WO2006041026A1 - Liquid honing machine and liquid honing method - Google Patents

Liquid honing machine and liquid honing method Download PDF

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Publication number
WO2006041026A1
WO2006041026A1 PCT/JP2005/018620 JP2005018620W WO2006041026A1 WO 2006041026 A1 WO2006041026 A1 WO 2006041026A1 JP 2005018620 W JP2005018620 W JP 2005018620W WO 2006041026 A1 WO2006041026 A1 WO 2006041026A1
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WO
WIPO (PCT)
Prior art keywords
liquid
cleaning
workpiece
zone
honing
Prior art date
Application number
PCT/JP2005/018620
Other languages
French (fr)
Japanese (ja)
Inventor
Nobuhiko Hisata
Original Assignee
Showa Denko K.K.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Denko K.K. filed Critical Showa Denko K.K.
Priority to EP05790634A priority Critical patent/EP1813386A4/en
Priority to CN2005800340360A priority patent/CN101035649B/en
Publication of WO2006041026A1 publication Critical patent/WO2006041026A1/en

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24CABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C3/00Abrasive blasting machines or devices; Plants
    • B24C3/02Abrasive blasting machines or devices; Plants characterised by the arrangement of the component assemblies with respect to each other
    • B08B1/20
    • B08B1/32
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24CABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C11/00Selection of abrasive materials or additives for abrasive blasts
    • B24C11/005Selection of abrasive materials or additives for abrasive blasts of additives, e.g. anti-corrosive or disinfecting agents in solid, liquid or gaseous form
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24CABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C3/00Abrasive blasting machines or devices; Plants
    • B24C3/08Abrasive blasting machines or devices; Plants essentially adapted for abrasive blasting of travelling stock or travelling workpieces
    • B24C3/085Abrasive blasting machines or devices; Plants essentially adapted for abrasive blasting of travelling stock or travelling workpieces the travelling workpieces being moved into different working positions during travelling
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24CABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C3/00Abrasive blasting machines or devices; Plants
    • B24C3/08Abrasive blasting machines or devices; Plants essentially adapted for abrasive blasting of travelling stock or travelling workpieces
    • B24C3/10Abrasive blasting machines or devices; Plants essentially adapted for abrasive blasting of travelling stock or travelling workpieces for treating external surfaces
    • B24C3/12Apparatus using nozzles
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03GELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G5/00Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
    • G03G5/10Bases for charge-receiving or other layers

Definitions

  • the present invention relates to a liquid hounging force machine and a liquid hounging carriage method for liquid hounging various workpieces such as a precision pipe blank and a photosensitive drum base pipe blank.
  • a photosensitive drum base that supports a photoconductive photosensitive layer such as selenium or an organic photosensitive member is aluminum (including an alloy thereof) or the like. It is formed from a metal pipe. This pipe is required to have high dimensional accuracy (eg, straightness) and high surface accuracy to obtain a high-quality image.
  • this pipe is manufactured from a raw tube obtained by drawing, but such a raw tube often has a non-uniform surface state. Therefore, conventionally, in order to make the surface of the raw tube uniform (for example, uniformly roughened), the surface of the raw tube is subjected to a liquid honing treatment. Further, since foreign matter such as abrasive grains adheres to the surface of the raw tube subjected to the liquid houng treatment, the raw tube is washed to remove this foreign matter (for example, Patent Document 1 and 2).
  • Patent Document 1 Japanese Patent Laid-Open No. 2001-296679
  • Patent Document 2 Japanese Patent Application Laid-Open No. 2004-246124
  • a hounging zone for performing liquid howing treatment on the raw tube, and cleaning treatment on the raw tube subjected to liquid honing treatment
  • the cleaning zone is provided adjacent to each other in a housing cut off from the outside air.
  • this liquid Hoyungkae machine has the following difficulties. That is, in this liquid hounging machine, the abrasive grains in the honing liquid used in the hounging zone are scattered and floated (drifted) in the atmosphere gas in the hounging zone during the liquid hounging process.
  • the present invention has been made in view of the above technical background, and an object of the present invention is to provide a liquid hounging machine capable of preventing contamination of the cleaning zone, and a pipe manufacturing apparatus using the liquid hounging machine. Another object of the present invention is to provide a liquid houng processing method and a liquid honing processed product obtained by this method.
  • the present invention provides the following means.
  • a hounging zone for liquid hounging a work and a cleaning zone for washing a work subjected to liquid honing in the hounging zone are provided adjacent to each other in a housing cut off from outside air.
  • a partition that prevents atmospheric gas in the hounging zone from flowing into the washing zone is disposed between the hounging zone and the washing zone in the housing,
  • a liquid hoisting carriage having a submerged transporting device in the housing.
  • the submerged conveying device includes a mounting plate portion on which a workpiece is mounted, an arm portion provided in a protruding manner on the mounting plate portion, and a suspension provided on an upper end portion of the arm.
  • a rail portion extending in the workpiece transfer direction is provided at the upper end of the side wall of the transfer tank. It is provided in a non-immersed state with respect to the liquid in the tank,
  • the transport table is disposed in the transport tank in a state in which the hanging portion is hung on the rail portion,
  • the submerged transfer device moves the work mounted on the mounting plate portion of the transfer table in the transfer tank by moving the hanging portion in a sliding state on the rail portion in the work transfer direction. 3.
  • a liquid hogging machine as described in 1 or 2 above, which is transported while immersed in liquid.
  • the submerged transport device has a jet nozzle that ejects and supplies liquid into the transport tank so that the liquid flows in a direction opposite to the workpiece transport direction in the transport tank.
  • the liquid hounging machine according to any one of the preceding items 1 to 6.
  • a liquid Hoyungkae machine according to item 1.
  • the submerged transfer device is formed such that a bottom surface of the transfer tank is inclined upward in a workpiece transfer direction with respect to a horizontal plane. Liquid hounging machine.
  • a hounging unit that performs a liquid honing process on the workpiece
  • a shower cleaning unit that performs a shower cleaning process on the workpiece that has been liquid hounged in the honing unit
  • a liquid honing process in the honing unit A honing tank having a transfer unit for transferring the workpiece to the shower cleaning unit from the honing unit,
  • the honing tank has a workpiece inlet, a workpiece outlet, and an open / close lid corresponding to each of the workpiece inlet and outlet.
  • the hounging zone includes a hounging unit that performs a liquid hounging process on the workpiece, a first shower cleaning unit that performs a shower cleaning process on the work subjected to the liquid hounging process in the hounging unit, and a liquid in the hounging unit.
  • a honing tank having a conveying section for conveying a houng-treated work from the honing section to the first shower cleaning section is disposed inside the hounging zone.
  • a first transport device that transports to a section, and a second transport device that transports the workpiece cleaned by the first shower cleaning section from the first shower cleaning section to the submerged transport apparatus In the cleaning zone, a second shower cleaning unit that performs a shower cleaning process on the cake transported to the cleaning zone by the submerged transport device, and a scrub cleaning process on the workpiece that has been cleaned by the second shower cleaning unit Scrub cleaning units arranged in a plurality of stages, a third shower cleaning unit for shower cleaning the workpiece cleaned by the scrub cleaning unit, and a workpiece cleaned by the third shower cleaning unit immersed in the cleaning liquid
  • An immersion cleaning unit that performs a cleaning process a pull drying unit that performs a drying process by immersing the workpiece cleaned in the immersion cleaning unit in a high-temperature liquid and pulling it up from the high-temperature liquid, and the submerged conveyance device
  • a third transfer device for sequentially transferring the work transferred to the cleaning zone from the submerged transfer device to the cleaning unit and the pulling and drying unit.
  • the scrub cleaning unit is provided with a scrub cleaning device
  • the scrub cleaning device includes a workpiece rotation driving device that rotates a workpiece by its own axis, a columnar or cylindrical rubbing member that is a porous soft body force of continuous pores, and a surface of the rubbing member that is in contact with the surface of the workpiece.
  • a rubbing member rotation driving device for rotating the rubbing member in its own axis and a pressing member for pressing the surface of the rubbing member during cleaning, and the cleaning liquid is passed through the rubbing member from the inside of the rubbing member. 18.
  • a honing zone for liquid hounging a columnar or cylindrical workpiece A cleaning zone for cleaning workpieces that have been liquid hounged in the hounging zone.
  • a partition that prevents atmospheric gas in the hounging zone from flowing into the washing zone is disposed between the hounging zone and the washing zone in the housing,
  • the work subjected to the liquid houng treatment in the houng zone is immersed in the liquid in the transfer tank, and the honing zone force is passed through the work passage opening provided in the partition wall to the cleaning zone.
  • a submerged conveying device for conveying is provided in the housing,
  • a scrub cleaning unit is disposed for scrub cleaning the cake transported to the cleaning zone by the submerged transport device,
  • the scrub cleaning device includes a workpiece rotation driving device that rotates a workpiece by its own axis, a columnar or cylindrical rubbing member that is a porous soft body force of continuous pores, and a surface of the rubbing member that is in contact with the surface of the workpiece.
  • a rubbing member rotation driving device for rotating the rubbing member in its own axis and a pressing member for pressing the surface of the rubbing member during cleaning, and the cleaning liquid is passed through the rubbing member from the inside of the rubbing member.
  • a liquid hounging carriage configured to exude to the outside of the surface of the rubbing member.
  • the rubbing member rotation driving device of the scrub cleaning apparatus is configured to be able to control a peripheral speed of the rubbing member in a range of at least 0 to 650 mmZs, and the workpiece rotation driving device includes the work rotation driving device.
  • the scrub cleaning apparatus includes a work support member attached to an end surface of the work,
  • the rubbing member of the scrub cleaning device is cylindrical
  • the scrubbing member of the scrub cleaning device is disposed substantially vertically, and one of the upper and lower ends of the cleaning liquid supply pipe is formed in a closed shape, and the cleaning liquid supply pipe 32.
  • the porous soft body of the rubbing member of the scrub cleaning device is any one of PVA resin, polyethylene resin, polyether resin, butyl acetate resin, and polyurethane resin.
  • a pipe manufacturing apparatus wherein the liquid honing machine according to any one of the preceding items:! To 35 is used as the liquid honing machine.
  • a houng zone for performing a liquid honing process on a workpiece and a cleaning zone for cleaning a work subjected to a liquid houng process in the honing zone are provided adjacent to each other in a housing that is blocked from outside air.
  • a liquid horning machine in which a partition wall is disposed between the hounging zone and the cleaning zone in the housing to prevent an atmospheric gas in the hounging zone from flowing into the cleaning zone.
  • the workpiece that has been liquid houng treated in the hounging zone is immersed in the liquid in the transport tank, and is transported from the honing zone through the workpiece passage opening provided in the partition wall to the cleaning zone.
  • a liquid houng processing method for cleaning the workpiece in the cleaning zone is provided.
  • the workpiece is immersed in the liquid in the transfer tank and transferred to the cleaning zone while jetting gas into the liquid in the transfer tank to generate bubbles. Liquid houng processing method.
  • the liquid in the transfer tank is discharged from the upper end of the side wall of the transfer tank on the hounging zone side.
  • 43. The liquid honing / cage method according to any one of items 39 to 42, wherein the work is conveyed to the cleaning zone in a state where the work is immersed in the liquid in the conveyance tank while overflowing.
  • the cleaning liquid is jetted toward the work while the work transported to the cleaning zone side in the transport tank is pulled up to the liquid force in the transport tank. Liquid Honinka Kaye method.
  • a hounging unit that performs a liquid honing process on the workpiece
  • a shower cleaning unit that performs a shower cleaning process on the workpiece that has been liquid hounged in the honing unit
  • a liquid honing process in the honing unit A honing tank having a transfer unit for transferring the workpiece to the shower cleaning unit from the honing unit,
  • the workpiece is liquid hounged in the hounging section, and then the workpiece is transported from the honing section to the shower cleaning section by the transport section, and then the workpiece is shower washed in the shower cleaning section. And then subjecting the cake to transport to the cleaning zone,
  • the workpiece transferred to the cleaning zone is subjected to a shower cleaning process, and the workpiece is sequentially scrubbed and cleaned in a scrub cleaning section arranged in a plurality of stages in the next stage.
  • the preceding items 39 to 47 wherein the workpiece is subjected to a shower cleaning treatment and then washed by immersing the workpiece in a cleaning solution, and then dried by immersing the workpiece in a high temperature solution and pulling it up from the high temperature solution.
  • the liquid Houngungkaro method according to any one of the above.
  • the housing is provided adjacent to each other in a housing that is shielded from outside air, and the atmosphere gas in the hounging zone is prevented from flowing into the washing zone between the hounging zone and the washing zone in the housing.
  • the work that has been liquid houng treated in the hounging zone is immersed in the liquid in the transport tank, and is passed from the hounging zone to the cleaning zone through the work passage opening provided in the partition wall.
  • the surface of the columnar or cylindrical rubbing member made of a porous soft body having continuous pores is brought into contact with the surface of the workpiece, and the surface of the rubbing member is pressed by the pressing member, and the cleaning liquid is supplied. While exuding from the inside of the rubbing member to the outer surface of the rubbing member through the continuous pores, the workpiece and the rubbing member are placed in the same direction. Liquid Houng Karoe method that scrubs and cleans workpieces by rotating their own axes.
  • the peripheral speed of the rubbing member is set in a range of 100 to 500 mmZs, the peripheral speed of the workpiece is set in a range of 50 to 200 mm / s, 55.
  • the workpiece supporting member force is attached to at least one end surface of both end surfaces of the workpiece, and the surface of the workpiece and the peripheral surface of the workpiece supporting member are mounted so as to be flush with each other in the axial direction of the workpiece.
  • the liquid houng processing method according to any one of -58.
  • the pressing member In the state where the surface of the rubbing member is pressed by the pressing member, the pressing member is arranged to be inclined rearward in the rotation direction of the rubbing member.
  • the liquid Houngungkae method according to item 60 which is set in a range of 0 to 45 °.
  • the pressing member is a plate-shaped member having one side edge as a pressing portion.
  • the rubbing member is cylindrical
  • a plurality of cleaning liquid outflow holes are provided in the peripheral wall, and a cleaning liquid supply pipe for supplying the cleaning liquid to the inside of the rubbing member is inserted and arranged in the axial direction of the rubbing member,
  • the workpiece and the rubbing member are each arranged substantially vertically,
  • the porous soft body is formed of any one of foams of PVA resin, polyethylene resin, polyether resin, vinyl acetate resin, and polyurethane resin.
  • the liquid honing method according to any one of -65.
  • the present invention has the following effects.
  • the liquid honing process and the cleaning process can be sequentially performed on the workpiece, so that mass productivity is improved.
  • the partition wall is disposed between the honing zone and the cleaning zone in the housing, foreign matter such as abrasive particles or the like floating in the atmosphere gas of the hounging zone. Can be prevented by this partition. Therefore, contamination of the cleaning zone due to inflow of foreign matter floating in the atmosphere gas in the houng zone to the cleaning zone can be prevented.
  • the workpiece subjected to the liquid houng treatment in the hounging zone is immersed in the liquid in the conveying tank by the submerged conveying device, and passes through the workpiece provided in the partition from the hounging zone. Since the workpiece is passed through the cleaning opening and transported to the cleaning zone, foreign matters such as abrasive grains adhering to the workpiece are removed when the workpiece is immersed in the liquid in the transport tank when the workpiece is transported. The As a result, foreign matter adhering to the workpiece can be prevented from being brought into the cleaning zone with the workpiece while remaining attached to the workpiece, and contamination of the cleaning zone due to foreign matter adhering to the workpiece being brought into the cleaning zone can be prevented. can do.
  • the liquid hounging machine of the present invention contamination of the cleaning zone due to inflow of foreign matter floating in the atmosphere gas of the honing zone into the cleaning zone can be prevented, and in addition, the workpiece can be prevented from being contaminated. It is possible to prevent contamination of the cleaning zone by bringing foreign matter adhering to the cleaning zone into the cleaning zone, so that the cleaning zone can be maintained at high cleanliness. Therefore, it is possible to prevent the occurrence of poor cleaning.
  • the upper edge of the work passage opening of the partition wall is immersed in the liquid in the transfer tank of the submerged transfer device, so that it floats in the atmospheric gas in the honing zone. It is possible to reliably prevent foreign matter from entering the cleaning zone through the workpiece passage opening. Therefore, the cleanliness of the cleaning zone can be reliably maintained.
  • the cover member can prevent dust generated due to sliding with the rail portion of the hanging portion of the transport table from being scattered to the outside. Therefore, the cleanliness of the cleaning zone can be maintained more reliably.
  • the work can be transported to the cleaning zone in a state where the work is immersed in the liquid in the transport tank while bubbles are generated in the liquid in the transport tank by the bubble generating means.
  • the bubble generating means As a result, foreign matters adhering to the workpiece can be effectively removed during the conveyance of the workpiece, and foreign matters adhering to the workpiece can be reliably prevented from being brought into the cleaning zone.
  • the work is supplied to the liquid in the transfer tank while the liquid is jetted and supplied into the transfer tank by the jet nozzle so that the liquid flows in the direction opposite to the workpiece transfer direction in the transfer tank. It can be transported to the cleaning zone while immersed in it. For this reason, the foreign matter force removed from the workpiece in the liquid in the transfer tank is moved to the houng zone side in the transfer tank by the liquid flow in the transfer tank, thus further ensuring contamination of the cleaning zone. Can be prevented.
  • the liquid can be ejected into the transport tank from the cleaning zone side in the transport tank.
  • the liquid can be ejected toward the workpiece at a position close to the workpiece just before being pulled up from the liquid in the transfer tank, and the removal rate of the foreign matter adhering to the workpiece is improved.
  • the foreign matter floating on the liquid surface in the transport tank overflows with the liquid in the transport tank and is discharged out of the transport tank. Therefore, it is possible to prevent a decrease in the cleanliness of the liquid in the transfer tank, and it is possible to prevent foreign matters from reattaching to the work during the work transfer. Furthermore, foreign matter that has floated to the liquid surface in the transport tank overflows from the upper end of the side wall portion on the honing zone side, not the side wall portion on the cleaning zone side of the transport tank, and is discharged. There is no danger of being contaminated.
  • the cleaning liquid is sprayed by an injection nozzle toward the workpiece that is being pulled up from the liquid in the transfer tank, so that foreign matter that has reattached to the workpiece during transfer or lifting of the workpiece is removed. , Can be removed in the middle of lifting the workpiece.
  • the foreign matter settled in the liquid in the transport tank slides on the bottom surface of the transport tank and is moved to the hounging zone side in the transport tank. Therefore, contamination of the cleaning zone can be prevented more reliably.
  • the cleanliness of the cleaning zone can be improved by supplying a clean atmospheric gas to the cleaning zone by the gas supply device.
  • the foreign gas floating in the atmospheric gas in the houng zone can be removed by sucking the atmospheric gas in the honing zone by the gas suction device, and the houng zone is cleaned.
  • the degree can be improved.
  • outside air outside the housing can be prevented from flowing into the cleaning zone through a gap inevitably generated in the housing, and the cleanliness of the cleaning zone can be reliably maintained.
  • Power S can be.
  • the atmospheric gas in the honing zone is prevented from flowing into the cleaning zone through a gap inevitably generated in the space between the partition wall and the housing and between the transfer tank and the like. And the cleanliness of the cleaning zone can be reliably maintained.
  • the workpiece cleaning efficiency can be further improved by sequentially performing a plurality of predetermined cleaning treatments and drying treatments on the workpiece in the washing zone.
  • the rubbing member of the scrub cleaning device is made of a porous soft body having continuous pores, the rubbing member is present on the surface of the workpiece by contacting the surface of the rubbing member with the surface of the workpiece. It is possible to take in the foreign matter in the pores on the surface of the rubbing member and catch it. Therefore, the foreign matter can be reliably removed from the surface of the workpiece.
  • the foreign matter trapped in the pores can easily be removed, for example, the foreign matter floating on the surface of the rubbing member due to contact with the pressing member. Can be increased. For this reason, it is possible to reliably prevent foreign matters from reattaching to the workpiece surface, and to prevent scratches on the workpiece surface caused by foreign matter remaining in the pores of the surface of the scraping member contacting the workpiece surface. Can do. Therefore, it is possible to reduce the incidence of surface defects on the workpiece.
  • the liquid discharged from the transfer tank can be used effectively.
  • the rubbing member of the scrub cleaning device is made of a porous soft body having continuous pores, the foreign material present on the surface of the workpiece by bringing the surface of the rubbing member into contact with the surface of the workpiece. It is possible to take in the pores on the surface of the rubbing member and capture it. Therefore, the foreign matter can be reliably removed from the surface of the workpiece.
  • the foreign matter trapped in the pores can easily be removed, such as the foreign matter floating on the surface of the rubbing member due to contact with the pressing member. Can be increased. For this reason, it is possible to reliably prevent foreign matters from reattaching to the workpiece surface, and to prevent scratches on the workpiece surface caused by foreign matter remaining in the pores of the surface of the scraping member contacting the workpiece surface. Can do. Therefore, it is possible to reduce the incidence of surface defects on the workpiece.
  • the peripheral speed of the rubbing member and the peripheral speed of the workpiece can be reliably set within predetermined ranges. Then, by rotating the rubbing member and the workpiece by their own axes, foreign objects can be more reliably removed from the surface of the workpiece.
  • the work can be scrub cleaned with the surface of the rubbing member abutting the work surface along the length direction of the work surface. Thereby, the removal amount of foreign matters from the surface of the cake can be increased.
  • the foreign matter can be removed over the entire length direction of the surface of the workpiece.
  • the work can be supported by the work support member by attaching the work support member to at least one of the both end faces of the work.
  • the workpiece support member is mounted on the end surface of the workpiece so that the surface of the workpiece and the peripheral surface of the workpiece support member are flush with each other, the surface of the rubbing member is securely attached to the end of the workpiece surface. The end of the surface of the workpiece can be surely scrubbed.
  • the foreign matter trapped in the pores can be more reliably discharged to the outside.
  • the invention of [30] by pressing the surface of the rubbing member with a plate-like pressing member, a large amount of the cleaning liquid can be surely exuded from the inside of the rubbing member, and the foreign matter is reliably discharged to the outside. Can be discharged.
  • the plate-like pressing member by using this plate-like pressing member, the foreign matter trapped in the pores can be easily removed, and the amount of foreign matter discharged to the outside can be reliably increased.
  • the cleaning liquid can be reliably supplied into the rubbing member.
  • the cleaning liquid supply pipe inserted into the hollow portion of the rubbing member acts as a core (core) for reinforcing the rubbing member, so that the surface of the rubbing member is brought into contact with the surface of the work and the tensile force. It is possible to make it S.
  • the cleaning liquid that has taken in the foreign matters flows down on the surface of the workpiece and the rubbing member in the axial direction during the cleaning, so that the foreign matters can be quickly removed.
  • the force S can be reliably removed from the workpiece surface without damaging the workpiece surface.
  • the foreign matter adhering to the surface of the workpiece can be reliably removed.
  • FIG. 1 is a schematic longitudinal sectional view of a liquid horning machine according to an embodiment of the present invention.
  • FIG. 2 is a schematic sectional view of a honing tank of the liquid honing machine.
  • FIG. 3 is a schematic longitudinal sectional view of a submerged transport device of the liquid honing machine.
  • FIG. 4 is a schematic cross-sectional view of the in-liquid transport device.
  • FIG. 5 is a perspective view of a part of the in-liquid transport device.
  • FIG. 6 Piping diagram of the liquid Hoyungkahe machine.
  • FIG. 7 is a perspective view of a scrub cleaning device of the same liquid Honinda cafe.
  • FIG. 8 is a front view of the scrub cleaning apparatus.
  • FIG. 9 is a sectional view taken along line XX in FIG.
  • FIG. 10 is a longitudinal sectional view of a rubbing member of the scrub cleaning apparatus.
  • FIG. 11 is an exploded view of the scrub cleaning apparatus.
  • FIG. 12A is an enlarged front view mainly showing an upper end portion of a work and a work supporting member in the scrub cleaning apparatus.
  • FIG. 12B is an enlarged front view corresponding to FIG. 12A when the workpiece support member is deformed in FIG. 12A.
  • (1) is a liquid honing machine according to an embodiment of the present invention.
  • This The work (2) processed by the liquid hounging force machine (1) is a base pipe of a precision pipe. More specifically, the base of a photosensitive drum mounted on an electronic copying machine, a laser printer, a facsimile machine, etc. 1 is a base pipe of a pipe used for the above, that is, a pipe for a photosensitive drum substrate.
  • This work (2) (element tube) is a cylindrical one set to a predetermined length, and is drawn from a drawn tube made of aluminum (including its alloy; the same shall apply hereinafter) obtained by drawing.
  • the length of the workpiece (2) is set to 200 to 450 mm
  • the outer diameter is set to 15 to 50 mm
  • the wall thickness is set to 0.5 to 2 mm.
  • the workpiece (2) is not limited to one made of aluminum, but may be made of other metals, or may be made of other materials. . Further, the workpiece (2) may have a cylindrical shape or another shape.
  • a pipe for a photosensitive drum substrate is manufactured by sequentially performing a liquid honing process and a cleaning process on the workpiece (2) (element tube) by the liquid honing machine (1).
  • the liquid honing machine (1) is for sequentially performing a liquid honing process and a cleaning process on the work (2) (element tube) provided in the photosensitive drum substrate pipe manufacturing apparatus.
  • the liquid hounging machine (1) cleans the honing zone (5) for liquid hounging the workpiece (2) and the workpiece (2) subjected to the liquid honing treatment in the honing zone (5).
  • a cleaning zone (6) is provided adjacent to each other in a housing (4) that is shielded from outside air.
  • a partition wall is formed between the hounging zone (5) and the cleaning zone (6) in the housing (4).
  • the partition wall (7) is for preventing the atmospheric gas in the honing zone (5) from flowing into the cleaning zone (6).
  • the atmospheric gas in the honing zone (5), the atmospheric gas in the cleaning zone (6), and the outside air outside the housing (4) are all air.
  • the liquid Honinka machine (1) includes a submerged transport device (10) having a transport tank (11) in the housing (4).
  • the submerged transport device (10) is for transporting the work (2) while being immersed in the liquid (72) in the transport tank (11). 5) With liquid honing treatment The workpiece (2) is immersed in the liquid (72) in the transfer tank (11) and passed through the workpiece passage opening (8) provided in the partition wall (7) from the honing zone (5). To transport to the cleaning zone (6).
  • the liquid (72) in the transfer tank (11) includes water, warm water, pure water, warm pure water, ultra pure water, warm ultra pure water, an organic solvent, or additives (for example, surfactants, detergents). Can be mentioned.
  • the liquid (72) is preferably one in which the temperature, Ph, conductivity, cleanliness, etc. are set within a predetermined range.
  • the transfer tank (11) is disposed across the honing zone (5) and the cleaning zone (6) through the workpiece passage opening (8) of the partition wall (7). ing.
  • the upper edge (8a) of the workpiece passage opening (8) of the partition wall (7) is located below the liquid surface (72a) of the liquid (72) in the transfer tank (11), and the transfer tank (11 ) Is immersed in the liquid (72).
  • the in-liquid transfer device (10) includes a transfer table (12) as shown in Figs.
  • the transfer table (12) has a substantially inverted gate shape, and includes a mounting plate portion (12a) on which one or a plurality of (in this embodiment, seven) workpieces (2) are mounted, and the mounting plate portion (12a).
  • An arm part (12b) provided on the left and right ends of the plate part (12a) so as to project upward, and a hanging part (12c) provided on the upper end of the arm (12b) so as to project laterally. ).
  • the submerged transfer device (10) is moved in the workpiece transfer direction (3) in a sliding state on the rail portion (lid) when the hanging portion (12c) receives the driving force from the drive source.
  • the work (2) mounted on the mounting plate (12a) is transported while being immersed in the liquid (72) in the transport tank (11).
  • both the movement path (13) and the rail part (l id) of the hanging part (12c) are covered with the cover member (14).
  • This cover member (14) is generated when the hanging part (12c) slides with the rail part (lid), and the generated dust is outside (ie, hounging zone (5) and cleaning zone (6)). )) To prevent splashing.
  • This cover member (1 Both ends of 4) are closed by the lid (14a).
  • the lower end (14c) of the side wall (14b) located inside the transport tank (11) in the cover member (14) is the side wall of the transport tank (11).
  • (11a) is spaced apart from the inside of the transfer tank (11).
  • the arm portion of the transport table (12) is inserted into the gap (15) between the lower end portion (14c) of the side wall portion (14b) of the cover member (14) and the side wall portion (11a) of the transport tank (11).
  • (12b) is arranged, and the arm portion (12b) moves through the gap (15) when the workpiece is transferred.
  • the lower end part (14c) of the side wall part (14b) of the cover member (14) is immersed in the liquid (72) in the transfer tank (11). Therefore, the inside of the cover member (14) is hermetically sealed.
  • the submerged transport device (10) has bubble generating means (17) for generating air bubbles (21) by jetting air as a gas into the liquid (72) in the transport tank (11). I'm going.
  • the bubble generating means (17) includes an air stone and an air supply pipe (gas supply pipe) for supplying air to the air stone.
  • the air supply pipe is attached to the lower surface of the mounting plate portion (12a) of the transfer table (12).
  • the air supply pipe itself may be formed of an air stone.
  • the submerged transport device (10) allows the liquid (72) to flow in the transport tank (11) in a direction opposite to the cake transport direction (3). It has a plurality of ejection nozzles (19) for ejecting (72) into the transport tank (11).
  • This jet nozzle (19) is arranged on the cleaning zone (6) side in the transfer tank (11), and more specifically, on the side wall (11c) on the cleaning zone (6) side of the transfer tank (11).
  • the jet nozzle (19) is disposed with its jet port facing in the direction opposite to the workpiece transfer direction (3).
  • an arrow (22) indicates the flow direction of the liquid (72) in the transfer tank (11).
  • the liquid flow direction (22) is opposite to the workpiece transfer direction (3) as described above.
  • the liquid (72) in the transport tank (11) overflows from the upper end of the side wall (rib) of the transport tank (11) on the honing zone (5) side. It is supposed to be done. Further, an overflow liquid receiver (20) for receiving the overflowed liquid is attached to the upper part of the side wall (lib) on the hounging zone (5) side of the transfer tank (11). The liquid level in the transfer tank (11) is kept at a predetermined height by this overflow mechanism.
  • the in-liquid transfer device (10) has an injection nozzle (23).
  • This jet nozure (23) The cleaning liquid (73) is sprayed toward the workpiece (2) that is being transported to the cleaning zone (6) side in the transport tank (11) and being lifted by the liquid (72) in the transport tank (11). Is to do.
  • the injection nozzle (23) is disposed above the transfer tank (11) in the cleaning zone (6), and thus the cleaning liquid (73) injected by the injection nozzle (23) After hitting the cake (2), it falls into the transfer tank (11).
  • the bottom surface (l ie) of the transfer tank (11) is formed in an upwardly inclined state with respect to the horizontal plane in the workpiece transfer direction (3).
  • the inclination angle of the bottom surface (lie) with respect to the horizontal plane is desirably set in the range of 1 to 15 (particularly preferably 7 to 13) °.
  • this foreign matter can be easily discharged by providing a discharge port (not shown) at the lowest position of the bottom surface (l ie).
  • a discharge port not shown
  • the inclination angle of the bottom surface (lie) is set within the above range because these effects can be sufficiently obtained and the flow state of the liquid (72) is not disturbed.
  • Houngune soda (30) is arranged in Hounging zone (5).
  • the honing tank (30) roughly cleans the hounging part (31) for liquid hounging the work (2) and the work (2) subjected to liquid howinging by the hounging part (31).
  • the first shower cleaning section (32) that performs the shower cleaning process, and the workpiece (2) that has been liquid houng processed in the hounging section (31) transports the hounging section (31) force to the first shower cleaning section (32). It has a part (33) inside.
  • the transport section (33) is, for example, a turntable type, (33a) is a turntable, and (33b) is a rotating shaft of the turntable (33a).
  • the interior of the honing tank (30) is shielded from the atmospheric gas in the hounging zone (5).
  • the atmosphere gas in the honing tank (30) is air.
  • this Honing soda (30) has a workpiece inlet (35), a workpiece outlet (36), an open / close lid (37) corresponding to each of the workpiece inlet (35) and the outlet (36). ) (38) .
  • the open / close lid (37) (38) is, for example, an electric open / close lid.
  • a honing tank gas suction device (41) for sucking atmospheric gas (air) in the honing soda (30) is connected to the honing soda (30). This gas suction device (41)
  • the hounging zone (5) includes a workpiece pitch changing section (42) and
  • a second transfer device (44) for transferring the work (2) subjected to the shower cleaning process in 32) from the first shower cleaning section (32) to the submerged transfer device (10) is arranged.
  • the cleaning zone (6) includes a second shower cleaning section (51), scrub cleaning sections (52a) (52b) arranged in two stages in the workpiece transfer direction (3), and a third shower cleaning section. (53), an immersion cleaning section (54), a bow I raising drying section (55), and a third transfer device (56) are arranged.
  • the second shower cleaning section (51) performs a shower cleaning process on the workpiece (2) transferred to the cleaning zone (6) by the submerged transfer device (10).
  • the two-stage scrub cleaning units (52a) and (52b) have the same configuration, and the second shower cleaning unit
  • Each scrub cleaning unit (52a) (52b) is provided with a scrub cleaning device (110).
  • the configuration of the scrub cleaning device (110) will be described later.
  • the third shower cleaning section (53) performs the shower cleaning process on the workpiece (2) cleaned by the scrub cleaning section (52b).
  • the immersion cleaning unit (54) performs immersion cleaning as a final cleaning process by immersing the workpiece (2) cleaned in the third shower cleaning unit (53) in the cleaning liquid (77). is there.
  • the pulling and drying unit (55) performs the drying process by immersing the workpiece (2) cleaned by the immersion cleaning unit (54) in the high temperature liquid (78) and pulling it up from the high temperature liquid (78). Is.
  • the third transfer device (56) is a workpiece transferred to the cleaning zone (6) by the submerged transfer device (10).
  • the work (2) which has been dried in the pulling drying unit (55), That is, a boxing portion (66) for packing a liquid houng processed product as a final processed workpiece into a box (case) is arranged.
  • the workpiece (2) dried in the bow I lifting and drying unit (55) is conveyed from the lifting and drying unit (55) to the boxing unit (66) by the third transfer device (56) and packed in a box.
  • the liquid honing machine (1) includes a plurality (two in this embodiment) of gas supply devices (58, 67) for supplying clean atmospheric gas to the cleaning zone (6).
  • This gas supply device (58) is composed of a clean unit or the like, and is installed on the ceiling of the housing (4) in the work transfer direction (3) downstream. More specifically, this gas supply device (58) (67 ) Are installed on the ceiling of the housing (4) above the immersion cleaning part (54) and one above the boxing part (66). (68) is an ionizer.
  • the liquid hounging machine (1) includes a honing zone gas suction device (45) for sucking the atmospheric gas in the honing zone (5).
  • This gas suction device (45) comprises an suction blower or the like and is connected to the honing zone ( 5 ).
  • the atmospheric gas pressure in the cleaning zone (6) is adjusted to a positive pressure relative to the outside air pressure outside the housing (4).
  • the atmospheric gas pressure in the cleaning zone (6) is adjusted to more than 1 and less than 2 times (particularly preferably 1.1 to 1.5 times) the outside air pressure outside the housing (4). Good to do.
  • the atmospheric gas pressure in the cleaning zone (6) is adjusted to a positive pressure relative to the atmospheric gas pressure in the hounging zone (5).
  • the atmospheric gas pressure in the cleaning zone (6) is more than 1 and less than 2 times the atmospheric gas pressure in the honing zone (5) (particularly preferably 1.:! To 1.5 times). It is good to adjust to.
  • reference numeral (60) denotes an unprocessed workpiece accommodating portion that accommodates an unmachined workpiece (2).
  • the uncarved work accommodating part (60) is arranged on the upstream side in the work conveying direction on the outside of the housing (4).
  • (61) is a fourth transport device for transporting the unprocessed work (2) from the unclean work accommodating section (60) to the work pitch changing section (42).
  • each of the transfer devices (43) (44) (56) (61) has a picker (not shown) and a plurality of workpieces. (2) can be transported in a batch, and in this embodiment, 7 workpieces (2) are transported in a batch. (See Figure 4).
  • the number of workpieces (2) that can be collectively conveyed by each conveying device (43) (44) (56) (61) is not limited to seven. For example, 2 to: 10 There may be one or one.
  • abrasive grains or dust contained in the hounging liquid adhere to the surface of the workpiece (2) that has been subjected to liquid howing treatment, and fine burrs are generated due to collision of the abrasive grains. Talk. Therefore, in order to remove foreign matter such as burrs, abrasive grains, and dust from the surface of the work (2), the surface of the work (2) is scrubbed by the scrub cleaning device (110).
  • the scrub cleaning device (110) includes a cylindrical rubbing member (111), a rubbing member rotation driving device (115) for rotating the rubbing member (111) on its own axis, and And a work rotation drive device (116) for rotating the work (2) on its own axis, and a pressing member (118) for pressing the surface (surface) of the rubbing member (111) during cleaning.
  • the workpiece (2) and the rubbing member (111) are arranged in parallel to each other, and are arranged vertically in the present embodiment.
  • As the cleaning liquid (120) pure water, a surfactant or the like is used.
  • the rubbing member (111) is made of a porous soft body having continuous pores.
  • the average pore size of the porous soft body is set in the range of 10 to 500 xm in order to ensure that foreign particles such as abrasive grains are captured and the cleaning liquid (120) (ie scrub cleaning liquid) can flow reliably. It is desirable that If it is less than 10 zm, it is difficult for foreign matter to enter the pores, and the cleaning liquid (120) becomes difficult to circulate. On the other hand, if it exceeds 500 x m, the foreign matter cannot stay in the pores, and the foreign matter cannot be caught persistently.
  • the preferred lower limit for the average pore size is 30 zm, and the preferred upper limit is 300 x m. However, in the present invention, the average pore diameter of the porous soft body is not limited to this range.
  • the softness is expressed as 30% compressive stress, and specifically, it is defined by the repulsive force when the thickness in the pressing direction of the porous soft body is compressed by 30%. Is done.
  • the 30% compressive stress of the porous soft body is preferably in the range of 1.5 to 98 kPa (15 to 1000 gf / cm 2 ). If the 30% compressive stress is less than 1.5 kPa (15 gf / cm 2 ), the force to scrub off foreign matter is too weak. If it exceeds 98 kPa (1000 gf / cm 2 ), it will be too hard and the rubbing member (11) itself will work ( There is a risk of scratching the surface of 2).
  • 30% pressure A preferable lower limit value of the compressive stress is 2.0 kPa (20 gfZcm 2 ), and a preferable upper limit value is 49 kPa (500 gfZcm 2 ).
  • any one of PVA resin, polyethylene resin, polyether resin, butyl acetate resin, and polyurethane resin is used. It is preferable to use a foam. These resins are used because the above average pore diameter and 30% compressive stress can be easily realized.
  • PVA foam as a PVA resin foam polyethylene foam as a polyethylene resin foam
  • polyether foam as a polyether resin foam polyether resin foam
  • polyurethane resin foams include polyurethane foams.
  • the porous soft body is not limited thereto.
  • the softness of the rubbing member (111), that is, the 30% compressive stress depends on the type of resin, the average pore diameter, the porosity, the degree of polymerization of the resin, the content of the plasticizer, and the like. In this embodiment, the softness including these conditions is defined as 30% compressive stress.
  • the cleaning liquid supply pipe (112) is inserted and arranged tightly in the axial direction of the rubbing member (111).
  • the cleaning liquid supply pipe (112) is for supplying the cleaning liquid (120) into the rubbing member (111).
  • the cleaning liquid supply pipe (112) has rigidity and can act as a core metal (core metal) for reinforcing the rubbing member (111).
  • the cleaning liquid supply pipe (112) is made of, for example, resin or metal. Specifically, the axially intermediate portion of the cleaning liquid supply pipe (112) is made of resin, and the upper and lower ends are made of stainless steel.
  • the upper end of the cleaning liquid supply pipe (112) is formed in a closed shape.
  • the lower end of the cleaning liquid supply pipe (112) is open and the lower end is liquid-tight with the cleaning liquid introduction pipe (113) for introducing the cleaning liquid into the cleaning liquid supply pipe (112). It is connected to.
  • the cleaning liquid is introduced from the cleaning liquid introduction pipe (113) into the cleaning liquid supply pipe (112). Entered.
  • the cleaning liquid in the cleaning liquid supply pipe (112) flows out from the cleaning liquid outflow hole (112a), whereby the cleaning liquid is supplied into the rubbing member (111).
  • the supplied cleaning liquid (120) is uniformly exuded over the entire surface of the rubbing member (211) outside the surface of the rubbing member (111) through the continuous pores of the rubbing member (111).
  • the surface of the rubbing member (111) is in contact with the surface of the workpiece (2) along the length direction of the surface.
  • the length of the surface of the rubbing member (111) is set to be larger than the length of the surface of the work (2), whereby the rubbing member (111) ) Surface can be brought into contact with the entire length of the surface of the workpiece (2).
  • the scrub cleaning apparatus (110) includes two upper and lower workpiece support members (121) (121) for vertically supporting the workpiece (2).
  • each workpiece support member (121) has a fitting protrusion (121a) fitted into each of the upper and lower end surface openings of the workpiece (2).
  • the fitting protrusion (121a) of the upper (one) workpiece support member (121) is coaxially fitted into the upper end opening of the workpiece (2), so that the upper end surface of the workpiece (2) is fitted.
  • the upper work support member (121) is mounted.
  • the rubbing member rotation drive device (115) has a motor (not shown) and a control unit (not shown) as drive sources, and is connected to the cleaning liquid supply pipe (112) of the rubbing member (111). Yes. Then, by driving the motor, the rubbing member (111) is rotated in its predetermined rotating direction (103) and the peripheral speed of the rubbing member (111) can be controlled by the control unit. Has been.
  • the work rotation drive device (116) has a motor (not shown) and a control unit (not shown) as a drive source, and a work support member (121) of the work (2) (in detail, the lower side) Connected to the workpiece support member). Then, by driving the motor, the workpiece (2) is rotated in its own axis in a predetermined rotation direction (104), and the peripheral speed of the workpiece (2) is configured to be controllable by the control unit. Les.
  • the rubbing member (111) and the workpiece (2) are each rotated in their own directions in the same direction.
  • the pressing member (118) is a flat plate having one side edge portion extending in a straight line as the pressing portion (118a).
  • the pressing member (118) has rigidity, and is made of, for example, plastic or metal.
  • the length of the pressing portion (118a) of the pressing member (118) is set to be the same or larger than the length of the surface of the workpiece (2). Desirably, it should be set to approximately the same size as the surface length.
  • the pressing member (118) is pressed against the surface of the rubbing member (111) during scrub cleaning and presses the rubbing member (111), and is pressed by an elastic means (not shown) such as a panel. A pressing force is applied to (118). Then, as shown in FIG. 9, in a state where the surface of the rubbing member (111) is pressed by the pressing member (118), the pressing member (118) The force S is disposed so as to be inclined rearward in the rotational direction (103) of the rubbing member (111), and the pressing member (118) is held by the holding means (not shown) in this inclined state. .
  • the partition wall (7) is provided with a small gas flow passage (not shown) or in one direction from the cleaning zone (6) to the honing zone (5).
  • Gas flow passage for example, a gas flow passage with a damper may be provided. By doing so, foreign matters can be reliably prevented from floating and flowing from the honing zone (5) into the cleaning zone (6).
  • a gas flow passage in one direction from the inside of the housing (4) to the outside thereof may be provided on the wall of the housing (4).
  • the work (2) is transferred from the work pitch changing section (42) to the honing tank (30) through the work input port (35) by the first transfer device (43). Transport to honing section (31). Thereafter, the work inlet (35) and the outlet (36) are closed with the corresponding opening / closing lids (37) and (38). In this closed state, the workpiece (2) is known by the honing unit (31). Liquid houng treatment by the method.
  • the workpiece (2) subjected to the liquid houng treatment is transported from the hounging section (31) to the first shower cleaning section (32) by the transporting section (33).
  • the workpiece insertion port (35) is opened, and a new unstressed workpiece (2) is moved from the workpiece pitch changing section (42) via the workpiece insertion port (35) by the first transport device (43). Then transport it to the Hounging section (31). Thereafter, the work insertion port (35) is closed with the opening / closing lid (37). Then, in this closed state, the unprocessed workpiece (2) is liquid hounged by the hounging part (31). At the same time, the workpiece (2) subjected to the liquid honing treatment is subjected to a shower washing process as a rough washing process by a known method in the first shower washing section (32).
  • a cleaning liquid (71) is formed by a plurality of spray nozzles (40) arranged in the axial direction of the workpiece (2) while rotating the workpiece (2). ) Towards the surface of the cake (2). As a result, the entire surface of the workpiece (2) is cleaned. At this time, the cleaning liquid (71) is sprayed into the hollow portion of the work (2) to clean the inner surface of the work (2).
  • the workpiece inlet (35) and the outlet (36) are opened.
  • the workpiece (2) that has been subjected to the cleaning process in the first shear cleaning section (32) is supplied to the cleaning zone (6). That is, the workpiece (2) is conveyed from the first shower cleaning section (32) to the submerged conveyance device (10) by the second conveyance device (44) through the workpiece outlet (36), and is conveyed to the conveyance table (12). It is mounted on the mounting plate (12a). Further, the work (2) subjected to the liquid houng treatment in the hounging part (31) is transported from the honing part (31) to the first shower cleaning part (32) by the transporting part (33). After that, a new unprocessed work (2) is transferred by the first transfer device (43) to the honing section (31) through the work input port (35).
  • the work insertion port (35) and the take-out port (36) are respectively closed with the corresponding opening / closing lids (37), (38). Then, in this closed state, the unpowered work (2) is removed in the same manner as described above.
  • the liquid houng process is performed in the hounging part (31), and the cake (2) subjected to the liquid hounging process is shower-cleaned in the first shower cleaning part (32).
  • the unstressed work (2) is successively transferred to the unprocessed work storage part (60) force houng zone (5), and the transferred work (2) is subjected to the honing tank.
  • liquid howing treatment and shower cleaning treatment are performed sequentially.
  • the work opening (35) and the outlet (36) of the honing soda (30) correspond to the open / close lid ( 37)
  • the gas suction device (45) for the honing zone is operated to suck the atmospheric gas in the honing zone (5) by the gas suction device (45)
  • the gas suction device (41) for the honing tank is not operated.
  • the honing tank gas suction device (41) is operated to perform the honing.
  • the atmospheric gas in the tank (30) is sucked by the gas suction device (41), while the gas suction device for the horn zone (45) is not operated.
  • foreign matter floating in the atmospheric gas in the honing tank (30) flows out to the hounging zone (5) through at least one of the workpiece inlet (35) and the outlet (36). Can be reliably prevented and the cleanliness of the hounging zone (5) can be maintained.
  • the workpiece (2) mounted on the mounting plate (12a) of the transfer platform (12) of the submerged transfer device (10) is transferred to the cleaning zone (6) as follows.
  • bubbles (21) are continuously generated in the liquid (72) in the transfer tank (11) by the bubble generating means (17). Furthermore, the liquid (72) is injected into the transfer tank (11) so that the liquid (72) flows in the direction (22) opposite to the cake transfer direction (3) in the transfer tank (11). ) Is continuously ejected from the cleaning zone (6) side in the transfer tank (11). It is preferable that the supplied liquid (72) flows into the workpiece conveyance range and flows in a laminar flow. The flow rate can be set in the range of 10-30 liters / min, for example. Furthermore, the liquid (72) in the transfer tank (11) is continuously supplied from the upper end of the side wall (lib) on the honing zone (5) side of the transfer tank (11). Then overflow.
  • the cake (2) mounted on the mounting plate (12a) of the transfer table (12) is immersed in the liquid (72) in the transfer tank (11).
  • the workpiece is passed from the honing zone (5) to the cleaning zone (6) through the workpiece passage opening (8) in the partition wall (7).
  • the conveying speed of the workpiece (2) is set within a range in which the workpiece (2) can be maintained in the state of being wrapped in the bubbles (21), for example, 50 to 100 mm / s (preferably 60 to 90 mm / s). It can be set within the range of s).
  • the conveyance time of the workpiece (2) that is, the residence time of the workpiece (2) in the liquid within a range of 15 to 40 seconds.
  • the transfer speed and transfer time of the workpiece (2) are not limited to such ranges.
  • the work (2) transported to the cleaning zone (6) is gripped by the third transport device (56) and pulled up from the liquid (72) in the transport tank (11) while the work (2 )
  • the cleaning liquid (73) is sprayed by the spray nozzle (23) toward the surface of the workpiece (2) and the workpiece (2) is subjected to a shower cleaning process.
  • the sprayed cleaning liquid (73) falls into the transfer tank (11) after hitting the work (2).
  • the workpiece (2) is continuously transferred from the submerged transfer device (10) to the second shear cleaning section (51) by the third transfer device (56). Then, the workpiece (2) is subjected to shower cleaning treatment by a known method in the second shower cleaning section (51).
  • the work (2) shower-washed in the second shower cleaning section (51) is transferred from the second shower cleaning section (51) to the two-stage scrub cleaning section by the third transport device (56).
  • (52a) Transfer to the first scrub cleaning section (52a) of (52b).
  • the work (2) is subjected to scrub cleaning by the scrub cleaning device (110) in the first scrub cleaning unit (52a).
  • the work (2) scrubbed by the second-stage scrub cleaning section (52b) is cleaned by the third transport apparatus (56) from the second-stage scrub cleaning section (52b) to the third shower cleaning. Transport to section (53). Then, the workpiece (2) is subjected to a shower cleaning process in a third shower cleaning section (53) by a known method.
  • the cleaning liquid (76a) is formed by a plurality of spray nozzles (53a) arranged side by side in the axial direction of the workpiece (2) while rotating the workpiece (2). ) Towards the surface of the cake (2). As a result, the entire surface of the workpiece (2) is cleaned. At this time, the cleaning liquid (76) is sprayed into the hollow portion of the workpiece (2) to clean the inner surface of the workpiece (2).
  • the work (2) shower-washed in the third shower cleaning section (53) is transported from the third shower cleaning section (53) to the immersion cleaning section (54) by the third transport device (56). To do. Then, the workpiece (2) is subjected to an immersion cleaning process by a known method in the immersion cleaning section (54).
  • the workpiece (2) subjected to the immersion cleaning process in the immersion cleaning unit (54) is pulled up from the immersion cleaning unit (54) and transferred to the drying unit (55) by the third transfer device (56). Then, the work (2) is dried by the ⁇ I raising drying unit (55).
  • the workpiece (2) (that is, the liquid honing Karoe product) dried by the pulling drying unit (55) is bowed by the third conveying device (56). Transport to 66). Thereafter, the work (2) is packed in a predetermined box (case) by the boxing section (66).
  • the liquid hounging force product processed by the liquid hounging force machine (1) is used as a pipe for a photosensitive drum base.
  • the cleaning liquid is introduced into the cleaning liquid supply pipe (112) from the cleaning liquid introduction pipe (113) at a predetermined pressure.
  • the cleaning liquid (120) in the cleaning liquid supply pipe (112) is removed from the cleaning liquid outflow hole (112a
  • the surface of the scraping member (111) is pressed against the entire surface of the workpiece (2) over the entire length direction of the workpiece (2).
  • the pressing part (118a) of the pressing member (118) along the length direction of the surface of the rubbing member (111) against the surface of the member (111), as shown in FIG. 9, the rubbing member (111) The surface is pressed by the pressing member (118).
  • the rubbing member rotation driving device (115) and the workpiece rotation driving device (1) are continuously leached out of the surface of the rubbing member (111) as described above. Operate 16) respectively.
  • the rubbing member (111) and the workpiece (2) are rotated in the same direction in the same direction at a predetermined peripheral speed, for example, for 30 seconds to 10 minutes.
  • the rotation time of the rubbing member (111) and the workpiece (2) is not limited to be within this range.
  • the peripheral speed of the rubbing member (111) is controlled by the control unit of the rubbing member rotation driving device (115), and the peripheral speed of the work (2) is controlled by the control unit of the work rotation driving device (116).
  • FIG. 6 is a piping diagram of the liquid hounging force machine (1). As shown in the figure, in the liquid honing machine (1), the cleaning liquid (76) (77) of the third shower cleaning section (53) and the immersion cleaning section (54), and the pulling and drying section (55) Pure water such as pure water is used as the hot liquid (78). In the present invention, an additive such as a surfactant or an additive solution may be added to the clean water.
  • an additive such as a surfactant or an additive solution may be added to the clean water.
  • the heating tank (86) When supplying the high temperature liquid (78) to the pulling and drying section (55), clean water is stored in the heating tank (86) and heated to a predetermined temperature here. Next, the heated clean water, that is, the high temperature liquid (78) is supplied to the high temperature liquid tank (55a) of the pulling and drying section (55) by the pump (84a) through the supply pipe (80a). The hot liquid (78) is always overflowed and discharged outside the hot liquid tank (55a) in order to maintain cleanliness.
  • the third shower cleaning section (53) and the immersion cleaning section (54) are supplied with clean water as cleaning liquids (76) and (77) through the supply pipe (80b), respectively.
  • the used cleaning liquid used here is stored in the first recovery tank (87a) via the discharge pipe (82a).
  • the used cleaning liquid in the first recovery tank (78a) is pumped through the cleaning liquid introduction pipe (113).
  • the scrub cleaning liquid (120) is supplied to the two-stage scrub cleaning sections (52a) and (52b) by (84b).
  • the used cleaning liquid used here is stored again in the first recovery tank (87a) via the discharge pipe (82b).
  • clean water is appropriately supplied to the first recovery tank (87a).
  • the used cleaning liquid in the second recovery tank (87b) is supplied as a cleaning liquid (74) to the second shower cleaning section (51) by the pump (84c) through the supply pipe (80d).
  • the used cleaning liquid used here is stored again in the second recovery tank (87b) via the discharge pipe (82d).
  • the used cleaning liquid in the third recovery tank (87c) is sprayed into the transfer tank (11) of the submerged transfer device (10) by the pump (84e) via the supply pipe (80e) (19) It is injected from and supplied. In this way, the used cleaning liquid can be effectively used by supplying the used cleaning liquid used in the cleaning zone (6) to the transfer tank (11).
  • the liquid supplied to the transfer tank (11) (that is, the used cleaning liquid) is, as shown in FIG. 3, a side wall (1 lb) on the honing zone (5) side of the transfer tank (11). It overflows from the upper end of the transfer tank (11) to the honing zone (5) side outside and is discharged. Then, as shown in FIG. 6, the discharged liquid from the transfer tank (11) is again stored in the third recovery tank (87c) via the discharge pipe (82f) from the overflow liquid receiver (20) force. In addition, clean water is appropriately supplied to the third recovery tank (87c).
  • the liquid in the fourth recovery tank (87d) is supplied to the first shower washing section (32) in the hounging zone (5) by the pump (84f) through the supply pipe (80f), and the first shower Used as at least part of the cleaning liquid (71) used in the cleaning section (32).
  • the used liquid used here is discharged to the outside.
  • the liquid in the fourth recovery tank (87d) that is, the liquid discharged from the transport tank (11) is used as the cleaning liquid (71) used in the first shower cleaning section (32) of the honing zone (5).
  • the liquid in the fourth recovery tank (87d) is supplied to the hounging section (31) of the hounging zone (5) and at least the honing liquid (70) used in the hounging section (31). It may be used as a part. In addition, clean water is appropriately supplied to the fourth recovery tank (87d).
  • liquid honing machine (1) and the liquid honing method have the following advantages.
  • the liquid hounging process and the cleaning process can be sequentially performed on the workpiece (2), so that mass productivity is improved.
  • the work (2) subjected to the liquid houng treatment in the hounging zone (5) is immersed in the liquid (72) in the transfer tank (11) by the submerged transfer device (10). Therefore, when the workpiece (2) is transferred, the workpiece (2) is transferred from the hounging zone (5) through the workpiece passage opening (8) of the partition wall (7) and transferred to the cleaning zone (6).
  • Is immersed in the liquid (72) in the transfer tank (11) foreign matters such as abrasive grains and dust adhering to the workpiece (2) are removed. Therefore, it is possible to prevent foreign matter adhering to the workpiece (2) from being brought into the cleaning zone (6) together with the workpiece (2) while remaining attached to the workpiece (2). It is possible to prevent contamination of the cleaning zone (6) due to foreign matter adhering to 2) being brought into the cleaning zone (6).
  • the upper edge (8a) of the workpiece passage opening (8) of the partition wall (7) is the transfer tank of the submerged transfer device (10).
  • the hanging part (12c) can slide with the rail part (l id).
  • the accompanying dust can be prevented from flowing into the liquid (72) in the transfer tank (11). Therefore, contamination of the liquid (72) in the transfer tank (11) due to the outflow of the dust into the liquid (72) in the transfer tank (11) can be prevented.
  • the moving path (13) and the rail part (lid) of the hanging part (12c) are covered by the cover member (14).
  • the dust generated by sliding with the rail (lid) of the hanging part (12c) is scattered outside (hounging zone ( 5 ) and cleaning zone ( 6 )). This can be prevented by the cover member (14). Therefore, it is possible to maintain the cleanliness of the cleaning zone (6) more reliably.
  • the bubbles (21) are generated in the liquid (72) in the transfer tank (11) by the bubble generating means (17), while the work (2) is transferred to the liquid (72 in the transfer tank (11).
  • the workpiece (2) is transported to the cleaning zone (6) while being immersed in the workpiece (2), foreign matter adhering to the workpiece (2) can be effectively removed during the transport of the workpiece (2). ) Can be reliably prevented from entering the cleaning zone (6).
  • the liquid (72) is ejected into the transport tank (11) by the ejection nozzle (19) so that the liquid (72) flows in the direction opposite to the work transport direction (3) in the transport tank (11).
  • the workpiece (2) is transported while being immersed in the liquid (72) in the transport tank (11), thereby being present in the liquid (72) in the transport tank (11).
  • the foreign matter removed from the work (2) is moved to the hounging zone (5) side in the transfer tank (11) by the liquid flow in the transfer tank (11). As a result, contamination of the cleaning zone (6) can be more reliably prevented.
  • the liquid (72) is ejected into the transport tank (11) from the cleaning zone (6) side of the transport tank (11) by the spray nozzle (19), thereby ⁇ just before being pulled out of the liquid (72) ⁇
  • the force that can force the liquid (72) to be ejected toward the work (2) at a position close to (2) The removal rate is improved.
  • the liquid (72) in the transfer tank (11) is transferred to the hounging zone (5) side wall of the transfer soda (11).
  • the foreign matter floating on the liquid level in the transfer tank (11) overflows together with the liquid (72) in the transfer tank (11) and flows out of the transfer tank (11). Is discharged. Therefore, it is possible to prevent a decrease in the cleanliness of the liquid (72) in the transfer tank (11), and it is possible to prevent foreign matters from reattaching to the work (2) when the work (2) is transferred.
  • the cleaning liquid (73) is sprayed by the spray nozzle (23) toward the work (2), The force S can be removed when the workpiece (2) is transported or lifted, and the foreign matter that has reattached to the workpiece (2) is removed while the workpiece (2) is being lifted.
  • cleaning is performed at the time of cleaning by cleaning the workpiece (2) in the cleaning zone (6) while supplying clean atmospheric gas to the cleaning zone (6) by the gas supply device (58) (67).
  • the cleanliness of the zone (6) can be improved.
  • the liquid houng processing machine (1) is equipped with a gas suction device (45), by sucking the atmospheric gas in the honing zone (5) by this gas suction device (45), the hounging machine (1) Foreign substances floating in the atmospheric gas in the zone (5) can be removed, and the cleanliness of the honing zone (5) can be improved.
  • the workpiece (2) should be cleaned in the cleaning zone (6) with the atmospheric gas pressure in the cleaning zone (6) adjusted to a positive pressure relative to the atmospheric gas pressure in the hounging zone (5).
  • the atmospheric gas in the honing zone (5) is removed from the gaps inevitably generated between the partition wall (7) and the housing (4) or between the partition wall (7) and the transfer tank (11). 6), and the cleanliness of the cleaning zone (6) can be maintained reliably. wear.
  • the honing tank (30) having (33) inside is disposed, the houng zone (5) can be prevented from being contaminated during the liquid honing process.
  • the cleaning zone (6) it is transferred to the workpiece (2) transferred to the cleaning zone (6), shower cleaning treatment, two scrub cleaning treatments, shower cleaning treatment, immersion.
  • shower cleaning treatment two scrub cleaning treatments
  • shower cleaning treatment immersion
  • the scrub cleaning sections (52a) and (52b) of the cleaning zone (6) scrub the workpiece (2) with the scrub cleaning device (110).
  • the rubbing member (111) of the scrub cleaning device (110) is composed of a porous soft body having continuous pores, the surface of the rubbing member (111) is brought into contact with the surface of the workpiece (2).
  • foreign matters such as burrs, abrasive grains, and dust existing on the surface of the work (2) can be taken into the pores on the surface of the rubbing member (111) and captured with a tenacity. For this reason, foreign matters can be reliably removed from the surface of the workpiece (2).
  • the foreign matter trapped in the pores may float on the surface of the rubbing member (111) due to contact with the pressing member (118), and the foreign matter may be easily removed.
  • the amount of discharge can be increased. For this reason, it is possible to prevent the foreign matter from reattaching to the surface of the workpiece, and the workpiece (2) generated when the foreign matter remaining in the pores of the surface of the scraping member (111) contacts the surface of the workpiece (2). Surface damage can be prevented. Therefore, the incidence of surface defects on the workpiece (2) can be reduced.
  • the peripheral speed of the rubbing member (111) in the range of 100 to 500 mm / s (particularly preferably 200 to 300 mm / s). Further, it is desirable to set the peripheral speed of the cake (2) in the range of 50 to 200 mm / s (particularly preferably 75 to 150 mm / s).
  • the force S can be removed more reliably from the surface of the work (2).
  • the rubbing member rotation drive device (115) sets the peripheral speed of the rubbing member (111) to at least 0 to 650 m. It is desirable to be configured to be controllable within a range of m / s. In addition, in order to ensure that the peripheral speed of the work (2) can be set within the above range, the work rotation drive device (16) can control the peripheral speed of the work (2) to at least the range of 0 to 300 mmZs. It is desirable that it is configured as follows.
  • the workpiece (2) is cleaned in a state where the surface of the scraping member (111) is in contact with the surface of the workpiece (2) along the length direction of the surface of the workpiece (2). As a result, the amount of foreign matter removed from the work surface can be increased.
  • the surface of the scraping member (111) was brought into contact with the surface of the work (2) so that the contact width W with the work surface was within a range of 5 to 30 mm.
  • W it is desirable to clean the workpiece (2). If W is less than 5mm, W is too small and cleaning power is insufficient. on the other hand If W exceeds 30 mm, the pressing force of the rubbing member (111) against the workpiece surface becomes too strong, and the surface of the workpiece (2) is easily damaged. Therefore, if it is desired that W is in the range of 5 to 30 mm, foreign matter can be reliably removed, and the pressing force of the scraping member (111) to the workpiece (2) surface is strong. It is possible to prevent the problem that the surface of the workpiece (2) is damaged by becoming too much.
  • a particularly preferable range of W is 10 to 15 mm. However, in the present invention, W is not limited to this range.
  • the workpiece (2) is cleaned in a state where the surface of the scraping member (111) is in contact with the entire surface of the workpiece (2) in the longitudinal direction of the workpiece (2). Therefore, foreign matter can be removed over the entire length of the surface of the work (2).
  • the workpiece support member (121) is mounted on the end surface of the workpiece (2) so that the surface of the workpiece (2) and the peripheral surface of the workpiece support member (121) are connected to each other.
  • the surface of the scraping member (111) can be brought into contact with the end of the surface of the work (2) with certainty, and the end of the surface of the work (2) can be reliably cleaned.
  • the pressing member (118) is rubbed in a state where the surface of the rubbing member (111) is pressed by the pressing member (118), and the pressing member (118) is rubbed ( 111) It is desirable to incline in the rotation direction (103) rear side. By doing so, it is possible to reliably discharge the foreign matter adhering to the surface of the rubbing member (111) and the foreign matter trapped in the pores to the outside.
  • is 10 to 45 ° ( Particularly preferably, it is desirable to set in the range of 20 to 30 °. By doing so, foreign matter can be more reliably discharged to the outside.
  • is not limited to this range.
  • the surface of the rubbing member (111) is formed on the surface so that a recess (119) having a depth K of 0.5 to 5 mm (particularly preferably 1 to 3 mm) is generated. It is desirable to press with the pressing member (118). In this way, foreign matter can be more reliably discharged to the outside.
  • the pressing member (118) is a plate-shaped member having one side edge as the pressing portion (118a).
  • a large amount of the cleaning liquid (120) can be surely exuded from the inside of the scraping member (111), and foreign matter can be removed. It is possible to discharge reliably to the part.
  • this plate-like pressing member (118) the foreign matter trapped in the pores can be easily removed, and the amount of foreign matter discharged can be reliably increased. .
  • the cleaning liquid supply pipe (112) is inserted into the hollow portion of the rubbing member (111), the cleaning liquid (120) can be reliably supplied into the rubbing member (111).
  • the cleaning liquid supply pipe (112) inserted into the hollow portion of the rubbing member (111) acts as a metal core for reinforcing the rubbing member (111), the surface of the rubbing member (111) is used as the surface of the workpiece (2). It can be brought into contact with tension.
  • the cleaning liquid (120) that has taken in the foreign matter moves over the surface of the workpiece (2) and the rubbing member (111) during cleaning. It will flow down in the axial direction and foreign matter can be removed quickly.
  • the workpiece (2) to be machined by the liquid honing machine according to the present invention may be an element tube of a precision neuve such as a pipe for a lens barrel of an optical device (eg, a camera or a telescope). It may be a blank tube used for other purposes.
  • the number of scrub cleaning units (52a) and (52b) arranged in the cleaning zone (6) may be three or four or more.
  • the workpiece (2) may be a columnar one, not limited to a cylindrical one.
  • the rubbing member (111) of the scrub cleaning device (110) may be a columnar one, not limited to a cylindrical one.
  • the lower end of the cleaning liquid supply pipe (112) is formed in a closed shape, while the upper end of the cleaning liquid supply pipe (112) is connected to the cleaning liquid introduction pipe (113). It is okay.
  • This work (2) (element tube) consists of an aluminum drawn round tube with a length of 200 to 450 mm, an outer diameter of 15 to 50 mm, and a wall thickness of 0.2 to 2 mm. is there.
  • the workpiece (2) was subjected to liquid houng processing by the liquid honing machine (1) of the above embodiment.
  • the cleaning failure rate was determined as follows.
  • This work (2) (element tube) consists of an aluminum drawn round tube with a length of 200 to 450 mm, an outer diameter of 15 to 50 mm, and a wall thickness of 0.5 to 2 mm. is there.
  • the surface of the workpiece (2) was subjected to liquid houng treatment by the liquid hounging machine (1) of the above embodiment. Then, the incidence of defects due to circumferentially generated scratches on the surface of the workpiece (2) was examined. The results are shown in Table 1.
  • the rubbing member (111) used in the scrub cleaning treatment is a PVA foam having a 30% compressive stress of 8.8 kPa (90 gf / cm 2 ) and an average pore diameter of 200 / im. It consists of a porous soft body with continuous pores formed by Also, the peripheral speed of the scraping member (111), the peripheral speed of the workpiece (2), the contact width W of the surface of the scraping member (111) with the surface of the workpiece (2), the pressing member (118) and the scraping member (111 ) And the depth K of the dent (119) on the surface of the rubbing member (111) were set to the values shown in Table 1 and scrub cleaning was performed. .
  • Example 2 100 1 50 10 30 1 0.05 Example 3 300 1 50 10 30 1 0.03 Example 4 500 1 50 10 30 1 0.05 Example 5 200 3 ⁇ 4 5 1 E 10 10 30 1 0.05 Example 6 200 75 10 30 1 0.03 Example 7 200 200 10 30 1 0.05 Example 8 200 1 50 5 30 1 0.05 Example 8 200 1 50 1 5 30 1 0.03 Example 10 200 1 50 30 30 1 0.05 Example 1 1 200 150 10 10 1 0.05 Example 1 2 200 150 10 20 1 0.02 Example 1 3 200 150 10 45 1 0.05 Example 14 200 150 10 30 0.5 0.05 Example 1 5 200 150 10 30 3 0.03 Example 16 200 150 10 30 5 0.05 Comparative Example 2 200 1 50 10 One 0.09
  • the work (2) was subjected to liquid honing.
  • the work (2) was scrubbed by the following method. That is, the scrub cleaning method is to rotate the rubbing member (111) by rotating the rubbing member (111) with the rubbing member (111) in contact with the surface of the workpiece (2). The surface was scrubbed. However, during this cleaning, the cleaning liquid is not leached from the inside of the rubbing member (111) to the outer surface of the rubbing member (111). However, the pressing member (118) was not used. Other conditions are the same as those in Examples 2 to 16. Then, the occurrence rate of defects due to the circumferentially extending flaw generated on the surface of the workpiece (2) was examined.
  • the present invention relates to a liquid houng processing machine and a liquid houng processing method for liquid hounging a workpiece such as a precision pipe base, a photosensitive drum base pipe, an optical device barrel pipe, and the like Is available.
  • the present invention can be used for a pipe manufacturing apparatus for manufacturing a pipe such as a precision pipe, a pipe for a photosensitive drum base, and a pipe for a lens barrel of an optical instrument.

Abstract

A liquid honing machine (1) has a honing zone (5) for performing liquid honing of work (2) and a cleaning zone (6) for cleaning the work (2) having been subjected to liquid honing in the honing zone (5), and the two zones are adjacent to each other in a housing (4) isolated from the outer air. Between the honing zone (5) and the cleaning zone (6) in the housing (4), there is provided a partition wall (7) for preventing atmospheric gas in the honing zone (5) from flowing into the cleaning zone (6). Furthermore, in the housing (4) is disposed an in-liquid conveyance device (10) for conveying the work (2) that has been subjected to liquid honing in the honing zone (5) from the honing zone (5) to the cleaning zone (6), where the work (2) is conveyed while being immersed in a liquid (72) in a conveyance tank (11).

Description

明 細 書  Specification
液体ホーユング加工機及び液体ホーユング加工方法  Liquid houng processing machine and liquid houng processing method
技術分野  Technical field
[0001] 本発明は、精密パイプの素管、感光ドラム基体用パイプの素管等の様々なワークを 液体ホーユング処理する液体ホーユング力卩ェ機及び液体ホーユングカ卩ェ方法に関 する。  TECHNICAL FIELD [0001] The present invention relates to a liquid hounging force machine and a liquid hounging carriage method for liquid hounging various workpieces such as a precision pipe blank and a photosensitive drum base pipe blank.
背景技術  Background art
[0002] 例えば電子複写機、レーザプリンタ等に搭載される感光ドラムにおける、セレンや 有機感光体等の光導電性の感光層を支持する感光ドラム基体は、アルミニウム(その 合金を含む。)等の金属製パイプから形成されている。このパイプは、高い寸法精度( 例:真直度)が要求される上、更に、高品位な画像を得るために高い表面精度が要 求される。  For example, in a photosensitive drum mounted on an electronic copying machine, a laser printer, or the like, a photosensitive drum base that supports a photoconductive photosensitive layer such as selenium or an organic photosensitive member is aluminum (including an alloy thereof) or the like. It is formed from a metal pipe. This pipe is required to have high dimensional accuracy (eg, straightness) and high surface accuracy to obtain a high-quality image.
[0003] ところで、このパイプは、多くの場合、引抜き加工により得られた素管から製作され ているが、このような素管は不均一な表面状態であることが多い。そこで従来では、 素管の表面を均一ィヒ(例えば均一に粗面化)するために、素管の表面を液体ホー二 ング処理している。さらに、液体ホーユング処理された素管の表面には砥粒ゃ塵等の 異物が付着していることから、この異物を除去するために、素管を洗浄処理している( 例えば特許文献 1及び 2参照)。  [0003] By the way, in many cases, this pipe is manufactured from a raw tube obtained by drawing, but such a raw tube often has a non-uniform surface state. Therefore, conventionally, in order to make the surface of the raw tube uniform (for example, uniformly roughened), the surface of the raw tube is subjected to a liquid honing treatment. Further, since foreign matter such as abrasive grains adheres to the surface of the raw tube subjected to the liquid houng treatment, the raw tube is washed to remove this foreign matter (for example, Patent Document 1 and 2).
特許文献 1:特開 2001— 296679号公報  Patent Document 1: Japanese Patent Laid-Open No. 2001-296679
特許文献 2:特開 2004 - 246124号公報  Patent Document 2: Japanese Patent Application Laid-Open No. 2004-246124
発明の開示  Disclosure of the invention
発明が解決しょうとする課題  Problems to be solved by the invention
[0004] 而して、素管について液体ホーユング処理及び洗浄処理を順次施す液体ホーニン ダカ卩ェ機として、素管を液体ホーユング処理するホーユングゾーンと、液体ホーニン グ処理された素管を洗浄処理する洗浄ゾーンとを、外気から遮断されたハウジング内 に互いに隣接して備えたものが考えられる。しかし、この液体ホーユングカ卩ェ機には 、次のような難点があった。 [0005] すなわち、この液体ホーユング加工機では、ホーユングゾーンで使用されるホー二 ング液中の砥粒が液体ホーユング処理時にホーユングゾーンの雰囲気ガス中に飛 散して浮遊 (漂流)する。そして、この雰囲気ガス中を浮遊している砥粒ゃ塵等の異 物が雰囲気ガスと共に洗浄ゾーンに流入して洗浄ゾーンを汚染するという難点があ つた。このように洗浄ゾーンが汚染されると、洗浄効率が低下したり、更には、流入し た異物がワークの表面に付着して、洗浄不良が発生する。 [0004] Thus, as a liquid honing machine that sequentially performs liquid hounging treatment and cleaning treatment on a raw tube, a hounging zone for performing liquid howing treatment on the raw tube, and cleaning treatment on the raw tube subjected to liquid honing treatment It is conceivable that the cleaning zone is provided adjacent to each other in a housing cut off from the outside air. However, this liquid Hoyungkae machine has the following difficulties. That is, in this liquid hounging machine, the abrasive grains in the honing liquid used in the hounging zone are scattered and floated (drifted) in the atmosphere gas in the hounging zone during the liquid hounging process. Further, there is a problem that foreign matters such as abrasive dust floating in the atmospheric gas flow into the cleaning zone together with the atmospheric gas and contaminate the cleaning zone. If the cleaning zone is contaminated in this way, the cleaning efficiency is lowered, and further, foreign matter that has flowed in adheres to the surface of the workpiece, resulting in poor cleaning.
[0006] 本発明は、上記技術背景に鑑みてなされたもので、その目的は、洗浄ゾーンの汚 染を防止することができる液体ホーユング加工機、該液体ホーユング加工機を用い たパイプの製造装置、液体ホーユング加工方法、この方法により得られた液体ホー二 ング加工品を提供することにある。  [0006] The present invention has been made in view of the above technical background, and an object of the present invention is to provide a liquid hounging machine capable of preventing contamination of the cleaning zone, and a pipe manufacturing apparatus using the liquid hounging machine. Another object of the present invention is to provide a liquid houng processing method and a liquid honing processed product obtained by this method.
課題を解決するための手段  Means for solving the problem
[0007] 本発明は以下の手段を提供する。 [0007] The present invention provides the following means.
[0008] (1) ワークを液体ホーユング処理するホーユングゾーンと、該ホーユングゾーンで 液体ホーニング処理されたワークを洗浄処理する洗浄ゾーンとを、外気から遮断され たハウジング内に互いに隣接して備えるとともに、  [0008] (1) A hounging zone for liquid hounging a work and a cleaning zone for washing a work subjected to liquid honing in the hounging zone are provided adjacent to each other in a housing cut off from outside air. With
前記ハウジング内における前記ホーユングゾーンと前記洗浄ゾーンとの間に、前記 ホーユングゾーンの雰囲気ガスが前記洗浄ゾーンに流入するのを防止する隔壁が配 設され、  A partition that prevents atmospheric gas in the hounging zone from flowing into the washing zone is disposed between the hounging zone and the washing zone in the housing,
更に、前記ホーユングゾーンで液体ホーユング処理されたワークを、搬送槽内の液 中に浸漬した状態で、前記ホーニングゾーン力 前記隔壁に設けたワーク通過用開 口を通過させて前記洗浄ゾーンへと搬送する液中搬送装置を、前記ハウジング内に 備えてレ、る液体ホーユングカ卩ェ機。  Further, the work subjected to the liquid houng treatment in the houng zone is immersed in the liquid in the transfer tank, and the honing zone force is passed through the work passage opening provided in the partition wall to the cleaning zone. A liquid hoisting carriage having a submerged transporting device in the housing.
[0009] (2) 前記隔壁のワーク通過用開口の上縁が前記液中搬送装置の搬送槽内の液 中に浸漬された状態となされている前項 1記載の液体ホーニング加工機。  [0009] (2) The liquid honing machine according to the above item 1, wherein the upper edge of the work passage opening of the partition wall is immersed in the liquid in the transfer tank of the submerged transfer apparatus.
[0010] (3) 前記液中搬送装置は、ワークが搭載される搭載板部と、該搭載板部に上方突 出状に設けられたアーム部と、該アームの上端部に設けられた吊掛部とを有する搬 送台を備え、  (3) The submerged conveying device includes a mounting plate portion on which a workpiece is mounted, an arm portion provided in a protruding manner on the mounting plate portion, and a suspension provided on an upper end portion of the arm. A carriage having a hanging portion,
前記搬送槽の側壁部の上端部に、ワーク搬送方向に延びたレール部が前記搬送 槽内の液に対し非浸漬状態に設けられ、 A rail portion extending in the workpiece transfer direction is provided at the upper end of the side wall of the transfer tank. It is provided in a non-immersed state with respect to the liquid in the tank,
前記搬送台は、前記レール部に前記吊掛部が吊り掛けられた状態で前記搬送槽 内に配置されており、  The transport table is disposed in the transport tank in a state in which the hanging portion is hung on the rail portion,
前記液中搬送装置は、前記吊掛部が前記レール部上を摺動状態でワーク搬送方 向に移動されることにより、前記搬送台の搭載板部に搭載されたワークを前記搬送槽 内の液中に浸漬した状態で搬送するものとなされている前項 1又は 2記載の液体ホ 一ユングカ卩ェ機。  The submerged transfer device moves the work mounted on the mounting plate portion of the transfer table in the transfer tank by moving the hanging portion in a sliding state on the rail portion in the work transfer direction. 3. A liquid hogging machine as described in 1 or 2 above, which is transported while immersed in liquid.
[0011] (4) 前記吊掛部の移動通路と前記レール部が、前記吊掛部の前記レール部との 摺動に伴い発生する粉塵が外部へ飛散するのを防止するカバー部材により覆われ てレ、る前項 3記載の液体ホーユング加工機。  (4) The moving path of the hanging portion and the rail portion are covered with a cover member that prevents dust generated due to sliding with the rail portion of the hanging portion from being scattered outside. The liquid hounging machine according to item 3 above.
[0012] (5) 前記カバー部材における搬送槽内側の側壁部の下端部が、前記搬送槽内の 液中に浸漬された状態となされてレ、る前項 4記載の液体ホーニング加工機。 [0012] (5) The liquid honing machine according to the above item 4, wherein the lower end portion of the side wall portion inside the transport tank in the cover member is immersed in the liquid in the transport tank.
[0013] (6) 前記液中搬送装置は、前記搬送槽内の液中にガスを噴出して気泡を発生さ せる気泡発生手段を有している前項 1〜5のいずれ力 1項記載の液体ホーニングカロ ェ機。 [0013] (6) The force in any one of the preceding items 1 to 5, wherein the submerged transport device includes bubble generating means for generating a bubble by ejecting a gas into the liquid in the transport tank. Liquid honing caloe machine.
[0014] (7) 前記液中搬送装置は、前記搬送槽内において液がワーク搬送方向とは反対 方向に流れるように液を前記搬送槽内に噴出して供給する噴出ノズノレを有している 前項 1〜6のいずれ力 1項記載の液体ホーユング加工機。  (7) The submerged transport device has a jet nozzle that ejects and supplies liquid into the transport tank so that the liquid flows in a direction opposite to the workpiece transport direction in the transport tank. The liquid hounging machine according to any one of the preceding items 1 to 6.
[0015] (8) 前記噴出ノズルは、前記搬送槽内の洗浄ゾーン側に配置されている前項 7記 載の液体ホーユングカ卩ェ機。 [0015] (8) The liquid hounging cache device according to item 7, wherein the ejection nozzle is disposed on a cleaning zone side in the transfer tank.
[0016] (9) 前記液中搬送装置は、前記搬送槽内の液が該搬送槽のホーニングゾーン側 の側壁部の上端力 オーバーフローされるものとなされている前項 1〜8のいずれか(9) The submerged transport device according to any one of the preceding items 1 to 8, wherein the liquid in the transport tank overflows the upper end force of the side wall portion on the honing zone side of the transport tank.
1項記載の液体ホーユングカ卩ェ機。 A liquid Hoyungkae machine according to item 1.
[0017] (10) 前記液中搬送装置は、前記搬送槽内の液中から引き上げられる途中のヮー クに向けて洗浄液を噴射する噴射ノズルを有している前項 1〜9のいずれか 1項記載 の液体ホーユング加工機。 [0017] (10) The liquid submerging device according to any one of the preceding items 1 to 9, wherein the submerged conveying device has an injection nozzle that injects a cleaning liquid toward a cake that is being pulled up from the liquid in the conveying tank. The liquid hounging machine as described.
[0018] (11) 前記液中搬送装置は、前記搬送槽の底面が水平面に対してワーク搬送方 向において上方に傾斜した状態に形成されている前項 1〜: 10のいずれ力 1項記載 の液体ホーユング加工機。 [0018] (11) The submerged transfer device is formed such that a bottom surface of the transfer tank is inclined upward in a workpiece transfer direction with respect to a horizontal plane. Liquid hounging machine.
[0019] (12) 前記洗浄ゾーンに清浄な雰囲気ガスを供給するガス供給装置を備えている 前項 1〜 11のレ、ずれ力 1項記載の液体ホーユング加工機。 [0019] (12) The liquid hounging machine according to [1], wherein the cleaning zone is provided with a gas supply device that supplies a clean atmospheric gas to the cleaning zone.
[0020] (13) 前記ホーニングゾーンの雰囲気ガスを吸引するガス吸引装置を備えている 前項 1〜 12のレ、ずれ力 1項記載の液体ホーユング加工機。 [0020] (13) The liquid hounging machine according to [1], wherein a gas suction device for sucking atmospheric gas in the honing zone is provided.
[0021] (14) 前記洗浄ゾーンの雰囲気ガス圧力は、前記ハウジング外側の外気圧力に対 し陽圧に調整されている前項 1〜: 13のいずれ力 4項記載の液体ホーユングカ卩ェ機。 [0021] (14) The liquid houngage cache machine according to any one of the above items 1 to 13, wherein the atmospheric gas pressure in the cleaning zone is adjusted to a positive pressure with respect to an outside air pressure outside the housing.
[0022] (15) 前記洗浄ゾーンの雰囲気ガス圧力は、前記ホーニングゾーンの雰囲気ガス 圧力に対し陽圧に調整されている前項 1〜: 14のいずれ力 1項記載の液体ホーユング 加工機。 [0022] (15) The liquid hounging machine according to any one of items 1 to 14, wherein the atmospheric gas pressure in the cleaning zone is adjusted to a positive pressure with respect to the atmospheric gas pressure in the honing zone.
[0023] (16) 前記ホーニングゾーンには、ワークを液体ホーニング処理するホーユング部 と、該ホーニング部で液体ホーユング処理されたワークをシャワー洗浄処理するシャ ヮー洗浄部と、前記ホーニング部で液体ホーニング処理されたワークを前記ホーニン グ部から前記シャワー洗浄部に搬送する搬送部とを内部に有するホーニング槽が配 置されており、  [0023] (16) In the honing zone, a hounging unit that performs a liquid honing process on the workpiece, a shower cleaning unit that performs a shower cleaning process on the workpiece that has been liquid hounged in the honing unit, and a liquid honing process in the honing unit A honing tank having a transfer unit for transferring the workpiece to the shower cleaning unit from the honing unit,
前記ホーニング槽は、ワーク投入口と、ワーク取出口と、前記ワーク投入口及び取 出口にそれぞれ対応する開閉蓋とを有しており、  The honing tank has a workpiece inlet, a workpiece outlet, and an open / close lid corresponding to each of the workpiece inlet and outlet.
前記ホーニング槽に、該ホーニング槽内の雰囲気ガスを吸引するホーニング槽用 ガス吸引装置が接続されてレ、る前項 1〜: 15のレ、ずれか 1項記載の液体ホーユングカロ ェ機。  16. The liquid houng calorie machine according to claim 1, wherein a gas suction device for a honing tank that sucks atmospheric gas in the honing tank is connected to the honing tank.
[0024] (17) 前記ホーユングゾーンには、ワークを液体ホーユング処理するホーユング部 と、該ホーユング部で液体ホーユング処理されたワークをシャワー洗浄処理する第 1 シャワー洗浄部と、前記ホーユング部で液体ホーユング処理されたワークを前記ホー ニング部から前記第 1シャワー洗浄部に搬送する搬送部とを内部に有するホーニン グ槽が配置されるとともに、更に、前記ホーユングゾーンには、ワークを前記ホーニン グ部に搬送する第 1搬送装置と、前記第 1シャワー洗浄部で洗浄処理されたワークを 前記第 1シャワー洗浄部から前記液中搬送装置に搬送する第 2搬送装置とが配置さ れており、 前記洗浄ゾーンには、前記液中搬送装置により前記洗浄ゾーンに搬送されたヮー クをシャワー洗浄処理する第 2シャワー洗浄部と、該第 2シャワー洗浄部で洗浄処理 されたワークをスクラブ洗浄処理する複数段に並んだスクラブ洗浄部と、該スクラブ洗 浄部で洗浄処理されたワークをシャワー洗浄処理する第 3シャワー洗浄部と、該第 3 シャワー洗浄部で洗浄処理されたワークを洗浄液中に浸漬することにより洗浄処理 する浸漬洗浄部と、該浸漬洗浄部で洗浄処理されたワークを高温液中に浸漬して高 温液中から引き上げることにより乾燥処理する引上げ乾燥部と、前記液中搬送装置 により前記洗浄ゾーンに搬送されたワークを前記液中搬送装置から前記各洗浄部及 び引上げ乾燥部に順次搬送する第 3搬送装置とが配置されてレ、る前項:!〜 16のい ずれか 1項記載の液体ホーユング加工機。 [0024] (17) The hounging zone includes a hounging unit that performs a liquid hounging process on the workpiece, a first shower cleaning unit that performs a shower cleaning process on the work subjected to the liquid hounging process in the hounging unit, and a liquid in the hounging unit. A honing tank having a conveying section for conveying a houng-treated work from the honing section to the first shower cleaning section is disposed inside the hounging zone. A first transport device that transports to a section, and a second transport device that transports the workpiece cleaned by the first shower cleaning section from the first shower cleaning section to the submerged transport apparatus, In the cleaning zone, a second shower cleaning unit that performs a shower cleaning process on the cake transported to the cleaning zone by the submerged transport device, and a scrub cleaning process on the workpiece that has been cleaned by the second shower cleaning unit Scrub cleaning units arranged in a plurality of stages, a third shower cleaning unit for shower cleaning the workpiece cleaned by the scrub cleaning unit, and a workpiece cleaned by the third shower cleaning unit immersed in the cleaning liquid An immersion cleaning unit that performs a cleaning process, a pull drying unit that performs a drying process by immersing the workpiece cleaned in the immersion cleaning unit in a high-temperature liquid and pulling it up from the high-temperature liquid, and the submerged conveyance device And a third transfer device for sequentially transferring the work transferred to the cleaning zone from the submerged transfer device to the cleaning unit and the pulling and drying unit. The liquid houng processing machine according to any one of ˜16.
[0025] (18) 前記スクラブ洗浄部には、スクラブ洗浄装置が設置され、  (18) The scrub cleaning unit is provided with a scrub cleaning device,
前記スクラブ洗浄装置は、ワークを自軸回転させるワーク回転駆動装置と、連続気 孔の多孔性軟質体力 なる円柱状又は円筒状こすり部材と、ワークの表面に前記こ すり部材の表面が当接された状態の前記こすり部材を自軸回転させるこすり部材回 転駆動装置と、洗浄時に前記こすり部材の表面を押圧する押圧部材と、を備え、洗 浄液を前記こすり部材の内部から前記連続気孔を介して前記こすり部材の表面外側 に滲出させるように構成されている前項 17記載の液体ホーユング加工機。  The scrub cleaning device includes a workpiece rotation driving device that rotates a workpiece by its own axis, a columnar or cylindrical rubbing member that is a porous soft body force of continuous pores, and a surface of the rubbing member that is in contact with the surface of the workpiece. A rubbing member rotation driving device for rotating the rubbing member in its own axis and a pressing member for pressing the surface of the rubbing member during cleaning, and the cleaning liquid is passed through the rubbing member from the inside of the rubbing member. 18. The liquid hounging machine according to item 17, wherein the liquid hounging machine is configured to exude to the outside of the surface of the rubbing member.
[0026] (19) 前記洗浄ゾーンで使用された使用済み洗浄液が、前記液中搬送装置の搬 送槽内に供給されるものとなされている前項 1〜: 18のいずれか 1項記載の液体ホー ユング加工機。  [0026] (19) The liquid according to any one of items 1 to 18 above, wherein the used cleaning liquid used in the cleaning zone is supplied into a transport tank of the submerged transport device. Ho Jung machine.
[0027] (20) 前記液中搬送装置の搬送槽からの排出液が、前記ホーニングゾーンで使 用されるホーニング液及び Z又は洗浄液の少なくとも一部として使用されるものとな されている前項 1〜: 19のいずれ力 1項記載の液体ホーユング加工機。  [0027] (20) The preceding paragraph 1 wherein the discharged liquid from the transfer tank of the submerged transfer device is used as at least part of the honing liquid and Z or the cleaning liquid used in the honing zone. ~: The liquid houng processing machine according to any one of 19 above.
[0028] (21) ワークは、精密パイプの素管である前項 1〜20のいずれか 1項記載の液体 ホーユング加工機。  [0028] (21) The liquid hounging machine according to any one of items 1 to 20, wherein the workpiece is a base pipe of a precision pipe.
[0029] (22) ワークは、感光ドラム基体用パイプの素管である前項 1〜20のいずれか 1項 記載の液体ホーユング加工機。  [0029] (22) The liquid hounging machine according to any one of items 1 to 20, wherein the workpiece is a base pipe of a pipe for a photosensitive drum base.
[0030] (23) 円柱状又は円筒状ワークを液体ホーユング処理するホーニングゾーンと、該 ホーユングゾーンで液体ホーユング処理されたワークを洗浄処理する洗浄ゾーンとを(23) A honing zone for liquid hounging a columnar or cylindrical workpiece, A cleaning zone for cleaning workpieces that have been liquid hounged in the hounging zone.
、外気から遮断されたハウジング内に互いに隣接して備えるとともに、 And provided adjacent to each other in a housing that is shielded from outside air,
前記ハウジング内における前記ホーユングゾーンと前記洗浄ゾーンとの間に、前記 ホーユングゾーンの雰囲気ガスが前記洗浄ゾーンに流入するのを防止する隔壁が配 設され、  A partition that prevents atmospheric gas in the hounging zone from flowing into the washing zone is disposed between the hounging zone and the washing zone in the housing,
更に、前記ホーユングゾーンで液体ホーユング処理されたワークを、搬送槽内の液 中に浸漬した状態で、前記ホーニングゾーン力 前記隔壁に設けたワーク通過用開 口を通過させて前記洗浄ゾーンへと搬送する液中搬送装置を、前記ハウジング内に 備えており、  Further, the work subjected to the liquid houng treatment in the houng zone is immersed in the liquid in the transfer tank, and the honing zone force is passed through the work passage opening provided in the partition wall to the cleaning zone. A submerged conveying device for conveying is provided in the housing,
前記洗浄ゾーンには、前記液中搬送装置により前記洗浄ゾーンに搬送されたヮー クをスクラブ洗浄処理するスクラブ洗浄部が配置されており、  In the cleaning zone, a scrub cleaning unit is disposed for scrub cleaning the cake transported to the cleaning zone by the submerged transport device,
前記スクラブ洗浄部には、スクラブ洗浄装置が設置され、  In the scrub cleaning section, a scrub cleaning device is installed,
前記スクラブ洗浄装置は、ワークを自軸回転させるワーク回転駆動装置と、連続気 孔の多孔性軟質体力 なる円柱状又は円筒状こすり部材と、ワークの表面に前記こ すり部材の表面が当接された状態の前記こすり部材を自軸回転させるこすり部材回 転駆動装置と、洗浄時に前記こすり部材の表面を押圧する押圧部材と、を備え、洗 浄液を前記こすり部材の内部から前記連続気孔を介して前記こすり部材の表面外側 に滲出させるように構成されている液体ホーユングカ卩ェ機。  The scrub cleaning device includes a workpiece rotation driving device that rotates a workpiece by its own axis, a columnar or cylindrical rubbing member that is a porous soft body force of continuous pores, and a surface of the rubbing member that is in contact with the surface of the workpiece. A rubbing member rotation driving device for rotating the rubbing member in its own axis and a pressing member for pressing the surface of the rubbing member during cleaning, and the cleaning liquid is passed through the rubbing member from the inside of the rubbing member. A liquid hounging carriage configured to exude to the outside of the surface of the rubbing member.
[0031] (24) 前記スクラブ洗浄装置の前記こすり部材回転駆動装置は、前記こすり部材 の周速度を少なくとも 0〜650mmZsの範囲に制御可能に構成されるとともに、 前記ワーク回転駆動装置は、前記ワークの周速度を少なくとも 0〜300mmZsの範 囲に制御可能に構成されている前項 23記載の液体ホーニンダカ卩ェ機。  [0031] (24) The rubbing member rotation driving device of the scrub cleaning apparatus is configured to be able to control a peripheral speed of the rubbing member in a range of at least 0 to 650 mmZs, and the workpiece rotation driving device includes the work rotation driving device. 24. The liquid horning machine according to item 23, wherein the peripheral speed of the liquid is controlled in a range of at least 0 to 300 mmZs.
[0032] (25) 前記スクラブ洗浄装置の前記こすり部材の表面は、ワークの表面に該表面 の長さ方向に沿って当接されるものである前項 23又は 24記載の液体ホーユングカロ ェ機。  [0032] (25) The liquid houngung calorifier according to item 23 or 24 above, wherein the surface of the rubbing member of the scrub cleaning device is in contact with the surface of the work along the length direction of the surface.
[0033] (26) 前記スクラブ洗浄装置の前記こすり部材の表面の長さがワークの表面の長 さに対して大寸に設定されている前項 23〜25のいずれか 1項記載の液体ホーニン グ加工機。 [0034] (27) 前記スクラブ洗浄装置は、前記ワークの端面に装着されるワーク支持部材を 備え、 [0033] (26) The liquid honing according to any one of the above items 23 to 25, wherein a length of a surface of the rubbing member of the scrub cleaning device is set to be large with respect to a length of a surface of the workpiece. Processing machine. [0034] (27) The scrub cleaning apparatus includes a work support member attached to an end surface of the work,
前記ワーク支持部材は、ワーク端面への装着状態において、ワークの表面とワーク 支持部材の周面とがワークの軸方向に面一に連なるように構成されている前項 23〜 26のいずれ力 1項記載の液体ホーユング加工機。  The work support member according to any one of the preceding items 23 to 26, wherein the work support member is configured such that the surface of the work and the peripheral surface of the work support member are flush with each other in the axial direction of the work in a mounted state on the work end surface. The liquid hounging machine described.
[0035] (28) 前記スクラブ洗浄装置の前記こすり部材の表面を前記押圧部材により押圧 した状態において、前記押圧部材が前記こすり部材の回転方向後方側に傾斜して 配置されている前項 23〜27のいずれ力 1項記載の液体ホーニング加工機。  (28) The preceding items 23 to 27, wherein the pressing member is arranged to be inclined rearward in the rotational direction of the rubbing member in a state where the surface of the rubbing member of the scrub cleaning device is pressed by the pressing member. The liquid honing machine according to claim 1.
[0036] (29) 前記スクラブ洗浄装置の前記押圧部材と前記こすり部材の回転方向後方側 の表面とのなす角度が 10〜45° の範囲に設定されている前項 28記載の液体ホー エング加工機。  [0036] (29) The liquid forging machine according to the above item 28, wherein an angle formed between the pressing member of the scrub cleaning device and a surface on the rear side in the rotational direction of the rubbing member is set in a range of 10 to 45 °. .
[0037] (30) 前記スクラブ洗浄装置の前記押圧部材は、一側縁部を押圧部とする板状の ものである前項 23〜29のいずれ力 1項記載の液体ホーニング加工機。  [0037] (30) The liquid honing machine according to any one of the items 23 to 29, wherein the pressing member of the scrub cleaning device is a plate-like member having one side edge as a pressing portion.
[0038] (31) 前記スクラブ洗浄装置の前記こすり部材は、円筒状であり、 [0038] (31) The rubbing member of the scrub cleaning device is cylindrical,
前記こすり部材の中空部内に、周壁に複数個の洗浄液流出孔が設けられ前記こす り部材の内部に洗浄液を供給する洗浄液供給管が、前記こすり部材の軸方向に挿 入配置されている前項 23〜30のいずれ力 1項記載の液体ホーニング加工機。  23. The preceding paragraph, wherein a plurality of cleaning liquid outflow holes are provided in a peripheral wall in the hollow portion of the rubbing member, and a cleaning liquid supply pipe for supplying the cleaning liquid into the rubbing member is inserted and arranged in the axial direction of the rubbing member. The liquid honing machine according to any one of ˜30.
[0039] (32) 前記スクラブ洗浄装置の前記こすり部材は、略鉛直に配置されており、 前記洗浄液供給管の上下両端部のうちいずれか一方の端部が閉塞状に形成され 前記洗浄液供給管の他方の端部が該洗浄液供給管内に洗浄液を導入する洗浄 液導入管と連結されている前項 31記載の液体ホーユングカ卩ェ機。 [0039] (32) The scrubbing member of the scrub cleaning device is disposed substantially vertically, and one of the upper and lower ends of the cleaning liquid supply pipe is formed in a closed shape, and the cleaning liquid supply pipe 32. The liquid honing cache machine as described in 31 above, wherein the other end of the liquid crystal is connected to a cleaning liquid introduction pipe for introducing a cleaning liquid into the cleaning liquid supply pipe.
[0040] (33) 前記スクラブ洗浄装置の前記こすり部材の前記多孔性軟質体は、 PVA系 樹脂、ポリエチレン系樹脂、ポリエーテル系樹脂、酢酸ビュル系樹脂及びポリウレタ ン系樹脂のうちのいずれかの発泡体により形成されている前項 23〜32のいずれか 1 項記載の液体ホーユングカ卩ェ機。  [0040] (33) The porous soft body of the rubbing member of the scrub cleaning device is any one of PVA resin, polyethylene resin, polyether resin, butyl acetate resin, and polyurethane resin. 33. The liquid houngage carriage according to any one of items 23 to 32, which is formed of a foam.
[0041] (34) ワークは、精密パイプの素管である前項 23〜33のいずれ力 4項記載の液体 ホーユング加工機。 [0042] (35) ワークは、感光ドラム基体用パイプの素管である前項 23〜33のいずれか 1 項記載の液体ホーユングカ卩ェ機。 [0041] (34) The liquid hounging machine as set forth in any one of the above items 23 to 33, wherein the workpiece is a precision pipe. [0042] (35) The liquid houngage cache machine according to any one of items 23 to 33, wherein the workpiece is a base pipe of a pipe for a photosensitive drum base.
[0043] (36) 素管について液体ホーニング処理及び洗浄処理を順次施す液体ホーニン ダカ卩ェ機を備えたパイプの製造装置において、 [36] (36) In a pipe manufacturing apparatus equipped with a liquid honing machine that sequentially performs liquid honing and cleaning on a raw pipe,
前記液体ホーニング加工機として、前項:!〜 35のいずれか 1項記載の液体ホー二 ングカ卩ェ機が用いられていることを特徴とするパイプの製造装置。  36. A pipe manufacturing apparatus, wherein the liquid honing machine according to any one of the preceding items:! To 35 is used as the liquid honing machine.
[0044] (37) パイプは、精密パイプである前項 36記載のパイプの製造装置。 [0044] (37) The pipe manufacturing apparatus according to 36 above, wherein the pipe is a precision pipe.
[0045] (38) パイプは、感光ドラム基体用パイプである前項 36記載のパイプの製造装置 [0045] (38) The pipe manufacturing apparatus according to 36 above, wherein the pipe is a photosensitive drum base pipe.
[0046] (39) ワークを液体ホーニング処理するホーユングゾーンと、該ホーニングゾーン で液体ホーユング処理されたワークを洗浄処理する洗浄ゾーンとを、外気から遮断さ れたハウジング内に互いに隣接して備えるとともに、前記ハウジング内における前記 ホーユングゾーンと前記洗浄ゾーンとの間に、前記ホーユングゾーンの雰囲気ガスが 前記洗浄ゾーンに流入するのを防止する隔壁が配設された液体ホーニンダカ卩ェ機 を用い、 [39] (39) A houng zone for performing a liquid honing process on a workpiece and a cleaning zone for cleaning a work subjected to a liquid houng process in the honing zone are provided adjacent to each other in a housing that is blocked from outside air. And a liquid horning machine in which a partition wall is disposed between the hounging zone and the cleaning zone in the housing to prevent an atmospheric gas in the hounging zone from flowing into the cleaning zone. ,
前記ホーユングゾーンで液体ホーユング処理されたワークを、搬送槽内の液中に 浸漬した状態で、前記ホーニングゾーンから前記隔壁に設けたワーク通過用開口を 通過させて前記洗浄ゾーンへと搬送し、該ワークを前記洗浄ゾーンで洗浄処理する 液体ホーユング加工方法。  The workpiece that has been liquid houng treated in the hounging zone is immersed in the liquid in the transport tank, and is transported from the honing zone through the workpiece passage opening provided in the partition wall to the cleaning zone. A liquid houng processing method for cleaning the workpiece in the cleaning zone.
[0047] (40) 前記搬送槽内の液中にガスを噴出して気泡を発生させながら、ワークを前 記搬送槽内の液中に浸漬した状態で前記洗浄ゾーンに搬送する前項 39記載の液 体ホーユング加工方法。  [0047] (40) In the above item 39, the workpiece is immersed in the liquid in the transfer tank and transferred to the cleaning zone while jetting gas into the liquid in the transfer tank to generate bubbles. Liquid houng processing method.
[0048] (41) 前記搬送槽内において液がワーク搬送方向とは反対方向に流れるように液 を前記搬送槽内に噴出しながら、ワークを前記搬送槽内の液中に浸漬した状態で前 記洗浄ゾーンに搬送する前項 39又は 40記載の液体ホーニンダカ卩ェ方法。  (41) While the work is immersed in the liquid in the transfer tank, the liquid is jetted into the transfer tank so that the liquid flows in the direction opposite to the work transfer direction in the transfer tank. 41. The liquid horning cake method according to 39 or 40 above, which is transported to the cleaning zone.
[0049] (42) 液を前記搬送槽内に該搬送槽内の洗浄ゾーン側から噴出する前項 41記載 の液体ホーユング加工方法。  [0049] (42) The liquid hounging method according to the above item 41, wherein the liquid is ejected into the transport tank from the cleaning zone side in the transport tank.
[0050] (43) 前記搬送槽内の液を該搬送槽のホーユングゾーン側の側壁部の上端から オーバーフローさせながら、ワークを前記搬送槽内の液中に浸漬した状態で前記洗 浄ゾーンに搬送する前項 39〜42のいずれ力 1項記載の液体ホーユングカ卩ェ方法。 [0050] (43) The liquid in the transfer tank is discharged from the upper end of the side wall of the transfer tank on the hounging zone side. 43. The liquid honing / cage method according to any one of items 39 to 42, wherein the work is conveyed to the cleaning zone in a state where the work is immersed in the liquid in the conveyance tank while overflowing.
[0051] (44) 前記搬送槽内の洗浄ゾーン側に搬送されたワークを前記搬送槽内の液中 力 引き上げながら該ワークに向けて洗浄液を噴射する前項 39〜43のいずれか 1 項記載の液体ホーニンダカ卩ェ方法。 [0051] (44) In any one of the preceding items 39 to 43, the cleaning liquid is jetted toward the work while the work transported to the cleaning zone side in the transport tank is pulled up to the liquid force in the transport tank. Liquid Honinka Kaye method.
[0052] (45) 前記洗浄ゾーンに清浄な雰囲気ガスを供給しながら、ワークを前記洗浄ゾ ーンで洗浄処理する前項 39〜44のいずれか 1項記載の液体ホーユング加工方法。 [0052] (45) The liquid hounging method according to any one of the above items 39 to 44, wherein the workpiece is cleaned with the cleaning zone while supplying a clean atmospheric gas to the cleaning zone.
[0053] (46) 前記洗浄ゾーンの雰囲気ガス圧力を前記ハウジング外側の外気圧力に対し 陽圧に調整した状態で、ワークを前記洗浄ゾーンで洗浄処理する前項 39〜45のレ、 ずれ力 1項記載の液体ホーユングカ卩ェ方法。 [0053] (46) In the state where the workpiece is cleaned in the cleaning zone in a state where the atmospheric gas pressure in the cleaning zone is adjusted to a positive pressure with respect to the outside air pressure outside the housing, The liquid Hoyungkae method as described.
[0054] (47) 前記洗浄ゾーンの雰囲気ガス圧力を前記ホーニングゾーンの雰囲気ガス圧 力に対し陽圧に調整した状態で、ワークを前記ホーニングゾーンで液体ホーユング 処理する前項 39〜46のいずれか 1項記載の液体ホーユング加工方法。 [0054] (47) Any one of the preceding items 39 to 46, wherein the workpiece is liquid hounged in the honing zone in a state where the atmospheric gas pressure in the cleaning zone is adjusted to be positive with respect to the atmospheric gas pressure in the honing zone. The liquid houng processing method of claim | item.
[0055] (48) 前記ホーニングゾーンには、ワークを液体ホーニング処理するホーユング部 と、該ホーニング部で液体ホーユング処理されたワークをシャワー洗浄処理するシャ ヮー洗浄部と、前記ホーニング部で液体ホーニング処理されたワークを前記ホーニン グ部から前記シャワー洗浄部に搬送する搬送部とを内部に有するホーニング槽が配 置されており、 [48] (48) In the honing zone, a hounging unit that performs a liquid honing process on the workpiece, a shower cleaning unit that performs a shower cleaning process on the workpiece that has been liquid hounged in the honing unit, and a liquid honing process in the honing unit A honing tank having a transfer unit for transferring the workpiece to the shower cleaning unit from the honing unit,
前記ホーユングゾーンにおいて、ワークを前記ホーユング部で液体ホーユング処理 し、次いで該ワークを前記搬送部により前記ホーニング部から前記シャワー洗浄部に 搬送したのち、該ワークを前記シャワー洗浄部でシャワー洗浄処理し、次いで該ヮー クを前記洗浄ゾーンへの搬送に供し、  In the hounging zone, the workpiece is liquid hounged in the hounging section, and then the workpiece is transported from the honing section to the shower cleaning section by the transport section, and then the workpiece is shower washed in the shower cleaning section. And then subjecting the cake to transport to the cleaning zone,
前記洗浄ゾーンにぉレ、て、前記洗浄ゾーンに搬送されたワークをシャワー洗浄処 理し、次レ、で該ワークを複数段に並んで配置されたスクラブ洗浄部で順次スクラブ洗 浄処理したのち、該ワークをシャワー洗浄処理し、次いで該ワークを洗浄液中に浸漬 することにより洗浄処理したのち、該ワークを高温液中に浸漬して高温液中から引き 上げることにより乾燥処理する前項 39〜47のいずれか 1項記載の液体ホーユングカロ ェ方法。 [0056] (49) 前記洗浄ゾーンの前記スクラブ洗浄部では、ワークの表面に連続気孔の多 孔性軟質体からなる円柱状又は円筒状こすり部材の表面を当接させ且つ前記こすり 部材の表面を押圧部材により押圧した状態で、洗浄液を前記こすり部材の内部から 前記連続気孔を介して前記こすり部材の表面外側に滲出させながら、ワークと前記こ すり部材を互いに同一方向にそれぞれ自軸回転させることにより、ワークをスクラブ洗 浄処理する前項 48記載の液体ホーニング加工方法。 The workpiece transferred to the cleaning zone is subjected to a shower cleaning process, and the workpiece is sequentially scrubbed and cleaned in a scrub cleaning section arranged in a plurality of stages in the next stage. The preceding items 39 to 47, wherein the workpiece is subjected to a shower cleaning treatment and then washed by immersing the workpiece in a cleaning solution, and then dried by immersing the workpiece in a high temperature solution and pulling it up from the high temperature solution. The liquid Houngungkaro method according to any one of the above. (49) In the scrub cleaning section of the cleaning zone, the surface of a columnar or cylindrical rubbing member made of a porous soft body having continuous pores is brought into contact with the surface of the work, and the surface of the rubbing member is The workpiece and the rubbing member are rotated in their own directions in the same direction while the cleaning liquid is oozed from the inside of the rubbing member to the outside of the surface of the rubbing member through the continuous pores while being pressed by the pressing member. 49. The liquid honing method according to 48 above, wherein the workpiece is scrubbed and cleaned.
[0057] (50) 前記洗浄ゾーンで使用された使用済み洗浄液を前記搬送槽内に供給する 前項 39〜49のいずれ力 1項記載の液体ホーユング加工方法。  [0057] (50) The liquid hounging method according to any one of items 39 to 49, wherein the used cleaning liquid used in the cleaning zone is supplied into the transfer tank.
[0058] (51) 前記搬送槽からの排出液を、前記ホーニングゾーンで使用されるホーニン グ液及び/又は洗浄液の少なくとも一部として使用する前項 39〜50のいずれ力 1項 記載の液体ホーニング加工方法。  [0058] (51) The liquid honing process according to any one of the items 39 to 50, wherein the liquid discharged from the transfer tank is used as at least part of a honing liquid and / or a cleaning liquid used in the honing zone. Method.
[0059] (52) ワークは、精密パイプの素管である前項 39〜51のいずれ力 1項記載の液体 ホーユング加工方法。  [0059] (52) The liquid hounging method according to any one of the above items 39 to 51, wherein the workpiece is a base pipe of a precision pipe.
[0060] (53) ワークは、感光ドラム基体用パイプの素管である前項 39〜51のいずれか 1 項記載の液体ホーニンダカ卩ェ方法。  [0060] (53) The liquid horning cake method according to any one of items 39 to 51, wherein the workpiece is a base pipe of a pipe for a photosensitive drum substrate.
[0061] (54) 円柱状又は円筒状ワークを液体ホーユング処理するホーニングゾーンと、該 ホーユングゾーンで液体ホーユング処理されたワークを洗浄処理する洗浄ゾーンとを[0061] (54) A honing zone for subjecting a columnar or cylindrical workpiece to liquid houng processing, and a cleaning zone for cleaning the workpiece subjected to liquid howing treatment in the hounging zone.
、外気から遮断されたハウジング内に互いに隣接して備えるとともに、前記ハウジング 内における前記ホーユングゾーンと前記洗浄ゾーンとの間に、前記ホーユングゾーン の雰囲気ガスが前記洗浄ゾーンに流入するのを防止する隔壁が配設された液体ホ 一ユング力卩ェ機を用い、 The housing is provided adjacent to each other in a housing that is shielded from outside air, and the atmosphere gas in the hounging zone is prevented from flowing into the washing zone between the hounging zone and the washing zone in the housing. Using a liquid hoisting machine equipped with a partition wall
前記ホーユングゾーンで液体ホーユング処理されたワークを、搬送槽内の液中に 浸漬した状態で、前記ホーユングゾーンから前記隔壁に設けたワーク通過用開口を 通過させて前記洗浄ゾーンへと搬送し、  The work that has been liquid houng treated in the hounging zone is immersed in the liquid in the transport tank, and is passed from the hounging zone to the cleaning zone through the work passage opening provided in the partition wall. ,
前記洗浄ゾーンでは、ワークの表面に連続気孔の多孔性軟質体からなる円柱状又 は円筒状こすり部材の表面を当接させ且つ前記こすり部材の表面を押圧部材により 押圧した状態で、洗浄液を前記こすり部材の内部から前記連続気孔を介して前記こ すり部材の表面外側に滲出させながら、ワークと前記こすり部材を互いに同一方向に それぞれ自軸回転させることにより、ワークをスクラブ洗浄処理する液体ホーユングカロ ェ方法。 In the cleaning zone, the surface of the columnar or cylindrical rubbing member made of a porous soft body having continuous pores is brought into contact with the surface of the workpiece, and the surface of the rubbing member is pressed by the pressing member, and the cleaning liquid is supplied. While exuding from the inside of the rubbing member to the outer surface of the rubbing member through the continuous pores, the workpiece and the rubbing member are placed in the same direction. Liquid Houng Karoe method that scrubs and cleans workpieces by rotating their own axes.
[0062] (55) 前記こすり部材の周速度を 100〜500mmZsの範囲に設定するとともに、 前記ワークの周速度を 50〜200mm/sの範囲に設定して、ワークと前記こすり部材 をそれぞれ自軸回転させる前項 54記載の液体ホーユング加工方法。  [0062] (55) The peripheral speed of the rubbing member is set in a range of 100 to 500 mmZs, the peripheral speed of the workpiece is set in a range of 50 to 200 mm / s, 55. The liquid hounging method according to item 54, wherein the liquid houng processing is performed.
[0063] (56) ワークの表面に前記こすり部材の表面をワークの表面の長さ方向に沿って 当接させた状態で、ワークをスクラブ洗浄処理する前項 54又は 55記載の液体ホー二 ング加工方法。  [0063] (56) The liquid honing process according to the above item 54 or 55, wherein the workpiece is scrubbed with the surface of the rubbing member in contact with the surface of the workpiece along the length direction of the workpiece surface. Method.
[0064] (57) ワークの表面に前記こすり部材の表面をワーク表面との当接幅が 5〜30m mの範囲内になるように当接させた状態で、ワークをスクラブ洗浄処理する前項 54〜 56のいずれか 1項記載の液体ホーユング加工方法。  [0064] (57) The preceding paragraph 54 wherein the workpiece is scrubbed with the surface of the rubbing member in contact with the surface of the workpiece so that the contact width with the workpiece surface is within a range of 5 to 30 mm. 56. The liquid hounging method according to any one of to 56.
[0065] (58) 前記こすり部材の表面の長さがワークの表面の長さに対して大寸に設定さ れており、  [0065] (58) The length of the surface of the rubbing member is set to be large relative to the length of the surface of the workpiece,
ワークの表面に前記こすり部材の表面をワークの表面の長さ方向全体に亘つて当 接させた状態で、ワークをスクラブ洗浄処理する前項 54〜57のいずれか 1項記載の 液体ホーユング加工方法。  58. The liquid hounging method according to any one of the above items 54 to 57, wherein the workpiece is scrubbed with the surface of the rubbing member in contact with the surface of the workpiece over the entire length of the workpiece surface.
[0066] (59) ワークの両端面のうち少なくとも一端面にワーク支持部材力 ワークの表面と ワーク支持部材の周面とがワークの軸方向に面一に連なる状態に装着されている前 項 54〜58のいずれ力 1項記載の液体ホーユング加工方法。 [0066] (59) The workpiece supporting member force is attached to at least one end surface of both end surfaces of the workpiece, and the surface of the workpiece and the peripheral surface of the workpiece supporting member are mounted so as to be flush with each other in the axial direction of the workpiece. The liquid houng processing method according to any one of -58.
[0067] (60) 前記こすり部材の表面を前記押圧部材により押圧した状態において、前記 押圧部材が前記こすり部材の回転方向後方側に傾斜して配置されている前項 54〜[0067] (60) In the state where the surface of the rubbing member is pressed by the pressing member, the pressing member is arranged to be inclined rearward in the rotation direction of the rubbing member.
59のいずれ力 1項記載の液体ホーユング加工方法。 59. The liquid houng processing method as set forth in any one of 59.
[0068] (61) 前記押圧部材と前記こすり部材の回転方向後方側の表面とのなす角度が 1(61) The angle formed by the pressing member and the surface on the rear side in the rotational direction of the rubbing member is 1
0〜45° の範囲に設定されている前項 60記載の液体ホーユングカ卩ェ方法。 60. The liquid Houngungkae method according to item 60, which is set in a range of 0 to 45 °.
[0069] (62) 前記こすり部材の表面を該表面に深さ 0. 5〜5mmの窪みが生じるように前 記押圧部材により押圧した状態で、ワークをスクラブ洗浄処理する前項 54〜61のい ずれ力 4項記載の液体ホーユングカ卩ェ方法。 [0069] (62) The above-mentioned items 54 to 61, in which the surface of the rubbing member is scrubbed with the workpiece while being pressed by the pressing member so that a depression having a depth of 0.5 to 5 mm is formed on the surface. Displacement force The liquid Hoyungkae method according to item 4.
[0070] (63) 前記押圧部材は、一側縁部を押圧部とする板状のものである前項 54〜62 のいずれ力 4項記載の液体ホーユング加工方法。 [0070] (63) In the preceding items 54 to 62, the pressing member is a plate-shaped member having one side edge as a pressing portion. The liquid houng processing method according to claim 4.
[0071] (64) 前記こすり部材は円筒状であり、 (64) The rubbing member is cylindrical,
前記こすり部材の中空部内に、周壁に複数個の洗浄液流出孔が設けられ前記こす り部材の内部に洗浄液を供給する洗浄液供給管が、前記こすり部材の軸方向に揷 入配置されており、  In the hollow portion of the rubbing member, a plurality of cleaning liquid outflow holes are provided in the peripheral wall, and a cleaning liquid supply pipe for supplying the cleaning liquid to the inside of the rubbing member is inserted and arranged in the axial direction of the rubbing member,
前記洗浄液供給管内の洗浄液を前記洗浄液流出孔から流出させて前記こすり部 材の連続気孔を介して前記こすり部材の表面外側に滲出させながら、ワークをスクラ ブ洗浄処理する前項 54〜63のいずれか 1項記載の液体ホーユングカ卩ェ方法。  54. Any one of the preceding items 54 to 63, wherein the cleaning liquid in the cleaning liquid supply pipe flows out from the cleaning liquid outflow hole and exudes to the outside of the surface of the rubbing member through continuous pores of the rubbing member, and the workpiece is scrubbed. The liquid Hoyungkae method according to item 1.
[0072] (65) ワークと前記こすり部材はそれぞれ略鉛直に配置されており、 (65) The workpiece and the rubbing member are each arranged substantially vertically,
前記洗浄液供給管の上下両端部のうちいずれか一方の端部が閉塞状に形成され 前記洗浄液供給管の他方の端部が該洗浄液供給管内に洗浄液を導入する洗浄 液導入管と連結されている前項 64記載の液体ホーユング加工方法。  Either one of the upper and lower ends of the cleaning liquid supply pipe is closed, and the other end of the cleaning liquid supply pipe is connected to a cleaning liquid introduction pipe for introducing the cleaning liquid into the cleaning liquid supply pipe. 65. The liquid hounging method according to item 64.
[0073] (66) 前記多孔性軟質体は、 PVA系樹脂、ポリエチレン系樹脂、ポリエーテル系 樹脂、酢酸ビニル系樹脂及びポリウレタン系樹脂のうちのいずれ力の発泡体により形 成されている前項 54〜65のいずれ力 1項記載の液体ホーニング加工方法。  [66] (66) The porous soft body is formed of any one of foams of PVA resin, polyethylene resin, polyether resin, vinyl acetate resin, and polyurethane resin. The liquid honing method according to any one of -65.
[0074] (67) ワークは、精密パイプの素管である前項 54〜66のいずれ力 1項記載の液体 ホーユング加工方法。  [0074] (67) The liquid hounging method according to any one of items 54 to 66, wherein the workpiece is a base pipe of a precision pipe.
[0075] (68) ワークは、感光ドラム基体用パイプの素管である前項 54〜66のいずれか 1 項記載の液体ホーニンダカ卩ェ方法。  [0075] (68) The liquid horning cake method according to any one of items 54 to 66, wherein the workpiece is a base pipe of a pipe for a photosensitive drum substrate.
[0076] (69) 前項 39〜68のいずれ力 4項記載の液体ホーユング加工方法により得られ た液体ホーユング加工品。 [0076] (69) A liquid houng processed product obtained by the liquid houng processing method as set forth in any one of the items 39 to 68.
発明の効果  The invention's effect
[0077] 本発明は次の効果を奏する。 [0077] The present invention has the following effects.
[0078] [1]の発明の液体ホーユング加工機によれば、ワークについて液体ホーニング処 理及び洗浄処理を順次施すことができるから、量産性が向上する。  [0078] According to the liquid hounging machine of the invention of [1], the liquid honing process and the cleaning process can be sequentially performed on the workpiece, so that mass productivity is improved.
[0079] さらに、ハウジング内におけるホーニングゾーンと洗浄ゾーンとの間に隔壁が配設さ れているので、ホーユングゾーンの雰囲気ガス中を浮遊している砥粒ゃ塵等の異物 が洗浄ゾーンに流入するのをこの隔壁によって防止することができる。そのため、ホ 一ユングゾーンの雰囲気ガス中を浮遊する異物の洗浄ゾーンへの流入による洗浄ゾ ーンの汚染を防止することができる。 [0079] Further, since the partition wall is disposed between the honing zone and the cleaning zone in the housing, foreign matter such as abrasive particles or the like floating in the atmosphere gas of the hounging zone. Can be prevented by this partition. Therefore, contamination of the cleaning zone due to inflow of foreign matter floating in the atmosphere gas in the houng zone to the cleaning zone can be prevented.
[0080] また、ホーユングゾーンで液体ホーユング処理されたワークは、液中搬送装置によ つて、搬送槽内の液中に浸漬された状態で、ホーユングゾーンから隔壁に設けたヮ ーク通過用開口を通過されて洗浄ゾーンへと搬送されることから、ワークの搬送時に 、ワークが搬送槽内の液中に浸漬されることにより該ワークに付着した砥粒ゃ塵等の 異物が除去される。そのため、ワークに付着した異物がワークへの付着状態のままで ワークと共に洗浄ゾーンに持ち込まれるのを防止することができて、ワークに付着した 異物の洗浄ゾーンへの持ち込みによる洗浄ゾーンの汚染を防止することができる。  [0080] Further, the workpiece subjected to the liquid houng treatment in the hounging zone is immersed in the liquid in the conveying tank by the submerged conveying device, and passes through the workpiece provided in the partition from the hounging zone. Since the workpiece is passed through the cleaning opening and transported to the cleaning zone, foreign matters such as abrasive grains adhering to the workpiece are removed when the workpiece is immersed in the liquid in the transport tank when the workpiece is transported. The As a result, foreign matter adhering to the workpiece can be prevented from being brought into the cleaning zone with the workpiece while remaining attached to the workpiece, and contamination of the cleaning zone due to foreign matter adhering to the workpiece being brought into the cleaning zone can be prevented. can do.
[0081] すなわち、この発明の液体ホーユング加工機によれば、ホーニングゾーンの雰囲気 ガス中を浮遊する異物の洗浄ゾーンへの流入による洗浄ゾーンの汚染を防止するこ とができるし、その上、ワークに付着した異物の洗浄ゾーンへの持ち込みによる洗浄 ゾーンの汚染をも防止することができるから、洗浄ゾーンを高い清浄度に維持するこ とができる。よって、洗浄不良の発生を防止することができる。  That is, according to the liquid hounging machine of the present invention, contamination of the cleaning zone due to inflow of foreign matter floating in the atmosphere gas of the honing zone into the cleaning zone can be prevented, and in addition, the workpiece can be prevented from being contaminated. It is possible to prevent contamination of the cleaning zone by bringing foreign matter adhering to the cleaning zone into the cleaning zone, so that the cleaning zone can be maintained at high cleanliness. Therefore, it is possible to prevent the occurrence of poor cleaning.
[0082] [2]の発明では、隔壁のワーク通過用開口の上縁が液中搬送装置の搬送槽内の 液中に浸漬された状態となされているので、ホーニングゾーンの雰囲気ガス中を浮遊 する異物がワーク通過用開口を通って洗浄ゾーンに流入するのを確実に防止するこ とができる。したがって、洗浄ゾーンの清浄度を確実に維持することができる。  [0082] In the invention of [2], the upper edge of the work passage opening of the partition wall is immersed in the liquid in the transfer tank of the submerged transfer device, so that it floats in the atmospheric gas in the honing zone. It is possible to reliably prevent foreign matter from entering the cleaning zone through the workpiece passage opening. Therefore, the cleanliness of the cleaning zone can be reliably maintained.
[0083] [3]の発明では、搬送槽のレール部が搬送槽内の液に対し非浸漬状態であるから 、吊掛部のレール部との摺動に伴い発生する粉塵が搬送槽内の液中に流出するの を防止することができる。そのため、この粉塵の、搬送槽内の液中への流出による搬 送槽内の液の汚染を防止することができる。  [0083] In the invention of [3], since the rail part of the transfer tank is not immersed in the liquid in the transfer tank, dust generated by sliding with the rail part of the hanging part is not contained in the transfer tank. It can be prevented from flowing into the liquid. Therefore, contamination of the liquid in the transport tank due to the outflow of this dust into the liquid in the transport tank can be prevented.
[0084] [4]の発明では、搬送台の吊掛部のレール部との摺動に伴い発生する粉塵が外部 へ飛散するのをカバー部材によって防止することができる。そのため、洗浄ゾーンの 清浄度を更に確実に維持することができる。  [0084] In the invention of [4], the cover member can prevent dust generated due to sliding with the rail portion of the hanging portion of the transport table from being scattered to the outside. Therefore, the cleanliness of the cleaning zone can be maintained more reliably.
[0085] [5]の発明では、カバー部材における搬送槽内側の側壁部の下端部が搬送槽内 の液中に浸漬された状態となされているので、搬送台の吊掛部のレール部との摺動 に伴い発生する粉塵が外部へ飛散するのを確実に防止することができる。 [0085] In the invention of [5], since the lower end portion of the side wall portion inside the transport tank in the cover member is immersed in the liquid in the transport tank, the rail portion of the suspension section of the transport base Sliding As a result, it is possible to reliably prevent the dust generated from scattering to the outside.
[0086] [6]の発明では、気泡発生手段によって搬送槽内の液中に気泡を発生させながら 、ワークを搬送槽内の液中に浸漬した状態で洗浄ゾーンに搬送することができる。そ のため、ワークの搬送時において、ワークに付着した異物を効果的に除去することが できて、ワークに付着した異物が洗浄ゾーンに持ち込まれるのを確実に防止すること ができる。 [0086] In the invention of [6], the work can be transported to the cleaning zone in a state where the work is immersed in the liquid in the transport tank while bubbles are generated in the liquid in the transport tank by the bubble generating means. As a result, foreign matters adhering to the workpiece can be effectively removed during the conveyance of the workpiece, and foreign matters adhering to the workpiece can be reliably prevented from being brought into the cleaning zone.
[0087] [7]の発明では、搬送槽内において液がワーク搬送方向とは反対方向に流れるよう に液を噴出ノズルにより搬送槽内に噴出して供給しながら、ワークを搬送槽内の液中 に浸漬した状態で洗浄ゾーンに搬送することができる。そのため、搬送槽内の液中に 存在している、ワークから除去された異物力 搬送槽内の液流によって搬送槽内のホ 一ユングゾーン側に移動されるから、洗浄ゾーンの汚染を更に確実に防止することが できる。  [0087] In the invention of [7], the work is supplied to the liquid in the transfer tank while the liquid is jetted and supplied into the transfer tank by the jet nozzle so that the liquid flows in the direction opposite to the workpiece transfer direction in the transfer tank. It can be transported to the cleaning zone while immersed in it. For this reason, the foreign matter force removed from the workpiece in the liquid in the transfer tank is moved to the houng zone side in the transfer tank by the liquid flow in the transfer tank, thus further ensuring contamination of the cleaning zone. Can be prevented.
[0088] [8]の発明では、液を搬送槽内に該搬送槽内の洗浄ゾーン側から噴出ノズノレにより 噴出することができる。そのため、搬送槽内の液中から引き上げる直前のワークに近 接した位置で該ワークに向けて液を噴出することができて、ワークに付着した異物の 除去率が向上する。  [0088] In the invention of [8], the liquid can be ejected into the transport tank from the cleaning zone side in the transport tank. As a result, the liquid can be ejected toward the workpiece at a position close to the workpiece just before being pulled up from the liquid in the transfer tank, and the removal rate of the foreign matter adhering to the workpiece is improved.
[0089] [9]の発明では、搬送槽内の液面に浮上した異物が搬送槽内の液と共にオーバー フローして搬送槽外へ排出される。そのため、搬送槽内の液の清浄度の低下を防止 できるし、ワークの搬送時における異物のワークへの再付着を防止できる。さらに、搬 送槽内の液面に浮上した異物は、搬送槽の洗浄ゾーン側の側壁部ではなくホーニン グゾーン側の側壁部の上端からオーバーフローして排出されるから、この排出液で 洗浄ゾーンが汚染される虞はなレ、。  [0089] In the invention [9], the foreign matter floating on the liquid surface in the transport tank overflows with the liquid in the transport tank and is discharged out of the transport tank. Therefore, it is possible to prevent a decrease in the cleanliness of the liquid in the transfer tank, and it is possible to prevent foreign matters from reattaching to the work during the work transfer. Furthermore, foreign matter that has floated to the liquid surface in the transport tank overflows from the upper end of the side wall portion on the honing zone side, not the side wall portion on the cleaning zone side of the transport tank, and is discharged. There is no danger of being contaminated.
[0090] [ 10]の発明では、搬送槽内の液中から引き上げられる途中のワークに向けて洗浄 液を噴射ノズノレにより噴射することにより、ワークの搬送時や引き上げ時にワークに再 付着した異物を、ワークを引き上げる途中で除去することができる。  [0090] In the invention of [10], the cleaning liquid is sprayed by an injection nozzle toward the workpiece that is being pulled up from the liquid in the transfer tank, so that foreign matter that has reattached to the workpiece during transfer or lifting of the workpiece is removed. , Can be removed in the middle of lifting the workpiece.
[0091] [ 11]の発明では、搬送槽内の液中に沈降した異物が搬送槽の底面上を滑って搬 送槽内のホーユングゾーン側に移動される。そのため、洗浄ゾーンの汚染を更に確 実に防止することができる。 [0092] [ 12]の発明では、ガス供給装置によって洗浄ゾーンに清浄な雰囲気ガスを供給す ることにより、洗浄ゾーンの清浄度を向上させることができる。 [0091] In the invention of [11], the foreign matter settled in the liquid in the transport tank slides on the bottom surface of the transport tank and is moved to the hounging zone side in the transport tank. Therefore, contamination of the cleaning zone can be prevented more reliably. [0092] In the invention of [12], the cleanliness of the cleaning zone can be improved by supplying a clean atmospheric gas to the cleaning zone by the gas supply device.
[0093] [ 13]の発明では、ガス吸引装置によってホーニングゾーンの雰囲気ガスを吸引す ることにより、ホーユングゾーンの雰囲気ガス中を浮遊する異物を除去することができ て、ホーユングゾーンの清浄度を向上させることができる。 [0093] According to the invention of [13], the foreign gas floating in the atmospheric gas in the houng zone can be removed by sucking the atmospheric gas in the honing zone by the gas suction device, and the houng zone is cleaned. The degree can be improved.
[0094] [ 14]の発明では、ハウジング外側の外気がハウジングに不可避的に生じた隙間か ら洗浄ゾーンに流入するのを防止することができて、洗浄ゾーンの清浄度を確実に 維持すること力 Sできる。 [0094] According to the invention of [14], outside air outside the housing can be prevented from flowing into the cleaning zone through a gap inevitably generated in the housing, and the cleanliness of the cleaning zone can be reliably maintained. Power S can be.
[0095] [ 15]の発明では、ホーニングゾーンの雰囲気ガスが、隔壁とハウジングとの間ゃ隔 壁と搬送槽との間などにおいて不可避的に生じた隙間から洗浄ゾーンに流入するの を防止することができて、洗浄ゾーンの清浄度を確実に維持することができる。  [0095] In the invention of [15], the atmospheric gas in the honing zone is prevented from flowing into the cleaning zone through a gap inevitably generated in the space between the partition wall and the housing and between the transfer tank and the like. And the cleanliness of the cleaning zone can be reliably maintained.
[0096] [ 16]の発明では、ホーニングゾーンに配置されたホーニング槽内で液体ホーニン グ処理とシャワー洗浄処理が行われる。そのため、ホーニングゾーンの汚染を防止す ること力 Sできる。  [0096] In the invention of [16], the liquid honing process and the shower cleaning process are performed in the honing tank disposed in the honing zone. Therefore, it is possible to prevent contamination of the honing zone.
[0097] さらに、ホーニング槽のワーク投入口及び取出口のうち少なくとも一方を開けた状 態のときに、ホーニング槽内の雰囲気ガスをホーニング槽用ガス吸引装置により吸引 することにより、ホーニング槽内の雰囲気ガス中を浮遊する異物がワーク投入口及び 取出口のうち前記少なくとも一方を介してホーユングゾーンに流出するのを確実に防 止することができて、ホーユングゾーンの清浄度を確実に維持することができる。  [0097] Further, when at least one of the work inlet and outlet of the honing tank is opened, the atmospheric gas in the honing tank is sucked by the gas suction device for the honing tank, thereby Foreign matter floating in the atmospheric gas can be reliably prevented from flowing into the hounging zone through at least one of the workpiece inlet and outlet, and the cleanliness of the hounging zone is reliably maintained. can do.
[0098] [ 17]の発明では、ホーユングゾーンに配置されたホーニング槽内で液体ホーニン グ処理とシャワー洗浄処理が行われる。そのため、ホーユングゾーンの汚染を防止す ること力 Sできる。  [0098] In the invention of [17], the liquid honing process and the shower cleaning process are performed in the honing tank disposed in the hounging zone. Therefore, it is possible to prevent contamination of the hounging zone.
[0099] さらに、洗浄ゾーンにおいて、ワークについて複数の所定の洗浄処理及び乾燥処 理を順次施すことにより、ワークの洗浄効率をより一層向上させることができる。  [0099] Furthermore, the workpiece cleaning efficiency can be further improved by sequentially performing a plurality of predetermined cleaning treatments and drying treatments on the workpiece in the washing zone.
[0100] [ 18]の発明では、スクラブ洗浄装置のこすり部材が連続気孔の多孔性軟質体から なるので、こすり部材の表面をワークの表面に当接させることにより、ワークの表面上 に存在している異物をこすり部材の表面の気孔内に取り込んでしつカ^と捕捉するこ とができる。そのため、異物をワークの表面から確実に除去することができる。 [0101] さらに、洗浄液をこすり部材の内部から連続気孔を介してこすり部材の表面外側に 滲出させながら、ワークの洗浄を行うことにより、こすり部材の表面に付着した異物や 表面の気孔内に捕捉された異物を、こすり部材の表面外側へ滲出する洗浄液によつ て、洗浄液と一緒に外部へ排出することができる。さらに、こすり部材の表面を押圧部 材により押圧することにより、こすり部材の表面の押圧部材による被押圧部分におい て、異物を排出するための洗浄液がこすり部材の内部から多量に滲出するようになる から、異物を外部へ確実に排出することができる。し力もこのとき、気孔内に捕捉され ていた異物が押圧部材との当接によってこすり部材の表面上に浮上するなど、異物 が除去され易い状態になり得るから、異物の外部への排出量を増大することができる 。そのため、異物のワーク表面への再付着を確実に防止することができるし、ワーク の表面にこすり部材の表面の気孔内に残留した異物が接触することにより生じるヮー ク表面の傷つきを防止することができる。したがって、ワークの表面欠陥の発生率を 低減すること力 Sできる。 [0100] In the invention of [18], since the rubbing member of the scrub cleaning device is made of a porous soft body having continuous pores, the rubbing member is present on the surface of the workpiece by contacting the surface of the rubbing member with the surface of the workpiece. It is possible to take in the foreign matter in the pores on the surface of the rubbing member and catch it. Therefore, the foreign matter can be reliably removed from the surface of the workpiece. [0101] Furthermore, by washing the workpiece while leaching the cleaning liquid from the inside of the rubbing member through the continuous pores to the outside of the surface of the rubbing member, the foreign matter adhered to the surface of the rubbing member and trapped in the pores on the surface The cleaned foreign matter can be discharged to the outside together with the cleaning liquid by the cleaning liquid that exudes to the outside of the surface of the rubbing member. Furthermore, by pressing the surface of the rubbing member with the pressing member, a large amount of the cleaning liquid for discharging foreign matter oozes out from the inside of the rubbing member at the pressed portion of the surface of the rubbing member by the pressing member. Therefore, foreign matter can be reliably discharged to the outside. At this time, the foreign matter trapped in the pores can easily be removed, for example, the foreign matter floating on the surface of the rubbing member due to contact with the pressing member. Can be increased. For this reason, it is possible to reliably prevent foreign matters from reattaching to the workpiece surface, and to prevent scratches on the workpiece surface caused by foreign matter remaining in the pores of the surface of the scraping member contacting the workpiece surface. Can do. Therefore, it is possible to reduce the incidence of surface defects on the workpiece.
[0102] [ 19]の発明では、洗浄ゾーンで使用された使用済み洗浄液を有効に利用すること ができる。  [0102] In the invention of [19], the used cleaning liquid used in the cleaning zone can be effectively used.
[0103] [20]の発明では、搬送槽からの排出液を有効に利用することができる。  [0103] In the invention [20], the liquid discharged from the transfer tank can be used effectively.
[0104] [21]の発明では、精密パイプの素管について洗浄不良の発生を防止することがで きる。 [0104] In the invention of [21], it is possible to prevent the occurrence of poor cleaning of the raw pipe of the precision pipe.
[0105] [22]の発明では、感光ドラム基体用パイプの素管について洗浄不良の発生を防 止すること力 Sできる。  [0105] In the invention of [22], it is possible to prevent the occurrence of poor cleaning of the base pipe of the photosensitive drum base pipe.
[0106] [23]の発明では、上記 [1]の発明と同様の効果を奏する。  [0106] The invention [23] has the same effects as the invention [1].
[0107] さらに、スクラブ洗浄装置のこすり部材が連続気孔の多孔性軟質体からなるので、 こすり部材の表面をワークの表面に当接させることにより、ワークの表面上に存在して レ、る異物をこすり部材の表面の気孔内に取り込んでしつカ^と捕捉することができる。 そのため、異物をワークの表面から確実に除去することができる。  [0107] Further, since the rubbing member of the scrub cleaning device is made of a porous soft body having continuous pores, the foreign material present on the surface of the workpiece by bringing the surface of the rubbing member into contact with the surface of the workpiece. It is possible to take in the pores on the surface of the rubbing member and capture it. Therefore, the foreign matter can be reliably removed from the surface of the workpiece.
[0108] さらに、洗浄液をこすり部材の内部から連続気孔を介してこすり部材の表面外側に 滲出させながら、ワークの洗浄を行うことにより、こすり部材の表面に付着した異物や 表面の気孔内に捕捉された異物を、こすり部材の表面外側へ滲出する洗浄液によつ て、洗浄液と一緒に外部へ排出することができる。さらに、こすり部材の表面を押圧部 材により押圧することにより、こすり部材の表面の押圧部材による被押圧部分におい て、異物を排出するための洗浄液がこすり部材の内部から多量に滲出するようになる から、異物を外部へ確実に排出することができる。し力もこのとき、気孔内に捕捉され ていた異物が押圧部材との当接によってこすり部材の表面上に浮上するなど、異物 が除去され易い状態になり得るから、異物の外部への排出量を増大することができる 。そのため、異物のワーク表面への再付着を確実に防止することができるし、ワーク の表面にこすり部材の表面の気孔内に残留した異物が接触することにより生じるヮー ク表面の傷つきを防止することができる。したがって、ワークの表面欠陥の発生率を 低減すること力 Sできる。 [0108] Further, by washing the workpiece while leaching the cleaning liquid from the inside of the rubbing member through the continuous pores to the outside of the surface of the rubbing member, the foreign matter adhered to the surface of the rubbing member and trapped in the pores on the surface Use a cleaning solution that exudes the foreign matter to the outside of the rubbing member. Can be discharged together with the cleaning solution. Furthermore, by pressing the surface of the rubbing member with the pressing member, a large amount of the cleaning liquid for discharging foreign matter oozes out from the inside of the rubbing member at the pressed portion of the surface of the rubbing member by the pressing member. Therefore, foreign matter can be reliably discharged to the outside. At this time, the foreign matter trapped in the pores can easily be removed, such as the foreign matter floating on the surface of the rubbing member due to contact with the pressing member. Can be increased. For this reason, it is possible to reliably prevent foreign matters from reattaching to the workpiece surface, and to prevent scratches on the workpiece surface caused by foreign matter remaining in the pores of the surface of the scraping member contacting the workpiece surface. Can do. Therefore, it is possible to reduce the incidence of surface defects on the workpiece.
[0109] [24]の発明では、こすり部材の周速度とワークの周速度をそれぞれ所定範囲に確 実に設定できる。そして、こすり部材とワークをそれぞれ自軸回転させることにより、異 物をワークの表面から更に確実に除去することができる。  [0109] In the invention of [24], the peripheral speed of the rubbing member and the peripheral speed of the workpiece can be reliably set within predetermined ranges. Then, by rotating the rubbing member and the workpiece by their own axes, foreign objects can be more reliably removed from the surface of the workpiece.
[0110] [25]の発明では、ワークの表面にこすり部材の表面をワークの表面の長さ方向に 沿って当接させた状態で、ワークをスクラブ洗浄処理できる。これにより、異物のヮー ク表面からの除去量を増大させることができる。 [0110] In the invention of [25], the work can be scrub cleaned with the surface of the rubbing member abutting the work surface along the length direction of the work surface. Thereby, the removal amount of foreign matters from the surface of the cake can be increased.
[0111] [26]の発明では、ワークの表面の長さ方向全体に亘つて異物を除去することがで きる。 [0111] In the invention of [26], the foreign matter can be removed over the entire length direction of the surface of the workpiece.
[0112] [27]の発明では、ワークの両端面のうち少なくとも一端面にワーク支持部材が装着 されることにより、ワークをワーク支持部材により支持することができる。さらに、ワーク の表面とワーク支持部材の周面とが互いに面一に連なる状態にワークの端面にヮー ク支持部材が装着されているので、ワークの表面の端部にこすり部材の表面を確実 に当接させることができて、ワークの表面の端部を確実にスクラブ洗浄処理することが できる。  In the invention of [27], the work can be supported by the work support member by attaching the work support member to at least one of the both end faces of the work. In addition, since the workpiece support member is mounted on the end surface of the workpiece so that the surface of the workpiece and the peripheral surface of the workpiece support member are flush with each other, the surface of the rubbing member is securely attached to the end of the workpiece surface. The end of the surface of the workpiece can be surely scrubbed.
[0113] [28]の発明では、こすり部材の表面に付着した異物や気孔内に捕捉された異物を 外部へ確実に排出することができる。  [0113] In the invention of [28], the foreign matter adhering to the surface of the rubbing member and the foreign matter trapped in the pores can be reliably discharged to the outside.
[0114] [29]の発明では、こすり部材の表面に付着した異物を気孔内に捕捉された異物を 外部へ更に確実に排出することができる。 [0115] [30]の発明では、こすり部材の表面を板状の押圧部材により押圧することにより、 こすり部材の内部から洗浄液を確実に多量に滲出させることができて、異物を外部へ 確実に排出することができる。しかも、この板状の押圧部材を用いることにより、気孔 内に捕捉されていた異物が確実に除去され易い状態になり得て、異物の外部への 排出量を確実に増大することができる。 [0114] According to the invention of [29], the foreign matter trapped in the pores can be more reliably discharged to the outside. [0115] In the invention of [30], by pressing the surface of the rubbing member with a plate-like pressing member, a large amount of the cleaning liquid can be surely exuded from the inside of the rubbing member, and the foreign matter is reliably discharged to the outside. Can be discharged. In addition, by using this plate-like pressing member, the foreign matter trapped in the pores can be easily removed, and the amount of foreign matter discharged to the outside can be reliably increased.
[0116] [31]の発明では、こすり部材の内部に洗浄液を確実に供給することができる。さら に、こすり部材の中空部内に揷入された洗浄液供給管がこすり部材を補強する芯金 (心金)として作用し、そのため、こすり部材の表面をワークの表面にしつ力りと当接さ せること力 Sできる。  [0116] In the invention of [31], the cleaning liquid can be reliably supplied into the rubbing member. In addition, the cleaning liquid supply pipe inserted into the hollow portion of the rubbing member acts as a core (core) for reinforcing the rubbing member, so that the surface of the rubbing member is brought into contact with the surface of the work and the tensile force. It is possible to make it S.
[0117] [32]の発明では、異物を取り込んだ洗浄液が洗浄時にワークやこすり部材の表面 上を軸方向に流下するようになり、もって異物を迅速に除去することができる。  [0117] In the invention of [32], the cleaning liquid that has taken in the foreign matters flows down on the surface of the workpiece and the rubbing member in the axial direction during the cleaning, so that the foreign matters can be quickly removed.
[0118] [33]の発明では、ワークの表面を傷つけることなく異物をワーク表面から確実に除 去すること力 Sできる。  [0118] In the invention of [33], the force S can be reliably removed from the workpiece surface without damaging the workpiece surface.
[0119] [34]の発明では、精密パイプの素管について洗浄不良の発生を防止することがで きる。  [0119] In the invention of [34], it is possible to prevent the occurrence of poor cleaning of the raw pipe of the precision pipe.
[0120] [35]の発明では、感光ドラム基体用パイプの素管について洗浄不良の発生を防 止すること力 Sできる。  [0120] In the invention of [35], it is possible to prevent the occurrence of poor cleaning of the base pipe of the pipe for the photosensitive drum base.
[0121] [36]の発明では、パイプの素管について洗浄不良の発生を防止することができる  [0121] In the invention of [36], it is possible to prevent the occurrence of poor cleaning of the pipe pipe.
[0122] [37]の発明では、精密パイプの素管について洗浄不良の発生を防止することがで きる。 [0122] In the invention of [37], it is possible to prevent the occurrence of poor cleaning of the raw pipe of the precision pipe.
[0123] [38]の発明では、感光ドラム基体用パイプの素管について洗浄不良の発生を防 止すること力 Sできる。  [0123] According to the invention of [38], it is possible to prevent the occurrence of poor cleaning of the base pipe of the pipe for the photosensitive drum base.
[0124] [39]〜 [53]の発明では、本発明の液体ホーニンダカ卩ェ機における上述した効果 と同様の効果を奏する。  [0124] In the inventions [39] to [53], the same effects as those described above in the liquid Honinka machine of the present invention are obtained.
[0125] [54]〜[56]の発明では、それぞれ上記 [23]〜[25]の発明と同様の効果を奏す る。 [0125] The inventions [54] to [56] have the same effects as the inventions [23] to [25], respectively.
[0126] [57]の発明では、ワークの表面に付着した異物を確実に除去することができる。さ らに、こすり部材のワーク表面への押付け力が強くなりすぎてワークの表面が傷つく 不具合を防止することができる。 [0126] According to the invention of [57], the foreign matter adhering to the surface of the workpiece can be reliably removed. The Furthermore, the pressing force of the rubbing member against the workpiece surface becomes too strong, and the problem that the workpiece surface is damaged can be prevented.
[0127] [58]〜[61]の発明では、それぞれ上記 [26]〜[29]の発明と同様の効果を奏す る。 [0127] The inventions [58] to [61] have the same effects as the inventions [26] to [29], respectively.
[0128] [62]の発明では、こすり部材の表面に付着した異物や気孔内に捕捉された異物を 外部へ更に確実に排出することができる。  [0128] In the invention of [62], the foreign matter adhering to the surface of the rubbing member and the foreign matter trapped in the pores can be more reliably discharged to the outside.
[0129] [63]〜[68]の発明では、それぞれ上記 [30]〜[35]の発明と同様の効果を奏す る。 [0129] The inventions [63] to [68] have the same effects as the inventions [30] to [35], respectively.
[0130] [69]の発明では、高品質の液体ホーユング加工品を提供できる。  [0130] In the invention of [69], a high-quality liquid houng processed product can be provided.
図面の簡単な説明  Brief Description of Drawings
[0131] [図 1]本発明の一実施形態に係る液体ホーニンダカ卩ェ機の概略縦断面図である。  FIG. 1 is a schematic longitudinal sectional view of a liquid horning machine according to an embodiment of the present invention.
[図 2]同液体ホーニング加工機のホーニング槽の概略断面図である。  FIG. 2 is a schematic sectional view of a honing tank of the liquid honing machine.
[図 3]同液体ホーニング加工機の液中搬送装置の概略縦断面図である。  FIG. 3 is a schematic longitudinal sectional view of a submerged transport device of the liquid honing machine.
[図 4]同液中搬送装置の概略横断面図である。  FIG. 4 is a schematic cross-sectional view of the in-liquid transport device.
[図 5]同液中搬送装置の一部の斜視図である。  FIG. 5 is a perspective view of a part of the in-liquid transport device.
[図 6]同液体ホーユングカ卩ェ機の配管図である。  [Fig. 6] Piping diagram of the liquid Hoyungkahe machine.
[図 7]同液体ホーニンダカ卩ェ機のスクラブ洗浄装置の斜視図である。  FIG. 7 is a perspective view of a scrub cleaning device of the same liquid Honinda cafe.
[図 8]同スクラブ洗浄装置の正面図である。  FIG. 8 is a front view of the scrub cleaning apparatus.
[図 9]図 8中の X—X線断面図である。  FIG. 9 is a sectional view taken along line XX in FIG.
[図 10]同スクラブ洗浄装置のこすり部材の縦断面図である。  FIG. 10 is a longitudinal sectional view of a rubbing member of the scrub cleaning apparatus.
[図 11]同スクラブ洗浄装置の分解図である。  FIG. 11 is an exploded view of the scrub cleaning apparatus.
[図 12A]同スクラブ洗浄装置におけるワークの上端部とワーク支持部材を中心に示し た拡大正面図である。  FIG. 12A is an enlarged front view mainly showing an upper end portion of a work and a work supporting member in the scrub cleaning apparatus.
[図 12B]図 12Aにおレ、てワーク支持部材を変形した場合の、図 12Aに対応する拡大 正面図である。  FIG. 12B is an enlarged front view corresponding to FIG. 12A when the workpiece support member is deformed in FIG. 12A.
発明を実施するための最良の形態  BEST MODE FOR CARRYING OUT THE INVENTION
[0132] 次に、本発明の一実施形態について図面を参照して以下に説明する。 Next, an embodiment of the present invention will be described below with reference to the drawings.
[0133] 図 1において、(1)は本発明の一実施形態に係る液体ホーニング加工機である。こ の液体ホーユング力卩ェ機(1)により加工されるワーク(2)は、精密パイプの素管であり 、詳述すると、電子複写機、レーザプリンタ、 FAX装置等に搭載される感光ドラムの 基体に用いられるパイプの素管、即ち感光ドラム基体用パイプの素管である。 [0133] In Fig. 1, (1) is a liquid honing machine according to an embodiment of the present invention. This The work (2) processed by the liquid hounging force machine (1) is a base pipe of a precision pipe. More specifically, the base of a photosensitive drum mounted on an electronic copying machine, a laser printer, a facsimile machine, etc. 1 is a base pipe of a pipe used for the above, that is, a pipe for a photosensitive drum substrate.
[0134] このワーク(2) (素管)は、所定長さに設定された円筒状のものであり、引抜き加工 により得られたアルミニウム(その合金を含む。以下同じ。)製の引抜き管からなる。例 えば、このワーク(2)の長さは 200〜450mm、外径は 15〜50mm、肉厚は 0. 5〜2 mmに設定されている。 [0134] This work (2) (element tube) is a cylindrical one set to a predetermined length, and is drawn from a drawn tube made of aluminum (including its alloy; the same shall apply hereinafter) obtained by drawing. Become. For example, the length of the workpiece (2) is set to 200 to 450 mm, the outer diameter is set to 15 to 50 mm, and the wall thickness is set to 0.5 to 2 mm.
[0135] なお本発明では、ワーク(2)はアルミニウム製のものに限定されるものではなぐ他 の金属製のものであっても良いし、他の材料製のものであっても良レ、。また、ワーク(2 )は円柱状であっても良いし、他の形状であっても良い。  [0135] In the present invention, the workpiece (2) is not limited to one made of aluminum, but may be made of other metals, or may be made of other materials. . Further, the workpiece (2) may have a cylindrical shape or another shape.
[0136] 本実施形態では、ワーク(2) (素管)についてこの液体ホーニング加工機(1)により 液体ホーニング処理及び洗浄処理を順次施すことにより、感光ドラム基体用パイプが 製造される。換言すると、この液体ホーニング加工機(1)は、感光ドラム基体用パイプ の製造装置に備えられた、ワーク(2) (素管)について液体ホーニング処理及び洗浄 処理を順次施すためのものである。  In the present embodiment, a pipe for a photosensitive drum substrate is manufactured by sequentially performing a liquid honing process and a cleaning process on the workpiece (2) (element tube) by the liquid honing machine (1). In other words, the liquid honing machine (1) is for sequentially performing a liquid honing process and a cleaning process on the work (2) (element tube) provided in the photosensitive drum substrate pipe manufacturing apparatus.
[0137] 液体ホーユング加工機(1)は、ワーク(2)を液体ホーユング処理するホーニングゾ ーン(5)と、該ホーニングゾーン(5)で液体ホーニング処理されたワーク(2)を洗浄処 理する洗浄ゾーン(6)とを、外気から遮断されたハウジング (4)内に互いに隣接して 備えている。  [0137] The liquid hounging machine (1) cleans the honing zone (5) for liquid hounging the workpiece (2) and the workpiece (2) subjected to the liquid honing treatment in the honing zone (5). A cleaning zone (6) is provided adjacent to each other in a housing (4) that is shielded from outside air.
[0138] ハウジング(4)内におけるホーユングゾーン(5)と洗浄ゾーン(6)との間には、隔壁  [0138] A partition wall is formed between the hounging zone (5) and the cleaning zone (6) in the housing (4).
(7)が配設されている。この隔壁(7)は、ホーニングゾーン(5)の雰囲気ガスが洗浄ゾ ーン(6)に流入するのを防止するためのものである。  (7) is provided. The partition wall (7) is for preventing the atmospheric gas in the honing zone (5) from flowing into the cleaning zone (6).
[0139] 本実施形態では、ホーニングゾーン(5)の雰囲気ガス、洗浄ゾーン(6)の雰囲気ガ ス、及びハウジング(4)外側の外気は、いずれも空気である。 In the present embodiment, the atmospheric gas in the honing zone (5), the atmospheric gas in the cleaning zone (6), and the outside air outside the housing (4) are all air.
[0140] また、液体ホーニンダカ卩ェ機(1)は、搬送槽(11)を有する液中搬送装置(10)をハ ウジング (4)内に備えている。 [0140] In addition, the liquid Honinka machine (1) includes a submerged transport device (10) having a transport tank (11) in the housing (4).
[0141] 液中搬送装置(10)は、ワーク(2)を搬送槽(11)内の液 (72)中に浸漬した状態で搬 送するためのものであり、詳述すると、ホーニングゾーン(5)で液体ホーニング処理さ れたワーク(2)を、搬送槽(11)内の液(72)中に浸漬した状態で、ホーニングゾーン( 5)から隔壁(7)に設けられたワーク通過用開口(8)を通過させて洗浄ゾーン(6)へと 搬送するためのものである。 [0141] The submerged transport device (10) is for transporting the work (2) while being immersed in the liquid (72) in the transport tank (11). 5) With liquid honing treatment The workpiece (2) is immersed in the liquid (72) in the transfer tank (11) and passed through the workpiece passage opening (8) provided in the partition wall (7) from the honing zone (5). To transport to the cleaning zone (6).
[0142] 搬送槽(11)内の液(72)としては、水、温水、純水、温純水、超純水、温超純水、有 機溶剤、又はこれらに添加物(例えば界面活性剤、洗剤)をカ卩えたもの等を挙げるこ とができる。また、液(72)は、温度、 Ph、電導度、クリーン度などを所定の範囲内に設 定したものが望ましい。 [0142] The liquid (72) in the transfer tank (11) includes water, warm water, pure water, warm pure water, ultra pure water, warm ultra pure water, an organic solvent, or additives (for example, surfactants, detergents). Can be mentioned. In addition, the liquid (72) is preferably one in which the temperature, Ph, conductivity, cleanliness, etc. are set within a predetermined range.
[0143] 搬送槽(11)は、図 3に示すように、隔壁(7)のワーク通過用開口(8)を介してホー二 ングゾーン(5)と洗浄ゾーン(6)とに跨って配置されている。また、隔壁(7)のワーク 通過用開口(8)の上縁 (8a)は、搬送槽(11)内の液(72)の液面(72a)より下側に位置 し、搬送槽(11)内の液(72)中に浸漬された状態となされている。  [0143] As shown in FIG. 3, the transfer tank (11) is disposed across the honing zone (5) and the cleaning zone (6) through the workpiece passage opening (8) of the partition wall (7). ing. The upper edge (8a) of the workpiece passage opening (8) of the partition wall (7) is located below the liquid surface (72a) of the liquid (72) in the transfer tank (11), and the transfer tank (11 ) Is immersed in the liquid (72).
[0144] また、液中搬送装置(10)は、図 3〜図 5に示すように搬送台(12)を備えている。こ の搬送台(12)は、略逆門形状のものであり、 1個又は複数個(本実施形態では 7個) のワーク(2)が搭載される搭載板部(12a)と、該搭載板部(12a)の左右両端部にそれ ぞれ上方突出状に設けられたアーム部(12b)と、該アーム(12b)の上端部に側方突 出状に設けられた吊掛部(12c)とを有している。一方、搬送槽(11)の左右両側壁部( 11a)の上端部には、それぞれ、ワーク搬送方向(3)に延びた、側方突出状のレール 部(l id)が、搬送槽(11)内の液 (72)に対し非浸漬状態に設けられている。そして、 搬送台(12)は、吊掛部(12c)が搬送槽(11)のレール部(l id)に吊り掛けられた状態 で搬送槽(11)内に配置されている。また、吊掛部(12c)にはロッドレスシリンダやガス シリンダ等の駆動源(図示せず)が連結されている。そして、液中搬送装置(10)は、 吊掛部(12c)が駆動源からの駆動力を受けてレール部(l id)上を摺動状態にワーク 搬送方向(3)に移動されることにより、搭載板部(12a)上に搭載されたワーク(2)を搬 送槽(11)内の液(72)中に浸漬した状態で搬送するものとなされている。  [0144] Further, the in-liquid transfer device (10) includes a transfer table (12) as shown in Figs. The transfer table (12) has a substantially inverted gate shape, and includes a mounting plate portion (12a) on which one or a plurality of (in this embodiment, seven) workpieces (2) are mounted, and the mounting plate portion (12a). An arm part (12b) provided on the left and right ends of the plate part (12a) so as to project upward, and a hanging part (12c) provided on the upper end of the arm (12b) so as to project laterally. ). On the other hand, at the upper ends of the left and right side wall portions (11a) of the transfer tank (11), there are laterally protruding rail portions (l id) extending in the workpiece transfer direction (3), respectively. ) In the liquid (72) in the non-immersed state. And the conveyance stand (12) is arrange | positioned in a conveyance tank (11) in the state in which the hanging part (12c) was hung on the rail part (lid) of the conveyance tank (11). In addition, a drive source (not shown) such as a rodless cylinder or a gas cylinder is connected to the hanging portion (12c). Then, the submerged transfer device (10) is moved in the workpiece transfer direction (3) in a sliding state on the rail portion (lid) when the hanging portion (12c) receives the driving force from the drive source. Thus, the work (2) mounted on the mounting plate (12a) is transported while being immersed in the liquid (72) in the transport tank (11).
[0145] また、図 4及び図 5に示すように、吊掛部(12c)の移動通路(13)とレール部(l id)は 共にカバー部材(14)により覆われている。このカバー部材(14)は、吊掛部(12c)のレ ール部(l id)との摺動に伴レ、発生する粉塵が外部(即ち、ホーユングゾーン(5)及び 洗浄ゾーン(6) )に飛散するのを防止するためのものである。また、このカバー部材(1 4)の両端部は蓋部(14a)によって閉塞されている。 Further, as shown in FIGS. 4 and 5, both the movement path (13) and the rail part (l id) of the hanging part (12c) are covered with the cover member (14). This cover member (14) is generated when the hanging part (12c) slides with the rail part (lid), and the generated dust is outside (ie, hounging zone (5) and cleaning zone (6)). )) To prevent splashing. This cover member (1 Both ends of 4) are closed by the lid (14a).
[0146] さらに、図 4に示すように、このカバー部材(14)における搬送槽(11)内側に位置す る側壁部(14b)の下端部(14c)は、搬送槽(11)の側壁部(11a)に対し搬送槽(11)内 側に離間して配置されている。そして、このカバー部材(14)の側壁部(14b)の下端部 (14c)と搬送槽(11)の側壁部 (11a)との間の隙間 (15)に、搬送台 (12)のアーム部 (1 2b)が配置されており、ワーク搬送時にはこの隙間(15)をアーム部(12b)が移動する 。さらに、このカバー部材(14)の側壁部(14b)の下端部(14c)は搬送槽(11)内の液( 72)中に浸漬された状態となされている。したがって、このカバー部材(14)の内側は 密閉状態となされている。  Furthermore, as shown in FIG. 4, the lower end (14c) of the side wall (14b) located inside the transport tank (11) in the cover member (14) is the side wall of the transport tank (11). (11a) is spaced apart from the inside of the transfer tank (11). The arm portion of the transport table (12) is inserted into the gap (15) between the lower end portion (14c) of the side wall portion (14b) of the cover member (14) and the side wall portion (11a) of the transport tank (11). (12b) is arranged, and the arm portion (12b) moves through the gap (15) when the workpiece is transferred. Furthermore, the lower end part (14c) of the side wall part (14b) of the cover member (14) is immersed in the liquid (72) in the transfer tank (11). Therefore, the inside of the cover member (14) is hermetically sealed.
[0147] また、液中搬送装置(10)は、搬送槽(11)内の液(72)中にガスとして空気を噴出し て気泡(21)を発生させる気泡発生手段(17)を有してレ、る。この気泡発生手段(17)は 、エアストーンと該エアストーンに空気を供給する空気供給管 (ガス供給管)とから構 成されている。空気供給管は、搬送台(12)の搭載板部(12a)下面に取り付けられて いる。なお本発明では、空気供給管自体がエアストーンから形成されていても良い。  [0147] Further, the submerged transport device (10) has bubble generating means (17) for generating air bubbles (21) by jetting air as a gas into the liquid (72) in the transport tank (11). I'm going. The bubble generating means (17) includes an air stone and an air supply pipe (gas supply pipe) for supplying air to the air stone. The air supply pipe is attached to the lower surface of the mounting plate portion (12a) of the transfer table (12). In the present invention, the air supply pipe itself may be formed of an air stone.
[0148] また、液中搬送装置(10)は、図 3に示すように、搬送槽(11)内において液(72)がヮ ーク搬送方向(3)とは反対方向に流れるように液(72)を搬送槽(11)内に噴出して供 給する複数個の噴出ノズル(19)を有している。この噴出ノズノレ(19)は、搬送槽(11) 内の洗浄ゾーン (6)側に配置されており、詳述すると、搬送槽(11)の洗浄ゾーン (6) 側の側壁部(11c)に、該噴出ノズル(19)の噴出口をワーク搬送方向(3)とは反対方 向に向けて配設されている。なお図 3において、矢印(22)は、搬送槽(11)内の液(72 )の流れ方向を示している。この液の流れ方向(22)は、上述したようにワーク搬送方 向(3)とは反対方向である。  [0148] Further, as shown in FIG. 3, the submerged transport device (10) allows the liquid (72) to flow in the transport tank (11) in a direction opposite to the cake transport direction (3). It has a plurality of ejection nozzles (19) for ejecting (72) into the transport tank (11). This jet nozzle (19) is arranged on the cleaning zone (6) side in the transfer tank (11), and more specifically, on the side wall (11c) on the cleaning zone (6) side of the transfer tank (11). The jet nozzle (19) is disposed with its jet port facing in the direction opposite to the workpiece transfer direction (3). In FIG. 3, an arrow (22) indicates the flow direction of the liquid (72) in the transfer tank (11). The liquid flow direction (22) is opposite to the workpiece transfer direction (3) as described above.
[0149] また、液中搬送装置(10)は、搬送槽(11)内の液 (72)が搬送槽(11)のホーニングゾ ーン(5)側の側壁部(l ib)の上端からオーバーフローされるものとなされている。また 、搬送槽(11)のホーユングゾーン(5)側の側壁部(l ib)の上部には、オーバーフロ 一した液を受けるためのオーバーフロー液受け(20)が付設されている。搬送槽(11) 内の液面高さは、このオーバーフロー機構により所定の高さに保たれている。  [0149] In addition, in the submerged transport device (10), the liquid (72) in the transport tank (11) overflows from the upper end of the side wall (rib) of the transport tank (11) on the honing zone (5) side. It is supposed to be done. Further, an overflow liquid receiver (20) for receiving the overflowed liquid is attached to the upper part of the side wall (lib) on the hounging zone (5) side of the transfer tank (11). The liquid level in the transfer tank (11) is kept at a predetermined height by this overflow mechanism.
[0150] また、液中搬送装置(10)は、噴射ノズノレ (23)を有している。この噴射ノズノレ (23)は 、搬送槽(11)内の洗浄ゾーン (6)側に搬送されて搬送槽(11)内の液 (72)中力 引 き上げられる途中のワーク(2)に向けて洗浄液(73)を噴射するためのものである。こ の噴射ノズル (23)は、洗浄ゾーン(6)における搬送槽(11)の上方に配置されており 、これにより、この噴射ノズル (23)により噴射された洗浄液(73)力 引き上げ途中のヮ ーク(2)に当たったのち、搬送槽(11)内に落下するものとなされている。 [0150] Further, the in-liquid transfer device (10) has an injection nozzle (23). This jet nozure (23) The cleaning liquid (73) is sprayed toward the workpiece (2) that is being transported to the cleaning zone (6) side in the transport tank (11) and being lifted by the liquid (72) in the transport tank (11). Is to do. The injection nozzle (23) is disposed above the transfer tank (11) in the cleaning zone (6), and thus the cleaning liquid (73) injected by the injection nozzle (23) After hitting the cake (2), it falls into the transfer tank (11).
[0151] また、搬送槽(11)の底面(l ie)は、水平面に対してワーク搬送方向(3)において上 方に傾斜した状態に形成されている。この底面(l ie)の水平面に対する傾斜角は、 1 〜15 (特に好ましくは 7〜13) ° の範囲に設定されることが望ましい。このように底面( l ie)を傾斜させることにより、搬送槽(11)の液(72)中に沈降して底面(l ie)上に堆積 する異物が、該底面(l ie)を滑ってその最下位置側すなわち搬送槽(11)内のホー二 ングゾーン(5)側に移動して集まることになる。さらに、底面(l ie)の最下位置に排出 口(図示せず)を設けることにより、この異物を容易に排出することができる。このよう に底面(l ie)を傾斜させることにより、洗浄ゾーン(6)の洗浄度を向上させることがで きるし、更に、搬送槽(11)内の液(72)の清浄度を保つことができる。特に、この底面( l ie)の傾斜角が上記の範囲内に設定されていると、これらの効果が十分に得られる し、液(72)の流れ状態を乱すこともないので望ましい。 [0151] Further, the bottom surface (l ie) of the transfer tank (11) is formed in an upwardly inclined state with respect to the horizontal plane in the workpiece transfer direction (3). The inclination angle of the bottom surface (lie) with respect to the horizontal plane is desirably set in the range of 1 to 15 (particularly preferably 7 to 13) °. By tilting the bottom surface (l ie) in this way, foreign matter that settles in the liquid (72) of the transfer tank (11) and accumulates on the bottom surface (l ie) slides on the bottom surface (l ie). It moves to the lowermost position side, that is, the honing zone (5) side in the transport tank (11) and gathers. Furthermore, this foreign matter can be easily discharged by providing a discharge port (not shown) at the lowest position of the bottom surface (l ie). By inclining the bottom surface (ie, in this way), it is possible to improve the cleanliness of the cleaning zone (6) and to maintain the cleanliness of the liquid (72) in the transfer tank (11). Can do. In particular, it is desirable that the inclination angle of the bottom surface (lie) is set within the above range because these effects can be sufficiently obtained and the flow state of the liquid (72) is not disturbed.
[0152] また、図 1に示すように、ホーユングゾーン(5)にはホーユングネ曹(30)が配置されて いる。このホーニング槽(30)は、図 2に示すように、ワーク(2)を液体ホーユング処理 するホーユング部(31)と、該ホーユング部(31)で液体ホーユング処理されたワーク( 2)を粗洗浄処理としてシャワー洗浄処理する第 1シャワー洗浄部(32)と、ホーユング 部(31)で液体ホーユング処理されたワーク(2)をホーユング部(31)力 第 1シャワー 洗浄部(32)に搬送する搬送部(33)とを内部に有してレ、る。搬送部(33)は例えばタ ーンテーブル式のものであり、(33a)はターンテーブル、(33b)はターンテーブル(33a )の回転軸である。また、このホーニング槽(30)の内部は、ホーユングゾーン(5)の雰 囲気ガスから遮断されている。このホーニング槽(30)内の雰囲気ガスは、空気である [0152] As shown in Fig. 1, Houngune soda (30) is arranged in Hounging zone (5). As shown in FIG. 2, the honing tank (30) roughly cleans the hounging part (31) for liquid hounging the work (2) and the work (2) subjected to liquid howinging by the hounging part (31). The first shower cleaning section (32) that performs the shower cleaning process, and the workpiece (2) that has been liquid houng processed in the hounging section (31) transports the hounging section (31) force to the first shower cleaning section (32). It has a part (33) inside. The transport section (33) is, for example, a turntable type, (33a) is a turntable, and (33b) is a rotating shaft of the turntable (33a). The interior of the honing tank (30) is shielded from the atmospheric gas in the hounging zone (5). The atmosphere gas in the honing tank (30) is air.
[0153] さらに、このホーニングネ曹(30)は、ワーク投入口(35)と、ワーク取出口(36)と、ヮー ク投入口(35)及び取出口(36)にそれぞれ対応する開閉蓋(37) (38)とを有している 。開閉蓋 (37) (38)は例えば電動開閉蓋である。 [0153] In addition, this Honing soda (30) has a workpiece inlet (35), a workpiece outlet (36), an open / close lid (37) corresponding to each of the workpiece inlet (35) and the outlet (36). ) (38) . The open / close lid (37) (38) is, for example, an electric open / close lid.
[0154] さらに、このホーニングネ曹(30)には、該ホーニングネ曹(30)内の雰囲気ガス(空気)を 吸引するホーニング槽用ガス吸引装置 (41)が接続されている。このガス吸引装置 (4Further, a honing tank gas suction device (41) for sucking atmospheric gas (air) in the honing soda (30) is connected to the honing soda (30). This gas suction device (4
1)は吸気ブロワ等からなる。 1) consists of an intake blower and the like.
[0155] さらに、ホーユングゾーン(5)には、図 1に示すように、ワークのピッチ変更部(42)と[0155] Further, as shown in Fig. 1, the hounging zone (5) includes a workpiece pitch changing section (42) and
、該ワークピッチ変更部(42)によりピッチが変更されたワーク(2)をワークピッチ変更 部 (42)からホーニング部(31)に搬送する第 1搬送装置 (43)と、第 1シャワー洗浄部(A first transfer device (43) for transferring the work (2) whose pitch has been changed by the work pitch changing unit (42) from the work pitch changing unit (42) to the honing unit (31), and a first shower cleaning unit (
32)でシャワー洗浄処理されたワーク(2)を第 1シャワー洗浄部(32)から液中搬送装 置(10)に搬送する第 2搬送装置 (44)とが配置されてレ、る。 A second transfer device (44) for transferring the work (2) subjected to the shower cleaning process in 32) from the first shower cleaning section (32) to the submerged transfer device (10) is arranged.
[0156] 洗浄ゾーン (6)には、第 2シャワー洗浄部(51)と、ワーク搬送方向(3)に二段に並 んだスクラブ洗浄部(52a) (52b)と、第 3シャワー洗浄部(53)と、浸漬洗浄部(54)と、 弓 I上げ乾燥部(55)と、第 3搬送装置 (56)とが配置されてレ、る。 [0156] The cleaning zone (6) includes a second shower cleaning section (51), scrub cleaning sections (52a) (52b) arranged in two stages in the workpiece transfer direction (3), and a third shower cleaning section. (53), an immersion cleaning section (54), a bow I raising drying section (55), and a third transfer device (56) are arranged.
[0157] 第 2シャワー洗浄部(51)は、液中搬送装置(10)により洗浄ゾーン (6)に搬送された ワーク(2)をシャワー洗浄処理するものである。 The second shower cleaning section (51) performs a shower cleaning process on the workpiece (2) transferred to the cleaning zone (6) by the submerged transfer device (10).
[0158] 二段のスクラブ洗浄部(52a) (52b)は、互いに同一構成であり、第 2シャワー洗浄部 [0158] The two-stage scrub cleaning units (52a) and (52b) have the same configuration, and the second shower cleaning unit
(51)で洗浄処理されたワーク(2)をスクラブ洗浄処理するものである。この各スクラブ 洗浄部(52a) (52b)には、スクラブ洗浄装置(110)が設置されている。このスクラブ洗 浄装置(110)の構成は後述する。  The work (2) cleaned in (51) is scrubbed. Each scrub cleaning unit (52a) (52b) is provided with a scrub cleaning device (110). The configuration of the scrub cleaning device (110) will be described later.
[0159] 第 3シャワー洗浄部(53)は、スクラブ洗浄部(52b)で洗浄処理されたワーク(2)をシ ャヮー洗浄処理するものである。 [0159] The third shower cleaning section (53) performs the shower cleaning process on the workpiece (2) cleaned by the scrub cleaning section (52b).
[0160] 浸漬洗浄部(54)は、第 3シャワー洗浄部(53)で洗浄処理されたワーク(2)を洗浄 液(77)中に浸漬することにより仕上げ洗浄処理として浸漬洗浄処理するものである。 [0160] The immersion cleaning unit (54) performs immersion cleaning as a final cleaning process by immersing the workpiece (2) cleaned in the third shower cleaning unit (53) in the cleaning liquid (77). is there.
[0161] 引上げ乾燥部(55)は、浸漬洗浄部(54)で洗浄処理されたワーク(2)を高温液(78) 中に浸漬して高温液(78)中から引き上げることにより乾燥処理するものである。 [0161] The pulling and drying unit (55) performs the drying process by immersing the workpiece (2) cleaned by the immersion cleaning unit (54) in the high temperature liquid (78) and pulling it up from the high temperature liquid (78). Is.
[0162] 第 3搬送装置 (56)は、液中搬送装置(10)により洗浄ゾーン (6)に搬送されたワーク [0162] The third transfer device (56) is a workpiece transferred to the cleaning zone (6) by the submerged transfer device (10).
(2)を液中搬送装置(10)から各洗浄部(51) (52a) (52b) (53) (54)及び引上げ乾燥 部(55)に順次搬送するものである。  (2) is sequentially transported from the submerged transport device (10) to each of the cleaning sections (51) (52a) (52b) (53) (54) and the pulling and drying section (55).
[0163] さらに、この洗浄ゾーン(6)には、引上げ乾燥部(55)で乾燥処理されたワーク(2)、 すなわち最終加工済みワークとしての液体ホーユング加工品を箱(ケース)に詰める 箱詰め部(66)が配置されてレ、る。弓 I上げ乾燥部(55)で乾燥処理されたワーク(2)は 、第 3搬送装置 (56)により引上げ乾燥部(55)からこの箱詰め部(66)に搬送されて箱 詰めされる。 [0163] Further, in the cleaning zone (6), the work (2), which has been dried in the pulling drying unit (55), That is, a boxing portion (66) for packing a liquid houng processed product as a final processed workpiece into a box (case) is arranged. The workpiece (2) dried in the bow I lifting and drying unit (55) is conveyed from the lifting and drying unit (55) to the boxing unit (66) by the third transfer device (56) and packed in a box.
[0164] また、液体ホーニンダカ卩ェ機(1)は、洗浄ゾーン (6)に清浄な雰囲気ガスを供給す る複数個(本実施形態では二台)のガス供給装置 (58) (67)を備えている。このガス供 給装置(58)はクリーンユニット等からなり、ハウジング (4)のワーク搬送方向(3)下流 側の天井部に設置されており、詳述すると、このガス供給装置(58) (67)は、ハウジン グ (4)の浸漬洗浄部(54)上方の天井部と箱詰め部(66)上方の天井部とに 1台ずつ 設置されている。なお、(68)はィオナイザである。  [0164] In addition, the liquid honing machine (1) includes a plurality (two in this embodiment) of gas supply devices (58, 67) for supplying clean atmospheric gas to the cleaning zone (6). I have. This gas supply device (58) is composed of a clean unit or the like, and is installed on the ceiling of the housing (4) in the work transfer direction (3) downstream. More specifically, this gas supply device (58) (67 ) Are installed on the ceiling of the housing (4) above the immersion cleaning part (54) and one above the boxing part (66). (68) is an ionizer.
[0165] また、液体ホーユング加工機(1)は、ホーニングゾーン(5)の雰囲気ガスを吸引す るホーニングゾーン用ガス吸引装置 (45)を備えている。このガス吸引装置 (45)は吸 気ブロワ等からなり、ホーニングゾーン(5)に接続されている。 [0165] Further, the liquid hounging machine (1) includes a honing zone gas suction device (45) for sucking the atmospheric gas in the honing zone (5). This gas suction device (45) comprises an suction blower or the like and is connected to the honing zone ( 5 ).
[0166] また、洗浄ゾーン(6)の雰囲気ガス圧力は、ハウジング (4)外側の外気圧力に対し 陽圧に調整されている。本発明では、洗浄ゾーン(6)の雰囲気ガス圧力は、ハウジン グ (4)外側の外気圧力に対して 1倍を超え 2倍以下(特に好ましくは 1. 1〜: 1. 5倍) に調整することが良い。  [0166] In addition, the atmospheric gas pressure in the cleaning zone (6) is adjusted to a positive pressure relative to the outside air pressure outside the housing (4). In the present invention, the atmospheric gas pressure in the cleaning zone (6) is adjusted to more than 1 and less than 2 times (particularly preferably 1.1 to 1.5 times) the outside air pressure outside the housing (4). Good to do.
[0167] さらに、洗浄ゾーン(6)の雰囲気ガス圧力は、ホーユングゾーン(5)の雰囲気ガス 圧力に対し陽圧に調整されている。本発明では、洗浄ゾーン(6)の雰囲気ガス圧力 は、ホーニングゾーン(5)の雰囲気ガス圧力に対して 1倍を超え 2倍以下(特に好まし くは 1.:!〜 1. 5倍)に調整することが良い。  [0167] Furthermore, the atmospheric gas pressure in the cleaning zone (6) is adjusted to a positive pressure relative to the atmospheric gas pressure in the hounging zone (5). In the present invention, the atmospheric gas pressure in the cleaning zone (6) is more than 1 and less than 2 times the atmospheric gas pressure in the honing zone (5) (particularly preferably 1.:! To 1.5 times). It is good to adjust to.
[0168] また、図 1において、(60)は、未加工のワーク(2)を収容する未加工ワーク収容部 である。この未カ卩ェワーク収容部(60)は、ハウジング (4)の外側におけるワーク搬送 方向上流側に配置されている。 (61)は、未加工のワーク(2)を未カ卩ェワーク収容部( 60)からワークピッチ変更部 (42)に搬送する第 4搬送装置である。  [0168] In FIG. 1, reference numeral (60) denotes an unprocessed workpiece accommodating portion that accommodates an unmachined workpiece (2). The uncarved work accommodating part (60) is arranged on the upstream side in the work conveying direction on the outside of the housing (4). (61) is a fourth transport device for transporting the unprocessed work (2) from the unclean work accommodating section (60) to the work pitch changing section (42).
[0169] また、液体ホーニンダカ卩ェ機(1)において、各搬送装置 (43) (44) (56) (61)は、ェ ァピッカー(図示せず)を有しており、また複数個のワーク(2)を一括して搬送し得るも のとなされており、本実施形態では 7個のワーク(2)を一括して搬送するものとなされ ている(図 4参照)。なお本発明では、各搬送装置 (43) (44) (56) (61)で一括搬送可 能なワーク(2)の個数は 7個に限定されるものではな 例えば、 2〜: 10個であっても 良いし、 1個であっても良い。 [0169] In addition, in the liquid honing machine (1), each of the transfer devices (43) (44) (56) (61) has a picker (not shown) and a plurality of workpieces. (2) can be transported in a batch, and in this embodiment, 7 workpieces (2) are transported in a batch. (See Figure 4). In the present invention, the number of workpieces (2) that can be collectively conveyed by each conveying device (43) (44) (56) (61) is not limited to seven. For example, 2 to: 10 There may be one or one.
[0170] 次に、スクラブ洗浄装置(110)の構成について以下に説明する。  Next, the configuration of the scrub cleaning device (110) will be described below.
[0171] 液体ホーユング処理されたワーク(2)の表面には、一般に、ホーユング液中に含ま れた砥粒あるいはゴミ等が付着してレ、たり砥粒の衝突により微細なバリが発生してレヽ る。そこで、バリ、砥粒、ゴミ等の異物をワーク(2)の表面から除去するために、このス クラブ洗浄装置(110)によってワーク(2)の表面をスクラブ洗浄処理する。  [0171] Generally, abrasive grains or dust contained in the hounging liquid adhere to the surface of the workpiece (2) that has been subjected to liquid howing treatment, and fine burrs are generated due to collision of the abrasive grains. Talk. Therefore, in order to remove foreign matter such as burrs, abrasive grains, and dust from the surface of the work (2), the surface of the work (2) is scrubbed by the scrub cleaning device (110).
[0172] スクラブ洗浄装置(110)は、図 7〜図 11に示すように、円筒状こすり部材(111)と、 該こすり部材(111)を自軸回転させるこすり部材回転駆動装置(115)と、ワーク(2)を 自軸回転させるワーク回転駆動装置(116)と、洗浄時にこすり部材(111)の表面 (周 面)を押圧する押圧部材(118)とを備えている。ワーク(2)とこすり部材(111)は、互い に平行に配置されており、本実施形態ではそれぞれ鉛直に配置されている。また、 洗浄液(120)としては、純水や界面活性剤等が用いられる。  [0172] As shown in Figs. 7 to 11, the scrub cleaning device (110) includes a cylindrical rubbing member (111), a rubbing member rotation driving device (115) for rotating the rubbing member (111) on its own axis, and And a work rotation drive device (116) for rotating the work (2) on its own axis, and a pressing member (118) for pressing the surface (surface) of the rubbing member (111) during cleaning. The workpiece (2) and the rubbing member (111) are arranged in parallel to each other, and are arranged vertically in the present embodiment. As the cleaning liquid (120), pure water, a surfactant or the like is used.
[0173] こすり部材(111)は、連続気孔を有する多孔性軟質体からなる。多孔性軟質体の平 均気孔径は、バリゃ砥粒等の異物の捕捉や洗浄液(120) (即ちスクラブ洗浄液)の流 通を確実に行えるようにするため、 10〜500 x mの範囲に設定されていることが望ま しい。 10 z m未満では異物が気孔内に入り難くなるし、洗浄液(120)が流通し難くな る。一方、 500 x mを超えると、異物を気孔内にとどまらせることができず、異物をしつ カ^と捕捉することができなレ、。平均気孔径の好ましい下限値は 30 z mであり、好ま しい上限値は 300 x mである。ただし本発明では、多孔性軟質体の平均気孔径はこ の範囲に限定されるものではない。  [0173] The rubbing member (111) is made of a porous soft body having continuous pores. The average pore size of the porous soft body is set in the range of 10 to 500 xm in order to ensure that foreign particles such as abrasive grains are captured and the cleaning liquid (120) (ie scrub cleaning liquid) can flow reliably. It is desirable that If it is less than 10 zm, it is difficult for foreign matter to enter the pores, and the cleaning liquid (120) becomes difficult to circulate. On the other hand, if it exceeds 500 x m, the foreign matter cannot stay in the pores, and the foreign matter cannot be caught persistently. The preferred lower limit for the average pore size is 30 zm, and the preferred upper limit is 300 x m. However, in the present invention, the average pore diameter of the porous soft body is not limited to this range.
[0174] また、多孔性軟質体において、柔らさは 30%圧縮応力として表し、具体的には、多 孔性軟質体の押付け方向における厚さを 30%圧縮させたときの反発力によって定 義される。本実施形態では、多孔性軟質体の 30%圧縮応力は 1. 5〜98kPa (15〜 1000gf/cm2)の範囲であることが望ましレ、。 30%圧縮応力が 1. 5kPa (15gf/cm 2)未満では柔らかすぎて異物を搔き取る力が弱ぐ 98kPa (1000gf/cm2)を超える と硬すぎてこすり部材(11)自身がワーク(2)の表面に傷を付ける虞がある。 30%圧 縮応力の好ましい下限値は 2. 0kPa (20gfZcm2)であり、好ましい上限値は 49kPa (500gfZcm2)である。 [0174] Moreover, in a porous soft body, the softness is expressed as 30% compressive stress, and specifically, it is defined by the repulsive force when the thickness in the pressing direction of the porous soft body is compressed by 30%. Is done. In this embodiment, the 30% compressive stress of the porous soft body is preferably in the range of 1.5 to 98 kPa (15 to 1000 gf / cm 2 ). If the 30% compressive stress is less than 1.5 kPa (15 gf / cm 2 ), the force to scrub off foreign matter is too weak. If it exceeds 98 kPa (1000 gf / cm 2 ), it will be too hard and the rubbing member (11) itself will work ( There is a risk of scratching the surface of 2). 30% pressure A preferable lower limit value of the compressive stress is 2.0 kPa (20 gfZcm 2 ), and a preferable upper limit value is 49 kPa (500 gfZcm 2 ).
[0175] 上述の平均気孔径と 30%圧縮応力とを有する多孔性軟質体として、 PVA系樹脂、 ポリエチレン系樹脂、ポリエーテル系樹脂、酢酸ビュル系樹脂及びポリウレタン系樹 脂のうちのいずれかの発泡体を用いることが好ましい。これらの樹脂を使用するのは 、上述の平均気孔径及び 30%圧縮応力を容易に実現することができるからである。 具体的に示すと、例えば、 PVA系樹脂発泡体として PVA発泡体、ポリエチレン系樹 脂発泡体としてポリエチレン発泡体、ポリエーテル系樹脂発泡体としてポリエーテル 発泡体、酢酸ビニル系樹脂として酢酸ビュル発泡体、ポリウレタン系樹脂発泡体とし てポリウレタン発泡体がそれぞれ挙げられる。ただし本発明では、多孔性軟質体はこ れらに限定されるものではない。  [0175] As the porous soft body having the above average pore diameter and 30% compressive stress, any one of PVA resin, polyethylene resin, polyether resin, butyl acetate resin, and polyurethane resin is used. It is preferable to use a foam. These resins are used because the above average pore diameter and 30% compressive stress can be easily realized. Specifically, for example, PVA foam as a PVA resin foam, polyethylene foam as a polyethylene resin foam, polyether foam as a polyether resin foam, bull acetate foam as a vinyl acetate resin Examples of polyurethane resin foams include polyurethane foams. However, in the present invention, the porous soft body is not limited thereto.
[0176] なお、こすり部材(111)の柔らかさ、すなわち 30%圧縮応力は、樹脂の種類や平均 気孔径の他、気孔率、樹脂の重合度、可塑剤の含有量等によって左右される。本実 施形態においては、これらの条件を含めて柔ら力さを 30%圧縮応力として規定する  [0176] The softness of the rubbing member (111), that is, the 30% compressive stress, depends on the type of resin, the average pore diameter, the porosity, the degree of polymerization of the resin, the content of the plasticizer, and the like. In this embodiment, the softness including these conditions is defined as 30% compressive stress.
[0177] こすり部材(111)の中空部内には、図 9及び図 10に示すように、洗浄液供給管(112 )がこすり部材(111)の軸方向にきつく挿入配置されている。洗浄液供給管(112)は、 こすり部材( 111 )の内部に洗浄液(120)を供給するためのものである。洗浄液供給管 (112)の周壁には、例えば φ l〜4mmの多数個の洗浄液流出孔(112a)力 該洗浄 液供給管(112)の軸方向及び周方向にそれぞれ間隔をおいて設けられている。この 洗浄液供給管(112)は、剛性を有しており、こすり部材(111)を補強するための芯金( 心金)としても作用し得るものとなされている。この洗浄液供給管(112)は例えば樹脂 製や金属製であり、具体的には、洗浄液供給管(112)の軸方向中間部が樹脂製で 上下両端部がステンレス鋼製である。 [0177] In the hollow portion of the rubbing member (111), as shown in Figs. 9 and 10, the cleaning liquid supply pipe (112) is inserted and arranged tightly in the axial direction of the rubbing member (111). The cleaning liquid supply pipe (112) is for supplying the cleaning liquid (120) into the rubbing member (111). On the peripheral wall of the cleaning liquid supply pipe (112), for example, a large number of cleaning liquid outflow holes (112a) of φl to 4 mm are provided at intervals in the axial direction and the circumferential direction of the cleaning liquid supply pipe (112). Yes. The cleaning liquid supply pipe (112) has rigidity and can act as a core metal (core metal) for reinforcing the rubbing member (111). The cleaning liquid supply pipe (112) is made of, for example, resin or metal. Specifically, the axially intermediate portion of the cleaning liquid supply pipe (112) is made of resin, and the upper and lower ends are made of stainless steel.
[0178] 図 10に示すように、洗浄液供給管(112)の上端部は閉塞状に形成されている。一 方、洗浄液供給管(112)の下端部は開口するとともに該下端部が、洗浄液供給管(1 12)内に洗浄液を導入する洗浄液導入管(113)と液密状態即ち洗浄液漏出阻止状 態に連結されている。洗浄液は洗浄液導入管(113)から洗浄液供給管(112)内に導 入される。そして、洗浄液供給管(112)内の洗浄液が洗浄液流出孔(112a)から流出 することにより洗浄液がこすり部材(111)の内部に供給される。供給された洗浄液(12 0)は、こすり部材(111)の連続気孔を介してこすり部材(111)の表面外側にこすり部 材(211)の表面全体に亘つて均一に滲出される。 As shown in FIG. 10, the upper end of the cleaning liquid supply pipe (112) is formed in a closed shape. On the other hand, the lower end of the cleaning liquid supply pipe (112) is open and the lower end is liquid-tight with the cleaning liquid introduction pipe (113) for introducing the cleaning liquid into the cleaning liquid supply pipe (112). It is connected to. The cleaning liquid is introduced from the cleaning liquid introduction pipe (113) into the cleaning liquid supply pipe (112). Entered. Then, the cleaning liquid in the cleaning liquid supply pipe (112) flows out from the cleaning liquid outflow hole (112a), whereby the cleaning liquid is supplied into the rubbing member (111). The supplied cleaning liquid (120) is uniformly exuded over the entire surface of the rubbing member (211) outside the surface of the rubbing member (111) through the continuous pores of the rubbing member (111).
[0179] また、こすり部材(111)の表面は、ワーク(2)の表面に該表面の長さ方向に沿って 当接されるものである。本実施形態では、こすり部材(111)の表面の長さは、ワーク(2 )の表面の長さに対して大寸に設定されており、これによりワーク(2)の表面にこすり 部材(111)の表面をワーク(2)の表面の長さ方向全体に亘つて当接させ得るものとな されている。 [0179] The surface of the rubbing member (111) is in contact with the surface of the workpiece (2) along the length direction of the surface. In the present embodiment, the length of the surface of the rubbing member (111) is set to be larger than the length of the surface of the work (2), whereby the rubbing member (111) ) Surface can be brought into contact with the entire length of the surface of the workpiece (2).
[0180] また、このスクラブ洗浄装置(110)は、ワーク(2)を鉛直に支持する上下 2個のヮー ク支持部材(121) (121)を備えている。図 11に示すように、各ワーク支持部材(121) は、ワーク(2)の上下各端面開口部内に嵌合される嵌合突部(121a)を有している。ま た、図 12Aに示すように、各ワーク支持部材(121)の直径 Dは、ワーク(2)の直径 (外 径) dに対して同寸に設定されている(即ち D = d)。そして、上側(一方)のワーク支持 部材(121)の嵌合突部(121a)がワーク(2)の上端面開口部内に同軸状に嵌合される ことにより、ワーク(2)の上端面に該上側のワーク支持部材(121)が装着されている。 この装着状態において、ワーク(2)の表面 (外周面)と該上側のワーク支持部材(121 )の周面とは、ワーク(2)の軸方向に面一(つらいち)に連なっている。また同じぐ下 側 (他方)のワーク支持部材(121)の嵌合突部(121a)がワーク(2)の下端面開口部 内に同軸状に嵌合されることにより、ワーク(2)の下端面に該下側のワーク支持部材 (121)が装着されている。この装着状態において、ワーク(2)の表面と該下側のヮー ク支持部材(121)の周面とは面一に連なっている。こうしてワーク(2)力 個のワーク 支持部材(121) (121)により鉛直に支持されている。  [0180] Further, the scrub cleaning apparatus (110) includes two upper and lower workpiece support members (121) (121) for vertically supporting the workpiece (2). As shown in FIG. 11, each workpiece support member (121) has a fitting protrusion (121a) fitted into each of the upper and lower end surface openings of the workpiece (2). Further, as shown in FIG. 12A, the diameter D of each work support member (121) is set to be the same as the diameter (outer diameter) d of the work (2) (that is, D = d). Then, the fitting protrusion (121a) of the upper (one) workpiece support member (121) is coaxially fitted into the upper end opening of the workpiece (2), so that the upper end surface of the workpiece (2) is fitted. The upper work support member (121) is mounted. In this mounted state, the surface (outer peripheral surface) of the workpiece (2) and the peripheral surface of the upper workpiece support member (121) are continuous with each other in the axial direction of the workpiece (2). In addition, the fitting protrusion (121a) of the workpiece support member (121) on the lower side (the other side) is fitted coaxially into the opening on the lower end surface of the work (2), so that the work (2) The lower work support member (121) is attached to the lower end surface. In this mounted state, the surface of the workpiece (2) and the peripheral surface of the lower workpiece support member (121) are flush with each other. Thus, the workpiece (2) force is vertically supported by the individual workpiece support members (121) (121).
[0181] ここで、ワーク(2)の表面と各ワーク支持部材(121)の周面とが面一に連なっている こと力ら、図 12Aに示すように、ワーク(2)の表面にこすり部材(111)の表面をワーク( 2)の表面の長さ方向全体に亘つて当接させる際に、ワーク(2)の表面の上端部や下 端部にこすり部材(111)の表面を確実に当接させることができる。一方、図 12Bに示 すように、もし仮にワーク支持部材(121)の直径 Dがワーク(2)の直径 dに対して大寸 に設定されてレ、る場合 (即ち D > d)には、ワーク(2)の端面にワーク支持部材(121) を装着した状態において、ワーク(2)の表面とワーク支持部材(121)の周面との間に 段差が生じるから、ワーク(2)の表面の上端部や下端部にこすり部材(111)の表面を 当接させようとしても、この段差によって当接させることができず、ワーク(2)の表面の 上端部や下端部を洗浄することができない。したがって、ワーク(2)の端面にワーク 支持部材(121)を装着した状態において、ワーク(2)の表面とワーク支持部材(121) の周面とはワーク(2)の軸方向に面一に連なっていることが望ましい。 [0181] Here, as shown in Fig. 12A, the surface of the work (2) and the peripheral surface of each work support member (121) are flush with each other. When the surface of the member (111) is brought into contact with the entire length of the surface of the workpiece (2), the surface of the rubbing member (111) is securely attached to the upper end and lower end of the surface of the workpiece (2). It can be made to contact. On the other hand, as shown in FIG. 12B, if the diameter D of the workpiece support member (121) is larger than the diameter d of the workpiece (2), If the workpiece support member (121) is mounted on the end surface of the workpiece (2), the surface of the workpiece (2) and the workpiece support member (121) Since there is a step with the peripheral surface, even if you try to bring the surface of the scraping member (111) into contact with the upper end or lower end of the surface of the work (2), it cannot be brought into contact with this step. The upper and lower ends of the workpiece (2) surface cannot be cleaned. Therefore, when the workpiece support member (121) is mounted on the end surface of the workpiece (2), the surface of the workpiece (2) and the peripheral surface of the workpiece support member (121) are flush with the axial direction of the workpiece (2). It is desirable to be connected.
[0182] こすり部材回転駆動装置(115)は、駆動源としてモータ(図示せず)と制御部(図示 せず)を有するとともに、こすり部材(111)の洗浄液供給管(112)に接続されている。 そして、モータを駆動させることによりこすり部材(111)が所定の回転方向(103)に自 軸回転されるものとなされるとともに、こすり部材(111)の周速度が制御部によって制 御可能に構成されている。  [0182] The rubbing member rotation drive device (115) has a motor (not shown) and a control unit (not shown) as drive sources, and is connected to the cleaning liquid supply pipe (112) of the rubbing member (111). Yes. Then, by driving the motor, the rubbing member (111) is rotated in its predetermined rotating direction (103) and the peripheral speed of the rubbing member (111) can be controlled by the control unit. Has been.
[0183] ワーク回転駆動装置(116)は、駆動源としてモータ(図示せず)と制御部(図示せず )を有するとともに、ワーク(2)のワーク支持部材(121) (詳述すると下側のワーク支持 部材)に接続されている。そして、モータを駆動させることによりワーク(2)が所定の回 転方向(104)に自軸回転されるものとなされるとともに、ワーク(2)の周速度が制御部 によって制御可能に構成されてレ、る。  The work rotation drive device (116) has a motor (not shown) and a control unit (not shown) as a drive source, and a work support member (121) of the work (2) (in detail, the lower side) Connected to the workpiece support member). Then, by driving the motor, the workpiece (2) is rotated in its own axis in a predetermined rotation direction (104), and the peripheral speed of the workpiece (2) is configured to be controllable by the control unit. Les.
[0184] また、こすり部材(111)とワーク(2)は、互いに同一方向にそれぞれ自軸回転される ものとなされている。  [0184] Further, the rubbing member (111) and the workpiece (2) are each rotated in their own directions in the same direction.
[0185] 押圧部材(118)は、直線状に延びた一側縁部を押圧部(118a)とする平板状のもの である。この押圧部材(118)は剛性を有しており、例えばプラスチック製又は金属製 である。この押圧部材(118)の押圧部(118a)の長さは、ワーク(2)の表面の長さに対 して同寸又は大寸に設定されることが望ましぐまたこすり部材(111)の表面の長さに 対して略同寸に設定されてレ、ることが望ましレ、。  [0185] The pressing member (118) is a flat plate having one side edge portion extending in a straight line as the pressing portion (118a). The pressing member (118) has rigidity, and is made of, for example, plastic or metal. Desirably, the length of the pressing portion (118a) of the pressing member (118) is set to be the same or larger than the length of the surface of the workpiece (2). Desirably, it should be set to approximately the same size as the surface length.
[0186] 押圧部材(118)は、スクラブ洗浄時にこすり部材(111)の表面に押し付けられてこす り部材(111)を押圧するものであり、パネ等の弾性手段(図示せず)によって押圧部材 (118)に押圧力が付与されるものとなされている。そして、図 9に示すように、この押圧 部材(118)によりこすり部材(111)の表面を押圧した状態において、押圧部材(118) 力 Sこすり部材(111)の回転方向(103)後方側に傾斜して配置されるとともに、この傾斜 状態に押圧部材(118)が保持手段(図示せず)により保持されるものとなされている。 [0186] The pressing member (118) is pressed against the surface of the rubbing member (111) during scrub cleaning and presses the rubbing member (111), and is pressed by an elastic means (not shown) such as a panel. A pressing force is applied to (118). Then, as shown in FIG. 9, in a state where the surface of the rubbing member (111) is pressed by the pressing member (118), the pressing member (118) The force S is disposed so as to be inclined rearward in the rotational direction (103) of the rubbing member (111), and the pressing member (118) is held by the holding means (not shown) in this inclined state. .
[0187] 次に、上記液体ホーユング力卩ェ機(1)を用いた液体ホーユングカ卩ェ方法について 以下に説明する。 [0187] Next, a liquid hounging cage method using the liquid hounging force machine (1) will be described below.
[0188] まず、図 1に示すように、ハウジング (4)内の洗浄ゾーン(6)にガス供給装置(58) (6 7)により清浄な雰囲気ガスを連続して供給する。これにより、洗浄ゾーン (6)の雰囲 気ガス圧力を、ハウジング (4)外側の外気圧力に対し陽圧に調整するとともに、ホー ユングゾーン(5)の雰囲気ガス圧力に対しても陽圧に調整する。また、ホーニングゾ ーン (5)の雰囲気ガス圧力をハウジング (4)外側の外気圧力に対し陽圧に調整する 。つまり、これらの圧力バランスは、「洗浄ゾーン(6)」 >「ホーユングゾーン(5)」 >「 ハウジング (4)外側」の関係になるように調節されてレ、る。なお本発明では、隔壁(7) には、この圧力バランスを保っために、小さなガス流通路(図示せず)を設けたり、洗 浄ゾーン(6)からホーニングゾーン(5)への一方向のガス流通路(図示せず)例えば ダンパー付ガス流通路が設されていたりしても良レ、。こうすることにより、ホーニングゾ ーン(5)から洗浄ゾーン(6)へ異物が浮遊流入するのを確実に抑制することができる 。また本発明では、ハウジング(4)の壁に、ハウジング(4)の内部からその外側への 一方向のガス流通路(図示せず)が設けられていても良い。  [0188] First, as shown in Fig. 1, clean atmospheric gas is continuously supplied to the cleaning zone (6) in the housing (4) by the gas supply devices (58) and (67). As a result, the atmospheric gas pressure in the cleaning zone (6) is adjusted to a positive pressure relative to the outside air pressure outside the housing (4), and is also set to a positive pressure relative to the atmospheric gas pressure in the housing zone (5). adjust. The atmospheric gas pressure in the honing zone (5) is adjusted to a positive pressure with respect to the outside air pressure outside the housing (4). In other words, these pressure balances are adjusted so that the relationship of “cleaning zone (6)”> “hounging zone (5)”> “housing (4) outside” is established. In the present invention, in order to maintain this pressure balance, the partition wall (7) is provided with a small gas flow passage (not shown) or in one direction from the cleaning zone (6) to the honing zone (5). Gas flow passage (not shown), for example, a gas flow passage with a damper may be provided. By doing so, foreign matters can be reliably prevented from floating and flowing from the honing zone (5) into the cleaning zone (6). In the present invention, a gas flow passage (not shown) in one direction from the inside of the housing (4) to the outside thereof may be provided on the wall of the housing (4).
[0189] このような状態を維持したままで、未加工ワーク収容部(60)に収容された未加工の ワーク(2)の複数個(本実施形態では 7個)を、一括して第 4搬送装置 (61)により未カロ ェワーク収容部(60)力 ハウジング (4)に設けられたワーク投入口(4a)を介してハウ ジング (4)内のホーユングゾーン(5)のワークピッチ変更部(42)に搬送する。その後 、ワーク投入口(4a)を電動開閉扉(図示せず)により閉塞する。  [0189] While maintaining such a state, a plurality of unprocessed workpieces (2) (seven in this embodiment) accommodated in the unprocessed workpiece accommodating portion (60) are collectively added to the fourth. The workpiece pitch change section of the hounging zone (5) in the housing (4) through the workpiece input port (4a) provided in the housing (4) by the transfer device (61). Transport to (42). Thereafter, the work insertion port (4a) is closed by an electric door (not shown).
[0190] 次レ、で、ワークピッチ変更部(42)に搬送された複数個のワーク(2)のピッチをワーク ピッチ変更部(42)で変更する。  [0190] At the next stage, the pitch of the plurality of workpieces (2) conveyed to the workpiece pitch changing section (42) is changed by the workpiece pitch changing section (42).
[0191] 次いで、このワーク(2)を第 1搬送装置 (43)によりワークピッチ変更部(42)からホー ニング槽 (30)のワーク投入口(35)を介して該槽 (30)内のホーニング部(31)に搬送 する。その後、ワーク投入口(35)及び取出口(36)をそれぞれ対応する開閉蓋(37) ( 38)で閉塞する。そして、この閉塞状態で、ワーク(2)をホーニング部(31)で公知の方 法で液体ホーユング処理する。 [0191] Next, the work (2) is transferred from the work pitch changing section (42) to the honing tank (30) through the work input port (35) by the first transfer device (43). Transport to honing section (31). Thereafter, the work inlet (35) and the outlet (36) are closed with the corresponding opening / closing lids (37) and (38). In this closed state, the workpiece (2) is known by the honing unit (31). Liquid houng treatment by the method.
[0192] この液体ホーユング処理を簡単に説明すると、図 2に示すように、ワーク(2)を自軸 回転させながら、ホーユング液(70)を噴射ノズル (39)によりワーク(2)の表面(外周 面)に吹き付けるとともに、噴射ノズル (39)をワーク(2)の軸方向に移動させる。  [0192] This liquid hounging process will be briefly explained. As shown in Fig. 2, while the work (2) is rotating about its own axis, hounging liquid (70) is injected onto the surface of the work (2) by the spray nozzle (39) ( The outer peripheral surface is sprayed and the spray nozzle (39) is moved in the axial direction of the workpiece (2).
これにより、ワーク(2)の表面全体が液体ホーニング処理され均一に粗面化される。  As a result, the entire surface of the workpiece (2) is subjected to the liquid honing process to be uniformly roughened.
[0193] 次レ、で、液体ホーユング処理されたワーク(2)を搬送部(33)によりホーユング部(31 )から第 1シャワー洗浄部(32)に搬送する。  [0193] In the next stage, the workpiece (2) subjected to the liquid houng treatment is transported from the hounging section (31) to the first shower cleaning section (32) by the transporting section (33).
[0194] 次いで、ワーク投入口(35)を開け、新たに未力卩ェのワーク(2)を第 1搬送装置 (43) によりワークピッチ変更部(42)からワーク投入口(35)を介してホーユング部(31)に搬 送する。その後、ワーク投入口(35)を開閉蓋 (37)で閉塞する。そして、この閉塞状態 で、未加工のワーク(2)をホーユング部(31)で液体ホーユング処理する。これと同時 に、液体ホーニング処理されたワーク(2)を第 1シャワー洗浄部(32)で公知の方法に より粗洗浄処理としてシャワー洗浄処理する。  [0194] Next, the workpiece insertion port (35) is opened, and a new unstressed workpiece (2) is moved from the workpiece pitch changing section (42) via the workpiece insertion port (35) by the first transport device (43). Then transport it to the Hounging section (31). Thereafter, the work insertion port (35) is closed with the opening / closing lid (37). Then, in this closed state, the unprocessed workpiece (2) is liquid hounged by the hounging part (31). At the same time, the workpiece (2) subjected to the liquid honing treatment is subjected to a shower washing process as a rough washing process by a known method in the first shower washing section (32).
[0195] このシャワー洗浄処理を簡単に説明すると、ワーク(2)を自軸回転させながら、ヮー ク(2)の軸方向に並んで配置された複数個の噴射ノズル (40)により洗浄液(71)をヮ ーク(2)の表面に向けて噴射する。これにより、ワーク(2)の表面全体が洗浄処理さ れる。またこのとき、洗浄液(71)をワーク(2)の中空部に噴射してワーク(2)の内面も 洗浄処理する。  [0195] This shower cleaning process will be briefly described. A cleaning liquid (71) is formed by a plurality of spray nozzles (40) arranged in the axial direction of the workpiece (2) while rotating the workpiece (2). ) Towards the surface of the cake (2). As a result, the entire surface of the workpiece (2) is cleaned. At this time, the cleaning liquid (71) is sprayed into the hollow portion of the work (2) to clean the inner surface of the work (2).
[0196] 次いで、ワーク投入口(35)及び取出口(36)をそれぞれ開ける。そして、第 1シャヮ 一洗浄部(32)で洗浄処理されたワーク(2)を、洗浄ゾーン(6)への搬送に供する。 すなわち、該ワーク(2)を第 2搬送装置 (44)により第 1シャワー洗浄部(32)からワーク 取出口(36)を介して液中搬送装置(10)に搬送して搬送台(12)の搭載板部(12a)に 搭載する。また、ホーユング部(31)で液体ホーユング処理されたワーク(2)を搬送部 (33)によりホーニング部 (31)から第 1シャワー洗浄部(32)に搬送する。その後、新た に未加工のワーク(2)を第 1搬送装置 (43)によりワーク投入口(35)を介してホーニン グ部(31)に搬送する。  [0196] Next, the workpiece inlet (35) and the outlet (36) are opened. Then, the workpiece (2) that has been subjected to the cleaning process in the first shear cleaning section (32) is supplied to the cleaning zone (6). That is, the workpiece (2) is conveyed from the first shower cleaning section (32) to the submerged conveyance device (10) by the second conveyance device (44) through the workpiece outlet (36), and is conveyed to the conveyance table (12). It is mounted on the mounting plate (12a). Further, the work (2) subjected to the liquid houng treatment in the hounging part (31) is transported from the honing part (31) to the first shower cleaning part (32) by the transporting part (33). After that, a new unprocessed work (2) is transferred by the first transfer device (43) to the honing section (31) through the work input port (35).
[0197] 次いで、ワーク投入口(35)及び取出口(36)をそれぞれ対応する開閉蓋(37) (38) で閉塞する。そして、この閉塞状態で、上述した手順と同様に、未力卩ェのワーク(2)を ホーユング部(31)で液体ホーユング処理すると共に、液体ホーユング処理されたヮ ーク(2)を第 1シャワー洗浄部(32)でシャワー洗浄処理する。 Next, the work insertion port (35) and the take-out port (36) are respectively closed with the corresponding opening / closing lids (37), (38). Then, in this closed state, the unpowered work (2) is removed in the same manner as described above. The liquid houng process is performed in the hounging part (31), and the cake (2) subjected to the liquid hounging process is shower-cleaned in the first shower cleaning part (32).
[0198] 以上の手順に従い、未力卩ェのワーク(2)を次々と未加工ワーク収容部(60)力 ホ 一ユングゾーン(5)に搬送し、搬送されたワーク(2)についてホーニング槽(30)内で 液体ホーユング処理とシャワー洗浄処理を順次施す。 [0198] In accordance with the above procedure, the unstressed work (2) is successively transferred to the unprocessed work storage part (60) force houng zone (5), and the transferred work (2) is subjected to the honing tank. Within (30), liquid howing treatment and shower cleaning treatment are performed sequentially.
[0199] 以上の、ホーニング槽(30)内での液体ホーユング処理及びシャワー洗浄処理にお いて、ホーニングネ曹(30)のワーク投入口(35)及び取出口(36)がそれぞれ対応する 開閉蓋(37) (38)で閉塞されている状態のときには、ホーニングゾーン用ガス吸引装 置 (45)を作動させてホーニングゾーン(5)の雰囲気ガスを該ガス吸引装置 (45)によ り吸引し、一方、ホーニング槽用ガス吸引装置 (41)は作動させない。こうすることによ り、ホーユングゾーン(5)の雰囲気ガス中を浮遊する異物を除去することができて、ホ 一ユングゾーン(5)の清浄度を向上させることができる。  [0199] In the above-described liquid hounging treatment and shower cleaning treatment in the honing tank (30), the work opening (35) and the outlet (36) of the honing soda (30) correspond to the open / close lid ( 37) When closed in (38), the gas suction device (45) for the honing zone is operated to suck the atmospheric gas in the honing zone (5) by the gas suction device (45) On the other hand, the gas suction device (41) for the honing tank is not operated. By doing this, foreign substances floating in the atmospheric gas in the houng zone (5) can be removed, and the cleanliness of the houng zone (5) can be improved.
[0200] また、ホーニング槽(30)のワーク投入口(35)及び取出口(36)のうち少なくとも一方 が開いている状態のときには、ホーニング槽用ガス吸引装置 (41)を作動させてホー ニング槽 (30)内の雰囲気ガスを該ガス吸引装置 (41)により吸引し、一方、ホーニン グゾーン用ガス吸引装置 (45)は作動させなレ、。こうすることにより、ホーニング槽(30) 内の雰囲気ガス中を浮遊する異物がワーク投入口(35)及び取出口(36)のうち前記 少なくとも一方を介してホーユングゾーン(5)に流出するのを確実に防止することが できて、ホーユングゾーン(5)の清浄度を維持することができる。  [0200] Further, when at least one of the work inlet (35) and the outlet (36) of the honing tank (30) is open, the honing tank gas suction device (41) is operated to perform the honing. The atmospheric gas in the tank (30) is sucked by the gas suction device (41), while the gas suction device for the horn zone (45) is not operated. As a result, foreign matter floating in the atmospheric gas in the honing tank (30) flows out to the hounging zone (5) through at least one of the workpiece inlet (35) and the outlet (36). Can be reliably prevented and the cleanliness of the hounging zone (5) can be maintained.
[0201] また、液中搬送装置(10)の搬送台(12)の搭載板部(12a)に搭載されたワーク(2) は、次のようにして洗浄ゾーン(6)に搬送される。  [0201] Also, the workpiece (2) mounted on the mounting plate (12a) of the transfer platform (12) of the submerged transfer device (10) is transferred to the cleaning zone (6) as follows.
[0202] まず、図 3及び図 4に示すように、搬送槽(11)内の液(72)中に気泡発生手段(17) により気泡(21)を連続して発生させる。さらに、搬送槽(11)内において液(72)がヮー ク搬送方向(3)とは反対方向(22)に流れるように、液 (72)を搬送槽(11)内に噴出ノ ズル(19)により搬送槽(11)内の洗浄ゾーン (6)側から連続して噴出して供給する。 供給された液(72)はワーク搬送範囲にぉレ、て層流状に流れてレ、ることが好ましレ、。 その流量は例えば 10〜30リットル/ minの範囲に設定できる。さらに、搬送槽(11) 内の液(72)を搬送槽(11)のホーニングゾーン(5)側の側壁部(l ib)の上端から連続 してオーバーフローさせる。 First, as shown in FIGS. 3 and 4, bubbles (21) are continuously generated in the liquid (72) in the transfer tank (11) by the bubble generating means (17). Furthermore, the liquid (72) is injected into the transfer tank (11) so that the liquid (72) flows in the direction (22) opposite to the cake transfer direction (3) in the transfer tank (11). ) Is continuously ejected from the cleaning zone (6) side in the transfer tank (11). It is preferable that the supplied liquid (72) flows into the workpiece conveyance range and flows in a laminar flow. The flow rate can be set in the range of 10-30 liters / min, for example. Furthermore, the liquid (72) in the transfer tank (11) is continuously supplied from the upper end of the side wall (lib) on the honing zone (5) side of the transfer tank (11). Then overflow.
[0203] このような状態を維持したままで、搬送台(12)の搭載板部(12a)に搭載されたヮー ク(2)を、搬送槽(11)内の液 (72)中に浸漬した状態で、ホーニングゾーン (5)から隔 壁(7)のワーク通過用開口(8)を通過させて洗浄ゾーン(6)へと搬送する。ワーク(2) の搬送速度は、ワーク(2)が気泡(21)に包まれた状態を維持できる範囲内に設定さ れるのが望ましぐ例えば 50〜100mm/s (好ましくは 60〜90mm/s)の範囲内に 設定できる。また、ワーク(2)の搬送時間すなわちワーク(2)の液中滞在時間は、 15 〜40秒の範囲内に設定することが好ましい。ただし本発明では、ワーク(2)の搬送速 度及び搬送時間はこのような範囲内であることに限定されるものではない。  [0203] While maintaining such a state, the cake (2) mounted on the mounting plate (12a) of the transfer table (12) is immersed in the liquid (72) in the transfer tank (11). In this state, the workpiece is passed from the honing zone (5) to the cleaning zone (6) through the workpiece passage opening (8) in the partition wall (7). It is desirable that the conveying speed of the workpiece (2) is set within a range in which the workpiece (2) can be maintained in the state of being wrapped in the bubbles (21), for example, 50 to 100 mm / s (preferably 60 to 90 mm / s). It can be set within the range of s). Moreover, it is preferable to set the conveyance time of the workpiece (2), that is, the residence time of the workpiece (2) in the liquid within a range of 15 to 40 seconds. However, in the present invention, the transfer speed and transfer time of the workpiece (2) are not limited to such ranges.
[0204] 次レ、で、洗浄ゾーン(6)におレ、て、次のような洗浄処理を行う。  [0204] The next cleaning process is performed in the cleaning zone (6).
[0205] すなわち、洗浄ゾーン (6)に搬送されたワーク(2)を第 3搬送装置 (56)により把持し て搬送槽(11)内の液(72)中から引き上げながら、該ワーク(2)の表面に向けて洗浄 液(73)を噴射ノズル(23)により噴射してワーク(2)をシャワー洗浄処理する。なお、 噴射された洗浄液 (73)は、ワーク(2)に当たったのち、搬送槽(11)内に落下する。  That is, the work (2) transported to the cleaning zone (6) is gripped by the third transport device (56) and pulled up from the liquid (72) in the transport tank (11) while the work (2 ) The cleaning liquid (73) is sprayed by the spray nozzle (23) toward the surface of the workpiece (2) and the workpiece (2) is subjected to a shower cleaning process. The sprayed cleaning liquid (73) falls into the transfer tank (11) after hitting the work (2).
[0206] このワーク(2)を引き続き第 3搬送装置 (56)により液中搬送装置(10)から第 2シャヮ 一洗浄部(51)に搬送する。そして、このワーク(2)を第 2シャワー洗浄部(51)で公知 の方法によりシャワー洗浄処理する。  [0206] The workpiece (2) is continuously transferred from the submerged transfer device (10) to the second shear cleaning section (51) by the third transfer device (56). Then, the workpiece (2) is subjected to shower cleaning treatment by a known method in the second shower cleaning section (51).
[0207] このシャワー洗浄処理を簡単に説明すると、ワーク(2)を自軸回転させながら、洗浄 液(74)を噴射ノズノレ (51a)によりワーク(2)の表面に向けて噴射するとともに、噴射ノ ズル(51a)をワーク(2)の軸方向に移動させる。これにより、ワーク(2)の表面全体が 洗浄処理される。またこのとき、洗浄液(74)をワーク(2)の中空部に噴射してワーク( 2)の内面も洗浄処理する。  [0207] This shower cleaning process will be briefly explained. While rotating the work (2) with its own axis, the cleaning liquid (74) is sprayed toward the surface of the work (2) by the spray nozzle (51a) and sprayed. Move the nozzle (51a) in the axial direction of the workpiece (2). As a result, the entire surface of the workpiece (2) is cleaned. At this time, the cleaning liquid (74) is sprayed into the hollow portion of the work (2) to clean the inner surface of the work (2).
[0208] 次レ、で、第 2シャワー洗浄部(51)でシャワー洗浄処理されたワーク(2)を第 3搬送 装置(56)により第 2シャワー洗浄部(51)から二段のスクラブ洗浄部(52a) (52b)のうち 一段目のスクラブ洗浄部(52a)に搬送する。そして、このワーク(2)を一段目のスクラ ブ洗浄部(52a)でスクラブ洗浄装置(110)によりスクラブ洗浄処理する。  [0208] At the next stage, the work (2) shower-washed in the second shower cleaning section (51) is transferred from the second shower cleaning section (51) to the two-stage scrub cleaning section by the third transport device (56). (52a) Transfer to the first scrub cleaning section (52a) of (52b). Then, the work (2) is subjected to scrub cleaning by the scrub cleaning device (110) in the first scrub cleaning unit (52a).
[0209] このスクラブ洗浄処理方法についての詳細な説明は後述する。  [0209] A detailed description of the scrub cleaning method will be described later.
[0210] 次いで、一段目のスクラブ洗浄部(52a)でスクラブ洗浄処理されたワーク(2)を、第 3搬送装置(56)により一段目のスクラブ洗浄部(52a)から二段目のスクラブ洗浄部(5 2b)に搬送する。そして、このワーク(2)を二段目のスクラブ洗浄部(52b)で一段目の スクラブ洗浄部(52a)と同様にスクラブ洗浄装置(110)によりスクラブ洗浄処理する。 [0210] Next, the work (2) scrubbed by the first-stage scrubbing unit (52a) 3 Transported from the first-stage scrub cleaning section (52a) to the second-stage scrub cleaning section (52b) by the transport device (56). Then, the work (2) is scrub cleaned by the scrub cleaning device (110) in the second scrub cleaning section (52b) in the same manner as the first scrub cleaning section (52a).
[0211] 次いで、二段目のスクラブ洗浄部(52b)でスクラブ洗浄処理されたワーク(2)を、第 3搬送装置(56)により二段目のスクラブ洗浄部(52b)から第 3シャワー洗浄部(53)に 搬送する。そして、このワーク(2)を第 3シャワー洗浄部(53)で公知の方法によりシャ ヮー洗浄処理する。 [0211] Next, the work (2) scrubbed by the second-stage scrub cleaning section (52b) is cleaned by the third transport apparatus (56) from the second-stage scrub cleaning section (52b) to the third shower cleaning. Transport to section (53). Then, the workpiece (2) is subjected to a shower cleaning process in a third shower cleaning section (53) by a known method.
[0212] このシャワー洗浄処理を簡単に説明すると、ワーク(2)を自軸回転させながら、ヮー ク(2)の軸方向に並んで配置された複数個の噴射ノズル (53a)により洗浄液(76)をヮ ーク(2)の表面に向けて噴射する。これにより、ワーク(2)の表面全体が洗浄処理さ れる。またこのとき、洗浄液(76)をワーク(2)の中空部に噴射してワーク(2)の内面も 洗浄処理する。  [0212] This shower cleaning process will be briefly described. The cleaning liquid (76a) is formed by a plurality of spray nozzles (53a) arranged side by side in the axial direction of the workpiece (2) while rotating the workpiece (2). ) Towards the surface of the cake (2). As a result, the entire surface of the workpiece (2) is cleaned. At this time, the cleaning liquid (76) is sprayed into the hollow portion of the workpiece (2) to clean the inner surface of the workpiece (2).
[0213] 次いで、第 3シャワー洗浄部(53)でシャワー洗浄処理されたワーク(2)を、第 3搬送 装置(56)により第 3シャワー洗浄部(53)から浸漬洗浄部(54)に搬送する。そして、こ のワーク(2)を浸漬洗浄部(54)で公知の方法により浸漬洗浄処理する。  [0213] Next, the work (2) shower-washed in the third shower cleaning section (53) is transported from the third shower cleaning section (53) to the immersion cleaning section (54) by the third transport device (56). To do. Then, the workpiece (2) is subjected to an immersion cleaning process by a known method in the immersion cleaning section (54).
[0214] この浸漬洗浄処理を簡単に説明すると、ワーク(2)を第 3搬送装置 (56)により載置 台(54b)上に載置したのち、該載置台(54b)を下降させてワーク(2)を浸漬洗浄槽 (5 4a)内の洗浄液(77)中に浸漬し、これにより該ワーク(2)を洗浄処理する。このとき、 ワーク(2)を洗浄液 (77)中に浸漬した状態で上下に揺動させることが洗浄効率の向 上を図り得るようになる点で望ましレ、。  [0214] This immersion cleaning process will be briefly described. After the workpiece (2) is placed on the placing table (54b) by the third transfer device (56), the placing table (54b) is lowered and the workpiece is lowered. (2) is immersed in the cleaning solution (77) in the immersion cleaning tank (54a), thereby cleaning the workpiece (2). At this time, it is desirable that the workpiece (2) can be swung up and down while being immersed in the cleaning liquid (77) in order to improve the cleaning efficiency.
[0215] 次いで、浸漬洗浄部(54)で浸漬洗浄処理されたワーク(2)を、第 3搬送装置 (56) により浸漬洗浄部(54)から引上げ乾燥部(55)に搬送する。そして、このワーク(2)を § I上げ乾燥部(55)で乾燥処理する。  [0215] Next, the workpiece (2) subjected to the immersion cleaning process in the immersion cleaning unit (54) is pulled up from the immersion cleaning unit (54) and transferred to the drying unit (55) by the third transfer device (56). Then, the work (2) is dried by the §I raising drying unit (55).
[0216] この乾燥処理を簡単に説明すると、ワーク(2)を第 3搬送装置 (56)により載置台(55 b)上に載置したのち、該載置台(55b)を下降させて高温液槽 (55a)内の高温液(78) 中に浸漬したのち、該ワーク(2)を高温液 (78)中から所定の引上げ速度で引き上げ ることにより、ワーク(2)を乾燥処理する。高温液(78)の温度は例えば 65°C以上に設 定されることが望ましぐまたワークの引上げ速度は例えば lcm/s以下に設定される ことが望ましい。ただし本発明では、高温液(78)の温度や引上げ速度は上記の範囲 に限定されるものではない。 [0216] This drying process will be briefly described. After the work (2) is placed on the placing table (55b) by the third transfer device (56), the placing table (55b) is lowered to move the high temperature liquid. After being immersed in the high temperature liquid (78) in the tank (55a), the work (2) is dried by pulling up the work (2) from the high temperature liquid (78) at a predetermined pulling speed. It is desirable that the temperature of the high temperature liquid (78) is set to 65 ° C or higher, for example, and the workpiece pulling speed is set to lcm / s or lower, for example. It is desirable. However, in the present invention, the temperature of the high temperature liquid (78) and the pulling rate are not limited to the above ranges.
[0217] 次いで、引上げ乾燥部(55)で乾燥処理されたワーク(2) (即ち液体ホーニングカロェ 品)を、第 3搬送装置 (56)により弓 I上げ乾燥部 (55)力も箱詰め部 (66)に搬送する。 その後、このワーク(2)を箱詰め部(66)で所定の箱 (ケース)に箱詰めする。 [0217] Next, the workpiece (2) (that is, the liquid honing Karoe product) dried by the pulling drying unit (55) is bowed by the third conveying device (56). Transport to 66). Thereafter, the work (2) is packed in a predetermined box (case) by the boxing section (66).
[0218] 上記液体ホーユング力卩ェ機(1)により加工された液体ホーユング力卩ェ品は、感光ド ラム基体用パイプとして用いられる。 [0218] The liquid hounging force product processed by the liquid hounging force machine (1) is used as a pipe for a photosensitive drum base.
[0219] 次に、スクラブ洗浄部(52a) (52b)で行われるスクラブ洗浄処理方法について以下 に説明する。 [0219] Next, a scrub cleaning method performed in the scrub cleaning sections (52a) and (52b) will be described below.
[0220] まず、図 7及び図 8に示すように、ワーク(2)の上下両端面にそれぞれ対応するヮー ク支持部材 (121)を装着し、ワーク(2)を鉛直に支持する。  [0220] First, as shown in FIGS. 7 and 8, work support members (121) corresponding to the upper and lower end surfaces of the work (2) are mounted, and the work (2) is vertically supported.
[0221] 次いで、洗浄液を洗浄液導入管(113)から洗浄液供給管(112)内に所定の圧力で 導入する。これにより、洗浄液供給管(112)内の洗浄液(120)を洗浄液流出孔(112a[0221] Next, the cleaning liquid is introduced into the cleaning liquid supply pipe (112) from the cleaning liquid introduction pipe (113) at a predetermined pressure. As a result, the cleaning liquid (120) in the cleaning liquid supply pipe (112) is removed from the cleaning liquid outflow hole (112a
)から流出させてこすり部材(111)の連続気孔を介してこすり部材(111)の表面外側 に連続して滲出させる。 ) From the surface of the rubbing member (111) through the continuous pores of the rubbing member (111).
[0222] また、図 8に示すように、ワーク(2)の表面にこすり部材(111)の表面をワーク(2)の 表面の長さ方向全体に亘つて押し当てて当接させるとともに、こすり部材(111)の表 面に押圧部材(118)の押圧部(118a)をこすり部材(111)の表面の長さ方向に沿って 押し付けることにより、図 9に示すように、こすり部材(111)の表面を押圧部材(118)に よって押圧する。  [0222] As shown in Fig. 8, the surface of the scraping member (111) is pressed against the entire surface of the workpiece (2) over the entire length direction of the workpiece (2). By pressing the pressing part (118a) of the pressing member (118) along the length direction of the surface of the rubbing member (111) against the surface of the member (111), as shown in FIG. 9, the rubbing member (111) The surface is pressed by the pressing member (118).
[0223] そして、この押圧状態で、洗浄液(120)を上述のようにこすり部材(111)の表面外側 に連続して滲出させながら、こすり部材回転駆動装置(115)とワーク回転駆動装置(1 16)をそれぞれ作動させる。これにより、こすり部材(111)とワーク(2)を互いに同一方 向にそれぞれ所定の周速度で、例えば 30秒〜 10分の間、 自軸回転させる。ただし 本発明では、こすり部材(111)とワーク(2)の回転時間はこの範囲内であることに限 定されるものではない。なお、こすり部材(111)の周速度はこすり部材回転駆動装置( 115)の制御部で制御され、またワーク(2)の周速度はワーク回転駆動装置(116)の 制御部で制御される。 [0224] 以上の操作により、ワーク(2)の表面が全体に亘つてスクラブ洗浄処理される。洗浄 後、ワーク(2)は第 3搬送装置 (56)によりワーク支持部材(121)から取り外されて搬送 される。 Then, in this pressed state, the rubbing member rotation driving device (115) and the workpiece rotation driving device (1) are continuously leached out of the surface of the rubbing member (111) as described above. Operate 16) respectively. As a result, the rubbing member (111) and the workpiece (2) are rotated in the same direction in the same direction at a predetermined peripheral speed, for example, for 30 seconds to 10 minutes. However, in the present invention, the rotation time of the rubbing member (111) and the workpiece (2) is not limited to be within this range. The peripheral speed of the rubbing member (111) is controlled by the control unit of the rubbing member rotation driving device (115), and the peripheral speed of the work (2) is controlled by the control unit of the work rotation driving device (116). [0224] Through the above operation, the entire surface of the workpiece (2) is scrubbed. After cleaning, the work (2) is removed from the work support member (121) by the third transfer device (56) and transferred.
[0225] 図 6は、上記液体ホーユング力卩ェ機(1)の配管図である。同図に示すように、上記 液体ホーニンダカ卩ェ機(1 )では、第 3シャワー洗浄部(53)と浸漬洗浄部(54)の洗浄 液(76) (77)、並びに引上げ乾燥部(55)の高温液(78)として、純水等の清浄水が用 レヽられる。なお本発明では、清浄水には界面活性剤等の添加剤や添加液が添加さ れていても良い。  [0225] FIG. 6 is a piping diagram of the liquid hounging force machine (1). As shown in the figure, in the liquid honing machine (1), the cleaning liquid (76) (77) of the third shower cleaning section (53) and the immersion cleaning section (54), and the pulling and drying section (55) Pure water such as pure water is used as the hot liquid (78). In the present invention, an additive such as a surfactant or an additive solution may be added to the clean water.
[0226] 引上げ乾燥部(55)に高温液(78)を供給する場合には、清浄水が加熱タンク(86) に貯留され、ここで所定温度に加熱される。次いで、加熱された清浄水、即ち高温液 (78)が供給管 (80a)を介してポンプ (84a)により引上げ乾燥部(55)の高温液槽 (55a) に供給される。高温液 (78)は、清浄度を維持するために常時、高温液槽 (55a)外側 へオーバーフローされて排出されてレ、る。  When supplying the high temperature liquid (78) to the pulling and drying section (55), clean water is stored in the heating tank (86) and heated to a predetermined temperature here. Next, the heated clean water, that is, the high temperature liquid (78) is supplied to the high temperature liquid tank (55a) of the pulling and drying section (55) by the pump (84a) through the supply pipe (80a). The hot liquid (78) is always overflowed and discharged outside the hot liquid tank (55a) in order to maintain cleanliness.
[0227] また、第 3シャワー洗浄部(53)と浸漬洗浄部(54)には、それぞれ、洗浄液(76) (77 )としての清浄水が供給管(80b)を介して供給される。そして、ここで使用された使用 済み洗浄液は、排出管 (82a)を介して第 1回収タンク (87a)に貯留される。  [0227] The third shower cleaning section (53) and the immersion cleaning section (54) are supplied with clean water as cleaning liquids (76) and (77) through the supply pipe (80b), respectively. The used cleaning liquid used here is stored in the first recovery tank (87a) via the discharge pipe (82a).
[0228] 第 1回収タンク(78a)内の使用済み洗浄液は、洗浄液導入管(113)を介してポンプ  [0228] The used cleaning liquid in the first recovery tank (78a) is pumped through the cleaning liquid introduction pipe (113).
(84b)により二段のスクラブ洗浄部(52a) (52b)にそれぞれスクラブ洗浄液(120)とし て供給される。そして、ここで使用された使用済み洗浄液は、排出管(82b)を介して 第 1回収タンク (87a)に再度貯留される。また、第 1回収タンク(87a)には清浄水が適 宜供給される。  The scrub cleaning liquid (120) is supplied to the two-stage scrub cleaning sections (52a) and (52b) by (84b). The used cleaning liquid used here is stored again in the first recovery tank (87a) via the discharge pipe (82b). In addition, clean water is appropriately supplied to the first recovery tank (87a).
[0229] 第 1回収タンク (87a)内の使用済み洗浄液の上澄み液は、排出管(82c)を介して第 2回収タンク(87b)に貯留される。  [0229] The supernatant of the used cleaning liquid in the first recovery tank (87a) is stored in the second recovery tank (87b) via the discharge pipe (82c).
[0230] 第 2回収タンク(87b)内の使用済み洗浄液は、供給管(80d)を介してポンプ (84c)に より第 2シャワー洗浄部(51)に洗浄液(74)として供給される。そして、ここで使用され た使用済み洗浄液は、排出管(82d)を介して第 2回収タンク (87b)に再度貯留される  The used cleaning liquid in the second recovery tank (87b) is supplied as a cleaning liquid (74) to the second shower cleaning section (51) by the pump (84c) through the supply pipe (80d). The used cleaning liquid used here is stored again in the second recovery tank (87b) via the discharge pipe (82d).
[0231] 第 2回収タンク(87b)内の使用済み洗浄液の上澄み液は、排出管(82e)を介してポ ンプ (84d)により第 3回収タンク (87c)に貯留される。 [0231] The supernatant of the used cleaning liquid in the second recovery tank (87b) is discharged through the discharge pipe (82e). Stored in the third recovery tank (87c) by the pump (84d).
[0232] 第 3回収タンク(87c)内の使用済み洗浄液は、供給管(80e)を介してポンプ (84e)に より液中搬送装置(10)の搬送槽(11)に噴射ノズル (19)から噴射されて供給される。 このようにして、洗浄ゾーン (6)で使用された使用済み洗浄液を搬送槽(11)に供給 することにより、使用済み洗浄液を有効に利用することができる。  [0232] The used cleaning liquid in the third recovery tank (87c) is sprayed into the transfer tank (11) of the submerged transfer device (10) by the pump (84e) via the supply pipe (80e) (19) It is injected from and supplied. In this way, the used cleaning liquid can be effectively used by supplying the used cleaning liquid used in the cleaning zone (6) to the transfer tank (11).
[0233] 搬送槽(11)に供給された液 (即ち、使用済み洗浄液)は、図 3に示すように、該搬 送槽(11)のホーニングゾーン(5)側の側壁部(1 lb)の上端から搬送槽(11)外側にお けるホーニングゾーン(5)側にオーバーフローして排出される。そして、搬送槽(11) 力 の排出液は、図 6に示すように、オーバーフロー液受け(20)力ら排出管(82f)を 介して第 3回収タンク (87c)に再度貯留される。また、この第 3回収タンク(87c)には清 浄水が適宜供給される。  [0233] The liquid supplied to the transfer tank (11) (that is, the used cleaning liquid) is, as shown in FIG. 3, a side wall (1 lb) on the honing zone (5) side of the transfer tank (11). It overflows from the upper end of the transfer tank (11) to the honing zone (5) side outside and is discharged. Then, as shown in FIG. 6, the discharged liquid from the transfer tank (11) is again stored in the third recovery tank (87c) via the discharge pipe (82f) from the overflow liquid receiver (20) force. In addition, clean water is appropriately supplied to the third recovery tank (87c).
[0234] 第 3回収タンク(87c)内の液の上澄み液は、排出管(82g)を介して第 4回収タンク(8 7d)に貯留される。  [0234] The supernatant liquid in the third recovery tank (87c) is stored in the fourth recovery tank (87 7d) via the discharge pipe (82g).
[0235] 第 4回収タンク(87d)内の液は、供給管(80f)を介してポンプ(84f)によりホーユング ゾーン(5)の第 1シャワー洗浄部(32)に供給され、該第 1シャワー洗浄部(32)に使用 される洗浄液(71)の少なくとも一部として使用される。そして、ここで使用された使用 済みの液は外部へ排出される。このようにして、第 4回収タンク(87d)内の液、即ち搬 送槽(11)からの排出液を、ホーニングゾーン(5)の第 1シャワー洗浄部(32)で使用さ れる洗浄液 (71)の少なくとも一部として使用することにより、搬送槽(11)からの排出 液を有効に利用することができる。なお発明では、第 4回収タンク(87d)内の液は、ホ 一ユングゾーン(5)のホーユング部(31)に供給され、該ホーユング部(31)で使用さ れるホーニング液(70)の少なくとも一部として使用されるものとなされていても良い。 また、この第 4回収タンク(87d)には清浄水が適宜供給される。  [0235] The liquid in the fourth recovery tank (87d) is supplied to the first shower washing section (32) in the hounging zone (5) by the pump (84f) through the supply pipe (80f), and the first shower Used as at least part of the cleaning liquid (71) used in the cleaning section (32). The used liquid used here is discharged to the outside. In this way, the liquid in the fourth recovery tank (87d), that is, the liquid discharged from the transport tank (11) is used as the cleaning liquid (71) used in the first shower cleaning section (32) of the honing zone (5). ), It is possible to effectively use the liquid discharged from the transfer tank (11). In the invention, the liquid in the fourth recovery tank (87d) is supplied to the hounging section (31) of the hounging zone (5) and at least the honing liquid (70) used in the hounging section (31). It may be used as a part. In addition, clean water is appropriately supplied to the fourth recovery tank (87d).
[0236] 而して、上記液体ホーニング加工機(1)及び液体ホーニング加工方法は、次の利 点を有している。  Therefore, the liquid honing machine (1) and the liquid honing method have the following advantages.
[0237] 液体ホーユング加工機(1)によれば、ワーク(2)について液体ホーユング処理及び 洗浄処理を順次施すことができるから、量産性が向上する。  [0237] According to the liquid hounging machine (1), the liquid hounging process and the cleaning process can be sequentially performed on the workpiece (2), so that mass productivity is improved.
[0238] さらに、ハウジング(4)内におけるホーニングゾーン(5)と洗浄ゾーン(6)との間に 隔壁(7)が配設されているので、ホーユングゾーン(5)の雰囲気ガス中を浮遊してい る砥粒ゃ塵等の異物が洗浄ゾーン(6)に流入するのをこの隔壁(7)によって防止す ることができる。そのため、ホーニングゾーン(5)の雰囲気ガス中を浮遊する異物の洗 浄ゾーン(6)への流入による洗浄ゾーン(6)の汚染を防止することができる。 [0238] Further, between the honing zone (5) and the cleaning zone (6) in the housing (4). Since the partition wall (7) is provided, foreign particles such as abrasive dust floating in the atmosphere gas in the hounging zone (5) flow into the cleaning zone (6). Can be prevented. Therefore, contamination of the cleaning zone (6) due to the inflow of foreign matter floating in the atmospheric gas in the honing zone (5) to the cleaning zone (6) can be prevented.
[0239] また、ホーユングゾーン(5)で液体ホーユング処理されたワーク(2)は、液中搬送装 置(10)によって、搬送槽(11)内の液(72)中に浸漬された状態で、ホーユングゾーン (5)から隔壁(7)のワーク通過用開口(8)を通過されて洗浄ゾーン (6)へと搬送され ること力ら、ワーク(2)の搬送時に、ワーク(2)が搬送槽(11)内の液(72)中に浸漬さ れることにより該ワーク(2)に付着した砥粒ゃ塵等の異物が除去される。そのため、ヮ ーク(2)に付着した異物がワーク(2)への付着状態のままでワーク(2)と共に洗浄ゾ ーン (6)に持ち込まれるのを防止することができて、ワーク(2)に付着した異物の洗 浄ゾーン(6)への持ち込みによる洗浄ゾーン(6)の汚染を防止することができる。  [0239] In addition, the work (2) subjected to the liquid houng treatment in the hounging zone (5) is immersed in the liquid (72) in the transfer tank (11) by the submerged transfer device (10). Therefore, when the workpiece (2) is transferred, the workpiece (2) is transferred from the hounging zone (5) through the workpiece passage opening (8) of the partition wall (7) and transferred to the cleaning zone (6). ) Is immersed in the liquid (72) in the transfer tank (11), foreign matters such as abrasive grains and dust adhering to the workpiece (2) are removed. Therefore, it is possible to prevent foreign matter adhering to the workpiece (2) from being brought into the cleaning zone (6) together with the workpiece (2) while remaining attached to the workpiece (2). It is possible to prevent contamination of the cleaning zone (6) due to foreign matter adhering to 2) being brought into the cleaning zone (6).
[0240] すなわち、この液体ホーニング加工機(1)によれば、ホーニングゾーン(5)の雰囲 気ガス中を浮遊する異物の洗浄ゾーン(6)への流入による洗浄ゾーン(6)の汚染を 防止することができるし、その上、ワーク(2)に付着した異物の洗浄ゾーン(6)への持 ち込みによる洗浄ゾーン (6)の汚染をも防止することができるから、洗浄ゾーン (6)を 高い清浄度に維持することができる。よって、洗浄不良の発生を防止することができ る。  [0240] That is, according to this liquid honing machine (1), contamination of the cleaning zone (6) due to the inflow of foreign matter floating in the atmosphere gas of the honing zone (5) into the cleaning zone (6) is prevented. In addition, it is possible to prevent contamination of the cleaning zone (6) by bringing foreign matter adhering to the workpiece (2) into the cleaning zone (6). ) Can be maintained at a high level of cleanliness. Therefore, it is possible to prevent the occurrence of poor cleaning.
[0241] また、隔壁 (7)のワーク通過用開口(8)の上縁 (8a)が液中搬送装置(10)の搬送槽  [0241] Also, the upper edge (8a) of the workpiece passage opening (8) of the partition wall (7) is the transfer tank of the submerged transfer device (10).
(11)内の液(72)中に浸漬された状態となされているので、ホーユングゾーン(5)の雰 囲気ガス中を浮遊する異物がワーク通過用開口(8)を通って洗浄ゾーン (6)に流入 するのを確実に防止することができる。したがって、洗浄ゾーン (6)の清浄度を確実 に維持することができる。  (11) Since it is immersed in the liquid (72) inside, the foreign matter floating in the atmosphere gas in the hounging zone (5) passes through the workpiece passage opening (8) and passes through the cleaning zone ( 6) can be reliably prevented. Therefore, the cleanliness of the cleaning zone (6) can be reliably maintained.
[0242] また、レール部(l id)が搬送槽(11)内の液(72)に対し非浸漬状態であるから、吊 掛部(12c)のレール部(l id)との摺動に伴い発生する粉塵が搬送槽(11)内の液(72 )中に流出するのを防止することができる。そのため、この粉塵の搬送槽(11)内の液( 72)中への流出による搬送槽(11)内の液(72)の汚染を防止することができる。  [0242] In addition, since the rail part (l id) is not immersed in the liquid (72) in the transfer tank (11), the hanging part (12c) can slide with the rail part (l id). The accompanying dust can be prevented from flowing into the liquid (72) in the transfer tank (11). Therefore, contamination of the liquid (72) in the transfer tank (11) due to the outflow of the dust into the liquid (72) in the transfer tank (11) can be prevented.
[0243] また、吊掛部(12c)の移動通路(13)とレール部(l id)がカバー部材(14)によって覆 われてレ、るので、吊掛部(12c)のレール部(l id)との摺動に伴レ、発生する粉塵が外 部(ホーユングゾーン(5)及び洗浄ゾーン(6) )へ飛散するのをこのカバー部材(14) によって防止することができる。そのため、洗浄ゾーン(6)の清浄度を更に確実に維 持すること力 Sできる。 [0243] Further, the moving path (13) and the rail part (lid) of the hanging part (12c) are covered by the cover member (14). As a result, the dust generated by sliding with the rail (lid) of the hanging part (12c) is scattered outside (hounging zone ( 5 ) and cleaning zone ( 6 )). This can be prevented by the cover member (14). Therefore, it is possible to maintain the cleanliness of the cleaning zone (6) more reliably.
[0244] さらに、カバー部材(14)における搬送槽(11)内側の側壁部(14b)の下端部(14c) が搬送槽(11)内の液(72)中に浸漬された状態となされているので、この粉塵が外部 へ飛散するのを確実に防止することができる。  [0244] Furthermore, the lower end (14c) of the side wall (14b) on the inner side of the transport tank (11) in the cover member (14) is immersed in the liquid (72) in the transport tank (11). Therefore, it is possible to reliably prevent the dust from scattering to the outside.
[0245] また、気泡発生手段(17)によって搬送槽(11)内の液 (72)中に気泡 (21)を発生さ せながら、ワーク(2)を搬送槽(11)内の液(72)中に浸漬した状態で洗浄ゾーン (6) に搬送することにより、ワーク(2)の搬送時において、ワーク(2)に付着した異物を効 果的に除去することができて、ワーク(2)に付着した異物が洗浄ゾーン(6)に持ち込 まれるのを確実に防止することができる。  [0245] Further, the bubbles (21) are generated in the liquid (72) in the transfer tank (11) by the bubble generating means (17), while the work (2) is transferred to the liquid (72 in the transfer tank (11). When the workpiece (2) is transported to the cleaning zone (6) while being immersed in the workpiece (2), foreign matter adhering to the workpiece (2) can be effectively removed during the transport of the workpiece (2). ) Can be reliably prevented from entering the cleaning zone (6).
[0246] また、搬送槽(11)内において液(72)がワーク搬送方向(3)とは反対方向に流れる ように液(72)を噴出ノズル(19)により搬送槽(11)内に噴出して供給しながら、ワーク( 2)を搬送槽(11)内の液 (72)中に浸漬した状態で搬送することにより、搬送槽(11)内 の液(72)中に存在してレ、る、ワーク(2)から除去された異物が、搬送槽(11)内の液 流によって搬送槽(11)内のホーユングゾーン(5)側に移動される。これにより、洗浄 ゾーン(6)の汚染を更に確実に防止することができる。  [0246] Further, the liquid (72) is ejected into the transport tank (11) by the ejection nozzle (19) so that the liquid (72) flows in the direction opposite to the work transport direction (3) in the transport tank (11). While being fed, the workpiece (2) is transported while being immersed in the liquid (72) in the transport tank (11), thereby being present in the liquid (72) in the transport tank (11). The foreign matter removed from the work (2) is moved to the hounging zone (5) side in the transfer tank (11) by the liquid flow in the transfer tank (11). As a result, contamination of the cleaning zone (6) can be more reliably prevented.
[0247] また、液 (72)を搬送槽(11)内に該搬送槽(11)内の洗浄ゾーン (6)側から噴出ノズ ル(19)により噴出することにより、搬送槽(11)内の液(72)中から引き上げる直前のヮ → (2)に近接した位置で該ワーク(2)に向けて液 (72)を噴出すること力できる力ら、 ワーク(2)に付着した異物の除去率が向上する。  [0247] Further, the liquid (72) is ejected into the transport tank (11) from the cleaning zone (6) side of the transport tank (11) by the spray nozzle (19), therebyヮ just before being pulled out of the liquid (72) → The force that can force the liquid (72) to be ejected toward the work (2) at a position close to (2) The removal rate is improved.
[0248] また、液中搬送装置(10)によるワーク(2)の搬送時において、搬送槽(11)内の液( 72)を搬送ネ曹(11)のホーユングゾーン(5)側の側壁部(l ib)の上端からオーバーフロ 一させることにより、搬送槽(11)内の液面に浮上した異物が搬送槽(11)内の液(72) と共にオーバーフローして搬送槽(11)外へ排出される。そのため、搬送槽(11)内の 液(72)の清浄度の低下を防止できるし、ワーク(2)の搬送時における異物のワーク( 2)への再付着を防止することできる。さらに、搬送槽(11)内の液面に浮上した異物 は、搬送槽(11)の洗浄ゾーン(6)側の側壁部(11c)ではなくホーニングゾーン(5)側 の側壁部(l ib)の上端からオーバーフローして排出されるから、この排出液で洗浄ゾ ーン (6)が汚染される虞はなレ、。 [0248] Further, when the workpiece (2) is transferred by the submerged transfer device (10), the liquid (72) in the transfer tank (11) is transferred to the hounging zone (5) side wall of the transfer soda (11). By overflowing from the upper end of the part (lib), the foreign matter floating on the liquid level in the transfer tank (11) overflows together with the liquid (72) in the transfer tank (11) and flows out of the transfer tank (11). Is discharged. Therefore, it is possible to prevent a decrease in the cleanliness of the liquid (72) in the transfer tank (11), and it is possible to prevent foreign matters from reattaching to the work (2) when the work (2) is transferred. In addition, foreign matter that floats on the liquid level in the transfer tank (11) Is discharged from the upper end of the side wall (lib) on the honing zone (5) instead of the side wall (11c) on the cleaning zone (6) side of the transfer tank (11). There is no risk of contamination of the cleaning zone (6).
[0249] また、ワーク(2)を搬送槽(11)内の液(72)中から引き上げながら該ワーク(2)に向 けて洗浄液(73)を噴射ノズノレ (23)により噴射することにより、ワーク(2)の搬送時や 引き上げ時にワーク(2)に再付着した異物を、ワーク(2)を引き上げる途中で除去す ること力 Sできる。 [0249] In addition, while lifting the work (2) from the liquid (72) in the transfer tank (11), the cleaning liquid (73) is sprayed by the spray nozzle (23) toward the work (2), The force S can be removed when the workpiece (2) is transported or lifted, and the foreign matter that has reattached to the workpiece (2) is removed while the workpiece (2) is being lifted.
[0250] また、搬送槽(11)の底面(l ie)が水平面に対してワーク搬送方向(3)において上 方に傾斜した状態に形成されているので、搬送槽(11)内の液(72)中に沈降した異 物が搬送槽(11)の底面(l ie)上を滑って搬送槽(11)内のホーニングゾーン(5)側に 移動される。そのため、洗浄ゾーン (6)の汚染を更に確実に防止することができる。  [0250] In addition, since the bottom surface (l ie) of the transfer tank (11) is formed to be inclined upward in the workpiece transfer direction (3) with respect to the horizontal plane, the liquid in the transfer tank (11) ( 72) The foreign matter that has settled down slides on the bottom surface (ie) of the transfer tank (11) and moves to the honing zone (5) side in the transfer tank (11). Therefore, contamination of the cleaning zone (6) can be more reliably prevented.
[0251] また、ガス供給装置 (58) (67)によって洗浄ゾーン (6)に清浄な雰囲気ガスを供給し ながら、ワーク(2)を洗浄ゾーン (6)で洗浄することにより、洗浄時における洗浄ゾー ン (6)の清浄度を向上させることができる。  [0251] In addition, cleaning is performed at the time of cleaning by cleaning the workpiece (2) in the cleaning zone (6) while supplying clean atmospheric gas to the cleaning zone (6) by the gas supply device (58) (67). The cleanliness of the zone (6) can be improved.
[0252] また、液体ホーユング加工機(1)はガス吸引装置(45)を備えているので、このガス 吸引装置 (45)によってホーニングゾーン(5)の雰囲気ガスを吸引することにより、ホ 一ユングゾーン(5)の雰囲気ガス中を浮遊する異物を除去することができて、ホー二 ングゾーン(5)の清浄度を向上させることができる。  [0252] Further, since the liquid houng processing machine (1) is equipped with a gas suction device (45), by sucking the atmospheric gas in the honing zone (5) by this gas suction device (45), the hounging machine (1) Foreign substances floating in the atmospheric gas in the zone (5) can be removed, and the cleanliness of the honing zone (5) can be improved.
[0253] また、洗浄ゾーン(6)の雰囲気ガス圧力をハウジング (4)外側の外気圧力に対し陽 圧に調整した状態で、ワーク(2)を洗浄ゾーン (6)で洗浄することにより、ハウジング( 4)外側の外気がハウジング (4)に不可避的に生じた隙間から洗浄ゾーン(6)に流入 するのを防止することができて、洗浄ゾーン(6)の清浄度を確実に維持することがで きる。  [0253] In addition, by cleaning the work (2) in the cleaning zone (6) with the atmospheric gas pressure in the cleaning zone (6) adjusted to a positive pressure relative to the outside air pressure outside the housing (4), (4) It is possible to prevent the outside air from flowing into the cleaning zone (6) from the gap inevitably generated in the housing (4), and to ensure the cleanliness of the cleaning zone (6). I can do it.
[0254] また、洗浄ゾーン(6)の雰囲気ガス圧力をホーユングゾーン(5)の雰囲気ガス圧力 に対し陽圧に調整した状態で、ワーク(2)を洗浄ゾーン (6)で洗浄処理することにより 、ホーニングゾーン(5)の雰囲気ガスが、隔壁(7)とハウジング(4)との間や隔壁(7) と搬送槽(11)との間などにおいて不可避的に生じた隙間から洗浄ゾーン (6)に流入 するのを防止することができて、洗浄ゾーン(6)の清浄度を確実に維持することがで きる。 [0254] In addition, the workpiece (2) should be cleaned in the cleaning zone (6) with the atmospheric gas pressure in the cleaning zone (6) adjusted to a positive pressure relative to the atmospheric gas pressure in the hounging zone (5). As a result, the atmospheric gas in the honing zone (5) is removed from the gaps inevitably generated between the partition wall (7) and the housing (4) or between the partition wall (7) and the transfer tank (11). 6), and the cleanliness of the cleaning zone (6) can be maintained reliably. wear.
[0255] また、ホーユングゾーン(5)には、ホーユング部(31)とシャワー洗浄部(32)と搬送部  [0255] In the hounging zone (5), the hounging section (31), the shower cleaning section (32), and the transport section
(33)とを内部に有するホーニング槽(30)が配置されているから、液体ホーニング処 理時においてホーユングゾーン(5)の汚染を防止することができる。  Since the honing tank (30) having (33) inside is disposed, the houng zone (5) can be prevented from being contaminated during the liquid honing process.
[0256] さらに、ホーニング槽(30)のワーク投入口(35)及び取出口(36)のうち少なくとも一 方を開けた状態のときに、ホーニング槽 (30)内の雰囲気ガスをホーニング槽用ガス 吸引装置 (41)により吸引することにより、ホーニング槽 (30)内の雰囲気ガス中を浮遊 する異物がワーク投入口(35)及び取出口(36)のうち前記少なくとも一方を介してホ 一二ングゾーン(5)に流出するのを確実に防止することができて、ホーニングゾーン( 5)の清浄度を維持することができる。  [0256] Further, when at least one of the work inlet (35) and the outlet (36) of the honing tank (30) is opened, the atmospheric gas in the honing tank (30) is used as the honing tank gas. By sucking with the suction device (41), foreign matter floating in the atmospheric gas in the honing tank (30) is passed through the at least one of the workpiece inlet (35) and the outlet (36) to the honing zone. (5) can be reliably prevented from flowing out, and the cleanliness of the honing zone (5) can be maintained.
[0257] また、洗浄ゾーン(6)におレ、て、洗浄ゾーン(6)に搬送されたワーク(2)につレヽて、 シャワー洗浄処理、 2回のスクラブ洗浄処理、シャワー洗浄処理、浸漬洗浄処理及び 引上げ乾燥処理を順次施すことにより、ワーク(2)の洗浄効率をより一層向上させる こと力 Sできる。  [0257] In addition, in the cleaning zone (6), it is transferred to the workpiece (2) transferred to the cleaning zone (6), shower cleaning treatment, two scrub cleaning treatments, shower cleaning treatment, immersion. By sequentially performing the cleaning process and the pull-up drying process, the cleaning efficiency of the workpiece (2) can be further improved.
[0258] さらに、洗浄ゾーン(6)のスクラブ洗浄部(52a) (52b)では、スクラブ洗浄装置(110) によりワーク(2)をスクラブ洗浄処理するから、以下の効果を奏する。  [0258] Further, the scrub cleaning sections (52a) and (52b) of the cleaning zone (6) scrub the workpiece (2) with the scrub cleaning device (110).
[0259] すなわち、スクラブ洗浄装置(110)のこすり部材(111)が連続気孔の多孔性軟質体 からなるので、このこすり部材(111)の表面をワーク(2)の表面に当接させることにより 、ワーク(2)の表面上に存在しているバリ、砥粒、ゴミ等の異物をこすり部材(111)の 表面の気孔内に取り込んでしつ力りと捕捉することができる。そのため、異物をワーク (2)の表面から確実に除去することができる。  [0259] That is, since the rubbing member (111) of the scrub cleaning device (110) is composed of a porous soft body having continuous pores, the surface of the rubbing member (111) is brought into contact with the surface of the workpiece (2). In addition, foreign matters such as burrs, abrasive grains, and dust existing on the surface of the work (2) can be taken into the pores on the surface of the rubbing member (111) and captured with a tenacity. For this reason, foreign matters can be reliably removed from the surface of the workpiece (2).
[0260] さらに、洗浄液(120)をこすり部材(111)の内部から連続気孔を介してこする部材(1 11)の表面外側に滲出させながら、ワーク(2)の洗浄が行われているので、こすり部 材(11)の表面に付着した異物や気孔内に捕捉された異物を、こすり部材(111)の表 面外側に滲出する洗浄液(120)によって外部へ排出することができる。さらに、こすり 部材(111)の表面を押圧部材(118)により押圧することにより、こすり部材(111)の表 面の押圧部材(118)による被押圧部分において、異物を排出するための洗浄液(120 )がこすり部材(111)の内部から多量に滲出するようになるから、異物を外部へ確実 に排出することができる。しかもこのとき、気孔内に捕捉されていた異物が押圧部材( 118)との当接によってこすり部材(111)の表面上に浮上するなど、異物が除去され易 い状態になり得るから、異物の排出量を増大することができる。そのため、異物のヮー ク表面への再付着を防止することができるし、ワーク(2)の表面にこすり部材(111)の 表面の気孔内に残留した異物が接触することにより生じるワーク(2)表面の傷つきを 防止することができる。したがって、ワーク(2)の表面欠陥の発生率を低減することが できる。 [0260] Furthermore, since the workpiece (2) is being washed out while leaching the cleaning liquid (120) from the inside of the rubbing member (111) to the outside of the surface of the member (111) that is rubbed through the continuous pores, Foreign matter adhering to the surface of the rubbing member (11) and foreign matter trapped in the pores can be discharged to the outside by the cleaning liquid (120) that exudes to the outer surface of the rubbing member (111). Further, by pressing the surface of the rubbing member (111) with the pressing member (118), a cleaning liquid (120 for discharging foreign matter at the pressed portion of the pressing member (118) on the surface of the rubbing member (111) (120). ) Will exude a large amount from the inside of the rubbing member (111). Can be discharged. In addition, at this time, the foreign matter trapped in the pores may float on the surface of the rubbing member (111) due to contact with the pressing member (118), and the foreign matter may be easily removed. The amount of discharge can be increased. For this reason, it is possible to prevent the foreign matter from reattaching to the surface of the workpiece, and the workpiece (2) generated when the foreign matter remaining in the pores of the surface of the scraping member (111) contacts the surface of the workpiece (2). Surface damage can be prevented. Therefore, the incidence of surface defects on the workpiece (2) can be reduced.
[0261] さらに、こすり部材(111)とワーク(2)を互いに同一方向にそれぞれ自軸回転させて ワーク(2)の洗浄を行うことにより、異物をワーク(2)の表面から該表面全周に亘つて 確実に除去することができる。  [0261] Further, by cleaning the workpiece (2) by rotating the rubbing member (111) and the workpiece (2) in the same direction in the same direction, foreign matter can be removed from the surface of the workpiece (2). Can be removed reliably.
[0262] また、このスクラブ洗浄処理方法では、こすり部材(111)の周速度を 100〜500mm /s (特に好ましくは 200〜300mm/s)の範囲に設定することが望ましレ、。また、ヮ ーク(2)の周速度を 50〜200mm/s (特に好ましくは 75〜: 150mm/s)の範囲に設 定することが望ましい。このように、こすり部材(111)の周速度とワーク(2)の周速度を それぞれ所定範囲に設定することにより、異物をワーク(2)の表面から更に確実に除 去すること力 Sできる。  [0262] In this scrub cleaning method, it is desirable to set the peripheral speed of the rubbing member (111) in the range of 100 to 500 mm / s (particularly preferably 200 to 300 mm / s). Further, it is desirable to set the peripheral speed of the cake (2) in the range of 50 to 200 mm / s (particularly preferably 75 to 150 mm / s). Thus, by setting the peripheral speed of the rubbing member (111) and the peripheral speed of the work (2) within predetermined ranges, the force S can be removed more reliably from the surface of the work (2).
[0263] また、こすり部材(111)の周速度を上記の範囲に確実に設定できるようにするため、 こすり部材回転駆動装置(115)は、こすり部材(111)の周速度を少なくとも 0〜650m m/sの範囲に制御可能に構成されることが望ましい。また、ワーク(2)の周速度を上 記の範囲に確実に設定できるようにするため、ワーク回転駆動装置(16)は、ワーク(2 )の周速度を少なくとも 0〜300mmZsの範囲に制御可能に構成されていることが望 ましい。  [0263] In order to ensure that the peripheral speed of the rubbing member (111) can be set within the above range, the rubbing member rotation drive device (115) sets the peripheral speed of the rubbing member (111) to at least 0 to 650 m. It is desirable to be configured to be controllable within a range of m / s. In addition, in order to ensure that the peripheral speed of the work (2) can be set within the above range, the work rotation drive device (16) can control the peripheral speed of the work (2) to at least the range of 0 to 300 mmZs. It is desirable that it is configured as follows.
[0264] さらに、ワーク(2)の表面にこすり部材(111)の表面をワーク(2)の表面の長さ方向 に沿って当接させた状態で、ワーク(2)の洗浄が行われているので、異物のワーク表 面からの除去量を増大させることができる。  [0264] Furthermore, the workpiece (2) is cleaned in a state where the surface of the scraping member (111) is in contact with the surface of the workpiece (2) along the length direction of the surface of the workpiece (2). As a result, the amount of foreign matter removed from the work surface can be increased.
[0265] また、図 9に示すように、ワーク(2)の表面にこすり部材(111)の表面をワーク表面と の当接幅 Wが 5〜30mmの範囲内になるように当接させた状態で、ワーク(2)の洗浄 を行うことが望ましい。 Wが 5mm未満では、 Wが小さすぎて洗浄力が不足する。一方 、 Wが 30mmを超えると、こすり部材(111)のワーク表面への押付け力が強くなりすぎ てワーク(2)の表面に傷が付き易くなる。したがって、 Wが 5〜30mmの範囲であるこ とが望ましぐこうすることにより、異物を確実に除去することができるし、こすり部材(1 11)のワーク(2)表面への押付け力が強くなりすぎてワーク(2)の表面が傷つく不具 合を防止することがきる。特に好ましい Wの範囲は 10〜: 15mmである。ただし本発明 では、 Wはこの範囲であることに限定されるものではない。 [0265] Further, as shown in FIG. 9, the surface of the scraping member (111) was brought into contact with the surface of the work (2) so that the contact width W with the work surface was within a range of 5 to 30 mm. In this condition, it is desirable to clean the workpiece (2). If W is less than 5mm, W is too small and cleaning power is insufficient. on the other hand If W exceeds 30 mm, the pressing force of the rubbing member (111) against the workpiece surface becomes too strong, and the surface of the workpiece (2) is easily damaged. Therefore, if it is desired that W is in the range of 5 to 30 mm, foreign matter can be reliably removed, and the pressing force of the scraping member (111) to the workpiece (2) surface is strong. It is possible to prevent the problem that the surface of the workpiece (2) is damaged by becoming too much. A particularly preferable range of W is 10 to 15 mm. However, in the present invention, W is not limited to this range.
[0266] さらに、ワーク(2)の表面にこすり部材(111)の表面をワーク(2)の表面の長さ方向 全体に亘つて当接させた状態で、ワーク(2)の洗浄が行われているので、ワーク(2) の表面の長さ方向全体に亘つて異物を除去することができる。  [0266] Furthermore, the workpiece (2) is cleaned in a state where the surface of the scraping member (111) is in contact with the entire surface of the workpiece (2) in the longitudinal direction of the workpiece (2). Therefore, foreign matter can be removed over the entire length of the surface of the work (2).
[0267] さらに、ワーク(2)の表面とワーク支持部材(121)の周面とが互いに面一に連なる状 態にワーク(2)の端面にワーク支持部材(121)が装着されているので、ワーク(2)の 表面の端部にこすり部材(111)の表面を確実に当接させることができて、ワーク(2)の 表面の端部を確実に洗浄することができる。  [0267] Furthermore, since the workpiece support member (121) is mounted on the end surface of the workpiece (2) so that the surface of the workpiece (2) and the peripheral surface of the workpiece support member (121) are connected to each other. The surface of the scraping member (111) can be brought into contact with the end of the surface of the work (2) with certainty, and the end of the surface of the work (2) can be reliably cleaned.
[0268] また、このスクラブ洗浄方法では、図 6に示すように、こすり部材(111)の表面を押圧 部材(118)により押圧した状態にぉレ、て、押圧部材(118)をこすり部材(111)の回転 方向(103)後方側に傾斜して配置することが望ましい。こうすることにより、こすり部材 (111)の表面に付着した異物や気孔内に捕捉された異物を外部へ確実に排出する こと力 Sできる。  [0268] Further, in this scrub cleaning method, as shown in FIG. 6, the pressing member (118) is rubbed in a state where the surface of the rubbing member (111) is pressed by the pressing member (118), and the pressing member (118) is rubbed ( 111) It is desirable to incline in the rotation direction (103) rear side. By doing so, it is possible to reliably discharge the foreign matter adhering to the surface of the rubbing member (111) and the foreign matter trapped in the pores to the outside.
[0269] さらに、同図に示すように、押圧部材(118)とこすり部材(111)の回転方向(103)後 方側の表面とのなす角度を Θとすると、 Θを 10〜45° (特に好ましくは 20〜30° ) の範囲に設定することが望ましい。こうすることにより、異物を外部へ更に確実に排出 することができる。ただし本発明では、 Θはこの範囲であることに限定されるものでは ない。  [0269] Furthermore, as shown in the figure, if the angle formed between the pressing member (118) and the surface of the rubbing member (111) in the rotational direction (103) rear side is Θ, Θ is 10 to 45 ° ( Particularly preferably, it is desirable to set in the range of 20 to 30 °. By doing so, foreign matter can be more reliably discharged to the outside. However, in the present invention, Θ is not limited to this range.
[0270] さらに、同図に示すように、こすり部材(111)の表面を該表面に深さ Kが 0. 5〜5m m (特に好ましくは l〜3mm)の窪み(119)が生じるように押圧部材(118)により押圧 することが望ましい。こうすることにより、異物を外部へ更に確実に排出することができ る。  [0270] Further, as shown in the figure, the surface of the rubbing member (111) is formed on the surface so that a recess (119) having a depth K of 0.5 to 5 mm (particularly preferably 1 to 3 mm) is generated. It is desirable to press with the pressing member (118). In this way, foreign matter can be more reliably discharged to the outside.
[0271] また、押圧部材(118)は、一側縁部を押圧部(118a)とする板状のものであるから、こ すり部材(111)の表面をこの板状押圧部材(118)により押圧することにより、こすり部 材(111)の内部から洗浄液(120)を確実に多量に滲出させることができて、異物を外 部へ確実に排出することができる。しかも、この板状押圧部材(118)を用いることによ り、気孔内に捕捉されていた異物が確実に除去され易い状態になり得て、異物の排 出量を確実に増大することができる。 [0271] The pressing member (118) is a plate-shaped member having one side edge as the pressing portion (118a). By pressing the surface of the scraping member (111) with the plate-shaped pressing member (118), a large amount of the cleaning liquid (120) can be surely exuded from the inside of the scraping member (111), and foreign matter can be removed. It is possible to discharge reliably to the part. Moreover, by using this plate-like pressing member (118), the foreign matter trapped in the pores can be easily removed, and the amount of foreign matter discharged can be reliably increased. .
[0272] さらに、こすり部材(111)の中空部内に洗浄液供給管(112)が揷入配置されている ので、こすり部材(111)の内部に洗浄液(120)を確実に供給することができる。さらに[0272] Furthermore, since the cleaning liquid supply pipe (112) is inserted into the hollow portion of the rubbing member (111), the cleaning liquid (120) can be reliably supplied into the rubbing member (111). further
、こすり部材(111)の中空部内に挿入された洗浄液供給管(112)がこすり部材(111) を補強する芯金として作用するため、こすり部材(111)の表面をワーク(2)の表面にし つ力りと当接させることができる。 Since the cleaning liquid supply pipe (112) inserted into the hollow portion of the rubbing member (111) acts as a metal core for reinforcing the rubbing member (111), the surface of the rubbing member (111) is used as the surface of the workpiece (2). It can be brought into contact with tension.
[0273] さらに、ワーク(2)とこすり部材(111)はそれぞれ鉛直に配置されているから、異物を 取り込んだ洗浄液(120)が洗浄時にワーク(2)やこすり部材(111)の表面上を軸方向 に流下するようになり、異物を迅速に除去することができる。 [0273] Furthermore, since the workpiece (2) and the rubbing member (111) are arranged vertically, the cleaning liquid (120) that has taken in the foreign matter moves over the surface of the workpiece (2) and the rubbing member (111) during cleaning. It will flow down in the axial direction and foreign matter can be removed quickly.
[0274] さらに、洗浄液供給管(112)の下端部が洗浄液導入管(113)と連結されているので[0274] Furthermore, since the lower end of the cleaning liquid supply pipe (112) is connected to the cleaning liquid introduction pipe (113),
、もし仮に洗浄液供給管(112)の下端部と洗浄液導入管(113)との連結部から洗浄 液が漏出した場合であっても、漏出時に、異物を取り込んだ洗浄液がこすり部材(11Even if the cleaning liquid leaks out from the connecting portion between the lower end of the cleaning liquid supply pipe (112) and the cleaning liquid introduction pipe (113), the cleaning liquid that has taken in the foreign material at the time of the leakage is rubbed (11
1)の表面に付着して汚染する不具合を防止することができる。 The problem of adhering to and contaminating the surface of 1) can be prevented.
[0275] 以上で、本発明の一実施形態について説明したが、本発明は上記実施形態に示 したものに限定されるものではな 様々に設定変更可能である。 [0275] Although one embodiment of the present invention has been described above, the present invention is not limited to the one shown in the above embodiment, and various settings can be changed.
[0276] 例えば、本発明に係る液体ホーニンダカ卩ェ機により加工されるワーク(2)は、光学 機器 (例:カメラ、望遠鏡)の鏡筒用パイプ等の精密ノイブの素管であっても良レ、し、 その他の用途に用いられる素管であっても良い。 [0276] For example, the workpiece (2) to be machined by the liquid honing machine according to the present invention may be an element tube of a precision neuve such as a pipe for a lens barrel of an optical device (eg, a camera or a telescope). It may be a blank tube used for other purposes.
[0277] また、洗浄ゾーン(6)に配置されるスクラブ洗浄部(52a) (52b)の段数は、 3段であ つても良いし、 4段以上であっても良い。 [0277] Further, the number of scrub cleaning units (52a) and (52b) arranged in the cleaning zone (6) may be three or four or more.
[0278] また、ワーク(2)は、円筒状のものに限定されるものではなぐ円柱状のものであつ ても良い。 [0278] Further, the workpiece (2) may be a columnar one, not limited to a cylindrical one.
[0279] また、スクラブ洗浄装置(110)のこすり部材(111)は、円筒状のものに限定されるも のではなぐ円柱状のものであっても良い。 [0280] また、スクラブ洗浄装置(110)では、洗浄液供給管(112)の下端部が閉塞状に形成 される一方、洗浄液供給管(112)の上端部が洗浄液導入管(113)と連結されていて も良い。 [0279] Further, the rubbing member (111) of the scrub cleaning device (110) may be a columnar one, not limited to a cylindrical one. [0280] In the scrub cleaning device (110), the lower end of the cleaning liquid supply pipe (112) is formed in a closed shape, while the upper end of the cleaning liquid supply pipe (112) is connected to the cleaning liquid introduction pipe (113). It is okay.
実施例  Example
[0281] 次に、本発明の具体的な実施例及び比較例を以下に示す。  [0281] Next, specific examples and comparative examples of the present invention are shown below.
[0282] <実施例 1 >  <Example 1>
ワーク(2)として、感光ドラム基体用パイプの素管を 5000個準備した。このワーク(2 ) (素管)は、アルミニウム製の引抜き丸管からなるものであり、その長さは 200〜450 mm、その外径は 15〜50mm、その肉厚は 0. 2〜2mmである。このワーク(2)を上 記実施形態の液体ホーニング加工機(1)により液体ホーユング処理した。  As work (2), 5,000 photosensitive drum base pipes were prepared. This work (2) (element tube) consists of an aluminum drawn round tube with a length of 200 to 450 mm, an outer diameter of 15 to 50 mm, and a wall thickness of 0.2 to 2 mm. is there. The workpiece (2) was subjected to liquid houng processing by the liquid honing machine (1) of the above embodiment.
[0283] <比較例 1 >  [0283] <Comparative Example 1>
ワーク(2)を液体ホーユング処理した。ただし、本比較例 1では、ハウジング(4)内 のホーユングゾーン(5)と洗浄ゾーン(6)との間には隔壁(7)は配設されておらず、 且つ、液中搬送装置(10)を使用しなレ、でワーク(2)をホーユングゾーン(5)から洗浄 ゾーン(6)に搬送した。他の条件は、実施例 1と同じである。  Work (2) was liquid hounged. However, in this comparative example 1, the partition wall (7) is not disposed between the hounging zone (5) and the cleaning zone (6) in the housing (4), and the submerged transfer device ( The workpiece (2) was transported from the hounging zone (5) to the cleaning zone (6) without using 10). Other conditions are the same as in Example 1.
[0284] 実施例 1及び比較例 1でそれぞれ液体ホーユング処理されたワーク(2)について洗 浄不良率を調べた。  [0284] The cleaning failure rate of the workpiece (2) treated in liquid hounging in Example 1 and Comparative Example 1 was examined.
[0285] その結果、比較例 1では、ワーク(2)の洗浄不良率が 1. 5%であった。一方、実施 例 1では、洗浄不良率は 0. 05。/。であった。したがって、上記液体ホーユング加工機 (1)によりワーク(2)を液体ホーユング処理することにより、ワークの洗浄不良率を大 幅に低減できることを確認できた。  [0285] As a result, in Comparative Example 1, the cleaning failure rate of the workpiece (2) was 1.5%. On the other hand, in Example 1, the cleaning failure rate was 0.05. /. Met. Therefore, it was confirmed that the cleaning failure rate of the workpiece can be greatly reduced by subjecting the workpiece (2) to the liquid houng treatment by the liquid hounging machine (1).
[0286] なお、洗浄不良率は以下のように求めた。  [0286] The cleaning failure rate was determined as follows.
[0287] ワーク(2)としての感光ドラム基体用パイプの素管についてイェローランプ照明下 での外観目視検査を実施し、この検査の合格品を上記実施形態の液体ホーニング 加工機(1)により液体ホーニング加工処理した。  [0287] Visual inspection of the pipe of the pipe for the photosensitive drum substrate as the work (2) was performed under a yellow lamp illumination, and a product that passed this inspection was liquidated by the liquid honing machine (1) of the above embodiment. Honed.
[0288] 次いで、液体ホーユング処理されたワーク(2)について再度イェローランプ照明下 での外観目視検査を実施した。そして、砥粒の付着及びこすり洗浄による傷の有無 を調べ、砥粒の付着及び傷が無いものを合格品とし、有るものを洗浄不良品と判定し た。 [0288] Next, visual inspection of the workpiece (2) that had been subjected to the liquid houng treatment was again performed under a yellow lamp illumination. Then, the presence or absence of scratches due to abrasive grains and rubbing cleaning is examined, and those without abrasive grains and scratches are accepted, and those that are present are judged to be poorly washed. It was.
[0289] <実施例 2〜: 16 >  [0289] <Example 2 to 16>
ワーク(2)として、感光ドラム基体用パイプの素管を 5000個準備した。このワーク(2 ) (素管)は、アルミニウム製の引抜き丸管からなるものであり、その長さは 200〜450 mm、その外径は 15〜50mm、その肉厚は 0. 5〜2mmである。このワーク(2)の表 面について上記実施形態の液体ホーユング加工機(1)により液体ホーユング処理し た。そして、このワーク(2)の表面に生じた周方向に延びた傷による欠陥の発生率を 調べた。その結果を表 1に示す。  As work (2), 5,000 photosensitive drum base pipes were prepared. This work (2) (element tube) consists of an aluminum drawn round tube with a length of 200 to 450 mm, an outer diameter of 15 to 50 mm, and a wall thickness of 0.5 to 2 mm. is there. The surface of the workpiece (2) was subjected to liquid houng treatment by the liquid hounging machine (1) of the above embodiment. Then, the incidence of defects due to circumferentially generated scratches on the surface of the workpiece (2) was examined. The results are shown in Table 1.
[0290] なお、この液体ホーニング処理のうちスクラブ洗浄処理で使用したこすり部材(111) は、 30%圧縮応力が 8. 8kPa (90gf/cm2)、平均気孔径が 200 /i mの PVA発泡体 により形成された連続気孔の多孔性軟質体からなるものである。また、こすり部材(11 1)の周速度、ワーク(2)の周速度、こすり部材(111)の表面のワーク(2)表面との当 接幅 W、押圧部材(118)とこすり部材(111)の回転方向後方側の表面とのなす角度 Θ、及び、こすり部材(111)の表面の窪み(119)の深さ Kを、それぞれ表 1に示した値 に設定してスクラブ洗浄を行った。 [0290] Of the liquid honing treatment, the rubbing member (111) used in the scrub cleaning treatment is a PVA foam having a 30% compressive stress of 8.8 kPa (90 gf / cm 2 ) and an average pore diameter of 200 / im. It consists of a porous soft body with continuous pores formed by Also, the peripheral speed of the scraping member (111), the peripheral speed of the workpiece (2), the contact width W of the surface of the scraping member (111) with the surface of the workpiece (2), the pressing member (118) and the scraping member (111 ) And the depth K of the dent (119) on the surface of the rubbing member (111) were set to the values shown in Table 1 and scrub cleaning was performed. .
[0291] <比較例 2 >  [0291] <Comparative Example 2>
ワーク(2)として、実施例 2〜: 16で用いた素管と同じものを 5000個準備した。このヮ ーク(2)の表面を、押圧部材(118)を用いないこと以外は実施例 2〜: 16と同じスクラ ブ洗浄処理によりスクラブ洗浄部(52a) (52b)で洗浄した。そして、このワーク(2)の表 面に生じた周方向に延びた傷による欠陥の発生率を調べた。その結果を表 1に示す  As the work (2), 5,000 pieces of the same raw tubes used in Examples 2 to 16 were prepared. The surface of the cake (2) was cleaned by the scrub cleaning sections (52a) and (52b) by the same scrub cleaning treatment as in Examples 2 to 16 except that the pressing member (118) was not used. Then, the incidence of defects due to the circumferentially extending scratches generated on the surface of the workpiece (2) was examined. The results are shown in Table 1
[0292] [表 1] こすリ部材 窪みの [0292] [Table 1] Scraping material
当接幅 W 角度 Θ  Contact width W angle Θ
の周速度 深さ 欠陥発生率  Peripheral speed Depth Defect occurrence rate
[mm]  [mm]
[mm/ s] [° ] [mm] [%] 実施例 2 100 1 50 10 30 1 0.05 実施例 3 300 1 50 10 30 1 0.03 実施例 4 500 1 50 10 30 1 0.05 実施例 5 200 ¾ 5 1 E 10 10 30 1 0.05 実施例 6 200 75 10 30 1 0.03 実施例 7 200 200 10 30 1 0.05 実施例 8 200 1 50 5 30 1 0.05 実施例 8 200 1 50 1 5 30 1 0.03 実施例 10 200 1 50 30 30 1 0.05 実施例 1 1 200 150 10 10 1 0.05 実施例 1 2 200 150 10 20 1 0.02 実施例 1 3 200 150 10 45 1 0.05 実施例 14 200 150 10 30 0.5 0.05 実施例 1 5 200 150 10 30 3 0.03 実施例 16 200 150 10 30 5 0.05 比較例 2 200 1 50 10 一 一 0.09  [mm / s] [°] [mm] [%] Example 2 100 1 50 10 30 1 0.05 Example 3 300 1 50 10 30 1 0.03 Example 4 500 1 50 10 30 1 0.05 Example 5 200 ¾ 5 1 E 10 10 30 1 0.05 Example 6 200 75 10 30 1 0.03 Example 7 200 200 10 30 1 0.05 Example 8 200 1 50 5 30 1 0.05 Example 8 200 1 50 1 5 30 1 0.03 Example 10 200 1 50 30 30 1 0.05 Example 1 1 200 150 10 10 1 0.05 Example 1 2 200 150 10 20 1 0.02 Example 1 3 200 150 10 45 1 0.05 Example 14 200 150 10 30 0.5 0.05 Example 1 5 200 150 10 30 3 0.03 Example 16 200 150 10 30 5 0.05 Comparative Example 2 200 1 50 10 One 0.09
[0293] 表 1に示すように、実施例 2〜: 16では、比較例 2よりも欠陥発生率を低減できること を確認し得た。 [0293] As shown in Table 1, in Examples 2 to 16, it was confirmed that the defect occurrence rate could be reduced as compared with Comparative Example 2.
[0294] ぐ比較例 3 >  [0294] Gu Comparative Example 3>
ワーク(2)を液体ホーニング処理した。ただし、本比較例 3では、次の方法によって ワーク(2)をスクラブ洗浄処理した。すなわち、そのスクラブ洗浄処理方法とは、ヮー ク(2)の表面にこすり部材(111)を当接させた状態で、こすり部材(111)を自軸回転さ せることにより、ワーク(2)の表面をスクラブ洗浄処理した。しかし、この洗浄時には、 洗浄液をこすり部材(111)の内部からこすり部材(111)の表面外側へ滲出させていな いし、押圧部材(118)は用いな力つた。その他の条件は、実施例 2〜: 16と同じである 。そして、このワーク(2)の表面に生じた周方向に延びた傷による欠陥の発生率を調 ベた。 Work (2) was subjected to liquid honing. However, in Comparative Example 3, the work (2) was scrubbed by the following method. That is, the scrub cleaning method is to rotate the rubbing member (111) by rotating the rubbing member (111) with the rubbing member (111) in contact with the surface of the workpiece (2). The surface was scrubbed. However, during this cleaning, the cleaning liquid is not leached from the inside of the rubbing member (111) to the outer surface of the rubbing member (111). However, the pressing member (118) was not used. Other conditions are the same as those in Examples 2 to 16. Then, the occurrence rate of defects due to the circumferentially extending flaw generated on the surface of the workpiece (2) was examined.
[0295] その結果、比較例 3では、この傷による欠陥発生率が 1. 74%であった。なお、この 傷は、こすり部材の表面の気孔内に捕捉された異物がこすり部材の回転に伴いヮー クの表面に接触することにより生じたものである。一方、実施例 2〜: 16では、この傷に よる欠陥発生率が約 0% (詳述すると 0. 05%以下)であり、したがって比較例 3よりも 大幅に欠陥発生率を低減できることを確認し得た。  [0295] As a result, in Comparative Example 3, the defect occurrence rate due to this scratch was 1.74%. This scratch is caused by the foreign matter trapped in the pores on the surface of the rubbing member coming into contact with the surface of the cake as the rubbing member rotates. On the other hand, in Examples 2 to 16, the defect occurrence rate due to this scratch is about 0% (more specifically, 0.05% or less), and therefore it is confirmed that the defect occurrence rate can be greatly reduced as compared with Comparative Example 3. It was possible.
[0296] この出願は、 2004年 11月 2日付で出願された日本国特許出願特願 2004— 3192 99号、 2004年 11月 9日付で出願された米国特許出願 60/625, 983号、及び 20 04年 10月 8日付で出願された日本国特許出願特願 2004— 296757号の優先権主 張を伴うものであり、その開示内容は、そのまま本願の一部を構成するものである。  [0296] This application includes Japanese Patent Application No. 2004-319299 filed on November 2, 2004, US Patent Application No. 60 / 625,983 filed on November 9, 2004, and 20 This is accompanied by the priority claim of Japanese Patent Application No. 2004-296757 filed on Oct. 8, 2004, the disclosure of which constitutes a part of the present application as it is.
[0297] ここに用いられた用語および表現は、説明のために用いられたものであって限定的 に解釈するために用いられたものではなぐここに示されかつ述べられた特徴事項の 如何なる均等物をも排除するものではなぐこの発明のクレームされた範囲内におけ る各種変形をも許容するものであると認識されなければならない。  [0297] The terms and expressions used herein are for explanatory purposes only and are not intended to be interpreted in a limited manner, and any equivalent of the features shown and described herein. It should be recognized that various modifications within the claimed scope of the present invention are permitted, not to exclude objects.
産業上の利用可能性  Industrial applicability
[0298] 本発明は、精密パイプの素管、感光ドラム基体用パイプの素管、光学機器の鏡筒 用パイプの素管等のワークを液体ホーユング加工する液体ホーユング加工機及び液 体ホーユング加工方法に利用可能である。 [0298] The present invention relates to a liquid houng processing machine and a liquid houng processing method for liquid hounging a workpiece such as a precision pipe base, a photosensitive drum base pipe, an optical device barrel pipe, and the like Is available.
[0299] 本発明は、精密パイプ、感光ドラム基体用パイプ、光学機器の鏡筒用パイプ等のパ イブを製造するパイプの製造装置に利用可能である。  [0299] The present invention can be used for a pipe manufacturing apparatus for manufacturing a pipe such as a precision pipe, a pipe for a photosensitive drum base, and a pipe for a lens barrel of an optical instrument.

Claims

請求の範囲 The scope of the claims
[1] ワークを液体ホーニング処理するホーユングゾーンと、該ホーユングゾーンで液体 ホーニング処理されたワークを洗浄処理する洗浄ゾーンとを、外気から遮断されたハ ウジング内に互いに隣接して備えるとともに、  [1] A houng zone for performing a fluid honing treatment on a workpiece and a washing zone for washing a workpiece subjected to the liquid honing treatment in the houng zone are provided adjacent to each other in a housing that is blocked from outside air.
前記ハウジング内における前記ホーニングゾーンと前記洗浄ゾーンとの間に、前記 ホーユングゾーンの雰囲気ガスが前記洗浄ゾーンに流入するのを防止する隔壁が配 設され、  A partition wall is disposed between the honing zone and the cleaning zone in the housing to prevent the atmospheric gas in the hounging zone from flowing into the cleaning zone.
更に、前記ホーユングゾーンで液体ホーニング処理されたワークを、搬送槽内の液 中に浸漬した状態で、前記ホーユングゾーンから前記隔壁に設けたワーク通過用開 口を通過させて前記洗浄ゾーンへと搬送する液中搬送装置を、前記ハウジング内に 備えてレ、る液体ホーユングカ卩ェ機。  Further, the workpiece subjected to the liquid honing treatment in the hounging zone is immersed in the liquid in the transfer tank, and then passed from the hounging zone through the workpiece passage opening provided in the partition wall to the cleaning zone. And a liquid transporting device that includes a submerged transport device in the housing.
[2] 前記隔壁のワーク通過用開口の上縁が前記液中搬送装置の搬送槽内の液中に浸 漬された状態となされている請求項 1記載の液体ホーユングカ卩ェ機。  [2] The liquid honing carriage according to claim 1, wherein an upper edge of the work passage opening of the partition wall is immersed in the liquid in the transfer tank of the submerged transfer apparatus.
[3] 前記液中搬送装置は、ワークが搭載される搭載板部と、該搭載板部に上方突出状 に設けられたアーム部と、該アームの上端部に設けられた吊掛部とを有する搬送台 を備え、  [3] The submerged transport device includes a mounting plate portion on which a workpiece is mounted, an arm portion provided on the mounting plate portion so as to protrude upward, and a hanging portion provided on an upper end portion of the arm. Equipped with a carrier
前記搬送槽の側壁部の上端部に、ワーク搬送方向に延びたレール部が前記搬送 槽内の液に対し非浸漬状態に設けられ、  At the upper end of the side wall of the transfer tank, a rail part extending in the workpiece transfer direction is provided in a non-immersed state with respect to the liquid in the transfer tank,
前記搬送台は、前記レール部に前記吊掛部が吊り掛けられた状態で前記搬送槽 内に配置されており、  The transport table is disposed in the transport tank in a state in which the hanging portion is hung on the rail portion,
前記液中搬送装置は、前記吊掛部が前記レール部上を摺動状態でワーク搬送方 向に移動されることにより、前記搬送台の搭載板部に搭載されたワークを前記搬送槽 内の液中に浸漬した状態で搬送するものとなされている請求項 1記載の液体ホー二 ング加工機。  The submerged transfer device moves the work mounted on the mounting plate portion of the transfer table in the transfer tank by moving the hanging portion in a sliding state on the rail portion in the work transfer direction. 2. The liquid honing machine according to claim 1, wherein the machine is transported while being immersed in the liquid.
[4] 前記吊掛部の移動通路と前記レール部が、前記吊掛部の前記レール部との摺動 に伴い発生する粉塵が外部へ飛散するのを防止するカバー部材により覆われている 請求項 3記載の液体ホーニンダカ卩ェ機。  [4] The moving passage of the hanging portion and the rail portion are covered with a cover member that prevents dust generated by sliding with the rail portion of the hanging portion from scattering to the outside. Item 4. The liquid Honinka machine according to Item 3.
[5] 前記カバー部材における搬送槽内側の側壁部の下端部が、前記搬送槽内の液中 に浸漬された状態となされている請求項 4記載の液体ホーニング加工機。 [5] The lower end portion of the side wall portion inside the transport tank in the cover member is in the liquid in the transport tank. 5. The liquid honing machine according to claim 4, wherein the liquid honing machine is immersed in the machine.
[6] 前記液中搬送装置は、前記搬送槽内の液中にガスを噴出して気泡を発生させる気 泡発生手段を有している請求項 1記載の液体ホーユングカ卩ェ機。 6. The liquid hoisting carriage according to claim 1, wherein the submerged transport device has bubble generating means for generating gas by jetting gas into the liquid in the transport tank.
[7] 前記液中搬送装置は、前記搬送槽内において液がワーク搬送方向とは反対方向 に流れるように液を前記搬送槽内に噴出して供給する噴出ノズノレを有している請求 項 1記載の液体ホーユング加ェ機。 7. The submerged transport device has a jet nozzle that ejects and supplies liquid into the transport tank so that the liquid flows in a direction opposite to the workpiece transport direction in the transport tank. The liquid hounging machine described.
[8] 前記噴出ノズルは、前記搬送槽内の洗浄ゾーン側に配置されている請求項 7記載 の液体ホーニング加工機。 8. The liquid honing machine according to claim 7, wherein the ejection nozzle is disposed on a cleaning zone side in the transfer tank.
[9] 前記液中搬送装置は、前記搬送槽内の液が該搬送槽のホーニングゾーン側の側 壁部の上端力 オーバーフローされるものとなされている請求項 1記載の液体ホー二 ング加工機。 [9] The liquid honing machine according to claim 1, wherein the submerged conveying device is configured such that the liquid in the conveying tank overflows the upper end force of the side wall portion on the honing zone side of the conveying tank. .
[10] 前記液中搬送装置は、前記搬送槽内の液中から引き上げられる途中のワークに向 けて洗浄液を噴射する噴射ノズルを有している請求項 1記載の液体ホーニングカロェ 機。  10. The liquid honing calorie machine according to claim 1, wherein the submerged conveying device has an ejection nozzle that ejects a cleaning liquid toward a workpiece that is being pulled up from the liquid in the conveying tank.
[11] 前記液中搬送装置は、前記搬送槽の底面が水平面に対してワーク搬送方向にお いて上方に傾斜した状態に形成されている請求項 1記載の液体ホーニンダカ卩ェ機。  11. The liquid honing machine according to claim 1, wherein the submerged conveying device is formed such that a bottom surface of the conveying tank is inclined upward in a workpiece conveying direction with respect to a horizontal plane.
[12] 前記洗浄ゾーンに清浄な雰囲気ガスを供給するガス供給装置を備えている請求項12. A gas supply device for supplying a clean atmospheric gas to the cleaning zone.
1記載の液体ホーユング加工機。 The liquid hounging machine according to 1.
[13] 前記ホーニングゾーンの雰囲気ガスを吸引するガス吸引装置を備えている請求項[13] The apparatus according to claim 13, further comprising a gas suction device for sucking atmospheric gas in the honing zone.
1記載の液体ホーユング加工機。 The liquid hounging machine according to 1.
[14] 前記洗浄ゾーンの雰囲気ガス圧力は、前記ハウジング外側の外気圧力に対し陽圧 に調整されている請求項 1記載の液体ホーユングカ卩ェ機。 14. The liquid hounging cache machine according to claim 1, wherein the atmospheric gas pressure in the cleaning zone is adjusted to be positive with respect to the outside air pressure outside the housing.
[15] 前記洗浄ゾーンの雰囲気ガス圧力は、前記ホーニングゾーンの雰囲気ガス圧力に 対し陽圧に調整されている請求項 1記載の液体ホーユング加工機。 15. The liquid hounging machine according to claim 1, wherein the atmospheric gas pressure in the cleaning zone is adjusted to a positive pressure with respect to the atmospheric gas pressure in the honing zone.
[16] 前記ホーユングゾーンには、ワークを液体ホーユング処理するホーユング部と、該 ホーユング部で液体ホーユング処理されたワークをシャワー洗浄処理するシャワー洗 浄部と、前記ホーユング部で液体ホーユング処理されたワークを前記ホーユング部か ら前記シャワー洗浄部に搬送する搬送部とを内部に有するホーニング槽が配置され ており、 [16] In the hounging zone, a hounging unit that performs liquid hounging of the workpiece, a shower cleaning unit that performs shower cleaning processing of the workpiece that has been liquid hounged in the hounging unit, and liquid hounging processing performed in the hounging unit A honing tank having a transfer unit for transferring a work from the hounging unit to the shower cleaning unit is disposed. And
前記ホーニング槽は、ワーク投入口と、ワーク取出口と、前記ワーク投入口及び取 出口にそれぞれ対応する開閉蓋とを有しており、  The honing tank has a workpiece inlet, a workpiece outlet, and an open / close lid corresponding to each of the workpiece inlet and outlet.
前記ホーニング槽に、該ホーニング槽内の雰囲気ガスを吸引するホーニング槽用 ガス吸引装置が接続されている請求項 1記載の液体ホーニンダカ卩ェ機。  2. The liquid honing machine according to claim 1, wherein a gas suction device for a honing tank for sucking atmospheric gas in the honing tank is connected to the honing tank.
[17] 前記ホーユングゾーンには、ワークを液体ホーユング処理するホーユング部と、該 ホーユング部で液体ホーユング処理されたワークをシャワー洗浄処理する第 1シャヮ 一洗浄部と、前記ホーニング部で液体ホーユング処理されたワークを前記ホーニン グ部から前記第 1シャワー洗浄部に搬送する搬送部とを内部に有するホーニング槽 が配置されるとともに、更に、前記ホーニングゾーンには、ワークを前記ホーニング部 に搬送する第 1搬送装置と、前記第 1シャワー洗浄部で洗浄処理されたワークを前記 第 1シャワー洗浄部から前記液中搬送装置に搬送する第 2搬送装置とが配置されて おり、 [17] The hounging zone includes a hounging unit that performs liquid hounging of the workpiece, a first cleaning unit that performs shower cleaning of the workpiece that has been liquid hounged in the hounging unit, and a liquid hounging process in the honing unit. A honing tank having a conveying unit for conveying the workpieces from the honing unit to the first shower cleaning unit is disposed therein, and in the honing zone, a honing tank for conveying the workpieces to the honing unit is disposed. 1 transport device and a second transport device that transports the workpiece cleaned by the first shower cleaning unit from the first shower cleaning unit to the submerged transport device,
前記洗浄ゾーンには、前記液中搬送装置により前記洗浄ゾーンに搬送されたヮー クをシャワー洗浄処理する第 2シャワー洗浄部と、該第 2シャワー洗浄部で洗浄処理 されたワークをスクラブ洗浄処理する複数段に並んだスクラブ洗浄部と、該スクラブ洗 浄部で洗浄処理されたワークをシャワー洗浄処理する第 3シャワー洗浄部と、該第 3 シャワー洗浄部で洗浄処理されたワークを洗浄液中に浸漬することにより洗浄処理 する浸漬洗浄部と、該浸漬洗浄部で洗浄処理されたワークを高温液中に浸漬して高 温液中から引き上げることにより乾燥処理する引上げ乾燥部と、前記液中搬送装置 により前記洗浄ゾーンに搬送されたワークを前記液中搬送装置から前記各洗浄部及 び引上げ乾燥部に順次搬送する第 3搬送装置とが配置されている請求項 1記載の液 体ホーユング加工機。  In the cleaning zone, a second shower cleaning unit that performs a shower cleaning process on the cake transported to the cleaning zone by the submerged transport device, and a scrub cleaning process on the workpiece that has been cleaned by the second shower cleaning unit Scrub cleaning units arranged in a plurality of stages, a third shower cleaning unit for shower cleaning the workpiece cleaned by the scrub cleaning unit, and a workpiece cleaned by the third shower cleaning unit immersed in the cleaning liquid An immersion cleaning unit that performs a cleaning process, a pull drying unit that performs a drying process by immersing the workpiece cleaned in the immersion cleaning unit in a high-temperature liquid and pulling it up from the high-temperature liquid, and the submerged conveyance device 2. A third transfer device that sequentially transfers the workpiece transferred to the cleaning zone by the submerged transfer device to the cleaning unit and the pulling and drying unit is disposed. Liquid body Hoyungu machine of the placement.
[18] 前記スクラブ洗浄部には、スクラブ洗浄装置が設置され、  [18] A scrub cleaning device is installed in the scrub cleaning unit,
前記スクラブ洗浄装置は、ワークを自軸回転させるワーク回転駆動装置と、連続気 孔の多孔性軟質体力 なる円柱状又は円筒状こすり部材と、ワークの表面に前記こ すり部材の表面が当接された状態の前記こすり部材を自軸回転させるこすり部材回 転駆動装置と、洗浄時に前記こすり部材の表面を押圧する押圧部材と、を備え、洗 浄液を前記こすり部材の内部から前記連続気孔を介して前記こすり部材の表面外側 に滲出させるように構成されている請求項 17記載の液体ホーユングカ卩ェ機。 The scrub cleaning device includes a workpiece rotation driving device that rotates a workpiece by its own axis, a columnar or cylindrical rubbing member that is a porous soft body force of continuous pores, and a surface of the rubbing member that is in contact with the surface of the workpiece. A rubbing member rotation drive device that rotates the rubbing member in its own axis and a pressing member that presses the surface of the rubbing member during cleaning. 18. The liquid hounging cache device according to claim 17, wherein the liquid fountain carriage is configured to exude clean liquid from the inside of the rubbing member to the outer surface of the rubbing member through the continuous pores.
[19] 前記洗浄ゾーンで使用された使用済み洗浄液が、前記液中搬送装置の搬送槽内 に供給されるものとなされている請求項 1記載の液体ホーユング加工機。 19. The liquid hounging machine according to claim 1, wherein the used cleaning liquid used in the cleaning zone is supplied into a transfer tank of the submerged transfer apparatus.
[20] 前記液中搬送装置の搬送槽からの排出液が、前記ホーニングゾーンで使用される ホーニング液及び/又は洗浄液の少なくとも一部として使用されるものとなされてい る請求項 1記載の液体ホーニング加工機。 [20] The liquid honing according to claim 1, wherein the liquid discharged from the transfer tank of the submerged transfer device is used as at least part of the honing liquid and / or the cleaning liquid used in the honing zone. Processing machine.
[21] ワークは、精密パイプの素管である請求項 1記載の液体ホーユング加工機。 21. The liquid hounging machine according to claim 1, wherein the workpiece is a base pipe of a precision pipe.
[22] ワークは、感光ドラム基体用パイプの素管である請求項 1記載の液体ホーニングカロ ェ機。 [22] The liquid honing calorifier according to [1], wherein the workpiece is a base pipe of a pipe for a photosensitive drum substrate.
[23] 円柱状又は円筒状ワークを液体ホーユング処理するホーニングゾーンと、該ホ一二 ングゾーンで液体ホーユング処理されたワークを洗浄処理する洗浄ゾーンとを、外気 力も遮断されたハウジング内に互いに隣接して備えるとともに、  [23] A honing zone in which a columnar or cylindrical workpiece is liquid hounged and a cleaning zone in which a workpiece that has been liquid hounged in the honing zone is disposed adjacent to each other in a housing that is also shielded from outside air. Prepare and
前記ハウジング内における前記ホーニングゾーンと前記洗浄ゾーンとの間に、前記 ホーユングゾーンの雰囲気ガスが前記洗浄ゾーンに流入するのを防止する隔壁が配 設され、  A partition wall is disposed between the honing zone and the cleaning zone in the housing to prevent the atmospheric gas in the hounging zone from flowing into the cleaning zone.
更に、前記ホーユングゾーンで液体ホーニング処理されたワークを、搬送槽内の液 中に浸漬した状態で、前記ホーニングゾーン力 前記隔壁に設けたワーク通過用開 口を通過させて前記洗浄ゾーンへと搬送する液中搬送装置を、前記ハウジング内に 備えており、  Further, the work subjected to the liquid honing treatment in the hounging zone is immersed in the liquid in the transfer tank, and the honing zone force is passed through the work passage opening provided in the partition wall to the cleaning zone. A submerged conveying device for conveying is provided in the housing,
前記洗浄ゾーンには、前記液中搬送装置により前記洗浄ゾーンに搬送されたヮー クをスクラブ洗浄処理するスクラブ洗浄部が配置されており、  In the cleaning zone, a scrub cleaning unit is disposed for scrub cleaning the cake transported to the cleaning zone by the submerged transport device,
前記スクラブ洗浄部には、スクラブ洗浄装置が設置され、  In the scrub cleaning section, a scrub cleaning device is installed,
前記スクラブ洗浄装置は、ワークを自軸回転させるワーク回転駆動装置と、連続気 孔の多孔性軟質体力 なる円柱状又は円筒状こすり部材と、ワークの表面に前記こ すり部材の表面が当接された状態の前記こすり部材を自軸回転させるこすり部材回 転駆動装置と、洗浄時に前記こすり部材の表面を押圧する押圧部材と、を備え、洗 浄液を前記こすり部材の内部から前記連続気孔を介して前記こすり部材の表面外側 に滲出させるように構成されている液体ホーユングカ卩ェ機。 The scrub cleaning device includes a workpiece rotation driving device that rotates a workpiece by its own axis, a columnar or cylindrical rubbing member that is a porous soft body force of continuous pores, and a surface of the rubbing member that is in contact with the surface of the workpiece. A rubbing member rotation driving device that rotates the rubbing member in its own axis and a pressing member that presses the surface of the rubbing member at the time of cleaning, and the cleaning solution is passed through the rubbing member from the inside of the rubbing member. The outer surface of the rubbing member through Liquid Hoyung Kaye machine that is configured to exude.
[24] 前記スクラブ洗浄装置の前記こすり部材回転駆動装置は、前記こすり部材の周速 度を少なくとも 0〜650mm/sの範囲に制御可能に構成されるとともに、 [24] The rubbing member rotation driving device of the scrub cleaning device is configured to be able to control the peripheral speed of the rubbing member in a range of at least 0 to 650 mm / s,
前記ワーク回転駆動装置は、前記ワークの周速度を少なくとも 0〜300mmZsの範 囲に制御可能に構成されている請求項 23記載の液体ホーニンダカ卩ェ機。  24. The liquid horning machine according to claim 23, wherein the work rotation driving device is configured to be able to control a peripheral speed of the work within a range of at least 0 to 300 mmZs.
[25] 前記スクラブ洗浄装置の前記こすり部材の表面は、ワークの表面に該表面の長さ 方向に沿って当接されるものである請求項 23記載の液体ホーユングカ卩ェ機。 25. The liquid hounging machine according to claim 23, wherein the surface of the rubbing member of the scrub cleaning device is in contact with the surface of the work along the length direction of the surface.
[26] 前記スクラブ洗浄装置の前記こすり部材の表面の長さがワークの表面の長さに対し て大寸に設定されている請求項 23記載の液体ホーニンダカ卩ェ機。 26. The liquid honing machine according to claim 23, wherein the length of the surface of the rubbing member of the scrub cleaning apparatus is set to be larger than the length of the surface of the workpiece.
[27] 前記スクラブ洗浄装置は、前記ワークの端面に装着されるワーク支持部材を備え、 前記ワーク支持部材は、ワーク端面への装着状態において、ワークの表面とワーク 支持部材の周面とがワークの軸方向に面一に連なるように構成されている請求項 23 記載の液体ホーニング加工機。 [27] The scrub cleaning apparatus includes a work support member mounted on an end surface of the work, and the work support member includes a work surface and a peripheral surface of the work support member in a mounted state on the work end surface. The liquid honing machine according to claim 23, wherein the machine is configured to be flush with each other in the axial direction.
[28] 前記スクラブ洗浄装置の前記こすり部材の表面を前記押圧部材により押圧した状 態において、前記押圧部材が前記こすり部材の回転方向後方側に傾斜して配置さ れている請求項 23記載の液体ホーユングカ卩ェ機。 28. The pressing device according to claim 23, wherein the pressing member is disposed to be inclined rearward in the rotational direction of the rubbing member in a state where the surface of the rubbing member of the scrub cleaning device is pressed by the pressing member. Liquid Hoyungkae machine.
[29] 前記スクラブ洗浄装置の前記押圧部材と前記こすり部材の回転方向後方側の表面 とのなす角度が 10〜45° の範囲に設定されている請求項 28記載の液体ホーニン グ加工機。 29. The liquid honing machine according to claim 28, wherein an angle formed between the pressing member of the scrub cleaning device and a surface on the rear side in the rotational direction of the rubbing member is set in a range of 10 to 45 °.
[30] 前記スクラブ洗浄装置の前記押圧部材は、一側縁部を押圧部とする板状のもので ある請求項 23記載の液体ホーユングカ卩ェ機。  30. The liquid hounging cache machine according to claim 23, wherein the pressing member of the scrub cleaning apparatus is a plate-shaped member having one side edge as a pressing portion.
[31] 前記スクラブ洗浄装置の前記こすり部材は、円筒状であり、 [31] The rubbing member of the scrub cleaning device is cylindrical,
前記こすり部材の中空部内に、周壁に複数個の洗浄液流出孔が設けられ前記こす り部材の内部に洗浄液を供給する洗浄液供給管が、前記こすり部材の軸方向に揷 入配置されている請求項 23記載の液体ホーユングカ卩ェ機。  A cleaning liquid supply pipe for supplying a cleaning liquid to the inside of the rubbing member is provided in the axial direction of the rubbing member. 23. Liquid Hoyungkae machine according to 23.
[32] 前記スクラブ洗浄装置の前記こすり部材は、略鉛直に配置されており、 [32] The rubbing member of the scrub cleaning device is disposed substantially vertically,
前記洗浄液供給管の上下両端部のうちいずれか一方の端部が閉塞状に形成され 前記洗浄液供給管の他方の端部が該洗浄液供給管内に洗浄液を導入する洗浄 液導入管と連結されている請求項 31記載の液体ホーユングカ卩ェ機。 Either one of the upper and lower ends of the cleaning liquid supply pipe is closed. 32. The liquid honing cache machine according to claim 31, wherein the other end of the cleaning liquid supply pipe is connected to a cleaning liquid introduction pipe for introducing the cleaning liquid into the cleaning liquid supply pipe.
[33] 前記スクラブ洗浄装置の前記こすり部材の前記多孔性軟質体は、 PVA系樹脂、ポ リエチレン系樹脂、ポリエーテル系樹脂、酢酸ビニル系樹脂及びポリウレタン系樹脂 のうちのいずれかの発泡体により形成されている請求項 23記載の液体ホーニング加 ェ機。 [33] The porous soft body of the rubbing member of the scrub cleaning device is made of a foam of any one of PVA resin, polyethylene resin, polyether resin, vinyl acetate resin, and polyurethane resin. The liquid honing machine according to claim 23, wherein the liquid honing machine is formed.
[34] ワークは、精密パイプの素管である請求項 23記載の液体ホーユングカ卩ェ機。  [34] The liquid hounging cache machine according to claim 23, wherein the workpiece is a base pipe of a precision pipe.
[35] ワークは、感光ドラム基体用パイプの素管である請求項 23記載の液体ホーニング 加工機。 35. The liquid honing machine according to claim 23, wherein the workpiece is an element pipe of a pipe for a photosensitive drum base.
[36] 素管について液体ホーニング処理及び洗浄処理を順次施す液体ホーニングカロェ 機を備えたパイプの製造装置において、  [36] In a pipe manufacturing apparatus equipped with a liquid honing Karoe machine that sequentially performs liquid honing treatment and cleaning treatment on a raw pipe,
前記液体ホーユングカ卩ェ機として、請求項:!〜 35のいずれか 1項記載の液体ホー ニング加工機が用いられていることを特徴とするパイプの製造装置。  35. An apparatus for manufacturing a pipe, wherein the liquid honing machine according to any one of claims: 35 to 35 is used as the liquid honing carriage.
[37] パイプは、精密パイプである請求項 36記載のパイプの製造装置。 37. The pipe manufacturing apparatus according to claim 36, wherein the pipe is a precision pipe.
[38] ノ イブは、感光ドラム基体用パイプである請求項 36記載のパイプの製造装置。 38. The pipe manufacturing apparatus according to claim 36, wherein the nove is a pipe for a photosensitive drum base.
[39] ワークを液体ホーニング処理するホーユングゾーンと、該ホーユングゾーンで液体 ホーニング処理されたワークを洗浄処理する洗浄ゾーンとを、外気から遮断されたハ ウジング内に互いに隣接して備えるとともに、前記ハウジング内における前記ホー二 ングゾーンと前記洗浄ゾーンとの間に、前記ホーユングゾーンの雰囲気ガスが前記 洗浄ゾーンに流入するのを防止する隔壁が配設された液体ホーユング力卩ェ機を用 レ、、 [39] A hounging zone for performing a liquid honing treatment on the workpiece and a washing zone for washing the workpiece subjected to the liquid honing treatment in the hounging zone are provided adjacent to each other in a housing that is blocked from outside air, A liquid honing force machine is used in which a partition wall is disposed between the honing zone and the cleaning zone in the housing to prevent atmospheric gas in the houng zone from flowing into the cleaning zone. ,,
前記ホーユングゾーンで液体ホーユング処理されたワークを、搬送槽内の液中に 浸漬した状態で、前記ホーユングゾーンから前記隔壁に設けたワーク通過用開口を 通過させて前記洗浄ゾーンへと搬送し、該ワークを前記洗浄ゾーンで洗浄処理する 液体ホーユング加工方法。  The work that has been liquid houng treated in the hounging zone is immersed in the liquid in the transport tank, and is passed from the hounging zone to the cleaning zone through the work passage opening provided in the partition wall. A liquid houng processing method for cleaning the workpiece in the cleaning zone.
[40] 前記搬送槽内の液中にガスを噴出して気泡を発生させながら、ワークを前記搬送 槽内の液中に浸漬した状態で前記洗浄ゾーンに搬送する請求項 39記載の液体ホ 一ユング加工方法。 [40] The liquid hob according to claim 39, wherein the workpiece is transported to the cleaning zone in a state of being immersed in the liquid in the transport tank while gas is jetted into the liquid in the transport tank to generate bubbles. Jung processing method.
[41] 前記搬送槽内において液がワーク搬送方向とは反対方向に流れるように液を前記搬 送槽内に噴出しながら、ワークを前記搬送槽内の液中に浸漬した状態で前記洗浄ゾ ーンに搬送する請求項 39記載の液体ホーニンダカ卩ェ方法。 [41] In the state where the work is immersed in the liquid in the transfer tank while the liquid is jetted into the transfer tank so that the liquid flows in the direction opposite to the work transfer direction in the transfer tank, 40. The liquid horning cake method according to claim 39, wherein the liquid horning cake method is conveyed to a container.
[42] 液を前記搬送槽内に該搬送槽内の洗浄ゾーン側から噴出する請求項 41記載の液 体ホーユング加工方法。  42. The liquid houng processing method according to claim 41, wherein the liquid is ejected into the transport tank from the cleaning zone side in the transport tank.
[43] 前記搬送槽内の液を該搬送槽のホーユングゾーン側の側壁部の上端力 オーバ 一フローさせながら、ワークを前記搬送槽内の液中に浸漬した状態で前記洗浄ゾー ンに搬送する請求項 39記載の液体ホーニング加工方法。  [43] While the liquid in the transfer tank overflows the upper end force of the side wall portion on the hounging zone side of the transfer tank, the work is transferred to the cleaning zone while being immersed in the liquid in the transfer tank. 40. The liquid honing method according to claim 39.
[44] 前記搬送槽内の洗浄ゾーン側に搬送されたワークを前記搬送槽内の液中から引き 上げながら該ワークに向けて洗浄液を噴射する請求項 39記載の液体ホーニングカロ ェ方法。 44. The liquid honing calorie method according to claim 39, wherein the cleaning liquid is sprayed toward the work while being lifted from the liquid in the transfer tank while the work is transferred to the cleaning zone in the transfer tank.
[45] 前記洗浄ゾーンに清浄な雰囲気ガスを供給しながら、ワークを前記洗浄ゾーンで洗 浄処理する請求項 39記載の液体ホーニング加工方法。  45. The liquid honing method according to claim 39, wherein the workpiece is cleaned in the cleaning zone while supplying a clean atmospheric gas to the cleaning zone.
[46] 前記洗浄ゾーンの雰囲気ガス圧力を前記ハウジング外側の外気圧力に対し陽圧 に調整した状態で、ワークを前記洗浄ゾーンで洗浄処理する請求項 39記載の液体 ホーユング加工方法。 46. The liquid hounging method according to claim 39, wherein the workpiece is cleaned in the cleaning zone in a state where the atmospheric gas pressure in the cleaning zone is adjusted to be positive with respect to the outside air pressure outside the housing.
[47] 前記洗浄ゾーンの雰囲気ガス圧力を前記ホーユングゾーンの雰囲気ガス圧力に対 し陽圧に調整した状態で、ワークを前記ホーユングゾーンで液体ホーユング処理する 請求項 39記載の液体ホーニング加工方法。  The liquid honing method according to claim 39, wherein the workpiece is liquid hounged in the hounging zone in a state where the atmospheric gas pressure in the cleaning zone is adjusted to a positive pressure with respect to the atmospheric gas pressure in the hounging zone. .
[48] 前記ホーユングゾーンには、ワークを液体ホーユング処理するホーユング部と、該 ホーユング部で液体ホーユング処理されたワークをシャワー洗浄処理するシャワー洗 浄部と、前記ホーユング部で液体ホーユング処理されたワークを前記ホーユング部か ら前記シャワー洗浄部に搬送する搬送部とを内部に有するホーニング槽が配置され ており、  [48] In the hounging zone, a hounging unit that performs liquid hounging of a workpiece, a shower cleaning unit that performs shower cleaning of a workpiece that has been liquid hounged in the hounging unit, and a liquid hounging process performed in the hounging unit A honing tank having a transfer unit for transferring a work from the hounging unit to the shower cleaning unit is disposed;
前記ホーユングゾーンにおいて、ワークを前記ホーユング部で液体ホーユング処理 し、次いで該ワークを前記搬送部により前記ホーニング部から前記シャワー洗浄部に 搬送したのち、該ワークを前記シャワー洗浄部でシャワー洗浄処理し、次いで該ヮー クを前記洗浄ゾーンへの搬送に供し、 前記洗浄ゾーンにぉレ、て、前記洗浄ゾーンに搬送されたワークをシャワー洗浄処 理し、次レ、で該ワークを複数段に並んで配置されたスクラブ洗浄部で順次スクラブ洗 浄処理したのち、該ワークをシャワー洗浄処理し、次いで該ワークを洗浄液中に浸漬 することにより洗浄処理したのち、該ワークを高温液中に浸漬して高温液中から引き 上げることにより乾燥処理する請求項 39記載の液体ホーニンダカ卩ェ方法。 In the hounging zone, the workpiece is liquid hounged in the hounging section, and then the workpiece is transported from the honing section to the shower cleaning section by the transport section, and then the workpiece is shower washed in the shower cleaning section. And then subjecting the cake to transport to the cleaning zone, The workpiece transferred to the cleaning zone is subjected to a shower cleaning process, and the workpiece is sequentially scrubbed and cleaned in a scrub cleaning section arranged in a plurality of stages in the next stage. 40. The method according to claim 39, wherein the workpiece is subjected to a shower cleaning treatment and then washed by immersing the workpiece in a cleaning solution, and then dried by immersing the workpiece in a high temperature solution and pulling it up from the high temperature solution. Liquid Honinka Kaye method.
[49] 前記洗浄ゾーンの前記スクラブ洗浄部では、ワークの表面に連続気孔の多孔性軟 質体力 なる円柱状又は円筒状こすり部材の表面を当接させ且つ前記こすり部材の 表面を押圧部材により押圧した状態で、洗浄液を前記こすり部材の内部から前記連 続気孔を介して前記こすり部材の表面外側に滲出させながら、ワークと前記こすり部 材を互いに同一方向にそれぞれ自軸回転させることにより、ワークをスクラブ洗浄処 理する請求項 48記載の液体ホーニンダカ卩ェ方法。  [49] In the scrub cleaning section of the cleaning zone, the surface of a columnar or cylindrical rubbing member having a porous soft body force of continuous pores is brought into contact with the surface of the workpiece, and the surface of the rubbing member is pressed by a pressing member. In this state, the work liquid and the rubbing member are rotated in their own directions in the same direction while allowing the cleaning liquid to bleed out from the inside of the rubbing member to the outside of the surface of the rubbing member through the continuous pores. 49. The liquid horny cake method according to claim 48, wherein scrubbing treatment is performed.
[50] 前記洗浄ゾーンで使用された使用済み洗浄液を前記搬送槽内に供給する請求項 39記載の液体ホーニング加工方法。  50. The liquid honing method according to claim 39, wherein the used cleaning liquid used in the cleaning zone is supplied into the transfer tank.
[51] 前記搬送槽からの排出液を、前記ホーニングゾーンで使用されるホーニング液及 び/又は洗浄液の少なくとも一部として使用する請求項 39記載の液体ホーニングカロ ェ方法。  51. The liquid honing calorie method according to claim 39, wherein the liquid discharged from the transfer tank is used as at least part of a honing liquid and / or a cleaning liquid used in the honing zone.
[52] ワークは、精密パイプの素管である請求項 39記載の液体ホーユング加工方法。  [52] The liquid hounging method according to claim 39, wherein the workpiece is a base pipe of a precision pipe.
[53] ワークは、感光ドラム基体用パイプの素管である請求項 39記載の液体ホーユング 加工方法。 [53] The liquid houng processing method according to [39], wherein the workpiece is a base pipe of a pipe for a photosensitive drum substrate.
[54] 円柱状又は円筒状ワークを液体ホーユング処理するホーユングゾーンと、該ホ一二 ングゾーンで液体ホーユング処理されたワークを洗浄処理する洗浄ゾーンとを、外気 力も遮断されたハウジング内に互いに隣接して備えるとともに、前記ハウジング内に おける前記ホーユングゾーンと前記洗浄ゾーンとの間に、前記ホーユングゾーンの雰 囲気ガスが前記洗浄ゾーンに流入するのを防止する隔壁が配設された液体ホー二 ングカ卩ェ機を用い、  [54] A hounging zone in which a columnar or cylindrical workpiece is subjected to liquid howing treatment and a washing zone in which the workpiece subjected to liquid howing treatment in the honing zone is washed adjacent to each other in a housing in which outside air force is also blocked. In addition, a liquid wall in which a partition wall for preventing atmospheric gas in the hounging zone from flowing into the washing zone is disposed between the hounging zone and the washing zone in the housing. Ii Using a Ngkaje machine,
前記ホーユングゾーンで液体ホーユング処理されたワークを、搬送槽内の液中に 浸漬した状態で、前記ホーユングゾーンから前記隔壁に設けたワーク通過用開口を 通過させて前記洗浄ゾーンへと搬送し、 前記洗浄ゾーンでは、ワークの表面に連続気孔の多孔性軟質体からなる円柱状又 は円筒状こすり部材の表面を当接させ且つ前記こすり部材の表面を押圧部材により 押圧した状態で、洗浄液を前記こすり部材の内部から前記連続気孔を介して前記こ すり部材の表面外側に滲出させながら、ワークと前記こすり部材を互いに同一方向に それぞれ自軸回転させることにより、ワークをスクラブ洗浄処理する液体ホーユングカロ ェ方法。 The work that has been liquid houng treated in the hounging zone is immersed in the liquid in the transport tank, and is passed from the hounging zone to the cleaning zone through the work passage opening provided in the partition wall. , In the cleaning zone, the surface of the columnar or cylindrical rubbing member made of a porous soft body having continuous pores is brought into contact with the surface of the workpiece, and the surface of the rubbing member is pressed by the pressing member, and the cleaning liquid is supplied. A liquid honing calorie that scrubs the workpiece by rotating the workpiece and the rubbing member in the same direction as each other while exuding from the inside of the rubbing member to the outside of the surface of the rubbing member through the continuous pores. Method.
[55] 前記こすり部材の周速度を 100〜500mm/sの範囲に設定するとともに、前記ヮ 一クの周速度を 50〜200mm/sの範囲に設定して、ワークと前記こすり部材をそれ ぞれ自軸回転させる請求項 54記載の液体ホーユング加工方法。  [55] The peripheral speed of the rubbing member is set in the range of 100 to 500 mm / s, and the peripheral speed of the single member is set in the range of 50 to 200 mm / s, so that the workpiece and the rubbing member are respectively set. 55. The liquid houng processing method according to claim 54, wherein the shaft is rotated.
[56] ワークの表面に前記こすり部材の表面をワークの表面の長さ方向に沿って当接さ せた状態で、ワークをスクラブ洗浄処理する請求項 54記載の液体ホーニング加工方 法。  [56] The liquid honing method according to claim 54, wherein the workpiece is scrubbed with the surface of the rubbing member in contact with the surface of the workpiece along the length direction of the workpiece surface.
[57] ワークの表面に前記こすり部材の表面をワーク表面との当接幅が 5〜30mmの範 囲内になるように当接させた状態で、ワークをスクラブ洗浄処理する請求項 54記載の 液体ホーユング加工方法。  [57] The liquid according to claim 54, wherein the workpiece is scrubbed with the surface of the rubbing member in contact with the surface of the workpiece so that the contact width with the workpiece surface is within a range of 5 to 30 mm. Houng processing method.
[58] 前記こすり部材の表面の長さがワークの表面の長さに対して大寸に設定されており ワークの表面に前記こすり部材の表面をワークの表面の長さ方向全体に亘つて当 接させた状態で、ワークをスクラブ洗浄処理する請求項 54記載の液体ホーユングカロ ェ方法。  [58] The length of the surface of the rubbing member is set to be larger than the length of the surface of the workpiece, and the surface of the rubbing member is applied to the surface of the workpiece over the entire length of the surface of the workpiece. 55. The liquid Hoengung caloe process according to claim 54, wherein the workpiece is scrubbed and cleaned in the contact state.
[59] ワークの両端面のうち少なくとも一端面にワーク支持部材力 ワークの表面とワーク 支持部材の周面とがワークの軸方向に面一に連なる状態に装着されている請求項 5 [59] The workpiece supporting member force is attached to at least one end surface of the both end surfaces of the workpiece so that the surface of the workpiece and the peripheral surface of the workpiece supporting member are flush with each other in the axial direction of the workpiece.
4記載の液体ホーユングカ卩ェ方法。 4. The liquid Hoyungkae method according to 4.
[60] 前記こすり部材の表面を前記押圧部材により押圧した状態において、前記押圧部 材が前記こすり部材の回転方向後方側に傾斜して配置されている請求項 54記載の 液体ホーユング加工方法。 [60] The liquid hounging method according to [54], wherein the pressing member is disposed to be inclined rearward in the rotational direction of the rubbing member in a state where the surface of the rubbing member is pressed by the pressing member.
[61] 前記押圧部材と前記こすり部材の回転方向後方側の表面とのなす角度が 10〜45[61] The angle formed by the pressing member and the surface on the rear side in the rotational direction of the rubbing member is 10 to 45
° の範囲に設定されている請求項 60記載の液体ホーニング加工方法。 61. The liquid honing method according to claim 60, wherein the method is set in a range of ° C.
[62] 前記こすり部材の表面を該表面に深さ 0. 5〜5mmの窪みが生じるように前記押圧 部材により押圧した状態で、ワークをスクラブ洗浄処理する請求項 54記載の液体ホ 一ユング加工方法。 [62] The liquid hounging process according to [54], wherein the workpiece is scrubbed while the surface of the rubbing member is pressed by the pressing member so that a recess having a depth of 0.5 to 5 mm is formed on the surface. Method.
[63] 前記押圧部材は、一側縁部を押圧部とする板状のものである請求項 54記載の液 体ホーユング加工方法。  [63] The liquid hounging method according to [54], wherein the pressing member is a plate-shaped member having one side edge as a pressing portion.
[64] 前記こすり部材は円筒状であり、  [64] The rubbing member is cylindrical.
前記こすり部材の中空部内に、周壁に複数個の洗浄液流出孔が設けられ前記こす り部材の内部に洗浄液を供給する洗浄液供給管が、前記こすり部材の軸方向に挿 入配置されており、  In the hollow portion of the rubbing member, a plurality of cleaning liquid outflow holes are provided in the peripheral wall, and a cleaning liquid supply pipe for supplying the cleaning liquid into the rubbing member is inserted and arranged in the axial direction of the rubbing member,
前記洗浄液供給管内の洗浄液を前記洗浄液流出孔から流出させて前記こすり部 材の連続気孔を介して前記こすり部材の表面外側に滲出させながら、ワークをスクラ ブ洗浄処理する請求項 54記載の液体ホーニング加工方法。  55. The liquid honing according to claim 54, wherein the workpiece is scrubbed while the cleaning liquid in the cleaning liquid supply pipe flows out from the cleaning liquid outflow hole and exudes to the outside of the surface of the rubbing member through the continuous pores of the rubbing member. Processing method.
[65] ワークと前記こすり部材はそれぞれ略鉛直に配置されており、 [65] The workpiece and the rubbing member are each arranged substantially vertically,
前記洗浄液供給管の上下両端部のうちいずれか一方の端部が閉塞状に形成され 前記洗浄液供給管の他方の端部が該洗浄液供給管内に洗浄液を導入する洗浄 液導入管と連結されている請求項 64記載の液体ホーニング加工方法。  Either one of the upper and lower ends of the cleaning liquid supply pipe is closed, and the other end of the cleaning liquid supply pipe is connected to a cleaning liquid introduction pipe for introducing the cleaning liquid into the cleaning liquid supply pipe. The liquid honing method according to claim 64.
[66] 前記多孔性軟質体は、 PVA系樹脂、ポリエチレン系樹脂、ポリエーテル系樹脂、 酢酸ビニル系樹脂及びポリウレタン系樹脂のうちのいずれかの発泡体により形成され ている請求項 54記載の液体ホーニング加工方法。 [66] The liquid according to claim 54, wherein the porous soft body is formed of a foam of any one of a PVA resin, a polyethylene resin, a polyether resin, a vinyl acetate resin, and a polyurethane resin. Honing method.
[67] ワークは、精密パイプの素管である請求項 54記載の液体ホーユング加工方法。 [67] The liquid hounging method according to claim 54, wherein the workpiece is a base pipe of a precision pipe.
[68] ワークは、感光ドラム基体用パイプの素管である請求項 54記載の液体ホーユング 加工方法。 [68] The liquid hounging method according to [54], wherein the workpiece is an element pipe of a pipe for a photosensitive drum substrate.
[69] 請求項 39〜68のいずれ力 1項記載の液体ホーユング加工方法により得られた液 体ホーユング加工品。  [69] A liquid houng processed product obtained by the liquid houng processing method according to any one of claims 39 to 68.
PCT/JP2005/018620 2004-10-08 2005-10-07 Liquid honing machine and liquid honing method WO2006041026A1 (en)

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