WO2004077164A1

WO2004077164A1 - Slm direct writer

Info

Publication number: WO2004077164A1
Application number: PCT/SE2004/000253
Authority: WO
Inventors: Torbjörn Sandström
Original assignee: Micronic Laser Systems Ab
Priority date: 2003-02-28
Filing date: 2004-02-25
Publication date: 2004-09-10
Also published as: US20060039651A1; JP2006519494A; US7542129B2; KR101069086B1; EP1597630A1; KR20050109923A; CN100576080C; CN1754130A; SE0300516D0

Abstract

The present invention relates to an apparatus (100) for patterning a workpiece arranged at an image plane and sensitive to electromagnetic radiation, comprising a source emitting electromagnetic radiation onto an object plane and at least two spatial light modulators each comprising numerous of object pixels, adapted to receive said electromagnetic radiation at said object plane and to relay said electromagnetic radiation toward said workpiece, wherein said electromagnetic radiation is split into at least two beams, which beams will impinge on different spatial light modulators, by a beam splitting device arranged at an optical plane between said spatial light modulators and an illuminator pupil or a conjugate optical plane. The invention also relates to a method for patterning a workpiece with a plurality of spatial ight modulators.

Description

SLM DIRECT WRITER

TECHNICAL FIELD

[0001] The present invention relates to laser lithography, in particular it relates to a method and a device for direct writing of patterns using spatial light modulators.

BACKGROUND OF THE INVENTION

[0002] Modem UV-lithography is searching for new highly parallel writing concepts. Spatial light modulation (SLM) with optical MEMS devices offers such possibilities. An SLM chip may comprise a DRAM-like CMOS circuitry with several million individually addressable pixels on top. Said pixels are deflected due to a difference in electrostatic force between a mirror element and an address electrode. A pattern generator using an SLM is described in US 6 373 619 assigned to the same assignee as this invention. This patent discloses in short a small field stepper, which exposes a series of images of the SLM. A workpiece is arranged on a stage, which is continuously moving and a pulsed electromagnetic radiation source (which could be a pulsed laser, a flash lamp, a flash from a synchrotron light source, etc) flashes and freezes an image of the SLM on the workpiece. The SLM is reprogrammed with a new pattern before each flash so a contiguous image is composed on the workpiece. [0003] In the past, integrated circuits have been manufactured more or less solely by using a number of masks or reticles comprising a pattern of a layer in said integrated circuit. In today's integrated circuits the number of layers could be larger than 30. Said Masks or reticles may be prepared in lithographical manner by using for example electron beams or laser beams for exposing a layer of material sensitive for the type of beam chosen. The mask material is most commonly transmissive on top of one of its sides a thin layer of opaque material is attached. In said thin material the pattern of one layer of said integrated circuit is created. The mask has typically N times larger pattern than the pattern to be printed on the semi-conducting substrate for forming said integrated circuit. The reduction in size is performed in a stepper, which uses the mask(s) for forming said integrated circuit. [0004] More recently, the need to manufacture integrated circuits by means other than using a conventional mask has developed for a number of reasons, for example the price of manufacturing mask(s) has increased due to its complexity to manufacture, small-scale development which needs very small series of integrated circuits, etc.

[0005] Unfortunately, all of the present known techniques for forming integrated circuits without using conventional masks or reticles have drawbacks and limitations. [0006] For example, most direct-writers known in the art are based on electron beams, typically so called shaped beams, where the pattern is assembled from flashes, each defining a simple geometrical figure. Other systems are known which use raster scanning of Gaussian beams. By using a conventional mask writer, which uses beams of electrons or laser beams for forming the pattern on a workpiece, is limited to relatively low scanning speeds, and, perhaps worst of all, can only scan a single dimension.

[0007] SLM writers disclosed in other patent applications, such as WO 01/18606 and US patent application No 09/954,721 by one of the assignees of the present invention and hereby incorporated by reference is related to raster scanning in the sense that it permits a bitmap pattern, but distinct by printing an entire frame of pattern in one flash instead of building the pattern from individual pixels. [0008] A spatial light modulator (SLM) comprises a number of modulator elements, which can be set in a desired way for forming a desired pattern. Reflective SLMs may be exposed to any kind of electromagnetic radiation, for example DUV or EUV for forming the desired pattern on the mask or any other workpiece. [0009J A direct-writing pattern generator for writing certain layers in a semiconductor design directly from data would have a high value to the industry. However, the complexity of modem chips is extremely high and getting higher by every new technology generation. The direct-writer must write the complex pattern not one, but 100 times on a 300 mm wafer.

[0010] What is needed is a method and apparatus, which creates pattern on a workpiece essentially faster and/or more flexible than the prior art techniques.

SUMMARY OF THE INVENTION

[0011] Accordingly, it is an object of the present invention to provide a direct writing method and apparatus, which prints features on a workpiece essentially faster and/or more flexible than prior art. [0012] This object, among others, is according to a first aspect of the invention, attained by an apparatus for patterning a workpiece as claimed in claim 1 and claim 56.

[0013] The invention also relates to a method for patterning a workpiece as claimed in claim 28.

[0014] Further characteristics of the invention, and advantages thereof, will be evident from the detailed description of preferred embodiments of the present invention given hereinafter and the accompanying figures 1-6, which are given by way of illustration only, and thus are not limitative of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 depicts a schematic overview of a first embodiment according to the present invention.

[0016] Figure 2 depicts a schematic illustration of a second embodiment according to the present invention. [0017] Figure 3 depicts schematically a first embodiment of SLM stamps on the workpiece from one writing pass.

[0018] Figure 4 depicts schematically another embodiment of SLM stamps, where

SLM stamps in a first and second pass are displaced from each other in one physical pass. [0019] Figure 5 illustrates a first fan out device.

[0020] Figure 6 illustrates another fan out device.

DETAILED DESCRIPTION

[0021 ] The following detailed description is made with reference to the Figures. Preferred embodiments are described to illustrate the present invention, not to limit its scope, which is defined by the claims. Those of ordinary skill in the art will recognize a variety of equivalent variations on the description that follows. [0022] Further, the preferred embodiments are described with reference to an analogue SLM. It will be obvious to one with ordinary skill in the art that there may be situations when other SLMs than analogue ones will be equally applicable; for example digital SLMs like a digital micromirror device (DMD) made by Texas instruments. Additionally, SLMs may be comprised of reflective or transmissive pixels. Even further, the preferred embodiments are described with reference to an excimer lacer source. It will be obvious to one with ordinary skill in the art that a pulsed electromagnetic radiation source other than an excimer laser may be used by the inventive method, for instance a Nd-YAG laser, ion laser, Ti sapphire laser, free electron laser or other pulsed fundamental frequency lasers, flash lamps, laser plasma sources, synchrotron light sources etc.

[0023] Figure 1 depicts a first embodiment of a pattern generator 100 according to the present invention. Said pattern generator comprising a field stop 105, a first lens arrangement 1 10, an illuminator pupil 112, a beam splitting device 114, a semitransparent beam splitter 116, a first relay lens 118, a first spatial light modulator 120a, a second spatial light modulator 120b, a system pupil 122, a second relay lens 124, an intermediate image plane 126, a tube lens 128, a final aperture 130, a final lens 132, a workpiece 134, an electromagnetic beam 150, 150a, 150b, 152a, and optical axis 160, 170. [0024] The beam of electromagnetic radiation 150 from an electromagnetic radiation source (not shown) is directed onto the first lens arrangement 1 10 via said field stop 105. The field stop 105 has essentially a size and lb mi of one SLM. The field stop 105 is used in order to prohibit light/radiation to impinge on other features than the SLM. [0025] The electromagnetic radiation source may be an excimer laser with an output wavelength at 248nm, 193nm orl 57nm. However wavelength longer or shorter than said wavelength may also be applicable. Said electromagnetic radiation is directed by said first lens arrangement to an illuminator pupil 1 12 at an illuminator pupil plane. Said illuminator pupil 1 12 filters said electromagnetic radiation to a desired degree. An NA at an object plane, which is the plane where the spatial light modulators (SLMs) are arranged, determines the size of the illuminator pupil. The illuminator pupil 1 12 restricts angles of incidence of the electromagnetic radiation passing through the field stop 105.

[0026] The beam will thereafter pass through the beam splitting device 1 14 splitting said beam into two or more beams. For instance may said beam splitting device 1 14 be a diffractive optical element. Examples of diffractive optical elements are a volume holographic element (HOE), a kinoform, a Fresnel zone plate, or a binary optical element (BOE). Instead of a diffractive optical element for splitting said beam into two or more beams, a partially reflecting optical element may be used. Said partially reflecting optical element may be a prism or a facetted mirror. [0027] The beam splitting device may be arranged at an optical plane between said illuminator pupil and said spatial light modulators, which modulators are arranged at an object plane. However, a lens system, e.g., a relay lens system may make it possible to arrange said beam splitting device at another conjugate plane. Said conjugate plane may be an optical equivalent plane, which means that there is a 1 to 1 imaging between the planes. In one embodiment a relay lens system may be arranged between the not illustrated electromagnetic radiation source and said field stop 105, thereby producing a conjugate illuminator aperture plane further away from the spatial light modulators.

[0028] In figure 1 said beam is split into two beams 150a, 150b only for reason of clarity. Said beams may be split into a larger number of beams by one or a plurality of beam splitting devices arranged in sequence. The beams 150a, 150b will then be transmitted through a semitransparent beam splitter allowing said beams to pass through when coming from the direction of the electromagnetic source and reflecting said beams when coming from a direction of the spatial light modulators. [0029] Having passed said semitransparent beam splitter 1 16, said beams 150a, 150b will be directed through a first relay lens 1 18. Said relay lens will make the beams 150a, 150b on said spatial light modulators telecentric.

[0030] Beam 150a will then be directed to SLM 120a and beam 150b will be directed to SLM 120b. The spatial light modulators are in this embodiment illustrated to be reflective spatial light modulators. Said reflective SLMs may comprise micromiiTors being pixel elements in said modulator, however other reflective spatial light modulators are also applicable as for example grating light valves and spatial light modulators based on viscose elastic layers. Said reflective spatial light modulators may come in two categories, deflective and diffractive spatial light modulators, where the deflective are operated in a digital mode and the diffractive are operated in an analog mode. Another type of spatial light modulators, which also may be used in the present invention are transmissive ones for instance SLMs based on liquid crystals.

[0031 ] In one embodiment all SLMs are equal. In another embodiment some of the SLMs may be transmissive and other may be reflective. In yet another embodiment the SLMs are operated differently, i.e., at lest one in an analog mode and at least one in a digital mode. In still another embodiment, a size of pixels in one SLM is different to the size in another SLM. The SLMs may also comprise different numbers of pixel elements. [0032] The relayed beam from the spatial light modulators 120a, 120b are then transmitted through said first relay lens 118 again and thereafter reflected by said semitransparent beam splitter 116, thereby leading said beams into an optical path with an optical axis 170 which is perpendicular to said workpiece 134 at an image plane. Optical axis 160 is perpendicular to said spatial light modulators at the object plane. The dotted line 152b in figure 1 denotes a marginal beam.

[0033] After said beams have been reflected by said semitransparent beam splitter 1 16, said beams 150a, 150b will be directed to the system pupil 122. The system pupil lies in a Fourier plane as the illuminator pupil 112 and said final aperture 130. With an analog SLM first and higher diffraction orders are filtered out by this system pupil, also denoted Fourier aperture.

[0034] The beams will then pass through a second relay lens 124, which will create an intermediate image 126 at an aerial image plane. Beams are then directed to the tube lens 128 and said final lens 132 comprising said final aperture 130. The tube lens 128 and the final lens may make the illumination at image plane telecentric. The final aperture 130, 230 is sized and shaped in order to control stray light at the image plane.

[0035] Beams from different SLMs 120a, 120b will end up on said workpiece 134 at different locations, adjacent to each other or non-adjacent to each other depending on which writing strategy is chosen. Figure 3 illustrates a possible arrangement of stamps from 10 SLMs in a single exposure onto a workpiece 300. The single exposure is defined as the imaging of the SLMs onto the workpiece in one event. [0036] Said single exposure may be intense enough for exposing the layer sensitive to the wavelength used, i.e., single pass strategy. In a multiple pass strategy, individual exposures do not have sufficient intensity for exposing said sensitive layer in itself, but the combination of them will expose said sensitive layer. In figure 3, a first exposure is denoted by filled rectangles, where the rectangles represent the stamps of the SLMs. In a next exposure a stage upon which said workpiece is arranged is moved a distance equal to the width of said stamps on said workpiece, said next exposure is denoted in figure 3 by dashed rectangles. Repeating the action of moving the stage and exposing the workpiece will perform a complete exposure of the workpiece. Between exposures the SLMs are reloaded with a new- pattern description. [0037] A distance between the spatial light modulators in the object plane is in one embodiment greater than corresponding stamps in the image plane. The reason for separating the spatial light modulators in the object plane is to make room for manipulators for each SLM. Said manipulator may tilt the SLM in any direction, allowing every SLM to be parallel and aligned to each other. [0038] The stamps may be non-overlapping or partially overlapping in a multipass writing strategy. The partial overlap may be an integer number of SLM pixels or portions of a SLM pixel plus a possible integer number of SLM pixels. In figure 4 it is illustrated that a single exposure may comprise patterns belonging to a first writing pass, and a second writing pass onto a workpiece 400. Here, said first and second writing passes, in one exposure, are denoted by filled rectangles. The stamps in the first pass are illustrated to be partially displaced to the stamps in the second pass, i.e., partially overlapping. In a next coming exposure may stamps belonging to different writing passes be partially overlapping each other. In figure 4 the second pass in another exposure is denoted by dashed rectangles, which are partially overlapping the stamps belonging to the first pass of a former exposure. The first pass in said another exposure is left out for reason of clarity only.

[0039] For instance, in a two pass writing strategy the first pass may be written with an SLM operated in an analog mode and a second pass with an SLM operated in a digital mode. It is also possible to have a reflective spatial light modulator for one pass and a transmissive spatial light modulator for another pass. In figure 4 the first pass may be written by the SLM operated in a digital mode and the second pass be written with the SLM operated in a digital mode. It is also possible to use SLMs with different capability in the form of line width performance. In figure 4 said first pass may be written with a coarse pattern definition by using an SLM with large pixels and/or a lesser number of pixels compared to the SLMs used to write the second pass. The second pass may use high performance spatial light modulators in order to adjust the dimensions of the lines to be patterned and/or creating pattern enhancement features in the mask pattern. The pattern enhancement features most often have smaller dimensions than a feature to which it is corresponded. By separating the pattern to be written, into the pattern itself and pattern enhancement features, could increase the writing speed. Pattern enhancement features could for instance be corner enhancement features to increase the sharpness of corners and optical proximity corrections in the form of scatter bars or other features, which takes into account the density of the pattern.

[0040] In one embodiment the radiation intensity from different SLMs may differ on order to enhance the critical dimension control (CDC). Introducing an attenuator in front of at least one spatial light modulator may alter said intensity. In one embodiment with multipass writing strategy a first pass is written with a first intensity and a second pass with another intensity onto the workpiece, where said first and second passes may belong to the same exposure as indicated in figure 4. [0041] Figure 2 illustrates another embodiment according to the present invention. The difference between figure 1 and 2 lies in the arrangement of the SLM and the number of said SLM, everything else is equal in figure 1 and figure 2 and therefore reference numerals, depicting the same feature, are in figure 1 starting with a 1 and in figure 2 starting with a 2.

[0042] In figure 2 the pattern generator is illustrated to comprise four spatial light modulators 220a, 220b, 220c, 220d. The beams are fanned out to said SLMs by means of a fan out device. [0043] Figure 5 illustrates a reflective octagon 500, which fans out incoming beams 510a, 510b, 510c, and 510d into four different directions X, Y, Z, W. Somewhere along said directions X, Y, Z, W another fan out device is arranged or a spatial light modulator. Figure 6 illustrates a prism 600, which fans out incoming beams 610a, 610b, 610c, and 610d into 2 different directions A, B. Here again somewhere along said directions A, B another fan out device is arranged or a spatial light modulator. The fan out device may be arranged in the optical path between said relay lens 1 18, 218 and said spatial light modulators 120, 220 (not illustrated in figure 1 or 2). [0044] Each SLM in figure 2 may be mounted on a module, which supplies data, purge gas, cooling and does mechanical alignment. Such module requires most often some space which easily can be established by said fan out device. [0045] A stage image detector may measure focus, translation, rotation, tilt and curvature/flatness of said SLM. Any deviation of requested specification of said focus, translation, rotation, tilt and curvature/flatness may be adjusted by an appropriate adjustment of the stage and/or a lens arrangement arranged between said spatial light modulator and said workpiece. A part of the alignment of said SLMs may also be performed in a data path, which carries the pattern information to be loaded in the different SLMs. For instance, a rotational error of one or a plurality of said SLMs may be performed by rotating the digital description of the pattern to be printed on said workpiece for one or more SLMs.

10046] While the present invention is disclosed by reference to the preferred embodiments and examples detailed above, it is understood that these examples are intended in an illustrative rather than in a limiting sense. It is contemplated that modifications and combinations will readily occur to those skilled in the art, which modifications and combinations will be within the spirit of the invention and the scope of the following claims.

Claims

1. An apparatus (100) for patterning a workpiece arranged at an image plane and sensitive to electromagnetic radiation, comprising:

a source emitting electromagnetic radiation onto an object plane,

at least two spatial light modulators each comprising numerous object pixels, adapted to receive said electromagnetic radiation at said object plane and to relay said electromagnetic radiation toward said workpiece, wherein said electromagnetic radiation is split into at least two beams, which beams will impinge on different spatial light modulators, by a beam splitting device arranged at an optical plane between said spatial light modulators and an illuminator pupil or a conjugate optical plane.

2. The apparatus according to claim 1, wherein said beam splitting device is a diffractive optical element.

3. The apparatus according to claim 1 , wherein relayed images of said at least two spatial light modulators will appear on said workpiece non adjacent to each other.

4. The apparatus according to claim 1, wherein at least one spatial light modulator comprising pixel elements being reflective micro mirrors.

5. The apparatus according to claim 4, wherein said reflective spatial light modulator comprises micro mirror elements operated in an analogue mode.

6. The apparatus according to claim 4, wherein said reflective spatial light modulator comprises micro mirror elements operated in a digital mode.

7. The apparatus according to claim 1, wherein at least one of said spatial light modulators is a transmissive spatial light modulator comprising liquid crystal elements operated in an analogue mode.

8. The apparatus according to claim 5, wherein at least one of said spatial light modulators is a transmissive spatial light modulator comprising liquid crystal elements operated in a digital mode.

9. The apparatus according to claim 1, wherein, in at least one single exposure of said at least two spatial light modulators for patterning said workpiece, at least one of said at least two spatial light modulators belongs to a first writing pass and at least one of said at least two spatial light modulators belongs to a second writing pass.

10. The apparatus according to claim 1, wherein at least two relayed images of said at least two spatial light modulators in a single exposure comprise patterns not equal to each other.

1 1. The apparatus according to claim 1, wherein said beam splitting element is at least a partially reflecting element.

12. The apparatus according to claim 2, wherein said di fractive optical element is one of the groups of elements of: volume holographic element (HOE), kinofoπns, Fresnel zone plate, or binary optical element (BOE).

13. The apparatus according to claim 1 1, wherein said at least partially reflecting optical element is one of the groups of elements of: prism or facetted mirror.

14. The apparatus according to claim 1 , wherein said source emitting electromagnetic radiation is an excimer laser.

15. The apparatus according to claim 15, wherein said laser has an output being one of the group of wavelengths:248 nm, 193 nm, 157 nm, 13 nm.

16. The apparatus according to claim 1, wherein said spatial light modulator is a grating light valve.

17. The apparatus according to claim 1, further comprising a Fourier filter adapted to filter said electromagnetic radiation in a Fourier space.

18. The apparatus according to claim 1, wherein at least two relayed images of said at least two spatial light modulators in single exposure belong to at least a first and a second writing pass.

19. The apparatus according to claim 1, wherein pixels in one of said spatial light modulators are of different size compared to pixels belonging to another spatial light modulator.

20. The apparatus according to claim 1, wherein pixels in one of said spatial light modulators are of different shape compared to pixels belonging to another spatial light modulator.

21. The apparatus according to claim 1, wherein said spatial light modulators are arranged on manipulators, which manipulators is operated independently of each other.

22. The apparatus according to claim 1 , wherein said spatial light modulators are separated at a larger distance from each other than corresponding images in said image plane.

23. The apparatus according to claim 1 , wherein at least one image of an SLM in a first writing pass is displaced to an image of an SLM in another writing pass.

24. The apparatus according to claim 23, wherein said displaced images come from different spatial light modulators.

25. The apparatus according to claim 23, wherein said displaced images come from one spatial light modulator.

26. The apparatus according to claim 23, wherein said images are displaced an integer number of SLM pixels.

27. The apparatus according to claim 23, wherein said images are displaced at least a portion of an SLM pixel.

28. A method for patterning a workpiece arranged at an image plane and sensitive to electromagnetic radiation, comprising the actions of:

emitting electromagnetic radiation onto an object plane,

splitting said electromagnetic radiation into at least two beams by a beam splitting device arranged at an optical plane between an object plane and an illuminator pupil or any other conjugate optical plane,

impinging said at least two beams on different spatial light modulators,

receiving said electromagnetic radiation at said object plane by at least two spatial light modulators each comprising numerous of object pixels,

directing said electromagnetic radiation from said at least two spatial light modulators toward said workpiece.

29. The method according to claim 28, wherein said beam splitting device is a diffractive optical element.

30. The method according lo claim 28, wherein relayed images of said at least two spatial light modulators will appear on said workpiece non adjacent to each other.

31. The method according to claim 28, wherein said at least two spatial light modulators comprising pixel elements being reflective micro mirrors.

32. The method according to claim 28, wherein at least one of said at least two spatial light modulators is a reflective spatial light modulator and at least one of said at least two spatial light modulators is a transmissive spatial light modulator.

33. The method according to claim 32, wherein said reflective spatial light modulator comprises micro mirror elements operated in an analogue mode.

34. The method according to claim 32, wherein said reflective spatial light modulator comprises micro mirror elements operated in a digital mode.

35. The method according to claim 32, wherein said transmissive spatial light modulator comprises liquid crystal elements operated in an analogue mode.

36. The method according to claim 32, wherein said transmissive spatial light modulator comprises liquid crystal elements operated in a digital mode.

37. The method according to claim 28, wherein, in at least one single exposure of said at least two spatial light modulators for patterning said workpiece, at least one of said at least two spatial light modulators belongs to a first writing pass and at least one of said at least two spatial light modulators belongs to a second writing pass.

38. The method according to claim 28, wherein at least two relayed images of said at least two spatial light modulators in single exposure comprise patterns not equal to each other.

39. The method according lo claim 28, wherein said beam splitting element is a refractive optical element.

40. The method according to claim 28, wherein said diffractive optical element is one of the groups of elements of: volume holographic element (HOE), kinoforms, Fresnel zone plate, or binary optical element (BOE).

41. The method according to claim 39, wherein said refractive optical element is one of the groups of elements of: prism or facetted mirror.

42. The method according to claim 28, wherein said source emitting electromagnetic radiation is an excimer laser.

43. The method according to claim 42, wherein said laser has an output being one of the group of wavelengths: 248 nm, 193 nm, 157 nm, 13 nm.

44. The method according to claim 28, wherein said spatial light modulator is a grating light valve.

45. The method according to claim 28, further comprising a Fourier filter adapted to filter said electromagnetic radiation in a Fourier space.

46. The method according to claim 28, wherein at least two relayed images of said at least two spatial light modulators in single exposure belong to at least a first and a second writing pass.

47. The method according to claim 28, wherein pixels in one of said spatial light modulators are of different size compared to pixels belonging to another spatial light modulator.

48. The method according to claim 28, wherein pixels in one of said spatial light modulators are of different shape compared to pixels belonging to another spatial light modulator.

49. The method according to claim 28, wherein said spatial light modulators are arranged on manipulators, which manipulators is operated independently of each other.

50. The method according to claim 28, wherein said spatial light modulators are separated at a larger distance from each other than corresponding images in said image plane.

- 51. The method according to claim 28, wherein at least one image of an SLM in a first writing pass is displaced to an image of an SLM in another writing pass.

52. The method according to claim 51 , wherein said displaced images come from different spatial light modulators.

53. The method according to claim 51 , wherein said displaced images come from one spatial light modulator.

54. The method according to claim 51, wherein said images are displaced an integer number of SLM pixels.

55. The method according to claim 51, wherein said images are displaced at least a portion of an SLM pixel.

56. An apparatus for patterning a workpiece arranged at an image plane and sensitive to electromagnetic radiation, comprising:

a source emitting electromagnetic radiation onto an object plane comprising a plurality of spatial light modulators separated at a larger distance from each other than corresponding images in said image plane.

57. The apparatus according to claim 56, wherein said images are non overlapping each other.

58. The apparatus according to claim 56, wherein said images are partially overlapping each other.

59. The apparatus according to claim 57, wherein at least one image belongs to a first writing pass and at least one image belongs to a second writing pass.