation region 9 provided in each electrophoresis lane 3 as described above is a transparent electrode 41a'42a The other portions are composed of metal electrodes 41b'42b made of Au or the like having a lower resistance than the transparent electrodes 41a'42a, so that when the sample (electrophoresis medium 90) is observed, the first electrode 41 In addition, the observation should be possible from both the top and bottom of the migration lane 3 (above the lower substrate 1 side and the upper substrate 2 side) without being blocked by the second electrode 42 (the migration electrode array 41 アレイ / 42Α). In addition, the resistance of the entire electrophoresis electrode array 41 Α · 42 上記 is compared with the case where a migration electrode array having the same shape (same pattern) as the migration electrode array 41 Α · 42 も and having a transparent electrode force is used. Can be kept low. Therefore, according to the present embodiment, the observation conditions for optical observation are not limited, and the usability is excellent because the attenuation / delay of the input voltage (electrophoresis control input voltage) can be suppressed. It is possible to realize an electrophoresis panel 10 and a dielectrophoresis device 70 with high measurement accuracy, a dielectrophoresis system 85, and a dielectrophoresis system 85.

[0294] In the present embodiment, the electrophoretic electrode arrays 41Α and 42Α are composed of the transparent electrodes 4la'42a such as heels in the portions overlapping each observation region 9, and the other portions are transparent. The electrode 41a'42a is composed of a metal electrode 41b'42b, such as Au, having a lower resistance than that of the electrode 41a'42a, but the present embodiment is not limited to this. It is sufficient if at least a part of the electrophoresis electrode array 41Α · 42Α is formed of a transparent electrode in a region overlapping with the above.

[0295] For example, the migration electrode arrays 41Α and 42Α have a region where the migration electrode arrays 41Α and 42Α overlap each observation region 9 (a region where the particles 91 receive a dielectrophoretic force) (that is, the swimming electrode array 41Α). · In the area where 42Α overlaps each electrophoresis lane 3), the part formed by the transparent electrode 41a • 42a (that is, the part where each electrode is also the force of the transparent electrode 41a or the transparent electrode 42a) and the metal electrode 41b ' It may have a portion provided with 42b (that is, a portion further provided with metal electrode 41b or metal electrode 42b). In addition, the electrophoretic electrode array 41A.42A has the metal electrode 4 lb · 42b formed on the transparent electrode 41a'42a in a part of the region that does not overlap the electrophoretic electrode array 41A • 42A force observation region 9. It is possible to have a structure that is layered)!

[0296] Furthermore, the migration electrode array 41A · 42Α is such that at least a part of the migration electrode array 41Α · 42Α is a transparent electrode 41a'42a in the region where the migration electrode array 41Α · 42Α overlaps each observation region 9 (That is, each electrode is formed of only the transparent electrode 41a or the transparent electrode 42a), non-transparent (semi-transparent or opaque) other than metal is formed in a part of the observation region 9 or a part of the non-observation region. It is also possible to have a configuration in which a third electrode made of a conductive material (low resistance conductive material) is provided. The third electrode may be provided in place of the metal electrodes 41b and 42b, or may be used in combination with the metal electrodes 4 lb and 42b. In this case, the third electrode has a laminated structure with respect to the metal electrode 41b′42b, which may be provided in the same layer as the metal electrode 41b′42b, so that the first electrode 41 and the second electrode At least one of the electrodes 42 may have a multilayer structure of three or more layers.

[0297] Also in the present embodiment, as in the case of the eighth embodiment, as the lower substrate 1 and the upper substrate 2, for example, a force that uses a transparent substrate of about 10 cm x 10 cm is used. In the region (observation region 9) where each of the electrophoresis lanes 3 and the first electrode 41 and the second electrode 42 (the electrophoresis electrode array 41Α · 42 重畳) overlap with each other is not limited to this, It is sufficient that the sample (electrophoresis medium 90) is provided so as to be observable. That is, also in the present embodiment, the dielectrophoresis panel 10 includes, for example, only one of the lower substrate 1 and the upper substrate 2 formed of a transparent electrode, and each electrophoresis lane on the other substrate. 3 in which the first electrode 41 and the second electrode 42 (electrophoresis electrode array 41Α · 42Α) overlap each other (observation region 9) is provided with an observation window (opening or transparent region). You may have. In addition, the dielectrophoresis panel 10 includes the lower substrate 1 and the upper substrate 2 that are connected to each electrophoresis lane 3, the first electrode 41, and the second electrode 42 (electrophoresis electrode arrays 41 and 42) on both substrates. A structure that also has a non-transparent substrate (semi-transparent or opaque substrate) force in which transparent regions (either one may be an opening! Have it.

[0298] Also, in the present embodiment, as described above, the first electrode 41 and the second electrode 42 (swimming) in each observation region 9 (the region where the migration electrode array 41A · 42A overlaps the observation region 9). Moving electrode array 41Α ・ 42Α) is used as a transparent electrode, and first electrode 41 and second electrode 42 (electrophoretic electrode array 41Α ・ 42 における) in other regions are used as transparent electrodes and low resistance non-metal such as metal electrodes. The case where a non-transparent electrode (that is, a non-transparent electrode structure in a plan view) is formed as a laminated structure with a transparent electrode has been described as an example. However, according to the present embodiment, for example, as shown in FIG. 20, in each observation region 9, that is, in each of the migration lanes 3 and the region where the migration electrode arrays 41Α and 42Α overlap each other, the migration electrode array By forming only a part of 41Α and 42Α with a transparent electrode, the transparent electrode can be used for transmission mode (observation and photographing with transmitted light) or epi-illumination mode (observation and photographing with reflected (epi-illumination) light from the object force) In addition, it is possible to provide the dielectrophoresis panel 10 capable of using an epi-illumination mode in which reflected (epi-illumination) light from a non-transparent electrode (metal electrode) is observed and projected. As a result, the observation conditions can be relaxed, and more complex dielectrophoretic behavior can be observed. As a result, two types of observations are possible by using both the transmission mode with a transparent electrode and the epi-illumination mode with a non-transparent electrode (reflection (epi-illumination) electrode) such as a metal electrode as described above. It is possible to provide a dielectrophoresis panel 10 that can analyze the angle of the angle.

In this case, for example, as shown in FIG. 20, in each observation region 9, that is, in each of the migration lanes 3 and the migration electrode arrays 41Α and 42Α, Either one of the migration electrode arrays, in this embodiment, for example, only the migration electrode array 41A has a region composed of a single layer structure of the transparent electrode 41a, and a two-layer in which a metal electrode 41b is further provided on the transparent electrode 41a. And the other migration electrode array 42A is formed of a single-layer structure of the transparent electrode 42a.

[0300] Thus, in each observation region 9, the electrophoresis electrode arrays 41 and 42 (the first electrode 41 and the second electrode 42) are at least at least one part of the transparent electrode cover as described above. The metal electrode is provided on the side, so that the resistance of the entire migration electrode array 41A • 42A is formed, and the electrode array 41A · 42A is formed only by the transparent electrode 4la · 42a. Compared to the case of the above, as described above, the transmission of light on the electrode surface and the transmission using the epi-illumination can be performed in view of the fact that the parasitic capacitance between the electrodes can be reduced. To provide a dielectrophoresis panel 10 that can be used in both a mode and an epi-illumination mode. Togashi.

[0301] Further, as described above, a plurality of electrophoresis lanes 3 are provided on one substrate, and each of the electrophoresis lanes 3 in the observation region 9 includes the electrophoresis electrode arrays 41 電極 and 42Α (first 1 electrode 41 and 2nd electrode 42) Both 1S is provided with a portion (transparent region 9a) which is a transparent electrode cover, and a portion where a metal electrode is provided on at least one side (an epi-illumination region 9b). Different analyzes can be performed at the same time by switching between the transmission mode with the transparent electrode and the epi-illumination mode with the metal electrode in the electrophoresis lane 3. Further, according to the above configuration, more complicated dielectrophoretic behavior can be observed.

[0302] In the present embodiment, in each observation region 9, a portion where the metal electrode is provided on at least one of the electrophoretic electrode array 41Α42A (first electrode 41 and second electrode 42) (epi-illumination) The ratio (9aZ9b) of the portion (transparent region 9a) in which the migration electrode array 41Α and 42Α (first electrode 41 and second electrode 42) both have transparent electrode force with respect to region 9b) is not particularly limited. For example, because of the observation record of trapped particles (dielectric particles) or migrating particles (dielectric particles), the lower limit is 1Z3, that is, 1/3 ≤ 9aZ9b (that is, in each observation region 9) The ratio of the transparent area 9a is 1Z4 or more), more preferably 1Z3 and 9aZ9b l≤9aZ9b (that is, the ratio of the transparent area 9a in each observation area 9 is 1Z2 or more) More preferably. Further, the ratio (9aZ9b) is preferably 9aZ9b <3, and it is particularly preferable to set 9a / 9b = 1.

[0303] In the present embodiment, as described above, as described above, the electrophoretic electrode array 10 is used as the dielectrophoresis panel 10 of the transmission mode Z incident mode dual-use type using light transmission Z incident on the electrode surface. The force described by taking as an example the case where a part of 41Α and 42Α is formed of a transparent electrode. The present embodiment is not limited to this.

[0304] For example, in the eighth embodiment, any one of the lower substrate 1 and the upper substrate 2 is overlapped with each electrophoresis lane 3 and the electrophoresis electrode arrays 41 and 42. A non-transparent substrate having a transparent region in a part of the region to be folded (each observation region 9), and the other substrate is a transparent substrate, or each electrophoresis lane 3 and electrophoresis electrode array 41 Α 4 2 Α Overlapping areas (each observation area 9) have observation windows (openings or transparent areas) By forming it with a non-transparent substrate, it is also possible to provide a transmission panel 10 for both transmission mode and epi-illumination mode.

[0305] Furthermore, according to the present embodiment, the migration lanes 3 and 3 adjacent to each other, for example, the migration lanes 3 and 3 are connected to the migration electrode arrays 41 and 42 (the first electrode 41 and the second electrode 42) force. Both may have a configuration including an observation region 9 having a transparent electrode force and an observation region 9 provided with a metal electrode in at least one of them. Also with the above configuration, the resistance of the entire electrophoresis electrode array 41Α / 42Α can be kept low compared to the case where the electrode array 41Α / 42Α is formed only by the transparent electrodes 41a'42a, and between the electrodes. In addition to being able to reduce the parasitic capacitance of the electrode, it is possible to provide a dielectrophoresis panel 10 that can use any of the transmission mode and the epi-illumination mode utilizing the light transmission Z epi-illumination on the electrode surface.

[Embodiment 10]

This embodiment will be described mainly based on FIGS. 21 (a) to (c) and FIGS. 22 (a) to (c). In the present embodiment, differences from the eighth and ninth embodiments will be mainly described, and components having the same functions as those used in the eighth and ninth embodiments are described. Are given the same numbers and their explanation is omitted.

FIGS. 21 (a) to 21 (c) are cross-sectional views of the dielectrophoresis panel 10 shown in FIG. 17, showing how the target particles in the electrophoresis medium are floated and transported using the dielectrophoresis system 85 shown in FIG. FIG. 5 is a cross-sectional view of another main part schematically shown in FIG. FIGS. 22 (a) to 22 (c) show how the target particles in the electrophoresis medium are floated and conveyed using the dielectrophoresis system 85 shown in FIG. It is other principal part sectional drawing typically shown in a cross section. FIG. 21 (a) and FIG. 22 (a) show how the target particles are levitated. FIG. 21 (b) and FIG. 21 (c), and FIG. 22 (b) and FIG. 22 (c) show how the levitated target particles are transported.

FIG. 21 and FIG. 22 show the case where the first electrode 41 and the second electrode 42 (electrophoresis electrode array 41Α · 42Α) are partially formed of transparent electrodes in the dielectrophoresis panel 10 shown in FIG. 14 corresponds to a cross-sectional view taken along the line JJ of the dielectrophoresis panel 10 shown in FIG.

In the present embodiment, as shown in FIGS. 21 (a) to (c), the electrophoresis electrode array 41 A · 42Α In the electrophoresis electrode arrays 41 アレイ and 42Α, electrodes adjacent to each other, for example, the first electrodes 41 (41χ, 41χ + 1, 41χ + 2, 41χ + 3, 41χ + 4,..., 41x + m) are applied with high frequencies having different phases by the control board 50. Similarly, the second electrodes 42 (42x, 42x + l, 42x + 2, 42x + 3, 42x + 4, ..., 42x + m) adjacent to each other in the electrophoresis electrode array 42A are also controlled as described above. High frequencies having different phases are applied by the substrates 50 and 55, respectively. X and m are arbitrary integers of 1 or more.

[0310] As shown in FIGS. 21 (a) to (c), each of the first electrodes 41 (41x, 41x + l, 41x + 2, 41x +) is passed through the migration lane 3 (migration medium layer). 3, 41x + 4, ..., 41x + m) and the second electrode 42 (42x, 42x + l, 42x + 2, 42x + 3, 42x + 4) , ..., 42x + m) and the second electrode 42 (42x, 42x + l, 42x + 2, 42x + 3, 42x + 4, ..., 42x + m) A high frequency with a phase different from that of the first electrode 41 (41x, 41x + l, 41 x + 2, 41x + 3, 41x + 4,. .

[0311] In the present embodiment, high frequencies satisfying the phase conditions shown in Table 1 below are respectively applied to the swimming electrodes facing vertically in the first electrode row and the second electrode row.

[0312] [Table 1]

In the present embodiment, η represents an integer of 1 or more. In the dielectrophoresis panel 10 shown in FIGS. 21 (a) to 21 (c), n = 2. That is, in the electrophoresis panel 10 shown in FIGS. 21 (a) to 21 (c), as described above, the (x + 2) -th first electrode 41 (41x) with respect to the X-th first electrode 41 (41x) in the first electrode row. The first electrode 41 (41x + 2) and the Xth second electrode 42 (42x) in the second electrode example facing the xth first electrode 41 (4 lx) are connected to the xth first electrode. A high frequency is applied so that the phase difference from the electrode 41 is π, and the x + 2nd second electrode 42 (42χ + 2) in the second electrode array is compared with the χth first electrode 41 Apply the same high frequency (with 0 phase difference).

[0314] Thus, high frequency is applied to each of the electrodes under a phase condition that satisfies the relationship in Table 1 above. As shown in FIG. 21 (a), the center of the space surrounded by the electrodes 41x, 41x + 2, 42x, 42x + 2 in the electrophoresis lane 3 (migration medium layer), specifically, The particle 91 (particle 91a) can be trapped in the center of the electrodes 41x + 1 and 42x + 1

[0315] Further, as shown in FIGS. 21 (b) and 21 (c), the target electrode to which a high frequency is applied in the first electrode row and the second electrode row is divided into four electrodes 4lx, 41x + n, 42x, By moving the target electrodes to which high frequency is applied in order so that x of one unit consisting of 42x + n is sequentially increased by 1 (that is, x = l, 2, 3, ...), Compared to the conventional TWD mode (a mode in which high-frequency waves are applied so that the phases of the electrodes adjacent to each other in each electrode array are sequentially shifted by πΖ2), the particles 91 (91a) can be transported more efficiently. Can do.

[0316] According to Figs. 21 (a) to (c), as shown in Fig. 21 (a), the x + second first electrode 41 (41x + 2) and the X th second electrode 42 (42x) In addition, a high frequency is applied so that the phase difference from the x-th first electrode 41 (41x) is π, and the x-th second electrode 42 (42χ + 2) is Particle 91 (particle 91 a) trapped in the center of the space surrounded by the electrodes 41χ, 41χ + 2, 42χ, 42χ + 2 by applying the same high frequency as the first electrode 41 (phase difference 0) As shown in FIG. 21 (b), the x + first electrode 41 (41x + 3) and the x + 1 second electrode 42 (42x + 1) are connected to the x + 1 first electrode 41 ( A high frequency is applied so that the phase difference with respect to (41x + 1) is π, and the χ + first electrode 41 (41χ + 3) is applied to the χ + third electrode 42 (42χ + 3). Same as 1) (phase difference 0) By applying a high frequency, the space surrounded by the electrodes 41χ + 1, 41χ + 3, 42χ + 1, 42χ + 3 To move to the center of.

[0317] Then, as shown in FIG. 21 (c), the x + second electrode 41 (41χ + 4) and the x + second electrode 42 (42x + 2) are connected to the x + second electrode. A high frequency is applied so that the phase difference from the first electrode 41 (41x + 2) is π, and the χ + second second electrode 42 (42χ + 4) is By applying the same high frequency as the electrode 41 (41χ + 2) (phase difference 0), particles in the center of the space surrounded by the electrodes 41χ + 1, 41χ + 3, 42χ + 1, 42χ + 3 91 (91a) further moves to the center of the space surrounded by the electrodes 41x + 2, 41x + 4, 42x + 2, 42x + 4. Thereby, according to the present embodiment, a highly efficient migration behavior can be realized. [0318] According to the present embodiment, using the dielectrophoresis system 85 that works well with the present embodiment, a particle 91, for example, a particle 91 having a diameter of about 10 m, is shown in FIGS. 21 (a) to 21 (c). It can be efficiently transported by the new migration mechanism shown. The dielectrophoresis system 85 basically uses the same dielectrophoresis system 85 as the dielectrophoresis system 85 described in the ninth embodiment, except for the signals applied to the electrode rows. .

[0319] Specifically, first, the particles 91 are injected into the electrophoresis lane 3 from one injection 'discharge hole 5 in the electrophoresis lane 3.

[0320] Next, the side force close to one of the injection and discharge holes 5 in the electrophoresis lane 3 is also sequentially applied to the electrodes (41x, 41x + 1, 41x + 2, 41x + 3, 41x + 4) in the first electrode row, The electrodes in the second electrode array (Al, A2, A3, A4) are arranged so as to overlap with the electrodes Al, A2, A3, A4 via the migration lane 3 (migration medium layer) ( 42x, 42x + l, 42x + 2, 42x + 3, 42x + 4) is Bl, B2, B3, B4, the above electrodes Al, A3, Bl, B3 have an amplitude of 4.5V and a frequency of 50kHz. Is applied under the phase condition that satisfies the relationship when n = 2 in Table 1, the particles injected into the center of the space surrounded by the electrodes A1, A3, Bl, B3 in the electrophoresis medium layer 91 is trapped.

[0321] Subsequently, an alternating current with an amplitude of 4.5 V and a frequency of 50 kHz was applied to the four electrodes A2, A4, B2, and B4 under the phase conditions satisfying the relationship shown in Table 1, and at the same time, the electrodes A1 and B1 When the voltage applied to is cut off, the particles 91 trapped in the center of the space surrounded by A1, A3, Bl, and B3 become the center of the space surrounded by A2, A4, B2, and B4. Move to the department. In this way, by sequentially moving the target electrodes to which the high frequency is applied in the first electrode row and the second electrode row, the particles 91 are continuously transported in the direction of forming the other injection and discharge holes 5. Is possible. As a result, the target particles 91 can be transported to a desired location.

In the present embodiment, as shown in FIGS. 21 (a) to (c), the (x +) second first electrode 41 (41x + 2) with respect to the xth first electrode 41 (41x). And the X-th second electrode 42 (42x), a high frequency is applied so that the phase difference between the X-th first electrode 41 (41x) and the X-th second electrode 42 (42x) is π. Although (42χ + 2) is applied with the same (phase difference 0) high frequency (AC voltage) as the χth first electrode 41 (41χ), the present embodiment is not limited to this. It is not a thing. [0323] According to the present embodiment, the electrodes in either one of the first electrode row and the second electrode row are sequentially set as Ax, Ax + 1, ..., Ax + m, and The electrodes in the other electrode array arranged at positions overlapping with the electrodes Ax, Ax + 1,..., Ax + m via electrophoresis lane 3 (electrophoresis medium layer) are connected to Bx, Bx + 1,. · When Bx + m, applying high frequency (alternating voltage) to each electrode under the phase conditions satisfying the relationship shown in Table 2 below, in the migration lane 3 (migration medium layer) The particles 91 (91a) can be trapped in the center of the space surrounded by the electrodes Ax, Ax + n, Bx, Bx + n.

[0324] [Table 2]

[0325] Furthermore, the target electrode to which a high frequency is applied in the first electrode row and the second electrode row is set to 1 unit x consisting of a combination of the above four electrodes Ax, Ax + n, Bx, Bx + n in order 1 By sequentially moving so as to become larger (that is, x = l, 2, 3,...), The conventional TWD mode (with respect to the second electrodes 42 adjacent to each other in each electrode row) The particles 91 (particles 91a) can be transported more efficiently compared to the mode in which a high frequency is applied so that the phases are sequentially shifted by πΖ2.

[0326] Also, according to the present embodiment, the four electrodes Ax, Ax + n, Bx, Bx + n, for example, ii022 (a) [As shown, electrodes 41x, 41x + 2, 42x , 42x + 2 [Table 3] [Table 3 below] Even when AC is applied under the phase conditions shown below, particles 91 (91a) are trapped by the TWD generated in the direction of rotation inside the four electrodes. can do. In the dielectrophoresis panel 10 shown in FIGS. 22 (a) to (c), n = 2. Furthermore, the target electrode to which a high frequency is applied in the first electrode row and the second electrode row is a unit of x consisting of a combination of the four electrodes Ax, Ax + n, Bx, Bx + n. The trapped particles 91 (91a) can be transported by sequentially moving them so as to increase one by one (that is, x = 1, 2, 3,...).

[0327] [Table 3] Electrode 4 1. 4 1 + n 4 2 χ 4 2 χ + η

Phase shift 0 π / 2 3 π / 2 π [0328] Further, the four electrodes Ax, Ax + n, Bx, Bx + n, for example, as shown in FIG. 22 (a), electrodes 41x, 41x + 2, 42x, 42x + 2, and Table 4 below. Even when alternating current is applied under the phase conditions shown, particles 91 (91a) can be trapped by TWD generated in the direction of rotation inside the four electrodes. Furthermore, the target electrode to which a high frequency is applied in the first electrode row and the second electrode row is sequentially changed to one unit of x that also has the combined force of the four electrodes Ax, Ax + n, Bx, Bx + n. The trapped particles 91 (91a) can be transported by sequentially moving them so as to increase by 1 (ie, x = l, 2, 3, ...). However, in this case, the particle 91 (91a) rotates in the opposite direction to that described in Table 3 and is located at the center of the space surrounded by the electrodes Ax, Ax + n, Bx, Bx + n. Trapped.

[0329] [Table 4]

[0330] As described above, according to the present embodiment, in the first electrode row and the second electrode row, high-frequency waves having different phases are applied to adjacent electrodes in each electrode row, It is possible to realize more efficient migration behavior by applying high-frequency waves of different phases to the electrodes arranged at positions overlapping with each other via the migration medium layer.

[0331] However, the migration mechanism shown in FIGS. 22 (a) to (c) is more complicated in movement of the particles 91 (91a) than the migration mechanism shown in FIGS. 22 (a) to (c). It becomes. For this reason, when a highly viscous solvent is used, the direction force particles 91 (91a) employing the migration mechanism shown in FIGS. 22 (a) to (c) are less likely to receive resistance. For this reason, when a highly viscous solvent is used, if the transport distance of the particles 91 (91a) is long, adopting the migration mechanism shown in Figs. 22 (a) to (c) is more effective than 1S. This is preferable.

[0332] Also, according to the present embodiment, when the migration mechanism shown in the eighth embodiment is adopted, as shown in FIGS. 18 (a) and 18 (b), it is necessary to switch modes. On the other hand, when the migration mechanism shown in FIGS. 21 (a) to (c) and FIGS. 22 (a) to (c) is adopted, it is not necessary to switch the mode, and the target electrode to which a voltage is applied is applied. Since the particles 91 can be separated and transported by simply switching, the migration mechanism shown in Fig. 18 (a) and (b) There is a merit that it is easier to control the separation and transport efficiency of the particles 91 than when adopting the above. In the eighth embodiment, the control of the levitation force and the transport of the particles 91 are performed separately, whereas in the present embodiment, the particles 91 are transported while giving the levitation force as described above. Therefore, there is also an advantage that the particles 91 are difficult to settle.

[0333] However, depending on the type of particle 91, there are many cases where it does not take ideal behavior due to various factors such as slight difference in shape and size, dielectric constant, viscosity resistance of solvent 92, etc. Therefore, the particles 91 to be transported may stay on the way.

[0334] However, even in such a case, according to the present embodiment, for example, by giving the DEP mode described in the eighth embodiment, the staying particles 91 are removed. It can be lifted and transported again.

[0335] For example, for particles 91 that are not ideally trapped or transported and remain in the middle of electrophoresis lane 3, first, a DEP mode signal (see Embodiment 8) is applied, and this electrophoresis After the particles 91 remaining (residual) in the middle of the particle 3 are levitated, the four electrodes Ax, Ax + n, Bx, Bx + n near the particles 91 are shown in Table 2 (for example, Table 1). To trap this particle 91 by applying an AC voltage (high frequency) under a phase condition that satisfies any of the relationships in Table 4. Thereafter, the trapped particles 91 are transported by sequentially moving the target electrodes to which a high frequency is applied. In this way, by repeatedly floating the particles 91 in the DEP mode and transporting them by a new migration mechanism, many particles 91 can be transported to the target position.

[0336] The particles 91 remaining in the middle of the electrophoresis lane 3 can be visually confirmed.

According to the present embodiment, after most of the cells are transported to the target position, the particles 91 remaining in the middle of the electrophoresis lane 3 are visually confirmed, a DEP mode signal is applied, and the above table 1 is again applied. By using the new mechanism described in any of Table 4, the particles 91 remaining in the middle of the electrophoresis lane 3 can be transported as described above.

[0337] In the present embodiment, n is an integer equal to or greater than 1, and the value of n is the height of the migration space (the substrate gap between the lower substrate 1 and the upper substrate 2) and the arrangement of the electrodes. What is necessary is just to select suitably according to conditions, such as a pitch. However, if the value of n is too large, the effect of dielectrophoretic force is weakened.

[0338] Non-Patent Document 5 describes, for example, a pole-type gold electrode (gold pole electrode) on a glass substrate. It is disclosed that the distribution of electric field strength changes with the parameters of the distance between two parallel electrodes, the distance between two electrodes in a pair, and the radius of the gold pole electrode by arranging the bipolar electrodes. Yes.

[0339] Therefore, the value of n is within a range of forces 1 to 5 depending on the pitch between the first electrode example and the second electrode array, and the pitch and electrode width between the electrodes in each electrode array. Is desirable

More specifically, for example, in the sectional view taken along line JJ of the dielectrophoresis panel 10 shown in FIG. 14, the electrodes Ax, Ax + n, Bx, Bx + n are substantially square (preferably It is more preferable that the electrodes are arranged so as to be square) (n is selected above). In other words, in the migration mechanism shown in Fig. 21 (&) to (J) and Fig. 22 (&) to ( ₍ :)), the above-mentioned Fig. 21 (a) to (c) and Fig. 22 (a) In the cross-sectional view shown in (c), the electrodes 41x, 41x + 2, 42x, 42x + 2 are arranged so that the electrodes are substantially square (preferably square), in other words, More preferably, alternating current is applied to the electrodes 41x, 41x + 2, 42x, 42x + 2 under the phase conditions shown in Table 3 (Table 2) or Table 4.

In the present embodiment, as shown in FIGS. 18 (a) and 21 (a), the distance between the first electrode 41 and the second electrode 42 (the surface of the first electrode 41 and the second electrode). The distance between the center of electrode 41x and the center of electrode 41x + n, and the distance between the center of electrode 42x and the center of electrode 42x + n is H. , N is preferably V: H≤1: 5, that is, H ZV≤5 is satisfied, more preferably, HZV≤2 is satisfied, and HZV is approximately 1 It is particularly preferable that HZV = 1.

That is, according to the present embodiment, the X-th electrode in one of the first electrode row and the second electrode row (hereinafter referred to as “first electrode row”). Is the Ax, x + n-th electrode is Ax + n (X and n are arbitrary integers of 1 or more), and the other electrode arranged at the position facing each of the electrodes Ax, Ax + n through the electrophoresis lane Each electrode in the electrode array (hereinafter referred to as “second electrode array”) is Bx, Bx + n, the distance between the surface of Ax and the surface of Bx is V, and the center of Ax is Assuming that the distance from the center of Ax + n is H, the control board 5 0 · 55 (1) The above η satisfies HZV≤5, and the phase difference of Ax + n with respect to Ax and the position of Bx Both phase differences are π, and the phase difference of Bx + n with respect to Ax is 0 Or (2) the above-mentioned n satisfies HZV≤5, and the phase difference of either Ax + n or Bx with respect to Ax is π 、 2, the other electrode It is preferable that an AC voltage is applied so that the phase difference of 3πΖ2 is π and the phase difference of Βχ + η with respect to Ax is π.

[0343] In this way, the control substrates 50 and 55 apply a voltage (AC voltage) applied to each electrode so that an AC voltage is applied to each electrode under a phase condition that satisfies the above relationship. By controlling, in the migration lane 3 (sample layer), the dielectric substance (for example, the particle 91 (91a)) is placed at the center of the space surrounded by the electrodes Ax, Ax + 2, Bx, Bx + 2. Can be trapped.

[0344] In this case, the control boards 50 and 55 specify the target electrodes to which an AC voltage is applied in the "first electrode array" and the "second electrode array" as Ax, Ax + n, Bx By combining the four electrodes Bx + n, which is the combined force of one unit, the voltage applied to each of the electrodes (AC voltage) is controlled so that the x of each unit is increased by one. Thus, the dielectric substance can be transported in a state where the dielectric substance (for example, the particles 91 (91a)) is trapped in the central portion of the space surrounded by the units. Therefore, according to the above configuration, the dielectric substance can be transported more efficiently than in the conventional TWD mode.

[0345] In the electrode structure described in Non-Patent Document 5, the sample (electrophoresis medium 90) that can be handled is limited to the height of the gold pole electrode. For example, only a single sample or a small amount of sample (eg, a cell) can be handled. In contrast, according to the present embodiment, since the electrode length is defined only by the size of the lower substrate 1 and the upper substrate 2, the quadrupole operation with four electrodes as one unit is performed. A large amount of specimen can be handled.

[0346] Note that the phase relationship of the AC signal described in the present embodiment does not necessarily satisfy the relationship described in each table above, and does not necessarily satisfy (approximate) the above description. If it is within a range, it may be in a state slightly deviated from the phases described in the above tables.

[0347] In other words, the AC signal has an external (that is, FPC17'46) force, and the migration electrode array 41Α · 42

Enter in Α. At this time, it is impossible to completely eliminate signal delay due to wiring resistance. The phase near the DC power supply 60 is far from the phase. Therefore, according to the present embodiment, the phase shift within the range in which the dielectrophoretic behavior is obtained is within the allowable range, and the phase conditions described in the above tables include the phase shift within the allowable range. May be.

[0348] According to the present embodiment, using the dielectrophoresis system 85 shown in Fig. 17 provided with a plurality of the above-described migration lanes 3, a plurality of particles 91 having different relative dielectric constants are identified by the difference in transport speed. can do. Specific examples thereof will be described below.

[0349] In this example, first, for example, two types of migration media 90 in which latex particles and silica particles are dispersed in respective solvents (the same solvent) are transferred to different migration lanes 3 respectively. Inject from one injection hole 5 in the discharge hole 5. Thereafter, in the same manner as in the tenth embodiment, for example, an alternating current with an amplitude of 4.5 V and a frequency of 50 kHz is applied under the phase condition satisfying the relationship of Table 1, and the high frequency in the first electrode row and the second electrode row is further applied. The target electrodes to be applied are moved sequentially. As a result, both latex particles and silica particles are conveyed to the injection / discharge holes 5 on the side opposite to the injection / discharge holes 5 into which the respective electrophoretic media 90 are injected. As described above, the dielectrophoretic force depends on the dielectric constant of the particles and the solvent, the frequency of the applied voltage, and the like. In this example, the dielectric constant of silica particles is higher than the dielectric constant of latex particles. For this reason, both particles have different migration speeds (conveyance speeds). Therefore, by applying a signal under the same conditions to a plurality of electrophoresis lanes 3 as described above, it is possible to select and identify particles having different relative dielectric constants.

[0350] As described above, also in the present embodiment, the use of the dielectrophoresis panel 10 (dielectrophoresis chip) having the plurality of electrophoresis lanes 3 as described above involves complicated setting of the experimental environment. Multiple different types of samples (for example, samples with different relative dielectric constants and viscosities of solvents, or samples with different physical properties (relative permittivity, etc.) of particles in the solvent) under the same conditions at the same time It is possible to put. Then, by using the dielectrophoresis panel 10 (dielectrophoresis chip) having a plurality of electrophoresis lanes 3 as described above, the type of the solvent 92 (electrophoresis medium 90) is changed for each electrophoresis lane 3, and a specific plurality of It is also possible to select a plurality of particles 91 at the same time, or the same solvent 92 (electrophoresis medium 90) can be selected at the same time by changing the electrode shape for each electrophoresis lane 3. Efficient particle sorting Is possible. Therefore, also in this embodiment, the dielectrophoresis chip and dielectrophoresis apparatus corresponding to a wide range of applications that have a wide application range with respect to test conditions, and Sarakuko can realize the dielectrophoresis system 85.

[Embodiment 11]

This embodiment will be described mainly based on FIG. In the present embodiment, differences from the eighth to tenth embodiments will be mainly described, and components having the same functions as those used in the eighth to tenth embodiments are described. Are given the same number

The description is omitted.

FIG. 23 is a plan view showing a schematic configuration of the main part of the dielectrophoresis panel 10 according to the present embodiment, and FIG. 23 is an outline of the electrophoresis lane 3 forming part of the dielectrophoresis panel 10. The configuration is shown.

[0353] As shown in Figs. 14 to 22 (a) to (c), in Embodiments 8 to 10, each electrode (first electrode 41, second electrode 42) in the electrophoresis electrode array 41Α and 42Α is used. In the above description, the electrode width and the electrode spacing are constant (LZS is 30 m) regardless of whether or not they overlap with the electrophoresis lane 3. That is, in Embodiments 8 to 10, the electrophoretic electrode arrays 41 and 42 have the stripe structures in which the electrodes in the electrophoretic electrode arrays 41 and 42 are provided in parallel with each other in the form of stripes. The case was described as an example.

[0354] However, in the present embodiment, as shown in FIG. 23, the electrode width and the electrode interval of each of the first electrode 41 and the second electrode 42 are the same as those of the first electrode 41 and the second electrode 42, as shown in FIG. The area where 2-electrode 42 (electrophoresis electrode array 41Α · 42Α) overlaps electrophoresis lane 3 is different from the other areas. Therefore, in the present embodiment, the electrode shapes of the first electrode 41 and the second electrode 42 are such that the first electrode 41 and the second electrode 42 (migration electrode array 41A-42A) overlap with the migration lane 3. And the other areas are different

[0355] In a dielectrophoresis experiment, when the narrow-pitch electrophoretic electrode arrays 41 Α and 42 配線 are formed, the wiring resistance of each electrophoretic electrode array 41A.42A is increased, and each of the electrophoretic electrode arrays 4 1 and 42 構成 is formed. Parasitic capacitance between electrodes (i.e. between first electrode 41 and 41 and second The parasitic capacitance between the electrodes 42 and 42 is also increased. For this reason, if the electrophoretic electrode arrays 41 and 42 having a narrow pitch are formed, it is inevitable that the influence of the attenuation and delay of the input AC voltage will increase.

Therefore, in the present embodiment, as shown in FIG. 23, a frame provided as an electrophoresis lane wall (interval holding layer 43) between the lower substrate 1 and the upper substrate 2 independently of each other. By providing a plurality of swimming lane walls 21 spaced apart from each other, a plurality of migration lanes 3 provided in parallel and spaced apart from each other are provided. Swim so that the electrode width and the electrode interval of each of the first electrode 41 and the second electrode 42 are different in the inter-lane region (gap 22), that is, outside the migration lane 3 (outside the frame). An electrode array 41A.42A is provided.

[0357] Specifically, each electrode in the electrophoresis lane 3, that is, an area (observation area 9) where the electrophoresis electrode arrays 41 アレイ and 42Α used as the observation area overlap with the electrophoresis lane 3 is observed. The first electrode 41 and the second electrode 42 are each formed, for example, with an electrode width (L) m and an electrode interval (S) 10 m (electrode pitch 20 m), while other regions, That is, the first electrode 41 and the second electrode 42 in the region not related to electrophoresis (that is, outside the electrophoresis lane 3) have an electrode width of 30 / ζ πι (and a maximum electrode interval of 30 / zm (that is, adjacent to each other). Electrode interval 30 μm at the center between electrophoresis lanes 3 and 3 and electrode pitch 60 μm at the center.

[0358] Thus, in the present embodiment, the first electrode 41 group and the second electrode 42 group in the electrophoresis lane 3 necessary for observation of the migration phenomenon (that is, the first electrode 41 group and the second electrode 42 in the observation region 9). Only the second electrode (group 42) is the required narrow-pitch wiring, and the other areas of the first electrode 41 group and the second electrode 42 group (the first electrode 41 group in the gap 22) are unrelated to the migration phenomenon. And the second electrode (group 42) is wide pitch wiring. As a result, the resistance of the entire electrophoresis electrode arrays 41 and 42 can be lowered, the parasitic capacitance can be reduced, and the attenuation and delay of the input AC voltage can be suppressed. The above-described wiring shape is only an example, and the present invention is not limited to this.

[Embodiment 12]

This embodiment will be described mainly based on FIG. In this embodiment, Differences from the eighth to eleventh embodiments will be mainly described, and components having the same functions as those used in the eighth to eleventh embodiments are denoted by the same reference numerals. The description is omitted.

FIG. 24 is another plan view showing a schematic configuration of the main part of the dielectrophoresis panel 10 according to the present embodiment, and FIG. 24 is a diagram of the electrophoresis lane 3 forming part of the dielectrophoresis panel 10. A schematic configuration is shown.

[0361] The dielectrophoresis panel 10 shown in FIG. 24 includes the electrode width and the electrode width of each of the first electrode 41 and the second electrode 42 in each of the three electrophoresis lanes 3 provided in parallel and spaced apart from each other. It differs from the dielectrophoresis panel 10 shown in Fig. 23 in that the electrode spacing (electrode pitch) is different. In the dielectrophoresis panel 10 shown in FIG. 24, the electrode width and the electrode interval in each of the first electrode 41 and the second electrode 42 are, for example, one substrate end (in this embodiment, for example, the lower substrate 1 end) The migration electrode arrays 41 and 42 are provided so that the migration lane 3 on the side farther from the mounting / connecting part 44) provided in the part becomes larger.

[0362] More specifically, the electrophoresis electrode arrays 41 and 42 shown in FIG. 24 overlap the electrophoresis lane 3 on the mounting portion 44 side in the region overlapping each electrophoresis lane 3 (the migration lane 3 at the left end in FIG. 24). Lane 3) In order of force, for example, electrode part P1 consisting of first electrode 41 group and second electrode 42 group with electrode width 10 μm, electrode interval 10 m (electrode pitch 20 μm), and electrode width 20 μm m, electrode interval 20 μm (electrode pitch 40 μm) electrode part P2 consisting of first electrode 41 group and second electrode 42 group, electrode width 30 μm, electrode interval 30 m (electrode pitch 60 μm) The first electrode 41 group and the second electrode 42 group force electrode part P3 in total 3 types of strip-like electrode parts P1, P2, and P3.

[0363] The first electrode 41 and the second electrode 42 between the electrode portions P1 and P2 have, for example, an electrode width of 30 m and an electrode interval of 10 m (electrode pitch at the electrode portion PI side end portion). 20 μm), and an electrode interval of 20 m (electrode pitch 40 m) at the end portion on the electrode P2 side. The electrode interval is determined by the array width of the electrophoresis electrode array 41Α · 42Α ( In the electrophoretic electrode array 41 A · 42A, the electrode width changes linearly according to the electrode width between the first electrodes 41 · 41 at both ends and the electrode width between the second electrodes 42 · 42 at both ends. Is formed. Furthermore, the first electrode 41 and the second electrode 42 between the electrode parts Ρ2 and Ρ3 have an electrode width of 30 μm and an electrode spacing of 20 μm at the electrode part P2 side end (electrode pitch of 40 μm). m), the electrode interval at the end of the electrode P3 side is 30 μm (electrode pitch m), and the array width of the migration electrode array 41 A · 42Α (the migration electrode array 41Α · 42Α The electrode width between the first electrodes 41 and 41 at both end portions and the electrode width between the second electrodes 42 and 42 at both end portions is linearly changed.

[0364] In this embodiment, as described in the third and fourth embodiments, as described above, the electrode shape (or electrode width, electrode spacing) of the migration electrode arrays 41 and 42 for each migration lane 3 is used. ) Can be used to select and identify a plurality of specific particles at the same time, and it is possible to efficiently select a plurality of particles. Another advantage is that it is possible to observe differences in migration behavior of multiple lanes 3 at once.

[Embodiment 13]

This embodiment will be described mainly based on FIGS. 25 (a) to (e). In the present embodiment, differences from the eighth to twelfth embodiments will be mainly described, and components having the same functions as those used in the eighth to twelfth embodiments are described. Are given the same number and their explanation is omitted.

FIG. 25 (a) is a plan view showing a schematic configuration of a main part of the dielectrophoresis panel 10 that works on the present embodiment. FIG. 25 (a) shows a schematic configuration of the electrophoresis lane 3 forming part of the dielectrophoresis panel 10. FIG. 25 (b) to (e) are plan views schematically showing the shapes of the first electrode 41 and the second electrode 42 in each electrophoresis lane 3 of the dielectrophoresis panel 10 shown in FIG. 25 (a). .

As shown in FIG. 25 (a), for example, as shown in FIG. 25 (a), the dielectrophoresis panel 10 according to the present embodiment includes a first electrode 41 and a second electrode 42 (in each of four electrophoresis lanes 3 provided in parallel. The shape of the electrophoresis electrode array 41A.42A) is different.

[0368] Specifically, among the four migration lanes 3, for example, at one end of the substrate, in the present embodiment, for example, at the end of the lower substrate 1, the mounting 'connection portion 44 is provided. In the closest migration lane 3A, the migration electrode array 41 A · 42 mm has a wiring width of 3 as shown in Fig. 25 (b). It has a structure (stripe-type electrode structure) in which 0 m linear first electrodes 41 and second electrodes 42 are provided in stripes. Next, in the electrophoresis lane 3B close to the mounting / connecting portion 44, the electrophoresis electrode array 41A.42A includes the linear first electrode 41 and the second electrode having a wiring width of 45 μm, as shown in FIG. The electrode 42 has a structure in which stripes are provided (stripe-type electrode structure). Then, in the electrophoresis lane 3C, which is next to the mounting lane connecting portion 44 next to the electrophoresis lane 3B, the electrophoresis electrode arrays 41Α and 42Α are chopped (with a wiring width of 30 m as shown in FIG. 25 (d)). A plurality of saw-shaped) first electrodes 41 and second electrodes 42 are arranged in parallel at equal intervals. Finally, in the electrophoresis lane 3D farthest from the mounting section 44 of the four electrophoresis lanes 3 described above, the electrophoresis electrode array 41Α and 42Α are shown in FIG. 25 (e). The mold has a structure in which a plurality of first electrodes 41 and second electrodes 42 are arranged in parallel at equal intervals. The electrode spacing (electrode pitch) in each of the first electrode 41 and the second electrode 42 is 60 μm.

[0369] The dielectrophoresis behavior is the same as that of the first electrode 41 and the second electrode 42 (electrophoresis electrode array 4) even when the same sample (electrophoresis medium 90) is used and driven with the same control voltage. Depending on the shape of 1Α · 42Α), it depends on the state of the electric field in the sample (electrophoresis medium 90).

[0370] Therefore, as in Embodiments 3, 4, and 12, in this embodiment, the electrode shapes and electrodes of the first electrode 41 and the second electrode 42 (electrophoresis electrode array 41Α · 42Α) for each electrophoresis lane 3 are as follows. By changing at least one of the width and the electrode spacing, it becomes possible to simultaneously select and identify a plurality of specific particles 91 in the electrophoresis medium 90. As a result, for example, the plurality of particles 91 can be efficiently selected. In addition, according to the above configuration, there is a merit that the difference in the migration behavior of the particles 91 in the plurality of migration lanes 3 can be collectively observed.

[0371] In the present embodiment, as described above, as the dielectrophoresis panel 10 that works on the present embodiment, the shapes of the first electrode 41 and the second electrode 42 (electrophoresis electrode array 41Α · 42Α), The dielectrophoresis panel in which at least one of the electrode width and the electrode interval is different for each electrophoresis lane 3 has been described as an example. However, the present embodiment is not limited to this.

[0372] For example, the dielectrophoresis panel 10 useful for the present embodiment is shown in FIG. 23 or FIG. As described above, a predetermined gap portion 22 (region between the migration lanes) is provided between the migration lanes 3 and 3 adjacent to each other, and the first electrode 41 and the second electrode are formed between the gap portion 22 and the migration lane 3. 42 (electrophoretic electrode array 41Α · 42Α) has a configuration in which at least one of the shape, electrode width, and electrode spacing is different! / ヽ!

[0373] For example, when the electrode shape of the migration electrode array 41Α · 42Α in the migration lanes 3A '3B' 3C is not a stripe shape, the electrode shape of the migration electrode array 41Α · 42Α in the gap 22 is a stripe structure. By shortening the wiring length, it is possible to suppress an increase in wiring resistance.

In addition, as shown in FIG. 23, the migration lane 3 and the gap 22 have different migration widths and spacings between the electrodes in the migration electrode array 41 and the migration electrode array 41. When the electrode shape of 42 mm is made different, the low resistance of the migration electrode array 41 Α · 42 Α (wiring) in the dielectrophoresis panel 10 can be achieved.

[0375] As described above, according to each of the above-described embodiments, compared to the case where particle floating (DEP mode) and transport (TWD mode) are controlled by only the electrode array arranged on one substrate. Thus, it is possible to provide a dielectrophoresis chip, a dielectrophoresis apparatus, and a dielectrophoresis system that can control the electrophoretic behavior more efficiently and obtain a stable dielectrophoretic behavior. Therefore, according to each of the above embodiments, the application range for the test conditions can be expanded and the observation environment can be greatly improved as compared to the conventional case. Furthermore, according to each of the above-described embodiments, the electrode array is arranged only on one substrate as described above, and more complicated electrophoretic behavior can be obtained as compared with the case. In addition, it is possible to provide a dielectrophoresis chip, a dielectrophoresis apparatus, and a dielectrophoresis system with higher measurement accuracy.

[0376] Also, as described above, in order to obtain a strong dielectrophoretic force when controlling the floating (DEP mode) and transport (TWD mode) of particles using only the electrode array arranged on one substrate, While it is necessary to increase the drive voltage applied to the electrode, the load on the drive system (drive IC (integrated circuit; integ rated circuit), etc.) increases. If the electrode array is arranged only on the substrate, the dielectrophoretic force can be increased without increasing the driving voltage as compared with the case. [0377] As described above, the dielectrophoresis chip is a dielectrophoresis chip that dielectrophores the dielectric substance by applying an electric field formed by an alternating voltage to a sample containing the dielectric substance. A plurality of electrophoretic lanes for dielectrophoretic migration of the dielectric substance are provided on a single substrate, and a plurality of electrode forces intersect with the electrophoretic lane, and an alternating current is applied to apply an electric field to the sample injected into the electrophoretic lane. An electrode array for dielectrophoretic migration of the dielectric substance by applying a voltage is provided, and each electrode in the electrode array is provided across the plurality of electrophoresis lanes.

[0378] According to the above configuration, a plurality of the electrophoresis lanes are provided on one substrate, and each electrode in the electrode array is provided across the plurality of migration lanes. That is, since each electrode is provided in common for a plurality of electrophoresis lanes, an alternating voltage (electrophoresis control voltage) that applies a dielectrophoretic force to the dielectric substance is applied to each electrode in each electrophoresis lane. Can be entered in batch. That is, according to the above configuration, when one type of signal is input to the electrode array, an electric field can be simultaneously applied to a plurality of electrophoresis lanes. Therefore, according to the above configuration, the migration control of a plurality of samples can be performed simultaneously.

[0379] For this reason, according to the above configuration, a plurality of different samples (for example, samples having different relative dielectric constants and viscosities of solvents, or physical property values of particles in the solvent) without complicated setting of the experimental environment. (Dielectric samples with different dielectric constants, etc.) can be placed under migration conditions under the same conditions at the same time, and a dielectrophoresis chip suitable for various test conditions with a wide range of application to test conditions is provided. Is possible.

[0380] Further, according to the above configuration, as described above, by using a dielectrophoresis chip having a plurality of electrophoresis lanes on a single substrate, the type of sample (for example, a medium such as a solvent) can be changed. It is possible to select specific particles at the same time by changing each electrode and changing the shape of the electrode for each electrophoresis lane. This makes it possible to efficiently select a plurality of particles. Therefore, according to the above configuration, it is possible to provide a dielectrophoresis chip corresponding to a wide range of uses.

[0381] In the dielectrophoresis chip, it is preferable that at least one of the shape, the electrode width, and the electrode interval of the electrode row is different between adjacent lanes. [0382] Even when the same sample is used and driven with the same control voltage, the dielectrophoretic behavior differs depending on the state of the electric field in the sample depending on the shape of the electrode array (electrode).

[0383] Therefore, according to the above configuration, by changing at least one of the shape of the electrode row, the electrode width, and the electrode interval between the electrophoresis lanes adjacent to each other as described above, It is possible to select and identify a plurality of specific dielectric materials at the same time, and it is possible to efficiently select a plurality of dielectric materials. In addition, according to the above configuration, there is a merit that it is possible to observe the difference in migration behavior of a plurality of migration lanes at once.

[0384] In addition, each of the electrophoresis lanes is provided apart from each other in the dielectrophoresis chip, and the electrode array is formed in each of the electrophoresis lanes and in an area between the electrophoresis lanes. It is preferable that at least one of the shape, electrode width, and electrode spacing is different.

[0385] According to the above configuration, for example, only the electrode rows in the electrophoresis lane necessary for observation of the migration phenomenon are required to have a narrow pitch wiring, and the other electrode rows in the region unrelated to the migration phenomenon. By using wide-pitch wiring (regions between the migration lanes), the resistance of the entire electrode array is lowered, and parasitic capacitance is reduced, thereby suppressing attenuation and delay of the input AC voltage. It becomes possible.

[0386] According to the above configuration, for example, in the case where the electrode shape force in the electrode row in the migration lane is not S stripe shape, the electrode shape of the electrode row in the region between the migration lanes is a stripe structure. It is also possible to suppress the increase in wiring resistance by shortening the wiring length.

[0387] Thus, according to the above-described configuration, at least one of the shape, the electrode width, and the electrode interval of the electrode array is formed in each electrophoresis lane and in an area between the electrophoresis lanes. By making the conditions different, it is possible to reduce the resistance of the electrode array.

[0388] In addition, the dielectrophoresis chip is provided with an electrophoresis lane wall separating the electrophoresis lanes on the substrate, and at least a region where the electrophoresis lane wall is formed. It is preferable that a protective film covering the above electrode array is provided in a region excluding a part. Yes.

[0389] According to the above configuration, since the protective film that covers the electrode array is provided on the substrate, the migrating dielectric substance is adsorbed to the electrode array in the electrophoresis lane. Can be prevented. The protective film is provided in a region on the substrate excluding at least a part of the region where the migration lane wall is formed, whereby adhesion between the protective film and the material of the migration lane wall is achieved. Even if it is bad, if you can get enough adhesion!

[0390] Further, in the dielectrophoresis chip, each electrophoresis lane is provided on the substrate, the substrate, an electrophoresis lane wall separating the electrophoresis lanes, and the substrate through the electrophoresis lane wall. The migration lane wall includes a spacer that maintains a distance between the substrate and the counter substrate disposed to face the substrate. , Prefer to be.

[0391] According to the above configuration, when the migration lane is formed between a pair of substrates in this way, the migration lane wall internally holds a spacer between the pair of substrates. By containing the above, there is an effect that the lane height of the electrophoresis lane can be kept uniform.

[0392] Further, it is preferable that the dielectrophoresis chip has input terminal portions for inputting the same voltage from both ends of each electrode to both ends of each electrode in the electrode row. .

[0393] According to the above configuration, at the time of the dielectrophoresis test, the same voltage, that is, the same AC voltage is simultaneously input to each electrode from both ends of each electrode in the electrode array.

[0394] Therefore, according to the above configuration, the same voltage is input from both ends of each electrode, so that the voltage is input to each electrode only from one side of each electrode. As a result, the effects of attenuation and delay of the input voltage signal due to wiring resistance and parasitic capacitance can be suppressed.

[0395] Also, in the dielectrophoresis chip, each electrophoresis lane is provided on the substrate, the electrophoresis lane wall provided on the substrate, and separating each electrophoresis lane, and the electrophoresis lane wall. Each of the electrophoresis lanes is disposed between the substrate and the opposite substrate disposed opposite to the substrate. It is preferable to have an inlet for injecting the above sample! /.

[0396] According to the above configuration, when the migration lane is formed between a pair of substrates in this way, an injection port for injecting the sample into the migration lane is provided with a hole or the like in the substrate. Compared with the case of forming by opening, etc., it is possible to prevent the entry of impurities into the electrophoresis lane and to relatively suppress the defect occurrence rate of the dielectrophoresis chip.

[0397] Further, according to the above configuration, the injection port is inevitably formed between the pair of substrates due to the pattern of the migration lane wall. Therefore, a separate material or process is used to form the injection port. Do not need. Therefore, according to the above configuration, the dielectrophoresis chip can be formed more efficiently than the case where the dielectrophoresis chip is provided with the injection port by drill or the like.

[0398] In addition, the electrode array includes a first electrode array and a second electrode array in which a plurality of electrodes are arranged in the lane direction of the migration lane, and the first electrode array and the second electrode array are provided. Each of the electrode arrays applies an electric field to the sample injected into the migration lane by forming an electric field with an alternating voltage between the electrodes in each electrode array, and the first electrode array and the second electrode array The electrodes in the first electrode array and the second electrode array are opposed to each other through the electrophoresis lane and intersect with the electrophoresis lane. It is preferable to be provided across a plurality of electrophoresis lanes.

[0399] As described above, when a dielectric substance is transported, separated, and collected using dielectrophoresis, the dielectric material is applied to the electrophoretic electrode array 6 provided in the dielectrophoresis panel 10 by the DEP mode. It is necessary to apply a signal for levitating or a signal for transporting the dielectric material to the destination by TWD mode.

[0400] As described above, for example, when particles are migrated (conveyed) as the dielectric substance, the electrophoretic particles migrating by the dielectrophoresis have a small shape, size, and dielectric constant. Do not behave ideally due to various factors such as solvent viscosity resistance There is.

[0401] In particular, in the above-described conventional semiconductor chip substrate (dielectrophoresis chip substrate) and particle transport apparatus using the same, it is difficult for the migrating particles to obtain stable dielectrophoretic behavior, It is easy to cause a problem that force cannot be efficiently conveyed.

[0402] On the other hand, when the above electric field is applied only to the single-sided force of the electrophoresis lane by applying the electric field formed by the AC voltage to the sample from separate electrode arrays provided across the electrophoresis lane. As compared with the above, it is possible to obtain a stable dielectrophoretic behavior of the dielectric material, and it is possible to efficiently transport the dielectric material (dielectrophoresis).

[0403] That is, according to the above configuration, each electrode in the first electrode row and the second electrode row is provided to face each other via the migration lane. An electrode for applying an electric field formed by an alternating voltage is provided on the sample so as to sandwich the injected sample. Therefore, an electric field formed by an AC voltage is applied to the dielectric material from both surfaces of the sample (sample layer) containing the dielectric material, that is, two opposing surfaces so as to sandwich the dielectric material. Therefore, compared to the case where the electric field is applied only from one side (one side) of the sample (sample layer), the behavior of dielectrophoresis of the inductive substance can be stabilized.

[0404] Moreover, when an electrode array is formed only on one side of the electrophoresis lane, in order to obtain a strong dielectrophoretic force, it is necessary to increase the drive voltage applied to the electrode, and the drive system (drive IC (integrated If the load of the integrated circuit) is increased, it will cause problems!

[0405] However, according to the above-described configuration, the electric field is applied to the dielectric substance from both sides of the sample (sample layer). Therefore, the dielectric substance is applied only from one side of the sample (sample layer). Compared with the case where an electric field is applied, the electric field exerted on the dielectric substance becomes stronger. For this reason, according to the above configuration, the dielectrophoretic force of the dielectric substance can be increased without increasing the driving voltage, compared to the case where the electric field is applied only from one side of the sample (sample layer). Can do.

[0406] Thus, according to the above configuration, a dielectrophoresis chip that can control the dielectrophoretic behavior of a dielectric substance more efficiently than before and can obtain a stable dielectrophoretic behavior is provided. There is an effect that can be done. [0407] According to the above-described configuration, each electrode in the first electrode row and the second electrode row is provided via the migration lane, for example. It is also possible to apply AC voltages having different conditions such as phase and amplitude to the electrode array and the second electrode array. For this reason, when the electric field is applied only from one side (one side) of the sample (sample layer), that is, compared to the case where one electrode array is not used, the migration behavior is more efficient. It is also possible to control, or to control more complicated migration behavior.

[0408] Further, according to the above configuration, a case where a voltage is applied to one of the first electrode row and the second electrode row, and a case where a voltage is applied to both the electrode rows, Can be used properly during the same experiment. As a result, the dielectrophoretic force can be adjusted without changing the driving voltage.

[0409] In the dielectrophoresis chip, the first electrode row and the second electrode row may have the same shape in a region where both electrode rows and the electrophoresis lane face each other. Favored ,.

[0410] The first electrode array and the second electrode array are ideally suited from the viewpoints of the collection effect of the dielectric substance (dielectric particles) at the electrode ends, the control of the levitation force, and the transport control. It is desirable that they overlap with each other in plan view. When the first electrode array and the second electrode array overlap each other in a planar manner, for example, from both surfaces of the sample (sample layer) containing the dielectric substance, that is, from two opposing surfaces, respectively. A symmetrical electric field can be applied. In addition, since the first electrode row and the second electrode row are exactly overlapped in a plane, the control of the levitation force and the transport control of the dielectric substance are facilitated. For this reason, it is desirable that the first electrode row and the second electrode row have the same shape in a region where both electrode rows and the migration lane face each other.

[0411] Further, the migration lane has a facing surface of each of the migration lanes facing each of the electrode rows in at least a part of a region where the migration lane faces the first electrode row and the second electrode row. Each of the electrodes is transparent, and at least a part of the electrode facing the transparent region in the migration lane in at least one of the first electrode row and the second electrode row is a transparent electrode. It is preferable that it is formed.

[0412] In addition, the migration lane includes at least one of the facing surfaces of each of the electrode rows in at least a part of a region where the migration lane and the first electrode row and the second electrode row face each other. The first electrode row and the second electrode row of the first electrode row and the second electrode row opposite to the transparent region in the migration lane are the electrodes in the portion facing the transparent region in the migration lane. It is preferable that at least a part of is formed of a transparent electrode.

[0413] When non-transparent electrodes are formed on both surfaces of the electrophoresis lane, optical imaging at least in the electrode region becomes impossible, and the observation conditions are limited.

[0414] Therefore, as described above, for example, (1) the migration lane is in at least a part of a region where the migration lane and the first electrode row and the second electrode row face each other (that is, overlap). The facing surfaces of the electrophoresis lanes to the electrode rows are transparent, and are opposed to the transparent regions in the electrophoresis lane in at least one of the first electrode row and the second electrode row. Or (2) the migration lane is such that the migration lane is opposed to the first electrode row and the second electrode row (that is, overlapped). At least one of the surfaces facing each of the electrode rows in at least a part of the region to be transparent is transparent, and the transparent region in the electrophoresis lane of the first electrode row and the second electrode row Electrode columns to counter, at least a portion of the transparent region facing the portion of the electrode in the electrophoresis lanes are formed in the transparent electrode! Thus, it is possible to easily observe the dielectrophoretic behavior of the dielectric substance in the electrode region and to perform optical imaging.

[0415] In particular, the migration lane includes the electrodes of the migration lane in at least a part of a region where the migration lane and the first electrode row and the second electrode row face each other (that is, overlap). The surface facing the column is transparent, and the first electrode column and the second electrode column are transparent at least part of the electrodes facing the transparent region in the migration lane. By being formed of electrodes, when observing the sample, any directional force above and below the swimming lane can be observed in the electrode region. For this reason, according to said structure, selection of an observation direction is attained. In addition, according to the above configuration, observation with a transmitted light and photographing (observation with a transmission mode, photographing) can be performed, so that an observation system by projection can be constructed. Therefore, according to the above configuration, it is possible to provide a dielectrophoresis chip in which the restriction of the observation conditions is relaxed. As described above, the dielectrophoresis chip can be observed and photographed with transmitted light. Therefore, it is very effective for observation using a lot of fluorescence observation and filtering.

[0416] In addition, at least one of the first electrode row and the second electrode row includes a metal electrode in a portion other than the portion facing the transparent region in the migration lane. Is preferred!

[0417] When an electrode of the same shape is formed of a transparent conductive material and a metal material, an electrode formed of the transparent electrode material (transparent electrode) is compared with an electrode formed of a metal material (metal electrode). The resistance is relatively high. For this reason, in order to keep the resistivity as low as possible, it is preferable that the electrode row has a metal electrode in the electrode row, such as a two-layer structure of a transparent electrode and a metal electrode. Therefore, by providing the metal electrode in a portion other than the portion facing the transparent region in the electrophoresis train in the electrode example (that is, the portion not facing), observation in the electrode region is possible. On the other hand, the resistance of the entire electrode array can be reduced as compared with the case where the electrode array is formed of only transparent electrodes, and the parasitic capacitance between the electrodes can be reduced. Therefore, according to the above configuration, observation in the electrode region is possible, and attenuation and delay of the input voltage (electrophoresis control input voltage) can be suppressed. The effect is that a dielectrophoresis chip can be provided.

[0418] Further, in the dielectrophoresis chip, the electrophoresis lane includes the electrophoresis lane in at least a part of a region where the electrophoresis lane and the first electrode row and the second electrode row face each other (that is, overlap). The surfaces facing the respective electrode rows are transparent, and the first electrode row and the second electrode row are arranged in a portion facing the transparent region in the migration lane. It is preferable that the electrode force facing each other via the migration lane in the second electrode row is provided with a portion where both are transparent electrode forces and a portion where a metal electrode is provided on at least one side. Better!/,.

[0419] As described above, in the first electrode row and the second electrode row, in the portion facing the transparent region in the migration lane, the above in the first electrode row and the second electrode row. By providing a portion in which both electrode forces facing each other through the electrophoresis lane are transparent electrode forces and a portion in which at least one metal electrode is provided, the resistance of the entire electrode array can be reduced. Compared to the case where the electrode array is formed only with transparent electrodes, it should be kept low. In addition to reducing the parasitic capacitance between the electrodes, observation and photographing with transmitted light that passes through the transparent electrode (transmission mode) and reflection from the metal electrode (epi-illumination) observation and photographing (epi-illumination) There is an effect that it is possible to provide a dielectrophoresis chip that can be used in any mode.

[0420] Further, in the dielectrophoresis chip, it is preferable that the electrophoresis lanes adjacent to each other differ in at least one condition among the shape of the electrode row, the electrode width, and the electrode interval.

[0421] Even when the same sample is used and driven with the same control voltage, the dielectrophoretic behavior varies depending on the state of the electric field in the sample depending on the shape of the electrode array (electrode).

[0422] Therefore, according to the configuration described above, by changing at least one of the shape of the electrode row, the electrode width, and the electrode interval between the electrophoresis lanes adjacent to each other as described above, It becomes possible to select and identify a plurality of specific dielectric materials at the same time, and it is possible to efficiently select a plurality of dielectric materials. In addition, according to the above configuration, there is a merit that the difference in migration behavior in a plurality of migration lanes can be observed collectively.

[0423] Further, in the dielectrophoresis chip, the electrophoresis lanes are provided apart from each other, and the shape of the electrode row and the electrode width are determined in the electrophoresis lanes and in the region between the electrophoresis lanes. It is preferable that at least one of the electrode spacing is different.

[0424] According to the above configuration, for example, only the electrode array in the electrophoresis lane necessary for observation of the electrophoresis phenomenon is used as the narrow pitch wiring required, and the other electrode arrays in the region unrelated to the electrophoresis phenomenon. By using wide-pitch wiring (regions between the migration lanes), the resistance of the entire electrode array is lowered, and parasitic capacitance is reduced, thereby suppressing attenuation and delay of the input AC voltage. It becomes possible.

[0425] Also, according to the above configuration, for example, when the electrode shape force in the electrode row in the migration lane is not S stripe shape, the electrode shape of the electrode row in the region between the migration lanes is a stripe structure. It is also possible to suppress the increase in wiring resistance by shortening the wiring length. [0426] Thus, according to the above-described configuration, at least one of the shape, the electrode width, and the electrode interval of the electrode array is formed in each electrophoresis lane and in a region between the electrophoresis lanes. By making the conditions different, it is possible to reduce the resistance of the electrode array.

[0427] Further, as described above, the dielectrophoresis apparatus has the configuration including the dielectrophoresis chip. The dielectrophoresis system has a configuration including the dielectrophoresis apparatus as described above. In other words, the dielectrophoresis system includes the dielectrophoresis chip and has the configuration described above.

[0428] As described above, the dielectrophoresis chip included in the dielectrophoresis apparatus and the dielectrophoresis system includes a plurality of electrophoresis lanes for dielectrophoresis of the dielectric substance on a single substrate, and intersects the electrophoresis lanes. A plurality of electrode forces, and an electrode array for inducing electrophoresis of the dielectric substance by applying an alternating voltage to apply an electric field to the sample injected into the electrophoresis lane, and each electrode in the electrode array The dielectrophoresis apparatus and the dielectrophoresis system are provided across the plurality of electrophoretic lanes, so that the dielectrophoresis apparatus and the dielectrophoresis system provide an alternating voltage (electrophoresis control voltage) that applies a dielectrophoretic force to the dielectric substance. It is possible to collectively input to each electrode in each electrophoresis lane of the dielectric swimming chip. That is, according to each of the above configurations, an electric field can be simultaneously applied to a plurality of electrophoresis lanes when one type of signal is input to the electrode array. Therefore, according to each of the above configurations, the migration control of a plurality of samples can be performed simultaneously in a lump.

[0429] For this reason, according to each of the above-described configurations, a plurality of different types of samples (for example, samples having different relative dielectric constants and viscosities of solvents, or physical property values of particles in the solvent) without complicated setting of the experimental environment. (Samples with different relative dielectric constants, etc.) can be placed under electrophoresis conditions under the same conditions at the same time. It is possible to provide an electrophoresis system.

[0430] Also, according to each of the above configurations, as described above, by using a dielectrophoresis chip having a plurality of electrophoresis lanes on one substrate, the type of sample (for example, a medium such as a solvent) can be changed. Each specific particle is selected at the same time, and the same medium such as solvent is selected, and the specific shape is selected simultaneously by changing the electrode shape for each electrophoresis lane. It is also possible to select a plurality of particles efficiently. Therefore, according to each of the above configurations, there is an effect that it is possible to provide a dielectrophoresis apparatus and a dielectrophoresis system corresponding to a wide range of uses.

[0431] In addition, as described above, the dielectrophoresis apparatus includes the first electrode array and the second electrode array, each having a plurality of electrodes arranged in the lane direction of the electrophoresis lane, as the dielectrophoresis chip. And, as described above, each of the electrodes in the first electrode row and the second electrode row is provided with a dielectrophoresis chip provided opposite to each other via the electrophoretic lane. An electric field formed by an alternating voltage is applied to the conductive material so that the dielectric material is sandwiched between both surfaces of the sample (sample layer) containing the dielectric material, that is, two opposing surfaces. Therefore, compared to the case where the electric field is applied only from one side (one side) of the sample (sample layer), the behavior of dielectrophoresis of the dielectric substance can be stabilized.

[0432] Further, according to the above configuration, since the electric field is applied to both sides of the sample (sample layer), the electric field is applied only to the single-sided force of the sample (sample layer). Compared with the case where the electric field is applied, the electric field exerted on the dielectric substance becomes stronger. For this reason, according to the above configuration, the dielectrophoretic force of the dielectric substance can be increased without increasing the driving voltage, compared to the case where the electric field is applied only from one side of the sample (sample layer). it can.

[0433] Therefore, according to the above configuration, it is possible to provide a dielectrophoresis apparatus that can control the dielectrophoretic behavior of a dielectric substance more efficiently than before and can obtain a stable dielectrophoretic behavior. be able to.

[0434] According to the above-described configuration, each of the electrodes in the first electrode row and the second electrode row is provided via the migration lane. It is also possible to apply AC voltages having different conditions such as phase and amplitude to the electrode array and the second electrode array. For this reason, when the electric field is applied only from one side (one side) of the sample (sample layer), that is, compared to the case where one electrode array is not used, the migration behavior is more efficient. It is also possible to control, or to control more complicated migration behavior.

[0435] Further, according to the above configuration, a case where a voltage is applied to one of the first electrode row and the second electrode example, and a case where a voltage is applied to both the electrode rows, The same Can be used properly during the experiment. As a result, the dielectrophoretic force can be adjusted without changing the driving voltage.

[0436] The dielectrophoresis apparatus includes a control unit that controls a voltage applied to the first electrode row and the second electrode row, and the control unit includes the first electrode row and the first electrode row. In the two electrode rows, the AC voltages having different phases are applied to the electrodes adjacent to each other, and the AC voltages having the same phase are applied to the electrodes facing each other via the migration lane. I like to talk.

[0437] According to the above configuration, AC voltages having different phases are applied to the electrodes adjacent to each other in the first electrode row and the second electrode row, and the migration train is An AC voltage having the same phase is applied to the electrodes facing each other through the two electrodes, so that the dielectric substance can be applied to both surfaces of the sample (sample layer) containing the dielectric substance, that is, from the two opposing faces. Each can apply a symmetric electric field. Therefore, according to the above configuration, there is an effect that a strong dielectrophoretic force can be obtained.

[0438] Also, in this case, the control unit applies an AC voltage so that the phases are sequentially shifted by π with respect to the electrodes adjacent to each other in the first electrode row and the second electrode row, respectively. I prefer it to be something!

[0439] As described above, the levitation force of the dielectric substance is efficiently controlled by applying the AC voltage so that the phases are sequentially shifted by π to the electrodes adjacent to each other in each electrode row. If you can, it will have a positive effect.

[0440] Further, the control unit applies an AC voltage so that the phases are sequentially shifted by πΖ2 to the electrodes adjacent to each other in the first electrode row and the second electrode row, respectively. Preferably there is.

[0441] As described above, the above-described dielectric substance can be efficiently transported by applying the AC voltage so that the phase is sequentially shifted by πΖ2 to the electrodes adjacent to each other in each electrode row. If you can!

[0442] Further, the dielectrophoresis apparatus includes a control unit that controls a voltage applied to the first electrode array and the second electrode array, and the control section includes the first electrode array and the first electrode array. When AC voltages with different phases are applied to the electrodes adjacent to each other in the two electrode arrays, Both preferably have a configuration in which alternating voltages having different phases are applied to the electrodes facing each other via the electrophoresis lane.

[0443] According to the above configuration, there is no need to switch between the DEP mode and the TWD mode, and the dielectric material can be separated and transported only by switching the target electrode to which the voltage is applied. In addition, the dielectric material can be easily separated and transported more efficiently. In addition, according to the above configuration, since the dielectric material is transported while giving a levitating force to the dielectric material, the dielectric material is difficult to settle and has both the effect of habit.

[0444] In this case, the control unit (1) sets the Xth electrode in the first electrode row to Ax, X

The + n-th electrode is Ax + n (x and n are integers of 1 or more), and the second electrode array disposed at a position facing each of the electrodes Ax and Ax + n through the electrophoresis lane If the distance between the surface of Ax and the surface of Bx is V and the distance between the center of Ax and the center of Ax + n is H, Satisfying HZV≤5, the phase difference of Ax + n and Bx with respect to Ax is π, and the AC voltage is applied so that the phase difference of Bx + n with respect to Ax is 0. Or (2) the Xth electrode in the first electrode row is Ax, and the x + nth electrode is Ax + n (X and n are integers of 1 or more), The electrodes in the second electrode array arranged at positions facing the electrodes Ax and Ax + n are Bx and Bx + n, respectively, and the distance between the surface of Ax and the surface of Bx is V age, Assuming that the distance between the center of Ax and the center of Ax + n is H, the above-mentioned n satisfies HZV≤5 and the phase difference of one of the above-mentioned electrodes Ax + n and Bx with respect to Ax Is preferably πΖ2, the phase difference of the other electrode is 3πΖ2, and an AC voltage is applied so that the phase difference of Bx + n with respect to Ax is π.

[0445] In any of the above cases, the electrodes Ax, Ax + 2, Bx in the electrophoresis lane (sample layer) can be applied to the electrodes by applying an alternating voltage under the phase condition satisfying the relationship described above. , Bx + 2 has the effect of trapping the dielectric material in the center of the space.

[0446] In this case, the control unit intersects the first electrode row and the second electrode row. It is preferable that the target electrode to which the current voltage is applied is moved sequentially so that one unit of X, which also has the combined force of the four electrodes Ax, Ax + n, Bx, and Bx + n, increases by one. .

[0447] Thus, the target electrode to which the AC voltage is applied in the first electrode row and the second electrode row is composed of a combination of four electrodes Ax, Ax + n, Bx, Bx + n 1 By sequentially moving the unit so that X increases by one, the dielectric material is trapped in the center of the space surrounded by the unit to which the AC voltage is applied, and the dielectric is trapped. The substance can be transported. Therefore, according to the above configuration, the dielectric substance can be efficiently transported as compared with the conventional TWD mode.

[0448] Further, the dielectrophoresis system force includes a first electrode row and a second electrode row each having a plurality of electrodes arranged in the lane direction of the electrophoresis lane, and as described above, the first electrode row And a second dielectrophoresis chip provided with the respective electrodes in the second electrode array facing each other through the electrophoretic lane, or a dielectrophoresis device including the dielectrophoresis chip. Since the electric field formed by the AC voltage is applied to both the surfaces of the sample (sample layer) containing the dielectric substance so as to sandwich the dielectric substance, the electric field formed by the AC voltage is applied to the conductive substance. Compared with the case where the electric field is applied only from one side (one side) of the sample (sample layer), the behavior of dielectrophoresis of the dielectric substance can be stabilized.

[0449] Further, according to the above configuration, the electric field is applied to the dielectric substance from both sides of the sample (sample layer), so the electric field is applied only to the single-sided force of the sample (sample layer). Compared with the case where the electric field is applied, the electric field exerted on the dielectric substance becomes stronger. For this reason, according to the above configuration, the dielectrophoretic force of the dielectric substance can be increased without increasing the driving voltage, compared to the case where the electric field is applied only from one side of the sample (sample layer). it can.

[0450] Therefore, according to the above configuration, there is provided a dielectrophoresis system that can control the dielectrophoretic behavior of a dielectric substance more efficiently than before and can obtain a stable dielectrophoretic behavior. be able to.

[0451] According to the above-described configuration, each of the electrodes in the first electrode row and the second electrode row is provided via the migration lane. of It is also possible to apply AC voltages having different conditions such as phase and amplitude to the electrode array and the second electrode array. For this reason, when the electric field is applied only from one side (one side) of the sample (sample layer), that is, compared to the case where one electrode array is not used, the migration behavior is more efficient. It is also possible to control, or to control more complicated migration behavior. Therefore, according to the above configuration, there is an effect that it is possible to provide a dielectrophoresis system in which the observation environment is improved as compared with the conventional case where the application range for the test conditions is wide.

[0452] Furthermore, according to the above configuration, a case where a voltage is applied to one of the first electrode row and the second electrode row, and a case where a voltage is applied to both the electrode rows, Can be used properly during the same experiment. As a result, the dielectrophoretic force can be adjusted without changing the driving voltage.

[0453] Each of the dielectrophoresis chip, the dielectrophoresis apparatus, and the dielectrophoresis system described above can be suitably applied to, for example, a bio-research microarray such as separation and detection of specific cells.

[0454] The present invention is not limited to the above-described embodiments, and various modifications are possible within the scope of the claims, and the technical means disclosed in the different embodiments are appropriately combined. Embodiments obtained in this manner are also included in the technical scope of the present invention. Industrial applicability

[0455] The dielectrophoresis chip, dielectrophoresis apparatus, and dielectrophoresis system according to the present invention are used for bio research microarrays such as separation and detection of specific cells, for example, dielectrics such as biomolecules and resin beads. The present invention can be suitably used in a chemical analysis system that conveys a sex substance by dielectrophoretic force. These chemical analysis systems can be widely applied in the medical field, food hygiene field, environmental monitoring, etc., and blood cell components such as red blood cells, white blood cells, and lymphocytes obtained by separating blood; Escherichia coli, Listeria monocytogenes Targeting a wide range of dielectric substances such as DNA (deoxyribonucleic acid; deoxyribose nucleic acid), tannoic acid, etc., for example, DNA, proteins, cells, etc. It is preferably used for applications such as analysis (reaction 'detection' separation 'transport); chemical synthesis (microplant);

Claims

The scope of the claims

[1] A dielectrophoresis chip that dielectrophores the dielectric substance by applying an electric field formed by an alternating voltage to a sample containing the dielectric substance,

In order to provide a plurality of migration lanes for dielectrophoretic migration of the dielectric substance on a single substrate, and to apply an electric field to the sample injected into the migration lane with a plurality of electrode forces intersecting the migration lane. An electrode array for causing the dielectric substance to dielectrically move by applying an AC voltage to the

Each electrode in the electrode array is provided across the plurality of electrophoresis lanes.

2. The dielectric swimming chip according to claim 1, wherein at least one of the shape, the electrode width, and the electrode interval of the electrode row is different between adjacent lanes.

[3] The electrophoresis lanes are provided apart from each other, and in the electrophoresis lanes and in the area between the electrophoresis lanes, the electrode row shape, electrode width, and electrode spacing are small. 2. The dielectrophoresis chip according to claim 1, wherein at least one condition is different.

[4] Electrophoresis lane walls separating the respective electrophoresis lanes are provided on the substrate, and the electrode array is provided in a region excluding at least a part of the region where the electrophoresis lane walls are formed. 2. The dielectrophoresis chip according to claim 1, further comprising a protective film for covering.

[5] Each electrophoresis lane is formed of the substrate, an electrophoresis lane wall that is provided on the substrate and separates the electrophoresis lanes, and a counter substrate that is arranged to face the substrate via the electrophoresis lane wall. Has been

The induction lane wall according to claim 1, wherein the electrophoresis lane wall includes a spacer that maintains a space between the substrate and a counter substrate disposed opposite to the substrate. Electrophoresis chip.

6. The dielectric swimming device according to claim 1, wherein input terminals for inputting the same voltage from both ends of each electrode are provided at both ends of each electrode in the electrode array. Moving chip.

[7] Each electrophoresis lane is formed by the substrate, an electrophoresis lane wall that is provided on the substrate and separates the electrophoresis lanes, and a counter substrate that is arranged to face the substrate via the electrophoresis lane wall. And

Each of the electrophoresis lanes has an inlet for injecting the sample into the electrophoresis lane between the substrate and a counter substrate disposed to face the substrate. Item 1. The dielectrophoresis chip according to item 1.

[8] The electrode array includes a first electrode array and a second electrode array each including a plurality of electrodes arranged in the lane direction of the electrophoresis lane,

The first electrode array and the second electrode array apply an electric field to the sample injected into the migration lane by forming an electric field by an alternating voltage between the electrodes in each electrode array, and The respective electrodes in the first electrode row and the second electrode row face each other through the electrophoresis lane and are provided so as to cross the migration lane. 2. The dielectrophoresis chip according to claim 1, wherein each electrode in the second electrode array is provided across the plurality of electrophoresis lanes.

[9] The first electrode row and the second electrode row have the same shape in the area where both electrode rows and the electrophoresis lane face each other! 9. The dielectrophoresis chip according to claim 8, wherein:

[10] In the migration lane, at least a part of the region where the migration lane and the first electrode row and the second electrode row face each other, a surface facing the electrode row of the migration lane is transparent. And at least a part of the electrode of the at least one electrode row of the first electrode row and the second electrode row facing the transparent region in the electrophoresis lane is formed of a transparent electrode. 9. The electrophoresis chip according to claim 8, wherein

[11] In the electrophoresis lane, at least one of the facing surfaces of the electrode lanes in at least a part of a region where the electrophoresis lanes are opposed to the first electrode row and the second electrode row is transparent, In addition, among the first electrode row and the second electrode row, the electrode row facing the transparent region in the migration lane is at least a part of the portion of the electrode facing the transparent region in the migration lane. 9. The dielectrophoresis chip according to claim 8, wherein is formed of a transparent electrode.

[12] The electrophoresis lane has a transparent surface facing each electrode row of the migration lane in at least a part of a region where the migration lane faces the first electrode row and the second electrode row. And the first electrode row and the second electrode row are characterized in that at least a part of the electrode facing the transparent region in the electrophoresis train is formed of a transparent electrode. The dielectrophoresis chip according to claim 1.

[13] At least one of the first electrode row and the second electrode row includes a metal electrode in a portion other than a portion facing the transparent region in the electrophoresis lane. The dielectrophoresis chip according to any one of claims 10 to 12.

[14] In the electrophoresis lane, at least a part of a region where the electrophoresis lane and the first electrode row and the second electrode row face each other, a surface facing the electrode row of the electrophoresis lane is transparent. And the first electrode row and the second electrode row include the migration lanes in the first electrode row and the second electrode row in a portion facing the transparent region in the migration lane. 9. The dielectrophoresis chip according to claim 8, comprising a portion in which both of the electrode forces facing each other are transparent electrode forces, and a portion in which at least one of the metal electrodes is provided.

[15] The at least one condition among the shape, the electrode width, and the electrode interval of the first electrode row and the second electrode row differs between electrophoresis lanes adjacent to each other. 8. The dielectrophoresis chip according to 8.

[16] The electrophoresis lanes are provided apart from each other, and in the electrophoresis lanes and in a region between the electrophoresis lanes, the shapes of the first electrode row and the second electrode row, 9. The dielectrophoresis chip according to claim 8, wherein at least one of the electrode width and the electrode interval is different.

[17] A dielectrophoresis chip that dielectrophores the dielectric substance by applying an electric field formed by an alternating voltage to the sample containing the dielectric substance,

The dielectrophoresis chip is

In order to provide a plurality of migration lanes for dielectrophoretic migration of the dielectric substance on a single substrate, and to apply an electric field to the sample injected into the migration lane with a plurality of electrode forces intersecting the migration lane. Dielectric swimming of the dielectric material by applying an AC voltage to An electrode array to be moved,

[18] The electrode array includes a first electrode array and a second electrode array each including a plurality of electrodes arranged in the lane direction of the electrophoresis lane,

The first electrode array and the second electrode array apply an electric field to the sample injected into the migration lane by forming an electric field by an alternating voltage between the electrodes in each electrode array, and The respective electrodes in the first electrode row and the second electrode row face each other through the electrophoresis lane and are provided so as to intersect the migration lane. Each electrode in the electrode array is provided across the plurality of electrophoresis lanes, and

A control unit configured to control a voltage applied to the first electrode row and the second electrode row, wherein the control unit is provided for electrodes adjacent to each other in the first electrode row and the second electrode row, respectively. 18. The dielectrophoresis device according to claim 17, wherein AC voltages having different phases are applied, and AC voltages having the same phase are applied to electrodes facing each other via the electrophoresis lane.

[19] The control unit is characterized in that an AC voltage is applied to electrodes adjacent to each other in the first electrode row and the second electrode row so that the phases are sequentially shifted by π. The dielectrophoresis apparatus according to claim 18.

[20] The control unit applies an AC voltage so that the phase is sequentially shifted by πΖ2 to the electrodes adjacent to each other in the first electrode row and the second electrode row, respectively. The dielectrophoresis apparatus according to claim 18.

[21] The electrode array includes a first electrode array and a second electrode array in which a plurality of electrodes are arranged in the lane direction of the migration lane,

The first electrode array and the second electrode array apply an electric field to the sample injected into the migration lane by forming an electric field by an alternating voltage between the electrodes in each electrode array, and The respective electrodes in the first electrode row and the second electrode row face each other through the electrophoresis lane and are provided so as to cross the migration lane. Each electrode in the first electrode row and the second electrode row is provided across the plurality of electrophoresis lanes, and

A control unit configured to control a voltage applied to the first electrode row and the second electrode row, wherein the control unit is provided for electrodes adjacent to each other in the first electrode row and the second electrode row, respectively. 18. The dielectrophoresis apparatus according to claim 17, wherein AC voltages having different phases are applied, and AC voltages having different phases are applied to electrodes facing each other via the electrophoresis lane.

[22] The control unit sets the Xth electrode in the first electrode row to Ax, and the x + nth electrode to Ax.

+ n (x and n are integers of 1 or more), and the electrodes in the second electrode array arranged at positions facing the electrodes Ax and Ax + n through the electrophoresis lane are respectively Bx and Bx + n, and the distance between the surface of Ax and the surface of Bx is V, and the distance between the center of Ax and the center of Ax + n is H, the above n satisfies HZV≤5, The dielectric voltage according to claim 21, wherein an AC voltage is applied so that a phase difference of Ax + n with respect to Ax and a phase difference of Bx are both π, and a phase difference of Βχ + η with respect to Ax is zero. Swimming device.

[23] The control unit sets the Xth electrode in the first electrode row to Αχ and the x + nth electrode to Ax

+ n (x and n are integers of 1 or more), and the electrodes in the second electrode array arranged at positions facing the electrodes Ax and Ax + n through the electrophoresis lane are respectively Bx and Bx + n, and the distance between the surface of Ax and the surface of Bx is V, and the distance between the center of Ax and the center of Ax + n is H, the above n satisfies HZV≤5, The phase difference of either Ax + n or Bx with respect to Ax is π Ζ2, the phase difference of the other electrode is 3 π Ζ2, and the phase difference of Βχ + η with respect to Ax is π The dielectrophoresis apparatus according to claim 21, wherein an alternating voltage is applied.

[24] The control unit includes a combination of four electrodes Ax, Ax + n, Bx, and Bx + n as target electrodes to which an AC voltage is applied in the first electrode row and the second electrode row. 24. The dielectrophoresis device according to claim 22 or 23, wherein the electrophoretic device is sequentially moved so that X of each unit increases by one.

[25] By applying an electric field formed by an alternating voltage to a sample containing a dielectric substance, A dielectrophoresis chip for dielectrophoresis of a dielectric material is provided.

The dielectrophoresis chip is

The electrode array includes a plurality of electrodes arranged in the lane direction of the electrophoresis lane.

Comprising one electrode row and a second electrode row,

The first electrode array and the second electrode array apply an electric field to the sample injected into the migration lane by forming an electric field by an alternating voltage between the electrodes in each electrode array, and The respective electrodes in the first electrode row and the second electrode row face each other through the electrophoresis lane and are provided so as to cross the migration lane. 26. The dielectrophoresis system according to claim 25, wherein each electrode in the second electrode array is provided across the plurality of electrophoresis lanes.