WO2005117216A2 - Short wavelength diode-pumped solid-state laser - Google Patents

Short wavelength diode-pumped solid-state laser Download PDF

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Publication number
WO2005117216A2
WO2005117216A2 PCT/US2005/019065 US2005019065W WO2005117216A2 WO 2005117216 A2 WO2005117216 A2 WO 2005117216A2 US 2005019065 W US2005019065 W US 2005019065W WO 2005117216 A2 WO2005117216 A2 WO 2005117216A2
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Prior art keywords
laser
level
gain medium
rare
wavelength
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PCT/US2005/019065
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French (fr)
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WO2005117216A3 (en
Inventor
Eric B. Takeuchi
David E. Hargis
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Melles Griot, Inc.
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Publication of WO2005117216A2 publication Critical patent/WO2005117216A2/en
Publication of WO2005117216A3 publication Critical patent/WO2005117216A3/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06Construction or shape of active medium
    • H01S3/0627Construction or shape of active medium the resonator being monolithic, e.g. microlaser
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09Processes or apparatus for excitation, e.g. pumping
    • H01S3/091Processes or apparatus for excitation, e.g. pumping using optical pumping
    • H01S3/094Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
    • H01S3/0941Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode
    • H01S3/09415Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode the pumping beam being parallel to the lasing mode of the pumped medium, e.g. end-pumping
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06Construction or shape of active medium
    • H01S3/0602Crystal lasers or glass lasers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06Construction or shape of active medium
    • H01S3/063Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/067Fibre lasers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08Construction or shape of optical resonators or components thereof
    • H01S3/08086Multiple-wavelength emission
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/16Solid materials
    • H01S3/1601Solid materials characterised by an active (lasing) ion
    • H01S3/1603Solid materials characterised by an active (lasing) ion rare earth
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/16Solid materials
    • H01S3/1601Solid materials characterised by an active (lasing) ion
    • H01S3/1603Solid materials characterised by an active (lasing) ion rare earth
    • H01S3/1613Solid materials characterised by an active (lasing) ion rare earth praseodymium
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/16Solid materials
    • H01S3/163Solid materials characterised by a crystal matrix
    • H01S3/1671Solid materials characterised by a crystal matrix vanadate, niobate, tantalate
    • H01S3/1673YVO4 [YVO]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/30Structure or shape of the active region; Materials used for the active region
    • H01S5/32Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
    • H01S5/323Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
    • H01S5/32308Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser emitting light at a wavelength less than 900 nm
    • H01S5/32341Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser emitting light at a wavelength less than 900 nm blue laser based on GaN or GaP

Definitions

  • laser emission is determined by the material properties of the gain medium, and therefore the available colors are restricted by these known transitions. For most of the materials of the gain medium, and therefore the available colors are restricted by these known transitions. For most of the materials of the gain medium, and therefore the available colors are restricted by these known transitions. For most of the materials of the gain medium, and therefore the available colors are restricted by these known transitions. For most of the materials of the gain medium, and therefore the available colors are restricted by these known transitions. For most of the gain medium
  • a gain media that emits at discrete transitions such as Nd:YAG is preferable; however a small number of strong (and therefore useful) energy transitions of the gain medium appear only at a few discrete wavelengths.
  • the strongest Nd 3+ transitions are in the infrared. Outside of these conditions
  • Frequency doubling is one common method for obtaining visible laser emission, and in frequency doubling, the laser utilizes a nonlinear process to convert laser emission at a fundamental wavelength (e.g., near-infrared) into a second harmonic (e.g., in the visible range), resulting in visible laser light output at the doubled frequency.
  • a fundamental wavelength e.g., near-infrared
  • a second harmonic e.g., in the visible range
  • near-infrared spectral region is used to optically pump a triply-ionized rare-earth element that has been doped into a glass or crystalline host material.
  • earth element first absorbs this pump radiation, and then re-radiates at a longer
  • the fundamental laser radiation is frequency doubled to produce laser radiation in the visible spectrum.
  • Prior art example 2 Optically-pumped semiconductor laser with intracavity frequency doubling: One prior art method uses a conventional semiconductor laser to optically pump a second semiconductor gain medium, thereby generating fundamental radiation in the near-infrared spectral region. By employing an external cavity geometry (i.e., placing a mirror separate from the gain medium with a high reflectivity at the desired fundamental frequency), a nonlinear crystal can be placed inside the same cavity to achieve second harmonic generation (SHG).
  • Prior art example 3 Electrically-pumped semiconductor lasers with intracavity frequency doubling.
  • FIG. 1 B is a schematic view of a prior art laser in which the output of a semiconductor laser is used as the input to a external frequency conversion device, such as a periodically-poled nonlinear crystal, which operates in a single pass. Because the nonlinear crystal is placed
  • this device typically requires a high effective
  • Periodically-poled structures in materials such as LiNb0 3 , KTP, KN are typically
  • Prior art example 5 Intracavity sum-frequency generation: Similar to other intracavity frequency conversion geometries that use semiconductor lasers as a source, the laser beams are generated in a semiconductor, but instead of second harmonic generation from a fundamental frequency, two different laser frequencies (e.g., from two different semiconductor lasers) are then combined within a nonlinear material to generate the visible wavelength desired.
  • Prior art example 6 Direct emitting semiconductor radiation: Practical visible wavelength semiconductor lasers have been demonstrated suitable only in the red spectral region; however with these red lasers, the spatial and spectral beam quality is not sufficient for many applications. In the short- wavelength (blue) spectral region, low-power lasers based upon the GaN and ZnSe material families have been demonstrated.
  • the spatial and spectral beam quality obtained with this technology is not sufficient for many applications.
  • the blue diode lasers are very low power, may not be scalable to higher powers, and therefore are not suitable for many desired applications. Future applications of either of these technologies into the blue-green and green spectral regions may be limited by material parameters.
  • a diode-pumped solid-state laser is described herein that includes a
  • short wavelength semiconductor laser to pump an
  • wavelength outputs including short wavelength outputs (e.g., blue), are examples of short wavelength outputs.
  • the diode-pumped, solid-state laser that emits an
  • output beam having a short wavelength comprises a laser cavity including a first
  • the gain medium may
  • a laser diode pump source is arranged to pump the gain medium
  • laser diode pump source having a wavelength in the range of about 365nm to
  • sources may comprise a GaN-based semiconductor; particularly, the laser diode
  • pump source may comprises one of GaN, AIGaN, and InGaN. In some embodiments,
  • the laser diode pump source emits a beam in the range of
  • FIG. 1 A is a schematic view of a prior art intracavity frequency-converted
  • Fig. 1 B is a schematic view of a prior art diode laser that is frequency- converted in a periodically poled nonlinear material situated external from the
  • FIG. 2 is a schematic view of a monolithic embodiment of a DPSSL
  • FIG. 3 is a perspective view of one particular monolithic embodiment of
  • Fig. 4A is a schematic view of an embodiment of a DPSSL in which the end mirrors are situated externally from the outside surface of the gain medium;
  • Fig. 4B is a schematic view of an embodiment of a DPSSL that includes a narrowband AR coating on the angled surface in order to select a particular wavelength;
  • Fig. 4C is a schematic view of a rare-earth-doped fiber laser embodiment
  • Fig. 4D is a schematic view of a multi-wavelength DPSSL embodiment
  • Fig. 4E is a schematic view of an embodiment of a DPSSL in which the residual pump beam is separated from the direct laser emission, to provide two separate beams with different wavelengths;
  • Fig. 5 is a Dieke chart of rare-earth elements, illustrating pump bands in the region between the up-arrows that corresponding to 365nm and 480nm pump
  • Fig. 6 is a free energy level diagram for triply-ionized europium (Eu 3+ ) in
  • Fig. 7 is a graph of the emission from the 5 D 0 level to the 7 F 2 level in
  • Fig. 8 is a graph of the emission from the 5 D 0 level to the 7 F 1 level in
  • Fig. 9 is a free energy level diagram for triply-ionized terbium (Tb 3+ ), and
  • Fig. 9 illustrates the potential for using a semiconductor laser emitting in the 370-
  • Fig. 10A is an energy level diagram that shows additional examples of pump and laser transitions for Er 3"1" ;
  • Fig. 10B is a table that provides additional information regarding the transition diagram of Fig. 10A;
  • Fig. 11 A is an energy level diagram that shows examples of pump and laser transitions for Ho 3+ ;
  • Fig. 11 B is a table that provides additional information regarding the transition diagram of Fig. 11A;
  • Fig. 12A is an energy level diagram that shows examples of pump and laser transitions for Pr 3+ ;
  • Fig. 12B is a table that provides additional information regarding the transition diagram of Fig. 12A;
  • Fig. 13A is a table of emission transitions of Eu 3+ :YV0 4 ;
  • Fig. 13B is a table of absorption transitions of Eu 3+ :YV0 4 ;
  • Fig. 14A is a table of emission transitions of Tb 3+ :TAB.
  • Fig. 14B is a table of absorption transitions of TB 3+ :TAB. DETAILED DESCRIPTION
  • SHG second harmonic generation a process by which the laser emission frequency is doubled Sm samarium
  • Tm thulium uv ultraviolet radiation wavelengths below about 400nm to about 1nm visible region light with wavelengths of approximately 400nm to 750nm wavelength a characteristic of electromagnetic radiation that, in the visible region, defines its color.
  • a short wavelength (e.g., blue, violet, or. UV) semiconductor laser to pump an absorption transition in a rare-earth-doped material arranged within a laser cavity. Responsive to this pumping, the active rare-earth element emits in the visible
  • the visible region is defined as an
  • Fig. 2 is a schematic view of a monolithic embodiment of a DPSSL
  • Fig. 3 is a perspective view of one monolithic embodiment of DPSSL
  • Fig. 4A is a schematic view of an embodiment of a DPSSL in which the end mirrors are situated externally from the outside surface of the gain medium.
  • the DPSSL can be made in a variety of configurations in addition to those shown; for example a different cavity configuration (e.g., a ring cavity) may be used.
  • a different cavity configuration e.g., a ring cavity
  • a semiconductor laser 21 i.e., a laser diode
  • a laser beam 22 in the short wavelength (blue/violet/UV spectral region.
  • the GaN/AIGaN/lnGaN family of materials that are used for semiconductor lasers can provide compositionally-tuned direct bandgap energies corresponding to stimulated emission from the ultraviolet (UV) through the blue- green spectral regions.
  • Semiconductor lasers are now commercially available for example in the 365480nm regime, for example from 370-380nm, 400415nm, 435-445nm, and 468 78nm.
  • the visible optical pump source includes a single laser diode (such as
  • the pump source additionally
  • control system may possibly be connected to other sensors, such as a beam sensor and/or a temperature sensor. Additionally, the pump source may be connected to other sensors, such as a beam sensor and/or a temperature sensor. Additionally, the pump source may be connected to other sensors, such as a beam sensor and/or a temperature sensor. Additionally, the pump source may be connected to other sensors, such as a beam sensor and/or a temperature sensor. Additionally, the pump source may be connected to other sensors, such as a beam sensor and/or a temperature sensor. Additionally, the pump source may be connected to other sensors, such as a beam sensor and/or a temperature sensor. Additionally, the pump source may be connected to other sensors, such as a beam sensor and/or a temperature sensor. Additionally, the pump source may be connected to other sensors, such as a beam sensor and/or a temperature sensor. Additionally, the pump source may be connected to other sensors, such as a beam sensor and/or a temperature sensor. Additionally, the pump source may be connected to other sensors, such as a beam sensor and/or
  • a solid state gain medium 23 (which comprises a rare-earth doped laser material, described in detail elsewhere herein) has end reflectors 24 and 25 that define the optical cavity coated directly onto the outer surfaces of the solid state gain medium.
  • one or both end reflectors may be separate mirrors spaced apart from the gain medium (such as the two separate end reflectors shown in Fig. 4A).
  • Fig. 3 is a perspective view of one embodiment of a monolithic laser including a GaN-based diode 31 that provides a pump beam for a trivalent rare- earth doped laser crystal 32 to provide visible laser emission.
  • the laser mirrors 33 and 34 that define the optical cavity are coated directly on the crystal to provide the visible emission 26.
  • the gain medium 23, 32, and 46 (Fig. 4A) is situated within the optical cavity so that it receives pump energy from the pump source, and responsive thereto provides a fundamental laser emission at the first wavelength ( ⁇ f ), generating lasing oscillation within the optical cavity.
  • the pump beam 22 is configured to end-pump the gain medium, which provides visible/UV laser emission 26.
  • the pumping arrangement may be configured as end pumping, side pumping, or
  • an optical beam conditioning system 45 e.g., a relay lens
  • a gain medium 46 e.g., a gain medium
  • the gain medium which may be a trivalent lanthanide, or rare-earth element (discussed in more detail elsewhere herein) is arranged between two reflective end mirrors including a first (back) reflector 47 and second (front) reflector 48 that define an optical cavity.
  • the optical cavity defines an optical axis extending from and through the rear reflector and the front reflector.
  • Other optical elements 49 may be situated in the optical cavity; e.g., one or more etalons, non-linear elements, Brewster's windows are provided as appropriate.
  • both the first and second reflectors are reflective at a lasing wavelength ⁇ f ; specifically, the first reflector is nearly 100%
  • the first mirror must be substantially transmissive at the wavelength of the pump beam in order to allow the pump beam to propagate through the mirror and to the gain medium with minimal loss; however in alternative embodiments in which the laser is not pumped through the back reflector, then this transmissivity would not be
  • Fig. 4B In some embodiments it may be useful to utilize a narrowband anti-reflective (AR) coating such described in co-
  • the gain medium 46 includes a narrow-band AR coating 51 , which selects the
  • the AR coating 51 is formed on a angled surface 52 of the gain medium; particularly, the angled surface 52 is angled with respect to the optical axis of the laser cavity, and the AR coating has a narrowband coating.
  • narrowband AR coating in application No. 10/434,579 is one that has a minimum loss point of less than 2% within the gain- bandwidth of the gain medium, the AR coating limiting the bandwidth of the laser emission to a predetermined spectral range around the minimum loss point.
  • the FWHM bandwidth may be less than about 1 nm, 0.5nm, or 0.25nm.
  • the AR coating, in conjunction with all other cavity losses, may constrain the laser emission to a FWHM bandwidth less than about 2nm.
  • the AR coating may have a minimum loss point of less than about 1%, 0.5%, 0.2%, or 0.1 %. Additionally an etalon may be provided in the optical cavity, as one of the additional elements 49.
  • the AR coating 51 may be formed on an optical element other than the gain medium; for example the narrow-band AR coating may be formed on any angled surface within the optical cavity defined between the front and back mirrors 47 and 48.
  • the AR coating may be formed on an additional intracavity optical element (e.g., a piece of optical glass or a nonlinear element).
  • Fig. 4C is a schematic view of an example of a rare-earth-doped fiber laser pumped by a short wavelength laser diode as described herein. The doped-
  • fiber laser includes an optical fiber 55 having a core 56 doped with a rare-earth lasant ion, such as any Pr 3+ or any of the other rare-earth lasant ions described
  • a back mirror 57 and a front mirror 57 define an
  • the back and front mirrors may be coated directly on the ends of the optical fiber 55, or one or both may be
  • the visible/UV pump beam 22 excites laser action within the optical fiber 55, and the visible/UV laser beam 59 exits from the output
  • the optical fiber may be made of silica fibers, which are more durable and less expensive than optical fibers made of ZBLAN or other low phonon energy fibers that have been used in other short wavelength doped-fiber lasers.
  • Fig. 4D is a schematic view of a multiple wavelength laser.
  • the gain medium 23 includes a back mirror 61 and a front mirror 62 that are coated to be substantially reflective at two or more wavelengths, as described in U.S. Patent No. 5,708,672, issued January 13, 1998, which is incorporated by reference herein in its entirety.
  • the peaks of the reflective coatings of the mirrors are selected to match the desired emission peaks of the gain medium.
  • the resulting laser output includes two wavelengths, as shown by a first wavelength laser output 63 and a second wavelength laser output 64.
  • Fig. 4E is a schematic view of a dual wavelength laser in which the laser radiation from the unabsorbed pump beam is separated from the main laser beam and utilized as desired.
  • the pump beam 22 has sufficient energy that a significant fraction of the energy is unabsorbed in the gain medium 23. Accordingly, a portion of the pump beam, shown at 66, exits with the direct laser emission 67.
  • a dichroic beamsplitter 68a separates the beam into the two
  • the beam can generate a 556nm laser emission in a Er 3"1" doped gain medium.
  • the visible/UV laser diode pumps a trivalent (triply- ionized) lanthanide, (rare-earth) element doped into a glass or crystalline laser host.
  • the rare-earth element then re-radiates laser radiation directly at a fundamental wavelength that lies in the visible spectral region.
  • a blue-green laser output is one particularly useful emission from a rare-earth doped
  • Several of the trivalent lanthanides, or rare-earth elements have energy band structures that would allow for optical absorption in the spectral output region from these semiconductor lasers.
  • triply-ionized samarium (Sm 3+ ), europium (Eu 3+ ), terbium (Tb 3+ ), dysprosium (Dy 3+ ), holmium (Ho 3+ ), erbium (Er 3+ ), praseodymium (Pr 3+ ), and thulium (Tm 3+ ) can all be excited by direct optical absorption in the blue/violet.
  • These same rare-earth elements also operate as the active ion, that is, they can provide laser emission from these excited states to lower-lying energy states, resulting in visible wavelength
  • Fig. 5 illustrates the free energy levels of the trivalent lanthanides. Particularly, Fig. 5 is a Dieke chart of that shows transitions of rare-earth
  • Pump (absorption) bands are shown in the region of a box 71 , defined by the energy levels between the with up-arrows corresponding to 365nm and 480nm wavelengths. In other words, any transition within this region may function
  • the possible emission transitions include any downward transitions from this region 71 , as allowed by quantum rules.
  • the lasant ion is doped in a suitable concentration into a suitable host material.
  • suitable host materials include YV0 4 , GdV0 4 , YAG, YLF, KYF, BYF, FAP, S-FAP, YOS, YSO, YALO, phosphate glass, silica glass, and ZBLAN.
  • Fig. 6 which is a free-energy level diagram for triply-ionized europium (Eu 3+ ) in a low energy host, like a liquid (the vertical axis shows energy in units of 10 3 cnrf 1 ).
  • a DPSS laser would achieve lasing action at about 488nm, so as to provide a solid-state replacement for the argon-ion laser emitting around the same wavelength.
  • semiconductor laser emitting in the violet spectral region around 375nm could be used to pump a Eu 3+ gain medium within the laser cavity.
  • the active dopant could be any active dopant.
  • Fig. 7 is a graph that plots the intensity of the emission from the 5 D 0 level to the 7 F 2 level in Eu 3+ :YV0 4 , pumped by violet laser diode, as a function of wavelength. Particularly, plot 70 in Fig. 7 shows fluorescence data from this transition from Eu 3+ :YV0 4 pumped with a violet laser diode.
  • Fig. 8 is a graph that plots the emission from the 5 D 0 level to the 7 F- ⁇ level in Eu 3+ :YV0 4 , pumped by a violet laser diode, as a function of wavelength.
  • a plot 80 shows the example emission from the 5 D 0 level located at about 17,184cm "1 to the 7 F ⁇ level located at about 335cm "1 resulting in emission at about
  • Fig. 9 is a free energy level diagram for triply-ionized terbium (Tb 3+ ). The vertical axis shows energy in units of 10 3 cm “1 . Fig. 9 illustrates the potential
  • Tb 3+ active ions resulting in emission at about 488nm.
  • the about 488nm emission is the transition on the right-most side; shown with two parts. These correspond to two possible transitions, both of which are pumped from the 370-385nm band.
  • the first transition has its upper laser level originate from the 5 D 3 level, and its lower laser level originates at 7 F 0 . This would lead to four-level laser operation; which would be more efficient than a three-level configuration. [075]
  • the second transition results from phonon decay from the pump level [ 5 D 3 ] to the 5 D 4 level.
  • the 5 D 4 level would then be the upper laser level, with the transition terminating on the 7 F 6 lower laser level.
  • Other visible wavelength transitions may also be possible.
  • transitions energy levels
  • active ion and approximate energy level for each transition noting that it is approximated based upon the free energy diagram; it should be apparent that the exact energy in any particular embodiment would depend heavily upon the specific host.
  • all of these transitions are subject to the quantum selection rules, and some may not be useful. Particularly, some transitions between energy levels are not allowed based upon quantum electronics selection rules. Also, the specific wavelengths generated by
  • each transition depend upon the host material into which each rare-earth element is doped, and therefore may vary between embodiments.
  • the sets of wavelengths that can be generated by each ion vary dependent upon a number of
  • , i 0...6.
  • Example 1 Eu 3+ :YLF: The 5 D 2 - 7 F 3 transition in YLF leads to emission in the 510nm regime. Also, the 5 D 2 - 7 F- ⁇ transition leads to emission in the 470nm regime.
  • Example 2 Eu 3+: YVO 4 : Transitions originating from the 5 D 0 level lead to visible emission in the red spectral region. The strongest emission appears to be from the 5 D 0 to the 7 F 2 level, corresponding to about 619nm, and the 595nm transition from the 5 D 0 to the 7 F ⁇ level, and the 539 transition from the 5 D- ⁇ to the 7 F ⁇ level. See Figs. 13A and 13B for a more detailed description of the emission and pump transitions for Eu 3+: YV0 4 .
  • Example 3 Tb 3+ :TAB: Emission from the 5D4 level to the 7F6 level corresponding to emission around 485nm has been observed.
  • Figs. 10A and 10B show additional examples of laser transitions for Er 3+ that can be utilized in a laser as described herein. Particularly, Fig. 10A is a diagram that shows the transitions, and Fig. 10B is a table that shows the initial
  • Figs. 11A and 11 B show additional examples of laser transitions for
  • Fig. 11 A is a
  • Fig. 11 B is a table that shows the initial
  • Figs. 12A and 12B show additional examples of laser transitions for Pr 3+ that can be utilized in a laser as described herein. Particularly, Fig. 12A is a diagram that shows the transitions, and Fig. 12B is a table that shows the initial state, the final state, the initial energy (in units of cm “1 ), and final energy, the transition energy, the wavelength, and the oscillator strength for each transition. [091] Figs. 13A and 13B show additional examples of laser transitions for Eu 3+ :YV0 4 that can be utilized in a laser as described herein.
  • Fig. 13A is a table of the emission transitions
  • Fig. 13B is a table of absorption transitions that show the initial state, the final state, the transition energy (in units of cm "1 ), and the wavelength for each transition.
  • the resonant absorption from the 7 F 0 (ground state) to the 5 D 3 energy level that would correspond to ⁇ 408-nm diode laser radiation is not allowed by quantum rules. Although this is true for most materials, the result is different for Eu 3+ :YV0 4 .
  • Figs. 14A and 14B show additional examples of laser transitions for
  • Tb 3+ :TAB that can be utilized in a laser as described herein.
  • Fig. 14B is a table of absorption transitions that shows the initial state, the final state, the transition energy (in units of cm "1 ), and the wavelength for each transition.
  • wavelength laser emission can be generated within a laser cavity without employing nonlinear crystal frequency conversion.
  • additional laser cavity elements such as the nonlinear crystal that would otherwise be required for
  • co-doping the host material with two or more rare-earth elements is a useful technique for generating visible laser radiation using short wavelength pump diodes.
  • active ions such as praseodymium (Pr 3+ ) and terbium (Tb 3+ ) have energy levels that could result in visible emission.
  • these active ions may not have efficient absorption in the wavelength regime where high power blue/violet diode lasers are available.
  • the Dy 3+ ion relaxes to a lower lying metastable energy level such as the 4 F 92 level. Because of the proximity in energy level of the
  • Tb 3+ ion to its excited 5 D 4 energy level. Once this level becomes sufficiently populated, the Tb 3+ ion can then radiatively decay to produce emission in the visible range.
  • the visible/UV laser emission from the gain medium may be further converted in frequency, such as by frequency doubling (SHG) processes, or frequency mixing, either intracavity or

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Abstract

A diode-pumped solid-state laser including a short wavelength (e.g., due, violet, or UV) semiconductor laser that pumps an absorption transition in a rare-earth-doped material. Responsive to this pumping, the rare-earth active ion directly emits laser radiation. A number of different wavelength outputs, including short wavelengths, are achievable dependent upon the material and the pump wavelength. The gain medium may include an active ion selected from Er3+ Sm3+ Eu3+, Tb3+, D3+ Tm3+, Ho3+, and Pr3+. A laser diode pump source has a wavelength in the range of about 365nm to 480nm to excite a laser emission in the range of 370 to 800nm. The laser diode pump source may comprise a GaN­based semiconductor. In some embodiments, the laser diode pump source supplies a pump beam in a range of 370-380nm, 400-415nm, 435-445nm, or 468-478nm.

Description

SHORT WAVELENGTH DIODE-PUMPED SOLID-STATE LASER
BACKGROUND OF THE INVENTION
[001] Cross-Reference to Related Application
[002] Priority is hereby claimed to U.S. Provisional Patent Application No. 60/574,351 , filed May 25, 2004, entitled Violet Diode-Pumped Solid State Laser, which is incorporated by reference herein in its entirety.
[003] Priority is hereby claimed to commonly-owned U.S. Patent Application No. 10/434,579, filed May 8, 2003, entitled LASER WITH NARROW BANDWIDTH ANTIREFLECTION FILTER FOR FREQUENCY SELECTION, which is incorporated by reference herein in its entirety. [004] 1. Field of the Invention [005] The invention relates generally to lasers that generate visible or ultraviolet laser light. More specifically, it relates to the field of diode-pumped solid-state lasers (DPSSLs). [006] 2. Description of Related Art
[007] Lasers that generate visible light and ultraviolet radiation have many important uses, such as medical applications, laser light sources for projection displays, and even laser light shows. However, it has proven difficult to design
and manufacture lasers that generate light over the entire visible range and into the ultraviolet, for a number of reasons. One reason is that the wavelength of
laser emission is determined by the material properties of the gain medium, and therefore the available colors are restricted by these known transitions. For most
uses a gain media that emits at discrete transitions, such as Nd:YAG is preferable; however a small number of strong (and therefore useful) energy transitions of the gain medium appear only at a few discrete wavelengths. For
example, the strongest Nd3+ transitions are in the infrared. Outside of these
discrete wavelengths, it can be difficult to obtain and sustain appropriate lasing transitions.
[008] One conventional way of accessing wavelengths that do not lase directly is to convert the laser emission wavelength to a different wavelength, and the process of converting the laser emission to a different wavelength is called "frequency conversion." For example, conventional frequency-converted DPSSLs generate visible laser light utilizing a nonlinear element in the laser cavity to convert the fundamental laser emission (at a "fundamental frequency") to a higher, visible converted frequency. However, the addition of the nonlinear element increases noise and creates instabilities in the output beam, reduces efficiency, and significantly increases the cost of production. Some specific examples of prior art are discussed below. [009] Prior art example 1 : Diode-pumped solid-state lasers with intracavity frequency doubling: Fig. 1A illustrates a frequency-converted laser. Frequency doubling is one common method for obtaining visible laser emission, and in frequency doubling, the laser utilizes a nonlinear process to convert laser emission at a fundamental wavelength (e.g., near-infrared) into a second harmonic (e.g., in the visible range), resulting in visible laser light output at the doubled frequency. For example, a semiconductor laser diode emitting in the
near-infrared spectral region is used to optically pump a triply-ionized rare-earth element that has been doped into a glass or crystalline host material. The rare-
earth element first absorbs this pump radiation, and then re-radiates at a longer
wavelength (the fundamental laser frequency), which then resonates within the laser cavity. By arranging an appropriate nonlinear crystal within the laser
resonator, the fundamental laser radiation is frequency doubled to produce laser radiation in the visible spectrum. Depending upon the specific rare-earth element
and the host material into which it is doped, frequency-doubled laser radiation can be generated at a number of wavelengths throughout the entire visible spectrum. [010] Prior art example 2: Optically-pumped semiconductor laser with intracavity frequency doubling: One prior art method uses a conventional semiconductor laser to optically pump a second semiconductor gain medium, thereby generating fundamental radiation in the near-infrared spectral region. By employing an external cavity geometry (i.e., placing a mirror separate from the gain medium with a high reflectivity at the desired fundamental frequency), a nonlinear crystal can be placed inside the same cavity to achieve second harmonic generation (SHG). [011] Prior art example 3: Electrically-pumped semiconductor lasers with intracavity frequency doubling. Similar to prior art example 2, but in this example the semiconductor laser is electrically-pumped, and used directly as the laser source that is frequency doubled. This example eliminates the need for a separate semiconductor gain medium. [012] Prior art example 4: Electrically-pumped semiconductor lasers with extracavity frequency doubling: Fig. 1 B is a schematic view of a prior art laser in which the output of a semiconductor laser is used as the input to a external frequency conversion device, such as a periodically-poled nonlinear crystal, which operates in a single pass. Because the nonlinear crystal is placed
outside of the laser cavity, this device typically requires a high effective
nonlinearity to achieve efficient frequency conversion into the second harmonic. Periodically-poled structures in materials such as LiNb03, KTP, KN are typically
used, although such structures may not be necessary if the bulk nonlinear material properties allow for sufficient second harmonic generation.
[013] Prior art example 5: Intracavity sum-frequency generation: Similar to other intracavity frequency conversion geometries that use semiconductor lasers as a source, the laser beams are generated in a semiconductor, but instead of second harmonic generation from a fundamental frequency, two different laser frequencies (e.g., from two different semiconductor lasers) are then combined within a nonlinear material to generate the visible wavelength desired. [014] Prior art example 6: Direct emitting semiconductor radiation: Practical visible wavelength semiconductor lasers have been demonstrated suitable only in the red spectral region; however with these red lasers, the spatial and spectral beam quality is not sufficient for many applications. In the short- wavelength (blue) spectral region, low-power lasers based upon the GaN and ZnSe material families have been demonstrated. Similar to the red laser diodes, however, the spatial and spectral beam quality obtained with this technology is not sufficient for many applications. Furthermore, the blue diode lasers are very low power, may not be scalable to higher powers, and therefore are not suitable for many desired applications. Future applications of either of these technologies into the blue-green and green spectral regions may be limited by material parameters.
SUMMARY OF THE INVENTION
[015] A diode-pumped solid-state laser is described herein that includes a
short wavelength (e.g., blue, violet, or UV) semiconductor laser to pump an
absorption transition in a rare-earth-doped material. Responsive to this pumping, the rare-earth active ion directly emits laser radiation. A number of different
wavelength outputs, including short wavelength outputs (e.g., blue), are
achievable dependent upon the gain medium and the pump wavelength.
[016] In one embodiment, the diode-pumped, solid-state laser that emits an
output beam having a short wavelength comprises a laser cavity including a first
and a second end mirror, a gain medium situated within the laser cavity, the gain
medium including a rare-earth doped solid state material providing a lasing
transition from an upper laser level to a lower laser level. The gain medium may
include an active ion selected from Er3+ Sm3+, Eu3+, Tb3+, Dy3+, Tm3+, Ho3+, and
Pr3+.
[017] A laser diode pump source is arranged to pump the gain medium, the
laser diode pump source having a wavelength in the range of about 365nm to
480nm to excite the rare-earth element to an energy level at least equal to the
upper laser level, thereby providing a laser emission from the lasing transition
within the laser cavity in the range of 370 to 800nm. The laser diode pump
sources may comprise a GaN-based semiconductor; particularly, the laser diode
pump source may comprises one of GaN, AIGaN, and InGaN. In some
embodiments, the laser diode pump source emits a beam in the range of
370-380nm, 400415nm, 435-445nm, or 468 78nm. BRIEF DESCRIPTION OF THE DRAWINGS
[018] For a more complete understanding of this invention, reference is now
made to the following detailed description of the embodiments as illustrated in the
accompanying drawing, wherein: [019] Fig. 1 A is a schematic view of a prior art intracavity frequency-converted
DPSSL;
[020] Fig. 1 B is a schematic view of a prior art diode laser that is frequency- converted in a periodically poled nonlinear material situated external from the
cavity;
[021] Fig. 2 is a schematic view of a monolithic embodiment of a DPSSL;
[022] Fig. 3 is a perspective view of one particular monolithic embodiment of
DPSSL;
[023] Fig. 4A is a schematic view of an embodiment of a DPSSL in which the end mirrors are situated externally from the outside surface of the gain medium;
[024] Fig. 4B is a schematic view of an embodiment of a DPSSL that includes a narrowband AR coating on the angled surface in order to select a particular wavelength;
[025] Fig. 4C is a schematic view of a rare-earth-doped fiber laser embodiment;
[026] Fig. 4D is a schematic view of a multi-wavelength DPSSL embodiment;
[027] Fig. 4E is a schematic view of an embodiment of a DPSSL in which the residual pump beam is separated from the direct laser emission, to provide two separate beams with different wavelengths; [028] Fig. 5 is a Dieke chart of rare-earth elements, illustrating pump bands in the region between the up-arrows that corresponding to 365nm and 480nm pump
wavelengths;
[029] Fig. 6 is a free energy level diagram for triply-ionized europium (Eu3+) in
a low phonon energy host; [030] Fig. 7 is a graph of the emission from the 5D0 level to the 7F2 level in
Eu3+:YV04, pumped by a violet laser diode;
[031] Fig. 8 is a graph of the emission from the 5D0 level to the 7F1 level in
Eu3+:YVO4, pumped by a violet laser diode; [032] Fig. 9 is a free energy level diagram for triply-ionized terbium (Tb3+), and
Fig. 9 illustrates the potential for using a semiconductor laser emitting in the 370-
385nm regime to pump Tb3+ active ions, resulting in visible emission;
[033] Fig. 10A is an energy level diagram that shows additional examples of pump and laser transitions for Er3"1"; [034] Fig. 10B is a table that provides additional information regarding the transition diagram of Fig. 10A;
[035] Fig. 11 A is an energy level diagram that shows examples of pump and laser transitions for Ho3+;
[036] Fig. 11 B is a table that provides additional information regarding the transition diagram of Fig. 11A;
[037] Fig. 12A is an energy level diagram that shows examples of pump and laser transitions for Pr3+;
[038] Fig. 12B is a table that provides additional information regarding the transition diagram of Fig. 12A; [039] Fig. 13A is a table of emission transitions of Eu3+:YV04;
[040] Fig. 13B is a table of absorption transitions of Eu3+:YV04;
[041] Fig. 14A is a table of emission transitions of Tb3+:TAB; and
[042] Fig. 14B is a table of absorption transitions of TB3+:TAB. DETAILED DESCRIPTION
[043] This invention is described in the following description with reference to the Figures, in which like numbers represent the same or similar elements.
[044] Glossary of Terms and Acronyms
[045] The following terms and acronyms are used throughout the detailed description. For convenience, some of the two-letter representations for elements are included in following; any omitted elements are readily available on any periodic chart of the elements.
AR coating anti-reflective coating
Ce cerium
cw substantially continuous wave (non-pulsed) laser operation
DPSSL diode-pumped solid state laser
Dy dysprosium
Er erbium
Eu europium finesse of etalon ratio of the separation of adjacent transmission maxima to the FWHM
FSR free spectral range (* c/2nL)
FWHM full width half maximum
Gd gadolinium
Ho holmium
LBO lithium triborate (a nonlinear material) (n = 1.61 @860nm) n index of refraction, which is a characteristic of the optical properties of a material
Nd neodymium
Pm promethium
Pr praseodymium
SHG second harmonic generation: a process by which the laser emission frequency is doubled Sm samarium
Tb terbium
Tm thulium uv ultraviolet radiation: wavelengths below about 400nm to about 1nm visible region light with wavelengths of approximately 400nm to 750nm wavelength a characteristic of electromagnetic radiation that, in the visible region, defines its color. YAG yttrium aluminum garnet
Yb ytterbium Herein, the terms "wavelength" (λ) and "frequency" (/) are used
interchangeably to characterize one parameter of laser radiation. Wavelength is defined herein as the wavelength in free space, and therefore either term (i.e., either wavelength or frequency) uniquely characterizes the laser radiation in accordance with the relationship λf = c, where c equals the speed of light in the
medium (herein assumed to be free space).
[046] Overview
[047] The diode-pumped solid-state laser described herein uses the output of
a short wavelength (e.g., blue, violet, or. UV) semiconductor laser to pump an absorption transition in a rare-earth-doped material arranged within a laser cavity. Responsive to this pumping, the active rare-earth element emits in the visible
region of the spectrum. For purposes herein, the visible region is defined as an
emission approximately within a range from about 400 to 750nm. [048] Laser description
[049] Reference is now made to Figs. 2, 3, and 4A. Fig. 2 is a schematic view of a monolithic embodiment of a DPSSL, Fig. 3 is a perspective view of one monolithic embodiment of DPSSL, and Fig. 4A is a schematic view of an embodiment of a DPSSL in which the end mirrors are situated externally from the outside surface of the gain medium. It should be apparent that the DPSSL can be made in a variety of configurations in addition to those shown; for example a different cavity configuration (e.g., a ring cavity) may be used. [050] In Fig. 2, a semiconductor laser 21 (i.e., a laser diode) is provided that emits a laser beam 22 in the short wavelength (blue/violet/UV spectral region. For example the GaN/AIGaN/lnGaN family of materials that are used for semiconductor lasers can provide compositionally-tuned direct bandgap energies corresponding to stimulated emission from the ultraviolet (UV) through the blue- green spectral regions. Semiconductor lasers are now commercially available for example in the 365480nm regime, for example from 370-380nm, 400415nm, 435-445nm, and 468 78nm. [051] The visible optical pump source includes a single laser diode (such as
shown at 41 in Fig. 4A) or an array of laser diodes to optically pump the gain medium with pump radiation. As shown in Fig. 4A, the pump source additionally
includes an electrical source 42 and a control system 43 connected to the laser
diode. The control system may possibly be connected to other sensors, such as a beam sensor and/or a temperature sensor. Additionally, the pump source may
include a heat sink or other temperature regulation means to maintain proper laser operation.
[052] In the monolithic configurations shown in Figs. 2 and 3, a solid state gain medium 23 (which comprises a rare-earth doped laser material, described in detail elsewhere herein) has end reflectors 24 and 25 that define the optical cavity coated directly onto the outer surfaces of the solid state gain medium. In alternative embodiments, one or both end reflectors may be separate mirrors spaced apart from the gain medium (such as the two separate end reflectors shown in Fig. 4A).
[053] Fig. 3 is a perspective view of one embodiment of a monolithic laser including a GaN-based diode 31 that provides a pump beam for a trivalent rare- earth doped laser crystal 32 to provide visible laser emission. The laser mirrors 33 and 34 that define the optical cavity are coated directly on the crystal to provide the visible emission 26.
[054] In operation, the gain medium 23, 32, and 46 (Fig. 4A) is situated within the optical cavity so that it receives pump energy from the pump source, and responsive thereto provides a fundamental laser emission at the first wavelength (λf), generating lasing oscillation within the optical cavity. The lasing oscillation
within the optical cavity is illustrated in Fig. 2 by a number of two-sided arrows. In Fig. 2, the pump beam 22 is configured to end-pump the gain medium, which provides visible/UV laser emission 26.
[055] Any suitable pumping arrangement can be implemented; for example,
the pumping arrangement may be configured as end pumping, side pumping, or
another suitable pumping arrangement. In an end pumping configuration such as shown in Fig. 4A, the pump radiation 44 from the laser diode 41 is conditioned by
an optical beam conditioning system 45 (e.g., a relay lens), and then directed as appropriate (e.g., with lenses, mirrors and so forth) to a gain medium 46.
[056] In Fig. 4A, the gain medium, which may be a trivalent lanthanide, or rare-earth element (discussed in more detail elsewhere herein) is arranged between two reflective end mirrors including a first (back) reflector 47 and second (front) reflector 48 that define an optical cavity. The optical cavity defines an optical axis extending from and through the rear reflector and the front reflector. Other optical elements 49 may be situated in the optical cavity; e.g., one or more etalons, non-linear elements, Brewster's windows are provided as appropriate. [057] In these laser configurations, both the first and second reflectors are reflective at a lasing wavelength λf; specifically, the first reflector is nearly 100%
reflective (as reflective as possible at the lasing wavelength), while the second mirror is only partially reflective (e.g., 90-95%) in order to allow the leakage that provides the laser output. In the end-pumped configuration, the first mirror must be substantially transmissive at the wavelength of the pump beam in order to allow the pump beam to propagate through the mirror and to the gain medium with minimal loss; however in alternative embodiments in which the laser is not pumped through the back reflector, then this transmissivity would not be
necessary.
[058] Reference is now made to Fig. 4B. In some embodiments it may be useful to utilize a narrowband anti-reflective (AR) coating such described in co-
pending U.S. Patent Application No. 10/434,579, filed May 8, 2003, entitled LASER WITH NARROW BANDWIDTH ANTIREFLECTION FILTER FOR
FREQUENCY SELECTION, Publication No. US-2003-0235228-A1 , which is incorporated by reference herein in its entirety. In the embodiment shown in Fig. 4B, the gain medium 46 includes a narrow-band AR coating 51 , which selects the
lasing wavelength of the optical cavity. The AR coating 51 is formed on a angled surface 52 of the gain medium; particularly, the angled surface 52 is angled with respect to the optical axis of the laser cavity, and the AR coating has a narrowband coating. One definition of narrowband AR coating in application No. 10/434,579 is one that has a minimum loss point of less than 2% within the gain- bandwidth of the gain medium, the AR coating limiting the bandwidth of the laser emission to a predetermined spectral range around the minimum loss point. The FWHM bandwidth may be less than about 1 nm, 0.5nm, or 0.25nm. The AR coating, in conjunction with all other cavity losses, may constrain the laser emission to a FWHM bandwidth less than about 2nm. The AR coating may have a minimum loss point of less than about 1%, 0.5%, 0.2%, or 0.1 %. Additionally an etalon may be provided in the optical cavity, as one of the additional elements 49. [059] The AR coating 51 may be formed on an optical element other than the gain medium; for example the narrow-band AR coating may be formed on any angled surface within the optical cavity defined between the front and back mirrors 47 and 48. For example, the AR coating may be formed on an additional intracavity optical element (e.g., a piece of optical glass or a nonlinear element). [060] Fig. 4C is a schematic view of an example of a rare-earth-doped fiber laser pumped by a short wavelength laser diode as described herein. The doped-
fiber laser includes an optical fiber 55 having a core 56 doped with a rare-earth lasant ion, such as any Pr3+ or any of the other rare-earth lasant ions described
herein. At either end of the fiber, a back mirror 57 and a front mirror 57 define an
optical cavity for laser emission within the fiber. The back and front mirrors may be coated directly on the ends of the optical fiber 55, or one or both may be
external optical elements. The visible/UV pump beam 22 excites laser action within the optical fiber 55, and the visible/UV laser beam 59 exits from the output
end of the doped-fiber laser. Advantageously, the optical fiber may be made of silica fibers, which are more durable and less expensive than optical fibers made of ZBLAN or other low phonon energy fibers that have been used in other short wavelength doped-fiber lasers.
[061] Fig. 4D is a schematic view of a multiple wavelength laser. In Fig. 4D. the gain medium 23 includes a back mirror 61 and a front mirror 62 that are coated to be substantially reflective at two or more wavelengths, as described in U.S. Patent No. 5,708,672, issued January 13, 1998, which is incorporated by reference herein in its entirety. Generally, the peaks of the reflective coatings of the mirrors are selected to match the desired emission peaks of the gain medium. The resulting laser output includes two wavelengths, as shown by a first wavelength laser output 63 and a second wavelength laser output 64.
[062] Fig. 4E is a schematic view of a dual wavelength laser in which the laser radiation from the unabsorbed pump beam is separated from the main laser beam and utilized as desired. In Fig. 4E, the pump beam 22 has sufficient energy that a significant fraction of the energy is unabsorbed in the gain medium 23. Accordingly, a portion of the pump beam, shown at 66, exits with the direct laser emission 67. A dichroic beamsplitter 68a separates the beam into the two
different wavelengths, to provide a residual pump beam 69a propagating at an angle with respect to the direct laser emission 67. For example, a 405nm pump
beam can generate a 556nm laser emission in a Er3"1" doped gain medium. The
direct laser emission at 556nm exits from the dichroic beamsplitter at a first angle, and the residual pump beam at 405nm exits from the dichroic beamsplitter at a
second different angle. Each beam can then be used as desired. In an alternative embodiment, illustrated in dashed lines in Fig. 4E, a beamsplitter 68b
is arranged between the pump source and the laser cavity, so a residual pump beam 69b exits from the laser apparatus. The remainder of the pump beam then continues into the laser cavity to excite laser emission. [063] Gain medium description
[064] Thus, in operation, the visible/UV laser diode pumps a trivalent (triply- ionized) lanthanide, (rare-earth) element doped into a glass or crystalline laser host. The rare-earth element then re-radiates laser radiation directly at a fundamental wavelength that lies in the visible spectral region. For example, a blue-green laser output is one particularly useful emission from a rare-earth doped
host.
[065] Several of the trivalent lanthanides, or rare-earth elements, have energy band structures that would allow for optical absorption in the spectral output region from these semiconductor lasers. For example, triply-ionized samarium (Sm3+), europium (Eu3+), terbium (Tb3+), dysprosium (Dy3+), holmium (Ho3+), erbium (Er3+), praseodymium (Pr3+), and thulium (Tm3+) can all be excited by direct optical absorption in the blue/violet. These same rare-earth elements also operate as the active ion, that is, they can provide laser emission from these excited states to lower-lying energy states, resulting in visible wavelength
emission.
[066] Fig. 5 illustrates the free energy levels of the trivalent lanthanides. Particularly, Fig. 5 is a Dieke chart of that shows transitions of rare-earth
elements; Pump (absorption) bands are shown in the region of a box 71 , defined by the energy levels between the with up-arrows corresponding to 365nm and 480nm wavelengths. In other words, any transition within this region may function
as an absorption transition. The possible emission transitions include any downward transitions from this region 71 , as allowed by quantum rules. Some of
these transitions are specified elsewhere herein.
[067] Several of the elements shown in Fig. 5 possess energy levels corresponding to absorption and emission in the wavelength regimes mentioned previously; for example several lasing transitions are discussed below for the active ions praseodymium (Pr3+), neodymium (Nd3+), samarium (Sm3+), europium (Eu3+), terbium (Tb3+), dysprosium, (Dy3+), erbium (Er3+) and thulium (Tm3+); it should be apparent that more transitions for each are possible. [068] These rare-earth ions provide the lasing transition. To provide a gain medium for a laser cavity, the lasant ion is doped in a suitable concentration into a suitable host material. Some common host materials include YV04, GdV04, YAG, YLF, KYF, BYF, FAP, S-FAP, YOS, YSO, YALO, phosphate glass, silica glass, and ZBLAN.
[069] Fig. 6, which is a free-energy level diagram for triply-ionized europium (Eu3+) in a low energy host, like a liquid (the vertical axis shows energy in units of 103cnrf1). In one specific example a DPSS laser would achieve lasing action at about 488nm, so as to provide a solid-state replacement for the argon-ion laser emitting around the same wavelength. As disclosed herein, a short wavelength
semiconductor laser emitting in the violet spectral region around 375nm could be used to pump a Eu3+ gain medium within the laser cavity. The active dopant could
absorb the pump radiation, and re-emit at about 488nm for example, which is the transition shown on the right. Other visible wavelength transitions are also
possible, such as illustrated in Fig. 6.
[070] As known in the art, the specific placement and splitting of the energy levels will be strongly dependent upon the specific host in which the ion is placed. For example, in a specific example of Eu3+:YV04, emission from the 5D0 level located at about 17,184cm"1 to the 7F2 level located at about 1 ,039cm"1 results in emission in the red at about 619nm (corresponding energy of the transition is about 16,145cm"1). [071] However, the resonant absorption from the 7F0 (ground state) to the 5D3 energy level that would correspond to ~408-nm diode laser radiation is not allowed by quantum rules. Although this is true for most materials, the result is different for Eu3+:YV0 . Particularly, it is believed that, in a Eu3+:YV04 material system, host-sensitized energy transfer of violet/UV radiation leads to population in the 5DN levels, where N is 0, 1 , 2, 3, ... Therefore in the host YV04, the active ion Eu3+ can be directly pumped by 408nm laser diodes.
[072] Fig. 7 is a graph that plots the intensity of the emission from the 5D0 level to the 7F2 level in Eu3+:YV04, pumped by violet laser diode, as a function of wavelength. Particularly, plot 70 in Fig. 7 shows fluorescence data from this transition from Eu3+:YV04 pumped with a violet laser diode. [073] Fig. 8 is a graph that plots the emission from the 5D0 level to the 7F-ι level in Eu3+:YV04, pumped by a violet laser diode, as a function of wavelength.
A plot 80 shows the example emission from the 5D0 level located at about 17,184cm"1 to the 7Fι level located at about 335cm"1 resulting in emission at about
594nm (corresponding energy of the transition is about 16,849cm"1). [074] Fig. 9 is a free energy level diagram for triply-ionized terbium (Tb3+). The vertical axis shows energy in units of 103cm"1. Fig. 9 illustrates the potential
for using a semiconductor laser emitting in the 370-385nm regime to pump the
Tb3+ active ions, resulting in emission at about 488nm. The about 488nm emission is the transition on the right-most side; shown with two parts. These correspond to two possible transitions, both of which are pumped from the 370-385nm band. The first transition has its upper laser level originate from the 5D3 level, and its lower laser level originates at 7F0. This would lead to four-level laser operation; which would be more efficient than a three-level configuration. [075] The second transition results from phonon decay from the pump level [5D3] to the 5D4 level. The 5D4 level would then be the upper laser level, with the transition terminating on the 7F6 lower laser level. Other visible wavelength transitions may also be possible. [076] Following are some of the transitions (energy levels) that can generate lasing action as described herein, by active ion and approximate energy level for each transition, noting that it is approximated based upon the free energy diagram; it should be apparent that the exact energy in any particular embodiment would depend heavily upon the specific host. Of course, all of these transitions are subject to the quantum selection rules, and some may not be useful. Particularly, some transitions between energy levels are not allowed based upon quantum electronics selection rules. Also, the specific wavelengths generated by
each transition depend upon the host material into which each rare-earth element is doped, and therefore may vary between embodiments. In general the sets of wavelengths that can be generated by each ion vary dependent upon a number of
factors, including at least the host material. [077] The transitions are shown in these energy units in customary fashion; it
should be clear that the wavelength corresponding to a given transition is just the
inverse of the difference in energy; e.g., for Eu, the 5D27F2 transition goes
from about 21 ,500cm"1 to about 1 ,000cm"1, which is a difference of about 20,500cm"1. To convert to terms of wavelength, the inverse is calculated; for example the inverse of about 20,500cm"1 is about 488nm.
[078] Samarium (Sm): beginning at upper laser level: 4G5 2, the terminal laser levels, and approximate transition energy from the upper laser level are as follows: 6H5/2 (~17,550cm"1) (570nm), 6H7/2(~16,550cm"1) (604nm), 6H9/2(about 15,550cm"1),(643nm), and 6H11/2(~14,250cm"1) (702nm).
[079] Europium (Eu): the upper laser levels, and approximate transition energy from the respective upper laser levels to the terminal laser levels are as follows: from the upper levels 5D3 (~19,000-24,000cm"1) (526-417nm), 5D2 (-16,500-21 , 500cm"1) (606-465nm), 5D1 (-14,000-19,000cm"1) (714-526nm), and 5D0 (-12,000-17,000cm"1) (833-588nm), to the terminal laser levels 7F|, i=0...6.
[080] Terbium (Tb): The upper laser level, and approximate transition energy from the respective upper laser levels to the terminal laser levels is as follows: from the upper laser levels 5D3 (~20,500-26,000cm"1) (488-387nm), and 5D4 (~15,000-20,500cnrf1) (667-488nm) to the terminal laser levels 7Fj, i=0...6. [081] Dysprosium (Dy): from the upper laser level: 4F9/2, the terminal laser
levels, followed by the approximate transition energy from the specified upper laser level are as follows: 6H11/2 (-15,250cm"1) (657nm), 6H13/2 (-17,750cm"1)
(563nm), and 6H15/2 (about 21 , 000cm"1)- (476nm). [082] Thulium (Tm): from the upper laser level: 1G4, the terminal laser level, and the approximate transition energy from the specified upper laser level is as
follows: 3H6 (-21 , 000cm"1) (476nm).
[083] Following are examples of some transitions that may be of particular
interest.
[084] Example 1 : Eu3+:YLF: The 5D2-7F3 transition in YLF leads to emission in the 510nm regime. Also, the 5D2-7F-ι transition leads to emission in the 470nm regime.
[085] Example 2: Eu3+:YVO4: Transitions originating from the 5D0 level lead to visible emission in the red spectral region. The strongest emission appears to be from the 5D0 to the 7F2 level, corresponding to about 619nm, and the 595nm transition from the 5D0 to the 7Fι level, and the 539 transition from the 5D-ι to the 7Fι level. See Figs. 13A and 13B for a more detailed description of the emission and pump transitions for Eu3+:YV04. [086] Example 3: Tb3+:TAB: Emission from the 5D4 level to the 7F6 level corresponding to emission around 485nm has been observed. Emission from the 5D4 to the 7F5 level (-541 nm) and to the 7F3 level (-621 nm) is also of interest. See Figs. 14A and 14B for a more detailed description of the emission and pump transitions for Tb3+:TAB. [087] Additional Examples: [088] Figs. 10A and 10B show additional examples of laser transitions for Er3+ that can be utilized in a laser as described herein. Particularly, Fig. 10A is a diagram that shows the transitions, and Fig. 10B is a table that shows the initial
state, the final state, the initial energy (in units of cm"1), and final energy, the
transition energy, the wavelength, and the oscillator strength for each transition. [089] Figs. 11A and 11 B show additional examples of laser transitions for
Ho3+ that can be utilized in a laser as described herein. Particularly, Fig. 11 A is a
diagram that shows the transitions, and Fig. 11 B is a table that shows the initial
state, the final state, the initial energy (in units of cm"1), and final energy, the transition energy, the wavelength, and the oscillator strength for each transition. [090] Figs. 12A and 12B show additional examples of laser transitions for Pr3+ that can be utilized in a laser as described herein. Particularly, Fig. 12A is a diagram that shows the transitions, and Fig. 12B is a table that shows the initial state, the final state, the initial energy (in units of cm"1), and final energy, the transition energy, the wavelength, and the oscillator strength for each transition. [091] Figs. 13A and 13B show additional examples of laser transitions for Eu3+:YV04 that can be utilized in a laser as described herein. Particularly, Fig. 13A is a table of the emission transitions, and Fig. 13B is a table of absorption transitions that show the initial state, the final state, the transition energy (in units of cm"1), and the wavelength for each transition. It may be noted, as discussed above, that the resonant absorption from the 7F0 (ground state) to the 5D3 energy level that would correspond to ~408-nm diode laser radiation is not allowed by quantum rules. Although this is true for most materials, the result is different for Eu3+:YV04. Particularly, it is believed that, in a Eu3+:YV04 material system, host- sensitized energy transfer of violet/UV radiation leads to population in the 5D levels. Therefore in context of the host YV04, the active ion Eu3+ can be directly pumped by 408nm laser diodes.
[092] Figs. 14A and 14B show additional examples of laser transitions for
Tb3+:TAB that can be utilized in a laser as described herein. Particularly, Fig. 14A
is a table that shows the emission transitions, and Fig. 14B is a table of absorption transitions that shows the initial state, the final state, the transition energy (in units of cm"1), and the wavelength for each transition.
[093] By using the direct emission approach described herein, visible
wavelength laser emission can be generated within a laser cavity without employing nonlinear crystal frequency conversion. By eliminating additional laser cavity elements such as the nonlinear crystal that would otherwise be required for
frequency conversion, the size and cost of the laser device can be significantly reduced. Also, those skilled in the art will recognize that the noise (amplitude instabilities) typically encountered with the intracavity frequency doubling approach would be significantly reduced with the elimination of the nonlinear harmonic generator. [094] Co-doped gain media
[095] In some embodiments, co-doping the host material with two or more rare-earth elements is a useful technique for generating visible laser radiation using short wavelength pump diodes. For example, active ions such as praseodymium (Pr3+) and terbium (Tb3+) have energy levels that could result in visible emission. However, these active ions may not have efficient absorption in the wavelength regime where high power blue/violet diode lasers are available.
By co-doping the host material with one of these elements as well as another element (a codopant) that has strong absorption properties in the spectral region of interest, more efficient population of the upper laser level of the desired active
element can be achieved.
[096] For example, by co-doping the host material with both Tb3+ and Dy3+,
the absorption of the Dy3+ around 400nm to efficiently absorb pump radiation.
Then, via phonon decay, the Dy3+ ion relaxes to a lower lying metastable energy level such as the 4F92 level. Because of the proximity in energy level of the
Tb3+5D4 energy level, there is a significant possibility of energy transfer from the Dy3+ ion to the Tb3+ ion, in which the Dy3+ ion gives up its energy to promote a
Tb3+ ion to its excited 5D4 energy level. Once this level becomes sufficiently populated, the Tb3+ ion can then radiatively decay to produce emission in the visible range.
[097] Another example is co-doping Pr3+ with D +, again using Dy3+ as the absorption sensitizer, ultimately resulting in energy transfer to the 3P0 energy level of the Pr3+ ion, again resulting in visible emission. [098] Also, thulium (Tm3+) can be useful in a co-doped gain medium, because its 1G4 energy level can emit visible wavelength radiation. Direct population of this level may be achieved by co-doping the host material with an absorption sensitizer such as Eu3+or Dy3+, for example. [099] It will be appreciated by those skilled in the art, in view of these teachings, that alternative embodiments may be implemented without deviating from the spirit or scope of the invention. For example, the visible/UV laser emission from the gain medium may be further converted in frequency, such as by frequency doubling (SHG) processes, or frequency mixing, either intracavity or
external cavity. [0100] This invention is to be limited only by the following claims, which include all such embodiments and modifications when viewed in conjunction with the
above specification and accompanying drawings. For purposes of convenience, in some of the following claims, the transitions are claimed in terms of the wavelength in nanometers (nm). In the specification, the particular transitions
associated with the wavelengths are described.

Claims

CLAIMSWHAT IS CLAIMED IS:
1. A diode-pumped, solid-state laser that emits an output beam having a short
wavelength, comprising: a laser cavity including a first and a second end mirror; a gain medium situated within said laser cavity, said gain medium including a rare-earth doped solid state material providing a lasing transition from an upper laser level to a lower laser level; and a laser diode pump source arranged to pump said gain medium, said laser diode pump source having a wavelength in the range of about 365nm to 480nm to excite said rare-earth element to an energy level at least equal to said upper laser level, thereby providing a laser emission from said lasing transition within said laser cavity in the range of 370 to 800nm.
2. The laser of claim 1 wherein said laser diode pump sources comprises a GaN-based semiconductor.
3. The laser of claim 2 wherein said laser diode pump source comprises one of GaN, AIGaN, and InGaN.
4. The laser of claim 2 wherein said laser diode pump source emits a beam in one of the ranges of 370-380nm, 400415nm, 435-445nm, and 468478nm.
5. The laser of claim 1 wherein said rare-earth doped gain medium comprises an active ion selected from Er3+ Sm3+, Eu3+, Tb3+, Dy3+, Tm3+, Ho3+, and Pr3+.
6. The laser of claim 5 wherein said active ion in said rare-earth doped gain medium comprises Sm3+, and said lasing transition is to a terminal level 4G5 2 from
upper laser level selected from one of 6H5/2, 6H7/2, 6H92, and δH11/2.
7. The laser of claim 5 wherein said active ion in said rare-earth doped gain medium comprises Eu3+, and said lasing transition has a terminal level of 7F-ι and the upper level is one of 5D3, 5D2, 5D-,, and 5D0.
8. The laser of claim 5 wherein said active ion in said rare-earth doped gain medium comprises Tb3+, and said lasing transition has an upper level of 7F1 and the terminal level is one of 5D3 and 5D4.
9. The laser of claim 5 wherein said active ion in said rare-earth doped gain medium comprises Dy3+, and said lasing transition has an upper level of 4F9/2 and the terminal level is one of 6H11/2, 6H13/2, and 6H15/2.
10. The laser of claim 5 wherein said active ion in said rare-earth doped gain medium comprises Tm3+, and said lasing transition has an upper level of 1G4 and the terminal level is 3H6.
11. The laser of claim 5 wherein said active ion in said rare-earth doped gain medium comprises Ho3+, and said lasing transition is one of 544nm, 541 nm,
487nm, 476nm, 455nm, and 419nm.
12. The laser of claim 5 wherein said active ion in said rare-earth doped gain medium comprises Pr3+, and said lasing transition is one of 479nm, 548nm,
466nm, 531 nm, 441 nm, 499nm, 364nm.
13. A diode-pumped, solid-state laser that emits an output beam having a short wavelength, comprising: a laser cavity including a first and a second end mirror; a gain medium comprising Eu3+:YV04 active ion situated within said laser cavity, said gain medium providing a lasing transition from an upper laser level to a lower laser level; and a laser diode pump source arranged to pump said gain medium, said laser diode pump source having a wavelength to excite said rare-earth element to a 5DN energy level, where N is one of 0, 1 , 2, and 3, said energy level is at least equal to said upper laser level, thereby providing laser emission from said lasing transition within said laser cavity.
14. The laser of claim 13 wherein said lasing transition has an upper level of 5D0 and said terminal level is one of 7F-ι and 7F2.
15. The laser of claim 13 wherein said lasing transition has an upper level of 5Dι, and said terminal level is 7
PCT/US2005/019065 2004-05-25 2005-05-25 Short wavelength diode-pumped solid-state laser WO2005117216A2 (en)

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WO2008104910A2 (en) * 2007-02-27 2008-09-04 Philips Intellectual Property & Standards Gmbh Blue ld pumped praseodymium doped solid state laser device with reduced temperature dependence
WO2008104910A3 (en) * 2007-02-27 2009-06-18 Philips Intellectual Property Blue ld pumped praseodymium doped solid state laser device with reduced temperature dependence
JP2010519756A (en) * 2007-02-27 2010-06-03 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ Solid state laser device with reduced temperature dependence
US8000363B2 (en) 2007-02-27 2011-08-16 Koninklijke Philips Electronics N.V. Solid state laser device with reduced temperature dependence
CN103444019A (en) * 2007-02-27 2013-12-11 皇家飞利浦电子股份有限公司 Blue LD pumped praseodymium doped solid state laser device with reduced temperature dependence
JP2009231483A (en) * 2008-03-21 2009-10-08 Fujifilm Corp Laser apparatus and microscope
CN105576490A (en) * 2016-03-09 2016-05-11 中国科学院合肥物质科学研究院 Method for realizing laser and frequency-doubled laser by utilizing GaN-based laser-diode-pumped rare-earth-ion-doped laser material
JP2021136439A (en) * 2020-02-21 2021-09-13 トヨタ自動車株式会社 Amplifying fiber and laser light-emitting device

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