AU2001260975A1 - Optical systems for measuring form and geometric dimensions of precision engineered parts - Google Patents

Optical systems for measuring form and geometric dimensions of precision engineered parts

Info

Publication number
AU2001260975A1
AU2001260975A1 AU2001260975A AU6097501A AU2001260975A1 AU 2001260975 A1 AU2001260975 A1 AU 2001260975A1 AU 2001260975 A AU2001260975 A AU 2001260975A AU 6097501 A AU6097501 A AU 6097501A AU 2001260975 A1 AU2001260975 A1 AU 2001260975A1
Authority
AU
Australia
Prior art keywords
optical systems
geometric dimensions
measuring form
precision engineered
engineered parts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001260975A
Inventor
James Biegen
Xavier Colonna De Lega
Peter De Groot
Leslie L. Deck
David Grigg
James W. Kramer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zygo Corp
Original Assignee
Zygo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zygo Corp filed Critical Zygo Corp
Publication of AU2001260975A1 publication Critical patent/AU2001260975A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/245—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using a plurality of fixed, simultaneously operating transducers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
    • G01B9/02021—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different faces of object, e.g. opposite faces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02024—Measuring in transmission, i.e. light traverses the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02027—Two or more interferometric channels or interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
    • G01B9/02072—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer by calibration or testing of interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
AU2001260975A 2000-01-25 2001-01-25 Optical systems for measuring form and geometric dimensions of precision engineered parts Abandoned AU2001260975A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US17791200P 2000-01-25 2000-01-25
US60177912 2000-01-25
US20573600P 2000-05-19 2000-05-19
US60205736 2000-05-19
PCT/US2001/002411 WO2001059402A2 (en) 2000-01-25 2001-01-25 Optical systems for measuring form and geometric dimensions of precision engineered parts

Publications (1)

Publication Number Publication Date
AU2001260975A1 true AU2001260975A1 (en) 2001-08-20

Family

ID=26873770

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001260975A Abandoned AU2001260975A1 (en) 2000-01-25 2001-01-25 Optical systems for measuring form and geometric dimensions of precision engineered parts

Country Status (5)

Country Link
US (1) US6822745B2 (en)
JP (2) JP5112588B2 (en)
AU (1) AU2001260975A1 (en)
DE (1) DE10195052B3 (en)
WO (1) WO2001059402A2 (en)

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Also Published As

Publication number Publication date
JP5032680B2 (en) 2012-09-26
US20010043333A1 (en) 2001-11-22
JP2003522939A (en) 2003-07-29
DE10195052B3 (en) 2015-06-18
JP5112588B2 (en) 2013-01-09
WO2001059402A2 (en) 2001-08-16
DE10195052T1 (en) 2003-05-08
US6822745B2 (en) 2004-11-23
JP2011107168A (en) 2011-06-02
WO2001059402A3 (en) 2002-01-17

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