WO2004032313A1

WO2004032313A1 - Surface shape measuring apparatus and single-shaft driver for use therein

Info

Publication number: WO2004032313A1
Application number: PCT/JP2003/012775
Authority: WO
Inventors: Masafumi Ishii
Original assignee: Tokyo Seimitsu Co., Ltd.
Priority date: 2002-10-04
Filing date: 2003-10-06
Publication date: 2004-04-15
Also published as: AU2003268773A1

Abstract

An apparatus for measuring the surface shape of an object comprising a detecting section, a stator, i.e. a rod-like magnet having N poles and S poles arranged alternately, and a mover, i.e., an annular member having a coil member and being fitted to the stator to be movably along it, is further provided with a linear motor for moving the detecting section relatively along the surface of the object. Features of this type of linear motor, i.e. maintenance-free, no wearing part, low oscillation driving, wide speed range, high rigidity, simple structure, no backlash, and the like, can thereby be advantageously attained.

Description

Description Surface profile measuring device and one-axis driving device used in the device

The present invention relates to a surface shape measuring device and a one-axis driving device used for the device, and more particularly to a surface shape measuring device using a linear motor for a driving unit and a one-axis driving device used for the device. Background art

Conventionally, surface roughness measuring devices, contour shape measuring devices, roundness measuring devices, three-dimensional coordinate measuring devices, and the like have been known as surface shape measuring devices.

Many of these surface profile measuring devices move the stylus and the DUT relative to each other while the contact-type stylus (probe) is in contact with the surface of the DUT, thereby obtaining the surface shape of the DUT. Is measured.

The relative movement between the stylus and the object to be measured is generally a linear motion in a surface roughness measuring device, a contour shape measuring device, a three-dimensional coordinate measuring device, and the like. In general, a circular motion occurs. In addition, the movement of the stylus in the Z axis (movement in the vertical direction) is generally linear even in a roundness measuring device.

In general, such linear motion is driven by a combination of a motor, a gear and a screw, or a combination of a motor, a pulley and a wire.

-See 139 3 17).

That is, the surface roughness measuring device, the contour shape measuring device, and the roundness measuring device perform linear driving by a combination of a gear, a screw, and a sliding guide surface (or a static pressure) having high straightness accuracy. While being supported by the bearing surface, the contact type detector moves linearly and measures the surface roughness, contour shape, roundness, etc. of the measured object. In the three-dimensional coordinate measuring device, linear drive is performed by a combination of motor, pulley and wire. At the same time, while being supported by the hydrostatic bearing surface with high straightness accuracy, the contact type detector moves linearly and measures the shape and dimensions of the measured object.

In this case, the linear drive of the surface roughness measuring device and the contour shape measuring device is in the X-axis direction, the linear drive of the roundness measuring device is in the R-axis and Z-axis directions, and the linear drive of the three-dimensional coordinate measuring device is the X-axis. , Y-axis and Z-axis directions are common.

The conventional linear drive mechanism in the above surface profile measuring device has the following problems, and improvements have been demanded. In other words, the surface roughness measuring device, the contour shape measuring device, the roundness measuring device, and the three-dimensional coordinate measuring device have a problem that the moving speed of the detector is slow and cannot be moved at high speed.

Further, the surface roughness measuring device, the contour shape measuring device, and the roundness measuring device have a problem that the vibration during high-speed movement is large. In addition, the surface roughness measuring device and the contour shape measuring device have a problem that the structure is complicated and that a high-precision pitch between gears is required. In addition, the three-dimensional coordinate measuring device has a problem that it cannot move at high acceleration because it uses wires.

Next, a conventional technique related to a single-axis drive device will be described. Conventionally, a one-axis driving device (also referred to as a linear motion device) comprising a fixed table and a moving table which is slidably supported in one axis direction with respect to the fixed table and driven in this direction. It has been known. This single-axis drive device is often configured to be driven by various motors (for example, a stepping motor, a linear motor, etc.).

FIG. 10 is a perspective view showing an example of a single-axis driving device. In the same figure, the one-axis drive device 301 slides in the one-axis direction (the direction of the arrow in the figure) on the fixed table 302 and the sliding surfaces 303, 303 against the fixed table 302. It has a movable table 304 that is freely supported, and a motor drive mechanism 304.

In the single-axis drive device 301, the screw member 303 of the motor drive mechanism 300 is rotatably fixed to the fixed table 302 via bearings 307, 307, and the screw member A nut member (not shown) that meshes with 303 is fixed to the moving table 304.

And, of the motor drive mechanism 3 05, the motor 3 fixed to the fixed table 302 By driving 08, the moving table 304 integrated with the nut member moves back and forth in the direction of the arrow in the figure.

As a motor used in such a one-axis drive device, a linear motor having a configuration that does not rotate, unlike the one shown in the figure, can be applied. Among these linear motors, a linear motor having a stator, which is a rod-shaped magnet, and a movable member, which is an annular member that is fitted to the stator, has a coil member, and can move linearly along the stator. Motors have features such as low cogging and low speed unevenness, and are becoming available on the market (for example, GM CHILLSTONE, product name: Shaft Motor-1).

In FIG. 11, a cross section of such a linear motor 311 is schematically shown. A mover 314, which is an annular member having a coil member, is fitted to a stator 314, which is a rod-shaped magnet in which N poles and S poles are alternately arranged in a linear manner. Then, due to the interaction between the magnetic flux of the stator 3 12 and the current flowing through the coil member of the mover 3 14, the mover 3 14 moves along the stator 3 1 2 according to Fleming's left-hand rule. To move linearly. A current is supplied to the coil members of the movers 314 from a drive circuit (not shown).

As an improvement technology of such a linear motor, a configuration having a structure capable of operating stably and with high accuracy has been proposed (for example, Japanese Patent Application Laid-Open Nos. H08-313184 and H11-111).

(See No. 150973).

However, the conventional technology related to the single-axis drive has the following problems and needs to be improved. In other words, it has been pointed out that if the above-mentioned conventional linear motor is applied to a single-axis drive device and the drive thrust is used in a state where the drive thrust is easily affected by the weight of the mover, it is difficult to suppress fluctuations in the drive thrust . .

FIGS. 11, 12, 13 (a) and 13 (b) are conceptual diagrams illustrating this phenomenon. In FIG. 11, the operation principle of the linear motor 311 is as described above.

In this linear motor 311, if there is friction between the stator 312 and the mover 314, if there is no drive by energization, Figs. 12, 13 (a) and 13 (b). FIG. 12 shows a state where the linear motors 3 1 1 are arranged horizontally, FIGS. 13 (a) and 13 (b) show a state where the linear motor 311 is arranged with an inclination angle of 0 with respect to the horizontal.

In FIG. 12, there is no relative movement between the stator 3 12 and the mover 314 when the mover 314 is not energized. In order to move the slider 314 to the right or left, a driving force F = Mg is required to overcome the frictional force of the slider 314 due to its own weight Mg. The coefficient of kinetic friction between 3 and 14; M is the mass of the mover 3 14; g is the gravitational acceleration).

On the other hand, in FIGS. 13 (a) and 13 (b), a component force M g sin 0 due to the weight of the movable element 314 is applied in the direction of linear movement along the stator 3 12. In addition, a component force Mg cos 0 due to the weight of the movable element 3 14 is applied perpendicularly to the direction of linear movement along the stator 312. In this state, as shown in FIG. 13 (a), to move the movable element 314 to the left by overcoming the component force and frictional force due to its own weight, the driving force F = Mg si η It takes θ + Μ gcos 0. On the other hand, to move the mover 314 to the right as shown in FIG. 13 (b), a driving force F = —Mg sin θ + lg cos 0 is required. As described above, in this type of conventional linear motor, the thrust required for driving varies when the moving direction changes due to the weight of the movable element 314.

If the inclination angle is large in the state as shown in FIGS. 13 (a) and 13 (b), the moving element 314 moves (falls) to the right due to its own weight. In order to suppress this and maintain the movable element 314 at the current position, it is necessary to energize the movable element 314 and apply a leftward driving force to balance the gravity. However, if the state where the movable element 314 is energized is maintained, heat is generated in the movable element 314, and this heat generation causes a dimensional error of the entire device.

In addition, when the above-described conventional linear motor is applied to a one-axis driving device, there is a problem that the driving thrust of the linear motor is easily changed. That is, in the single-axis drive device, the fixed table and the movable table are usually made of a metal material. This is due to the ease of adding metal materials, high rigidity and high durability. However, if the fixed table and the movable table around the linear motor were made of magnetic metal, The magnetic force of the near motor is affected by the surrounding magnetic material, and as a result, the driving force of the linear motor tends to fluctuate.

The present invention has been made in view of such circumstances, and an object of the present invention is to provide a surface shape measuring device having a driving mechanism capable of overcoming the above-mentioned conventional problems. The present invention also provides a linear motor that reduces the influence of the weight of the linear motor on the drive thrust due to its own weight, reduces dimensional accuracy errors due to heat generation, etc., and reduces the influence of the components of the single-axis drive device on the drive thrust. Another object of the present invention is to provide a one-axis driving device using the same. Disclosure of the invention

In order to achieve the above object, the present invention provides a surface shape measuring device for measuring a surface shape of an object to be measured, which is a rod-shaped magnet in which a detection unit, and N poles and S poles are alternately arranged. A moving member having a coil member, a coil member, and fitted to the stator, the movable member being movable along the stator. And a linear shape moving relative to the surface. .

According to the present invention, driving is performed by a linear motor having a stator that is a rod-shaped magnet and a mover that is an annular member fitted to the stator. Therefore, this type of linear motor features special features such as maintenance-free, no wear, low vibration drive, large speed range, high rigidity, simple structure, and backlash. There are no advantageous effects such as lack of access.

The surface shape measuring device is a surface roughness measuring device, a contour shape measuring device, a roundness measuring device, a three-dimensional coordinate measuring device, and the like, and a detecting unit is relatively moved along a surface of an object to be measured. A device that measures the surface shape of an object to be measured by moving it, and also includes a device that measures not only the outer surface of an object but also, for example, the inner peripheral surface of a cylindrical object. In general, the detection unit is a contact-type detection unit that performs measurement while bringing a stylus (probe) into contact with the surface of an object to be measured, but is not limited thereto. For example, it also includes a laser type detection unit. Further, the present invention has a stator which is a bar-shaped magnet in which N poles and S poles are alternately arranged, and has a coil member fitted to the stator and moves along the stator. A single-axis drive device using a linear motor having a mover that is an annular member capable of: and wherein a balance weight is disposed so as to be balanced with the mover. provide.

Here, the “balance weight” is “a weight added to remove the unbalance of the rotating body in grinding or the like.” Or “the weight of the spindle head of the cross rail or boring machine of the portal machine tool. It is understood by those skilled in the art that the weight is used to balance with. However, in this specification, the latter is used in the meaning of the latter.

According to the present invention, when the moving member has its own weight or another constituent member is attached to the moving member, the balance can be achieved by the balance weight having substantially the same weight as the total weight thereof. Therefore, the influence of the weight of the mover due to its own weight and the like is small, the driving thrust does not easily fluctuate, and dimensional accuracy errors due to heat generation and the like hardly occur.

In the present invention, it is preferable that the weight of the balance weight is substantially the same as the weight of the mover. When the moving element is used without attaching other components, the balance can be achieved by the balance weight having substantially the same weight as the weight of the moving element. Therefore, the driving thrust is hardly affected by the weight of the moving element, and a dimensional accuracy error hardly occurs. Further, in the present invention, it is preferable that the weight of the balance weight is within 20% of the weight of the moving element. If the slider is used without attaching other components, or if the slider is used with other components attached, if the weight of the balance weight is within such a range, the weight of the slider will be its own weight. Fluctuations in driving thrust due to factors such as these are often within the allowable range, and dimensional accuracy errors are unlikely to occur.

In the present invention, the balance weight may be connected to the movable element by a winding motion transmitting member via a winding motion transmitting supporting member provided near one end or both ends of the linear motor. Is preferred. In this way, if the balance weight is connected to the moving element by the wrapping motion transmitting member via the wrapping motion transmitting support member, the balance can be easily obtained. The “winding motion transmitting member” is a mechanical element in wrapping transmission in mechanics, and generally corresponds to a belt, a chain, a wire, and the like. The "winding motion transmission support member" is also a mechanical element in the wrapping transmission, and generally corresponds to a pulley, a belt wheel, a sprocket, and the like.

Further, the present invention provides a fixed table, a moving table supported slidably in one axis direction with respect to the fixed table, and a bar-shaped magnet in which N poles and S poles are alternately arranged. A linear motor that is fitted to the stator, has a coil member, and is a movable member that is an annular member that can move along the stator. One of the stator and the moving element is fixed to the fixed table, and the other of the stator and the moving element is fixed to the moving table, and at least a portion of the fixed table and the moving table around the linear motor. The present invention provides a one-axis drive device, characterized in that the shaft is made of a non-magnetic material.

According to the present invention, since the portion around the linear motor is made of a non-magnetic material, the magnetic force of the linear motor is hardly affected by the surrounding magnetic material (metal material, etc.). Is hard to fluctuate.

Further, the present invention provides a fixed table, a moving table supported slidably in one axis direction with respect to the fixed table, and a bar-shaped magnet in which N poles and S poles are alternately arranged. A linear motor that is fitted to the stator, has a coil member, and is a movable member that is an annular member that can move along the stator. One of the fixed element and the movable element is fixed to the fixed table; the other of the fixed element and the movable element is fixed to the movable table; a sliding surface between the fixed table and the movable table; The axis of the stator of the linear motor is disposed in substantially the same plane, and the sliding surface of the fixed table and the moving table and the linear motor are separated by a predetermined distance. Provide a one-axis drive

According to the present invention, the sliding surfaces of the fixed table and the movable table and the linear motor are separated by a predetermined distance. Therefore, the magnetic force of the linear motor is less affected by the surrounding magnetic materials (metal materials, etc.), and as a result, the driving thrust of the linear motor is less likely to fluctuate. The sliding surface between the fixed table and the movable table and the axis of the stator of the linear motor are arranged in substantially the same plane. Therefore, it is not easily affected by rolling and pitching. Further, even if there is a slight influence of the bowing, this can be reduced by setting the length of the sliding surface between the fixed table and the movable tape to a predetermined length. BRIEF DESCRIPTION OF THE FIGURES

FIG. 1 is a perspective view showing an entire surface roughness measuring device according to an embodiment of the present invention; FIG. 2 is a block diagram showing a configuration of the surface roughness measuring device shown in FIG. 3 (a) and 3 (b) are cross-sectional views showing details of the driving unit;

Figure 4 is a perspective view showing the overall configuration around the linear motor;

FIG. 5 is a cross-sectional view taken along line 5-5 of FIG. 4;

Figure 6 is an enlarged sectional view of the main part of the linear motor;

FIG. 7 is a perspective view showing the entirety of the roundness measuring apparatus according to the embodiment;

Figure 8 is a conceptual diagram illustrating the measurement location of the DUT;

Figure 9 is a schematic cross section of the stand;

FIG. 10 is a perspective view showing an example of a conventional one-axis driving device;

Figure 11 is a sectional view showing the outline of a conventional linear motor;

Fig. 12 is a conceptual diagram illustrating a problem in the conventional linear motor; Figs. 13 (a) and 13 (b) are conceptual diagrams illustrating a problem in the conventional linear motor;

FIG. 14 is a cross-sectional view of an embodiment of the single-axis drive device according to the present invention;

FIG. 15 is a perspective view showing an outline of a linear motor used in the one-axis drive device; FIG. 16 is a cross-sectional view of still another embodiment of the one-axis drive device according to the present invention; FIG. 17 is a perspective view of still another embodiment of the single-axis drive device according to the present invention. BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, according to the attached drawings, a surface roughness measuring device which is an example of a surface shape measuring device according to the present invention will be described. A preferred embodiment of the fixing device will be described in detail. FIG. 1 is a perspective view showing the entire surface roughness measuring device 10 according to the embodiment, and FIG. 2 is a block diagram showing the configuration of the surface roughness measuring device 10 shown in FIG.

The surface roughness measuring device 10 includes a measuring unit (data output means) 112, a data processing device 114, an input device (for example, a keyboard and a mouse: measuring area designating means, setting means) 116, and a monitor 118. The measuring section 112 has a pickup 122 for measuring the surface roughness of the work W shown in FIG. 2 placed on a measuring table 120. The pickup 122 is supported by a holder 124A of a driving section 124.

The pickup 122 has a stylus 126 at its tip, and the displacement of the stylus 126 is converted into a voltage by a differential transformer (not shown) built in the drive unit 124. Then, this voltage value is AZD-converted by the AZD converter and output to the CPU (measurement data acquisition means, calculation means, control means, comparison means) 128 of the data processing unit 114. Thus, the CPU 128 obtains measurement data indicating the surface roughness of the work W. As shown in FIG. 1, the drive unit 124 is attached to a column 130 erected on the measuring table 120. Then, in accordance with an instruction from the CPU 128 in FIG. 2, a motor (not shown) for up / down (Z direction) movement is driven, so that the entire drive unit 124 is moved up / down along the column 130. In addition, according to an instruction from the CPU 128, a linear motor (to be described later) for left / right (X direction) movement is driven, so that the holder 1 is moved.

24 A is moved left and right. The drive unit 124 can also be operated by a joystick 132 mounted on the front of the measurement table 120.

As shown in FIG. 2, the data processing device 114 includes an auxiliary storage device 1 such as a hard disk or an EEPROM which is an electrically erasable and writable read-only memory.

34 are built in.

Next, details of the drive unit 124, which is a characteristic part of the present invention, will be described. FIG. 3A is a left sectional view showing details of the driving section 124, and FIG. 3B is a front sectional view thereof. FIG. 4 is a perspective view showing the entire configuration around the linear motor 12 arranged in the drive unit 124, FIG. 5 is a cross-sectional view taken along line 5-5 in FIG. 4, and FIG. Main part expansion It is sectional drawing.

The overall configuration around the linear motor 12 arranged in the drive section 124 consists of a linear motor 12 mainly composed of a stator 14 and a mover 16 and a base 18 (see FIG. 4 are not shown), fixing brackets 20 and 20 for fixing both ends of the stator 14 to the base 18, a cable carrier 22 for supplying power to the slider 16, and a slider 16. Encoders 24 and encoder scales 26 that detect the position in one axis direction of the actuator, and limit sensors 28 and 28 that are installed near both ends of the stator 14 and detect the end limit of the slider 16 A balance weight 30 for balancing the weight of the moving element 16 with its own weight, etc .; pulleys 34, 3 4 as winding motion supporting members provided near both ends of the stator 14; and a base 18 Pulley shafts 36, 36 fixed to the shaft and rotatably supporting the pulley 34, and the mover 16 via the pulley 34 And a wire 32 which is a wrapping motion transmitting member for connecting the balance weight 30 to the balance weight 30.

As shown in FIG. 5, a slit 18 A having a predetermined width is formed in the base 18, and the moving element 16 and the holder 124 A are connected to each other through the slit 18 A. I have. Therefore, when the linear motor 12 is driven, the holder 124A moves left and right. Next, details of the linear motor 12 will be described with reference to FIG. The linear motor 12 is a so-called shaft type linear motor. The linear motor 12 includes a stator 14 which is a straight rod-shaped shaft member on which a magnet for the field is formed, and a movable member 16 which is an annular member having a coil member as a main part. It is configured by fitting.

The stator 14 is made of a machinable and magnetizable material, for example, a Fe—Cr—Co metal, and has a circular cross section. Further, the stator 14 is magnetized so as to have a magnetic flux distribution of a uniform pitch, preferably a substantially rectangular shape, along the longitudinal direction. As a result, the stator 14 has a driving magnetized portion in which the N pole and the S pole are alternately arranged with the same magnetic pole width P along the longitudinal direction, and this is formed with the field magnet. Has become. The magnetic pole width P can be, for example, 3 O mm.

The coil member 40 of the mover 16 is composed of three coils of U-phase, V-phase, and W-phase. It consists of two sets of coil groups (the first set of coil groups and the second set of coil groups). The first set of coil group includes coils Ul, VI, and W1, and is arranged in the longitudinal direction of the stator 14 in this order. The second group of coils includes coils U2, V2, and W2, and is arranged in this order in the longitudinal direction of the stator 14. Each of these coils is formed to be 1/3 of the pole width P.

These coils constituting the coil member 40 of the mover 16 are fixed and integrated such that their outer peripheral surfaces are coated with an adhesive. The coil member 40 is built in a hollow portion of the hollow rectangular parallelepiped movable element frame 42, and is integrally supported on the inner peripheral surface of the movable element frame 42.

Bearing portions 44, 44 fitted on the stator 14 and slidable on the stator 14 are provided on both left and right end portions of the slider frame 42 of the slider 16. By the action of the bearings 44, 44, the moving member 16 can move smoothly along the stator 14.

The interaction between the magnetic flux of the stator 14 and the current flowing through the coil member 40 of the mover 16 causes the mover 16 to move linearly along the stator 14 according to Fleming's left-hand rule. A current is supplied to the coil member 40 of the mover 16 from the drive circuit (not shown) via the cape bearer 22.

As such a linear motor 12, for example, a shaft motor manufactured by GMC HILL STONE can be used.

As the balance weight 30 shown in FIGS. 4 and 5, it is preferable to select a weight that balances the total weight of the mover 16 and the holder 124A (including the pickup 122).

Further, it is also possible to adopt a configuration in which the weight of the balance weight 30 can be increased or decreased depending on the weight of the pickup 122 attached to the holder 124A.

As shown in FIGS. 4 and 5, the connection between the mover 16 and the balance weight 30 is formed by an endless ring by a wire 32, and the wire 32 is wound around pulleys 34, 34 and supported. Good.

Thus, the balance weight 30 is moved to the moving element 16 and the holder 124A (pickup). (Including 1 2 2) so as to be in proportion to the total weight, it is possible to deal with the problem that occurs in the linear motor 12 having this configuration as described above.

In addition, the other components in the drive unit 124 (base 18, fixing bracket 20, cable carrier 22, encoder 24, encoder scale 26, encoder sensor 28) are all known. Therefore, the description is omitted.

According to the surface roughness measuring device having the above configuration, the features of the linear motor 12 are that maintenance is unnecessary, there is no wear part, low vibration driving is possible, the speed range can be widened, and high Advantageous effects such as rigidity, simple structure, and no backlash can be obtained.

Next, a description will be given of a configuration that addresses the problem described above, which occurs in the linear motor 12 having this configuration depending on the use state. In other words, when the linear motor 12 of this configuration is applied and used in a state where the driving thrust fluctuates due to the weight of the moving element 16, there is a concern that it is difficult to suppress the fluctuation of the driving thrust. Has been described with reference to FIGS. 11, 12, 13 (a) and 13 (b).

The embodiment of the present invention has been made in view of such circumstances, and the driving thrust hardly fluctuates due to the weight of the movable element 16 of the linear motor 12 and the like, and the dimensional accuracy due to heat generation and the like. It is an object of the present invention to provide a surface shape measuring apparatus using a linear motor 12 which does not easily cause a degree error. That is, the balance weight 30 is arranged so as to be balanced with the weight of the movable element 16 and the like.

According to such a configuration, the weight of the movable member 16 and the balance having substantially the same weight as the other components (the pickup 122 and the holder 124 A in this example) attached to the movable member 16 are provided. Balance is better than weight 30. Therefore, the influence of the weight of the mover 16 due to its own weight and the like is small, the driving thrust does not easily fluctuate, and dimensional accuracy errors due to heat generation and the like are less likely to occur.

In such a configuration, it is preferable that the weight of the balance weight 30 be substantially the same as the total value of the weight of the moving element 16 and the weights of other components. As described above, the balance is achieved by the balance weight 30 having substantially the same weight as the own weight of the movable element 16 and the like. Therefore, The influence of the weight of the mover 16 is smaller, the driving thrust is less likely to fluctuate, and dimensional accuracy errors due to heat generation are less likely to occur.

In such a configuration, it is preferable that the weight of the balance weight 30 is within a range of 20% of the total value of the weight of the moving element 16 and the weight of the other components. If the weight of the balance weight 30 is within such a range, the fluctuation of the driving thrust due to the weight of the movable member 16 or the like often becomes an allowable range, and a dimensional accuracy error hardly occurs. In such a configuration, as in the present embodiment, the balance weight 30 is provided with a winding motion transmitting support member (in this example, a pulley shaft 3) provided near one end or both ends of the linear motor 12. It is preferable that the movable member 16 is connected to the moving member 16 by a winding motion transmitting member (in this example, a pulley 34) via the member 6). In this way, if the balance weight 30 is connected to the moving element 16 by the winding motion transmitting member via the winding motion transmitting supporting member, the balance can be easily obtained.

Next, a preferred embodiment of a roundness measuring device as another example of the surface shape measuring device according to the present invention will be described in detail with reference to the accompanying drawings. FIG. 7 is an overall configuration diagram of the roundness measuring device. The roundness measuring device 210 is provided with a Z-direction moving device 2 14 provided on the upper right side of the device body 2 12 and the device body 2 12, and an X-direction moving device supported by the Z-direction moving device 2 14. 2 16 The X-direction moving means 2 16 The detector holder 2 22 supported on the left end of the X-axis and rotatable around the X axis. The detector 224, which is movably supported, the work table 218, which is provided substantially on the upper center of the main body 212, and the operation panel 220, which is provided on the upper left side of the main body 212, It is composed. Note that a probe P is provided at the tip of the detector 222.

FIG. 8 is a conceptual diagram for explaining the measurement location of the DUT W. The probe P of the detector 222 is pressed against the inner and outer peripheral portions of the cylindrical DUT W at the upper left. 2 shows a state in which the probe P of the detector 222 is pressed against the conical portion, the outer surface of the cylinder, the upper surface of the flange portion, and the lower surface of the flange portion of the DUT W at the lower right.

The detector 224 and the probe P are configured to be automatically positioned so as to be able to cope with various measurements (coaxiality, cylindricity, etc.) in each of these states. Hereinafter, the outline of each component will be described. The Z-direction moving means 2 14 is provided on a right upper surface of the apparatus main body 2 12 and includes a stand 230 provided with a Z-direction table and a measurement stage 2 32 which moves up and down along the Z-direction table. Composed of combinations. The vertical movement (movement in the Z direction) of the measurement stage 2 3 2 can be performed manually (eg, button operation, joystick operation, etc.), and the shape, dimensions, and measurement type (coaxiality, cylinder) of the DUT W , Etc.) can be input to the operation panel 220 to automatically execute the operation.

The X direction moving means 2 16 is supported by the Z direction moving means 2 14, and is provided so as to penetrate the measuring stage 2 32 and the measuring stage 2 32, and is provided in the left and right direction with respect to the measuring stage 2 32. It is composed of a horizontal arm 2 3 4 that can move in the (X direction). The horizontal movement (horizontal movement) of the horizontal arm 2 3 4 can be performed manually (eg, button operation, joystick operation, etc.), and the shape, dimensions, and measurement type of the DUT W (coaxiality, cylindricity, etc.). By inputting the same into the operation panel 220, it is possible to automatically execute the operation.

The work table ₂ 18 is provided on the substantially central upper surface of the apparatus main body 2 12, is formed in a disk shape, and can be driven to rotate. The number of revolutions may be changed stepwise, or may be changed steplessly. It should be noted that it is also possible to make it possible to perform the ringing adjustment / tilting adjustment as needed, and it is also possible to add an automatic eccentricity correction function and an automatic inclination correction function.

The operation panel 220 is provided on the upper left side of the apparatus main body 212 so that measurement information (including shape information of the workpiece W) can be input, various operations of the apparatus, and output of measurement results and the like can be performed. Is configured. A personal computer is used for the operation panel 220 shown in the figure, and input work is mainly performed by a keyboard, and output is performed by a display (liquid crystal panel) and a printer. Various controls of the roundness measuring device 210 are performed by the CPU built in the operation panel 220. For low-priced models, a dedicated panel can be used instead of using a personal computer for the operation panel 220.

As the detector 222, a lever-type probe type that uses a differential transformer for displacement detection and presses the probe P against the workpiece W is used. The adoption of other various methods is not excluded. Probe P to DUT The force that presses the sensor, the so-called measuring force, may be a detector 224 that is fixed to a single unit (for example, 70 mN), or the shape, dimensions, and measurement type (coaxiality, cylinder It may be configured to be variable (for example, 30 to 10 OmN) according to the degree, etc.

FIG. 9 is a schematic sectional view (right sectional view) of the stand 230 and illustrates the configuration of the Z-direction moving means 214. In the example of the surface roughness measuring device 10 of the embodiment (see FIGS. 1 to 6), the balance weight 30 is connected to pulleys 34 and 34 provided near both ends of the linear motor 12. Although a configuration in which the movable element 16 is connected to the movable element 16 by the wire 32 is adopted, in the example of this embodiment, the pulleys 34 and 34 are provided near the upper end of the linear motor 12. A structure is employed in which a wire 32 is wound around the wire to balance the mover 16 and the balance weight 30.

That is, the linear motor 12 is disposed vertically in front of the inside of the stand 230 (to the left in FIG. 9). Further, a Z-direction table 231, which supports an X-direction moving means 2 16 (indicated by an image line in the figure), is fixed to the moving element 16. The balance weight 30, which is a weight balanced with the total weight of the slider 16 and the X-direction moving means 2 16, is penetrated by the vertically arranged shaft 31, and can be moved up and down. It is connected to the mover 16 by a wire 32 via pulleys 34 and 34 provided near the upper end.

According to such a configuration, the own weight of the slider 16 and the total weight of the other components (the Z-direction table 2 31 and the X-direction moving means 2 16) attached to the slider 16 in this example. A balance weight 30 of approximately the same weight as the quantity balances. Therefore, the influence of the weight of the movable member 16 is small, the driving thrust is hardly fluctuated, and a dimensional accuracy error due to heat generation is hardly generated.

As described above, each example of the embodiment of the surface shape measuring device according to the present invention has been described. However, the present invention is not limited to the example of the above-described embodiment, and various modes can be adopted. For example, in the example of the embodiment, the balance weight 30 is connected to the winding motion transmitting member (the wire 3) via a winding motion transmitting supporting member (pulley 34) provided near both ends or one end of the linear motor 12. 2), it is connected to the mover 16. In a configuration other than the combination of the motion transmitting support member (pulley 34) and the wrapping motion transmitting member (wire 32), the balance weight 30 is arranged so as to be balanced with the mover 16. If so, various configurations can be adopted.

For example, in the case of operating in the vertical direction using the linear motor 12, the balance weight 30 and the mover 16 are balanced via a manometer (communication pipe). In this case, for example, a vertically movable lid material that covers the mercury heads (upper ends) in the manometers at both ends is provided, and the weights of the balance weight 30 and the moving element 16 can be received by the lid materials at both ends. Just fine.

Next, examples of different embodiments of the linear mode will be described.

FIG. 14 is a cross-sectional view of another embodiment of the one-axis drive device according to the present invention, and FIG. 15 is a perspective view showing an outline of a linear motor 4 12 used in the one-axis drive device. . Note that the enlarged cross-sectional view of the essential part of Linamo 4/12 is the same as that of Fig. 6 described above.

The 1-axis drive device 4 10 can move the fixed table 4 3 0, the moving table 4 32, the fixed table 4 3 0, and the moving table 4 3 2 slidably in one axis direction. The linear motion guides 4 3 4 and 4 3 4 to be connected (the above members are not shown in FIG. 15), the linear motor 4 12 mainly composed of the stator 4 14 and the mover 4 16 , Stator 4 1 4 Fixing brackets 4 2 0, 4 2 0 to fix both ends of the stator to the fixing table 4 3 0, Cable carrier 4 2 2 for supplying power to the slider 4 16, and the slider 4 1 6 Encoder 4 2 4 and encoder scale 4 2 6 for detecting the position in one axis direction, and limit sensor 4 2 provided near the both ends of stator 4 14 to detect the end limit of mover 4 16 8, 4 2 8; The moving element 4 16 of the linear motor 4 1 2 is fixed to the moving table 4 32, the encoder 4 24 is fixed to the moving table 4 32, and the encoder scale 4 2 6 is fixed to the fixed table 4. It is fixed to 30.

The linear guide 4 3 4 has a long rail-shaped fixed portion 4 3 4 A and a moving portion 4 3 4 B, and the moving portion 4 3 4 B is in one axial direction with respect to the fixed portion 4 3 4 A. Slidably supported by For such a sliding mechanism, a mechanism such as a rolling guide (by a pole or a roller), a sliding guide, or the like can be employed. Examples of such a linear motion guide 4 3 4 include products manufactured by THK Name: LM guide can be used. Note that a configuration may be employed in which the moving table 432 is directly supported on the fixed table 4330 so as to be slidable in one axial direction without using the linear guide 434.

Here, of the fixed table 430 and the moving table 432, at least the portion around the linear motor 412 must be made of a non-magnetic material. In the present embodiment, all parts of the fixed table 4300 and the movable table 432 are made of a non-magnetic material. Various ceramics can be preferably used as such a non-magnetic material. In addition, if the longitudinal elastic modulus and the like are equal to or more than a predetermined value, various resin materials, especially engineering plastics and the like can be preferably used. Other non-magnetic materials can also be used.

Since the details of the linear motor 4 12 have already been described with reference to FIG. 6, the detailed description is omitted. Other configurations of the 1-axis drive device 410 (fixing bracket 420, cape bearer 42, encoder 42, encoder scale 42, limit sensor 42) are all known. Therefore, the description is omitted.

Although the outline of the single-axis driving device 410 is not shown, the overall configuration is substantially the same as that of the conventional single-axis driving device 1 shown in FIG. Only the point where mechanism 5 was replaced by Linamo-E 4 1 2.

According to the one-axis drive device 410 having the above-described configuration, the portions around the linear motor 412 (the fixed table 430 and the movable table 432) are made of a non-magnetic material. The magnetic force of the night is hardly affected by the surrounding materials, and as a result, the driving thrust of the linear motor 4 12 is hard to fluctuate.

Applications of the single-axis drive device 410 of the above configuration include, for example, use in drive units such as a surface roughness measurement device, a contour shape measurement device, a roundness measurement device, and a three-dimensional coordinate measurement device. . When used in such applications, the characteristics of the linear motor 4 12, maintenance is unnecessary, there is no wear part, low vibration drive is possible, the speed range can be widened, high rigidity, Advantageous effects such as simple structure and no backlash can be obtained. Next, still another preferred embodiment of the uniaxial drive device according to the present invention will be described in detail with reference to the accompanying drawings. FIG. 16 is a cross-sectional view of still another embodiment of the single-axis drive device according to the present invention, and FIG. 17 is a perspective view of the same. Note that the same or similar members as those of the other embodiments (FIGS. 14 and 15) are denoted by the same reference numerals and description thereof will be omitted.

The present embodiment is different from the other embodiments in the position where the linear motors 4 and 12 are provided. That is, in other embodiments, the linear motor 4 12 is disposed between the linear motion guides 4 3 4 and 4 3 4 in parallel with the linear motion guides 4 3 4 and 4 3 4. In the configuration, the linear motor 4 1 2 is positioned at a predetermined distance from the linear motion guides 4 3 4 and 4 3 4.

It is arranged in parallel with 3 4 and 4 3 4.

In the other embodiments, the moving element 4 16 is fixed to the moving table 4 32, but in the present embodiment, the moving element 4 16 extends horizontally from the moving table 4 32. It is fixed to the connecting plate 436. It is preferable that the length of the connecting plate 436 (in one axis driving direction) be as short as possible so that the moving element 416 can be fixed.

In addition, the portion of the fixed table 4300 facing the linear motor 412 is cut away except for the portion to which the fixing brackets 420 and 420 are fixed.

According to the single-axis drive device 4 1 1 having the above configuration, the fixed table 4 30 and the movable table

Even if 4 32 is made of a magnetic material (metal material, etc.), there is almost no magnetic material around the linear motor 4 12 and the magnetic force of the linear motor is affected by the surrounding materials. As a result, the driving thrust of the linear motor 4 12 hardly fluctuates. Even if the connecting plate 436 is made of a magnetic material (such as a metal material), the magnetic force of the linear motor is hardly affected by this if the area is minimized.

Also, as described above, the sliding surface between the fixed table 4330 and the moving table 432 and the axis of the stator 414 of the linear motor 412 are arranged in substantially the same plane. I have. Therefore, it is not easily affected by rolling and pitching. In addition, even if there is some influence of the swing, this can be reduced if the length of the sliding surface between the fixed table 430 and the movable table 432 is a predetermined length.

The example of the embodiment of the single-axis drive device according to the present invention has been described above. W

19

The present invention is not limited to the example of the embodiment, and various modes can be adopted. For example, in the embodiment, a configuration in which two linear motion guides 434 are provided is adopted, but a configuration in which only one linear guide is provided may be employed.

Further, as described above, a configuration may be employed in which the moving table 432 is directly supported on the fixed table 4330 so as to be slidable in one axial direction without providing the linear guide 434. . Industrial applicability

As described above, according to the present invention, linear drive is performed by a linear motor having a stator that is a bar-shaped magnet and a movable member that is an annular member fitted to the stator. Therefore, the characteristics of this type of linear motor are that maintenance is unnecessary, there are no wear parts, low vibration driving is possible, a large speed range is available, high rigidity, and the structure is simple. Advantageous effects such as no backlash, etc. can be obtained.

Claims

The scope of the claims

1. In a surface profile measuring device that measures the surface profile of the DUT,

A detection unit;

A moving member that has a stator that is a bar-shaped magnet in which N poles and S poles are alternately arranged, and a coil member, is an annular member that is fitted to the stator and that can move along the stator. And a linear motor that relatively moves the detector along the surface of the device under test.

2. The surface shape measurement according to claim 1, wherein a balance weight having substantially the same weight as a total value of a weight of the movable element and a weight of a component moving integrally with the movable element is arranged. apparatus.

3. A claim in which a balance weight, which is a weight within ± 20% of a total value of a weight of the movable element and a weight of a component moving integrally with the movable element, is arranged to be balanced. 2. The surface shape measuring device according to 1.

4. The balance weight, which is substantially the same as the sum of the weight of the mover and the weight of the component moving integrally with the mover, is arranged so as to be balanced,

The balance weight is a component of the component that moves integrally with the moving element and the moving element by a winding motion transmitting member via a winding motion transmitting supporting member provided near at least one end of the linear motor. The surface shape measuring device according to claim 1, which is connected to at least one of the surfaces.

5. The balance weight, which is a weight within the range of 20%, is balanced with the sum of the weight of the mover and the weight of the component moving integrally with the mover, and the balance weight is provided. And at least one of the components moved integrally with the moving element and the moving element by the wrapping motion transmitting member via a wrapping motion transmitting supporting member provided near at least one end of the linear motor. The surface profile measuring device according to claim 1, which is connected.

6. Move the detector relative to the surface of the object to measure the surface shape of the object. In a surface shape measurement device that performs shape measurement,

Fixed table,

A moving table supported slidably in one axis direction with respect to the fixed table, and a one-axis driving device for performing relative movement of the detection unit, wherein N poles and S poles are alternately arranged. A linear motor comprising: a stator, which is a bar-shaped magnet; and a movable member, which is an annular member that is fitted to the stator and has a coil member and that can move along the stator. A one-axis driving device, wherein one of the stator and the mover is fixed to the fixed table, and the other of the stator and the mover is fixed to the movable table.

A surface shape measuring device, wherein at least a portion around the linear motor of the fixed table and the movable table is made of a non-magnetic material.

7. In a surface shape measuring device for measuring the surface shape of the measured object by relatively moving the detecting section along the surface of the measured object,

A fixed table,

A moving table supported slidably in one axis direction with respect to the fixed table, and a one-axis driving device for performing relative movement of the detection unit, wherein N poles and S poles are alternately arranged. A linear motor having a stator, which is a bar-shaped magnet, and a movable member, which is an annular member that is fitted to the stator and has a coil member and that can move along the stator. A one-axis driving device in which one of the stator and the mover is fixed to the fixed table, and the other of the stator and the mover is fixed to the movable table.

A sliding surface between the fixed table and the moving table and an axis of the stator of the linear motor are disposed in substantially the same plane, and the sliding surface of the fixed table and the moving table and the linear A surface shape measuring device characterized by being spaced a certain distance from an amo.

8. A stator that is a bar-shaped magnet in which N poles and S poles are alternately arranged, and an annular shape that has a coil member that is fitted to the stator and that can move along the stator. With the member What is claimed is: 1. A one-axis drive device using a linear motion device having a certain moving element, and wherein a balance weight is arranged to be balanced with the moving element.

9. The uniaxial drive device according to claim 8, wherein the weight of the balance weight is substantially the same as the weight of the mover.

10. The uniaxial drive device according to claim 8, wherein the weight of the balance weight is within a range of ± 20% with respect to the weight of the mover.

1 1. Fixed table and

A moving table that is slidably supported in one axial direction with respect to the fixed table, a stator that is a bar-shaped magnet in which N poles and S poles are alternately arranged, and fitted to the stator. A linear motor having a coil member, an annular member movable along the stator, and a linear motor having:

One of the stator and the moving element is fixed to the fixed table, the other of the stator and the moving element is fixed to the moving table, and at least the linear motor among the fixed table and the moving table A one-axis drive device, wherein a peripheral portion is made of a non-magnetic material.

1 2. Fixed table and

One of the stator and the moving element is fixed to the fixed table, the other of the stator and the moving element is fixed to the moving table, and a sliding surface between the fixed table and the moving table; The linear motor and the axis of the stator are arranged in substantially the same plane, and the sliding surfaces of the fixed table and the movable table and the linear motor are separated by a predetermined distance. One-axis drive.