WO2004074720A3 - Anneau d'etancheite pour ensemble soupape pendulaire - Google Patents

Anneau d'etancheite pour ensemble soupape pendulaire Download PDF

Info

Publication number
WO2004074720A3
WO2004074720A3 PCT/US2003/041268 US0341268W WO2004074720A3 WO 2004074720 A3 WO2004074720 A3 WO 2004074720A3 US 0341268 W US0341268 W US 0341268W WO 2004074720 A3 WO2004074720 A3 WO 2004074720A3
Authority
WO
WIPO (PCT)
Prior art keywords
seal ring
bores
valve assembly
housing
slide plate
Prior art date
Application number
PCT/US2003/041268
Other languages
English (en)
Other versions
WO2004074720A2 (fr
Inventor
Paul D Lucas
Original Assignee
Mks Instr Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mks Instr Inc filed Critical Mks Instr Inc
Priority to JP2004568591A priority Critical patent/JP4421480B2/ja
Priority to EP03800173A priority patent/EP1595091B1/fr
Priority to DE60314014T priority patent/DE60314014T2/de
Publication of WO2004074720A2 publication Critical patent/WO2004074720A2/fr
Publication of WO2004074720A3 publication Critical patent/WO2004074720A3/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/04—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members
    • F16K3/06—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members in the form of closure plates arranged between supply and discharge passages
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K25/00—Details relating to contact between valve members and seats
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/04—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members
    • F16K3/10—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members with special arrangements for separating the sealing faces or for pressing them together
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sliding Valves (AREA)
  • Details Of Valves (AREA)

Abstract

L'invention porte sur un ensemble soupape comprenant un corps pourvu d'un canal d'écoulement, une plaque coulissante pouvant se déplacer entre une position fermée et une position ouverte, et un anneau d'étanchéité entourant le canal d'écoulement et venant en contact avec la plaque coulissante en position fermée et se désolidarisant de celle-ci en position ouverte. L'anneau d'étanchéité comporte une pluralité d'alésages alignés, ces trous étant formés dans une surface adjacente du corps. Chaque alésage comprend un dégagement formant une lèvre. Une pluralité d'éléments de fixation sont disposés dans les trous de la surface annulaire du corps et s'étendent dans les alésages correspondants de l'anneau d'étanchéité. Les parois latérales des éléments de fixation comportent des fentes qui mordent sur les lèvres des alésages de l'anneau d'étanchéité lorsque les éléments de fixation sont insérés dans ces alésages, l'anneau d'étanchéité effectuant alors une rotation.
PCT/US2003/041268 2003-02-20 2003-12-24 Anneau d'etancheite pour ensemble soupape pendulaire WO2004074720A2 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2004568591A JP4421480B2 (ja) 2003-02-20 2003-12-24 振り子型弁アッセンブリ用シールリング
EP03800173A EP1595091B1 (fr) 2003-02-20 2003-12-24 Anneau d'etancheite pour ensemble soupape pendulaire
DE60314014T DE60314014T2 (de) 2003-02-20 2003-12-24 Dichtungsring für eine pendelventilanordnung

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/369,952 US6863256B2 (en) 2003-02-20 2003-02-20 Seal ring for pendulum valve assembly
US10/369,952 2003-02-20

Publications (2)

Publication Number Publication Date
WO2004074720A2 WO2004074720A2 (fr) 2004-09-02
WO2004074720A3 true WO2004074720A3 (fr) 2005-03-10

Family

ID=32868130

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2003/041268 WO2004074720A2 (fr) 2003-02-20 2003-12-24 Anneau d'etancheite pour ensemble soupape pendulaire

Country Status (6)

Country Link
US (1) US6863256B2 (fr)
EP (1) EP1595091B1 (fr)
JP (1) JP4421480B2 (fr)
KR (1) KR100891032B1 (fr)
DE (1) DE60314014T2 (fr)
WO (1) WO2004074720A2 (fr)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7278444B2 (en) * 2005-02-22 2007-10-09 Mks Instruments, Inc. Valve assembly having improved pump-down performance
CN100455856C (zh) * 2007-04-02 2009-01-28 石家庄阀门一厂股份有限公司 眼镜阀的自动补偿夹紧密封装置
ITTO20080125A1 (it) * 2008-02-19 2008-05-20 Roberto Ravetti Valvola piatta ad ingombro ridotto
CN102171098B (zh) * 2008-10-03 2014-06-25 B/E航空公司 用于真空排污系统的冲洗阀和真空发生器
TW201124655A (en) * 2009-09-03 2011-07-16 Ulvac Inc Gate valve
JP2013011289A (ja) * 2011-06-28 2013-01-17 Tokyo Electron Ltd ゲートバルブ及びそれを用いた基板処理システム
US8833383B2 (en) 2011-07-20 2014-09-16 Ferrotec (Usa) Corporation Multi-vane throttle valve
KR101528458B1 (ko) * 2013-01-18 2015-06-18 (주) 유앤아이솔루션 슬라이딩 역압 차단 밸브
JP6507516B2 (ja) * 2014-08-06 2019-05-08 株式会社島津製作所 真空バルブ
TWI666401B (zh) * 2016-10-04 2019-07-21 日商愛發科股份有限公司 閘閥
US10197166B2 (en) * 2016-12-12 2019-02-05 Sumitomo Heavy Industries, Ltd. Vacuum gate valve
JP2018112259A (ja) * 2017-01-12 2018-07-19 株式会社島津製作所 スライドバルブ
CN106979351B (zh) * 2017-05-18 2019-04-26 浙江工贸职业技术学院 一种摆动式进料阀
CN106969160B (zh) * 2017-05-22 2019-07-05 张翼 一种摆动阀
KR102151172B1 (ko) * 2018-02-14 2020-09-02 프리시스 주식회사 팬듈럼 게이트 밸브
WO2019212226A1 (fr) * 2018-04-30 2019-11-07 티에스케이 주식회사 Purgeur d'eau de condensation
US10676673B2 (en) * 2018-11-13 2020-06-09 Deltavalve, Llc Systems and methods for valve sealing
CN112834277B (zh) * 2019-11-22 2023-08-29 北方工业大学 一种可连续使用的流体取送样密闭接口组件
CN114922994B (zh) * 2022-06-30 2023-09-15 靖江佳佳精密机械科技有限公司 一种气驱动式密封真空阀门

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5577707A (en) * 1995-12-18 1996-11-26 Vat Holding Ag Slide valve
US6328051B1 (en) * 2000-06-28 2001-12-11 Mks Instruments, Inc. Dual pendulum valve assembly
US6422607B1 (en) * 1998-06-01 2002-07-23 Micron Technology, Inc. Ramp-lock fitting device

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5873562A (en) 1996-01-29 1999-02-23 Vat Holding Ag Control apparatus for controlling gas flow in a molecular region
US6161576A (en) 1999-06-23 2000-12-19 Mks Instruments, Inc. Integrated turbo pump and control valve system
US6089537A (en) 1999-06-23 2000-07-18 Mks Instruments, Inc. Pendulum valve assembly
US6409149B1 (en) 2000-06-28 2002-06-25 Mks Instruments, Inc. Dual pendulum valve assembly with valve seat cover

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5577707A (en) * 1995-12-18 1996-11-26 Vat Holding Ag Slide valve
US6422607B1 (en) * 1998-06-01 2002-07-23 Micron Technology, Inc. Ramp-lock fitting device
US6328051B1 (en) * 2000-06-28 2001-12-11 Mks Instruments, Inc. Dual pendulum valve assembly

Also Published As

Publication number Publication date
US6863256B2 (en) 2005-03-08
JP4421480B2 (ja) 2010-02-24
DE60314014T2 (de) 2008-01-17
EP1595091A2 (fr) 2005-11-16
KR100891032B1 (ko) 2009-03-31
WO2004074720A2 (fr) 2004-09-02
KR20050117522A (ko) 2005-12-14
US20040164264A1 (en) 2004-08-26
DE60314014D1 (de) 2007-07-05
JP2006514237A (ja) 2006-04-27
EP1595091B1 (fr) 2007-05-23
EP1595091A4 (fr) 2006-05-03

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