WO2003077414A8 - Leistungsverstärker - Google Patents
LeistungsverstärkerInfo
- Publication number
- WO2003077414A8 WO2003077414A8 PCT/EP2003/002533 EP0302533W WO03077414A8 WO 2003077414 A8 WO2003077414 A8 WO 2003077414A8 EP 0302533 W EP0302533 W EP 0302533W WO 03077414 A8 WO03077414 A8 WO 03077414A8
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- matching
- relates
- power amplifier
- matching network
- power mosfets
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F1/00—Details of amplifiers with only discharge tubes, only semiconductor devices or only unspecified devices as amplifying elements
- H03F1/56—Modifications of input or output impedances, not otherwise provided for
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F3/00—Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements
- H03F3/20—Power amplifiers, e.g. Class B amplifiers, Class C amplifiers
- H03F3/21—Power amplifiers, e.g. Class B amplifiers, Class C amplifiers with semiconductor devices only
- H03F3/211—Power amplifiers, e.g. Class B amplifiers, Class C amplifiers with semiconductor devices only using a combination of several amplifiers
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F3/00—Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements
- H03F3/20—Power amplifiers, e.g. Class B amplifiers, Class C amplifiers
- H03F3/21—Power amplifiers, e.g. Class B amplifiers, Class C amplifiers with semiconductor devices only
- H03F3/217—Class D power amplifiers; Switching amplifiers
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Amplifiers (AREA)
Abstract
Verfahren und Vorrichtung zur Leistungsverstärkung mit einem modifiziertem Klasse E-Verstärker, bei dem ein spezielles Anpassungsnetzwerk sowohl eine Bandpassfilterung für die Grundwelle als auch eine Widerstandsanpassung an die Last vornimmt und sich zugleich durch seine Bauart als Anpassungsnetzwerk zum Zusammenschalten mehrerer nicht identisch gleicher Leistungs-MOS-FETs eignet sowie eine solche Anpassungsschaltung sowie eine geeignete besonders verlustarme Treiberschaltung zur Ansteuerung solcher Leistungs-MOS-FETs
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/937,395 US7046088B2 (en) | 2002-03-12 | 2004-09-10 | Power amplifier |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10211609A DE10211609B4 (de) | 2002-03-12 | 2002-03-12 | Verfahren und Leistungsverstärker zur Erzeugung von sinusförmigen Hochfrequenzsignalen zum Betreiben einer Last |
DE10211609.1 | 2002-03-12 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/937,395 Continuation US7046088B2 (en) | 2002-03-12 | 2004-09-10 | Power amplifier |
Publications (3)
Publication Number | Publication Date |
---|---|
WO2003077414A2 WO2003077414A2 (de) | 2003-09-18 |
WO2003077414A3 WO2003077414A3 (de) | 2004-04-08 |
WO2003077414A8 true WO2003077414A8 (de) | 2004-04-29 |
Family
ID=27797815
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2003/002533 WO2003077414A2 (de) | 2002-03-12 | 2003-03-12 | Leistungsverstärker |
Country Status (3)
Country | Link |
---|---|
US (1) | US7046088B2 (de) |
DE (1) | DE10211609B4 (de) |
WO (1) | WO2003077414A2 (de) |
Families Citing this family (45)
Publication number | Priority date | Publication date | Assignee | Title |
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GB0404121D0 (en) * | 2004-02-25 | 2004-03-31 | Univ Belfast | Class E power amplifier circuit and associated transmitter circuits |
JP2008537467A (ja) * | 2005-04-20 | 2008-09-11 | エヌエックスピー ビー ヴィ | 並列配置された線形増幅器およびdc−dcコンバータ |
GB2426134B (en) * | 2005-05-12 | 2009-06-10 | Univ Bristol | Amplifiers |
DE102005050622A1 (de) | 2005-10-21 | 2007-05-03 | Infineon Technologies Ag | Sendeendstufe mit einstellbarer Ausgangsleistung und Verfahren zum Verstärken eines Signals in einer Sendeendstufe |
US7777567B2 (en) * | 2007-01-25 | 2010-08-17 | Mks Instruments, Inc. | RF power amplifier stability network |
DE102007026784A1 (de) * | 2007-06-09 | 2008-12-24 | Isle Gmbh | Verfahren zur Bestimmung von Kapazitäts-Spannungskennlinien elektronischer Schaltelemente |
DE112007003667A5 (de) * | 2007-07-23 | 2010-07-01 | Hüttinger Elektronik GmbH & Co. KG | Plasmaversorgungseinrichtung |
FR2919762B1 (fr) * | 2007-08-02 | 2009-10-02 | Thales Sa | Coupleur de puissance pour generateur haute frequence industrielle |
JP2009094805A (ja) * | 2007-10-09 | 2009-04-30 | Sumitomo Electric Ind Ltd | 増幅器 |
US20090121555A1 (en) * | 2007-11-08 | 2009-05-14 | Augustyn Michael T | Vehicle audio system power supply |
US8994270B2 (en) | 2008-05-30 | 2015-03-31 | Colorado State University Research Foundation | System and methods for plasma application |
US8575843B2 (en) | 2008-05-30 | 2013-11-05 | Colorado State University Research Foundation | System, method and apparatus for generating plasma |
US9288886B2 (en) | 2008-05-30 | 2016-03-15 | Colorado State University Research Foundation | Plasma-based chemical source device and method of use thereof |
US7948312B2 (en) * | 2009-05-13 | 2011-05-24 | Qualcomm, Incorporated | Multi-bit class-D power amplifier system |
KR20120082450A (ko) | 2009-10-12 | 2012-07-23 | 사이클로스 세미컨덕터, 인크. | 종래의 모드에서 공진 클록 네트워크를 동작시키기 위한 아키텍처 |
US8222822B2 (en) | 2009-10-27 | 2012-07-17 | Tyco Healthcare Group Lp | Inductively-coupled plasma device |
EP2552340A4 (de) | 2010-03-31 | 2015-10-14 | Univ Colorado State Res Found | Plasmavorrichtung mit flüssig-gas-schnittstelle |
CA2794895A1 (en) | 2010-03-31 | 2011-10-06 | Colorado State University Research Foundation | Liquid-gas interface plasma device |
JPWO2011148711A1 (ja) * | 2010-05-27 | 2013-07-25 | 京セラ株式会社 | 増幅回路ならびにそれを用いた送信装置および通信装置 |
CN102170277A (zh) * | 2011-01-20 | 2011-08-31 | 中国科学院半导体研究所 | 基于移相相与获取皮秒精度窄脉宽ttl信号的方法 |
US9532826B2 (en) | 2013-03-06 | 2017-01-03 | Covidien Lp | System and method for sinus surgery |
US9555145B2 (en) | 2013-03-13 | 2017-01-31 | Covidien Lp | System and method for biofilm remediation |
WO2016147272A1 (ja) * | 2015-03-13 | 2016-09-22 | 日本電気株式会社 | 生体検知装置、生体検知方法、および、記録媒体 |
DE102015212232B4 (de) | 2015-06-30 | 2020-03-05 | TRUMPF Hüttinger GmbH + Co. KG | Leistungscombiner zur Kopplung von Hochfrequenzsignalen und Leistungscombineranordnung mit einem solchen Leistungscombiner |
US11038477B2 (en) | 2017-06-30 | 2021-06-15 | Airily Technologies, LLC | High gain resonant amplifier for resistive output impedance |
US10555412B2 (en) | 2018-05-10 | 2020-02-04 | Applied Materials, Inc. | Method of controlling ion energy distribution using a pulse generator with a current-return output stage |
US10938358B2 (en) * | 2018-10-31 | 2021-03-02 | Kabushiki Kaisha Toshiba | Digital power amplifier |
US11476145B2 (en) | 2018-11-20 | 2022-10-18 | Applied Materials, Inc. | Automatic ESC bias compensation when using pulsed DC bias |
CN113169026B (zh) | 2019-01-22 | 2024-04-26 | 应用材料公司 | 用于控制脉冲电压波形的反馈回路 |
US11508554B2 (en) | 2019-01-24 | 2022-11-22 | Applied Materials, Inc. | High voltage filter assembly |
US11848176B2 (en) | 2020-07-31 | 2023-12-19 | Applied Materials, Inc. | Plasma processing using pulsed-voltage and radio-frequency power |
US11901157B2 (en) | 2020-11-16 | 2024-02-13 | Applied Materials, Inc. | Apparatus and methods for controlling ion energy distribution |
US11798790B2 (en) | 2020-11-16 | 2023-10-24 | Applied Materials, Inc. | Apparatus and methods for controlling ion energy distribution |
US11495470B1 (en) | 2021-04-16 | 2022-11-08 | Applied Materials, Inc. | Method of enhancing etching selectivity using a pulsed plasma |
US11791138B2 (en) | 2021-05-12 | 2023-10-17 | Applied Materials, Inc. | Automatic electrostatic chuck bias compensation during plasma processing |
US11948780B2 (en) | 2021-05-12 | 2024-04-02 | Applied Materials, Inc. | Automatic electrostatic chuck bias compensation during plasma processing |
US11967483B2 (en) | 2021-06-02 | 2024-04-23 | Applied Materials, Inc. | Plasma excitation with ion energy control |
US11984306B2 (en) | 2021-06-09 | 2024-05-14 | Applied Materials, Inc. | Plasma chamber and chamber component cleaning methods |
US11810760B2 (en) | 2021-06-16 | 2023-11-07 | Applied Materials, Inc. | Apparatus and method of ion current compensation |
US11569066B2 (en) | 2021-06-23 | 2023-01-31 | Applied Materials, Inc. | Pulsed voltage source for plasma processing applications |
US11776788B2 (en) | 2021-06-28 | 2023-10-03 | Applied Materials, Inc. | Pulsed voltage boost for substrate processing |
US11476090B1 (en) | 2021-08-24 | 2022-10-18 | Applied Materials, Inc. | Voltage pulse time-domain multiplexing |
CN113904421A (zh) * | 2021-10-28 | 2022-01-07 | 丰码科技(南京)有限公司 | 一种用于自动导向车的信号源 |
US11694876B2 (en) | 2021-12-08 | 2023-07-04 | Applied Materials, Inc. | Apparatus and method for delivering a plurality of waveform signals during plasma processing |
US11972924B2 (en) | 2022-06-08 | 2024-04-30 | Applied Materials, Inc. | Pulsed voltage source for plasma processing applications |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3919656A (en) * | 1973-04-23 | 1975-11-11 | Nathan O Sokal | High-efficiency tuned switching power amplifier |
US4717884A (en) * | 1986-04-14 | 1988-01-05 | Motorola, Inc. | High efficiency RF power amplifier |
DE3942560C2 (de) | 1989-12-22 | 1996-05-02 | Dressler Hochfrequenztechnik G | Hochfrequenz-Generator für einen Plasma erzeugenden Verbraucher |
US5187580A (en) * | 1991-02-04 | 1993-02-16 | Advanced Energy Industries, Inc. | High power switch-mode radio frequency amplifier method and apparatus |
DE4119738C2 (de) | 1991-06-15 | 1995-05-11 | Dressler Hochfrequenztechnik G | Hochfrequenz-Generator |
US6229392B1 (en) * | 1992-01-30 | 2001-05-08 | Advanced Energy Industries, Inc. | High power switch-mode radio frequency amplifier method and apparatus |
JP2710467B2 (ja) * | 1992-04-16 | 1998-02-10 | アドバンスド エナージィ インダストリーズ,インコーポレイテッド | プロセシング・プラズマのac特性を特徴付ける装置 |
JPH06334446A (ja) * | 1993-05-26 | 1994-12-02 | Shinsaku Mori | 補助スイッチによる高出力型e級増幅器 |
JP2831252B2 (ja) * | 1993-12-14 | 1998-12-02 | 松下電工株式会社 | E級プッシュプル電力増幅回路 |
US5535438A (en) * | 1994-05-10 | 1996-07-09 | Panasonic Technologies, Inc. | Phase linear class E amplifier for a satellite communication terminal which communicates with a low earth orbiting satellite |
GB2314474B (en) * | 1996-06-21 | 2001-03-07 | Univ Bristol | Low power audio device |
WO2002031966A2 (en) * | 2000-10-10 | 2002-04-18 | California Institute Of Technology | Class e/f switching power amplifiers |
-
2002
- 2002-03-12 DE DE10211609A patent/DE10211609B4/de not_active Expired - Fee Related
-
2003
- 2003-03-12 WO PCT/EP2003/002533 patent/WO2003077414A2/de not_active Application Discontinuation
-
2004
- 2004-09-10 US US10/937,395 patent/US7046088B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
WO2003077414A3 (de) | 2004-04-08 |
DE10211609B4 (de) | 2009-01-08 |
US20050088231A1 (en) | 2005-04-28 |
WO2003077414A2 (de) | 2003-09-18 |
DE10211609A1 (de) | 2003-10-09 |
US7046088B2 (en) | 2006-05-16 |
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