AU2002232855A1 - Integrated alignment and calibration of optical system - Google Patents

Integrated alignment and calibration of optical system

Info

Publication number
AU2002232855A1
AU2002232855A1 AU2002232855A AU3285502A AU2002232855A1 AU 2002232855 A1 AU2002232855 A1 AU 2002232855A1 AU 2002232855 A AU2002232855 A AU 2002232855A AU 3285502 A AU3285502 A AU 3285502A AU 2002232855 A1 AU2002232855 A1 AU 2002232855A1
Authority
AU
Australia
Prior art keywords
calibration
optical system
integrated alignment
alignment
integrated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002232855A
Inventor
Leo B. Baldwin
Frank G. Evans
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Electro Scientific Industries Inc
Original Assignee
Electro Scientific Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Electro Scientific Industries Inc filed Critical Electro Scientific Industries Inc
Publication of AU2002232855A1 publication Critical patent/AU2002232855A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
AU2002232855A 2000-10-25 2001-10-24 Integrated alignment and calibration of optical system Abandoned AU2002232855A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US24316500P 2000-10-25 2000-10-25
US60243165 2000-10-25
PCT/US2001/050387 WO2002039055A1 (en) 2000-10-25 2001-10-24 Integrated alignment and calibration of optical system

Publications (1)

Publication Number Publication Date
AU2002232855A1 true AU2002232855A1 (en) 2002-05-21

Family

ID=22917595

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002232855A Abandoned AU2002232855A1 (en) 2000-10-25 2001-10-24 Integrated alignment and calibration of optical system

Country Status (3)

Country Link
US (1) US6678058B2 (en)
AU (1) AU2002232855A1 (en)
WO (1) WO2002039055A1 (en)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002085091A2 (en) * 2000-12-15 2002-10-24 Cyberoptics Corporation Camera with improved illuminator
US6856694B2 (en) * 2001-07-10 2005-02-15 Eaton Corporation Decision enhancement system for a vehicle safety restraint application
US7181083B2 (en) * 2003-06-09 2007-02-20 Eaton Corporation System and method for configuring an imaging tool
FR2836575B1 (en) * 2002-02-28 2004-07-02 Patrick Sandoz METHOD FOR MEASURING THE LOCATION OF AN OBJECT BY PHASE DETECTION
JP4105926B2 (en) * 2002-09-30 2008-06-25 株式会社新川 Offset measuring mechanism in bonding apparatus and offset measuring method in bonding apparatus
US6870949B2 (en) 2003-02-26 2005-03-22 Electro Scientific Industries Coaxial narrow angle dark field lighting
US6944527B2 (en) * 2003-11-07 2005-09-13 Eaton Corporation Decision enhancement system for a vehicle safety restraint application
US7599576B2 (en) 2004-01-23 2009-10-06 Electro Scientific Industries, Inc. Image subtraction of illumination artifacts
JP2009500631A (en) 2005-07-08 2009-01-08 エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド Optimal use and performance of optical systems implemented with dark field illumination on the telecentric axis
WO2007047721A2 (en) * 2005-10-18 2007-04-26 Gsi Group Corporation Methods and apparatus for utilizing an optical reference
US20080156207A1 (en) * 2006-12-28 2008-07-03 Dan Ellenbogen Stencil printers and the like, optical systems therefor, and methods of printing and inspection
US8024060B2 (en) * 2008-06-16 2011-09-20 Electro Scientific Industries, Inc. Method for defining safe zones in laser machining systems
US20110010122A1 (en) * 2009-07-07 2011-01-13 Delta Design, Inc. Calibrating separately located cameras with a double sided visible calibration target for ic device testing handlers
TWI417969B (en) * 2010-07-21 2013-12-01 Lextar Electronics Corp Method for transfering chip and apparatus for transfering chip
DE102013014475B4 (en) 2012-08-29 2020-11-12 Technische Universität Ilmenau Process for the detection and compensation of measurement deviations during the operation of an optical measuring device, optical measuring method and optical measuring device
CN103778640B (en) * 2014-03-07 2017-09-22 中国工程物理研究院激光聚变研究中心 A kind of object space telecentricity micro-vision system scaling method based on microballoon target
DE112014006641A5 (en) * 2014-05-05 2017-01-26 Carl Zeiss Industrielle Messtechnik Gmbh Coordinate measuring device for determining geometric properties of a measurement object
DE112014006640A5 (en) * 2014-05-06 2017-02-09 Carl Zeiss Industrielle Messtechnik Gmbh Method and device for calibrating imaging optics for metrological applications
US10223589B2 (en) 2015-03-03 2019-03-05 Cognex Corporation Vision system for training an assembly system through virtual assembly of objects
US11562502B2 (en) 2015-11-09 2023-01-24 Cognex Corporation System and method for calibrating a plurality of 3D sensors with respect to a motion conveyance
US10812778B1 (en) 2015-11-09 2020-10-20 Cognex Corporation System and method for calibrating one or more 3D sensors mounted on a moving manipulator
US10757394B1 (en) 2015-11-09 2020-08-25 Cognex Corporation System and method for calibrating a plurality of 3D sensors with respect to a motion conveyance

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5298988A (en) * 1992-06-02 1994-03-29 Massachusetts Institute Of Technology Technique for aligning features on opposite surfaces of a substrate
US5257336A (en) 1992-08-21 1993-10-26 At&T Bell Laboratories Optical subassembly with passive optical alignment
US5537204A (en) 1994-11-07 1996-07-16 Micron Electronics, Inc. Automatic optical pick and place calibration and capability analysis system for assembly of components onto printed circuit boards
DE69735943T2 (en) * 1996-11-26 2007-01-04 Assembléon N.V. METHOD FOR ARRANGING COMPONENTS ON A CARRIER WITH A CALIBRATION PROCESS AND DEVICE THEREFOR
US6055055A (en) 1997-12-01 2000-04-25 Hewlett-Packard Company Cross optical axis inspection system for integrated circuits

Also Published As

Publication number Publication date
US6678058B2 (en) 2004-01-13
US20020113970A1 (en) 2002-08-22
WO2002039055A1 (en) 2002-05-16

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