WO2004061308A1 - Microbuses a membrane passive - Google Patents

Microbuses a membrane passive Download PDF

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Publication number
WO2004061308A1
WO2004061308A1 PCT/US2003/036081 US0336081W WO2004061308A1 WO 2004061308 A1 WO2004061308 A1 WO 2004061308A1 US 0336081 W US0336081 W US 0336081W WO 2004061308 A1 WO2004061308 A1 WO 2004061308A1
Authority
WO
WIPO (PCT)
Prior art keywords
valve
fluid
membrane sheet
microfluidic
passive
Prior art date
Application number
PCT/US2003/036081
Other languages
English (en)
Inventor
Xunhu Dai
Andrew Christie
Chenggang Xie
Original Assignee
Freescale Semiconductor, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Freescale Semiconductor, Inc. filed Critical Freescale Semiconductor, Inc.
Priority to AU2003298633A priority Critical patent/AU2003298633A1/en
Publication of WO2004061308A1 publication Critical patent/WO2004061308A1/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10—Valves; Arrangement of valves
    • F04B53/1037—Flap valves
    • F04B53/1047—Flap valves the valve being formed by one or more flexible elements
    • F04B53/106—Flap valves the valve being formed by one or more flexible elements the valve being a membrane
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0015—Diaphragm or membrane valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0048—Electric operating means therefor using piezoelectric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0055—Operating means specially adapted for microvalves actuated by fluids
    • F16K99/0057—Operating means specially adapted for microvalves actuated by fluids the fluid being the circulating fluid itself, e.g. check valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/008—Multi-layer fabrications
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/0094—Micropumps

Definitions

  • the present invention relates to micropumps, and more particularly, in one representative and exemplary embodiment, to piezoelectrically actuated micropumps having passive membrane valves for improved performance and efficiency in microfluidic applications.
  • microfluidic technology has generally been driven by parallel ontological advancements in the commercial electronics industry with an ever-increasing demand for sophisticated devices having reduced part counts, weights, form factors and power consumption while improving or otherwise maintaining overall device performance.
  • advancement of microfluidic technology has met with some success in the areas of packaging and the development of novel architectures directed to achieving many of these aims at relatively low fabrication cost.
  • microfluidic systems based on for example, multilayer laminate substrates with highly integrated functionality, have been of particular interest.
  • Monolithic substrates formed from laminated ceramic have been generally shown to provide structures that are relatively inert or otherwise stable to most chemical reactions as well as tolerant to high temperatures. Additionally, monolithic substrates typically provide for miniaturization of device components, thereby improving circuit and/or fluidic channel integration density.
  • Potential applications for integrated microfluidic devices include, for example, fluidic management of a variety of microsystems for life science and portable fuel cell applications.
  • One representative application includes the use of ceramic materials to form micro-channels and/or cavities within a ceramic structure to define, for example, a monolithic micropump device.
  • micropumps having high aspect ratio integrated valves suitably adapted for incorporation with, for example, a monolithic package.
  • the present invention provides a system and method for fluid transport in microfluidic systems.
  • a representative design is disclosed as comprising a fluid inlet cavity, a fluid outlet cavity, a passive membrane valve disposed substantially between each of the cavities, and means for moving fluid through the device.
  • An integrated micropump in accordance with one embodiment of the present invention, may be formed utilizing multilayer ceramic technology in which passive membrane valves are integrated into a ceramic structure; however, the disclosed system and method may be readily and more generally adapted for use in any fluid transport system.
  • the present invention may embody a device and/or method for providing integrated pumping and/or valving systems for use in fuel cell fuel delivery and/or partitioning applications.
  • One representative advantage of the present invention would allow for improved process control and manufacturing of integrated micropump systems at substantially lower cost. Additional advantages of the present invention will be set forth in the Detailed Description which follows and may be obvious from the Detailed Description or may be learned by practice of exemplary embodiments of the invention. Still other advantages of the invention may be realized by means of any of the instrumentalities, methods or combinations particularly pointed out in the Claims.
  • FIG. 1 representatively depicts a cross-section, elevation view of a micropump device package in accordance with one embodiment of the present invention
  • FIG. 2 representatively illustrates a cross-section, elevation view of the micropump device package of FIG. 1 during an intake stroke in accordance with one operational embodiment of the present invention
  • FIG. 3 representatively illustrates a cross-section, elevation view of the micropump device package of FIG. 1 during an output stroke in accordance with another operational embodiment of the present invention
  • FIG. 4 representatively illustrates a valve membrane sheet in accordance with one exemplary embodiment of the present invention
  • FIG. 5 representatively illustrates a valve membrane sheet in accordance with another exemplary embodiment of the present invention
  • FIG. 6 representatively illustrates a valve membrane sheet in accordance with still another exemplary embodiment of the present invention
  • FIG. 14 FIG.
  • FIG. 7 representatively illustrates a valve membrane sheet in accordance with yet another exemplary embodiment of the present invention.
  • fluid As used herein, the terms “fluid”, “fluidic” and/or any contextual, variational or combinative referent thereof, are generally intended to include anything that may be regarded as at least being susceptible to characterization as generally referring to a gas, a liquid, a plasma and/or any matter, substance or combination of compounds substantially not in a solid or otherwise effectively immobile condensed phase. As used herein, the terms “inlet” and “outlet” are generally not used interchangeably.
  • inlet may generally be understood to comprise any cross- sectional area or component feature of a device, the flux through which tends to translate fluid from a volume element substantially external to the device to a volume element substantially internal to the device; whereas “outlet” may be generally understood as referring to any cross- sectional area or component feature of a device, the flux through which tends to translate fluid from a volume element substantially internal to the device to a volume element substantially external to the device.
  • liquid and “gas” may generally be used interchangeably and may also be understood to comprise, in generic application, any fluid and/or any translationally mobile phase of matter.
  • the term "purged”, as well as any contextual or combinative referent or variant thereof, is generally intended to include any method, technique or process for moving a volume element of fluid through the outlet of a device so as to dispose or otherwise positionally locate the "purged" volume element external to the device.
  • the terms “valve” and “valving”, as well as any contextual or combinative referents or variants thereof, are generally intended to include any method, technique, process, apparatus, device and/or system suitably adapted to control, affect or otherwise parameterize fluid flow scalar quantities (e.g., volume, density, viscosity, etc.) and/or fluid flow vector quantities (i.e., direction, velocity, acceleration, jerk, etc.).
  • pump and “pumping”, or any contextual or combinative referents or variants thereof, are generally intended to include any method, technique, process, apparatus, device and/or system suitably adapted to flow or otherwise translate a fluid volume element from a first location to a second location.
  • pump and “pumping”, or any contextual or combinative referents or variants thereof, are generally intended to include any method, technique, process, apparatus, device and/or system suitably adapted to flow or otherwise translate a fluid volume element from a first location to a second location.
  • a passive membrane valve 400 as generally depicted in FIG. 4, is disclosed for application with a microfluidic pump.
  • Membrane valve 400 generally comprises opening regions 410 for providing a path for fluid transport across the valve membrane.
  • a laminar micropump system as generally depicted in FIG. 1 is disclosed.
  • the system generally includes at least one substantially flexible or otherwise at least partially deformable material comprising a valve membrane sheet 130, 160.
  • a piezoelectric membrane 120 is anchored to one surface of substrate 100 via anchoring element 110.
  • Membrane sheets 130, 160 generally form a substantially hermetic seal when sealed against seating element 170.
  • seating element 170 may comprise a glass ring or other substantially annular feature demonstrating relatively low surface roughness.
  • the disclosed valving system in certain representative embodiments, may include features to control the effective magnitude of cross-sectional area presented for fluid acceptance in order to at least partially control or otherwise parameterize fluid flux through said inlet opening 140 and/or outlet opening 150.
  • inlet opening 140 and/or outlet opening 150 may comprise a taper, a flare, a constriction, a plurality of corrugations, a bend, a pinch, an oblique plane of fluid acceptance (e.g., wherein inlet opening 140 and/or outlet opening 150 facial alignment generally may be other than normal to the instantaneous vector of fluid flow) or such other means, features and/or methods now known, subsequently developed or otherwise hereafter described in the art.
  • the operation of membrane valves 130, 160 generally provide passive means for substantially preventing or otherwise controlling or restricting the backflow of purged outlet fluid into inter alia the pumping chamber.
  • outlet membrane valve 160 generally permits fluid flow when the flow vector (i.e., the direction of fluid pressure; also termed the "fluid transport gradient") corresponds to translation of fluid volume elements away from inlet opening 140 through fluidic channels toward outlet opening 150.
  • outlet flapper valve 160 in accordance with representative aspects of the present invention, conjunctively provides for effective prevention of fluid flow to outlet opening 150 when the instantaneous fluid transport gradient corresponds to translation of fluid volume elements away from outlet opening 150 through fluidic channels toward inlet opening 140 (i.e., "backflow").
  • the pumping chamber may further or alternatively comprise a mixing chamber, a reservoir chamber, a reaction chamber and/or a fuel reformer chamber (in the case of application of the present invention, for example, to fuel cell systems).
  • a mixing chamber for example, a laminar substrate 100 is provided for the fabrication of a piezo-driven micropump.
  • Outlet opening 150 is suitably configured to provide a path for fluid transport to the pumping chamber.
  • Fluidic channels provide fluidic communication between the inlet opening 140 and outlet opening 150.
  • Skilled artisans will appreciate that other channel configurations and/or circuit geometries may be employed in order to define inter alia various fluidic transport paths, for example, in a laminar substrate in accordance with various other embodiments of the present invention.
  • bypass as it may refer to valving devices and/or function, generally connotes the ability of a valve and/or valve device feature so characterized, to actuate the operation of restriction, constriction and/or dilation of fluid inlet acceptance and/or fluid outlet purging in effective correspondence to the forces nominally inherent to the translation of fluid volume elements through the valve device.
  • the fluidic forces when the fluid flow is in a first direction, the fluidic forces operate to actuate the valve into a first conformation (e.g., substantially open); and, when the fluid flow is in a second direction (i.e., for a binary valve, generally given as the "opposite direction"), the fluidic forces operate to actuate the valve into a second conformation (e.g., substantially closed).
  • first conformation e.g., substantially open
  • a second conformation e.g., for a binary valve, generally given as the "opposite direction
  • passive membrane valves 130, 160 may be fabricated from silicone, silicone-based rubber, rubber, metal, metal alloy, polymer or such other materials whether now known or subsequently discovered or otherwise hereafter described in the art.
  • the membrane valves may comprise a silicone-based rubber material.
  • passive membrane valves 130, 160 may optionally comprise means for attachment, such as, for example, an extension tab having a substantially annular retaining ring for securing or otherwise at least partially immobilizing membrane valve 130, 160 within device package substrate 100.
  • Various other attachment means and/or packaging features for retaining, localizing or otherwise disposing check valves known in the art may be used as well.
  • FIG. 2 generally depicts two passive membrane valves 230, 160 disposed within an exemplary monolithic package substrate 100 during the intake pumping stroke.
  • actuator element 220 distends away from the substrate surface so as to generally enlarge the volume of the pumping chamber.
  • inlet valve membrane sheet 230 distends away and unseats from the glass sealing ring seating element beneath the membrane sheet.
  • pump actuator may comprise a piezoelectric micropump element.
  • piezoelectric element 220 may be secured to the package substrate 100 by, for example, solder 110.
  • substrate 100 may comprise solder-wettable features that are generally provided to permit secure solder attachment of piezoelectric element 220 and/or a cover.
  • piezoelectric element 220 and/or a cover may include, for example: epoxy, adhesive and/or such other attachment means and/or methods whether now known or hereafter described in the art.
  • piezoelectric element 220 may alternatively be integrated within the package substrate; for example, between ceramic layers in a position substantially internal to the device as the package is built up.
  • piezoelectric element 120 operates as a deformable diaphragm membrane whose deformation (i.e., "stroke volume") causes oscillating over- and under-pressures in the pump chamber.
  • the pump chamber in an exemplary embodiment, may be bounded by, for example, two passive membrane valves 130, 160.
  • the pump actuation mechanism 120 need not be limited to piezoelectric actuation, but may alternatively, sequentially or conjunctively be driven by electrostatic or thermopneumatic actuation or such other means and/or methods now known, subsequently derived or otherwise hereafter described in the art.
  • actuation membrane deflects during a pump cycle generally defines the stroke volume ⁇ V .
  • volume may be used to express the compression ratio ⁇ . Due in part to the relatively small stroke of micro-actuators and the relatively large
  • the pressure cycles i.e., "pressure waves" generated from the actuation supply and pump modes typically operate to alternately switch the passive membrane valves.
  • the pressure waves would ideally propagate from the actuation diaphragm to the valves with no net pressure loss - in which case, the compression ratio is generally not regarded as an important metric of pump performance and/or efficiency.
  • the fluid medium is not ideally incompressible, there exists a compressibility factor > 0 which may be employed to characterize the tendency of a real fluid to dampen the propagation of the actuation pressure wave Ap . If the pressure change ⁇ p falls below
  • p' e.g., the threshold pressure differential for actuation
  • ⁇ for liquid micropumps may be expressed as ⁇ liquid ⁇ .
  • V 0 generally may not exceed 10ml. Skilled artisans, however, will
  • adiabatic coefficient ⁇ may be taken as equal to unity.
  • volume V 0 for the same system adapted for the micropumping of air
  • the actuation pressure wave will be dampened in an amount that may be calculated if the volume of the gas bubble is substituted for the dead volume in the appropriate equation presented vide supra. If the gas bubble volume becomes so large that the actuation pressure wave falls below the threshold valve actuation pressure, the micropump will fail. Consequently, in the limit of the entire pump chamber volume being filled with a gas, the operational design criteria for liquid self-priming pumps converges to the design criteria for those of gas micropumps. [0034] Additionally, in practical applications, the design criteria may even need to be more stringent to account for higher-order fluid dynamics. For example, self-priming liquid micropumps must typically suck the liquid meniscus from the inlet 140 into the pump chamber, thereby increasing the threshold critical pressure p' in parity with the surface tension of
  • Opening regions may comprise symmetric patterns, asymmetric patterns, polygonal geometries 510, slits 610 and/or fanciful or parametric designs 710 as generally depicted, for example, in membrane valve sheets 500, 600, 700 corresponding to Figures 5, 6 and 7 respectively.
  • very low frequency actuation of the micropump was able to achieve flow rates in excess of 1.5 mL/min. Skilled artisans will appreciate that low frequency operation generally corresponds to low power consumption. Additionally, when driven with a sinusoidal signal, near silent operation was observed.

Abstract

Selon la présente invention, un dispositif exemplaire de transport microfluidique comprend une feuille de membrane à buse (400), un canal d'entrée (140) et un canal de sortie (150). Cette feuille de membrane à buse permet de confiner le transport de fluide du canal d'entrée au canal de sortie où ledit fluide est purgé et elle engendre un dispositif de prévention et de diminution des cas de fluide purgé entrant à nouveau dans le canal d'entrée. Cette invention a aussi trait à des caractéristiques et à des spécifications qui peuvent, de façons diverses, être commandées, adaptées voire facultativement modifiées, afin d'améliorer le fonctionnement de micropompes dans une application microfluidique quelconque.
PCT/US2003/036081 2002-12-18 2003-11-07 Microbuses a membrane passive WO2004061308A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2003298633A AU2003298633A1 (en) 2002-12-18 2003-11-07 Passive membrane microvalves

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/323,035 US20040120836A1 (en) 2002-12-18 2002-12-18 Passive membrane microvalves
US10/323,035 2002-12-18

Publications (1)

Publication Number Publication Date
WO2004061308A1 true WO2004061308A1 (fr) 2004-07-22

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2003/036081 WO2004061308A1 (fr) 2002-12-18 2003-11-07 Microbuses a membrane passive

Country Status (3)

Country Link
US (1) US20040120836A1 (fr)
AU (1) AU2003298633A1 (fr)
WO (1) WO2004061308A1 (fr)

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