WO2004008216A3 - Laserbearbeitungsmaschine - Google Patents

Laserbearbeitungsmaschine Download PDF

Info

Publication number
WO2004008216A3
WO2004008216A3 PCT/EP2003/006283 EP0306283W WO2004008216A3 WO 2004008216 A3 WO2004008216 A3 WO 2004008216A3 EP 0306283 W EP0306283 W EP 0306283W WO 2004008216 A3 WO2004008216 A3 WO 2004008216A3
Authority
WO
WIPO (PCT)
Prior art keywords
machine tool
laser machine
laser beam
laser
telescope
Prior art date
Application number
PCT/EP2003/006283
Other languages
English (en)
French (fr)
Other versions
WO2004008216A2 (de
Inventor
Thomas Zeller
Joachim Schulz
Original Assignee
Trumpf Lasertechnik Gmbh
Thomas Zeller
Joachim Schulz
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Trumpf Lasertechnik Gmbh, Thomas Zeller, Joachim Schulz filed Critical Trumpf Lasertechnik Gmbh
Priority to EP03763639A priority Critical patent/EP1520198A2/de
Priority to US10/520,525 priority patent/US7297898B2/en
Publication of WO2004008216A2 publication Critical patent/WO2004008216A2/de
Publication of WO2004008216A3 publication Critical patent/WO2004008216A3/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Lenses (AREA)

Abstract

Bei einer Laserbearbeitungsmaschine zum Bearbeiten von Werkstücken mittels eines Laserstrahls (2) umfasst ein Teleskop (1) zum Aufweiten des Laserstrahls (2) einen Ellipsoidspiegel (3) und einen Paraboloidspiegel (4), deren Rotationsachsen 10 (6) parallel zueinander, insbesondere kollinear, verlaufen. Durch diese Ausrichtung können die reflektierenden Oberflächen der beiden Spiegel in einer einzigen Aufspannung (z.B. durch Diamantdrehen) bereits so genau hergestellt werden, dass eine nachträgliche Justage nicht mehr erforderlich ist.
PCT/EP2003/006283 2002-07-10 2003-06-14 Laserbearbeitungsmaschine WO2004008216A2 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP03763639A EP1520198A2 (de) 2002-07-10 2003-06-14 Laserbearbeitungsmaschine
US10/520,525 US7297898B2 (en) 2002-07-10 2003-06-14 Laser processing machine

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10230960A DE10230960B4 (de) 2002-07-10 2002-07-10 Laserbearbeitungsmaschine
DE10230960.4 2002-07-10

Publications (2)

Publication Number Publication Date
WO2004008216A2 WO2004008216A2 (de) 2004-01-22
WO2004008216A3 true WO2004008216A3 (de) 2004-04-08

Family

ID=29796225

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2003/006283 WO2004008216A2 (de) 2002-07-10 2003-06-14 Laserbearbeitungsmaschine

Country Status (4)

Country Link
US (1) US7297898B2 (de)
EP (1) EP1520198A2 (de)
DE (1) DE10230960B4 (de)
WO (1) WO2004008216A2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105904087A (zh) * 2016-06-26 2016-08-31 上海嘉强自动化技术有限公司 一种反射式高功率双金属振镜扫描系统

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004007178B4 (de) * 2004-02-13 2006-01-12 Precitec Kg Laserbearbeitungskopf
EP1695787A1 (de) * 2005-02-25 2006-08-30 Trumpf Laser- und Systemtechnik GmbH Laserbearbeitungsverfahren für einen Mehrstationenbetrieb
DE102007028504B4 (de) 2007-06-18 2009-07-30 Scansonic Mi Gmbh Vorrichtung zum Bearbeiten eines Werkstücks mittels eines Laserstrahls
JP5641958B2 (ja) * 2011-01-31 2014-12-17 ギガフォトン株式会社 チャンバ装置およびそれを備える極端紫外光生成装置
US9374882B2 (en) 2013-12-12 2016-06-21 Asml Netherlands B.V. Final focus assembly for extreme ultraviolet light source
DE102016113378B4 (de) * 2016-07-20 2019-10-10 Karl H. Arnold Maschinenfabrik Gmbh & Co. Kg Optisches System für eine Laserbearbeitungsmaschine, Verfahren zum Verstellen eines optischen Systems für eine Laserbearbeitungsmaschine und Laserbearbeitungsmaschine
EP3794393B1 (de) * 2018-05-14 2023-09-27 TRUMPF Lasersystems for Semiconductor Manufacturing GmbH Fokussiereinrichtung und euv-strahlungserzeugungsvorrichtung damit
WO2021055715A1 (en) 2019-09-20 2021-03-25 Ndc Technologies Inc. Laser interferometry systems and methods

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4205902A (en) * 1978-10-12 1980-06-03 The Perkin-Elmer Corporation Laser beam expander
EP0649042A2 (de) * 1993-10-16 1995-04-19 British Aerospace Public Limited Company Optischer Strahlaufweiter

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3674334A (en) * 1971-01-04 1972-07-04 Perkin Elmer Corp Catoptric anastigmatic afocal optical system
US4568982A (en) * 1984-04-09 1986-02-04 At&T Laboratories Optical scanning method and apparatus
US4806728A (en) * 1988-02-01 1989-02-21 Raytheon Company Laser process apparatus
JPH04301613A (ja) * 1991-03-29 1992-10-26 Toshiba Corp ビーム拡大・縮小器
DE4120684A1 (de) * 1991-06-22 1992-12-24 Zeiss Carl Fa Spiegelobjektiv
JP2786796B2 (ja) * 1993-06-23 1998-08-13 シャープ株式会社 プロジェクター
JP3380416B2 (ja) * 1997-02-05 2003-02-24 本田技研工業株式会社 レーザ溶接装置
US6078420A (en) * 1998-06-24 2000-06-20 Optical Engineering, Inc. Hole-coupled laser scanning system
DE19949198B4 (de) * 1999-10-13 2005-04-14 Myos My Optical Systems Gmbh Vorrichtung mit mindestens einer mehrere Einzel-Lichtquellen umfassenden Lichtquelle
US6789908B2 (en) * 2003-02-07 2004-09-14 The United States Of America As Represented By The Secretary Of The Navy Confocal ellipsoidal mirror system for wide field of view imaging

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4205902A (en) * 1978-10-12 1980-06-03 The Perkin-Elmer Corporation Laser beam expander
EP0649042A2 (de) * 1993-10-16 1995-04-19 British Aerospace Public Limited Company Optischer Strahlaufweiter

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP1520198A2 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105904087A (zh) * 2016-06-26 2016-08-31 上海嘉强自动化技术有限公司 一种反射式高功率双金属振镜扫描系统

Also Published As

Publication number Publication date
DE10230960A1 (de) 2004-01-29
WO2004008216A2 (de) 2004-01-22
US7297898B2 (en) 2007-11-20
DE10230960B4 (de) 2011-10-06
US20060102603A1 (en) 2006-05-18
EP1520198A2 (de) 2005-04-06

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