WO2006136504A1 - Piezoaktor mit gesteigertem hubvermögen - Google Patents
Piezoaktor mit gesteigertem hubvermögen Download PDFInfo
- Publication number
- WO2006136504A1 WO2006136504A1 PCT/EP2006/063081 EP2006063081W WO2006136504A1 WO 2006136504 A1 WO2006136504 A1 WO 2006136504A1 EP 2006063081 W EP2006063081 W EP 2006063081W WO 2006136504 A1 WO2006136504 A1 WO 2006136504A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- layer
- piezoelectric
- piezoelectric actuator
- electric field
- electrode layers
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
Definitions
- the present invention relates to piezoelectric actuators, which exhibit a certain elongation behavior as a function of this electrical voltage when an electrical voltage is applied.
- Piezo actuators are used in various fields of technology. They are produced for example in multilayer construction. These multilayer piezoelectric actuators are used to control injection valves in internal combustion engines, positioning tables or in precision engineering, just to name a few examples.
- US 6,274,967 discloses a piezoelectric actuator in multilayer construction, which is equipped with a biasing device for introducing force into the piezoelectric layers. With the help of the biasing device, the piezoelectric layers are subjected to a uniaxial compressive stress along the stacking direction of the piezoelectric actuator.
- WO 2004/015789 A2 discloses a piezoelectric actuator with at least one stacked piezoelectric element.
- the piezoelectric element enclosed by electrodes is held in a pretensioning device in such a way that a force is introduced into a partial volume of the piezoelectric layer.
- the mechanical bias introduced into the piezoelectric layer in combination with an electric field acting in the piezoelectric layer, produces an increased elongation of the piezoactuator in comparison to conventional piezoactuator constructions.
- various areas of technology such as, for example, micromechanics, require a further stroke magnification or an improved expansion behavior of piezoactuators. It is therefore the problem of the present invention to provide a piezo actuator with increased stroke behavior compared to the prior art.
- the present invention discloses a piezoactuator comprising the following features: at least one piezoelectric layer disposed between two opposing electrode layers for generating an electric field in the piezoelectric layer, at least one second layer disposed adjacent to the piezoelectric layer interact with this, and a biasing device, by means of which a tension of the piezoelectric and the second layer is adjustable, so that when generating an electric field in the piezoelectric layer, the stress of both layers supports a stretching behavior of the piezoelectric actuator.
- the present invention is based on the principle of combining a piezoelectric layer with a piezoelectric effect of certain strength with a second layer, which is characterized by a lower piezoelectric effect compared to the piezoelectric layer.
- a lesser piezoelectric effect designates that the strains produced piezoelectrically, ferroelectrically and / or ferroelastically in the second layer are smaller with the same electric field strength or mechanical stress than in the piezoelectric layer. Due to the combination of these two layers with different
- the second layer of the piezoelectric actuator has a different electrical conductivity and / or electrical permittivity and / or a different piezoelectric coefficient and / or elastic modulus than the piezoelectric layer.
- the piezoelectric layer and the second layer are formed by a gradient layer which in the direction perpendicular to the electrode layers has a piezoelectric region and a region of changing material properties, i. a material gradient.
- This gradient layer is distinguished, for example, in the direction perpendicular to the electrode layers by a decreasing piezoelectric effect, by a changing electrical conductivity and / or elastic modulus.
- FIGS 1 to 3 preferred material designs and their effect in the present piezoelectric actuator.
- the preferred piezoactuator 1 shown schematically in FIG. 1 comprises a piezoelectric layer 10, a second layer 30 and electrode layers 20.
- the electrode layers 20 are arranged opposite each other and in this way hold the piezoelectric layer 10 and 10 the second layer 30 a. It is also conceivable that the electrode layers 20 are arranged so that they surround only the piezoelectric layer 10.
- the piezoelectric actuator 1 comprises a pretensioning device 40.
- the pretensioning device 40 introduces a mechanical bending stress into the layer structure 10, 20, 30.
- the second layer 30 has different material properties than the piezoelectric layer 10.
- the differences to the piezoelectric layer 10 may, for example, be given by a different electrical conductivity and / or electrical conductivity and / or a different piezoelectric coefficient and / or a different modulus of elasticity than the piezoelectric layer 10. It is also conceivable to realize a change in the material properties in the second layer 30 with the aid of a material gradient.
- This material gradient characterizes a range of changing material properties, wherein the change in the material properties preferably takes place in the plane of the sheet perpendicular to the electrode layers 20.
- the piezoelectric layer 10 and the second layer 30 are not implemented as separate layers.
- the two layers 10, 30 form a common gradient layer which, viewed in the plane of the figures in the direction perpendicular to the electrode layers 20, has a piezoelectric region and a region of changing material properties.
- this gradient layer consisting of the piezoelectric layer 10 and the second layer 30, viewed in the thickness direction, i. perpendicular to the electrode layers 20, a piezoelectric portion followed by a region of varying electrical conductivity and / or varying dielectric permittivity and / or with varying piezoelectric coefficient and / or with varying modulus of elasticity.
- This special material design of the layers 10, 30 generates additional piezoelectric and ferroelectric expansion components when an electrical voltage is applied to the piezoceramic layer 10 or the piezoceramic subregion within the gradient layer. According to the external mechanical
- Bias conditions produced by the biasing device 40 will equilibrate to a different deformation than if only a single piezoelectric layer 10 were present. Due to the strongly non-linear relationship between the strain state and the height of the layer curvature, a significantly greater stroke variation of the piezoelectric actuator 1 can be achieved per layer 10, 30 than is possible with the change in thickness of the piezoceramic layer used in conventional stacking actuators. With the help of the additionally introduced material gradient within the gradient layer, therefore, the stroke of the piezoelectric actuator 1 is increased again.
- the electrical polarity of the piezoelectric layer 10 or of the piezoelectric subregion in the gradient layer is effected by applying an electrical voltage to the electrode layers 20.
- the applied electrical voltage and thereby within the piezoelectric layer 10 generated electric field aligns the ferroelectric domains in the field direction, which is schematically indicated by arrows which are perpendicular to the electrode layers 20.
- the layer structure 10, 20, 30 is arranged in the biasing device 40.
- a 3-point bend assembly 40 is shown, but other biasing means are contemplated, such as a 4-point bend assembly.
- the pretensioning device generates a partial region in the piezoelectric layer 10 which is loaded parallel to the electrode layers 20 by tensile stresses in the plane of the sheet of the drawings.
- this partial region, loaded by tensile stresses is located in the vicinity of the apex of the bent layer structure 10, 20, 30.
- the arrows near the vertex aligned parallel to the electrode layers 20 indicate that the introduced tensile stresses lead in this area to ferroelastic domain wall shifts and strain changes in the layer structure 10, 20, 30.
- the method and device described above allow new cost-effective mass applications for low-voltage operation, eg in the field of biotechnology and medical technology (micropumps, microvalves), industrial electronics (pneumatic valves) and microactuators -motorik realize.
- a layer structure 10, 20, 30 which, as the second layer 30, has a conductive ceramic with a reduced piezoelectric effect. If the prestressed layer structure 10, 20, 30 is loaded by an electric field, then in the second layer 30 there is initially less lateral contraction or shortening at the apex of the schematically illustrated bending in comparison to the piezoelectric layer 10. In addition, the conductivity of the second layer results 30 to a gain of the applied voltage in the piezoelectric layer 10 electric field. Due to the increased piezoelectric effect, the amplified electric field leads to a greater elongation in the direction perpendicular to the electrode layers 20 within the piezoelectric layer 10. These strain states within the layer structure 10, 20, 30 lead to an increased lift capacity of the piezoactuator in interaction with the impressed mechanical biases 1.
- FIG. 3 shows a layer structure 10, 20, 30 whose second layer 30 is represented by an increased modulus of elasticity in comparison to the piezoelectric layer 10 is marked.
- the increased modulus of elasticity leads to a smaller reduction in the vicinity of the vertex of the layer structure 10, 20, 30 compared to the shortening in this area within the piezoelectric layer 10.
- the embodiment shown in FIG exemplarily shown layer structure 10, 20, 30 generates different strain states in the layers 10 and 30, which lead in combination with the impressed bias voltage to a stroke magnification of the piezoelectric actuator 1.
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Micromachines (AREA)
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2006800223380A CN101228643B (zh) | 2005-06-22 | 2006-06-12 | 提高了行程能力的压电执行器 |
EP06763636A EP1894260A1 (de) | 2005-06-22 | 2006-06-12 | Piezoaktor mit gesteigertem hubvermögen |
US11/993,465 US20100133957A1 (en) | 2005-06-22 | 2006-06-12 | Piezo actuator with increased displacement capacity |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102005028976A DE102005028976A1 (de) | 2005-06-22 | 2005-06-22 | Piezoaktor mit gesteigertem Hubvermögen |
DE102005028976.2 | 2005-06-22 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2006136504A1 true WO2006136504A1 (de) | 2006-12-28 |
Family
ID=36869877
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2006/063081 WO2006136504A1 (de) | 2005-06-22 | 2006-06-12 | Piezoaktor mit gesteigertem hubvermögen |
Country Status (5)
Country | Link |
---|---|
US (1) | US20100133957A1 (de) |
EP (1) | EP1894260A1 (de) |
CN (1) | CN101228643B (de) |
DE (1) | DE102005028976A1 (de) |
WO (1) | WO2006136504A1 (de) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102016116763A1 (de) * | 2016-09-07 | 2018-03-08 | Epcos Ag | Vorrichtung zur Erzeugung einer haptischen Rückmeldung |
US11396928B2 (en) | 2018-07-15 | 2022-07-26 | Delbert Tesar | Actuator with a parallel eccentric gear train driven by a mechanically amplified piezoelectric assembly |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6329741B1 (en) * | 1999-04-30 | 2001-12-11 | The Trustees Of Princeton University | Multilayer ceramic piezoelectric laminates with zinc oxide conductors |
WO2002086981A2 (en) * | 2001-04-24 | 2002-10-31 | Clemson University | Mechanically pretensioned electroactive devices and operation methods |
WO2004015789A2 (de) * | 2002-07-31 | 2004-02-19 | Siemens Aktiengesellschaft | Piezoaktor und verfahren zum herstellen des piezoaktors |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3833158A1 (de) * | 1988-09-29 | 1990-04-12 | Siemens Ag | Bistabiler biegewandler |
DE4103145A1 (de) * | 1991-02-02 | 1992-08-13 | Schott Glaswerke | Ultraschallsonde |
JP3183177B2 (ja) * | 1996-08-13 | 2001-07-03 | 株式会社村田製作所 | 加速度センサ |
DE19818068A1 (de) * | 1998-04-22 | 1999-10-28 | Siemens Ag | Piezoelektronischer Aktor für einen Stellantrieb |
US6329739B1 (en) * | 1998-06-16 | 2001-12-11 | Oki Electric Industry Co., Ltd. | Surface-acoustic-wave device package and method for fabricating the same |
EP1024540A3 (de) * | 1999-01-29 | 2001-09-12 | Seiko Epson Corporation | Piezoelectrischer Transducer und Anzeigevorrichtung mit elektrophoretischer Tinte, die den piezoelektrischen Transducer benutzt |
US6447106B1 (en) * | 1999-05-24 | 2002-09-10 | Matsushita Electric Industrial Co., Ltd. | Ink jet head and method for the manufacture thereof |
DE19954164B4 (de) * | 1999-11-10 | 2008-08-21 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Sensor zur Zustandsbestimmung von Kenngrößen an mechanischen Komponenten unter Verwendung von amorphen Kohlenstoffschichten mit piezoresistiven Eigenschaften |
DE50212202D1 (de) * | 2001-05-11 | 2008-06-19 | Caterpillar Inc | Verfahren zur Herstellung eines flachen mehrschichtigen Biegewandlers sowie entsprechender Biegewandler |
US6490385B1 (en) * | 2001-05-24 | 2002-12-03 | Nortel Networks Limited | Dimensionally stable device construction |
DE20202297U1 (de) * | 2001-09-07 | 2002-08-29 | Drei S Werk Praez Swerkzeuge G | Flacher Aktor oder Sensor mit interner Vorspannung |
JP3941592B2 (ja) * | 2002-06-03 | 2007-07-04 | 株式会社村田製作所 | 圧電フィルタ、およびそれを有する電子部品 |
US7070674B2 (en) * | 2002-12-20 | 2006-07-04 | Caterpillar | Method of manufacturing a multi-layered piezoelectric actuator |
-
2005
- 2005-06-22 DE DE102005028976A patent/DE102005028976A1/de not_active Withdrawn
-
2006
- 2006-06-12 WO PCT/EP2006/063081 patent/WO2006136504A1/de active Application Filing
- 2006-06-12 EP EP06763636A patent/EP1894260A1/de not_active Withdrawn
- 2006-06-12 US US11/993,465 patent/US20100133957A1/en not_active Abandoned
- 2006-06-12 CN CN2006800223380A patent/CN101228643B/zh not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6329741B1 (en) * | 1999-04-30 | 2001-12-11 | The Trustees Of Princeton University | Multilayer ceramic piezoelectric laminates with zinc oxide conductors |
WO2002086981A2 (en) * | 2001-04-24 | 2002-10-31 | Clemson University | Mechanically pretensioned electroactive devices and operation methods |
WO2004015789A2 (de) * | 2002-07-31 | 2004-02-19 | Siemens Aktiengesellschaft | Piezoaktor und verfahren zum herstellen des piezoaktors |
Also Published As
Publication number | Publication date |
---|---|
US20100133957A1 (en) | 2010-06-03 |
CN101228643B (zh) | 2010-04-14 |
CN101228643A (zh) | 2008-07-23 |
EP1894260A1 (de) | 2008-03-05 |
DE102005028976A1 (de) | 2006-12-28 |
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