WO2005078419A1

WO2005078419A1 - Radiation photofluorographic device and radiation photofluorographic method

Info

Publication number: WO2005078419A1
Application number: PCT/JP2005/002323
Authority: WO
Inventors: Shigeru Sasakura
Original assignee: Pony Industry Co., Ltd.
Priority date: 2004-02-18
Filing date: 2005-02-16
Publication date: 2005-08-25

Abstract

A simple-configuration radiation photofluorographic device and a radiation photofluorographic method using this. The radiation photofluorographic device comprises a radiation source (2), a radiation detector (30) and a sample table (20) having a mounting unit (28) between the radiation source (2) and the radiation detector (30). A detector drive unit (40) is so constructed that the radiation detector (30) can move along a path (M) turning around a reference axis (L) along the radiation direction of a radiation ray emitted from the radiation source (2). The path (M) is formed in an arcuate shape with the radiation source (2) or its vicinity as its center. The detector drive unit (40) is so constructed as to allow a detector rotating mechanism (41) to rotate a rotation frame (51) around the reference axis (L), or to allow the cable (C) of the radiation detector (30) and/or the detector drive unit (40) to penetrate the rotation axis (44) of the detector rotating mechanism (41).

Description

Specification

Radiographic apparatus and radiographic method using the same

Technical field

The present invention relates to a fluoroscopic imaging apparatus that can be used for, for example, a fluoroscopic inspection of an electronic circuit board, and a radiographic imaging method using the same. More specifically, the present invention relates to a radioscopic imaging apparatus including a radiation source, a radiation detector, and a sample stand having a mounting portion between the radiation source and the radiation detector, and a radiographic imaging method using the same. Concerns.

Background art

[0002] As a fluoroscopic imaging apparatus having the above configuration, an apparatus described in Patent Document 1 below is known.

Patent Document 1: JP 2003-166951 A

[0003] In this apparatus, the detector is configured to be two-dimensionally movable in a YZ vertical plane and to be tiltable about an axis perpendicular to the vertical plane. The sample stage is configured to be rotatable in order to perform fluoroscopic imaging by changing the relative angle between the sample on the sample stage and the detection object.

[0004] However, according to the conventional apparatus, when the sample stage is rotated, there is a problem that the configuration of the apparatus is complicated because wiring and the like of the rotation mechanism are routed. In particular, if the radiation source is at the lower part, the wiring must be arranged around the relevant part, so that the wiring of the wiring bow I is complicated and troublesome.

Disclosure of the invention

Problems to be solved by the invention

[0005] In view of such conventional circumstances, an object of the present invention is to provide a radiographic imaging apparatus having a simple configuration and a radiographic imaging method using the same.

Means for solving the problem

[0006] In order to achieve the above object, the features of the radioscopic imaging apparatus according to the present invention include a radiation source, a radiation detector, and a sample table having a mounting portion between the radiation source and the radiation detector. To Wherein the radiation detector is configured to be movable along a trajectory that rotates around a reference axis along a radiation direction of radiation emitted from the radiation source. is there.

[0007] According to the feature, "the radiation detector is movable along a trajectory rotating around a reference axis along a radiation direction of the radiation emitted from the radiation source." Can move to different parts of the sample stage, and can relatively rotate the sample stage and the detection body. This makes it possible to perform fluoroscopic imaging of the sample from different directions around the vertical axis. Since the movement and rotation of the detection object with respect to the trajectory may be controlled, the upper detection object moving mechanism is simplified. In addition, since the lower sample stage does not need to be rotated, routing of the lower wiring is simplified.

[0008] The trajectory is desirably in an arc shape centered on the radiation source or its vicinity. Thus, the detection surface of the detection object can be vertically oriented with two degrees of freedom with respect to the radiation source, and the image can be stabilized.

[0009] It is preferable that the sample mounting portion of the sample stage is configured to be movable in a plane orthogonal to the reference axis. It is also a force that can position the desired imaging position of the sample on the imaging line connecting the detector and the source moved to an arbitrary position.

[0010] In addition, the detector driving unit is configured to rotate a rotating frame around the reference axis by a detector rotating mechanism, and the cable of the radiation detector and z or the detector driving unit is connected to the detector rotating. It is desirable to have a configuration that penetrates the rotating shaft of the mechanism. According to this configuration, by passing these cables through the rotating shaft, it is possible to prevent the cables from becoming entangled with the shaft of the rotating frame, and it is possible to improve the degree of freedom of control of the detector drive unit.

[0011] Further, the sample stage may be configured to raise and lower the mounting section along the reference axis direction. According to the configuration, the sample can be arranged at an arbitrary position on the photographing line, and a photographed image at an arbitrary magnification can be obtained.

[0012] On the other hand, a feature of the radiographic imaging method according to the present invention is that the radiographic imaging apparatus described in item V of the above-described configuration is used, and the radiographic imaging apparatus is arranged along the radiation direction of the radiation emitted from the radiation source. The radiation detector along a trajectory that rotates around the reference axis To shoot. Furthermore, the sample stage may be raised and lowered along the reference axis direction to take a picture.

The invention's effect

[0013] According to the features of the radiographic apparatus and the radiographic method using the apparatus according to the present invention, the configuration is simplified by the rationalization of the driving part and the cable management despite the high degree of freedom of imaging. It became possible to aim at.

[0014] Other objects, configurations, and effects of the present invention will become apparent from the following embodiments of the present invention.

Brief Description of Drawings

FIG. 1 is a front view showing a radiographic imaging apparatus.

FIG. 2 is a plan view showing a radiographic imaging apparatus.

FIG. 3 is an enlarged front view of a rotation mechanism.

FIG. 4 is an enlarged front view of a state where a main part of FIG. 3 is rotated.

FIG. 5 is a sectional view taken along line AA of FIG. 4.

FIG. 6 is a diagram showing a relationship between a detection object, a rotating frame, and an upper plate at the time of photographing, where (al) -a (a4) is a plan view, and (bl) — (b4) are (al) — The side view corresponding to () is shown.

Explanation of symbols

[0016] 1: radiographic imaging apparatus, 2: source, 3: source apparatus, 10: base frame, 12: pedestal, 20: sample base, 21: base base, 22: lifting mechanism, 22a: drive screw, 22b: slider, 23: lifting platform, 24: Y-axis linear motion mechanism, 24a: rail, 24b: slider, 25: X-axis linear motion mechanism, 25a: rail, 25b: slider, 26: middle plate, 27: upper Plate, 28: receiver, 30: radiation detector, 40: detector drive unit, 41: detector rotation mechanism, 42: upper frame, 43: rotary bearing, 44: rotary cylinder, 44a: hole, 45 : Rotation drive mechanism, 45a: Large gear, 45b: Pion gear, 45c, Motor, 50: Detector slide mechanism, 51: Rotating frame, 52: Slide table, 53: Moving frame, 54: Slide mechanism, 54a: rail, 54b: slider, 55: slide drive mechanism, 55a: rack, 55b: pion gear, 55c: motor, C: cable, F: imaging line, S: sample, L: reference axis, M: Orbit BEST MODE FOR CARRYING OUT THE INVENTION

Next, the present invention will be described in more detail with reference to the accompanying drawings.

As shown in FIGS. 16, a radiographic apparatus 1 according to the present invention includes a source apparatus 3 serving as an X-ray source 2, a sample table 20 on which a sample S is mounted, and a fluoroscopic X-ray. And a detector driving unit 40 for moving the radiation detector 30 three-dimensionally by rotation and sliding as described later.

The radiation source device 3 according to the present embodiment generates a sufficiently wide-angle X-ray from the radiation source 2 within a visual field V-V range. Therefore, it is possible to cope with the moving range of the radiation detector 30 by the detector driving unit 40 without basically moving the radiation source device 3.

The sample table 20 can move a mounting section 28 for mounting the sample S in an XY direction on a horizontal plane by an X-axis linear motion mechanism 25 and a Y-axis linear motion mechanism 24. The elevating mechanism 22 can elevate the placing unit 28 in the Z direction. The lifting mechanism 22 includes a driving screw 22a having a screw feed mechanism such as a trapezoidal screw or a ball screw and a slider 22b, the Y-axis linear movement mechanism 24 includes a rail 24a and a slider 24b, and the X-axis linear movement mechanism 25 includes a rail 25a. And a slider 25b.

Specifically, four driving screws 22 a are rotatably supported on bases 21 and 21 on pedestals 12 and 12 supported on base frame 10, A fixed slider 22b is screwed into this. The four drive screws 22a are linked to a motor (not shown), and drive up and down the elevator 23 with respect to the base 21 by driving rotation. A Y-axis linear motion mechanism 24 is placed between the lifting table 23 and the middle plate 26, and an X-axis linear motion mechanism 25 is placed between the middle plate 26 and the upper plate 27 while changing the direction. A drive mechanism that does not operate intervenes to control the position of the

The radiation detector 30 is obtained by attaching a scintillator for converting X-ray energy to light on an image sensor having a pixel matrix structure. The light receiving surface of the radiation detector 30 to which the scintillator 1 is attached is planar. Finally, the fluoroscopic image is output as an electric signal.

The detector drive unit 40 moves the radiation detector 30 along a trajectory M that rotates around a reference axis L along a radiation direction of radiation emitted from the radiation source 2. Here, this embodiment In this state, the reference axis L coincides with the Z-axis direction and is located at the center of the field of view V—V of the source 2. The reference axis L does not necessarily have to be located at the center of the field of view VV, but it is best to make it coincide with the center for the most efficient use of the source. The detector drive unit 40 rotates the rotating frame 51 around the reference axis L by the detector rotating mechanism 41. Further, the detector slide mechanism 50 drives and moves a slide table 52 that supports the radiation detector 30 along the trajectory M of the rotating frame 51. The orbit M has an arc shape centered on the source 2 or its vicinity.

The detector rotating mechanism 41 rotatably supports a hollow rotary cylinder 44 serving as a rotating shaft with respect to an upper frame 42 supported by the base frame 10 by a pair of upper and lower rotary bearings 43, 43. . The rotary cylinder 44 penetrates through the hole 44a in the direction of the reference axis L, and passes the cables C of the radiation detector 30 and the detector drive unit 40. This prevents the cables C from being entangled due to the rotation of the rotating frame 51. Regarding the rotary drive mechanism 45, a large gear 45a is fixed to the lower end of the rotary cylinder 44 with its center aligned with the reference axis L, and a corresponding pinion gear 45b is provided by a motor 45c supported by the upper frame 42. By driving, the rotation of the rotating frame 51 is controlled.

In the detection object slide mechanism 50, a rail 54a and a rack 55a are arranged along the track M on one side of the rotating frame 51! A slider 54b of the slide mechanism 54 guides the moving frame 53 along the track M along the rail 54a. Further, in the slide drive mechanism 55, the pinion gear 55b that meshes with the rack 55a is driven and rotated by the motor 55c, thereby driving the slide table 52 along the track M as a result. The trajectory M orients the imaging plane of the radiation detector 30 so as to always be perpendicular to the source 2.

With the above configuration, the relative position between the radiation source 2 and the radiation detector 30 with respect to the sample S on the mounting unit 28 can be changed as shown in FIG. The shooting angle and magnification can be changed freely. In addition, the direction in which the imaging is extended as described above can be appropriately selected.

Here, FIG. 6 will be further described. FIG. 6 is a diagram showing the relationship between the detection object, the rotating frame, and the upper plate at the time of imaging, and (al)-(a4) are plan views, respectively. bl)-(b4) show side views corresponding to (al)-(a4), respectively. The movement trajectory M of the detector 30 is rotated by the detector rotating mechanism 41 on the rotating frame 51 and further on the rotating frame 51. The position of the detection body 30 is determined by sliding. The sample S on the mounting portion 28 of the upper plate 27 is placed on the imaging line F connecting the center of the detection object 30 and the radiation source 2 determined appropriately as described above so as to pass through the desired portion or the vicinity thereof. The movement of the plate 27 is controlled. To adjust the magnification, the upper plate 27 may be moved up and down along the Z axis.

Finally, the possibility of still another embodiment of the present invention will be described.

In the above embodiment, the trajectory M is configured to be arc-shaped around the radiation source 2, but the trajectory M may be configured to be linear. However, by configuring the trajectory M in an arc shape as described above, the relative relationship between the radiation source 2 and the radiation detector 30 can be kept constant, and thereby the imaging conditions can be made uniform.

In the above-described embodiment, the radiation detection body 30 may be a member having a substantially planar force-receiving surface using a digital flat panel X-ray detector. For example, films, other types of flat panel detectors, scannable line sensors, etc. can be used.

The radiation source 2 is not necessarily limited to the X-ray radiation source, and other types of radiation may be used.

In the above embodiment, the reference axis L is aligned in the Z-axis direction. However, the reference axis L need not always be aligned, and the reference axis L can be oriented in any direction. Further, the reference axis L may be made coincident with the Z-axis direction, and the radiation source 2 may be arranged on the upper side and the detector 30 may be arranged on the lower side. However, the above-described embodiment is the most excellent in terms of reducing the load on the detector rotating mechanism 41.

[0031] It should be noted that the reference numerals written in the claims are merely for convenience of comparison with the drawings, and the present invention is limited to the configuration of the attached drawings. There is no.

Industrial applicability

[0032] The present invention can be used as any fluoroscopic imaging apparatus and imaging method for performing fluoroscopic imaging of a sample with radiation. For example, the bonding state of soldering on an electronic circuit board, the wettability of wires and chips of semiconductors and electronic components, the evaluation of mold resin, and the like can be performed by fluoroscopic imaging.

Claims

The scope of the claims

[1] A source (2), a radiation detector (30), and a sample stage (20) having a mounting portion (28) between the source (2) and the radiation detector (30) A radiographic apparatus provided with the radiation detector (30), wherein the radiation detector (30) rotates along a trajectory (M) rotating around a reference axis (L) along a radiation direction of radiation emitted from the radiation source (2). A radiographic imaging apparatus characterized by comprising a detector driving unit (40) so as to be movable.

[2] The radiographic imaging apparatus according to claim 1, wherein the trajectory (M) has an arc shape centered on the radiation source (2) or its vicinity.

[3] The radioscopic imaging apparatus according to claim 1, wherein the sample mounting portion (28) of the sample stage (20) is movable in a plane orthogonal to the reference axis (L). .

[4] The detector driving unit (40) is configured to rotate a rotating frame (51) around the reference axis (L) by a detector rotating mechanism (41), and the radiation detector (30) and Z or The radiographic imaging apparatus according to claim 1, wherein the cable (C) of the detector drive unit (40) penetrates a rotation axis (44) of the detector rotation mechanism (41).

[5] The method according to any one of claims 1 to 4, wherein the sample stage (20) is capable of moving the mounting portion (28) up and down along the direction of the reference axis (L). Radiography equipment

[6] A radiographic imaging method using the radiographic imaging apparatus according to any one of claims 1 to 4, wherein a reference axis (L) along a radiation direction of radiation emitted from the radiation source (2). A radiographic imaging method, characterized in that imaging is performed by moving the radiation detector (30) along a trajectory (M) rotating around it.

[7] A radiographic imaging method using the radiographic imaging apparatus according to claim 5, wherein the orbit rotates around a reference axis (L) along a radiation direction of radiation emitted from the radiation source (2). M), the radiation detector (30) is moved, and the sample table (20) is further moved up and down along the reference axis (L) with respect to the mounting section (28) to perform imaging. Characteristic radiography method.