WO2007023575A1

WO2007023575A1 - Mapping sensor system

Info

Publication number: WO2007023575A1
Application number: PCT/JP2005/018747
Authority: WO
Inventors: Yoshitane Saitou; Kenji Nishikido
Original assignee: Anywire Corporation
Priority date: 2005-08-25
Filing date: 2005-10-12
Publication date: 2007-03-01
Also published as: TWI326117B; TW200709326A; JP2007059856A; CN101238498B; CN101238498A; KR20080038249A; KR100976194B1

Abstract

A monitor signal is superimposed on a power supply superimposing common data signal line so as to reduce connections of the power supply and signal lines. By time-dividing operation period of each sensor child station, power of the mapping sensor system during operation is reduced and mounting adjustment is facilitated. The mapping sensor system has a plurality of sensor stations (9, 7a to 7h) including a sensor unit monitoring an object (8) to be detected. The sensor child stations (9, 7a to 7h) are connected to common data signals (11, 12) and configured so as to transmit a monitor signal from the sensor unit to a control unit via the common data signal lines (11, 12).

Description

Specification

Mapping sensor system

TECHNICAL FIELD [0001] The present invention relates to a muffing sensor system that detects the presence or absence or storage position of a flat article, a fixed article, and the like. In particular, the present invention relates to a tumbling sensor system that detects the presence or absence of a thin plate in a liquid crystal factory, or the presence or absence of a semiconductor wafer in a semiconductor factory, or a storage position.

Background art

[0002] In storage and management of articles on a flat plate and articles of a fixed shape, detecting the presence or absence or storage position of the flat article or article in a fixed form is a process of manufacturing or using these articles. It is an important requirement to store and manage objects in the factory, and to realize the automation of the process in the production line, inspection line or storage management by transferring this information to the host system and the automation machine of the next process. Can. For example, the presence or absence and storage position of semiconductor wafer in a semiconductor factory are detected by a mapping sensor, and the above detection result data is delivered to automated manufacturing equipment, inspection equipment, storage management equipment to automate the line, or for liquid crystal Mapping sensors are also used in the production of glass, glass plates for disks, printed circuit boards, etc. in the same manner as described above. Furthermore, also in storage management of a fixed-shaped medical device, the presence or absence or storage position of the article is detected by the mapping sensor.

The above-mentioned mapping sensor is provided with a detection head having a light emitting element and a light receiving element, and a detecting device such as a wafer or the like using this mapping sensor or a mapping sensor is disclosed in Patent Documents 1 to 4. Patent Documents 1 and 2 use a compact bi-directional detection head capable of projecting or receiving light in two directions opposite to each other mainly with a prism structure including a pair of prisms, which are used for projecting light and receiving light. A detection device such as a wafer arrayed alternately for use is disclosed. In a detection device such as a Whaha et al. Configured in this manner, one light emitting element or light receiving element corresponds to two detection optical axes that are reversed in a straight line, that is, a pair of light emitting elements supported by a fiber holder. Since the incident optical axis or the output optical axis in the reflecting prism is along one straight line, the number of light emitting elements and light receiving elements can be saved and Now it is possible to detect the position of dense owha etc.

[0004] Further, in Patent Document 3, a prism structure including a pair of prisms is formed of a transparent resin, and compact single-sided detection heads capable of projecting or receiving light in two opposite directions. A fiber sensor detection head is disclosed in which a polarity detection head is configured, and bidirectional light emitting and receiving heads are alternately arranged. In the detection head for a fiber sensor configured in this way, one light emitting element or light receiving element can be made to correspond to two detected light axes, so that a large number of thin articles arranged in series can be detected. It has become.

Further, Patent Document 4 discloses a wafer sensor that optically couples a light emitting element of a main body case and a light receiving element via a light emitting portion and a light receiving portion provided in a detection head. In the case of the sensor configured as described above, electrical wiring can be performed extremely easily, and even when an individual detection head fails, it is sufficient to replace only the detection head without performing wiring work. Therefore, daily maintenance and inspection can be easily performed.

Patent Document 1: Japanese Patent Application Laid-Open No. 11-074331 (Paragraph [0006], Paragraph [0019])

Patent Document 2: Japanese Patent Application Laid-Open No. 11-074332 (Paragraph [0006], Paragraph [0019])

Patent Document 3: Japanese Patent Application Laid-Open No. 11-064101 (Paragraph [0018])

Patent Document 4: Japanese Patent Application Laid-Open No. 10-070176 (paragraph [0014])

Disclosure of the invention

Problem that invention tries to solve

However, in the detection devices and the like shown in the above-mentioned Patent Documents 1 to 4, the light projection element is made to correspond to the two detection light axes which are contradicted in a straight line. The number of light receiving elements can be reduced, or electrical connection can be made easily by optically coupling the light emitting element and the light receiving element, but as the number of mapping sensors increases, the number of electrical signal wiring can be increased. For example, signal lines and power supply lines are wired for each mapping sensor group around the mapping sensor, and these signals are received. Connection to the host system or automation equipment It is necessary to wire each of the mapping sensors for each terminal location. As a result, the problem of increasing the number of wiring lines and terminal blocks and wiring was a problem, and it was necessary to spend much time and labor for increasing the number of wiring work, assembling and testing, adjusting each sensor, and so on. In addition, as the number of wiring man-hours increases, there are problems such as expansion of costs, cost increase, and increase in equipment volume. In addition, when the failure of the mapping sensor is a break in the above wiring, the maintenance work becomes complicated in proportion to the number of wiring, requiring a lot of work time, and the wiring management in the miniaturization of the device becomes a problem. In addition, it has also led to a decrease in the reliability of many wires. Also, when multiple sensors are operating at the same time as signal processing, light leaks from other mapping sensors, illumination near the mapping sensors The complexity of handling was accompanied by the need for fine adjustment to easily pick up signal noise due to light and the like. In addition, if the detection sensitivity of the object to be detected is increased, it is necessary to finely adjust the sensitivity, since it may detect the light emitted by other illumination etc. by mistake or pick up the light of the other mapping sensor and cause malfunction. There was a problem.

Furthermore, each detection head is operating at the same time, and the power consumption of the circuit increases and the power supply capacity also increases in proportion to the number of mapping sensors. There was also a malfunction of malfunction due to

The present invention superimposes detection information of an object to be detected on a common signal line, that is, a line carrying power for operating a terminal, reduces connection of a power source and a signal line, and emits light from each mapping sensor. The structure and adjustment that can perform each sensor sensitivity adjustment simply from both the left and right while having the light emission drive circuit and the light reception timing adjustment circuit which suppress the interference of the mutual mapping sensor by time-dividing the light reception operation timing. It has a circuit. As a result, sensor sensitivity adjustment is completed, and a display indicating that the circuit operation is normal can also be confirmed with multi-directional force, and the amount of power at the time of operation of the mapping sensor system can be reduced. Installation and adjustment can be facilitated, and wiring saving and wiring work can be simplified.

That is, the first object of the present invention is to reduce wiring and connection of the power supply and the signal line, and to connect the easy-to-wiring connection even if the number of mapping sensors is increased. It is an object of the present invention to provide a mapping sensor system capable of suppressing the interference of mapping sensors with each other.

The second object of the present invention is that each sensor sensitivity adjustment can be performed simply from both right and left directions, and when the sensor sensitivity adjustment is completed, a display indicating that the circuit operation is normal can also confirm multi-directional force , Providing a mapping sensor system.

The third object of the present invention is to reduce the amount of power during operation of the mapping sensor group and to facilitate the installation and preparation, and further simplify the wiring work by omitting the wiring. Providing a mapping sensor system that can

Means to solve the problem

As shown in FIGS. 1 to 3, 7, 9, 11, 12, 13 and 17, the invention according to claim 1 is a sensor unit (124) of a controlled unit. The mapping sensor (111), which has mapping sensors (111) that are a plurality of detection heads that monitor the sensor, is connected to the common data signal line (11, 12), and from the sensor unit (124) The monitoring signal is transmitted to the control unit (24) through the common data signal line (11, 12).

In the mapping sensor system according to the first aspect, the signal from the mapping sensor (111) is superimposed on the power from the power supply, and each signal is transferred by the shift register structure, and the respective mapping sensors (111) are transmitted. The number of signal lines can be set to two power supply lines (common data signal line D + (common data signal line D 11) and 0- (12)), which makes it possible to greatly reduce the number of wires. In particular, in the semiconductor plant and liquid crystal plant, it is possible to miniaturize the equipment and save space.

The invention according to claim 2 is a light projection synchronized with a predetermined synchronous transmission clock as shown in FIGS. 1 to 3 and 7, 9, 11, 12, 13 and 17. A timing shift signal generation circuit (113, 120, 121, 122) for generating a timing shift signal (60) or a timing shift signal, and control of a light projection timing shift signal (60) or a timing shift signal. Configured in the mapping sensor (111) which is a plurality of detection heads for detecting the detection object (8) A projection signal generation circuit (114) for causing the detection light projectors (18) in the individual mapping sensors to emit light sequentially based on the synchronous transmission clock and the single detection light projector (18) or the plurality of detection light projectors; An operation display circuit (118) which holds a single detection light reception signal (5) or a plurality of detection light reception signals according to the light emission timing of a single detection light projector (18) or a plurality of detection light projectors. And a transmission output signal circuit (117) for transmitting a single detection light reception signal (5) or a plurality of detection light reception signals to the common data signal line (11, 12) as a monitoring signal. It is a mapping sensor system characterized by the above.

In the mapping sensor system according to claim 2, by operating each of the mapping sensors (111) in time division, the problem of light interference from each other mapping sensor (111) can be solved. At the same time, it is possible to curb the increase in circuit operating current, resulting in smaller equipment and reduced equipment costs. Specifically, a timing shift signal generation circuit (113) for generating a light emission timing shift signal (60) or a timing shift signal synchronized with a predetermined synchronous transmission clock, and a timing shift signal (60) or timing Under the control of the movement signal, the detection light projector (18) configured in the mapping sensor (111), which is each detection head for detecting the detection target, is sequentially based on the synchronous transmission clock. Light is emitted individually, and the light reception signal for detection is held according to the light emission timing, and this detection light reception signal is sent as a monitoring signal to the common data signal line (11, 12). It is possible to minimize the current due to the light operation and solve the light interference problem.

The invention according to claim 3 is the mapping sensor system according to claim 1 or 2 as shown in FIG. 1, FIG. 2, FIG. 3 or FIG. Mapping sensors that are multiple detection heads by sequentially sending, as electrical signals, timing movement signals at sequential addresses of the mapping sensor (111) that is the detection head, to the mapping sensor (111) that is the next detection head. This mapping sensor system is characterized in that it can capture sensor signals from (111).

In the mapping sensor system according to the third aspect, time-division operation of each of the mapping sensors (111) eliminates interference with other sensor operations, and the luminance from the outside can be increased by increasing the light emission luminance. Can improve the intensity ratio of light noise, and The sensitivity of detection can be easily adjusted as well as the detection sensitivity to the detection object is enhanced. In addition, the number of displays can be reduced by changing the sensor operation display, which indicates that sensitivity adjustment is being properly performed, to a multi-directional display that can be easily viewed from multiple directions, and the circuit current and circuit cost can be reduced. Therefore, the number of wires and connections can be reduced, operation adjustment can be simplified, and adjustment can be omitted, and the burden of installation and periodic adjustment can be significantly reduced.

[0010] The invention according to claim 4 is, as shown in FIG. 1 to FIG. 3, FIG. 7 or FIG. A mapping sensor system characterized in that a plurality of arbitrary detection heads, that is, a mapping sensor (111) force sensor signal, can be taken in by sequentially sending a light emission signal to a mapping sensor (111) which is the next detection head.

In the mapping sensor system according to the fourth aspect, a plurality of arbitrary detection heads are sequentially sent as a light projection signal to the mapping sensor (111) which is the next detection head, the timing movement signal of the sequential address. The sensor signal can be taken from the mapping sensor (111). As a result, by making each mapping sensor (111) operate in a time-division manner, interference with other sensor operations is eliminated, and by raising the light emission luminance, the intensity ratio of the light noise from the outside can be improved. The sensitivity of the detection object to the object to be detected can be enhanced and the sensitivity can be easily adjusted.

The invention according to claim 5 is the mapping sensor system according to claim 1 or 2, as shown in FIG. 1, FIG. 2, FIG. 7 or FIG. 9, FIG. 11, FIG. , The detection sensitivity adjustment variable resistors (19, 20) are provided on the left and right of the mapping sensor (111) which is the detection head, and a single sensor operation display (23) is provided at a position where it can be confirmed from multiple directions. It is a mapping sensor system characterized by

In the mapping sensor system described in claim 5, a single sensor operation display 23 can be confirmed from multiple directions. In addition, each mapping sensor (111) uses fixed crossover wiring or superimposes a signal on the power supply line, so that the connection to the power supply superimposed common data signal line can be fixed simultaneously with the mapping sensor (111) fixed. The number of wiring steps can be reduced by reducing the number of wiring lines.

As shown in FIGS. 11 to 14, the mapping sensor (111) is a plurality of detection heads. To the mounting plate 97, and using the crossover wiring (96) sequentially between each mapping sensor (111), transmit the timing movement signal and the power and transmission data signal of the power supply for circuits common to the detection head. Can be configured to

Also, as shown in FIG. 2, a common conductor (13) is provided on the mounting plate 1 to which the mapping sensor (111), which is a plurality of detection heads, is attached, and a mapping sensor (111) is provided on the conductor (13). ), And to transmit the power and transmission data signal of the circuit power supply common to the mapping sensor (111), which is the detection head.

Effect of the invention

According to the present invention, the detection signal of the detection object by the mapping sensor is placed on the power supply line, that is, the signal wiring is omitted by superimposing the detection signal and the power of the power supply, thereby mapping Wiring between sensors and wiring between the mapping sensor and the master station can be omitted, and wiring man-hours can be reduced and wiring space can be reduced.

In addition, the distance between mapping sensors can be easily adjusted and changed, and the number of mapping sensors can be easily increased or decreased. In addition, since the mapping sensor receives light to the detection object at different timings in synchronization with the light projection timing, it is not affected by the other mapping sensor signals at all, and therefore the light emission amount is increased, and the sensitivity is high. Power consumption can be reduced during detection because detection is possible and light is not emitted at the same time. In addition, if signal transmission between the mapping sensors is performed using crossover wiring of the same standard, the interval between the mapping sensors can be easily set and changed. Furthermore, if the signal transmission between the adjacent mapping sensors is performed by light, the wiring between the mapping sensors can be further reduced.

Brief description of the drawings

FIG. 1 is a side view showing a plurality of mapping sensors (111) and an object to be detected (8) according to a first embodiment of the present invention.

[FIG. 2] It is a schematic diagram which fixes those mapping sensors (111) to a mounting plate (1) by screwing, and is a perspective view which shows the attachment state of each component.

[Figure 3] Multiple mapping sensor power The power superimposition common data signal line D + (11) and the power superimposition common data signal line D-(12) are connected and further connected to the master station, external input unit And a connection for exchanging data with an external output unit. 4) It is a block diagram showing exchange of data with connection with a functional block inside a parent station and a power superimposition common data signal line, and a control part.

FIG. 5 is a block diagram showing details of functional blocks in a master station.

6) It is a timing chart showing change of each signal inside the parent station.

7 is a circuit diagram of sensor slave station A. FIG.

[FIG. 8] A timing chart showing changes in each signal in sensor slave station A.

FIG. 9 is a circuit diagram of a sensor slave station B.

FIG. 10 is a timing chart showing changes in each signal in sensor slave station B.

[FIG. 11] A block diagram showing an example of transmission of a light projection signal and a light reception signal by the crossover wiring of the sensor slave station.

[Fig. 12] The circuit diagram of the crossover type sensor slave station A to which the timing movement signal (87) for transmitting the light projection timing shift signal to the next sensor slave station B is added following the sensor slave station A. is there.

圆 13] A crossover wiring type sensor element that receives the signal AD from the previous sensor slave station and sends the timing movement signal (87) to the subsequent sensor slave station after the slave station has completed the light emitting and receiving operations. FIG. 10 is a circuit diagram of a station B.

[Fig. 14] Fix the mapping sensor module (89) on the mapping sensor base (92), and fix the mapping sensor module (89) together with the mapping sensor base (92) on the mounting plate (97). FIG. 16 is a perspective view of relevant parts showing a state immediately before connection is made by connection between the bus cable connector (95) and the mapping sensor module (96).

FIG. 15 is a perspective view of relevant parts showing an example of fixing a mapping sensor module (103) to a DIN standard rail (99) and configuring a mapping sensor.

FIG. 16 is a circuit diagram of a sensor slave station A including a plurality of detection light emitting photodiodes LEDsn (107) and a plurality of detection light receiving phototransistors PHTRsn (108).

[FIG. 17] A configuration diagram showing that a sensor section (124) of a controlled section of a conventional control system is replaced with a plurality of mapping sensors (111) including this sensor section.

Explanation of sign , 97 Mounting plate

Detection flood signal

Detection light reception signal

a Sensor slave station B (# l)

b Sensor slave station B (# 2)

c Sensor slave station B (# 3)

d Sensor slave station B (# n — 4)

e Sensor slave station B (# n-3)

f Sensor slave station B (# n — 2)

g Sensor slave station B (# n — 1)

h Sensor slave station B (# n)

Detected body

Sensor slave station A (# 0)

1 Power supply overlapping common data signal line D +

2 Power supply superimposed common data signal line D—

3 conductor

6 Mounting screw (conductive fixture)

7 Phototransistor for light reception PHTRs

8 LED for floodlighting (sender for detection)

9 Right detection sensitivity adjustment volume VRr (Variable resistance for detection sensitivity adjustment) 0 Left detection sensitivity adjustment volume VR1 (Variable resistance for detection sensitivity adjustment) 4 Controller

5 DC power supply (supply power for circuit)

6 Timing generation means

0 Projection timing movement signal

6,96 Crossing Line

7 Timing movement signal

2 base station base 107 Detection floodlighting photodiode LEDs (Detection floodlight)

110 Mapping Sensor System

111 Mapping Sensor

113, 120, 121, 122 Timing movement signal generation circuit

124 Sensor

BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, the best mode for carrying out the present invention will be described based on examples.

First Embodiment

A first embodiment of the present invention will be described with reference to FIGS.

FIG. 17 shows the entire mapping sensor system of the present invention. Here, reference numeral 124 in FIG. 17 denotes a force which is a sensor unit of a conventional controlled unit. This mapping sensor system according to the present invention is a portion where this portion is replaced with the mapping sensor (111).

FIG. 1 shows a side view of a mapping sensor system according to the present invention. The mapping sensor (111) comprises a plurality of mapping sensor slave stations (9, 7a to 7h) and a mounting plate (1) for mounting these sensor slave stations (9, 7a to 7h). The mounting plate (1) is provided with a plate-like insulator (14) extending in the vertical direction and extending at a predetermined distance in the vertical direction and the surface is exposed to the insulator (14) And two square prism-like conductors (13, 13) embedded respectively (Fig. 2). The plurality of mapping sensor slave stations (9, 7a to 7h) are fixed to the mounting plate (1) at predetermined intervals in the longitudinal direction. Also, two conductors (13, 13) transmit power from the power source to the mapping sensor slave station (9, 9) via the power superimposing common data signal line D + (11) and the power superimposing common data signal line D- (12). 7a to 7h), and also sends the monitoring signal of the sensor section (124) to the power-superimposed common data signal line D + (11) and the power-superimposed common data signal line D- (12).

In the example of FIG. 1 which is a schematic view, nine sets of mapping sensor slave stations (9, 7a to 7h) are fixed to a mounting plate (1). In actual use, as the 25 sets, 32 sets, 50 sets and so on, more mapping sensors are attached to the mounting plate and used for ease of explanation. It is a thing. In FIG. 1, for example, only the sensor slave station A (9) located at the lowermost level has a sensor A circuit (FIG. 7) in which the circuit of station B (7a to 7h) (FIG. 9) and the signal transmission circuit are different is used. Also, FIG. 1 is an example of the case where the detection subject (8) is in the missing state.

In the example of Fig. 1, the lower force also transmits the signal upward, but when transmitting the signal from top to bottom, the sensor slave station A (9) is provided at the top, and the sensor slave station B (7a Use ~ 7h)

FIG. 2 shows a schematic view of fixing the mapping sensor in the present invention to the mounting plate (1) by screwing. The attached state of each part is shown in FIG. A plurality of screw holes (15) are formed on the surfaces of the two conductors (13, 13) at predetermined intervals in the longitudinal direction of these conductors, and the screw holes of the conductors (13, 13) are formed. The three surfaces other than the formed surface of (15) are covered with an insulator (14) to be electrically insulated, and these conductors (13, 13) are sensor slave station A (9) or a sensor It has sufficient strength to fix the slave station B (7a to 7h). The mapping sensor slave stations (9, 7a to 7h) are screwed with the mounting screw (16) for attaching the mapping sensor (111), which is the detection head, to the sensor slave station ( 9, 7a-7h) are fixed to the mounting plate (1). Also, the circuits (FIGS. 7 and 7) of the mapping sensor slave stations (9, 7a to 7h) are connected via the conductor (13) to the power supply superimposed common data signal line D + (11) and the power supply superimposed common data signal line D− By being connected to 12), the mapping sensor information, that is, the information of the presence or absence of the detected object (8) detected by the sensor section (124) can be transmitted to the master station (29). Specifically, when the object to be detected (8) is located at a predetermined place, the light emitted from the LED for light emission (18) of the sensor section (124) is reflected by the object to be detected (8), The reflected light is received by the phototransistor PHTRs (17) for light reception of the sensor section (124) to detect the presence of the detected object (8), and the detected object (8) is positioned at a predetermined location. If not, the light emitted from the LED for light emission (18) of the sensor unit (124) is not reflected by the detection object (8), and the phototransistor PHTRs (17) for light reception of the sensor unit (124) It is configured not to receive the reflected light, and to detect that the object to be detected (8) is not present.

In this case, the light emitting LED (18) and the light receiving phototransistor PHTRs (17) can obtain optimum detection sensitivity by adjusting the number of mountings depending on the type of object to be detected. The detection sensitivity of the sensor unit (124) can be adjusted by the detection sensitivity adjustment circuit (119). This detection sensitivity adjustment circuit (119) is the right edge of each sensor slave station (9, 7a to 7h). And a left detection sensitivity adjustment volume VR1 (20) provided at the left edge of each sensor slave station (9, 7a to 7h). The initial setting of each sensor slave station (9, 7a to 7h) and the detection sensitivity setting when replacing the sensor slave station (9, 7a to 7h) are the right detection sensitivity adjustment volume VRr (19) or the left detection sensitivity. Adjustment volume V Rl (20) makes it easy to do while looking at the sensor activity indicator LED (23) from either side. The address light emission LEDa (21) sends an address signal to the sensor slave station of the next address, which is received by the address light reception phototransistor PHTRa (22).

[0020] FIG. 3 shows a plurality of sensor slave stations (9, 7a to 7h) according to the present invention, a power superimposing common data signal line D + (11), a power superimposing common data signal line D- (12) and a master station 29), and a block diagram showing the connection status for data exchange between the master station (29) and the external input unit (25) and external output unit (26) of the control unit (24). Show. Fig. 3 shows a block diagram for transmitting signals between sensor slave stations (9, 7a to 7h) according to the present invention, thereby omitting the signal transmission line. It has become possible. FIG. 4 shows a specific configuration of the master station (29) in FIG. The master station (29) receives the mapping sensor information of a plurality of sensor slave stations via the power-superimposed common data signal line D + (11) and the power-superimposed common data signal line D- (12). The transmission bleeder current circuit (40), which is the interface circuit of the master station (29), is connected to the line driver (34) in the master station output section (32), and receives control data generation means (33). The control data is sent via the external signal connection (41) together with the clock signal sent from the timing generation means (36) to the power supply superimposed common data signal line D + (11) and the external signal connection (42). Send it to the power supply superimposed common data signal line D-(12).

The line driver (34) passes a data signal to the supervisory signal detection means (39) of the master station input unit (37), and the supervisory data extraction means (38) receives the timing generation means (36). The monitor data signal is obtained in synchronization with the clock signal. This supervisory data signal is passed to the input data section (30), and transmitted to the input unit (25) of the control section (24) as a master station transmission signal (27). On the other hand, the output unit (26) of the control unit (24) transmits the master station reception signal (28) to the output data unit (31) of the master station, and the signal component is received by the timing generation means (36). Generates control data in the control signal generation means (33) in the master station output part (32) by Then, the signal passes through the line driver (34) and is sent out to the power-superposed common data signal line D-(12) through the external signal connection section (42). A DC power supply (35) is connected to supply power to the master station (29).

FIG. 5 shows the detailed wiring and block diagram of the inside of the master station in FIG.

The timing generation means (36) sends the clock signal Dck (48) to the output data portion (31) and sends the data input clock signal Dick (51) to the input data portion (30).

The timing generation means (36) transmits a start signal ST (50) of control data generation (33), and uses this signal as a preset signal for parallel / serial conversion of the output data portion (31). This is a preset signal of the serial-to-parallel conversion input data division shift register of the input data division (30).

The master station reception signal (28) transmitted from the output unit (26) of the control unit (24) to the output data unit (31) of the master station (29) is the master station output data unit (31). The signal is parallel-serial converted and sent as a serial data signal D (49) to the control data generation unit (33), and in the control data generation unit (33), the line driver (34) as the signal Pck (53). Sent. The transmission pre-driver current circuit (40) is connected in parallel to the power-superposed common data signal line D + (11) and the power-superimposed common data signal line D- (12), and the output current of the line driver (34) A monitoring signal flowing in the circuit of the monitoring signal detection means (39) is detected as a current signal Is (56), and a combined current of the flowing signal Ip (55) and the current signal lis (57) is detected. ) Is transmitted as a signal Diip (54) to a flip-flop which is monitoring data extraction means. The output of this flip-flop is transmitted to the input data section as the data input monitoring signal Diis (52).

A serial data input monitoring signal Diis (52) which is a status signal of each mapping sensor is stored in the shift register of the input data unit (30). The data of each cell of the shift register, which is serial data, is passed as parallel data as it is to input port i "0" (43) force input port i "31" (44), and the input unit of the control unit Is sent out as parallel data. On the other hand, the master station reception signal (28) sent from the output unit of the control unit is sent from output port p "0" (45) to output port p "31" (46), and the output data section 31) Serial conversion of parallel data is performed internally, and control data generation is performed as serial data signal D (49). It is sent to the part (33).

FIG. 6 shows signal waveforms of respective portions of the wiring functional block diagram of the master station (29) in FIG.

After the rising edge of the start signal ST (50), the clock signal Dck (48) continuously sends out a clock signal of a fixed cycle until the next rising edge of the start signal. The data input clock signal Dick (51) is a clock signal for performing signal processing of the input data section (30), and is shifted by one clock period from the clock start point of the clock signal Dck (48). Wait for the monitoring signal of the bing system to process the signal.

The data input monitoring signal Diis (52) shows a signal example in the case where the monitoring signal is in the state of “0”, “1”, “0”, “1”. The signal Pck (53) is a clock signal exhibiting a phase opposite to that of the clock signal Dck (48), and (changes) the line driver (34) to the power supply superimposed common data signal line D + (11) It is sent to signal line D-(12) and performs status signal processing of the mapping sensor. The signal Diip (54) is an input current signal obtained by inverting the monitoring signal detected by the monitoring signal detection means (39) by the inverter (47), and the monitoring signal information is input to the input of the flip-flop which is a monitoring data extraction means. To communicate. The data input monitoring signal Diis (52) is sent to the input data section (30) in synchronization with the data input clock signal Dick (51) to the flip-flop which is the monitoring data extracting means. The signal current Ip (55) is a signal current of the transmission bleeder current circuit according to a signal that is placed on the power superimposed common data signal line D + (11) and the power superimposed common data signal line D-(12). .

[0027] FIG. 7 shows a wiring diagram inside sensor slave station A (# 0) (9). Sensor slave station A (# 0) is a circuit configuration used only in the lowermost stage in the mapping sensor system. Here, the clock signal sent from the master station via the common data signal line D + (11) and 0- (12) is detected by the clock detection circuit (112). The clock detection circuit (112) has a function of transmitting the light emission timing movement signal (60) in its own station in the light emission timing movement signal generation circuit A (113). In addition, the light emission signal generation circuit (114) receives the detection light emission signal detected by the light emission phototransistor PHTRs (17), which also emits the light emission LED (18) that emits the light emission LED (18) that detects the detection object (8). Then, the presence or absence of the detected object (8) and the state are transmitted to the master station via the power superimposed common data signal line D + (11) and the power superimposed common data signal line D − (12). The detection sensitivity of the detection object (8) is adjusted by the mapping sensor (111) in the detection sensitivity adjustment circuit (119), with the right detection sensitivity adjustment volume VRr (19) and the left detection sensitivity connected in series. The adjustment volume VR1 (20) enables adjustment from the left and right sides of the mapping sensor system. This has the advantage that the detection sensitivity can be adjusted without having to move around the periphery of a relatively large installation to which the mapping sensor system (110) is attached and moving to the opposite side. The operation state in the adjustment of the detection sensitivity is performed by the sensor operation display LED (23) in the operation display circuit (118). The sensor operation display LED (23) has a multi-faced reflector so that the operation can be checked from multiple directions, which makes it easy to check the adjustment of the operating range such as detection sensitivity and dead zone! .

After the sensor operation of sensor slave station A (# 0) (9) is completed, the address for the phototransistor PHTRa (22) for address light reception of sensor slave station B (7a) corresponding to the next address is The LED for LED light (21) emits an address light signal to transmit and transmit an operation signal (Fig. 7 and 9). Also, in the clock detection circuit (112), the zener diode ZD (78) detects the clock with a threshold value of 21 V to obtain a sensor slave clock signal CK (58) (Fig. 7) o Further slave control power supply CV (64) forms a control power supply for sensor slave station A.

On the other hand, in the light emission timing shift signal generation circuit (113), the sensor slave station clock signal CK (58) is amplified by the transistor TRc (65), and a part of its output signal passes through the inverter (66). The RC circuit becomes a time constant 3t on-de relay signal (68). Also

0

A diode and a resistor provide a 1Z4T off relay signal (67). This signal is

0

The slave station start signal ST (59).

A flip-flop (69) force S is set at the falling timing of the start signal ST (59) and the clock signal CK (58), and a light projection timing shift signal (60) is obtained as an output.

The light emission signal generation circuit (114) amplifies the light emission timing shift signal (60) by the transistor TR1 (70), and the light emission LED (18) and the address light emission circuit (115) connected in series. LEDa for address light emission (21) Force Generate address light emission signal (3).

The detection signal adjusted by the right detection sensitivity adjustment volume VRr (19) and the left detection sensitivity adjustment volume VR1 (20) is adjusted as the input voltage of the operational amplifier (74) of the detection light receiving circuit (116), and the comparator (75) Output signal S (61) of the operation display circuit (118) At the same time, the output of the AND gate (71) enters the S terminal of the flip flop (72). The output of the flip flop (72) causes the sensor operation display LED (23) to emit light as a drive signal SD (62) for the transistor TR (76). The AND gate (73) of the transmission output signal circuit (117) is the logical product of the output signal of the flip flop (72) and the clock signal which is the output signal of the transistor T Rc (65) and the light emission timing shift signal (60). Then, the signal Dip (63) is transmitted to the transistor TRi (77), and the output signal of the sensor slave station A (9) is superimposed on the transistor TRi (77) power supply common data signal line D + (11) Send between common data signal line D-(12).

[0031] FIG. 8 shows signals of respective units in the sensor slave station A (9) shown in FIG. 7 as a timing chart. A signal voltage of 24 V and a pulse signal are superimposed between the power supply superimposed common data signal line D + (11) which is a transmission line and the power supply superimposed common data signal line D-(12). The sensor slave station clock signal CK (58) is detected as a voltage.

In FIG. 8, the first falling edge of the sensor slave station clock signal CK (58) and the inverted signal of the sensor slave station start signal ST (59) become the on timing of the light emission timing shift signal (60). A falling signal one cycle later indicates that the light projection timing shift signal (60) is turned off.

In FIG. 8, the signal S (61), which is the output of the comparator (75), slightly rises after the light emission timing shift signal (60) due to phototransistor detection, and is delayed together with the light emission timing shift signal (60). Falling signal. Signal SD (62) is a drive signal of the sensor operation display LED (23). The signal Dip (63) drives the output transistor TRi of the sensor slave station A, and transmits it to the master station via the power superimposed common data signal line D + (11) and the power superimposed common data signal line D-(12). Signal.

FIG. 9 shows a circuit configuration diagram of a sensor slave station B (7a to 7h) which is a sensor slave station other than the sensor slave station A used only in the lowermost stage in the mapping sensor, for example. The sensor slave station B (7a to 7h) is the lowermost sensor slave station A or the address slave station B (7a to 7h) of the address from the sensor slave station B (7a to 7h). The address light emission signal emitted from the LEDa (21) is received by the address light reception phototransistor PHTRa (22), and the sensor slave station B (7a to 7h) starts operation. Phototransistor PHTRa (22) for address reception , And sends the signal AD (81) to the flip flop (80) via the inverter (79).

The flip-flop (80) generates the light emission timing shift signal LT at the timing when the signal AD (81) and the sensor slave station B clock signal CK (82) are received via the transistor TRc. Since the subsequent circuit operation is the same as that of the sensor slave station A, not all of them are described. However, the sensor slave station B signal S (83) which is a comparator output signal becomes an input signal of the flip flop FF, and the sensor slave station The B signal SD (84) serves as a drive signal for the transistor TR that drives the sensor operation display LED. The signal Dip (85) transmits the output signal of the sensor slave station B (7a to 7h) to the master station via the power superimposition common data signal line D + (11) and the power superimposition common data signal line D- (12) To drive the transistor TRi.

FIG. 10 shows signals of respective parts in the sensor slave station B shown in FIG. 9 as a timing chart. Similar to the operation of the sensor slave station A, the sensor slave station B clock signal CK (82) is detected as a clock signal with a threshold voltage of 21 V from the transmission line. The signal AD (81) is an address signal of the sensor slave station B, and generates a light projection timing shift signal LT of the sensor slave station B via a flip-flop.

In FIG. 10, LT (# 1), LT (# 2), LT (# 3), and LT (# n) are the light emission timing shift signal LT (# 1) of the sensor slave station B, and this sensor slave station. A light emission timing movement signal LT (# 2) of sensor slave station B adjacent to B, a light emission timing movement signal LT (# 3) adjacent to the next sensor slave station B, the nth sensor slave station B Flash timing change signal LT (

# n) are shown respectively.

The sensor slave station B signal S (83) turns on after the rise of the light emission timing shift signal LT (# 1), and falls with the fall of one cycle of the clock signal CK (82). Sensor slave station B signal SD (84) rises with sensor slave station B signal S (83). The signal Dip (85) rises with the sensor slave station B signal S (83) and falls at a half clock cycle.

Second Embodiment

FIG. 11 shows an example in which the light projection signal and the light reception signal are transmitted by the wiring (86) between the sensor slave stations. Crossover wiring between sensor slave stations (86) is a crossover wiring that connects between sensor slave stations. Between sensor slave stations, the sensor slave station bus cable unit (109) Connected with a standard length connector cable. Therefore, by changing the cable length of the standard length, it is possible to freely change the distance between sensor slave stations, and it is also possible to change the distance slightly due to the allowance of wiring. Thus, the mapping sensor system (110) is configured by optimally arranging the plurality of sensor slave stations. In addition, it is not limited to only connecting adjacent sensor slave stations by the crossover wiring. For example, even if the sensor slave station A is set to be interrupted, the sensor slave stations are separated by the crossover wiring. Connect to sensor slave station B directly above station A, connect this sensor slave station B to sensor slave station B directly below sensor slave station A by crossover wiring, and connect to sensor slave stations B on top and bottom in order. Good. Positional relationship is ぉ, and ranking is performed, and in this case, this method can also be used.

As described above, since each of them including the crossover wiring portion can be manufactured in a fixed shape and a fixed shape, it is easy to manufacture a stock method in which each is prepared in advance and assembled as needed with simple work and short delivery time. is there.

FIG. 12 shows a circuit diagram of the sensor wiring station A of the crossover wiring type. The timing shift signal generation circuit AW (121) sets the light projection timing of the detected light projection signal of the sensor slave station A, and the crossover passes the timing shift signal (87) to the sensor slave station B. In FIG. 12, following the sensor slave station A, a timing shift signal (87) for transmitting a light projection timing shift signal to the next sensor slave station B is added. As described above, this can be easily realized by the crossover wiring without using the method of transmitting the timing shift signal (87) by light. However, as shown in Fig. 2, using the conductor (13) for the power superimposition common data signal line D + (11) and the power superimposition common data signal line D-(12), both the connection and the sensor slave station are fixed In order to achieve this, there is a great advantage to using the method of connecting by the light projection timing movement signal without using the crossover wiring.

FIG. 13 shows a circuit diagram of the sensor wiring station B of the crossover wiring type. Sensor slave station B following sensor slave station A shown in FIG. 12 and sensor slave station B following it all have the same configuration as the circuit shown in FIG. 13, and the timing movement signal generation circuit BW (122) Upon receiving the signal AD (88) from the sensor slave station, the slave station sends out a timing movement signal (87) to the subsequent sensor slave station after the light projection and light reception operations are completed. Except for the circuit for generating this timing transfer signal (87) and the circuit for receiving the signal AD (88), all of them are The circuit operation remains unchanged except for the terminal that sends the timing movement signal (87) and part of the timing movement signal generation circuit BW (122), regardless of the method of passing the light emission signal. Is possible.

[0037] FIG. 14 shows an assembly procedure of the mapping sensor module (89) to the mapping sensor base (92). First, the mapping sensor module (89) is fixed to the mapping sensor base (92) by the mapping sensor module fixing screw (90). Next, after the mapping sensor base fixing screw (91) is inserted into the through hole of the mating sensor base (92) to which the mapping sensor module (89) is fixed, the mapping sensor base fixing female screw of the mounting plate (97) Screw on (98). This completes the mapping sensor system (110). In this case, the connection between the modules is also made by connecting the bus cable connector (95) and the wiring between the mapping sensor modules (96). In addition, by using the spacer (93), the distance between the mapping sensor assembly (94) can be easily determined and accurate distance adjustment can be performed.

[0038] Fig. 15 shows an example of a mapping sensor system in which the mapping sensor module (103) is fixed to a rail (99) of DIN standard. The mapping sensor module (103) is fixed to the rack mount mapping sensor base (101) from the mapping sensor base fixing screw (105). By using the positioning spacer (102), the hopping sensor module (103) can be easily fixed to the rail (99) at a fixed interval. The rail (99) is formed with a plurality of free holes (100) extending in the longitudinal direction of the rail, and these free holes (100) are used to attach and fix the mapping sensor system to a structure such as a post or rack. Thus, the positional relationship with the detection subject (8) can be easily adjusted. The rack mount mapping sensor base (101) can be simply mounted on a DIN standard rail (99), and can be fixed without any angular deviation or the like by means of fixing screws. Also, the rack mount mapping sensor base (101) is provided with a bus cable connector (104), and this bus cable connector (104) mounts the mapping sensor module (103) to the rack mount mapping sensor base (101). And the replacement of the mapping module (103) can be easily performed.

[0039] FIG. 16 shows a plurality of detection light emitting photodiodes LEDs.sub.n (107) and a plurality of light reception detection light The circuit block diagram of the sensor slave station A using the autotransistor PHTRsn (108) is shown. The plurality of detection light emitting photodiodes LEDsn (107) and the plurality of light reception detection phototransistors PHT Rsn (108) are indicated by reference numeral 123. The detection object (8) can be detected with high sensitivity by including a plurality of detection light emitting photodiodes LEDsn (107) and a plurality of detection light receiving phototransistors PHTRsn (108), and a disturbance signal It is possible to improve the S / N ratio, which is the signal-to-noise ratio for. In FIG. 16, the plurality of detection projection photodiodes LEDsn (107) are connected with resistors (106) for supplying signal current to the detection projection photodiodes LEDsn (107).

Even if the multiple detection light emitting photodiodes LEDsn (107) and multiple detection light receiving phototransistors PHTRsn (108) are activated, the entire mapping sensor system does not emit light simultaneously but operates in a time-division manner. The power can be minimized, and the miniaturization of the device and the power saving can be realized.

Industrial applicability

The present invention is used in the process of producing plate-like objects to be detected, such as liquid crystal glass, silicon wafer, and semiconductor mounting substrates, but it can be used to produce, process, store, etc. parts having a fixed shape. It can be widely used.

Claims

The scope of the claims

[1] Each of the mapping sensors (111), which has a plurality of detection heads that monitor the sensor unit (124) of the controlled part, has a plurality of detection heads, and the mapping sensors that are the plurality of detection heads have common data signal lines , 12), and transmits the monitoring signal from the sensor unit (124) to the control unit (24) via the common data signal line (11, 12). .

[2] A timing shift signal generation circuit (113, 120, 121, 122) for generating a light projection timing shift signal (60) or a timing shift signal (87) synchronized with a predetermined synchronous transmission clock; A single configured in the mapping sensor which is each of the plurality of detection heads for detecting the object (8) under the control of the optical timing movement signal (60) or the timing movement signal (87) A plurality of detection light projectors (18) or a plurality of detection light projectors in sequence based on the synchronous transmission clock, the single detection light projector (18) or the plurality of detection light projectors in the individual individual mapping sensors. A single detection light receiving signal (5) or a plurality of detection light reception signals (5) or a plurality of detection light emission timings according to the light emission timing of the light emission signal generation circuit (114) for emitting light and the single detection light projector (18) Detection light reception circuit for receiving the detection light reception signal Path (116), an operation display circuit (118) holding the detection light reception signal, and the common data signal using the single detection light reception signal (5) or a plurality of detection light reception signals as a monitoring signal What is claimed is: 1. A mapping sensor system comprising: a transmission output signal circuit (117) for sending out to lines (11, 12).

[3] In the mapping sensor system according to claim 1 or 2, a timing movement signal at a sequential address of the mapping sensor as the detection head is sequentially sent as an electric signal to the mapping sensor as the next detection head. A mapping sensor system characterized in that the mapping sensor force sensor signal which is the plurality of detection heads can be taken.

[4] In the mapping sensor system according to claim 1 or 2, a plurality of the timing shift signals of sequential addresses are sequentially sent as the detection light projection signal (6) to the mapping sensor which is the next detection head. A mapping sensor system characterized in that the sensor signal can be captured. System.

[5] The mapping sensor system according to claim 1 or 2, wherein one or both of the left and right forces of the mapping sensor which is a detection head has a variable resistor (19, 20) for adjusting detection sensitivity. A mapping sensor system characterized in that a single sensor operation display (23) is provided at a position where it can be confirmed from multiple directions.

[6] The mapping sensor system according to any one of claims 1 to 3, wherein the mapping sensors, which are a plurality of detection heads, are attached to the mounting plate (1, 97), and sequentially pass between the mapping sensors. A mapping sensor system characterized by transmitting a timing movement signal, a power of a power supply for a circuit common to the detection head, and a transmission data signal using a wire (96).

[7] In the mapping sensor system according to any one of claims 1, 2 or 4, a common conductor (13) is provided on a mounting plate (1) to which the mapping sensor, which is a plurality of detection heads, is attached. Using a conductive fixture (16) for attaching the mapping sensor, which is a detection head, to a conductor (13), transmitting power and transmission data signals of a power supply common to the mapping sensor, which is the detection head Mapping sensor system characterized by