WO2005068679A1 - Method for activating surface of metal member - Google Patents

Method for activating surface of metal member Download PDF

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Publication number
WO2005068679A1
WO2005068679A1 PCT/JP2005/000607 JP2005000607W WO2005068679A1 WO 2005068679 A1 WO2005068679 A1 WO 2005068679A1 JP 2005000607 W JP2005000607 W JP 2005000607W WO 2005068679 A1 WO2005068679 A1 WO 2005068679A1
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WO
WIPO (PCT)
Prior art keywords
gas
furnace
metal member
hcn
metal
Prior art date
Application number
PCT/JP2005/000607
Other languages
French (fr)
Japanese (ja)
Inventor
Kaoru Hoshino
Makoto Miyashita
Takashi Kawamura
Toshiko Totsuka
Hiroshi Eiraku
Kuniji Yashiro
Takumi Kurosawa
Original Assignee
Parker Netsushori Kogyo K.K.
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Application filed by Parker Netsushori Kogyo K.K. filed Critical Parker Netsushori Kogyo K.K.
Priority to DE602005015934T priority Critical patent/DE602005015934D1/en
Priority to CN2005800025506A priority patent/CN1910303B/en
Priority to US10/586,626 priority patent/US20070204934A1/en
Priority to JP2005517113A priority patent/JP4861703B2/en
Priority to EP05703844A priority patent/EP1707646B1/en
Publication of WO2005068679A1 publication Critical patent/WO2005068679A1/en

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Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/02Pretreatment of the material to be coated
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/28Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases more than one element being applied in one step
    • C23C8/30Carbo-nitriding
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/28Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases more than one element being applied in one step
    • C23C8/30Carbo-nitriding
    • C23C8/32Carbo-nitriding of ferrous surfaces

Definitions

  • the present invention relates to a metal member pretreatment method for activating a metal member surface prior to subjecting the metal member to a diffusion and infiltration treatment such as nitriding and carburizing.
  • a gas nitriding method or a gas carburizing method in which a nitrided or carburized layer is formed on the surface of a metal member is performed by using a component made of an iron-based material. It is mainly widely implemented.
  • the passivation film (oxide, etc.) present on the surface of the member causes nitrogen or carbon to enter the metal member surface. This is a problem in that the penetration and diffusion of the components are hindered, and processing defects and processing unevenness of the above members occur. Therefore, prior to these diffusion and infiltration treatments, activation treatment of the surface of the metal member is performed.
  • the most widely used surface activation treatment is a method using a chloride compound represented by a marcoizing treatment.
  • a chloride compound represented by a marcoizing treatment As the chloride, a butyl chloride resin, a salted ammonium salt, methylene chloride, or the like is used.
  • the chloride is placed in a processing furnace together with a metal member and heated. By the heating, these chlorides are decomposed to generate HC1, and the generated HC1 destroys (modifies) the passivation film on the surface of the metal member and activates the surface. Make sure that the diffusion and infiltration treatment is assured.
  • the surface activation of the metal member by the above-mentioned salt ridden is performed by gas nitriding / gas nitrocarburizing in which the decomposition-generated H C1 only wears the furnace inner wall made of brick / metal. Reacts with ammonia, which is an atmospheric gas, to produce ammonium chloride, which remains on the surface of a metal member (work) that is not only a cause of trouble due to deposition of the salt in the furnace or the exhaust system. This leads to a reduction in the corrosion resistance and fatigue strength of the member.
  • the above NF is decomposed by heating to generate fluorine, and the generated fluorine is a metal
  • the passivation film on the member surface is changed to a fluoride film to activate the metal member surface.
  • a fluorine compound (NF) NF
  • Advanced treatment is required to detoxify the contained NF and HF, which hinders the spread of the method.
  • the method of activating a metal member surface using the halogen compound has problems such as a problem of deposits in a furnace, wear of a furnace inner wall, and a need for a detoxification facility for exhaust gas.
  • problems such as a problem of deposits in a furnace, wear of a furnace inner wall, and a need for a detoxification facility for exhaust gas.
  • development of a method for activating a metal member surface without using a halide has been promoted.
  • the ammonia gas nitriding method described in Patent Document 2 generates a reducing radical generated by thermal decomposition of acetone and CO on the surface of a high chromium alloy steel member, which is a work, thereby reducing the surface of the alloy steel member.
  • This is a method of activating the passivation film by reduction.
  • acetone is thermally decomposed according to the following equation (1) on the surface of the heated high chromium alloy steel member, and reducing radicals and CO are generated on the surface of the high chromium alloy member.
  • the oxide film (MO) on the surface of the metal member is reduced by the following equation (2).
  • the HCN generated by the above equation (4) reduces the passivation film on the surface of the high chromium alloy member by the following reaction.
  • the C and N of the generated Cr (CN) diffuse into the surface of high chromium alloy members and contribute to carburizing and nitriding.
  • Patent Document 1 JP-A-3-44457
  • Patent Document 2 Japanese Patent Application No. 9-38341
  • the method described in Patent Document 2 is excellent in that the problem of the method for activating the surface of a metal member with chlorides described in Patent Document 1 is solved in principle.
  • the method described in Patent Document 2 uses acetone which is liquid at normal temperature and normal pressure, it requires an apparatus for introducing acetone vapor, and since it is not easy to control the flow rate of acetone, it has a uniform active surface. There is a disadvantage that it is difficult to obtain a metal member.
  • the present inventors have developed a method using a compound that is a gas at normal temperature and normal pressure in place of acetone, which has a problem in handling, and completed the present invention. That is, the configuration of the present invention is as follows.
  • a method for activating the surface of a metal member wherein HCN is generated by a catalytic action of a metal jig, and the generated HCN is caused to act on the surface of the metal member.
  • the metal furnace inner wall or the metal jig contains one or more metals selected from the group consisting of Fe, Ni, Co, Cu, Cr, Mo, Nb, V, Ti and Zr.
  • the concentration of HCN generated in the furnace is 100 mg / m 3 or more, 2.
  • the method for activating a metal member surface according to the above 1, wherein the dew point of the metal is 5 ° C. or less.
  • a high-alloy steel part which is difficult to perform a diffusion and infiltration treatment such as a gas nitriding method or a gas carburizing method in which a nitrided layer, a carburized layer or a carbonitrided layer is formed on the surface of a metal member.
  • the surface passivation film is formed by using gases normally used in gas heat treatment and generating HCN gas in the furnace by utilizing the catalytic action of the surface of the metal and / or metal furnace material to be treated.
  • reaction product of CO and ammonia in the atmospheric gas is similar in terms of the effect on the passivation film by comparing the above equations (2) and (5), and the presence of both CH 'and HCN Is
  • a force that is a sufficient condition for activation of the surface of a high chromium alloy steel member is not necessarily a necessary condition, and it is assumed that it is not a necessary condition. We worked on confirming the revitalization effect.
  • the gas selected from the compounds was introduced into a matsufur furnace made of SUS310S and heated to 550 ° C to investigate the formation of HCN. As a result, it was confirmed that carbon monoxide, carbon dioxide, acetylene, ethylene, propane, and butane each clearly generate HCN in combination with ammonia.
  • HCN generation reaction by ammonia and the carbon-containing compound can be represented by the following equations, respectively.
  • a gas selected from a nitriding atmosphere gas (NH: N molar ratio 1: 1) and various carbon-containing compounds.
  • the comparison of the amount of HCN generated by the reaction with nitric acid is based on the nitriding atmosphere gas (NH: N molar ratio 1: 1).
  • Each carbon-containing compound is contained in an equivalent ratio of 1%, and the inner wall is introduced into a SUS310S Matsufuru furnace, heated to 550 ° C for 30 minutes, and the reaction of the above formulas (7)-(12) is carried out. I did it. As a result, the amount of HCN produced by each carbon-containing compound was in the following order.
  • each of these compounds is introduced into a heating furnace at the initial stage of the nitriding treatment to have an activating effect. Whether or not it was evaluated using a SUS304 plate material. As a result, C
  • RX gas is a mixture of hydrocarbon gas (for example, propane gas, butane gas, natural gas) and air at almost chemical equivalents, and decomposes in a catalyst layer maintained at 1000 ° C to produce C ⁇ and H (N).
  • CO gas as a carbon supply compound for activating the metal member surface
  • the required injection amount of CO gas in the present invention is about 1/10 (capacity) of the gas nitrocarburizing atmosphere, the influence of HO and C In some cases, it can be used as a C ⁇ source.
  • the activation effect of the alloy steel member surface according to the present invention is due to HCN.
  • the above activation effect depends on the HCN concentration in the furnace atmosphere. Proper concentration of HCN to obtain activating effect satisfying ranges from 100- 30, 000mg / m 3. If the concentration of HCN is less than 100 mg / m 3 , the above activating effect cannot be expected. On the other hand, HCN concentration 30, the activating effect is saturated at OOOmgZm 3 exceeds, not only economically disadvantageous, is not preferred in the sooting by thermal decomposition of a carbon feed I ⁇ product (carbon produced in the furnace) occurs .
  • the dew point of the furnace atmosphere gas is preferably 5 ° C or less. If the above dew point is higher than 5 ° C, the metal surface activated by HCN gas is re-oxidized by H ⁇ in the atmosphere.
  • the environmental advantage of the method of the present invention is that, as explained in the above reaction formula (5), HCN that has contributed to activation of the surface of a metal member is taken into the surface of the member and nitrogen of the member is reduced. HCN, which contributes to carving and carburization, does not leave residue on the surface of the member, and is discharged as exhaust gas without contributing to the reaction, can be easily detoxified by the ammonia combustion device attached to the nitriding device. And no new equipment is required.
  • a further advantage of the present invention is that the nitridation processing time is reduced by the smooth progress of the nitridation process.
  • Gas nitriding of metal members is usually performed according to the following schedule.
  • the nitriding atmosphere gas (NH + N) was reduced to 1% of the furnace volume per hour.
  • the pressure is maintained at +0.5 kPa by a pressure valve, and the extruded exhaust gas is burned and decomposed by an exhaust gas combustion device.
  • a carbon supply compound is introduced into the nitriding atmosphere gas to generate HCN to activate the metal member surface, and thereafter, the carbon supply compound By stopping the introduction, the process can be shifted to the nitriding step.
  • the inner wall of the processing furnace used in the present invention is made of metal.However, even if the inner wall is not made of metal, the metal member to be treated serves as a catalyst for HCN, and the metal member is used as a furnace.
  • the jig to be held inside may be made of metal.
  • the metal constituting the metal inner wall, the metal member, and the jig includes, for example, one or more metals selected from Fe, Ni, Co, Cu, Cr, Mo, Nb, V, Ti, and Zr. Is preferred.
  • Metal members subjected to the surface activation treatment by the method of the present invention include steel for cold mold, steel for hot mold, steel for plastic mold, high speed tool steel, powder high speed tool steel, These include chromium molybdenum steel, maraging steel, austenitic stainless steel, ferritic stainless steel, martensitic stainless steel, martensitic heat-resistant steel, austenitic heat-resistant steel, and nickel-based superalloys.
  • the metal member is placed in the processing furnace by an appropriate jig according to a conventional method and subjected to a surface activation treatment.
  • the surface treatment gases supplied into the furnace are a carbon supply compound and ammonia, which are gases at normal temperature and normal pressure, and are supplied into the furnace from dedicated cylinders.
  • the metal members are set in the furnace, the atmosphere in the furnace is vacuum purged or replaced with nitrogen gas, and then the nitriding atmosphere gas (ammonia alone or ammonia + nitrogen gas or ammonia + nitrogen gas + After introducing a hydrogen gas) and establishing a reducing atmosphere, the temperature is raised and the carbon supply compound of the present invention is introduced.
  • the ammonia gas and the carbon supply mixture are heated in a furnace at 300 ° C or higher, HCN is generated by the catalytic action of the metal surface.
  • the ratio of the flow rate of the nitriding atmosphere gas, ammonia, to the flow rate of the carbon feed conjugate to be introduced should be in the range of 1: 0.000001 to 1: 0.1. If the flow rate ratio of the carbon-supplying compound is lower than 1: 0.000001, the activation effect cannot be obtained because the amount of generated HCN is low. If the flow rate ratio of the carbon-supplying compound is more than 1: 0.1, the activation effect is saturated and economically disadvantageous.
  • the carbon supply compound is one or more gaseous compounds selected from acetylene, ethylene, propane, butane and carbon monoxide as described above, and is supplied into the processing furnace simultaneously with the ammonia-containing gas as described above. You can also.
  • the temperature of the ammonia-containing gas in the furnace reaches about 300 ° C.
  • the introduction of the carbon supply compound is started.
  • the carbon supply compound is introduced at the same time as the temperature rise, and It is desirable to generate HCN.
  • FIG. 1 1 is a Matsufur furnace, 2 is its outer shell, 3 is a heater, 4 is an inner vessel (retort), 5 is a gas introduction pipe, 6 is an exhaust pipe, 7 is a motor, 8 is a fan, 9 Is a metal jig, 10 is a gas guide cylinder, 11 is a umbrella, 12 is a vacuum pump, 13 is an exhaust gas combustion device, 14 is a carbon supply compound gas cylinder, 15 is an ammonia gas cylinder, 16 is a nitrogen gas cylinder, and 17 is a hydrogen gas cylinder. , 18 is a flow meter and 19 is a gas control valve.
  • Fig. 1 (Use a SUS310S Matsufune furnace with an inner volume of 100L shown here. Inside the furnace, set the SUS304 plate and feed NH gas and N gas at a flow rate of 200 L / H, respectively, from room temperature to 55
  • the temperature was raised to 0 ° C in 75 minutes.
  • the injection of acetylene gas 2LZH was started.
  • the ambient temperature was maintained for 2 hours.At this point, while the injection of acetylene gas was stopped, NH gas and N gas were allowed to flow at 550 ° C for another 4 hours to advance nitriding.
  • the heating was stopped, the furnace was cooled by continuing to flow only N gas, and the test piece in the furnace was taken out when the ambient temperature became 100 ° C or less.
  • Example 2 A SUS304 plate was set in the Matsufuru furnace used in Example 1, and NH gas and N gas were fed at a flow rate of 200 LZH, respectively, and the temperature was raised from room temperature to 550 ° C in 75 minutes.
  • the injection of 5LZH propane gas was started when the ambient temperature reached 100 ° C (18 minutes after the start of heating). After raising the temperature to 550 ° C, the atmosphere temperature was maintained for 2 hours.At this point, while propane gas injection was stopped, NH gas and N gas were further flowed at 550 ° C for 4 hours to allow nitriding to proceed. The heating was stopped, only N gas was kept flowing, and the furnace was cooled. When the temperature of the furnace reached 100 ° C or less, the test piece in the furnace was taken out.
  • the exhaust gas from the furnace was branched, and a part of the exhaust gas was absorbed into a 2% by mass aqueous solution of caustic soda, and HCN analysis was performed. From the analysis results of the HCN absorption solution, the average HCN concentration in the furnace atmosphere during the propane gas injection period was 400 mg / m 3 .
  • the weight increase of the SUS304 test piece before and after the nitriding treatment was measured and found to be 18 g / m 2 .
  • the SUS304 plate was set in the Matsufurn furnace used in Example 1, and ⁇ gas and ⁇ gas were fed at a flow rate of 200 LZH each, and the temperature was raised from room temperature to 550 ° C in 75 minutes.
  • injection of 5 L / H of C ⁇ gas was started.
  • the ambient temperature was maintained for 2 hours.At this time, while the injection of C ⁇ gas was stopped, NH gas and N gas were further flowed at 550 ° C for 4 hours to advance nitriding. Then, the heating was stopped, only the N gas was kept flowing, the furnace was cooled, and the test piece in the furnace was taken out when the ambient temperature became 100 ° C or less.
  • the exhaust gas from the furnace was branched, and a part of the exhaust gas was absorbed into a 2% by mass aqueous solution of caustic soda, and HCN analysis was performed. From the analysis results of the HCN absorption solution, the average HCN concentration in the furnace atmosphere during the CO gas injection period reached 1,000 mg / m 3 .
  • the weight increase of the SUS304 test piece before and after the nitriding treatment was measured and found to be 18 gZm 2 .
  • the SUS304 plate was set in the Matsufurn furnace used in Example 1 and ⁇ gas and ⁇ gas were
  • nitriding was performed by flowing NH gas and N gas at 550 ° C for another 4 hours.
  • the heating was stopped and only the N gas was kept flowing, the furnace was cooled and the ambient temperature dropped to 100 ° C or less.
  • the exhaust gas from the furnace was branched, and a part of the exhaust gas was absorbed into a 2% by mass aqueous solution of caustic soda, and HCN analysis was performed. From the analysis results of the HCN absorbing solution, the CH gas injection period
  • the average HCN concentration in the furnace atmosphere reached 1,200 mg / m 3 .
  • the weight increase of the SUS304 test piece before and after the nitriding treatment was measured and found to be 18 g / m 2 .
  • the SUS304 specimen was cut and polished, etched with a marble solution, and the cut surface was observed with an optical microscope. As a result, a nitride layer having a uniform thickness of 45 ⁇ was formed.
  • the SUS304 plate was set in the Matsufurn furnace used in Example 1 and ⁇ gas and ⁇ gas were
  • nitriding was performed by flowing NH gas and N gas at 550 ° C for another 4 hours.
  • the heating was stopped and only the N gas was kept flowing, the furnace was cooled and the ambient temperature dropped to 100 ° C or less.
  • the average HCN concentration in the furnace atmosphere reached 600 mg / m 3 .
  • the weight increase of the SUS304 test piece before and after the nitriding treatment was measured and found to be 18 gZm 2 .
  • the SUS304 test piece was cut and polished, etched with a marble solution, and the cut surface was observed with an optical microscope, a nitride layer having a uniform thickness of 45 zm was formed.
  • the SUS304 plate was set in the Matsufurn furnace used in Example 1 and ⁇ gas and ⁇ gas were
  • the heating was stopped and only the N gas was kept flowing, the furnace was cooled and the ambient temperature dropped to 100 ° C or less.
  • a high-alloy steel part which is difficult to perform a diffusion and infiltration treatment such as a gas nitriding method or a gas carburizing method in which a nitrided layer, a carburized layer or a carbonitrided layer is formed on the surface of a metal member.
  • the surface passivation film is formed by using gases normally used in gas heat treatment and generating HCN gas in the furnace by utilizing the catalytic action of the surface of the metal and / or metal furnace material to be treated.
  • FIG. 1 is a diagram showing the structure of a processing furnace used in the present invention.
  • FIG. 2 A micrograph of a cut surface of the test piece of Example 1
  • FIG. 3 A micrograph of a cut surface of the test piece of Comparative Example 1.

Abstract

A method for activating the surface of a metal member, that is, activating a passivated coating film present in the surface of a high alloy steel member, which makes it difficult to effect a diffusion penetration treatment such as a gas nitriding method or a gas carburizing method for forming a nitrided layer, a carburized layer or a carburized and nitrided layer on the surface of a metal member, which method comprises using a gas generally used in a gas heat treatment, forming an HCN gas in a furnace through the utilization of a catalytic action of the surface of a metal to be treated and/or a material of the furnace, to thereby activate the passivated surface of the high alloy steel member. The above method is free from disadvantages such as the formation of deposits in a furnace, the wear of the wall surface in a furnace, and the necessity of the treatment for converting an exhaust gas to a harmless material, which have been problems in the case of a conventional activation treatment using a halogen compound, and thus can be advantageously used as a method for activating the surface of a metal member which is useful as a pretreatment for a diffusion penetration treatment.

Description

明 細 書  Specification
金属部材表面の活性化方法  Activation method of metal member surface
技術分野  Technical field
[0001] 本願発明は、金属部材に対して、窒化ゃ浸炭などの拡散浸透処理を施すに先立つ て、金属部材表面を活性化させる金属部材の前処理方法に関する。  The present invention relates to a metal member pretreatment method for activating a metal member surface prior to subjecting the metal member to a diffusion and infiltration treatment such as nitriding and carburizing.
背景技術  Background art
[0002] 耐摩耗性、疲労強度などの機械的性質を向上させる目的で、金属部材の表面に窒 化層あるいは浸炭層を形成させるガス窒化法やガス浸炭法は、鉄系材料からなる部 材を主に広く実施されてレ、る。  [0002] In order to improve mechanical properties such as wear resistance and fatigue strength, a gas nitriding method or a gas carburizing method in which a nitrided or carburized layer is formed on the surface of a metal member is performed by using a component made of an iron-based material. It is mainly widely implemented.
[0003] 合金鋼、特に高合金鋼からなる部材表面に、これらの処理を施す際、部材表面に 存在している不動態化皮膜 (酸化物など)により、窒素や炭素の金属部材表面中へ の浸入拡散が妨げられ、上記部材の処理不良や処理ムラを発生することが問題とな る。このためこれらの拡散浸透処理に先立ち、金属部材の表面の活性化処理が行わ れている。該表面活性化処理として最も広く採用されているのは、マルコマイジング 処理に代表される塩化物系化合物を用いる方法である。塩化物としては塩化ビュル 樹脂、塩ィ匕アンモニゥム、塩化メチレンなどが使用されている。  [0003] When these treatments are performed on the surface of a member made of an alloy steel, particularly a high alloy steel, the passivation film (oxide, etc.) present on the surface of the member causes nitrogen or carbon to enter the metal member surface. This is a problem in that the penetration and diffusion of the components are hindered, and processing defects and processing unevenness of the above members occur. Therefore, prior to these diffusion and infiltration treatments, activation treatment of the surface of the metal member is performed. The most widely used surface activation treatment is a method using a chloride compound represented by a marcoizing treatment. As the chloride, a butyl chloride resin, a salted ammonium salt, methylene chloride, or the like is used.
[0004] 上記塩化物は、処理炉中に金属部材とともに入れられて加熱される。該加熱により これらの塩化物が分解して HC1が生成し、該生成した HC1が金属部材表面の不動態 化皮膜を破壊 (変性)して表面を活性化させ、次工程の窒化ゃ浸炭などの拡散浸透 処理を確実なものとしてレ、る。  [0004] The chloride is placed in a processing furnace together with a metal member and heated. By the heating, these chlorides are decomposed to generate HC1, and the generated HC1 destroys (modifies) the passivation film on the surface of the metal member and activates the surface. Make sure that the diffusion and infiltration treatment is assured.
[0005] し力 ながら、上記の如き塩ィ匕物による金属部材の表面活性化は、分解生成した H C1がレンガゃ金属からなる炉内壁面を損耗させるだけでなぐガス窒化ゃガス軟窒化 においては、雰囲気ガスであるアンモニアと反応して塩化アンモニゥムを生成し、該 塩ィ匕アンモニゥムが炉内や排気系に堆積してトラブルの原因となるだけでなぐ金属 部材 (ワーク)表面に残存して該部材の耐食性や疲労強度の低下などをもたらしてレ、 る。  [0005] However, the surface activation of the metal member by the above-mentioned salt ridden is performed by gas nitriding / gas nitrocarburizing in which the decomposition-generated H C1 only wears the furnace inner wall made of brick / metal. Reacts with ammonia, which is an atmospheric gas, to produce ammonium chloride, which remains on the surface of a metal member (work) that is not only a cause of trouble due to deposition of the salt in the furnace or the exhaust system. This leads to a reduction in the corrosion resistance and fatigue strength of the member.
[0006] 近年、前記塩化物を用いる方法に代わる方法として、同じハロゲン族に属するフッ 素化合物 (NF )による金属部材表面の活性化方法が実用化されている(例えば、特[0006] In recent years, as an alternative to the above-described method using a chloride, fluorine belonging to the same halogen group has been used. A method of activating the surface of a metal member with a nitrogen compound (NF) has been put into practical use (for example,
3 Three
許文献 1)。上記 NFは加熱により分解されてフッ素を生成し、生成したフッ素が金属  Permission 1). The above NF is decomposed by heating to generate fluorine, and the generated fluorine is a metal
3  Three
部材表面の不動態化皮膜をフッ化物膜に変えて金属部材表面を活性化してレ、る。し 力 ながら、フッ素化合物(NF )による金属部材表面の活性化法では、排ガス中に  The passivation film on the member surface is changed to a fluoride film to activate the metal member surface. However, in the method of activating the metal member surface with a fluorine compound (NF),
3  Three
含まれる NFや HFの無害化に高度な処理が必要であり、当該方法の普及の妨げと  Advanced treatment is required to detoxify the contained NF and HF, which hinders the spread of the method.
3  Three
なっている。  It has become.
[0007] 前記ハロゲンィヒ物を用いる金属部材表面の活性化方法には炉内堆積物の問題、 炉内壁面の損耗、あるいは排ガスの無害化処理設備を要するなどの課題がある。こ のような背景からハロゲン化物を用いない金属部材表面の活性化方法の開発が進 められている。  [0007] The method of activating a metal member surface using the halogen compound has problems such as a problem of deposits in a furnace, wear of a furnace inner wall, and a need for a detoxification facility for exhaust gas. Against this background, development of a method for activating a metal member surface without using a halide has been promoted.
[0008] 特許文献 2に記載のアンモニアガス窒化方法は、アセトンの熱分解により生成する 還元性ラジカルと COとをワークである高クロム合金鋼部材表面で生成させることによ り、合金鋼部材表面の不動態化皮膜を還元活性化する方法である。この方法によれ ば加熱された高クロム合金鋼部材表面でアセトンが下記(1)式に従って熱分解し、 還元性ラジカルと COが高クロム合金部材表面で生成される。  [0008] The ammonia gas nitriding method described in Patent Document 2 generates a reducing radical generated by thermal decomposition of acetone and CO on the surface of a high chromium alloy steel member, which is a work, thereby reducing the surface of the alloy steel member. This is a method of activating the passivation film by reduction. According to this method, acetone is thermally decomposed according to the following equation (1) on the surface of the heated high chromium alloy steel member, and reducing radicals and CO are generated on the surface of the high chromium alloy member.
2 (CH ) CO→2CH - + CO · · · (1)  2 (CH) CO → 2CH-+ CO (1)
3 3  3 3
金属部材表面の酸化膜 (MO)は下記(2)式で還元される。  The oxide film (MO) on the surface of the metal member is reduced by the following equation (2).
5MO + 2CH -→5M + 2CO + 3H O · · · (2)  5MO + 2CH-→ 5M + 2CO + 3H O (2)
3 2  3 2
高クロム合金鋼部材の表面酸化膜の主成分は Cr Oであるので  Since the main component of the surface oxide film of high chromium alloy steel members is Cr 2 O
2 3  twenty three
5Cr〇 + 6CH -→10Cr + 6CO + 9H O · · · (3)  5Cr〇 + 6CH-→ 10Cr + 6CO + 9H O (3)
2 3 3 2  2 3 3 2
上記(1)一 (3)式に従って生成した COは雰囲気ガスであるアンモニアと反応して 下記(4)式に従レ、HCNを生成する。  The CO generated according to the above formulas (1) and (3) reacts with ammonia, which is an atmospheric gas, to generate HCN according to the following formula (4).
CO + NH→HCN + H O …(4)  CO + NH → HCN + H O… (4)
3 2  3 2
上記 (4)式で生成した HCNは、下記の反応により高クロム合金部材表面の不動態 化皮膜を還元する。  The HCN generated by the above equation (4) reduces the passivation film on the surface of the high chromium alloy member by the following reaction.
Cr O + 6HCN→2Cr (CN) + 3H O · · · (5)  Cr O + 6HCN → 2Cr (CN) + 3H O
2 3 3 2  2 3 3 2
生成した Cr (CN) の Cと Nは、高クロム合金部材表面中に拡散し、浸炭と窒化に寄  The C and N of the generated Cr (CN) diffuse into the surface of high chromium alloy members and contribute to carburizing and nitriding.
3  Three
与して上記部材表面に残留物は生じない。 [0009] これに対し前記塩化物による高クロム合金鋼部材表面の活性化反応は下記(6)式 で表される。 As a result, no residue is generated on the surface of the member. On the other hand, the activation reaction of the surface of the high chromium alloy steel member by the chloride is expressed by the following equation (6).
Cr O + 6HCl→2CrCl + 3H O · · · (6)  Cr O + 6HCl → 2CrCl + 3H O (6)
2 3 3 2  2 3 3 2
上記クロム塩ィ匕物が部材表面に残留し、部材の腐食の原因物質となる。 特許文献 1:特開平 3 - 44457号公報  The above-mentioned chrome salt residue remains on the surface of the member and becomes a substance causing corrosion of the member. Patent Document 1: JP-A-3-44457
特許文献 2:特願平 9-38341号公報  Patent Document 2: Japanese Patent Application No. 9-38341
発明の開示  Disclosure of the invention
発明が解決しょうとする課題  Problems to be solved by the invention
[0010] 以上のように、特許文献 2に記載の方法は、特許文献 1に記載の塩化物による金属 部材表面の活性化方法の問題点を原理的に解決した点で優れている。しかしながら 、特許文献 2に記載の方法は、常温常圧で液体のアセトンを用いるので、アセトン蒸 気を導入する装置を必要とし、アセトンの流量制御が容易でないことから、均一な活 性表面を有する金属部材を得ることが難しいという欠点がある。 [0010] As described above, the method described in Patent Document 2 is excellent in that the problem of the method for activating the surface of a metal member with chlorides described in Patent Document 1 is solved in principle. However, since the method described in Patent Document 2 uses acetone which is liquid at normal temperature and normal pressure, it requires an apparatus for introducing acetone vapor, and since it is not easy to control the flow rate of acetone, it has a uniform active surface. There is a disadvantage that it is difficult to obtain a metal member.
課題を解決するための手段  Means for solving the problem
[0011] 上記課題を解決するため、本発明者らは取り扱いに問題のあるアセトンに代わり、 常温常圧で気体である化合物を用いる方法の開発に取り組み本発明を完成した。 すなわち、本発明の構成は下記の通りである。  [0011] In order to solve the above problems, the present inventors have developed a method using a compound that is a gas at normal temperature and normal pressure in place of acetone, which has a problem in handling, and completed the present invention. That is, the configuration of the present invention is as follows.
1.常温常圧で気体である炭素供給化合物とアンモニアとを必須成分とする混合気 体を加熱炉内で 300°C以上に加熱し、該加熱混合気体中で金属部材、金属製炉内 壁あるいは金属製治具の触媒作用により HCNを生成させ、生成した HCNを金属部 材の表面に作用させることを特徴とする金属部材表面の活性化方法。  1. A mixed gas containing a carbon supply compound and ammonia, which are gaseous at normal temperature and normal pressure, is heated to 300 ° C or more in a heating furnace, and the metal member and the inner wall of the metal furnace are heated in the heated mixed gas. Alternatively, a method for activating the surface of a metal member, wherein HCN is generated by a catalytic action of a metal jig, and the generated HCN is caused to act on the surface of the metal member.
[0012] 2.炭素供給化合物が、アセチレン、エチレン、プロパン、ブタンおよび一酸化炭素か ら選択された一つ以上の化合物である前記 1に記載の金属部材表面の活性化方法  [0012] 2. The method for activating the surface of a metal member according to the above 1, wherein the carbon supply compound is at least one compound selected from acetylene, ethylene, propane, butane and carbon monoxide.
[0013] 3.金属製炉内壁あるいは金属製治具が、 Fe、 Ni、 Co、 Cu、 Cr、 Mo、 Nb、 V、 Tiお よび Zrから選択された一つ以上の金属を含有する前記 1に記載の金属部材表面の 活性化方法。 [0013] 3. The metal furnace inner wall or the metal jig contains one or more metals selected from the group consisting of Fe, Ni, Co, Cu, Cr, Mo, Nb, V, Ti and Zr. The method for activating the surface of a metal member according to claim 1.
[0014] 4.炉内において発生させる HCN濃度力 100mg/m3以上であり、炉内雰囲気ガ スの露点が 5°C以下である前記 1に記載の金属部材表面の活性化方法。 [0014] 4. The concentration of HCN generated in the furnace is 100 mg / m 3 or more, 2. The method for activating a metal member surface according to the above 1, wherein the dew point of the metal is 5 ° C. or less.
発明の効果  The invention's effect
[0015] 本発明によれば、金属部材の表面に窒化層、浸炭層あるいは浸炭窒化層を形成さ せるガス窒化法、ガス浸炭法などの拡散浸透処理を困難ならしめている高合金鋼部 材の表面不動態化皮膜を、ガス熱処理で通常に扱われているガス類を用い、被処理 金属および/または金属製炉材表面の触媒作用を利用して、炉内において HCNガ スを生成させ、不動態化している高合金鋼部材の表面を活性化させることにより、従 来、ハロゲンィヒ物による活性化処理で問題であった炉内堆積物、炉内壁面の損耗、 さらには排ガスの無害化処理などの弊害を伴わない、拡散浸透処理の前段処理とし て有用な金属部材表面の活性化処理法を提供することができる。  [0015] According to the present invention, a high-alloy steel part which is difficult to perform a diffusion and infiltration treatment such as a gas nitriding method or a gas carburizing method in which a nitrided layer, a carburized layer or a carbonitrided layer is formed on the surface of a metal member. The surface passivation film is formed by using gases normally used in gas heat treatment and generating HCN gas in the furnace by utilizing the catalytic action of the surface of the metal and / or metal furnace material to be treated. By activating the surface of the passivated high-alloy steel member, the detrimental treatment of the furnace deposits and the inner wall of the furnace, which had been a problem with the activation treatment with halogens, and the detoxification of exhaust gas Thus, it is possible to provide a method for activating the surface of a metal member, which is useful as a pre-treatment of the diffusion and infiltration treatment without adverse effects.
発明を実施するための最良の形態  BEST MODE FOR CARRYING OUT THE INVENTION
[0016] 次に発明を実施するための最良の形態を挙げて本発明をさらに詳しく説明する。  Next, the present invention will be described in more detail with reference to the best mode for carrying out the present invention.
前記特許文献 2によれば、前記(1)式のアセトンの熱分解で生成した CH · (メチル  According to Patent Document 2, CH · (methyl) formed by thermal decomposition of acetone of the above formula (1) is used.
3 ラジカル)は金属部材表面の酸化膜を還元する。前記(1)と(2)式で生成した COは 、雰囲気ガスのアンモニアと金属表面で反応して HCNを生成する。 HCNは前記(5 )式に従って金属酸化膜に作用する。  3 radicals) reduce the oxide film on the surface of the metal member. The CO generated by the above equations (1) and (2) reacts with ammonia in the atmospheric gas on the metal surface to generate HCN. HCN acts on the metal oxide film according to the above formula (5).
[0017] 本発明者らはアセトンの熱分解で生成する CH 'と HCN (もう一つの熱分解生成物 [0017] The present inventors have found that CH 'and HCN (another pyrolysis product)
3  Three
である COと雰囲気ガスのアンモニアとの反応生成物)は、前記(2)式と(5)式の比較 力 不動態化皮膜への作用において類似しており、 CH 'と HCNの両方の存在は、  The reaction product of CO and ammonia in the atmospheric gas is similar in terms of the effect on the passivation film by comparing the above equations (2) and (5), and the presence of both CH 'and HCN Is
3  Three
高クロム合金鋼部材表面の活性化の十分条件ではある力 必ずしも必要条件ではな レ、ものと推定し、 HCNに着目して金属表面での HCN生成方法の開発と、 HCNによ る金属部材表面の活性化効果の確認に取り組んだ。  A force that is a sufficient condition for activation of the surface of a high chromium alloy steel member is not necessarily a necessary condition, and it is assumed that it is not a necessary condition. We worked on confirming the revitalization effect.
[0018] 窒化雰囲気ガス (NH: N =モル比 1: 1)と常温常圧で気体である各種の炭素含有 [0018] Nitrogen atmosphere gas (NH: N = molar ratio 1: 1) and various types of carbon containing gas at normal temperature and normal pressure
3 2  3 2
化合物から選択したガスを炉内が SUS310S製のマツフル炉に導入して 550°Cに加 熱し、 HCNの生成について調べた。その結果、一酸化炭素、二酸化炭素、ァセチレ ン、エチレン、プロパン、ブタンがそれぞれアンモニアとの組み合わせで、明らかに H CNを生成することが確認された。  The gas selected from the compounds was introduced into a matsufur furnace made of SUS310S and heated to 550 ° C to investigate the formation of HCN. As a result, it was confirmed that carbon monoxide, carbon dioxide, acetylene, ethylene, propane, and butane each clearly generate HCN in combination with ammonia.
[0019] これに対しマツフル炉の内壁をレンガ製の炉に代えた以外は、上記と同じ実験を実 施して HCNの生成量を分析した結果、すべてのケースで HCNは検出されな力 た 。このことからアンモニアとこれらガスとによる HCN生成反応には、金属表面の触媒 作用が必須条件であることが明らかとなった。 [0019] On the other hand, the same experiment as above was performed except that the inner wall of the Matsufuru furnace was replaced with a brick furnace. As a result, HCN was not detected in all cases. This indicates that the catalytic action of the metal surface is an essential condition for the HCN generation reaction between ammonia and these gases.
[0020] アンモニアと前記炭素含有化合物による HCN生成反応はそれぞれ下記の式で表 すこと力 Sできる。 [0020] The HCN generation reaction by ammonia and the carbon-containing compound can be represented by the following equations, respectively.
NH +CO→HCN + H O …(7)  NH + CO → HCN + H O… (7)
3 2  3 2
2NH + 2CO→2HCN + H O + O · · · (8)  2NH + 2CO → 2HCN + H O + O
3 2 2 2  3 2 2 2
2NH +C H→2HCN + 3H …(9)  2NH + CH → 2HCN + 3H… (9)
3 2 2 2  3 2 2 2
2NH +C H→2HCN + 4H …(10)  2NH + CH → 2HCN + 4H… (10)
3 2 4 2  3 2 4 2
3NH +C H→3HCN + 7H · · · (11)  3NH + CH → 3HCN + 7H (11)
3 3 8 2  3 3 8 2
4NH +C H →4HCN + 9H …(12)  4NH + CH → 4HCN + 9H… (12)
3 4 10 2  3 4 10 2
[0021] 窒化雰囲気ガス (NH: N =モル比 1: 1)と各種の炭素含有化合物から選択したガ  [0021] A gas selected from a nitriding atmosphere gas (NH: N = molar ratio 1: 1) and various carbon-containing compounds.
3 2  3 2
スとの反応による HCNの生成量の比較は、窒化雰囲気ガス(NH : N 二モル比 1 : 1  The comparison of the amount of HCN generated by the reaction with nitric acid is based on the nitriding atmosphere gas (NH: N molar ratio 1: 1).
3 2  3 2
)に対しそれぞれの炭素含有化合物を当量比で 1%含有させ、内壁が SUS310S製 のマツフル炉に導入し、 550°Cに 30分間加熱して、前記(7)—(12)式の反応を行な わせた。その結果、それぞれの炭素含有化合物による HCN生成量は下記の順であ つた。  ), Each carbon-containing compound is contained in an equivalent ratio of 1%, and the inner wall is introduced into a SUS310S Matsufuru furnace, heated to 550 ° C for 30 minutes, and the reaction of the above formulas (7)-(12) is carried out. I did it. As a result, the amount of HCN produced by each carbon-containing compound was in the following order.
C H >CO > C H > C H > C H > CO  CH> CO> CH> CH> CH> CO
2 2 2 4 4 10 3 8 2  2 2 2 4 4 10 3 8 2
[0022] 窒化雰囲気ガスとの反応で HCNを生成することが確認されたこれらの炭素含有化 合物について、窒化処理の初期段階にこれら化合物のそれぞれを加熱炉内に導入 し活性化作用があるか否かについて SUS304板材を用いて評価した。その結果、 C  [0022] For these carbon-containing compounds that have been confirmed to generate HCN by reaction with a nitriding atmosphere gas, each of these compounds is introduced into a heating furnace at the initial stage of the nitriding treatment to have an activating effect. Whether or not it was evaluated using a SUS304 plate material. As a result, C
2 2
H 、 CO、 C H 、 C H および C Hは、炭素含有化合物を導入しないコントロールのH, CO, CH, CH and CH are control
2 2 4 4 10 3 8 2 2 4 4 10 3 8
窒化処理と比較し、上記 SUS304板材において窒化均一性ならびに窒素浸入によ る重量増加において明らかな効果が認められた。これに対し COを用いた場合は均  Compared with the nitriding treatment, a clear effect was observed in the above SUS304 plate material in terms of uniformity of nitriding and weight increase due to nitrogen intrusion. In contrast, when CO is used, the average
2  2
ー窒化性および試験片の重量増のいずれにおいてもコントロールの窒化処理と差が なぐ COについては上記 SUS304板材の表面に対して活性化作用は認められな  -There is no difference between the nitriding property and the weight increase of the test piece compared with the control nitriding treatment.There is no activation effect on CO on the surface of the above SUS304 plate.
2  2
かった。  won.
[0023] 炉内において COの導入により HCNが生成するにもかかわらず、上記 SUS304板 材の表面に対して活性化作用が得られないのは、前記(8)式の HCN生成反応の副 生成物である Oと H Oの酸化作用による上記 SUS304板材の表面の再酸化による ものと推定される。 C〇については、上述のように HCNを生成する力 このことはアン モユアと、 COを含む RXガスとが存在するガス軟窒化雰囲気でステンレス鋼が均一 に窒化されない現象と矛盾するが、該矛盾は以下の理由によると考えられる。ここで RXガスとは炭化水素ガス(例えばプロパンガス、ブタンガス、天然ガス)と空気をほぼ 化学当量で混合し、 1000°Cに保った触媒層の中で分解させ C〇、 H (N )を主成分 とし少量の COと H〇を含むガスのことで浸炭ガスとして広く用いられているガスであ る。 [0023] Despite the generation of HCN due to the introduction of CO in the furnace, The lack of activation on the surface of the material is presumed to be due to the re-oxidation of the surface of the SUS304 sheet by the oxidizing effect of O and HO, which are by-products of the HCN formation reaction in equation (8). Is done. As for C〇, the ability to generate HCN as described above contradicts the phenomenon that stainless steel is not uniformly nitrided in a gas nitrocarburizing atmosphere in which ammonia and RX gas containing CO are present. Is considered as follows. Here, RX gas is a mixture of hydrocarbon gas (for example, propane gas, butane gas, natural gas) and air at almost chemical equivalents, and decomposes in a catalyst layer maintained at 1000 ° C to produce C〇 and H (N). A gas containing a small amount of CO and H〇 as its main component and is widely used as a carburizing gas.
[0024] ガス軟窒化の代表的な組成である NH: RXガス =モル比 1 : 1に含まれる COは、 容量比で約 10%である。従ってガス軟窒化炉内には金属部材表面の活性化に必要 な HCNは十分存在すると推定されるが、露点を制御されていない RXガスには相当 量の H〇(2容量%前後)と 0. 5容量%前後の COが存在することから、これらの酸 化作用により活性化された上記 SUS304板材の表面が再酸化され、上記板材表面 中への窒素の浸入が妨げられてレ、ると判断される。  [0024] The typical composition of gas nitrocarburizing is NH: RX gas = molar ratio of 1: 1 and the CO contained in the composition is about 10% by volume. Therefore, it is presumed that the HCN necessary for activating the surface of metal members is sufficiently present in the gas nitrocarburizing furnace, but the RX gas whose dew point is not controlled has a considerable amount of H〇 (around 2% by volume) and 0%. Since about 5% by volume of CO is present, the surface of the SUS304 plate activated by these oxidation is re-oxidized, preventing the infiltration of nitrogen into the plate surface. Is determined.
[0025] 従って金属部材表面の活性化のための炭素供給化合物として COガスを選択する 場合、 RXガスではなぐ単独の COガスを用いることが望ましい。し力 ながら、本発 明における COガスの必要注入量は、ガス軟窒化雰囲気の 1/10 (容量)程度である から、 RXガス中の H Oや C〇の影響が低くなるので、 RXガスを C〇源として利用でき るケースもあり得る。  Therefore, when selecting CO gas as a carbon supply compound for activating the metal member surface, it is desirable to use a single CO gas instead of RX gas. However, since the required injection amount of CO gas in the present invention is about 1/10 (capacity) of the gas nitrocarburizing atmosphere, the influence of HO and C In some cases, it can be used as a C〇 source.
[0026] 前記(7)—(12)の反応式の右辺の式から判断してシアン生成作用のあるこれらの 化合物の中で COの場合の副生成物の酸化作用が最も高 次いで COであり、炭 化水素化合物はいずれも還元性の水素を生成する。従って再酸化を防ぐためには 炭素供給ィヒ合物として炭化水素化合物を選択することが望ましい。  [0026] Judging from the formulas on the right side of the above reaction formulas (7) to (12), among these compounds having a cyanogenic effect, the oxidizing effect of by-products in the case of CO is the highest, followed by CO In addition, all hydrocarbon compounds generate reducing hydrogen. Therefore, in order to prevent reoxidation, it is desirable to select a hydrocarbon compound as the carbon feed compound.
[0027] 本発明による合金鋼部材表面の活性化作用は HCNによるものである。上記活性 化効果は炉内雰囲気中の HCN濃度に依存する。満足する活性化作用を得るため の HCNの適正な濃度は 100— 30, 000mg/m3の範囲である。 HCNの濃度が 100 mg/m3未満では上記活性化作用を期待することができない。一方、 HCNの濃度が 30, OOOmgZm3超では上記活性化効果が飽和し、経済的に不利となるだけでなく 、炭素供給ィ匕合物の熱分解によるスーティング (炉内でのカーボン生成)が起こるの で好ましくない。 [0027] The activation effect of the alloy steel member surface according to the present invention is due to HCN. The above activation effect depends on the HCN concentration in the furnace atmosphere. Proper concentration of HCN to obtain activating effect satisfying ranges from 100- 30, 000mg / m 3. If the concentration of HCN is less than 100 mg / m 3 , the above activating effect cannot be expected. On the other hand, HCN concentration 30, the activating effect is saturated at OOOmgZm 3 exceeds, not only economically disadvantageous, is not preferred in the sooting by thermal decomposition of a carbon feed I匕合product (carbon produced in the furnace) occurs .
また、炉内雰囲気ガスの露点は 5°C以下であることが好ましい。上記露点が 5°Cより も高いと HCNガスにより活性化された金属表面が雰囲気中の H〇により再酸化され  The dew point of the furnace atmosphere gas is preferably 5 ° C or less. If the above dew point is higher than 5 ° C, the metal surface activated by HCN gas is re-oxidized by H〇 in the atmosphere.
2  2
再び不動態化する。  Passivate again.
[0028] 本発明の方法における環境面での利点は、前記反応式(5)で説明されているよう に、金属部材表面の活性化に寄与した HCNが部材表面中に取り込まれて部材の窒 ィ匕、浸炭に寄与し部材表面に残留物を残さないとともに、反応に寄与せずに排ガスと して排出される HCNは窒化装置に付属しているアンモニア燃焼装置で容易に燃焼 無害化することができ、新たな付カ卩的設備は不要である点である。  [0028] The environmental advantage of the method of the present invention is that, as explained in the above reaction formula (5), HCN that has contributed to activation of the surface of a metal member is taken into the surface of the member and nitrogen of the member is reduced. HCN, which contributes to carving and carburization, does not leave residue on the surface of the member, and is discharged as exhaust gas without contributing to the reaction, can be easily detoxified by the ammonia combustion device attached to the nitriding device. And no new equipment is required.
[0029] 本発明のさらなる利点は窒化処理プロセス上のスムースな工程進行による窒化処 理時間の短縮である。金属部材のガス窒化は通常下記のようなスケジュールで行わ れる。  [0029] A further advantage of the present invention is that the nitridation processing time is reduced by the smooth progress of the nitridation process. Gas nitriding of metal members is usually performed according to the following schedule.
[0030] 金属部材を炉内にセットし、炉内の大気を真空パージあるいは窒素ガス置換した後 窒化雰囲気ガス(NH +N )を時間当たり炉内容積の 1  After the metal member was set in the furnace and the atmosphere in the furnace was vacuum-purged or replaced with nitrogen gas, the nitriding atmosphere gas (NH + N) was reduced to 1% of the furnace volume per hour.
3 2 一 10倍量導入しながら、金 属部材の窒化処理温度まで昇温後一定温度に維持する。処理中炉内圧は大気圧 3 2 While introducing the 10-fold amount, raise the temperature to the nitriding temperature of the metal parts and maintain it at a constant temperature. The furnace pressure during processing is atmospheric pressure
+ 0. 5kPa程度に圧力弁によって維持し、押し出された排ガスは排ガス燃焼装置で 燃焼分解される。 The pressure is maintained at +0.5 kPa by a pressure valve, and the extruded exhaust gas is burned and decomposed by an exhaust gas combustion device.
[0031] 前記特許文献 1に示されるフッ素系ガスによる方法では、 日本特許第 2501925号 明細書の実施例に記載されているように、フッ化系ガスを導入して部材の活性化処 理を実施した後、フッ化系ガスを排気してから窒化雰囲気ガスを炉内に導入する必 要がある。  [0031] In the method using a fluorine-based gas described in Patent Document 1, as described in the example of Japanese Patent No. 2501925, a fluorine-based gas is introduced to activate the members. After implementation, it is necessary to exhaust the fluorinated gas and then introduce the nitriding atmosphere gas into the furnace.
[0032] これに対し本発明では金属部材を窒化処理温度に昇温する工程で、窒化雰囲気 ガス中に炭素供給化合物を導入し、 HCNを発生させて金属部材表面を活性化し、 その後炭素供給化合物の導入を停止することで窒化工程へそのまま移行することが できる。これにより窒化工程の処理時間が大幅に短縮されるとともに、活性化から窒 化工程に移行する際に従来の処理で問題となっていた金属部材表面の再酸化現象 を原理的に解消することができる。 On the other hand, in the present invention, in the step of raising the temperature of the metal member to the nitriding temperature, a carbon supply compound is introduced into the nitriding atmosphere gas to generate HCN to activate the metal member surface, and thereafter, the carbon supply compound By stopping the introduction, the process can be shifted to the nitriding step. This greatly reduces the time required for the nitridation process, and the reoxidation phenomenon on the metal member surface, which has been a problem with the conventional process when transitioning from activation to nitridation. Can be solved in principle.
[0033] 本発明の技術的特徴および効果は上記の通りである。以下に本発明の好ましい実 施形態を説明する。本発明で使用する処理炉は、内壁が金属製であることが好まし レ、が、内壁が金属製でなくても、処理される金属部材が HCNの触媒となり、また、金 属部材を炉内で保持する治具が金属製であればよい。上記金属製内壁、金属部材 、治具を構成する金属としては、例えば、 Fe、 Ni、 Co、 Cu、 Cr、 Mo、 Nb、 V、 Tiお よび Zrから選択された一つ以上の金属を含有することが好ましい。  [0033] The technical features and effects of the present invention are as described above. Hereinafter, preferred embodiments of the present invention will be described. It is preferable that the inner wall of the processing furnace used in the present invention is made of metal.However, even if the inner wall is not made of metal, the metal member to be treated serves as a catalyst for HCN, and the metal member is used as a furnace. The jig to be held inside may be made of metal. The metal constituting the metal inner wall, the metal member, and the jig includes, for example, one or more metals selected from Fe, Ni, Co, Cu, Cr, Mo, Nb, V, Ti, and Zr. Is preferred.
[0034] 本発明の方法で表面活性化処理される金属部材としては、冷間金型用鋼、熱間金 型用鋼、プラスチック金型用鋼、高速度工具鋼、粉末高速度工具鋼、クロムモリブデ ン鋼、マルエージング鋼、オーステナイト系ステンレス鋼、フェライト系ステンレス鋼、 マルテンサイト系ステンレス鋼、マルテンサイト系耐熱鋼、オーステナイト系耐熱鋼さ らにはニッケル基超合金などが挙げられ、これらの金属部材は前記処理炉内におい て適当な治具によって常法に従って載置されて表面活性化処理される。  [0034] Metal members subjected to the surface activation treatment by the method of the present invention include steel for cold mold, steel for hot mold, steel for plastic mold, high speed tool steel, powder high speed tool steel, These include chromium molybdenum steel, maraging steel, austenitic stainless steel, ferritic stainless steel, martensitic stainless steel, martensitic heat-resistant steel, austenitic heat-resistant steel, and nickel-based superalloys. The metal member is placed in the processing furnace by an appropriate jig according to a conventional method and subjected to a surface activation treatment.
[0035] 前記炉内に供給する表面処理用気体は常温常圧で気体である炭素供給化合物と アンモニアであり、それぞれ専用のボンベから炉内に供給される。これらの気体は金 属部材を炉内にセットし、炉内の大気を真空パージあるいは窒素ガスで置換したの ち炉内に窒化雰囲気ガス(アンモニア単独またはアンモニア +窒素ガスあるいはアン モニァ +窒素ガス +水素ガス)を導入して、還元雰囲気を確立した後昇温を開始し 本発明の炭素供給化合物を導入する。アンモニアガスと炭素供給ィ匕合物は、炉内で 300°C以上に加熱されると金属表面の触媒作用により HCNを生成する。窒化雰囲 気ガスであるアンモニアの流量と導入する炭素供給ィ匕合物の流量比は 1 : 0. 0001 一 1 : 0. 1の範囲内とすべきである。炭素供給化合物の流量比が 1 : 0. 0001より低い 場合では HCNの生成量が低いため活性化効果が得られない。炭素供給化合物の 流量比が 1 : 0. 1超では活性化効果が飽和し経済的に不利となる。  [0035] The surface treatment gases supplied into the furnace are a carbon supply compound and ammonia, which are gases at normal temperature and normal pressure, and are supplied into the furnace from dedicated cylinders. For these gases, the metal members are set in the furnace, the atmosphere in the furnace is vacuum purged or replaced with nitrogen gas, and then the nitriding atmosphere gas (ammonia alone or ammonia + nitrogen gas or ammonia + nitrogen gas + After introducing a hydrogen gas) and establishing a reducing atmosphere, the temperature is raised and the carbon supply compound of the present invention is introduced. When the ammonia gas and the carbon supply mixture are heated in a furnace at 300 ° C or higher, HCN is generated by the catalytic action of the metal surface. The ratio of the flow rate of the nitriding atmosphere gas, ammonia, to the flow rate of the carbon feed conjugate to be introduced should be in the range of 1: 0.000001 to 1: 0.1. If the flow rate ratio of the carbon-supplying compound is lower than 1: 0.000001, the activation effect cannot be obtained because the amount of generated HCN is low. If the flow rate ratio of the carbon-supplying compound is more than 1: 0.1, the activation effect is saturated and economically disadvantageous.
[0036] 炭素供給化合物は前記の通りアセチレン、エチレン、プロパン、ブタンおよび一酸 化炭素から選択された一つ以上のガス状化合物であり、前記の通りアンモニア含有 ガスと同時に処理炉内に供給することもできる。前記アンモニア含有ガスの炉内温度 が約 300°Cに達した時点で炭素供給ィヒ合物の導入を開始することが炭素供給ィ匕合 物の効率的な利用上は好ましいが、炉内雰囲気中の炭素供給化合物濃度を早期に 上昇させて処理時間を短縮させるためには昇温開始と同時に炭素供給化合物を導 入し初期段階からの HCN生成を図ることが望ましい。 [0036] The carbon supply compound is one or more gaseous compounds selected from acetylene, ethylene, propane, butane and carbon monoxide as described above, and is supplied into the processing furnace simultaneously with the ammonia-containing gas as described above. You can also. When the temperature of the ammonia-containing gas in the furnace reaches about 300 ° C., the introduction of the carbon supply compound is started. Although it is preferable in terms of efficient use of the material, in order to increase the concentration of the carbon supply compound in the furnace atmosphere at an early stage and to shorten the processing time, the carbon supply compound is introduced at the same time as the temperature rise, and It is desirable to generate HCN.
実施例  Example
[0037] 以下実施例および比較例を挙げて本発明をさらに具体的に説明する。なお、以下 の実施例および比較例は図 1に示す構造の処理炉を用いて行なった。図 1におレ、て 1がマツフル炉、 2はその外殻、 3がヒータ、 4は内容器(レトルト)、 5はガス導入管、 6 は排気管、 7はモータ、 8はファン、 9は金属製の治具、 10はガス案内筒、 11は陣傘 、 12は真空ポンプ、 13は排ガス燃焼装置、 14は炭素供給化合物ガスボンベ、 15は アンモニアガスボンベ、 16は窒素ガスボンベ、 17は水素ガスボンベ、 18は流量計、 19はガスの制御弁である。  Hereinafter, the present invention will be described more specifically with reference to Examples and Comparative Examples. The following examples and comparative examples were performed using a processing furnace having the structure shown in FIG. In Figure 1, 1 is a Matsufur furnace, 2 is its outer shell, 3 is a heater, 4 is an inner vessel (retort), 5 is a gas introduction pipe, 6 is an exhaust pipe, 7 is a motor, 8 is a fan, 9 Is a metal jig, 10 is a gas guide cylinder, 11 is a umbrella, 12 is a vacuum pump, 13 is an exhaust gas combustion device, 14 is a carbon supply compound gas cylinder, 15 is an ammonia gas cylinder, 16 is a nitrogen gas cylinder, and 17 is a hydrogen gas cylinder. , 18 is a flow meter and 19 is a gas control valve.
[0038] 〔実施例 1〕  [Example 1]
図 1 (こ示した内容積 100Lの SUS310Sマツフノレ炉を用レヽ、該炉内 (こ SUS304板 材をセットし NHガスと Nガスをそれぞれ 200L/Hの流速で送り込み、室温から 55 Fig. 1 (Use a SUS310S Matsufune furnace with an inner volume of 100L shown here. Inside the furnace, set the SUS304 plate and feed NH gas and N gas at a flow rate of 200 L / H, respectively, from room temperature to 55
0°Cに 75分で昇温した。途中雰囲気温度が 100°Cになった時点(昇温開始から 18 分後)でアセチレンガス 2LZHの注入を開始した。 550°Cに昇温後 2時間雰囲気温 度を維持し、この時点でアセチレンガスの注入を停止する一方で、 NHガスと Nガス を 550°Cでさらに 4時間流して窒化を進行させた後、加熱を止め Nガスだけを流し続 けて炉冷し、雰囲気温度が 100°C以下になったところで炉内の試験片を取り出した。 The temperature was raised to 0 ° C in 75 minutes. When the ambient temperature reached 100 ° C. (18 minutes after the start of heating), the injection of acetylene gas 2LZH was started. After the temperature was raised to 550 ° C, the ambient temperature was maintained for 2 hours.At this point, while the injection of acetylene gas was stopped, NH gas and N gas were allowed to flow at 550 ° C for another 4 hours to advance nitriding. Then, the heating was stopped, the furnace was cooled by continuing to flow only N gas, and the test piece in the furnace was taken out when the ambient temperature became 100 ° C or less.
[0039] また、炉内からの排ガスを分岐し、排ガスの一部を 2質量%苛性ソーダ水溶液に吸 収させて HCN分析を実施した。 HCN吸収液の分析結果から、アセチレンガス注入 期間の炉内雰囲気中の平均 HCN濃度は 8, 000mg/m3であった。 SUS304試験 片の窒化処理前後の重量増を測定したところ 20g/m2であった。 SUS304試験片を 切断および研磨しマーブル液でエッチングして光学顕微鏡で切断面を観察したとこ ろ、 50 /i mの均一な厚さの窒化層が形成されていた(図 2に倍率 500倍の顕微鏡写 真を示す)。ビッカース硬度計で上記試験片の表面硬度を 5点測定したところいずれ の値も Hv= 1200一 1250の 【こ分布してレヽた。 [0039] Exhaust gas from the furnace was branched, and a part of the exhaust gas was absorbed into a 2% by mass aqueous solution of caustic soda to perform HCN analysis. From the analysis results of the HCN absorbing solution, the average HCN concentration in the furnace atmosphere during the acetylene gas injection period was 8,000 mg / m 3 . The weight increase of the SUS304 test piece before and after the nitriding treatment was measured and found to be 20 g / m 2 . When the SUS304 test piece was cut and polished, etched with a marble solution, and the cut surface was observed with an optical microscope, a nitrided layer with a uniform thickness of 50 / im was formed (Fig. Photo is shown). When the surface hardness of the test piece was measured at 5 points using a Vickers hardness tester, all the values were found to have a distribution of Hv = 1200 to 1250.
[0040] 〔実施例 2〕 実施例 1で使用したマツフル炉内に SUS304板材をセットし NHガスと Nガスをそ れぞれ 200LZHの流速で送り込み室温から 550°Cに 75分で昇温した。途中雰囲気 温度が 100°Cになった時点(昇温開始から 18分後)でプロパンガス 5LZHの注入を 開始した。 550°Cに昇温後 2時間雰囲気温度を維持し、この時点でプロパンガスの 注入を停止する一方で、 NHガスと Nガスを 550°Cでさらに 4時間流して窒化を進行 させた後、加熱を止めて Nガスだけを流し続けて炉冷し雰囲気温度が 100°C以下に なつたところで炉内の試験片を取り出した。 [Example 2] A SUS304 plate was set in the Matsufuru furnace used in Example 1, and NH gas and N gas were fed at a flow rate of 200 LZH, respectively, and the temperature was raised from room temperature to 550 ° C in 75 minutes. The injection of 5LZH propane gas was started when the ambient temperature reached 100 ° C (18 minutes after the start of heating). After raising the temperature to 550 ° C, the atmosphere temperature was maintained for 2 hours.At this point, while propane gas injection was stopped, NH gas and N gas were further flowed at 550 ° C for 4 hours to allow nitriding to proceed. The heating was stopped, only N gas was kept flowing, and the furnace was cooled. When the temperature of the furnace reached 100 ° C or less, the test piece in the furnace was taken out.
[0041] また、炉内からの排ガスを分岐し、排ガスの一部を 2質量%苛性ソーダ水溶液に吸 収させて HCN分析を実施した。 HCN吸収液の分析結果から、プロパンガス注入期 間の炉内雰囲気中の平均 HCN濃度は 400mg/m3であった。 SUS304試験片の 窒化処理前後の重量増を測定したところ 18g/m2であった。 SUS304試験片を切 断および研磨しマーブル液でエッチングして切断面を光学顕微鏡で観察したところ、 45 μ mの均一な厚さの窒化層が形成されていた。ビッカース硬度計で上記試験片の 表面硬度を 5点測定したところ、 V、ずれの値も Hv= 1200— 1250の間に分布してレヽ た。 Further, the exhaust gas from the furnace was branched, and a part of the exhaust gas was absorbed into a 2% by mass aqueous solution of caustic soda, and HCN analysis was performed. From the analysis results of the HCN absorption solution, the average HCN concentration in the furnace atmosphere during the propane gas injection period was 400 mg / m 3 . The weight increase of the SUS304 test piece before and after the nitriding treatment was measured and found to be 18 g / m 2 . The SUS304 specimen was cut and polished, etched with a marble solution, and the cut surface was observed with an optical microscope. As a result, a nitride layer having a uniform thickness of 45 μm was formed. When the surface hardness of the test specimen was measured at five points using a Vickers hardness tester, the values of V and deviation were distributed between Hv = 1200-1250.
[0042] 〔実施例 3〕  Example 3
実施例 1で使用したマツフル炉内に SUS304板材をセットし ΝΗガスと Νガスをそ れぞれ 200LZHの流速で送り込み室温から 550°Cに 75分で昇温した。途中雰囲気 温度が 100°Cになった時点(昇温開始から 18分後)で C〇ガス 5L/Hの注入を開始 した。 550°Cに昇温後 2時間雰囲気温度を維持し、この時点で C〇ガスの注入を停止 する一方で、 NHガスと Nガスを 550°Cでさらに 4時間流して窒化を進行させた後、 加熱を止めて Nガスだけを流し続けて炉冷し雰囲気温度が 100°C以下になったとこ ろで炉内の試験片を取り出した。  The SUS304 plate was set in the Matsufurn furnace used in Example 1, and ΝΗ gas and Ν gas were fed at a flow rate of 200 LZH each, and the temperature was raised from room temperature to 550 ° C in 75 minutes. When the temperature of the atmosphere reached 100 ° C (18 minutes after the start of heating), injection of 5 L / H of C〇 gas was started. After the temperature was raised to 550 ° C, the ambient temperature was maintained for 2 hours.At this time, while the injection of C〇 gas was stopped, NH gas and N gas were further flowed at 550 ° C for 4 hours to advance nitriding. Then, the heating was stopped, only the N gas was kept flowing, the furnace was cooled, and the test piece in the furnace was taken out when the ambient temperature became 100 ° C or less.
[0043] また、炉内からの排ガスを分岐し、排ガスの一部を 2質量%苛性ソーダ水溶液に吸 収させて HCN分析を実施した。 HCN吸収液の分析結果から、 COガス注入期間の 炉内雰囲気中の平均 HCN濃度は 1 , 000mg/m3に達してレ、た。 SUS304試験片 の窒化処理前後の重量増を測定したところ、 18gZm2であった。 SUS304試験片を 切断および研磨しマーブル液でエッチングして切断面を光学顕微鏡で観察したとこ ろ、 45 z mの均一な厚さの窒化層が形成されていた。ビッカース硬度計で上記試験 片の表面硬度を 5点測定したところいずれの値も Hv= 1200— 1250の間に分布し ていた。 Further, the exhaust gas from the furnace was branched, and a part of the exhaust gas was absorbed into a 2% by mass aqueous solution of caustic soda, and HCN analysis was performed. From the analysis results of the HCN absorption solution, the average HCN concentration in the furnace atmosphere during the CO gas injection period reached 1,000 mg / m 3 . The weight increase of the SUS304 test piece before and after the nitriding treatment was measured and found to be 18 gZm 2 . SUS304 specimen was cut and polished, etched with marble solution, and the cut surface was observed with an optical microscope. After all, a nitride layer having a uniform thickness of 45 zm was formed. When the surface hardness of the test piece was measured at five points using a Vickers hardness tester, all values were distributed between Hv = 1200-1250.
[0044] 〔実施例 4〕 Example 4
実施例 1で使用したマツフル炉内に SUS304板材をセットし ΝΗガスと Νガスをそ  The SUS304 plate was set in the Matsufurn furnace used in Example 1 and ΝΗ gas and Ν gas were
3 2 れぞれ 200LZHの流速で送り込み室温から 550°Cに 75分で昇温した。途中雰囲気 温度が 100°Cになった時点(昇温開始から 18分後)で C Hガス 5LZHの注入を開  3 2 Each was fed at a flow rate of 200 LZH, and the temperature was raised from room temperature to 550 ° C in 75 minutes. When the temperature of the atmosphere reached 100 ° C (18 minutes after the start of heating), injection of CH gas 5LZH was started.
2 4  twenty four
始した。 550°Cに昇温後 2時間雰囲気温度を維持し、この時点で C Hガスの注入を  Started. After raising the temperature to 550 ° C, maintain the ambient temperature for 2 hours.At this point, inject CH gas.
2 4  twenty four
停止する一方で、 NHガスと Nガスを 550°Cでさらに 4時間流して窒化を進行させた  While stopping, nitriding was performed by flowing NH gas and N gas at 550 ° C for another 4 hours.
3 2  3 2
後、加熱を止めて Nガスだけを流し続けて炉冷し雰囲気温度が 100°C以下になった  After that, the heating was stopped and only the N gas was kept flowing, the furnace was cooled and the ambient temperature dropped to 100 ° C or less.
2  2
ところで炉内の試験片を取り出した。  By the way, the test piece in the furnace was taken out.
[0045] また、炉内からの排ガスを分岐し、排ガスの一部を 2質量%苛性ソーダ水溶液に吸 収させて HCN分析を実施した。 HCN吸収液の分析結果から、 C Hガス注入期間 [0045] Further, the exhaust gas from the furnace was branched, and a part of the exhaust gas was absorbed into a 2% by mass aqueous solution of caustic soda, and HCN analysis was performed. From the analysis results of the HCN absorbing solution, the CH gas injection period
2 4  twenty four
の炉内雰囲気中の平均 HCN濃度は 1, 200mg/m3に達してレ、た。 SUS304試験 片の窒化処理前後の重量増を測定したところ、 18g/m2であった。 SUS304試験片 を切断および研磨しマーブル液でエッチングして切断面を光学顕微鏡で観察したと ころ、 45 μ ΐηの均一な厚さの窒化層が形成されていた。ビッカース硬度計で上記試 験片の表面硬度を 5点測定したところ、いずれの値も Ην= 1200— 1250の間に分 布していた。 The average HCN concentration in the furnace atmosphere reached 1,200 mg / m 3 . The weight increase of the SUS304 test piece before and after the nitriding treatment was measured and found to be 18 g / m 2 . The SUS304 specimen was cut and polished, etched with a marble solution, and the cut surface was observed with an optical microscope. As a result, a nitride layer having a uniform thickness of 45 μΐη was formed. The surface hardness of the test piece was measured at five points using a Vickers hardness tester, and all values were distributed between Ην = 1200-1250.
[0046] 〔実施例 5〕 Example 5
実施例 1で使用したマツフル炉内に SUS304板材をセットし ΝΗガスと Νガスをそ  The SUS304 plate was set in the Matsufurn furnace used in Example 1 and ΝΗ gas and Ν gas were
3 2 れぞれ 200LZHの流速で送り込み室温から 550°Cに 75分で昇温した。途中雰囲気 温度が 100°Cになった時点(昇温開始から 18分後)で C H ガス 5L/Hの注入を開  3 2 Each was fed at a flow rate of 200 LZH, and the temperature was raised from room temperature to 550 ° C in 75 minutes. When the temperature of the atmosphere reached 100 ° C (18 minutes after the start of heating), the injection of CH gas 5 L / H was started.
4 10  4 10
始した。 550°Cに昇温後 2時間雰囲気温度を維持し、この時点で C H ガスの注入を  Started. After raising the temperature to 550 ° C, maintain the ambient temperature for 2 hours.At this point, inject C H gas.
4 10  4 10
停止する一方で、 NHガスと Nガスを 550°Cでさらに 4時間流して窒化を進行させた  While stopping, nitriding was performed by flowing NH gas and N gas at 550 ° C for another 4 hours.
3 2  3 2
後、加熱を止めて Nガスだけを流し続けて炉冷し雰囲気温度が 100°C以下になった  After that, the heating was stopped and only the N gas was kept flowing, the furnace was cooled and the ambient temperature dropped to 100 ° C or less.
2  2
ところで炉内の試験片を取り出した。  By the way, the test piece in the furnace was taken out.
[0047] また、炉内からの排ガスを分岐し、排ガスの一部を 2質量%苛性ソーダ水溶液に吸 収させて HCN分析を実施した。 HCN吸収液の分析結果から、 C H ガス注入期間 [0047] Exhaust gas from the furnace is branched, and a part of the exhaust gas is absorbed into a 2% by mass aqueous solution of caustic soda. HCN analysis was performed. From the analysis results of the HCN absorbing solution, the CH gas injection period
4 10  4 10
の炉内雰囲気中の平均 HCN濃度は 600mg/m3に達していた。 SUS304試験片 の窒化処理前後の重量増を測定したところ、 18gZm2であった。 SUS304試験片を 切断および研磨しマーブル液でエッチングして切断面を光学顕微鏡で観察したとこ ろ、 45 z mの均一な厚さの窒化層が形成されていた。ビッカース硬度計で上記試験 片の表面硬度を 5点測定したところいずれの値も Hv= 1200— 1250の間に分布し ていた。 The average HCN concentration in the furnace atmosphere reached 600 mg / m 3 . The weight increase of the SUS304 test piece before and after the nitriding treatment was measured and found to be 18 gZm 2 . When the SUS304 test piece was cut and polished, etched with a marble solution, and the cut surface was observed with an optical microscope, a nitride layer having a uniform thickness of 45 zm was formed. When the surface hardness of the test piece was measured at five points using a Vickers hardness tester, all values were distributed between Hv = 1200-1250.
[0048] 〔比較例 1〕 [Comparative Example 1]
実施例 1で使用したマツフル炉内に SUS304板材をセットし ΝΗガスと Νガスをそ  The SUS304 plate was set in the Matsufurn furnace used in Example 1 and ΝΗ gas and Ν gas were
3 2 れぞれ 200L/Hの流速で送り込み室温から 550°Cに 75分で昇温した。 550°Cに昇 温後 6時間雰囲気温度を維持し、 NHガスと Nガスを流し続けて窒化を進行させた  32 Each was fed at a flow rate of 200 L / H, and the temperature was raised from room temperature to 550 ° C in 75 minutes. After raising the temperature to 550 ° C, the ambient temperature was maintained for 6 hours, and nitriding was allowed to proceed by flowing NH gas and N gas
3 2  3 2
後、加熱を止めて Nガスだけを流し続けて炉冷し雰囲気温度が 100°C以下になった  After that, the heating was stopped and only the N gas was kept flowing, the furnace was cooled and the ambient temperature dropped to 100 ° C or less.
2  2
ところで炉内の試験片を取り出した。  By the way, the test piece in the furnace was taken out.
[0049] 炉内からの排ガスを分岐し、排ガスの一部を 2質量%苛性ソーダ水溶液に吸収させ て HCN分析を実施した。 HCN吸収液を分析結果、 HCNは全く検出されず炉内雰 囲気中には HCNは全く存在しなかったことが確認された。 SUS304試験片の窒化 処理前後の重量增を測定したところ、 10g/m2であった。 SUS304試験片を切断お よび研磨しマーブル液でエッチングして切断面を光学顕微鏡で観察したところ、 8— 18 μ mの不均一な厚さの窒化層が形成されていた(図 3に倍率 500倍の顕微鏡写 真を示す)。ビッカース硬度計で上記試験片の表面硬度を 5点測定したところ Hv= 5 00— 1100と大きく変動し絶対値も実施例と比較して低い値を示した。 [0049] Exhaust gas from the furnace was branched, and a part of the exhaust gas was absorbed into a 2% by mass aqueous solution of caustic soda to perform HCN analysis. As a result of analyzing the HCN absorbent, it was confirmed that no HCN was detected at all and no HCN was present in the furnace atmosphere. The weight の of the SUS304 test piece before and after the nitriding treatment was measured and found to be 10 g / m 2 . The SUS304 specimen was cut and polished, etched with a marble solution, and the cut surface was observed with an optical microscope. As a result, a nitrided layer with a nonuniform thickness of 8 to 18 μm was formed (Fig. Magnification micrograph is shown). When the surface hardness of the test piece was measured at five points using a Vickers hardness tester, Hv = 500-1100 was obtained, and the absolute value was lower than that of the example.
産業上の利用可能性  Industrial applicability
[0050] 本発明によれば、金属部材の表面に窒化層、浸炭層あるいは浸炭窒化層を形成さ せるガス窒化法、ガス浸炭法などの拡散浸透処理を困難ならしめている高合金鋼部 材の表面不動態化皮膜を、ガス熱処理で通常に扱われているガス類を用い、被処理 金属および/または金属製炉材表面の触媒作用を利用して、炉内において HCNガ スを生成させ、不動態化している高合金鋼部材の表面を活性化させることにより、従 来、ハロゲンィヒ物による活性化処理で問題であった炉内堆積物、炉内壁面の損耗、 さらには排ガスの無害化処理などの弊害を伴わなレ、、拡散浸透処理の前段処理とし て有用な金属部材表面の活性化処理法を提供することができる。 [0050] According to the present invention, a high-alloy steel part which is difficult to perform a diffusion and infiltration treatment such as a gas nitriding method or a gas carburizing method in which a nitrided layer, a carburized layer or a carbonitrided layer is formed on the surface of a metal member. The surface passivation film is formed by using gases normally used in gas heat treatment and generating HCN gas in the furnace by utilizing the catalytic action of the surface of the metal and / or metal furnace material to be treated. By activating the surface of a high-alloyed steel member that has been passivated, it has been difficult to activate the surface with the Halogen compound, and the sediment in the furnace and the inner wall of the furnace have been damaged. Further, it is possible to provide a method for activating the surface of a metal member which is useful as a pre-stage treatment of the diffusion and infiltration treatment without causing any adverse effects such as a detoxification treatment of exhaust gas.
図面の簡単な説明  Brief Description of Drawings
[0051] [図 1]本発明において使用する処理炉の構造を示す図。  FIG. 1 is a diagram showing the structure of a processing furnace used in the present invention.
[図 2]実施例 1の試験片の切断面の顕微鏡写真  [FIG. 2] A micrograph of a cut surface of the test piece of Example 1
[図 3]比較例 1の試験片の切断面の顕微鏡写真  [FIG. 3] A micrograph of a cut surface of the test piece of Comparative Example 1.
符号の説明  Explanation of symbols
[0052] 1:マツフル炉 [0052] 1: Matsufuru furnace
2:外殻  2: outer shell
3:ヒータ  3: heater
4:内容器(レトルト)  4: Inner container (retort)
5:ガス導入管  5: Gas inlet pipe
6:排気管  6: Exhaust pipe
7:モータ  7: Motor
8:ファン  8: Fan
9:金属製の治具  9: metal jig
10:ガス案内筒  10: Gas guide cylinder
11:陣傘  11: umbrella
12:真空ポンプ  12: vacuum pump
13:排ガス燃焼装置  13: Exhaust gas combustion device
14:炭素供給化合物ガスボンベ  14: Gas cylinder for carbon supply compound
15:アンモニアガスボンベ  15: Ammonia gas cylinder
16:窒素ガスボンベ  16: Nitrogen gas cylinder
17:水素ガスボンベ  17: Hydrogen gas cylinder
18:流量計  18: Flow meter
19:ガスの制御弁  19: Gas control valve

Claims

請求の範囲 The scope of the claims
[1] 常温常圧で気体である炭素供給ィヒ合物とアンモニアとを必須成分とする混合気体 を加熱炉内で 300°C以上に加熱し、該加熱混合気体中で金属部材、金属製炉内壁 あるいは金属製治具の触媒作用により HCNを生成させ、生成した HCNを金属部材 の表面に作用させることを特徴とする金属部材表面の活性化方法。  [1] A mixed gas containing a carbon feed mixture and ammonia as essential components at normal temperature and normal pressure is heated to 300 ° C or more in a heating furnace, and a metal member or a metal material is heated in the heated mixed gas. A method for activating the surface of a metal member, wherein HCN is generated by a catalytic action of a furnace inner wall or a metal jig, and the generated HCN is caused to act on the surface of the metal member.
[2] 炭素供給化合物が、アセチレン、エチレン、プロパン、ブタンおよび一酸化炭素か ら選択された一つ以上の化合物である請求項 1に記載の金属部材表面の活性化方 法。  [2] The method for activating a metal member surface according to claim 1, wherein the carbon supply compound is at least one compound selected from acetylene, ethylene, propane, butane and carbon monoxide.
[3] 金属製炉内壁あるいは金属製治具が、 Fe、 Ni、 Co、 Cu、 Cr、 Mo、 Nb、 V、 Tiお よび Zrから選択された一つ以上の金属を含有する請求項 1に記載の金属部材表面 の活性化方法。  [3] The metal furnace inner wall or the metal jig contains one or more metals selected from Fe, Ni, Co, Cu, Cr, Mo, Nb, V, Ti and Zr according to claim 1. The method for activating the surface of a metal member according to the above.
[4] 炉内において発生させる HCN濃度力 100mg/m3以上であり、炉内雰囲気ガス の露点力 。 C以下である請求項 1に記載の金属部材表面の活性化方法。 [4] The concentration of HCN generated in the furnace is 100 mg / m 3 or more, and the dew point force of the atmosphere gas in the furnace. 2. The method for activating the surface of a metal member according to claim 1, wherein the temperature is C or less.
PCT/JP2005/000607 2004-01-20 2005-01-19 Method for activating surface of metal member WO2005068679A1 (en)

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CN2005800025506A CN1910303B (en) 2004-01-20 2005-01-19 Method for activating surface of metal member
US10/586,626 US20070204934A1 (en) 2004-01-20 2005-01-19 Method for Activating Surface of Metal Member
JP2005517113A JP4861703B2 (en) 2004-01-20 2005-01-19 Method for activating metal member surface
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