WO2005049255A1 - Machining device - Google Patents

Machining device Download PDF

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Publication number
WO2005049255A1
WO2005049255A1 PCT/JP2004/017365 JP2004017365W WO2005049255A1 WO 2005049255 A1 WO2005049255 A1 WO 2005049255A1 JP 2004017365 W JP2004017365 W JP 2004017365W WO 2005049255 A1 WO2005049255 A1 WO 2005049255A1
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WO
WIPO (PCT)
Prior art keywords
tool
ultrasonic vibration
handle
vibration applying
fixed
Prior art date
Application number
PCT/JP2004/017365
Other languages
French (fr)
Japanese (ja)
Inventor
Kazumasa Ohnishi
Original Assignee
Kazumasa Ohnishi
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kazumasa Ohnishi filed Critical Kazumasa Ohnishi
Priority to JP2005515682A priority Critical patent/JPWO2005049255A1/en
Publication of WO2005049255A1 publication Critical patent/WO2005049255A1/en

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B24B1/04Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes subjecting the grinding or polishing tools, the abrading or polishing medium or work to vibration, e.g. grinding with ultrasonic frequency
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B37/00Boring by making use of ultrasonic energy
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/02Driving main working members
    • B23Q5/027Driving main working members reciprocating members

Definitions

  • the present invention relates to a machining device provided with a tool such as a drill.
  • Japanese Patent Application Laid-Open No. 2000-254801 discloses an ultrasonic vibrator arranged in a hollow sleeve formed in a spindle that is rotationally driven by a drive motor, connected to the ultrasonic vibrator coaxially and There is disclosed a spindle structure constituted by two supporting horns restrained and fixed to the inner peripheral wall of the hollow sleeve, and a holder horn connected to the bottom of the supporting horn and having a tip attached to a tip (tool).
  • the two support horns fixed to and fixed to the inner peripheral wall of the hollow sleeve of the spindle rotate, so that the tool fixed to the holder horn connected to the bottom of the support horn, and the support horn
  • the ultrasonic vibrator connected to the top of the is rotated.
  • the ultrasonic vibrator applies ultrasonic vibration to the processing chip via two support horns and a holder horn.
  • a power supply unit is connected to the ultrasonic vibrator via an annular power supply brush (slip ring) to apply electric energy for generating ultrasonic vibration to the ultrasonic vibrator rotating with the tool.
  • RU annular power supply brush
  • the same publication discloses that in order to excite a predetermined vibration to the support horn, the vibration frequency of the ultrasonic vibrator, the natural vibration of the ultrasonic vibrator, the support horn, the holder horn, and the entire horn are all It is stated that the shape and mass of each member should be optimized so that the number and the natural frequency of the vibration system including the spindle as a mass point are appropriate.
  • Patent Document 1 JP 2000-254801A
  • slip rings cannot transmit electric energy normally when the rotation shaft on which the slip ring is attached is rotated at a rotation speed exceeding approximately 5000 rotations Z minutes. For this reason, when using a spindle structure having a slip ring, it is difficult to rotate the tool at high speed.
  • An object of the present invention is to provide a machining apparatus which has a simple apparatus configuration and can perform machining by applying ultrasonic vibration to various tools by a simple method.
  • the present invention provides a base on which an object to be processed is arranged, a support standing upright on the support, and a vertical support.
  • a support member attached so as to be able to move, a hollow motor supported by the support member above a region where the workpiece is arranged, a rotatable hollow spindle connected to the motor and extending downward, and fixed to a lower end portion of the spindle.
  • a machining device of the first configuration is referred to as a machining device of the first configuration.
  • Preferred embodiments of the machining device having the first configuration are as follows.
  • the ultrasonic vibration applying member supports the bolted Langevin type ultrasonic vibrator, which is disposed in contact with the top surface of the handle of the tool, and the bolted Langevin type ultrasonic vibrator at the lower end, And a rod-shaped support member extending along the axis of the hollow spindle to above the hollow motor.
  • an ultrasonic vibration applying member a lower end surface of which is arranged in contact with a top surface of a handle portion of the tool, and a rod-shaped metal member extending to above the hollow motor along the axis of the hollow spindle; and And a bolted Langevin type ultrasonic transducer fixed to the top.
  • an ultrasonic vibration applying member a lower end surface of which is in contact with the top surface of the handle portion of the tool, and a rod-shaped metal member extending above the hollow motor along the axis of the hollow spindle; And a piezoelectric vibrator fixed to the side surface.
  • the lubricating layer is a solid lubricating layer made of a solid.
  • the solid lubricating layer is fixed to the tool or the ultrasonic vibration applying member.
  • the solid lubricating layer contains graphite or fluorine resin.
  • the present invention also provides a base, a stage on which an object to be processed is placed, which is installed on the base so as to be able to ascend and descend, a supporter erected on the supporter, a support member attached to the supporter, A hollow motor supported above the stage by a support member, a rotatable hollow spindle connected to the motor and extending downward, a chuck fixed to the lower end of the spindle, and a column-shaped handle are provided.
  • the load applying member force that presses against is there.
  • the machining apparatus of the present invention having such a configuration is referred to as a machining apparatus of the second configuration.
  • Preferred embodiments of the ultrasonic vibration applying member and the lubricating layer of the machining apparatus having the second configuration are the same as those of the machining apparatus having the first configuration.
  • the present invention also provides a base on which the object to be processed is disposed, a support standing upright on the base, a support member attached to the support so as to be able to move up and down, and A vertically extending hollow spindle rotatably supported on the upper side, fixed to a supporting member, a motor having a drive shaft engaged with the hollow spindle via rotation transmitting means, and fixed to a lower end of the spindle.
  • a tool provided with a chuck, a column-shaped handle, and supported and fixed to the chuck on the side surface of the handle, an ultrasonic vibration applying member disposed in contact with a top surface of the handle of the tool via a lubricating layer,
  • a machining device that applies a force to apply a vibration applying member to the top surface of a handle portion of a tool.
  • the machining device of the present invention having such a configuration is referred to as a machining device of a third configuration.
  • Preferred embodiments of the machining apparatus having the third configuration are as follows.
  • the ultrasonic vibration applying member supports the bolted Langevin type ultrasonic vibrator, which is disposed in contact with the top surface of the handle of the tool, and the bolted Langevin type ultrasonic vibrator at the lower end, A rod-shaped support member extending above the upper end of the spindle along the axis of the hollow spindle.
  • an ultrasonic vibration applying member a lower end surface of which is in contact with the top surface of the handle of the tool, and a bar-shaped metal member extending above the spindle upper end along the axis of the hollow spindle; and a bar-shaped metal member.
  • a bolted Langevin type ultrasonic vibrator fixed to the top of the.
  • an ultrasonic vibration applying member a lower end surface of which is in contact with the top surface of the handle portion of the tool, and a rod-shaped metal member extending above the spindle upper end along the axis of the hollow spindle; and And a piezoelectric vibrator fixed to the side surface.
  • the lubricating layer is a solid lubricating layer made of a solid.
  • the solid lubricating layer is fixed to the tool or the ultrasonic vibration applying member.
  • the solid lubricating layer contains graphite or fluorine resin.
  • the present invention also provides a base, a stage on which an object to be processed is placed, which is installed on the base so as to be able to ascend and descend, a support standing upright on the support, a support member attached to the support, A vertically extending hollow spindle rotatably supported above the region where the workpiece is arranged by the support member, fixed to a vertically extending hollow spindle, and a drive shaft is engaged with the above hollow spindle via rotation transmission means.
  • a motor a chuck fixed to the lower end of the spindle, and a column-shaped handle, a tool supported and fixed to the chuck on the side surface of the handle, and a top surface of the handle of the tool contacted through a lubricating layer.
  • the ultrasonic vibration applying member arranged and a machining device having a load applying member force for pressing the ultrasonic vibration applying member against the top surface of the handle of the tool are used.
  • the machining device of the present invention having such a configuration is referred to as a machining device having a fourth configuration.
  • the preferred modes of the ultrasonic vibration applying member and the lubricating layer of the machining apparatus having the fourth configuration are the same as those of the machining apparatus having the third configuration.
  • the ultrasonic vibration generated by the ultrasonic vibration applying member which is placed in contact with the rotating tool in a stationary state on the top surface of the handle via the lubricating layer, Is given. For this reason, it is possible to directly connect an AC power supply to the ultrasonic vibrator included in the ultrasonic vibration applying member and apply electric energy without using a slip ring. Further, in the machining apparatus of the present invention, two supports fixed and fixed to the inner peripheral wall of the hollow sleeve of the spindle for rotating the tool and the ultrasonic vibrator as in the spindle structure described in the above-mentioned publication.
  • the machining apparatus of the present invention has a simple configuration, and can perform machining by applying ultrasonic vibration to various kinds of tools by a simple method. Further, the mechanical device of the present invention can rotate the tool at high speed because no slip ring is used.
  • FIG. 1 is a partially cutaway front view showing an example of a first configuration of a machining apparatus of the present invention.
  • the mechanical casing device 10 shown in Fig. 1 includes a base 12 on which a processing object 11 is arranged, a support 13 erected on the base 12, and a support member mounted on the support 13 so as to be able to move up and down.
  • a hollow motor 15 supported above the area where the workpiece 11 is placed by the support member 14, a rotatable hollow spindle 16 connected to the motor 15 and extending downward, and a chuck fixed to the lower end of the spindle 16 17, a tool 18 provided with a column-shaped handle 18a, and a tool 18 supported and fixed to a chuck 17 on the side surface of the handle 18a, and is arranged in contact with a top surface of a handle 18a of the tool 18 via a solid lubricating layer 19.
  • An ultrasonic vibration applying member 20 and a load applying member 21 for pressing the ultrasonic vibration applying member 20 against the top surface of the handle 18a of the tool 18 are provided.
  • a drill is used as the tool 18 included in the machining apparatus 10 of FIG.
  • the support 13 of the mechanical device 10 shown in FIG. 1 is connected to a motor 28 installed on the base 12 so as to be rotatable, and a screw is formed on an outer peripheral surface thereof.
  • the top of the support 13 is rotatably supported by a bearing 30 provided on an upper part of an auxiliary support 31 erected on the base 12.
  • a nut 29 is fitted into a portion of the column 13 where the screw is formed.
  • the support member 14 that supports the hollow motor 15 is attached to the column 13 via a nut 29.
  • a hollow spindle 16 is connected to a hollow motor 15 supported above a region where the workpiece 11 is arranged by a support member 14.
  • the hollow motor 15 By operating the hollow motor 15 to rotate the hollow spindle 16, the tool 18 supported and fixed on the chuck 17 provided at the lower end of the spindle 16 rotates.
  • the support member 14 is lowered as described above, the tool 18 contacts the workpiece 11 while rotating, and the workpiece 11 is machined, for example, when a drill is used as the tool 18. Is drilled.
  • Examples of the tool 18 include a drill having a columnar handle, a tap, a reamer, an end mill, a gantry, and a tool for ultrasonic blasting.
  • a slurry containing abrasive grains can be supplied between the workpiece and the tool.
  • the efficiency of machining can be increased.
  • Examples of the abrasive grains contained in the abrasive slurry include: Examples include silicon carbide particles, chromium oxide particles, iron oxide particles, silicon carbide particles, boron nitride particles, and diamond particles.
  • Examples of the abrasive slurry solvent include water and oil.
  • An ultrasonic vibration applying member 20 is disposed in contact with a top surface of a handle 18 a of a tool 18 of the mechanical machine 10 of FIG. 1 via a solid lubricating layer 19.
  • the ultrasonic vibration applying member 20 of the machining apparatus 10 shown in FIG. 1 includes a bolted Langevin type ultrasonic vibrator 22 and a bolted Langevin type ultrasonic vibration placed in contact with the top surface of the handle 18a of the tool 18 described above.
  • a rod-shaped support member 23 that supports the child 22 at the lower end and extends above the hollow motor 15 along the axis of the hollow spindle 16.
  • the rod-shaped support member 23 is vertically movable by a linear guide 27 fixed to the support member 14.
  • a bolted Langevin type ultrasonic transducer 22 is composed of a laminated body of a hollow cylindrical bottom support member 24 and piezoelectric vibrators 25a, 25b, It is formed by fastening together with metal members 26a and 26b arranged on each side by bolts (not shown) and fixed to the bottom plate 24.
  • Each of the piezoelectric vibrators 25a and 25b includes, for example, a plate-shaped piezoelectric body formed of a lead zirconate titanate-based piezoelectric ceramic material and electrode layers provided on the upper and lower surfaces thereof, respectively. It is configured.
  • the electrode layer for example, a thin film (or thin plate) formed of a glass such as silver or phosphor bronze is used.
  • Each of the piezoelectric bodies included in the piezoelectric vibrators 25a and 25b is polarized, for example, in its thickness direction. In this case, it is preferable to arrange the piezoelectric vibrators 25a and 25b so that the polarization directions of the piezoelectric bodies are opposite to each other.
  • the metal members 26a and 26b are formed from a metal material such as titanium or stainless steel.
  • the ultrasonic vibration applying member used in the machining apparatus of the present invention is not limited to a configuration using a bolted Langevin-type ultrasonic vibrator, but includes a known ultrasonic vibrator. It can also be configured.
  • the ultrasonic vibrator include an electrostrictive vibrator and a magnetostrictive vibrator.
  • the electrostrictive vibrator include a piezoelectric vibrator and the above-mentioned bolted Langevin type ultrasonic vibrator.
  • Examples of the magnetostrictive vibrator include a metal magnetostrictive vibrator and a ferrite vibrator. As the ultrasonic vibrator, it is preferable to use an electrostrictive vibrator because of its simple configuration.
  • the ultrasonic vibration applying member 20 of the machining apparatus 10 of the present invention has a bolted Langevin type ultrasonic vibrator 22 and a rod-shaped support member 23 in which one of the hollow spindle 16 and the chuck 17 is rotationally driven.
  • the ultrasonic vibration generated by the Langevin type vibrator 22 can be applied to the tool 18 in a stationary state without being fixed. For this reason, the Langevin-type vibrator 22 of the ultrasonic vibration applying member 20 can directly connect an AC power supply to apply electric energy without using a slip ring.
  • the machining apparatus of the present invention two spindles are fixed and fixed to the inner peripheral wall of the hollow sleeve of the spindle in order to rotate the tool and the ultrasonic vibrator as in the spindle structure disclosed in JP-A-2000-254801.
  • the machining apparatus of the present invention has a simple configuration, and can perform machining by applying ultrasonic vibration to various tools by a simple method.
  • the machining apparatus of the present invention is capable of rotating a tool at a high speed because it is not necessary to use a slip ring.
  • the solid lubricating layer 19 of the mechanical device 10 of FIG. 1 has a function of reducing the friction coefficient between the rotating tool 18 and the ultrasonic vibration applying member 20 arranged in contact with the top surface of the handle 18a.
  • the solid lubricating layer 19 is a layer formed of a solid lubricant described below, or a layer formed of a solid material containing a solid lubricant. Since the solid lubricant is a known material, it will be briefly described below. Solid lubricants are broadly divided into the following four groups of solid lubricants.
  • the solid lubricant belonging to the first group is a material having a layered crystal structure.
  • Examples thereof include graphite, sulfides such as molybdenum disulfide and molybdenum disulfide and tungsten, fluorides such as carbon sulfide, and nitrides such as boron nitride.
  • the solid lubrication layer For example, it is obtained by forming these solid lubricants into a layer.
  • Solid lubricants belonging to the second group are resin materials used as sliding members. Examples include fluorine resin, polyamide resin, and polyethylene resin.
  • the solid lubricant belonging to the third group is called a self-lubricating composite material.
  • a metal material and the solid lubricant belonging to the first group described above for example, graphite disulfide) Molybdenum
  • a solid lubricant belonging to the first group and a solid lubricant belonging to the second group There are various methods of compounding.Examples include a method of impregnating graphite with a metal material, a method of impregnating a solid lubricant belonging to the first group with a resin material which is a solid lubricant belonging to the second group.
  • a method of adding a powder of a lubricant for example, a powder of molybdenum disulfide
  • the solid lubricant belonging to the fourth group is a thin metal film such as lead, tin, gold or silver.
  • the thickness of the metal thin film used as the solid lubricant is set in the range of 1 to 10 / zm.
  • an ion plating method and a snotter method can be given as an example of a method of forming a metal thin film.
  • the lubrication layer disposed between the ultrasonic vibration applying member and the tool is preferably a solid lubrication layer.
  • the lubricating layer instead of the solid lubricating layer described above, there is a semi-solid lubricating layer in which a semi-solid lubricant such as grease is also formed, or a liquid lubricating layer in which a liquid lubricant such as oil is also formed.
  • a lubricating layer formed by adding a powder of the solid lubricant belonging to the first group to these lubricants can also be used.
  • the above-mentioned semi-solid lubricating layer or liquid lubricating layer may be provided between the solid lubricating layer and the tool or the ultrasonic vibration applying member.
  • a solid lubricating layer is used as the lubricating layer as in the machining apparatus 10 shown in FIG. 1, it is possible to prevent oil and the like from dropping and adhering to the workpiece and contaminating the workpiece.
  • the solid lubricating layer 19 is preferably fixed to the tool 18 or the ultrasonic vibration applying member 20.
  • the solid lubricating layer 19 and the tool 18 are joined to each other by, for example, epoxy resin.
  • Solid lubricant layer 19 of the machine mosquito ⁇ E device 10 of FIG. 1 5 mass graphite powder 0. 5 m average particle size comprising a spindle oil 0/0, and fluorine ⁇ (eg, poly It is made of epoxy resin to which 5% by mass of powder of tetrafluoroethylene is added.
  • the solid lubricating layer is also preferably formed from a self-lubricating composite material (SC Carbon NC-071, manufactured by Nippon Carbon Co., Ltd.) in which graphite is impregnated with an antimony alloy.
  • the ultrasonic vibration applying member 20 in order to sufficiently contact the ultrasonic vibration applying member 20 with the top surface of the handle 18 a of the tool 18, the ultrasonic vibration applying member 20 is placed on the rod-shaped support member 23 of the ultrasonic vibration applying member 20. Is a weight as a load applying member 21.
  • the ultrasonic vibration applying member 20 can be used as a load applying member.
  • FIG. 2 is a partially cutaway front view showing another example of the first configuration of the machining apparatus of the present invention
  • FIG. 3 is an ultrasonic vibration provided in the machining apparatus 40 of FIG.
  • FIG. 9 is an exploded perspective view showing the configuration of a hollow spindle 46 into which a rod-shaped metal member 53 of an applying member 50 is inserted and a check 47 to which a tool 48 is supported and fixed.
  • a drill is used as the tool 48 of the mechanical device 40 of FIG.
  • the configuration of the machining apparatus 40 shown in FIG. 2 is such that the ultrasonic vibration imparting member 50 is arranged such that the lower end surface thereof is in contact with the top surface of the handle 48 a of the tool 48, and the hollow motor 15 extends along the axis of the hollow spindle 46.
  • 1 is the same as the mechanical calorie device 10 of FIG. 1 except that it comprises a rod-shaped metal member 53 extending to the upper part of the bar and a bolted Langevin type ultrasonic transducer 52 fixed to the top of the rod-shaped metal member 53. It is.
  • the rod-shaped metal member 53 is formed of a metal material such as titanium or stainless steel.
  • the hollow spindle 46 and the chuck 47 are mutually moved by pushing an inverted truncated cone-shaped portion formed below the spindle 46 into a hole formed above the chuck 47. Is temporarily fixed by the frictional force.
  • Such a configuration of the spindle and the chuck is a known configuration employed in a known drilling machine and the like. With such a configuration, it is possible to use various chucks suitable for the diameter of the tool.
  • the ultrasonic vibration generated by the ultrasonic vibrator 52 is applied to the tool 48 via the rod-shaped metal member 53 and the solid lubricant layer 19.
  • the Langevin vibrator 52 can be arranged outside the hollow spindle 46, so that the diameter of the spindle 46 can be reduced, and the size of the machining apparatus can be easily reduced. is there. Further, since the bolted Langevin type ultrasonic vibrator 52 can be easily replaced, it is easy to change the frequency of the ultrasonic vibration applied to the tool during machining.
  • FIG. 4 is a view showing another example of the configuration of the ultrasonic vibration applying member used in the machining apparatus of the present invention and the state of contact with the tool.
  • the ultrasonic vibration applying member 60 shown in FIG. 4 includes a rod-shaped metal member 63 having a lower end surface in contact with the top surface of a handle 68a of a tool 68 and extending above the upper end of the hollow spindle along the axis of the hollow spindle, and a rod-shaped metal member 63.
  • a total of four piezoelectric vibrators 62 are fixed along the circumferential direction of the side surface of the member 63.
  • the vicinity of the lower end of the rod-shaped metal member 63 is formed in a disk shape in order to ensure a good contact state with the solid lubricating layer 69.
  • the solid lubrication layer 69 shown in FIG. 4 is set in a columnar shape in which a concave portion having a diameter corresponding to the diameter of the handle portion 68a of the tool 68 is formed on the lower surface.
  • the solid lubrication layer 69 and the tool 68 are inserted into the recess on the lower surface of the solid lubrication layer 69 by applying an adhesive (eg, epoxy resin) to the top surface of the handle 68a, and then applying the adhesive. They are joined together by curing.
  • an adhesive eg, epoxy resin
  • the contact area between the solid lubricating layer 69 and the rod-shaped metal member 63 increases, and the solid lubricating layer 69 is generated by the piezoelectric vibrator 62. Ultrasonic vibration is easily transmitted to the tool 68.
  • FIG. 5 is a partially cutaway front view showing still another example of the first configuration of the machining apparatus of the present invention.
  • the configuration of the machining device 70 in FIG. 5 is such that the ultrasonic vibration applying member 20 is a load applying member 71 that presses against the top surface of the handle 18a of the tool 18 as a linear support member fixed to the rod-shaped support member 23 and the support member 14. It is the same as the mechanical casing device 10 of FIG. 1 except that a total of four coil panels for connecting the guide 27 are used. Thus, an elastic body such as a coil panel can be used as the load applying member.
  • FIG. 6 is a partially cutaway front view showing an example of the second configuration of the machining apparatus of the present invention.
  • the machining device 80 shown in Fig. 6 is a base 12 and a caro A stage 81 on which the object 11 is placed, a column 83 erected on the base 12, a support member 14 attached to the column 83, a hollow motor 15 supported above the stage 81 by the support member 14, A rotatable hollow spindle 16 connected to the motor 15 and extending downward, a chuck 17 fixed to the lower end of the spindle 16, and a columnar shank 18a are supported and fixed to the chuck 17 on the side of the shank 18a.
  • the ultrasonic vibration imparting member 20 and the ultrasonic vibration imparting member 20, which are disposed in contact with the top surface of the tool 18, the handle 18 a of the tool 18 via the solid lubricating layer 19, and the top of the handle 18 a of the tool 18. It is composed of a load applying member 21 pressed against the surface.
  • the mechanical caulking device 80 of Fig. 6 is different from the mechanical caulking device 10 of Fig. 1 in that the tool is lowered and brought into contact with the karoe object to mechanically caulk the workpiece.
  • the object 11 is machined by moving the stage 81 up and bringing the object 11 placed on the stage 81 into contact with the tool 18.
  • a three-dimensional positioning stage can be used.
  • a plate material that is attached to the column so as to be able to move up and down in the same manner as the support member 14 of the mechanical force maker 10 in FIG. 1 is used as the stage.
  • FIG. 7 is a partially cutaway front view showing an example of the third configuration of the machining apparatus of the present invention.
  • the machine casing 90 shown in FIG. 7 includes a base 12 on which a workpiece 11 is arranged, a support 13 erected on the base 12, a support member 14 attached to the support 13 so as to be able to move up and down, and a support.
  • the ultrasonic vibration applying member 50 which is disposed in contact with the top surface of the handle portion 48a of the tool 48 via the solid lubricating layer 19, and the load applying member 21 that presses the ultrasonic vibration applying member 50 against the top surface of the handle portion 48a of the tool 48. It is composed.
  • the hollow spindle 46 of the mechanical device 90 of FIG. 7 is rotatable by a bearing 100 fixed to the lower surface of the support member 14.
  • the hollow spindle 46 and the drive shaft 95a of the motor 95 fixed to the support member 14 are engaged via rotation transmission means 96.
  • a belt is used as the rotation transmitting means 96 of the mechanical device 90 in FIG.
  • Examples of the rotation transmitting means include a gear and the like in addition to the belt.
  • the configuration of the machine 90 shown in FIG. 7 is the same as that of the machining apparatus 40 shown in FIG. 2 except that the rotary spindle 46 is rotationally driven by a motor 95 engaged via a rotation transmitting means 96. The same is true.
  • FIG. 1 is a partially cutaway front view showing an example of a first configuration of a machining apparatus of the present invention.
  • FIG. 2 is a partially cutaway front view showing another example of the first configuration of the machining apparatus of the present invention.
  • FIG. 3 is an exploded perspective view showing a configuration of a hollow spindle into which a rod-shaped metal member included in the ultrasonic vibration applying member of the machining apparatus of FIG. 2 is inserted, and a chuck to which a tool is supported and fixed.
  • FIG. 4 is a view showing another configuration example of the ultrasonic vibration applying member used in the machining apparatus of the present invention and a state of contact with the tool.
  • FIG. 5 is a partially cutaway front view showing still another example of the first configuration of the machining apparatus of the present invention.
  • FIG. 6 is a partially cutaway front view showing an example of a second configuration of the machining apparatus of the present invention.
  • FIG. 7 is a partially cutaway front view showing an example of a third configuration of the machining apparatus of the present invention. Explanation of symbols

Abstract

A machining device has a base on which a workpiece is placed, a supporting column stood on the base, a supporting member liftably installed on the supporting column, a hollow motor supported, by the supporting member, above a region where the workpiece is placed, a hollow spindle connected to the motor and extending downward, a chuck fixed to the lower end of the spindle, a tool having a column-like shank and supported by and fixed to the chuck at the side face of the shank, a supersonic vibration-applying member provided, in a contacting manner through a lubrication layer, on the shank of the tool, and a load-applying member for pressing the supersonic vibration-applying member to the top surface of the shank of the tool. The construction of the machining device is simple, and capable of performing machining by applying, with a simple method, supersonic vibration to various kinds of tools.

Description

明 細 書  Specification
機械加工装置  Machining equipment
技術分野  Technical field
[0001] 本発明は、ドリルなどの工具を備える機械加工装置に関する。  The present invention relates to a machining device provided with a tool such as a drill.
背景技術  Background art
[0002] 従来より、柱状の柄部を備えたドリル、タップ、リーマ、エンドミル、あるいは砲石など の工具により機械加工を行なう際には、工具をその柄部の側面にて支持固定するチ ャックと、このチャックを回転させるモータとを備えた機械カ卩ェ装置が用いられて 、る 。そして機械加工装置のチャックに支持固定された工具を回転させ、工具を加工対 象物に接触させることにより各種の機械加工が行なわれる。  [0002] Conventionally, when performing machining with a tool such as a drill, tap, reamer, end mill, or gantry having a columnar handle, a chuck that supports and fixes the tool on the side surface of the handle. And a motor for rotating the chuck. Then, various types of machining are performed by rotating the tool supported and fixed on the chuck of the machining apparatus and bringing the tool into contact with the object to be machined.
[0003] 一方、工具に超音波振動を付与することにより、機械加工の効率や精度が向上す ることは知られている。  [0003] On the other hand, it is known that applying ultrasonic vibration to a tool improves the efficiency and accuracy of machining.
[0004] 特開 2000-254801号公報には、駆動モータにより回転駆動されるスピンドルに形 成された中空スリーブ内に配置された超音波振動子、この超音波振動子に同軸状に 接続され且つ中空スリーブの内周壁に拘束固定される二個の支持ホーン、そして支 持ホーンの底部に接続され先端にカ卩ェチップ(工具)が固定されたホルダホーンなど 力 構成されるスピンドル構造が開示されて 、る。  [0004] Japanese Patent Application Laid-Open No. 2000-254801 discloses an ultrasonic vibrator arranged in a hollow sleeve formed in a spindle that is rotationally driven by a drive motor, connected to the ultrasonic vibrator coaxially and There is disclosed a spindle structure constituted by two supporting horns restrained and fixed to the inner peripheral wall of the hollow sleeve, and a holder horn connected to the bottom of the supporting horn and having a tip attached to a tip (tool). RU
[0005] このスピンドルを回転させると、スピンドルの中空スリーブ内周壁に拘束固定された 二個の支持ホーンが回転するため、支持ホーンの底部に接続されたホルダホーンに 固定された工具、そして支持ホーンの頂部に接続された超音波振動子が回転する。 超音波振動子は、二個の支持ホーンとホルダホーンとを介して加工チップに超音波 振動を付与する。そして工具と共に回転する超音波振動子に超音波振動を発生させ るための電気的エネルギーを付与するため、超音波振動子には環状の給電ブラシ( スリップリング)を介して給電ユニットが接続されて 、る。  When the spindle is rotated, the two support horns fixed to and fixed to the inner peripheral wall of the hollow sleeve of the spindle rotate, so that the tool fixed to the holder horn connected to the bottom of the support horn, and the support horn The ultrasonic vibrator connected to the top of the is rotated. The ultrasonic vibrator applies ultrasonic vibration to the processing chip via two support horns and a holder horn. A power supply unit is connected to the ultrasonic vibrator via an annular power supply brush (slip ring) to apply electric energy for generating ultrasonic vibration to the ultrasonic vibrator rotating with the tool. RU
[0006] この公報に記載のスピンドル構造では、超音波振動子力 加工チップまでを、超音 波振動負荷時に二個の支持ホーンに圧縮変形と引張り変形が配列方向の順に相互 に弓 Iき起こされる振動が励起される構成とすることにより、支持ホーンからスピンドル 側への超音波振動エネルギーの逃げが抑えられて超音波振動を加工チップ側に効 率良く伝達できるとともに、ホルダホーンの半径方向の振れを抑えることができるとさ れている。そして、このスピンドル構造を用いることにより、加工チップによるワーク (加 ェ対象物)の加工効率が向上するとともに、加工チップのワークに対する調心性が保 たれて高精度の加工を維持できるとされて!/ヽる。 [0006] In the spindle structure described in this publication, compressive deformation and tensile deformation are caused in the two support horns in the order of the arrangement direction to each other by ultrasonic vibration load on the two support horns up to the ultrasonic vibrator force processing tip. The vibration that is excited is excited so that the spindle It is said that the escape of the ultrasonic vibration energy to the side can be suppressed, the ultrasonic vibration can be efficiently transmitted to the processing chip side, and the holder horn can be prevented from oscillating in the radial direction. It is said that by using this spindle structure, the machining efficiency of the workpiece (workpiece) by the machining chip is improved, and the alignment of the machining chip with the workpiece can be maintained to maintain high-precision machining! / Puru.
[0007] また、同公報には、支持ホーンに所定の振動を励起するためには、超音波振動子 の振動周波数、超音波振動子、支持ホーン、ホルダホーン及びカ卩ェチップの全体の 固有振動数、そしてスピンドルを質点として含む振動系の固有振動数などが適切と なるように、各部材の形状や質量を最適化すれば良 、と記載されて 、る。  [0007] Furthermore, the same publication discloses that in order to excite a predetermined vibration to the support horn, the vibration frequency of the ultrasonic vibrator, the natural vibration of the ultrasonic vibrator, the support horn, the holder horn, and the entire horn are all It is stated that the shape and mass of each member should be optimized so that the number and the natural frequency of the vibration system including the spindle as a mass point are appropriate.
特許文献 1:特開 2000— 254801号公報  Patent Document 1: JP 2000-254801A
発明の開示  Disclosure of the invention
発明が解決しょうとする課題  Problems to be solved by the invention
[0008] 上記の公報に記載のスピンドル構造を用いることにより、ある程度は高い精度でカロ ェ対象物を機械加工することができる。しカゝしながら、設計と異なる種類あるいはサイ ズの加工チップ(工具)を用いる場合には、上記のように支持ホーンに所定の振動を 励起するために超音波振動子の振動周波数、超音波振動子、支持ホーン、ホルダホ ーン及び加工チップの全体の固有振動数などが適切となるように、各部材の形状や 質量を最適化する必要がある。また、工具と共に回転する超音波振動子に電気的ェ ネルギーを付与するためにスリップリングを用いるため、スピンドルの構成が複雑とな る。また、スリップリングは、スリップリングが付設される回転軸がおよそ 5000回転 Z 分を超える回転数で回転されると正常に電気エネルギーを伝達できないものが多い 。このことから、スリップリングを備えるスピンドル構造を用いる場合には、工具を高速 で回転させることが難しい。  [0008] By using the spindle structure described in the above-mentioned publication, it is possible to machine the carothe object with a high degree of accuracy. However, when using a different type or size of processing tip (tool) from the design, as described above, the vibration frequency of the ultrasonic vibrator, the ultrasonic frequency, It is necessary to optimize the shape and mass of each member so that the natural frequency of the vibrator, the support horn, the holder horn, and the processing chip as a whole becomes appropriate. In addition, since a slip ring is used to impart electric energy to the ultrasonic vibrator that rotates together with the tool, the configuration of the spindle is complicated. Further, many slip rings cannot transmit electric energy normally when the rotation shaft on which the slip ring is attached is rotated at a rotation speed exceeding approximately 5000 rotations Z minutes. For this reason, when using a spindle structure having a slip ring, it is difficult to rotate the tool at high speed.
[0009] 本発明の課題は、装置構成が簡単であり、そして各種の工具に簡単な方法により 超音波振動を付与して機械加工を行なうことができる機械加工装置を提供することに ある。  An object of the present invention is to provide a machining apparatus which has a simple apparatus configuration and can perform machining by applying ultrasonic vibration to various tools by a simple method.
課題を解決するための手段  Means for solving the problem
[0010] 本発明は、加工対象物が配置される基台、基台上に立設された支柱、支柱に昇降 可能に取り付けられた支持部材、支持部材により加工対象物の配置領域の上方に 支持された中空モータ、このモータに接続されて下方に伸びる回転可能な中空スピ ンドル、スピンドルの下端部に固定されたチャック、柱状の柄部を備え、この柄部の側 面にてチャックに支持固定された工具、この工具の柄部の頂面に潤滑層を介して接 触配置された超音波振動付与部材、および超音波振動付与部材を工具の柄部の頂 面に押し付ける荷重付与部材カもなる機械加工装置にある。 [0010] The present invention provides a base on which an object to be processed is arranged, a support standing upright on the support, and a vertical support. A support member attached so as to be able to move, a hollow motor supported by the support member above a region where the workpiece is arranged, a rotatable hollow spindle connected to the motor and extending downward, and fixed to a lower end portion of the spindle. A chuck, a tool provided with a columnar handle, and supported and fixed to the chuck on a side surface of the handle; an ultrasonic vibration applying member disposed in contact with a top surface of the handle of the tool via a lubricating layer; And a load applying member for pressing the ultrasonic vibration applying member against the top surface of the handle of the tool.
[0011] 以下、このような構成の本発明の機械加工装置を、第一の構成の機械加工装置と いう。第一の構成の機械加工装置の好ましい態様は、下記の通りである。  Hereinafter, the machining device of the present invention having such a configuration is referred to as a machining device of the first configuration. Preferred embodiments of the machining device having the first configuration are as follows.
(1)超音波振動付与部材が、上記工具の柄部の頂面に接触配置されたボルト締め ランジュバン型超音波振動子と、このボルト締めランジュバン型超音波振動子を下端 部にて支持し、中空スピンドルの軸に沿って中空モータの上方まで伸びる棒状支持 部材とからなる。  (1) The ultrasonic vibration applying member supports the bolted Langevin type ultrasonic vibrator, which is disposed in contact with the top surface of the handle of the tool, and the bolted Langevin type ultrasonic vibrator at the lower end, And a rod-shaped support member extending along the axis of the hollow spindle to above the hollow motor.
(2)超音波振動付与部材が、上記工具の柄部の頂面に下端面が接触配置され、 中空スピンドルの軸に沿って中空モータの上方まで伸びる棒状金属部材と、この棒 状金属部材の頂部に固定されたボルト締めランジュバン型超音波振動子とからなる。  (2) an ultrasonic vibration applying member, a lower end surface of which is arranged in contact with a top surface of a handle portion of the tool, and a rod-shaped metal member extending to above the hollow motor along the axis of the hollow spindle; and And a bolted Langevin type ultrasonic transducer fixed to the top.
(3)超音波振動付与部材が、上記工具の柄部の頂面に下端面が接触配置され、 中空スピンドルの軸に沿って中空モータの上方まで伸びる棒状金属部材と、この棒 状金属部材の側面に固定された圧電振動子とからなる。  (3) an ultrasonic vibration applying member, a lower end surface of which is in contact with the top surface of the handle portion of the tool, and a rod-shaped metal member extending above the hollow motor along the axis of the hollow spindle; And a piezoelectric vibrator fixed to the side surface.
(4)潤滑層が固体からなる固体潤滑層である。  (4) The lubricating layer is a solid lubricating layer made of a solid.
(5)固体潤滑層が工具もしくは超音波振動付与部材に固定されている。 (5) The solid lubricating layer is fixed to the tool or the ultrasonic vibration applying member.
(6)固体潤滑層が黒鉛もしくはフッ素榭脂を含む。 (6) The solid lubricating layer contains graphite or fluorine resin.
[0012] 本発明はまた、基台、基台の上に昇降可能に設置された、加工対象物が配置され るステージ、基台上に立設された支柱、支柱に取り付けられた支持部材、支持部材 によりステージの上方に支持された中空モータ、このモータに接続されて下方に伸び る回転可能な中空スピンドル、スピンドルの下端部に固定されたチャック、柱状の柄 部を備え、この柄部の側面にてチャックに支持固定された工具、この工具の柄部の 頂面に潤滑層を介して接触配置された超音波振動付与部材、および超音波振動付 与部材を工具の柄部の頂面に押し付ける荷重付与部材力 なる機械加工装置にも ある。 [0012] The present invention also provides a base, a stage on which an object to be processed is placed, which is installed on the base so as to be able to ascend and descend, a supporter erected on the supporter, a support member attached to the supporter, A hollow motor supported above the stage by a support member, a rotatable hollow spindle connected to the motor and extending downward, a chuck fixed to the lower end of the spindle, and a column-shaped handle are provided. A tool supported and fixed to the chuck on the side surface, an ultrasonic vibration applying member placed in contact with the top surface of the handle portion of the tool via a lubricating layer, and an ultrasonic vibration applying member attached to the top surface of the tool handle portion. The load applying member force that presses against is there.
[0013] 以下、このような構成の本発明の機械加工装置を、第二の構成の機械加工装置と V、う。第二の構成の機械加工装置の超音波振動付与部材及び潤滑層の好ま ヽ態 様は、上記の第一の構成の機械加工装置の場合と同様である。  Hereinafter, the machining apparatus of the present invention having such a configuration is referred to as a machining apparatus of the second configuration. Preferred embodiments of the ultrasonic vibration applying member and the lubricating layer of the machining apparatus having the second configuration are the same as those of the machining apparatus having the first configuration.
[0014] 本発明はまた、加工対象物が配置される基台、基台上に立設された支柱、支柱に 昇降可能に取り付けられた支持部材、支持部材により加工対象物の配置領域の上 方にて回転可能に支持された上下に伸びる中空スピンドル、支持部材に固定され、 駆動軸が上記の中空スピンドルと回転伝達手段を介して係合しているモータ、スピン ドルの下端部に固定されたチャック、柱状の柄部を備え、この柄部の側面にてチヤッ クに支持固定された工具、この工具の柄部の頂面に潤滑層を介して接触配置された 超音波振動付与部材、および超音波振動付与部材を工具の柄部の頂面に押し付け る荷重付与部材力 なる機械加工装置にもある。  [0014] The present invention also provides a base on which the object to be processed is disposed, a support standing upright on the base, a support member attached to the support so as to be able to move up and down, and A vertically extending hollow spindle rotatably supported on the upper side, fixed to a supporting member, a motor having a drive shaft engaged with the hollow spindle via rotation transmitting means, and fixed to a lower end of the spindle. A tool provided with a chuck, a column-shaped handle, and supported and fixed to the chuck on the side surface of the handle, an ultrasonic vibration applying member disposed in contact with a top surface of the handle of the tool via a lubricating layer, In addition, there is a machining device that applies a force to apply a vibration applying member to the top surface of a handle portion of a tool.
[0015] 以下、このような構成の本発明の機械加工装置を、第三の構成の機械加工装置と いう。第三の構成の機械加工装置の好ましい態様は、下記の通りである。  Hereinafter, the machining device of the present invention having such a configuration is referred to as a machining device of a third configuration. Preferred embodiments of the machining apparatus having the third configuration are as follows.
(1)超音波振動付与部材が、上記工具の柄部の頂面に接触配置されたボルト締め ランジュバン型超音波振動子と、このボルト締めランジュバン型超音波振動子を下端 部にて支持し、中空スピンドルの軸に沿つてスピンドル上端よりも上方に伸びる棒状 支持部材とからなる。  (1) The ultrasonic vibration applying member supports the bolted Langevin type ultrasonic vibrator, which is disposed in contact with the top surface of the handle of the tool, and the bolted Langevin type ultrasonic vibrator at the lower end, A rod-shaped support member extending above the upper end of the spindle along the axis of the hollow spindle.
(2)超音波振動付与部材が、上記工具の柄部の頂面に下端面が接触配置され、 中空スピンドルの軸に沿ってスピンドル上端よりも上方に伸びる棒状金属部材と、こ の棒状金属部材の頂部に固定されたボルト締めランジュバン型超音波振動子とから なる。  (2) an ultrasonic vibration applying member, a lower end surface of which is in contact with the top surface of the handle of the tool, and a bar-shaped metal member extending above the spindle upper end along the axis of the hollow spindle; and a bar-shaped metal member. And a bolted Langevin type ultrasonic vibrator fixed to the top of the.
(3)超音波振動付与部材が、上記工具の柄部の頂面に下端面が接触配置され、 中空スピンドルの軸に沿ってスピンドル上端よりも上方に伸びる棒状金属部材と、該 棒状金属部材の側面に固定された圧電振動子とからなる。  (3) an ultrasonic vibration applying member, a lower end surface of which is in contact with the top surface of the handle portion of the tool, and a rod-shaped metal member extending above the spindle upper end along the axis of the hollow spindle; and And a piezoelectric vibrator fixed to the side surface.
(4)潤滑層が固体からなる固体潤滑層である。  (4) The lubricating layer is a solid lubricating layer made of a solid.
(5)固体潤滑層が工具もしくは超音波振動付与部材に固定されている。 (5) The solid lubricating layer is fixed to the tool or the ultrasonic vibration applying member.
(6)固体潤滑層が黒鉛もしくはフッ素榭脂を含む。 [0016] 本発明はまた、基台、基台の上に昇降可能に設置された、加工対象物が配置され るステージ、基台上に立設された支柱、支柱に取り付けられた支持部材、支持部材 により加工対象物の配置領域の上方にて回転可能に支持された上下に伸びる中空 スピンドル、支持部材に固定され、駆動軸が上記の中空スピンドルと回転伝達手段を 介して係合しているモータ、上記スピンドルの下端部に固定されたチャック、柱状の 柄部を備え、この柄部の側面にてチャックに支持固定された工具、この工具の柄部 の頂面に潤滑層を介して接触配置された超音波振動付与部材、および超音波振動 付与部材を工具の柄部の頂面に押し付ける荷重付与部材力 なる機械加工装置に もめる。 (6) The solid lubricating layer contains graphite or fluorine resin. [0016] The present invention also provides a base, a stage on which an object to be processed is placed, which is installed on the base so as to be able to ascend and descend, a support standing upright on the support, a support member attached to the support, A vertically extending hollow spindle rotatably supported above the region where the workpiece is arranged by the support member, fixed to a vertically extending hollow spindle, and a drive shaft is engaged with the above hollow spindle via rotation transmission means. A motor, a chuck fixed to the lower end of the spindle, and a column-shaped handle, a tool supported and fixed to the chuck on the side surface of the handle, and a top surface of the handle of the tool contacted through a lubricating layer. The ultrasonic vibration applying member arranged and a machining device having a load applying member force for pressing the ultrasonic vibration applying member against the top surface of the handle of the tool are used.
[0017] 以下、このような構成の本発明の機械加工装置を、第四の構成の機械加工装置と V、う。第四の構成の機械加工装置の超音波振動付与部材及び潤滑層の好ま ヽ態 様は、上記の第三の構成の機械加工装置の場合と同様である。  Hereinafter, the machining device of the present invention having such a configuration is referred to as a machining device having a fourth configuration. The preferred modes of the ultrasonic vibration applying member and the lubricating layer of the machining apparatus having the fourth configuration are the same as those of the machining apparatus having the third configuration.
発明の効果  The invention's effect
[0018] 本発明の機械加工装置では、回転する工具に、その柄部の頂面に潤滑層を介して 静止した状態にて接触配置された超音波振動付与部材にて発生させた超音波振動 を付与する。このため超音波振動付与部材が備える超音波振動子には、スリップリン グを用いずに、交流電源を直接接続して電気的エネルギーを付与することができる。 また、本発明の機械加工装置では、上記の公報に記載のスピンドル構造のようにェ 具と超音波振動子とを回転させるためにスピンドルの中空スリーブ内周壁に拘束固 定される二個の支持ホーンを用いる必要がなぐまた二個の支持ホーンに圧縮変形 と引張り変形が配列方向の順に相互に引き起こさせるような特別の振動を励起する 必要もない。このように本発明の機械加工装置は、その構成が簡単であり、そして各 種の工具に簡単な方法により超音波振動を付与して機械加工を行なうことができる。 また、本発明の機械カ卩ェ装置は、スリップリングを用いていないために工具を高速で 回転させることち可會である。  [0018] In the machining apparatus of the present invention, the ultrasonic vibration generated by the ultrasonic vibration applying member, which is placed in contact with the rotating tool in a stationary state on the top surface of the handle via the lubricating layer, Is given. For this reason, it is possible to directly connect an AC power supply to the ultrasonic vibrator included in the ultrasonic vibration applying member and apply electric energy without using a slip ring. Further, in the machining apparatus of the present invention, two supports fixed and fixed to the inner peripheral wall of the hollow sleeve of the spindle for rotating the tool and the ultrasonic vibrator as in the spindle structure described in the above-mentioned publication. There is no need to use a horn, nor is it necessary to excite the two supporting horns with special vibrations that cause the compressive and tensile deformations to occur in the order of arrangement. As described above, the machining apparatus of the present invention has a simple configuration, and can perform machining by applying ultrasonic vibration to various kinds of tools by a simple method. Further, the mechanical device of the present invention can rotate the tool at high speed because no slip ring is used.
発明を実施するための最良の形態  BEST MODE FOR CARRYING OUT THE INVENTION
[0019] 本発明の機械加工装置を、添付の図面を用いて説明する。図 1は、本発明の機械 加工装置の第一の構成の例を示す一部切り欠き正面図である。 [0020] 図 1の機械カ卩ェ装置 10は、加工対象物 11が配置される基台 12、基台 12の上に立 設された支柱 13、支柱 13に昇降可能に取り付けられた支持部材 14、支持部材 14 により加工対象物 11の配置領域の上方に支持された中空モータ 15、モータ 15に接 続されて下方に伸びる回転可能な中空スピンドル 16、スピンドル 16の下端部に固定 されたチャック 17、柱状の柄部 18aを備え、この柄部 18aの側面にてチャック 17に支 持固定された工具 18、工具 18の柄部 18aの頂面に固体潤滑層 19を介して接触配 置された超音波振動付与部材 20、そして超音波振動付与部材 20を工具 18の柄部 18aの頂面に押し付ける荷重付与部材 21から構成されている。図 1の機械加工装置 10が備える工具 18としては、例えば、ドリルが用いられている。 [0019] The machining apparatus of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a partially cutaway front view showing an example of a first configuration of a machining apparatus of the present invention. [0020] The mechanical casing device 10 shown in Fig. 1 includes a base 12 on which a processing object 11 is arranged, a support 13 erected on the base 12, and a support member mounted on the support 13 so as to be able to move up and down. 14, a hollow motor 15 supported above the area where the workpiece 11 is placed by the support member 14, a rotatable hollow spindle 16 connected to the motor 15 and extending downward, and a chuck fixed to the lower end of the spindle 16 17, a tool 18 provided with a column-shaped handle 18a, and a tool 18 supported and fixed to a chuck 17 on the side surface of the handle 18a, and is arranged in contact with a top surface of a handle 18a of the tool 18 via a solid lubricating layer 19. An ultrasonic vibration applying member 20 and a load applying member 21 for pressing the ultrasonic vibration applying member 20 against the top surface of the handle 18a of the tool 18 are provided. For example, a drill is used as the tool 18 included in the machining apparatus 10 of FIG.
[0021] 図 1の機械カ卩ェ装置 10の支柱 13は、基台 12の上に設置されたモータ 28に接続さ れて回転可能とされ、その外周面にはねじが形成されている。支柱 13の頂部は、基 台 12の上に立設された補助支柱 31の上部に備えられたベアリング 30によって回転 可能に支持されている。また、支柱 13のねじが形成された部位には、ナット 29が嵌 め合わされている。中空モータ 15を支持する支持部材 14は、ナット 29を介して支柱 13に取り付けられている。そしてモータ 28を作動させて支柱 13を回転させることによ り、ナット 29に固定された支持部材 14を、支柱 13の長さ方向に沿って上昇あるいは 下降させることができる。  The support 13 of the mechanical device 10 shown in FIG. 1 is connected to a motor 28 installed on the base 12 so as to be rotatable, and a screw is formed on an outer peripheral surface thereof. The top of the support 13 is rotatably supported by a bearing 30 provided on an upper part of an auxiliary support 31 erected on the base 12. In addition, a nut 29 is fitted into a portion of the column 13 where the screw is formed. The support member 14 that supports the hollow motor 15 is attached to the column 13 via a nut 29. By operating the motor 28 to rotate the column 13, the support member 14 fixed to the nut 29 can be raised or lowered along the length direction of the column 13.
[0022] 支持部材 14により加工対象物 11の配置領域の上方に支持された中空モータ 15に は、中空スピンドル 16が接続されている。この中空モータ 15を作動させて中空スピン ドル 16を回転させることにより、スピンドル 16の下端部に備えられたチャック 17に支 持固定された工具 18が回転する。そして、上記のようにして支持部材 14を下降させ ると、工具 18が回転しながら加工対象物 11に接触して、加工対象物 11が機械加工 、例えば、工具 18としてドリルを用いた場合には穴あけカ卩ェされる。  A hollow spindle 16 is connected to a hollow motor 15 supported above a region where the workpiece 11 is arranged by a support member 14. By operating the hollow motor 15 to rotate the hollow spindle 16, the tool 18 supported and fixed on the chuck 17 provided at the lower end of the spindle 16 rotates. When the support member 14 is lowered as described above, the tool 18 contacts the workpiece 11 while rotating, and the workpiece 11 is machined, for example, when a drill is used as the tool 18. Is drilled.
[0023] 工具 18の例としては、柱状の柄部を備えたドリル、タップ、リーマ、エンドミル、砲石 、および超音波砲粒加工用の工具などが挙げられる。これらの工具を用いて機械カロ ェを行なう際に、加工対象物と工具との間に砥粒を含むスラリを供給することもできる 。加工対象物と工具との間に砥粒スラリを供給することにより、機械加工の効率を高く することができる。砥粒スラリに含まれる砥粒の例としては、酸ィ匕アルミニウム粒子、酸 化ケィ素粒子、酸化クロム粒子、酸化鉄粒子、炭化ケィ素粒子、窒化ホウ素粒子、お よびダイヤモンド粒子が挙げられる。砥粒スラリの溶媒の例としては、水や油などが挙 げられる。 Examples of the tool 18 include a drill having a columnar handle, a tap, a reamer, an end mill, a gantry, and a tool for ultrasonic blasting. When mechanical calorie is performed using these tools, a slurry containing abrasive grains can be supplied between the workpiece and the tool. By supplying the abrasive slurry between the workpiece and the tool, the efficiency of machining can be increased. Examples of the abrasive grains contained in the abrasive slurry include: Examples include silicon carbide particles, chromium oxide particles, iron oxide particles, silicon carbide particles, boron nitride particles, and diamond particles. Examples of the abrasive slurry solvent include water and oil.
[0024] そして図 1の機械カ卩ェ装置 10の工具 18の柄部 18aの頂面には、固体潤滑層 19を 介して超音波振動付与部材 20が接触配置されている。図 1の機械加工装置 10の超 音波振動付与部材 20は、上記の工具 18の柄部 18aの頂面に接触配置されたボルト 締めランジュバン型超音波振動子 22と、ボルト締めランジュバン型超音波振動子 22 を下端部にて支持し、中空スピンドル 16の軸に沿って中空モータ 15の上方まで伸び る棒状支持部材 23とから構成されている。棒状支持部材 23は支持部材 14に固定さ れたリニアガイド 27によって上下に移動可能とされている。  An ultrasonic vibration applying member 20 is disposed in contact with a top surface of a handle 18 a of a tool 18 of the mechanical machine 10 of FIG. 1 via a solid lubricating layer 19. The ultrasonic vibration applying member 20 of the machining apparatus 10 shown in FIG. 1 includes a bolted Langevin type ultrasonic vibrator 22 and a bolted Langevin type ultrasonic vibration placed in contact with the top surface of the handle 18a of the tool 18 described above. And a rod-shaped support member 23 that supports the child 22 at the lower end and extends above the hollow motor 15 along the axis of the hollow spindle 16. The rod-shaped support member 23 is vertically movable by a linear guide 27 fixed to the support member 14.
[0025] ボルト締めランジュバン型超音波振動子 (以下、ランジュバン型振動子とも 、う) 22 は、中空円柱状の支持部材の底板 24と圧電振動子 25a、 25bとの積層体を、上側と 下側のそれぞれに配置された金属部材 26a、 26bと共にボルト(図示は略する)により 締め付けることにより構成され、底板 24に固定される。  [0025] A bolted Langevin type ultrasonic transducer (hereinafter, also referred to as a Langevin type transducer) 22 is composed of a laminated body of a hollow cylindrical bottom support member 24 and piezoelectric vibrators 25a, 25b, It is formed by fastening together with metal members 26a and 26b arranged on each side by bolts (not shown) and fixed to the bottom plate 24.
[0026] 圧電振動子 25a、 25bはそれぞれ、例えば、ジルコン酸チタン酸鉛系の圧電セラミ ック材料から形成された板状の圧電体と、その上面及び下面にそれぞれ付設された 電極層とから構成されている。電極層としては、例えば、銀やリン青銅などカゝら形成さ れた薄膜 (もしくは薄板)が用いられる。  [0026] Each of the piezoelectric vibrators 25a and 25b includes, for example, a plate-shaped piezoelectric body formed of a lead zirconate titanate-based piezoelectric ceramic material and electrode layers provided on the upper and lower surfaces thereof, respectively. It is configured. As the electrode layer, for example, a thin film (or thin plate) formed of a glass such as silver or phosphor bronze is used.
[0027] 圧電振動子 25a、 25bが備える圧電体はそれぞれ、例えば、その厚み方向に分極 される。この場合には、圧電振動子 25a、 25bを、各々の圧電体の分極方向が互い に逆向きとなるように重ね合わせて配置することが好まし 、。  [0027] Each of the piezoelectric bodies included in the piezoelectric vibrators 25a and 25b is polarized, for example, in its thickness direction. In this case, it is preferable to arrange the piezoelectric vibrators 25a and 25b so that the polarization directions of the piezoelectric bodies are opposite to each other.
[0028] 金属部材 26a、 26bは、例えば、チタンやステンレススチールなどの金属材料から 形成される。  [0028] The metal members 26a and 26b are formed from a metal material such as titanium or stainless steel.
[0029] そして圧電振動子 25a、 25bのそれぞれに、各々の電極層を介して電気的ェネル ギー (例、交流電圧)を付与することにより、ボルト締めランジュバン型超音波振動子 2 2が超音波振動を発生する。  [0029] Then, by applying electric energy (for example, AC voltage) to each of the piezoelectric vibrators 25a and 25b through the respective electrode layers, the bolted Langevin type ultrasonic vibrator 22 becomes an ultrasonic wave. Generates vibration.
[0030] なお、本発明の機械加工装置に用いる超音波振動付与部材は、ボルト締めランジ ュバン型超音波振動子を用いる構成に限定されず、公知の超音波振動子を備えた 構成とすることもできる。超音波振動子の例としては、電歪振動子及び磁歪振動子が 挙げられる。電歪振動子の例としては、圧電振動子や上記のボルト締めランジュバン 型超音波振動子が挙げられる。磁歪振動子の例としては、金属磁歪振動子およびフ エライト振動子が挙げられる。超音波振動子としては、その構成が簡単であることから 、電歪振動子を用いることが好ましい。 [0030] The ultrasonic vibration applying member used in the machining apparatus of the present invention is not limited to a configuration using a bolted Langevin-type ultrasonic vibrator, but includes a known ultrasonic vibrator. It can also be configured. Examples of the ultrasonic vibrator include an electrostrictive vibrator and a magnetostrictive vibrator. Examples of the electrostrictive vibrator include a piezoelectric vibrator and the above-mentioned bolted Langevin type ultrasonic vibrator. Examples of the magnetostrictive vibrator include a metal magnetostrictive vibrator and a ferrite vibrator. As the ultrasonic vibrator, it is preferable to use an electrostrictive vibrator because of its simple configuration.
[0031] 本発明の機械加工装置 10の超音波振動付与部材 20は、そのボルト締めランジュ バン型超音波振動子 22及び棒状支持部材 23が、回転駆動される中空スピンドル 16 及びチャック 17のいずれにも固定されておらず、静止した状態にてランジュバン型振 動子 22で発生させた超音波振動を工具 18に付与することができる。このため超音波 振動付与部材 20のランジュバン型振動子 22には、スリップリングを用いずに、交流 電源を直接接続して電気的エネルギーを付与することができる。また、本発明の機械 加工装置では、上記特開 2000-254801号公報のスピンドル構造のように工具と超 音波振動子とを回転させるためにスピンドルの中空スリーブ内周壁に拘束固定される 二個の支持ホーンを用いる必要がなぐまた二個の支持ホーンに圧縮変形と引張り 変形が配列方向の順に相互に引き起こさせるような特別の振動を励起する必要もな い。このように本発明の機械加工装置は、その構成が簡単であり、そして各種の工具 に簡単な方法により超音波振動を付与して機械加工を行なうことができる。また、本 発明の機械加工装置は、スリップリングを用いる必要がないために工具を高速で回 転させることち可會である。  [0031] The ultrasonic vibration applying member 20 of the machining apparatus 10 of the present invention has a bolted Langevin type ultrasonic vibrator 22 and a rod-shaped support member 23 in which one of the hollow spindle 16 and the chuck 17 is rotationally driven. The ultrasonic vibration generated by the Langevin type vibrator 22 can be applied to the tool 18 in a stationary state without being fixed. For this reason, the Langevin-type vibrator 22 of the ultrasonic vibration applying member 20 can directly connect an AC power supply to apply electric energy without using a slip ring. Further, in the machining apparatus of the present invention, two spindles are fixed and fixed to the inner peripheral wall of the hollow sleeve of the spindle in order to rotate the tool and the ultrasonic vibrator as in the spindle structure disclosed in JP-A-2000-254801. There is no need to use a support horn, nor is it necessary to excite the two support horns with special vibrations that cause compressive and tensile deformations to occur in the order of arrangement. As described above, the machining apparatus of the present invention has a simple configuration, and can perform machining by applying ultrasonic vibration to various tools by a simple method. Further, the machining apparatus of the present invention is capable of rotating a tool at a high speed because it is not necessary to use a slip ring.
[0032] 次に、図 1の機械カ卩ェ装置 10の固体潤滑層 19について説明する。固体潤滑層 19 は、回転する工具 18とその柄部 18aの頂面に接触配置される超音波振動付与部材 20との摩擦係数を小さくする働きをする。固体潤滑層 19は、次に記載する固体潤滑 剤から形成された層であるカゝ、あるいは固体潤滑剤を含む固体材料から形成された 層である。固体潤滑剤は、既に知られている材料であるため、以下では簡単に説明 する。固体潤滑剤は、以下の四つのグループの固体潤滑剤に大別される。  Next, the solid lubricating layer 19 of the mechanical device 10 of FIG. 1 will be described. The solid lubricating layer 19 has a function of reducing the friction coefficient between the rotating tool 18 and the ultrasonic vibration applying member 20 arranged in contact with the top surface of the handle 18a. The solid lubricating layer 19 is a layer formed of a solid lubricant described below, or a layer formed of a solid material containing a solid lubricant. Since the solid lubricant is a known material, it will be briefly described below. Solid lubricants are broadly divided into the following four groups of solid lubricants.
[0033] 第一のグループに属する固体潤滑剤は、層状の結晶構造を有する材料である。そ の例としては、黒鉛、二硫ィ匕モリブデンや二硫ィ匕タングステンなどの硫ィ匕物、フツイ匕 炭素などのフッ化物、および窒化ボロンなどの窒化物が挙げられる。固体潤滑層は、 例えば、これらの固体潤滑剤を層状に形成して得られる。 [0033] The solid lubricant belonging to the first group is a material having a layered crystal structure. Examples thereof include graphite, sulfides such as molybdenum disulfide and molybdenum disulfide and tungsten, fluorides such as carbon sulfide, and nitrides such as boron nitride. The solid lubrication layer For example, it is obtained by forming these solid lubricants into a layer.
[0034] 第二のグループに属する固体潤滑剤は、摺動用部材として用いられる榭脂材料で ある。その例としては、フッ素榭脂、ポリアミド榭脂、およびポリエチレン榭脂が挙げら れる。  [0034] Solid lubricants belonging to the second group are resin materials used as sliding members. Examples include fluorine resin, polyamide resin, and polyethylene resin.
[0035] 第三のグループに属する固体潤滑剤は、自己潤滑性複合材料と呼ばれており、例 えば、金属材料と上記の第一のグループに属する固体潤滑剤(例えば、黒鉛ゃニ硫 化モリブデン)とが複合化された材料、あるいは第一のグループに属する固体潤滑剤 と第二のグループに属する固体潤滑剤とを複合ィ匕した材料が挙げられる。複合化の 方法は様々であるが、その例として、黒鉛に金属材料を含浸する方法、および上記 の第二のグループに属する固体潤滑剤である榭脂材料に、第一のグループに属す る固体潤滑剤の粉末 (例えば、二硫ィ匕モリブデンの粉末)を添加する方法が挙げられ る。  [0035] The solid lubricant belonging to the third group is called a self-lubricating composite material. For example, a metal material and the solid lubricant belonging to the first group described above (for example, graphite disulfide) Molybdenum) and a solid lubricant belonging to the first group and a solid lubricant belonging to the second group. There are various methods of compounding.Examples include a method of impregnating graphite with a metal material, a method of impregnating a solid lubricant belonging to the first group with a resin material which is a solid lubricant belonging to the second group. A method of adding a powder of a lubricant (for example, a powder of molybdenum disulfide) is included.
[0036] 第四のグループに属する固体潤滑剤は、鉛、錫、金あるいは銀などの金属薄膜で ある。通常、固体潤滑剤として用いられる金属薄膜の厚みは、 1乃至 10 /z mの範囲 に設定される。金属薄膜を形成する方法の例としては、イオンプレーティング法ゃス ノッタ法が挙げられる。  [0036] The solid lubricant belonging to the fourth group is a thin metal film such as lead, tin, gold or silver. Usually, the thickness of the metal thin film used as the solid lubricant is set in the range of 1 to 10 / zm. As an example of a method of forming a metal thin film, an ion plating method and a snotter method can be given.
[0037] このように、本発明の機械加工装置において、超音波振動付与部材と工具との間 に配置される潤滑層は固体潤滑層であることが好ましい。潤滑層としては、上記の固 体潤滑層に代えて、グリースなどの半固体潤滑剤力も形成された半固体潤滑層、あ るいは油などの液体潤滑剤力も形成された液体潤滑層、ある 、はこれらの潤滑剤に 上記の第一のグループに属する固体潤滑剤の粉末を添加したものから形成された 潤滑層を用いることもできる。さらに、固体潤滑層と工具あるいは超音波振動付与部 材との間に、上記の半固体潤滑層あるいは液体潤滑層を設けてもよい。図 1の機械 加工装置 10のように潤滑層として固体潤滑層を用いると、油などが加工対象物に落 下、そして付着して加工対象物が汚染されることを防止することができる。  As described above, in the machining apparatus of the present invention, the lubrication layer disposed between the ultrasonic vibration applying member and the tool is preferably a solid lubrication layer. As the lubricating layer, instead of the solid lubricating layer described above, there is a semi-solid lubricating layer in which a semi-solid lubricant such as grease is also formed, or a liquid lubricating layer in which a liquid lubricant such as oil is also formed. A lubricating layer formed by adding a powder of the solid lubricant belonging to the first group to these lubricants can also be used. Further, the above-mentioned semi-solid lubricating layer or liquid lubricating layer may be provided between the solid lubricating layer and the tool or the ultrasonic vibration applying member. When a solid lubricating layer is used as the lubricating layer as in the machining apparatus 10 shown in FIG. 1, it is possible to prevent oil and the like from dropping and adhering to the workpiece and contaminating the workpiece.
[0038] 固体潤滑層 19は、工具 18もしくは超音波振動付与部材 20に固定されていることが 好ましい。固体潤滑層 19と工具 18とは、例えば、エポキシ榭脂により互いに接合さ れる。 [0039] 図 1の機械カ卩ェ装置 10の固体潤滑層 19は、スピンドル油を含む平均粒径が 0. 5 mのグラフアイト粉末を 5質量0 /0、およびフッ素榭脂(例、ポリ四フッ化工チレン)の 粉末を 5質量%の割合で添加したエポキシ榭脂から形成されている。また、固体潤滑 層は、黒鉛にアンチモン合金を含浸した自己潤滑性複合材料 (SCカーボン NC— 07 1、 日本カーボン (株)製)から形成することも好ましい。 The solid lubricating layer 19 is preferably fixed to the tool 18 or the ultrasonic vibration applying member 20. The solid lubricating layer 19 and the tool 18 are joined to each other by, for example, epoxy resin. [0039] Solid lubricant layer 19 of the machine mosquito卩E device 10 of FIG. 1, 5 mass graphite powder 0. 5 m average particle size comprising a spindle oil 0/0, and fluorine榭脂(eg, poly It is made of epoxy resin to which 5% by mass of powder of tetrafluoroethylene is added. The solid lubricating layer is also preferably formed from a self-lubricating composite material (SC Carbon NC-071, manufactured by Nippon Carbon Co., Ltd.) in which graphite is impregnated with an antimony alloy.
[0040] また、図 1に示すように、超音波振動付与部材 20を工具 18の柄部 18aの頂面に十 分に接触させるため、超音波振動付与部材 20の棒状支持部材 23の上には荷重付 与部材 21として錘が置かれている。なお超音波振動付与部材 20のボルト締めランジ ュバン型超音波振動子 22と棒状支持部材 23の質量が十分に大きい場合には、超 音波振動付与部材 20を荷重付与部材として用いることもできる。  Further, as shown in FIG. 1, in order to sufficiently contact the ultrasonic vibration applying member 20 with the top surface of the handle 18 a of the tool 18, the ultrasonic vibration applying member 20 is placed on the rod-shaped support member 23 of the ultrasonic vibration applying member 20. Is a weight as a load applying member 21. When the bolted Langevin type ultrasonic vibrator 22 and the rod-shaped support member 23 of the ultrasonic vibration applying member 20 have sufficiently large masses, the ultrasonic vibration applying member 20 can be used as a load applying member.
[0041] 図 2は、本発明の機械加工装置の第一の構成の別の例を示す一部切り欠き正面図 であり、そして図 3は、図 2の機械加工装置 40が備える超音波振動付与部材 50の棒 状金属部材 53が挿入された中空スピンドル 46及び工具 48が支持固定されたチヤッ ク 47の構成を示す分解斜視図である。図 2の機械カ卩ェ装置 40の工具 48としては、 例えば、ドリルが用いられている。  FIG. 2 is a partially cutaway front view showing another example of the first configuration of the machining apparatus of the present invention, and FIG. 3 is an ultrasonic vibration provided in the machining apparatus 40 of FIG. FIG. 9 is an exploded perspective view showing the configuration of a hollow spindle 46 into which a rod-shaped metal member 53 of an applying member 50 is inserted and a check 47 to which a tool 48 is supported and fixed. For example, a drill is used as the tool 48 of the mechanical device 40 of FIG.
[0042] 図 2の機械加工装置 40の構成は、超音波振動付与部材 50が、工具 48の柄部 48a の頂面に下端面が接触配置され、中空スピンドル 46の軸に沿って中空モータ 15の 上方まで伸びる棒状金属部材 53と、この棒状金属部材 53の頂部に固定されたボル ト締めランジュバン型超音波振動子 52とから構成されていること以外は図 1の機械カロ ェ装置 10と同様である。  The configuration of the machining apparatus 40 shown in FIG. 2 is such that the ultrasonic vibration imparting member 50 is arranged such that the lower end surface thereof is in contact with the top surface of the handle 48 a of the tool 48, and the hollow motor 15 extends along the axis of the hollow spindle 46. 1 is the same as the mechanical calorie device 10 of FIG. 1 except that it comprises a rod-shaped metal member 53 extending to the upper part of the bar and a bolted Langevin type ultrasonic transducer 52 fixed to the top of the rod-shaped metal member 53. It is.
[0043] 棒状金属部材 53は、例えば、チタンやステンレススチールなどの金属材料力 形 成される。  The rod-shaped metal member 53 is formed of a metal material such as titanium or stainless steel.
[0044] また図 3に示すように、中空スピンドル 46とチャック 47とは、スピンドル 46の下側に 形成された逆円錐台状の部分をチャック 47の上部に形成された孔に押し込むことで 互いの摩擦力によって仮固定される。このようなスピンドルとチャックの構成は、公知 のボール盤などに採用されている公知のものである。このような構成によって、工具 の直径に適した各種のチャックを使用することが可能となる。  Further, as shown in FIG. 3, the hollow spindle 46 and the chuck 47 are mutually moved by pushing an inverted truncated cone-shaped portion formed below the spindle 46 into a hole formed above the chuck 47. Is temporarily fixed by the frictional force. Such a configuration of the spindle and the chuck is a known configuration employed in a known drilling machine and the like. With such a configuration, it is possible to use various chucks suitable for the diameter of the tool.
[0045] 図 2の機械加工装置 40の超音波振動付与部材 50のボルト締めランジュバン型超 音波振動子 52にて発生した超音波振動は、棒状金属部材 53、そして固体潤滑層 1 9を介して工具 48に付与される。このように棒状金属部材 53を用いると、ランジュバ ン振動子 52を中空スピンドル 46の外部に配置することができるため、スピンドル 46 の直径を小さくすることができ、機械加工装置の小型化が容易である。また、ボルト締 めランジュバン型超音波振動子 52の交換が容易であるため、機械加工の際に工具 に付与する超音波振動の周波数を変更することが容易である。 The ultrasonic vibration imparting member 50 of the machining apparatus 40 shown in FIG. The ultrasonic vibration generated by the ultrasonic vibrator 52 is applied to the tool 48 via the rod-shaped metal member 53 and the solid lubricant layer 19. When the bar-shaped metal member 53 is used, the Langevin vibrator 52 can be arranged outside the hollow spindle 46, so that the diameter of the spindle 46 can be reduced, and the size of the machining apparatus can be easily reduced. is there. Further, since the bolted Langevin type ultrasonic vibrator 52 can be easily replaced, it is easy to change the frequency of the ultrasonic vibration applied to the tool during machining.
[0046] 図 4は、本発明の機械加工装置に用いる超音波振動付与部材の別の構成例とそ の工具への接触状態を示す図である。図 4の超音波振動付与部材 60は、工具 68の 柄部 68aの頂面に下端面が接触配置され、中空スピンドルの軸に沿ってスピンドル 上端よりも上方まで伸びる棒状金属部材 63と、棒状金属部材 63の側面の周方向に 沿って固定された合計で四個の圧電振動子 62から構成されている。棒状金属部材 6 3の下端部付近は、固体潤滑層 69との良好な接触状態を確保するために円盤状に 形成されている。 FIG. 4 is a view showing another example of the configuration of the ultrasonic vibration applying member used in the machining apparatus of the present invention and the state of contact with the tool. The ultrasonic vibration applying member 60 shown in FIG. 4 includes a rod-shaped metal member 63 having a lower end surface in contact with the top surface of a handle 68a of a tool 68 and extending above the upper end of the hollow spindle along the axis of the hollow spindle, and a rod-shaped metal member 63. A total of four piezoelectric vibrators 62 are fixed along the circumferential direction of the side surface of the member 63. The vicinity of the lower end of the rod-shaped metal member 63 is formed in a disk shape in order to ensure a good contact state with the solid lubricating layer 69.
[0047] また、図 4に示す固体潤滑層 69は、下面に工具 68の柄部 68aの直径と対応する直 径の凹みが形成された円柱状の形状に設定されている。固体潤滑層 69と工具 68と は、固体潤滑層 69の下面の凹みに、工具 68をその柄部 68aの頂面に接着剤(例、 エポキシ榭脂)を塗布して差し込み、そして接着剤を硬化させることにより互いに接合 される。このように工具 68の柄部 68aの直径よりも大きい直径の固体潤滑層 69を用 いると、固体潤滑層 69と棒状金属部材 63との接触面積が大きくなり、圧電振動子 62 にて発生した超音波振動が工具 68に伝わり易くなる。  Further, the solid lubrication layer 69 shown in FIG. 4 is set in a columnar shape in which a concave portion having a diameter corresponding to the diameter of the handle portion 68a of the tool 68 is formed on the lower surface. The solid lubrication layer 69 and the tool 68 are inserted into the recess on the lower surface of the solid lubrication layer 69 by applying an adhesive (eg, epoxy resin) to the top surface of the handle 68a, and then applying the adhesive. They are joined together by curing. As described above, when the solid lubricating layer 69 having a diameter larger than the diameter of the handle 68a of the tool 68 is used, the contact area between the solid lubricating layer 69 and the rod-shaped metal member 63 increases, and the solid lubricating layer 69 is generated by the piezoelectric vibrator 62. Ultrasonic vibration is easily transmitted to the tool 68.
[0048] 図 5は、本発明の機械加工装置の第一の構成のさらに別の例を示す一部切り欠き 正面図である。図 5の機械加工装置 70の構成は、超音波振動付与部材 20を工具 1 8の柄部 18aの頂面に押し付ける荷重付与部材 71として、棒状支持部材 23と、支持 部材 14に固定されたリニアガイド 27とを連結する合計で四つのコイルパネが用いら れていること以外は図 1の機械カ卩ェ装置 10と同様である。このように、荷重付与部材 としては、コイルパネなどの弾性体を用いることもできる。  FIG. 5 is a partially cutaway front view showing still another example of the first configuration of the machining apparatus of the present invention. The configuration of the machining device 70 in FIG. 5 is such that the ultrasonic vibration applying member 20 is a load applying member 71 that presses against the top surface of the handle 18a of the tool 18 as a linear support member fixed to the rod-shaped support member 23 and the support member 14. It is the same as the mechanical casing device 10 of FIG. 1 except that a total of four coil panels for connecting the guide 27 are used. Thus, an elastic body such as a coil panel can be used as the load applying member.
[0049] 図 6は、本発明の機械加工装置の第二の構成の例を示す一部切り欠き正面図であ る。図 6の機械加工装置 80は、基台 12、基台 12の上に昇降可能に設置された、カロ ェ対象物 11が配置されるステージ 81、基台 12の上に立設された支柱 83、支柱 83 に取り付けられた支持部材 14、支持部材 14によりステージ 81の上方に支持された 中空モータ 15、モータ 15に接続されて下方に伸びる回転可能な中空スピンドル 16、 スピンドル 16の下端部に固定されたチャック 17、柱状の柄部 18aを備え、この柄部 1 8aの側面にてチャック 17に支持固定された工具 18、工具 18の柄部 18aの頂面に固 体潤滑層 19を介して接触配置された超音波振動付与部材 20、および超音波振動 付与部材 20を工具 18の柄部 18aの頂面に押し付ける荷重付与部材 21から構成さ れている。 FIG. 6 is a partially cutaway front view showing an example of the second configuration of the machining apparatus of the present invention. The machining device 80 shown in Fig. 6 is a base 12 and a caro A stage 81 on which the object 11 is placed, a column 83 erected on the base 12, a support member 14 attached to the column 83, a hollow motor 15 supported above the stage 81 by the support member 14, A rotatable hollow spindle 16 connected to the motor 15 and extending downward, a chuck 17 fixed to the lower end of the spindle 16, and a columnar shank 18a are supported and fixed to the chuck 17 on the side of the shank 18a. The ultrasonic vibration imparting member 20 and the ultrasonic vibration imparting member 20, which are disposed in contact with the top surface of the tool 18, the handle 18 a of the tool 18 via the solid lubricating layer 19, and the top of the handle 18 a of the tool 18. It is composed of a load applying member 21 pressed against the surface.
[0050] 図 6の機械カ卩ェ装置 80は、図 1の機械カ卩ェ装置 10のように工具を下降させてカロェ 対象物に接触させることにより加工対象物を機械カ卩ェするのではなぐステージ 81を 上昇させてステージ 81の上に配置されたカ卩ェ対象物 11を工具 18に接触させること により加工対象物 11を機械加工する。ステージ 81としては、例えば、三次元位置決 めステージを用いることができる。また、ステージとしては、例えば、図 1の機械力卩ェ装 置 10の支持部材 14と同様にして支柱に昇降可能に取り付けられた板材を用いること ちでさる。  [0050] The mechanical caulking device 80 of Fig. 6 is different from the mechanical caulking device 10 of Fig. 1 in that the tool is lowered and brought into contact with the karoe object to mechanically caulk the workpiece. The object 11 is machined by moving the stage 81 up and bringing the object 11 placed on the stage 81 into contact with the tool 18. As the stage 81, for example, a three-dimensional positioning stage can be used. In addition, as the stage, for example, a plate material that is attached to the column so as to be able to move up and down in the same manner as the support member 14 of the mechanical force maker 10 in FIG. 1 is used.
[0051] 図 7は、本発明の機械加工装置の第三の構成の例を示す一部切り欠き正面図であ る。図 7の機械カ卩ェ装置 90は、加工対象物 11が配置される基台 12、基台 12の上に 立設された支柱 13、支柱 13に昇降可能に取り付けられた支持部材 14、支持部材 1 4により加工対象物 11の配置領域の上方にて回転可能に支持された上下に伸びる 中空スピンドル 46、支持部材 14に固定され、駆動軸 95aが中空スピンドル 46と回転 伝達手段 96を介して係合しているモータ 95、スピンドル 46の下端部に固定されたチ ャック 47、柱状の柄部 48aを備え、この柄部 48aの側面にてチャック 47に支持固定さ れた工具 48、工具 48の柄部 48aの頂面に固体潤滑層 19を介して接触配置された 超音波振動付与部材 50、および超音波振動付与部材 50を工具 48の柄部 48aの頂 面に押し付ける荷重付与部材 21から構成されて 、る。  FIG. 7 is a partially cutaway front view showing an example of the third configuration of the machining apparatus of the present invention. The machine casing 90 shown in FIG. 7 includes a base 12 on which a workpiece 11 is arranged, a support 13 erected on the base 12, a support member 14 attached to the support 13 so as to be able to move up and down, and a support. A vertically extending hollow spindle 46 rotatably supported above the arrangement area of the workpiece 11 by the member 14 and fixed to the supporting member 14, and the drive shaft 95 a is driven via the hollow spindle 46 and the rotation transmitting means 96. It has a motor 95 engaged, a chuck 47 fixed to the lower end of the spindle 46, and a column-shaped handle 48a, and a tool 48 and a tool 48 supported and fixed to the chuck 47 on the side surface of the handle 48a. The ultrasonic vibration applying member 50, which is disposed in contact with the top surface of the handle portion 48a of the tool 48 via the solid lubricating layer 19, and the load applying member 21 that presses the ultrasonic vibration applying member 50 against the top surface of the handle portion 48a of the tool 48. It is composed.
[0052] 図 7の機械カ卩ェ装置 90の中空スピンドル 46は、支持部材 14の下面に固定された ベアリング 100によって回転可能とされている。この中空スピンドル 46と、支持部材 1 4に固定されたモータ 95の駆動軸 95aとは回転伝達手段 96を介して係合されている 。図 7の機械カ卩ェ装置 90の回転伝達手段 96としてはベルトが用いられている。回転 伝達手段の例としては、ベルトの他にギヤなどが挙げられる。図 7の機械カ卩ェ装置 90 の構成は、回転スピンドル 46を回転伝達手段 96を介して係合されたモータ 95により 回転駆動する構成とされていること以外は図 2の機械加工装置 40と同様である。 The hollow spindle 46 of the mechanical device 90 of FIG. 7 is rotatable by a bearing 100 fixed to the lower surface of the support member 14. The hollow spindle 46 and the drive shaft 95a of the motor 95 fixed to the support member 14 are engaged via rotation transmission means 96. . A belt is used as the rotation transmitting means 96 of the mechanical device 90 in FIG. Examples of the rotation transmitting means include a gear and the like in addition to the belt. The configuration of the machine 90 shown in FIG. 7 is the same as that of the machining apparatus 40 shown in FIG. 2 except that the rotary spindle 46 is rotationally driven by a motor 95 engaged via a rotation transmitting means 96. The same is true.
[0053] また、図 7の機械カ卩ェ装置 90を、図 6の機械加工装置 80の場合と同様に加工対象 物が配置されるステージを上昇させて機械加工を行なう構成 (第四の構成)とすること ちでさる。 A configuration in which the mechanical processing device 90 of FIG. 7 is raised and the stage on which the object to be processed is placed is lifted in the same manner as in the case of the mechanical processing device 80 of FIG. 6 (fourth configuration) ).
図面の簡単な説明  Brief Description of Drawings
[0054] [図 1]本発明の機械加工装置の第一の構成の例を示す一部切り欠き正面図である。  FIG. 1 is a partially cutaway front view showing an example of a first configuration of a machining apparatus of the present invention.
[図 2]本発明の機械加工装置の第一の構成の別の例を示す一部切り欠き正面図で ある。  FIG. 2 is a partially cutaway front view showing another example of the first configuration of the machining apparatus of the present invention.
[図 3]図 2の機械加工装置の超音波振動付与部材が備える棒状金属部材が挿入さ れた中空スピンドル及び工具が支持固定されたチャックの構成を示す分解斜視図で ある。  FIG. 3 is an exploded perspective view showing a configuration of a hollow spindle into which a rod-shaped metal member included in the ultrasonic vibration applying member of the machining apparatus of FIG. 2 is inserted, and a chuck to which a tool is supported and fixed.
[図 4]本発明の機械加工装置に用いる超音波振動付与部材の別の構成例とそのェ 具への接触状態を示す図である。  FIG. 4 is a view showing another configuration example of the ultrasonic vibration applying member used in the machining apparatus of the present invention and a state of contact with the tool.
[図 5]本発明の機械加工装置の第一の構成のさらに別の例を示す一部切り欠き正面 図である。  FIG. 5 is a partially cutaway front view showing still another example of the first configuration of the machining apparatus of the present invention.
[図 6]本発明の機械加工装置の第二の構成の例を示す一部切り欠き正面図である。  FIG. 6 is a partially cutaway front view showing an example of a second configuration of the machining apparatus of the present invention.
[図 7]本発明の機械加工装置の第三の構成の例を示す一部切り欠き正面図である。 符号の説明  FIG. 7 is a partially cutaway front view showing an example of a third configuration of the machining apparatus of the present invention. Explanation of symbols
[0055] 10 機械加工装置 [0055] 10 Machine processing equipment
11 加工対象物  11 Workpiece
12 基台  12 bases
13 支柱  13 props
14 支持部材  14 Support members
15 中空モータ  15 Hollow motor
16 中空スピンドノレ チャック 16 Hollow Spin Donore Chuck
工具 tool
a 工具の柄部 a Tool handle
固体潤滑層  Solid lubrication layer
超音波振動付与部材  Ultrasonic vibration applying member
荷重付与部材  Load applying member
ボルト締めランジュバン型超音波振動子 棒状支持部材  Bolt-fastened Langevin type ultrasonic transducer Bar-shaped support member
中空円柱状の支持部材の底板a, 25b 圧電振動子 Bottom plate of hollow cylindrical support member a, 25b Piezoelectric vibrator
a, 26b 金属部材 a, 26b metal parts
リニアガイド  Linear guide
モータ  motor
ナット  Nut
ベアリング  Bearing
補助支柱  Auxiliary strut
機械加工装置  Machining equipment
中空スピンドノレ  Hollow Spindle
チャック  Chuck
工具 tool
a 工具の柄部 a Tool handle
超音波振動付与部材  Ultrasonic vibration applying member
ボルト締めランジュバン型超音波振動子 棒状金属部材  Bolt-fastened Langevin type ultrasonic transducer Rod-shaped metal member
超音波振動付与部材  Ultrasonic vibration applying member
圧電振動子  Piezoelectric vibrator
棒状金属部材  Rod-shaped metal member
工具 a 工具の柄部 固体潤滑層 機械加工装置 荷重付与部材 機械加工装置 ステージ 支柱 tool a Tool handle Solid lubrication layer Machining device Load applying member Machining device Stage support
機械加工装置 モータa モータの,駆動軸 回転伝達手段0 ベアリング  Machining equipment Motor a Motor's drive shaft Rotation transmission means 0 Bearing

Claims

請求の範囲 The scope of the claims
[1] 加工対象物が配置される基台、該基台上に立設された支柱、該支柱に昇降可能に 取り付けられた支持部材、該支持部材により該加工対象物の配置領域の上方に支 持された中空モータ、該モータに接続されて下方に伸びる回転可能な中空スピンド ル、該スピンドルの下端部に固定されたチャック、柱状の柄部を備え、該柄部の側面 にて該チャックに支持固定された工具、該工具の柄部の頂面に潤滑層を介して接触 配置された超音波振動付与部材、および該超音波振動付与部材を工具の柄部の頂 面に押し付ける荷重付与部材力 なる機械加工装置。  [1] A base on which an object to be processed is placed, a support standing upright on the base, a support member attached to the support so as to be able to move up and down, and a support member provided above the area where the work is arranged. It has a supported hollow motor, a rotatable hollow spindle connected to the motor and extending downward, a chuck fixed to the lower end of the spindle, and a column-shaped handle. A tool supported and fixed to the tool, an ultrasonic vibration applying member disposed in contact with the top surface of the handle portion of the tool via a lubricating layer, and a load for pressing the ultrasonic vibration applying member against the top surface of the handle portion of the tool. A mechanical processing device that is a powerful member.
[2] 超音波振動付与部材が、上記工具の柄部の頂面に接触配置されたボルト締めラン ジュバン型超音波振動子と、該ボルト締めランジュバン型超音波振動子を下端部に て支持し、中空スピンドルの軸に沿って中空モータの上方まで伸びる棒状支持部材 と力 なる請求項 1に記載の機械加工装置。  [2] An ultrasonic vibration applying member supports the bolted Langevin type ultrasonic vibrator, which is arranged in contact with the top surface of the handle of the tool, and the bolted Langevin type ultrasonic vibrator at the lower end. The machining apparatus according to claim 1, wherein the rod-shaped support member extends to a position above the hollow motor along the axis of the hollow spindle.
[3] 超音波振動付与部材が、上記工具の柄部の頂面に下端面が接触配置され、中空 スピンドルの軸に沿って中空モータの上方まで伸びる棒状金属部材と、該棒状金属 部材の頂部に固定されたボルト締めランジュバン型超音波振動子とからなる請求項 1 に記載の機械加工装置。  [3] An ultrasonic vibration applying member, a lower end surface of which is disposed in contact with a top surface of a handle portion of the tool, and a rod-shaped metal member extending up to the hollow motor along the axis of the hollow spindle; The machining apparatus according to claim 1, comprising a bolted Langevin type ultrasonic vibrator fixed to the fin.
[4] 超音波振動付与部材が、上記工具の柄部の頂面に下端面が接触配置され、中空 スピンドルの軸に沿って中空モータの上方まで伸びる棒状金属部材と、該棒状金属 部材の側面に固定された圧電振動子とからなる請求項 1に記載の機械加工装置。  [4] An ultrasonic vibration applying member, a lower end surface of which is arranged in contact with a top surface of a handle portion of the tool, and a rod-shaped metal member extending to above the hollow motor along the axis of the hollow spindle; 2. The machining apparatus according to claim 1, comprising a piezoelectric vibrator fixed to the piezoelectric vibrator.
[5] 潤滑層が固体力 なる固体潤滑層である請求項 1に記載の機械加工装置。  [5] The machining apparatus according to claim 1, wherein the lubricating layer is a solid lubricating layer having a solid strength.
[6] 固体潤滑層が工具もしくは超音波振動付与部材に固定されている請求項 5に記載 の機械加工装置。  6. The machining apparatus according to claim 5, wherein the solid lubrication layer is fixed to a tool or an ultrasonic vibration applying member.
[7] 基台、該基台の上に昇降可能に設置された、加工対象物が配置されるステージ、 該基台上に立設された支柱、該支柱に取り付けられた支持部材、該支持部材により ステージの上方に支持された中空モータ、該モータに接続されて下方に伸びる回転 可能な中空スピンドル、該スピンドルの下端部に固定されたチャック、柱状の柄部を 備え、該柄部の側面にて該チャックに支持固定された工具、該工具の柄部の頂面に 潤滑層を介して接触配置された超音波振動付与部材、および該超音波振動付与部 材を工具の柄部の頂面に押し付ける荷重付与部材力 なる機械加工装置。 [7] A base, a stage on which an object to be processed is placed, which is installed on the base so as to be able to ascend and descend, a support standing upright on the support, a support member attached to the support, and the support A hollow motor supported above the stage by members, a rotatable hollow spindle connected to the motor and extending downward, a chuck fixed to the lower end of the spindle, and a columnar handle, and a side surface of the handle A tool supported and fixed to the chuck, an ultrasonic vibration applying member disposed in contact with a top surface of a handle of the tool via a lubricating layer, and the ultrasonic vibration applying section A mechanical processing device that applies force to the material to press the material against the top surface of the tool handle.
[8] 超音波振動付与部材が、上記工具の柄部の頂面に接触配置されたボルト締めラン ジュバン型超音波振動子と、該ボルト締めランジュバン型超音波振動子を下端部に て支持し、中空スピンドルの軸に沿って中空モータの上方まで伸びる棒状支持部材 と力 なる請求項 7に記載の機械加工装置。  [8] An ultrasonic vibration applying member supports the bolted Langevin type ultrasonic vibrator, which is disposed in contact with the top surface of the handle of the tool, and supports the bolted Langevin type ultrasonic vibrator at the lower end. The machining apparatus according to claim 7, wherein the rod-shaped support member extends along the axis of the hollow spindle to above the hollow motor.
[9] 超音波振動付与部材が、上記工具の柄部の頂面に下端面が接触配置され、中空 スピンドルの軸に沿って中空モータの上方まで伸びる棒状金属部材と、該棒状金属 部材の頂部に固定されたボルト締めランジュバン型超音波振動子とからなる請求項 7 に記載の機械加工装置。  [9] An ultrasonic vibration applying member, a lower end surface of which is in contact with a top surface of a handle portion of the tool, and a rod-shaped metal member extending above the hollow motor along the axis of the hollow spindle; and a top portion of the rod-shaped metal member. 8. The machining device according to claim 7, comprising a bolt-fastened Langevin type ultrasonic transducer fixed to the bolt.
[10] 超音波振動付与部材が、上記工具の柄部の頂面に下端面が接触配置され、中空 スピンドルの軸に沿って中空モータの上方まで伸びる棒状金属部材と、該棒状金属 部材の側面に固定された圧電振動子とからなる請求項 7に記載の機械加工装置。  [10] An ultrasonic vibration applying member, a lower end surface of which is in contact with the top surface of the handle of the tool, and a rod-shaped metal member extending above the hollow motor along the axis of the hollow spindle, and a side surface of the rod-shaped metal member. 8. The machining apparatus according to claim 7, comprising a piezoelectric vibrator fixed to the piezoelectric vibrator.
[11] 潤滑層が固体力 なる固体潤滑層である請求項 7に記載の機械加工装置。  [11] The machining device according to claim 7, wherein the lubricating layer is a solid lubricating layer having a solid strength.
[12] 固体潤滑層が工具もしくは超音波振動付与部材に固定されている請求項 11に記 載の機械加工装置。  12. The machining apparatus according to claim 11, wherein the solid lubrication layer is fixed to a tool or an ultrasonic vibration applying member.
[13] 加工対象物が配置される基台、該基台上に立設された支柱、該支柱に昇降可能に 取り付けられた支持部材、該支持部材により該加工対象物の配置領域の上方にて 回転可能に支持された上下に伸びる中空スピンドル、該支持部材に固定され、駆動 軸が該中空スピンドルと回転伝達手段を介して係合して ヽるモータ、該スピンドルの 下端部に固定されたチャック、柱状の柄部を備え、該柄部の側面にて該チャックに支 持固定された工具、該工具の柄部の頂面に潤滑層を介して接触配置された超音波 振動付与部材、および該超音波振動付与部材を工具の柄部の頂面に押し付ける荷 重付与部材からなる機械加工装置。  [13] A base on which the object to be processed is arranged, a support standing upright on the base, a support member attached to the support so as to be able to move up and down, and a support member provided above the area where the work is arranged. A vertically extending hollow spindle rotatably supported, a motor fixed to the support member, and a drive shaft engaged with the hollow spindle via rotation transmitting means, fixed to the lower end of the spindle A tool provided with a chuck and a column-shaped handle portion, supported and fixed to the chuck on a side surface of the handle portion, an ultrasonic vibration applying member disposed in contact with a top surface of the handle portion of the tool via a lubricating layer, And a machining device comprising a load applying member for pressing the ultrasonic vibration applying member against the top surface of the handle of the tool.
[14] 超音波振動付与部材が、上記工具の柄部の頂面に接触配置されたボルト締めラン ジュバン型超音波振動子と、該ボルト締めランジュバン型超音波振動子を下端部に て支持し、中空スピンドルの軸に沿って該スピンドル上端よりも上方に伸びる棒状支 持部材とからなる請求項 13に記載の機械加工装置。  [14] An ultrasonic vibration applying member supports the bolted Langevin type ultrasonic vibrator placed in contact with the top surface of the handle of the tool, and supports the bolted Langevin type ultrasonic vibrator at the lower end. 14. The machining apparatus according to claim 13, further comprising a rod-shaped support member extending above the upper end of the hollow spindle along the axis of the hollow spindle.
[15] 超音波振動付与部材が、上記工具の柄部の頂面に下端面が接触配置され、中空 スピンドルの軸に沿って該スピンドル上端よりも上方に伸びる棒状金属部材と、該棒 状金属部材の頂部に固定されたボルト締めランジュバン型超音波振動子とからなる 請求項 13に記載の機械加工装置。 [15] The ultrasonic vibration applying member is arranged so that the lower end surface thereof is in contact with the top surface of the handle portion of the tool, and is hollow. 14. The machining apparatus according to claim 13, comprising a rod-shaped metal member extending above the upper end of the spindle along the axis of the spindle, and a bolt-fastened Langevin-type ultrasonic transducer fixed to the top of the rod-shaped metal member. .
[16] 超音波振動付与部材が、上記工具の柄部の頂面に下端面が接触配置され、中空 スピンドルの軸に沿って該スピンドル上端よりも上方に伸びる棒状金属部材と、該棒 状金属部材の側面に固定された圧電振動子とからなる請求項 13に記載の機械加工 装置。 [16] An ultrasonic vibration applying member, a lower end surface of which is in contact with a top surface of a handle portion of the tool, and a bar-shaped metal member extending above the upper end of the hollow spindle along the axis of the hollow spindle; 14. The machining apparatus according to claim 13, comprising a piezoelectric vibrator fixed to a side surface of the member.
[17] 基台、該基台の上に昇降可能に設置された、加工対象物が配置されるステージ、 該基台上に立設された支柱、該支柱に取り付けられた支持部材、該支持部材により 該カ卩ェ対象物の配置領域の上方にて回転可能に支持された上下に伸びる中空スピ ンドル、該支持部材に固定され、駆動軸が該中空スピンドルと回転伝達手段を介し て係合しているモータ、該スピンドルの下端部に固定されたチャック、柱状の柄部を 備え、該柄部の側面にて該チャックに支持固定された工具、該工具の柄部の頂面に 潤滑層を介して接触配置された超音波振動付与部材、および該超音波振動付与部 材を工具の柄部の頂面に押し付ける荷重付与部材力 なる機械加工装置。  [17] A base, a stage on which an object to be processed is placed, which is installed on the base so as to be able to ascend and descend, a support standing upright on the support, a support member attached to the support, and the support A vertically extending hollow spindle rotatably supported above a region where the object is arranged by a member, fixed to the support member, and a drive shaft is engaged with the hollow spindle via rotation transmitting means; A motor, a chuck fixed to the lower end of the spindle, a tool having a columnar handle, and a tool supported and fixed to the chuck on the side surface of the handle, and a lubricating layer on the top surface of the handle of the tool. And an ultrasonic vibration applying member, which is disposed in contact with the tool through the intermediary of the tool, and a load applying member which presses the ultrasonic vibration applying member against the top surface of the handle of the tool.
[18] 超音波振動付与部材が、上記工具の柄部の頂面に接触配置されたボルト締めラン ジュバン型超音波振動子と、該ボルト締めランジュバン型超音波振動子を下端部に て支持し、中空スピンドルの軸に沿って該スピンドル上端よりも上方に伸びる棒状支 持部材とからなる請求項 17に記載の機械加工装置。  [18] An ultrasonic vibration applying member supports the bolted Langevin type ultrasonic vibrator placed in contact with the top surface of the handle of the tool and the bolted Langevin type ultrasonic vibrator at the lower end. 18. The machining apparatus according to claim 17, further comprising a rod-shaped support member extending above the upper end of the hollow spindle along the axis of the hollow spindle.
[19] 超音波振動付与部材が、上記工具の柄部の頂面に下端面が接触配置され、中空 スピンドルの軸に沿って該スピンドル上端よりも上方に伸びる棒状金属部材と、該棒 状金属部材の頂部に固定されたボルト締めランジュバン型超音波振動子とからなる 請求項 17に記載の機械加工装置。  [19] An ultrasonic vibration applying member, a lower end surface of which is disposed in contact with a top surface of a handle portion of the tool, and a rod-shaped metal member extending above the upper end of the hollow spindle along the axis of the hollow spindle; 18. The machining apparatus according to claim 17, comprising a bolted Langevin type ultrasonic transducer fixed to a top of the member.
[20] 超音波振動付与部材が、上記工具の柄部の頂面に下端面が接触配置され、中空 スピンドルの軸に沿って該スピンドル上端よりも上方に伸びる棒状金属部材と、該棒 状金属部材の側面に固定された圧電振動子とからなる請求項 17に記載の機械加工 装置。  [20] An ultrasonic vibration applying member, a lower end surface of which is in contact with a top surface of a handle portion of the tool, and a rod-shaped metal member extending above the upper end of the hollow spindle along the axis of the hollow spindle; 18. The machining apparatus according to claim 17, comprising a piezoelectric vibrator fixed to a side surface of the member.
PCT/JP2004/017365 2003-11-20 2004-11-22 Machining device WO2005049255A1 (en)

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