WO2007020767A1

WO2007020767A1 - Acoustic sensor device, acoustic analysis diagnosis device, and acoustic analysis diagnosis device manufacturing method

Info

Publication number: WO2007020767A1
Application number: PCT/JP2006/314411
Authority: WO
Inventors: Toshiyuki Matsumoto; Naoki Ikeuchi
Original assignee: Tokyo Electron Limited
Priority date: 2005-08-18
Filing date: 2006-07-20
Publication date: 2007-02-22
Also published as: TWI294514B; TW200718927A; JP2007051952A

Abstract

Since each of acoustic sensors (11-15) resonates with a different sound, a data collection/transmission circuit (30) detects only a sound in a different frequency band in the entire band and data conversion circuits (21-25) convert it into data. A control unit (31) transmits the data from a data transmission circuit (32) via an antenna (33). A data reception/analysis diagnosis circuit (40) receives data corresponding to the acoustic sensors (11-15) and compares a sound pressure stored in advance to a sound pressure obtained by the received data so as to determine whether the measurement object is normal.

Description

Specification

Acoustic sensor device, acoustic analysis diagnostic device, and method of manufacturing acoustic analysis diagnostic device

Technical field

The present invention relates to an acoustic sensor device, an acoustic analysis diagnostic device, and a method for manufacturing an acoustic analysis diagnostic device. More specifically, the present invention relates to an acoustic sensor device, an acoustic analysis diagnostic device, and a method for manufacturing the acoustic analysis diagnostic device using a resonator that vibrates in response to sound vibration, for example.

Background art

Conventionally, various facility diagnosis methods have been proposed in order to determine whether there is an abnormality in equipment or facilities. In such equipment diagnosis methods, it is still possible to continue to operate sufficiently before a serious accident, such as when the bearings in a rotating machine are damaged or the wear of moving parts has progressed. Although it is possible, if it is left as it is, abnormalities that may lead to serious failures in the future are detected.

[0003] For example, “Diagnosis engineering by sound and diagnosis”, edited by the Japanese Acoustical Society 'Corona Corporation, collects sound using a directional microphone and analyzes the signal to diagnose and analyze engine beating sound. The sound diagnosis is described.

[0004] Japanese Patent Application Laid-Open No. 2004-20484 describes an abnormality monitoring device and an abnormality monitoring program. That is, a signal indicating a physical quantity reflecting the state of a diagnosis target is obtained by a sensor, and the signal is divided into band signals for a plurality of frequency bands. Based on each determination criterion set for each of the obtained plurality of band signals, the presence / absence of abnormality of the diagnosis target is determined for each frequency band.

[0005] In the diagnostic method using a microphone described in the document "diagnostic engineering by sound diagnosis", if there is noise other than the target sound in the measurement environment, if the sound pressure of the noise is high The microphone output becomes saturated due to noise. For this reason, the target sound cannot be captured. This is because the microphone is designed to have the same sensitivity in all detectable bands. [0006] In the device described in Japanese Patent Application Laid-Open No. 2004-20484, a programmable band pass filter is used to divide the output signal of the sensor into band signals for a plurality of frequency bands. The program bandpass filter first extracts the first frequency band, where n is the number of band divisions. After the abnormality determination process for the extracted first band signal is completed, the extraction process for the second frequency band is performed. For this reason, it is necessary to perform extraction and abnormality determination processing n times. This process is a software process based on a program, and there is a problem that the processing time is increased in order to perform complicated calculations.

Disclosure of the invention

Accordingly, an object of the present invention is to provide an acoustic sensor device, an acoustic analysis diagnostic device, and a manufacturing method of the acoustic analysis diagnostic device for analyzing the sound of the force to be measured in real time with a relatively simple configuration. is there.

[0008] The present invention is an acoustic sensor device that detects at least a predetermined band of a wide band of sound emitted from a measurement target, and includes a plurality of first vibrators that resonate according to different sounds. A first acoustic sensing element that detects the first band sound within a wide band and extracts the first characteristic sound to be measured, and a plurality of second transducers that resonate in response to different sounds Including a first acoustic sensing element that detects sounds in a second band different from the first band within a wide band and extracts the second characteristic sound to be measured. And a second acoustic sensing element.

[0009] Although an element necessary for detecting a wide band sound with one element is difficult to manufacture, the first acoustic sensing element and the second acoustic sensing element are provided separately and independently. Since the sound of a predetermined band from the measurement object is detected, the difficulty in manufacturing the element can be solved. Since the first and second acoustic sensing elements are provided separately and independently, the sensing elements can be combined according to the diagnostic purpose. For diagnostic purposes, it is possible to diagnose whether the measurement target is normal, whether it is abnormal, or failure prediction.

[0010] Preferably, the first acoustic detection element detects a sound in a predetermined band out of a wide band of sound that also has a measurement target force, and the second acoustic detection element has a wide full band of the measurement target force. The sound of the remaining band is detected. As a result, the sound of the entire band can be detected and the state of the measurement target can be analyzed. [0011] Preferably, the first acoustic detection element detects a sound of a predetermined band out of a wide band of sound that also produces a measurement target force, and the second acoustic detection element detects a wide full band of the measurement target force. The sound of a part of the predetermined band of the sound of the sound and the sound of the remaining band are detected.

[0012] Preferably, the first characteristic sound indicates that the measurement target is normal, and the second characteristic sound indicates that the measurement target is abnormal. This makes it possible to diagnose whether the measurement target is normal or abnormal.

[0013] Another aspect of the present invention is an acoustic diagnostic analysis apparatus that detects, analyzes, and diagnoses at least a predetermined band of a wide band of sound emitted from a measurement target, each of which has a different sound. A plurality of acoustic detection elements that are included in a wide range and that detect only sounds in different frequency bands, each independently provided, and a plurality of acoustic detectors. It includes an analysis and diagnosis unit that analyzes sound signals output from the sensing elements in different frequency bands, diagnoses the sound distribution, and analyzes the characteristics of the measurement target.

[0014] In the present invention, each failure mode can be diagnosed when the measurement object is a factory provided with a plurality of apparatus facilities having a plurality of failure modes.

[0015] Preferably, the analysis / diagnostic unit analyzes the characteristics of normality and abnormality of the measurement target.

[0016] Preferably, the analysis / diagnostic unit determines whether or not the maintenance inspection of the measurement target is necessary according to the analysis of the abnormality detection. Depending on the analysis result, the necessity of maintenance can be accurately determined.

The failure diagnosis unit stores in advance comparison data according to the purpose of diagnosis. Diagnosis is facilitated by comparing the analysis results with the comparison data.

[0018] Still another aspect of the present invention is a method of manufacturing an acoustic analysis diagnostic apparatus used for acoustic analysis of a measurement target, including vibrators that resonate according to different sounds, each of which is provided separately. Preparing a plurality of acoustic detection elements, installing a plurality of acoustic detection elements in the vicinity of the measurement target, collecting the measurement target data according to the purpose, and a plurality of acoustic detection elements based on the collected data. Determining a combination of acoustic detection elements that resonate with sound of a predetermined band among the detection elements. This combination enables monitoring and diagnosis according to the condition of the measurement target.

According to the present invention, the first acoustic detection element that extracts the first characteristic sound to be measured, and the measurement By separately providing a second acoustic detection element that extracts the second characteristic sound of the measurement target, the sound of the measurement target force can be analyzed in real time with a relatively simple configuration according to the characteristic sound of the measurement target it can.

[0020] In addition, by resonating with different sounds, only sounds in different frequency bands that are included in a wide band are detected, and each of the outputs from the plurality of acoustic sensing elements has different frequencies. By analyzing the acoustic signal in the band to diagnose the sound distribution and analyzing the characteristics of the measurement target, it is possible to analyze the sound of the measurement target force in real time.

[0021] Furthermore, a plurality of acoustic detection elements that resonate with different sounds are prepared, a plurality of acoustic detection elements are installed in the vicinity of the measurement target, and the measurement target data is collected according to the purpose. Manufactures an acoustic analysis and diagnosis device that analyzes the sound of the force to be measured in real time by determining the combination of acoustic detection elements that resonate with sound in a predetermined band among multiple acoustic detection elements based on the data it can.

Brief Description of Drawings

FIG. 1 is a plan view of an example of an acoustic sensor device according to an embodiment of the present invention.

2 is a diagram showing frequency response characteristics of a plurality of resonance beams in the acoustic sensor device shown in FIG.

FIG. 3 is a diagram showing input / output characteristics of the acoustic sensor device.

FIG. 4 is a diagram showing environmental noise tolerance in an acoustic sensor device.

FIG. 5A is a block diagram showing a data collection / transmission circuit of the acoustic analysis / diagnosis apparatus according to one embodiment of the present invention.

FIG. 5B is a block diagram showing a data reception / analysis diagnostic circuit of the acoustic analysis diagnostic device according to one embodiment of the present invention.

FIG. 6A is a flowchart for explaining the operation of the data collection and transmission circuit of the acoustic analysis diagnostic device according to one embodiment of the present invention.

FIG. 6B is a flowchart for explaining the operation of the data reception / analysis diagnosis circuit of the acoustic analysis / diagnosis apparatus according to the embodiment of the present invention.

FIG. 7A is a diagram showing an example of analyzing and diagnosing a measurement target sound in all bands using an acoustic analysis / diagnosis apparatus according to another embodiment of the present invention, and showing a data collection / transmission circuit. FIG. 7B is a diagram showing an example of analyzing and diagnosing a measurement target sound in all bands using an acoustic analysis diagnostic apparatus according to another embodiment of the present invention, and showing a data reception / analysis diagnostic circuit.

FIG. 8A is a diagram showing a data collection / transmission circuit in which only the optimal acoustic sensor is arranged in the acoustic analysis diagnostic apparatus of the example shown in FIGS. 7A and 7B.

FIG. 8B is a diagram showing a data reception / analysis diagnostic circuit in which only the optimal acoustic sensor is arranged in the acoustic analysis diagnostic apparatus of the example shown in FIGS. 7A and 7B.

FIG. 9A is a conceptual diagram showing an example of an acoustic analysis / diagnosis apparatus according to another embodiment of the present invention, in which an acoustic sensor is arranged in a factory.

FIG. 9B shows an acoustic analysis diagnostic apparatus according to another embodiment of the present invention, and is a diagram showing a data reception / analysis diagnostic circuit.

FIG. 10A shows an acoustic analysis / diagnosis apparatus according to still another embodiment of the present invention, and shows an example in which an acoustic sensor is arranged in a unique apparatus.

FIG. 10B is a diagram showing an acoustic analysis / diagnosis device according to still another embodiment of the present invention and a data reception / analysis diagnosis circuit.

BEST MODE FOR CARRYING OUT THE INVENTION

In FIG. 1, an acoustic sensor device 1 as an acoustic sensing element is formed on a semiconductor silicon substrate 10, and operates as a diaphragm 2, a transverse beam 3, a stop plate 4, a plurality of resonant beams 5 Including.

Diaphragm 2 is formed in a thin plate shape so as to vibrate in response to input sound! Transverse beam 3 is formed so as to connect between diaphragm 2 and end plate 4, and the force on which diaphragm 2 side widens gradually becomes narrower toward end plate 4 side. It is the narrowest at the four ends.

[0025] The length of each of the plurality of resonance beams 5 is adjusted so as to resonate at a specific frequency, and is cantilevered so as to extend from the transverse beam 3 to both sides. This acoustic sensor device 1 has a fishbone structure having a pair of resonant beams 5 and 5 having the same resonant frequency. The end plate 4 is provided to absorb the vibration caused by the input sound propagating from the diaphragm 2 via the transverse beam 3 so as not to return to the diaphragm 2 side. The The diaphragm 2, the crossing beam 3, the end plate 4, and the lower portions of the plurality of resonance beams 5 are spaces, and the periphery of the plurality of resonance beams 5 is opened.

[0026] Diaphragm 2 vibrates vertically by vibration due to input sound, and the vibration propagates in transverse beam 3 in the horizontal direction, and a corresponding vibrator among a plurality of resonance beams 5 vibrates vertically. By changing the length or thickness of the resonant beam 5, the respective resonant frequency can be set to a desired value. Each resonant beam 5 is provided with a piezoresistor (not shown) on the transverse beam 3 side, and a change in the resistance value of the piezoresistor can be taken out as an output of a Wheatstone bridge, for example.

FIG. 2 is a diagram showing frequency response characteristics of a plurality of resonant beams 5 in the acoustic sensor device 1 shown in FIG. 1, FIG. 3 is a diagram showing input / output characteristics, and FIG. 4 is environmental noise resistance. FIG.

[0028] As shown in FIG. 2, the plurality of resonant beams 5 of the acoustic sensor device 1 shown in FIG. 1 are adjusted in length so as to resonate at a resonant frequency of 1.2 kHz to 2.5 kHz, for example. It is possible to selectively respond to each resonance frequency. Then, due to the interaction between the resonant beams 5, the frequency between the resonant frequencies can be made to respond.

[0029] When the diaphragm 2 is amplified with the value shown on the horizontal axis shown in FIG. 3, the plurality of resonant beams 5 are amplified with the value shown on the vertical axis in FIG. For example, if the amplitude of diaphragm 2 is 0, the amplitude of resonant beam 5 is 4.2 m, so the output can be amplified by about 14 times.

Furthermore, the acoustic sensor device 1 shown in FIG. 1 can detect a signal of a target sound even when a disturbing sound is input in addition to the target sound. Waveform a shown in Fig. 4 shows the output waveform when the target sound (2 900 Hz, 0. lPa) is input, and waveform b shows the output waveform when the interference sound (500 Hz, lOPa) is input. In FIG. 4, waveform b shows the waveform a with the vertical axis compressed to 1Z100. Waveform c shows the output waveform when the target sound and interference sound are input simultaneously. From FIG. 4, even if a disturbance sound, which is a noise, is input, it becomes possible to detect a target sound having a sound pressure of 1Z100, which is the interference sound.

FIG. 5A is a block diagram showing a data collection and transmission circuit of the acoustic analysis diagnostic device according to one embodiment of the present invention, and FIG. 5B shows an acoustic analysis diagnostic according to one embodiment of the present invention. It is a block diagram which shows the data reception 'analysis diagnostic circuit of a cutting device.

In FIG. 5A, the data collection / transmission circuit 30 includes acoustic sensors 11 to 15, data conversion circuits 21 to 25, a control unit 31, and a data transmission circuit 32, which are independently provided separately. And antenna 33. The acoustic sensors 11 to 15 detect the entire band of a wide band of sound emitted from the measurement target, and the acoustic sensor device 1 shown in FIG. 1 is used.

[0033] The acoustic sensor 11 is, for example, 500 Hz to: LkHz, the acoustic sensor 12 is 900 Hz to l.8 kHz, the acoustic sensor 13 is 1.7 kHz to 3.4 kHz, the acoustic sensor 14 is 3.3 kHz to 6.8 kHz, and the acoustic sensor. The resonance beam 15 is configured to be included in each of the acoustic sensors 11 to 15 so that a part of the adjacent bands overlaps so that 15 resonates with sound of 6.7 kHz to 10 kHz. Thereby, the acoustic sensors 11 to 15 can detect, for example, sounds in a continuous band from 600 Hz to LOkHz.

[0034] If a single acoustic sensor device 1 tries to detect a wide band of sound, the transverse beam becomes long and it is difficult to manufacture the resonant beam 5. For example, each of the five acoustic sensors 11 to 15 By detecting the band separately, the resonant beam 5 can be manufactured relatively easily, and the vibrator in the unnecessary band can be omitted. In addition, since the acoustic sensors 11 to 15 are provided independently and separately, the detection elements can be combined according to the purpose of diagnosis.

[0035] It should be noted that the band can be arbitrarily set according to the measurement target, and the number of acoustic sensors is increased so that the sound output from the measurement target, for example, 600 Hz to: LOOkHz can be detected. Alternatively, it may be possible to detect only a certain frequency band from the sound of the entire band in which the measurement target force is also output. Furthermore, one acoustic sensor may detect a certain band of the entire band, and the other acoustic sensor may detect the remaining band.

[0036] Outputs of the acoustic sensors 11 to 15 are given to data conversion circuits 21 to 25, respectively. The data conversion circuits 21 to 25 perform AZD conversion on the frequency band sound signals output from the acoustic sensors 11 to 15 and output them to the control unit 31 as sound pressure intensity distribution data. The control unit 31 sequentially outputs the data given from the data conversion circuits 21 to 25 to the data transmission circuit 32 in a time division manner, and the data transmission circuit 32 transmits each data from the antenna 33 by radio or light. The data reception / analysis diagnosis circuit 40 as an analysis diagnosis unit shown in FIG. 5B includes an antenna 41, a data reception circuit 42, an analysis diagnosis circuit 43, and a display unit 44. The data receiving circuit 42 receives each data of each acoustic sensor 11 to 15 transmitted from the data collecting / transmitting circuit 30 via the antenna 41 and gives it to the analysis / diagnosis circuit 43.

[0038] The analysis / diagnosis circuit 43 stores the sound pressure intensity distribution as comparison data in advance according to the purpose of diagnosis, and compares the sound pressure intensity distribution with the sound pressure intensity given as data for diagnosis. Perform target feature extraction. In other words, if the purpose of diagnosis is to detect whether the measurement target is in a normal state or to detect an abnormal state, the sound pressure distribution of the sound when the measurement target is operating normally or abnormally is stored as a characteristic sound. Keep it. When the measurement target is abnormal, a sound pressure distribution different from that in the normal state appears, so the sound pressure intensity corresponding to each sound pressure is stored in advance as a characteristic sound. The abnormal state includes a state in which the measurement target has failed! /, And a state in which a failure of the measurement target is predicted.

[0039] When data corresponding to each of the acoustic sensors 11 to 15 is given, the analysis / diagnosis circuit 43 compares the sound pressure strength of each with the sound pressure strength stored in advance, and the acoustic sensors 11 to 15 are compared. Choose the best combination of. The display unit 44 displays the selected combination of acoustic sensors.

FIG. 6A is a flowchart for explaining the operation of the data collection and transmission circuit 30 of the acoustic analysis and diagnosis apparatus in one embodiment of the present invention, and FIG. 6B shows the acoustic analysis and diagnosis in one embodiment of the present invention. 4 is a flowchart for explaining the operation of the data reception / analysis / diagnosis circuit 40 of the apparatus.

Next, with reference to FIG. 6A and FIG. 6B, an operation for diagnosing normality or abnormality of the measurement object with the acoustic analysis diagnostic apparatus of one embodiment of the present invention will be described. The acoustic sensors 11 to 15 are arranged in the vicinity of a measurement target (not shown), and when the measurement target is operated, the acoustic sensors 11 to 15 perform the diaphragm shown in FIG. 1 according to the sound emitted from the measurement target. 2 vibrates, and this vibration is propagated to the plurality of resonant beams 5 via the transverse beam 3. Among the multiple resonant beams 5, the transducer corresponding to the sound to be measured vibrates vertically. Due to this vibration, the resistance value of the piezoresistive element changes and is taken out as a change in voltage.

[0042] Each acoustic sensor 11-15 outputs a signal corresponding to the vibration of the corresponding sound. The data conversion circuits 21 to 25 are supplied to the control unit 31 as data indicating the sound pressure intensity after AZD conversion. The control unit 31 determines whether or not the data indicating the sound pressure intensity from the acoustic sensors 11 to 15 is input in the step shown in FIG. 6A (abbreviated as SP in the drawing) SP1. For example, in step SP2, each data is sequentially transmitted from the data transmission circuit 32 via the antenna 33.

[0043] The data reception circuit 42 of the data reception / analysis diagnostic circuit 40 shown in FIG. 5B determines whether or not all the data of the acoustic sensors 11 to 15 have been received at step SP11 shown in FIG. 6B! Is discriminated. If received, the analysis / diagnostic circuit 43 extracts a characteristic signal for diagnosis from the sound pressure intensity of each sound based on the data of each acoustic sensor 11-15 in step SP12, and in step SP13 An acoustic sensor based on a combination of at least one or more for detecting feature signals is determined as a signal detection device for the facility to be diagnosed. In step SP14, the corresponding one of the acoustic sensors 11 to 15 as the device is displayed.

[0044] The combination of the plurality of acoustic sensors 11 to 15 determined as the signal detection device is selected according to the purpose of diagnosis. For example, the purpose of diagnosis is determined by whether the object to be measured is in a normal state, detection of failure prediction as an abnormal state, or force that is detection of failure. Since the distribution of the sound output from the measurement target force differs depending on whether it is in the normal state, failure prediction, or failure state, the combination of acoustic sensors is determined so that each sound distribution can be detected. The For example, a combination of acoustic sensors 12, 13, and 15 is selected to detect a normal state, a combination of acoustic sensors 11, 12, and 13 is selected to detect a failure prediction, and an acoustic sensor 13 is selected to detect a failure. , 14, 15 combination is selected.

[0045] As described above, according to this embodiment, each of the plurality of acoustic sensors 11 to 15 resonates with a different sound, thereby detecting only sounds in different frequency bands within the entire band. Then, by analyzing the acoustic signals of the different frequency bands output from the plurality of acoustic sensors 11 to 15 and diagnosing the sound distribution, by selecting a combination of acoustic sensors according to each feature, Although it has a relatively simple configuration, it can analyze and diagnose sound from the measurement object in real time.

[0046] The fish force is also provided as a pair of resonant beams 5, 5 as acoustic sensors 11-15. Because it uses a sensor with a sensor structure, frequency decomposition can be performed in real time without the need for frequency decomposition by software processing. Furthermore, the processing time can be shortened because the calculation time required for decomposition into each frequency band can be reduced.

FIG. 7A and FIG. 7B are diagrams showing an example of analyzing and diagnosing the measurement target sound in the entire band using the acoustic analysis and diagnosis apparatus according to another embodiment of the present invention. In particular, FIG. Fig. 7B shows the data reception and analysis diagnostic circuit.

FIG. 8A and FIG. 8B are diagrams showing an example in which only the optimal acoustic sensor is arranged in the acoustic analysis diagnostic apparatus of the example shown in FIG. 7A and FIG. 7B, and FIG. 8A shows a data collection and transmission circuit FIG. 8B shows a data reception / analysis diagnostic circuit.

[0049] As shown in FIG. 7A, the acoustic sensors 11 to 15 are separately arranged in the vicinity of the measurement object 50, respectively. The data collection / transmission circuit 30a is configured by removing the acoustic sensors 11 to 15 from the data collection / transmission circuit 30 shown in FIG. 5A. The acoustic sensors 11 to 15 are distributed around the measurement object 50. The data reception / analysis / diagnostic circuit 40 analyzes and diagnoses the sound from the measurement object 50 in the entire band based on the flowchart shown in FIG. 6B. For example, in order to detect a normal state, a combination of acoustic sensors 12, 13, and 15 is selected. FIG. 8A shows the arrangement of the selected acoustic sensors 12, 13, and 15.

[0050] The data reception / analysis diagnostic circuit 40 shown in FIG. 8B collects sound data from the measurement target 50, analyzes and diagnoses whether the measurement target is in a normal state or an abnormal state, and measures the measurement target. Monitors the status of 50 maintenance requirements. As described with reference to FIG. 5A, the acoustic sensors 11, 12, and 13 may be arranged for failure prediction, and the acoustic sensors 13, 14, and 15 may be arranged for failure detection.

FIG. 9A shows an acoustic analysis / diagnosis apparatus according to another embodiment of the present invention, and is a conceptual diagram showing an example in which an acoustic sensor is arranged in a factory. FIG. 9B shows another embodiment of the present invention. 1 shows an acoustic analysis diagnostic device and a data reception / analysis diagnostic circuit.

In FIG. 9A, in the factory 60, although not shown, a plurality of apparatus facilities having a plurality of failure modes are installed. For this reason, multiple abnormal noises are generated in the factory. Therefore, in this embodiment, a plurality of acoustic sensors 11 to 15 are arranged in order to detect individual abnormal sounds in the factory 60. In FIG. 9A, the output of each of the acoustic sensors 11 to 15 is given to the data collection / transmission circuit 30a shown in FIG. 7A. Data reception / analysis shown in Figure 9B The diagnostic circuit 40 is located outside the factory 60. In the data reception / analysis / diagnostic circuit 40, since the acoustic sensors 11 to 15 detect individual sounds, whether or not the equipment is normal is abnormal based on the data of the acoustic sensors 11 to 15. Status monitoring, such as determining whether maintenance is necessary.

[0054] FIG. 10A shows an acoustic analysis and diagnosis apparatus according to still another embodiment of the present invention, and is a diagram showing an example in which an acoustic sensor is arranged in a unique apparatus. FIG. 10B is still another embodiment of the present invention. It is a figure which shows the data reception 'analysis diagnostic circuit of the acoustic analysis diagnostic apparatus in embodiment.

[0055] As shown in FIG. 10A, unique devices 71 to 74 are arranged in a factory or the like, and each of the devices 71 to 74 generates noise. The acoustic sensors 11 to 14 are arranged close to the devices 71 to 74. The data reception / analysis / diagnostic circuit 40 detects the unique sound of each of the devices 71-74 based on the data collection / transmission circuit force (not shown) corresponding to the acoustic sensors 11-14, Diagnosis such as normal / abnormal judgment and feature extraction can be performed.

[0056] The power of the embodiment of the present invention described above with reference to the drawings. The present invention is not limited to that of the illustrated embodiment. Various modifications and variations can be made to the illustrated embodiment within the same range or equivalent range as the present invention.

Industrial applicability

The acoustic sensor device, acoustic analysis / diagnosis device, and acoustic sensor manufacturing method according to the present invention are used to determine whether there is an abnormality in equipment or equipment in a factory.

Claims

The scope of the claims

[1] Power to be measured An acoustic sensor device that detects at least a predetermined band of a wide band of sounds,

A first acoustic sensing element that includes a plurality of first vibrators that resonate according to different sounds, detects a first band sound within the band, and extracts a first characteristic sound of the measurement target; Including a plurality of second vibrators that resonate in response to different sounds, detecting a second band sound different from the first band within the band, and detecting a second characteristic sound to be measured An acoustic sensor device comprising: a second acoustic sensing element that is provided separately from the first acoustic sensing element to be extracted.

[2] The first acoustic detection element detects a sound in a predetermined band out of a wide range of sounds emitted from the measurement target, and the second acoustic detection element is a wide range output from the measurement target. The acoustic sensor device according to claim 1, wherein the sound of the remaining band among the sounds of the entire band is detected.

[3] The first acoustic detection element detects a sound in a predetermined band out of a wide range of sounds emitted from the measurement target, and the second acoustic detection element is a wide range output from the measurement target. 2. The acoustic sensor device according to claim 1, wherein a sound in a part of the predetermined band among sounds in all bands and a sound in the remaining band are detected.

[4] The sound according to claim 1, wherein the first characteristic sound indicates that the measurement target is normal, and the second characteristic sound indicates that the measurement target is abnormal. Sensor device.

[5] Power to be measured An acoustic diagnostic analysis device that detects at least a predetermined band of a wide band of sounds and prays for diagnosis.

A plurality of acoustic sensing elements each including a vibrator that resonates in response to different sounds and that detects only sounds in different frequency bands that are included in the wide band;

An acoustic analysis diagnostic device comprising: an analysis diagnostic unit that analyzes acoustic signals of different frequency bands, each of which is output by the plurality of acoustic detection element forces, diagnoses a sound distribution, and analyzes characteristics of the measurement target .

[6] The analysis / diagnosis unit performs normality / abnormality / failure prediction diagnosis of the measurement target. The acoustic analysis diagnostic device according to claim 5, wherein

7. The acoustic analysis / diagnosis device according to claim 5, wherein the analysis / diagnosis unit determines whether or not maintenance / inspection of the measurement target is necessary according to the analysis of the abnormality detection.

8. The acoustic analysis diagnostic apparatus according to claim 5, wherein the failure diagnosis unit stores in advance comparison data corresponding to a diagnosis purpose.

[9] A method of manufacturing an acoustic analysis diagnostic device used for acoustic analysis of a measurement object,

Preparing a plurality of acoustic detection elements, each including a vibrator that resonates in response to different sounds, each independently provided;

Installing the plurality of acoustic detection elements in the vicinity of the measurement target, and collecting the data to be measured according to the purpose;

And a step of determining a combination of acoustic detection elements that resonate with sound in a predetermined band among the plurality of acoustic detection elements based on the collected data.