WO2006095590A1 - Filler for resin, resin base material containing same and electronic component substrate material - Google Patents

Filler for resin, resin base material containing same and electronic component substrate material Download PDF

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Publication number
WO2006095590A1
WO2006095590A1 PCT/JP2006/303599 JP2006303599W WO2006095590A1 WO 2006095590 A1 WO2006095590 A1 WO 2006095590A1 JP 2006303599 W JP2006303599 W JP 2006303599W WO 2006095590 A1 WO2006095590 A1 WO 2006095590A1
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WO
WIPO (PCT)
Prior art keywords
resin
filler
base material
compound
resin base
Prior art date
Application number
PCT/JP2006/303599
Other languages
French (fr)
Japanese (ja)
Inventor
Toshifumi Kawamura
Toru Imori
Original Assignee
Nippon Mining & Metals Co., Ltd.
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Publication date
Application filed by Nippon Mining & Metals Co., Ltd. filed Critical Nippon Mining & Metals Co., Ltd.
Priority to JP2007507048A priority Critical patent/JP5072094B2/en
Publication of WO2006095590A1 publication Critical patent/WO2006095590A1/en

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Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/18Pretreatment of the material to be coated
    • C23C18/20Pretreatment of the material to be coated of organic surfaces, e.g. resins
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L63/00Compositions of epoxy resins; Compositions of derivatives of epoxy resins
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/18Pretreatment of the material to be coated
    • C23C18/20Pretreatment of the material to be coated of organic surfaces, e.g. resins
    • C23C18/2006Pretreatment of the material to be coated of organic surfaces, e.g. resins by other methods than those of C23C18/22 - C23C18/30
    • C23C18/2046Pretreatment of the material to be coated of organic surfaces, e.g. resins by other methods than those of C23C18/22 - C23C18/30 by chemical pretreatment
    • C23C18/2053Pretreatment of the material to be coated of organic surfaces, e.g. resins by other methods than those of C23C18/22 - C23C18/30 by chemical pretreatment only one step pretreatment
    • C23C18/2066Use of organic or inorganic compounds other than metals, e.g. activation, sensitisation with polymers
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0313Organic insulating material
    • H05K1/0353Organic insulating material consisting of two or more materials, e.g. two or more polymers, polymer + filler, + reinforcement
    • H05K1/0373Organic insulating material consisting of two or more materials, e.g. two or more polymers, polymer + filler, + reinforcement containing additives, e.g. fillers
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • H05K3/4644Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
    • H05K3/4661Adding a circuit layer by direct wet plating, e.g. electroless plating; insulating materials adapted therefor
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/02Fillers; Particles; Fibers; Reinforcement materials
    • H05K2201/0203Fillers and particles
    • H05K2201/0206Materials
    • H05K2201/0209Inorganic, non-metallic particles
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/02Fillers; Particles; Fibers; Reinforcement materials
    • H05K2201/0203Fillers and particles
    • H05K2201/0206Materials
    • H05K2201/0239Coupling agent for particles
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/18Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
    • H05K3/181Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating

Definitions

  • Resin filler resin base material containing the same, and electronic component base material
  • the present invention relates to a resin filler, a resin base material containing the same, and an electronic component base material.
  • Patent Document 2 or 2 Various proposals have already been made to meet such demands. Among them, what is proposed in Patent Document 2 or 2 is that a polyimide resin precursor solution containing a palladium compound is applied and dried on a polyimide resin substrate to form a polyimide resin precursor layer. After forming a plating base nucleus by irradiating ultraviolet rays in the presence of a hydrogen donor, a polyimide base metal layer is formed by an electroless plating process, and a surface plating layer is further formed or before the polyimide is formed. When the resin precursor layer is heated and imidized to form a polyimide resin layer. This is because the adhesive base nucleus is formed in the polyimide resin layer, and the anchoring effect improves the adhesion strength between the polyimide resin layer and the plating base metal layer.
  • Patent Document 1 Japanese Patent Laid-Open No. 2002-30216
  • Patent Document 2 Japanese Patent Laid-Open No. 2002-374055
  • the substrate material is limited to polyimide resin, and cannot be applied to a substrate for electronic parts in general. Further, the ultraviolet ray treatment is required for activating noradium, and further, high temperature heating is required for imido, so that the treatment process is complicated. [0005]
  • the present invention provides a technique that can be applied to a general resin base material as a substrate material and can more easily improve the adhesion strength between the base material and the metal layer. That is, an object of the present invention is to provide a general resin substrate useful as an electronic component substrate having improved adhesion strength with a plated metal layer.
  • the filler is a solution containing a noble metal compound that is an electroless plating catalyst and a solution containing a silane coupling agent that traps the noble metal, or a mixed solution thereof.
  • the surface of the resin base material can be made to appear on the surface of the resin base material, and the surface can be activated. It is possible to give an anchor effect to the deposited metal by attaching via the silane coupling agent, and to improve the adhesion strength between the metal layer and the resin substrate by electroless plating. As a result, the present invention has been achieved.
  • the present invention provides:
  • a resin filler that is surface-treated with a solution containing a silane coupling agent and a solution containing a noble metal compound, or a mixed solution thereof.
  • silane coupling agent is a silane coupling agent obtained by reacting an azole compound or an amine compound with an epoxy silane compound.
  • a solution containing a silane coupling agent and a solution containing a noble metal compound By blending the filler whose surface has been treated with each or a mixed solution thereof into the resin base material, the filler appears on the surface of the resin base material, and the resin base material is electrolessly electrolyzed.
  • the deposited metal can obtain an anchor effect through the silane coupling agent, and as a result, the adhesion strength between the resin layer of the resin base material and the metal layer due to electroless plating is improved. Can do.
  • the filler used in the present invention it is possible to use a filler that is generally blended with sallow.
  • inorganic fillers such as silica, alumina, glass fiber or organic fillers can be raised.
  • the filler preferably has an average particle size of 0.1 to 50 ⁇ m, more preferably 1 to 10 ⁇ m.
  • the silane coupling agent used in the present invention is preferably an azole compound or a silane coupling agent that traps a noble metal obtained by the reaction of an amine compound and an epoxy silane compound.
  • lower dialkylamines such as dimethylamine and jetamine are preferred.
  • the azole compound is a compound containing an azole group
  • preferred azole groups include imidazole, oxazole, thiazole, selenazole, pyrazole, isoxazole, isothiazole, triazole, oxadiazole, thiadiazole, tetrazole, oxatriazole, Examples include thiatriazole, bendazole, indazole, benzimidazole, and benzotriazole. Of these, an imidazole group is particularly preferable.
  • the silane coupling agent is a compound having a SIX X X group in addition to a noble metal ion-trapping group derived from the azole compound or an amine compound,
  • X means alkyl group, halogen or alkoxy group, and can be fixed to filler
  • X, X, and X may be the same or different.
  • R 3 and R 4 are hydrogen or an alkyl group having 1 to 3 carbon atoms, and n is an integer of 1 to 3).
  • the reaction between the azole compound and the epoxy group-containing silane compound can be performed under the conditions described in JP-A-6-256358. For example, at 80 to 200 ° C., 0.1 to 10 mol of an epoxy group-containing silane compound is added dropwise to 1 mol of an azole compound, and reacted for 5 minutes to 2 hours. In that case, an organic solvent such as chloroform, dioxane methanol, ethanol, or the like, which does not particularly require a solvent, may be used.
  • an organic solvent such as chloroform, dioxane methanol, ethanol, or the like, which does not particularly require a solvent, may be used.
  • silane coupling agent having a metal scavenging ability used in the present invention include y-aminopropyltrimethoxysilane, ⁇ -aminopropyltriethoxysilane, N-j8 (aminoethyl) ⁇ — Examples include aminopropyltrimethoxysilane, N-j8 (aminoethyl) ⁇ -aminopropyltriethoxysilane, and ⁇ -mercaptopropyltrimethoxysilane.
  • the particularly preferred U ⁇ silane coupling agent is imidazole silane, which is represented by the following (1), (2) and (3).
  • R 1 is hydrogen or an alkyl group having 120 carbon atoms
  • R 2 is hydrogen, a beer group or an alkyl group having 15 carbon atoms
  • R 3 R 4 is an alkyl group having 13 carbon atoms
  • n is 1 indicates 3.
  • R 1 is hydrogen or an alkyl group having 1 to 20 carbon atoms
  • R 2 is hydrogen, a bur group or an alkyl group having 1 to 5 carbon atoms
  • R 3 and R 4 are carbon atoms having 1 to 3 carbon atoms.
  • Alkyl group, n represents 1-3.
  • imidazole compound represented by the general formula (4) examples include imidazole, 2-alkylimidazole, 2,4-dialkylimidazole, and 4-bulimidazole.
  • imidazole; 2-alkylimidazole is particularly preferred as 2-methylimidazole, 2-ethylimidazole, 2-undecylimidazole, 2-heptadecylimidazole; and 2,4 dialkylimidazole.
  • the 3-glycidoxypropyl trisilane compound represented by the general formula (5) includes 3-glycidoxypropyltrialkoxysilane, 3-glycidoxypropyl dialkoxyalkylsilane, 3 —Glycidoxypropylalkoxydialkylsilanes.
  • 3-glycidoxypropyltrialkoxysilanes 3-glycidoxypropinoletrimethoxysilane, 3-glycidoxypro Pinoletriethoxysilane, 3-glycidoxypropyldialkoxyalkylsilane as 3-glycidoxypropyldimethoxymethylsilane, 3-glycidoxypropylalkoxydialkylsilane as 3-glycidoxypropylethoxydimethylsilane Etc.
  • the silane coupling agent is used in the treatment agent at a concentration of 1 to 30000 mgZL, preferably 10 to 20000 mgZL.
  • the noble metal compound includes palladium, silver, platinum, gold and other chlorides, hydroxides, oxides, and the like that exhibit a catalytic effect when copper or nickel is deposited from an electroless plating solution. Forces including ammine complexes such as sulfates and ammonium salts Particularly preferred are palladium compounds, especially palladium soap.
  • the precious metal compound is preferably used as an aqueous solution, and the concentration in the treating agent is preferably 1 to 30000 mg ZL. In this specification, the concentration in the treatment agent refers to the concentration in the solution when the filler is pretreated.
  • the filler treatment is performed using a force performed by a solution of each of the silane coupling agent and the noble metal compound or a mixed solution of the silane coupling agent and the noble metal compound.
  • the filler is treated with a solution of each of the silane coupling agent and the noble metal compound, it is preferable to treat with a solution containing the silane coupling agent first.
  • solvents used in this solution include water, methyl alcohol, ethyl alcohol, 2-propanol, butyl alcohol, acetone, toluene, ethylene glycol, polyethylene glycol, dimethylformamide, dimethyl sulfoxide, dioxane, and the like. It can be used in a solution dissolved in a mixed solution or the like.
  • the surface-treated resin filler may be blended with a material to be a resin base material to obtain a resin base material. Thus, the filler appears on the surface of the obtained resin base material.
  • the amount of the surface-treated resin filler is arbitrarily adjusted depending on the resin substrate used so that the filler appears on the surface of the resin substrate obtained by adding the resin filler.
  • the resin base material used in the present invention is not particularly limited, including those used as electronic component base materials.
  • epoxy resin, phenol resin, melamine resin, polyurethane resin, silicon resin and the like can be mentioned.
  • a particularly preferred resin is epoxy resin.
  • This epoxy resin includes, for example, diglycidyl ethers of bisphenols such as bisphenol A and bisphenol F (bisphenol type epoxy resin), side chain, or main chain with rubber, urethane, poly Those modified with flexible resins such as ether and polyester, phenol novolaks, cresol boracs, and other glycidyl etherified products (novolac type epoxy resins), or conjugated diene polymer epoxy compounds such as polybutadiene, etc. Is raised.
  • the resin base material containing the filler Before starting, it is preferable to treat the resin base material containing the filler with a reducing agent.
  • a reducing agent a known reducing agent that is usually used in electroless plating can be used.
  • hypophosphorous acid, alkali metal hypophosphite such as sodium hypophosphite, Dimethylamine borane can be raised.
  • the adhesion strength is further improved by treating the resin base material containing the filler with permanganic acid or the like and roughening the surface.
  • the resin base material containing the filler treated with each of the solution containing the noble metal compound and the solution containing the silane coupling agent or the mixed solution thereof is subjected to non-electrolysis. It includes electronic component base materials and build-up base materials.
  • the electroless plating itself is not particularly limited by a known method. Electroless plating is preferably copper plating, but nickel, cobalt, etc. may also be used. Further, after electroless plating, electric plating can be performed. A known technique with no particular limitation can be applied to this electric plating method. For example, copper, chromium, nickel, silver, etc. can be applied.
  • a commercially available silica-based filler (manufactured by Tatsumori Co., Ltd., maximum particle size of 35 ⁇ m, average particle size of 5 m) is mixed with imidazole silane (imidazole and 3-glycidoxypropyltrimethoxysilane).
  • imidazole silane imidazole and 3-glycidoxypropyltrimethoxysilane.
  • the product was immersed in a butanol solution containing lgZL and Pd soap (palladium naphthenate lgZUPd equivalent 200 mgZL), and air-dried and the solvent was removed for surface treatment.
  • Bisphenol A-type epoxy resin (manufactured by Yuka Shell Epoxy Co., Ltd., Epicoat 1001) 90 parts by weight, multifunctional epoxy resin (manufactured by Yuka Shell Epoxy Co., Ltd., Epicoat 154) 10 parts by weight, dicyandiamide cured 2 parts by weight of agent, imidazole silane curing accelerator (manufactured by Nikko Materials Co., Ltd.) 0.2 part by weight, 50 parts by weight of the filler treated as described above is added and heat molded. An insulated insulating resin was obtained. By treating this with an activator such as hypophosphorous acid (phosphinic acid) 30 g ZL, Pd was electrolessly activated.
  • an activator such as hypophosphorous acid (phosphinic acid) 30 g ZL
  • Electroless copper plating high temperature type formalin copper plating solution, KC500 (manufactured by Nikko Metal Plating Co., Ltd., 0.3 m thickness)
  • electric copper plating copper sulfate plating solution, current density 1. 5 A / dm 2 , 35 m thickness
  • the peel strength was 0.9 kgfZcm, and the peel strength was 90 ° peel strength (JIS C6481).
  • a commercially available silica-based filler (manufactured by Tatsumori Co., Ltd., maximum particle size of 35 ⁇ m, average particle size of 5 m) is mixed with imidazole silane (imidazole and 3-glycidoxypropyltrimethoxysilane).
  • imidazole silane imidazole and 3-glycidoxypropyltrimethoxysilane.
  • the product was immersed in a butanol solution containing lgZL and Pd soap (palladium naphthenate lgZUPd equivalent 200 mgZL), and air-dried and the solvent was removed for surface treatment.
  • Electroless copper plating high temperature type formalin copper plating solution, KC 500 (manufactured by Nikko Metal Plating Co., Ltd., 0.3 m thickness) was applied, and then electric copper plating (copper sulfate plating solution, Current density 1. 35 m thick).
  • the peel strength was 1.3 kgf / cm.
  • a commercially available silica-based filler (manufactured by Tatsumori Co., Ltd., with a maximum particle size of 35 ⁇ m and an average particle size of 5 ⁇ m) was added to imidazole silane (equimolar amount of imidazole and 3-glycidoxypropyltrimethoxysilane).
  • hypophosphorous acid Phosphinic acid
  • Pd was electrolessly activated by treatment with an activator consisting of 30 g ZL.Electroless copper plating (high-temperature type formalin copper plating solution, KC500 (manufactured by Nikko Metal Plating Co., Ltd., 0 3m thick), followed by electrolytic copper plating (copper sulfate plating solution, current density 1.5A 35m thick), peel strength was 0.8kgfZcm.
  • silica-based filler manufactured by Tatsumori Co., Ltd., maximum particle size 35 ⁇ m, average particle size 5 ⁇ m
  • equimolar reaction of imidazole silane imidazole and 3-glycidoxypropyltrimethoxysilane.
  • Surface treatment was performed by dipping in an aqueous solution containing 200 mg ZL, palladium chloride (60 mg ZL in terms of lOOmgZUPd) and ethylene glycol 20 g / L and drying.
  • Electroless copper plating high-temperature type formalin copper plating solution, KC500 (manufactured by Nikko Metal Plating Co., Ltd., 0.3 m thickness)
  • electrolytic copper plating solution copper sulfate plating solution, current density 1
  • the peel strength was 1. OkgfZcm.
  • a commercially available silica-based filler (manufactured by Tatsumori Co., Ltd., maximum particle size of 35 ⁇ m, average particle size of 5 m) is mixed with imidazole silane (imidazole and 3-glycidoxypropyltrimethoxysilane).
  • imidazole silane imidazole and 3-glycidoxypropyltrimethoxysilane.
  • the product was immersed in a butanol solution containing lgZL and Pd soap (palladium naphthenate lgZUPd equivalent 200 mgZL), and air-dried and the solvent was removed for surface treatment.
  • Polyaminobismaleimide (Kerimid, manufactured by Rhone Pouleic) 100 parts by weight dissolved in 50 parts by weight of N-methylpyrrolidone Add 100 parts by weight of the filler treated as described above and press-mold. Insulating polyimide resin containing a filler was obtained. By treating this with an activator that has a hypophosphorous acid (phosphinic acid) strength of 30 g / L, Pd was activated electrolessly. Electroless copper plating (high temperature type formalin copper plating solution, KC500 (manufactured by Nikko Metal Plating Co., Ltd., 0.3 / zm thickness)), followed by electrolytic copper plating (copper sulfate plating solution, current density) 1. 5AZdm 2 (35 m thickness) The peel strength was 0.8 kgfZcm.
  • Example 2 The same treatment as in Example 1 was conducted except that the silica-based filler was changed to an alumina-based filler (Showa Denko KK, maximum particle size 30 m, average particle size 4 m). Peel strength was 0.9kgfZcm
  • Example 2 Using fillers that were not surface-treated in Example 1, insulating filler containing filler was prepared, and electroless copper plating (0.3 ⁇ m thick) with normal Sn—Pd colloid, followed by electrolytic copper plating ( Copper sulfate plating solution, current density 1.5AZdm 2 , 35 m thickness). The peel strength was as low as O. lkgfZc m. Comparative Example 2
  • Example 2 Using fillers that were not surface-treated in Example 2, a filler-filled insulating resin was prepared, and electroless copper plating (0.3 m thick) with ordinary Sn-Pd colloid and subsequent electrolytic copper plating (copper sulfate) Plating solution, current density 1.5 AZdm 2 , 35 / zm thickness). Peel strength is 0.6kgf

Abstract

Disclosed is a technique which can be applied to a resin base material commonly used as substrate material and enables to improve the adhesion strength between the base material and a plated metal layer, namely a general resin base material improved in adhesion to a plated metal layer. Specifically disclosed is a filler for resins composed of a silica which is surface-treated with both a solution containing a silane coupling agent such as one obtained by a reaction between an azole compound or amine compound and an epoxysilane compound and a solution containing a noble metal compound, or alternatively surface-treated with a mixture of these solutions. Also specifically disclosed are a resin base material containing such a filler and an electronic component substrate material obtained by electroless plating such a resin base material.

Description

明 細 書  Specification
樹脂用フイラ一、それを配合した樹脂基材、及び電子部品基材  Resin filler, resin base material containing the same, and electronic component base material
技術分野  Technical field
[0001] 本発明は、榭脂用フイラ一、それを配合した榭脂基材、及び電子部品基材に関す る。  The present invention relates to a resin filler, a resin base material containing the same, and an electronic component base material.
背景技術  Background art
[0002] 近年、プリント基板は、機器の小型化、高性能化の要求によりその配線密度はます ます増大している。それに伴い、ビルドアップ基板など基板は配線を微細化するため その表面をロープ口ファイルィ匕しており、この表面の低粗化傾向により、基板と基板 上に形成する金属めつき膜との密着性を十分にとることが困難になっている。しかし、 前記の要求を満たすために、この密着強度の向上もまた要求される。  [0002] In recent years, the wiring density of printed circuit boards has been increasing due to demands for smaller and higher performance devices. Along with this, the surface of a board, such as a build-up board, is rope-filed in order to make the wiring finer, and due to the low roughness of this surface, the adhesion between the board and the metal plating film formed on the board is increased. It has become difficult to take sufficient sex. However, in order to satisfy the above requirements, this improvement in adhesion strength is also required.
[0003] こうした要求に対応するため、すでに各種の提案がなされている。その中で、特許 文献 あるいは 2に提案されたものは、ポリイミド榭脂基材上にパラジウム化合物を 含有するポリイミド榭脂前駆体溶液を塗布 ·乾燥させてポリイミド榭脂前駆体層を形成 し、次いで水素供与体の存在下において紫外線を照射しめっき下地核を形成した後 、無電解めつき処理によりめつき下地金属層を形成し、更に表面めつき層を形成した 後または形成する前に前記ポリイミド榭脂前駆体層を加熱イミドィ匕してポリイミド榭脂 層にすると 、うものである。これはめつき下地核をポリイミド榭脂層内に形成したことに よりそのアンカー効果により、ポリイミド榭脂層とめっき下地金属層の密着強度を向上 さ ·¾:るちのである。  [0003] Various proposals have already been made to meet such demands. Among them, what is proposed in Patent Document 2 or 2 is that a polyimide resin precursor solution containing a palladium compound is applied and dried on a polyimide resin substrate to form a polyimide resin precursor layer. After forming a plating base nucleus by irradiating ultraviolet rays in the presence of a hydrogen donor, a polyimide base metal layer is formed by an electroless plating process, and a surface plating layer is further formed or before the polyimide is formed. When the resin precursor layer is heated and imidized to form a polyimide resin layer. This is because the adhesive base nucleus is formed in the polyimide resin layer, and the anchoring effect improves the adhesion strength between the polyimide resin layer and the plating base metal layer.
特許文献 1:特開 2002— 30216号公報  Patent Document 1: Japanese Patent Laid-Open No. 2002-30216
特許文献 2:特開 2002— 374055号公報  Patent Document 2: Japanese Patent Laid-Open No. 2002-374055
発明の開示  Disclosure of the invention
発明が解決しょうとする課題  Problems to be solved by the invention
[0004] し力しながら、前記の提案では基板材料はポリイミド榭脂に限定され、電子部品用 基板一般に適用することはできない。また、ノラジウムを活性ィ匕するために紫外線処 理を要し、更にイミドィ匕のために高温加熱を要するなどその処理工程は煩雑である。 [0005] 本発明は、基板材料として一般的な榭脂基材に適用でき、その基材とめつき金属 層との密着強度をより簡易に向上させることができる技術を提供するものである。すな わち、本発明は、めっき金属層との密着強度を向上した電子部品基材として有用な 一般的な樹脂基材を提供することを目的とする。 However, in the above proposal, the substrate material is limited to polyimide resin, and cannot be applied to a substrate for electronic parts in general. Further, the ultraviolet ray treatment is required for activating noradium, and further, high temperature heating is required for imido, so that the treatment process is complicated. [0005] The present invention provides a technique that can be applied to a general resin base material as a substrate material and can more easily improve the adhesion strength between the base material and the metal layer. That is, an object of the present invention is to provide a general resin substrate useful as an electronic component substrate having improved adhesion strength with a plated metal layer.
課題を解決するための手段  Means for solving the problem
[0006] 本発明者は、鋭意検討した結果、フィラーを無電解めつきの触媒である貴金属化合 物を含む溶液と該貴金属を捕捉するシランカップリング剤を含む溶液それぞれにより 、またはそれらの混合溶液により表面処理し、該榭脂用フイラ一を榭脂基材に配合す ることにより、該フイラ一を榭脂基材の表面に現出させて表面を活性ィ匕することができ 、無電解めつきすることにより析出する金属に対して前記シランカップリング剤を介し てアンカー効果を付与することができ、無電解めつきによる金属層と榭脂基材との密 着強度を向上し得ることを知見し、本発明に至った。  [0006] As a result of diligent investigations, the present inventor has found that the filler is a solution containing a noble metal compound that is an electroless plating catalyst and a solution containing a silane coupling agent that traps the noble metal, or a mixed solution thereof. By surface-treating and blending the resin filler with the resin base material, the surface of the resin base material can be made to appear on the surface of the resin base material, and the surface can be activated. It is possible to give an anchor effect to the deposited metal by attaching via the silane coupling agent, and to improve the adhesion strength between the metal layer and the resin substrate by electroless plating. As a result, the present invention has been achieved.
[0007] すなわち、本発明は、  That is, the present invention provides:
[1] シランカップリング剤を含む溶液と貴金属化合物を含む溶液それぞれにより、ま たはそれらの混合溶液により表面処理された榭脂用フイラ一。  [1] A resin filler that is surface-treated with a solution containing a silane coupling agent and a solution containing a noble metal compound, or a mixed solution thereof.
[2] フィラーがシリカである [1]記載の榭脂用フイラ一。  [2] The resin filler according to [1], wherein the filler is silica.
[3] シランカップリング剤がァゾール系化合物またはアミンィ匕合物とエポキシシラン 系化合物との反応により得られたシランカップリング剤である [1]または [2]記載の榭 脂用フイラ一。  [3] The resin filler according to [1] or [2], wherein the silane coupling agent is a silane coupling agent obtained by reacting an azole compound or an amine compound with an epoxy silane compound.
[4] 貴金属化合物がパラジウム化合物である [ 1]〜 [3]の 、ずれかに記載の榭脂 用フイラ一。  [4] The resin filler according to any one of [1] to [3], wherein the noble metal compound is a palladium compound.
[5] [1]〜 [4]の 、ずれかに記載の榭脂用フイラ一を配合した榭脂基材。  [5] A resin base material containing the resin filler according to any one of [1] to [4].
[6] 榭脂基材の榭脂がエポキシ榭脂である [5]記載の榭脂基材。  [6] The resin substrate according to [5], wherein the resin of the resin substrate is an epoxy resin.
[7] [5]または [6]記載の榭脂基材に無電解めつきを施した電子部品基材。  [7] An electronic component base material obtained by applying electroless plating to the resin base material according to [5] or [6].
[8] 電子部品基材がビルドアップ基板である [7]記載の電子部品基材。  [8] The electronic component base material according to [7], wherein the electronic component base material is a build-up substrate.
に関する。  About.
発明の効果  The invention's effect
[0008] 本発明によれば、シランカップリング剤を含む溶液と貴金属化合物を含む溶液それ ぞれにより、またはそれらの混合溶液により表面を処理されたフイラ一を榭脂基材に 配合することにより、該フイラ一が榭脂基材表面に現出し、この榭脂基材を無電解め つきすることで析出した金属がシランカップリング剤を介してアンカー効果を得ること ができ、その結果、榭脂基材の榭脂層と無電解めつきによる金属層との密着強度を 向上させることができる。 [0008] According to the present invention, a solution containing a silane coupling agent and a solution containing a noble metal compound, By blending the filler whose surface has been treated with each or a mixed solution thereof into the resin base material, the filler appears on the surface of the resin base material, and the resin base material is electrolessly electrolyzed. The deposited metal can obtain an anchor effect through the silane coupling agent, and as a result, the adhesion strength between the resin layer of the resin base material and the metal layer due to electroless plating is improved. Can do.
発明を実施するための最良の形態  BEST MODE FOR CARRYING OUT THE INVENTION
[0009] 本発明に使用するフイラ一としては、榭脂一般に配合されるフイラ一を使用すること ができる。例えば、シリカ、アルミナ、ガラス繊維などの無機系フイラ一あるいは有機系 フィラーを上げることができる。  [0009] As the filler used in the present invention, it is possible to use a filler that is generally blended with sallow. For example, inorganic fillers such as silica, alumina, glass fiber or organic fillers can be raised.
フイラ一は、平均粒径 0. 1〜50 μ mが好ましぐより好ましくは 1〜10 μ mである。  The filler preferably has an average particle size of 0.1 to 50 μm, more preferably 1 to 10 μm.
[0010] 本発明に使用するシランカップリング剤としては、ァゾール系化合物あるいはァミン 化合物とエポキシシラン系化合物との反応により得られた貴金属を捕捉するシラン力 ップリング剤が好ましい。 [0010] The silane coupling agent used in the present invention is preferably an azole compound or a silane coupling agent that traps a noble metal obtained by the reaction of an amine compound and an epoxy silane compound.
エポキシシラン系化合物と反応させるアミンィ匕合物としては、ジメチルァミン、ジェチ ルァミン等の低級ジアルキルァミンが好まし 、。  As the amine compound to be reacted with the epoxysilane compound, lower dialkylamines such as dimethylamine and jetamine are preferred.
ァゾール系化合物は、ァゾール基を含有する化合物であり、その好ましいァゾール 基としては、イミダゾール、ォキサゾール、チアゾール、セレナゾール、ピラゾール、ィ ソォキサゾール、イソチアゾール、トリァゾール、ォキサジァゾール、チアジアゾール、 テトラゾール、ォキサトリァゾール、チアトリァゾール、ベンダゾール、インダゾール、ベ ンズイミダゾール、ベンゾトリアゾールなどが挙げられる。中でもイミダゾール基が特に 好ましい。  The azole compound is a compound containing an azole group, and preferred azole groups include imidazole, oxazole, thiazole, selenazole, pyrazole, isoxazole, isothiazole, triazole, oxadiazole, thiadiazole, tetrazole, oxatriazole, Examples include thiatriazole, bendazole, indazole, benzimidazole, and benzotriazole. Of these, an imidazole group is particularly preferable.
[0011] また、前記シランカップリング剤とは、前記ァゾール系化合物またはアミンィ匕合物等 由来の貴金属イオン捕捉基の他に、 SIX X X基を有する化合物であり、 X  [0011] The silane coupling agent is a compound having a SIX X X group in addition to a noble metal ion-trapping group derived from the azole compound or an amine compound,
1 2 3 1、 X  1 2 3 1, X
2、 2,
Xはアルキル基、ハロゲンやアルコキシ基などを意味し、フィラーへの固定が可能なX means alkyl group, halogen or alkoxy group, and can be fixed to filler
3 Three
官能基であれば良い。 X、 X、 Xは同一でもまた異なっていても良い。  Any functional group may be used. X, X, and X may be the same or different.
1 2 3  one two Three
[0012] また、このような前記のアミンィ匕合物あるいはァゾール系化合物と反応させるェポキ シ基含有シラン化合物としては、  [0012] Further, as an epoxy group-containing silane compound to be reacted with the above-mentioned amine compound or azole compound,
[化 1] C^2プ H— CH20 (CH2) 3S i (OR3) nR4 (3一„) [Chemical 1] C ^ 2 flops H- CH 2 0 (CH 2) 3 S i (OR 3) n R 4 (3 one ")
O  O
(式中、 R3、 R4は水素又は炭素数が 1〜3のアルキル基、 nは 1〜3の整数)で示され るエポキシシランカップリング剤が好まし 、。 (Wherein R 3 and R 4 are hydrogen or an alkyl group having 1 to 3 carbon atoms, and n is an integer of 1 to 3).
[0013] 前記ァゾールイ匕合物と前記エポキシ基含有シランィ匕合物との反応は、特開平 6— 2 56358号公報に説示されている条件で行うことができる。例えば、 80〜200°Cでァゾ ール化合物 1モルに対して 0.1〜10モルのエポキシ基含有シラン化合物を滴下して 5分〜 2時間反応させる。その際、溶媒は特に不要である力 クロ口ホルム、ジォキサ ンメタノール、エタノール等の有機溶媒を用いてもよい。  [0013] The reaction between the azole compound and the epoxy group-containing silane compound can be performed under the conditions described in JP-A-6-256358. For example, at 80 to 200 ° C., 0.1 to 10 mol of an epoxy group-containing silane compound is added dropwise to 1 mol of an azole compound, and reacted for 5 minutes to 2 hours. In that case, an organic solvent such as chloroform, dioxane methanol, ethanol, or the like, which does not particularly require a solvent, may be used.
[0014] 本発明に使用する金属捕捉能を有するシランカップリング剤のその他の例として、 y—ァミノプロピルトリメトキシシラン、 γ—ァミノプロピルトリエトキシシラン、 N— j8 (ァ ミノェチル) Ί—ァミノプロピルトリメトキシシラン、 N— j8 (アミノエチル) γ—ァミノプロ ピルトリエトキシシラン、 Ί—メルカプトプロピルトリメトキシシラン等が挙げられる。 [0014] Other examples of the silane coupling agent having a metal scavenging ability used in the present invention include y-aminopropyltrimethoxysilane, γ-aminopropyltriethoxysilane, N-j8 (aminoethyl) Ί — Examples include aminopropyltrimethoxysilane, N-j8 (aminoethyl) γ-aminopropyltriethoxysilane, and Ί -mercaptopropyltrimethoxysilane.
[0015] 本発明にお 、て特に好ま Uヽシランカップリング剤は、イミダゾールシランであり、こ れは、以下の(1)、(2)および(3)で表される。  In the present invention, the particularly preferred U ヽ silane coupling agent is imidazole silane, which is represented by the following (1), (2) and (3).
[化 2] [Chemical 2]
NCH2CHCH20(CH2)3S i (〇R3 )nR4 (3nl (1) NCH 2 CHCH 2 0 (CH 2 ) 3 Si (〇R 3 ) n R 4 (3nl (1)
OH OH
Figure imgf000006_0001
Figure imgf000006_0001
(ただし、 R1は水素または炭素数が 1 20のアルキル基、 R2は水素、ビ-ル基または 炭素数 1 5のアルキル基、 R3 R4は炭素数 1 3のアルキル基、 nは 1 3を示す。 )(Where R 1 is hydrogen or an alkyl group having 120 carbon atoms, R 2 is hydrogen, a beer group or an alkyl group having 15 carbon atoms, R 3 R 4 is an alkyl group having 13 carbon atoms, and n is 1 indicates 3.)
[0016] 上記式(1)、(2)、(3)において、 I^ R4は各規定されたとおりの意義を有するが、 特に合成の容易性力 R1は水素、メチル、ェチル、ゥンデシル、ヘプタデシルが好ま しぐ R2は水素、メチル、ェチルが好ましぐ R3 R4はメチル、ェチルが好ましい。 [0016] the above formula (1), (2), in (3), I ^ R 4 has a meaning of as being the defined, in particular ease force R 1 of the synthesis is hydrogen, methyl, Echiru, Undeshiru R 2 is preferably hydrogen, methyl, and ethyl. R 3 R 4 is preferably methyl and ethyl.
[0017] 二れらの合成法については、特開平 5— 186479号公報に開示されている。  [0017] The two synthesis methods are disclosed in JP-A-5-186479.
すなわち、以下に示すイミダゾールイ匕合物と 3—グリシドキシプロビルシランィ匕合物 との等モル反応により合成することができる。なお、この合成法によって上記(1)、 (2 That is, it can be synthesized by an equimolar reaction of the following imidazole compound and 3-glycidoxypropyl silane compound. The above synthesis method (1), (2
) (3)で表されるイミダゾールシランの混合物として得られる場合にも特に分離する 必要はなぐ混合物の形態で使用することが有利である。 ) Even when it is obtained as a mixture of imidazole silanes represented by (3), it is advantageous to use it in the form of a mixture that does not need to be separated.
[0018] [化 3] S i (O R3 ) n R4
Figure imgf000007_0001
[0018] [Chemical 3] S i (OR 3 ) n R 4
Figure imgf000007_0001
(4 )  (Four )
Figure imgf000007_0002
Figure imgf000007_0002
(上記式中、 R1は水素又は炭素数が 1〜20のアルキル基、 R2は水素、ビュル基又 は炭素数 1〜5のアルキル基、 R3及び R4は炭素数 1〜3のアルキル基、 nは 1〜3を表 す。) (In the above formula, R 1 is hydrogen or an alkyl group having 1 to 20 carbon atoms, R 2 is hydrogen, a bur group or an alkyl group having 1 to 5 carbon atoms, and R 3 and R 4 are carbon atoms having 1 to 3 carbon atoms. Alkyl group, n represents 1-3.)
上記一般式 (4)で表されるイミダゾールイ匕合物として好まし 、のは、イミダゾール、 2 アルキルイミダゾール、 2, 4 ジアルキルイミダゾール、 4 ビュルイミダゾール等 である。これらのうちとくに好ましいのは、イミダゾール; 2—アルキルイミダゾールとし ては、 2—メチルイミダゾール、 2—ェチルイミダゾール、 2—ゥンデシルイミダゾール、 2 へプタデシルイミダゾール;また、 2, 4 ジアルキルイミダゾールとしては、 2 ェ チル— 4—メチルイミダゾール等を挙げることができる。 [0020] 又上記一般式(5)で表される 3—グリシドキシプロビルシランィ匕合物は、 3—グリシド キシプロピルトリアルコキシシラン、 3 -グリシドキシプロピルジアルコキシアルキルシ ラン、 3—グリシドキシプロピルアルコキシジアルキルシランであり、これらのうちとくに 好ましいものを挙げれば、 3—グリシドキシプロピルトリアルコキシシランとしては、 3— グリシドキシプロピノレトリメトキシシラン、 3—グリシドキシプロピノレトリエトキシシラン、ま た 3—グリシドキシプロピルジアルコキシアルキルシランとしては、 3—グリシドキシプロ ピルジメトキシメチルシラン、 3—グリシドキシプロピルアルコキシジアルキルシランとし ては、 3—グリシドキシプロピルエトキシジメチルシラン等である。 Preferable examples of the imidazole compound represented by the general formula (4) include imidazole, 2-alkylimidazole, 2,4-dialkylimidazole, and 4-bulimidazole. Among these, imidazole; 2-alkylimidazole is particularly preferred as 2-methylimidazole, 2-ethylimidazole, 2-undecylimidazole, 2-heptadecylimidazole; and 2,4 dialkylimidazole. Can include 2-ethyl-4-methylimidazole and the like. [0020] The 3-glycidoxypropyl trisilane compound represented by the general formula (5) includes 3-glycidoxypropyltrialkoxysilane, 3-glycidoxypropyl dialkoxyalkylsilane, 3 —Glycidoxypropylalkoxydialkylsilanes. Among these, particularly preferred are 3-glycidoxypropyltrialkoxysilanes: 3-glycidoxypropinoletrimethoxysilane, 3-glycidoxypro Pinoletriethoxysilane, 3-glycidoxypropyldialkoxyalkylsilane as 3-glycidoxypropyldimethoxymethylsilane, 3-glycidoxypropylalkoxydialkylsilane as 3-glycidoxypropylethoxydimethylsilane Etc.
本発明において、前記シランカップリング剤は、処理剤中 l〜30000mgZL好まし くは、 10〜20000mgZLの濃度で使用される。  In the present invention, the silane coupling agent is used in the treatment agent at a concentration of 1 to 30000 mgZL, preferably 10 to 20000 mgZL.
[0021] また、前記貴金属化合物としては、無電解めつき液から銅やニッケルなどを析出さ せる際に触媒効果を示すパラジウム、銀、白金、金などの塩化物、水酸化物、酸化物 、硫酸塩、アンモ-ゥム塩などのアンミン錯体などが挙げられる力 特にパラジウム化 合物、中でもパラジウム石けんが好ましい。貴金属化合物は水溶液として用いること が好ましぐ処理剤中の濃度は l〜30000mgZLが好ましい。本明細書において、 処理剤中の濃度とは、フィラーを前処理する際の溶液中の濃度をいう。  [0021] The noble metal compound includes palladium, silver, platinum, gold and other chlorides, hydroxides, oxides, and the like that exhibit a catalytic effect when copper or nickel is deposited from an electroless plating solution. Forces including ammine complexes such as sulfates and ammonium salts Particularly preferred are palladium compounds, especially palladium soap. The precious metal compound is preferably used as an aqueous solution, and the concentration in the treating agent is preferably 1 to 30000 mg ZL. In this specification, the concentration in the treatment agent refers to the concentration in the solution when the filler is pretreated.
[0022] 本発明にお 、て、フィラーの処理は、シランカップリング剤と貴金属化合物それぞ れの溶液により行われる力 あるいはこれらシランカップリング剤と貴金属化合物の混 合液を用いて行われる。シランカップリング剤と貴金属化合物それぞれの溶液により フィラーの処理を行う場合は、シランカップリング剤を含む溶液で先に処理することが 好ましい。  [0022] In the present invention, the filler treatment is performed using a force performed by a solution of each of the silane coupling agent and the noble metal compound or a mixed solution of the silane coupling agent and the noble metal compound. When the filler is treated with a solution of each of the silane coupling agent and the noble metal compound, it is preferable to treat with a solution containing the silane coupling agent first.
この溶液に使用される溶媒としては、例えば、水、メチルアルコール、ェチルアルコ ール、 2—プロパノール、ブチルアルコール、アセトン、トノレェン、エチレングリコール 、ポリエチレングリコール、ジメチルホルムアミド、ジメチルスルホキシド、ジォキサンな どやこれらを混合した溶液などに溶解させた溶液で使用できる。  Examples of solvents used in this solution include water, methyl alcohol, ethyl alcohol, 2-propanol, butyl alcohol, acetone, toluene, ethylene glycol, polyethylene glycol, dimethylformamide, dimethyl sulfoxide, dioxane, and the like. It can be used in a solution dissolved in a mixed solution or the like.
水を使用する場合、特にフイラ一面及びめつき条件により溶液の pHを最適化する 必要がある。  When using water, it is necessary to optimize the pH of the solution, especially according to the surface of the filler and the mating conditions.
[0023] 表面処理された榭脂フイラ一を、榭脂基材となる材料に配合して榭脂基材を得るこ とにより、得られた榭脂基材の表面には該フイラ一が現出する。表面処理された榭脂 フィラーを配合する量は、榭脂フイラ一を配合して得られた榭脂基材表面にフィラー が現出するよう、使用する榭脂基材により任意に調整する。 [0023] The surface-treated resin filler may be blended with a material to be a resin base material to obtain a resin base material. Thus, the filler appears on the surface of the obtained resin base material. The amount of the surface-treated resin filler is arbitrarily adjusted depending on the resin substrate used so that the filler appears on the surface of the resin substrate obtained by adding the resin filler.
[0024] 本発明に使用する榭脂基材としては、電子部品基材等として使用されているものを 含め特に制限はない。例えばエポキシ榭脂、フエノール榭脂、メラミン榭脂、ポリウレ タン榭脂、シリコン榭脂等をあげることができる。  [0024] The resin base material used in the present invention is not particularly limited, including those used as electronic component base materials. For example, epoxy resin, phenol resin, melamine resin, polyurethane resin, silicon resin and the like can be mentioned.
本発明において、特に好ましい榭脂は、エポキシ榭脂である。このエポキシ榭脂と しては、例えばビスフエノール A、ビスフエノール Fなどのビスフエノール類のジグリシ ジルエーテルィ匕物(ビスフエノール型エポキシ榭脂)、や側鎖、または主鎖にゴム、ゥ レタン、ポリエーテル、ポリエステル等の可撓性榭脂で変性されたもの、フエノールノ ボラック、クレゾ一ルのボラック、などのグリシジルエーテル化物(ノボラック型エポキシ 榭脂)、あるいはポリブタジエンなどの共役ジエンポリマーのエポキシィ匕物などが上げ られる。  In the present invention, a particularly preferred resin is epoxy resin. This epoxy resin includes, for example, diglycidyl ethers of bisphenols such as bisphenol A and bisphenol F (bisphenol type epoxy resin), side chain, or main chain with rubber, urethane, poly Those modified with flexible resins such as ether and polyester, phenol novolaks, cresol boracs, and other glycidyl etherified products (novolac type epoxy resins), or conjugated diene polymer epoxy compounds such as polybutadiene, etc. Is raised.
[0025] また、貴金属化合物を含む溶液とシランカップリング剤を含む溶液それぞれにより、 またはそれらの混合溶液により処理されたフイラ一の無電解めつき活性を更に活性 ィ匕させるために、無電解めつき前に、該フイラ一を配合した榭脂基材を、還元剤により 処理することが好ましい。この還元剤としては、無電解めつきにおいて通常使用され ている公知の還元剤を使用することができる力 好ましくは、次亜リン酸、次亜リン酸 ナトリウム等の次亜リン酸アルカリ金属塩、ジメチルァミンボランなどを上げることがで きる。  [0025] Further, in order to further enhance the electroless binding activity of the filler treated with each of the solution containing the noble metal compound and the solution containing the silane coupling agent or a mixed solution thereof, Before starting, it is preferable to treat the resin base material containing the filler with a reducing agent. As this reducing agent, a known reducing agent that is usually used in electroless plating can be used. Preferably, hypophosphorous acid, alkali metal hypophosphite such as sodium hypophosphite, Dimethylamine borane can be raised.
また、前記還元剤による処理の前に、フィラーを配合した榭脂基材を過マンガン酸 等で処理し、表面を粗ィ匕することによりさらに密着強度が向上する。  Further, before the treatment with the reducing agent, the adhesion strength is further improved by treating the resin base material containing the filler with permanganic acid or the like and roughening the surface.
[0026] 本発明は、貴金属化合物を含む溶液とシランカップリング剤を含む溶液それぞれに より、またはそれらの混合溶液により処理されたフイラ一を配合した榭脂基材に無電 解めつきを施した電子部品基材、ビルドアップ基材を含むものである。 [0026] In the present invention, the resin base material containing the filler treated with each of the solution containing the noble metal compound and the solution containing the silane coupling agent or the mixed solution thereof is subjected to non-electrolysis. It includes electronic component base materials and build-up base materials.
本発明において、無電解めつきそれ自体は、公知の方法でよぐ特に制限されるも のではない。無電解めつきは、銅めつきが好ましいが、その他、ニッケル、コバルトな どでも良い。 また、無電解めつきの後、電気めつきを行うことができる。この電気めつき法につい ても特に制限はなぐ公知の技術が適用できる。例えば、銅、クロム、ニッケル、銀な どが適用できる。 In the present invention, the electroless plating itself is not particularly limited by a known method. Electroless plating is preferably copper plating, but nickel, cobalt, etc. may also be used. Further, after electroless plating, electric plating can be performed. A known technique with no particular limitation can be applied to this electric plating method. For example, copper, chromium, nickel, silver, etc. can be applied.
実施例  Example
[0027] 実施例 1  [0027] Example 1
市販のシリカ系フイラ一( (株)龍森社製、最大粒径 35 μ m、平均粒径 5 m)を、ィ ミダゾールシラン (イミダゾールと 3—グリシドキシプロピルトリメトキシシランの等モル反 応生成物) lgZLと Pd石けん (ナフテン酸パラジウム) lgZUPd換算 200mgZL) を含んだブタノール溶液に浸漬して、風乾 ·溶媒除去することで表面処理をした。ビ スフエノール A型エポキシ榭脂(油化シェルエポキシ (株)製、ェピコート 1001) 90重 量部、多官能型エポキシ榭脂(油化シェルエポキシ (株)製、ェピコート 154) 10重量 部、ジシアンジァミド硬化剤 2重量部、イミダゾールシラン硬化促進剤((株)日鉱マテ リアルズ製) 0. 2重量部に対して、前記のように処理されたフイラ一を 50重量部加え て加熱成型することでフイラ一入り絶縁榭脂を得た。これを次亜リン酸 (ホスフィン酸) 30gZLカゝらなる活性化剤で処理することで Pdを無電解めつき活性にした。無電解 銅めつき(高温タイプのホルマリン系銅めつき液、 KC500 (日鉱メタルプレーティング (株)製、 0.3 m厚)を行い、その後電気銅めつき (硫酸銅めつき液、電流密度 1. 5 A/dm2, 35 m厚)を行った。ピール強度は 0.9kgfZcmとなった。なお、ピール強 度は、 90° ピール強度 (JIS C6481)である。以下のピール強度も同じである。 A commercially available silica-based filler (manufactured by Tatsumori Co., Ltd., maximum particle size of 35 μm, average particle size of 5 m) is mixed with imidazole silane (imidazole and 3-glycidoxypropyltrimethoxysilane). The product was immersed in a butanol solution containing lgZL and Pd soap (palladium naphthenate lgZUPd equivalent 200 mgZL), and air-dried and the solvent was removed for surface treatment. Bisphenol A-type epoxy resin (manufactured by Yuka Shell Epoxy Co., Ltd., Epicoat 1001) 90 parts by weight, multifunctional epoxy resin (manufactured by Yuka Shell Epoxy Co., Ltd., Epicoat 154) 10 parts by weight, dicyandiamide cured 2 parts by weight of agent, imidazole silane curing accelerator (manufactured by Nikko Materials Co., Ltd.) 0.2 part by weight, 50 parts by weight of the filler treated as described above is added and heat molded. An insulated insulating resin was obtained. By treating this with an activator such as hypophosphorous acid (phosphinic acid) 30 g ZL, Pd was electrolessly activated. Electroless copper plating (high temperature type formalin copper plating solution, KC500 (manufactured by Nikko Metal Plating Co., Ltd., 0.3 m thickness)), followed by electric copper plating (copper sulfate plating solution, current density 1. 5 A / dm 2 , 35 m thickness) The peel strength was 0.9 kgfZcm, and the peel strength was 90 ° peel strength (JIS C6481).
[0028] 実施例 2 [0028] Example 2
市販のシリカ系フイラ一( (株)龍森社製、最大粒径 35 μ m、平均粒径 5 m)を、ィ ミダゾールシラン (イミダゾールと 3—グリシドキシプロピルトリメトキシシランの等モル反 応生成物) lgZLと Pd石けん (ナフテン酸パラジウム) lgZUPd換算 200mgZL) を含んだブタノール溶液に浸漬して、風乾 ·溶媒除去することで表面処理した。ビス フエノール A型エポキシ榭脂(油化シェルエポキシ (株)製、ェピコート 1001) 90重量 部、多官能型エポキシ榭脂(油化シェルエポキシ (株)製、ェピコート 154) 10重量部 、ジシアンジァミド硬化剤 2重量部、イミダゾールシラン硬化促進剤((株)日鉱マテリ アルズ製) 0. 2重量部に対して、前記のように処理されたフイラ一を 50重量部加えて 加熱成型することでフイラ一入り絶縁榭脂を得た。過マンガン酸で粗化処理した後、 これを次亜リン酸 (ホスフィン酸) 30g/Lからなる活性化剤で処理することで Pdを無 電解めつき活性にした。無電解銅めつき(高温タイプのホルマリン系銅めつき液、 KC 500 (日鉱メタルプレーティング (株)製、 0. 3 m厚)を行 ヽ、その後電気銅めつき( 硫酸銅めつき液、電流密度 1.
Figure imgf000011_0001
35 m厚)を行った。ピール強度は 1. 3k gf/ cmとなった。
A commercially available silica-based filler (manufactured by Tatsumori Co., Ltd., maximum particle size of 35 μm, average particle size of 5 m) is mixed with imidazole silane (imidazole and 3-glycidoxypropyltrimethoxysilane). The product was immersed in a butanol solution containing lgZL and Pd soap (palladium naphthenate lgZUPd equivalent 200 mgZL), and air-dried and the solvent was removed for surface treatment. 90 parts by weight of bisphenol A type epoxy resin (manufactured by Yuka Shell Epoxy Co., Ltd., Epicoat 1001), 10 parts by weight of polyfunctional type epoxy resin (manufactured by Yuka Shell Epoxy Co., Ltd., Epicoat 154), dicyandiamide curing agent 2 parts by weight, imidazole silane curing accelerator (manufactured by Nikko Materials) 0.2 part by weight 50 parts by weight of the filler treated as described above An insulating resin containing a filler was obtained by heat molding. After roughening with permanganic acid, this was treated with an activator consisting of hypophosphorous acid (phosphinic acid) 30 g / L to make Pd electroless plating activity. Electroless copper plating (high temperature type formalin copper plating solution, KC 500 (manufactured by Nikko Metal Plating Co., Ltd., 0.3 m thickness) was applied, and then electric copper plating (copper sulfate plating solution, Current density 1.
Figure imgf000011_0001
35 m thick). The peel strength was 1.3 kgf / cm.
[0029] 実施例 3 [0029] Example 3
市販のシリカ系フイラ一( (株)龍森社製、最大粒径 35 μ m、平均粒径 5 μ m)をイミ ダゾールシラン((イミダゾールと 3 -グリシドキシプロピルトリメトキシシランの等モル反 応生成物)を lg/L含んだブタノール溶液で処理 ·乾燥後、塩化パラジウムを 100m g/L (Pd換算 60mgZL)含んだブタノール溶液で処理 ·乾燥することで表面処理し た。ビスフエノール A型エポキシ榭脂(油化シェルエポキシ (株)製、ェピコート 1001) 90重量部、多官能型エポキシ榭脂(油化シェルエポキシ (株)製、ェピコート 154) 10 重量部、ジシアンジァミド硬化剤 2重量部、イミダゾールシラン硬化促進剤((株)日鉱 マテリアルズ製) 0. 2重量部に対して、前記のように処理されたフイラ一を 50重量部 加えて加熱成型することでフイラ一入り絶縁榭脂を得た。これを次亜リン酸 (ホスフィ ン酸) 30gZLからなる活性化剤で処理することで Pdを無電解活性にした。無電解銅 めっき(高温タイプのホルマリン系銅めつき液、 KC500 (日鉱メタルプレーティング( 株)製、 0. 3 m厚)を行い、その後電気銅めつき (硫酸銅めつき液、電流密度 1. 5A 35 m厚)を行った。ピール強度は 0.8kgfZcmとなった。  A commercially available silica-based filler (manufactured by Tatsumori Co., Ltd., with a maximum particle size of 35 μm and an average particle size of 5 μm) was added to imidazole silane (equimolar amount of imidazole and 3-glycidoxypropyltrimethoxysilane). The product was treated with butanol solution containing lg / L · After drying, treated with butanol solution containing 100 mg / L of palladium chloride (Pd conversion 60mgZL) · Surface treatment was carried out by drying.Bisphenol A type Epoxy resin (Oka Shell Epoxy Co., Ltd., Epicoat 1001) 90 parts by weight, polyfunctional epoxy resin (Oka Chemical Shell Epoxy Co., Ltd., Epicoat 154) 10 parts by weight, dicyandiamide curing agent 2 parts by weight, Imidazole silane curing accelerator (manufactured by Nikko Materials Co., Ltd.) 0.2 parts by weight, 50 parts by weight of the filler treated as described above is added and heat-molded to obtain insulating resin containing filler. This was obtained with hypophosphorous acid ( Phosphinic acid) Pd was electrolessly activated by treatment with an activator consisting of 30 g ZL.Electroless copper plating (high-temperature type formalin copper plating solution, KC500 (manufactured by Nikko Metal Plating Co., Ltd., 0 3m thick), followed by electrolytic copper plating (copper sulfate plating solution, current density 1.5A 35m thick), peel strength was 0.8kgfZcm.
[0030] 実施例 4 [0030] Example 4
市販のシリカ系フイラ一( (株)龍森社製、最大粒径 35 μ m、平均粒径 5 μ m)をイミ ダゾールシラン (イミダゾールと 3 -グリシドキシプロピルトリメトキシシランの等モル反 応生成物) 200mgZLと塩化パラジウム lOOmgZUPd換算 60mgZL)とエチレン グリコール 20g/Lを含んだ水溶液に浸漬して、乾燥することで表面処理した。ビスフ ェノール A型エポキシ榭脂(油化シェルエポキシ (株)製、ェピコート 1001) 90重量部 、多官能型エポキシ榭脂(油化シェルエポキシ (株)製、ェピコート 154) 10重量部、 ジシアンジアミド硬化剤 2重量部、イミダゾールシラン硬化促進剤((株)日鉱マテリア ルズ製) 0. 2重量部に対して、前記のように処理されたフイラ一を 50重量部加えて加 熱成型することでフイラ一入り絶縁榭脂を得た。これを次亜リン酸 (ホスフィン酸) 30g /Lからなる活性化剤で処理することで Pdを無電解めつき活性にした。無電解銅め つき(高温タイプのホルマリン系銅めつき液、 KC500 (日鉱メタルプレーティング (株) 製、 0.3 m厚)を行い、その後電気銅めつき液 (硫酸銅めつき液、電流密度 1. 5A 35 m厚)を行った。ピール強度は 1. OkgfZcmとなった。 Commercially available silica-based filler (manufactured by Tatsumori Co., Ltd., maximum particle size 35 μm, average particle size 5 μm) is treated with equimolar reaction of imidazole silane (imidazole and 3-glycidoxypropyltrimethoxysilane). Product) Surface treatment was performed by dipping in an aqueous solution containing 200 mg ZL, palladium chloride (60 mg ZL in terms of lOOmgZUPd) and ethylene glycol 20 g / L and drying. 90 parts by weight of bisphenol A type epoxy resin (Epicor Shell Epoxy Co., Ltd., Epicoat 1001), 10 parts by weight of polyfunctional epoxy resin (Epicoat 154, Epicoat 154), dicyandiamide curing agent 2 parts by weight, imidazole silane curing accelerator (Nikko Materia Co., Ltd.) (Luz) 0.2 parts by weight, 50 parts by weight of the filler treated as described above was added and heat-molded to obtain a filler-containing insulating resin. This was treated with an activator comprising hypophosphorous acid (phosphinic acid) 30 g / L to make Pd electroless plating activity. Electroless copper plating (high-temperature type formalin copper plating solution, KC500 (manufactured by Nikko Metal Plating Co., Ltd., 0.3 m thickness)), followed by electrolytic copper plating solution (copper sulfate plating solution, current density 1 The peel strength was 1. OkgfZcm.
[0031] 実施例 5 [0031] Example 5
市販のシリカ系フイラ一( (株)龍森社製、最大粒径 35 μ m、平均粒径 5 m)を、ィ ミダゾールシラン (イミダゾールと 3—グリシドキシプロピルトリメトキシシランの等モル反 応生成物) lgZLと Pd石けん (ナフテン酸パラジウム) lgZUPd換算 200mgZL) を含んだブタノール溶液に浸漬して、風乾 ·溶媒除去することで表面処理をした。ポリ アミノビスマレイミド(Rhone Pouleic社製 Kerimid) 100重量部を N—メチルピロリド ン 50重量部に溶解させたもの 100重量部に、前記のように処理されたフイラ一を 50 重量部加えて加圧成形することでフイラ一入り絶縁ポリイミド榭脂を得た。これを次亜 リン酸 (ホスフィン酸) 30g/L力もなる活性化剤で処理することで Pdを無電解めつき 活性にした。無電解銅めつき(高温タイプのホルマリン系銅めつき液、 KC500 (日鉱 メタルプレーティング (株)製、 0.3 /z m厚)を行い、その後電気銅めつき (硫酸銅めつ き液、電流密度 1. 5AZdm2、 35 m厚)を行った。ピール強度は 0. 8kgfZcmとな つた o A commercially available silica-based filler (manufactured by Tatsumori Co., Ltd., maximum particle size of 35 μm, average particle size of 5 m) is mixed with imidazole silane (imidazole and 3-glycidoxypropyltrimethoxysilane). The product was immersed in a butanol solution containing lgZL and Pd soap (palladium naphthenate lgZUPd equivalent 200 mgZL), and air-dried and the solvent was removed for surface treatment. Polyaminobismaleimide (Kerimid, manufactured by Rhone Pouleic) 100 parts by weight dissolved in 50 parts by weight of N-methylpyrrolidone Add 100 parts by weight of the filler treated as described above and press-mold. Insulating polyimide resin containing a filler was obtained. By treating this with an activator that has a hypophosphorous acid (phosphinic acid) strength of 30 g / L, Pd was activated electrolessly. Electroless copper plating (high temperature type formalin copper plating solution, KC500 (manufactured by Nikko Metal Plating Co., Ltd., 0.3 / zm thickness)), followed by electrolytic copper plating (copper sulfate plating solution, current density) 1. 5AZdm 2 (35 m thickness) The peel strength was 0.8 kgfZcm.
[0032] 実施例 6  [0032] Example 6
シリカ系フイラ一をアルミナ系フイラ一(昭和電工社製、最大粒径 30 m、平均粒径 4 m)とした以外は実施例 1と同様に処理した。ピール強度は 0. 9kgfZcmとなった  The same treatment as in Example 1 was conducted except that the silica-based filler was changed to an alumina-based filler (Showa Denko KK, maximum particle size 30 m, average particle size 4 m). Peel strength was 0.9kgfZcm
[0033] 比較例 1 [0033] Comparative Example 1
実施例 1で表面処理を行わないフィラーを用い、フイラ一入り絶縁榭脂を作り、通常 の Sn—Pdコロイドでの無電解銅めつき(0. 3 μ m厚)とその後電気銅めつき(硫酸銅 めっき液、電流密度 1. 5AZdm2、 35 m厚)を実施した。ピール強度は O. lkgfZc mと低かった。 比較例 2 Using fillers that were not surface-treated in Example 1, insulating filler containing filler was prepared, and electroless copper plating (0.3 μm thick) with normal Sn—Pd colloid, followed by electrolytic copper plating ( Copper sulfate plating solution, current density 1.5AZdm 2 , 35 m thickness). The peel strength was as low as O. lkgfZc m. Comparative Example 2
実施例 2で表面処理を行わないフィラーを用い、フイラ一入り絶縁榭脂を作り、通常 の Sn— Pdコロイドでの無電解銅めつき(0.3 m厚)とその後の電気銅めつき(硫酸 銅めつき液、電流密度 1. 5AZdm2、 35 /z m厚)を実施した。ピール強度は 0.6kgf Using fillers that were not surface-treated in Example 2, a filler-filled insulating resin was prepared, and electroless copper plating (0.3 m thick) with ordinary Sn-Pd colloid and subsequent electrolytic copper plating (copper sulfate) Plating solution, current density 1.5 AZdm 2 , 35 / zm thickness). Peel strength is 0.6kgf

Claims

請求の範囲 The scope of the claims
[1] シランカップリング剤を含む溶液と貴金属化合物を含む溶液それぞれにより、または それらの混合溶液により表面処理された榭脂用フイラ一。  [1] A resin filler that has been surface-treated with a solution containing a silane coupling agent and a solution containing a noble metal compound, or a mixed solution thereof.
[2] フィラーがシリカである請求の範囲第 1項記載の榭脂用フイラ一。  [2] The resin filler according to claim 1, wherein the filler is silica.
[3] シランカップリング剤がァゾール系化合物またはァミン化合物とエポキシシラン系化 合物との反応により得られたシランカップリング剤である請求の範囲第 1項または第 2 項に記載の榭脂用フイラ一。  [3] The silane coupling agent according to claim 1 or 2, wherein the silane coupling agent is a silane coupling agent obtained by a reaction of an azole compound or an amine compound and an epoxy silane compound. Fira.
[4] 貴金属化合物がパラジウム化合物である請求の範囲第 1項〜第 3項のいずれかに記 載の榭脂用フイラ一。 [4] The resin filler according to any one of claims 1 to 3, wherein the noble metal compound is a palladium compound.
[5] 請求の範囲第 1項〜第 4項のいずれかに記載の榭脂用フイラ一を配合した榭脂基材  [5] A resin base material containing the resin filler according to any one of claims 1 to 4
[6] 榭脂基材の榭脂がエポキシ榭脂である請求の範囲第 5項記載の榭脂基材。 6. The resin substrate according to claim 5, wherein the resin of the resin substrate is an epoxy resin.
[7] 請求の範囲第 5項または第 6項に記載の榭脂基材に無電解めつきを施した電子部品 基材。 [7] An electronic component base material obtained by electroless plating the resin base material according to claim 5 or 6.
[8] 電子部品基材がビルドアップ基板である請求の範囲第 7項記載の電子部品基材。  8. The electronic component base material according to claim 7, wherein the electronic component base material is a build-up substrate.
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JP2009173846A (en) * 2007-12-27 2009-08-06 Sekisui Chem Co Ltd Organically-modified inorganic oxide microparticle, manufacturing method thereof, dispersion slurry thereof, and resin composition
GB2444010B (en) * 2005-09-15 2010-12-08 Sekisui Chemical Co Ltd Resin composition, sheet-like formed body, prepreg, cured body, laminate, and multilayer laminate
JP2014129529A (en) * 2012-12-28 2014-07-10 Samsung Electro-Mechanics Co Ltd Silica surface modified by alkyl sulfonated tetrazole compound, its manufacturing method and resin composition containing the same
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GB2444010B (en) * 2005-09-15 2010-12-08 Sekisui Chemical Co Ltd Resin composition, sheet-like formed body, prepreg, cured body, laminate, and multilayer laminate
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