WO2004040620A3 - Procede et appareil destine a la mise en oeuvre de mesure ou d'instrumentation sur un equipement de production - Google Patents
Procede et appareil destine a la mise en oeuvre de mesure ou d'instrumentation sur un equipement de production Download PDFInfo
- Publication number
- WO2004040620A3 WO2004040620A3 PCT/US2003/033715 US0333715W WO2004040620A3 WO 2004040620 A3 WO2004040620 A3 WO 2004040620A3 US 0333715 W US0333715 W US 0333715W WO 2004040620 A3 WO2004040620 A3 WO 2004040620A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- enclosure
- instrumentation
- production equipment
- module
- process tool
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67775—Docking arrangements
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU2003286648A AU2003286648A1 (en) | 2002-10-25 | 2003-10-24 | Method and apparatus for implementing measurement or instrumentation on production equipment |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US42126802P | 2002-10-25 | 2002-10-25 | |
US60/421,268 | 2002-10-25 | ||
US10/693,170 | 2003-10-23 | ||
US10/693,170 US20040090152A1 (en) | 2002-10-25 | 2003-10-23 | Method and apparatus for implementing measurement or instrumentation on production equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2004040620A2 WO2004040620A2 (fr) | 2004-05-13 |
WO2004040620A3 true WO2004040620A3 (fr) | 2009-08-27 |
Family
ID=32233436
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2003/033715 WO2004040620A2 (fr) | 2002-10-25 | 2003-10-24 | Procede et appareil destine a la mise en oeuvre de mesure ou d'instrumentation sur un equipement de production |
Country Status (3)
Country | Link |
---|---|
US (1) | US20040090152A1 (fr) |
AU (1) | AU2003286648A1 (fr) |
WO (1) | WO2004040620A2 (fr) |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4532970A (en) * | 1983-09-28 | 1985-08-06 | Hewlett-Packard Company | Particle-free dockable interface for integrated circuit processing |
US5733024A (en) * | 1995-09-13 | 1998-03-31 | Silicon Valley Group, Inc. | Modular system |
US6134107A (en) * | 1998-10-19 | 2000-10-17 | International Business Machines Corporation | Reverse convective airflow cooling of computer enclosure |
US6135698A (en) * | 1999-04-30 | 2000-10-24 | Asyst Technologies, Inc. | Universal tool interface and/or workpiece transfer apparatus for SMIF and open pod applications |
US6138721A (en) * | 1997-09-03 | 2000-10-31 | Asyst Technologies, Inc. | Tilt and go load port interface alignment system |
US6193339B1 (en) * | 1999-04-12 | 2001-02-27 | Inclose Design, Inc. | Docking adapter for memory storage devices |
-
2003
- 2003-10-23 US US10/693,170 patent/US20040090152A1/en not_active Abandoned
- 2003-10-24 WO PCT/US2003/033715 patent/WO2004040620A2/fr not_active Application Discontinuation
- 2003-10-24 AU AU2003286648A patent/AU2003286648A1/en not_active Abandoned
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4532970A (en) * | 1983-09-28 | 1985-08-06 | Hewlett-Packard Company | Particle-free dockable interface for integrated circuit processing |
US5733024A (en) * | 1995-09-13 | 1998-03-31 | Silicon Valley Group, Inc. | Modular system |
US6138721A (en) * | 1997-09-03 | 2000-10-31 | Asyst Technologies, Inc. | Tilt and go load port interface alignment system |
US6134107A (en) * | 1998-10-19 | 2000-10-17 | International Business Machines Corporation | Reverse convective airflow cooling of computer enclosure |
US6193339B1 (en) * | 1999-04-12 | 2001-02-27 | Inclose Design, Inc. | Docking adapter for memory storage devices |
US6135698A (en) * | 1999-04-30 | 2000-10-24 | Asyst Technologies, Inc. | Universal tool interface and/or workpiece transfer apparatus for SMIF and open pod applications |
Also Published As
Publication number | Publication date |
---|---|
AU2003286648A8 (en) | 2009-10-08 |
WO2004040620A2 (fr) | 2004-05-13 |
AU2003286648A1 (en) | 2004-05-25 |
US20040090152A1 (en) | 2004-05-13 |
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