WO2005113647A1 - Polyesterimide having low coefficient of linear thermal expansion and precursor therefor - Google Patents

Polyesterimide having low coefficient of linear thermal expansion and precursor therefor Download PDF

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WO2005113647A1
WO2005113647A1 PCT/JP2004/016627 JP2004016627W WO2005113647A1 WO 2005113647 A1 WO2005113647 A1 WO 2005113647A1 JP 2004016627 W JP2004016627 W JP 2004016627W WO 2005113647 A1 WO2005113647 A1 WO 2005113647A1
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polyesterimide
film
precursor
thermal expansion
divalent aromatic
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PCT/JP2004/016627
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French (fr)
Japanese (ja)
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WO2005113647A6 (en
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Masatoshi Hasegawa
Shinsuke Inoue
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Manac Inc
Masatoshi Hasegawa
Shinsuke Inoue
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Priority to JP2006513666A priority Critical patent/JP4627297B2/en
Publication of WO2005113647A1 publication Critical patent/WO2005113647A1/en
Publication of WO2005113647A6 publication Critical patent/WO2005113647A6/en

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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0313Organic insulating material
    • H05K1/032Organic insulating material consisting of one material
    • H05K1/0346Organic insulating material consisting of one material containing N
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08G73/16Polyester-imides

Definitions

  • Polyesterimide having low coefficient of linear thermal expansion and its precursor
  • the present invention relates to a practically useful polyester imide and a precursor thereof, which have a low dielectric constant, a low coefficient of linear thermal expansion, a high glass transition temperature, and a sufficient film toughness for use in a flexible printed wiring board. And their manufacturing methods.
  • Polyimide has not only excellent heat resistance but also properties such as chemical resistance, radiation resistance, electrical insulation, and excellent mechanical properties. Currently, it is widely used in various electronic devices as materials, protective films for semiconductor elements, inter-layer insulating films for integrated circuits, and the like.
  • polyimide is prepared by equimolarly dissolving an aromatic tetracarboxylic dianhydride such as pyromellitic anhydride and an aromatic diamine such as diaminodiphenyl ether in an aprotic polar organic solvent such as dimethylacetamide.
  • a polyimide precursor having a high degree of polymerization obtained by the reaction is formed into a film or the like and cured by heating.
  • the skeletal structure In order to maintain the heat resistance of polyimide while applying force, the skeletal structure must be rigid in molecular design, and as a result, many polyimides are insoluble in organic solvents and even at glass transition temperatures or higher. Since it does not melt, it is usually not easy to mold the polyimide itself.
  • a method is used in which a polyimide precursor having high solubility in an amide-based organic solvent is used. Specifically, a polyimide precursor is coated on a metal substrate with a non-tonic organic solvent solution, dried, and heated at 250 ° C to 350 ° C for dehydration ring closure (imidization) to form a polyimide film. I do.
  • polyimides which can also form 3,3 ', 4,4'-biphenyltetracarboxylic dianhydride and paraphenylenediamine, are best known. It is known that this polyimide film has a very low linear thermal expansion coefficient of 5-lOppmZK, depending on the film thickness and manufacturing conditions (for example, see Non-Patent Documents 2 and 3).
  • introduction of an alicyclic unit into the polyimide skeleton reduces ⁇ electrons, and is effective for lowering the dielectric constant.
  • the introduction of an alicyclic unit generally has a problem in that the linearity and rigidity of the polyimide main chain skeleton are reduced and the coefficient of linear thermal expansion is increased.
  • a highly flexible alicyclic diamine such as 4,4'-methylenebis (cyclohexylamine)
  • polymerization proceeds easily with various acid dianhydrides, and a polyimide precursor having a high degree of polymerization is produced.
  • the polyimide film obtained by the ring closure reaction does not exhibit low thermal expansion characteristics.
  • the obtained polyimide film has a low dielectric constant as described above, but has a linear thermal expansion.
  • the coefficient is as high as 70 ppm ZK, and does not show low thermal expansion characteristics.
  • 1,2,3,4-cyclobutanetetracarboxylic dianhydride and polyimide having trans 1,4-sixoxyhexandiamine power have a rigid and relatively linear skeleton, and therefore have a low dielectric constant.
  • the development of low thermal expansion characteristics is expected.
  • the polyimide precursor polymerization reaction of 1,2,3,4-cyclobutanetetracarboxylic dianhydride with 2,2'bis (trifluoromethyl) benzidine the above-mentioned salt formation is suppressed. It does not occur at all and a high molecular weight product can be easily obtained. Furthermore, the polyimide film has a low dielectric constant (2.66), a low thermal expansion coefficient (21PpmZK) and high glass transition temperature (356 ° C) satisfying simultaneously (e.g., Non-Patent Document 5 reference.) 0
  • Non-Patent Document 1 Polymer, 28, 2282 (1987)
  • Non-Patent Document 2 Macromolecules, 29, 7897 (1996)
  • Non-Patent Document 4 Macromolecules, 24, 5001 (1991)
  • Non-Patent Document 5 High Performance Polymers, 15, 47 (2003)
  • Non-Patent Document 6 Macromolecules, 32, 4933 (1999)
  • Non-Patent Document 7 Reactive and Functional Polymers, 30, 61 (1996)
  • the present invention provides a practically useful polyester imide and a precursor thereof, which has a low dielectric constant, a low coefficient of linear thermal expansion, a high glass transition temperature, and also has sufficient film toughness for flexible printed wiring board applications. And a method for producing them.
  • the present invention is as follows.
  • a and B are each independently a divalent aromatic group, an alicyclic group or a combination thereof. However, the bonding positions of the divalent groups are all in the para-position or a relation equivalent thereto.
  • a polyesterimide precursor comprising a repeating unit represented by the formula:
  • [0030] is selected from a divalent aromatic group or an alicyclic group represented by
  • the steric structure of the cyclohexane ring in A and B is the chair-type trans configuration described in 1) above.
  • a and B are each independently a divalent aromatic group, an alicyclic group or a combination thereof. However, the bonding positions of the divalent groups are all in the para-position or a relation equivalent thereto. Polyester imide characterized by containing a repeating unit
  • the polyesterimide as described.
  • the precursor film is subjected to a thermal dehydration cyclization reaction or a cyclization reaction using a dehydration ring closure reagent
  • polyesterimide film according to 8) above which has a dielectric constant lower than 3.3, a linear thermal expansion coefficient lower than 30 ppm ZK, a glass transition temperature of 300 ° C or higher, and sufficient toughness.
  • An electronic device comprising the polyesterimide film described in 8) or 9) above.
  • the present invention focused on ester bonds.
  • Ester bonds are relatively hindered from conformational changes, where the internal rotation barrier is higher than ether bonds, and are expected to provide some degree of flexibility to the main chain.
  • ester bond has a lower polarizability per unit volume than the amide bond or the imide bond
  • introduction of the ester bond into the polyimide is also advantageous for low dielectric constant.
  • ester groups are expected to contribute to a decrease in water absorption, which largely affects the dielectric constant, in view of the fact that polyesters exhibit lower water absorption than polyimide / polyamide.
  • the tetracarboxylic dianhydride monomer used in the production of the polyesterimide of the present invention can be easily synthesized from a diol imparting rigidity or linearity such as hydroquinone and trimellitic anhydride chloride. And the resulting monomer is also of high purity. In addition, the raw materials used can be obtained at low cost, which is advantageous in terms of the production cost of polyesterimide.
  • FIG. 1 is an infrared absorption spectrum of the ester group-containing tetracarboxylic dianhydride described in Example 1.
  • FIG. 2 is an infrared absorption spectrum of the ester group-containing tetracarboxylic dianhydride described in Example 2.
  • FIG. 3 is an infrared absorption spectrum of the polyesterimide precursor film described in Example 3.
  • FIG. 4 is an infrared absorption spectrum of the polyesterimide film described in Example 3.
  • FIG. 5 is an infrared absorption spectrum of the polyesterimide precursor film described in Example 4.
  • FIG. 6 is an infrared absorption spectrum of the polyesterimide film described in Example 4.
  • FIG. 7 is an infrared absorption spectrum of the polyesterimide precursor film described in Example 5.
  • FIG. 8 is an infrared absorption spectrum of the polyesterimide film described in Example 5. BEST MODE FOR CARRYING OUT THE INVENTION
  • the synthesis of the tetracarboxylic dianhydride monomer represented by the formula (3) is performed as follows. First, a diol is dissolved in a dehydrated organic solvent such as tetrahydrofuran or N, N-dimethylformamide, and a tertiary amine such as pyridine / triethylamine is added as a deoxidizing agent. To this solution, a solution of trimellitic anhydride chloride in a molar amount twice as much as that of the diol used was gradually added dropwise while cooling with ice, and the mixture was stirred at room temperature for 24 hours to obtain the desired formula (3):
  • a dehydrated organic solvent such as tetrahydrofuran or N, N-dimethylformamide
  • a tertiary amine such as pyridine / triethylamine
  • A is a divalent aromatic group, an alicyclic group or a combination thereof, provided that the bonding positions of the divalent groups are all in the para-position or a relation equivalent thereto.
  • the tetracarboxylic dianhydride monomer represented can be obtained.
  • the tertiary amine hydrochloride contained in the above reaction solution is removed by filtration, the reaction solvent is distilled off under reduced pressure, and recrystallization is repeated using an appropriate solvent to obtain a high-molecular-weight polymer that can be used for polymerization.
  • a pure ester group-containing acid dianhydride monomer is obtained.
  • the product is dissolved in chloroform and ethyl acetate, and the mixture is shaken with water to extract and remove the hydrochloride salt.
  • the reaction solution into a large amount of water and wash the precipitated product. Since the anhydride groups are partially hydrolyzed by these operations, they are subjected to thermal ring closure at 200 ° C. in vacuum, and finally recrystallized from an appropriate solvent.
  • Ring closure treatment of the ester group-containing tetracarboxylic dianhydride monomer can also be performed by dissolving in a dehydrating agent such as acetic anhydride and heating and refluxing it. When used for applications, it is preferable to thermally close the ring.
  • a dehydrating agent such as acetic anhydride
  • / ⁇ diol is an aromatic or Z or alicyclic dihydroxy compound having two hydroxy groups at each terminal.
  • the bonding positions of the hydroxy group, the aromatic group, and the z or alicyclic group are all related to the para-position or a position corresponding thereto. In charge.
  • the "para position or a relation corresponding thereto" means a relation such that one bonding position is point-symmetric or line-symmetric with respect to the other bonding position.
  • a 6-membered ring such as benzene and cyclohexane means 1,4, and a 10-membered ring such as a naphthalene ring means 2,6 or 1,5.
  • the diol of the present invention is in the para-position or By having a corresponding relationship, a straight and rigid structure is provided.
  • Preferred aromatic dihydroxy conjugates include, specifically, monocyclic and condensed polycyclic carbons having 6 to 24 carbon atoms and having two hydroxyl groups in a para position or a relationship corresponding thereto.
  • Hydrogen groups which may optionally be interconnected directly or by a bridging member (in which case, the two hydroxyl groups are each terminally present).
  • the bridging member is a spacer group having 116 atoms, and may be, for example, alkylene, ONH—, carbonyl, sulfiel, sulfol, or a combination thereof. Further, they may be optionally substituted by one or more halogen, hydroxyl, or alkyl having 14 to 14 carbons, alkyl or alkoxy.
  • More preferable aromatic dihydroxy conjugates include, for example, hydroquinone, 4,4'-biphenol, and 4, A "-dihydroxy-terphenyl.
  • Preferred alicyclic dihydroxy conjugates are, specifically, monocyclic or polycyclic carbons having 6 to 24 carbon atoms having two hydroxyl groups in para-position or a relationship corresponding thereto.
  • Hydrogen groups which may optionally be interconnected directly or by a bridging member (in which case, the two hydroxyl groups are each terminally present).
  • the bridging member is a spacer group having 116 atoms, and may be, for example, alkylene, ONH—, carbol, sulfiel, sulfol, or a combination thereof.
  • More preferred alicyclic dihydroxy conjugates include, for example, trans 1,4-cyclohexanediol.
  • the polymerization of the polyesterimide precursor is performed as follows. First, a diamine component is dissolved in a polymerization solvent, and a tetracarboxylic dianhydride powder represented by the formula (3) is gradually added thereto. Using a mechanical stirrer, 10 to 40 ° C, preferably Stir at room temperature for 0.5-48 hours. At this time, the monomer concentration is 5 to 40% by weight, preferably 10 to 35% by weight. By performing polymerization in this monomer concentration range, a uniform and high polymerization degree polyesterimide precursor solution can be obtained.
  • the polyesterimide precursor of the present invention has an intrinsic viscosity of 0.3 dL / g or more measured in N, N-dimethylacetamide at 30 ° C. at a concentration of 0.5% by weight, and It is preferably in the range of 0.3-6. OdL / g, depending on the desired use of OdL / g.
  • the polyesterimide precursor having a higher degree of polymerization tends to be obtained as the monomer concentration is higher, it is preferable to start the polymerization at the highest possible concentration, particularly for applications where the polyesterimide film requires high toughness.
  • Diamine component is an aromatic and Z or alicyclic diamine compound having two amino groups at the respective terminals.
  • the bonding positions of the amino group, the aromatic group and the Z or alicyclic group are all in the para-position or a relation equivalent thereto.
  • the diamine component of the invention has a linear or rigid structure by having a para-position or a relation equivalent thereto.
  • Preferred diamine components are p-phenylenediamine, benzidine, 4,4 'diaminobenzalide, 1,4 diaminocyclohexane or 4-aminobenzoic acid ⁇ aminophenol, which may be one in some cases. It may be substituted with the above halogen, hydroxyl, or alkyl having 14 to 14 carbon atoms, alkyl halide or alkoxy.
  • 2-methyl-1,4-phenylenediamine, 2-trifluoromethyl-1,4-phenylenediamine, benzidine, o-tolidine, m-trizine, 2,2'bis (trifluoromethyl) benzene Gin, 3,3'-dihydroxybenzidine, 3,3'-dimethoxybenzidine, 4,4'diaminobenzalide, trans 1,4 diaminocyclohexane or 4-aminobenzoic acid 4'-aminophenol are preferred, for example.
  • No. In the polyesterimide according to the present invention, it is preferable to use these diamine components in an amount of 70 to 100% by mole of the diamine components used.
  • the aromatic diamine which can be partially used in the range without significantly impairing the required properties of the polyesterimide according to the present invention is not particularly limited, but m-phenylenediamine, 2,4-diaminotoluene, 2,4 -Diaminoxylene, 2,4-diaminodulene, 4,4'-Diaminodiphenylmethane, 4,4'-Methylenebis (2-methyla-line), 4,4'-Methylenebis (2-ethyla-line), 4,4'-Methylenebis ( 2, 6-dimethyla-phosphine), 4, 4'-methylene bis (2,6-diethyl aniline), 4, 4'-diaminodiphenyl ether, 3, 4'-diaminodidiphenyl ether, 3, 3'-diaminodiphenyl- Diether, 2, 4 '-diaminodiphenyl-ether, 4, 4' diaminodiphenylsulfone, 3, 3 '-d
  • the aliphatic diamine that can be partially used within a range that does not significantly impair the required properties of the polyesterimide is not particularly limited, but cis 1,4-diaminocyclohexane, 1,4-diaminocyclohexane (trans / cis Mixture), 1,3-diaminocyclohexane, isophoronediamine, 1,4-cyclohexanebis (methylamine), 2,5 bis (aminomethyl) bicyclo [2.2.1] heptane, 2,6-bis (Aminomethyl) bicyclo [2.2.1] heptane, 3,8 bis (aminomethyl) tricyclo [5.2.1.0] decane, 1,3-diaminoadamantane, 4,4'-methylenebis (cyclohexylamine ), 4,4'-methylenebis (2-methylcyclohexylamine), 4,4'-methylenebis (2-ethylcyclohexylamine), 4,
  • an alicyclic diamine such as 1,4 diaminocyclohexane as the aliphatic diamine.
  • the tetracarboxylic dianhydride represented by the formula (3) according to the present invention When the tetracarboxylic dianhydride represented by the formula (3) according to the present invention is used while reacting, it quickly reacts with trans 1,4-diaminocyclohexane to give a high polymerization degree.
  • a polyesterimide precursor can be easily obtained. Therefore, there is no need for a complicated pre-polymerization treatment step for silylizing aliphatic diamine with a silylating agent such as chlorotrimethylsilane.
  • a diamine containing an ester bond such as 4-aminobenzoic acid 4′-aminophenol is used as the aromatic diamine. It is also preferable to use the
  • An acid dianhydride component other than the tetracarboxylic dianhydride represented by the formula (3) is partially added to the polyesterimide according to the present invention in a range not significantly impairing the required properties and polymerization reactivity.
  • the copolymeric dianhydride component is not particularly limited, but may be pyromellitic dianhydride, 3,3 ', 4,4'-biphenyltetracarboxylic dianhydride, 3,3', 4,4 ' Benzophenone tetracarboxylic dianhydride, 3, 3 ', 4, 4'-biphenyl ether tetracarboxylic dianhydride, 3, 3', 4, 4'-biphenyl sulfone tetracarboxylic dianhydride 2,2'bis (3,4-dicarboxyphenyl) hexafluoropropanoic dianhydride, 2,2'bis (3,4-dicarboxyphenyl) propanoic dianhydride, Examples include 1,4,5,8-naphthalenetetracarboxylic dianhydride. These may be used alone or in combination of two or more as copolymer components.
  • a polymer dissolution promoter often added during the polymerization of the polyesterimide precursor that is, a metal salt such as lithium bromide / lithium chloride, need not be used at all in the polyesterimide precursor polymerization reaction according to the present invention. ,. These metal salts should not be used because even if trace amounts of metal ions remain in the polyesterimide film, the reliability as an electronic device is significantly reduced.
  • the polyesterimide precursor solution applied on the substrate is dried in a range of 40 ° C to 180 ° C.
  • the obtained polyesterimide precursor film is heat-treated on a substrate in air, in an atmosphere of an inert gas such as nitrogen, or in a vacuum, at a temperature of 200 ° C to 430 ° C, preferably 250 ° C to 400 ° C.
  • an inert gas such as nitrogen
  • a vacuum at a temperature of 200 ° C to 430 ° C, preferably 250 ° C to 400 ° C.
  • Imido-dani can also be performed chemically using a dehydration cyclization reagent. That is, a polyesterimide film can also be obtained by immersing the polyesterimide precursor film formed on the substrate in acetic anhydride containing a basic catalyst such as pyridine or triethylamine at room temperature for one minute and several hours.
  • a basic catalyst such as pyridine or triethylamine
  • additives such as an acid stabilizer, a terminal blocking agent, a filler, a silane coupling agent, a photosensitizer, a photopolymerization initiator, and a sensitizer may be added, if necessary. May be mixed.
  • a 0.5% by weight solution of the polyesterimide precursor in N, N-dimethylacetamide was measured at 30 ° C. using an Ostwald viscometer.
  • the dynamic viscoelasticity was measured from the loss peak at a frequency of 0.1 ⁇ and a heating rate of 5 ° CZ.
  • thermogravimetric change of the polyesterimide film was measured at a heating rate of 10 ° CZ, and the temperature at which the weight was reduced by 5% was determined.
  • the coefficient of linear thermal expansion was determined as the average value in the range of 100 to 200 ° C from the elongation of the test piece at a load of 0.5 gZ, a film thickness of 1 ⁇ m, and a heating rate of 5 ° CZ.
  • the dielectric constant and the dielectric loss tangent were measured by preparing an electrode pattern by depositing gold on a polyesterimide film cut into a circular shape with a diameter of 5 cm, and sandwiching it with a dielectric measurement electrode 16451B manufactured by Agilent Technologies, Inc. The measurement was performed at a relative humidity of 46% by connecting to a high-precision LCR meter 4285A manufactured by Technology One.
  • polyesterimide film was vacuum-dried at 50 ° C for 24 hours, immersed in water at 25 ° C for 24 hours, and calculated as an increase in weight after wiping off excess water.
  • the Young's modulus, breaking strength and breaking elongation of the polyesterimide film were determined by performing a tensile test on a 30 mm ⁇ 3 mm test piece using Tensilon manufactured by Toyo Baldwin Co. at a tensile speed of 8 mmZ.
  • the reaction solution was concentrated by an evaporator and dropped into water to obtain a precipitate.
  • the ring is partially hydrolyzed and the ring is opened.
  • the crude product obtained for ring closing is vacuum-dried at 200 ° C for 24 hours. It was recrystallized from (volume ratio 8Z2). The crystals separated by filtration were further dried in vacuum at 200 ° C. for 24 hours. From the infrared absorption spectrum (FIG. 1), it was confirmed that the target tetracarboxylic dianhydride was obtained, and that the thermal ring closure was completely performed.
  • the polyesterimide precursor solution did not precipitate or gel at all even when left at room temperature and 20 ° C for one month, and showed extremely high solution storage stability.
  • the intrinsic viscosity of the polyesterimide precursor measured with an Ostwald viscometer in N, N-dimethylacetamide at 30 ° C. at a concentration of 0.5% by weight was 1.12 dLZg.
  • polyesterimide precursor solution was applied to a glass substrate, and dried at 60 ° C for 2 hours.
  • the resulting polyesterimide precursor film was thermally imidized on the substrate at 250 ° C under reduced pressure for 2 hours. After that, the substrate force was removed to remove residual stress, and heat treatment was further performed at 350 ° C for 1 hour to obtain a transparent polyesterimide film having a thickness of 20 m.
  • the polyesterimide film did not break even in the 180 ° bending test, and showed toughness.
  • the polymer did not show any solubility in any organic solvent.
  • this polyesterimide film As a result of dynamic viscoelasticity measurement of this polyesterimide film, no clear glass transition point (determined from the loss peak in the dynamic viscoelasticity curve) was observed, and a force showing no thermoplasticity was observed. . This shows that this polyesterimide film is extremely high and has dimensional stability.
  • the dielectric constant estimated from the average refractive index is 3.26, a typical wholly aromatic low thermal expansion polyesterimide composed of 3,3 ', 4,4'-biphenyltetracarboxylic dianhydride and ⁇ -phenylenediamine. It was lower than the dielectric constant (3.5). This result is the effect of introducing an ester group into the polyesterimide skeleton.
  • the 5% weight loss temperature was 470 ° C in nitrogen and 463 ° C in air.
  • this Polyester Luimide exhibited a very low coefficient of linear thermal expansion, excellent dimensional stability, high thermal stability, and sufficient film toughness.
  • the infrared absorption spectra of the obtained polyesterimide precursor film and polyesterimide film are shown in FIGS. 3 and 4, respectively.
  • the polyesterimide precursor solution was applied to a glass substrate, and dried at 60 ° C for 2 hours.
  • a polyesterimide precursor film obtained was thermally imidized on the substrate at 250 ° C under reduced pressure for 2 hours. After that, the substrate force was removed to remove residual stress, and heat treatment was further performed at 350 ° C for 1 hour to obtain a transparent polyesterimide film having a thickness of 20 m.
  • the polyesterimide film did not break even in the 180 ° bending test, and showed toughness.
  • the polymer did not show any solubility in any organic solvent.
  • the dielectric constant estimated from the average refractive index is 3.22, a semi-aromatic low thermal expansion polyester which has 3,3 ', 4,4'-biphenyltetracarboxylic dianhydride and 1,4-cyclohexanediamine. Comparable with the dielectric constant of imide (3.15) Value.
  • the 5% weight loss temperature was 481 ° C in nitrogen and 463 ° C in air.
  • the polyesterimide exhibited a coefficient of linear thermal expansion as low as silicon, excellent dimensional stability, high thermal stability, and sufficient film toughness.
  • the infrared absorption spectra of the obtained polyesterimide precursor film and polyesterimide film are shown in FIGS. 5 and 6, respectively.
  • polymerization was conducted from 2,2′bis (trifluoromethyl) benzidine and the tetracarboxylic dianhydride described in Example 2 to obtain a transparent, uniform and viscous polyesterimide precursor. A body solution was obtained.
  • the polyesterimide precursor solution did not precipitate or gel at all even when left at room temperature and 20 ° C for one month, and showed extremely high solution storage stability.
  • the intrinsic viscosity of the polyesterimide precursor measured with an Ostwald viscometer at 30 ° C. and 0.5% by weight in N, N-dimethylacetamide was 2.93 dLZg, which was an extremely high molecular weight substance.
  • This polyesterimide precursor solution was applied to a glass substrate, and dried at 60 ° C for 2 hours.
  • the resulting polyesterimide precursor film was thermally imidized on the substrate at 250 ° C under reduced pressure for 2 hours. After that, the substrate force was removed to remove residual stress, and heat treatment was further performed at 350 ° C for 1 hour to obtain a transparent polyesterimide film having a thickness of 20 m.
  • the polyesterimide film did not break even in the 180 ° bending test, and showed toughness.
  • the glass transition temperature was 360 ° C or higher.
  • the dielectric constant estimated from the average refractive index was relatively low at 2.99.
  • the 5% weight loss temperature was 487 ° C in nitrogen and 479 ° C in air.
  • FIGS. 7 and 8 show infrared absorption spectra of the obtained polyesterimide precursor film and polyesterimide film, respectively.
  • Example 6 According to the method described in Example 4, polymerization was carried out from trans 1,4-diaminocyclohexane and the tetracarboxylic dianhydride described in Example 2. Although a salt was formed in the early stage of the polymerization, the salt was not so strong and was gradually dissolved by stirring, and after 24 hours, a clear, uniform and viscous polyesterimide precursor solution was obtained. This polyesterimide precursor solution did not precipitate or gel at all even when left at room temperature and 20 ° C. for one month, and showed extremely high solution storage stability. The intrinsic viscosity of the polyesterimide precursor measured in an N, N-dimethylacetamide at 30 ° C. and a concentration of 0.5% by weight with an Ostwald viscometer was 0.52 dLZg. Casting and thermal imidation were performed according to the method described in Example 4 to obtain a polyesterimide film having high transparency.
  • Example 4 According to the method described in Example 4 except that N-methyl-2-pyrrolidone was used instead of N, N-dimethylacetamidoamide as the polymerization solvent, trans 1,4-diaminocyclohexane and described in Example 2 were used.
  • N-methyl-2-pyrrolidone was used instead of N, N-dimethylacetamidoamide as the polymerization solvent
  • trans 1,4-diaminocyclohexane and described in Example 2 were used.
  • the polyesterimide precursor solution did not precipitate or gel at all even when left at room temperature and 20 ° C for one month, and showed extremely high solution storage stability.
  • the intrinsic viscosity of the polyester imide precursor measured with an Ostwald viscometer at 30 ° C. and 0.5% by weight in N, N dimethylacetamide was 1.14 dLZg, which was a high molecular weight product.
  • polyesterimide precursor solution was applied to a glass substrate and dried at 60 ° C for 2 hours.
  • the obtained polyesterimide precursor film was placed on the substrate at 250 ° C under reduced pressure for 1 hour and further at 300 ° C. After performing thermal imidation for 1 hour, the substrate was peeled off to remove residual stress, and heat treatment was further performed at 350 ° C for 1 hour to obtain a highly transparent polyesterimide film having a thickness of 20 m.
  • polyesterimide film did not break even in the 180 ° bending test, and showed toughness.
  • the 5% weight loss temperature was 471 ° C in nitrogen and 428 ° C in air.
  • the polyesterimide exhibited a low coefficient of linear thermal expansion near copper substrates, a high glass transition temperature, a very high Young's modulus, a relatively low dielectric constant, high thermal stability, and good film toughness.
  • polymerization was carried out using 4,4 ′ diaminobenzalide and the tetracarboxylic dianhydride described in Example 2 to obtain a transparent, uniform and viscous polyester imid. A precursor solution was obtained.
  • polyesterimide precursor solution did not precipitate or gel at all even when left at room temperature and 20 ° C for one month, and showed extremely high solution storage stability.
  • the intrinsic viscosity of the polyesterimide precursor measured with an Ostwald viscometer at 30 ° C. and 0.5% by weight in N, N-dimethylacetamide was 2.37 dLZg, which was an extremely high molecular weight substance.
  • polyesterimide precursor solution was applied to a glass substrate and dried at 60 ° C for 2 hours.
  • the obtained polyesterimide precursor film was placed on the substrate at 250 ° C under reduced pressure for 1 hour and further at 300 ° C. After performing thermal imidation for 1 hour, the substrate was peeled off to remove residual stress, and heat treatment was further performed at 350 ° C. for 1 hour to obtain a transparent polyesterimide film having a thickness of 20 m.
  • polyesterimide film did not break even in the 180 ° bending test, and showed toughness.
  • polyesterimide film has extremely high dimensional stability.
  • the dielectric constant estimated from the average refractive index was 3.26, and the water absorption was 2.06%.
  • the 5% weight loss temperature was 480 ° C in nitrogen and 470 ° C in air.
  • the metal exhibited a very low coefficient of linear thermal expansion, high glass transition temperature, relatively low dielectric constant, high thermal stability, and good film toughness.
  • 4-Aminobenzoic acid 4'-aminofurol (APAB) lOmmol is placed in a well-dried closed reaction vessel with a stirrer, dissolved in N, N-dimethylacetamide sufficiently dehydrated with molecular sieves 4A, and then dissolved in this solution. Then, 10 mmol of the tetracarboxylic dianhydride powder described in Example 2 was gradually dried. The mixture was stirred at room temperature for 48 hours while appropriately diluting with the same solvent to obtain a transparent, uniform and viscous polyesterimide precursor solution.
  • APAB 4-Aminobenzoic acid 4'-aminofurol
  • polyesterimide precursor solution did not precipitate or gel at all even when left at room temperature and 20 ° C. for one month, and showed extremely high solution storage stability.
  • the intrinsic viscosity of the polyesterimide precursor measured in an N, N-dimethylacetamide at 30 ° C. and a concentration of 0.5% by weight with an Ostwald viscometer was 2.81 dLZg, which was an extremely high polymer.
  • the polyesterimide precursor solution was applied to a glass substrate and dried at 60 ° C. for 1 hour.
  • the polyesterimide precursor film obtained was dried on the substrate at 250 ° C. under reduced pressure for 1 hour and further at 300 ° C.
  • a final heat treatment was performed at 350 ° C for 1 hour to obtain a transparent polyesterimide film having a film thickness of 20 ⁇ m.
  • polyesterimide film did not break even in the 180 ° bending test, and showed toughness.
  • the dielectric constant measured at a frequency of 1 MHz with a high-precision LCR meter was 3.22, which was close to the dielectric constant 3.26 estimated from the average refractive index.
  • the dielectric loss tangent was 0.025, which was a relatively low value.
  • the Young's modulus was 7.1 lGPa and the breaking strength was 0.22 GPa, which was extremely high elasticity and high strength, and the breaking elongation was 11%.
  • the 5% weight loss temperature was 471 ° C in nitrogen and 452 ° C in air.
  • the polyesterimide has a relatively low dielectric constant and And a very low coefficient of linear thermal expansion comparable to that of a silicon substrate, a very high Young's modulus, and a very low water absorption, and had sufficient film toughness.
  • polyesterimide precursor solution did not precipitate or gel at all even when left at room temperature and 20 ° C. for one month, and showed extremely high solution storage stability.
  • the intrinsic viscosity of the polyesterimide precursor measured with an Ostwald viscometer at 30 ° C. and 0.5% by weight in N, N-dimethylacetamide was 1.08 dLZg, which was a high polymer.
  • the polyesterimide precursor solution was applied to a glass substrate, and dried at 60 ° C for 1 hour.
  • the resulting polyesterimide precursor film was placed on the substrate at 250 ° C under reduced pressure for 1 hour and further at 300 ° C.
  • a final heat treatment was performed at 350 ° C for 1 hour to obtain a transparent polyesterimide film having a film thickness of 20 ⁇ m.
  • polyesterimide film did not break even in the 180 ° bending test, and showed toughness.
  • the glass transition point was 395 ° C.
  • the storage elastic modulus of the polyesterimide film was hardly reduced, indicating that the dimensional stability was high!
  • the water absorption was 0.66%, an extremely low value.
  • the dielectric constant estimated from the average refractive index was 3.20.
  • the Young's modulus was 6.28 GPa and the breaking strength was 0.295 GPa, which was extremely high elasticity and strength, and the breaking elongation was 36%.
  • the 5% weight loss temperature was 487 ° C in nitrogen and 485 ° C in air.
  • the present polyesterimide has a relatively low dielectric constant, a low linear thermal expansion coefficient almost equal to that of a copper substrate, and an extremely high dielectric constant. It exhibited a high glass transition temperature, a very high Young's modulus and a very low water absorption, and had sufficient film toughness.
  • An ester group-containing tetracarboxylic dianhydride was synthesized from 2,2′-biphenol and twice the molar amount of trimellitic anhydride chloride. This is the isomer of the tetracarboxylic dianhydride described in Example 1. From this acid dianhydride and p-phenylenediamine, a polyesterimide precursor was polymerized according to the methods shown in Examples 3 and 4. The intrinsic viscosity of the polyesterimide precursor measured in an N, N-dimethylacetamide at 30 ° C. and a concentration of 0.5% by weight with a Ostwald viscometer was 0.53 dLZg.
  • polyesterimide precursor solution was applied to a glass substrate, and dried at 60 ° C for 2 hours.
  • the obtained polyesterimide precursor film was thermally imidized at 300 ° C for 1 hour under reduced pressure on the substrate.
  • a transparent and tough polyesterimide film with a thickness of 20 m was obtained.
  • the linear thermal expansion coefficient of this polyesterimide film was as high as 66 ppmZK, and the required characteristics according to the present invention were satisfied. This is because the benzene rings are greatly twisted due to steric hindrance that cannot be caused by the 2,2'-biphenyl bond force in the acid dianhydride and the S-para bond. This is because spontaneous in-plane orientation was hardly induced.
  • the polyesterimide of the present invention has a low dielectric constant, a low coefficient of linear thermal expansion, a high glass transition temperature, and a sufficient film toughness. In addition to these, it preferably has a low water absorption. Since they can be held together, as precision electronic materials, for example, electronic devices such as flexible printed wiring boards, cover materials (protective films) for electronic circuits on flexible printed wiring boards, protective films for semiconductor devices, or interlayer insulating films for integrated circuits, In particular, it is suitable for use on flexible printed wiring boards.
  • the polyesterimide film of the present invention is laminated with a laminate, for example, amorphous silicon, by utilizing an extremely low linear thermal expansion coefficient comparable to that of a copper substrate or a silicon substrate as described in Example 410. It is also useful to use it as a base film for solar cells.

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Abstract

A practically useful polyesterimide which has a low permittivity, low coefficient of linear thermal expansion, and high glass transition temperature and has film toughness sufficient in flexible printed wiring boards; a precursor for the polyesterimide; and a process for producing these. The polyesterimide is characterized by containing repeating units represented by the formula (2): wherein A and B each independently represents a divalent aromatic or alicyclic group or a combination of these, provided that in each of A and B, the two bonds linked to the adjacent atoms are in a para arrangement or an arrangement equivalent thereto.

Description

明 細 書  Specification
低線熱膨張係数を有するポリエステルイミドとその前駆体  Polyesterimide having low coefficient of linear thermal expansion and its precursor
技術分野  Technical field
[0001] 本発明は低誘電率、低線熱膨張係数、高ガラス転移温度を有し、且つフレキシブ ルプリント配線基板用途として十分な膜靭性を併せ持つ、実用上有益なポリエステル イミドとその前駆体、およびそれらの製造方法に関する。  The present invention relates to a practically useful polyester imide and a precursor thereof, which have a low dielectric constant, a low coefficient of linear thermal expansion, a high glass transition temperature, and a sufficient film toughness for use in a flexible printed wiring board. And their manufacturing methods.
背景技術  Background art
[0002] ポリイミドは優れた耐熱性のみならず、耐薬品性、耐放射線性、電気絶縁性、優れ た機械的性質などの特性を併せ持つことから、フレキシブルプリント配線回路用基板 、テープオートメーションボンディング用基材、半導体素子の保護膜、集積回路の層 間絶縁膜等として、様々な電子デバイスに現在広く利用されている。  [0002] Polyimide has not only excellent heat resistance but also properties such as chemical resistance, radiation resistance, electrical insulation, and excellent mechanical properties. Currently, it is widely used in various electronic devices as materials, protective films for semiconductor elements, inter-layer insulating films for integrated circuits, and the like.
[0003] 一般にポリイミドは、無水ピロメリット酸等の芳香族テトラカルボン酸二無水物とジァ ミノジフエ-ルエーテル等の芳香族ジァミンとをジメチルァセトアミド等の非プロトン性 極性有機溶媒中で等モル反応させて得られる高重合度のポリイミド前駆体を、膜など に成形し加熱硬化して得られる。  [0003] In general, polyimide is prepared by equimolarly dissolving an aromatic tetracarboxylic dianhydride such as pyromellitic anhydride and an aromatic diamine such as diaminodiphenyl ether in an aprotic polar organic solvent such as dimethylacetamide. A polyimide precursor having a high degree of polymerization obtained by the reaction is formed into a film or the like and cured by heating.
[0004] し力しながらポリイミドの耐熱性を保持するためには、分子設計上、骨格構造を剛直 にせざるを得ず、結果として多くのポリイミドは有機溶媒に不溶で、ガラス転移温度以 上でも溶融しないため、ポリイミドそのものを成型カ卩ェすることは通常容易ではない。  [0004] In order to maintain the heat resistance of polyimide while applying force, the skeletal structure must be rigid in molecular design, and as a result, many polyimides are insoluble in organic solvents and even at glass transition temperatures or higher. Since it does not melt, it is usually not easy to mold the polyimide itself.
[0005] 従って通常、ポリイミド膜の形成等に際しては、アミド系有機溶媒に高い溶解性を示 すポリイミド前駆体を経由する方法が用いられる。具体的にはポリイミド前駆体の非プ 口トン性有機溶媒溶液を金属基板上に塗布、乾燥後、 250°Cないし 350°Cで加熱脱 水閉環 (イミド化)反応せしめることでポリイミド膜を形成する。  [0005] Therefore, when forming a polyimide film or the like, usually, a method is used in which a polyimide precursor having high solubility in an amide-based organic solvent is used. Specifically, a polyimide precursor is coated on a metal substrate with a non-tonic organic solvent solution, dried, and heated at 250 ° C to 350 ° C for dehydration ring closure (imidization) to form a polyimide film. I do.
[0006] ポリイミド Z金属基板積層体を前述のようなイミドィヒ温度力 室温へ冷却する過程で 発生する熱応力は、しばしばカーリング、膜の剥離、割れ等の深刻な問題を引き起こ す。最近では電子回路の高密度化に伴い、多層配線基板が採用されるようになって きたが、たとえ膜の剥離や割れにまで至らなくても多層基板における応力の残留は デバイスの信頼性を著しく低下させる。 [0007] イミドィ匕工程で発生する応力は、金属基板とポリイミド膜との間の線熱膨張係数の 差が大き 、ほど、またイミドィ匕温度が高 、ほど増加する。 [0006] The thermal stress generated during the process of cooling the polyimide Z metal substrate laminate to the above-described temperature of the imidig temperature to room temperature often causes serious problems such as curling, film peeling, and cracking. Recently, with the increase in the density of electronic circuits, multilayer wiring boards have been adopted.However, even if the film does not peel or crack, residual stress on the multilayer board significantly increases device reliability. Lower. [0007] The stress generated in the imidani process increases as the difference in linear thermal expansion coefficient between the metal substrate and the polyimide film increases, and as the imidani temperature increases.
[0008] 熱応力低減の方策として、ポリイミドの低熱膨張ィ匕が挙げられる。殆どのポリイミドで は線熱膨張係数が 40— 90ppmZKの範囲にあり、金属基板例えば銅の線熱膨張係 数 17ppm/Kよりもはるかに大きいため、銅の値に近い、およそ 20ppm/K以下を示 す低熱膨張性ポリイミドの研究開発が行われて ヽる。  [0008] As a measure for reducing the thermal stress, there is a method of reducing the thermal expansion of polyimide. Most polyimides have a linear thermal expansion coefficient in the range of 40 to 90 ppm ZK, which is much higher than the linear thermal expansion coefficient of metal substrates such as copper, 17 ppm / K. Research and development on the low thermal expansion polyimide shown below is underway.
[0009] ポリイミドの低熱膨張ィ匕には一般に、その主鎖構造が直線的でし力も内部回転が束 縛され、剛直であることが必要条件であると報告されている(例えば、非特許文献 1参 照。;)。無水ピロメリット酸とジァミノジフエ二ルエーテルより得られるポリイミドは主鎖中 に存在するエーテル結合により高い膜靭性を示すが、線熱膨張係数は 40— 50ppm ZKと高ぐ低熱膨張特性を示さない。  [0009] It is generally reported that the low thermal expansion of polyimide is a necessary condition that its main chain structure is linear, its internal rotation is restricted, and its rigidity is rigid (for example, see Non-Patent Document See 1.)). The polyimide obtained from pyromellitic anhydride and diaminodiphenyl ether exhibits high film toughness due to the ether bond present in the main chain, but does not exhibit a low linear thermal expansion coefficient as high as 40 to 50 ppm ZK.
[0010] 現在実用的な低熱膨張性ポリイミド材料としては 3, 3' , 4, 4' ービフエニルテトラ カルボン酸二無水物とパラフエ-レンジアミンカも形成されるポリイミドが最もよく知ら れている。このポリイミド膜は、膜厚や作製条件にもよるが、 5— lOppmZKと非常に 低い線熱膨張係数を示すことが知られている (例えば、非特許文献 2、非特許文献 3 参照。)。  [0010] Among the practically available low thermal expansion polyimide materials, polyimides, which can also form 3,3 ', 4,4'-biphenyltetracarboxylic dianhydride and paraphenylenediamine, are best known. It is known that this polyimide film has a very low linear thermal expansion coefficient of 5-lOppmZK, depending on the film thickness and manufacturing conditions (for example, see Non-Patent Documents 2 and 3).
[0011] 一方、近年マイクロプロセッサーの演算速度の高速ィ匕ゃクロック信号の立ち上がり 時間の短縮ィ匕が情報処理 ·通信分野で重要な課題になってきている力 そのために は絶縁膜として使用されるポリイミド膜の低誘電率ィ匕の要求が高まっている。また電 気配線長の短縮のための高密度配線および多層基板ィ匕にとつても、絶縁膜の誘電 率が低いほど絶縁層を薄くできる等の点で有利である。  On the other hand, in recent years, the operation speed of the microprocessor has been increasing, and the shortening of the rise time of the clock signal has become an important issue in the information processing and communication fields. For this reason, it is used as an insulating film. There is an increasing demand for a polyimide film having a low dielectric constant. In addition, high-density wiring and multilayer substrate fabrication for shortening the electrical wiring length are also advantageous in that the lower the dielectric constant of the insulating film, the thinner the insulating layer can be.
[0012] 3, 3' , 4, 4' —ビフエ-ルテトラカルボン酸二無水物とパラフエ-レンジァミンから 得られる上記のポリイミドは優れた低熱膨張特性を示すが、誘電率は 3. 5と高ぐ誘 電率の点では不十分である。  [0012] The above polyimide obtained from 3,3 ', 4,4'-biphenyltetracarboxylic dianhydride and paraphenylenediamine exhibits excellent low thermal expansion properties, but has a high dielectric constant of 3.5. Insufficient in terms of electrical conductivity.
[0013] ポリイミドの低誘電率ィ匕には骨格中へのフッ素置換基の導入が有効である(例えば 、非特許文献 4参照。 ) o例えば 2, 2 ビス(3, 4—ジカルボキシフエ-ル)へキサフル ォロプロパン酸二無水物と 2, 2' ビス(トリフルォロメチル)ベンジジンから得られる フッ素化ポリイミド膜は、平均屈折率から見積もられた誘電率が 2. 65と非常に低い 値を示す (例えば、非特許文献 5参照。 )0 [0013] Introduction of a fluorine substituent into the skeleton is effective for lowering the dielectric constant of polyimide (for example, see Non-patent Document 4.) o For example, 2,2 bis (3,4-dicarboxyphene) F) The fluorinated polyimide film obtained from hexafluoropropanoic acid dianhydride and 2,2'bis (trifluoromethyl) benzidine has a very low dielectric constant of 2.65 estimated from the average refractive index. Indicating a value (e.g., Non-Patent Document 5 reference.) 0
[0014] また芳香族単位を脂環式単位に置き換えて π電子を減少することも低誘電率化〖こ 有効な手段である(例えば、非特許文献 6参照。 )0例えば、 1, 2, 3, 4ーシクロブタン テトラカルボン酸二無水物と 4, 4' ーメチレンビス(シクロへキシルァミン)から得られ る非芳香族ポリイミド膜は、平均屈折率から見積もられた誘電率が 2. 6と非常に低い 値を示す (例えば、非特許文献 7参照。 )0 [0014] It is also a low dielectric constant 〖this effective means of reducing the π electrons replacing the aromatic units cycloaliphatic units (e.g., Non-Patent Document 6 reference.) 0 For example, 1, 2, Non-aromatic polyimide film obtained from 3,4-cyclobutanetetracarboxylic dianhydride and 4,4'-methylenebis (cyclohexylamine) has a very low dielectric constant of 2.6, which is estimated from the average refractive index. indicating a value (e.g., non-Patent Document 7 reference.) 0
[0015] しかしながら、低誘電率 (一時的な目標値として 3. 3以下)と低熱膨張係数 (一時的 な目標値として 30ppmZK以下)を同時に有し、且つハンダ耐熱性を保持して 、るポ リイミドを得ることは分子設計上容易ではな!ヽ。ポリイミド以外の低誘電率高分子材料 や無機材料も検討されているが、誘電率、線熱膨張係数、耐熱性および膜靭性の点 で要求特性が十分に満たされて 、な 、のが現状である。  However, a low dielectric constant (a temporary target value of 3.3 or less as a temporary value) and a low coefficient of thermal expansion (30 ppm ZK or less as a temporary target value) at the same time, while maintaining solder heat resistance. Obtaining imide is not easy in molecular design! ヽ. Polymer materials and inorganic materials having a low dielectric constant other than polyimide are also being studied, but the required characteristics are sufficiently satisfied in terms of dielectric constant, coefficient of linear thermal expansion, heat resistance, and film toughness. is there.
[0016] 一般にポリイミド構造中へのフッ素基の導入は分子間相互作用を弱め、低熱膨張 化の要因であるイミドィ匕時の自発的分子配向を妨害する傾向をもたらす。カロえてフッ 素基の過度の導入はコスト面でも不利である。前述のように 2, 2 ビス(3, 4—ジカル ボキシフエ-ル)へキサフルォロプロパン酸二無水物と 2, 2' ビス(トリフルォロメチ ル)ベンジジン力 得られる代表的なフッ素化ポリイミド膜は、低誘電率を示すが、線 熱膨張係数は 64ppmZKと非常に高ぐ低熱膨張特性を示さない (例えば、非特許 文献 5参照。)。  In general, the introduction of a fluorine group into a polyimide structure weakens the intermolecular interaction, and tends to hinder the spontaneous molecular orientation during imidization, which is a cause of low thermal expansion. Excessive introduction of fluorine radicals is disadvantageous in terms of cost. As described above, 2,2 bis (3,4-dicarboxyphenol) hexafluoropropanoic acid dianhydride and 2,2'bis (trifluoromethyl) benzidine are the typical fluorinated polyimide films obtained. Although it has a low dielectric constant, it has a very high linear thermal expansion coefficient of 64 ppm ZK and does not exhibit low thermal expansion characteristics (for example, see Non-Patent Document 5).
[0017] 前述のようにポリイミド骨格への脂環式単位の導入は π電子を減少させ、低誘電率 化に有効である。し力しながら脂環式単位の導入は一般にポリイミド主鎖骨格の直線 性および剛直性を低下させ、線熱膨張係数の増大を引き起こすという問題がある。 例えば 4, 4' ーメチレンビス(シクロへキシルァミン)の如き屈曲性の高い脂環式ジァ ミンを用いた場合、各種酸二無水物と容易に重合が進行し、高重合度のポリイミド前 駆体を生成するが、閉環反応により得られるポリイミド膜は低熱膨張特性を示さな 、。  As described above, introduction of an alicyclic unit into the polyimide skeleton reduces π electrons, and is effective for lowering the dielectric constant. However, the introduction of an alicyclic unit generally has a problem in that the linearity and rigidity of the polyimide main chain skeleton are reduced and the coefficient of linear thermal expansion is increased. For example, when a highly flexible alicyclic diamine such as 4,4'-methylenebis (cyclohexylamine) is used, polymerization proceeds easily with various acid dianhydrides, and a polyimide precursor having a high degree of polymerization is produced. Although produced, the polyimide film obtained by the ring closure reaction does not exhibit low thermal expansion characteristics.
[0018] 例えば 1, 2, 3, 4ーシクロブタンテトラカルボン酸二無水物と 4, 4' ーメチレンビス( シクロへキシルァミン)力 得られるポリイミド膜は前述のように低誘電率を示すが、線 熱膨張係数は 70ppmZKと非常に高ぐ低熱膨張特性を示さない。  For example, 1,2,3,4-cyclobutanetetracarboxylic dianhydride and 4,4′-methylenebis (cyclohexylamine) force The obtained polyimide film has a low dielectric constant as described above, but has a linear thermal expansion. The coefficient is as high as 70 ppm ZK, and does not show low thermal expansion characteristics.
[0019] 一方、低誘電率を保持しつつ、低熱膨張特性発現を目論み、上記屈曲性脂環式 ジァミンの代わりに剛直な脂環式ジァミンであるトランス 1, 4ーシクロへキサンジアミ ンを用いると、ポリイミド前駆体の重合時に強固な塩形成が起り、しばしば重合反応 が進行しな 、と 、う問題が生じる。 [0019] On the other hand, while aiming to exhibit low thermal expansion characteristics while maintaining a low dielectric constant, When trans-1,4-cyclohexanediamine, which is a rigid alicyclic diamine, is used instead of diamine, a strong salt is formed during the polymerization of the polyimide precursor, and the polymerization reaction often does not proceed. Occurs.
[0020] 例えば、 1, 2, 3, 4ーシクロブタンテトラカルボン酸二無水物と、トランス 1, 4ーシク 口へキサンジァミン力も成るポリイミドは剛直で比較的直線状の骨格を有するため、低 誘電率に加えて低熱膨張特性の発現が期待される。しかしながら実際には上記の理 由によりポリイミド前駆体を重合することは困難である。 [0020] For example, 1,2,3,4-cyclobutanetetracarboxylic dianhydride and polyimide having trans 1,4-sixoxyhexandiamine power have a rigid and relatively linear skeleton, and therefore have a low dielectric constant. In addition, the development of low thermal expansion characteristics is expected. However, in practice, it is difficult to polymerize a polyimide precursor for the above reasons.
[0021] これに対して、 1, 2, 3, 4ーシクロブタンテトラカルボン酸二無水物と 2, 2' ビス(ト リフルォロメチル)ベンジジンとのポリイミド前駆体重合反応では、上記のような塩形成 は全く起こらず、容易に高分子量体を得ることができる。更に、そのポリイミド膜は低 誘電率(2. 66)、低熱膨張係数(21ppmZK)および高ガラス転移温度(356°C)を同 時に満たす (例えば、非特許文献 5参照。 ) 0 [0021] In contrast, in the polyimide precursor polymerization reaction of 1,2,3,4-cyclobutanetetracarboxylic dianhydride with 2,2'bis (trifluoromethyl) benzidine, the above-mentioned salt formation is suppressed. It does not occur at all and a high molecular weight product can be easily obtained. Furthermore, the polyimide film has a low dielectric constant (2.66), a low thermal expansion coefficient (21PpmZK) and high glass transition temperature (356 ° C) satisfying simultaneously (e.g., Non-Patent Document 5 reference.) 0
[0022] し力しながらこのポリイミド膜の破断伸びは 3%程度と低ぐ膜靭性があまり高くない ことが唯一の欠点である。これは低熱膨張係数発現に不可欠な構造因子、即ちポリ イミド鎖を直線的で剛直な構造にした結果、ポリマー鎖同士の絡み合いが乏しくなつ たことが主な原因である。このことは低熱膨張性ポリイミドに常に付随する問題であり 、低熱膨張係数、低誘電率およびフレキシブルプリント配線基板に適用できるほど十 分な膜靭性を全て満足するポリイミドはこれまで知れて 、な 、。  The only drawback is that the elongation at break of this polyimide film is as low as about 3%, but the film toughness is not so high. This is mainly due to the fact that the structure of the polyimide chain, which is indispensable for the development of a low coefficient of thermal expansion, has a linear and rigid structure, resulting in poor entanglement between polymer chains. This is a problem that is always associated with low thermal expansion polyimides. Polyimides that have a low coefficient of thermal expansion, a low dielectric constant, and a film toughness that is all sufficient to be applied to flexible printed wiring boards have been known.
[0023] 非特許文献 1: Polymer, 28, 2282 (1987)  Non-Patent Document 1: Polymer, 28, 2282 (1987)
非特許文献 2 : Macromolecules, 29, 7897 (1996)  Non-Patent Document 2: Macromolecules, 29, 7897 (1996)
特干文献 3 : Polyimiaes: Fundamentals and Applications, Marcel Dekker, New York, 1996, p207)  (* 3): Polyimiaes: Fundamentals and Applications, Marcel Dekker, New York, 1996, p207)
非特許文献 4 : Macromolecules, 24, 5001 (1991)  Non-Patent Document 4: Macromolecules, 24, 5001 (1991)
非特許文献 5 : High Performance Polymers, 15, 47 (2003)  Non-Patent Document 5: High Performance Polymers, 15, 47 (2003)
非特許文献 6 : Macromolecules, 32, 4933 (1999)  Non-Patent Document 6: Macromolecules, 32, 4933 (1999)
非特許文献 7 : Reactive and Functional Polymers, 30, 61 (1996)  Non-Patent Document 7: Reactive and Functional Polymers, 30, 61 (1996)
発明の開示  Disclosure of the invention
発明が解決しょうとする課題 [0024] 本発明は低誘電率、低線熱膨張係数、高ガラス転移温度を有し、且つフレキシブ ルプリント配線基板用途として十分な膜靭性を併せ持つ、実用上有益なポリエステル イミドとその前駆体、およびそれらの製造方法を提供するものである。 Problems the invention is trying to solve The present invention provides a practically useful polyester imide and a precursor thereof, which has a low dielectric constant, a low coefficient of linear thermal expansion, a high glass transition temperature, and also has sufficient film toughness for flexible printed wiring board applications. And a method for producing them.
課題を解決するための手段  Means for solving the problem
[0025] 以上の問題を鑑み、鋭意研究を積み重ねた結果、式(2)で表されるポリエステルィ ミドが上記の要求特性を満たすことを見出し、本発明を完成するに至った。 In view of the above problems, as a result of intensive studies, it has been found that the polyesterimide represented by the formula (2) satisfies the above-mentioned required characteristics, and the present invention has been completed.
[0026] すなわち、本発明は、以下に示すものである。 That is, the present invention is as follows.
1)式 (1) :
Figure imgf000006_0001
1) Equation (1):
Figure imgf000006_0001
[0028] 式中、 Where:
Aおよび Bは、独立して、二価の芳香族基、脂環式基またはそれらの組合せである 力 但し二価の基の結合位置関係は、全てパラ位またはそれに相当する関係にある で表される繰り返し単位を含むことを特徴とするポリエステルイミド前駆体。  A and B are each independently a divalent aromatic group, an alicyclic group or a combination thereof. However, the bonding positions of the divalent groups are all in the para-position or a relation equivalent thereto. A polyesterimide precursor comprising a repeating unit represented by the formula:
2) Aが、
Figure imgf000006_0002
2) A is
Figure imgf000006_0002
[0030] で表される 2価の芳香族基あるいは脂環式基より選択され、 Bが、 [0030] is selected from a divalent aromatic group or an alicyclic group represented by
Figure imgf000007_0001
Figure imgf000007_0001
[0032] で表される二価の芳香族基あるいは脂環式基より選択される力 但し、 Aおよび Bに おけるシクロへキサン環の立体構造は、椅子型トランス配置である、上記 1)に記載の ポリエステルイミド前駆体。 [0032] A force selected from a divalent aromatic group or an alicyclic group represented by the following formula. However, the steric structure of the cyclohexane ring in A and B is the chair-type trans configuration described in 1) above. The polyesterimide precursor according to the above.
3) N, N—ジメチルァセトアミド中、 30°C、 0. 5重量%の濃度における固有粘度が、 0 . 3dLZg以上である、上記 1)または 2)に記載のポリエステルイミド前駆体。  3) The polyesterimide precursor according to the above 1) or 2), wherein an intrinsic viscosity in N, N-dimethylacetamide at 30 ° C. and a concentration of 0.5% by weight is 0.3 dLZg or more.
4)上記 1)一 3) 、ずれか〖こ記載のポリエステルイミド前駆体を含む有機溶媒溶液。 4) An organic solvent solution containing the polyesterimide precursor described in 1) to 3) above.
5)式(2) :
Figure imgf000007_0002
式中、
5) Equation (2):
Figure imgf000007_0002
Where
Aおよび Bは、独立して、二価の芳香族基、脂環式基またはそれらの組合せである 力 但し二価の基の結合位置関係は、全てパラ位またはそれに相当する関係にある で表される繰り返し単位を含むことを特徴とするポリエステルイミド<  A and B are each independently a divalent aromatic group, an alicyclic group or a combination thereof. However, the bonding positions of the divalent groups are all in the para-position or a relation equivalent thereto. Polyester imide characterized by containing a repeating unit
6) Aが、  6) A is
[0035] [0035]
Figure imgf000007_0003
[0036] で表される 2価の芳香族基あるいは脂環式基より選択され、 Bが、
Figure imgf000007_0003
[0036] selected from a divalent aromatic group or an alicyclic group represented by
Figure imgf000008_0001
Figure imgf000008_0001
[0038] で表される二価の芳香族基あるいは脂環式基より選択される力 但し、 Aおよび Bに おけるシクロへキサン環の立体構造は、椅子型トランス配置である、上記 5)に記載の ポリエステルイミド。 [0038] A force selected from a divalent aromatic group or an alicyclic group represented by the formula: where the steric structure of the cyclohexane ring in A and B is a chair-type trans configuration, as described in 5) above. The polyesterimide as described.
7)ポリエステルイミド膜の製造方法であって、  7) A method for producing a polyesterimide film,
(i)上記 1)一 3)に記載のポリエステルイミド前駆体の有機溶媒溶液を調製し; (i) preparing an organic solvent solution of the polyesterimide precursor according to 1) to 3) above;
(ii) (i)で得られた溶液を、基板上に塗布、乾燥してポリエステルイミド前駆体膜を形 成し;そして (ii) applying the solution obtained in (i) on a substrate and drying to form a polyesterimide precursor film; and
(iii)該前駆体膜を加熱脱水環化反応させるか、もしくは脱水閉環試薬を用いて環化 反応させる  (iii) The precursor film is subjected to a thermal dehydration cyclization reaction or a cyclization reaction using a dehydration ring closure reagent
ことによりポリエステルイミド膜を製造する方法。  And producing a polyesterimide film.
8)上記 7)に記載の方法により得られる、ポリエステルイミド膜。  8) A polyesterimide film obtained by the method described in 7) above.
9) 3. 3よりも低い誘電率、 30ppmZKよりも低い線熱膨張係数、 300°C以上のガラス 転移温度および十分な靭性を併せ持つ、上記 8)に記載のポリエステルイミド膜。 9) The polyesterimide film according to 8) above, which has a dielectric constant lower than 3.3, a linear thermal expansion coefficient lower than 30 ppm ZK, a glass transition temperature of 300 ° C or higher, and sufficient toughness.
10)上記 8)または 9)に記載のポリエステルイミド膜を含む、電子デバイス。 10) An electronic device comprising the polyesterimide film described in 8) or 9) above.
[0039] 一般に、ポリマーフィルムが十分な膜靭性を示すためには、ポリマー鎖同士の絡み 合いが必要であり、絡み合いの程度はポリマーの重合度の増加と共に増加する。ま た、 、くら高分子量であっても主鎖中に内部回転可能な屈曲結合を一切含んで 、な い場合、ポリマー鎖は絡み合うことができず、膜は脆弱になってしまう。ポリイミド骨格 へのエーテル結合の導入は膜靭性の向上に大きく寄与する力 その一方で、主鎖の 剛直性や直線性の低下を招き、低熱膨張特性発現を妨げる。 Generally, in order for a polymer film to exhibit sufficient film toughness, entanglement between polymer chains is necessary, and the degree of entanglement increases with an increase in the degree of polymerization of the polymer. Also, if the main chain does not include any internally rotatable bending bonds even if it has a high molecular weight, the polymer chains cannot be entangled and the membrane becomes fragile. Polyimide skeleton Introducing an ether bond into the polymer has a great effect on improving the film toughness. On the other hand, it reduces the rigidity and linearity of the main chain and hinders the development of low thermal expansion characteristics.
[0040] 低熱膨張特性と膜靭性を両立させるため、本発明ではエステル結合に着目した。  In order to achieve both low thermal expansion characteristics and film toughness, the present invention focused on ester bonds.
エステル結合はエーテル結合に比べて内部回転障壁が高ぐコンホーメンシヨン変 化が比較的妨げられており、且つ主鎖にある程度の柔軟さも付与しうると期待される  Ester bonds are relatively hindered from conformational changes, where the internal rotation barrier is higher than ether bonds, and are expected to provide some degree of flexibility to the main chain.
[0041] またエステル結合はアミド結合やイミド結合よりも単位体積当たりの分極率が低いた め、ポリイミドへのエステル結合の導入は低誘電率ィ匕にも有利である。一般にポリエ ステルがポリイミドゃポリアミドに比べて低 、吸水率を示す事実から考えて、エステル 基導入は誘電率を大きく左右する吸水率の低下にも寄与することが期待される。 [0041] Further, since the ester bond has a lower polarizability per unit volume than the amide bond or the imide bond, introduction of the ester bond into the polyimide is also advantageous for low dielectric constant. Generally, ester groups are expected to contribute to a decrease in water absorption, which largely affects the dielectric constant, in view of the fact that polyesters exhibit lower water absorption than polyimide / polyamide.
[0042] 本発明のポリエステルイミドの製造に使用されるテトラカルボン酸二無水物モノマー は、ヒドロキノンのような剛直性や直線性を付与するジオールとトリメリット酸無水物ク ロリドから容易に合成することができ、得られたモノマーも高純度である。しかも使用 する原料は安価に入手でき、ポリエステルイミドの製造コストの点でも有利である。 図面の簡単な説明  [0042] The tetracarboxylic dianhydride monomer used in the production of the polyesterimide of the present invention can be easily synthesized from a diol imparting rigidity or linearity such as hydroquinone and trimellitic anhydride chloride. And the resulting monomer is also of high purity. In addition, the raw materials used can be obtained at low cost, which is advantageous in terms of the production cost of polyesterimide. Brief Description of Drawings
[0043] [図 1]図 1は実施例 1に記載のエステル基含有テトラカルボン酸二無水物の赤外線吸 収スペクトルである。  FIG. 1 is an infrared absorption spectrum of the ester group-containing tetracarboxylic dianhydride described in Example 1.
[図 2]図 2は実施例 2に記載のエステル基含有テトラカルボン酸二無水物の赤外線吸 収スペクトルである。  FIG. 2 is an infrared absorption spectrum of the ester group-containing tetracarboxylic dianhydride described in Example 2.
[図 3]図 3は実施例 3に記載のポリエステルイミド前駆体膜の赤外線吸収スペクトルで ある。  FIG. 3 is an infrared absorption spectrum of the polyesterimide precursor film described in Example 3.
[図 4]図 4は実施例 3に記載のポリエステルイミド膜の赤外線吸収スペクトルである。  FIG. 4 is an infrared absorption spectrum of the polyesterimide film described in Example 3.
[図 5]図 5は実施例 4に記載のポリエステルイミド前駆体膜の赤外線吸収スペクトルで ある。  FIG. 5 is an infrared absorption spectrum of the polyesterimide precursor film described in Example 4.
[図 6]図 6は実施例 4に記載のポリエステルイミド膜の赤外線吸収スペクトルである。  FIG. 6 is an infrared absorption spectrum of the polyesterimide film described in Example 4.
[図 7]図 7は実施例 5に記載のポリエステルイミド前駆体膜の赤外線吸収スペクトルで ある。  FIG. 7 is an infrared absorption spectrum of the polyesterimide precursor film described in Example 5.
[図 8]図 8は実施例 5に記載のポリエステルイミド膜の赤外線吸収スペクトルである。 発明を実施するための最良の形態 FIG. 8 is an infrared absorption spectrum of the polyesterimide film described in Example 5. BEST MODE FOR CARRYING OUT THE INVENTION
[0044] 以下に本発明を詳細に説明する。  Hereinafter, the present invention will be described in detail.
[0045] 式(3)で表されるテトラカルボン酸二無水物モノマーの合成は以下のように行う。ま ずジオールを脱水済みのテトラヒドロフランや N, N—ジメチルホルムアミド等の有機溶 媒に溶解し、これに脱酸剤としてピリジンゃトリエチルァミン等の 3級ァミンを添加する 。この溶液へ、用いたジオールに対して 2倍モルのトリメリット酸無水物クロリドの溶液 を氷で冷却しながら徐々に滴下し、室温で 24時間攪拌して目的の式(3):
Figure imgf000010_0001
The synthesis of the tetracarboxylic dianhydride monomer represented by the formula (3) is performed as follows. First, a diol is dissolved in a dehydrated organic solvent such as tetrahydrofuran or N, N-dimethylformamide, and a tertiary amine such as pyridine / triethylamine is added as a deoxidizing agent. To this solution, a solution of trimellitic anhydride chloride in a molar amount twice as much as that of the diol used was gradually added dropwise while cooling with ice, and the mixture was stirred at room temperature for 24 hours to obtain the desired formula (3):
Figure imgf000010_0001
[0047] 式中、 Aは、二価の芳香族基、脂環式基またはそれらの組合せである力 但し二価 の基の結合位置関係は、全てパラ位またはそれに相当する関係にある、で表される テトラカルボン酸二無水物モノマーを得ることができる。反応終了後、上記反応溶液 中に含まれる 3級ァミンの塩酸塩を濾過により除去し、反応溶媒を減圧留去後、適当 な溶媒を用いて再結晶を繰返すことで重合に供することのできる高純度なエステル 基含有酸二無水物モノマーが得られる。 [0047] In the formula, A is a divalent aromatic group, an alicyclic group or a combination thereof, provided that the bonding positions of the divalent groups are all in the para-position or a relation equivalent thereto. The tetracarboxylic dianhydride monomer represented can be obtained. After completion of the reaction, the tertiary amine hydrochloride contained in the above reaction solution is removed by filtration, the reaction solvent is distilled off under reduced pressure, and recrystallization is repeated using an appropriate solvent to obtain a high-molecular-weight polymer that can be used for polymerization. A pure ester group-containing acid dianhydride monomer is obtained.
[0048] より厳密に塩酸塩成分を除去するには、生成物をクロ口ホルムや酢酸ェチル等に 溶解し、水と共に振とうして塩酸塩を抽出除去した後、溶媒を留去するか、または反 応溶液を大量の水中に滴下し、沈澱した生成物を洗浄する。これらの操作により酸 無水物基が一部加水分解を受けるので、これを真空中、 200°Cで熱閉環処理し、最 後に適当な溶媒より再結晶する。  [0048] To remove the hydrochloride component more strictly, the product is dissolved in chloroform and ethyl acetate, and the mixture is shaken with water to extract and remove the hydrochloride salt. Alternatively, drop the reaction solution into a large amount of water and wash the precipitated product. Since the anhydride groups are partially hydrolyzed by these operations, they are subjected to thermal ring closure at 200 ° C. in vacuum, and finally recrystallized from an appropriate solvent.
[0049] エステル基含有テトラカルボン酸二無水物モノマーの閉環処理は、無水酢酸等の 脱水剤に溶解し、これを加熱還流することでも行えるが、 目的物が着色する傾向があ るため、光学用途に使用する場合は熱閉環する方が好ましい。  [0049] Ring closure treatment of the ester group-containing tetracarboxylic dianhydride monomer can also be performed by dissolving in a dehydrating agent such as acetic anhydride and heating and refluxing it. When used for applications, it is preferable to thermally close the ring.
[0050] 本発明に係るポリエステルイミドの要求特性を満足するために好まし!/ヽジオールは 、 2つのヒドロキシ基が各々末端に存在する芳香族および Zまたは脂環式ジヒドロキ シ化合物である。但しこれらの化合物において、ヒドロキシ基、芳香族基および zま たは脂環式基のそれぞれの結合位置関係は、全てパラ位またはそれに相当する関 係にある。 [0050] Preferable to satisfy the required properties of the polyesterimide according to the present invention! / ヽ diol is an aromatic or Z or alicyclic dihydroxy compound having two hydroxy groups at each terminal. However, in these compounds, the bonding positions of the hydroxy group, the aromatic group, and the z or alicyclic group are all related to the para-position or a position corresponding thereto. In charge.
[0051] 本発明において「パラ位またはそれに相当する関係」とは、一方の結合位置に対し て、他方の結合位置が点対称または線対称にあるような関係を意味する。例えばべ ンゼン、シクロへキサンのような 6員環の場合は、 1, 4 を意味し、例えばナフタレン 環のような 10員環の場合は、 2, 6 若しくは 1, 5 を意味する。(なお、置換位置を表 す数字は、命名法上の優先順位に応じて場合により変動するが、両者の関係性は数 字とは無関係に保持される。 )本発明のジオールはパラ位またはそれに相当する関 係を有することにより、直線的で剛直な構造を付与している。  [0051] In the present invention, the "para position or a relation corresponding thereto" means a relation such that one bonding position is point-symmetric or line-symmetric with respect to the other bonding position. For example, a 6-membered ring such as benzene and cyclohexane means 1,4, and a 10-membered ring such as a naphthalene ring means 2,6 or 1,5. (Although the number representing the substitution position may vary depending on the precedence in the nomenclature, the relationship between the two is maintained irrespective of the number.) The diol of the present invention is in the para-position or By having a corresponding relationship, a straight and rigid structure is provided.
[0052] 好ましい芳香族ジヒドロキシィ匕合物は、具体的には、パラ位またはそれに相当する 関係にある 2つのヒドロキシル基を有する炭素数 6— 24個の単環式、縮合多環式の 炭化水素基であり、これらは場合により、直接または架橋員により相互に連結されて いてもよい(この場合、 2つのヒドロキシル基は各々末端に存在する)。ここで、架橋員 とは、原子数 1一 6個のスぺーサ一基であって、例えばアルキレン、 O NH—、力 ルボニル、スルフィエル、スルホ-ルまたはこれらの組合せであってよい。さらにこれ らは場合により、 1つ以上のハロゲン、ヒドロキシル、または炭素数 1一 4個のアルキル 、ハロゲン化アルキルもしくはアルコキシで置換されて 、てもよ 、。  [0052] Preferred aromatic dihydroxy conjugates include, specifically, monocyclic and condensed polycyclic carbons having 6 to 24 carbon atoms and having two hydroxyl groups in a para position or a relationship corresponding thereto. Hydrogen groups, which may optionally be interconnected directly or by a bridging member (in which case, the two hydroxyl groups are each terminally present). Here, the bridging member is a spacer group having 116 atoms, and may be, for example, alkylene, ONH—, carbonyl, sulfiel, sulfol, or a combination thereof. Further, they may be optionally substituted by one or more halogen, hydroxyl, or alkyl having 14 to 14 carbons, alkyl or alkoxy.
[0053] より好ましい芳香族ジヒドロキシィ匕合物としては、例えばヒドロキノン、 4, 4' ービフエ ノールまたは 4, A"ージヒドロキシーテルフエ-ルなどが挙げられる。  [0053] More preferable aromatic dihydroxy conjugates include, for example, hydroquinone, 4,4'-biphenol, and 4, A "-dihydroxy-terphenyl.
[0054] 好ましい脂環式ジヒドロキシィ匕合物は、具体的には、パラ位またはそれに相当する 関係にある 2つのヒドロキシル基を有する炭素数 6— 24個の単環式、多環式の炭化 水素基であり、これらは場合により、直接または架橋員により相互に連結されていても よい (この場合、 2つのヒドロキシル基は各々末端に存在する)。ここで、架橋員とは、 原子数 1一 6個のスぺーサ一基であって、例えばアルキレン、 O NH—、カルボ -ル、スルフィエル、スルホ-ルまたはこれらの組合せであってよい。さらにこれらは 場合により、 1つ以上のハロゲン、ヒドロキシル、または炭素数 1一 4個のアルキル、ハ ロゲン化アルキルもしくはアルコキシで置換されていてもよぐおよび/または 1っ以 上の O NH—、カルボ-ル、スルフィエル、またはスルホ -ルで中断されていて ちょい。 [0055] より好ましい脂環式ジヒドロキシィ匕合物としては、例えばトランス 1, 4ーシクロへキサ ンジオールなどが挙げられる。 Preferred alicyclic dihydroxy conjugates are, specifically, monocyclic or polycyclic carbons having 6 to 24 carbon atoms having two hydroxyl groups in para-position or a relationship corresponding thereto. Hydrogen groups, which may optionally be interconnected directly or by a bridging member (in which case, the two hydroxyl groups are each terminally present). Here, the bridging member is a spacer group having 116 atoms, and may be, for example, alkylene, ONH—, carbol, sulfiel, sulfol, or a combination thereof. In addition, they may be optionally substituted by one or more halogen, hydroxyl, or alkyl having 1 to 14 carbon atoms, alkyl or alkoxy, and / or one or more of O NH—, It is interrupted by Carbol, Sulfiel, or Sulfol. [0055] More preferred alicyclic dihydroxy conjugates include, for example, trans 1,4-cyclohexanediol.
[0056] 続いてポリエステルイミド前駆体の重合は以下のように行う。まずジァミン成分を重 合溶媒に溶解し、これに式(3)で表されるテトラカルボン酸二無水物粉末を徐々に添 加し、メカ-カルスターラーを用い、 10— 40°C、好ましくは室温で、 0. 5— 48時間攪 拌する。この際、モノマー濃度は 5— 40重量%、好ましくは 10— 35重量%である。こ のモノマー濃度範囲で重合を行うことにより均一で高重合度のポリエステルイミド前駆 体溶液を得ることができる。  Subsequently, the polymerization of the polyesterimide precursor is performed as follows. First, a diamine component is dissolved in a polymerization solvent, and a tetracarboxylic dianhydride powder represented by the formula (3) is gradually added thereto. Using a mechanical stirrer, 10 to 40 ° C, preferably Stir at room temperature for 0.5-48 hours. At this time, the monomer concentration is 5 to 40% by weight, preferably 10 to 35% by weight. By performing polymerization in this monomer concentration range, a uniform and high polymerization degree polyesterimide precursor solution can be obtained.
[0057] 本発明のポリエステルイミド前駆体は、 N, N—ジメチルァセトアミド中、 30°C、 0. 5 重量%の濃度で測定した固有粘度が 0. 3dL/g以上であり、ポリエステルイミドの所望 の用途に応じて、 0. 3-6. OdL/gの範囲であるのが好ましい。  The polyesterimide precursor of the present invention has an intrinsic viscosity of 0.3 dL / g or more measured in N, N-dimethylacetamide at 30 ° C. at a concentration of 0.5% by weight, and It is preferably in the range of 0.3-6. OdL / g, depending on the desired use of OdL / g.
[0058] モノマー濃度が高いほど高重合度のポリエステルイミド前駆体が得られる傾向があ るため、ポリエステルイミド膜が特に高靭性を必要とする用途ではできるだけ高い濃 度で重合を開始することが好ましい。この重合反応の際、酸二無水物成分とジァミン 成分とのモル比は、酸二無水物成分 Zジァミン成分 =0. 7-1. 3であることが好まし く、特に、 0. 95— 1. 05の範囲力好まし!/ヽ。  [0058] Since the polyesterimide precursor having a higher degree of polymerization tends to be obtained as the monomer concentration is higher, it is preferable to start the polymerization at the highest possible concentration, particularly for applications where the polyesterimide film requires high toughness. . In this polymerization reaction, the molar ratio between the acid dianhydride component and the diamine component is preferably such that the acid dianhydride component and the diamine component = 0.7 to 1.3. 1. 05 range power preferred! / ヽ.
[0059] 重合溶媒としては N, N—ジメチルァセトアミド、 N, N—ジェチルァセトアミド、 N, N— ジメチルホルムアミド、 N—メチルー 2—ピロリドン、へキサメチルホスホルアミド、ジメチ ノレスノレホキシド、 γ ブチロラタトン、 1, 3 ジメチルー 2 イミダゾリジノン、 1, 2 ジメト キシェタン ビス(2—メトキシェチル)エーテル、テロラヒドロフラン、 1, 4 ジォキサン、 ピコリン、ピリジン、アセトン、クロ口ホルム、トルエン、キシレン等の非プロトン性溶媒、 およびフエノール、 ο クレゾール、 m クレゾール、 p クレゾール、 o—クロ口フエノーノレ 、 m一クロ口フエノール、 p クロ口フエノール等のプロトン性溶媒が使用可能である。ま たこれらの溶媒は単独でも、 2種類以上混合して用いてもょ ヽ。 [0059] As the polymerization solvent, N, N-dimethylacetamide, N, N-getylacetamide, N, N-dimethylformamide, N-methyl-2-pyrrolidone, hexamethylphosphoramide, dimethylenoles Norefoxide, γ-butyrolataton, 1,3 dimethyl-2 imidazolidinone, 1,2 dimethoxetane bis (2-methoxyethyl) ether, terahydrofuran, 1,4 dioxane, picoline, pyridine, acetone, chloroform, toluene, Aprotic solvents such as xylene, and protic solvents such as phenol, ο-cresol, m-cresol, p-cresol, o-chlorophenol, m- chlorophenol, and p-chlorophenol can be used. These solvents may be used alone or in combination of two or more.
[0060] 本発明に係るポリエステルイミドの要求特性を満足するために好まし!/ヽジァミン成分 は、 2つのアミノ基が各々末端に存在する芳香族および Zまたは脂環式ジァミン化合 物である。但しこれらの化合物において、アミノ基、芳香族基および Zまたは脂環式 基のそれぞれの結合位置関係は、全てパラ位またはそれに相当する関係にある。本 発明のジァミン成分はパラ位またはそれに相当する関係を有することにより、直線的 で剛直な構造を付与して 、る。 [0060] Preferable to satisfy the required properties of the polyesterimide according to the present invention! / Diamine component is an aromatic and Z or alicyclic diamine compound having two amino groups at the respective terminals. However, in these compounds, the bonding positions of the amino group, the aromatic group and the Z or alicyclic group are all in the para-position or a relation equivalent thereto. Book The diamine component of the invention has a linear or rigid structure by having a para-position or a relation equivalent thereto.
[0061] 好ましいジァミン成分は、 p フエ-レンジァミン、ベンジジン、 4, 4' ージァミノベン ズァ-リド、 1, 4ージアミノシクロへキサンまたは 4—ァミノ安息香酸^ ーァミノフエ-ル であり、これらは場合により 1つ以上のハロゲン、ヒドロキシル、または炭素数 1一 4個 のアルキル、ハロゲン化アルキルもしくはアルコキシで置換されていてもよい。具体的 には、 2—メチルー 1 , 4 フエ二レンジァミン、 2—トリフルォロメチルー 1, 4 フエ二レンジ ァミン、ベンジジン、 o—トリジン、 m トリジン、 2, 2' ビス(トリフルォロメチル)ベンジ ジン、 3, 3' —ジヒドロキシベンジジン、 3, 3' —ジメトキシベンジジン、 4, 4' ージアミ ノベンズァ-リド、トランス 1, 4ージアミノシクロへキサンまたは 4ーァミノ安息香酸 4' ーァミノフエ-ルが好まし 、例として挙げられる。本発明に係るポリエステルイミドにお いて、これらのジァミン成分を、使用するジァミン成分の 70— 100モル%使用するこ とが好ましい。  [0061] Preferred diamine components are p-phenylenediamine, benzidine, 4,4 'diaminobenzalide, 1,4 diaminocyclohexane or 4-aminobenzoic acid ^ aminophenol, which may be one in some cases. It may be substituted with the above halogen, hydroxyl, or alkyl having 14 to 14 carbon atoms, alkyl halide or alkoxy. Specifically, 2-methyl-1,4-phenylenediamine, 2-trifluoromethyl-1,4-phenylenediamine, benzidine, o-tolidine, m-trizine, 2,2'bis (trifluoromethyl) benzene Gin, 3,3'-dihydroxybenzidine, 3,3'-dimethoxybenzidine, 4,4'diaminobenzalide, trans 1,4 diaminocyclohexane or 4-aminobenzoic acid 4'-aminophenol are preferred, for example. No. In the polyesterimide according to the present invention, it is preferable to use these diamine components in an amount of 70 to 100% by mole of the diamine components used.
[0062] 本発明に係るポリエステルイミドの要求特性を著しく損なわな 、範囲で部分的に使 用可能な芳香族ジァミンとしては特に限定されないが、 m フエ-レンジァミン、 2, 4 —ジァミノトルエン、 2, 4—ジアミノキシレン、 2, 4—ジァミノデュレン、 4, 4' ージァミノ ジフエ-ルメタン、 4, 4' ーメチレンビス(2—メチルァ-リン)、 4, 4' ーメチレンビス(2 ーェチルァ-リン)、 4, 4' ーメチレンビス(2, 6—ジメチルァ-リン)、 4, 4' ーメチレン ビス(2, 6—ジェチルァニリン)、 4, 4' —ジアミノジフエニルエーテル、 3, 4' —ジアミ ノジフエ-ルエーテル、 3, 3' —ジアミノジフエ-ルエーテル、 2, 4' —ジアミノジフエ -ルエーテル、 4, 4' ージアミノジフエ-ルスルホン、 3, 3' —ジアミノジフエ-ルスル ホン、 4, 4' —ジァミノべンゾフエノン、 3, 3' ージァミノべンゾフエノン、 1, 4 ビス(4 —アミノフエノキシ)ベンゼン、 1, 3 ビス(4 アミノフエノキシ)ベンゼン、 1, 3 ビス(3 —アミノフエノキシ)ベンゼン、 4, 4' ビス(4 アミノフエノキシ)ビフエ-ル、ビス(4一( 3—アミノフエノキシ)フエ-ル)スルホン、ビス(4— (4—アミノフエノキシ)フエ-ル)スル ホン、 2, 2—ビス(4— (4 アミノフエノキシ)フエ-ル)プロパン、 2, 2 ビス(4— (4—アミ ノフエノキシ)フエニル)へキサフルォロプロパン、 2, 2 ビス(4ーァミノフエ-ル)へキ サフルォロプロパン、 p テルフエ-レンジァミン等が例として挙げられる。またこれら を 2種類以上併用することもできる。 [0062] The aromatic diamine which can be partially used in the range without significantly impairing the required properties of the polyesterimide according to the present invention is not particularly limited, but m-phenylenediamine, 2,4-diaminotoluene, 2,4 -Diaminoxylene, 2,4-diaminodulene, 4,4'-Diaminodiphenylmethane, 4,4'-Methylenebis (2-methyla-line), 4,4'-Methylenebis (2-ethyla-line), 4,4'-Methylenebis ( 2, 6-dimethyla-phosphine), 4, 4'-methylene bis (2,6-diethyl aniline), 4, 4'-diaminodiphenyl ether, 3, 4'-diaminodidiphenyl ether, 3, 3'-diaminodiphenyl- Diether, 2, 4 '-diaminodiphenyl-ether, 4, 4' diaminodiphenylsulfone, 3, 3 '-diaminodiphenyl-sulfone, 4, 4'-diaminobenzophenone, 3, 3 ' Aminobenzophenone, 1,4-bis (4-aminophenoxy) benzene, 1,3-bis (4-aminophenoxy) benzene, 1,3-bis (3-aminophenoxy) benzene, 4,4'bis (4-aminophenoxy) biphenyl, bis (4- (3-aminophenoxy) phenyl) sulfone, bis (4- (4-aminophenoxy) phenyl) sulfone, 2,2-bis (4- (4aminophenyloxy) phenyl) propane, 2, Examples thereof include 2-bis (4- (4-aminophosphenoxy) phenyl) hexafluoropropane, 2,2bis (4-aminophenyl) hexafluoropropane, and p-terphenylenediamine. Also these Can be used in combination of two or more.
[0063] また、ポリエステルイミドの要求特性を著しく損なわない範囲で部分的に使用可能 な脂肪族ジァミンとしては特に限定されないが、シス 1, 4ージアミノシクロへキサン、 1, 4ージアミノシクロへキサン(トランス/シス混合物)、 1, 3—ジアミノシクロへキサン、 イソホロンジァミン、 1, 4—シクロへキサンビス(メチルァミン)、 2, 5 ビス(ァミノメチル )ビシクロ〔2. 2. 1〕ヘプタン、 2, 6—ビス(アミノメチル)ビシクロ〔2. 2. 1〕ヘプタン、 3 , 8 ビス(アミノメチル)トリシクロ〔5. 2. 1. 0〕デカン、 1, 3—ジアミノアダマンタン、 4, 4' ーメチレンビス(シクロへキシルァミン)、 4, 4' ーメチレンビス(2—メチルシクロへキ シルァミン)、 4, 4' ーメチレンビス(2—ェチルシクロへキシルァミン)、 4, 4' ーメチレ ンビス(2, 6—ジメチルシクロへキシルァミン)、 4, 4' ーメチレンビス(2, 6—ジェチル シクロへキシルァミン)、 2, 2—ビス(4—アミノシクロへキシル)プロパン、 2, 2 ビス(4 アミノシクロへキシル)へキサフルォロプロパン、 1, 3 プロパンジァミン、 1, 4ーテトラ メチレンジァミン、 1, 5 ペンタメチレンジァミン、 1, 6—へキサメチレンジァミン、 1, 7 ヘプタメチレンジァミン、 1, 8 オタタメチレンジァミン、 1, 9 ノナメチレンジァミン等 が挙げられる。またこれらを 2種類以上併用することもできる。  [0063] The aliphatic diamine that can be partially used within a range that does not significantly impair the required properties of the polyesterimide is not particularly limited, but cis 1,4-diaminocyclohexane, 1,4-diaminocyclohexane (trans / cis Mixture), 1,3-diaminocyclohexane, isophoronediamine, 1,4-cyclohexanebis (methylamine), 2,5 bis (aminomethyl) bicyclo [2.2.1] heptane, 2,6-bis (Aminomethyl) bicyclo [2.2.1] heptane, 3,8 bis (aminomethyl) tricyclo [5.2.1.0] decane, 1,3-diaminoadamantane, 4,4'-methylenebis (cyclohexylamine ), 4,4'-methylenebis (2-methylcyclohexylamine), 4,4'-methylenebis (2-ethylcyclohexylamine), 4,4'-methylenebis (2,6-dimethyl) Lecyclohexylamine), 4,4'-methylenebis (2,6-getyl cyclohexylamine), 2,2-bis (4-aminocyclohexyl) propane, 2,2bis (4aminocyclohexyl) hexaflu Olopropane, 1,3 propanediamine, 1,4-tetramethylenediamine, 1,5 pentamethylenediamine, 1,6-hexamethylenediamine, 1,7 heptamethylenediamine, 1,8 And rangenamine and 1,9 nonamethylenediamine. Two or more of these can be used in combination.
[0064] 高い熱安定性や高いガラス転移温度を保持するために、脂肪族ジァミンとして 1, 4 ージアミノシクロへキサンの如き脂環式ジァミンを用いた方が好ま U 、。  In order to maintain high thermal stability and high glass transition temperature, it is preferable to use an alicyclic diamine such as 1,4 diaminocyclohexane as the aliphatic diamine.
[0065] 一般に脂肪族ジァミンをポリエステルイミド前駆体重合反応に供した場合、重合初 期に塩が形成され、重合の進行が妨げられることが起こる。脂肪族ジァミンの中では 特にトランス 1, 4ージアミノシクロへキサンと殆どのテトラカルボン酸二無水物との組 合せではより強固な塩が形成され、しばしば重合が全く進まな!/、。  [0065] In general, when an aliphatic diamine is subjected to a polymerization reaction of a polyesterimide precursor, a salt is formed at an early stage of the polymerization, which may hinder the progress of the polymerization. Among the aliphatic diamines, especially with the combination of trans 1,4-diaminocyclohexane and most of the tetracarboxylic dianhydrides, stronger salts are formed and often the polymerization does not proceed at all!
[0066] し力しながら本発明に係る式(3)で表されるテトラカルボン酸二無水物を用いた場 合は、トランス 1, 4ージアミノシクロへキサンと速やかに反応して、高重合度のポリェ ステルイミド前駆体を容易に得ることができる。そのため、脂肪族ジァミンをクロロトリメ チルシランの如きシリル化剤でシリルイ匕するような煩雑な重合前処理工程を必要とし ない。  When the tetracarboxylic dianhydride represented by the formula (3) according to the present invention is used while reacting, it quickly reacts with trans 1,4-diaminocyclohexane to give a high polymerization degree. A polyesterimide precursor can be easily obtained. Therefore, there is no need for a complicated pre-polymerization treatment step for silylizing aliphatic diamine with a silylating agent such as chlorotrimethylsilane.
[0067] さらに、低誘電率、低線熱膨張係数を示し、且つ吸水率を小さくするために、芳香 族ジァミンとして 4ーァミノ安息香酸 4' ーァミノフエ-ルの如きエステル結合含有ジアミ ンを用いることもまた好まし 、。 Further, in order to exhibit a low dielectric constant and a low coefficient of linear thermal expansion and to reduce the water absorption, a diamine containing an ester bond such as 4-aminobenzoic acid 4′-aminophenol is used as the aromatic diamine. It is also preferable to use the
[0068] 本発明に係るポリエステルイミドの要求特性および重合反応性を著しく損なわな!/ヽ 範囲で、式(3)で表されるテトラカルボン酸二無水物以外の酸二無水物成分を部分 的に使用しても差し支えない。共重合酸二無水物成分としては特に限定されないが 、ピロメリット酸二無水物、 3, 3' , 4, 4' ービフエ-ルテトラカルボン酸二無水物、 3, 3' , 4, 4' 一べンゾフエノンテトラカルボン酸二無水物、 3, 3' , 4, 4' ービフエ-ル エーテルテトラカルボン酸二無水物、 3, 3' , 4, 4' ービフエ-ルスルホンテトラカル ボン酸二無水物 2, 2' ビス(3, 4—ジカルボキシフエ-ル)へキサフルォロプロパン 酸二無水物、 2, 2' ビス(3, 4—ジカルボキシフエ-ル)プロパン酸二無水物、 1, 4 , 5, 8—ナフタレンテトラカルボン酸二無水物等が挙げられる。共重合成分としてこれ らを単独あるいは 2種類以上用いてもょ ヽ。  [0068] An acid dianhydride component other than the tetracarboxylic dianhydride represented by the formula (3) is partially added to the polyesterimide according to the present invention in a range not significantly impairing the required properties and polymerization reactivity. Can be used for The copolymeric dianhydride component is not particularly limited, but may be pyromellitic dianhydride, 3,3 ', 4,4'-biphenyltetracarboxylic dianhydride, 3,3', 4,4 ' Benzophenone tetracarboxylic dianhydride, 3, 3 ', 4, 4'-biphenyl ether tetracarboxylic dianhydride, 3, 3', 4, 4'-biphenyl sulfone tetracarboxylic dianhydride 2,2'bis (3,4-dicarboxyphenyl) hexafluoropropanoic dianhydride, 2,2'bis (3,4-dicarboxyphenyl) propanoic dianhydride, Examples include 1,4,5,8-naphthalenetetracarboxylic dianhydride. These may be used alone or in combination of two or more as copolymer components.
[0069] ポリエステルイミド前駆体の重合の際しばしば添加される高分子溶解促進剤即ちリ チウムブロミドゃリチウムクロリドの如き金属塩類は、本発明に係るポリエステルイミド 前駆体重合反応には一切使用する必要がな 、。これらの金属塩類はポリエステルィ ミド膜中に金属イオンが痕跡量でも残留すると、電子デバイスとしての信頼性を著しく 低下させるため用いられるべきではな 、。  [0069] A polymer dissolution promoter often added during the polymerization of the polyesterimide precursor, that is, a metal salt such as lithium bromide / lithium chloride, need not be used at all in the polyesterimide precursor polymerization reaction according to the present invention. ,. These metal salts should not be used because even if trace amounts of metal ions remain in the polyesterimide film, the reliability as an electronic device is significantly reduced.
[0070] 基板上に塗布されたポリエステルイミド前駆体溶液を、 40°C— 180°C範囲で乾燥さ せる。得られたポリエステルイミド前駆体膜を基板上で空気中、窒素等の不活性ガス 雰囲気中あるいは真空中、 200°C— 430°C、好ましくは 250°C— 400°Cの温度で熱 処理することでポリエステルイミド膜が得られる。 [0070] The polyesterimide precursor solution applied on the substrate is dried in a range of 40 ° C to 180 ° C. The obtained polyesterimide precursor film is heat-treated on a substrate in air, in an atmosphere of an inert gas such as nitrogen, or in a vacuum, at a temperature of 200 ° C to 430 ° C, preferably 250 ° C to 400 ° C. Thus, a polyesterimide film is obtained.
[0071] イミドィ匕は脱水環化試薬を用いて化学的に行うこともできる。即ちピリジンあるいはト リエチルァミンの如き塩基性触媒を含む無水酢酸中に、基板上に形成されたポリエス テルイミド前駆体膜を室温で 1分一数時間浸漬する方法によってもポリエステルイミド 膜を得ることができる。 [0071] Imido-dani can also be performed chemically using a dehydration cyclization reagent. That is, a polyesterimide film can also be obtained by immersing the polyesterimide precursor film formed on the substrate in acetic anhydride containing a basic catalyst such as pyridine or triethylamine at room temperature for one minute and several hours.
[0072] 得られたポリエステルイミド膜中には必要に応じて酸ィ匕安定剤、末端封止剤、フイラ 一、シランカップリング剤、感光剤、光重合開始剤および増感剤等の添加物が混合さ れていても差し支えない。  [0072] In the obtained polyesterimide film, additives such as an acid stabilizer, a terminal blocking agent, a filler, a silane coupling agent, a photosensitizer, a photopolymerization initiator, and a sensitizer may be added, if necessary. May be mixed.
実施例 [0073] 以下に本発明を実施例により具体的に説明するが、本発明は、これらに限定される ものではない。尚、各例における分析値は以下の方法により求めた。 Example [0073] Hereinafter, the present invention will be described specifically with reference to Examples, but the present invention is not limited thereto. In addition, the analytical value in each example was calculated | required by the following method.
[0074] 贿 [0074] 贿
0. 5重量%のポリエステルイミド前駆体の N, N—ジメチルァセトアミド溶液を、ォスト ワルド粘度計を用いて 30°Cで測定した。  A 0.5% by weight solution of the polyesterimide precursor in N, N-dimethylacetamide was measured at 30 ° C. using an Ostwald viscometer.
[0075] ガラス転移温度 [0075] Glass transition temperature
動的粘弾性測定により、周波数 0. 1Ηζ、昇温速度 5°CZ分における損失ピークか ら求めた。  The dynamic viscoelasticity was measured from the loss peak at a frequency of 0.1Ηζ and a heating rate of 5 ° CZ.
[0076] 5。/o重量減少温度 [0076] 5. / o weight loss temperature
ポリエステルイミド膜の熱重量変化を、昇温速度 10°CZ分で測定し、重量が 5%減 少した温度を求めた。  The thermogravimetric change of the polyesterimide film was measured at a heating rate of 10 ° CZ, and the temperature at which the weight was reduced by 5% was determined.
[0077] 線熱 係数 [0077] Linear heat coefficient
熱機械分析により、荷重 0. 5gZ膜厚 1 μ m、昇温速度 5°CZ分における試験片の 伸びより、 100— 200°Cの範囲での平均値として線熱膨張係数を求めた。  From the thermomechanical analysis, the coefficient of linear thermal expansion was determined as the average value in the range of 100 to 200 ° C from the elongation of the test piece at a load of 0.5 gZ, a film thickness of 1 μm, and a heating rate of 5 ° CZ.
[0078] 複屈析 [0078] Birefringence
ポリエステルイミド膜に平行な方向(n )と垂直な方向(n )の屈折率をアッベ屈折 Abbe refraction of the refractive index in the direction ( n ) parallel to the polyesterimide film ( n ) and the direction ( n ) perpendicular to the polyesterimide film
m out  m out
計けトリウムランプ使用、波長 589應)で測定し、これらの屈折率の差から複屈折( Δ η=η— η リ 求め 7こ。  Using a measuring thorium lamp, the wavelength is 589, and determine the birefringence (Δη = η−η) from the difference between these refractive indices.
in out  in out
[0079] 誘 率、誘 正接  [0079] Invitation rate, invitation tangent
誘電率および誘電正接は、直径 5cmの円形に切り出したポリエステルイミド膜に金 を蒸着して電極パターンを形成したもの作製し、これをアジレントテクノロジ一社製誘 電体測定用電極 16451Bではさみ、アジレントテクノロジ一社製、高精度 LCRメータ 4285Aに接続して相対湿度 46%で測定した。  The dielectric constant and the dielectric loss tangent were measured by preparing an electrode pattern by depositing gold on a polyesterimide film cut into a circular shape with a diameter of 5 cm, and sandwiching it with a dielectric measurement electrode 16451B manufactured by Agilent Technologies, Inc. The measurement was performed at a relative humidity of 46% by connecting to a high-precision LCR meter 4285A manufactured by Technology One.
更にポリエステルイミド膜の平均屈折率〔n = (2n +n ) Z3〕に基づいて、次式  Further, based on the average refractive index of the polyesterimide film [n = (2n + n) Z3], the following formula
av m out  av m out
により 1MHzにおける誘電率( ε )を算出した。 ε = 1. Ι Χ η 2 Calculated the dielectric constant (ε) at 1 MHz. ε = 1.Ι Χ η 2
av  av
[0080] 吸水率  [0080] Water absorption
ポリエステルイミド膜を 50°Cで 24時間真空乾燥し、 25°Cの水中に 24時間浸漬後、 余分の水を拭き取った後の重量増加分として算出した。 [0081] 機械的特件 The polyesterimide film was vacuum-dried at 50 ° C for 24 hours, immersed in water at 25 ° C for 24 hours, and calculated as an increase in weight after wiping off excess water. [0081] Mechanical Special
ポリエステルイミド膜のヤング率、破断強度および破断伸びは、 30mm X 3mmの試 験片について、東洋ボールドウィン社製、テンシロンを用い、 8mmZ分の引張速度で 引張試験を実施して求めた。  The Young's modulus, breaking strength and breaking elongation of the polyesterimide film were determined by performing a tensile test on a 30 mm × 3 mm test piece using Tensilon manufactured by Toyo Baldwin Co. at a tensile speed of 8 mmZ.
[0082] エステル某含有テトラカルボン酸二無水物の合成 Synthesis of Tetracarboxylic Dianhydride Containing Ester
(実施例 1)  (Example 1)
よく乾燥した攪拌機付三口フラスコ中、 4, A' ービフエノール 20mmol (3. 7240g) を無水 N, N—ジメチルホルムアミド 22mLと無水ピリジン 200mmol (16mL)の混合溶 媒に溶解し、反応容器をセプタムキャップでシールした。氷浴中で冷却しながらこの 溶液に、トリメリット酸無水物クロリド 40mmol (8. 4221g)の無水 N, N—ジメチルホル ムアミド(51mL)溶液をシリンジにて徐々に滴下し、更に室温で数時間攪拌した。反 応終了後、反応溶液をエバポレーターで濃縮し、水中に滴下して沈殿物を得た。こ れにより一部加水分解を受けて開環するので、閉環するために得られた粗生成物を 200°Cで 24時間真空乾燥後、 N, N—ジメチルァセトアミドと無水酢酸の混合溶媒( 体積比 8Z2)より再結晶した。濾別した結晶を更に 200°Cで 24時間真空乾燥した。 赤外吸収スペクトル(図 1)より目的のテトラカルボン酸二無水物が得られ、熱閉環も 完全に行われたことが確認された。  In a well-dried three-necked flask equipped with a stirrer, 20 mmol (3.7240 g) of 4, A'-biphenol is dissolved in a mixed solvent of 22 mL of anhydrous N, N-dimethylformamide and 200 mmol (16 mL) of anhydrous pyridine, and the reaction vessel is closed with a septum cap. Sealed. While cooling in an ice bath, a solution of trimellitic anhydride chloride (40 mmol, 8.4221 g) in anhydrous N, N-dimethylformamide (51 mL) was slowly added dropwise to this solution with a syringe, and the mixture was further stirred at room temperature for several hours. did. After the completion of the reaction, the reaction solution was concentrated by an evaporator and dropped into water to obtain a precipitate. As a result, the ring is partially hydrolyzed and the ring is opened.The crude product obtained for ring closing is vacuum-dried at 200 ° C for 24 hours. It was recrystallized from (volume ratio 8Z2). The crystals separated by filtration were further dried in vacuum at 200 ° C. for 24 hours. From the infrared absorption spectrum (FIG. 1), it was confirmed that the target tetracarboxylic dianhydride was obtained, and that the thermal ring closure was completely performed.
[0083] (実施例 2) (Example 2)
よく乾燥した攪拌機付三口フラスコ中、ヒドロキノン 20mmol (2. 2021g)を無水 N, N—ジメチルホルムアミド 50mLと無水ピリジン 200mmol (16mL)の混合溶媒に溶解し 、反応容器をセプタムキャップでシールした。氷浴中で冷却しながらこの溶液に、トリ メリット酸無水物クロリド 40mmol (8. 4221g)の無水 N, N—ジメチルホルムアミド(51 mL)溶液をシリンジにて徐々に滴下し、更に室温で数時間攪拌した。反応終了後、 反応溶液をエバポレーターで濃縮し、水中に滴下して沈殿物を得た。これにより一部 加水分解を受けて開環するので、閉環するために得られた粗生成物を 200°Cで 24 時間真空乾燥後、 1, 4 ジォキサンより再結晶した。濾別した結晶を更に 200°Cで 2 4時間真空乾燥した。赤外吸収スペクトル(図 2)より目的のテトラカルボン酸二無水 物が得られ、熱閉環も完全に行われたことが確認された。 [0084] ポリエステルイミド前駆体の重合、イミド化およびポリエステルイミド膜特性の評価 (実施例 3) In a well-dried three-necked flask equipped with a stirrer, 20 mmol (2.221 g) of hydroquinone was dissolved in a mixed solvent of 50 mL of anhydrous N, N-dimethylformamide and 200 mmol (16 mL) of anhydrous pyridine, and the reaction vessel was sealed with a septum cap. While cooling in an ice bath, a solution of trimellitic anhydride chloride 40 mmol (8.4221 g) in anhydrous N, N-dimethylformamide (51 mL) was slowly added dropwise to this solution with a syringe, and the mixture was further added at room temperature for several hours. Stirred. After completion of the reaction, the reaction solution was concentrated by an evaporator and dropped into water to obtain a precipitate. Since the ring was opened by partial hydrolysis, the crude product obtained for ring closing was vacuum-dried at 200 ° C for 24 hours and recrystallized from 1,4-dioxane. The crystals separated by filtration were further dried in vacuum at 200 ° C. for 24 hours. From the infrared absorption spectrum (FIG. 2), it was confirmed that the desired tetracarboxylic dianhydride was obtained and that the thermal ring closure was completely performed. [0084] Polymerization, imidization of polyesterimide precursor and evaluation of polyesterimide film properties (Example 3)
よく乾燥した攪拌機付密閉反応容器中に P-フエ-レンジァミン lOmmoKl. 0814g )を入れ、モレキュラーシーブス 4Aで十分に脱水した N, N—ジメチルァセトアミド 15 mLに溶解した後、この溶液に実施例 1に記載のテトラカルボン酸二無水物粉末 10 mmol(5. 3439g)を徐々に加えた。 5分後、溶液粘度が急激に増加したため、溶媒 1 lmLをカ卩ぇ希釈した。更に室温で 24時間撹拌し、透明、均一で粘稠なポリエステル イミド前駆体溶液を得た。  0814 g) was placed in a well-dried sealed reaction vessel equipped with a stirrer, and dissolved in 15 mL of N, N-dimethylacetamide sufficiently dehydrated with Molecular Sieves 4A. 10 mmol (5.3439 g) of the tetracarboxylic dianhydride powder described in 1 was gradually added. Five minutes later, 1 lmL of the solvent was diluted with kamitol because the solution viscosity increased rapidly. The mixture was further stirred at room temperature for 24 hours to obtain a transparent, uniform and viscous polyesterimide precursor solution.
[0085] このポリエステルイミド前駆体溶液は、室温および 20°Cで一ヶ月間放置しても沈 澱、ゲル化は全く起こらず、極めて高い溶液貯蔵安定性を示した。 N, N—ジメチルァ セトアミド中、 30°C、 0. 5重量%の濃度でォストワルド粘度計にて測定したポリエステ ルイミド前駆体の固有粘度は 1. 12dLZgであった。  [0085] The polyesterimide precursor solution did not precipitate or gel at all even when left at room temperature and 20 ° C for one month, and showed extremely high solution storage stability. The intrinsic viscosity of the polyesterimide precursor measured with an Ostwald viscometer in N, N-dimethylacetamide at 30 ° C. at a concentration of 0.5% by weight was 1.12 dLZg.
[0086] このポリエステルイミド前駆体溶液をガラス基板に塗布し、 60°C、 2時間で乾燥して 得たポリエステルイミド前駆体膜を基板上、減圧下 250°Cで 2時間熱イミド化を行った 後、残留応力を除去するために基板力も剥がして更に 350°Cで 1時間、熱処理を行 い、膜厚 20 mの透明なポリエステルイミド膜を得た。  [0086] The polyesterimide precursor solution was applied to a glass substrate, and dried at 60 ° C for 2 hours. The resulting polyesterimide precursor film was thermally imidized on the substrate at 250 ° C under reduced pressure for 2 hours. After that, the substrate force was removed to remove residual stress, and heat treatment was further performed at 350 ° C for 1 hour to obtain a transparent polyesterimide film having a thickness of 20 m.
[0087] このポリエステルイミド膜は 180° 折曲げ試験によっても破断せず、靭性を示した。  [0087] The polyesterimide film did not break even in the 180 ° bending test, and showed toughness.
また如何なる有機溶媒に対しても全く溶解性を示さなカゝつた。このポリエステルイミド 膜につ!ヽて動的粘弾性測定を行った結果、明瞭なガラス転移点 (動的粘弾性曲線に おける損失ピークより決定)は観測されず、全く熱可塑性を示さな力つた。これよりこ のポリエステルイミド膜が極めて高 、寸法安定性を有して 、ることを示して 、る。また 線熱膨張係数は 7. 4ppmZKと極めて低い線熱膨張係数を示した。これは、非常に 大きな複屈折値(Δη=0. 187)力も判断して、ポリエステルイミド鎖の高度な面内配 向によるものと考えられる。平均屈折率より見積もった誘電率は 3. 26であり、 3, 3' , 4, 4' ービフエ-ルテトラカルボン酸二無水物と ρ フエ-レンジァミンからなる代表 的な全芳香族低熱膨張ポリエステルイミドの誘電率 (3. 5)より低い値であった。この 結果はポリエステルイミド骨格中にエステル基を導入した効果である。また 5%重量 減少温度は、窒素中で 470°C、空気中で 463°Cであった。このようにこのポリエステ ルイミドは極めて低い線熱膨張係数、優れた寸法安定性、高い熱安定性、および十 分な膜靭性を示した。得られたポリエステルイミド前駆体膜およびポリエステルイミド 膜の赤外線吸収スペクトルを図 3、図 4にそれぞれ示す。 In addition, the polymer did not show any solubility in any organic solvent. As a result of dynamic viscoelasticity measurement of this polyesterimide film, no clear glass transition point (determined from the loss peak in the dynamic viscoelasticity curve) was observed, and a force showing no thermoplasticity was observed. . This shows that this polyesterimide film is extremely high and has dimensional stability. The coefficient of linear thermal expansion showed a very low coefficient of linear thermal expansion of 7.4 ppm ZK. This is considered to be due to a high degree of in-plane orientation of the polyesterimide chain, judging also a very large birefringence value (Δη = 0.187). The dielectric constant estimated from the average refractive index is 3.26, a typical wholly aromatic low thermal expansion polyesterimide composed of 3,3 ', 4,4'-biphenyltetracarboxylic dianhydride and ρ-phenylenediamine. It was lower than the dielectric constant (3.5). This result is the effect of introducing an ester group into the polyesterimide skeleton. The 5% weight loss temperature was 470 ° C in nitrogen and 463 ° C in air. Thus this Polyester Luimide exhibited a very low coefficient of linear thermal expansion, excellent dimensional stability, high thermal stability, and sufficient film toughness. The infrared absorption spectra of the obtained polyesterimide precursor film and polyesterimide film are shown in FIGS. 3 and 4, respectively.
[0088] (実施例 4) (Example 4)
よく乾燥した攪拌機付密閉反応容器中に、 P-フエ-レンジァミン lOmmoKl. 0814 g)を入れ、モレキュラーシーブス 4Aで十分に脱水した N, N—ジメチルァセトアミド 15 mLに溶解した後、この溶液に実施例 2に記載のテトラカルボン酸二無水物粉末 10 mmol(4. 5828g)を徐々に加えた。溶液粘度が急激に増加したため、適宜溶媒で希 釈して一時間後に 52mLをカ卩ぇ希釈した。更に室温で 24時間撹拌し、透明、均一で 粘稠なポリエステルイミド前駆体溶液を得た。  0814 g) of P-phenylenediamine (OmmoKl. 0814 g) was placed in a well-dried sealed reaction vessel equipped with a stirrer, and dissolved in 15 mL of N, N-dimethylacetamide thoroughly dehydrated with Molecular Sieves 4A. 10 mmol (4.5828 g) of the tetracarboxylic dianhydride powder described in Example 2 was gradually added. Since the solution viscosity increased rapidly, 52 mL of the mixture was diluted with a suitable solvent, and one hour later, 52 mL of the solution was diluted. The mixture was further stirred at room temperature for 24 hours to obtain a transparent, uniform and viscous polyesterimide precursor solution.
[0089] このポリエステルイミド前駆体溶液は室温および 20°Cで一ヶ月間放置しても沈澱 、ゲル化は全く起こらず、極めて高い溶液貯蔵安定性を示した。 N, N ジメチルァセ トアミド中、 30°C、 0. 5重量%の濃度でォストワルド粘度計にて測定したポリエステル イミド前駆体の固有粘度は 5. 19dLZgであり、極めて高分子量体が得られた。  [0089] Even if this polyesterimide precursor solution was left at room temperature and 20 ° C for one month, no precipitation or gelation occurred, and extremely high solution storage stability was exhibited. The intrinsic viscosity of the polyesterimide precursor measured with an Ostwald viscometer at 30 ° C and 0.5% by weight in N, N dimethylacetamide was 5.19 dLZg, and an extremely high molecular weight product was obtained.
[0090] このポリエステルイミド前駆体溶液をガラス基板に塗布し、 60°C、 2時間で乾燥して 得たポリエステルイミド前駆体膜を基板上、減圧下 250°Cで 2時間熱イミド化を行った 後、残留応力を除去するために基板力も剥がして更に 350°Cで 1時間、熱処理を行 い、膜厚 20 mの透明なポリエステルイミド膜を得た。  [0090] The polyesterimide precursor solution was applied to a glass substrate, and dried at 60 ° C for 2 hours. A polyesterimide precursor film obtained was thermally imidized on the substrate at 250 ° C under reduced pressure for 2 hours. After that, the substrate force was removed to remove residual stress, and heat treatment was further performed at 350 ° C for 1 hour to obtain a transparent polyesterimide film having a thickness of 20 m.
[0091] このポリエステルイミド膜は 180° 折曲げ試験によっても破断せず、靭性を示した。  [0091] The polyesterimide film did not break even in the 180 ° bending test, and showed toughness.
また如何なる有機溶媒に対しても全く溶解性を示さなカゝつた。このポリエステルイミド 膜につ!ヽて動的粘弾性測定を行った結果、明瞭なガラス転移点 (動的粘弾性曲線に おける損失ピークより決定)は観測されず、全く熱可塑性を示さな力つた。これよりこ のポリエステルイミド膜が極めて高 、寸法安定性を有して 、ることを示して 、る。また 線熱膨張係数は 3. 2ppmZKとシリコンに匹敵するほど低い線熱膨張係数を示した。 これは、非常に大きな複屈折値(Δη=0. 219)から判断して、ポリエステルイミド鎖 の高度な面内配向によるものと考えられる。平均屈折率より見積もった誘電率は 3. 2 2であり、 3, 3' , 4, 4' ービフエ-ルテトラカルボン酸二無水物と 1, 4ーシクロへキサ ンジァミン力もなる半芳香族低熱膨張ポリエステルイミドの誘電率(3. 15)に匹敵す る値であった。また 5%重量減少温度は、窒素中で 481°C、空気中で 463°Cであった 。このようにこのポリエステルイミドはシリコン並みに低い線熱膨張係数、優れた寸法 安定性、高い熱安定性、および十分な膜靭性を示した。得られたポリエステルイミド 前駆体膜およびポリエステルイミド膜の赤外線吸収スペクトルを図 5、図 6にそれぞれ 示す。 In addition, the polymer did not show any solubility in any organic solvent. As a result of dynamic viscoelasticity measurement of this polyesterimide film, no clear glass transition point (determined from the loss peak in the dynamic viscoelasticity curve) was observed, and a force showing no thermoplasticity was observed. . This shows that this polyesterimide film is extremely high and has dimensional stability. The coefficient of linear thermal expansion was 3.2 ppmZK, which was as low as silicon. Judging from the extremely large birefringence value (Δη = 0.219), this is thought to be due to the high degree of in-plane orientation of the polyesterimide chains. The dielectric constant estimated from the average refractive index is 3.22, a semi-aromatic low thermal expansion polyester which has 3,3 ', 4,4'-biphenyltetracarboxylic dianhydride and 1,4-cyclohexanediamine. Comparable with the dielectric constant of imide (3.15) Value. The 5% weight loss temperature was 481 ° C in nitrogen and 463 ° C in air. Thus, the polyesterimide exhibited a coefficient of linear thermal expansion as low as silicon, excellent dimensional stability, high thermal stability, and sufficient film toughness. The infrared absorption spectra of the obtained polyesterimide precursor film and polyesterimide film are shown in FIGS. 5 and 6, respectively.
[0092] (実施例 5) (Example 5)
実施例 4に記載した方法に従って、 2, 2' ビス(トリフルォロメチル)ベンジジンと 実施例 2に記載のテトラカルボン酸二無水物より重合を行い、透明、均一で粘稠なポ リエステルイミド前駆体溶液を得た。  According to the method described in Example 4, polymerization was conducted from 2,2′bis (trifluoromethyl) benzidine and the tetracarboxylic dianhydride described in Example 2 to obtain a transparent, uniform and viscous polyesterimide precursor. A body solution was obtained.
[0093] このポリエステルイミド前駆体溶液は、室温および 20°Cで一ヶ月間放置しても沈 澱、ゲル化は全く起こらず、極めて高い溶液貯蔵安定性を示した。 N, N—ジメチルァ セトアミド中、 30°C、 0. 5重量%の濃度でォストワルド粘度計にて測定したポリエステ ルイミド前駆体の固有粘度は 2. 93dLZgであり、極めて高分子量体であった。  [0093] The polyesterimide precursor solution did not precipitate or gel at all even when left at room temperature and 20 ° C for one month, and showed extremely high solution storage stability. The intrinsic viscosity of the polyesterimide precursor measured with an Ostwald viscometer at 30 ° C. and 0.5% by weight in N, N-dimethylacetamide was 2.93 dLZg, which was an extremely high molecular weight substance.
[0094] このポリエステルイミド前駆体溶液をガラス基板に塗布し、 60°C、 2時間で乾燥して 得たポリエステルイミド前駆体膜を基板上、減圧下 250°Cで 2時間熱イミド化を行った 後、残留応力を除去するために基板力も剥がして更に 350°Cで 1時間、熱処理を行 い、膜厚 20 mの透明なポリエステルイミド膜を得た。  [0094] This polyesterimide precursor solution was applied to a glass substrate, and dried at 60 ° C for 2 hours. The resulting polyesterimide precursor film was thermally imidized on the substrate at 250 ° C under reduced pressure for 2 hours. After that, the substrate force was removed to remove residual stress, and heat treatment was further performed at 350 ° C for 1 hour to obtain a transparent polyesterimide film having a thickness of 20 m.
[0095] このポリエステルイミド膜は 180° 折曲げ試験によっても破断せず、靭性を示した。  [0095] The polyesterimide film did not break even in the 180 ° bending test, and showed toughness.
このポリエステルイミド膜につ ヽて動的粘弾性測定を行った結果、ガラス転移温度は 360°C以上であった。また線熱膨張係数は 30ppmZKと比較的低 、線熱膨張係数 を示した。これは、大きな複屈折値(Δ η=0. 135)から判断して、ポリエステルイミド 鎖の面内配向によるものと考えられる。平均屈折率より見積もった誘電率は 2. 99と 比較的低い値を示した。また 5%重量減少温度は、窒素中で 487°C、空気中で 479 °Cであった。このようにこのポリエステルイミドは比較的低い線熱膨張係数、高いガラ ス転移温度、比較的低い誘電率、高い熱安定性、および十分な膜靭性を示した。得 られたポリエステルイミド前駆体膜およびポリエステルイミド膜の赤外線吸収スぺタト ルを図 7、図 8にそれぞれ示す。  As a result of dynamic viscoelasticity measurement of this polyesterimide film, the glass transition temperature was 360 ° C or higher. The coefficient of linear thermal expansion was relatively low at 30 ppm ZK, indicating a linear coefficient of thermal expansion. Judging from the large birefringence value (Δη = 0.135), this is considered to be due to the in-plane orientation of the polyesterimide chains. The dielectric constant estimated from the average refractive index was relatively low at 2.99. The 5% weight loss temperature was 487 ° C in nitrogen and 479 ° C in air. Thus, the polyesterimide exhibited relatively low coefficient of linear thermal expansion, high glass transition temperature, relatively low dielectric constant, high thermal stability, and good film toughness. FIGS. 7 and 8 show infrared absorption spectra of the obtained polyesterimide precursor film and polyesterimide film, respectively.
[0096] (実施例 6) 実施例 4に記載した方法に従って、トランス 1, 4ージアミノシクロへキサンと実施例 2に記載のテトラカルボン酸二無水物より重合を行った。重合初期に塩が生成したが 、塩はそれほど強固ではなぐ攪拌により徐々に溶解し、 24時間後、透明、均一で粘 稠なポリエステルイミド前駆体溶液を得た。このポリエステルイミド前駆体溶液は室温 および 20°Cで一ヶ月間放置しても沈澱、ゲル化は全く起こらず、極めて高い溶液 貯蔵安定性を示した。 N, N—ジメチルァセトアミド中、 30°C、 0. 5重量%の濃度でォ ストワルド粘度計にて測定したポリエステルイミド前駆体の固有粘度は 0. 52dLZgで あった。実施例 4に記載した方法に従って、キャストおよび熱イミドィ匕を行い、透明性 の高 、ポリエステルイミド膜が得られた。 [0096] (Example 6) According to the method described in Example 4, polymerization was carried out from trans 1,4-diaminocyclohexane and the tetracarboxylic dianhydride described in Example 2. Although a salt was formed in the early stage of the polymerization, the salt was not so strong and was gradually dissolved by stirring, and after 24 hours, a clear, uniform and viscous polyesterimide precursor solution was obtained. This polyesterimide precursor solution did not precipitate or gel at all even when left at room temperature and 20 ° C. for one month, and showed extremely high solution storage stability. The intrinsic viscosity of the polyesterimide precursor measured in an N, N-dimethylacetamide at 30 ° C. and a concentration of 0.5% by weight with an Ostwald viscometer was 0.52 dLZg. Casting and thermal imidation were performed according to the method described in Example 4 to obtain a polyesterimide film having high transparency.
[0097] (実施例 7) (Example 7)
重合溶媒として、 N, N—ジメチルァセトアミドアミドの代わりに N—メチルー 2—ピロリド ンを用いた以外は実施例 4に記載した方法に従って、トランス 1, 4ージアミノシクロ へキサンと実施例 2に記載のテトラカルボン酸二無水物より重合を行った。重合初期 に塩が生成した力 塩はそれほど強固ではなぐ攪拌により徐々に溶解し、 20時間 後、透明、均一で粘稠なポリエステルイミド前駆体溶液を得た。  According to the method described in Example 4 except that N-methyl-2-pyrrolidone was used instead of N, N-dimethylacetamidoamide as the polymerization solvent, trans 1,4-diaminocyclohexane and described in Example 2 were used. Was polymerized from tetracarboxylic dianhydride. The strength of the salt formed at the beginning of the polymerization was not so strong, but gradually dissolved by stirring, and after 20 hours, a transparent, uniform and viscous polyesterimide precursor solution was obtained.
[0098] このポリエステルイミド前駆体溶液は室温および 20°Cで一ヶ月間放置しても沈澱 、ゲル化は全く起こらず、極めて高い溶液貯蔵安定性を示した。 N, N ジメチルァセ トアミド中、 30°C、 0. 5重量%の濃度でォストワルド粘度計にて測定したポリエステル イミド前駆体の固有粘度は 1. 14dLZgであり、高分子量体であった。  [0098] The polyesterimide precursor solution did not precipitate or gel at all even when left at room temperature and 20 ° C for one month, and showed extremely high solution storage stability. The intrinsic viscosity of the polyester imide precursor measured with an Ostwald viscometer at 30 ° C. and 0.5% by weight in N, N dimethylacetamide was 1.14 dLZg, which was a high molecular weight product.
[0099] このポリエステルイミド前駆体溶液をガラス基板に塗布し、 60°C、 2時間で乾燥して 得たポリエステルイミド前駆体膜を基板上、減圧下 250°Cで 1時間、更に 300°Cで 1 時間熱イミドィ匕を行った後、残留応力を除去するために基板力 剥がして更に 350 °Cで 1時間、熱処理を行い、膜厚 20 mの透明性の高いポリエステルイミド膜を得た  [0099] The polyesterimide precursor solution was applied to a glass substrate and dried at 60 ° C for 2 hours. The obtained polyesterimide precursor film was placed on the substrate at 250 ° C under reduced pressure for 1 hour and further at 300 ° C. After performing thermal imidation for 1 hour, the substrate was peeled off to remove residual stress, and heat treatment was further performed at 350 ° C for 1 hour to obtain a highly transparent polyesterimide film having a thickness of 20 m.
[0100] このポリエステルイミド膜は 180° 折曲げ試験によっても破断せず、靭性を示した。 [0100] The polyesterimide film did not break even in the 180 ° bending test, and showed toughness.
このポリエステルイミド膜につ ヽて動的粘弾性測定を行った結果、明瞭なガラス転移 点は観測されず、全く熱可塑性を示さなカゝつた。これは、このポリエステルイミド膜が 極めて高!、寸法安定性を有して 、ることを示して 、る。また線熱膨張係数は 13ppm ZKと非常に低い線熱膨張係数を示した。これは、大きな複屈折値(Δη=0. 135) から判断して、ポリエステルイミド鎖の面内配向によるものと考えられる。平均屈折率 より見積もった誘電率は 3. 04と比較的低い値を示した。機械的特性は、ヤング率が 5. 6GPa、破断強度が 0. 18GPaと高弾性、高強度を示し、破断伸びは 4. 1%であ つた。また 5%重量減少温度は、窒素中で 471°C、空気中で 428°Cであった。このよ うにこのポリエステルイミドは、銅基板に近い低線熱膨張係数、高いガラス転移温度、 非常に高いヤング率、比較的低い誘電率、高い熱安定性、および十分な膜靭性を 示した。 As a result of dynamic viscoelasticity measurement of this polyesterimide film, no clear glass transition point was observed, and the film showed no thermoplasticity at all. This indicates that the polyesterimide film is extremely high and has dimensional stability. The linear thermal expansion coefficient is 13ppm It showed ZK and very low linear thermal expansion coefficient. Judging from the large birefringence value (Δη = 0.135), this is considered to be due to the in-plane orientation of the polyesterimide chain. The dielectric constant estimated from the average refractive index was relatively low at 3.04. As for mechanical properties, the Young's modulus was 5.6 GPa, the breaking strength was 0.18 GPa, indicating high elasticity and high strength, and the breaking elongation was 4.1%. The 5% weight loss temperature was 471 ° C in nitrogen and 428 ° C in air. Thus, the polyesterimide exhibited a low coefficient of linear thermal expansion near copper substrates, a high glass transition temperature, a very high Young's modulus, a relatively low dielectric constant, high thermal stability, and good film toughness.
[0101] (実施例 8) (Example 8)
実施例 4に記載した方法に従って、 4, 4' ージァミノベンズァ-リドと実施例 2に記 載のテトラカルボン酸二無水物より重合を行い、透明、均一で粘稠なポリエステルイミ ド前駆体溶液を得た。  According to the method described in Example 4, polymerization was carried out using 4,4 ′ diaminobenzalide and the tetracarboxylic dianhydride described in Example 2 to obtain a transparent, uniform and viscous polyester imid. A precursor solution was obtained.
[0102] このポリエステルイミド前駆体溶液は、室温および 20°Cで一ヶ月間放置しても沈 澱、ゲル化は全く起こらず、極めて高い溶液貯蔵安定性を示した。 N, N—ジメチルァ セトアミド中、 30°C、 0. 5重量%の濃度でォストワルド粘度計にて測定したポリエステ ルイミド前駆体の固有粘度は 2. 37dLZgであり、極めて高分子量体であった。  [0102] The polyesterimide precursor solution did not precipitate or gel at all even when left at room temperature and 20 ° C for one month, and showed extremely high solution storage stability. The intrinsic viscosity of the polyesterimide precursor measured with an Ostwald viscometer at 30 ° C. and 0.5% by weight in N, N-dimethylacetamide was 2.37 dLZg, which was an extremely high molecular weight substance.
[0103] このポリエステルイミド前駆体溶液をガラス基板に塗布し、 60°C、 2時間で乾燥して 得たポリエステルイミド前駆体膜を基板上、減圧下 250°Cで 1時間、更に 300°Cで 1 時間熱イミドィ匕を行った後、残留応力を除去するために基板力 剥がして更に 350 °Cで 1時間、熱処理を行い、膜厚 20 mの透明なポリエステルイミド膜を得た。  [0103] This polyesterimide precursor solution was applied to a glass substrate and dried at 60 ° C for 2 hours. The obtained polyesterimide precursor film was placed on the substrate at 250 ° C under reduced pressure for 1 hour and further at 300 ° C. After performing thermal imidation for 1 hour, the substrate was peeled off to remove residual stress, and heat treatment was further performed at 350 ° C. for 1 hour to obtain a transparent polyesterimide film having a thickness of 20 m.
[0104] このポリエステルイミド膜は 180° 折曲げ試験によっても破断せず、靭性を示した。  [0104] The polyesterimide film did not break even in the 180 ° bending test, and showed toughness.
このポリエステルイミド膜につ ヽて動的粘弾性測定を行った結果、明瞭なガラス転移 点は観測されず、全く熱可塑性を示さなカゝつた。これは、このポリエステルイミド膜が 極めて高い寸法安定性を有していることを示している。また線熱膨張係数は 6. Oppm ZKと極めて低い線熱膨張係数を示した。これは、大きな複屈折値(Δη=0. 196) から判断して、ポリエステルイミド鎖の面内配向によるものと考えられる。平均屈折率 より見積もった誘電率は 3. 26であり、吸水率は 2. 06%であった。また 5%重量減少 温度は、窒素中で 480°C、空気中で 470°Cであった。このようにこのポリエステルイミ ドは極めて低い線熱膨張係数、高いガラス転移温度、比較的低い誘電率、高い熱安 定性、および十分な膜靭性を示した。 As a result of dynamic viscoelasticity measurement of this polyesterimide film, no clear glass transition point was observed, and the film showed no thermoplasticity at all. This indicates that the polyesterimide film has extremely high dimensional stability. The coefficient of linear thermal expansion was as low as 6. Oppm ZK. Judging from the large birefringence value (Δη = 0.196), this is considered to be due to the in-plane orientation of the polyesterimide chain. The dielectric constant estimated from the average refractive index was 3.26, and the water absorption was 2.06%. The 5% weight loss temperature was 480 ° C in nitrogen and 470 ° C in air. Like this polyester immi The metal exhibited a very low coefficient of linear thermal expansion, high glass transition temperature, relatively low dielectric constant, high thermal stability, and good film toughness.
[0105] (実施例 9)  (Example 9)
よく乾燥した攪拌機付密閉反応容器中に、 4-ァミノ安息香酸 4' -ァミノフ -ル( APAB) lOmmolを入れ、モレキュラーシーブス 4Aで十分に脱水した N, N—ジメチル ァセトアミドに溶解した後、この溶液に実施例 2に記載のテトラカルボン酸二無水物 粉末 lOmmolを徐々にカ卩えた。同一の溶媒で適宜希釈しながら室温で 48時間撹拌し 、透明、均一で粘稠なポリエステルイミド前駆体溶液を得た。  4-Aminobenzoic acid 4'-aminofurol (APAB) lOmmol is placed in a well-dried closed reaction vessel with a stirrer, dissolved in N, N-dimethylacetamide sufficiently dehydrated with molecular sieves 4A, and then dissolved in this solution. Then, 10 mmol of the tetracarboxylic dianhydride powder described in Example 2 was gradually dried. The mixture was stirred at room temperature for 48 hours while appropriately diluting with the same solvent to obtain a transparent, uniform and viscous polyesterimide precursor solution.
[0106] このポリエステルイミド前駆体溶液は室温および 20°Cで一ヶ月間放置しても沈澱 、ゲル化は全く起こらず、極めて高い溶液貯蔵安定を示した。 N, N—ジメチルァセト アミド中、 30°C、 0. 5重量%の濃度でォストワルド粘度計にて測定したポリエステルィ ミド前駆体の固有粘度は 2. 81dLZgと、極めて高重合体であった。  This polyesterimide precursor solution did not precipitate or gel at all even when left at room temperature and 20 ° C. for one month, and showed extremely high solution storage stability. The intrinsic viscosity of the polyesterimide precursor measured in an N, N-dimethylacetamide at 30 ° C. and a concentration of 0.5% by weight with an Ostwald viscometer was 2.81 dLZg, which was an extremely high polymer.
[0107] このポリエステルイミド前駆体溶液をガラス基板に塗布し、 60°C、 1時間で乾燥して 得たポリイエステルミド前駆体膜を基板上、減圧下 250°Cで 1時間、更に 300°Cで 1 時間、熱イミド化を行い、基板力も剥がした後、最後に 350°Cで 1時間熱処理して、膜 厚 20 μ mの透明なポリエステルイミド膜を得た。  The polyesterimide precursor solution was applied to a glass substrate and dried at 60 ° C. for 1 hour. The polyesterimide precursor film obtained was dried on the substrate at 250 ° C. under reduced pressure for 1 hour and further at 300 ° C. After performing thermal imidization at C for 1 hour and removing the substrate force, a final heat treatment was performed at 350 ° C for 1 hour to obtain a transparent polyesterimide film having a film thickness of 20 μm.
[0108] このポリエステルイミド膜は 180° 折曲げ試験によっても破断せず、靭性を示した。  [0108] The polyesterimide film did not break even in the 180 ° bending test, and showed toughness.
このポリエステルイミド膜にっ 、て動的粘弾性測定 (室温一 500°Cまで)を行った結 果、明瞭なガラス転移点は観測されな力つた。この結果より寸法安定性が極めて高い ことがわ力つた。線熱膨張係数は 3. 3ppmZKと、シリコン基板と同等の極めて低い 値が得られた。極めて高い複屈折値(Δη=0. 1990)より、この結果はポリエステル イミド鎖の高度な面内配向によるものと考えられる。吸水率は 0. 75%と、通常のポリ イミド市販品(吸水率 2. 9%)と比べてはるかに低い値が得られた。また、高精度 LC Rメータにて周波数 1MHzで測定した誘電率は 3. 22であり、平均屈折率より見積も つた誘電率 3. 26に近い値が得られた。また、誘電正接は 0. 025と比較的低い値で あった。引張特性は、ヤング率が 7. lGPa、破断強度が 0. 22GPaと、極めて高弾性 、高強度であり、破断伸びは 11%であった。 5%重量減少温度は、窒素中で 471°C 、空気中で 452°Cであった。このように本ポリエステルイミドは、比較的低い誘電率お よび誘電正接、シリコン基板に匹敵する極めて低い線熱膨張係数、極めて高いヤン グ率、および非常に低い吸水率を示し、且つ十分な膜靭性を併せ持つものであった As a result of dynamic viscoelasticity measurement (at room temperature up to 500 ° C) of the polyesterimide film, no clear glass transition point was observed. It was clear from the results that the dimensional stability was extremely high. The coefficient of linear thermal expansion was 3.3 ppmZK, an extremely low value equivalent to that of a silicon substrate. The extremely high birefringence value (Δη = 0.1990) suggests that this result is due to the high degree of in-plane orientation of the polyester imide chains. The water absorption was 0.75%, which was much lower than that of ordinary polyimide commercial products (water absorption 2.9%). The dielectric constant measured at a frequency of 1 MHz with a high-precision LCR meter was 3.22, which was close to the dielectric constant 3.26 estimated from the average refractive index. The dielectric loss tangent was 0.025, which was a relatively low value. As for the tensile properties, the Young's modulus was 7.1 lGPa and the breaking strength was 0.22 GPa, which was extremely high elasticity and high strength, and the breaking elongation was 11%. The 5% weight loss temperature was 471 ° C in nitrogen and 452 ° C in air. Thus, the polyesterimide has a relatively low dielectric constant and And a very low coefficient of linear thermal expansion comparable to that of a silicon substrate, a very high Young's modulus, and a very low water absorption, and had sufficient film toughness.
[0109] (実施例 10) (Example 10)
よく乾燥した攪拌機付密閉反応容器中に、 APAB7mmolおよび 4, 4' -ォキシジ ァ-リン 3mmolを入れ、モレキュラーシーブス 4Aで十分に脱水した N, N—ジメチルァ セトアミドに溶解した後、この溶液に実施例 2に記載のテトラカルボン酸二無水物粉 末 lOmmolを徐々に加えた。同一の溶媒で適宜希釈しながら室温で 28時間撹拌し、 透明、均一で粘稠なポリエステルイミド前駆体溶液を得た。  In a well-dried closed reaction vessel with a stirrer, 7 mmol of APAB and 3 mmol of 4,4'-oxydiamine were dissolved and dissolved in N, N-dimethylacetamide sufficiently dehydrated with molecular sieves 4A. 10 mmol of the tetracarboxylic dianhydride powder described in 2 was gradually added. The mixture was stirred at room temperature for 28 hours while appropriately diluting with the same solvent to obtain a transparent, uniform and viscous polyesterimide precursor solution.
[0110] このポリエステルイミド前駆体溶液は室温および 20°Cで一ヶ月間放置しても沈澱 、ゲル化は全く起こらず、極めて高い溶液貯蔵安定を示した。 N, N—ジメチルァセト アミド中、 30°C、 0. 5重量%の濃度でォストワルド粘度計にて測定したポリエステルィ ミド前駆体の固有粘度は 1. 08dLZgと、高重合体であった。  This polyesterimide precursor solution did not precipitate or gel at all even when left at room temperature and 20 ° C. for one month, and showed extremely high solution storage stability. The intrinsic viscosity of the polyesterimide precursor measured with an Ostwald viscometer at 30 ° C. and 0.5% by weight in N, N-dimethylacetamide was 1.08 dLZg, which was a high polymer.
[0111] このポリエステルイミド前駆体溶液をガラス基板に塗布し、 60°C、 1時間で乾燥して 得たポリイエステルミド前駆体膜を基板上、減圧下 250°Cで 1時間、更に 300°Cで 1 時間、熱イミド化を行い、基板力も剥がした後、最後に 350°Cで 1時間熱処理して、膜 厚 20 μ mの透明なポリエステルイミド膜を得た。  [0111] The polyesterimide precursor solution was applied to a glass substrate, and dried at 60 ° C for 1 hour. The resulting polyesterimide precursor film was placed on the substrate at 250 ° C under reduced pressure for 1 hour and further at 300 ° C. After performing thermal imidization at C for 1 hour and removing the substrate force, a final heat treatment was performed at 350 ° C for 1 hour to obtain a transparent polyesterimide film having a film thickness of 20 μm.
[0112] このポリエステルイミド膜は 180° 折曲げ試験によっても破断せず、靭性を示した。  [0112] The polyesterimide film did not break even in the 180 ° bending test, and showed toughness.
このポリエステルイミド膜にっ 、て動的粘弾性測定 (室温一 500°Cまで)を行った結 果、ガラス転移点は 395°Cであった。また、ガラス転移温度以上でもポリエステルイミ ド膜の貯蔵弾性率の低下は殆ど見られず寸法安定性が高!、ことがわかった。線熱膨 張係数は 14. 8ppmZKと、銅基板にほぼ等しい値が得られた。極めて高い複屈折 値(Δη=0. 1699)より、この結果はポリエステルイミド鎖の高度な面内配向によるも のと考えられる。吸水率は 0. 66%と、極めて低い値が得られた。また、平均屈折率よ り見積もった誘電率は 3. 20であった。引張特性は、ヤング率が 6. 28GPa、破断強 度が 0. 295GPaと、極めて高弾性、高強度であり、破断伸びは 36%であった。 5% 重量減少温度は、窒素中で 487°C、空気中で 485°Cであった。このように本ポリエス テルイミドは、比較的低い誘電率、銅基板にほぼ等しい低線熱膨張係数、極めて高 いガラス転移温度、非常に高いヤング率および極めて低い吸水率を示し、且つ十分 な膜靭性を併せ持つものであった。 As a result of dynamic viscoelasticity measurement (at room temperature to 500 ° C) of the polyesterimide film, the glass transition point was 395 ° C. In addition, even at a temperature equal to or higher than the glass transition temperature, the storage elastic modulus of the polyesterimide film was hardly reduced, indicating that the dimensional stability was high! The linear thermal expansion coefficient was 14.8 ppm ZK, almost the same value as that of a copper substrate. From the extremely high birefringence value (Δη = 0.1699), this result is considered to be due to the high degree of in-plane orientation of the polyesterimide chains. The water absorption was 0.66%, an extremely low value. The dielectric constant estimated from the average refractive index was 3.20. As for the tensile properties, the Young's modulus was 6.28 GPa and the breaking strength was 0.295 GPa, which was extremely high elasticity and strength, and the breaking elongation was 36%. The 5% weight loss temperature was 487 ° C in nitrogen and 485 ° C in air. Thus, the present polyesterimide has a relatively low dielectric constant, a low linear thermal expansion coefficient almost equal to that of a copper substrate, and an extremely high dielectric constant. It exhibited a high glass transition temperature, a very high Young's modulus and a very low water absorption, and had sufficient film toughness.
[0113] (比較例 1)  [0113] (Comparative Example 1)
2, 2' ービフエノールと二倍モルのトリメリット酸無水物クロリドより、エステル基含有 テトラカルボン酸二無水物を合成した。これは実施例 1に記載のテトラカルボン酸二 無水物の異性体である。この酸二無水物と p—フヱ-レンジァミンより、実施例 3および 4に示す方法に従ってポリエステルイミド前駆体を重合した。 N, N—ジメチルァセトァ ミド中、 30°C、 0. 5重量%の濃度でォストワルド粘度計にて測定したポリエステルイミ ド前駆体の固有粘度は 0. 53dLZgであった。このポリエステルイミド前駆体溶液をガ ラス基板に塗布し、 60°C、 2時間で乾燥して得たポリエステルイミド前駆体膜を基板 上で減圧下 300°Cで 1時間、熱イミド化を行い、膜厚 20 mの透明で強靭なポリエス テルイミド膜を得た。  An ester group-containing tetracarboxylic dianhydride was synthesized from 2,2′-biphenol and twice the molar amount of trimellitic anhydride chloride. This is the isomer of the tetracarboxylic dianhydride described in Example 1. From this acid dianhydride and p-phenylenediamine, a polyesterimide precursor was polymerized according to the methods shown in Examples 3 and 4. The intrinsic viscosity of the polyesterimide precursor measured in an N, N-dimethylacetamide at 30 ° C. and a concentration of 0.5% by weight with a Ostwald viscometer was 0.53 dLZg. This polyesterimide precursor solution was applied to a glass substrate, and dried at 60 ° C for 2 hours.The obtained polyesterimide precursor film was thermally imidized at 300 ° C for 1 hour under reduced pressure on the substrate. A transparent and tough polyesterimide film with a thickness of 20 m was obtained.
[0114] しカゝしながらこのポリエステルイミド膜の線熱膨張係数は 66ppmZKと高ぐ本発明 に係る要求特性を満足しな力つた。これは酸二無水物中の 2, 2' ービフエ-ル結合 力 Sパラ結合ではなぐ立体障害によりベンゼン環同士が大きくねじれた結果、ポリエス テルイミド鎖に大きな折曲りが生じて、熱イミドィ匕時の自発的面内配向が殆ど誘起さ れなかったことが原因である。  The linear thermal expansion coefficient of this polyesterimide film was as high as 66 ppmZK, and the required characteristics according to the present invention were satisfied. This is because the benzene rings are greatly twisted due to steric hindrance that cannot be caused by the 2,2'-biphenyl bond force in the acid dianhydride and the S-para bond. This is because spontaneous in-plane orientation was hardly induced.
産業上の利用可能性  Industrial applicability
[0115] 本発明のポリエステルイミドは、低誘電率、低線熱膨張係数、高ガラス転移温度を 有し、且つ十分な膜靭性を併せ持ち、さらにこれらに加えて、好適には低吸水率をも 併せ持ち得ることから、精密電子材料として、例えばフレキシブルプリント配線基板、 フレキシブルプリント配線基板上の電子回路のカバー材 (保護フィルム)、半導体素 子の保護膜、または集積回路の層間絶縁膜といった電子デバイス、特にはフレキシ ブルプリント配線基板への使用に適している。特に実施例 4一 10に記載したような銅 基板やシリコン基板に匹敵する極めて低い線熱膨張係数を生カゝして、本発明のポリ エステルイミド膜を、積層体、例えばアモルファスシリコンとの積層体とし、太陽電池 用ベースフィルムとして使用することも有用である。 [0115] The polyesterimide of the present invention has a low dielectric constant, a low coefficient of linear thermal expansion, a high glass transition temperature, and a sufficient film toughness. In addition to these, it preferably has a low water absorption. Since they can be held together, as precision electronic materials, for example, electronic devices such as flexible printed wiring boards, cover materials (protective films) for electronic circuits on flexible printed wiring boards, protective films for semiconductor devices, or interlayer insulating films for integrated circuits, In particular, it is suitable for use on flexible printed wiring boards. Particularly, the polyesterimide film of the present invention is laminated with a laminate, for example, amorphous silicon, by utilizing an extremely low linear thermal expansion coefficient comparable to that of a copper substrate or a silicon substrate as described in Example 410. It is also useful to use it as a base film for solar cells.

Claims

請求の範囲  The scope of the claims
[1] 式 (1)
Figure imgf000026_0001
式中、
[1] Expression (1)
Figure imgf000026_0001
Where
Aおよび Bは、独立して、二価の芳香族基、脂環式基またはそれらの組合せである 力 但し二価の基の結合位置関係は、全てパラ位またはそれに相当する関係にある で表される繰り返し単位を含むことを特徴とするポリエステルイミド前駆体。  A and B are each independently a divalent aromatic group, an alicyclic group or a combination thereof. However, the bonding positions of the divalent groups are all in the para-position or a relation equivalent thereto. A polyesterimide precursor comprising a repeating unit represented by the formula:
Aが、
Figure imgf000026_0002
で表される 2価の芳香族基あるいは脂環式基より選択され、 Bが、
A is
Figure imgf000026_0002
Is selected from divalent aromatic groups or alicyclic groups represented by
Figure imgf000026_0003
で表される二価の芳香族基あるいは脂環式基より選択される力 但し、 Aおよび Bに おけるシクロへキサン環の立体構造は、椅子型トランス配置である、請求項 1に記載 のポリエステルイミド前駆体。
Figure imgf000026_0003
The force selected from a divalent aromatic group or an alicyclic group represented by the formula: wherein the steric structure of the cyclohexane ring in A and B is a chair-type trans configuration. Imide precursor.
[3] N, N-ジメチルァセトアミド中、 30°C、 0. 5重量%の濃度における固有粘度が、 0. 3dLZg以上である、請求項 1または 2に記載のポリエステルイミド前駆体。 [3] In N, N-dimethylacetamide, the intrinsic viscosity at 30 ° C. and a concentration of 0.5% by weight is 0.5%. 3. The polyesterimide precursor according to claim 1, which is 3 dLZg or more.
請求項 1一 3いずれかに記載のポリエステルイミド前駆体を含む有機溶媒溶液。 式 (2) :
Figure imgf000027_0001
式中、
An organic solvent solution containing the polyesterimide precursor according to claim 13. Equation (2):
Figure imgf000027_0001
Where
Αおよび Βは、独立して、二価の芳香族基、脂環式基またはそれらの組合せである 力 但し二価の基の結合位置関係は、全てパラ位またはそれに相当する関係にある で表される繰り返し単位を含むことを特徴とするポリエステルイミド<  Α and Β are each independently a divalent aromatic group, an alicyclic group or a combination thereof. However, the bonding positions of the divalent groups are all in the para-position or a relation equivalent thereto. Polyester imide characterized by containing a repeating unit
Aが、
Figure imgf000027_0002
で表される 2価の芳香族基あるいは脂環式基より選択され、 Bが、
A is
Figure imgf000027_0002
Is selected from divalent aromatic groups or alicyclic groups represented by
Figure imgf000027_0003
<H で表される二価の芳香族基あるいは脂環式基より選択される力 但し、 Aおよび Bに おけるシクロへキサン環の立体構造は、椅子型トランス配置である、請求項 5に記載 のポリエステルイミド。 [7] ポリエステルイミド膜の製造方法であって、
Figure imgf000027_0003
The force selected from a divalent aromatic group or an alicyclic group represented by <H.However, the steric structure of the cyclohexane ring in A and B is in a chair-type trans configuration. Polyester imide. [7] A method for producing a polyesterimide film,
(i)請求項 1一 3 、ずれかに記載のポリエステルイミド前駆体の有機溶媒溶液を調製 し;  (i) preparing a solution of the polyesterimide precursor according to claim 13 in an organic solvent;
(ii) (i)で得られた溶液を、基板上に塗布、乾燥してポリエステルイミド前駆体膜を形 成し;そして  (ii) applying the solution obtained in (i) on a substrate and drying to form a polyesterimide precursor film; and
(iii)該前駆体膜を加熱脱水環化反応させるか、もしくは脱水閉環試薬を用いて環化 反応させる  (iii) The precursor film is subjected to a thermal dehydration cyclization reaction or a cyclization reaction using a dehydration ring closure reagent
ことによりポリエステルイミド膜を製造する方法。  And producing a polyesterimide film.
[8] 請求項 7に記載の方法により得られる、ポリエステルイミド膜。 [8] A polyesterimide film obtained by the method according to claim 7.
[9] 3. 3よりも低い誘電率、 30ppmZKよりも低い線熱膨張係数、 300°C以上のガラス 転移温度および十分な膜靭性を併せ持つ、請求項 8に記載のポリエステルイミド膜。 [9] The polyesterimide film according to claim 8, having a dielectric constant lower than 3.3, a linear thermal expansion coefficient lower than 30 ppmZK, a glass transition temperature of 300 ° C or higher, and sufficient film toughness.
[10] 請求項 8または 9に記載のポリエステルイミド膜を含む、電子デバイス。 [10] An electronic device comprising the polyesterimide film according to claim 8 or 9.
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KR20230147181A (en) 2021-04-02 2023-10-20 아사히 가세이 가부시키가이샤 Polyimide, resin composition, polyimide film, and method for producing the same

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