GB0306733D0 - Abatement of backflow contaminants in a dry pump - Google Patents

Abatement of backflow contaminants in a dry pump

Info

Publication number
GB0306733D0
GB0306733D0 GB0306733A GB0306733A GB0306733D0 GB 0306733 D0 GB0306733 D0 GB 0306733D0 GB 0306733 A GB0306733 A GB 0306733A GB 0306733 A GB0306733 A GB 0306733A GB 0306733 D0 GB0306733 D0 GB 0306733D0
Authority
GB
United Kingdom
Prior art keywords
abatement
backflow
contaminants
dry pump
dry
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB0306733A
Other versions
GB2399772A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOC Group Ltd
Original Assignee
BOC Group Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOC Group Ltd filed Critical BOC Group Ltd
Priority to GB0306733A priority Critical patent/GB2399772A/en
Publication of GB0306733D0 publication Critical patent/GB0306733D0/en
Priority to PCT/GB2004/001198 priority patent/WO2004086610A2/en
Priority to TW93108110A priority patent/TW200427928A/en
Publication of GB2399772A publication Critical patent/GB2399772A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D39/00—Filtering material for liquid or gaseous fluids
    • B01D39/14—Other self-supporting filtering material ; Other filtering material
    • B01D39/20—Other self-supporting filtering material ; Other filtering material of inorganic material, e.g. asbestos paper, metallic filtering material of non-woven wires
    • B01D39/2027—Metallic material
    • B01D39/2051—Metallic foam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D39/00—Filtering material for liquid or gaseous fluids
    • B01D39/14—Other self-supporting filtering material ; Other filtering material
    • B01D39/20—Other self-supporting filtering material ; Other filtering material of inorganic material, e.g. asbestos paper, metallic filtering material of non-woven wires
    • B01D39/2055—Carbonaceous material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D8/00—Cold traps; Cold baffles
GB0306733A 2003-03-25 2003-03-25 A metallic filter and associated cooling means Withdrawn GB2399772A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
GB0306733A GB2399772A (en) 2003-03-25 2003-03-25 A metallic filter and associated cooling means
PCT/GB2004/001198 WO2004086610A2 (en) 2003-03-25 2004-03-19 Abatement of backflow contaminants in a dry pump
TW93108110A TW200427928A (en) 2003-03-25 2004-03-25 Abatement of backflow contaminants in a dry pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0306733A GB2399772A (en) 2003-03-25 2003-03-25 A metallic filter and associated cooling means

Publications (2)

Publication Number Publication Date
GB0306733D0 true GB0306733D0 (en) 2003-04-30
GB2399772A GB2399772A (en) 2004-09-29

Family

ID=9955415

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0306733A Withdrawn GB2399772A (en) 2003-03-25 2003-03-25 A metallic filter and associated cooling means

Country Status (3)

Country Link
GB (1) GB2399772A (en)
TW (1) TW200427928A (en)
WO (1) WO2004086610A2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202010009413U1 (en) * 2010-06-23 2010-09-16 Mahle International Gmbh Material for hydrocarbon adsorption
CN103991983A (en) * 2014-05-26 2014-08-20 芜湖市华泰实业有限公司 Water purification composite filter element
DE102015216043B4 (en) * 2015-08-21 2023-09-21 Christian Jakschik Device and method for cleaning process exhaust air
EP4282505A1 (en) * 2022-05-27 2023-11-29 Siemens Aktiengesellschaft Condensation apparatus and condensation method for condensation of gas components of gas mixture and method for producing the condensation apparatus

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB992236A (en) * 1961-06-12 1965-05-19 American Sterilizer Co Process and installation for extracting by condensation condensable vapours
US3372531A (en) * 1964-09-08 1968-03-12 Nat Res Corp Vacuum device
US3387767A (en) * 1966-12-07 1968-06-11 Nat Res Corp High vacuum pump with cryosorption pumping element
US4966016A (en) * 1987-01-27 1990-10-30 Bartlett Allen J Cryopump with multiple refrigerators
US5072592A (en) * 1990-06-26 1991-12-17 Smc Corporation Gas cleaner
US5360572A (en) * 1991-11-29 1994-11-01 The United States Of America As Represented By The Secretary Of The Air Force Aerogel mesh getter
US5537833A (en) * 1995-05-02 1996-07-23 Helix Technology Corporation Shielded cryogenic trap
US6330801B1 (en) * 1999-06-11 2001-12-18 Francis J. Whelan Method and system for increasing cryopump capacity

Also Published As

Publication number Publication date
TW200427928A (en) 2004-12-16
GB2399772A (en) 2004-09-29
WO2004086610A3 (en) 2004-12-02
WO2004086610A2 (en) 2004-10-07

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)