第94143310號專利申請案 補充、修正後無劃線之說明^：修正頁一式三份 九、發明說明： 【發明所屬之技術領域】 本發明係有關一種檢測有無平板狀物品或定型狀物品 等或其保管位置所用之映射感測m尤其是關於在液 晶工廒檢測有無薄板或其料位置，或在半導體工廢檢測 有無半導體晶圓或其保管位置所用之映射感測器系統。 【先前技術】 在平板狀物品、定型狀物品之保管或管理上，檢測有 無該等物品或其保管位置，係在製造該等物品之製造工序 或使用時對於該等物品之保管及管理上極為重要，將此等 資訊傳輸至主機系統（Host System)或次工序之自動化機 械，即得以在生產線或檢査線或保管管理上實現自動化。 例如在半導體工廠利用映射感測器檢測有無半導體晶圓或 保管位置，將上述檢測結果數據傳輸至自動化之製造機器 或檢査設備、保管f理機器，使生產線自動化，或在液晶 用玻璃、磁碟用秣璃板、印刷基板等之生產時，亦如上述 使用映射感測器。更有在醫療器具之保管管理上，亦可使 用映射感測器檢測物品之有無或其保管位置。 上述映射感測器具有投光元件及受光元件之檢測頭， 此種映射感測器或採用此種映射感測器之晶圓等之檢測裝 置已揭示於上述專利文獻1〜4中。專利文獻1及2揭示一 種以含有一對棱鏡之稜鏡構造體作為主體，使用小型且可 向相反之2方向投光或受光之雙向檢測頭，將此等作為投 光用或受光用而交互排列所成之晶圓等之檢測裝置。此種 1326117 第94143310號專利申請案 補充、修正後無劃線之說明書修正頁一式三份 晶圓等之檢測裝置，因需使一個投光元件或受光元件在一 直線上與相反之2條檢測光軸對應，即因為由纖維夾具支 撑之一對反射稜鏡之入射光軸或出射光軸沿一條直線，故 可節省奴光元件及受光元件之數，並且可檢測晶圓等之精 確位置。 專利文獻3揭示一種由透明樹脂形成含一對稜鏡之稜 鏡構造體，在一個纖維用檢測頭構成可向相反2方向投光 或欠光之小型雙方向性檢測頭，將投光用及受光用之雙方 向性檢測頭交互排列所構成之纖維感測器用檢測頭。如此 構成之纖維感測器用檢測頭，可由一個投光元件或受光元 件對應2條檢測光軸，因此可檢測串聯排列之多數薄形物。 專利文獻4揭示一種通過設於檢測頭之投光部及受光 部，使本體機殼之投光元件與受光元件光結合之晶圓感測 器。此種晶圓感測器，極易於電氣佈線，同時在檢測頭故 障時，亦無需佈線作業僅抽換檢測頭即可，因此可簡化曰 常維修工作。 11-074331 號公報（段落[0006]、 專利文獻1 :日本特開平 [0019]) 專利文獻2:日本特開平11〇74332號公報（段落[〇〇〇6]、 [0019]) 專利文獻3 : 專利文獻4 : 【發明内容】 曰本特開平11-064101號公報（段落[0018]) 曰本特開平10-070176號公報（段落[0014]) 但是上述專利文獻1〜4所揭示之檢測裝置等，係使一 1326117 第94143310號專利申請案 補充、修正後無劃線之說明書修正頁一式三份 個投光元件或受光元件在一直線上與相反之2條檢測轴對 應，因而得以節省投光元件及受光元件之數，或將投光元 件與受光元件光結合，得以容易進行電氣佈線，但是映射 感測器增加時，電氣訊號佈線之條數增加，而有電氣訊號 線之佈線作業煩雜之問題。 例如映射感測器周邊’為各個映射感測器組需有訊號 線及電源線之佈線，且在接收此等訊號連接至主機系統及 自動化機器之終端處，需對各個映射感測器佈線。結果， • 除有佈線多、增加端子座及佈線之問題外，增加佈線工數， 組裝檢査及各感測器之調整等亦頗費時間與勞力。而且， 隨佈線工數之增加，引起工期延長及成本增加以及設備容 積增加等問題。 又，映射感測器之故障若是上述佈線之斷線時，其維 修工作會隨著佈線之增加比例的變為煩雜及增加工作時間 之外，由於裝置之小型化，佈線成問題且佈線數多也會影 響可靠性。 又，訊號處理時若是有多數感測器同時動作時，易於 拾取（pick up)來自其他映射感測器漏洩之光，及因映射感 ，器附近之照明光之訊號雜訊，以致需要作微調整等煩雜 操作。又，如提高被檢測體之檢測靈敏度，則會誤檢測其 他照明所發出之光，或拾取其他映射感測器之光而發生誤 動作等問題，以致有常需微調整之缺失。 再者’由於各個檢測頭同時動作，因此線路之耗電量 與映射感測器之數成比例的增加，結果電源容量增加，同 7 1326117 ，94143310號專利申請案 補充、修正後無劃線之說明書修正頁一式三份 時在檢測頭之映射感測器間會因回繞而發生誤動作問題。 本發明係在共用訊號線上，即在輸送操作終端設備所 需之電力的線路上重疊被檢測體之檢測資訊，藉以減少電 源與訊號線之連接，同時將各個映射感測器之投光及受光 動作時期分時（time division)，使具有能控制彼此映射感測 器干擾之投光驅動電路及受光時間調整電路，同時具有能 自左右兩方向簡易調整各個映射感測器的靈敏度之構造及 調整電路。由此調整感測器的靈敏度後，可自多方向確認 電路動作正常之顯示，又可減少該映射感測器系統動作時 之電量，同時亦彳容易裝設調整映射感測胃，實現佈線及 佈線作業之簡化。 即，本發明之第i目的為，提供一種映射感測器系統， 可減低電源及訊號線之佈線與連接，同時即便映射感測器 數增加’亦可因以佈線與連接簡單之跨接佈線抑制彼此映 射感測器之干擾。 本發明之第2目的為’提供一種映射感測器系統，可 自左右兩方向簡易調整各個感測器之靈敏度且當感測器靈 敏度調整完成時’可自多方向確認線路動作為正常之顯示。 本發月之第3目的為，提供一種映射感測器系統，可 =低映射感測ϋ群在動料之電量，同時料進行裝設調 整且又可因省略佈線而簡化佈線作業。 请求項1之發明為一種映射感測器系統，其特徵為， 如圓卜圖3、圖7、圖9、圖u〜圖13、圖”所示，且有 可監視被控制部之感測器部（124)之多數檢測頭之映射感測 1326117 第94143310號專利申請案 補充、修正後無劃線之說明書修正頁一式三份 器（111) ’而該多數之檢測頭之映射感測器（1U)連接於共用 數據訊號線（11、12)’通過該共用數據訊號線（U，12)將來 自上述感測器部（12句之監視訊號傳遞至控制部24。 依上述請求項1之映射感測器系統，可運用：將映射 感測器（111)之訊號疊置於來自電源之電力，利用移位寄存 器（Shift Register)轉送該訊號，同時各映射感測器〇 i i)間利 用跨接佈線連接’或各映射感測器（111)間利用光傳遞訊號 方式’將訊號線數整合成2條電源線（共用數據訊號線D + (11)及D-(12))，而大幅減少佈線數。因此尤其可在半導體 工廠設備或液晶工廠設備上實現設備之小型化及節省空 間。 請求項2之發明為一種映射感測器系統，其特徵為， 如圖1〜圖3、及圖7、圖9、圖11〜圖13、圖17所示，備 有：一時序移動訊號發生電路（113、120、121、122)，用以 發生同步於規定之同步傳遞時鐘之投光時序移動訊號（6〇) 或時序移動訊號（87); —投光訊號發生電路（114)，用以在 上述投光時序移動訊號（60)或上述時序移動訊號（87)之控 制下，為檢測被檢測體（8)之各多數檢測頭之映射感測器系 統内所構成之單一檢測用投光器（18)，或多數檢測用投光 器’依據上述同步傳遞時鐘按序使各個上述映射感測器中 之上述單一檢測用投光器（18)或多數上述檢測用投光器（18) 發光；一檢測受光電路（116)，用以配合上述單一檢測用投. 光器（18)或多數之上述檢測用投光器之發光時序，接受單一 檢測用受光訊號（5)或多數之上述檢測用受光訊號；一動作 9 1326117 第94143310號專利申請案 補充、修正後無劃線之說明書修正頁一式三份 顯示電路（118)，用以保持上述檢測用受光訊號；及一傳遞 輸出訊號電路（117)，用以將上述單一檢測用受光訊號（5)或 多數之上述檢測用受光訊號作為監視訊號發出至共用數據 訊號線（11、12)。 。依上述請求項2之映射感測器系統，可將各個映射感 測器（111)分時動作，解除來自其他映射感測器之光干擾問 題，同時可抑制電路動作電流之增加，而有利於設備小型 化及減低成本。具體的說，可將用以發生同步於規定之同 步傳遞時鐘之投光時序移動訊號（6〇)或時序移動訊號之時 序移動訊號發生電路⑴3)，及在時序移動訊號⑽)或時序 移動訊號之控制下，檢測被檢測體之各個檢測頭之映射感 測器（ill)中所構成之檢測用投光器（18)，依據同步傳遞: 鐘按序個別發光’響應其發光時序控制檢測用受光訊號 將此檢測受光訊號作為監視訊號送出至共用數據訊號^線 (11、12)，因此依上述分時進行投光動作，即可實現電流之 最小化且可解決光之干擾問題。 机 請求項3之發明為一種映射感測器系統，A 如圖1〜圖3、或圖7、圖〜圖13、圖、17^，’ 於請求項1或2之映射感測器系統’將該檢測頭之映:咸 測器（111)之依序地址號碼之時序移動訊號，向次—檢^ 之映射感測器（111)，順序作為電氣訊號送出，得以夕 檢測頭之映射感測器（1U)取進感測器訊號。 夕數 此請求項3之映射感測器系統，由於可使各個 測器_作分時動作，避免與其他感測器之、：感 10 1326117 第94143310號專利申請案 補充、修正後無劃線之說明書修正頁一式三份 擾，提高投光輝度，因而可改善來自外部之 肋㈣之強度比率及提高對各個被檢測體之檢測靈敏度巧同 1容易實行靈敏度之調整。又，若採料自多方向監視 :多純顯不，使能顯示出靈敏度調整適當之感測器動 作，則可減少顯示器數及減低電路電流及電路成本。結果 不但可減少佈線數與連接，同時動作調整得以簡便化，甚 至免調整’顯著減少裝設工作及免除"調整之負擔。Description of the patent application No. 94143310 and the absence of a line after the correction ^: Amendment page in triplicate IX. Description of the invention: [Technical field of the invention] The present invention relates to the detection of the presence or absence of a flat article or a shaped article or the like The mapping sense m used for the storage location is, in particular, a mapping sensor system for detecting the presence or absence of a thin plate or its material position in a liquid crystal process, or for detecting the presence or absence of a semiconductor wafer or its storage location. [Prior Art] In the storage or management of flat articles and shaped articles, the presence or absence of such articles or their storage locations is extremely important in the storage and management of such articles during the manufacturing process or use of such articles. Important, this information can be transferred to the host system or the automated machinery of the sub-process, which enables automation on the production line or inspection line or storage management. For example, in a semiconductor factory, a mapping sensor is used to detect the presence or absence of a semiconductor wafer or a storage location, and the above-described detection result data is transmitted to an automated manufacturing machine or inspection equipment, a storage machine, a production line, or a glass or disk for liquid crystal. When producing with a glass plate, a printed substrate, or the like, a mapping sensor is also used as described above. In addition, in the storage management of medical devices, it is also possible to use a mapping sensor to detect the presence or absence of an item or its storage location. The mapping sensor includes a light-emitting element and a detection head of the light-receiving element, and such a mapping sensor or a detecting device using such a mapping sensor or the like is disclosed in the above Patent Documents 1 to 4. Patent Documents 1 and 2 disclose a two-way detecting head which is small and can project or receive light in the opposite directions by using a 稜鏡 structure including a pair of prisms as a main body, and interacts as a light projecting or light receiving means. A detection device such as a wafer or the like is arranged. The detection device of the patent application No. 1 326 117, No. 94,432, 311, the correction of the unlined specification, the detection device of the three-part wafer, etc., because one light-emitting element or the light-receiving element is required to be in the straight line and the opposite two detection lights The axis corresponds to the fact that the optical axis or the outgoing optical axis of one of the pair of fiber holders is in a straight line, so that the number of slave elements and light-receiving elements can be saved, and the precise position of the wafer or the like can be detected. Patent Document 3 discloses a structure in which a pair of bismuth-containing structures are formed of a transparent resin, and a small-sized bidirectional detecting head capable of emitting light or omitting in opposite directions in one fiber detecting head is used. A detection head for a fiber sensor formed by alternately arranging the bidirectional detection heads for light reception. The detection head for the fiber sensor thus constructed can detect the optical axis by two light-emitting elements or light-receiving elements, and thus can detect a plurality of thin objects arranged in series. Patent Document 4 discloses a wafer sensor that combines a light projecting element of a main body casing and a light receiving element by a light projecting portion and a light receiving portion provided in the detecting head. Such a wafer sensor is extremely easy to electrically route, and when the head is faulty, it is not necessary to perform a wiring operation, and only the head is replaced, thereby simplifying the maintenance work. Japanese Laid-Open Patent Publication No. H11-074331 (Patent Document 1) Japanese Patent Application Laid-Open No. Hei No. Hei No. Hei. [Patent Document 4] [Patent Document 4] [Patent Document No. 11-064101] (Paragraph [0018]) JP-A-10-070176 (paragraph [0014]) However, the detection disclosed in the above Patent Documents 1 to 4 The apparatus and the like are supplemented with the patent application No. 1326117, No. 94,432,310, and the revised page without the scribe line. The three-part light-emitting element or the light-receiving element corresponds to the opposite two detection axes in a straight line, thereby saving investment. The number of optical elements and light-receiving elements, or the combination of the light-emitting elements and the light-receiving elements, facilitates electrical wiring. However, when the mapping sensor is increased, the number of electrical signal wirings increases, and the wiring operation of the electrical signal lines is complicated. The problem. For example, the mapping sensor periphery's wiring for each signal and power line is required for each mapping sensor group, and each mapping sensor needs to be wired at the terminal receiving the signals connected to the host system and the automated machine. As a result, • In addition to wiring problems, increased terminal block and wiring problems, it is time-consuming and labor-intensive to increase the number of wiring, assembly inspection, and adjustment of each sensor. Moreover, as the number of wiring work increases, problems such as extension of construction period and cost increase, and increase in equipment capacity are caused. Moreover, if the fault of the mapping sensor is disconnected from the above wiring, the maintenance work will become complicated and increase the working time with the increase of the wiring ratio, and the wiring is problematic and the number of wiring is large due to the miniaturization of the device. It also affects reliability. Moreover, if there are many sensors operating at the same time during signal processing, it is easy to pick up the light leaking from other mapping sensors, and the signal noise of the illumination light near the device due to the sense of mapping, so that it is necessary to make a micro Adjustment and other cumbersome operations. Further, if the detection sensitivity of the subject is increased, the light emitted by the other illumination is erroneously detected, or the light of other mapping sensors is picked up, and malfunction occurs, so that the micro adjustment is often required. Furthermore, since each of the detecting heads operates at the same time, the power consumption of the line increases in proportion to the number of mapping sensors, and as a result, the power supply capacity increases, and the patent application of No. 7 1326117 and 94143310 is supplemented and corrected without a line. When the manual revision page is in triplicate, a malfunction occurs due to the wrap around the mapping sensor of the detecting head. The invention overlaps the detection information of the detected object on the shared signal line, that is, on the line for transmitting the power required for operating the terminal device, thereby reducing the connection between the power source and the signal line, and simultaneously projecting and receiving the light of each mapping sensor. The time division of the operation period enables the light-emitting driving circuit and the light-receiving time adjusting circuit capable of controlling the interference of the mapping sensors, and has the structure and adjustment for easily adjusting the sensitivity of each mapping sensor from the left and right directions. Circuit. By adjusting the sensitivity of the sensor, the display of the normal operation of the circuit can be confirmed from multiple directions, and the power of the mapping sensor system can be reduced, and the adjustment mapping sensing stomach can be easily installed to realize wiring and Simplification of wiring work. That is, the first object of the present invention is to provide a mapping sensor system which can reduce the wiring and connection of the power supply and the signal line, and at the same time, even if the number of mapped sensors is increased, the wiring can be easily connected by wiring and connection. The interference of mapping sensors to each other is suppressed. A second object of the present invention is to provide a mapping sensor system that can easily adjust the sensitivity of each sensor from both left and right directions and can confirm that the line action is normal from multiple directions when the sensor sensitivity adjustment is completed. . The third objective of this month is to provide a mapping sensor system that can detect the amount of power of the turbulent group in the low-mapping, and at the same time, adjust the wiring and simplify the wiring operation by omitting the wiring. The invention of claim 1 is a mapping sensor system, which is characterized in that, as shown in FIG. 3, FIG. 7, FIG. 9, FIG. 9 to FIG. 13, and FIG. Mapping detection of a plurality of detecting heads of the device portion (124) 1326117 Patent application No. 94,432,310, amendment, no-lined instruction, correction page, triplicate (111) 'and the mapping sensor of the majority of the detecting heads (1U) is connected to the shared data signal line (11, 12)' through the common data signal line (U, 12) from the sensor portion (12-segment monitoring signal is transmitted to the control unit 24. According to the above request item 1 The mapping sensor system can be used to: superimpose the signal of the mapping sensor (111) on the power from the power source, transfer the signal by using a shift register (Shift Register), and simultaneously map the sensors 〇 ii) Use the jumper wiring connection' or the optical signal transmission mode between the mapping sensors (111) to integrate the number of signal lines into two power lines (shared data signal lines D + (11) and D-(12)), And greatly reduce the number of wiring. Therefore, especially in semiconductor factory equipment or LCD The device is miniaturized and saves space on the device. The invention of claim 2 is a mapping sensor system, which is characterized in that, as shown in FIG. 1 to FIG. 3, FIG. 7, FIG. 9, FIG. 11 to FIG. 17 is provided with: a time-series mobile signal generating circuit (113, 120, 121, 122) for generating a light-emitting timing shift signal (6〇) or a timing shift signal (87) synchronized with a predetermined synchronous transfer clock. a light-emitting signal generating circuit (114) for detecting a majority of the detecting heads of the detected object (8) under the control of the light-emitting timing shift signal (60) or the timing shift signal (87) A single detection emitter (18) or a plurality of detection emitters in the sensor system sequentially causes the single detection emitter (18) or most of the detections in each of the mapping sensors in accordance with the synchronous transfer clock. Illuminating with a light projector (18); a detecting light receiving circuit (116) for receiving a single detecting light receiving signal (5) or for matching the light emitting timing of the single detecting emitter (18) or the plurality of detecting emitters most The above-mentioned detection receiving light signal; an action 9 1326117, the patent application No. 94,432,310, the revised, unlined instruction manual correction page, the triplicate display circuit (118) for maintaining the above-mentioned detection received light signal; and a transmission output The signal circuit (117) is configured to send the single detection light receiving signal (5) or a plurality of the detected light receiving signals as a monitoring signal to the common data signal line (11, 12). According to the mapping sense of the above request item 2 The detector system can time-distribute each mapping sensor (111) to remove the light interference problem from other mapping sensors, and at the same time, can suppress the increase of circuit operating current, which is beneficial to equipment miniaturization and cost reduction. Specifically, the timing shift signal generating circuit (1) 3) for generating the light-emitting timing (6〇) or the timing shift signal synchronized with the specified synchronous transfer clock, and the timing shift signal (10) or the timing shift signal may be used. Under the control of the detection, the detection emitter (18) formed in the mapping sensor (ill) of each detection head of the object is detected, and the light is transmitted according to the synchronization: the clock is sequentially illuminated, and the light receiving signal is detected in response to the illumination timing. The detection signal is sent as a monitoring signal to the common data signal line (11, 12). Therefore, the current can be minimized and the light interference problem can be solved by performing the light-emitting operation in the above-mentioned time division. The invention of claim 3 is a mapping sensor system, A as shown in FIG. 1 to FIG. 3, or FIG. 7, FIG. 13, FIG. 13, FIG. 17, and the mapping sensor system of claim 1 or 2. The detection head is reflected by the timing signal of the sequence address number of the salt detector (111), and the mapping sensor (111) of the secondary-detection is sequentially sent as an electrical signal, so that the sense of mapping of the head can be detected. The detector (1U) takes in the sensor signal. In the case of the mapping sensor system of the request item 3, since the respective detectors can be operated in a time-sharing manner, avoiding the interference with other sensors: the sense of 10 1326117 patent application No. 94143310 is added, and the line is not marked after correction. The manual correction sheet is a three-way disturbance, which improves the brightness of the projection light, thereby improving the intensity ratio of the external ribs (4) and improving the detection sensitivity of each of the objects to be easily adjusted. In addition, if the material is monitored from multiple directions: if it is more pure, it can display the sensor operation with appropriate sensitivity adjustment, which can reduce the number of displays and reduce the circuit current and circuit cost. As a result, not only the number of wires and connections can be reduced, but also the adjustment of the operation can be simplified, and even the adjustment can be reduced to significantly reduce the burden of installation work and exemption.
請求項4之發明為一種映射感測器系統，其特徵為， 如圖1〜圖3、圖7、或圖9、所示，於請求項1或2之映射 感測器系統’依序將地址號碼之時序移動訊號作為投光訊 號’送至下-檢測頭之映射感測器〇11)，而自多數任意之 檢測頭之映射感測器〇11)取得感測器訊號。 依此請求項4之映射感測器系統，由於依序將地址號 碼=時序移動訊號作為投光訊號送至下—檢測頭之映射感 測，（111) ’目而可自多數任意之檢測頭之映射感測器（⑴) 取知·感測器訊號。其結果，由於使各個映射感測器（111)分 時動作，因而可消除與其他感測器之動作發生干擾，提高 杈光輝度，改善來自外部之光雜訊之強度比率，提高對各 個被檢測體之㈣靈敏度，同時能容易的實行靈敏度之調 整。 明求項5之發明為一種映射感測器系統，其特徵為， 如圖1、圖2'圖7、或圖9、圖11〜圖13、圖17所示， 於明求項1或2之映射感測器系統中，在檢測頭之映射感 測器（111)的左右設置有檢測靈敏度調整可變電阻器（19、 11 1326117 ，94143310號專利申請案 補充、修正後無劃線之說明書修正頁一式三份 20)，及在可自多方向確認之位置上裝設有單一感測器動作 顯不 LED(23)。 依此請求項5之映射感測器系統，其裝設之單一感測 器動作顯示LED(23)可自多方向確認。同時，各個映射感 測器（111)因可使用規格化之長度之跨接佈線或藉由訊號與 電源線之重疊，使對於電源重疊共用數據訊號線之連接得 以同時達成映射感測器（111)之固定，從而減少佈線數及減 低佈線工數。 再者如圖11〜圖14所示，將多數之檢測頭之映射感 測is(iii)裝設於固定板（97)，在各個映射感測器（111)間依 序使用跨越佈線（96)，構成可傳遞時序移動訊號、檢測頭共 用之電路用供應電源電力及傳遞數據訊號。 另外，亦可如圖2所示，可於裝設映射感測器（111)之 裝設板上設置共用之導體（13)，在此導體（13)使用裝設檢測 頭之映射感測器（m)之導電性固定具（16)，傳送檢測頭之 映射感測器（111)共用之電路用供給電源之電力及傳遞數據 訊號。 依據本發明，使由映射感測器對被檢測體測得之檢測 訊號付載於電源線，即，可使上述制訊號與來自電源之 電力重疊省略訊號佈線，從而省略映射感測器間之佈線 及映射感測II與總局（master statiGn)間之佈線，實現減低佈 線工數及達成佈線空間之小型化。 另外又具有可容易調整及變更映射感測器間之間隔及 容易增減映射感測器數之優點。另外，映射感測器可分別 12 1326117 第94143310號專利申請案 補充、修正後無劃線之說明書修正頁一式三份 對被檢測體以不同時序，同步於投光時序而受光，因此完 全不受其他映射感測器訊號之影響，可增大投光量而實行 南靈敏度之檢測，又由於不同時投光因此又可減低投光時 • 之電力消耗。又，各映射感測器間之訊號傳輸如使用同一 規格之跨越佈線’則可容易設定及變更各映射感測器間之 間隔°再者’如用光傳輸相鄰映射感測器間之傳輸訊號， 則更可減低映射感測器間之佈線。 •^ 【實施方式】 以下依實施例說明實施本發明之最佳方式。 〈第1實施例〉 圖1〜圖17說明本發明之第i實施態樣。 圖17為本發明之映射感測器系統。圖中符號130 (由 虛線圍繞之方境部分）為以往之支局（branch 〇ffice)輸入部 及感測器部’此等部分由映射感測器（m)置換者為本發明 之映射感測器系統。 圖1為本發明之映射感測器系統之側視圖。映射感測 'φ 器（111)具備：多數之映射感測器支局（9、7a〜7h)及裝設此 等感測器支局（9、7a〜7h)之固定板⑴。g]定板⑴具備：向 垂直方向延設之板狀絶緣體（14);及沿垂直方向以規定間隔 分別埋設於該絕緣體之2條角柱狀導體（13、13)且使該等柱 狀導體露出於絶緣體（14)之表面，如圖2所示。上述多數映 - 射感測器支局（9、7a〜7h)沿長度方向以規定間隔固定在固定 板（1)。又’ 2條導體（13、13)經過電源重疊共用數據訊號線 D+(U) ’及電源重疊共用數據訊號線D-(12)，供應電源之 13 1326117 第94143310號專利申請案 補充、修正後無劃線之說明書修正頁一式三份 電力至映射感測器支局（9、7a〜7h)，同時將感測器部（124) 之監視訊號傳送至電源重疊共用數據訊號線D+(ll)及電源 重疊共用數據訊號線D—(12)。 圖1所示者為將9組映射感測器支局（9、7a〜7h)固定於 固定板（1)之例。但實際上係將例如25絚、32組、50組或 更多之映射感測器固定於固定板使用’為了說明方便只例 示9組。於圖1 ’例如僅在位於最下段之感測器支局A(9) 的上方配置感測器支局B(7a〜7h)之電路（圖9)與訊號傳遞 電路不同之電路（圖7)。又，圖1為被檢測體（8)以殘缺狀態 存在之事例。 圖1之事例係自下向上傳輸訊號者，自上向下傳輸訊 號時’在最上部設置感測器支局A(9)，而在其下方亦可使 用感測器支局B(7a〜7h)。 圖2表示本發明之將映射感測器支局以螺栓固定在固 疋板（1)之模式圖。於圖2顯示各零件之裝設狀態。於2條 導體（13、13)之表面，在此等導體之長度方向隔距形成有多 數螺栓孔（15)，而導體（13、13)之中除形成有螺栓孔（15)之 ^以外之其他3面均由絶緣體（14)覆蓋成電氣絶緣，同時此 等導體（13、13)具有足够之強度固定感測器支局A(9)或感 測器支局B(7a〜7h卜映射感測器支局（9、7a〜7h)係藉裝設 檢測頭之映射感測器（m)之固定螺栓（16)螺合於上述螺栓 孔（丨5)，而固定於固定板（丨）。又，映射感測器支局（9、7a〜7h) 之電路（圖7)係經由導體（13)連接於電源重疊共用數據訊 號線D+(11)及電源重疊共用數據訊號線D_(l2),由此可 14 1326117 第94143310號專利申請案 補充、修正後無劃線之說明書修正頁一式三份The invention of claim 4 is a mapping sensor system, characterized in that, as shown in FIG. 1 to FIG. 3, FIG. 7, or FIG. 9, the mapping sensor system of claim 1 or 2 is sequentially The time-series mobile signal of the address number is sent as a light-emission signal 'to the lower-detection head mapping sensor 〇11), and the sensor signal is obtained from the mapping sensor 〇11) of most arbitrary detection heads. According to the mapping sensor system of claim 4, since the address number=time-sequence mobile signal is sequentially sent as a light-emitting signal to the lower-detection head mapping sensing, (111) 'the target can be from any arbitrary detection head The mapping sensor ((1)) acquires the sensor signal. As a result, since each mapping sensor (111) is time-divisionally operated, it is possible to eliminate interference with the operation of other sensors, improve the brightness of the dimming, improve the intensity ratio of the optical noise from the outside, and improve the ratio of each of the external noises. The sensitivity of the detector is (4), and the sensitivity adjustment can be easily performed. The invention of claim 5 is a mapping sensor system, which is characterized in that, as shown in FIG. 1, FIG. 2, FIG. 7, or FIG. 9, FIG. 11 to FIG. 13, FIG. In the mapping sensor system, a detection sensitivity adjustment variable resistor is provided on the left and right sides of the mapping sensor (111) of the detecting head (the patent application No. 19, 11 1326117, 94143310 is added, and the line after the correction is not marked) The correction page is in triplicate 20), and a single sensor action display LED (23) is mounted at a position that can be confirmed from multiple directions. According to the mapping sensor system of claim 5, the single sensor action display LED (23) installed can be confirmed from multiple directions. At the same time, each mapping sensor (111) can use the normalized length of the jumper wiring or the overlap of the signal and the power line, so that the connection of the power data overlapping common data signal line can simultaneously achieve the mapping sensor (111) ) fixed, thus reducing the number of wiring and reducing the number of wiring. Further, as shown in FIG. 11 to FIG. 14, a plurality of detection heads sensed is(iii) are mounted on the fixed board (97), and a spanning wiring (96) is sequentially used between the respective mapping sensors (111). ), which can be used to transmit time-series mobile signals, supply power to the circuit shared by the detection head, and transmit data signals. In addition, as shown in FIG. 2, a common conductor (13) may be disposed on a mounting board on which the mapping sensor (111) is mounted, where the conductor (13) uses a mapping sensor equipped with a detecting head. The conductive fixture (16) of (m) transmits the power of the power supply and the data transmission signal to the circuit shared by the mapping sensor (111) of the detection head. According to the present invention, the detection signal measured by the mapping sensor on the detected object is carried on the power supply line, that is, the signal can be overlapped with the power from the power supply to omit the signal wiring, thereby omitting the wiring between the mapping sensors. And the wiring between the mapping sensing II and the main office (master statiGn), to reduce the number of wiring and to achieve miniaturization of wiring space. In addition, it has the advantage that the interval between the mapping sensors can be easily adjusted and changed, and the number of mapping sensors can be easily increased or decreased. In addition, the mapping sensor can be supplemented by the patent application No. 94 1 326 117, respectively, and the revised page without the scribe line is corrected in triplicate, and the subject is received at different timings in synchronization with the light projection timing, so that it is completely unaffected. The influence of other mapping sensor signals can increase the amount of light emitted and perform the detection of the south sensitivity, and the power consumption of the light source can be reduced because the light is not emitted at the same time. Moreover, the signal transmission between the mapping sensors can easily set and change the interval between the mapping sensors by using the same specification of the spanning wiring'. Further, if the transmission between adjacent mapping sensors is transmitted by optical transmission, The signal can also reduce the wiring between the mapped sensors. • Embodiments Hereinafter, the best mode for carrying out the invention will be described by way of examples. <First Embodiment> Figs. 1 to 17 illustrate an i-th embodiment of the present invention. Figure 17 is a mapping sensor system of the present invention. In the figure, the symbol 130 (the boundary portion surrounded by the dotted line) is the previous branch (branch 〇ffice) input portion and the sensor portion'. These portions are replaced by the mapping sensor (m) as the mapping sensing of the present invention. System. 1 is a side view of a mapping sensor system of the present invention. Mapping Sensing The 'φ device (111) has a plurality of mapping sensor branches (9, 7a to 7h) and a fixing plate (1) to which the sensor branches (9, 7a to 7h) are mounted. g] the fixed plate (1) includes: a plate-shaped insulator (14) extending in the vertical direction; and two angular columnar conductors (13, 13) embedded in the insulator at predetermined intervals in the vertical direction and having the columnar shape The conductor is exposed on the surface of the insulator (14) as shown in FIG. The plurality of reflection sensor branches (9, 7a to 7h) are fixed to the fixed plate (1) at a predetermined interval in the longitudinal direction. And 'two conductors (13, 13) through the power supply overlap shared data signal line D + (U) ' and power supply overlap shared data signal line D- (12), power supply 13 1326117 Patent 94143310 patent application added, corrected The uncorrected manual revision page is divided into three parts of power to the mapping sensor branch (9, 7a~7h), and the monitoring signal of the sensor unit (124) is transmitted to the power supply overlapping common data signal line D+(ll) and The power supply overlaps the shared data signal line D-(12). Fig. 1 shows an example in which nine sets of mapping sensor branches (9, 7a to 7h) are fixed to a fixed plate (1). However, in practice, for example, 25 絚, 32 sets, 50 sets or more of mapping sensors are fixed to the fixed plate for use. For the sake of convenience, only 9 sets are exemplified. In Fig. 1, for example, only the circuit (Fig. 9) of the sensor branch B (7a to 7h) is disposed above the sensor branch A (9) at the lowermost stage, and the circuit is different from the signal transfer circuit (Fig. 7). Further, Fig. 1 shows an example in which the subject (8) exists in a defective state. The example in Figure 1 is for transmitting signals from bottom to top. When transmitting signals from top to bottom, 'the sensor branch A (9) is set at the top, and the sensor branch B (7a~7h) can also be used below it. . Fig. 2 is a schematic view showing the state in which the mapping sensor branch is bolted to the fixing plate (1) of the present invention. Figure 2 shows the installation status of each part. On the surface of the two conductors (13, 13), a plurality of bolt holes (15) are formed in the length direction of the conductors, and the conductors (13, 13) are formed by the bolt holes (15). The other three sides are covered by an insulator (14) to be electrically insulated, and the conductors (13, 13) have sufficient strength to fix the sensor branch A (9) or the sensor branch B (7a ~ 7h map) The sensor branch (9, 7a to 7h) is screwed to the bolt hole (丨5) by the mounting sensor (m) of the mapping sensor (m) of the detecting head, and is fixed to the fixing plate (丨). Further, the circuit (FIG. 7) of the mapping sensor branch (9, 7a to 7h) is connected to the power supply overlap shared data signal line D+(11) and the power supply overlap shared data signal line D_(l2) via the conductor (13). , which can be supplemented by the patent application of 14 1326117 No. 94143310, and the revised page without the scribe line is corrected in triplicate.
將映射感測器資訊，即感測器部（124)所檢測之有無被檢測 體（8)之資訊傳輸至總局（29)。具體而言，其構成為，當^ 檢測體（8)位於規定位置時’感測器部（丨24)之投光 LED( 18)發出之光乃在被檢測體（8)反射而由感測器部（1 μ 之受光用光電電晶體PHTRs(17)受光，檢測被檢測體（8)2 有無存在’若被檢測體（8)不在規定位置時，感測器部（124) 之投光用LED(18)發出之光即不在被檢測體（8)反射，於是 感測器部（124)之受光用光電電晶體PHTRs(l7)不受反射$ 而檢測出被檢測體（8)之不存在。The mapping sensor information, that is, the presence or absence of the detected object (8) detected by the sensor unit (124), is transmitted to the central office (29). Specifically, when the detecting body (8) is at a predetermined position, the light emitted from the light-emitting LED (18) of the sensor portion (丨24) is reflected by the object (8). The detector unit (1 μ of the photoelectron crystal PHTRs (17) receives light, and detects whether or not the subject (8) 2 is present. 'If the subject (8) is not at the predetermined position, the sensor unit (124) is turned on. The light emitted from the light LED (18) is not reflected by the object (8), and the photodetector PHTRs (17) of the sensor unit (124) are not reflected by $, and the object (8) is detected. It does not exist.
此時，依被檢測體之種類增減投光用LED( 18)及受光 用光電電晶體PHTRs(17)之裝設數即可得到最適當之檢測 靈敏度。又，可將感測器部（124)之檢測靈敏度構成可由檢 測靈敏度調整電路（119)調整。此檢測靈敏度調整電路（119) 備有：設於各感測器支局（9、7a〜7h)右側邊緣之右側檢測靈 敏度調整調節器VRr(19)及設於各感測器支局（9、7a〜7h)左 側邊緣之左側檢測靈敏度調整調節器VR1(20)。各感測器支 局（9、7a〜7h)之初始設定及感測器支局（9、7a〜7h)之替換時 之檢測靈敏度設定，可由右側檢測靈敏度調整調節器 VRr(19)或左側檢測靈敏度調整調節器VRL(20)之任何一 邊，看著感測器動作顯示LED(23)方便的實行。由地址投 光用LEDa(21)對下一地址之感測器支局送出地址訊號，而 由地址受光用光電電晶體PHTRs(22)接收訊號。 圖3為顯示本發明之多數感測器支局（9、7a〜7h)與電源 重疊共用數據訊號線D+(ll)以及電源重疊共用數據訊號 15 1326117 第94143310號專利申請案 補充、修正後無劃線之說明書修正頁一式三份 線D—(12)與總局（29)之連接情形，及顯示總局（29)與控制 部（24)之外部輸入單元（25)及外部輸出單元（26)間之數據交 換用連線情形方塊圖。圖3為於本發明之感測器支局（9、 7a〜7h)間以光訊號進行訊號傳輸時之方塊圖，依此構成可 省略訊號傳輸線。 圖4為圖3所示之總局（29)之具體構成。總局（29)係經 由電源重疊共用數據訊號線D+(ll)及電源重疊共用數據 訊號線D—（12)接收來自多數感測器支局之映射感測器資 訊。總局（29)之介面電路之傳遞泄放（Bleeder)電流電路（40) 連接於總局輸出部（32)内之電路驅動器（34)，將接受自控制 數據發生裝置（3乃之控制數據連同由定時發生裝置（3幻送 來之時鐘訊號，經由外部訊號連接部（41)送至電源重疊共用 數據訊號線D+( 11 )，或經由外部訊號連接部（42)送至電源 重疊共用數據訊號D-(12)。 電路驅動器（34)對總局輸入部（37)之監視訊號檢測裝 置（39)傳遞數據訊號，並藉由監視數據抽出裝置（38)，與自 定時發生裝置（36)接受之時鐘訊號同步獲得監視數據信 號。將此監視數據信號傳遞至輸入數據部（3〇) ’作為總局發 信訊號（27)傳遞至控制部（24)之輸入單元（25)。另外’控制 部（24)之輸出單元（26)將總局受信信號（28)傳遞至總局之輸 出數據部（31)，將其訊號成分藉由接受自定時發生裝置（36) 之時鐘訊號，在總局輸出部（32)内之控制數據發生裝置（33) 發生控制數據’通過電路驅動器（34)及外部訊號連接部（42) 送至電源重疊共用數據訊號線D—(12)。DC電源（35)係為 16 1326117 第94143310號專利申請案 補充、修正後無劃線之說明書修正頁一式三份 供應電力至總局（29)而連接。 圖5顯示圖4之總局内部之詳細佈線及方塊圖之構成。 定時發生裝置（36)送出時鐘訊號Dck(48)至輸出數據部 (31)，同時對輸入數據部（30)送出數據輸入時鐘訊號 Dick(51) ° 又，定時發生裝置（36)送出控制數據發生部（33)之啓動 訊號ST(50)，將此訊號作為輸出數據部（31)之並聯•串聯變 換預設訊號，同時作為輸入數據部（30)之串聯•並聯變換輸 入數據部移位暫存器之預設訊號。 自控制部（24)之輸出單元（26)送出至總局（29)之輸出數 據部（31)之總局受信訊號（28)，於總局輸出數據部（31)，訊 號經並聯•串聯變換為串聯數據訊號D(49)而被送出至控制 數據發生部（33)，同時在控制數據部（33)作為訊號Pck(53) 被送至電路驅動器（34)。傳遞泄放電流電路（40)與共用數據 訊號線D+(11)及共用數據訊號線D—(12)並聯連接，而電 路驅動器（34)之輸出電流與從泄放電流電路流出之訊號 Ip(55)與電流訊號Iis(57)之合成電流則作為電流訊號Is(56) 檢測流入監視訊號檢測裝置（39)之電路，而由該裝置（39)將 其作為監視訊號檢出，進而作為訊號Diip(54)經由變流器 (47)傳送至監視數據抽出裝置之觸發器（Flip-Flop)。此觸發 器之輸出作為數據輸入監視訊號Diis (52)傳輸至輸入數 據部。 各映射感測器之狀態訊號之串聯數據輸入監視訊號 Diis(52)暫時被儲存於輸入數據部（30)之移位暫存器。串聯 17 1326117 第94143310號專利申請案 補充、修正後無劃線之說明書修正頁一式三份 數據之移位暫存器之各單元（cell)之數據，則直接作為並聯 數據，由輸入通道（P〇rt)i號“0”（43)送至輸入通道i號 “31”（44)，並作為並聯數據送至控制部之輸入單元。至 於，由控制部之輸出單元送出之總局受信訊號（28)，則自輸 出通道p號“0”（45)送入輸出通道p號“31”（46)，且在 輸出數據部（31)内部進行並聯數據之串聯變換，作為亭聯數 據訊號D(49)送至控制數據發生部（33)。 圖6顯示圖5之總局（29)之佈線機能方塊圖之各部之訊 號波形。時鐘訊號Dck(48)在啓動訊號ST(50)之臨限訊號 (threshold signal)後，在到達次一啓動訊號開始之間，將繼 續送出一定周期之時鐘訊號。又，數據輸入時鐘訊號 Dick(51)係用以處理輸入數據部（30)之訊號之時鐘訊號，從 時鐘訊號Dck(48)之時鐘開始點移位時鐘一周期分，等候映 射感測器系統之監視訊號而實行訊號處理。 數據輸入監視訊號Diis(52)表示監視訊號在“0” 、 “Γ 、“〇” 、“Γ之狀態時之訊號例。訊號Pck(53)為 顯示時鐘訊號Dck(48)呈逆相之時鐘訊號，自（要變更）電路 驅動器（34)送出至電源重疊共用數據訊號線D+(11)及電源 重疊共用數據訊號線D—( 12)，進行映射感測器之狀態訊號 處理。訊號Diip(54)係於監視訊號檢測裝置（39)所檢測之監 視訊號藉變流器（47)反轉之輸入電流訊號，對監視數據抽出 裝置之觸發器之輸入端傳輸監視訊號資訊。於該監視數據 抽出裝置之觸發器，與數據輸入時鐘訊號Dick(51)同步， 將數據輸入監視訊號Diis(52)送至輸入數據部（30)。訊號電 18 1326117 第94143310號專利申請案 補充、修正後無割·線之說明書修正頁一式三份 流Ip(55)係為使控制數據隨同時鐘訊號付載於電源重疊共 用數據訊號線D+(ll)及電源重疊共用數據訊號線D、（ 而由傳遞泄放電流電路（40)流出之訊號電流。 圖7為感測器支局A(#〇)(9)之内部佈線圖。感挪器支 局A(#0)為在映射感測器系統中僅在最下段使用之電路構 成。在此，自總局經過共用數據訊號線d+(11)&d〜（12) 所送之時鐘訊號’在時鐘檢測電路（112)被檢測。此被檢測 之時鐘訊號具有在投光時序移動訊號發生電路A( 113)中在 φ 自局内發出投光時序移動訊號（60)之機能。又，投光訊號發 生電路（114)，可使檢測被檢測體（8)之投光用LED(18)發出 之檢測投光訊號，由受光用光電電晶體PHTRs(17)接收檢 測受光訊號，隨後經過電源重疊共用數據訊號線D+(11) 及電源重疊共用數據訊號線D—(12)，對總局傳遞有無被檢 測體（8)及其狀態》 利用映射感測器（111)調整被檢測體（8)之檢測靈敏度 時，可於檢測靈敏度調整電路（119)，用串聯連接之右側檢 測靈敏度調整調節器VRr(19)及左側檢測靈敏度調整調節 -φ 器VR1(20)，自映射感測器系統之左右兩側方便的進行調 整。因此進行檢測靈敏度之調整時不必繞到設有映射感 測器系統（110)之大設備的背後β上述檢測靈敏度之調整動 作狀態，係在動作顯示電路（118)利用感測益動作顯不 LED(23)進行。感測器動作顯示LED(23)具有多面反射板可 自多方向確認其動作，因此易於實行檢測靈敏度及不感帶 等動作範圍之調整及確認作業。 《測器支局A(#0)(9)之感測動作終了後，對相當於下 19 1326117 第94143310號專利申請案 補充、修正後無劃線之說明書修正頁一式三份 一地址之感測器支局B(7a)之地址受光用光電電晶體 PHTRa(22)、由地址投光用LEDa(21)發出地址投光訊號而 傳輸動作訊號（圖7及圖9)。另外，於時鐘檢測電路（II2) ’ 藉由穩壓二極管ZD(78)以21V為閾値檢測時鐘，獲得感測 器支局時鐘訊號CK(58)(圖7)。再者，支局控制電源CV(64) 形成感測器支局A之控制電源。 另者，於投光時鐘移動訊號發生電珞（Π3)，感測器支 局時鐘訊號CK(58)由電晶體TRc(65)放大，其輸出訊號之 一部分通過變流器（66)後，由RC電路變成為時常數3t〇延 時動作（On-delay)訊號（68)。又，由二極管及電阻獲得1/4Τ〇 斷開遲延（Off-delay)訊號（67)。此訊號成為感測器支局之啓 動訊號ST(59)。 由啓動訊號ST(59)與時鐘訊號CK(58)之下降時序設定 觸發器（69)，獲得輸出之投光時序移動訊號（60)。 投光訊號發生電路（114)係藉由電晶體TR1(70)放大投 光時序移動訊號（60)，而從投光用LED(18)及串聯連接之地 址投光電路（115)之地址投光用LEDa(21)，發生地址投光用 訊號（3)。 經由右側檢測靈敏度調整調節器VRr(19)及左側檢測 靈敏度調整調節器VR1(20)調整之檢測訊號乃由檢測受光 電路（116)之運算放大器（74)調整為輸入電壓，而比較器（75) 之輸出訊號S(61)傳輸至動作顯示電路（118)之觸發器 (72)，同時，“及閘”（AND-gate)(71)之輸出進入觸發器（72) 之S端子。觸發器（72)之輸出作為對電晶體TR(76)之驅動 20 1326117 第94143310號專利申請案 補充、修正後無劃線之說明書修正頁一式三份 訊號SD(62)使感測器顯示LED(23)作投光動作。傳遞輸出 訊號電路（117)之及閘（73)採用觸發器（72)之輸出訊號及電 晶體TRC(65)之輸出訊號之時鐘訊號，與投光時序移動訊 號（60)之邏輯積，將訊號Dip(63)傳輸至電晶體TRi(77)，將 該感測器支局A(9)之輸出訊號自電晶體TRi(77)送出至電 源重疊共用數據訊號線D+(ll)及電源重疊共用數據訊號 線D—(12)之間。 圖8為於圖7所示感測器支局A(9)内部之各部的訊號 作為定時圖表表不者。在傳輪線之電源重疊共用數據訊號 線D+(ll)與電源重疊共用數據訊號線d_(12)之間，有 24V之訊號電壓與脈衝訊號重疊，以21V為閾値電壓檢測 感測器支局時鐘訊號CK(58)。 圖8顯示感測器支局時鐘訊號CK(58)之最初下降及感 測器支局啓動訊號ST(59)之反轉訊號成為投光時序移動訊 號（60)之接通時間，以及顯示由時鐘之一周期後之下降訊號 投光時序移動訊號（60)變為斷開之情形。 圖8中’比較器（75)之輸出之訊號s(61)，係因光電電 晶體檢測而稍許比時序移動訊就（6〇)延遲上昇而隨同投光 時序移動訊號（60)延遲下降之訊鞔。訊號sd(62)為感測器 動作顯示LED(23)之驅動訊號。訊號Dip(63)為驅動感測器 支局A之輸出電晶體TRi，經由電源重疊共用數據訊號線 D+(11)與電源重疊共用數據訊鞔線(12)傳遞至總局之 訊號。 圖9為在映射感測器之例如僅在最下段使用之感測器 21 1326117 第94143310號專利申請案 補充、修正後無劃線之說明書修正頁一式三份 支局A以外之感測器支局之感測器支局B(7a〜7h)之電路構 成圖。感測器支局B(7a〜7h)係由最下段之感測器支局A或 比該感測器支局B(7a〜7h)之地址較近之感測器支局 B(7a〜7h)之地址投光用LEDa(21)所投光之地址投光訊號地 址由受光用光電電晶體PHTRa (22)收信，使該感測器支 局B(7a〜7h)開始動作。受光用光電電晶體PHTRa(22)接收 地址訊號，同時經由變流器（79)對觸發器（80)送出訊號 AD(81)。 觸發器（80)於經由電晶體TRc接收到上述訊號AD(81) 及感測器支局B時鐘訊號CK(82)時，產生投光時序移動訊 號LT。隨後之電路動作與上述感測器支局A相同，因此不 予詳述，其中比較器輸出訊號之感測器局B訊號S(83)成為 觸發器FF之輸入訊號，同時感測器支局B訊號SD(84)成 為驅動感測器動作顯示LED之電晶體TR之驅動訊號。另 外，訊號Dip(85)成為電晶體TRi之驅動訊號，用以將該感 測器支局B(7a〜7h)之輸出訊號通過電源重疊共用數據訊號 線D+(ll)與電源重疊共用數據訊號線D —（12)傳送至總 局。 圖10為圖9所示感測器支局B内部各部之訊號以圖表 表示者。感測器支局B時鐘訊號CK(82)係如同上述感測器 支局A之動作，以21V作為閾電壓自傳遞線檢出之時鐘訊 號。訊號AD(81)為該感測器支局B之地址訊號，可經由觸 發器生成該感測器支局B之投光時序移動訊號LT。 於圖 10 中，LT(#1)，LT(#2)，LT(#3)，…LT(#n)，分別 22 1326117 第94143310號專利申請案 補充、修正後無劃線之說明書修正頁一式三份 表示為該感測器支局B之投光時序移動訊號LT(#1)，鄰接 此感測器支局B之投光時序移動訊號LT(#2)，隣接次一感 測器支局B之投光時序移動訊號LT(#3)，…第η個之感測 器支局Β之投光時序移動訊號LT(#n)。 感測器支局B訊號S(83)在投光時序移動訊號LT(#1) 上昇後成為接通，同時隨同鐘訊號CK(82)—周期之下降而 下降。感測器支局B訊號SD(84)則隨同感測器支局Bs訊 號S(83)上昇。訊號Dip(85)隨同感測器支局Ή訊號S(83) 上昇，但經時鐘半周期即下降。 〈第2實施例〉 圖11顯示各感測器支局間利用跨越佈線（86)傳輸投光 訊號及受光訊號之例。跨越佈線（86)係連結各感測器支局間 之配線。各個感測器支局之間係藉感測器支局間之母線電 纜單元（109)使用標準長度之連接電纜連接。因此只要變更 標準長之電纜長度即可自由變更感測器支局之間隔，而且 可利用佈線之寬裕部分對間隔作稍許之變更。如此，將多 數之感測器支局適當排列，即構成本發明之映射感測器系 統（110)。再者，跨越佈線不僅用以連接相隣之感測器支局， 例如，將感測器支局A設於中段時，可用跨越佈線將此感 測器支局A連接於其正上方之感測器支局B，再將此感測 器支局B用跨越佈線連接於感測器支局A正下方之感測器 支局B，進而亦可依序連接於上下之感測器支局B。若是 對位置關係想定順位時，亦可用此方法。 如此，包含跨越佈線部分在内，能以一定形狀、一定 23 1326117 第94143310號專利申請案 補充、修正後無劃線之說明書修正頁一式三份 形態製作各個構件，因此將其事先製備便可在需要時藉由 單純之作業、短期内組裝交貨。 圖12為跨越佈線型感測器支局A之電路圖。藉由時序 移動訊號發生電路AW(121)設定該感測器支局A之檢測投 光訊號之投光時序，同時經由跨越佈線對感測器支局B送 出時序移動訊號（87)。於圖12，繼感測器支局A之後為了 對次一感測器支局B發送投光時序移動訊號特附加有時序 移動訊號（87)。然而不用此種利用光傳送時序移動訊號（87) 之方式而利用跨越佈線即能容易實現。但是，如圖2所示， 使用導體（13)達成電源重疊共用數據訊號線D+(11)與電源 重疊共用數據訊號線D—(12)之連接及感測器支局之固定 之雙層目的時，不使用跨越佈線而採用光之投光時序移動 訊號之連接方式較有利。 圖13為表示跨越佈線型感測器支局B之電路圖。接連 於圖12所示感測器支局A之感測器支局B，以及隨後之感 測器支局B，均與圖13所示電路具有相同構成，即於時序 移動訊號發生電路BW(122)，接受來自前一感測器支局之 訊號AD ( 88)，在該支局完成投光及受光動作後，對後續 之感測器支局送出時序移動訊號（87)。除了此時序移動訊號 (87)之發生電路及接收來自感測器支局之訊號AD ( 88)之 電路外，其餘全與使用光實行地址投光訊號之收送方式相 同，即除了傳送時序移動訊號（87)之端子與時序移動訊號發 生電路BW(122)之一部分之外，電路動作不變’可共用部 分之印刷基板佈線。 24 1326117 第94143310號專利申請案 補充、修正後無劃線之說明書修正頁一式三份 圖14顯示將映射感測器模組（89)組裝於映射感測器基 盤（92)上之順序。首先用映射感測器模組固定螺栓（9〇)將映 - 射感測器模組（89)固定於映射感測器基盤（92 a )上。其次， ‘將映射感測器固定螺检（91)挿通於固定有映射感測器模組 (89)之映射感測器基盤（92)之通孔之後，螺合於固定板（97) 上之映射感測器固定用陰螺紋（9 8)。如此組裝成映射感測器 系統（110)。此時，各映射感測器模組間之連接，係由母線 電缓連結器（95)至映射感測器模組間跨越佈線（96)所連 * 接。又，使用墊片（93)可容易定出映射感測器（94)組裝之間 隔’俾利正確之間隔調整。 圖15為在DIN規格之軌道（99)上固定映射感測器模組 (103)之映射感測器系統例。映射感測器模組（1〇3)係藉映射 感測器墊片固定螺栓（105)固定於安裝支架映射感測器基盤 (101)。使用定位墊片（102)可簡易地將映射感測器模組（1〇3) 以一定間隔固定於轨道（99)。在軌道（99)設有多數之向軌道 長度方向延伸之預留孔（1〇〇)，利用此等預留孔（1〇〇)將映射 -φ 感測器系統固裝於支柱或支架等構造物，使能簡易調整與 被檢測體（8)之位置關係。上述之安裝支架映射感測器基盤 (101)可容易的裝設於DIN規格之轨道（99)，進而藉固定螺 栓緊定防止搖動。另外在安裝支架映射感測器系統基盤 (101)設有母線電纜連接器（1〇4)，藉此母線電境連接器（1〇4) 可將映射感測器模組（103)輕易的裝設於安裝支架映射感測 器基盤（101)上，或方便的作映射感測器模組（1〇3)之交換作 業。 ' 25 1326117 第94143310號專利申請案 補充、修正後無劃線之說明書修正頁一式三份 圖16顯示使用多數檢測投光光電二極管LEDsn(107) 及多數之受光檢測光電電晶體PHTRsn(108)之感測器支局 A之電路構成圖。多數之檢測投光光電二極管LEDsn(107) 及多數之受光檢測光電電晶體PHTRsn(108)係以符號123 表示。因具有多數之檢測投光光電二極管LEDsn(107)，故 能以高靈敏度檢測被檢測體（8)，進而可改善對外干擾訊號 之訊號-噪音比，即S/N比。圖16顯示，於多數之檢測投 光光電二極管LEDsn(107)連接有為此等多數之檢測投光光 電二極管LEDsn(107)供應信號電流之電阻（106)。 即使多數之檢測投光光電二極管LEDsn(107)及多數之 受光檢測光電電晶體PHTRan(108)同時動作，由於整體映 射感測器系統不同時發光，而是分時的動作，因而可將電 路使用電力減至最少，實現裝置之小型化及節電效益。 本發明係利用在生產被檢測體之液晶玻璃、石夕晶圓、 半導體封裝基板之工序，但是在定型形狀之零組件類之生 產、加工、保管等亦可廣泛使用。 26 1326117 第94143310號專利申請案 補充、修正後無劃線之說明^修正頁一式三份 【圖式簡單說明】 圖1本發明第1實施例之多數之映射感測器（111)及 被檢測體（8)之側視圖。 圖2為將多數之映射感測器（ill)藉螺栓固定於固定 板（1)之模式圖，表示各零組件之裝設狀態之斜視圖。 圖3表不多數之映射感測器連接於電源重疊共用數 據訊號線D+U1)及電源重疊共用數據訊號線D_(12)，進 而與總局連接，表示外部輸入單元及外部輸出單元間之數 據授受之連接方塊圖。 圖4表示總局内部之機能方塊與電源重疊共用數據 訊號線之連接及與控制部間之數據授受之方塊圖。 圖5表示總局内部之機能方塊之詳細方塊圖 圖ό表示總局内部各訊號之變化之時序表。 圖7 感測器支局Α之電路圖。 圖8表示感測器支局A内部之各訊號之變化之時序 表。 圖9 感測器支局B之電路圖。 圖1〇表示感測器支局B内部各訊號之變化之時序 表。 圖11由感測器支局之跨越佈線進行投光訊號及受光 訊號之傳輸例之方塊圖。 圖12繼感測器支局A之後，為對次一感測器支局5 發信投光時序移動訊號而附加時移動訊號（87)之跨越佈線 型感測器支局A之電路圖。 27 1326117 第94143310號專利申請案 補充、修正後無劃線之說明書修正頁一式三份 圖13由前面之感測器支局杻— 完成投光及受絲狀後，賊AD而在該支局 移動訊號陳跨越佈線型感心局感 圖丨4顯示將映射感測器模組（89)固定於映L感測器 基座（92)，再將映射感測器模乡且（89)連同映射感測器基座 (92)固疋於固定板（97)而將各模纽間以母線電纜連接器（95)In this case, the optimum detection sensitivity can be obtained by increasing or decreasing the number of the light-emitting LEDs (18) and the light-receiving photovoltaic cells PHTRs (17) depending on the type of the object to be detected. Further, the detection sensitivity configuration of the sensor unit (124) can be adjusted by the detection sensitivity adjustment circuit (119). The detection sensitivity adjustment circuit (119) is provided with: a detection sensitivity adjustment regulator VRr (19) disposed on the right side edge of each sensor branch (9, 7a to 7h) and a detector branch (9, 7a) ~7h) Detect sensitivity adjustment adjuster VR1 (20) on the left side of the left edge. The initial setting of each sensor branch (9, 7a~7h) and the detection sensitivity setting of the sensor branch (9, 7a~7h) can be adjusted by the right side detection sensitivity adjustment regulator VRr (19) or the left side detection sensitivity. Adjust either side of the regulator VRL (20) and watch the sensor action display LED (23) conveniently implemented. The address projection LED a (21) sends an address signal to the sensor branch of the next address, and the address receiving photo-electric crystal PHTRs (22) receives the signal. 3 is a diagram showing a plurality of sensor branches (9, 7a to 7h) of the present invention and a power supply overlap shared data signal line D+(11) and a power supply overlap shared data signal 15 1326117 Patent No. 94,432,310 The line specification correction page is the connection between the triplicate line D-(12) and the central office (29), and between the external input unit (25) and the external output unit (26) of the display central office (29) and the control unit (24). A block diagram of the connection situation for data exchange. FIG. 3 is a block diagram showing the signal transmission between the sensor branches (9, 7a and 7h) of the present invention by optical signals, thereby omitting the signal transmission line. Figure 4 is a diagram showing the specific configuration of the central office (29) shown in Figure 3. The central office (29) receives the mapped sensor information from the majority of the sensor branches via the power supply overlap shared data signal line D+(ll) and the power overlap shared data line D-(12). The Bleeder current circuit (40) of the interface of the central office (29) is connected to the circuit driver (34) in the output of the central office (32) and will be controlled by the control data generating device (3) The timing generating device (3 clock signal sent by the phantom is sent to the power supply overlapping data signal line D+(11) via the external signal connecting unit (41), or sent to the power source overlapping common data signal D via the external signal connecting unit (42). - (12) The circuit driver (34) transmits a data signal to the monitoring signal detecting means (39) of the central office input unit (37), and receives the data extracting means (38) and the self-timing generating means (36). The clock signal is synchronously obtained to obtain the monitoring data signal, and the monitoring data signal is transmitted to the input data unit (3〇) as the input signal (27) of the central office transmission signal (27) to the input unit (25) of the control unit (24). 24) The output unit (26) transmits the central office received signal (28) to the output data portion (31) of the central office, and the signal component is received at the output of the central office by the clock signal received from the timing generating device (36). ) The control data generating device (33) generates control data 'passed by the circuit driver (34) and the external signal connecting portion (42) to the power supply overlapping common data signal line D-(12). The DC power source (35) is 16 1326117 The patent application No. 94143310 is supplemented, and the revised page without the scribe line is supplied in triplicate to the central office (29). Figure 5 shows the detailed wiring and block diagram of the internal office of Figure 4. (36) The clock signal Dck (48) is sent to the output data unit (31), and the data input clock signal Dick (51) is sent to the input data unit (30). The timing generating device (36) sends the control data generating portion ( 33) The start signal ST(50), which is used as the parallel/series conversion preset signal of the output data unit (31), and serves as the serial/parallel conversion input data portion shift register of the input data unit (30). The preset signal is sent from the output unit (26) of the control unit (24) to the central office receiving signal (28) of the output data unit (31) of the central office (29), and is outputted in parallel by the central office output data unit (31). • Series transformation The serial data signal D (49) is sent to the control data generating unit (33), and is sent to the circuit driver (34) as the signal Pck (53) in the control data unit (33). The bleeder current circuit (40) is transmitted. Connected in parallel with the shared data signal line D+(11) and the shared data signal line D-(12), and the output current of the circuit driver (34) and the signal Ip(55) and the current signal Iis (57) flowing out from the bleeder current circuit. The combined current is detected as a current signal Is (56) into the circuit of the monitoring signal detecting device (39), and the device (39) detects it as a monitoring signal, and then acts as a signal Diip (54) via the converter (47) A flip-flop (Flip-Flop) transmitted to the monitoring data extracting device. The output of this trigger is transmitted as a data input monitor signal Diis (52) to the input data section. The serial data input monitoring signal Diis (52) of each state signal of the mapping sensor is temporarily stored in the shift register of the input data unit (30). Serial 17 1326117 Patent No. 94,432,310 Patent Application Supplementary, Corrected, Unlined Instruction Manual Correction Page The data of each unit (cell) of the shift register of the data is directly used as the parallel data by the input channel (P). 〇rt) The "0" "0" (43) is sent to the input channel i number "31" (44) and sent as parallel data to the input unit of the control unit. As a result, the central office received signal (28) sent by the output unit of the control unit is sent to the output channel p number "31" (46) from the output channel p number "0" (45), and is in the output data portion (31). The serial conversion of the parallel data is performed internally, and sent to the control data generating unit (33) as the booth data signal D (49). Figure 6 shows the signal waveforms of the various parts of the wiring function block diagram of the central office (29) of Figure 5. After the threshold signal Dck (48) starts the threshold signal of the signal ST (50), it will continue to send a clock signal of a certain period between the start of the next start signal. Moreover, the data input clock signal Dick (51) is a clock signal for processing the signal of the input data unit (30), and shifts the clock by one cycle from the clock of the clock signal Dck (48), waiting for the mapping sensor system. The signal is processed by the monitoring signal. The data input monitoring signal Diis (52) indicates an example of the signal when the monitoring signal is in the state of “0”, “Γ, “〇”, and “Γ”. The signal Pck (53) is a clock signal with the reverse phase signal of the display clock signal Dck (48), and is sent from the (to be changed) circuit driver (34) to the power supply overlap common data signal line D+(11) and the power supply overlap common data signal line D. - (12), the state signal processing of the mapping sensor is performed. The signal Diip (54) is an input current signal inverted by the monitoring signal detector (47) detected by the monitoring signal detecting device (39), and transmits the monitoring signal information to the input end of the trigger of the monitoring data extracting device. The trigger of the monitoring data extracting device is synchronized with the data input clock signal Dick (51), and the data input monitoring signal Diis (52) is sent to the input data portion (30). Signal No. 18 1326117 Patent No. 94,432,310 is supplemented, and there is no cut/line specification revision page. The three-part stream Ip (55) is to make the control data accompany the clock signal on the power supply overlap shared data signal line D+(ll And the power supply overlaps the shared data signal line D, (and the signal current flowing from the bleeder current circuit (40). Figure 7 shows the internal wiring diagram of the sensor branch A (#〇) (9). A(#0) is a circuit that is used only in the lowermost stage in the mapping sensor system. Here, the clock signal sent from the common data line through the shared data signal line d+(11)&d~(12) The clock detecting circuit (112) is detected. The detected clock signal has a function of emitting a light-emitting timing shift signal (60) in the φ self-office in the light-emitting timing mobile signal generating circuit A (113). The generating circuit (114) can detect the detected light-emitting signal emitted by the light-emitting LED (18) of the object to be detected (8), and receive and detect the light-receiving signal by the light-emitting photovoltaic cell PHTRs (17), and then share the power through the power supply. Data signal line D+(11) and power supply overlap sharing number Signal line D—(12), whether or not the object to be detected (8) and its state is transmitted to the central office. When the detection sensitivity of the object (8) is adjusted by the mapping sensor (111), the sensitivity adjustment circuit can be detected (119). ), using the right side detection sensitivity adjustment adjuster VRr (19) and the left side detection sensitivity adjustment adjustment - φ VR1 (20), which are conveniently adjusted from the left and right sides of the mapping sensor system. The adjustment operation state of the detection sensitivity of the back surface of the large device provided with the mapping sensor system (110) is not required to be adjusted, and is performed by the operation display circuit (118) using the sensory action display LED (23). The sensor operation display LED (23) has a multi-faceted reflector that can confirm its operation from multiple directions. Therefore, it is easy to perform adjustment and confirmation of the detection range such as detection sensitivity and non-sensing belt. "Measurer branch A (#0) (9) After the end of the sensing operation, the address of the sensor branch B (7a), which is equivalent to the patent application of the following 19 1326117, No. 94,340,310, and the revised page without a line, is in the address of the sensor branch B (7a). The transistor PHTRa (22) transmits an operation signal (Fig. 7 and Fig. 9) by the address projection light emitting signal LEDa (21). In addition, the clock detection circuit (II2) 'by the Zener diode ZD ( 78) Using 21V as the threshold detection clock, obtain the sensor branch clock signal CK (58) (Fig. 7). Furthermore, the branch control power supply CV (64) forms the control power of the sensor branch A. The optical clock mobile signal generates power (Π3), and the sensor branch clock signal CK (58) is amplified by the transistor TRc (65), and one of the output signals passes through the converter (66), and then the RC circuit becomes the time. Constant 3t〇 On-delay signal (68). In addition, a 1/4 turn off-delay signal (67) is obtained from the diode and the resistor. This signal becomes the activation signal ST (59) of the sensor branch. The flip-flop (69) is set by the falling timing of the start signal ST (59) and the clock signal CK (58), and the output projection timing shift signal (60) is obtained. The light-emitting signal generating circuit (114) amplifies the light-emission timing shift signal (60) by the transistor TR1 (70), and the address from the light-emitting LED (18) and the serially connected address light-emitting circuit (115) Light LED (21) generates an address projection signal (3). The detection signal adjusted by the right detection sensitivity adjustment adjuster VRr (19) and the left detection sensitivity adjustment adjuster VR1 (20) is adjusted by the operational amplifier (74) of the detection light receiving circuit (116) to an input voltage, and the comparator (75) The output signal S (61) is transmitted to the flip-flop (72) of the action display circuit (118), and the output of the "AND-gate" (71) enters the S terminal of the flip-flop (72). The output of the flip-flop (72) is used as a driver for the transistor TR (76). 20 1326117 Supplement No. 94,342,310 Patent Application, Corrected No Line Correction Page Tri-Four Signal SD (62) enables the sensor to display the LED (23) For the light projection action. The output signal circuit (117) and the gate (73) use the output signal of the flip-flop (72) and the clock signal of the output signal of the transistor TRC (65), and the logical product of the light-emitting timing shift signal (60). The signal Dip (63) is transmitted to the transistor TRi (77), and the output signal of the sensor branch A (9) is sent from the transistor TRi (77) to the power supply overlapping common data signal line D+(11) and the power supply overlaps. Between the data signal lines D-(12). Fig. 8 is a view showing the signals of the respective sections inside the sensor branch A (9) shown in Fig. 7 as a timing chart. Between the power supply overlapping data signal line D+(11) of the transmission line and the power supply overlapping data signal line d_(12), a signal voltage of 24V overlaps with the pulse signal, and the sensor clock is detected with a threshold voltage of 21V. Signal CK (58). 8 shows the initial drop of the sensor branch clock signal CK (58) and the inversion signal of the sensor branch start signal ST (59) becomes the turn-on time of the light-emitting timing shift signal (60), and the display is performed by the clock. After one cycle, the falling signal projection timing shift signal (60) becomes disconnected. The signal s(61) of the output of the comparator (75) in Fig. 8 is slightly delayed by the delay of the timing signal (6〇) due to the photoelectric transistor detection, and the delay signal (60) is delayed with the light emission timing. News. The signal sd (62) is the driving signal of the sensor action display LED (23). The signal Dip (63) is the output transistor TRi of the drive sensor branch A, and is transmitted to the central office via the power supply overlap shared data signal line D+(11) and the power supply overlap shared data signal line (12). FIG. 9 is a sensor branch of a mapping sensor that is used only in the lowermost section, for example, only in the lowermost section, the patent application is supplemented by the patent application No. 94,314,310, and the correction is not corrected. The circuit configuration diagram of the sensor branch B (7a to 7h). The sensor branch B (7a~7h) is the address of the sensor branch B (7a~7h) which is closer to the address of the lowermost sensor branch A or the address of the sensor branch B (7a~7h). The address light-emitting signal address projected by the light-emitting LEDa (21) is received by the light-receiving photovoltaic transistor PHTRa (22), and the sensor branch B (7a to 7h) starts to operate. The light-receiving photoelectric transistor PHTRa (22) receives the address signal, and simultaneously sends a signal AD (81) to the flip-flop (80) via the current transformer (79). The flip-flop (80) generates the light-emission timing shift signal LT when receiving the signal AD (81) and the sensor branch B clock signal CK (82) via the transistor TRc. Subsequent circuit operation is the same as the above-mentioned sensor branch A, so it will not be described in detail, wherein the sensor B signal S (83) of the comparator output signal becomes the input signal of the flip-flop FF, and the sensor branch B signal The SD (84) becomes a driving signal for driving the transistor TR of the sensor action display LED. In addition, the signal Dip (85) becomes the driving signal of the transistor TRi, and the output signal of the sensor branch B (7a~7h) is used to overlap the shared data signal line D+(11) and the power source to share the data signal line. D — (12) is transmitted to the central office. Fig. 10 is a diagram showing the signals of the internal parts of the sensor branch B shown in Fig. 9. The sensor branch B clock signal CK (82) is the clock signal detected from the transmission line with 21V as the threshold voltage as in the above-mentioned action of the sensor branch A. The signal AD (81) is the address signal of the sensor branch B, and the light projecting timing signal LT of the sensor branch B can be generated via the trigger. In FIG. 10, LT (#1), LT (#2), LT (#3), ... LT (#n), respectively, the patent application of No. 22 1326117 No. 94,432,310, and the revised page without the scribe line after correction The triplicate is represented as the light projecting timing movement signal LT (#1) of the sensor branch B, adjacent to the light projecting timing movement signal LT (#2) of the sensor branch B, adjacent to the next sensor branch B The light-emitting timing movement signal LT (#3), ... the ηth sensor branch Β 投 投 投 投 投 时序 移动 移动 # # # # # The sensor branch B signal S (83) is turned on after the light-emitting timing shift signal LT (#1) rises, and decreases with the falling of the cycle signal CK (82). The sensor branch B signal SD (84) rises with the sensor branch Bs signal S (83). The signal Dip (85) rises with the sensor branch signal S (83), but falls after half a cycle of the clock. <Second Embodiment> Fig. 11 shows an example in which a light-emitting signal and a light-receiving signal are transmitted between the respective sensor branches by using a crossing wiring (86). The wiring across the sensor branches is connected across the wiring (86). The bus cable units (109) between the sensor branches are connected by standard length connection cables. Therefore, the interval between the sensor branches can be freely changed by changing the cable length of the standard length, and the interval can be slightly changed by the margin of the wiring. Thus, the majority of the sensor branches are properly aligned to form the mapping sensor system (110) of the present invention. Furthermore, the spanning wiring is not only used to connect adjacent sensor branches, for example, when the sensor branch A is set in the middle section, the sensor branch A can be connected to the sensor branch directly above it by crossing the wiring. B. The sensor branch B is connected to the sensor branch B directly below the sensor branch A by using a spanning wiring, and can also be sequentially connected to the upper and lower sensor branches B. This method can also be used if you want to determine the positional relationship. In this way, the components can be fabricated in a three-part form with a certain shape, a certain shape, and a patent application filed in the patent application No. 23 1326117, No. 94,432,310, and a modified line without a scribe line, so that it can be prepared in advance. Delivered by simple operation and short-term assembly when needed. Figure 12 is a circuit diagram of a cross-route type sensor branch A. The timing of the detection of the projection signal of the sensor branch A is set by the timing shift signal generating circuit AW (121), and the timing shift signal (87) is sent to the sensor branch B via the crossover wiring. In Fig. 12, after the sensor branch A, a timing shift signal (87) is additionally added to transmit the light-emitting timing mobile signal to the next-sensor branch B. However, it is easy to realize the use of the crossover wiring without using the optical transmission timing shift signal (87). However, as shown in FIG. 2, the conductor (13) is used to achieve the connection between the power supply overlap shared data signal line D+(11) and the power supply overlap common data signal line D-(12) and the fixed double-layer purpose of the sensor branch. It is advantageous to use a connection method that uses a light projection timing to move signals across the wiring. Fig. 13 is a circuit diagram showing a branching type sensor branch B. The sensor branch B, which is connected to the sensor branch A shown in FIG. 12, and the subsequent sensor branch B, have the same configuration as the circuit shown in FIG. 13, that is, the timing shift signal generating circuit BW (122), The signal AD (88) from the previous sensor branch is received, and after the light-emitting and light-receiving operations are completed in the branch, the timing signal (87) is sent to the subsequent sensor branch. Except for the circuit for generating the time-series mobile signal (87) and the circuit for receiving the signal AD (88) from the sensor branch, the rest is the same as the method of transmitting the address light-emitting signal by using light, that is, in addition to transmitting the timing mobile signal In addition to the terminal of the (87) and the timing shift signal generating circuit BW (122), the circuit operation does not change, and the printed circuit board wiring can be shared. 24 1326117 Patent Application No. 94,432,310 Supplementary, Corrected, Unlined Instruction Revision Page Triplicate Figure 14 shows the sequence in which the mapping sensor module (89) is assembled onto the mapping sensor substrate (92). The mapping sensor module (89) is first attached to the mapping sensor base (92a) using a mapping sensor module mounting bolt (9 turns). Next, 'the mapping sensor fixed screw inspection (91) is inserted into the through hole of the mapping sensor base plate (92) to which the mapping sensor module (89) is fixed, and screwed onto the fixing plate (97). The mapping sensor is fixed with a female thread (9 8). This is assembled into a mapping sensor system (110). At this time, the connection between each mapping sensor module is connected by the busbar electrical slow connector (95) to the mapping sensor module across the wiring (96). Further, it is easy to determine the interval between the assembly of the mapping sensor (94) by using the spacer (93). Figure 15 is an example of a mapping sensor system with a fixed mapping sensor module (103) on a DIN rail (99). The mapping sensor module (1〇3) is fixed to the mounting bracket mapping sensor base (101) by means of a mapping sensor spacer fixing bolt (105). The mapping sensor module (1〇3) can be easily fixed to the track (99) at regular intervals using the positioning spacer (102). The track (99) is provided with a plurality of reserved holes (1〇〇) extending in the longitudinal direction of the track, and the mapped-φ sensor system is fixed to the pillar or the bracket by using the reserved holes (1〇〇). The structure enables easy adjustment of the positional relationship with the subject (8). The above-described mounting bracket mapping sensor base plate (101) can be easily mounted on the DIN rail (99), and is prevented from being shaken by the fixing bolts. In addition, a busbar cable connector (1〇4) is provided on the mounting bracket mapping sensor system base plate (101), whereby the busbar electrical connector (1〇4) can easily map the sensor module (103). It is installed on the mounting bracket mapping sensor base (101), or conveniently exchanges the mapping sensor module (1〇3). ' 25 1326117 Patent Application No. 94143310 Supplementary, Corrected, Unlined Manual Amendment Page Triplicate Figure 16 shows the use of most of the detection of light-emitting photodiodes LEDsn (107) and most of the photodetection optoelectronics PHTRsn (108) The circuit diagram of the sensor branch A. Most of the detection light-emitting diodes LEDsn (107) and most of the light-detecting photovoltaic cells PHTRsn (108) are indicated by the symbol 123. Since the majority of the detection light-emitting photodiodes LEDsn (107) are provided, the object to be detected (8) can be detected with high sensitivity, and the signal-to-noise ratio of the external interference signal, that is, the S/N ratio, can be improved. Fig. 16 shows that a plurality of detection projection photodiodes LEDsn (107) are connected to a resistor (106) for supplying a signal current to the majority of the detection light-emitting photodiodes LEDsn (107). Even though most of the detection light-emitting diodes LEDsn (107) and most of the light-receiving photoelectric transistors PHTRan (108) operate at the same time, since the overall mapping sensor system emits light at different times, but the time-division action, the circuit can be used. Minimize power and achieve miniaturization and power saving. The present invention is a process for producing a liquid crystal glass, a stone wafer, or a semiconductor package substrate of a sample, but it can also be widely used for production, processing, storage, and the like of a component of a fixed shape. 26 1326117 Patent Application No. 94143310 Supplementary, Corrected, Unlined Description ^Revised Page Triplicate [Simplified Schematic] FIG. 1 is a majority of the mapping sensor (111) of the first embodiment of the present invention and is detected Side view of the body (8). Fig. 2 is a schematic view showing a state in which a plurality of mapping sensors (ill) are fixed to a fixing plate (1) by bolts, and shows a state in which the components are mounted. Figure 3 shows that the majority of the mapping sensor is connected to the power supply overlap shared data signal line D+U1) and the power supply overlaps the shared data signal line D_(12), and is connected to the central office to indicate the data between the external input unit and the external output unit. The connection block diagram of the grant. Figure 4 is a block diagram showing the connection between the function block and the power supply overlap shared data signal line and the data transfer between the control unit and the control unit. Figure 5 shows a detailed block diagram of the functional blocks inside the central office. Figure ό shows the timing chart of the changes in the internal signals of the central office. Figure 7 shows the circuit diagram of the sensor branch. Fig. 8 is a timing chart showing changes in respective signals inside the sensor branch A. Figure 9 is a circuit diagram of the sensor branch B. Figure 1 shows the timing chart of the changes in the signals inside the sensor branch B. Fig. 11 is a block diagram showing an example of transmission of a light-emitting signal and a light-receiving signal by a spanning wiring of a sensor branch. FIG. 12 is a circuit diagram of the traversing wiring type sensor branch A of the mobile signal (87) after the sensor branch A is sent to transmit the signal to the next sensor branch 5. 27 1326117 Patent application No. 94143310 is added, revised, and there is no scribe line. Amendment page is in triplicate. Figure 13 is from the previous sensor branch. After completing the light projection and receiving the filament, the thief AD moves the signal in the branch. Chen crossed the wiring type sensory map 丨 4 shows that the mapping sensor module (89) is fixed to the reflection L sensor base (92), and then the mapping sensor is modeled and (89) together with the mapping sensing The base (92) is fixed to the fixing plate (97) and the busbar cable connector (95) is used between the modules.
及映射感測器模組間跨越佈線（96)連接之直前之狀態之要 部斜視圖。 圖15為固定映射感測器模組（1〇3)於DIN規格之導 軌（99)以構成映射感測器之範例之要部斜視圖。 圖16具備多數之檢測投光光電二極管LEDsn(107) 及多數之檢測受光光電電晶體PHTRsn(1〇8)之感測器支局 A之電路構成圖。 圖Π習知之控制系之被控制部之感測器部（124)，由 含有此感測器部之多數映射感測器（m)替換之構成圖。 【主要元件符號說明】 1 ' 97 固定板 6 檢測投光訊號 7a 感測器支局B(#l) 7c 感測器支局B(#3) 7e 感測器支局B(#n-3) 7f 感測器支局B(#n—2) 7g 感測器支局B(#n—1) 7h 感測器支局B(#n) 5 檢測受光訊號 7b 感測器支局B(#2) 7d 感測器支局B(#n-4)And an oblique view of the state in which the sensor modules are connected directly across the wiring (96). Fig. 15 is a perspective view of an essential part of an example in which a fixed mapping sensor module (1〇3) is placed on a rail (99) of the DIN specification to form a mapping sensor. Fig. 16 is a circuit diagram showing the majority of the detection light-emitting diodes LEDsn (107) and the sensor branches A of the majority of the light-receiving photovoltaic cells PHTRsn (1〇8). The sensor portion (124) of the controlled portion of the conventional control system is replaced by a plurality of mapping sensors (m) including the sensor portion. [Main component symbol description] 1 ' 97 Fixed board 6 Detecting light projection signal 7a Sensor branch B (#l) 7c Sensor branch B (#3) 7e Sensor branch B (#n-3) 7f Sense Detector branch B (#n - 2) 7g Sensor branch B (#n - 1) 7h Sensor branch B (#n) 5 Detecting received signal 7b Sensor branch B (#2) 7d sensor Branch B (#n-4)
28 1326117 第94143310號專利申請案 補充、修正後無劃線之說明書修正頁一式三份 8 被檢測體 9 感測器支局A(#0) 11 電源重疊共用數據訊號線D+ 12 電源重豐共用數據訊號線D — 13 導體 16 固定螺栓（導電性固定具） 17 受光用光電電晶體PHTRs 18 投光用LED(檢測用投光器） 19 右侧檢測靈敏度調整用調節器VRr(檢測靈敏度調整 用可變電阻） 20 左側檢測靈敏度調整用調節器 VR1(檢測靈敏度調整 用可變電阻） 24 控制部 25 輸入單元 26 輸出單元 27 總局發信訊號 28 總局受信信號 29 總局 34 電路驅動器 35 DC電源（電路用供應電源） 36 時序發生裝置 60 投光時序移動訊號 86 ' 96 跨越佈線 87 時序移動訊號 92 支局基地 95 母線電纜連結器 107 檢測投光光電二極管LEDs(檢測投光器） 110 映射感測器糸統 111 映射感測器 113 、120 、 121 、 122 時序移動訊號發生電路 124 感測部 2928 1326117 Patent application No. 94,432,310 Supplementary, revised, unlined manual, revised page, triplicate 8 Detected body 9 Sensor branch A (#0) 11 Power supply overlap shared data signal line D+ 12 Power heavy shared data Signal line D — 13 Conductor 16 Fixing bolt (conducting fixture) 17 Photoelectric crystal PHTRs for light transmission 18 LED for projection (detector for detection) 19 Regulator for adjusting sensitivity for right side VRr (variable resistor for detection sensitivity adjustment) 20 Left side detection sensitivity adjustment regulator VR1 (variable resistance for detection sensitivity adjustment) 24 Control unit 25 Input unit 26 Output unit 27 General office signal 28 Total office signal 29 General office 34 Circuit driver 35 DC power supply (circuit supply power supply) 36 Timing generator 60 Projection timing movement signal 86 ' 96 Crossing wiring 87 Timing movement signal 92 Branch base 95 Bus cable connector 107 Detecting light-emitting photodiode LEDs (detecting light projector) 110 Mapping sensor system 111 Mapping sensing 113, 120, 121, 122 timing shift signal generating circuit 124 sensing unit 2 9