WO2004092048A1 - Microfluidic sealing - Google Patents

Microfluidic sealing Download PDF

Info

Publication number
WO2004092048A1
WO2004092048A1 PCT/AU2004/000458 AU2004000458W WO2004092048A1 WO 2004092048 A1 WO2004092048 A1 WO 2004092048A1 AU 2004000458 W AU2004000458 W AU 2004000458W WO 2004092048 A1 WO2004092048 A1 WO 2004092048A1
Authority
WO
WIPO (PCT)
Prior art keywords
microfluidic
microwave
conductive polymer
layer
channel
Prior art date
Application number
PCT/AU2004/000458
Other languages
French (fr)
Inventor
Abdirahman Ali Yussuf
Jason Hayes
Matthew Solomon
Igor Sbarski
Original Assignee
Microtechnology Centre Management Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Microtechnology Centre Management Limited filed Critical Microtechnology Centre Management Limited
Publication of WO2004092048A1 publication Critical patent/WO2004092048A1/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00General aspects of processes or apparatus for joining preformed parts
    • B29C66/70General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material
    • B29C66/71General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the composition of the plastics material of the parts to be joined
    • B29C66/712General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the composition of the plastics material of the parts to be joined the composition of one of the parts to be joined being different from the composition of the other part
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C65/00Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
    • B29C65/02Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
    • B29C65/14Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using wave energy, i.e. electromagnetic radiation, or particle radiation
    • B29C65/1403Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using wave energy, i.e. electromagnetic radiation, or particle radiation characterised by the type of electromagnetic or particle radiation
    • B29C65/1425Microwave radiation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C65/00Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
    • B29C65/02Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
    • B29C65/14Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using wave energy, i.e. electromagnetic radiation, or particle radiation
    • B29C65/1477Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using wave energy, i.e. electromagnetic radiation, or particle radiation making use of an absorber or impact modifier
    • B29C65/1483Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using wave energy, i.e. electromagnetic radiation, or particle radiation making use of an absorber or impact modifier coated on the article
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00General aspects of processes or apparatus for joining preformed parts
    • B29C66/01General aspects dealing with the joint area or with the area to be joined
    • B29C66/05Particular design of joint configurations
    • B29C66/10Particular design of joint configurations particular design of the joint cross-sections
    • B29C66/11Joint cross-sections comprising a single joint-segment, i.e. one of the parts to be joined comprising a single joint-segment in the joint cross-section
    • B29C66/112Single lapped joints
    • B29C66/1122Single lap to lap joints, i.e. overlap joints
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00General aspects of processes or apparatus for joining preformed parts
    • B29C66/50General aspects of joining tubular articles; General aspects of joining long products, i.e. bars or profiled elements; General aspects of joining single elements to tubular articles, hollow articles or bars; General aspects of joining several hollow-preforms to form hollow or tubular articles
    • B29C66/51Joining tubular articles, profiled elements or bars; Joining single elements to tubular articles, hollow articles or bars; Joining several hollow-preforms to form hollow or tubular articles
    • B29C66/54Joining several hollow-preforms, e.g. half-shells, to form hollow articles, e.g. for making balls, containers; Joining several hollow-preforms, e.g. half-cylinders, to form tubular articles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C65/00Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
    • B29C65/02Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
    • B29C65/14Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using wave energy, i.e. electromagnetic radiation, or particle radiation
    • B29C65/1403Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using wave energy, i.e. electromagnetic radiation, or particle radiation characterised by the type of electromagnetic or particle radiation
    • B29C65/1406Ultraviolet [UV] radiation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C65/00Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
    • B29C65/02Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
    • B29C65/14Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using wave energy, i.e. electromagnetic radiation, or particle radiation
    • B29C65/1429Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using wave energy, i.e. electromagnetic radiation, or particle radiation characterised by the way of heating the interface
    • B29C65/1435Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using wave energy, i.e. electromagnetic radiation, or particle radiation characterised by the way of heating the interface at least passing through one of the parts to be joined, i.e. transmission welding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C65/00Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
    • B29C65/02Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
    • B29C65/34Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using heated elements which remain in the joint, e.g. "verlorenes Schweisselement"
    • B29C65/3472Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using heated elements which remain in the joint, e.g. "verlorenes Schweisselement" characterised by the composition of the heated elements which remain in the joint
    • B29C65/3484Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using heated elements which remain in the joint, e.g. "verlorenes Schweisselement" characterised by the composition of the heated elements which remain in the joint being non-metallic
    • B29C65/3488Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using heated elements which remain in the joint, e.g. "verlorenes Schweisselement" characterised by the composition of the heated elements which remain in the joint being non-metallic being an electrically conductive polymer
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C65/00Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
    • B29C65/48Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor using adhesives, i.e. using supplementary joining material; solvent bonding
    • B29C65/52Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor using adhesives, i.e. using supplementary joining material; solvent bonding characterised by the way of applying the adhesive
    • B29C65/526Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor using adhesives, i.e. using supplementary joining material; solvent bonding characterised by the way of applying the adhesive by printing or by transfer from the surfaces of elements carrying the adhesive, e.g. using brushes, pads, rollers, stencils or silk screens
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00General aspects of processes or apparatus for joining preformed parts
    • B29C66/70General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material
    • B29C66/71General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the composition of the plastics material of the parts to be joined
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00General aspects of processes or apparatus for joining preformed parts
    • B29C66/70General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material
    • B29C66/73General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset
    • B29C66/739General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the material of the parts to be joined being a thermoplastic or a thermoset
    • B29C66/7392General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the material of at least one of the parts being a thermoplastic
    • B29C66/73921General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the material of at least one of the parts being a thermoplastic characterised by the materials of both parts being thermoplastics
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29KINDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2995/00Properties of moulding materials, reinforcements, fillers, preformed parts or moulds
    • B29K2995/0003Properties of moulding materials, reinforcements, fillers, preformed parts or moulds having particular electrical or magnetic properties, e.g. piezoelectric
    • B29K2995/0005Conductive
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29LINDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2031/00Other particular articles
    • B29L2031/756Microarticles, nanoarticles

Definitions

  • This invention relates to the fabrication of microfluidic devices and in particular to forming fluid tight seals between layers in laminated microfluidic devices.
  • microfluidic devices on various substrates with range of materials such as amorphous silicon, glass, quartz, and metals and polymers.
  • materials such as amorphous silicon, glass, quartz, and metals and polymers.
  • the majority of the devices reported in the literature, as well as those that are commercially available, have been fabricated- using silicon and glass based materials.
  • polymeric materials are increasingly being used in microfluidic systems.
  • Polymer substrates are seen as a better alternative for the fabrication of microfluidic devices because these materials are less expensive, possess good processibility for mass production, are recyclable and easier to manipulate than silica-based substrates.
  • Various polymers such as polydimethylsiloxane (PDMS), polymethylmethacrylate (PMMA), polycarbonate (PC), polystrene (PS) and polyethylene (PE) have been used for microfluidic fabrications.
  • PDMS polydimethylsiloxane
  • PMMA polymethylmethacrylate
  • PC polycarbonate
  • PS polystrene
  • PE polyethylene
  • the most commonly used material is PDMS which is tough, optically transparent, amenable to fabrication using a number of procedures, inexpensive and excellent optical properties of PDMS. Ail these relevant characteristics of PDMS render this material an excellent alternative to the commonly used glass and quartz substrate.
  • Laminated microfluidic structures need the layers to be bonded together and this may be achieved by adhesive or by welding.
  • Most thermoplastics can be heat sealed or welded by heating the plastic surface to be joined to high temperatures depending on the plastic. The surfaces should be brought into contact and sufficient pressure applied to allow intimate contact. The heat may be applied from both sides of the joint to be bonded or from only one side.
  • thermal bonding of solid polymeric substrates one or more of the substrates to be bonded is heated to the glass transition temperature of the substrate surface. For polymeric substrates substantial deformation can occur during thermal bonding at substantially lower temperatures, and this should be taken into account.
  • Adhesive bonding is used in microfluidic devices technology mainly to attach components.
  • Adhesives have an ability to seal as well as bond the interior parts of the assembly from the environment. While a hermetic seal is possible, care is necessary in the surface preparation (surface modifications) of the joint and the application of the adhesive. The disadvantage of this technique is when using it, care needs to be taken in order to prevent the adhesive from flowing into the micro channels.
  • Lamination is the process of combining two or more polymeric materials into a new composite.
  • the polymers may be alike or different.
  • Several methods such as wet lamination and hot melts lamination are in common practice today.
  • Lamination process is widespread in the microfluidic devices for fabricating polymers in a polymer film and works well for sealing channels. It is particularly well suited to fabrication of micro-scale components because the laminates can often be cut or machined using macroscale processes combined with a wide variety of microfabrication techniques. Frequently a thermoplastic welding technique will be selected for reasons which may include cost, short joining times, good joint mechanical properties and high level of consistency.
  • USA 6284329 also discloses plasma treatment for bonding polyimide and copper. It is an object of this invention to provide an inexpensive means of bonding layers in microfluidic devices that do not interfere with the integrity of the microwave channels and is easily adaptable to manufacturing techniques employed in making polymer based microfluidic devices.
  • the present invention provides a method of bonding polymeric layers in a microfluidic device in which at least one polymeric layer includes microfluidic channels and a second polymeric layer is bonded to the first to seal the channels which method includes the steps of a) Applying a microwave heatable substance adjacent to said microfluidic channel, b) irradiating the microwave heatable substance with microwave radiation of a wavelength effective to heat said substance for a time sufficient to heat the polymer adjacent said microwave heatable substance to bond the two layers together.
  • Microwaves are electromagnetic waves in the frequency band from 300 MHz to 300 GHz.
  • Microwave heating and conventional heating techniques differ fundamentally. In the former heat is absorbed over the entire cross-section of the weld, whereas in the latter heat is diffused from the surface through the material.
  • the microwave welding technique employs concentrated microwave energy affecting only the area to be bonded, which means selective zone heating or localized heating.
  • the major advantage of using microwave is that it raises the bulk material temperature volumetrically instead of conduction from the surface such as conventional oven heating. This method is applicable to the polymeric materials usually used in microfluidic devices such as polymethylmethacrylate (PMMA) and polycarbonate (PC).
  • Microwave welding of plastics can be achieved by placing a conductive polymer- heating element at joint interface. This heating element absorbs the microwave energy and converts it into heat, which determines the heat generation and peak temperature during welding.
  • This invention provides new approaches to improve the physical properties of materials; provides alternatives for processing materials that are hard to process; reduces the environmental impact of material processing; provides economic advantages through the saving of energy, space, and time; and provides an opportunity to produce new materials and structures that can not be achieved by other methods.
  • An alternative method includes the steps of a) forming at least one channel adjacent said microfluidic channel, b) filling said channel with said conductive polymer.
  • the channel may be in the microfluidic layer or the layer to be bonded to the microfluidic layer. This enables a greater quantity of material to be located at the optimal distance from the microfluidic channel and allows the time required for heating to be reduced.
  • Figurel is a plan view of microfluidic channel in a first polymer film
  • Figure 2 is a plan view of a second polymer film having sealing channel according to this invention
  • Figure 3 is a plan view of the two films of figures Hand 2 superimposed on each other;
  • Figure 4 is a side view of figure 3;
  • Figure 5 is an end view of figure 3.
  • Figure 6 is a view along the line A-A of figure 3.
  • a microfluidic channel 11 is formed in a film 10 which is the upper substrate in the microfluidic device.
  • a sealing channel 15 is formed and filled with a conductive polymer such as liquid polyaniline.
  • the formation and filling of the channels may be achieved using conventional lithographic and printing techniques.
  • the polymer layers are preferably each 0.1 to 2 mm thick, the channels are 0.5 to
  • the preferred conductive polymer used in this invention is polyaniline.
  • the polyaniline is deposited in channels 15 on either side of the microfluidic channel
  • the channel 11 may be 0.2 to 1mm wide and 0.2 0.6mm deep.
  • the channel 15 is spaced sufficient distance away from the microfluidic channel 11 to prevent any distortion of the channel due to the localized heating of the conductive polymer.
  • This distance is preferably 1 to 4mm.
  • the polyaniline may be printed lithographically onto the surface of the substrates 10 or 15 in the same relative locations.
  • the printed layer may be about lOOmicrons thick and 50 to 100 microns wide. Because less material is used the time required to achieve bonding may be longer. Since the microwave field will interact with any electrically conductive materials present, it may not be compatible with devices including electrical contacts. This process is most suited to thermoplastic polymers which do not absorb microwave radiation to a significant level. This includes the majority of polymers currently used in microfluidics except for polyimide and PDMS. A suitable clamping method is required to produce spatially uniform bonds to avoid deformation due to uneven loading.
  • the preferred microwave frequency is 2.45 GHz and a Single Mode Microwave System is preferred. Due to the dimensions of the waveguide, the number of wave modes inside the applicator is limited. A single mode microwave heating provides faster heating and welding than multi-mode systems. Also the field distribution can be calculated by using Maxwell's equations with the associated boundary conditions.
  • Waveguide is normally made of conductive materials such as aluminium or any metal alloys and has the shape of either a hollow rectangular or cylindrical, which is designed as such to meet the propagation modes of interest. It has an advantage over other transmission lines such as coaxial cable as it can handle electromagnetic waves more efficiently, leading to low electromagnetic energy losses at higher frequency operation. In fact at higher frequency operation, the use of coaxial cable to carry out microwave transmission is not recommended because it could result in the leakage of microwave radiation.
  • Transverse Electric Magnetic Mode TEM Mode
  • TE Mode Transverse Electric mode
  • TM Mode Transverse Magnetic
  • TEM Mode Transverse Electric Magnetic Mode
  • TE and TM modes can occur inside a waveguide due to the dimensional constraints.
  • the microwave heating process is an electromagnetic interaction between the incident microwave radiation and the target material. The microwave energy absorbed within materials depends, among other things, on the incident microwave frequency, distribution of electric fields within the material and dielectric properties of the material.
  • Non-conducting materials are transparent to microwave energy whilst highly conductive materials are opaque, resulting total reflection of the microwaves.
  • the material property that indicates the degree of absorption is called the dielectric loss.
  • the microwaves are absorbed by the component that has high dielectric loss while passing through the low loss material with little drop in energy.
  • the dielectric constant mostly determines how much of the incident energy reflected at the air-sample interface, and how much enters the sample.
  • the important factor in microwave processing of materials is the loss tangent, tan ⁇ , which is indicative of the ability of the materials to convert absorbed energy into heat depending on electric-field intensity, frequency, loss factor and permittivity. This is defined as follows;
  • is the dielectric loss or loss factor ⁇ is the dielectric constant
  • Dielectric loss factor, ⁇ , loss tangent, and tan ⁇ were used to evaluate potential material processability under applied microwave radiation.
  • the heat-ability was found to be a direct function of the dielectric loss dispersion dependence on temperature and frequency.
  • the dielectric loss factor obtained at low-frequency measurements was found to be directly proportional to the heat-ability of the polymers.
  • Microwave parameters such as power, time have been optimised for a polyaniline containing channel of 400 ⁇ m and (300W for 15 sec). The time required has been found to increase with lower volumes of polyaniline.
  • PMMA and PC substrates have been sealed using this technology without channel blocking and distortion.
  • Different channel widths such as 600, 400, 200 ⁇ m have been sealed.
  • a range of polyaniline channels widths have been tested such as 600, 400, 200 ⁇ m, and all of them resulted in a good bond.
  • Pressure and leak tests of the sealed channels were performed and results showed no leakage up to 200 psi.
  • Patterning of the polyaniline may be carried out by screen printing The cost of developing equipment to implement this technique is likely to be relatively low.
  • the key task in development is in producing a sufficiently uniform microwave field over a suitable area.
  • This technique allows the hermetic sealing of a range of thermoplastic polymers without the presence of a third material in contact with the channels. This solves many of the channel filling and non-material compatibility issues present with many adhesives. Bonding occurs over a few seconds and requires only a low clamping force. This suggests that the technique could be scaled up to allow medium to large scale manufacture on a continuous web.
  • This technique may be applied not only to microfluidic sealing, but also many other fields of manufacture such as medical devices where it can replace techniques such as RF heating of metallic susceptors, and UV cured adhesive bonding.
  • the ability to use printing techniques to dispense the polyaniline may improve mass- manufacturability.
  • the present invention provides a unique method for achieving effective sealing of polymeric microfluidic channels whether the materials are in the two polymer films are the same or different.

Abstract

A method of laminating polymeric microfluidic devices in which a conductive polymer is deposited in channels (15) adjacent the microfluidic channels (11) and subjected to microwave radiation sufficient to locally heat the polymer adjacent the conductive polymer to thermally bond the polymeric layers (10, 14) together. Polyaniline is a preferred conductive polymer.

Description

MICROFLUIDIC SEALING
This invention relates to the fabrication of microfluidic devices and in particular to forming fluid tight seals between layers in laminated microfluidic devices.
Background to the invention
Extensive work has been done on producing microfluidic devices on various substrates with range of materials such as amorphous silicon, glass, quartz, and metals and polymers. To date, the majority of the devices reported in the literature, as well as those that are commercially available, have been fabricated- using silicon and glass based materials. However, polymeric materials are increasingly being used in microfluidic systems.
One major problem in the area of plastic microfluidics is bonding of components made of different materials. Most existing bonding techniques in microfluidics focus on the bonding of silicon, glass and ceramic material that can sustain high processing temperature but these schemes are not applicable to temperature- sensitive plastic materials.
Polymer substrates are seen as a better alternative for the fabrication of microfluidic devices because these materials are less expensive, possess good processibility for mass production, are recyclable and easier to manipulate than silica-based substrates. Various polymers such as polydimethylsiloxane (PDMS), polymethylmethacrylate (PMMA), polycarbonate (PC), polystrene (PS) and polyethylene (PE) have been used for microfluidic fabrications. The most commonly used material is PDMS which is tough, optically transparent, amenable to fabrication using a number of procedures, inexpensive and excellent optical properties of PDMS. Ail these relevant characteristics of PDMS render this material an excellent alternative to the commonly used glass and quartz substrate. Laminated microfluidic structures need the layers to be bonded together and this may be achieved by adhesive or by welding. Most thermoplastics can be heat sealed or welded by heating the plastic surface to be joined to high temperatures depending on the plastic. The surfaces should be brought into contact and sufficient pressure applied to allow intimate contact. The heat may be applied from both sides of the joint to be bonded or from only one side. In thermal bonding of solid polymeric substrates, one or more of the substrates to be bonded is heated to the glass transition temperature of the substrate surface. For polymeric substrates substantial deformation can occur during thermal bonding at substantially lower temperatures, and this should be taken into account. Adhesive bonding is used in microfluidic devices technology mainly to attach components. Adhesives have an ability to seal as well as bond the interior parts of the assembly from the environment. While a hermetic seal is possible, care is necessary in the surface preparation (surface modifications) of the joint and the application of the adhesive. The disadvantage of this technique is when using it, care needs to be taken in order to prevent the adhesive from flowing into the micro channels.
Lamination is the process of combining two or more polymeric materials into a new composite. The polymers may be alike or different. Several methods such as wet lamination and hot melts lamination are in common practice today. Lamination process is widespread in the microfluidic devices for fabricating polymers in a polymer film and works well for sealing channels. It is particularly well suited to fabrication of micro-scale components because the laminates can often be cut or machined using macroscale processes combined with a wide variety of microfabrication techniques. Frequently a thermoplastic welding technique will be selected for reasons which may include cost, short joining times, good joint mechanical properties and high level of consistency. Today there are numerous joining (welding) techniques available, which can be broadly divided into three groups : those where heat is generated by mechanical movement of components to be joined (friction), those where heat is generated by an external source and those using electromagnetism. All these provide the means to join most thermoplastic components. However the issue of sample contaminants needs to be considered in some methods; for example, if the two surface to be joined are contaminated with release agents or other chemicals, a weld will not take place as the friction heat to melt the polymers will not be generated by the ultrasonic vibrational energy. In addition, chemical contaminants may prevent the softened/molten plastics from joining. One form of adhesiveless bonding is to use plasma treatment of the surface. USA patent 6171714 is one example where a polymer film is treated to improve adhesion of a metal layer
USA 6284329 also discloses plasma treatment for bonding polyimide and copper. It is an object of this invention to provide an inexpensive means of bonding layers in microfluidic devices that do not interfere with the integrity of the microwave channels and is easily adaptable to manufacturing techniques employed in making polymer based microfluidic devices.
Brief description of the invention
To this end the present invention provides a method of bonding polymeric layers in a microfluidic device in which at least one polymeric layer includes microfluidic channels and a second polymeric layer is bonded to the first to seal the channels which method includes the steps of a) Applying a microwave heatable substance adjacent to said microfluidic channel, b) irradiating the microwave heatable substance with microwave radiation of a wavelength effective to heat said substance for a time sufficient to heat the polymer adjacent said microwave heatable substance to bond the two layers together.
Microwaves are electromagnetic waves in the frequency band from 300 MHz to 300 GHz. Microwave heating and conventional heating techniques differ fundamentally. In the former heat is absorbed over the entire cross-section of the weld, whereas in the latter heat is diffused from the surface through the material. The microwave welding technique employs concentrated microwave energy affecting only the area to be bonded, which means selective zone heating or localized heating. The major advantage of using microwave is that it raises the bulk material temperature volumetrically instead of conduction from the surface such as conventional oven heating. This method is applicable to the polymeric materials usually used in microfluidic devices such as polymethylmethacrylate (PMMA) and polycarbonate (PC).
Microwave welding of plastics can be achieved by placing a conductive polymer- heating element at joint interface. This heating element absorbs the microwave energy and converts it into heat, which determines the heat generation and peak temperature during welding.
This invention provides new approaches to improve the physical properties of materials; provides alternatives for processing materials that are hard to process; reduces the environmental impact of material processing; provides economic advantages through the saving of energy, space, and time; and provides an opportunity to produce new materials and structures that can not be achieved by other methods.
Microwave possess several characteristics that are not available in conventional processing of materials, including:
♦ Penetrating radiation;
♦ Controllable electric-field distributions;
♦ Rapid heating;
♦ Selective heating materials through differential absorption; and ♦ Self-limiting reactions
These characteristics, either singly or in combination, present opportunities and benefits that are not available from conventional heating or processing methods and provide alternatives for the processing of a wide variety of materials, including rubber, polymers, ceramics, composites etc. In some processes and products heating of a specific component while leaving the surrounding material relatively unaffected would be of great advantage; this selective heating process is not possible by conventional heating techniques.
In the last 20 years, a new class of electrically conductive polymers such as polythiophene, polyptrrole and polyaniline have been studied. These materials have a unique combination of mechanical and electrical properties making them very useful for welding. Among the conducting polymers, liquid polyaniline has been considered as one of the most promising materials because the electromagnetic parameters can be adjusted by changing both oxidation and protonation state. The microwave heatable material may be applied or printed onto the surface of the layer containing the microfluidic channels or onto the layer to be laminated to the microfluidic channel layer. The amount of the conducting polymer applied determines the heat which can be generated. An alternative method includes the steps of a) forming at least one channel adjacent said microfluidic channel, b) filling said channel with said conductive polymer. The channel may be in the microfluidic layer or the layer to be bonded to the microfluidic layer. This enables a greater quantity of material to be located at the optimal distance from the microfluidic channel and allows the time required for heating to be reduced.
Detailed Description of the Invention
Preferred embodiments of the invention are shown in the drawings in which
Figurel is a plan view of microfluidic channel in a first polymer film;
Figure 2 is a plan view of a second polymer film having sealing channel according to this invention; Figure 3 is a plan view of the two films of figures Hand 2 superimposed on each other;
Figure 4 is a side view of figure 3;
Figure 5 is an end view of figure 3; and
Figure 6 is a view along the line A-A of figure 3. As seen in figure 1 a microfluidic channel 11 is formed in a film 10 which is the upper substrate in the microfluidic device. In the lower substrate 14 a sealing channel 15 is formed and filled with a conductive polymer such as liquid polyaniline. The formation and filling of the channels may be achieved using conventional lithographic and printing techniques. The polymer layers are preferably each 0.1 to 2 mm thick, the channels are 0.5 to
0.6 mm in width and 0.1 to 0.3 mm in depth.
The preferred conductive polymer used in this invention is polyaniline. The polyaniline is deposited in channels 15 on either side of the microfluidic channel
11. The channel 11 may be 0.2 to 1mm wide and 0.2 0.6mm deep. The channel 15 is spaced sufficient distance away from the microfluidic channel 11 to prevent any distortion of the channel due to the localized heating of the conductive polymer.
This distance is preferably 1 to 4mm. Instead of using channels the polyaniline may be printed lithographically onto the surface of the substrates 10 or 15 in the same relative locations. The printed layer may be about lOOmicrons thick and 50 to 100 microns wide. Because less material is used the time required to achieve bonding may be longer. Since the microwave field will interact with any electrically conductive materials present, it may not be compatible with devices including electrical contacts. This process is most suited to thermoplastic polymers which do not absorb microwave radiation to a significant level. This includes the majority of polymers currently used in microfluidics except for polyimide and PDMS. A suitable clamping method is required to produce spatially uniform bonds to avoid deformation due to uneven loading.
The preferred microwave frequency is 2.45 GHz and a Single Mode Microwave System is preferred. Due to the dimensions of the waveguide, the number of wave modes inside the applicator is limited. A single mode microwave heating provides faster heating and welding than multi-mode systems. Also the field distribution can be calculated by using Maxwell's equations with the associated boundary conditions.
At microwave heating frequencies the energy transfer is accomplished in special channels called waveguide, the dimensions of which depend upon the operating frequency. The energy thus, once generated, is confined to travel in these enclosed structures and, with the exception of the horn type radiator; microwave applicators are designed to confine the microwave within them. Waveguide is normally made of conductive materials such as aluminium or any metal alloys and has the shape of either a hollow rectangular or cylindrical, which is designed as such to meet the propagation modes of interest. It has an advantage over other transmission lines such as coaxial cable as it can handle electromagnetic waves more efficiently, leading to low electromagnetic energy losses at higher frequency operation. In fact at higher frequency operation, the use of coaxial cable to carry out microwave transmission is not recommended because it could result in the leakage of microwave radiation. In general transmission line system there are three modes, known as Transverse Electric Magnetic Mode (TEM Mode) as is found in a coaxial cable, Transverse Electric mode (TE Mode), and Transverse Magnetic (TM Mode) which are found in a waveguide. In a waveguide transmission line system, only two modes, namely, TE and TM modes separately, can occur inside a waveguide due to the dimensional constraints. In order successfully apply microwave energy for materials processing and effectively control the level of the microwave energy to be absorbed by the materials under processing, the knowledge of material-microwave interaction must be understood well. The microwave heating process is an electromagnetic interaction between the incident microwave radiation and the target material. The microwave energy absorbed within materials depends, among other things, on the incident microwave frequency, distribution of electric fields within the material and dielectric properties of the material. Non-conducting materials are transparent to microwave energy whilst highly conductive materials are opaque, resulting total reflection of the microwaves. The material property that indicates the degree of absorption is called the dielectric loss. The microwaves are absorbed by the component that has high dielectric loss while passing through the low loss material with little drop in energy. The dielectric constant mostly determines how much of the incident energy reflected at the air-sample interface, and how much enters the sample. The important factor in microwave processing of materials is the loss tangent, tan δ, which is indicative of the ability of the materials to convert absorbed energy into heat depending on electric-field intensity, frequency, loss factor and permittivity. This is defined as follows;
tan δ = -
Where; ε" is the dielectric loss or loss factor ε is the dielectric constant
Chen et al. 1993 have investigated the relationship between polymer structure and microwave absorptivity. Dielectric loss factor, ε , loss tangent, and tan δ were used to evaluate potential material processability under applied microwave radiation. In general, the heat-ability was found to be a direct function of the dielectric loss dispersion dependence on temperature and frequency. The dielectric loss factor obtained at low-frequency measurements was found to be directly proportional to the heat-ability of the polymers.
Microwave parameters such as power, time have been optimised for a polyaniline containing channel of 400μm and (300W for 15 sec). The time required has been found to increase with lower volumes of polyaniline.
PMMA and PC substrates have been sealed using this technology without channel blocking and distortion. Different channel widths such as 600, 400, 200μm have been sealed. A range of polyaniline channels widths have been tested such as 600, 400, 200μm, and all of them resulted in a good bond. Pressure and leak tests of the sealed channels were performed and results showed no leakage up to 200 psi. Patterning of the polyaniline may be carried out by screen printing The cost of developing equipment to implement this technique is likely to be relatively low. The key task in development is in producing a sufficiently uniform microwave field over a suitable area. This technique allows the hermetic sealing of a range of thermoplastic polymers without the presence of a third material in contact with the channels. This solves many of the channel filling and non-material compatibility issues present with many adhesives. Bonding occurs over a few seconds and requires only a low clamping force. This suggests that the technique could be scaled up to allow medium to large scale manufacture on a continuous web.
This technique may be applied not only to microfluidic sealing, but also many other fields of manufacture such as medical devices where it can replace techniques such as RF heating of metallic susceptors, and UV cured adhesive bonding. The ability to use printing techniques to dispense the polyaniline may improve mass- manufacturability.
From the above it can be seen that the present invention provides a unique method for achieving effective sealing of polymeric microfluidic channels whether the materials are in the two polymer films are the same or different.
Those skilled in the art will realize that the invention can be put into practice in a number of ways without departing from the essential teachings of the invention.

Claims

1. A method of bonding polymeric layers in a microfluidic device in which at least one polymeric layer includes microfluidic channels and a second polymeric layer is bonded to the first to seal the channels which method includes the steps of a) Applying a microwave heatable substance adjacent to said microfluidic channel, b) irradiating the microwave heatable substance with microwave radiation of a wavelength effective to heat said substance for a time sufficient to heat the polymer adjacent said microwave heatable substance to bond the two layers together.
2. A method as claimed in claim 1 in which microwave heatable substance is a conductive polymer,
3. A method as claimed in claim 2 in which the conductive polymer is polyaniline.
4. A method as claimed in any preceding claim which includes the steps of a. forming at least one channel adjacent said microfluidic channel, b. filling said channel with said conductive polymer,
5. A method as claimed in any preceding claim in which the polymeric material in each layer is different.
6. A method as claimed in claim 4 in which the microfluidic channel is formed in one polymer and the channels containing the conductive polymer are in the layer to be bonded to the layer containing the microfluidic channel.
7. A microfluidic device incorporating a microfluidic channel formed in a first polymeric substrate and a second polymeric substrate bonded to the first substrate in which a microwave heatable substance is located adjacent said microfluidic channel to facilitate the thermal bonding of the substrates.
8. A device as claimed in claim 7 in which the microwave heatable substance is a conductive polymer.
9. A device as claimed in claim 8in which the conductive polymer is polyaniline.
10. A device as claimed in claim 7 to 9 in which the polymeric material in each layer is different.
11. A device as claimed in claim any one of claims 2-10 in which the microfluidic channel is formed in one polymer and the conductive polymer is printed on the layer to be bonded to the layer containing the microfluidic channel.
PCT/AU2004/000458 2003-04-15 2004-04-13 Microfluidic sealing WO2004092048A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AU2003901779 2003-04-15
AU2003901779A AU2003901779A0 (en) 2003-04-15 2003-04-15 Microfluidic sealing

Publications (1)

Publication Number Publication Date
WO2004092048A1 true WO2004092048A1 (en) 2004-10-28

Family

ID=31500816

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/AU2004/000458 WO2004092048A1 (en) 2003-04-15 2004-04-13 Microfluidic sealing

Country Status (2)

Country Link
AU (1) AU2003901779A0 (en)
WO (1) WO2004092048A1 (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008081363A1 (en) * 2006-12-28 2008-07-10 Kimberly-Clark Worldwide, Inc. Process for bonding substrates with improved microwave absorbing compositions
US7674300B2 (en) 2006-12-28 2010-03-09 Kimberly-Clark Worldwide, Inc. Process for dyeing a textile web
US7740666B2 (en) 2006-12-28 2010-06-22 Kimberly-Clark Worldwide, Inc. Process for dyeing a textile web
US8182552B2 (en) 2006-12-28 2012-05-22 Kimberly-Clark Worldwide, Inc. Process for dyeing a textile web
CN102896008A (en) * 2012-10-18 2013-01-30 哈尔滨工业大学 Bonding method for micro-fluidic chip based on polymethyl methacrylate (PMMA) and other polymeric materials
CN102910577A (en) * 2012-10-18 2013-02-06 哈尔滨工业大学 Microwave interface heating bonding method for micro-fluidic chip based on PMMA (Polymethyl Methacrylate) material and other organic polymers
WO2013072439A1 (en) * 2011-11-16 2013-05-23 Sanofi-Aventis Deutschland Gmbh Medicament guiding assembly for a drug delivery device
US8632613B2 (en) 2007-12-27 2014-01-21 Kimberly-Clark Worldwide, Inc. Process for applying one or more treatment agents to a textile web
US8920879B2 (en) * 2007-06-08 2014-12-30 Board Of Trustees Of The University Of Illinois Self-healing materials with microfluidic networks

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116238161B (en) * 2023-02-27 2024-03-08 麦卡苏豫(无锡)智能装备有限公司 Beam welding machine for welding plastic parts

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2262258A (en) * 1991-12-04 1993-06-16 Cookson Group Plc Joining polymer-containing materials
EP0983841A2 (en) * 1998-04-09 2000-03-08 E.I. Du Pont De Nemours & Company Incorporated Monolithic polyimide laminate containing encapsulated design and preparation thereof
EP1002843A2 (en) * 1998-11-21 2000-05-24 DaimlerChrysler AG Method for releasably bonding building elements
WO2002028532A2 (en) * 2000-10-06 2002-04-11 Protasis Corporation Microfluidic substrate assembly and method for making same
US6409900B1 (en) * 1996-04-16 2002-06-25 Caliper Technologies Corp. Controlled fluid transport in microfabricated polymeric substrates
US6418968B1 (en) * 2001-04-20 2002-07-16 Nanostream, Inc. Porous microfluidic valves

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2262258A (en) * 1991-12-04 1993-06-16 Cookson Group Plc Joining polymer-containing materials
US6409900B1 (en) * 1996-04-16 2002-06-25 Caliper Technologies Corp. Controlled fluid transport in microfabricated polymeric substrates
EP0983841A2 (en) * 1998-04-09 2000-03-08 E.I. Du Pont De Nemours & Company Incorporated Monolithic polyimide laminate containing encapsulated design and preparation thereof
EP1002843A2 (en) * 1998-11-21 2000-05-24 DaimlerChrysler AG Method for releasably bonding building elements
WO2002028532A2 (en) * 2000-10-06 2002-04-11 Protasis Corporation Microfluidic substrate assembly and method for making same
US6418968B1 (en) * 2001-04-20 2002-07-16 Nanostream, Inc. Porous microfluidic valves

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
HONG-SEOK NOH ET AL.: "Wafer bonding using microwave heating of parylene intermediate layers", JOURNAL OF MICROMECHANICS AND MICROENGINEERING, vol. 14, April 2004 (2004-04-01), pages 625 - 631 *

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008081363A1 (en) * 2006-12-28 2008-07-10 Kimberly-Clark Worldwide, Inc. Process for bonding substrates with improved microwave absorbing compositions
US7674300B2 (en) 2006-12-28 2010-03-09 Kimberly-Clark Worldwide, Inc. Process for dyeing a textile web
US7740666B2 (en) 2006-12-28 2010-06-22 Kimberly-Clark Worldwide, Inc. Process for dyeing a textile web
US8182552B2 (en) 2006-12-28 2012-05-22 Kimberly-Clark Worldwide, Inc. Process for dyeing a textile web
US8920879B2 (en) * 2007-06-08 2014-12-30 Board Of Trustees Of The University Of Illinois Self-healing materials with microfluidic networks
US8632613B2 (en) 2007-12-27 2014-01-21 Kimberly-Clark Worldwide, Inc. Process for applying one or more treatment agents to a textile web
WO2013072439A1 (en) * 2011-11-16 2013-05-23 Sanofi-Aventis Deutschland Gmbh Medicament guiding assembly for a drug delivery device
CN103957965A (en) * 2011-11-16 2014-07-30 赛诺菲-安万特德国有限公司 Medicament guiding assembly for a drug delivery device
JP2014533534A (en) * 2011-11-16 2014-12-15 サノフィ−アベンティス・ドイチュラント・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング Drug guide assembly for drug delivery device
US10016562B2 (en) 2011-11-16 2018-07-10 Sanofi-Aventis Deutschland Gmbh Medicament guiding assembly for a drug delivery device
CN102896008A (en) * 2012-10-18 2013-01-30 哈尔滨工业大学 Bonding method for micro-fluidic chip based on polymethyl methacrylate (PMMA) and other polymeric materials
CN102910577A (en) * 2012-10-18 2013-02-06 哈尔滨工业大学 Microwave interface heating bonding method for micro-fluidic chip based on PMMA (Polymethyl Methacrylate) material and other organic polymers

Also Published As

Publication number Publication date
AU2003901779A0 (en) 2003-05-01

Similar Documents

Publication Publication Date Title
EP1115573B1 (en) Methods of fabricating polymeric structures incorporating microscale fluidic elements
Siores et al. Microwave applications in materials joining
JP4751554B2 (en) Method for joining two workpieces made of plastic without using foreign matter
JP6014658B2 (en) Method for joining a thermoplastic polymer to a thermosetting polymer part
WO2004092048A1 (en) Microfluidic sealing
US7837821B2 (en) Laminated microfluidic structures and method for making
TWI494404B (en) Method for adhesion of heat -activated adherable face element
US20130020022A1 (en) Inductively heatable adhesive tape having differential detachment properties
AU6186898A (en) High efficiency heating agents
Grimm Welding processes for plastics
KR20080114826A (en) Process for production of resin composite molded article
EP1706467B1 (en) Laminated microfluidic structures and method for making
Jiang et al. A laser microwelding method for assembly of polymer based microfluidic devices
Rahbar et al. Microwave-induced, thermally assisted solvent bonding for low-cost PMMA microfluidic devices
Kumar et al. A state-of-the-art review of laser welding of polymers—Part I: Welding parameters
Lei et al. Microwave bonding of polymer-based substrates for micro-nano fluidic applications
JP2008157644A (en) Plastic microchip, and biochip or micro analysis chip using the same
Yu et al. Rapid bonding enhancement by auxiliary ultrasonic actuation for the fabrication of cyclic olefin copolymer (COC) microfluidic devices
JP2006258508A (en) Bonding method of plastic member, and biochip and micro analysis chip manufactured using method
Mekaru Thermal and ultrasonic bonding between planar polyethylene terephthalate, acrylonitrile butadiene styrene, and polycarbonate substrates
WO2002092329A1 (en) Film adhering method
JPS62271726A (en) Adhering method
Toossi Efficient Microwave Susceptor Design for Wafer Bonding Applications
EP4008434A1 (en) Methods for ultrasonic fabrication and sealing of microfluidic or other microdevices
Yeh Overview of welding methods for medical plastics

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A1

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BW BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE EG ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NA NI NO NZ OM PG PH PL PT RO RU SC SD SE SG SK SL SY TJ TM TN TR TT TZ UA UG US UZ VC VN YU ZA ZM ZW

AL Designated countries for regional patents

Kind code of ref document: A1

Designated state(s): BW GH GM KE LS MW MZ SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LU MC NL PL PT RO SE SI SK TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG

121 Ep: the epo has been informed by wipo that ep was designated in this application
122 Ep: pct application non-entry in european phase