WO2005077592A1 - Guidage lineaire aerostatique pour bras de positionnement dote d'une tete de montage de composants electriques - Google Patents

Guidage lineaire aerostatique pour bras de positionnement dote d'une tete de montage de composants electriques Download PDF

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Publication number
WO2005077592A1
WO2005077592A1 PCT/EP2005/050505 EP2005050505W WO2005077592A1 WO 2005077592 A1 WO2005077592 A1 WO 2005077592A1 EP 2005050505 W EP2005050505 W EP 2005050505W WO 2005077592 A1 WO2005077592 A1 WO 2005077592A1
Authority
WO
WIPO (PCT)
Prior art keywords
positioning arm
chassis
linear guide
air bearing
bearing elements
Prior art date
Application number
PCT/EP2005/050505
Other languages
German (de)
English (en)
Inventor
Mohammad Mehdianpour
Jan Brand
Michael Muth
Georg Slotta
Original Assignee
Siemens Aktiengesellschaft
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Aktiengesellschaft filed Critical Siemens Aktiengesellschaft
Priority to EP05716631A priority Critical patent/EP1718433A1/fr
Publication of WO2005077592A1 publication Critical patent/WO2005077592A1/fr

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25Movable or adjustable work or tool supports
    • B23Q1/26Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/38Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/01Frames, beds, pillars or like members; Arrangement of ways
    • B23Q1/017Arrangements of ways
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00Bearings for parts moving only linearly
    • F16C29/02Sliding-contact bearings
    • F16C29/025Hydrostatic or aerostatic
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00Bearings not otherwise provided for
    • F16C32/06Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/04Mounting of components, e.g. of leadless components
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2322/00Apparatus used in shaping articles
    • F16C2322/39General build up of machine tools, e.g. spindles, slides, actuators

Definitions

  • the invention relates to an aerostatic linear guide for a positioning arm with a placement head for equipping substrates with electrical components, the positioning arm on a chassis of a placement device being displaceable in a longitudinal direction and the placement head on the positioning arm being displaceably mounted in a transverse direction, and wherein the linear guide Has positioning arm associated air bearing elements and for these extending in the longitudinal direction guideways.
  • Such a device is e.g. made known by EP 0291119 B.
  • the chassis then has an upper bridge part made of cast iron, which carries a rail-like guide part made of granite, on which the guideways are formed, and on which a magnetic rail of a linear motor is attached at an angle to the guideways.
  • a longitudinally displaceable slide is guided on the guide part and is supported on the guideways of the guide part with the foot-like pressurized air bearing elements.
  • the carriage also receives a coil part of a linear motor, which is arranged at a short distance above the magnetic rail.
  • a permanent magnetic attraction which is absorbed by the aerostatic linear guide, acts between the permanent magnets of the magnetic rail and the iron core of the coil part, perpendicular to the separation gap. This has two mutually perpendicular guide planes that are inclined to the vector of the magnetic force. This will guide the slide in a defined manner.
  • the beam-like positioning arm extends transversely to the rail-like guide part and is attached to the underside of the slide, the slide being longer than that Width of the positioning arm in the longitudinal direction.
  • the invention has for its object to reduce the vibration problems and to increase the placement accuracy.
  • the guide rails according to claim 2 are relatively thin compared to the chassis and supported over a large area on this and transfer the bearing forces directly to the chassis. They have on their outside a smooth surface that is advantageous for air storage.
  • the positioning arm conforms in its outer contour to the chassis with a small distance, which enables the desired close support contact.
  • the space available for one correspondingly rigid design of the positioning arm is used to the maximum.
  • the positioning arm is supported against tilting at the corners of the storage area.
  • the middle guideway ensures precise centering along two closely adjacent guideways.
  • FIG. 1 shows a side view of a placement device for substrates with electrical components
  • FIG. 2 shows a top view, partially sectioned along line II-II, of the placement device according to FIG. 1,
  • FIG. 3 shows an enlarged section III from FIG. 1,
  • FIG. 4 shows an enlarged detail IV from FIG. 2 in a top view according to FIG. 3.
  • a placement device 1 has a dimensionally stable chassis 2, on which a positioning arm 3 is guided and driven linearly in a longitudinal direction x. ben is.
  • a placement head 4 is guided and driven transversely displaceably on the positioning arm 3.
  • electronic components 14 can be picked up from supply modules 16 at pick-up points 15 by means of the placement head 4 and placed on a substrate 17 with high accuracy.
  • the chassis 2 has a vertical support wall 5, on the upper side of which an approximately horizontal support 6 projects, which partially projects beyond the positioning arm 3.
  • An inclined outside 18 of the carrier 6 is covered with a horizontally extending magnetic rail 7 of a linear motor.
  • On the positioning arm 3 opposite a coil part 8 of the linear motor is attached.
  • An attractive force acts between permanent magnets of the magnetic rail 7 and an iron core of the coil part 8, which pulls the positioning arm 3 against the chassis 2 and is intercepted by an aerostatic linear guide.
  • the linear guide consists of three longitudinally extending guide tracks 9a, 9b 9c, which are formed on the outer sides of guide rails 10 resting on the chassis.
  • the linear guide further comprises foot-like air bearing elements 11, which are pivotally anchored directly to housing parts of the positioning arm 3 and engage in the guideways 9, the contour of the positioning arm 3 in the region of the connection to the chassis 2 to the cross-sectional contour of the between the supporting wall 5 and the carrier 6 formed inner corner is adjusted.
  • An inner, vertical guideway 9a is formed along the supporting wall 5 and supports the corresponding end face of the positioning arm 3 via two spaced-apart air bearing elements 11.
  • a middle, horizontally inclined guideway 9b is in direct connection to the inner guideway 9 on a horizontal section of the underside of the carrier 6 educated.
  • a middle air bearing element 11 engages in this guideway 9b the longitudinal direction x between the inner end air bearing elements 11 is anchored to the positioning arm 3.
  • the obliquely rising outer side 18 of the carrier 6 adjoins the horizontal central guideway 9 with the magnetic rail 7.
  • the normal vector of the guide plane 12 of this outer guide track 9c is inclined such that it runs essentially parallel to the connecting line between the motor center and the center of gravity of the positioning arm 3 in the yz plane.
  • the inclination of the magnetic rail 7 is oriented obliquely to all guideways 9, wherein it is set steeper than the inclination of the guiding plane 12, as a result of which better distribution of the bearing forces and reliable guidance is achieved.
  • placement device 1 placement device 2 chassis 3 positioning arm 4 placement head 5 support wall 6 carrier 7 magnetic rail 8 coil part 9 guideway 10 guide rail 11 air bearing element 12 guide level 14 component 15 pick-up point 16 feed module 17 substrate. 18 Outside X longitudinal direction y transverse direction

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Moving Of Heads (AREA)

Abstract

L'invention concerne un dispositif de montage (1) pour mettre en place des composants électriques (14) sur des supports (17), ce dispositif comportant un bras de positionnement (3) monté sur palier d'air sur un châssis (2) et mobile dans le sens longitudinal (x), une tête de montage (4) étant montée mobile dans le sens transversal (y). L'invention est caractérisée en ce que des éléments de palier d'air (11) d'un guidage linéaire aérostatique sont ancrés directement sur le bras de positionnement (3) et des voies de guidage (9a, 9b, 9c) des éléments de palier d'air (11) sont formées directement sur le châssis (2). Ainsi, les forces d'inertie du bras de positionnement (3) sont absorbées avec efficacité et les oscillations conséquentes réduites.
PCT/EP2005/050505 2004-02-11 2005-02-07 Guidage lineaire aerostatique pour bras de positionnement dote d'une tete de montage de composants electriques WO2005077592A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP05716631A EP1718433A1 (fr) 2004-02-11 2005-02-07 Guidage lineaire aerostatique pour bras de positionnement dote d'une tete de montage de composants electriques

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102004006755A DE102004006755A1 (de) 2004-02-11 2004-02-11 Aerostatische Linearführung für einen Positionierarm mit einem Bestückkopf für elektrische Bauelemente
DE102004006755.4 2004-02-11

Publications (1)

Publication Number Publication Date
WO2005077592A1 true WO2005077592A1 (fr) 2005-08-25

Family

ID=34832603

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2005/050505 WO2005077592A1 (fr) 2004-02-11 2005-02-07 Guidage lineaire aerostatique pour bras de positionnement dote d'une tete de montage de composants electriques

Country Status (3)

Country Link
EP (1) EP1718433A1 (fr)
DE (1) DE102004006755A1 (fr)
WO (1) WO2005077592A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010106079A1 (fr) * 2009-03-16 2010-09-23 Kulicke And Soffa Die Bonding Gmbh Machine de placement de composant électronique avec axe pneumatique pour son système de tri et/ou de placement
CN102126138A (zh) * 2010-12-29 2011-07-20 中捷机床有限公司 一种应用直线电机驱动的正l形滑板

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61112216A (ja) * 1984-11-07 1986-05-30 Hitachi Ltd 非接触駆動形平面移動台
EP0291119A1 (fr) * 1987-05-13 1988-11-17 Koninklijke Philips Electronics N.V. Dispositif de guidage
US6150740A (en) * 1999-01-21 2000-11-21 Aesop, Inc. Linear motion carriage system and method with bearings preloaded by inclined linear motor with high attractive force

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61112216A (ja) * 1984-11-07 1986-05-30 Hitachi Ltd 非接触駆動形平面移動台
EP0291119A1 (fr) * 1987-05-13 1988-11-17 Koninklijke Philips Electronics N.V. Dispositif de guidage
US6150740A (en) * 1999-01-21 2000-11-21 Aesop, Inc. Linear motion carriage system and method with bearings preloaded by inclined linear motor with high attractive force

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 010, no. 294 (P - 504) 7 October 1986 (1986-10-07) *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010106079A1 (fr) * 2009-03-16 2010-09-23 Kulicke And Soffa Die Bonding Gmbh Machine de placement de composant électronique avec axe pneumatique pour son système de tri et/ou de placement
CN102126138A (zh) * 2010-12-29 2011-07-20 中捷机床有限公司 一种应用直线电机驱动的正l形滑板

Also Published As

Publication number Publication date
DE102004006755A1 (de) 2005-09-08
EP1718433A1 (fr) 2006-11-08

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