WO2006112212A1

WO2006112212A1 - Movement guiding device and process for producing the same

Info

Publication number: WO2006112212A1
Application number: PCT/JP2006/304867
Authority: WO
Inventors: Naoki Yamashita
Original assignee: Thk Co., Ltd.
Priority date: 2005-03-31
Filing date: 2006-03-13
Publication date: 2006-10-26
Also published as: JP5275626B2; JPWO2006112212A1

Abstract

A movement guiding device having a track member and a moving member, at least one of which consists of a Cr-Mn-N alloy. Preferably, the Cr-Mn-N alloy is an austenitic stainless steel composed of, in terms of weight percent, 0.05 to 0.15% C, 16 to 20% Cr, 9 to 18% Mn, 0.8 to 5% Ni, 0.1 to 0.35% N and the balance of Fe and impurities. The production of screw shaft (11) as the track member is carried out through the drawing step (step S10) of performing reduction of a Cr-Mn-N austenitic stainless steel material and the forming/processing steps (step S11 to step S18) of machining the material having undergone the reduction of the drawing step (step S10) so as to attain forming thereof as screw shaft (11). Thus, a nonmagnetic movement guiding device of high hardness and high corrosion resistance can be produced at low cost.

Description

Specification

Motion guide device and manufacturing method thereof

Technical field

TECHNICAL FIELD [0001] The present invention relates to a motion guide device and a manufacturing method thereof, for example, high hardness, corrosion resistance, and the like that are required when used in special environments such as liquid crystal semiconductor manufacturing equipment, food machinery, and the medical field. The present invention relates to a motion guide device having a non-magnetic property and a method for manufacturing the same.

Background art

[0002] Conventionally, in motion guide devices such as linear guides, linear guide devices, ball spline devices, and Bonole screw devices, the members that make up a forceful device are repeatedly rolled and accompanied by a sliding motion. The structural member is generally made of a high-hardness metal material such as high-carbon chromium bearing steel, stainless steel or case-hardened steel.

[0003] On the other hand, in response to the recent demand for expanding the application range of motion guidance devices, for example, exercise in corrosive environments such as liquid crystal / semiconductor manufacturing equipment, food machinery, and machinery used in the medical field. Opportunities to use guidance devices are increasing. However, in a motion guide device used in such a corrosive environment, if bearing steel or the like is used as its constituent material, it may start early and end in a short life. Therefore, materials having good corrosion resistance such as stainless steel are used as constituent materials when corrosion resistance or chemical resistance is required.

[0004] The surface hardness that can be obtained when cold-working stainless steel with a force is limited to about 400 with the Bickers hardness HV. Stainless steel with this degree of hardness is the motion guide device. When used in the above, there is a problem with the viewpoint power such as wear resistance.

Disclosure of the invention

Problems to be solved by the invention

[0005] In the motion guide device, for example, austenitic stainless steels such as SUS303, SUS304, SUS316, and SUS316L have been used in the past. Since it becomes a martensite organization, In the manufacturing process, it has a problem of erosion that induces deterioration of corrosion resistance and generation of magnetism! / Therefore, there has been a demand for a technology that can provide an inexpensive motion guide device that has high surface hardness, corrosion resistance, and non-magnetic properties without adding an extra manufacturing process.

[0006] The present invention has been made in view of the above-described problems, and does not require additional manufacturing steps, so that manufacturing costs can be suppressed, and high surface hardness, corrosion resistance, and non-magnetism can be achieved. It is an object of the present invention to provide an unprecedented motion guide device that also has properties and a manufacturing method thereof.

Means for solving the problem

[0007] The motion guide device according to the present invention is installed on a raceway member and a plurality of rolling elements on the raceway member, and is capable of reciprocating or rotating freely in an axial direction or a circumferential direction of the raceway member. And at least one of the track member and the moving member is made of a Cr—Mn—N-based alloy.

[0008] In the motion guide apparatus according to the present invention, the Cr Mn-N-based alloy includes:% by weight: 0.05 to 0.15%, Cr: 16 to 20%, Mn: 9 to 18%, Ni : 0.8-5%, N: 0.1-0.35%, and the balance is preferably austenitic stainless steel with Fe and impurity power. In this specification, it is allowed to contain a trace amount of alloy elements such as Mo, Cu, V, and S as impurities contained in the balance.

[0009] Further, in the motion guide apparatus according to the present invention, the Cr-Mn-N-based alloy may have a hardness of 500 or more with a Pitzers hardness HV.

[0010] Further, in the motion guide device according to the present invention, the Cr Mn—N-based alloy may have a relative magnetic permeability of 1.01 or less.

[0011] Further, in the motion guide device according to the present invention, the raceway member is a screw shaft in which a spiral rolling member rolling groove is formed on an outer peripheral surface, and the moving member is on the inner peripheral surface. It is a nut member in which a helical load rolling groove corresponding to a moving body rolling groove is formed, and the nut member is a load rolling path constituted by the loaded rolling groove and the rolling element rolling groove. The nut of the screw shaft is provided with a return passage that forms an infinite circulation path by connecting one end and the other end, and the plurality of rolling elements are installed so as to be able to circulate in the infinite circulation path. The nut member can be configured as a rolling element screw device that reciprocally moves relative to the screw shaft in association with a relative rotational movement with respect to the member.

[0012] A method of manufacturing a motion guide apparatus according to the present invention includes a race member, a race member that is installed via a plurality of rolling elements, and can freely reciprocate or rotate in the axial direction or circumferential direction of the race member. A moving member installed movably, wherein at least one of the track member and the moving member is made of a Cr-Mn-N alloy, A drawing process for performing reduction treatment on the N-based alloy material, and a forming process step for forming the material subjected to the reduction treatment in the drawing process as the race member or the moving member by mechanically cleaning the material. A process including the above is performed.

[0013] In another method for manufacturing a motion guide device according to the present invention, a reciprocating motion is provided in a raceway member and the raceway member via a plurality of rolling elements, and in the axial direction or the circumferential direction of the raceway member. A moving member that is freely or rotationally movable, and a method for manufacturing an in-exercise device comprising at least one force Cr Mn-N-based alloy of the track member and the moving member, The moving member is a nut member in which the rolling groove of the rolling element is formed on the inner peripheral surface, and the mechanical force of the Cr Mn—N alloy material is increased to 95% or more of the final shape of the nut member. And a roughing process to be performed, and a finishing process to obtain the nut member by performing a finishing process on a member roughened by the roughing cache process. To do.

[0014] It should be noted that the above summary of the invention does not enumerate all the necessary features of the present invention, and a sub-combination of these feature groups can also be an invention.

The invention's effect

[0015] According to the present invention, it is possible to provide a motion guide device having a high hardness, excellent corrosion resistance, and non-magnetic properties, and a method for manufacturing the same, without additional manufacturing steps such as surface treatment. Therefore, for example, it is possible to provide an inexpensive motion guide apparatus that can be suitably used even in a special environment such as a liquid crystal semiconductor manufacturing facility, a food machine, or a medical field.

Brief Description of Drawings FIG. 1 is a vertical cross-sectional side view illustrating an example of a case where the motion guide device according to the present embodiment is configured as a ball screw device.

FIG. 2 is a flowchart showing a manufacturing process of a screw shaft according to the present embodiment.

FIG. 3 is a flowchart showing a manufacturing process of a nut member according to the present embodiment.

[FIG. 4A] FIG. 4A is an external perspective view illustrating an embodiment in which a motion guide device using a Cr—Mn—N alloy according to the present invention is configured as a linear guide device.

FIG. 4B is a cross-sectional view for explaining the infinite circuit provided in the linear guide device shown in FIG. 4A.

FIG. 5 is an external perspective view illustrating an embodiment in which a motion guide device using a Cr—Mn—N alloy according to the present invention is configured as a spline device.

[FIG. 6A] FIG. 6A is a partially longitudinal perspective view illustrating an embodiment in which a motion guide device using a Cr—Mn—N alloy according to the present invention is configured as a rotary bearing device.

FIG. 6B is a view showing a longitudinal section of the rotary bearing device shown in FIG. 6A.

Explanation of symbols

[0017] 10 ball screw device, 11 screw shaft, 11a rolling element rolling groove, 12, 42, 62 ball, 20 load rolling path, 31 nut member, 32 nut body, 32a flange, 32b load rolling groove, 33 side Lid, 34 Return path, 35 Return piece, 36 Cover, 37 Direction change path, 38 No-load rolling path, 39 Endless circulation path, 40 Linear guide device, 41 Track rail, 41a Rolling element rolling groove, 43 Moving block, 43a Loaded rolling element rolling groove, 52 loaded rolling path, 53 unloaded rolling path, 55 direction changing path, 60 spline device, 61 spline shaft, 61a rolling element rolling groove, 63 outer cylinder, 64 cage, 70 rotating bearing device 71 inner ring, 72 inner raceway groove, 73 outer race, 74 outer raceway, 75 raceway, 77 rollers.

BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, preferred embodiments for carrying out the present invention will be described with reference to the drawings.

. The following embodiments are not intended to limit the invention according to each claim, and are also described in the embodiments! All combinations of features are essential to the solution of the invention. Not exclusively.

[0019] Application to ball screw device The motion guide device according to the present embodiment can be configured as a rolling element (ball) screw device as shown in FIG. FIG. 1 is a vertical cross-sectional side view illustrating one mode when the motion guide device according to this embodiment is configured as a ball screw device.

As shown in FIG. 1, a ball screw device 10 according to the present embodiment moves through a screw shaft 11 as a race member and a plurality of rolling elements balls 12 to the screw shaft 11. And a nut member 31 as a movable member that can be freely attached. On the outer peripheral surface of the screw shaft 11, two spiral rolling element rolling grooves 11a, 11a are formed. In the ball screw device 10 according to the present embodiment, both members of the screw shaft 11 and the nut main body 32 constituting the nut member 31 are made of a Cr—Mn—N-based alloy manufactured by a process described later.

The nut member 31 includes a nut main body 32 and resin side covers 33 and 33 attached to both ends thereof. On the outer periphery of the nut body 32, a flange 32a for attaching the nut member 31 to its counterpart part is formed. In addition, on the inner peripheral surface of the nut body 32, two strips of load rolling grooves 32b and 32b extending spirally corresponding to the rolling element rolling grooves 11a and 11a are formed. Helical load rolling paths 20 and 20 are formed by the combination of the rolling element rolling grooves 11a and 11a and the load rolling grooves 32b and 32b.

[0022] Two return passages 34, 34 penetrating the nut main body 32 in the axial direction are formed in the nut main body 32 of the nut member 31. The side lid 33 has a return piece 35 and a cover 36 that covers the outer side of the return piece 35, and the direction connecting the return path 34, 34 and the load rolling path 20, 20 by the left and right return pieces 35, 35, respectively. Diversion paths 37, 37 are formed. The combination of the return path 34, 34 and the direction change path 37, 37 constitutes the unloaded rolling path 38, 38 of the ball 12, and the combination of the unloaded rolling path 38, 38 and the loaded rolling path 20, 20 The infinite circulation paths 39 and 39 are constituted by the above.

With the above configuration, the ball screw device 10 according to the present embodiment allows the nut member 31 to move relative to the screw shaft 11 as the screw shaft 11 rotates relative to the nut member 31. Can now reciprocate! /

[0024] The two side lids 33, 33 of the nut member 31 are manufactured by the steps described later in the same manner as the force nut body 32 and the screw shaft 11 which are exemplified by the case of being made of grease. It is possible to configure with a Cr—Mn—N based alloy. Further, in FIG. 1, the motion guide device according to this embodiment may be configured as a roller screw device by using the force roller described by exemplifying the case where the ball 12 is used as the rolling element. Further, the nut member 31 shown in FIG. 1 employs a so-called end cap method, but a member employing a return nove, a deflector, or the like is also applicable.

Next, a method for manufacturing the motion guide device according to the present embodiment will be described by illustrating a method for manufacturing the screw shaft 11 and the nut body 32 shown in FIG.

[0026] The metal material to be processed in the manufacturing method according to the present embodiment employs a high Mn high N Cr-Mn-N alloy as exemplified in the following table. . The steel types shown in the table below have a hardness of 500 or more in Pitzkaas hardness HV only by undergoing cold working without any special treatment, and the strength also maintains the same corrosion resistance as SUS304, etc. The magnetic permeability achieves a value of 1.01 or less. Therefore, it can be suitably used for a motion guide device used in a special environment.

[0027] [Table 1]

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li

Degree bit

Name i) (le fiber)

Other

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郜

铜铜 system Ito ΰ05015 DNM-n- --pure--F .. + c

Remaining soil ^ οο.Q0Desasτ-''

Below 80105000- ..

Pure thing F + e:

ΐ

; JαοΈiroO 9I £ SAS

Less than

Blunt F + e:

ιο

n

o

1 1

σ

1 1 o

ϋ

\ Inch

ό?

7

o

Specifically, the Cr—Mn—N-based alloy according to the embodiment is the same by weight%: 0.05 to 0.1. 5%, Cr: 16-20%, Mn: 9-18%, Ni: 0.8-5%, N: 0.1-0.35%, the balance is austenitic stainless steel with Fe and impurity power Preferably it is. The Cr-Mn-N alloy having the characteristics of high hardness, high corrosion resistance and non-magnetism can be obtained by the function and effect exhibited by each alloy element having a limited composition range.

[0029] The reason for selecting the alloy components of Cr Mn-N austenitic stainless steel has been described above. By using austenitic stainless steel with a strong component range, it is possible to obtain high hardness, high corrosion resistance, and non-magnetic properties that could not be realized in the past. However, the application of the present invention includes any component austenitic stainless steel as long as it is included in the component ranges shown in the table above. For example, Cr—high Ni, Cr high Mn This also includes the Cr Ni—N austenitic stainless steels. Hereinafter, the manufacturing method will be specifically described.

[0030] Iron shaft making process of screw shaft

FIG. 2 is a flowchart showing a manufacturing process of the screw shaft according to the present embodiment. The screw shaft 11 according to this embodiment is manufactured by a reduction process (step S10) in which a reduction process is performed on a Cr-Mn-N austenitic stainless steel material (step S10), and the reduction process is performed by this extraction process (step S10). This is performed by carrying out a molding (step S11 to step S18) molding process for forming the screw shaft 11 by mechanically cleaning the material.

Specifically, a Cr—Mn—N austenitic stainless steel material is obtained, and first, a reduction treatment as a drawing process is performed (step S 10). This drawing process (step S10) is performed in order to physically stabilize the material that will be subjected to the rolling process later. In this embodiment, a reduction process of about 25 to 45% is performed.

[0032] Subsequently, the material is subjected to rough machining as a previous stage to undergo machining, and a rough outline shape is cut out by centerless grinding (step S11), and the outline shape is adjusted by chamfering. (Step S12).

[0033] When the roughing of the material is completed, the material is subsequently finished. In this finishing process, first, a rolling process is performed on the surface of the material after the roughing process to form the rolling element rolling groove 1 la (step S13). And by cutting to a predetermined length, the screw shaft After defining the axial length of 11 (Step S14), intermediate correction (Step SI 5), terminal processing before finishing correction (Step S16), and finishing correction (Step S17), the terminal force as finishing A check is performed (step S18). The forming of the screw shaft 11 is completed by performing the forming and covering process (Step SI 1 to Step S18) described above.

[0034] When the formation of the screw shaft 11 is completed, a product inspection is performed (step S19). After confirming that the completed screw shaft 11 satisfies a predetermined standard, the product is assembled in the motion guide device. Will be included.

[0035] The screw shaft 11 thus completed exhibits a value of 500 or more in terms of Vickers hardness HV. This is due to the work hardening caused by the cold working such as the rolling cage carried out in step S13, and is due to the effect of the suitably contained N. Therefore, the screw shaft 11 manufactured by the manufacturing method according to the present embodiment can obtain a desired hardness only by performing a forming process without adding an extra processing step such as a surface treatment.

[0036] Further, the screw shaft 11 manufactured by the manufacturing method according to the present embodiment can maintain the same corrosion resistance as that of SUS304 or the like due to the effect of Mn and Ni contained suitably.

[0037] Further, when the relative permeability of the screw shaft 11 was measured, 1.01 or less was achieved. Therefore, the screw shaft 11 manufactured by the manufacturing method according to the present embodiment has a high hardness, an excellent corrosion resistance, and also maintains non-magnetic properties. It can be suitably applied as a component of the ball screw device 10 used below.

[0038] Manufacturing process of nut member

Next, the manufacturing process of the nut member 31 using Cr—Mn—N austenitic stainless steel will be described with reference to FIG. FIG. 3 is a flowchart showing the manufacturing process of the nut member according to the present embodiment. The production of the nut member 31 according to this embodiment is performed by a rough caulking process (step S20 to step S23) in which a mechanical calorie is applied to a Cr-Mn-N alloy material to 95% or more of the final shape of the nut member. And a finishing process (step S24 to step S27) for obtaining a nut member by applying a finishing force to the member subjected to the rough cleaning process (step S20 to step S23). Line by carrying out Is called.

[0039] A characteristic point in the manufacturing process of the nut member 31 according to the present embodiment is that a roughing process (step S20 to step S23) and a finishing process (step S24 to step S27) are performed in two stages. The nut member 31 is in production. In particular, the load rolling groove 32b as the rolling groove of the rolling element formed on the inner peripheral surface of the nut member 31 is a rough material that is subjected to mechanical force up to 95% or more of the final shape of the nut member 31. It is formed by a rolling tap cover (step S22) as a mold and a rolling tap cover (step S26) as a finish cover. By undergoing such a two-stage molding process, high hardness can be obtained.

[0040] Explaining the specific manufacturing process, the nut member 31 is manufactured by first obtaining a Cr-Mn-N austenitic stainless steel material and cutting the material into a suitable size. (Step S 20). Then, inner diameter drilling, rolling tapping, and outer shape processing are performed as roughing (steps S21 to S23).

[0041] The material that has been rough-cured in this way is then divided into a top hole (step S24), a flange-chamber for forming the flange 32a (step S25), and a rough-rolled load rolling groove. A rolling tap cover (Step S26) for completing 32b is applied, and then cylindrical processing (Step S27), which is a molding finishing process, is performed. The nut member 31 is completely formed through such a forming / caching process. The significant properties of the completed nut member 31 are the same as in the case of the screw shaft 11 described above. In addition to its high hardness, it has excellent corrosion resistance and is non-magnetic (relative permeability is 1. In particular, it can be suitably applied as a component of the ball screw device 10 used in a special environment.

[0042] In the present embodiment, the two members of the screw shaft 11 and the nut body 32 are made of Cr-Mn-N austenitic stainless steel. Only the vicinity of the spiral load rolling paths 20 and 20 can be formed of austenitic stainless steel subjected to the processing according to the present embodiment. That is, the screw shaft 11 that is the raceway member or the nut body 32 that constitutes the moving member has at least the rolling element rolling surface such as the load rolling path 20 in contact with the plurality of balls 12. Aus of the system It can be assumed that it is made of tenite stainless steel. Furthermore, all the members constituting the movement guide device can be made of Cr Mn—N austenitic stainless steel manufactured by the manufacturing method according to the present embodiment.

[0043] Although the preferred embodiments of the present invention have been described above, the technical scope of the present invention is not limited to the scope described in the above embodiments. Various modifications or improvements can be covered in the above embodiment. That is, the motion guide device using the Cr—Mn—N alloy according to the present invention is installed on the raceway member and the raceway member via a plurality of rolling elements, and reciprocates in the axial direction or the circumferential direction of the raceway member. A moving member that is freely movable or rotationally movable, and has at least one of the force of the race member and the moving member Cr Mn-N-based alloy. It can also be applied to.

[0044] Configuration of the linear guide device applicable to the present invention

For example, the motion guide device using a Cr—Mn—Ν alloy according to the present invention can be configured as a linear guide device as shown in FIGS. 4A and 4B. Here, FIG. 4A is an external perspective view illustrating an embodiment in which a motion guide device using a Cr—Mn—N alloy according to the present invention is configured as a linear guide device. FIG. 4B is a cross-sectional view for explaining the infinite circuit provided in the linear guide device shown in FIG. 4A.

[0045] The linear guide device 40 illustrated in FIG. 4A and FIG. 4B is slidable via a track rail 41 as a track member and balls 42 that are installed on the track rail 41 as a large number of rolling elements. And a moving block 43 as a moving member attached to the. The track rail 41 is a long member whose cross section perpendicular to the longitudinal direction is formed in a substantially rectangular shape. The rolling element rolling groove 41a which becomes a track when the ball rolls on its surface (upper surface and both side surfaces). ... is formed over the entire length of the track rail 41.

[0046] Here, the track rail 41 may be formed to extend linearly or may be formed to extend in a curved line. In addition, the number of rolling element rolling grooves 41a... Is four in total, two on each side, but the number can be changed according to the application of the linear guide device 40 and the like.

[0047] On the other hand, the moving block 43 is loaded at positions corresponding to the rolling element rolling grooves 41a. The rolling element rolling groove 43a '"is provided. The rolling element rolling groove 52a of the rolling rail 43 and the loaded rolling element rolling groove 43a ... A plurality of balls 42 are formed. Furthermore, the moving block 43 includes four unloaded rolling paths 53 extending in parallel with the rolling element rolling grooves 41 a, each unloaded rolling path 53, and each loaded rolling path 52. There is a direction change path 55 ... A combination of one loaded rolling path 52 and unloaded rolling path 53 and a pair of direction changing paths 55 connecting them forms one infinite circuit (see FIG. 4B).

[0048] Then, a plurality of balls 42 are installed in an infinite circulation path composed of a load rolling path 52, a no-load rolling path 53, and a pair of directional switching paths 55, 55 so as to allow infinite circulation. As a result, the moving block 43 can reciprocate relative to the track rail 41.

[0049] Of the members constituting such a linear guide device 40, at least one of the track rail 41 and the moving block 43 is made of a Cr-Mn-N alloy formed by the manufacturing method according to the present invention. Is possible. By using such a Cr—Mn—N alloy as a constituent member, it is possible to realize a linear guide device 40 having excellent properties such as high hardness, high corrosion resistance, and non-magnetism that are not available in the past.

[0050] The present invention can be used as a spline arrangement.

Further, the motion guide device using the Cr—Mn—N alloy according to the present invention can be configured as a spline device as shown in FIG. Here, FIG. 5 is an external perspective view illustrating an embodiment in which the motion guide device using the Cr Mn—N alloy according to the present invention is configured as a spline device.

[0051] The spline device 60 shown in Fig. 5 includes a spline shaft 61 as a race member and a movable member attached to the spline shaft 61 via a plurality of balls 62 as rolling elements. And a cylindrical outer cylinder 63 as the above.

[0052] On the surface of the spline shaft 61, a rolling element rolling groove 6 la 'is formed as a track of the ball 62 and extending in the axial direction of the spline shaft 21 !. The outer cylinder 63 attached to the spline shaft 61 is formed with a loaded rolling element rolling groove corresponding to the rolling element rolling groove 6 la. These load rolling element rolling grooves are formed with a plurality of protrusions extending in the direction in which the rolling element rolling grooves 61a. A load rolling path is formed between the loaded rolling element rolling groove formed on the outer cylinder 63 and the rolling element rolling groove 6 la formed on the spline shaft 61. Next to the load rolling path, there is formed a no-load return path through which balls 62 ... released from the load move. The outer cylinder 63 incorporates a cage 64 that holds and holds a plurality of balls 62... In a circuit shape.

[0054] A plurality of balls 62 are installed between the loaded rolling element rolling groove of the outer cylinder 63 and the rolling element rolling groove 61a of the spline shaft 61 so as to be freely rollable. The outer cylinder 63 can be reciprocated relative to the spline shaft 61 by being installed so as to be infinitely circulated therethrough.

[0055] Of the members constituting the spline device 60, at least one of the spline shaft 61 and the outer cylinder 63 can be composed of a Cr Mn-N alloy formed by the manufacturing method according to the present invention. It is. By using such a Cr—Mn—N alloy as a constituent member, it is possible to realize a spline device 60 that has excellent properties such as high hardness, high corrosion resistance and non-magnetism that have not been conventionally available.

[0056] Configuration of commercially available rolling bearing device

Furthermore, the motion guide device using the Cr—Mn—N alloy according to the present invention can be configured as a rotary bearing device as shown in FIGS. 6A and 6B. Here, FIG. 6A is a partially longitudinal perspective view illustrating an embodiment in which the motion guide device is configured as a rotary bearing device using the Cr Mn—N alloy according to the present invention. FIG. 6B is a view showing a longitudinal section of the rotary bearing device shown in FIG. 6A.

As shown in FIGS. 6A and 6B, the motion guide device configured as the rotary bearing device 70 includes an inner ring 71 having an inner raceway groove 72 having a V-shaped cross section on the outer peripheral surface, and a cross section on the inner peripheral surface. The outer ring 73 having the V-shaped outer raceway groove 74 and the raceway 75 having a substantially rectangular cross section formed by the inner raceway groove 72 and the outer raceway groove 74 are cross-arranged so as to be able to roll. By having rollers 77 as a plurality of rolling elements, the inner ring 71 and the outer ring 73 perform relative rotational movement in the circumferential direction.

[0058] Among the members constituting the rotary bearing device 70, at least one of the inner ring 71 and the outer ring 73 is formed of a Cr-Mn-N alloy formed by the manufacturing method according to the present invention. Is possible. Such a Cr-Mn-N alloy is used as a component. In particular, it is possible to realize the rotary bearing device 70 that has excellent properties such as high hardness, high corrosion resistance, and non-magnetism that have not been obtained in the past.

The present invention can be applied to all types of motion guide devices such as linear guide devices and rolling bearings that can be used only with the above-described linear guide device, spline device, ball screw device, and rotary bearing device. It is apparent from the description of the scope of claims that the embodiments added with such changes or improvements can also be included in the technical scope of the present invention.

Claims

The scope of the claims

[1] raceway members;

A moving member installed on the raceway member via a plurality of rolling elements and installed so as to be reciprocally movable or rotatable in the axial direction or circumferential direction of the raceway member,

At least one of the track member and the moving member is made of a Cr—Mn—N-based alloy.

[2] In the exercise guidance device according to claim 1,

The Cr—Mn—N-based alloy is as follows:% by weight: 0.05 to 0.15%, Cr: 16 to 20%, Mn: 9 to 18%, Ni: 0.8 to 5%, N: 0 A motion guide device characterized by being austenitic stainless steel of 1 to 0.35%, the balance being Fe and impurities.

[3] In the exercise guidance device according to claim 1 or 2,

The Cr-Mn-N alloy has a Vickers hardness HV and a hardness of 500 or more.

[4] In the exercise guidance device according to any one of claims 1 to 3,

The Cr—Mn—N alloy has a relative magnetic permeability of 1.01 or less.

[5] In the exercise guidance device according to any one of claims 1 to 4,

The track member is a screw shaft in which a spiral rolling element rolling groove is formed on an outer peripheral surface, and the moving member is a spiral load rolling groove corresponding to the rolling element rolling groove on an inner peripheral surface. Is a formed nut member,

The nut member includes a return passage that forms an infinite circulation path by connecting one end and the other end of a load rolling path constituted by the load rolling groove and the rolling element rolling groove, When the rolling element is installed so as to be able to circulate in the infinite circulation path, the nut member reciprocates relative to the screw shaft as the screw shaft rotates relative to the nut member. A motion guide device characterized by being configured as a moving rolling element screw device.

[6] raceway members; A moving member installed on the raceway member via a plurality of rolling elements and installed so as to be reciprocally movable or rotatable in the axial direction or circumferential direction of the raceway member,

A method of manufacturing a motion guide device in which at least one of the track member and the moving member is made of a Cr-Mn-N alloy,

A drawing process for performing reduction treatment on the Cr-Mn-N alloy material;

A forming process step of forming the track member or the moving member by mechanically cleaning the material subjected to the reduction process in the drawing step;

A method of manufacturing a motion guide device, comprising performing a process including:

A track member;

The moving member is a nut member in which a rolling groove of the rolling element is formed on an inner peripheral surface,

A roughing process in which mechanical calorie is applied to Cr-Mn-N alloy material to 95% or more of the final shape of the nut member;

A finishing step of obtaining the nut member by performing a finishing force check on the member roughly roughed by the roughing cache step;