WO2005037726A2 - Procede permettant de pratiquer des cavites dans des corps composites metal-ceramique - Google Patents

Procede permettant de pratiquer des cavites dans des corps composites metal-ceramique Download PDF

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WO2005037726A2
WO2005037726A2 PCT/US2004/034112 US2004034112W WO2005037726A2 WO 2005037726 A2 WO2005037726 A2 WO 2005037726A2 US 2004034112 W US2004034112 W US 2004034112W WO 2005037726 A2 WO2005037726 A2 WO 2005037726A2
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cavity
preform
infiltrant
silicon
composite body
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WO2005037726A3 (fr
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Prashant G. Karandikar
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M Cubed Technologies, Inc.
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    • C04B2237/36Non-oxidic
    • C04B2237/365Silicon carbide

Definitions

  • the present invention relates to metal-ceramic composite bodies, especially such composite bodies made by infiltrating a porous mass of one or more reinforcement materials with a molten infiltrant containing silicon metal. More exactly, the present invention pertains to methods for producing hollow passageways, or channels, possibly but not necessarily open at both ends, within the composite body.
  • the porous mass which is often silicon carbide particulate, also contains a quantity of carbon.
  • carbonaceous precursors can be used to introduce this carbon into the prefo ⁇ n such as pitch, phenolics, furfuryl alcohol, carbohydrates such as sugars, etc.
  • the preform containing the reinforcement and the precursor is "carbonized" in an inert atmosphere above 600°C to convert the precursor to carbon.
  • the preform is placed in contact with a molten infiltrant material featuring Si metal or alloys of Si in an inert or vacuum atmosphere and heated to above the melting point of the infiltrant material. Due to inherent wetting and reaction between carbon and molten Si, the preform is infiltrated completely.
  • the carbon in the preform reacts with the Si, forming some in-situ SiC, and in the process bonds the reinforcement together.
  • this in-situ SiC typically is interconnected. A dense body usually is desired, so the process typically occurs in the presence of excess silicon.
  • the resulting composite body thus comprises silicon carbide and unreacted silicon (which typically also is interconnected), and may be referred to in shorthand notation as Si/SiC or RBSC (denoting "reaction-bonded silicon carbide”).
  • Si/SiC or RBSC denoted "reaction-bonded silicon carbide”
  • Other terms such as “self-bonded SiC”, reaction forming", “reactive sintering”, etc., are also abundant in the literature.
  • Popper U.S. Patent No. 3,275,722
  • Taylor U.S. Patent No. 3,205,043
  • Hillig U.S. Patent No. 4,184,894
  • Chiang et al. U.S. Patent No. 5, 509,555
  • the preform to be infiltrated by the alloy can consist of carbon or can consist essentially of carbon combined with at least one other material such as a metal like Mo, W, or Nb; a carbide like SiC, TiC, or ZrC; a nitride like Si 3 N 4 , TiN or A1N; an oxide like ZrO 2 or Al 2 O 3 ; or an intermetallic compound like MoSi 2 or WSi 2 , or mixtures thereof.
  • the liquid infiltrant includes silicon and a metal such as aluminum, copper, zinc, nickel, cobalt, iron, manganese, chromium, titanium, silver, gold, platinum and mixtures thereof.
  • U.S. Patent No. 3,857,744 to Moss discloses the use of boron nitride powder to help define a shape or surface of a composite silicon impregnated boron carbide body.
  • Moss discloses that coating a surface of a preform with the boron nitride powder prevents silicon metal from depositing or adhering to that surface. After infiltration of the preform, the boron nitride powder can be readily removed.
  • U.S. Patent No. 5,125,822 to Kasprzyk discloses an "insulating material", which is defined as "one that is not wetted by molten silicon, that is, is not silicon infiltrated.”
  • the insulating material functions to provide physical support for the RBSC structure being formed, insulate the furnace tube from high temperatures and allow the final RBSC structure to be easily removed from the furnace tube.
  • Boron nitride, aluminum nitride, silicon nitride, and oxides such as aluminum oxide zirconium oxide and fused quartz are useful insulating materials.
  • shape defining means for use in conjunction with the production of metal matrix composites (MMCs), particularly in the context of the spontaneous infiltration of aluminum-based alloys into permeable ceramic preforms.
  • MMCs metal matrix composites
  • the matrix metal alloy infiltrates up to, but not into, the shape defining means.
  • a hollow or void is left in the MMC body having the inverse shape as the shape defining means.
  • This technique can be used to make cavities, or channels in MMC bodies.
  • the shape defining means can be material that is substantially non- infiltratable under the process conditions, such as ceramic particulate not containing an infiltration enhancer material.
  • M Cubed M Cubed Technologies, Inc.
  • Waggoner in particular teaches the use of "bedding materials" for supporting the porous mass to be infiltrated.
  • the bedding material is a material that is substantially non-infiltratable under the local process conditions.
  • the use of a bedding material dispenses with the need to place the porous mass in direct contact with the container that houses the porous mass and the molten silicon. Such direct contact often resulted in reaction between the molten silicon and the container material.
  • SiC is a common filler for the porous mass, under certain conditions such as relatively low temperature and/or noble gas atmosphere, it cannot be infiltrated easily by molten silicon without the additional presence of some free (i.e., reactable) carbon.
  • an acceptable bedding material can be SiC particulate that does not also contain such free carbon.
  • the non-infiltratable material is in a form that can be readily removed following processing, such as a loosely bound, or even a free-flowing mass of particulate.
  • the preform or subunit assemblage may then be infiltrated with the molten infiltrant material in the normal way.
  • the infiltrant does not infiltrate into the cavity, it being locally stopped by the non- infiltratable material at the walls of the cavity.
  • the non-infiltratable material is removed readily, since it is still in a loose, or loosely bonded condition, thus, it can be removed by air or water jets, shaking, vacuuming, etc.
  • any such temporary access ports may be re-closed or resealed, for example with a thermoplastic or thermosetting polymer.
  • Figures 1A through IC illustrate in schematic form three different types of cavities that can be produced in metal-ceramic composite bodies according to the instant invention.
  • Figure 2 is a photograph of a plate or block of RBSC composite material containing four at least partially occluded cooling channels, and one open channel.
  • Figure 3 is a schematic view of an infiltration bonded cooling plate having an internal serpentine cooling channel.
  • the instant invention describes how to produce a silicon-infiltrated composite body containing one or more intentional cavities, engineered "internal cavities".
  • internal cavities A non-limiting exemplary number of such cavities are shown in Figure 1, each of which is encompassed by the instant invention.
  • the preform is assembled from two subunit preforms, perhaps being joined to one another through an adhesive bond, but ultimately becoming a unitary structure upon infiltration.
  • the lower 11 subunit features a cavity 13 of some sort, and the upper subunit 15 attaches to the lower preform subunit to provide a top surface of the cavity, thereby closing off this side of the cavity to the environment outside of the assembled preform.
  • FIG. 1A what is shown is an internal cavity that extends completely through the composite body.
  • This cavity has an entrance region 21 and an exit region 23.
  • Figure IB by contrast, the cavity is "blind" in that it does not extend all the way through the composite structure. It does not have separate entrance and exit regions.
  • Figure IC the cavity has neither an entrance nor an exit region; it has no opening to the exterior of the composite structure. It is completely enclosed.
  • the engineered cavities resulting from the Figure 1 A and IB embodiments can also be produced using a single preform body, that is, by green machining, for example.
  • a porous mass containing at least some carbon is infiltrated with a molten infiltrant containing silicon. At least at some point during the infiltration, the silicon component of the infiltrant chemically reacts with at least a portion of the carbon in the porous mass to form silicon carbide. Typically, some infiltrant material remains in the infiltrated body, and distributed throughout. The body thus formed containing in-situ silicon carbide and residual infiltrant material is therefore a composite body. What is also typical is that the porous mass contains one or more materials that remain substantially inert under the processing conditions. These so-called "fillers" become the reinforcement component in the formed composite body.
  • the instant invention also encompasses an infiltration technique known as "siliconizing".
  • This process is similar to the reaction bonding process, except that the porous mass to be infiltrated contains the one or more fillers but substantially no carbon, at least substantially none that reacts with the molten silicon. Accordingly, the formed body contains substantially no silicon carbide formed in-situ.
  • the presence of carbon in the porous mass seems to assist the infiltration process in reaction-bonding. Accordingly, the siliconizing process may not be as robust as reaction-bonding. Viewed in the alternative, siliconizing may require higher processing temperatures than reaction-bonding, and may require a vacuum environment rather than an argon atmosphere.
  • the instant invention embraces the placement of holes, channels or other forms of engineered cavities into a preform, such as by "green machining", and infiltrating this custom shaped preform with a silicon-containing melt.
  • the resulting silicon-containing composite body replicates the engineered cavities therein, without the need to have to machine the desired cavities in the formed composite body, or without having to machine out residual infiltrant metal that filled up the cavity during infiltration of the preform.
  • the instant invention furthermore encompasses the fabrication of solid, unitary metal-ceramic composite structures produced as a result of gathering together a number of smaller structures, or subunits, and bonding the subunits to one another. There are a number of reasons for desiring to carry out such a procedure.
  • bonding of preform subunits can be used to produce structures whose shape is more complex than can be fabricated from the infiltration of a single porous mass or preform.
  • it may be impossible to perform certain machining operations on the final, unitary structure whereas the machining might be easily performed on the individual subunits prior to assembly and bonding.
  • a RBSC part becomes scrap due to defective machining, better that the scrap part be a subunit rather than the final unitary RBSC body due to the large cost invested in a shaped RBSC body during the final processing operations, such as machining.
  • two or more preforms are bonded together with an adhesive or cement that imparts at least strength sufficient for handling during subsequent thermal processing.
  • the adhesive or cement contains carbon in some form amenable to being pyrolyzed to a form that is conducive to the reaction-bonding process, e.g., elemental carbon.
  • Carbohydrate-based resins, as well as those based on epoxy have been found to be entirely satisfactory for providing temporary preform bonding qualities, as well as providing the carbon source for subsequent reaction-bonding during infiltration.
  • the adhesive or cement composition also contains one or more filler materials, and preferably being substantially identical to any filler material making up the porous mass to be infiltrated.
  • the present invention is based on metal infiltration techniques involving molten metals based on silicon.
  • at least one constituent of the infiltrant material comprises silicon.
  • the infiltrant may also contain one or more other constituent(s) that may be capable of producing some desirable effect during processing or on the final character or properties of the resulting composite body.
  • the non-silicon constituents may give rise to an infiltrant alloy having a lower liquidus temperature than the melting point of pure silicon. A reduced liquidus temperature might then permit the infiltration to be conducted at a lower temperature, thereby saving energy and time, as well as reducing the tendency for the infiltrant to over-infiltrate the boundaries of the preform or porous mass into the supporting materials.
  • a non-silicon constituent infiltrated into the porous mass along with the reactive silicon constituent may produce superior properties of the resulting composite body— enhanced strength or toughness, for instance.
  • a non-silicon constituent so infiltrated may also counterbalance the expansion of the silicon phase upon solidification, a desirable result from a number of standpoints, as will be discussed in more detail later.
  • Elemental non-silicon constituents that fulfill one or more of the advantageous attributes include aluminum, beryllium, copper, cobalt, iron, manganese, nickel, tin, zinc, silver, gold, boron, magnesium, calcium, barium, strontium, germanium, lead, titanium, vanadium, molybdenum, chromium, yttrium and zirconium.
  • Preferred constituents include aluminum, copper, iron, nickel, cobalt and titanium. Particularly preferred are aluminum and copper.
  • the atmosphere in which the infiltration of a silicon-containing alloy is conducted is usually one that is inert or mildly reducing. Accordingly, forming gas, carbon monoxide, and noble gases such as argon, helium, etc., may be used.
  • a vacuum environment is often preferred, however, at least from the standpoint of facilitating the reliability or robustness of infiltration. As will be discussed in more detail below, where the infiltration is excessively robust, the selection of atmosphere is one parameter that may be varied to regulate this "infiltration power".
  • the mass or preform to be infiltrated by the silicon-containing infiltrant must be one that is permeable to the infiltrant under the local processing conditions.
  • sufficient temperature e.g., about 2150°C
  • pure silicon carbide can be infiltrated by silicon in a pressureless manner (see for example, U.S. Patent No. 3,951,587 to Alliegro et al.), but more typically, the porous mass contains at least some elemental or free carbon to facilitate the process. The more carbon that is present, the more silicon carbide that is produced in-situ.
  • porous mass containing less than about 25 percent by weight carbon, and more preferably less than about 10 percent.
  • a particularly preferred range is about 1 percent to about 5 percent.
  • the balance of the porous mass may comprise one or more materials that are substantially inert under the process conditions, e.g., "filler materials".
  • suitable materials for use in the present invention would include the carbides such as SiC, B 4 C, TiC and WC; the nitrides such as Si 3 N 4 , TiN and A1N; the borides such as SiB , TiB 2 , and A1B 2 ; and oxides such as Al 2 O 3 and MgO.
  • the form of the filler material may be any that can be produced, for example, particulate, fiber, platelet, flake, hollow spheres, etc.
  • Fiber includes continuous and discontinuous fiber, as well as short fiber, chopped fiber, and whiskers.
  • the filler material bodies may range in size from submicron to several millimeters, with sizes ranging from several microns to tens of microns being common. Filler material bodies having different sizes may be blended together, for example, to increase particle packing. Fillers may also include nanotubes.
  • Preforms can vary greatly in their loading or theoretical density. As long as the preform (i) is capable of being wetted by the infiltrant material and (ii) contains interconnected porosity, it should be capable of being infiltrated to form the composite bodies of the present invention.
  • the form of the carbon component can be significant. Specifically, some fillers such as the oxides, typically are difficult to infiltrate. Accordingly, it may be important to provide the reactable carbon in the form of a coating on the filler bodies (e.g., particles) rather than as a mere particulate addition to the preform.
  • One method to accomplish this is to provide the carbon to the preform in the form of a resin. .
  • a binder In addition to assisting in the infiltration process, another important role played by the carbonaceous resin is that of a binder.
  • a binder preferably here a carbonaceous binder, and then pressed or cast or molded to a desired shape using techniques known in the art. Curing the binder then renders the formed body self-supporting.
  • those materials that are substantially non-infiltratable under the process conditions can be used as containment materials for supporting the porous mass to be infiltrated, or for buttressing the walls of the cavity to prevent the cavity from filling up with infiltrant metal.
  • infiltration is more robust when the temperature of infiltration is increased, both in terms of absolute temperature as well as in terms of the homologous temperature (e.g., percentage or fraction of the melting temperature). Still further, infiltration is more robust when conducted under vacuum as opposed to inert gas atmosphere such as argon.
  • silicon carbide for example, is infiltratable by silicon melts to produce a composite body.
  • silicon carbide is reliably infiltrated by silicon (e.g., "siliconizing") only at temperatures well above the melting point of silicon. At temperatures just slightly above the silicon melting point, infiltration becomes rather difficult. If a metal like aluminum is alloyed with the silicon, the melting point or liquidus temperature is depressed, and the processing temperature similarly can be decreased, which further reduces the propensity for infiltration. Under these conditions, such silicon carbide material can be used as a containment or infiltration-halting material.
  • silicon carbide as a containment material is that in situations where impurities or contamination is an issue (e.g., semiconductor applications), the same source of silicon carbide can be used as a containment material as is used as a porous mass to be infiltrated without exposing the resulting silicon carbide composite body to alien or additional contaminants.
  • the boron nitride does not have to be dense; nor does it have to fill up the bulk volume of the cavity or channel; even a porous coating such as might be produced from the application of a boron nitride paste or paint or slip is sufficient to stop silicon infiltration when it locally reaches such boron nitride. If boron nitride cannot be used (for example, because certain sensitive applications such as semiconductor fabrication prohibit contact of the semiconductor material with any components that could be contaminated with boron), then possible substitute infiltration-halting materials might include silicon nitride or possibly even silicon carbide itself (but see the discussions of "siliconizing" above and below).
  • silicon-based infiltrant systems that contain increasing amounts of aluminum, boron nitride becomes less effective in its ability to locally halt the infiltration, possibly because the BN is chemically attacked by the molten aluminum component of the infiltrant.
  • the aluminum-containing infiltrants are not as robust in terms of wetting power as is a pure silicon infiltrant, possibly also because infiltrations with silicon- aluminum alloys typically are conducted at somewhat lower temperature than are infiltrations using pure silicon.
  • pure silicon carbide particulate that is, particulate that is substantially free of elemental carbon, serve as an acceptable infiltrant- halting material.
  • pure SiC particulate may not work as an infiltration-halting material in the pure silicon infiltrant systems, because pure silicon molten metal can infiltrate a porous SiC mass under the right conditions, such as a vacuum environment and a sufficiently high temperature, which process is termed "siliconizing".
  • the cavity in the preform may be substantially completely filled with the infiltration- halting material.
  • a temporary binder material such as polyvinyl alcohol may be admixed with the halting-halting material so that the latter may be place or applied to various surfaces and remain in place during thermal processing. If the binder contains a carbon source, however, it may be important that such carbon source be removed (such as by pyrolysis) prior to the infiltration process with the silicon-containing molten metal.
  • the infiltration-halting material could be provided in a form where it possesses a paste consistency or viscosity. Often binders are provided in aqueous or other dissolved form, so it may be convenient or desirable to provide the infiltration-halting material in the form of a paint, slurry or slip.
  • EXAMPLE 1 This example demonstrates the fabrication of a RBSC composite body containing a channel through its bulk.
  • the channel is provided in the preform, here, an assemblage of two preform subunits bonded together, and it is filled with an infiltration-halting material to prevent its being filled with the infiltrant during the infiltration of the rest of the preform.
  • Two plate preforms (9.5 x 95 x 190 mm and 17 x 95 x 190 mm) of SiC particulates were made as follows: a. 240 and 500 grit SiC particles (ESK, Kempten, Germany and St. Gobain Ceramic Materials, Worcester, MA, respectively) of 63 and 17 microns size, respectively, were mixed in a ratio of 70 to 30 by weight. b. To this mix 7.5 parts by weight Krystar 300 crystalline fructose (A.E. Staley Manufacturing Co., Decatur, IL) was added. c. To this 19.5 parts by weight de-ionized water was added. d.
  • Tamol dispersant (Rohm & Haas Co., Philadelphia, PA) was added.
  • the mixture was mixed in a high shear mixer (Ross) and cast into rubber molds.
  • the molds were placed on a vibrating table until a hard preform surface was produced. The excess water that came to the top was decanted and sponged off.
  • the molds with preforms were then placed in a freezer for 3 hours.
  • the molds were removed from the freezer and the preforms were removed from the molds, i. Finally, the preforms were placed on a graphite tray and fired in an inert atmosphere at around 600°C to carbonize the binder.
  • the thin plate was bonded onto the thick plate, covering the filled slots, using a mixture of SiC and Ciba 8603 ResinFusionTM epoxy (Ciba Specialty Chemicals Corp., East Lansing, MI).
  • the bonded assembly was then placed in a vacuum furnace in contact with an 80-20 (wt%) Si-Al alloy.
  • the chamber was evacuated to vacuum below 200 millitorr and the temperature was raised to 1350°C and held there for 1 hour. During this time, the silicon alloy melted, infiltrated the bonded preforms, reacted with the carbonized binder to form some SiC in-situ, and in general, produced a unitary reaction-bonded SiC structure. Then the furnace was cooled to room temperature.
  • this example demonstrates the fabrication of an in-situ channel in a RBSC body without its having to be made by a machining technique.
  • the example also demonstrated the limitations of boron nitride, which is a well-known non-infiltratable material for infiltrations in which the infiltrant is substantially pure silicon.
  • Example 2 [0054] In this example, a much larger ( ⁇ 0 13 x 400 x 560 mm) commercial component was made using the approach described in Example 1. With reference to Figure 3, this component has much longer ( ⁇ 6.5 x 6.5 x 1020 mm) serpentine cooling channels.
  • two preform plates were made, a continuous serpentine slot 31 was machined in one of them 33 from the inlet to the outlet side, it was filled with 90 grit SiC, and the second preform plate 35 was bonded on.
  • two small access holes (not shown) were drilled in the preform over each straight portion of the cooling channel. This assembly was then infiltrated with 80:20 Si-Al alloy.
  • the access holes were used, in addition to the inlet and outlet holes, to assist in vacuuming out the 90 grit SiC after infiltration.
  • the access holes were then closed off by bonding cover plugs with a thermosetting resin (e.g., epoxy) and curing the resin.
  • a thermosetting resin e.g., epoxy
  • heat source 37 is mounted on one side of the cooling plate.
  • the coolant flowing through the channel removes the heat generated by the heat source and keeps its operating temperature within limits.
  • the methods and articles of the present invention should find utility in applications requiring engineered cavities, e.g., cavities having a specific size, shape and location within a composite body made by a silicon infiltration technique. Typically, the cavities will be enclosed except for entrance and exit regions; that is, a channel within the body, or "internal channel". Such channels would be useful for circulating a fluid such as a cooling medium to remove heat from the body or from a body in contact with the composite body, such as from an electrical circuit. Such channels could also be used to "pull a vacuum” from one side of the composite body to the other, for example, in a vacuum chuck application.

Abstract

La présente invention concerne une structure composite métal-céramique présentant une cavité ou toute autre structure creuse à l'intérieur. La cavité n'est ni découpée, ni usinée dans la structure finale, mais elle est formée au cours du processus d'infiltration. Dans le système présentant des matériaux composites Si/SiC en particulier, une préforme est utilisée, laquelle présente ladite cavité souhaitée, ou encore, plusieurs préformes de sous-unités sont reliées ensemble de manière à former ou à définir ladite cavité. Un matériau essentiellement impénétrable par le matériau infiltrant fondu est mis en contact avec la quasi totalité des surfaces intérieures, par exemple, les parois, de la cavité. La mise en contact peut consister essentiellement en un enrobage des parois, ou elle peut consister en un remplissage substantiel de la cavité avec le matériau impénétrable, ou un matériau similaire. De préférence, le matériau impénétrable se présente sous une forme permettant un retrait rapide après le traitement, telle qu'une masse de matière particulaire collée de manière lâche. La préforme ou l'assemblage de sous-unités peuvent ensuite être imprégnés normalement par le matériau infiltrant fondu. Le matériau infiltrant ne s'infiltre pas dans la cavité, il est localement stoppé par le matériau impénétrable sur les parois de la cavité. Après solidification du matériau infiltrant pour former un corps RBSC, le matériau impénétrable est rapidement retiré, par exemple, par jets d'air ou d'eau, par agitation, application d'un vide d'air, etc. En outre, un ou plusieurs orifices d'accès provisoires à la cavité peuvent être usinés dans la structure composite, par exemple, pour permettre un accès supplémentaire à un moyen à jet de pression ou à un moyen de vide; ces orifices d'accès sont rebouchés après retrait du matériau impénétrable.
PCT/US2004/034112 2003-10-14 2004-10-14 Procede permettant de pratiquer des cavites dans des corps composites metal-ceramique WO2005037726A2 (fr)

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Publication number Priority date Publication date Assignee Title
CN112340105A (zh) * 2020-12-07 2021-02-09 珠海晨新科技有限公司 一种盲孔自动贴膜装置
CN113909456A (zh) * 2021-09-14 2022-01-11 昆明理工大学 一种稀土掺杂颗粒增强钢铁基复合材料的制备方法
WO2023051905A1 (fr) 2021-09-29 2023-04-06 Schunk Ingenieurkeramik Gmbh Composant produit à l'aide d'un procédé d'infiltration, dispositif comprenant ledit composant et procédé d'infiltration pour la production d'un composant

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US3857744A (en) * 1970-01-19 1974-12-31 Coors Porcelain Co Method for manufacturing composite articles containing boron carbide
US5267601A (en) * 1988-11-10 1993-12-07 Lanxide Technology Company, Lp Method for forming a metal matrix composite body by an outside-in spontaneous infiltration process, and products produced thereby
US5666269A (en) * 1994-01-03 1997-09-09 Motorola, Inc. Metal matrix composite power dissipation apparatus
US5839329A (en) * 1994-03-16 1998-11-24 Baker Hughes Incorporated Method for infiltrating preformed components and component assemblies

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3857744A (en) * 1970-01-19 1974-12-31 Coors Porcelain Co Method for manufacturing composite articles containing boron carbide
US5267601A (en) * 1988-11-10 1993-12-07 Lanxide Technology Company, Lp Method for forming a metal matrix composite body by an outside-in spontaneous infiltration process, and products produced thereby
US5666269A (en) * 1994-01-03 1997-09-09 Motorola, Inc. Metal matrix composite power dissipation apparatus
US5839329A (en) * 1994-03-16 1998-11-24 Baker Hughes Incorporated Method for infiltrating preformed components and component assemblies

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112340105A (zh) * 2020-12-07 2021-02-09 珠海晨新科技有限公司 一种盲孔自动贴膜装置
CN113909456A (zh) * 2021-09-14 2022-01-11 昆明理工大学 一种稀土掺杂颗粒增强钢铁基复合材料的制备方法
WO2023051905A1 (fr) 2021-09-29 2023-04-06 Schunk Ingenieurkeramik Gmbh Composant produit à l'aide d'un procédé d'infiltration, dispositif comprenant ledit composant et procédé d'infiltration pour la production d'un composant

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