WO2006109403A1

WO2006109403A1 - Machine with built-in movement guiding device, actuator, and attenuating module for machine with built-in movement guiding device

Info

Publication number: WO2006109403A1
Application number: PCT/JP2006/305217
Authority: WO
Inventors: Hidekazu Michioka; Hiroshi Niwa; Yoshio Taki
Original assignee: Thk Co., Ltd.
Priority date: 2005-03-30
Filing date: 2006-03-16
Publication date: 2006-10-19
Also published as: JPWO2006109403A1

Abstract

A machine with a built-in movement guiding device capable of relieving fretting corrosion phenomenon when a moving object is moved at a high acceleration. An attenuating module (13) for attenuating the free vibration of a frame (8) is installed on the frame (8) to which either of the rails (12) and the blocks (10) of the movement guiding device (9) are fixed. A high-frequency vibration generating the fretting corrosion phenomenon is caused by the free vibration of the frame (8) of the machine on which the movement guiding device (9) is installed. Thus, if the free vibration of the frame (8) is attenuated, the high-frequency vibration can be attenuated and, accordingly, the fretting corrosion phenomenon can be relieved.

Description

Specification

Motion guide device built-in machine, actuator, and motion guide device built-in machine damping module

Technical field

[0001] The present invention relates to a motion guide device-embedded machine in which a motion guide device that performs a guide function by rolling motion of a rolling element is incorporated in a guide portion via a rolling element of balls and rollers.

Background art

[0002] Motion guide devices that guide moving objects that perform linear or curved motions are used in various fields such as robots that carry parts and assemble, semiconductor 'liquid crystal manufacturing devices, and machine tools. ing. A rolling motion guide device performs a guiding function by rolling motion of a rolling element via a ball or roller rolling element at a guide portion.

[0003] As a drive source for moving a moving object, a ball screw mechanism and a linear motor are frequently used. In recent years, with the advent of linear motors, moving objects have been frequently moved with high acceleration. The demand for high acceleration extends not only to linear motors but also to ball screw mechanisms.

[0004] When a moving object is moved at a high acceleration, things that have not been a problem have occurred. It is a phenomenon called fretting corrosion, and it is a problem that the rail of the motion guide device wears at the rolling element pitch.

[0005] Fig. 1 (A) shows a perspective view of the rail, and Fig. 1 (B) shows a rolling element rolling portion of the rail in which the fretting corrosion phenomenon has occurred. The darker areas in Fig. 1 (B) are areas where wear has occurred. FIG. 2 is a graph showing the relationship between the longitudinal position of the rolling element rolling part and the amount of wear in the depth direction of the rolling element rolling part of FIG. 1 (B). From Fig. 1 and Fig. 2, it can be seen that there is a deep dent due to wear in the rolling element rolling groove. Wear occurs at a constant rolling element pitch.

[0006] Conventionally, the fretting corrosion has been caused by the relative sliding between the rolling elements and the rails due to the interruption of the lubricating oil due to repeated fine strokes of the moving object and the oil film breaking. It was thought that this was caused by the fine powder acidifying and promoting wear.

[0007] However, not only when the moving object is reciprocated with a small stroke, but also when the moving object is reciprocated with a long stroke, if the moving object is moved at a high acceleration, a fretting corrosion phenomenon occurs similarly. Nogawa has been strong.

Disclosure of the invention

Problems to be solved by the invention

[0008] In order to find out the cause of the fretting corrosion phenomenon, the inventor tried to reciprocate the rail 3 at a high acceleration with the load endurance tester shown in FIG. In this testing machine, the block 1 side is fixed and the table 2 and rail 3 sides are retaliated. A load is applied to the block 1 from above through the disc spring 4 and the load cell 5. Figure 4 shows the speed diagram of the rail at this time. Specifically, the rail is first accelerated at a substantially constant acceleration. When the speed increases, the rail is accelerated to a substantially constant speed, and then decelerated and stopped. The rail is reciprocated with this velocity diagram.

The inventor tried to measure the vibration of the block with a non-contact displacement meter 6 while reciprocating the rail. Then, as shown in Fig. 4, we discovered that Block 1, which should not move normally, vibrates at an amplitude of 10 m or less and at a high frequency. In other words, when the rail is reciprocated, the block vibrates at high frequency. When the rail was moved at a high acceleration, the amplitude of the vibration increased, and it was found that high-frequency vibration with a large amplitude causes fretting collision phenomenon.

Means for solving the problem

[0010] Hereinafter, the present invention will be described. In order to facilitate understanding of the present invention, reference numerals on the attached drawings are appended in parentheses, but the present invention is not limited to the illustrated form.

[0011] The inventor studied the cause of high-frequency vibration that causes the fretting corrosion phenomenon. Until now, the motion guide device itself has attracted attention, but the high-frequency vibration that causes the fretting corrosion phenomenon is caused by the free vibration of the frame of the machine to which the motion guide device is attached. It has been found that if the vibration is attenuated, the high-frequency vibration can be attenuated and the fretting corrosion phenomenon can be mitigated. [0012] That is, the invention according to claim 1 includes a raceway member (12) that extends linearly or in a curved line and has a rolling element rolling part (12a) formed along a longitudinal direction, and the rolling element rolling. A rolling member rolling portion (29) facing the portion (12a) is formed, and the moving member (10) is slidably assembled along the race member (12), the race member (12), and A motion guide device (9) having a plurality of rolling elements (28) interposed between the rolling elements (12a, 29) of the moving member (10) so as to allow rolling motion; and the motion guide A frame (8) to which either one of the track member (12) or the moving member (10) of the device (9) is fixed, attached to the frame (8), or at least of the frame (8) A motion comprising: a damping module (13, 17, 20, 24) that forms a part and damps free vibration of the frame (8) The inner device built machine, for solving the above problems.

[0013] The invention according to claim 2 is the motion guide device built-in machine according to claim 1, wherein the damping module (13) includes a metal structure (14) having a hollow portion (14a), A vibration absorber (15) made of a ceramic material filled in the hollow portion (14a) is provided.

[0014] The invention according to claim 3 is the motion guide device-embedded machine according to claim 1, wherein the damping module (17) includes a metal shaft-like structure (18) and the structure ( And a vibration absorber (19) made of a ceramic material wound around the periphery of 18).

[0015] The invention according to claim 4 includes a raceway member (12) extending linearly or curvedly and having a rolling element rolling part (12a) formed along a longitudinal direction, and the rolling element rolling part. A rolling member rolling part (29) opposite to (12a) is formed, and the moving member (10) is slidably assembled along the track member (12), the track member (12), and the moving A motion guide device (9) having a plurality of rolling elements (28) interposed between the rolling element rolling portions (12a, 29) of the member (10) so as to allow rolling motion; and the motion guide device (9 ) Of the track member (12) or the moving member (10) is fixed, a base (36) having a hollow portion (36c), and the track member (12) with respect to the base (36). ) Or the driving member (40) for moving either the moving member (10) and the hollow portion (36c) of the base (36), and the free vibration of the base (36) is filled. The above-described problem is solved by an actuator characterized by comprising a vibration absorber (37) for damping motion. [0016] The invention described in claim 5 is the actuator according to claim 4, wherein the base (36) is made of metal, and the vibration absorber (37) is made of a ceramic material. .

[0017] The invention according to claim 6 includes a raceway member (12) extending linearly or curvedly and having a rolling element rolling part (12a) formed along a longitudinal direction, and the rolling element rolling part. A rolling member rolling part (29) opposite to (12a) is formed, and the moving member (10) is slidably assembled along the track member (12), the track member (12), and the moving A motion guide device (9) having a plurality of rolling elements (28) interposed between the rolling element rolling portions (12a, 29) of the member (10) so as to allow rolling motion; and the motion guide device (9 ) Of the track member (12) or the frame (8) to which one of the moving members (10) is fixed, and a damping module (13, 17, 20, 24) attached to the machine incorporating the motion guide device The damping module (13, 17, 20, 24) is attached to the frame (8) to reduce the free vibration of the frame (8). The motion guide device built machinery attenuation module, characterized in that to, for solving the above problems. As described in claim 6, the attenuation module may be traded alone.

The invention's effect

[0018] According to the invention of claim 1, since the free vibration of the frame can be damped by the damping module, the fretting corrosion phenomenon that occurs when the moving body is moved at high acceleration can be mitigated. it can.

[0019] According to the invention of claim 2 or 3, vibration of a high frequency such as a machine frame can be effectively damped by the damping module.

[0020] According to the invention of claim 4, since the free vibration of the base can be damped by the vibration absorber, the fretting corrosion phenomenon that occurs when the moving body is moved at a high acceleration can be achieved. can do.

[0021] According to the invention of claim 5, the vibration of the high frequency such as the base of the machine is performed.

It can be effectively damped by the vibration absorber.

[0022] According to the invention of claim 6, since the free vibration of the frame can be damped by the damping module, the fretting corrosion generated when the moving body is moved at a high acceleration. The phenomenon can be alleviated.

Brief Description of Drawings

[0023] [Fig. 1] Diagram showing rail wear (Fig. 1 (A) is a perspective view of the rail, and Fig. 1 (B) is a photograph of the rolling element rolling part of the rail).

FIG. 2 is a graph showing the relationship between the longitudinal position of the rolling element rolling part and the amount of wear in the depth direction.

FIG. 3 is a schematic diagram showing a load durability tester.

[Figure 4] Rail speed diagram.

FIG. 5 is a schematic view of a machine incorporating a motion guide device according to an embodiment of the present invention.

FIG. 6 is a perspective view of the attenuation module.

FIG. 7 is a perspective view showing another example of the attenuation module.

FIG. 8 is a perspective view showing another example of the attenuation module.

FIG. 9 is a perspective view showing another example of the attenuation module.

FIG. 10 is a perspective view showing a motion guide device incorporated in a machine.

FIG. 11 is a sectional view along the rail of the motion guide device.

FIG. 12 is a perspective view showing an actuator according to an embodiment of the present invention.

FIG. 13 is a sectional view showing an actuator according to an embodiment of the present invention.

Explanation of symbols

[0024] 8 ... Frame

9… Exercise guide device

10 · · · Block (moving member)

12 ··· Rail (Race member)

12a ... rolling element rolling part

13. 17, 20, 24

14. 18, 22, 25

14a, 25a, 36c ... hollow part

15. 19, 21, 37… Vibration absorber

29

36 · · · Base 37 ··· Vibration absorber

40… Linear motor (drive source)

BEST MODE FOR CARRYING OUT THE INVENTION

[0025] Hereinafter, a machine incorporating a motion guide apparatus according to an embodiment of the present invention will be described with reference to the accompanying drawings. In the drawings, the same machine elements are denoted by the same reference numerals.

FIG. 5 shows a schematic diagram of a machine incorporating a motion guide device. The motion guide device 9 is supported on the frame 8 of the machine incorporating the motion guide device. The frame 8 has a structure in which a frame 8a is formed of, for example, a shape steel or an aluminum extruded material, and a surface plate 8b is mounted on the upper surface of the frame 8a. A motion guide device 9 is attached to the surface plate 8b. A table 11 is attached to the upper surface of the block 10 of the motion guide device 9, and a moving object such as a tool is attached to the upper surface of the table 11. The motion guide device 9 guides the linear motion of the moving object. The moving object is driven by, for example, a linear motor or a ball screw and reciprocates.

[0027] Applications of the motion guide device built-in machine shown in Fig. 5 include semiconductor bonder manufacturing equipment such as wire bonders and dicers, machine tools, and robots that carry and assemble things (for example, each axis of the robot, Component mounting machines that attach components to circuit boards, ski 'snowboard tune-up machines, and robots that transport robots). Among them, the semiconductor 'liquid crystal manufacturing apparatus' has improved the performance of the manufactured semiconductor' liquid crystal product, so that it is required to move the tool with high accuracy and high speed. On the other hand, the frame 8 of the semiconductor / liquid crystal manufacturing apparatus has lower rigidity than the frame of a machine tool that is often made by welding metal members. For this reason, when the moving object is moved at a high acceleration, the frame vibrates freely due to the inertia of the moving object.

[0028] The free vibration of the frame 8 causes a fretting corrosion phenomenon in the motion guide device 9 as described above. That is, the free vibration of the frame 8 causes the rail 12 to vibrate at a relatively large amplitude with respect to the block 10, and the high-frequency vibration of the rail 12 causes a fretting corrosion phenomenon.

In order to attenuate the free vibration of the frame 8, a damping module 13 is attached to the frame 8. The damping module 13 can be attached in various forms such as braces, beams, and struts to the frame 8 that responds to various and various vibrations that occur depending on the machine. . The damping module 13 may also form part of the frame 8 instead of the post. Since the fretting corrosion phenomenon is caused by the rail 12 vibrating in the moving direction of the block 10, it is effective to attenuate the free vibration of the frame 8 in the moving direction of the block 10.

[0030] The free vibration of the frame 8 has a high frequency and a small amplitude. The frequency is, for example, 40 to 70 Hz, and the amplitude is, for example, 10 μm to 40 μm. On the other hand, the reciprocating motion of a microstroke that generates a fretting corrosion, which has been conventionally considered, has a frequency of 3 to 5 Hz and an amplitude of about 2 to 3 mm. The attenuation module 13 of the present embodiment is devised so as to effectively attenuate a minute amplitude at a high frequency.

FIG. 6 shows a perspective view of the attenuation module 13. The damping module 13 includes a metal structure 14 having a hollow portion 14a and a vibration absorber 15 made of a ceramic material filled in the hollow portion 14a. There is no gap between the structure 14 and the vibration absorber 15. The vibration absorber 15 is in close contact with the structure 14.

The structure 14 shown in FIG. 6 is made of a metal such as iron or aluminum, and is formed in a hollow shaft shape.

The ceramic material is obtained by heat-curing a non-metallic inorganic material, and includes cement. The vibration absorber 15 may be integrally formed by press-fitting a cylindrical shape into the hollow portion 14a of the structure 14, or may be filled in the hollow portion 14a in a granular or fluid state, The hollow portion 14a may be formed into a shape that matches the hollow portion 14a.

In the present embodiment, a hydraulic composition (trade name: Zima, manufactured by Sumitomo Cement Co., Ltd.) mainly composed of hydraulic powder and non-hydraulic powder is pressure-filled into the hollow portion 14a of the structure 14. By hydrothermally synthesizing this, the vibration absorber 15 made of a ceramic material is integrated with the structure 14. Here, the hydraulic powder means a powder that is hardened by water, such as calcium silicate compound powder, calcium aluminate compound powder, calcium fluoroaluminate compound powder, Calcium sulfa aluminate compound powder, calcium aluminoferrite compound powder, calcium phosphate compound powder, semi-water or anhydrous gypsum powder, self-hardening quick lime powder, two or more kinds of these powders A mixed powder can be exemplified, and a representative example thereof is a cement such as Portland cement.

[0034] Further, the non-hydraulic powder means a powder that does not harden even when in contact with water. However, it also includes powders that elute in an alkaline or acidic state or in a high-pressure steam atmosphere and react with other already-eluting components to form products. By adding such a non-hydraulic powder, it becomes possible to increase the filling rate at the time of molding of the molded body and to decrease the porosity of the molded body to be obtained, thereby improving the dimensional stability of the molded body. be able to. Representative examples of non-hydraulic powders include calcium hydroxide powder, dihydrate gypsum powder, calcium carbonate powder, slag powder, fly ash powder, silica stone powder, clay powder, silica fume powder, and the like. .

[0035] The blending amount of the non-hydraulic powder is 10 to 50% by mass, preferably 25 to 35% by mass, based on the composition ratio of the mixed powder composed of the hydraulic powder and the non-hydraulic powder. If the blending amount is less than 10% by mass, the filling rate will be low, and if it exceeds 50% by mass, the strength and filling rate will be low. For this reason, it is desirable to adjust the blending amount of the non-hydraulic powder so that the filling rate does not become too low.

[0036] As a specific process for integrating the structure 14 and the vibration absorber 15, first, a hydraulic powder such as Portland cement, a non-hydraulic powder such as silica fume, and other additives. Molded into a mixed powder consisting of a product containing 30 parts by mass or less of water or less than the theoretical amount of hydration with respect to 100 parts by mass of a mixed powder of hydraulic powder and non-hydraulic powder. Adjust the mixture. For mixing, it is preferable to use a mixing method or a mixing machine that can apply a strong shearing force to the molding mixture.

[0037] Next, the molding mixture thus obtained is pressure-filled into the hollow portion 14a of the structure 14, and when the filling is completed, it is cured for curing. Curing is performed at room temperature or at high temperature and pressure, and the curing time varies depending on the curing temperature. As described above, the hollow portion 14a of the structure 14 can be filled with the vibration absorber having a ceramic material force without any gap.

[0038] The ceramic material filled in the hollow portion 14a can freely adjust the porosity and hardness by appropriately changing the blending amount of the non-hydraulic powder and the applied pressure at the time of filling. A damping performance corresponding to the vibration of the frame 8 can be imparted to the damping module 13.

When the frame 8 vibrates, the vibration of the frame 8 is transmitted to the attenuation module 13 attached to the frame 8. The structure 14 of the damping module 13 includes a vibration absorber with high damping Since 15 is in close contact, the vibration absorber 15 converts the vibration energy of the damping module 13 into heat energy, and exhibits a vibration damping effect. As a result, the vibration of the frame 8 is damped by the damping module 13.

The free vibration of the frame 8 becomes a wide variety of vibrations that vary depending on the structure of the frame 8 itself, the mass of the moving body, the acceleration, and the like. If modularity of the damping member causes the frame 8 to vibrate in a certain vibration mode, it may be effective for damping. If not, install a further damping module 13. Such adjustment is possible.

FIG. 7 shows another example of the attenuation module. In the damping module 17 of this example, a vibration absorber 19 is wound around an axial structure 18. As with the damping module 13 described above, the vibration absorber 19 is made of a hydraulic composition (trade name: Zima, manufactured by Sumitomo Cement) mainly composed of hydraulic powder and non-hydraulic powder around the structure 18. It is integrated with the structure 18 by winding and hydrothermal synthesis. If the structure 18 and the vibration absorber 19 are in close contact with each other, the vibration absorber 19 may be wound around the structure 18 as shown in FIG.

[0042] FIG. 8 shows still another example of the attenuation module. The damping module 20 in this example is formed in a block shape, and is formed by connecting several sections 23 at the intersection of the frame 8 frame. The structure 22 is filled with a vibration absorber 21, and the vibration absorber 21 is in close contact with the structural steel 23.

[0043] FIG. 9 shows yet another example of an attenuation module. The damping module 24 in this example also serves as a structural material for frame 8. The aluminum extruded material as the structure 25 is provided with a hollow portion 25a, and the vibration absorber is filled in the hollow portion 25a.

[0044] FIG. 10 shows a motion guide device 9 incorporated in a machine. The motion guide device 9 includes a rail 12 as a track member extending linearly, and a block 10 as a moving member that is movably assembled to the rail 12 via a number of rolling elements. When the moving object moves in a curved line, the rail extends in a curved line.

[0045] On the left and right side surfaces of the rail 12, a plurality of rolling element rolling portions 12a extending along the longitudinal direction are formed. The block 10 includes a central portion 10a that faces the upper surface of the rail 12, and side wall portions 10b that hang downward from the left and right sides of the central portion 10a and face the left and right side surfaces of the rail 12. . A plurality of rolling element rolling portions 29 (see FIG. 11) facing the rolling element rolling portions 12a of the rail 12 are formed in the central portion 10a and the side wall portion 10b of the block 10. Further, the block 10 is formed with a no-load return passage 30 extending in parallel with the rolling element rolling part 29. The block 10 has side lids 31 at both ends in the traveling direction, and a U-shaped direction change path 32 that connects the rolling element rolling part 29 and the no-load return path 30 is formed in the side cover 31. . A circuit-like rolling element circulation path is formed by the linear rolling element rolling part 29, the no-load return path 30 parallel to the rolling element rolling part 29, and the U-shaped direction changing path 32.

[0046] A plurality of balls 28 are arranged in the rolling element circulation path. In order to prevent contact between the balls 28, a spacer 33 may be interposed between the balls.

As shown in FIG. 11, the ball 28 rolled to one end of the rolling element rolling part 29 of the block 10 changes direction via a U-shaped direction change path 32 provided in the side lid 31. After that, it enters an unloaded return passage 30 extending in parallel with the rolling element rolling part 29. The ball 28 that has passed through the no-load return passage 30 passes through the direction change passage 32 of the opposite side lid 31 and then enters the rolling element rolling section 29 again.

FIG. 12 and FIG. 13 show an actuator according to an embodiment of the present invention. 12 shows a perspective view of the actuator, and FIG. 13 shows a cross-sectional view. This actuator uses a linear motor 40 as a drive source and moves the table 35 at a high acceleration. The actuator is a compact assembly of a guide mechanism and a drive mechanism. It is used on the top of the frame 8 shown in Fig. 5 and used as each axis of the robot.

[0049] The base 36 is made of an extruded aluminum material, and has a bottom portion 36a and a side wall 36b, and is elongated. A hollow portion 36 c is formed inside the base 36. The hollow portion 36c is filled with the vibration absorber 37. The rail 12 of the motion guide device 9 is attached to the upper surface of the side wall 36b of the base 36. A block 10 is slidably mounted on the rail 12. Since the structure of the motion guide device 9 is the same as that shown in FIG. 10, the same reference numerals are given and the description thereof is omitted.

[0050] The table 35 is driven by a linear motor 40. The linear motor 40 has a stator 38 and a secondary conductor 39. The stator 38 is a stator core equipped with a two-phase or three-phase primary winding, and generates a moving magnetic field when excited. Secondary conductor 39 is a rotary motor It corresponds to a rotor, and sheet-like conductors such as steel plates and copper plates are used.

[0051] When the table 35 is moved at a high acceleration by the linear motor 40, the base 36 vibrates freely due to the inertia of the moving object. Since the vibration absorber 37 is filled in the hollow portion of the base 36, the vibration absorber 37 converts the vibration energy into heat energy to attenuate the vibration of the base 36. Therefore, it is possible to prevent the fretting collision phenomenon from occurring in the motion guide device 9 even if the base 36 vibrates freely.

Note that the present invention is not limited to the above-described embodiment, and can be embodied in other embodiments without departing from the scope of the present invention. For example, the use of motion guidance device built-in machines is not limited to semiconductors and liquid crystal display devices. In addition, a ball spline mechanism can be used for the motion guide device, and a roller can be used for the rolling element instead of the ball.

[0053] Based on Japanese Patent Application 2005-096688 filed on Mar. 30, 2005. This content [all included here.

Claims

The scope of the claims

[1] A raceway member that extends linearly or in a curved line and forms a rolling element rolling part along the longitudinal direction, and a rolling element rolling part that faces the rolling element rolling part are formed. A motion guide device comprising: a moving member slidably assembled along the track member; and a plurality of rolling elements interposed between the track member and a rolling element rolling portion of the moving member so as to allow rolling motion. When,

A frame to which either the track member or the moving member of the motion guide device is fixed;

A motion guide apparatus-embedded machine comprising: a damping module attached to the frame or constituting at least a part of the frame and dampening free vibration of the frame.

2. The motion guide according to claim 1, wherein the damping module includes a metal structure having a hollow portion and a vibration absorber made of a ceramic material filled in the hollow portion. Equipment embedded machine.

[3] The motion guide device according to claim 1, wherein the damping module includes a metal shaft-like structure and a vibration absorber made of a ceramic material wound around the structure. Embedded machine.

[4] A raceway member that extends linearly or in a curved line and forms a rolling element rolling part along the longitudinal direction, and a rolling element rolling part that faces the rolling element rolling part are formed, A motion guide device comprising: a moving member slidably assembled along the track member; and a plurality of rolling elements interposed between the track member and a rolling element rolling portion of the moving member so as to allow rolling motion. When,

Either one of the track member or the moving member of the motion guide device is fixed, and a base having a hollow portion;

A drive source for moving either the track member or the moving member with respect to the base;

An actuator comprising: a vibration absorber that fills the hollow portion of the base and attenuates the free vibration of the base.

5. The actuator according to claim 4, wherein the base is made of metal and the vibration absorber is made of a ceramic material.

[6] A raceway member that extends linearly or in a curved line and forms a rolling element rolling part along the longitudinal direction, and a rolling element rolling part that faces the rolling element rolling part are formed, A motion guide device comprising: a moving member slidably assembled along the track member; and a plurality of rolling elements interposed between the track member and a rolling element rolling portion of the moving member so as to allow rolling motion. A damping module attached to a motion guide device built-in machine comprising: a frame on which either the track member or the moving member of the motion guide device is fixed,

The damping module for a machine incorporating a motion guide device, wherein the damping module is attached to the frame to dampen free vibration of the frame.