WO2005078762A3 - Appareil de rayonnement electromagnetique a haute intensite, et procedes s'y rapportant - Google Patents

Appareil de rayonnement electromagnetique a haute intensite, et procedes s'y rapportant Download PDF

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Publication number
WO2005078762A3
WO2005078762A3 PCT/CA2004/000202 CA2004000202W WO2005078762A3 WO 2005078762 A3 WO2005078762 A3 WO 2005078762A3 CA 2004000202 W CA2004000202 W CA 2004000202W WO 2005078762 A3 WO2005078762 A3 WO 2005078762A3
Authority
WO
WIPO (PCT)
Prior art keywords
electrodes
electromagnetic radiation
generate
flow
liquid
Prior art date
Application number
PCT/CA2004/000202
Other languages
English (en)
Other versions
WO2005078762A2 (fr
Inventor
David Malcolm Camm
Chee Chin
Rick Doolan
Tony Hewett
Arne Kjorvel
Tony Komasa
Mike Krasnich
Steve Mccoy
Joseph Reyers
Igor Rudic
Ludmila Shepelev
Greg Stuart
Tilman Thrum
Alex Viel
Original Assignee
Mattson Tech Canada Inc
David Malcolm Camm
Chee Chin
Rick Doolan
Tony Hewett
Arne Kjorvel
Tony Komasa
Mike Krasnich
Steve Mccoy
Joseph Reyers
Igor Rudic
Ludmila Shepelev
Greg Stuart
Tilman Thrum
Alex Viel
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mattson Tech Canada Inc, David Malcolm Camm, Chee Chin, Rick Doolan, Tony Hewett, Arne Kjorvel, Tony Komasa, Mike Krasnich, Steve Mccoy, Joseph Reyers, Igor Rudic, Ludmila Shepelev, Greg Stuart, Tilman Thrum, Alex Viel filed Critical Mattson Tech Canada Inc
Priority to PCT/CA2004/000202 priority Critical patent/WO2005078762A2/fr
Priority to CN2004800415926A priority patent/CN1926658B/zh
Priority to JP2006552429A priority patent/JP5074039B2/ja
Publication of WO2005078762A2 publication Critical patent/WO2005078762A2/fr
Publication of WO2005078762A3 publication Critical patent/WO2005078762A3/fr

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/84—Lamps with discharge constricted by high pressure
    • H01J61/90—Lamps suitable only for intermittent operation, e.g. flash lamp
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
    • H01J61/523—Heating or cooling particular parts of the lamp
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
    • H01J61/523—Heating or cooling particular parts of the lamp
    • H01J61/526—Heating or cooling particular parts of the lamp heating or cooling of electrodes

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Plasma Technology (AREA)
  • Cleaning In General (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)

Abstract

L'invention concerne un appareil produisant un rayonnement électromagnétique, qui comprend un générateur de flux configuré pour générer un flux de liquide le long d'une surface intérieure d'une enveloppe; une première et une seconde électrodes configurées pour générer un arc électrique à l'intérieur de l'enveloppe afin de produire le rayonnement électromagnétique; et une chambre d'échappement qui s'étend vers l'extérieur au-delà d'une des électrodes et est configurée pour loger une partie du flux de liquide. Dans un aspect, le générateur de flux est isolé électriquement. Dans un autre aspect, les électrodes sont configurées pour générer une impulsion de décharge électrique destinée à produire un flash d'irradiance; et l'appareil comprend un dispositif de suppression configuré pour éliminer une contamination particulaire du liquide, laquelle contamination particulaire, libérée durant le flash d'irradiance, est différente de celle libérée par les électrodes durant un fonctionnement continu.
PCT/CA2004/000202 2004-02-12 2004-02-12 Appareil de rayonnement electromagnetique a haute intensite, et procedes s'y rapportant WO2005078762A2 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
PCT/CA2004/000202 WO2005078762A2 (fr) 2004-02-12 2004-02-12 Appareil de rayonnement electromagnetique a haute intensite, et procedes s'y rapportant
CN2004800415926A CN1926658B (zh) 2004-02-12 2004-02-12 高强度电磁辐射装置与方法
JP2006552429A JP5074039B2 (ja) 2004-02-12 2004-02-12 高強度の電磁放射線発生装置及び発生方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/CA2004/000202 WO2005078762A2 (fr) 2004-02-12 2004-02-12 Appareil de rayonnement electromagnetique a haute intensite, et procedes s'y rapportant

Publications (2)

Publication Number Publication Date
WO2005078762A2 WO2005078762A2 (fr) 2005-08-25
WO2005078762A3 true WO2005078762A3 (fr) 2006-06-01

Family

ID=34842429

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CA2004/000202 WO2005078762A2 (fr) 2004-02-12 2004-02-12 Appareil de rayonnement electromagnetique a haute intensite, et procedes s'y rapportant

Country Status (3)

Country Link
JP (1) JP5074039B2 (fr)
CN (1) CN1926658B (fr)
WO (1) WO2005078762A2 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7781947B2 (en) 2004-02-12 2010-08-24 Mattson Technology Canada, Inc. Apparatus and methods for producing electromagnetic radiation

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20120045040A (ko) 2002-12-20 2012-05-08 맷슨 테크날러지 캐나다 인코퍼레이티드 피가공물 지지 방법
JP5718809B2 (ja) 2008-05-16 2015-05-13 マトソン テクノロジー、インコーポレイテッド 加工品の破壊を防止する方法および装置
CN104145321B (zh) * 2012-02-24 2016-07-06 马特森技术有限公司 用于生成电磁辐射的设备和方法
KR102436519B1 (ko) * 2015-08-18 2022-08-25 삼성전자주식회사 아크 램프 및 이를 갖는 기판 가열 장치
CN108370620B (zh) * 2015-12-30 2020-11-03 马特森技术有限公司 弧光灯的电极端头
KR102166480B1 (ko) * 2015-12-30 2020-10-15 베이징 이타운 세미컨덕터 테크놀로지 컴퍼니 리미티드 아크 램프용 질소 주입

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2877341A (en) * 1955-06-28 1959-03-10 Harold E Edgerton Liquid cooled flash-producing apparatus
US2906858A (en) * 1957-10-10 1959-09-29 Union Carbide Corp Liquid vortex arc torch process
US3366815A (en) * 1965-12-29 1968-01-30 Union Carbide Corp High pressure arc cooled by a thin film of liquid on the wall of the envelope
US3983436A (en) * 1974-12-19 1976-09-28 Max-Planck-Gesellschaft Zur Forderung Der Wissenschaften E.V. Electric arc discharge lamp
GB1468137A (en) * 1974-06-13 1977-03-23 Canadian Patents Dev High intensity radiation source
US6621199B1 (en) * 2000-01-21 2003-09-16 Vortek Industries Ltd. High intensity electromagnetic radiation apparatus and method

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3651358A (en) * 1970-05-04 1972-03-21 Union Carbide Corp Method and apparatus for extending the useful life of an arc radiation source
US4027185A (en) * 1974-06-13 1977-05-31 Canadian Patents And Development Limited High intensity radiation source
DE2433781C2 (de) * 1974-07-13 1984-12-13 Kernforschungszentrum Karlsruhe Gmbh, 7500 Karlsruhe Elektronenquelle
JPH0653580A (ja) * 1992-07-31 1994-02-25 Toshiba Medical Eng Co Ltd レーザ装置
JP2000195469A (ja) * 1998-12-24 2000-07-14 Fuji Koken Kk 超高圧水銀灯装置及びジャケット管
JP3458757B2 (ja) * 1999-03-30 2003-10-20 ウシオ電機株式会社 誘電体バリア放電ランプ装置
WO2003012824A1 (fr) * 2001-08-02 2003-02-13 Koninklijke Philips Electronics N.V. Lampe a decharge gazeuse basse pression

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2877341A (en) * 1955-06-28 1959-03-10 Harold E Edgerton Liquid cooled flash-producing apparatus
US2906858A (en) * 1957-10-10 1959-09-29 Union Carbide Corp Liquid vortex arc torch process
US3366815A (en) * 1965-12-29 1968-01-30 Union Carbide Corp High pressure arc cooled by a thin film of liquid on the wall of the envelope
GB1468137A (en) * 1974-06-13 1977-03-23 Canadian Patents Dev High intensity radiation source
US3983436A (en) * 1974-12-19 1976-09-28 Max-Planck-Gesellschaft Zur Forderung Der Wissenschaften E.V. Electric arc discharge lamp
US6621199B1 (en) * 2000-01-21 2003-09-16 Vortek Industries Ltd. High intensity electromagnetic radiation apparatus and method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7781947B2 (en) 2004-02-12 2010-08-24 Mattson Technology Canada, Inc. Apparatus and methods for producing electromagnetic radiation

Also Published As

Publication number Publication date
CN1926658A (zh) 2007-03-07
JP5074039B2 (ja) 2012-11-14
WO2005078762A2 (fr) 2005-08-25
CN1926658B (zh) 2012-10-10
JP2007522624A (ja) 2007-08-09

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