WO2004086610A3 - Abatement of backflow contaminants in a dry pump - Google Patents

Abatement of backflow contaminants in a dry pump Download PDF

Info

Publication number
WO2004086610A3
WO2004086610A3 PCT/GB2004/001198 GB2004001198W WO2004086610A3 WO 2004086610 A3 WO2004086610 A3 WO 2004086610A3 GB 2004001198 W GB2004001198 W GB 2004001198W WO 2004086610 A3 WO2004086610 A3 WO 2004086610A3
Authority
WO
WIPO (PCT)
Prior art keywords
pump
compartment
inlet
abatement
backflow
Prior art date
Application number
PCT/GB2004/001198
Other languages
French (fr)
Other versions
WO2004086610A2 (en
Inventor
Joanne Rachel Greenwood
Nathan Lee Kettlewell
Julian Richard Dean
John Spencer Kendall
Original Assignee
Boc Group Plc
Joanne Rachel Greenwood
Nathan Lee Kettlewell
Julian Richard Dean
John Spencer Kendall
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Boc Group Plc, Joanne Rachel Greenwood, Nathan Lee Kettlewell, Julian Richard Dean, John Spencer Kendall filed Critical Boc Group Plc
Publication of WO2004086610A2 publication Critical patent/WO2004086610A2/en
Publication of WO2004086610A3 publication Critical patent/WO2004086610A3/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D39/00—Filtering material for liquid or gaseous fluids
    • B01D39/14—Other self-supporting filtering material ; Other filtering material
    • B01D39/20—Other self-supporting filtering material ; Other filtering material of inorganic material, e.g. asbestos paper, metallic filtering material of non-woven wires
    • B01D39/2027—Metallic material
    • B01D39/2051—Metallic foam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D39/00—Filtering material for liquid or gaseous fluids
    • B01D39/14—Other self-supporting filtering material ; Other filtering material
    • B01D39/20—Other self-supporting filtering material ; Other filtering material of inorganic material, e.g. asbestos paper, metallic filtering material of non-woven wires
    • B01D39/2055—Carbonaceous material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D8/00—Cold traps; Cold baffles

Abstract

A dry pump (10) has adjacent its inlet (12) and between the inlet and pump foreline (14) an apparatus for abating the back flow of organic molecules originating from a lubricant used to lubricate a drive mechanism of the pump. In one embodiment, the apparatus comprises a first compartment (18) having extending from its internal wall a plurality of cooling baffle plates (20). The cooling baffle plates are cooled by means of a water-cooling coil (22). Between the first compartment (18) and the foreline (14) is a second compartment 24 having extending from its internal wall a plurality of interleaved baffles (26). These baffles are coated on their surfaces with activated charcoal pellets for adsorbing halocarbon molecules back-streaming from the pump inlet.
PCT/GB2004/001198 2003-03-25 2004-03-19 Abatement of backflow contaminants in a dry pump WO2004086610A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB0306733A GB2399772A (en) 2003-03-25 2003-03-25 A metallic filter and associated cooling means
GB0306733.7 2003-03-25

Publications (2)

Publication Number Publication Date
WO2004086610A2 WO2004086610A2 (en) 2004-10-07
WO2004086610A3 true WO2004086610A3 (en) 2004-12-02

Family

ID=9955415

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/GB2004/001198 WO2004086610A2 (en) 2003-03-25 2004-03-19 Abatement of backflow contaminants in a dry pump

Country Status (3)

Country Link
GB (1) GB2399772A (en)
TW (1) TW200427928A (en)
WO (1) WO2004086610A2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202010009413U1 (en) * 2010-06-23 2010-09-16 Mahle International Gmbh Material for hydrocarbon adsorption
CN103991983A (en) * 2014-05-26 2014-08-20 芜湖市华泰实业有限公司 Water purification composite filter element
DE102015216043B4 (en) * 2015-08-21 2023-09-21 Christian Jakschik Device and method for cleaning process exhaust air
EP4282505A1 (en) * 2022-05-27 2023-11-29 Siemens Aktiengesellschaft Condensation apparatus and condensation method for condensation of gas components of gas mixture and method for producing the condensation apparatus

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3372531A (en) * 1964-09-08 1968-03-12 Nat Res Corp Vacuum device
US3387767A (en) * 1966-12-07 1968-06-11 Nat Res Corp High vacuum pump with cryosorption pumping element
US4966016A (en) * 1987-01-27 1990-10-30 Bartlett Allen J Cryopump with multiple refrigerators
US5537833A (en) * 1995-05-02 1996-07-23 Helix Technology Corporation Shielded cryogenic trap

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB992236A (en) * 1961-06-12 1965-05-19 American Sterilizer Co Process and installation for extracting by condensation condensable vapours
US5072592A (en) * 1990-06-26 1991-12-17 Smc Corporation Gas cleaner
US5360572A (en) * 1991-11-29 1994-11-01 The United States Of America As Represented By The Secretary Of The Air Force Aerogel mesh getter
US6330801B1 (en) * 1999-06-11 2001-12-18 Francis J. Whelan Method and system for increasing cryopump capacity

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3372531A (en) * 1964-09-08 1968-03-12 Nat Res Corp Vacuum device
US3387767A (en) * 1966-12-07 1968-06-11 Nat Res Corp High vacuum pump with cryosorption pumping element
US4966016A (en) * 1987-01-27 1990-10-30 Bartlett Allen J Cryopump with multiple refrigerators
US5537833A (en) * 1995-05-02 1996-07-23 Helix Technology Corporation Shielded cryogenic trap

Also Published As

Publication number Publication date
TW200427928A (en) 2004-12-16
WO2004086610A2 (en) 2004-10-07
GB2399772A (en) 2004-09-29
GB0306733D0 (en) 2003-04-30

Similar Documents

Publication Publication Date Title
ATE384194T1 (en) COOLING ARRANGEMENT
WO2006060659A3 (en) Corona-discharge air mover and purifier for fireplace and hearth
JP2010127234A (en) Oilless screw compressor
JP2006105584A (en) Cooler for piston equipment
CA2104991A1 (en) Sound Reduction Unit for Compressors
PL1973631T3 (en) Method and device for drying a gas
ATE493787T1 (en) ELECTRIC MOTOR
CN105683687A (en) Purge system for chiller system
RU2009145637A (en) FRAME FOR DEVICES OPERATING USING A FLUID
SE522700C2 (en) Internal combustion engine
CN1672763A (en) Oil separator for separating an oil portion from the gas fluid including mist
WO2004086610A3 (en) Abatement of backflow contaminants in a dry pump
US20090142212A1 (en) Rotary blower with noise abatement jacket enclosure
CA2524824A1 (en) Inline vent fan
EP1757816A3 (en) Device for pumps
CN108862203B (en) Oxygen generating device
TW200607568A (en) Centrifugal separator
CN108479256A (en) A kind of waste gas purification apparatus
RU2009142880A (en) REFRIGERATING UNIT WITH AIR RECYCLING
WO2007134565A3 (en) Conducting unit, and conducting methods
CN201070568Y (en) Waste gas processor
ATE530105T1 (en) DRYING UNIT FOR DISHWASHERS
DE3333828A1 (en) Energy supply system
CN103397672B (en) A kind of bulldozer and motor thereof
JP2010077883A (en) Cooling equipment for engine

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A2

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BW BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE EG ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NA NI NO NZ OM PG PH PL PT RO RU SC SD SE SG SK SL SY TJ TM TN TR TT TZ UA UG US UZ VC VN YU ZA ZM ZW

AL Designated countries for regional patents

Kind code of ref document: A2

Designated state(s): BW GH GM KE LS MW MZ SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LU MC NL PL PT RO SE SI SK TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG

121 Ep: the epo has been informed by wipo that ep was designated in this application
122 Ep: pct application non-entry in european phase