WO2005017510A1 - Erstellung von testmustern zur nachkontrolle - Google Patents
Erstellung von testmustern zur nachkontrolle Download PDFInfo
- Publication number
- WO2005017510A1 WO2005017510A1 PCT/EP2004/007441 EP2004007441W WO2005017510A1 WO 2005017510 A1 WO2005017510 A1 WO 2005017510A1 EP 2004007441 W EP2004007441 W EP 2004007441W WO 2005017510 A1 WO2005017510 A1 WO 2005017510A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- pattern
- actual
- data
- substrate
- target
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
- H05K3/3457—Solder materials or compositions; Methods of application thereof
- H05K3/3485—Applying solder paste, slurry or powder
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/12—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
- H05K3/1216—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns by screen printing or stencil printing
- H05K3/1225—Screens or stencils; Holders therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
- G01N2021/95615—Inspecting patterns on the surface of objects using a comparative method with stored comparision signal
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N2021/95638—Inspecting patterns on the surface of objects for PCB's
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N2021/95638—Inspecting patterns on the surface of objects for PCB's
- G01N2021/95661—Inspecting patterns on the surface of objects for PCB's for leads, e.g. position, curvature
- G01N2021/95669—Inspecting patterns on the surface of objects for PCB's for leads, e.g. position, curvature for solder coating, coverage
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N2021/95676—Masks, reticles, shadow masks
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0266—Marks, test patterns or identification means
- H05K1/0269—Marks, test patterns or identification means for visual or optical inspection
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/16—Inspection; Monitoring; Aligning
- H05K2203/163—Monitoring a manufacturing process
Definitions
- This invention relates to a method and an arrangement for testing is provided with a predetermined 'pattern substrates, in particular printed circuit boards with a solder paste.
- a suitable technique for achieving high component densities with low assembly costs is surface mounting SMT (Surface Mount Technology), in which the components are applied and soldered directly on the surface of the circuit board, whereby the density of the connections of the surface-mounted components SMD (Surface Mounted Device ) is higher than that of conventional components.
- SMT Surface Mount Technology
- solder paste is usually applied to the circuit board using a plotter (US Pat. No. 4,572,103) or stencil printing. Then the components with their connections are placed on the applied solder paste and passed through a reflow oven. The solder paste is melted in the reflow oven, whereby it connects to the components. After cooling, the components are firmly connected to the circuit board.
- Stencil printing usually uses metal stencils that are provided with openings at the points where there should be solder paste on the circuit board after printing.
- the openings can be created using various methods, such as, for example, etching free the openings in the metal template, cutting the openings using a laser, electroplating the mask or exposing photosensitive layers on a sieve and washing out the uncured areas.
- the layout of the circuit board should exactly match the openings of the template. Since reliable soldering of components on the circuit board is only guaranteed where there is sufficient solder paste, the applied solder paste is usually examined for presence, misalignment and bridging immediately after application.
- the layout of the circuit board is usually recognized in the stencil printing machine by means of a CCD camera and aligned with the stencil. In this case, the software and the camera system are usually designed in such a way that a so-called reprint control can also be carried out with the same camera.
- the computer In order for the image processing system to be able to recognize good and bad prints during the reprint control, the computer must first check the pattern to be checked, i.e. the target pattern. For this purpose, it is possible to teach the structures to be tested by optically capturing one or more printed and / or unprinted printed circuit boards.
- DE 197 28 144 AI discloses a method in which it is not the printed circuit board but the printing stencil of the printed circuit board that is optically recorded for teaching in the desired pattern. However, these test procedures are time and cost intensive.
- the object on which the invention is based is to specify a method and an arrangement for testing substrates provided with a predetermined pattern, with which can be checked quickly and precisely.
- the actual pattern applied to the substrate by means of a printing or structuring method is optically recorded, the optically recorded actual pattern is compared with a target pattern and, depending on the comparison and taking allowable tolerances into account, a decision is made as to which further process the considered one has with the is is pattern ubstrat provided S feed, wherein the optical detection of the actual pattern in the form of digital data to form an actual data record is made from control data formats a target data set for applying the pattern on the substrates and a data processing is carried out as to that the target data record and the actual data record are compared with each other, taking into account permissible tolerances. There is no learning process.
- the target pattern can be created for the entire printed circuit board in a short time, the operator merely specifying the areas relevant to the test on the printed circuit board.
- the method is particularly advantageous when the A uftragen of the pattern on the substrates by means of an appropriately designed mask used V experiencing occurs because the target data set can be very simple as formatted in from the chablone already for the production of S used control data here. Furthermore, by appropriately designing the data processing, it is possible to subject only certain selected sections of the target pattern to a test and / or to assign different sub-tolerance data records to different sections of the target pattern. This can reduce the scope of data records required for the check and accelerate the check.
- the optical detection of the actual pattern can be done using a digital matrix camera, e.g. a CCD camera, carried out pixel by pixel, a linear pixel camera, the length of which corresponds to a linear dimension of the area of the actual pattern to be checked on the substrate, advantageously being used for high accuracy.
- a digital matrix camera e.g. a CCD camera
- a linear pixel camera the length of which corresponds to a linear dimension of the area of the actual pattern to be checked on the substrate, advantageously being used for high accuracy.
- a relative movement between the digital camera and the substrate carrying the actual pattern is carried out with a step size of one pixel perpendicular to the one linear dimension.
- the matrix camera can be partially moved in two dimensions
- the linear camera can only be moved in one dimension in cycles, which minimizes errors that inevitably occur during mechanical movement, which is important for very fine structures.
- the optical detection is advantageously designed or carried out in such a way that it compares the actual pattern to be tested with the others Patterns and the substrate discriminate, for example, by filtering.
- the data set can be reduced or the resolution of the recorded pattern increased when the actual pattern is recorded.
- a further advantage can also be checked, expediently, regularly, using the target data record, to determine whether the template has added to a relevant extent during its use or has changed in some other way, and whether a cleaning procedure, a reworking procedure or even an exchange procedure should be triggered. It is only necessary to optically scan the template in the same way and to carry out the same comparison data processing.
- Figure 1 shows the basic structure of a first embodiment for " testing the pattern applied to a circuit board with solder paste according to the present invention
- Figure 2 is a subdivision of the pattern applied to the circuit board into sub-patterns according to a second embodiment of the present invention.
- an actual pattern 1 a for example a predetermined solder paste pattern, applied to a substrate, such as a printed circuit board 1, is tested in accordance with the present invention.
- control data by means of which the actual pattern la was generated on the printed circuit board 1, becomes a formatter 2 fed.
- This control data is, depending on the application method of the actual pattern la on the circuit board 1 directly from a plotter 3, which applies the actual pattern la directly, or from a database 4, which, for example, contains the data for producing a corresponding printing template or the like. contains by means of which the actual pattern la is applied (not shown here).
- the formatter 2 recognizes the type of control data supplied and formats a target data set from the received control data in accordance with the specifications of a control unit 5.
- the target data record thus created is stored, so that the steps of reading in the control data and formatting a target data record when testing several circuit boards 1 only need to be run once.
- At least the actual pattern la that is patterned with the actual pattern la circuit board 1 is scanned by a camera 6, which detects this on the circuit board 1 by means of the Plotter 3 or the actual pattern la applied to the stencil printing is optically recorded, in particular in the form and pixels, and transmitted to a converter 7 in the form of digital data.
- the converter 7 converts the actual pattern la recorded by the camera 6 into an actual data record in accordance with the specifications of the control unit 5.
- the actual data record and the target data record as well as a tolerance data record provided by the control unit 5, which describes the permissible tolerances with respect to the target data record, whereby such tolerances can be quite different distributed over the target pattern, are then transmitted to a comparator 8 supplied, which, taking into account the permissible tolerances specified in the tolerance data set, compares or correlates the actual data set with the target data set.
- the result of the comparison can be shown on a display 9.
- corresponding sections of the actual pattern can be highlighted on the display 9 in order to provide the user with a. to enable a corresponding reaction.
- the nature of the actual pattern la on the circuit board 1 is taken into account in the test, for example, in that within the overall pattern in areas or sections with a high connection density, for example at the points where IC components are to be applied to the circuit board 1 lower tolerance with regard to the actual / target offset is specified than in areas with a low connection density, for example at the points where resistors and capacitors are to be applied to the printed circuit board 1.
- the selection of the ranges and the assignment of the respective tolerances can be done automatically or by the operator.
- Fig. 2 shows a section of a circuit board 1 with the predetermined target pattern as it is processed by the formatter 2.
- the pattern here has areas lai, la 2 , la 3 , la 4 with different structures, for example densities of solder paste applications.
- the control unit 5 determines or discriminates the areas lai, la 2 , la 3 , la 4 by the control unit 5 the distances between the Detected individual points with solder paste application and summarized adjacent points with approximately equal distances to an area la x , la 2 , la 3 , la 4 .
- the permissible tolerances are assigned to the areas la x , la 2 , la 3 , la 4 . Sub-data sets corresponding to the various areas were thus generated and compared with corresponding sub-data sets of the actual pattern.
- the target values thus created for each sample to be checked Data records are edited and filed with regard to the sections to be compared and the associated tolerances.
- the comparator 8 compares the actual data set with the target data set, taking into account the tolerances determined as permissible for the individual areas lai, la 2 , la 3 , la 4 .
- Control unit 5 discriminates the section to be compared in the actual data set created by the converter 7 and causes the selected sections from the actual and target data sets to be fed by the converter 7 or the formatter 2 and from the corresponding tolerance data set to the comparator 8th.
- the pattern to be tested e.g. from solder paste
- itself already carries another pattern (e.g. a printed circuit)
- the actual pattern to be checked la compared to this other pattern on the
- the information is obtained in a simple manner from the control data by means of which the actual pattern la to be checked was generated on the printed circuit board 1, on the other hand the camera 6 optically discriminates the actual pattern of the not only compared to the printed circuit board 1 but also this other Pattern.
- control unit 5 to control the camera 6 or its converter 7 in such a way that only the selected sections of the actual pattern 1 a are recorded on the printed circuit board 1.
- the pattern is applied to a substrate, such as the printed circuit board 1, by means of a printing or structuring method using a template, it can happen that, in the course of the use of the template, the template changes in such a way that it often produces products that are no longer tolerable become. It is therefore advisable to check the stencil itself for such errors that have arisen over the course of use, at the latest when accumulating intolerable products, but expediently earlier and regularly. This is advantageously done using the idea on which the invention is based.
- the target data record was formatted from the control data used to manufacture the template
- an optical scanning of the template corresponding to the optical scanning of the circuit board 1 or the substrate and comparing the actual data record of the template obtained in this way with the target data record is sufficient in order to be able to record and also evaluate changes to the template, in order to be able to act in time by cleaning, reworking and / or by exchange.
- the frequency of checking the template depends on the tolerable deviations in the manufacture of substrates or printed circuit boards 1. If the tolerances specified in the tolerance data set permit only slight deviations from the target printing pattern specified in the target data set, the stencil must be checked more frequently, in the worst case after each individual use of the stencil for printing or structuring a substrate such as a circuit board 1. This can be specified by the user and can also be changed.
- the optical detection of the actual pattern la can be carried out by means of a digital matrix camera, a one-pixel wide CCD linear camera or line camera, the length of which corresponds to a linear dimension of the area of the actual pattern to be tested on the substrate or by staggered sub-assemblies. Linear cameras take place pixel by pixel.
- a line scan camera compared to a matrix camera is that recording parameters such as the exposure time and the distance between the scan lines can be selected as required for each picture.
- a relative movement between the digital camera and the substrate carrying the actual pattern la - printed circuit board 1 - is carried out with a step size of one pixel perpendicular to the one linear dimension.
- all the pixels of the CCD line are exposed simultaneously and, after the exposure time has expired, all the pixels are buffered in parallel in a transfer register. This process is very fast, so that the next begins immediately after one exposure cycle.
- the information pixel by pixel is read out successively from the transfer register and fed to the converter 7.
- the resolution of the line in the line direction depends on the number of pixels of the camera 6.
- the resolution can be increased by arranging several cameras side by side.
- Another advantage is that a mechanically induced relative movement takes place in only one dimension, while with a matrix camera there is a relative movement in two dimensions, each mechanically induced relative movement being fundamentally faulty, which is the case with very fine ones Structures that can influence test accuracy.
- the present invention is not limited to the application described for testing printed circuit boards, but rather can be used advantageously wherever the patterning / structuring / patterning of parts with a predetermined pattern is to be checked.
- the tolerance data sets for comparing the target data set with the actual data set were supplied to the comparator 8.
- the permissible tolerance it is also possible for the permissible tolerance to be taken into account already when the target data record is formatted and / or the actual data record is formed.
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/565,919 US20070053577A1 (en) | 2003-08-01 | 2004-07-07 | Production of test patterns for test inspection |
JP2006521426A JP2007500841A (ja) | 2003-08-01 | 2004-07-07 | 監査検査のための検査パターンの生成 |
EP04740753A EP1649268A1 (de) | 2003-08-01 | 2004-07-07 | Erstellung von testmustern zur nachkontrolle |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10335312A DE10335312A1 (de) | 2003-08-01 | 2003-08-01 | Erstellen von Testmustern zur Nachkontrolle |
DE10335312.7 | 2003-08-01 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2005017510A1 true WO2005017510A1 (de) | 2005-02-24 |
Family
ID=34089022
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2004/007441 WO2005017510A1 (de) | 2003-08-01 | 2004-07-07 | Erstellung von testmustern zur nachkontrolle |
Country Status (6)
Country | Link |
---|---|
US (1) | US20070053577A1 (de) |
EP (1) | EP1649268A1 (de) |
JP (1) | JP2007500841A (de) |
CN (1) | CN1833165A (de) |
DE (1) | DE10335312A1 (de) |
WO (1) | WO2005017510A1 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102007004122B4 (de) * | 2006-01-26 | 2014-10-30 | Koh Young Technology Inc. | Verfahren für das Messen einer dreidimensionalen Form |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102011000529B3 (de) * | 2011-02-07 | 2012-04-05 | Lpkf Laser & Electronics Ag | Verfahren zum Einbringen einer Durchbrechung in ein Substrat |
CN103475812B (zh) * | 2013-07-30 | 2016-05-25 | 宁波迪吉特电子科技发展有限公司 | 一种摄像机阵列 |
LT2840874T (lt) * | 2013-08-19 | 2019-10-25 | Asm Assembly Sys Gmbh & Co Kg | Spausdinimo parametrų reguliavimas priklausomai nuo išmatuotų lituojamosios pastos liekanų tam tikrose spausdintinės plokštės zonose |
US9881235B1 (en) * | 2014-11-21 | 2018-01-30 | Mahmoud Narimanzadeh | System, apparatus, and method for determining physical dimensions in digital images |
JP7194613B2 (ja) * | 2019-02-28 | 2022-12-22 | デンカ株式会社 | 基板の製造方法 |
JP7195977B2 (ja) * | 2019-02-28 | 2022-12-26 | デンカ株式会社 | 基板検査装置、基板検査方法、およびプログラム |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4799175A (en) * | 1984-06-12 | 1989-01-17 | Dainippon Screen Mfg., Co. | System for inspecting pattern defects of printed wiring boards |
EP0563829A2 (de) * | 1992-03-30 | 1993-10-06 | Sharp Kabushiki Kaisha | Vorrichtung zur Kontrolle gedruckten Pastenlots |
JPH06348820A (ja) * | 1993-06-08 | 1994-12-22 | Hitachi Ltd | プリント配線板用マスクの外観検査装置 |
JPH07243984A (ja) * | 1994-03-08 | 1995-09-19 | Dainippon Screen Mfg Co Ltd | 画像パターン検査装置 |
US5608453A (en) * | 1993-10-26 | 1997-03-04 | Gerber Systems Corporation | Automatic optical inspection system having a weighted transition database |
DE19728144A1 (de) * | 1997-07-02 | 1999-01-07 | Ekra Eduard Kraft Gmbh | Verfahren und Vorrichtung zum Erzeugen von Testpattern |
WO2001040770A2 (en) * | 1999-12-05 | 2001-06-07 | Orbotech Ltd. | Adaptive tolerance reference inspection system |
WO2002014846A2 (en) * | 2000-08-10 | 2002-02-21 | Kla-Tencor Corporation | Multiple beam inspection apparatus and method |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4572103A (en) * | 1984-12-20 | 1986-02-25 | Engel Harold J | Solder paste dispenser for SMD circuit boards |
US6636301B1 (en) * | 2000-08-10 | 2003-10-21 | Kla-Tencor Corporation | Multiple beam inspection apparatus and method |
-
2003
- 2003-08-01 DE DE10335312A patent/DE10335312A1/de not_active Withdrawn
-
2004
- 2004-07-07 WO PCT/EP2004/007441 patent/WO2005017510A1/de active Application Filing
- 2004-07-07 CN CNA2004800224219A patent/CN1833165A/zh active Pending
- 2004-07-07 JP JP2006521426A patent/JP2007500841A/ja not_active Withdrawn
- 2004-07-07 US US10/565,919 patent/US20070053577A1/en not_active Abandoned
- 2004-07-07 EP EP04740753A patent/EP1649268A1/de not_active Withdrawn
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4799175A (en) * | 1984-06-12 | 1989-01-17 | Dainippon Screen Mfg., Co. | System for inspecting pattern defects of printed wiring boards |
EP0563829A2 (de) * | 1992-03-30 | 1993-10-06 | Sharp Kabushiki Kaisha | Vorrichtung zur Kontrolle gedruckten Pastenlots |
JPH06348820A (ja) * | 1993-06-08 | 1994-12-22 | Hitachi Ltd | プリント配線板用マスクの外観検査装置 |
US5608453A (en) * | 1993-10-26 | 1997-03-04 | Gerber Systems Corporation | Automatic optical inspection system having a weighted transition database |
JPH07243984A (ja) * | 1994-03-08 | 1995-09-19 | Dainippon Screen Mfg Co Ltd | 画像パターン検査装置 |
DE19728144A1 (de) * | 1997-07-02 | 1999-01-07 | Ekra Eduard Kraft Gmbh | Verfahren und Vorrichtung zum Erzeugen von Testpattern |
WO2001040770A2 (en) * | 1999-12-05 | 2001-06-07 | Orbotech Ltd. | Adaptive tolerance reference inspection system |
WO2002014846A2 (en) * | 2000-08-10 | 2002-02-21 | Kla-Tencor Corporation | Multiple beam inspection apparatus and method |
Non-Patent Citations (2)
Title |
---|
PATENT ABSTRACTS OF JAPAN vol. 1995, no. 03 28 April 1995 (1995-04-28) * |
PATENT ABSTRACTS OF JAPAN vol. 1996, no. 01 31 January 1996 (1996-01-31) * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102007004122B4 (de) * | 2006-01-26 | 2014-10-30 | Koh Young Technology Inc. | Verfahren für das Messen einer dreidimensionalen Form |
Also Published As
Publication number | Publication date |
---|---|
EP1649268A1 (de) | 2006-04-26 |
CN1833165A (zh) | 2006-09-13 |
US20070053577A1 (en) | 2007-03-08 |
DE10335312A1 (de) | 2005-02-24 |
JP2007500841A (ja) | 2007-01-18 |
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