WO2007000727A3 - Method of reconstructing a surface topology of an object - Google Patents

Method of reconstructing a surface topology of an object Download PDF

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Publication number
WO2007000727A3
WO2007000727A3 PCT/IB2006/052118 IB2006052118W WO2007000727A3 WO 2007000727 A3 WO2007000727 A3 WO 2007000727A3 IB 2006052118 W IB2006052118 W IB 2006052118W WO 2007000727 A3 WO2007000727 A3 WO 2007000727A3
Authority
WO
WIPO (PCT)
Prior art keywords
reconstructing
surface topology
areas
slope values
methods
Prior art date
Application number
PCT/IB2006/052118
Other languages
French (fr)
Other versions
WO2007000727A2 (en
Inventor
Amstel Willem D Van
Konrad K Szwedowicz
Original Assignee
Koninkl Philips Electronics Nv
Amstel Willem D Van
Konrad K Szwedowicz
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninkl Philips Electronics Nv, Amstel Willem D Van, Konrad K Szwedowicz filed Critical Koninkl Philips Electronics Nv
Priority to EP06765897A priority Critical patent/EP1899677A2/en
Priority to US11/993,248 priority patent/US20100157312A1/en
Priority to JP2008519073A priority patent/JP2008544295A/en
Publication of WO2007000727A2 publication Critical patent/WO2007000727A2/en
Publication of WO2007000727A3 publication Critical patent/WO2007000727A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention relates to a method of reconstructing a surface topology of a surface (1) of an object (2). Conventional methods such as interferometry, or methods which acquire measurement values which represent slopes of the surface profile (slope values), show only a limited height resolution in the case of large flat objects such as wafers. In order to overcome this problem the surface of the object is sub-divided into smaller areas, and from each area slope values are obtained at optimum apparatus parameters. Then the areas are stitched together and the 3D topography is reconstructed.
PCT/IB2006/052118 2005-06-28 2006-06-27 Method of reconstructing a surface topology of an object WO2007000727A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP06765897A EP1899677A2 (en) 2005-06-28 2006-06-27 Method of reconstructing a surface topology of an object
US11/993,248 US20100157312A1 (en) 2005-06-28 2006-06-27 Method of reconstructing a surface topology of an object
JP2008519073A JP2008544295A (en) 2005-06-28 2006-06-27 Method for reconstructing the surface topology of an object

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP05105733.9 2005-06-28
EP05105733 2005-06-28

Publications (2)

Publication Number Publication Date
WO2007000727A2 WO2007000727A2 (en) 2007-01-04
WO2007000727A3 true WO2007000727A3 (en) 2007-04-12

Family

ID=37595512

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB2006/052118 WO2007000727A2 (en) 2005-06-28 2006-06-27 Method of reconstructing a surface topology of an object

Country Status (5)

Country Link
US (1) US20100157312A1 (en)
EP (1) EP1899677A2 (en)
JP (1) JP2008544295A (en)
CN (1) CN101208581A (en)
WO (1) WO2007000727A2 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9595091B2 (en) * 2012-04-19 2017-03-14 Applied Materials Israel, Ltd. Defect classification using topographical attributes
US9858658B2 (en) 2012-04-19 2018-01-02 Applied Materials Israel Ltd Defect classification using CAD-based context attributes
CA2925620C (en) * 2012-10-29 2020-07-21 7D Surgical Inc. Integrated illumination and optical surface topology detection system and methods of use thereof
US10005229B2 (en) 2015-08-31 2018-06-26 Xerox Corporation System for using optical sensor focus to identify feature heights on objects being produced in a three-dimensional object printer
US10011078B2 (en) 2015-10-01 2018-07-03 Xerox Corporation System for using multiple optical sensor arrays to measure features on objects produced in a three-dimensional object printer
US9993977B2 (en) * 2015-10-01 2018-06-12 Xerox Corporation System for using an optical sensor array to monitor color fidelity in objects produced by a three-dimensional object printer
CN108489445A (en) * 2018-03-12 2018-09-04 四川大学 One kind is for arbitrary not equidistant area surface shape integration method
JP2021047043A (en) * 2019-09-17 2021-03-25 株式会社東芝 Method for evaluating shape, manufacturing method of component, and system for evaluating shape

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0919858A1 (en) * 1997-12-01 1999-06-02 Agfa-Gevaert N.V. Method for reconstructing a radiation image of a body from partial radiation images
US20040145733A1 (en) * 1999-06-18 2004-07-29 Kla-Tencor Corporation Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2531596B2 (en) * 1991-03-19 1996-09-04 富士写真光機株式会社 Connection method between divided areas and wavefront connection method between divided areas on the surface to be measured
JPH09218034A (en) * 1996-02-14 1997-08-19 Fuji Xerox Co Ltd Shape measuring method
DE69733689T2 (en) * 1997-12-01 2006-05-18 Agfa-Gevaert Method and device for recording a radiation image of an elongated body
JP3509005B2 (en) * 1999-12-07 2004-03-22 株式会社ミツトヨ Shape measurement method
AU2001260975A1 (en) * 2000-01-25 2001-08-20 Zygo Corporation Optical systems for measuring form and geometric dimensions of precision engineered parts
US7455407B2 (en) * 2000-02-11 2008-11-25 Amo Wavefront Sciences, Llc System and method of measuring and mapping three dimensional structures
US6895106B2 (en) * 2001-09-11 2005-05-17 Eastman Kodak Company Method for stitching partial radiation images to reconstruct a full image
US6956657B2 (en) * 2001-12-18 2005-10-18 Qed Technologies, Inc. Method for self-calibrated sub-aperture stitching for surface figure measurement
AU2003288671A1 (en) * 2003-01-14 2004-08-10 Koninklijke Philips Electronics N.V. Reconstruction of a surface topography
EP1593087A4 (en) * 2003-01-30 2006-10-04 Chase Medical Lp A method and system for image processing and contour assessment
US20050088664A1 (en) * 2003-10-27 2005-04-28 Lars Stiblert Method for writing a pattern on a surface intended for use in exposure equipment and for measuring the physical properties of the surface
US7866820B2 (en) * 2006-02-14 2011-01-11 Vision Optimization, Llc Corneo-scleral topography system

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0919858A1 (en) * 1997-12-01 1999-06-02 Agfa-Gevaert N.V. Method for reconstructing a radiation image of a body from partial radiation images
US20040145733A1 (en) * 1999-06-18 2004-07-29 Kla-Tencor Corporation Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool

Also Published As

Publication number Publication date
JP2008544295A (en) 2008-12-04
WO2007000727A2 (en) 2007-01-04
CN101208581A (en) 2008-06-25
EP1899677A2 (en) 2008-03-19
US20100157312A1 (en) 2010-06-24

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