WO2005076918A2 - Barrier layer process and arrangement - Google Patents
Barrier layer process and arrangement Download PDFInfo
- Publication number
- WO2005076918A2 WO2005076918A2 PCT/US2005/003551 US2005003551W WO2005076918A2 WO 2005076918 A2 WO2005076918 A2 WO 2005076918A2 US 2005003551 W US2005003551 W US 2005003551W WO 2005076918 A2 WO2005076918 A2 WO 2005076918A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- atomic layer
- layer deposition
- substrate
- chamber
- source
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/403—Oxides of aluminium, magnesium or beryllium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45544—Atomic layer deposition [ALD] characterized by the apparatus
- C23C16/45548—Atomic layer deposition [ALD] characterized by the apparatus having arrangements for gas injection at different locations of the reactor for each ALD half-reaction
- C23C16/45551—Atomic layer deposition [ALD] characterized by the apparatus having arrangements for gas injection at different locations of the reactor for each ALD half-reaction for relative movement of the substrate and the gas injectors or half-reaction reactor compartments
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45555—Atomic layer deposition [ALD] applied in non-semiconductor technology
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
- C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/844—Encapsulations
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Laminated Bodies (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006552260A JP2007522344A (en) | 2004-02-09 | 2005-02-04 | Barrier layer process and apparatus |
EP05712844A EP1713950A2 (en) | 2004-02-09 | 2005-02-04 | Barrier layer process and arrangement |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/774,841 | 2004-02-09 | ||
US10/774,841 US20050172897A1 (en) | 2004-02-09 | 2004-02-09 | Barrier layer process and arrangement |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2005076918A2 true WO2005076918A2 (en) | 2005-08-25 |
WO2005076918A3 WO2005076918A3 (en) | 2006-10-19 |
Family
ID=34827064
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2005/003551 WO2005076918A2 (en) | 2004-02-09 | 2005-02-04 | Barrier layer process and arrangement |
Country Status (6)
Country | Link |
---|---|
US (1) | US20050172897A1 (en) |
EP (1) | EP1713950A2 (en) |
JP (1) | JP2007522344A (en) |
CN (1) | CN1918322A (en) |
TW (1) | TW200539252A (en) |
WO (1) | WO2005076918A2 (en) |
Cited By (3)
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JP2009540122A (en) * | 2006-06-05 | 2009-11-19 | ゼネラル・エレクトリック・カンパニイ | Roll-to-roll atomic layer deposition system and method on continuously fed objects |
US20120219708A1 (en) * | 2006-03-26 | 2012-08-30 | Lotus Applied Technology, Llc | Atomic layer deposition method utilizing multiple precursor zones for coating flexible substrates |
EP3054032A1 (en) | 2015-02-09 | 2016-08-10 | Coating Plasma Industrie | Installation for film deposition onto and/or modification of the surface of a moving substrate |
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EP1629543B1 (en) * | 2003-05-16 | 2013-08-07 | E.I. Du Pont De Nemours And Company | Barrier films for flexible polymer substrates fabricated by atomic layer deposition |
US7115304B2 (en) | 2004-02-19 | 2006-10-03 | Nanosolar, Inc. | High throughput surface treatment on coiled flexible substrates |
US20090032108A1 (en) * | 2007-03-30 | 2009-02-05 | Craig Leidholm | Formation of photovoltaic absorber layers on foil substrates |
US8927315B1 (en) | 2005-01-20 | 2015-01-06 | Aeris Capital Sustainable Ip Ltd. | High-throughput assembly of series interconnected solar cells |
WO2007106076A2 (en) * | 2006-03-03 | 2007-09-20 | Prasad Gadgil | Apparatus and method for large area multi-layer atomic layer chemical vapor processing of thin films |
US7781031B2 (en) * | 2006-12-06 | 2010-08-24 | General Electric Company | Barrier layer, composite article comprising the same, electroactive device, and method |
US11136667B2 (en) | 2007-01-08 | 2021-10-05 | Eastman Kodak Company | Deposition system and method using a delivery head separated from a substrate by gas pressure |
US7947128B2 (en) * | 2007-06-28 | 2011-05-24 | Siemens Energy, Inc. | Atomic layer epitaxy processed insulation |
EP2188413B1 (en) * | 2007-09-07 | 2018-07-11 | Fujifilm Manufacturing Europe B.V. | Method for atomic layer deposition using an atmospheric pressure glow discharge plasma |
FR2956869B1 (en) * | 2010-03-01 | 2014-05-16 | Alex Hr Roustaei | SYSTEM FOR PRODUCING HIGH CAPACITY FLEXIBLE FILM FOR PHOTOVOLTAIC AND OLED CELLS BY CYCLIC LAYER DEPOSITION |
BR112012008642A2 (en) | 2009-10-14 | 2017-06-13 | Lotus Applied Tech Llc | inhibition of precursor excess transport between separate precursor zones in an atomic layer deposition system. |
SE534932C2 (en) * | 2009-12-21 | 2012-02-21 | Stora Enso Oyj | A paper or cardboard substrate, a process for manufacturing the substrate and a package formed from the substrate |
JP5621258B2 (en) * | 2009-12-28 | 2014-11-12 | ソニー株式会社 | Film forming apparatus and film forming method |
US8637123B2 (en) * | 2009-12-29 | 2014-01-28 | Lotus Applied Technology, Llc | Oxygen radical generation for radical-enhanced thin film deposition |
EP2360293A1 (en) * | 2010-02-11 | 2011-08-24 | Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO | Method and apparatus for depositing atomic layers on a substrate |
JP5912228B2 (en) * | 2010-05-17 | 2016-04-27 | 凸版印刷株式会社 | Method for producing gas barrier laminate |
AU2011264922B2 (en) * | 2010-06-08 | 2015-11-26 | President And Fellows Of Harvard College | Low-temperature synthesis of silica |
US9297076B2 (en) | 2010-07-23 | 2016-03-29 | Lotus Applied Technology, Llc | Substrate transport mechanism contacting a single side of a flexible web substrate for roll-to-roll thin film deposition |
FI20105903A0 (en) | 2010-08-30 | 2010-08-30 | Beneq Oy | Device |
FI20105906A0 (en) * | 2010-08-30 | 2010-08-30 | Beneq Oy | Device |
FI20105905A0 (en) | 2010-08-30 | 2010-08-30 | Beneq Oy | Spray head and device |
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JP5768962B2 (en) * | 2011-03-23 | 2015-08-26 | 凸版印刷株式会社 | Film formation processing drum in atomic layer deposition method film formation apparatus |
CN103459665B (en) | 2011-03-29 | 2017-02-22 | 凸版印刷株式会社 | Rolled film formation apparatus |
EP2740593A4 (en) | 2011-07-28 | 2015-04-15 | Toppan Printing Co Ltd | Laminate, gas barrier film, production method for laminate, and laminate production device |
EP2557198A1 (en) * | 2011-08-10 | 2013-02-13 | Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO | Method and apparatus for depositing atomic layers on a substrate |
EP2773793B1 (en) | 2011-10-31 | 2017-11-29 | 3M Innovative Properties Company | Methods for applying a coating to a substrate in rolled form |
KR20150022782A (en) | 2012-05-31 | 2015-03-04 | 도판 인사츠 가부시키가이샤 | Rolled film formation device |
TWI549823B (en) * | 2013-03-29 | 2016-09-21 | 財團法人工業技術研究院 | Composite film and manufacturing method of the same |
GB2514539A (en) * | 2013-04-09 | 2014-12-03 | Innovia Films Ltd | UV protected films |
US9435028B2 (en) | 2013-05-06 | 2016-09-06 | Lotus Applied Technology, Llc | Plasma generation for thin film deposition on flexible substrates |
JP6028711B2 (en) * | 2013-10-23 | 2016-11-16 | 住友金属鉱山株式会社 | Double-sided film forming method and method for producing resin film with metal base layer |
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US11732345B2 (en) | 2020-06-04 | 2023-08-22 | Applied Materials, Inc. | Vapor deposition apparatus and method for coating a substrate in a vacuum chamber |
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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US5300189A (en) * | 1986-05-21 | 1994-04-05 | Hitachi, Ltd. | Plasma surface treatment method and apparatus |
US20020043216A1 (en) * | 2000-08-09 | 2002-04-18 | Chul-Ju Hwang | Atomic layer deposition method and semiconductor device fabricating apparatus having rotatable gas injectors |
US20030207032A1 (en) * | 2002-05-02 | 2003-11-06 | Micron Technology, Inc. | Methods, systems, and apparatus for atomic-layer deposition of aluminum oxides in integrated circuits |
US20040194691A1 (en) * | 2001-07-18 | 2004-10-07 | George Steven M | Method of depositing an inorganic film on an organic polymer |
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SE393967B (en) * | 1974-11-29 | 1977-05-31 | Sateko Oy | PROCEDURE AND PERFORMANCE OF LAYING BETWEEN THE STORAGE IN A LABOR PACKAGE |
EP0122092A3 (en) * | 1983-04-06 | 1985-07-10 | General Engineering Radcliffe Limited | Vacuum coating apparatus |
US5224441A (en) * | 1991-09-27 | 1993-07-06 | The Boc Group, Inc. | Apparatus for rapid plasma treatments and method |
CA2126731A1 (en) * | 1993-07-12 | 1995-01-13 | Frank Jansen | Hollow cathode array and method of cleaning sheet stock therewith |
KR100296692B1 (en) * | 1996-09-10 | 2001-10-24 | 사토 도리 | Plasma CVD |
JP2000133836A (en) * | 1998-10-22 | 2000-05-12 | Japan Science & Technology Corp | Variable wavelength light-emitting device and manufacture thereof |
US6713177B2 (en) * | 2000-06-21 | 2004-03-30 | Regents Of The University Of Colorado | Insulating and functionalizing fine metal-containing particles with conformal ultra-thin films |
-
2004
- 2004-02-09 US US10/774,841 patent/US20050172897A1/en not_active Abandoned
-
2005
- 2005-02-04 CN CNA2005800043805A patent/CN1918322A/en active Pending
- 2005-02-04 TW TW094103771A patent/TW200539252A/en unknown
- 2005-02-04 JP JP2006552260A patent/JP2007522344A/en active Pending
- 2005-02-04 WO PCT/US2005/003551 patent/WO2005076918A2/en not_active Application Discontinuation
- 2005-02-04 EP EP05712844A patent/EP1713950A2/en not_active Withdrawn
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5300189A (en) * | 1986-05-21 | 1994-04-05 | Hitachi, Ltd. | Plasma surface treatment method and apparatus |
US20020043216A1 (en) * | 2000-08-09 | 2002-04-18 | Chul-Ju Hwang | Atomic layer deposition method and semiconductor device fabricating apparatus having rotatable gas injectors |
US20040194691A1 (en) * | 2001-07-18 | 2004-10-07 | George Steven M | Method of depositing an inorganic film on an organic polymer |
US20030207032A1 (en) * | 2002-05-02 | 2003-11-06 | Micron Technology, Inc. | Methods, systems, and apparatus for atomic-layer deposition of aluminum oxides in integrated circuits |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20120219708A1 (en) * | 2006-03-26 | 2012-08-30 | Lotus Applied Technology, Llc | Atomic layer deposition method utilizing multiple precursor zones for coating flexible substrates |
US9469901B2 (en) * | 2006-03-26 | 2016-10-18 | Lotus Applied Techonology, Llc | Atomic layer deposition method utilizing multiple precursor zones for coating flexible substrates |
JP2009540122A (en) * | 2006-06-05 | 2009-11-19 | ゼネラル・エレクトリック・カンパニイ | Roll-to-roll atomic layer deposition system and method on continuously fed objects |
EP3054032A1 (en) | 2015-02-09 | 2016-08-10 | Coating Plasma Industrie | Installation for film deposition onto and/or modification of the surface of a moving substrate |
WO2016128259A1 (en) | 2015-02-09 | 2016-08-18 | Coating Plasma Industrie | Installation for film deposition onto and/or modification of the surface of a moving substrate |
Also Published As
Publication number | Publication date |
---|---|
WO2005076918A3 (en) | 2006-10-19 |
US20050172897A1 (en) | 2005-08-11 |
TW200539252A (en) | 2005-12-01 |
CN1918322A (en) | 2007-02-21 |
EP1713950A2 (en) | 2006-10-25 |
JP2007522344A (en) | 2007-08-09 |
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