WO2003089957A3 - Micro piezoelectric actuator and method for fabricating same - Google Patents
Micro piezoelectric actuator and method for fabricating same Download PDFInfo
- Publication number
- WO2003089957A3 WO2003089957A3 PCT/KR2003/000785 KR0300785W WO03089957A3 WO 2003089957 A3 WO2003089957 A3 WO 2003089957A3 KR 0300785 W KR0300785 W KR 0300785W WO 03089957 A3 WO03089957 A3 WO 03089957A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- actuators
- axis
- gimbals
- membranes
- mirror
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
- B81B3/004—Angular deflection
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
- H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
- H10N30/082—Shaping or machining of piezoelectric or electrostrictive bodies by etching, e.g. lithography
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2041—Beam type
- H10N30/2042—Cantilevers, i.e. having one fixed end
- H10N30/2043—Cantilevers, i.e. having one fixed end connected at their free ends, e.g. parallelogram type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/045—Optical switches
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Micromachines (AREA)
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU2003223125A AU2003223125A1 (en) | 2002-04-17 | 2003-04-17 | Micro piezoelectric actuator and method for fabricating same |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/KR2002/000701 WO2002084753A1 (en) | 2001-04-17 | 2002-04-17 | Micro piezoelectric actuator and method for fabricating same |
KRPCT/KR02/00701 | 2002-04-17 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2003089957A2 WO2003089957A2 (en) | 2003-10-30 |
WO2003089957A3 true WO2003089957A3 (en) | 2003-12-04 |
Family
ID=29244672
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/KR2003/000785 WO2003089957A2 (en) | 2002-04-17 | 2003-04-17 | Micro piezoelectric actuator and method for fabricating same |
Country Status (3)
Country | Link |
---|---|
KR (1) | KR20040103977A (en) |
AU (1) | AU2003223125A1 (en) |
WO (1) | WO2003089957A2 (en) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4550653B2 (en) * | 2005-04-15 | 2010-09-22 | 富士通株式会社 | Micro movable element and optical switching device |
DE102007027428A1 (en) * | 2007-06-14 | 2008-12-18 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Component with a vibration element |
DE102009026506A1 (en) | 2009-05-27 | 2010-12-02 | Robert Bosch Gmbh | Micromechanical component and production method for a micromechanical component |
US8866364B2 (en) | 2010-07-05 | 2014-10-21 | Aron Michael | Piezo-electric based micro-electro-mechanical lens actuation system |
KR102235703B1 (en) * | 2014-02-12 | 2021-04-05 | 삼성디스플레이 주식회사 | Display device and method of manufacturing a display device |
DE102017200055A1 (en) * | 2017-01-04 | 2018-07-05 | Robert Bosch Gmbh | MEMS sensor device and method for manufacturing a MEMS sensor device |
CN109723945B (en) * | 2019-01-10 | 2021-04-06 | 北京机械设备研究所 | Precise pointing platform based on flexible parallelogram mechanism |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6198565B1 (en) * | 1998-11-16 | 2001-03-06 | Victor Company Of Japan, Limited | Light deflection element and display apparatus using same |
US6201629B1 (en) * | 1997-08-27 | 2001-03-13 | Microoptical Corporation | Torsional micro-mechanical mirror system |
WO2002024570A1 (en) * | 2000-09-25 | 2002-03-28 | Bookham Technology Plc | Micro electro-mechanical systems |
-
2003
- 2003-04-17 KR KR1020047016755A patent/KR20040103977A/en not_active Application Discontinuation
- 2003-04-17 WO PCT/KR2003/000785 patent/WO2003089957A2/en not_active Application Discontinuation
- 2003-04-17 AU AU2003223125A patent/AU2003223125A1/en not_active Abandoned
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6201629B1 (en) * | 1997-08-27 | 2001-03-13 | Microoptical Corporation | Torsional micro-mechanical mirror system |
US6198565B1 (en) * | 1998-11-16 | 2001-03-06 | Victor Company Of Japan, Limited | Light deflection element and display apparatus using same |
WO2002024570A1 (en) * | 2000-09-25 | 2002-03-28 | Bookham Technology Plc | Micro electro-mechanical systems |
Also Published As
Publication number | Publication date |
---|---|
AU2003223125A1 (en) | 2003-11-03 |
AU2003223125A8 (en) | 2003-11-03 |
KR20040103977A (en) | 2004-12-09 |
WO2003089957A2 (en) | 2003-10-30 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2004026757A3 (en) | Controlling electromechanical behavior of structures within a microelectromechanical systems device | |
US6491404B2 (en) | Microelectromechanical apparatus with tiltable bodies including variable tilt-stop engaging portions and methods of operation and fabrication therefor | |
US6774535B2 (en) | Micromechanical platform pivotal on a compliant member | |
US6236490B1 (en) | Dual stage deformable mirror | |
WO2005026801A3 (en) | Apparatus for manipulation of an optical element | |
WO2004077109A3 (en) | Integrated zonal meniscus mirror | |
EP1120677A3 (en) | MEMS optical cross-connect switch | |
US20080225370A1 (en) | Low-cost continuous phase sheet deformable mirror | |
TW200617420A (en) | Deformable mirror equipment, deformable mirror plate | |
CA2366527A1 (en) | Electrostatically actuated micro-electro-mechanical system (mems) device | |
CA2320458A1 (en) | Mems variable optical attenuator | |
WO2000067063A8 (en) | Moveable microelectromechanical mirror structures | |
EP1396036A1 (en) | Micro piezoelectric actuator and method for fabricating same | |
WO2002065187A3 (en) | Method for making an optical micromirror and micromirror or array of micromirrors obtained by said method | |
WO2003089957A3 (en) | Micro piezoelectric actuator and method for fabricating same | |
CA2522790A1 (en) | A micro-electro-mechanical-system two dimensional mirror with articulated suspension structures for high fill factor arrays | |
WO2005102909A1 (en) | Actuator | |
WO2005046206A3 (en) | Electromechanical micromirror devices and methods of manufacturing the same | |
EP3803497B1 (en) | Steerable optical assemblies | |
WO2005064701A8 (en) | Electronic device | |
KR101671541B1 (en) | Method for operating an electrostatic drive and electrostatic drives | |
JP2001298970A (en) | Piezoelectric actuator | |
US20020025106A1 (en) | Mechanically latching optical switch | |
US6621681B2 (en) | Low voltage control of MEM actuators | |
KR102322168B1 (en) | Piezo actuator type axis precision control module and piezo actuator type axis precision control device |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AK | Designated states |
Kind code of ref document: A2 Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NI NO NZ OM PH PL PT RO RU SC SD SE SG SK SL TJ TM TN TR TT TZ UA UG US UZ VC VN YU ZA ZM ZW |
|
AL | Designated countries for regional patents |
Kind code of ref document: A2 Designated state(s): GH GM KE LS MW MZ SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LU MC NL PT RO SE SI SK TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
WWE | Wipo information: entry into national phase |
Ref document number: 1020047016755 Country of ref document: KR |
|
WWP | Wipo information: published in national office |
Ref document number: 1020047016755 Country of ref document: KR |
|
122 | Ep: pct application non-entry in european phase | ||
NENP | Non-entry into the national phase |
Ref country code: JP |
|
WWW | Wipo information: withdrawn in national office |
Country of ref document: JP |