WO2006064445A1 - Procede sequentiel a sondes multiples destine a la mesure de la rectitude d'une regle d'ajusteur - Google Patents

Procede sequentiel a sondes multiples destine a la mesure de la rectitude d'une regle d'ajusteur Download PDF

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Publication number
WO2006064445A1
WO2006064445A1 PCT/IB2005/054175 IB2005054175W WO2006064445A1 WO 2006064445 A1 WO2006064445 A1 WO 2006064445A1 IB 2005054175 W IB2005054175 W IB 2005054175W WO 2006064445 A1 WO2006064445 A1 WO 2006064445A1
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WO
WIPO (PCT)
Prior art keywords
straightedge
carriage
measurement
along
straightness
Prior art date
Application number
PCT/IB2005/054175
Other languages
English (en)
Inventor
Antonius M. Rijken
Martinus A. M. Cuppen
Erik J. M. Janssen
Theo A. M. Ruijl
Original Assignee
Koninklijke Philips Electronics N.V.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips Electronics N.V. filed Critical Koninklijke Philips Electronics N.V.
Priority to EP05824115A priority Critical patent/EP1828715A1/fr
Priority to JP2007546258A priority patent/JP2008524576A/ja
Publication of WO2006064445A1 publication Critical patent/WO2006064445A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/20—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring contours or curvatures, e.g. determining profile
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/20—Measuring arrangements characterised by the use of mechanical techniques for measuring contours or curvatures
    • G01B5/207—Measuring arrangements characterised by the use of mechanical techniques for measuring contours or curvatures using a plurality of fixed, simultaneously operating transducers

Definitions

  • the invention relates to a sequential multi-probe method for measurement of straightness of a straightedge using a multi-probe device for sequential measurements along the straightedge using a carriage moving along a guide way.
  • the invention also relates to an apparatus for measuring position errors in a machine having a movable element, and a straightedge and a measurement system for measurement of the straightness of the straightedge, said measurement system comprising a multi-probe device for sequentially measuring along the straightedge using a carriage moving along a guide way.
  • the invention also relates to a measurement system for measurement of the straightness of the straightedge, said system comprising a multi-probe device for sequentially measuring along the straightedge using a carriage moving along a guide way.
  • Machine tools and multi-axis machinery require a high standard precision in line with the development of high precision engineering. High precision in manufacturing can only be accomplished if it is possible to measure and calculate accurately the errors of machine components.
  • Coordinate measurement machines are used for 1- 2 or 3 dimensional inspection of work pieces such as machine parts.
  • a work piece is typically secured to a fixed table, and a measuring probe is used which is movable in one, two or three dimensions.
  • the probe In brought into contact with the point or in other ways for instance capacitively a measurement is made, and measuring scales or other sensors on the machine are read.
  • Probes may be of any type, the probes may contact probes which make contact with the straightedge, may be optical probes, or may be contactless probes based on Eddy currents or capacitance.
  • the position of the point is typically expressed as X, Y and/or Z coordinates within a working volume of the machine.
  • coordinate measuring machines typically have features such as high resolution measuring systems, electrical contact probes, motor drives, computer controlled drives and computer acquisition and processing of data.
  • a moving bridge machine One type of coordinate measuring machine is known as a moving bridge machine.
  • a bridge moves in the Y direction along guide ways on a table.
  • a carriage moves in the X direction along guide ways on the bridge.
  • Scales associated with each of the movable elements indicate the positions of the movable elements in three axial directions.
  • the accuracy of a coordinate measuring machine is limited by inaccuracies in the scales or other measuring devices, and by faults in the guide ways or other elements which define machine motions.
  • One approach to increasing accuracy is simply to improve the construction techniques and to reduce tolerances of the system so that errors are reduced.
  • the reduction of errors becomes progressively more expensive as required accuracies increase and as the size of the work pieces increase.
  • a precision straightedge is used as a means of calibration of linearity in the direction along the straightedge.
  • the current solution to straightness calibration is to measure the 'individual machine fault' of the individual machine with (often) laser measurement tools and store it. Then all kind of efforts are made to keep conditions the same, so that the 'individual machine fault' stays the same. This requires a very good control over conditions such as temperature and humidity, the use of often (very) expensive materials such as Zerodur and invar to reduce as much as possible any deviation of the established 'individual machine fault'. Even then, the measurement procedure has to be regularly repeated after any service activity that could have affected the configuration.
  • Li et al describe in SPIE vol. 2101 Measurement technology and intelligent Instruments (1993), page 483 describe a sequential-three-points method for measurement of the straightness of precision straightedges.
  • Multi-probe' measurement means within the concept of the present invention, that at least three probes are used. In such measurement a carriage in which three probes are provided is moved along a guide way and sequentially sets of points (at least three) are measured on the straightedge. Using the sets of measured points, Li et al state that it is possible to calculate the straightness of the straightedge, independent of the errors in guide way or yaw error of the carriage.
  • the method, apparatus and system is characterized in that the carriage is moved along one surface of the straightedge to take measurements, and is subsequently moved along an opposite surface of the straightedge to take measurements.
  • the invention is based on the insights that: Ideally, the sequential multi-probe measurement should be free of systematically errors in guide way or carriage, however, the inventors have realized that a systematic error persists.
  • a carriage is any means or device(s) by which the three or more probes are positioned in respect of each other, it need not be a single unity
  • 'guide way' is any means or device(s) by which the carriage is moved along the straightedge and "rotating the carriage' comprises any method in which the position of the three or more probes is changed such that, thereafter, the position of the probes in respect to each other is changed in accordance with a rotation along one or more of said axes. It is not necessary for the method in accordance with the invention that the guide ways at both sides of the straightedge are identical, as will be explained below, although for reasons of manufacturing it is preferred that they are similar.
  • the method in accordance with the invention allows a continuous measurement of straightness of the straightedge, reducing any error that may occur due to changes in conditions in between measurements of the straightness of the straightedge, and making in-line measurements possible.
  • Fig. 1 is a schematic drawing of a x-y moving machine.
  • Fig. 2 shows an example of a precision gauge straightedge on a machine as shown in Fig. 1.
  • Figs. 3 and 4 illustrate the three probe sequential method.
  • Fig. 5 illustrates a systematic error
  • Fig. 6 illustrates that the probe probes at opposite surfaces of the straightedge.
  • Figs. 7 and 8 illustrate two different arrangements for the probe at opposite surfaces of the straightedge.
  • Figs. 9 to 12 illustrate measurements.
  • FIG. 1 is a schematic drawing of a x-y moving machine 1.
  • the machine has a moving part 2 for moving a part A over a table B in two perpendicular directions x and y.
  • Such machine may be any kind of precision machinery.
  • Machine tools and multi-axis machinery require a high standard precision in line with the development of high precision engineering. High precision in manufacturing can only be accomplished if it is possible to measure and calculate accurately the errors of machine components.
  • the current solution to straightness calibration is to measure the 'individual machine fault' of the individual machine with (often) laser measurement tools and store it. Then all kind of efforts are made to keep conditions the same, so that the 'individual machine fault' stays the same. This requires a very good control over conditions such as temperature and humidity, the use of often (very) expensive materials such as Zerodur and invar to reduce as much as possible any deviation of the established 'individual machine fault'. Even then, the measurement procedure has to be repeated at regular intervals, e.g. bi-yearly, and after any service activity that could have affected the configuration. In order to be able to measure accurately a gauge must be available. However, this gauge has to be measured also. Ultimately, therefore, the accuracy of the gauge determines the accuracy of manufacturing.
  • FIG. 2 shows schematically the position of such a straightedge 3.
  • a measuring device 4 is used, in which three probes 4a, 4b and 4c are provided. The measuring device is moved along a guide way G(x) and at intervals the position S(x) is sequentially measured. Thus, sequentially measurements using three probes are taken, which is the reason that this method is called the sequential three probe method.
  • a relatively large number of unknown parameters play a part. First of all the to be measured surface S(x) is a priori unknown. Secondly the guide way G(x) is unknown, thirdly, the yaw angle ⁇ of device 4 is unknown.
  • probe 4a measures a distance a(n) between the guide way G(x) and the surface S(x) at position n.
  • probe 4b measures a distance b(n) between the guide way and the surface at position n+1 and probe 4c measures a distance c(n).
  • b(n) G(n)-S(n+1)+L ⁇ (n), where ⁇ (n) is the yaw error at position n.
  • c(n) G(n)-S(n+2)+2L ⁇ (n).
  • a(n)-2b(n)+c(n) -S(n)+2S(n+l)-S(n+2).
  • a(n+l )-2b(n+l )+c(n+l ) -S(n+l )+2S(n+2)-S(n+3).
  • a(n+2)-2b(n+2)+c(n+2) -S(n+2)+2S(n+3)-S(n+4).
  • the sequential three probe measurement method is based on such calculations.
  • the center probe 4b may be offset by an amount ⁇ in respect of a straight line through the outer probes 4a and 4c. This offset is a fixed offset, independent of the value n.
  • a(n) G(n)-S(n).
  • b(n) G(n)-S(n+l) - ⁇ +L ⁇ (n)
  • c(n) G(n)-S(n+2)+2L ⁇ (n).
  • a(n)-2b(n)+c(n) -S(n)+2S(n+l)+ ⁇ -S(n+2).
  • a(n+l )-2b(n+l )+c(n+l ) -S(n+l )+2S(n+2)+ ⁇ -S(n+3).
  • a(n+2)-2b(n+2)+c(n+2) -S(n+2)+2S(n+3)+ ⁇ -S(n+4).
  • the unknown parameter ⁇ influences the outcome of the equations.
  • an error in measurement occurs which is cumulative, i.e. whereas at the first point the error is small ( ⁇ ) at the n 411 point the error is approximately n(n-l) ⁇ .
  • the systematic error ⁇ may be small, due to the cumulative influence, the error in measurement may be large.
  • the size of the device has a tendency to increase and the number of measurement points also, so that this systematic error becomes appreciable.
  • Figure 6 illustrates the method and device in accordance with the invention.
  • the device 4 with the probes 4a, 4b and 4c is moved along one surface S (x) of the straightedge 3, and measurements are taken.
  • the device is then brought to the opposite surface of the straightedge 3, to measure the opposite surface S'(x) of the straightedge 3.
  • Figure 7 and 8 illustrates two different configurations.
  • the device 4 may, at opposite surfaces of the straightedge be oriented, such that probe 4a faces probe 4a or faces probe 4c, i.e. the same probes face each other.
  • Figure 7 the same probes face each other
  • Figure 8 different probes face each other, i.e.
  • Figure 9 illustrates measured values ( ⁇ +S(x)) in arbitrary units (a.u) as a function of x in arbitrary units (a.u) as determined by the common sequential three probe method.
  • the thickness of the straightedge can be controlled to a very high accuracy, and is also hardly dependent on other parameters such as temperature and humidity, that may have an appreciable influence on the straightness of the straightedge. It is to be noted, that one could think that the scheme could only work if the two guide ways (G(x)) and the yaw error ( ⁇ (x)) are the same for the opposite surfaces of the straightedge. This would, if true, pose a serious limitation on the method, since it is hardly likely that this would be the case. However, this is not the case, G(x) and ⁇ (x) drop out of the equations at both sides of the straightedge 3, and independent of each other.
  • said measurement system comprises a multi-probe (4a, 4b, 4c) device (4) for sequentially measuring along the straightedge (3) using a carriage (4) moving along a guide way (G(x)).
  • the carriage (4) is moved along one surface (S(x)) of the straightedge (3) to take measurements, is then transferred to an opposite surface (S'(x)) of the straightedge (3) and moved along the opposite surface of the straightedge (3) to take measurements.
  • a three-probe method is used, but more than three probes could be used. On the one hand an additional error would be introduced, however, also additional information would be available. In preferred embodiments a three probe method is used.
  • a straightedge may be provided in one direction or two or more directions.
  • the method of the invention works, since the deviations in thickness are much better controllable than the deviations in straightness.
  • the dimensions of the straightedge are for instance typically 5 mm (thickness) by 2-3 meters (length).
  • the thickness of the straightedge can during manufacturing be controlled to within micrometers.
  • One type of systematic error would be a systematic change in thickness of the straightedge along its length.
  • Such a systematic, known change in thickness along the length of the straightedge can be accounted for in the measurements by accurately measuring the variation of thickness of the straightedge along the straightedge before putting it in the apparatus or while in the apparatus, and accounting for such variation when comparing the measurements at opposite surfaces of the straightedge.
  • a simple look-up table comprising such systematic deviation as a function of position along the straightedge would suffice.
  • Deviations due to temporal influences on the thickness of the straightedge, such as temperature variations, would then not be accounted for, but such errors are orders of magnitude less than the deviations of straightness.
  • the straightedge may have the form of a lath or a plate, or any suitable shape or form.
  • the probes do not need to be all on one side of the straightedge. For instance, a number n (n ⁇ l) of probes could be probing a first surface of the straightedge, while simultaneously m (m ⁇ l), wherein n+m> 3, probes probe the opposite surface of the straightedge.
  • the method would then comprise taking measurements along one direction, where after, the carriage is rotated so that the m probes probe the first surface, and the n probes probe the opposite surface, and the measurements are repeated.
  • either the carriage may be transferred to an opposite side of the straightedge leaving the straight edge in position, or the carriage is left in position and the straight edge is turned around so that the opposite surface faces the carriage.
  • the straight edge is convex or concave (i.e. having a form departing from a true straight edge) due to an intrinsic curvature in the straightedge a curvature in the straightedge due to the mounting (e.g. clamping or screwing) of the straightedge.
  • the present method, apparatus and system is suitable for on-line measurement.
  • An apparatus as described regularly travels along the straightedge, during such travels back and forth, the carriage, when it has reached a final position, is changed in position so that the probes which before such change were probing one surface, are thereafter probing the opposite surface.
  • the temporal influence such as temperature and humidity do not change to much, the method allows on-line accurate calibration of straightness. It is emphasized that the change in position of the probes, i.e. from one surface of the straightedge to the opposite, makes it possible to perform such accurate and in-line measurement.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)

Abstract

L'invention concerne un système et un procédé de mesure de la rectitude d'une règle d'ajusteur, le système de mesure comprenant un dispositif (4) à sondes multiples (4a, 4b, 4c) permettant d'effectuer des mesures séquentielles le long de la règle d'ajusteur (3), au moyen d'un chariot (4) se déplaçant le long d'un chemin guide (G(x)). Le chariot (4) est déplacé le long d'une surface (S (x) ) de la règle d'ajusteur (3), afin de prendre des mesures, puis est transféré vers une surface opposée (S (x) ) de la règle d'ajusteur (3) et déplacé le long de la surface opposée de celle-ci (3), aux fins de prises de mesures. L'addition et la soustraction des points de mesure pris au niveau des surfaces opposées de la règle d'ajusteur permettent d'identifier une erreur systématique engendrée par la sonde, la mesure de la rectitude de la règle d'ajusteur étant ainsi améliorée. Des erreurs dans la fabrication et les mesures de pièces à usiner et d'autres parties peuvent ainsi être réduites. Les procédé et appareil peuvent également être utilisés pour des étalonnages en ligne de la rectitude.
PCT/IB2005/054175 2004-12-16 2005-12-12 Procede sequentiel a sondes multiples destine a la mesure de la rectitude d'une regle d'ajusteur WO2006064445A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP05824115A EP1828715A1 (fr) 2004-12-16 2005-12-12 Procede sequentiel a sondes multiples destine a la mesure de la rectitude d'une regle d'ajusteur
JP2007546258A JP2008524576A (ja) 2004-12-16 2005-12-12 直定規の直線度測定のための順次式マルチプローブ法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP04106644 2004-12-16
EP04106644.0 2004-12-16

Publications (1)

Publication Number Publication Date
WO2006064445A1 true WO2006064445A1 (fr) 2006-06-22

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EP (1) EP1828715A1 (fr)
JP (1) JP2008524576A (fr)
CN (1) CN101080609A (fr)
WO (1) WO2006064445A1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4980817B2 (ja) * 2007-08-07 2012-07-18 株式会社ナガセインテグレックス 多点プローブの零点誤差関連値記録装置
JP4980818B2 (ja) * 2007-08-07 2012-07-18 株式会社ナガセインテグレックス 多点プローブの零点誤差の変動検出方法
JP5210911B2 (ja) * 2009-02-03 2013-06-12 株式会社ナガセインテグレックス 形状測定装置
CN102519408B (zh) * 2011-12-12 2013-09-11 陕西宝成航空仪表有限责任公司 用三坐标测量机一次测量多个零件的方法
CN103673844A (zh) * 2013-12-03 2014-03-26 高玉树 一种管、棒直度检测尺

Citations (3)

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Publication number Priority date Publication date Assignee Title
US4048849A (en) * 1974-07-22 1977-09-20 Nippon Kokan Kabushiki Kaisha Method and apparatus for measuring surface flatness of material
US4084324A (en) * 1975-04-23 1978-04-18 The Rank Organisation Limited Measuring instrument
US5205046A (en) * 1991-06-05 1993-04-27 Ford Motor Company Method for measuring surface waviness

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4048849A (en) * 1974-07-22 1977-09-20 Nippon Kokan Kabushiki Kaisha Method and apparatus for measuring surface flatness of material
US4084324A (en) * 1975-04-23 1978-04-18 The Rank Organisation Limited Measuring instrument
US5205046A (en) * 1991-06-05 1993-04-27 Ford Motor Company Method for measuring surface waviness

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
LI SHENG-YI, TAN JIE, PAN PEI-YUAN: "Fine sequential-three-points method for on-line measurement of the straightness of precision lathes", PROCEEDINGS OF THE SPIE - MEASUREMENT TECHNOLOGY AND INTELLIGENT SYSTEMS, vol. 2101, 1993, pages 483 - 487, XP002374583 *

Also Published As

Publication number Publication date
EP1828715A1 (fr) 2007-09-05
JP2008524576A (ja) 2008-07-10
CN101080609A (zh) 2007-11-28

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