KR101789673B1 - A vibration decreasing apparatus for multi-articulated robot and a method for decreasing vibration - Google Patents

Abstract

According to an embodiment of the present invention, provided are an apparatus to reduce vibration of a robot processing load which is directly installed in a processing apparatus to perform processing in a multi-joint robot, removing dust using a flexible guide mechanism; and to a method of reducing vibration using the same. According to the embodiment of the present invention, the apparatus to reduce vibration of the robot processing load comprises: a flexible guide unit including a first moving member having a hollow portion into which a processing driving unit is inserted to be in contact therewith, linearly reciprocating in one axial direction, a first guide member connected to the first moving member to guide the first moving member, a second moving member spaced apart from an outer circumference of the first moving member to be formed in a shape of surrounding the same, connected to the first guide member, and linearly reciprocating in the other axial direction, a second guide member connected to the second moving member to guide the second moving member, and a fixed member connected to the second guide member and fixated and installed to a processing apparatus; a first driving unit coupled to the second moving member moving the first moving member; and a second driving unit coupled to the fixed member moving the second moving member.

Description

Technical Field [0001] The present invention relates to a robot processing load vibration reduction device and a vibration reduction method using the robot vibration reduction load device.

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a machining load vibration reducing apparatus and a vibration reducing method using the same, and more particularly, And a vibration reduction method using the vibration reduction apparatus.

Recently, in the industrial field, articulated robots that automatically perform machining due to factory automation are used variously, and their usage is continuously increasing.

In the case of a robot arm driven at a high speed, such an articulated robot performs processing while driving at a high speed, and not only the amount of elastic deformation of the robot arm increases as the motion acceleration (deceleration) increases, Residual vibration is generated in the robot arm and the machining part of the end when it is stopped. In addition, due to the characteristics of the articulated robot having weak stiffness, vibration can be generated to a greater extent during processing such as machining.

In the case where vibration occurs in the robot as described above, the entire processing accuracy of the robot is lowered and productivity of the manufacturing work using the robot may be lowered. Also, vibration generated during driving or processing of the robot may negatively affect the durability of the robot.

In Korean Patent No. 10-1658063 (entitled "Vibration Abatement System for Multi-Joint Robot"), the balance balance of the articulated robot is prevented from concentrating toward the front side, The subblocks are connected to the ends of the fixed base and the mounting brackets at the rear portion and the mounting brackets of the articulated robots are fixed to the equipment and the vibrations generated in the equipment are efficiently reduced to prolong the parts life of the articulated robot In order to enhance durability, a plurality of anti-vibration pads are formed of a double outer appearance upper and lower steel caps. In order to absorb the vibration generated in the facility, a neoprene which is a synthetic rubber is built in each of the inside of the dual appearance upper and lower steel caps, The lower steel cap is bolted to the mounting bracket through a bolt hole, The steel cap is fixed to the fixed base through a bolt shaft installed at the center. The number and specifications of the vibration pads are determined by the weight of the joint articulated robot, the weight of the unit mounted on the articulated robot, And a maximum load applied to the lower portion of the main body of the articulated robot based on a sum of the peripheral weights.

Korean Patent No. 10-1658063

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and it is an object of the present invention to directly perform a vibration suppression by providing a vibration suppression device for the construction of the end of the articulated robot.

It is an object of the present invention to perform appropriate vibration damping for each of starting and ending of processing of a robot and making the direction of force for damping constant, thereby minimizing vibration damping errors.

It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory and are not intended to limit the invention to the precise form disclosed. There will be.

According to an aspect of the present invention, there is provided a multi-joint robot including a machining tool including a machining tool and a machining drive for driving the machining tool, the machining tool including a hollow portion A first guide member that is connected to the first movement member and guides the first movement member, and a second guide member that is spaced apart from the outer circumference of the first movement member to surround the first movement member, A second guide member connected to the first guide member and linearly reciprocating in the other axial direction, a second guide member connected to the second movement member to guide the second movement member, And a fixing member connected to the processing device and fixed to the processing device; A first driving unit coupled to the second motion member and moving the first motion member; And a second driving unit coupled to the fixing member and moving the second motion member.

In an embodiment of the present invention, the first driving unit includes a first driving unit for transmitting a force to one side of the first moving member, and a second driving unit for transmitting a force to a surface corresponding to one side of the first moving member And a 1-2 driving unit.

In an embodiment of the present invention, the 1-1 driving unit may be any one selected from a voice coil motor, a piezoelectric element, and a linear motor.

In an embodiment of the present invention, the 1-2 driving part may be a fluid damper.

In the embodiment of the present invention, the second driving unit may include a second-1 driving unit that transmits a force to one side of the second moving member, and a second driving unit that transmits a force to a surface corresponding to one side of the second moving member And a second-2 driving unit.

In an embodiment of the present invention, the 2-1 drive unit may be any one selected from a voice coil motor, a piezoelectric element, and a linear motor.

In an embodiment of the present invention, the second -2 driving unit may be a fluid damper.

In an embodiment of the present invention, the first guide member may be in the form of a beam, a plate or a pipe.

The first guide member may be formed of one or more metals selected from the group consisting of Fe, Al, Mg, and Cu.

In an embodiment of the present invention, the second guide member may be in the form of a beam, a plate or a pipe.

The second guide member may be formed of one or more metals selected from the group consisting of Fe, Al, Mg, and Cu.

According to an aspect of the present invention, there is provided a multi-joint robot including a machining device including a machining tool and a machining drive section for driving the machining tool,

A first guide member having an elastic force and being connected to the first movement member and guiding the first movement member; a second guide member connected to the first movement member and guiding the first movement member; A second moving member which is formed in a shape to surround and surround the outer circumference of the first moving member and connected to the first guide member and linearly reciprocates in the other axial direction, A second guide member for guiding the second guide member, and a fixing member connected to and fixed to the second guide member; A first driving unit coupled to the second motion member and moving the first motion member; A second driving unit coupled to the fixing member and moving the second motion member; A sensor unit for sensing a vibration of the processing drive unit; And a control unit for generating a first control signal transmitted to the first driving unit and the second driving unit at the start of the driving of the processing drive unit or a second control signal transmitted to the first driving unit and the second driving unit during driving of the processing unit, .

In an embodiment of the present invention, the first control signal may be generated by analyzing vibration information stored in advance in the controller.

In the embodiment of the present invention, the second control signal may be generated by analyzing the vibration sensed by the sensor unit.

The robot having the robot processing load vibration reduction device of the present invention can be manufactured.

According to another aspect of the present invention, there is provided a method of manufacturing a semiconductor device, the method comprising: i) ii) transmitting, by the control unit, the first control signal to the first driving unit and the second driving unit by previously stored vibration information; iii) reducing the vibration of the machining drive unit by causing the first motion member to linearly reciprocate in one axial direction and the second motion member to reciprocate linearly in the other axial direction; iv) sensing vibration of the machining drive part in the sensor part; v) transferring the second control signal to the first driving unit and the second driving unit, the control unit receiving the real-time vibration information of the processing driving unit; vi) reducing the vibration of the machining drive unit by the first motion member performing a linear reciprocating motion in one axial direction and the second motion member performing a linear reciprocating motion in the other axial direction; And vii) repeating steps iv) through vi).

The effect of the present invention with the above-described structure is that the vibration reduction device is directly installed in the machining device that performs machining in the articulated robot and the vibration is directly applied to the machining device, so that the machining error of the robot can be minimized will be.

Further, the effect of the present invention is to perform vibration suppression by using a flexible guide mechanism or the like, so that it is possible to cope with high frequency vibrations that occur during the processing work of the robot.

The effect of the present invention is that vibration damping suitable for each of starting and processing of the robot is controlled by the control of the control unit and the direction of the force for vibration damping is constant by the flexible guide mechanism, The error can be minimized.

It should be understood that the effects of the present invention are not limited to the above effects and include all effects that can be deduced from the detailed description of the present invention or the configuration of the invention described in the claims.

1 is a schematic diagram of a robot according to an embodiment of the present invention.
2 is a perspective view of a processing apparatus according to an embodiment of the present invention.
3 is a side view of a machining apparatus according to an embodiment of the present invention.
4 is a perspective view of a flexible guide according to an embodiment of the present invention.
5 is a plan view of a flexible guide according to an embodiment of the present invention.
6 is a state view of a first guide member of a flexible guide according to an embodiment of the present invention in a linear motion.
7 is a state view of a second guide member in a case where the second guide member is linearly moved according to an embodiment of the present invention.
8 is a state view of a first guide member and a second guide member of a flexible guide according to an embodiment of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described with reference to the accompanying drawings. The present invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. In order to clearly illustrate the present invention, parts not related to the description are omitted, and similar parts are denoted by like reference characters throughout the specification.

Throughout the specification, when a part is referred to as being "connected" (connected, connected, coupled) with another part, it is not only the case where it is "directly connected" "Is included. Also, when an element is referred to as "comprising ", it means that it can include other elements, not excluding other elements unless specifically stated otherwise.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The singular expressions include plural expressions unless the context clearly dictates otherwise. In this specification, the terms "comprises" or "having" and the like refer to the presence of stated features, integers, steps, operations, elements, components, or combinations thereof, But do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, or combinations thereof.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

1 is a schematic diagram of a robot 1 according to an embodiment of the present invention. 2 is a perspective view of a machining apparatus 10 according to an embodiment of the present invention, and Fig. 3 is a side view of a machining apparatus 10 according to an embodiment of the present invention. 4 is a perspective view of a flexible guide unit 100 according to an embodiment of the present invention, and FIG. 5 is a plan view of a flexible guide unit 100 according to an embodiment of the present invention.

As shown in Figs. 1 to 5, in the articulated robot 1 provided with the machining apparatus 10 including the machining tool 12 and the machining tool 12 for driving the machining tool 12, The robot processing load vibration reducing apparatus according to the invention comprises a first motion member 121 having a hollow portion 140 to which a processing drive unit 11 is inserted and brought into contact and linearly reciprocating in one axial direction, A first guide member 111 connected to the first guide member 111 for guiding the first motion member 121 and a second guide member 111 formed to surround the first movement member 121 so as to surround the outer periphery of the first movement member 121, A second guide member 112 connected to the second motion member 122 to guide the second motion member 122, and a second guide member 112 connected to the second motion member 122, (100) having a fixing member (130) connected to the machining apparatus (112) and fixed to the machining apparatus (10); A first driving unit 210 coupled to the second motion member 122 and moving the first motion member 121; And a second driving unit 220 that is coupled to the fixing member 130 and moves the second motion member 122.

As shown in FIG. 2, the machining apparatus 10 may include a fixing portion 13 for fixing and fixing the fixing member 130 of the flexible guide portion 100. The fixing unit 130 is fixedly mounted on the part of the processing device 10 in the embodiment of the present invention. However, the fixing unit 130 is not limited to this, The flexible guide unit 100 may be installed such that the other side of the fixing unit 13 is connected to a part of the processing apparatus 10 and connected to the fixing member 130 of the flexible guide unit 100. [ One side portion of the fixing portion 13 is connected to the fixing member 130 of the flexible guide portion 100 and the other side portion of the fixing portion 13 is connected to a part of the robot arm combined with the processing device 10, A portion 100 may be provided.

The flexible guide unit 100 may operate with two degrees of freedom.

When the machining tool 12 is operated by the machining drive section 11 to perform machining on the workpiece by the machining tool 12, vibration is generated in the machining apparatus 10 provided on the multi-joint robot arm of weak stiffness And the vibration of the machining apparatus 10 affects the machining tool 12, so that the machining quality can be lowered. This can be a major cause of increased machining error in precision machining.

In order to prevent the above-described phenomenon, the robot processing load vibration reduction apparatus of the present invention can be coupled to the processing drive unit 11 connected to the processing tool 12. [ It is possible to reduce the vibrations of the processing tool 11 and the processing tool 11 which are affected not only by the vibration of the processing drive unit 11 itself but also by the motion or vibration of the entire articulated robot by the robot processing load vibration reduction apparatus of the present invention, The machining error can be minimized and the precise machining can be realized by the tool 12 when the workpiece is machined.

FIG. 6 is a view illustrating a state in which the first motion member 121 of the flexible guide unit 100 according to the embodiment of the present invention is linearly moved. FIG. 7 is a sectional view of the flexible guide unit 100 Is a linear motion of the second moving member 122 of FIG. 8 is a state view showing a case where the first moving member 121 and the second moving member 122 of the flexible guide unit 100 according to the embodiment of the present invention linearly move.

5 to 8, in one embodiment, the first motion member 121 can perform a linear reciprocating motion without error in the y-axis direction, and the second motion member 122 can perform a linear reciprocating motion in the x- It is possible to perform a linear reciprocating motion without error.

Hereinafter, the vibration suppression transmission path will be described.

Here, the vibration damping vibration may be a vibration force generated in the first drive unit 210 or the second drive unit 220 to reduce or remove the vibration transmitted from the processing drive unit 11 to the first motion member 121 The vibration damping vibration generated by the first drive unit 210 may be referred to as a first vibration damping vibration and the vibration damping vibration generated by the second drive unit 220 may be referred to as a second vibration damping vibration)

First, the second drive unit 220 generates the second vibration damping vibration, and the second vibration damping vibration can be transmitted to the second motion member 122.

Next, the second moving member 122 can perform a linear reciprocating motion in the x-axis direction without error.

Then, the first driving unit 210 generates the first vibration, and the first vibration is transmitted to the first motion member 121.

Thereafter, the first motion member 121 can perform a linear reciprocating motion in the y-axis direction without error.

The second vibration damping vibration transmitted from the second motion member 122 to the first guide member 111 and the first motion member 121 may be transmitted to the processing drive unit 11.

In addition, the first vibration can be transmitted from the first motion member 121 to the machining drive section 11. [

That is, the first drive unit 210 provides the first vibration damping vibration corresponding to the vibration of the machining drive unit 11 in the y axis direction to the machining drive unit 11, and the second drive unit 220 provides the first damping vibration in the x axis direction So that the second vibration damping vibration corresponding to the vibration of the machining drive section 11 can be provided to the machining drive section 11. [

The first motion member 121 and the second motion member 122 move as a transmission medium of the respective vibration suppression vibrations and the first guide member 111 having elasticity is moved in a direction in which the first motion member 121 is free from errors the second guide member 112 having elasticity can guide the second motion member 122 to perform a linear reciprocating motion in the x-axis direction without any error.

Here, since the first motion member 121 directly contacts the machining drive unit 11, it is possible to provide the first machining drive unit 11 with the first vibration. Since the second motion member 122 does not directly contact the processing drive unit 11, the second vibration damping vibration is generated by sequentially moving the second motion member 122, the first guide member 111 and the first motion member 121 To the processing drive unit 11 via the processing unit.

Since vibration is performed in order to minimize the position change of the machining drive unit 11 connected to the machining tool 12 in real time as described above, 121). This will be described later in detail.

6 to 8, the first driving unit 210 includes a first driving unit 211 for transmitting a force to one side of the first moving member 121, And a first-second driving unit 212 for transmitting a force to a surface corresponding to one side.

Since the first guide member 111 has an elastic force, the first motion member 121 can perform a linear reciprocating motion in one direction even if only the first driving member 211 is provided, If the driving unit 212 is provided, more precise vibration control can be performed.

The 1-1 drive unit 211 may be any one selected from a voice coil motor, a piezoelectric element, and a linear motor.

The 1-2 driving part 212 may be a fluid damper.

Here, the 1-2 drive unit 212 may be an MR damper (Magneto-Rheological damper) among the fluid dampers.

When the first-second driving unit 212 is an MR damper, a minute force can be generated using an electromagnetic force, so that it can be suitable for generating vibration of a minute size.

When the first-second driving unit 212 performs a function of providing a reaction force like a spring without generating its own force, the first-second driving unit 211 assists the elastic force of the first guide member 111, The linear motion of the first motion member 121 moving by the first motion member 121 can be increased.

6 to 8, the second driving unit 220 includes a second-1 driving unit 221 and a second moving unit 122 for transmitting a force to one side of the second moving member 122 And a second-second driving unit 222 for transmitting a force to a surface corresponding to one side.

Since the second guide member 112 has an elastic force, the second motion member 122 can perform the linear reciprocating motion in one direction even if only the second-first drive unit 221 is provided, If the driving unit 222 is provided, more precise vibration control can be performed.

The second drive unit 221 may be any one selected from a voice coil motor, a piezoelectric element, and a linear motor.

The second-second driving unit 222 may be a fluid damper.

Here, the second-second driving unit 222 may be an MR damper (Magneto-Rheological damper) among the fluid dampers.

When the second-second driving unit 222 is an MR damper, a fine force can be generated by using an electromagnetic force, so that the second-second driving unit 222 may be suitable for generating a minute-sized vibration.

When the second-second driving unit 222 performs a function of providing a reaction force such as a spring without generating its own force, the second-first driving unit 221 assists the elastic force of the second guide member 112, The second reciprocating motion of the second moving member 122 can be increased.

The first guide member 111 may be in the form of a beam, plate or pipe. The second guide member 112 may be in the form of a beam, a plate, or a pipe.

When the first guide member 111 or the second guide member 112 is in the shape of a beam, the cross section perpendicular to the longitudinal direction of the first guide member 111 or the second guide member 112 is an H- , I-shaped, or the like.

When the first guide member 111 or the second guide member 112 has a shape of a pipe, the cross section perpendicular to the longitudinal direction of the first guide member 111 or the second guide member 112 may be circular or polygonal have.

The first guide member 111 or the second guide member 112 may be partially wavy or repeatedly bent. When the first guide member 111 or the second guide member 112 is formed in such a shape, the vibration transmission performance can be improved.

The first guide member 111 and the second guide member 112 may be formed of a material having elasticity.

The first guide member 111 may be formed of at least one metal selected from the group consisting of Fe, Al, Mg, and Cu. The second guide member 112 may be formed of one or more metals selected from the group consisting of iron (Fe), aluminum (Al), magnesium (Mg), and copper (Cu)

The first guide member 111 or the second guide member 112 may be formed of a polymer material such as plastic.

The first guide member 111 or the second guide member 112 is formed of a metal or a polymeric material as described above. However, the present invention is not limited to this, but may be formed of another metal or ceramic material .

The first motion member 121 may be formed of a metal or a polymer material. The second motion member 122 may be formed of a metal or a polymer material.

Hereinafter, another embodiment of the robot processing load vibration reduction device of the present invention will be described.

The robot handling load vibration reducing apparatus according to the present invention is characterized in that in the articulated robot (1) equipped with the processing apparatus (10) including the processing tool (12) and the processing drive unit (11) A first motion member (121) having a hollow portion (140) to which the processing drive portion (11) is pulled and in contact and reciprocating linearly in one axial direction, a first motion member (121) having an elastic force and connected to the first motion member A first guide member 111 for guiding the member 121, a first guide member 111 formed to surround the outer circumference of the first motion member 121 and to surround the first guide member 111 and connected to the first guide member 111, A second guide member 112 connected to the second motion member 122 to guide the second motion member 122 and a second guide member 112 connected to the second guide member 112, A flexible guide portion (100) having a fixing member (130) installed to be installed; A first driving unit 210 coupled to the second motion member 122 and moving the first motion member 121; A second driving unit 220 coupled with the fixing member 130 and moving the second motion member 122; A sensor unit 300 for sensing vibration of the processing drive unit 11; The first driving unit 210 and the second driving unit 220 may be operated during the driving of the processing driving unit 11 or the first control signal transmitted to the first driving unit 210 and the second driving unit 220 at the start of driving the processing drive unit 11. [ And a control unit 220 for generating a second control signal to be transmitted to the second control unit 220.

(The control unit is not shown.)

The first control signal may be generated by analyzing vibration information stored in advance in the controller.

The second control signal may be generated by analyzing the vibration sensed by the sensor unit 300.

The sensor unit 300 may include a vibration sensor 320 and a force sensor 310. It may also include a displacement sensor (gap sensor) and a velocity sensor.

The vibration sensor 320 can sense the position error generated in the first motion member 121 in real time, and the sensed information can be transmitted to the control unit by wire or wirelessly. However, in the case where the sensor unit 300 and the control unit are connected by wire, the accuracy of vibration suppression can be improved by increasing the signal transmission speed.

As described above, since vibration is performed in order to minimize the position change of the first motion member 121 that engages with the processing drive unit 11 in real time as described above, as shown in FIGS. 4 to 8, the vibration sensor 320 May be provided on a part of the first motion member 121. [

The first control signal may include a first control signal to be transmitted to the first driver 210 and a second control signal to be transmitted to the second driver 220. The second control signal may include a second control signal transmitted to the first driving unit 210 and a second control signal transmitted to the second driving unit 220.

The control unit includes a processor for processing data and a memory for storing data and is configured to analyze the vibration change (position change) of the first motion member 121 coupled with the processing drive unit 11 by time, Can be stored in the memory.

When the processing drive section 11 is driven to perform a predetermined operation in the stopped state, the drive for the operation is repeated and can be performed in the same pattern.

Therefore, when the machining drive section 11 starts to drive, the magnitude and direction of the average vibration at that point in time can be predicted.

When the machining tool 12 starts machining, the control unit supplies a first-first control signal and a first-second control signal capable of initially performing anticipated vibration damping to the first drive unit 210 and the second drive unit The first drive unit 210 and the second drive unit 220 can transmit the vibration to the machining drive unit 11 which can eliminate the occurrence of the vibration of the machining drive unit 11 predicted at the start of the drive of the machining drive unit 11. [ It can generate force.

The control unit can transmit the vibration signal sensed in real time by the sensor unit 300 to the control unit when the processing drive unit 11 is in operation or in a stopped state, The second drive control signal or the second drive control signal to the second drive unit 210 and the second drive unit 220 so as to eliminate or reduce the vibration of the processing drive unit 11. [

A robot arm according to the present invention comprises a robot arm and a plurality of jointing robots each having a processing tool (12) for performing machining and a machining device (10) including a machining drive part (11) for driving the machining tool Can be manufactured.

Here, the machining tool 12 and the machining drive section 11 may be included in one or more equipment selected from a drilling machine, a water jet machine, a laser processing machine, a welding machine, and a cutting machine. Further, the present invention is not limited to the above-described apparatuses, but may be various processing apparatuses.

Hereinafter, a vibration reduction method using the robot processing load vibration reduction device of the present invention will be described.

In the first step, the driving of the processing drive section 11 can be started.

In the second step, the control unit may transmit the first control signal to the first driving unit 210 and the second driving unit 220 according to the previously stored vibration information.

At this time, the 1-1 control signal may be transmitted to the first driver 210 and the 1-2 control signal may be transmitted to the second driver 220.

In the third step, the first motion member 121 linearly reciprocates in one axial direction, and the second motion member 122 linearly reciprocates in the other axial direction, thereby reducing the vibration of the processing drive unit 11 .

Here, the first motion member 121 may perform a linear reciprocating motion in the y-axis direction, and the second motion member 122 may perform a linear reciprocating motion in the x-axis direction.

In the fourth step, the sensor unit 300 can sense the vibration of the processing drive unit 11. [

The controller receiving the real-time vibration information of the processing drive unit 11 may transmit the second control signal to the first driving unit 210 and the second driving unit 220 in a fifth step.

In this case, the 2-1 control signal may be transmitted to the first driving unit 210, and the 2-2 control signal may be transmitted to the second driving unit 220.

In the sixth stage, the first motion member 121 performs a linear reciprocating motion in one axial direction, and the second motion member 122 linearly reciprocates in the other axial direction, thereby reducing the vibration of the processing drive unit 11 .

Here, the first motion member 121 may perform a linear reciprocating motion in the y-axis direction, and the second motion member 122 may perform a linear reciprocating motion in the x-axis direction.

When the processing drive unit 11 is continuously driven, the above-described fourth to sixth steps may be repeated.

It will be understood by those skilled in the art that the foregoing description of the present invention is for illustrative purposes only and that those of ordinary skill in the art can readily understand that various changes and modifications may be made without departing from the spirit or essential characteristics of the present invention. will be. It is therefore to be understood that the above-described embodiments are illustrative in all aspects and not restrictive. For example, each component described as a single entity may be distributed and implemented, and components described as being distributed may also be implemented in a combined form.

The scope of the present invention is defined by the appended claims, and all changes or modifications derived from the meaning and scope of the claims and their equivalents should be construed as being included within the scope of the present invention.

1: Robot
10: machining apparatus 11: machining drive section
12: Processing tool 13:
100: flexible guide portion 111: first guide member
112: second guide member 121: first movement member
122: second movement member 130: fixing member
140: hollow part 210: first driving part
211: first 1-1 driving part 212: 1-2 driving part
220: second driving part 221: second-1 driving part
222: 2nd-2nd driving unit 300:
310: force sensor 320: vibration sensor

Claims (16)

A multi-joint robot in which a machining device including a machining tool and a machining drive section for driving the machining tool is provided,
A first moving member having a hollow portion in which the processing drive portion is drawn in contact with and reciprocating linearly in one axial direction, a first guide member connected to the first moving member and guiding the first moving member, A second moving member connected to the first guide member and linearly reciprocating in the other axial direction, a second moving member connected to the first moving member and guiding the second moving member, A second guide member, and a fixing member connected to the second guide member and fixed to the machining apparatus;
A first driving unit coupled to the second motion member and moving the first motion member; And
And a second driving unit coupled to the fixed member and moving the second motion member.
The method according to claim 1,
The first driving unit may include a first driving unit for transmitting a force to one side of the first moving member and a first driving unit for transmitting a force to a surface corresponding to one side of the first moving member Wherein the robot processing load vibration reduction device is a robot.
The method of claim 2,
Wherein the 1-1 driving unit is any one selected from a voice coil motor, a piezoelectric element, and a linear motor.
The method of claim 2,
And the second driving unit is a fluid damper.
The method according to claim 1,
The second driving unit includes a second driving unit for transmitting a force to one side of the second moving member and a second driving unit for transmitting a force to a surface corresponding to one side of the second moving member Wherein the robot processing load vibration reduction device is a robot.
The method of claim 5,
Wherein the second-1 drive unit is any one selected from a voice coil motor, a piezoelectric element, and a linear motor.
The method of claim 5,
And the second-2 driving unit is a fluid damper.
The method according to claim 1,
Wherein the first guide member is in the shape of a beam, a plate, or a pipe.
The method of claim 8,
Wherein the first guide member is formed of at least one metal selected from the group consisting of Fe, Al, Mg, and Cu.
The method according to claim 1,
Wherein the second guide member is in the shape of a beam, a plate, or a pipe.
The method of claim 10,
Wherein the second guide member is formed of at least one metal selected from the group consisting of Fe, Al, Mg, and Cu.
A multi-joint robot in which a machining device including a machining tool and a machining drive section for driving the machining tool is provided,
A first guide member having an elastic force and being connected to the first movement member and guiding the first movement member; a second guide member connected to the first movement member and guiding the first movement member; A second moving member which is formed in a shape to surround and surround the outer circumference of the first moving member and connected to the first guide member and linearly reciprocates in the other axial direction, A second guide member for guiding the second guide member, and a fixing member fixedly connected to the second guide member;
A first driving unit coupled to the second motion member and moving the first motion member;
A second driving unit coupled to the fixing member and moving the second motion member;
A sensor unit for sensing a vibration of the processing drive unit; And
A control unit for generating a first control signal transmitted to the first driving unit and the second driving unit at the start of driving of the processing drive unit or a second control signal transmitted to the first driving unit and the second driving unit during driving of the processing driving unit, And a control unit for controlling the operation of the robot.
The method of claim 12,
Wherein the first control signal is generated by analyzing vibration information previously stored in the control unit.
The method of claim 12,
Wherein the second control signal is generated by analyzing the vibration sensed by the sensor unit.
A robot comprising a robot processing load vibration reduction device manufactured by any one of claims 1 to 14.
The vibration reduction method using the robot processing load vibration reduction apparatus according to claim 12,
i) starting driving of the processing drive section;
ii) transmitting, by the control unit, the first control signal to the first driving unit and the second driving unit by previously stored vibration information;
iii) reducing the vibration of the machining drive unit by causing the first motion member to linearly reciprocate in one axial direction and the second motion member to reciprocate linearly in the other axial direction;
iv) sensing vibration of the machining drive part in the sensor part;
v) transferring the second control signal to the first driving unit and the second driving unit, the control unit receiving the real-time vibration information of the processing driving unit;
vi) reducing the vibration of the machining drive unit by the first motion member performing a linear reciprocating motion in one axial direction and the second motion member performing a linear reciprocating motion in the other axial direction; And
and vii) repeating the steps iv) to vi). < RTI ID = 0.0 > 11. < / RTI >

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