WO2005043209A2 - Dispositifs de guidage d'articulations de corps solides - Google Patents

Dispositifs de guidage d'articulations de corps solides Download PDF

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Publication number
WO2005043209A2
WO2005043209A2 PCT/EP2004/012112 EP2004012112W WO2005043209A2 WO 2005043209 A2 WO2005043209 A2 WO 2005043209A2 EP 2004012112 W EP2004012112 W EP 2004012112W WO 2005043209 A2 WO2005043209 A2 WO 2005043209A2
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WO
WIPO (PCT)
Prior art keywords
solid
spring
state
guide according
joint guide
Prior art date
Application number
PCT/EP2004/012112
Other languages
German (de)
English (en)
Other versions
WO2005043209A3 (fr
Inventor
Karlheinz Bartzke
Georg Günther
Original Assignee
Carl Zeiss Jena Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss Jena Gmbh filed Critical Carl Zeiss Jena Gmbh
Publication of WO2005043209A2 publication Critical patent/WO2005043209A2/fr
Publication of WO2005043209A3 publication Critical patent/WO2005043209A3/fr

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C11/00—Pivots; Pivotal connections
    • F16C11/04—Pivotal connections
    • F16C11/12—Pivotal connections incorporating flexible connections, e.g. leaf springs
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/003—Alignment of optical elements

Definitions

  • the invention relates to solid-state articulated guides that have a solid-state spring element, preferably for use in optical devices.
  • the current guiding concepts for the sliding movement of optical elements consist in the use of high-precision rods or thin-walled tubes. Both concepts have disadvantages, such as high manufacturing costs, bearing play, constraining forces and, in the case of rod guides, high space requirements.
  • the pipe guides take up little space because the lens can be accommodated in their center.
  • the optical link is guided by 2 parallel precision rods (surgical and stereomicroscopes).
  • the lens slides on the rods at a distance from the guides.
  • Loose guides of 20 ⁇ m are to be expected, which will take up the entire available tolerance when zooming.
  • a statically overdetermined bearing of the optical sliding elements by means of a bearing bush on each rod or their mutual bracing by springs causes constraining forces, the overcoming of which requires stronger motors.
  • the manufacturing costs and the space required for the tour are considerable.
  • a pipe guide is guided by 2 concentrically sliding pipes (binoculars, spotting scopes, photo lenses), in the middle of which the lens is arranged.
  • a 20 ⁇ m gap between the tubes is to be expected, which takes up the entire available tolerance when zooming. Deformations and out-of-roundness can cause constraining forces. The space requirement is small, but the manufacturing costs are high.
  • Linear ball guides are not used for zooming or focusing in optical devices due to their high price and relatively large dimensions.
  • a solid-state joint guide which has a solid-state spring element is known from DE 31 43 092 A1.
  • the wall of a cylinder is provided with recesses which form parallel leaf springs which coincide with the transverse plane of the body.
  • the cylinder is slotted so that two parts are created, which are movably connected to each other via the leaf springs.
  • Solid spring joints allow the use of particularly small motors due to the small actuating forces, have a high reproducibility of the guidance of tenths of a micrometer and travel ranges of ⁇ 0.5 mm.
  • the task is to design the solid-state joint guide so that it has large travel ranges, small positioning forces, sufficient mechanical stability transversely to the guide direction and is inexpensive to produce.
  • the guidance of optical sliding links should be significantly improved.
  • the solid-state articulated guides are to be created in particular for optical elements, such as those used for. B. in the adjustment of lenses for zooming or focusing in microscopes, binoculars or cameras or for x-y table adjustments.
  • the objectives are travel ranges from 2 to 50 mm, guidance accuracies of ⁇ 1 ⁇ m, positioning forces ⁇ 1 N and manufacturing costs of less than € 10.
  • the solid-state joints should act free of constraining forces and without bearing play.
  • the object is achieved by solid-state articulated guides, which are described in claims 1, 10, 18 and 25.
  • Advantageous further developments can be found in the respective subclaims.
  • One solution is to use a thin-walled elastic tube that carries a lens or other optical components in the center.
  • the tube is the geometric body with the greatest bending stiffness in all directions.
  • the tube is elastically easily stretchable and compressible in the axial direction by solid spring joints incorporated into the lateral surface, but is rigid in the transverse direction and in the torsional direction.
  • the web width of the solid-state joints should be as small as possible in order to be able to achieve small joint sizes, large travel ranges and small positioning forces.
  • Resilience N F 10mm / N reproducibility 1 ⁇ m Bar preparation of 50 ⁇ m is at the limit of what is technologically feasible when laser cutting, etching, eroding or punching. They require small material thicknesses of 0.1 mm. Bridge widths of 50 ⁇ m or significantly less do not pose any problems with processes of photolithography or the LIGA technique.
  • thin-walled tubes are not mechanically very stable, especially since the tube wall is still delicately broken through by the spring joints. You can dent and buckle. Stability is achieved in that the tube is preferably designed with double walls. This is preferably done by not structuring the thin-walled tube itself, but rather its developed and flat outer surface. This offers the advantage of productive structuring in the package, e.g. B.
  • Fig. 1 Parallel spring element of a solid-state joint guide
  • Fig. 2 Solid-body joint guide made of 5 parallel spring elements in a row
  • Fig. 3 Solid-body joint guide made of 15 parallel spring elements in 3 parallel rows
  • Fig. 4 Tubular solid-body joint guide made of 5 parallel spring joints in a row and 10 parallel ones
  • Rows Fig. 5 telescopically nested solid-state articulation from 5 tubes with 5 parallel spring elements per row and 10 parallel rows per tube
  • Fig. 6 solid-state articulation according to Figure 5 in section
  • Fig. 7 mirror-image spiral solid-body articulation with 5 turns each Fig.
  • FIGS. 1 to 3 show how long adjustment paths of, for example, 2.5 mm can be achieved by connecting parallel spring elements in series with unchanged actuating forces.
  • Parallel spring elements consist of two
  • L-shaped webs 2 which are connected to one another by means of two spring elements 1 and four joints 8.
  • a movable bridge is arched in x
  • Pipes can be nested ( Figure 5).
  • pipe guides are shown, the base element of which is a parallel spring element.
  • the parallel spring elements are connected in series and in parallel.
  • the free ends of the parallel spring elements connected in parallel are connected to one another by coupling elements 4.
  • Figure 6 shows the pipe guide according to Figure 5 in section. Shown are thin-walled, nested structured tubes which are connected to one another by coupling elements 4.
  • FIG. 7a shows an arrangement for zooming or focusing, in which the sheet with the parallel spring elements is not wound into a tube but into a spiral.
  • the two spiral guides are wound in mirror image to compensate for torsional moments.
  • additional joints 8 are provided in the edge zones of the spiral. Adequate stability of the guide results from the double-walled tubes and connectors 9, 9 ' between the two spiral guides.
  • FIG. 7b shows a section through the spiral guide according to FIG. 7a.
  • FIG. 8 shows a rhombic spring element in three different states: without force, compressed and stretched.
  • the spring knots 3 (shown in detail in FIG. 10 a) are represented by small circles. The length and width of the rhombus change in opposite directions when stretching or compressing.
  • FIG. 9 The outer connection points of a grid-shaped arrangement of rhomboid spring elements (FIG. 9) are elastically connected to one another by coupling elements 4. These must allow movements in two directions, otherwise a tight gripping of the grille would lead to a rigid structure.
  • Figure 10 a shows a spring node 3, which combines four spring elements 1, in detail.
  • the spring elements 1 have tapers at the connection points, which form joints 8.
  • FIG. 10 b shows a spring node 3, which combines two spring elements 1 and which has a connection to the coupling member 4. This connection is designed as a spring joint.
  • FIG. 11 shows an elastic pipe guide made from rhomboid spring elements.
  • Rhombenfederetti are connected to the edge zones of the pipe guide by spring tongues which bulge outwards when the pipe is compressed and inwards when stretched.
  • This pipe guide changes its diameter when it is adjusted. For this reason, their double walls cannot be produced by means of stabilizing rings arranged on the circumference of the tube, as can be seen in FIG. 19.
  • the connection between the walls of a double-walled tube can be made by an immersion process in liquid plastic, adhesive or photoresist or by PMMA. Such a plastic connection must not hinder the functionality of the joints.
  • FIG. 12 shows a nested arrangement of several elastic tubes according to FIG. 11. It allows a limited range for large travel ranges Overall length. The diameter of the tubes increases and decreases alternately when they are stretched or compressed.
  • Another variant is a double parallel spring joint that is particularly advantageously designed as a force-invariant spring element according to FIG.
  • the force-invariant spring element enables solid-state articulation with constant spring force that always acts from one direction.
  • a guided tour with a weight train works in a similar way. This avoids positioning errors that occur when spring forces change or change their direction, as is the case with the parallel spring element according to FIG. 1, with a rhombic spring element according to FIG. 8 or with a gimbal ring spring according to FIG. 17.
  • the force invariance is achieved in that the linear spring characteristic of the spring joint, which has a positive increase, is superimposed on the non-linear spring characteristic of a double parallel spring joint, the characteristic of which has a negative increase in a partial area.
  • a negative increase in the spring characteristic curve means that when a tension spring is pulled apart or a compression spring is compressed, the spring forces do not increase but decrease (frog effect).
  • the decisive factor for this effect is the angle ⁇ o at which the spring elements 1 are cut (FIG. 13 left).
  • the spring joints must squeeze through the legs 6 of the U-shaped frame 5 with their moving part 7 when moving in the direction of force. A compressive force acts first. There is an indifferent balance in the central position of the parallel spring joints. The positioning force is zero ( Figure 13 middle). As you move it further, there is increasing thrust on the center piece until it strikes the U-shaped frame ( Figure 13, right).
  • the effect of the force-invariant spring element is to be explained on the basis of the characteristic curves in FIG.
  • the spring joints 1 per se have a spring characteristic with a positive slope (FIG. 14 left).
  • the base of the U-shaped frame 5 acts as a stop for the moving part 7.
  • this characteristic curve has a negative slope.
  • the overall characteristic of the spring system is created by superimposing the characteristic of the spring joints on the characteristic of the constraining forces ( Figure 14, right). As a result, an approximately constant actuating force F acts in the working range of the spring element.
  • FIG. 16 shows a tubular arrangement of force-invariant spring elements, in which parallel spring elements are connected in series and in parallel.
  • the free frame 5 and the free moving parts 7 of the spring elements connected in parallel are each connected to one another by coupling members 4.
  • FIG. 17 shows a solid-state joint guide made of 2 gimbal ring springs.
  • the advantage is their relatively large travel in positive and negative directions, the simple manufacture and assembly, but disadvantageous is their large space requirement.
  • a series connection of gimbal ring springs is possible, but then, as with a corrugated tube, the bending stability is lost and the deflection can no longer take place in the negative direction beyond the reverse position.
  • Thin-walled pipes can be because of their low mechanical
  • the rolled-up flat surface of the tube is structured and then bent to form the tube.
  • the tube is bent from flat outer surfaces, because the tube consists of struts and the tube ends are firmly clamped by the coupling elements 4.
  • a further stabilization is achieved by rings which are connected to the outer surface of the tube.
  • the rolled surface of the pipe is structured by laser cutting, etching, eroding or punching.
  • the structures that are processed into double-walled tubes must have somewhat smaller dimensions in the circumferential direction on the inner lateral surface because of their smaller diameter than the structures on the outer lateral surface.
  • the precision stamping of the lateral surfaces with the solid joints is a particularly productive process. It requires the provision of cutting dies. Small web widths can be obtained by an electrolytic etching process, which follows the punching and the web preparation, which e.g. 100 ⁇ m, reduced to 50 ⁇ m. Such etching processes are also used for electrolytic deburring.
  • the jacket surfaces are assembled into a double-walled tube by inserting the inner jacket surface of the tube into a corresponding number of center rings 11 and securing it by means of internal spring rings 12.
  • the outer circumferential surface of the tube is placed over the center rings 11 and secured by the outer spring rings 10 (FIG. 19).
  • All rings 10, 11, 12 are located at the locations of the lateral surfaces where there are no spring elements 1. They stabilize the pipe and do not disturb its mobility here. Additional stability can be achieved by a dipping process or by PMMA, through which all the spaces between the tube walls are filled with plastic.
  • This manufacturing and assembly process is for elastic tubes with parallel and force-invariant spring elements but not for tubes with rhomboid spring elements, where the expansion or compression of the Pipe diameter changes, applicable.
  • the latter can be assembled into pipes using a plastic immersion process or PMMA, through which the outer and inner spring joints are firmly connected.
  • a further assembly of the double-walled tube takes place in that the thin structured steel surfaces, which also serve as a lithography mask for soft X-ray radiation, are glued to the inside and outside of a raw PMMA carrier.
  • the irradiated PMMA parts are then dissolved in an ethylene developer, while the non-irradiated PMMA parts remain as a mechanical stabilizer between the inner and outer steel jacket (LIGA technology).
  • the shell surfaces of the tube can also be produced by micromechanical processes, such as photolithographic etching of thin silicon wafers or thin photosensitive glasses, or by LIGA technology. These methods offer the possibility of particularly small web widths of z. B. to achieve 10 microns. Silicon also offers the advantage of a much higher resilience than steel. Ceramics and plastics are also suitable as materials. In the case of plastics, the double-walledness of the tube can possibly be dispensed with because certain plastics can be deformed elastically over a wide range and only slight forces occur when the tube is bent, stretched and compressed.
  • FIG. 20 shows an arrangement of force-invariant spring elements in a double-walled prismatic tube. This arrangement offers the
  • Figure 21 shows an x-y table with planar, double-layered
  • Solid-state articulated guides that can also be arranged under the table to save space.
  • the stiffness of this is perpendicular to the plane of the drawing
  • FIG. 22 shows a zoom or focusing drive, which consists of two pipe systems mechanically coupled to one another and a high-resolution differential spindle drive 15 with a stepping motor 16.
  • the advantages of solid-body articulation are that the backlash is approximately 1 ⁇ m, and 20 ⁇ m for rod or pipe guides. Abbe's principle of the equator is observed. The space requirement is comparatively very small.
  • FIG. 23 shows a symmetrical drive system to avoid bending moments and constraining forces on the spring joint guide, which in the example is a telescopically nested elastic pipe system 18.
  • the double motor drive 16, 16 ' is shown for a uniaxial pipe system which has two motors 16, 16 ' and two differential thread pairs 15 and 15 ' .
  • one of the differential thread spindles has a right-hand thread and the other has a left-hand thread.
  • FIG. 24 shows a nesting of half-tube systems that is biocular.
  • the tubes of a solid-state joint guide are designed here as half-tubes, one half-tube guide in each case displacing a lens 19.
  • the lenses are both within the overall length of the guides.
  • FIG. 25 shows the biocular optical system according to FIG. 24 in section.
  • differential thread spindle pairs 15 and 15 ' with motor drives 16 and 16 ' ensure the uniform adjustment of each of the half-tube guides in both optical beam paths on path curves.
  • FIG. 26 shows a further embodiment, which makes it possible to position optics within the overall length of the solid-state joint guides.
  • two independent solid-state articulated guides are nested coaxially. The outside
  • Solid-state articulated guides have cutouts, the length of which is dimensioned in accordance with the desired adjustment path.
  • Connectors 9 connect the associated optical systems of a biocular arrangement.
  • FIGS. 7, 22, 24 and 25 and 26 can also be implemented with a single optical beam path. Then the differential thread spindle is given a correspondingly stable bearing that prevents tilting. Alternatively, the adjustment can be carried out by means of the double differential screw arrangement according to FIG. 23. LIST OF REFERENCE NUMBERS
  • Movement part s web width of the joint

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Springs (AREA)
  • Joints Allowing Movement (AREA)

Abstract

L'invention concerne des dispositifs de guidage d'articulations de corps solides comprenant un élément ressort de corps solide. Cette invention est caractérisée en ce que des éléments ressorts parallèles, des éléments ressorts rhombiques ou des éléments ressorts à double parallélisme sont disposés en rangée et/ou de manière parallèle.
PCT/EP2004/012112 2003-10-30 2004-10-27 Dispositifs de guidage d'articulations de corps solides WO2005043209A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10350574.1 2003-10-30
DE2003150574 DE10350574A1 (de) 2003-10-30 2003-10-30 Festkörpergelenkführungen

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WO2005043209A2 true WO2005043209A2 (fr) 2005-05-12
WO2005043209A3 WO2005043209A3 (fr) 2005-08-04

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005039279A1 (de) * 2005-08-19 2007-02-22 Mtu Aero Engines Gmbh Linearführung
DE102006019260A1 (de) * 2006-04-12 2007-10-18 Ruhlamat Automatisierungstechnik Gmbh Vorrichtung zum gleichzeitigen Betätigen von mehreren Kontaktstiften

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EP0831294A1 (fr) * 1996-09-18 1998-03-25 Pronk Beheer B.V. Dispositif de mesure avec précision de distances ou de diamètres extérieurs ou intérieurs
US20020153480A1 (en) * 1999-09-20 2002-10-24 Cleveland Jason P. Flexure assembly for a scanner
US20020194926A1 (en) * 2001-01-19 2002-12-26 Shorya Awtar Apparatus having motion with pre-determined degrees of freedom

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DE10115915A1 (de) * 2001-03-30 2002-10-02 Zeiss Carl Vorrichtung zur Justierung von Einrichtungen und zum Einstellen von Verstellwegen

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0831294A1 (fr) * 1996-09-18 1998-03-25 Pronk Beheer B.V. Dispositif de mesure avec précision de distances ou de diamètres extérieurs ou intérieurs
US20020153480A1 (en) * 1999-09-20 2002-10-24 Cleveland Jason P. Flexure assembly for a scanner
US20020194926A1 (en) * 2001-01-19 2002-12-26 Shorya Awtar Apparatus having motion with pre-determined degrees of freedom

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005039279A1 (de) * 2005-08-19 2007-02-22 Mtu Aero Engines Gmbh Linearführung
DE102005039279B4 (de) * 2005-08-19 2007-06-14 Mtu Aero Engines Gmbh Linearführung
US8506791B2 (en) 2005-08-19 2013-08-13 Mtu Aero Engines Gmbh Linear guide
DE102006019260A1 (de) * 2006-04-12 2007-10-18 Ruhlamat Automatisierungstechnik Gmbh Vorrichtung zum gleichzeitigen Betätigen von mehreren Kontaktstiften

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WO2005043209A3 (fr) 2005-08-04
DE10350574A1 (de) 2005-06-02

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