AU2002232855A1 - Integrated alignment and calibration of optical system - Google Patents
Integrated alignment and calibration of optical systemInfo
- Publication number
- AU2002232855A1 AU2002232855A1 AU2002232855A AU3285502A AU2002232855A1 AU 2002232855 A1 AU2002232855 A1 AU 2002232855A1 AU 2002232855 A AU2002232855 A AU 2002232855A AU 3285502 A AU3285502 A AU 3285502A AU 2002232855 A1 AU2002232855 A1 AU 2002232855A1
- Authority
- AU
- Australia
- Prior art keywords
- calibration
- optical system
- integrated alignment
- alignment
- integrated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
- G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US24316500P | 2000-10-25 | 2000-10-25 | |
US60243165 | 2000-10-25 | ||
PCT/US2001/050387 WO2002039055A1 (en) | 2000-10-25 | 2001-10-24 | Integrated alignment and calibration of optical system |
Publications (1)
Publication Number | Publication Date |
---|---|
AU2002232855A1 true AU2002232855A1 (en) | 2002-05-21 |
Family
ID=22917595
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2002232855A Abandoned AU2002232855A1 (en) | 2000-10-25 | 2001-10-24 | Integrated alignment and calibration of optical system |
Country Status (3)
Country | Link |
---|---|
US (1) | US6678058B2 (en) |
AU (1) | AU2002232855A1 (en) |
WO (1) | WO2002039055A1 (en) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2002085091A2 (en) * | 2000-12-15 | 2002-10-24 | Cyberoptics Corporation | Camera with improved illuminator |
US7181083B2 (en) * | 2003-06-09 | 2007-02-20 | Eaton Corporation | System and method for configuring an imaging tool |
US6856694B2 (en) * | 2001-07-10 | 2005-02-15 | Eaton Corporation | Decision enhancement system for a vehicle safety restraint application |
FR2836575B1 (en) * | 2002-02-28 | 2004-07-02 | Patrick Sandoz | METHOD FOR MEASURING THE LOCATION OF AN OBJECT BY PHASE DETECTION |
JP4105926B2 (en) * | 2002-09-30 | 2008-06-25 | 株式会社新川 | Offset measuring mechanism in bonding apparatus and offset measuring method in bonding apparatus |
US6870949B2 (en) | 2003-02-26 | 2005-03-22 | Electro Scientific Industries | Coaxial narrow angle dark field lighting |
US6944527B2 (en) * | 2003-11-07 | 2005-09-13 | Eaton Corporation | Decision enhancement system for a vehicle safety restraint application |
US7599576B2 (en) | 2004-01-23 | 2009-10-06 | Electro Scientific Industries, Inc. | Image subtraction of illumination artifacts |
DE112006001820T5 (en) | 2005-07-08 | 2008-06-26 | Electro Scientific Industries, Inc., Portland | Optimize the use and performance of optical systems implemented with telecentric darkfield illumination on the axis |
KR100990028B1 (en) * | 2005-10-18 | 2010-10-26 | 지에스아이 그룹 코포레이션 | Methods and apparatus for utilizing an optical reference |
US20080156207A1 (en) * | 2006-12-28 | 2008-07-03 | Dan Ellenbogen | Stencil printers and the like, optical systems therefor, and methods of printing and inspection |
US8024060B2 (en) * | 2008-06-16 | 2011-09-20 | Electro Scientific Industries, Inc. | Method for defining safe zones in laser machining systems |
US20110010122A1 (en) * | 2009-07-07 | 2011-01-13 | Delta Design, Inc. | Calibrating separately located cameras with a double sided visible calibration target for ic device testing handlers |
TWI417969B (en) * | 2010-07-21 | 2013-12-01 | Lextar Electronics Corp | Method for transfering chip and apparatus for transfering chip |
DE102013014475B4 (en) | 2012-08-29 | 2020-11-12 | Technische Universität Ilmenau | Process for the detection and compensation of measurement deviations during the operation of an optical measuring device, optical measuring method and optical measuring device |
CN103778640B (en) * | 2014-03-07 | 2017-09-22 | 中国工程物理研究院激光聚变研究中心 | A kind of object space telecentricity micro-vision system scaling method based on microballoon target |
DE112014006641A5 (en) * | 2014-05-05 | 2017-01-26 | Carl Zeiss Industrielle Messtechnik Gmbh | Coordinate measuring device for determining geometric properties of a measurement object |
WO2015169345A1 (en) * | 2014-05-06 | 2015-11-12 | Carl Zeiss Industrielle Messtechnik Gmbh | Method and device for calibrating an imaging optical unit for measurement applications |
US10223589B2 (en) | 2015-03-03 | 2019-03-05 | Cognex Corporation | Vision system for training an assembly system through virtual assembly of objects |
US10757394B1 (en) | 2015-11-09 | 2020-08-25 | Cognex Corporation | System and method for calibrating a plurality of 3D sensors with respect to a motion conveyance |
US11562502B2 (en) | 2015-11-09 | 2023-01-24 | Cognex Corporation | System and method for calibrating a plurality of 3D sensors with respect to a motion conveyance |
US10812778B1 (en) | 2015-11-09 | 2020-10-20 | Cognex Corporation | System and method for calibrating one or more 3D sensors mounted on a moving manipulator |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5298988A (en) | 1992-06-02 | 1994-03-29 | Massachusetts Institute Of Technology | Technique for aligning features on opposite surfaces of a substrate |
US5257336A (en) | 1992-08-21 | 1993-10-26 | At&T Bell Laboratories | Optical subassembly with passive optical alignment |
US5537204A (en) * | 1994-11-07 | 1996-07-16 | Micron Electronics, Inc. | Automatic optical pick and place calibration and capability analysis system for assembly of components onto printed circuit boards |
WO1998024291A2 (en) | 1996-11-26 | 1998-06-04 | Philips Electronics N.V. | Method and machine for placing components on a carrier and a calibration carrier detection device for use in the method and in the machine |
US6055055A (en) * | 1997-12-01 | 2000-04-25 | Hewlett-Packard Company | Cross optical axis inspection system for integrated circuits |
-
2001
- 2001-10-24 WO PCT/US2001/050387 patent/WO2002039055A1/en active Application Filing
- 2001-10-24 AU AU2002232855A patent/AU2002232855A1/en not_active Abandoned
- 2001-10-24 US US10/039,249 patent/US6678058B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US20020113970A1 (en) | 2002-08-22 |
US6678058B2 (en) | 2004-01-13 |
WO2002039055A1 (en) | 2002-05-16 |
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